Multi-mode composite multi-degree-of-freedom ultrasonic driver, control method and robot

Abstract

The invention belongs to the technical field of ultrasonic drivers, and provides a multi-mode composite multi-degree-of-freedom ultrasonic driver, a control method and a robot. The multi-mode composite multi-degree-of-freedom ultrasonic driver comprises a vibrating body and an electric ceramic piece arranged in the middle of the vibrating body; the vibrating body comprises a square groove formed in the middle and spiral grooves formed in the two ends respectively. The electric ceramic piece comprises a longitudinal bending piezoelectric ceramic piece, a stretching piezoelectric ceramic piece and a transverse bending piezoelectric ceramic piece which are arranged on the square groove; driving feet are arranged at the two ends of the vibrating body respectively, and the spiral grooves are located between the driving feet and the electric ceramic pieces. Tensile vibration provided by the tensile piezoelectric ceramic piece can be converted into tensile-torsional composite vibration through the spiral groove structure, and the tensile vibration and the torsional vibration are combined and overlapped with longitudinal bending vibration and transverse bending vibration respectively, so that the driver moves in the longitudinal and transverse orthogonal directions; on the basis that the size design difficulty is not increased, the multi-degree-of-freedom movement requirement is met.

Description

Technical Field

[0001] The present invention belongs to the technical field of ultrasonic drivers, and in particular relates to a multi-modal composite multi-degree-of-freedom ultrasonic driver, a control method and a robot. Background Art

[0002] In order to meet the use requirements in different scenarios, various patch-type piezoelectric / ultrasonic drivers have been developed in traditional technologies, such as annular piezoelectric drivers and piezoelectric motors. By using a piezoelectric body with an annular plate structure polarized along the thickness direction, multiple electrode areas are set on the main plane of the first end and the main plane of the second end of the piezoelectric body, so that the piezoelectric driver can generate two orthogonal or antisymmetric first-order in-plane E01 vibration modes under the excitation of a preset driving voltage, thereby converting the tiny directional vibration of the piezoelectric body into the macroscopic linear motion of the mover through the friction coupling of the friction head; its annular symmetry and hollow structure improve the symmetry of the positive and negative linear motion of the piezoelectric motor, reduce the heat dissipation of the ceramic, and enhance the temperature stability. For another example, the inertial piezoelectric rotary driver with a biased piezoelectric vibrator has the advantages of novel structure, using a piezoelectric dual chip with a biased arrangement and no clamping difference clamping as the driving source, and cooperating with symmetrical electrical signals and symmetrical friction forces, omitting the complex circuit system, and also optimizing the uncontrollable clamping difference adjustment method of the asymmetric clamping difference structure. In addition, the secondary displacement amplification type piezoelectric actuator and the isosceles trapezoidal stick-slip piezoelectric linear actuator proposed in the conventional technology can also achieve actuation purposes such as the movement of the piezoelectric / ultrasonic actuator body or load.

[0003] However, piezoelectric actuators using stick-slip and inchworm drive mechanisms are limited by the small vibration displacement and poor mechanical output characteristics of piezoelectric ceramics themselves, and have limited thrust density and power density, resulting in low movement speed and poor load-bearing capacity. They cannot meet the requirements for high speed and high load-bearing characteristics in practical applications, and are not conducive to the wide application of actuators in multiple scenarios. Traditional piezoelectric / ultrasonic actuators using simple geometries (rectangles, cylinders, etc.) can only achieve single-degree-of-freedom motion through a combination of two vibrations, which cannot meet the requirements of high flexibility and high controllability; and multi-degree-of-freedom motion often requires the same-frequency excitation of multiple vibrations, which greatly increases the difficulty of actuator size design and limits the flexibility and practicality of the actuator. Summary of the invention

[0004] In order to solve the above problems, the present invention proposes a multi-modal composite multi-degree-of-freedom ultrasonic driver, a control method and a robot. The tensile vibration provided by the stretched piezoelectric ceramic sheet can be converted into a tensile-torsional composite vibration through a spiral groove structure, and the tensile and torsional vibrations are respectively combined and superimposed with the longitudinal and transverse bending vibrations, thereby realizing the movement of the driver in orthogonal directions of the longitudinal and transverse directions; without increasing the difficulty of dimensional design, the requirements of multi-degree-of-freedom movement are met.

