Automatic degumming line for crystal support

Abstract

The invention belongs to the technical field of wafer support degumming in the photovoltaic industry, and discloses an automatic wafer support degumming line. Comprising a conveying roller way mechanism, a heating mechanism, an adhesive plate stacking mechanism, a flushing box and an air drying mechanism which are sequentially arranged, a flushing feeding and discharging mechanism is arranged on one side of the flushing box, an adhesive removing mechanism is arranged at the top of the flushing box, the conveying roller way mechanism penetrates through the heating mechanism and the adhesive plate stacking mechanism, and the flushing box is arranged between the flushing feeding and discharging mechanism and the air drying mechanism; the overall proportion is small, the production cost is reduced, operators are reduced, the working time is greatly shortened, the overall working efficiency is improved, and operation is convenient and fast.

Description

Technical Field

[0001] The present invention belongs to the technical field of crystal tray degumming in the photovoltaic industry, and the present invention relates to an automatic crystal tray degumming line. Background Art

[0002] Traditionally, the degumming of wafer trays is done manually by boiling and removing the glue, which results in a dirty and messy site, a waste of manpower, and high labor intensity. It is easy to cause incomplete degumming and uneven cleaning of the wafer tray surface, or secondary degumming, etc. The existing wafer tray degumming equipment has a high overall cost, occupies a large workshop area, requires high precision, and is cumbersome to operate manually, which increases the overall working time and complexity, takes up a long time, prolongs the entire pre-process work cycle, has low production efficiency, and has a relatively high overall labor cost. Summary of the invention

[0003] In order to overcome the shortcomings of the prior art, the present invention provides an automatic crystal tray glue removal line, which has a small overall occupancy, reduces production costs, reduces the number of operators, greatly shortens working time, improves overall work efficiency, and is easy to operate.

[0004] The above object of the present invention is achieved through the following technical solutions:

[0005] The automatic degumming line for crystal trays includes a conveying roller mechanism, a heating mechanism, a stacking mechanism for adhesive sheets, a washing box, and an air drying mechanism, one side of the washing box is provided with a washing loading and unloading mechanism, and the top of the washing box is provided with a degumming mechanism. The conveying roller mechanism runs through the heating mechanism, the stacking mechanism for adhesive sheets, the washing box and the washing loading and unloading mechanism, and the air drying mechanism.

[0006] The conveying roller mechanism includes a material conveying roller, a heating zone conveying roller, a material separation zone conveying roller, a flushing zone conveying roller, and an air-drying zone conveying roller, which are arranged in sequence; the material conveying roller, the heating zone conveying roller, the material separation zone conveying roller, the flushing zone conveying roller, and the air-drying zone conveying roller are all provided with material arrival sensors and switches for detecting the presence or absence of materials, and are all provided with stop components, the stop components including a stop cylinder, the stop cylinder is arranged below the conveying roller, the front end of the cylinder rod of the stop cylinder is provided with a stop limiter, and the stop limiter is arranged to be inserted into the roller gap of the conveying roller through the stop cylinder. The material conveying roller, the heating zone conveying roller, the material separation zone conveying roller, the flushing zone conveying roller, and the air-drying zone conveying roller are not limited in model, and the working functions can be realized.

[0007] The heating mechanism is used for heating materials, the adhesive sheet stacking mechanism is used for removing the adhesive sheets, the conveying roller mechanism is used for conveying and transferring materials, and the flushing loading and unloading mechanism is used for loading and unloading materials.

[0008] The heating mechanism includes a heating box, in which a high-frequency heating coil for heating materials is arranged, the high-frequency heating coil is arranged above the conveying roller mechanism, a smoke exhaust pipe is arranged above the high-frequency heating coil, a draft fan is arranged on the smoke exhaust pipe, the end of the smoke exhaust pipe is connected to the smoke exhaust port, the smoke exhaust port is arranged on the top of the heating box and connected to the external smoke exhaust pipeline; the high-frequency heating coil is externally connected to the high-frequency machine.

[0009] The high-frequency machine is an existing device, which includes a high-frequency main machine, a high-frequency auxiliary machine, and a high-frequency cooling machine. The high-frequency main machine is connected to the high-frequency auxiliary machine, and the high-frequency main machine and the high-frequency auxiliary machine are respectively connected to the high-frequency cooling machine.

[0010] Heating zone conveying roller channel openings are also arranged at the lower parts of both sides of the heating box body, and a detachable glue splicing box for glue splicing is also arranged at the bottom of the heating box body.

[0011] The viscose board stacking mechanism includes a material storage trolley and a viscose board removing assembly. The viscose board removing assembly is arranged above the conveying roller in the material separation area. The material storage trolley is arranged on one side of the conveying roller in the material separation area. The viscose board removing assembly includes a walking group and a gripper for driving a gripper to walk. The walking group is connected to the gripper and a buffer spring is arranged at the connection. The gripper includes a removing jaw. The removing jaw is clamped and released by a removing cylinder. A gripper positioning member for positioning the viscose board is arranged on the gripper.

[0012] The adhesive plate removing assembly comprises an adhesive plate removing frame, and the walking group is arranged on the adhesive plate removing frame.

[0013] The walking group includes an adhesive plate removing X-axis component and an adhesive plate removing Z-axis component; the adhesive plate removing X-axis component and the adhesive plate removing Z-axis component are connected through an X-axis slide plate.

[0014] The adhesive plate removal X-axis assembly comprises a servo motor, the servo motor is connected to a servo module, and a servo module slide of the servo module is connected to an X-axis slide.

[0015] The adhesive plate removal Z-axis assembly includes an adhesive plate removal Z-axis cylinder, the front end of the cylinder rod of the adhesive plate removal Z-axis cylinder is connected to the adhesive plate removal Z-axis connecting piece, the adhesive plate removal Z-axis connecting piece is connected to the gripper vertical rod, the bottom of the gripper vertical rod is connected to the gripper, and the gripper vertical rod is connected to the X-axis slide plate through a linear guide rail and a slider.

[0016] The Z-axis cylinder for removing the adhesive plate is arranged on the X-axis slide plate, and the Z-axis cylinder for removing the adhesive plate is equipped with a pressure reducing valve, which works when the pressure reducing valve is lowered.

[0017] The bottom of the gripper vertical rod is connected to the gripper connecting frame, and two grippers are arranged below the gripper connecting frame.