[0005] In order to achieve the above objectives, in a first aspect, the present invention provides a multi-modal composite multi-degree-of-freedom ultrasonic driver, which adopts the following technical solution:

[0006] A multi-modal composite multi-degree-of-freedom ultrasonic driver comprises a vibrating body and an electric ceramic sheet arranged in the middle of the vibrating body;

[0007] The vibrating body includes a square groove arranged in the middle position and spiral grooves arranged at both ends respectively; the electric ceramic sheet includes a longitudinal bending piezoelectric ceramic sheet, a tensile piezoelectric ceramic sheet and a transverse bending piezoelectric ceramic sheet arranged on the square groove; driving feet are also arranged at both ends of the vibrating body respectively, and the spiral groove is located between the driving foot and the electric ceramic sheet.

[0008] Furthermore, a first mounting position, a second mounting position, a third mounting position and a fourth mounting position are arranged in the middle position of the vibration body; the first mounting position and the second mounting position are adjacent to each other, and the third mounting position and the fourth mounting position are adjacent to the first mounting position and the second mounting position respectively; the first mounting position and the second mounting position are arranged with the tensile piezoelectric ceramic sheet, and the third mounting position and the fourth mounting position are arranged with the longitudinal bending piezoelectric ceramic sheet and the transverse bending piezoelectric ceramic sheet.

[0009] Furthermore, a tensile piezoelectric ceramic sheet is respectively disposed on the four surfaces of the first mounting position and the four surfaces of the second mounting position.

[0010] Furthermore, two parallel surfaces of the third mounting position are respectively provided with a longitudinally curved piezoelectric ceramic sheet, and another two parallel surfaces are respectively provided with a transversely curved piezoelectric ceramic sheet.

[0011] Furthermore, two parallel surfaces of the fourth mounting position are respectively provided with a longitudinally curved piezoelectric ceramic sheet, and the other two parallel surfaces are respectively provided with a transversely curved piezoelectric ceramic sheet.

[0012] Furthermore, the driving foot is configured as an inclined structure.

[0013] In order to achieve the above-mentioned object, in a second aspect, the present invention further provides a multi-modal composite multi-degree-of-freedom ultrasonic driver control method, which adopts the following technical solution:

[0014] A method for controlling a multi-modal composite multi-degree-of-freedom ultrasonic driver uses the multi-modal composite multi-degree-of-freedom ultrasonic driver as described in the first aspect, including: when the spiral groove is working on the stretched piezoelectric ceramic sheet, the stretched vibration is converted into a stretched-torsional composite vibration.

[0015] Furthermore, when an excitation voltage of the same amplitude and phase is applied to the tensile piezoelectric ceramic sheet, a tensile-torsional composite vibration is excited on the vibrating body, the tensile vibration causes the driving foot to vibrate along the length direction, and the torsional motion causes the driving foot to swing along a preset direction; when an excitation voltage of the same amplitude and phase is applied to the longitudinal bending piezoelectric ceramic sheet, a longitudinal bending vibration is excited on the vibrating body, causing the driving foot to swing up and down, and the driver is excited to move longitudinally with a 90° phase difference from the tensile vibration; when an excitation voltage of the same amplitude and phase is applied to the transverse bending piezoelectric ceramic sheet, a transverse bending vibration is excited on the vibrating body, causing the driving foot to swing laterally, and the driver is excited to move laterally with a 90° phase difference from the reverse vibration.

[0016] In order to achieve the above-mentioned purpose, in a third aspect, the present invention further provides a robot, which adopts the following technical solution:

[0017] A robot comprises a robot body, and a first driver and a second driver arranged on both sides of the robot body; the first driver and the second driver both use the multi-modal composite multi-degree-of-freedom ultrasonic driver as described in the first aspect.

[0018] Furthermore, a robot driving circuit is arranged in the robot body.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] In the present invention, a bending piezoelectric ceramic sheet, a tensile piezoelectric ceramic sheet and a transverse bending piezoelectric ceramic sheet are arranged in the middle position of the vibrator through a square groove, and a spiral groove is arranged between the driving foot and the piezoelectric ceramic sheet; the tensile vibration provided by the tensile piezoelectric ceramic sheet can be converted into a tensile-torsional composite vibration through the spiral groove structure, and the tensile and torsional vibrations are combined and superimposed with the longitudinal and transverse bending vibrations respectively, thereby realizing the movement of the driver in the longitudinal and transverse orthogonal directions; without increasing the difficulty of dimensional design, the multi-degree-of-freedom movement requirements are met.

[0021] The present invention aims at the problems that the conventional ultrasonic / piezoelectric driver driven by the stick-slip / inchworm principle has limited speed and load performance, and the conventional resonant ultrasonic / piezoelectric driver lacks an effective solution for multi-modal degeneration, and can only realize single-degree-of-freedom motion, resulting in poor driver functionality and insufficient application scenarios. The present invention converts the tensile vibration into a tensile-torsion composite vibration through a spiral groove structure, and the two vibrations are respectively combined with the longitudinal and transverse bending vibrations, so that the driver can move in both directions along the length and width. In addition, its longitudinal / transverse symmetrical structure makes the longitudinal / transverse bending basically consistent, and multi-modal degeneration can be achieved by simply adjusting the driving frequency of the longitudinal / torsion composite vibration; the technical problem that the conventional piezoelectric / ultrasonic driver is difficult to achieve high speed, high load, and multi-degree-of-freedom motion at the same time is solved, and the speed / load performance of the multi-degree-of-freedom driver is improved; the proposed longitudinal-torsion-transverse bending / longitudinal bending multi-modal composite ultrasonic driver system is simple, has strong controllability, is very easy to realize system combination, and realizes its multi-scenario integrated application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings in the specification that constitute a part of this embodiment are used to provide a further understanding of this embodiment. The schematic embodiments of this embodiment and their descriptions are used to explain this embodiment and do not constitute improper limitations on this embodiment.

[0023] Figure 1 This is a schematic diagram of the structure of a driver according to Embodiment 1 of the present invention;

[0024] Figure 2 is the lateral bending vibration mode during lateral movement of Example 1 of the present invention;

[0025] Figure 3 It is the tensile-torsion composite vibration mode during lateral motion of Example 1 of the present invention;

[0026] Figure 4 is the longitudinal bending vibration mode during longitudinal motion of Example 1 of the present invention;

[0027] Figure 5 It is the tensile-torsion composite vibration mode during longitudinal motion of Example 1 of the present invention;

[0028] Figure 6 This is a schematic diagram of the robot structure of Example 2 of the present invention;

[0029] Figure 7 A driving / control system of the acoustic robot according to embodiment 2 of the present invention;

[0030] Figure 8 This is a motion / displacement closed-loop control flow chart of a robot according to Embodiment 2 of the present invention;

[0031] Among them, 1. vibrating body; 11. spiral groove; 12. driving foot; 13. square groove; 1301. first mounting position; 1302. second mounting position; 1303. third mounting position; 1304. fourth mounting position; 2. longitudinally bent piezoelectric ceramic sheet; 3. stretched piezoelectric ceramic sheet; 4. transversely bent piezoelectric ceramic sheet; 5. first driver; 6. second driver; 7. robot body; 8. robot driving circuit. DETAILED DESCRIPTION

[0032] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0033] It should be noted that the following detailed descriptions are exemplary and are intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present application belongs.

[0034] Embodiment 1:

[0035] Piezoelectric / ultrasonic actuators are actuators that convert electrical energy into mechanical energy based on the inverse piezoelectric effect and drive through friction. Compared with traditional motors and electromagnetic actuators, piezoelectric / ultrasonic actuators have many advantages such as compact structure, fast response, self-locking in the power-off stage, and no electromagnetic radiation. Generally speaking, piezoelectric / ultrasonic actuators can be excited by transducers or piezoelectric ceramic patches to produce corresponding movements. When using transducer excitation, it is difficult to achieve large adjustments in geometric parameters due to the relationship between vibration frequency and wavelength. The length of the actuator in the direction of transducer vibration propagation (wavelength direction) is limited, the space for optimizing mass / size is small, and the system integration is difficult. When using piezoelectric ceramic patches for excitation, piezoelectric ceramics are pasted on the surface of the vibrating body, the system is light in mass, small in size, and easy to integrate. In addition, various flexible movements of the actuator can be achieved through structural design and modal degeneracy. Therefore, in intelligent industrial scenarios with high precision, high integration, and high power density, such as optical focusing equipment, small robots, aerospace, and micro-electromechanical systems, patch-type piezoelectric / ultrasonic actuators have more significant technical advantages and broad application prospects.