[0018] The gripper includes a gripper connecting plate and a clamping claw connecting plate arranged above and below, the gripper connecting plate and the clamping claw connecting plate are connected by a buffer spring, the gripper connecting plate is connected to the bottom of the gripper connecting frame, the clamping claw connecting plate is provided with a removal cylinder, the two ends of the removal cylinder are respectively connected to the clamping claw, a limit pressure piece is arranged on the outer side of the clamping claw, and the clamping claw connecting plate is provided with a plurality of gripper positioning pieces. Preferably, three gripper positioning pieces are arranged.

[0019] A switch for detecting the presence of adhesive sheets is provided on the conveying roller in the material separation area. A glue splicing tray for gluing is provided at the lower part of the conveying roller in the material separation area. The glue splicing tray is provided at an angle, and its end is connected to a glue splicing box, which is detachably provided at the lower part of the conveying roller in the material separation area.

[0020] The storage trolley is used for storing and transporting adhesive sheets. Universal wheels are arranged at the bottom of the storage trolley, a handle is arranged on the body of the storage trolley, and a shooting switch for detecting whether the storage trolley is full of materials is arranged on the top surface of the storage trolley.

[0021] The flushing box includes a flushing box body, an observation window for operators to observe is arranged on one side of the flushing box body, and a box door for opening and closing is arranged on the other side. A crystal tray placement position for placing the crystal tray is arranged inside the flushing box body, a pull-out glue connection drawer is arranged in the lower part of the flushing box body, a water connection box is arranged below the glue connection drawer, and the water connection box is arranged at the bottom of the flushing box body.

[0022] A drainage pipe is provided on the upper part of the water receiving tank to discharge relatively clean water for subsequent filtration and reuse.

[0023] A slag discharge port is also arranged on one side of the water receiving box, the bottom of the slag discharge port is connected to a slag discharge pipe, and a slag discharge valve is arranged on the slag discharge pipe.

[0024] The bottom surface of the glue connection drawer is a mesh structure, and the flushing water can fall into the water receiving box through the mesh. The glue connection drawer is tilted.

[0025] Sound insulation cotton is installed inside the flushing box.

[0026] The box door is opened and closed by an opening and closing cylinder, the front end of the cylinder rod of the opening and closing cylinder is connected to the side of the box door by a cylinder connector, and the opening and closing cylinder is fixed to the lower part of the outer wall of the flushing box body. Preferably, two opening and closing cylinders are arranged below the two sides of the box door.

[0027] A flushing inspection door is also provided on the top of the flushing box body, which is used for box body inspection.

[0028] The observation window is made of high-strength tempered glass to ensure personnel safety during the flushing process. The observation window is used to observe the flushing cleanliness in real time and quickly adjust the cleaning speed and position.

[0029] The flushing loading and unloading mechanism is arranged above the conveying roller in the flushing area, and the flushing loading and unloading mechanism includes a loading and unloading frame, and the loading and unloading frame is provided with an X-axis assembly and a Z-axis assembly for driving the grabbing assembly to move, and the Z-axis assembly includes a cylinder fixing plate, and two grabbing cylinders are arranged on the cylinder fixing plate to drive the grabbing gripper to move up and down, and the bottom of the grabbing cylinder is connected to the grabbing gripper, and the clamping claws of the grabbing gripper are clamped and grasped by the centering cylinder.

[0030] The loading and unloading rack is made of carbon steel.

[0031] The X-axis assembly includes an X-axis servo motor, the output end of the X-axis servo motor is connected to the gear, the gear and the rack are meshingly connected, the X-axis servo motor is arranged on a horizontal slide, the bottom of the horizontal slide is connected to the Z-axis assembly, the rack is arranged on the inner side of the upper part of the loading and unloading rack, and the horizontal slide is connected to the top surface of the loading and unloading rack through a linear guide rail and a slider.

[0032] The Z-axis assembly includes a Z-axis connecting rod, a cylinder fixing plate, and a grabbing cylinder; the top surface of the Z-axis connecting rod is connected to the horizontal slide plate, the bottom surface of the Z-axis connecting rod is connected to the cylinder fixing plate, and the grabbing cylinder is arranged on the cylinder fixing plate.

[0033] The front end of the cylinder rod of the grabbing cylinder is connected to the clamping claw fixing plate through a cylinder connecting piece, and the clamping claw fixing plate is provided with a cylinder limiting buffer for limiting the grabbing cylinder.

[0034] A grabbing gripper is arranged on the clamp fixing plate; the grabbing gripper comprises two clamps and a centering cylinder, and two ends of the centering cylinder are respectively connected with a clamp. A guide piece is also arranged at the bottom of the clamp.

[0035] A lapped frame is also arranged at one end of the loading and unloading frame, and the lapped frame is used for being fixed on the top surface of the flushing box to realize a fixed connection.

[0036] The glue removal mechanism includes a glue removal frame, a water spray assembly is arranged on the glue removal frame, and a walking and rotating group for driving the water spray assembly to walk and rotate is also arranged on the glue removal frame. The bottom of the walking and rotating group is connected to the water spray assembly. The water spray assembly includes a main nozzle and a branch nozzle. The bottom side of the main nozzle is connected to the branch nozzle. The bottom of the main nozzle is connected to a plurality of top surface nozzles, and the end of the branch nozzle is connected to the end surface nozzle. The plane where the top surface nozzle is located and the plane where the end surface nozzle is located are perpendicular to each other.

[0037] Preferably, three top surface nozzles are arranged, and the bottoms of the three top surface nozzles are located at the same height, wherein two top surface nozzles are arranged in parallel, another top surface nozzle is arranged in the middle area behind the two top surface nozzles, and the end surface nozzle is arranged behind the separately arranged top surface nozzle.

[0038] The water spray assembly is externally connected to a high-pressure water tank, and a main spray pipe of the water spray assembly is connected to the high-pressure water tank through a water inlet and a hose, and a solenoid valve is arranged on the hose.

[0039] The glue removal frame is made of carbon steel.

[0040] The walking and rotating group includes a glue removal X-axis assembly, a glue removal Y-axis assembly, and a glue removal R-axis assembly. The glue removal Y-axis assembly and the glue removal R-axis assembly are arranged on the glue removal X-axis sliding bracket of the glue removal X-axis assembly. The glue removal X-axis assembly includes a servo motor. The gear at the output end of the servo motor is meshed and connected with the rack. The rack is arranged on the glue removal frame. The servo motor is fixed on the glue removal X-axis sliding bracket. The glue removal X-axis sliding bracket is connected to the top surface of the glue removal frame through a linear guide rail and a slider.