[0036] As described in the background technology, the piezoelectric / ultrasonic actuators using the stick-slip / inchworm principle have limited power density, poor speed performance and load performance; the traditional longitudinal / torsion / bending composite piezoelectric / ultrasonic actuators have problems such as difficulty in merging multi-modal excitation frequencies, difficult structural design, and difficult system optimization, which limits the flexibility and practicality of the actuators. Specifically, piezoelectric / ultrasonic actuators using simple geometric shapes (rectangles, cylinders, etc.) can only achieve single-degree-of-freedom motion through a combination of two vibrations, which cannot meet the requirements of high flexibility and high controllability; and multi-degree-of-freedom motion often requires the same-frequency excitation of multiple vibrations, which greatly increases the difficulty of the size design of the actuator.

[0037] In order to solve at least one of the above problems, Figure 1 As shown, this embodiment provides a multi-modal composite multi-degree-of-freedom ultrasonic driver, including a vibrating body 1, and a longitudinal bending piezoelectric ceramic sheet 2, a tensile piezoelectric ceramic sheet 3 and a transverse bending piezoelectric ceramic sheet 4 arranged on the vibrating body 1; the vibrating body 1 includes a spiral groove 11, a driving foot 12 and a square groove 13; the square groove 13 includes a first mounting position 1301, a second mounting position 1302, a third mounting position 1303 and a fourth mounting position 1304.

[0038] like Figure 1 As shown, when the spiral groove 11 is working on the stretched piezoelectric ceramic sheet 3 , the stretched vibration excited by the spiral groove 11 can be converted into a stretched-torsional composite vibration, and vibrations in both the stretched and torsional directions can be outputted at the driving foot 12 at the same time.

[0039] The first mounting position 1301 is adjacent to the second mounting position 1302, and the third mounting position 1303 and the fourth mounting position 1304 are adjacent to the first mounting position 1301 and the second mounting position 1302 respectively; the tensile piezoelectric ceramic sheet 3 is arranged at the first mounting position 1301 and the second mounting position 1302, and the longitudinal bending piezoelectric ceramic sheet 2 and the transverse bending piezoelectric ceramic sheet 4 are arranged at the third mounting position 1303 and the fourth mounting position 1304. Optionally, a tensile piezoelectric ceramic sheet 3 is arranged on each of the four surfaces of the first mounting position 1301 and the four surfaces of the second mounting position 1302. A longitudinal bending piezoelectric ceramic sheet 2 is arranged on each of the two parallel surfaces of the third mounting position 1303, and a transverse bending piezoelectric ceramic sheet 4 is arranged on each of the other two parallel surfaces; a longitudinal bending piezoelectric ceramic sheet 2 is arranged on each of the two parallel surfaces of the fourth mounting position 1304, and a transverse bending piezoelectric ceramic sheet 4 is arranged on each of the other two parallel surfaces.

[0040] Specifically, two groups of 8 stretched piezoelectric ceramic sheets 3 of the same specification are pasted in the middle part of the square groove 13 through a coupling agent, and 4 longitudinal bending piezoelectric ceramic sheets 2 and 4 transverse bending piezoelectric ceramic sheets 4 of the same specification are also distributed on the left and right sides of the square groove 13. The longitudinal bending piezoelectric ceramic sheets 2, the stretched piezoelectric ceramic sheets 3 and the transverse bending piezoelectric ceramic sheets 4 are all polarized along the thickness direction. The arrangement of the piezoelectric ceramic sheets can effectively excite the longitudinal / transverse bending and tensile-torsion composite vibrations of the vibrating body 1. In other embodiments, the size and shape of the main part of the transducer, the number of piezoelectric ceramic groups, etc. can be changed.

[0041] The driving foot 12 is an inclined structure, and the design of the oblique 45° arrangement is conducive to converting the output force of the torsional vibration excited by the spiral groove into an oblique 45° downward to achieve the driving effect. When an excitation voltage of the same amplitude and phase is applied to the tensile piezoelectric ceramic sheet 3, the tensile-torsion composite vibration is excited on the vibrating body 1, the tensile vibration causes the driving foot 12 to vibrate along the length direction, and the torsional movement causes the driving foot 12 to swing along the 45° direction. When an excitation voltage of the same amplitude and phase is applied to the longitudinal bending piezoelectric ceramic sheet 2, a longitudinal bending vibration can be excited on the vibrating body 1, causing the driving foot 12 to swing up and down, and the excitation with a 90° phase difference from the tensile vibration can cause the driver to move longitudinally. When an excitation voltage of the same amplitude and phase is applied to the transverse bending piezoelectric ceramic sheet 3, a transverse bending vibration can be excited on the vibrating body 1, and the driving foot 12 swings along the transverse direction, and the excitation with a 90° phase difference from the reverse vibration can cause the driver to move laterally. Among them, the movement speed of the driver can be adjusted by adjusting the amplitude of the excitation voltage.

[0042] like Figure 2 As shown in the figure, it is the lateral bending vibration mode during lateral motion, such as Figure 3 As shown in the figure, it is the tensile-torsion composite vibration mode during lateral motion, such as Figure 4 As shown in the figure, it is the longitudinal bending vibration mode during longitudinal motion, such as Figure 5 The figure shows the tensile-torsion composite vibration mode during longitudinal motion. The four modes are combined in pairs, and when the system works at the corresponding resonant frequency, they are independently excited by the piezoelectric ceramic sheets at the corresponding positions. The spiral groove structure realizes the simultaneous excitation of tensile / torsion vibrations, and its symmetrical structure in both the transverse and longitudinal directions makes its longitudinal / transverse bending resonance frequencies basically consistent. The four vibration modes can be degenerated by adjusting some dimensions.

[0043] like Figure 6 As shown, this example is an application scenario of the present invention on a robot, which is a robot spiral groove configuration ultrasonic robot array; the spiral groove configuration ultrasonic robot can be used in pairs through a single unit combination. As one form, the number of drivers is 2, and the speed control of the driver unit can be achieved by controlling the amplitude and phase of the excitation voltage of the first driver 5 and the second driver 6. Based on the differential principle, the overall forward and backward movement, rotation, and rotation around the center of the driver combination can be achieved. The robot's driving circuit 8 is integrated in the robot body 7.

[0044] like Figure 7As shown, the drive / control system of the spiral groove configuration ultrasonic robot array in this example. In terms of signal generation, the remote control handle sends instructions to the control circuit through the wireless receiving module. Then, the microcontroller synthesizes the signal by determining the signal parameters. The direction of movement mainly depends on the frequency and phase, and the speed of movement is mainly determined by the voltage, which is calculated by the speed target value in each direction. In addition, according to the relationship between the robot posture measured by the gyroscope and the ideal posture, the voltage difference is calculated by the PID controller, thereby changing the signal parameters to ensure that the robot moves along the ideal posture. In the amplification circuit, the 12V voltage is boosted to ±75V through two boost modules, and the AC signal is amplified by multiple amplifiers. Then the signal is passed to the piezoelectric ceramic group to realize the drive and control of the robot.

[0045] In some other implementations, the driving signals of the longitudinal bending piezoelectric ceramic sheet 2, the tensile piezoelectric ceramic sheet 3 and the transverse bending piezoelectric ceramic sheet 4 are respectively V 2 sin(2πf) and Among them, f = 37.95kHz is the optimal driving frequency.

[0046] When V 1 =V 2 =V 0 ≠0, V 3 =0 and When , the longitudinal motion mode is excited and the transducer moves in the positive direction. The transducer moves in the opposite direction.