[0041] The glue removal Y-axis assembly includes a servo motor and a glue removal Y-axis slide. The servo motor is arranged on the glue removal Y-axis slide. The gear at the output end of the servo motor is meshed and connected with the rack. The rack is arranged on the glue removal X-axis sliding bracket. The glue removal Y-axis slide is connected to the top surface of the X-axis sliding bracket through a linear guide rail and a slider.

[0042] The glue removing R-axis assembly comprises an R-axis rotating servo motor, and the output end of the R-axis rotating servo motor is connected and fixed to the main spray pipe in the water spray assembly through a shaft sleeve.

[0043] The R-axis rotation servo motor is arranged on the glue removal Y-axis slide.

[0044] The glue removal mechanism is arranged above the flushing box. The top surface of the flushing box body of the flushing box is provided with a groove for the water spray assembly to penetrate into the flushing box, and an accordion shield is arranged at the connection between the main spray pipe in the water spray assembly and the flushing box.

[0045] The air-drying mechanism includes an air-drying frame, which is arranged above the conveying roller in the air-drying area. A top air knife assembly for air-drying the top surface of the crystal tray is arranged on the upper part of the air-drying frame, and side air knife assemblies for air-drying the side surfaces of the crystal tray are arranged on the sides of the air-drying frame. A bottom air knife assembly for air-drying the bottom surface of the crystal tray is arranged below the air-drying frame, and a protective inspection door is arranged on the top surface of the air-drying frame.

[0046] An inspection window is provided on the protective inspection door.

[0047] The top surface air knife, the bottom surface air knife and the side surface air knife are respectively connected to the compressed air pipelines, and the electromagnetic valves are arranged on the compressed air pipelines.

[0048] The side wind knife assembly includes a plurality of top wind knives, which are fixed on the air drying frame through a wind knife fixing seat. The plurality of top wind knives are arranged in parallel and equidistantly, and preferably three top wind knives are arranged.

[0049] The side wind knife assembly includes a plurality of side wind knives, which are fixed on the air drying frame through a wind knife fixing seat. The plurality of side wind knives are arranged in parallel and equidistantly, and preferably two side wind knives are arranged on each side.

[0050] The bottom of the air drying frame is arranged on the air drying base. A seam-riding switch is also arranged on the air drying frame.

[0051] The bottom wind knife assembly is arranged on the air-drying base. The bottom wind knife assembly includes a bottom wind knife, and the bottom wind knife is arranged at the angle of the upper part of the air-drying frame. Preferably, one bottom wind knife is arranged.

[0052] The air-drying frame and air-drying base are both made of aluminum profiles.

[0053] The automatic degumming line for crystal trays is also equipped with a PLC control system. The high-frequency heating coil, high-frequency main machine, high-frequency auxiliary machine, high-frequency cooling machine, switch for detecting the presence of adhesive board, shooting switch, adhesive board removal Z-axis cylinder, opening and closing cylinder, top wind knife, bottom wind knife, side wind knife, grabbing cylinder, X-axis servo motor, cylinder limit buffer, top nozzle, end nozzle, material conveying roller, heating zone conveying roller, material separation zone conveying roller, flushing zone conveying roller, air drying zone conveying roller, material in place sensor, switch for detecting the presence of material, stop cylinder, induced draft fan, high-frequency machine, removal cylinder, servo motor, servo module, pressure reducing valve, slag discharge valve, grabbing cylinder, centering cylinder, water spray assembly, solenoid valve, high-pressure water tank, riding switch, and R-axis rotation servo motor are respectively connected to the PLC control system without limiting the specific model, as long as it can work.

[0054] The top of the crystal tray that needs to be cleaned in the present invention is made of a plastic adhesive plate when it is transported to the heating mechanism. After removing the adhesive plate, the remaining adhesive surfaces on the crystal tray include the top adhesive surface of the top surface, the side adhesive surfaces of the sides, and the corner adhesive surfaces of the four corners.

[0055] The heating mechanism heats the upper surface of the crystal tray through the adhesive plate, and the adhesive is ineffective through heating, so that the crystal tray and the adhesive plate are naturally separated. After the material conveying roller conveys the adhesive plate and the crystal tray to the conveying roller in the heating area, the high-frequency machine is turned on, the high-frequency heating coil is heated, the induced draft fan works, and the smoke is exhausted through the smoke exhaust pipe. The crystal tray is normally conveyed on the conveying roller in the heating area. When it is conveyed to the right place, the adhesive plate of the crystal tray is automatically separated.

[0056] The adhesive sheet stacking mechanism is used to grab the separated adhesive sheets and stack them on the storage trolley. The remaining crystal trays and the stacked adhesive sheets are transferred to the next process respectively.

[0057] The flushing box is used to place the crystal tray and provide a flushing place for the degumming work. The box door and the high-strength tempered glass observation window are set to ensure the safety of personnel during the flushing process. The degumming mechanism is placed on the top of the flushing box to complete the degumming action together with the flushing box. The flushing box has a double-layer structure with sound insulation cotton in the middle to reduce impact noise. The glue drawer is used to receive waste glue, and the slag discharge port is used to clean glue particles and silicon mud.

[0058] The degumming mechanism is equipped with a walking and rotating group: the degumming X-axis assembly and the degumming Y-axis assembly drive the water spray assembly to move in the length and width of the crystal tray, and the degumming R-axis assembly rotates the corresponding end nozzle to a corresponding angle. The cooperation of the walking and rotating group ensures that all glue surfaces of the crystal tray can be seamlessly spliced ​​with the flushing trajectory; the main nozzle is divided into four nozzles, two of which are arranged in parallel, and the other top nozzle is just behind the center line of the two top nozzles, and there is another end nozzle arranged at 90 degrees to the main nozzle.

[0059] The air-drying mechanism uses the conveying roller in the air-drying area as the conveying medium. When it is conveyed to the front end of the air-drying mechanism station, the air-drying starts, and the wind knife blows compressed air to the outer surface of the crystal tray for air-drying. When the crystal tray passes through this air-drying mechanism station, there will be a seam switch detection to turn off the air supply switch of the wind knife, and the clean crystal tray is conveyed to the next station for reuse.

[0060] The beneficial effects of the present invention compared with the prior art are:

[0061] The automatic degumming line for crystal trays provided by the present invention includes degumming on the surface, on the sides and at the four corners of the crystal trays. The present invention can reuse the crystal trays after degumming.

[0062] The automatic glue removal line for crystal trays provided by the present invention solves the problems of existing glue removal equipment that requires processes such as scraping glue and polishing in actual operation, which leads to increased costs, cumbersome debugging, and inconvenient operation. Compared with the existing glue removal equipment, the automatic glue removal line for crystal trays provided by the present invention is easy to install, saves debugging time, has lower cost, is more convenient to operate, saves work rhythm, and reduces overall production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0063] Figure 1 It is a front view of the automatic glue removal line for crystal trays of the present invention.