[0047] When V 2 =V 3 =V 0 ≠0, V 1 =0 and When , the lateral motion mode is excited and the transducer moves in the positive direction. The transducer moves in the opposite direction.

[0048] According to the experimental data fitting, the calculation formula of voltage and movement speed under longitudinal motion is v = 2.0548V 0 -27.479; the calculation formula of voltage and movement speed under lateral movement is v = 1.0106V 0 -19.667.

[0049] like Figure 8 The figure shows the motion / displacement closed-loop control flow chart of the spiral groove ultrasonic robot in this example. The ideal acceleration and angle of the robot are received by the wireless module, and the robot uses the inertial navigation module to collect and feedback the posture angle and motion acceleration, thereby constructing a cascade PID control algorithm for acceleration and angle, and realizing precise control of motion and posture.

[0050] In some other implementations, the piezoelectric ceramic driving voltages of the first driver 5 and the second driver 6 are respectively V 51、 V 52、 V 53 and V 61、 V 62、 V 63 In the longitudinal motion mode, the inertial navigation module collects the longitudinal motion acceleration and longitudinal offset angle, and adjusts V 51、 V 52 and V 61、 V 62 Achieve closed-loop control; in lateral motion mode, the inertial navigation module collects lateral motion acceleration and lateral offset angle, and adjusts V 52、 V 53 and V 62、 V 63 Closed-loop control is achieved. The voltage regulation here is based on the calculation formula of voltage-movement speed.

[0051] In summary, this embodiment converts the traditional tensile vibration into tensile-torsion composite vibration through a spiral groove structure, in which the tensile and torsional vibrations are combined and superimposed with the longitudinal and transverse bending vibrations, respectively, to realize the orthogonal movement of the driver along the length direction (longitudinal) and the width direction (transverse). Based on the 67.5×10×10mm3 driver prototype, when the voltage is 250V and the operating frequency is 37.95kHz, the driver can achieve a maximum lateral no-load speed of 483mm / s and a longitudinal no-load speed of 233m / s, and its lateral and longitudinal loads reach 1218.5g and 711.5g respectively, which can exceed the movement / load performance of most traditional patch-type resonant drivers. The ultrasonic robot array composed of two spiral groove ultrasonic drivers can realize the movement of three degrees of freedom of longitudinal / lateral movement and in-plane rotation. In addition, this embodiment also proposes a drive / control scheme for a spiral groove-configured ultrasonic robot to achieve precise control of the robot's movement / posture.

[0052] Embodiment 2:

[0053] This embodiment provides a multi-modal composite multi-degree-of-freedom ultrasonic driver control method, using the multi-modal composite multi-degree-of-freedom ultrasonic driver as described in Example 1, including: when the spiral groove 11 is working on the stretched piezoelectric ceramic sheet 3, the stretched vibration is converted into a stretched-torsional composite vibration.

[0054] When an excitation voltage of the same amplitude and phase is applied to the tensile piezoelectric ceramic sheet 3, a tensile-torsion composite vibration is excited on the vibrating body 1, and the tensile vibration causes the driving foot 12 to vibrate along the length direction, and the torsional motion causes the driving foot 12 to swing along the 45° direction. When an excitation voltage of the same amplitude and phase is applied to the longitudinal bending piezoelectric ceramic sheet 2, a longitudinal bending vibration can be excited on the vibrating body 1, causing the driving foot 12 to swing up and down, and the excitation with a 90° phase difference from the tensile vibration can cause the driver to move longitudinally. When an excitation voltage of the same amplitude and phase is applied to the transverse bending piezoelectric ceramic sheet 3, a transverse bending vibration can be excited on the vibrating body 1, causing the driving foot 12 to swing in the transverse direction, and the excitation with a 90° phase difference from the reverse vibration can cause the driver to move laterally. Among them, the movement speed of the driver can be adjusted by adjusting the amplitude of the excitation voltage.

[0055] Embodiment 3:

[0056] This embodiment provides a robot, including a robot body, and a first driver and a second driver arranged on both sides of the robot body; the first driver and the second driver both use the multi-modal composite multi-degree-of-freedom ultrasonic driver as described in Example 1.

[0057] A robot driving circuit 8 is disposed in the robot body 7 .

[0058] The above description is only a preferred embodiment of the present embodiment and is not intended to limit the present embodiment. For those skilled in the art, the present embodiment may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present embodiment shall be included in the protection scope of the present embodiment.

Claims

1. A multi-mode composite multi-degree-of-freedom ultrasonic driver, characterized in that: It includes a vibrating body and an electric ceramic sheet arranged in the middle of the vibrating body; The vibrating body includes a square groove arranged in the middle position and spiral grooves arranged at both ends respectively; the electric ceramic sheet includes a longitudinal bending piezoelectric ceramic sheet, a tensile piezoelectric ceramic sheet and a transverse bending piezoelectric ceramic sheet arranged on the square groove; driving feet are also arranged at both ends of the vibrating body respectively, and the spiral groove is located between the driving foot and the electric ceramic sheet.

2. The multi-modal composite multi-degree-of-freedom ultrasonic driver according to claim 1, characterized in that: A first mounting position, a second mounting position, a third mounting position and a fourth mounting position are arranged in the middle position of the vibrating body; the first mounting position and the second mounting position are adjacent to each other, and the third mounting position and the fourth mounting position are adjacent to the first mounting position and the second mounting position respectively; the first mounting position and the second mounting position are arranged with the tensile piezoelectric ceramic sheet, and the third mounting position and the fourth mounting position are arranged with the longitudinal bending piezoelectric ceramic sheet and the transverse bending piezoelectric ceramic sheet.

3. The multi-modal composite multi-degree-of-freedom ultrasonic driver according to claim 2, characterized in that: A tensile piezoelectric ceramic sheet is respectively disposed on the four surfaces of the first installation position and the four surfaces of the second installation position.

4. The multi-modal composite multi-degree-of-freedom ultrasonic driver according to claim 2, characterized in that: Two parallel surfaces of the third mounting position are respectively provided with a longitudinally curved piezoelectric ceramic sheet, and another two parallel surfaces are respectively provided with a transversely curved piezoelectric ceramic sheet.

5. The multi-modal composite multi-degree-of-freedom ultrasonic driver according to claim 2, characterized in that: Two parallel surfaces of the fourth mounting position are respectively provided with a longitudinally curved piezoelectric ceramic sheet, and the other two parallel surfaces are respectively provided with a transversely curved piezoelectric ceramic sheet.

6. The multi-modal composite multi-degree-of-freedom ultrasonic driver according to claim 1, characterized in that: The driving foot is configured as an inclined structure.

7. A multi-mode composite multi-degree-of-freedom ultrasonic driver control method, characterized in that: A multi-modal composite multi-degree-of-freedom ultrasonic driver as described in any one of claims 1 to 6 is used, comprising: when the spiral groove is working on the stretched piezoelectric ceramic sheet, the stretched vibration is converted into a stretched-torsional composite vibration.

8. The multi-mode composite multi-degree-of-freedom ultrasonic driver control method according to claim 7, characterized in that: When an excitation voltage of the same amplitude and phase is applied to the tensile piezoelectric ceramic sheet, a tensile-torsion composite vibration is excited on the vibrating body, the tensile vibration causes the driving foot to vibrate along the length direction, and the torsional motion causes the driving foot to swing along a preset direction; when an excitation voltage of the same amplitude and phase is applied to the longitudinal bending piezoelectric ceramic sheet, a longitudinal bending vibration is excited on the vibrating body, causing the driving foot to swing up and down, and the driver is excited to move longitudinally with a 90° phase difference from the tensile vibration; when an excitation voltage of the same amplitude and phase is applied to the transverse bending piezoelectric ceramic sheet, a transverse bending vibration is excited on the vibrating body, causing the driving foot to swing laterally, and the driver is excited to move laterally with a 90° phase difference from the reverse vibration.

9. A robot, characterized in that: It comprises a robot body, and a first driver and a second driver arranged on both sides of the robot body; the first driver and the second driver both use the multi-modal composite multi-degree-of-freedom ultrasonic driver as described in any one of claims 1-6.

10. A robot as claimed in claim 9, characterized in that: A robot driving circuit is arranged in the robot body.

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