[0064] Figure 2 It is a top view of the automatic glue removal line for the wafer tray of the present invention.

[0065] Figure 3 It is a three-dimensional diagram of the automatic glue removal line for the crystal tray of the present invention.

[0066] Figure 4 Schematic diagram of the adhesive surface on the crystal tray. Figure (a) is the front view of the crystal tray with adhesive, Figure (b) is the side view of the crystal tray with adhesive, and Figure (c) is the top view of the crystal tray with adhesive.

[0067] Figure 5 This is a schematic diagram of the sequence of removing glue from the crystal tray.

[0068] Figure 6 It is a three-dimensional diagram of the heating mechanism.

[0069] Figure 7 It is a side view of the adhesive board stacking mechanism.

[0070] Figure 8 It is the front view of the adhesive board stacking mechanism.

[0071] Fig. 9 It is a top view of the adhesive board stacking mechanism.

[0072] Fig.10 It is a three-dimensional diagram of the adhesive board stacking mechanism.

[0073] Fig.11 This is the front view of the flushing tank.

[0074] Fig.12 It is a cross-sectional view of a side view of the flushing tank.

[0075] Fig.13 It is a top view of the flushing tank.

[0076] Fig.14 It is a three-dimensional diagram of the flushing tank.

[0077] Fig.15 It is a side view of the flushing loading and unloading mechanism.

[0078] Fig.16 It is a three-dimensional diagram of the flushing loading and unloading mechanism.

[0079] Fig.17 It is a three-dimensional diagram of the glue removal mechanism.

[0080] Fig.18 It is a side view of the glue removal mechanism.

[0081] Fig.19 It is a top view of the glue removal mechanism.

[0082] Fig. 20 It is a three-dimensional diagram of the air-drying mechanism.

[0083] Fig.21 It is a top view of the air-drying mechanism.

[0084] Fig. 22 It is the main view of the air-drying mechanism.

[0085] Fig.23 It is a side view of the air-drying mechanism.

[0086] In the figure: 1. Heating mechanism, 2. Glue board stacking mechanism, 3. Flushing box, 4. Air drying mechanism, 5. Conveyor roller mechanism, 6. Flushing loading and unloading mechanism, 7. Glue removal mechanism, 8. Crystal support, 101. Heating box, 102. High-frequency heating coil, 103. Heating zone conveyor roller channel opening, 104. Smoke exhaust port, 105. High-frequency main machine, 106. High-frequency auxiliary machine, 107. High-frequency cooling machine, 201. Material storage trolley, 202. Material separation zone conveyor roller, 203. Glue board removal frame, 204. Smoke exhaust port, 105. High-frequency main machine, 106. High-frequency auxiliary machine, 107. High-frequency cooling machine, 201. Material storage trolley, 202. Material separation zone conveyor roller, 203. Glue board removal frame, 204. 4. Grippers, 205. X-axis assembly for removing adhesive board, 206. Z-axis assembly for removing adhesive board, 207. Switch for detecting whether adhesive board is present, 208. Opposing switch, 209. X-axis slide plate, 210. Z-axis cylinder for removing adhesive board, 211. Z-axis connecting piece for removing adhesive board, 212. Grippers positioning piece, 213. Buffer spring, 214. Glue box, 301. Box door, 302. Opening and closing cylinder, 303. Crystal support placement position, 304. Flushing inspection door, 305. Observation window, 306. Glue drawer , 307. Slag discharge port, 308. Drain pipe, 309. Flushing box, 310. Water receiving box, 311. Slag discharge pipe, 401. Air drying base, 402. Air drying frame, 403. Inspection window, 404. Protective inspection door, 405. Top wind knife, 406. Bottom wind knife, 407. Side wind knife, 601. Loading and unloading frame, 602. X-axis assembly, 603. Z-axis assembly, 604. Grabbing cylinder B, 605. Grabbing cylinder A, 606. Grabbing gripper A, 607. Grabbing gripper B , 608. X-axis servo motor, 609. Overlap frame, 610. Gripper, 611. Cylinder limit buffer, 612. Cylinder fixing plate, 701. Glue removal X-axis assembly, 702. Glue removal Y-axis assembly, 703. Glue removal R-axis assembly, 704. Glue removal frame, 705. Main nozzle, 706. Branch nozzle, 707, water inlet, 708. Top nozzle, 709. End nozzle, 801. Top glue surface, 802. Side glue surface, 803. Corner glue surface, 804. Glue removal starting position. DETAILED DESCRIPTION

[0087] The present invention is described in detail below by specific examples, but the protection scope of the present invention is not limited. Unless otherwise specified, the experimental methods used in the present invention are all conventional methods, and the experimental equipment, materials, reagents, etc. used can be obtained from commercial channels.

[0088] Example 1

[0089] Automatic glue removal line for crystal trays, such as Figure 1-Figure 23As shown, it includes a conveying roller mechanism 5, a heating mechanism 1, a glue board stacking mechanism 2, a washing box 3, and an air drying mechanism 4, one side of the washing box 3 is provided with a washing loading and unloading mechanism 6, and the top of the washing box 3 is provided with a glue removal mechanism 7. The conveying roller mechanism 5 runs through the heating mechanism 1, the glue board stacking mechanism 2, the washing box 3 and the washing loading and unloading mechanism 6, and the air drying mechanism 4 is provided;

[0090] The conveying roller mechanism 5 includes a material conveying roller, a heating zone conveying roller, a material separation zone conveying roller 202, a flushing zone conveying roller, and an air-drying zone conveying roller, which are arranged in sequence; the material conveying roller, the heating zone conveying roller, the material separation zone conveying roller 202, the flushing zone conveying roller, and the air-drying zone conveying roller are all provided with material in place sensors and switches for detecting the presence or absence of materials, and are all provided with stop components, the stop components including a stop cylinder, the stop cylinder is arranged below the conveying roller, the front end of the cylinder rod of the stop cylinder is provided with a stop limit piece, and the stop limit piece is arranged to be inserted into the roller gap of the conveying roller through the stop cylinder. The material conveying roller, the heating zone conveying roller, the material separation zone conveying roller 202, the flushing zone conveying roller, and the air-drying zone conveying roller are not limited in model, and can realize the working function.

[0091] The heating mechanism 1 is used for heating materials, the adhesive sheet stacking mechanism 2 is used for removing the adhesive sheets, the conveying roller mechanism 5 is used for conveying and transferring materials, and the flushing loading and unloading mechanism 6 is used for loading and unloading materials.

[0092] The heating mechanism 1 includes a heating box 101, in which a high-frequency heating coil 102 for heating materials is arranged, the high-frequency heating coil 102 is arranged above the conveying roller mechanism 5, a smoke exhaust duct is arranged above the high-frequency heating coil 102, a draft fan is arranged on the smoke exhaust duct, the end of the smoke exhaust duct is connected to a smoke exhaust port 104, the smoke exhaust port 104 is arranged on the top of the heating box 101 and connected to an external smoke exhaust pipeline; the high-frequency heating coil 102 is externally connected to a high-frequency machine.

[0093] The high frequency machine is an existing device, and includes a high frequency main machine 105, a high frequency auxiliary machine 106, and a high frequency cooling machine 107. The high frequency main machine 105 is connected to the high frequency auxiliary machine 106, and the high frequency main machine 105 and the high frequency auxiliary machine 106 are respectively connected to the high frequency cooling machine 107. There is no restriction on the model, as long as the working function is achieved.

[0094] Heating zone conveying roller channel openings 103 are also provided at the lower parts of both sides of the heating box body 101 , and a detachable glue splicing box for glue splicing is also provided at the bottom of the heating box body 101 .

[0095] The adhesive board stacking mechanism 2 includes a material storage trolley 201 and an adhesive board removal assembly. The adhesive board removal assembly is arranged above the conveying roller 202 in the material separation area. The material storage trolley 201 is arranged on one side of the conveying roller 202 in the material separation area. The adhesive board removal assembly includes a walking group for driving the gripper 204 to walk, and the gripper 204. The walking group is connected to the gripper 204 and a buffer spring 213 is arranged at the connection. The gripper 204 includes a removal clamping claw, and the removal clamping claw is clamped and released by a removal cylinder. The gripper is provided with a gripper positioning member 212 for positioning the adhesive board. Because the adhesive board is made of plastic, it is in a circular arc shape after heating and degumming, which is not easy to grasp and position.

[0096] The adhesive plate removing assembly includes an adhesive plate removing frame 203 , and the walking group is arranged on the adhesive plate removing frame 203 .

[0097] The walking group includes an adhesive plate removing X-axis component 205 and an adhesive plate removing Z-axis component 206 ; the adhesive plate removing X-axis component 205 and the adhesive plate removing Z-axis component 206 are connected via an X-axis slide plate 209 .

[0098] The adhesive plate removal X-axis assembly 205 includes a servo motor, the servo motor is connected to a servo module, and a servo module slide of the servo module is connected to an X-axis slide 209 .

[0099] The adhesive plate removal Z-axis assembly 206 includes an adhesive plate removal Z-axis cylinder 210, the front end of the cylinder rod of the adhesive plate removal Z-axis cylinder 210 is connected to the adhesive plate removal Z-axis connecting piece 211, the adhesive plate removal Z-axis connecting piece 211 is connected to the gripper vertical rod, the bottom of the gripper vertical rod is connected to the gripper 204, and the gripper vertical rod is connected to the X-axis slide 209 through a linear guide rail and a slider.

[0100] The adhesive plate removal Z-axis cylinder 210 is arranged on the X-axis slide plate 209, and the adhesive plate removal Z-axis cylinder 210 is equipped with a pressure reducing valve, which works when it descends.

[0101] The bottom of the gripper vertical rod is connected to the gripper connecting frame, and two grippers 204 are arranged below the gripper connecting frame.

[0102] The gripper 204 includes a gripper connecting plate and a clamping claw connecting plate arranged above and below, the gripper connecting plate and the clamping claw connecting plate are connected by a buffer spring 213, the gripper connecting plate is connected to the bottom of the gripper connecting frame, the clamping claw connecting plate is provided with a removal cylinder, the two ends of the removal cylinder are respectively connected to the clamping claw, a limit pressure piece is arranged on the outer side of the clamping claw, and the clamping claw connecting plate is provided with a plurality of gripper positioning members 212. Preferably, three gripper positioning members 212 are arranged.

[0103] A switch 207 for detecting the presence of adhesive sheets is provided on the conveying roller 202 in the material separation area. A glue splicing tray for splicing is provided at the lower part of the conveying roller 202 in the material separation area. The glue splicing tray is provided at an angle, and its end is connected to a glue splicing box 214, which is detachably provided at the lower part of the conveying roller 202 in the material separation area.

[0104] The material storage trolley 201 is used for storing and transporting the adhesive board. Universal wheels are arranged at the bottom of the material storage trolley 201, a handle is arranged on the body of the material storage trolley 201, and a shooting switch 208 for detecting whether the material is full is arranged on the top surface of the material storage trolley 201.

[0105] The flushing box 3 includes a flushing box body 309, one side of which is provided with an observation window 305 for the operator to observe, and the other side is provided with a box door 301 for opening and closing. A crystal tray placement position 303 for placing the crystal tray 8 is provided inside the flushing box 3, and a pull-out glue connection drawer 306 is provided at the lower part of the flushing box body 3, and a water connection box 310 is provided below the glue connection drawer 306, and the water connection box 310 is provided at the bottom of the flushing box body 309.

[0106] A drainage pipe 308 for draining water is arranged on the upper part of the water receiving box 310 to drain relatively clean water for subsequent filtration and reuse.

[0107] A slag discharge port 307 is also provided on one side of the water receiving box 310 . The bottom of the slag discharge port 307 is connected to a slag discharge pipe 311 . A slag discharge valve is provided on the slag discharge pipe 311 .

[0108] The bottom surface of the glue receiving drawer 306 is a mesh structure, and the flushing water can fall into the water receiving box 310 through the mesh. The glue receiving drawer 306 is set at an angle.

[0109] Sound insulation cotton is arranged inside the flushing box 309 .

[0110] The box door 301 is opened and closed by an opening and closing cylinder 302. The front end of the cylinder rod of the opening and closing cylinder 302 is connected to the side of the box door 301 through a cylinder connector. The opening and closing cylinder 302 is fixed to the lower part of the outer wall of the flushing box body 309. Two opening and closing cylinders 302 are preferably provided, and the two opening and closing cylinders 302 are provided below the two sides of the box door 301.

[0111] A flushing inspection door 304 is also provided on the top of the flushing box 309. The flushing inspection door 304 is used for flushing the box 309 for inspection.

[0112] The observation window 305 is made of high-strength tempered glass to ensure the safety of personnel during the flushing process. The observation window 305 is used to observe the flushing cleanliness in real time and quickly adjust the cleaning speed and position.

[0113] The flushing loading and unloading mechanism 6 is arranged above the conveying roller in the flushing area, and the flushing loading and unloading mechanism 6 includes a loading and unloading frame 601, and the loading and unloading frame 601 is provided with an X-axis assembly 602 and a Z-axis assembly 603 for driving the grabbing assembly to move, and the Z-axis assembly 603 includes a cylinder fixing plate 612, and two grabbing cylinders are arranged on the cylinder fixing plate 612 to drive the grabbing gripper to move up and down, and the bottom of the grabbing cylinder is connected to the grabbing gripper, and the clamping claw 610 of the grabbing gripper realizes clamping and grabbing through the centering cylinder.

[0114] The X-axis assembly 602 includes an X-axis servo motor 608, the output end of the X-axis servo motor 608 is connected to the gear, the gear and the rack are meshingly connected, the X-axis servo motor 608 is arranged on a horizontal slide, the bottom of the horizontal slide is connected to the Z-axis assembly 603, the rack is arranged on the inner side of the upper part of the loading and unloading rack 601, and the horizontal slide is connected to the top surface of the loading and unloading rack 601 through a linear guide rail and a slider.

[0115] The Z-axis assembly 603 includes a Z-axis connecting rod, a cylinder fixing plate 612, and a grabbing cylinder; the top surface of the Z-axis connecting rod is connected to the horizontal slide, the bottom surface of the Z-axis connecting rod is connected to the cylinder fixing plate 612, and the grabbing cylinder is arranged on the cylinder fixing plate 612.

[0116] The front end of the cylinder rod of the grabbing cylinder is connected to the clamping claw fixing plate through a cylinder connecting piece, and the clamping claw fixing plate is provided with a cylinder limiting buffer 611 for limiting the grabbing cylinder.

[0117] The gripper is provided on the clamp fixing plate; the gripper comprises two clamps 610 and a centering cylinder, and the two ends of the centering cylinder are respectively connected with a clamp 610. A guide piece is also provided at the bottom of the clamp 610.

[0118] A lapped frame 609 is also provided at one end of the loading and unloading frame 601, and the lapped frame 609 is used to be fixed on the top surface of the flushing box 3 to achieve a fixed connection.

[0119] The glue removal mechanism 7 includes a glue removal frame 704, on which a water spray assembly is arranged, and the glue removal frame 704 is also provided with a walking and rotating group for driving the water spray assembly to walk and rotate, and the bottom of the walking and rotating group is connected to the water spray assembly, and the water spray assembly includes a main nozzle 705 and a branch nozzle 706, and the bottom side of the main nozzle 705 is connected to the branch nozzle 706, and the bottom of the main nozzle 705 is connected to a plurality of top surface nozzles 708, and the end of the branch nozzle 706 is connected to the end surface nozzle 709, and the plane where the top surface nozzle 708 is located and the plane where the end surface nozzle 709 is located are perpendicular to each other.

[0120] Three top surface nozzles 708 are preferably provided, and the bottoms of the three top surface nozzles 708 are located at the same height, two of which are arranged in parallel, and another top surface nozzle 708 is arranged in the middle area behind the two top surface nozzles 708, and the end surface nozzle 709 is arranged behind the separately arranged top surface nozzle 708.

[0121] The water spray assembly is externally connected to a high-pressure water tank, and the main spray pipe 705 of the water spray assembly is connected to the high-pressure water tank through a water inlet 707 and a hose, and a solenoid valve is arranged on the hose.

[0122] The walking and rotating group includes a glue removal X-axis assembly 701, a glue removal Y-axis assembly 702, and a glue removal R-axis assembly 703. The glue removal Y-axis assembly 702 and the glue removal R-axis assembly 703 are arranged on the glue removal X-axis sliding bracket of the glue removal X-axis assembly 701. The glue removal X-axis assembly 701 includes a servo motor. The gear at the output end of the servo motor is meshed and connected with the rack. The rack is arranged on the glue removal frame 704. The servo motor is fixed on the glue removal X-axis sliding bracket. The glue removal X-axis sliding bracket is connected to the top surface of the glue removal frame 704 through a linear guide rail and a slider.

[0123] The glue removal Y-axis assembly 702 includes a servo motor and a glue removal Y-axis slide. The servo motor is arranged on the glue removal Y-axis slide. The gear at the output end of the servo motor is meshed and connected with the rack. The rack is arranged on the glue removal X-axis sliding bracket. The glue removal Y-axis slide is connected to the top surface of the X-axis sliding bracket through a linear guide rail and a slider.

[0124] The glue removal R-axis assembly 703 includes an R-axis rotation servo motor, and the output end of the R-axis rotation servo motor is connected and fixed to the main nozzle 705 in the water spray assembly through a shaft sleeve.

[0125] The R-axis rotation servo motor is arranged on the glue removal Y-axis slide.

[0126] The glue removal mechanism 7 is arranged above the flushing box 3. The top surface of the flushing box body 309 of the flushing box 3 is provided with a groove for the water spray component to penetrate into the flushing box 3, and an accordion shield is provided at the connection between the main nozzle 705 in the water spray component and the flushing box 3.

[0127] The air-drying mechanism 4 includes an air-drying frame 402, which is arranged above the conveying roller in the air-drying area. A top surface wind knife assembly for air-drying the top surface of the crystal tray 8 is arranged on the upper part of the air-drying frame 402, and side surface wind knife assemblies for air-drying the side surfaces of the crystal tray 8 are arranged on the sides of the air-drying frame 402. A bottom surface wind knife assembly for air-drying the bottom surface of the crystal tray 8 is arranged below the air-drying frame 402, and a protective inspection door 404 is arranged on the top surface of the air-drying frame 402.

[0128] An inspection window 403 is provided on the protective inspection door 404.

[0129] The side wind knife assembly includes a plurality of top wind knives 405, and the top wind knives 405 are fixed on the air drying frame 402 through a wind knife fixing seat. The plurality of top wind knives 405 are arranged in parallel and equidistantly, and preferably three top wind knives 405 are arranged.

[0130] The side wind knife assembly includes a plurality of side wind knives 406, and the side wind knives 406 are fixed on the air drying frame 402 through a wind knife fixing seat. The plurality of side wind knives 406 are arranged in parallel and equidistantly, and preferably two side wind knives 406 are arranged on each side.

[0131] The bottom of the air-drying frame 402 is arranged on the air-drying base 401 .

[0132] The bottom wind knife assembly is arranged on the air-drying base 401. The bottom wind knife assembly includes a bottom wind knife 407, and the bottom wind knife is arranged at the angle of the upper part of the air-drying base 401. Preferably, one bottom wind knife 407 is arranged.

[0133] The top surface air knife 405, the bottom surface air knife 406, and the side surface air knife 407 are respectively connected to compressed air pipelines, and a solenoid valve is arranged on the compressed air pipeline.

[0134] The automatic debonding line for wafer support is also equipped with a PLC control system, including the high-frequency heating coil 102, the high-frequency main machine 105, the high-frequency auxiliary machine 106, the high-frequency cooling machine 107, the switch 207 for detecting the presence of adhesive board, the shooting switch 208, the Z-axis cylinder 210 for removing adhesive board, the opening and closing cylinder 302, the top wind knife 405, the bottom wind knife 406, the side wind knife 407, the grabbing cylinder, the X-axis servo motor 608, the cylinder limit buffer 611, the top nozzle 708, the end nozzle 70 9. Material conveying rollers, heating zone conveying rollers, material separation zone conveying rollers 202, flushing zone conveying rollers, air drying zone conveying rollers, material in-place sensors, material presence detection switches, stop cylinders, induced draft fans, high-frequency machines, transfer cylinders, servo motors, servo modules, pressure reducing valves, slag discharge valves, grabbing cylinders, centering cylinders, water spraying components, solenoid valves, high-pressure water tanks, and R-axis rotating servo motors are connected to the PLC control system separately, without limiting the specific models, as long as they can work.

[0135] The top of the crystal tray 8 that needs to be cleaned in the present invention is made of an adhesive plate made of plastic material when it is transported to the heating mechanism 1. After removing the adhesive plate, the remaining adhesive surface on the crystal tray 8 includes the top adhesive surface 801 of the top surface, the side adhesive surface 802 of the side, and the corner adhesive surfaces 803 of the four corners.

[0136] During specific operation, the crystal tray 8 with the adhesive sheet is transported to the heating zone conveyor roller in the heating box 101 in the heating mechanism 1 through the material conveying roller in the conveying roller mechanism 5, and the high-frequency heating coil 102 is turned on for heating, and the crystal tray 8 is heated while being transported (the glue between the crystal tray 8 and the adhesive sheet can be automatically ineffective through heating) to achieve automatic separation of the adhesive sheet and the crystal tray 8, until it is transported to the stop position on the conveying roller in the heating zone, the crystal tray 8 is completely heated in the length direction, and the high-frequency heating is completed; the stop position The stop limiter falls and is transported to the next station. The material separation area conveying roller 202 on the adhesive board stacking mechanism 2 stops the crystal support 8. The adhesive board removal Z-axis assembly 206 on the adhesive board stacking mechanism 2 drops into place. The gripper 204 clamps the adhesive board. The adhesive board removal Z-axis assembly 206 rises. The adhesive board removal X-axis assembly 205 moves the adhesive board to the top of the storage trolley 201. The adhesive board removal Z-axis assembly 206 drops into place. The gripper 204 clamps the adhesive board. 4 is released, and the adhesive sheet falls into the material slot of the storage trolley 201 (which can be set as needed). The adhesive sheets are placed one after another in this way. When the storage trolley 201 is full of materials, the shooting switch 208 feedbacks a signal, and the storage trolley 201 is manually pushed away for processing; after the adhesive sheet removal Z-axis assembly 206 rises to its position, the stop limiter on the material separation area conveyor roller 202 falls, and the material separation area conveyor roller 202 starts to send the crystal tray 8 to the washing area conveyor roller for washing and degumming. The stop limiter on the feeding roller stops the crystal support 8, and the two grabbing cylinders on the flushing loading and unloading mechanism 6 that drive the grabbing grippers to move up and down are grabbing gripper A606, grabbing gripper B607, grabbing cylinder A605, and grabbing cylinder B604; grabbing cylinder A605 is connected to grabbing gripper A606, grabbing cylinder B604 is connected to grabbing gripper B607, grabbing gripper A606 and grabbing gripper B607 are arranged side by side, and grabbing gripper A606 is arranged on the outside of grabbing gripper B607;Driven by the X-axis assembly 602, the grabbing gripper A606 moves to the conveying roller of the rinsing area to pick up the undebonded wafer tray 8, the grabbing cylinder A605 descends, the centering cylinder drives the gripping gripper A606's claws to clamp the wafer tray 8, the grabbing cylinder A605 rises with the wafer tray 8, the stop limiter on the conveying roller of the rinsing area falls, the door 301 of the rinsing box 3 opens, the grabbing cylinder A605 places the wafer tray 8 in the wafer tray placement position driven by the walking group, the grabbing gripper A606 leaves the rinsing box and resets under the drive of the walking group, the door 301 of the rinsing box 3 closes, and the high-pressure rinsing of the wafer tray 8 is ready. Preparation work, the degumming mechanism 7 starts working, the high-pressure water pump in the high-pressure water tank starts working, the top nozzle 708 and the end nozzle 709 start working, the top nozzle 708 and the end nozzle 709 are two-hole rotating flushing high-pressure nozzles, which can cover a 50mm flushing and degumming area, and the surface of the crystal tray 8 to be degummed is flushed and degummed. The flushing divides the crystal tray 8 into two areas for flushing. The flushing order is to clean the 90-degree angle of the starting end of the crystal tray 8, the side of the crystal tray 8 in the first area, the top surface of the crystal tray 8 in the first area, another 90-degree angle in the first area, the 90-degree angle in the second area, and the side of the crystal tray 8 in the second area. , another 90-degree angle in the second zone. After all surfaces have been debonded, the high-pressure water pump stops supplying water, and the debonding mechanism 7 drives the water spray assembly to return to the initial position. The door 301 of the flushing box 3 is opened, and the flushing box 3 is loaded and unloaded again; the grabbing gripper A606 on the flushing loading and unloading mechanism 6 carries the unwashed crystal tray 8 into the cleaning box, and the grabbing gripper B607 on the flushing loading and unloading mechanism 6 grabs the cleaned crystal tray 8. After the grabbing gripper B607 grabs the cleaned crystal tray 8, the X-axis assembly 602 on the flushing loading and unloading mechanism 6 drives the Z-axis assembly 603 to move backward as a whole, and the grabbing gripper A606 is moved backward. 06 Place the unwashed wafer tray 8 in the wafer tray placement position, and the grab gripper A606 leaves the rinsing box and resets under the drive of the walking group. The door 301 of the rinsing box 3 is closed, and the next cleaning work begins. The cleaned wafer tray 8 is placed on the conveying roller of the rinsing area by the grab gripper B607, and is conveyed to the conveying roller of the air-drying area through the conveying roller of the rinsing area for air-drying. Air-drying is to use a fixed wind knife with compressed air to blow dry the upper, lower, left and right sides of the wafer tray 8. After the wafer tray 8 passes through the air-drying mechanism 4 station, it has become a clean wafer tray 8 and will be transferred to the next process for repeated use. ;

[0137] The drainage pipe 308 of the flushing box 3 is connected to the sedimentation tank under the workshop through a pipeline. After three layers of sedimentation and filtration, the sewage becomes clean water, and the clean water is discharged for repeated flushing by the high-pressure water pump. In addition, the door panel of the heating box 101, the side wall of the flushing box 3 and the air-drying mechanism 4 are all provided with transparent organic glass, so that the material status can be checked at any time and the equipment parameters can be adjusted. The glass of the flushing box 3 is high-strength tempered glass to prevent high-pressure water from splashing and injuring people.

[0138] The above-described embodiments are only preferred embodiments of the present invention, but not all feasible embodiments of the present invention. For those skilled in the art, any obvious changes made thereto without departing from the principles and spirit of the present invention should be considered to be included in the scope of protection of the claims of the present invention.

Claims

1. A crystal tray automatic glue removal line, characterized in that: The invention comprises a conveying roller mechanism (5), a heating mechanism (1), a glue board stacking mechanism (2), a washing box (3), and an air drying mechanism (4) which are arranged in sequence; a washing loading and unloading mechanism (6) is arranged on one side of the washing box (3); a glue removal mechanism (7) is arranged on the top of the washing box (3); the conveying roller mechanism (5) passes through the heating mechanism (1), the glue board stacking mechanism (2), between the washing box (3) and the washing loading and unloading mechanism (6), and the air drying mechanism (4).

2. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The heating mechanism (1) is used for heating materials, the adhesive sheet stacking mechanism (2) is used for removing adhesive sheets, the conveying roller mechanism (5) is used for conveying and transferring materials, and the flushing loading and unloading mechanism (6) is used for loading and unloading materials.

3. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The conveying roller mechanism (5) comprises a material conveying roller, a heating zone conveying roller, a material separation zone conveying roller (202), a flushing zone conveying roller, and an air drying zone conveying roller, which are arranged in sequence.

4. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The heating mechanism (1) comprises a heating box (101), a high-frequency heating coil (102) for heating materials is arranged in the heating box (101), the high-frequency heating coil (102) is arranged above the conveying roller mechanism (5), a smoke exhaust duct is arranged above the high-frequency heating coil (102), an induced draft fan is arranged on the smoke exhaust duct, the end of the smoke exhaust duct is connected to the smoke exhaust port (104), and the smoke exhaust port (104) is arranged at the top of the heating box (101) and connected to an external smoke exhaust pipeline.

5. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The adhesive sheet stacking mechanism (2) comprises a material storage trolley (201) and an adhesive sheet removal assembly. The adhesive sheet removal assembly is arranged above a conveying roller (202) in a material separation zone. The material storage trolley (201) is arranged on one side of the conveying roller (202) in the material separation zone. The adhesive sheet removal assembly comprises a walking group for driving a gripper (204) to walk, and a gripper (204). The walking group is connected to the gripper (204) and a buffer spring (213) is arranged at the connection. The gripper (204) comprises a removal clamping jaw. The removal clamping jaw is clamped and released by a removal cylinder. A gripper positioning member (212) for positioning the adhesive sheet is arranged on the gripper.

6. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The flushing box (3) comprises a flushing box body (309), one side of the flushing box body (309) is provided with an observation window (305) for observation by an operator, and the other side is provided with a box door 301) for opening and closing, a crystal tray placement position 303) for placing a crystal tray 8) is provided inside the flushing box (3), a pull-out glue connection drawer (306) is provided at the lower part of the flushing box body 3), and a water connection box (310) is provided below the glue connection drawer (306).

7. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The flushing loading and unloading mechanism (6) is arranged above the conveying roller in the flushing area, and the flushing loading and unloading mechanism (6) includes a loading and unloading frame (601), and the loading and unloading frame (601) is provided with an X-axis component (602) and a Z-axis component (603) for driving the grasping component to move, and the Z-axis component (603) includes a cylinder fixing plate (612), and two grasping cylinders are arranged on the cylinder fixing plate (612) for driving the grasping gripper to move up and down, and the bottom of the grasping cylinder is connected to the grasping gripper, and the gripping claw (610) of the grasping gripper realizes clamping and grasping through the centering cylinder.

8. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The glue removal mechanism (7) comprises a glue removal frame (704), a water spray assembly is arranged on the glue removal frame (704), and a walking and rotating group for driving the water spray assembly to walk and rotate is also arranged on the glue removal frame (704), the bottom of the walking and rotating group is connected to the water spray assembly, and the water spray assembly comprises a main nozzle (705) and a branch nozzle (706), the bottom side of the main nozzle (705) is connected to the branch nozzle (706), the bottom of the main nozzle (705) is connected to a plurality of top surface nozzles (708), the end of the branch nozzle (706) is connected to the end surface nozzle (709), and the plane where the top surface nozzle (708) is located and the plane where the end surface nozzle (709) is located are perpendicular to each other.

9. The automatic adhesive removal line for wafer support as claimed in claim 1, characterized in that: The air-drying mechanism (4) includes an air-drying frame (402), which is arranged above the conveying roller in the air-drying area. The upper part of the air-drying frame (402) is provided with a top surface wind knife assembly for air-drying the top surface of the crystal tray (8), and the side parts of the air-drying frame (402) are provided with side wind knife assemblies for air-drying the side surfaces of the crystal tray (8). The lower part of the air-drying frame (402) is provided with a bottom surface wind knife assembly for air-drying the bottom surface of the crystal tray (8).

10. The automatic adhesive removal line for wafer support as claimed in claim 2, characterized in that: The material conveying roller, the heating zone conveying roller, the material separation zone conveying roller (202), the washing zone conveying roller, and the air drying zone conveying roller are all provided with material arrival sensors and switches for detecting the presence of materials, and are all provided with stop components, the stop components comprising a stop cylinder, the stop cylinder is arranged below the conveying roller, a stop limit piece is arranged at the front end of the cylinder rod of the stop cylinder, and the stop limit piece is arranged to be inserted into the roller gap of the conveying roller through the stop cylinder.

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