Vibration isolation component for dilution refrigerator and dilution refrigerator

Abstract

The present invention provides a vibration isolation component for a dilution refrigerator and a dilution refrigerator, relating to the technical field of vibration reduction and dilution refrigerators. The vibration isolation component for a dilution refrigerator includes a vibration isolation body and a connecting assembly. A plurality of cavities for absorbing vibration waves are formed inside the vibration isolation body. The connecting assembly includes a first base and a second base, which are respectively connected to the two ends of the vibration isolation body. The connecting assembly also includes a first group of side plates and a second group of side plates, which are arranged around the vibration isolation body, the first end of the first group of side plates is connected to the first base, and the second end of the first group of side plates extends out of the second base and is connected to the isolation target. The first end of the second group of side plates is connected to the second base, and the second end of the second group of side plates extends out of the first base and is connected to the vibration source.

Description

Technical Field

[0001] The present invention relates to the technical field of vibration reduction and dilution refrigerators, and more particularly to a vibration isolation component for a dilution refrigerator and the dilution refrigerator. Background Art

[0002] The working principle of a dilution refrigerator is based on the dilution cooling effect, which achieves cooling by mixing quantum liquids of different compositions. Quantum liquids exhibit superfluidity at low temperatures. When two quantum liquids of different compositions are mixed, the interaction between the components generates an entropy change, thus achieving cooling.

[0003] The dilution refrigerator currently in widespread use utilizes helium-3 ( 3 He) and helium-4 ( 4 The unique properties of He) mixtures enable extremely low temperatures (usually below 100mK). The core principle is 3 He and 4 At 0.86K, the He mixture will separate into two phases. The upper phase is the concentrated phase, the main components of which are 3 He, that is 3 He solution. The lower layer is the dilution phase, the main components of which are 3 He and 4 He mixture, where 3 He accounts for about 6.4%-6.6%. 3 He draws out and makes 3 He vapor condenses into 3 The He solution then flows back into the concentrated phase, and then passes through the phase interface separating the concentrated phase and the dilute phase to form dilution refrigeration, continuously absorbing heat to reach the mK level or even lower temperature.

[0004] In the related art, the dilution refrigerator body will inevitably generate vibration during operation. For example, the vacuum pump, booster pump, throttle valve, etc. may generate mechanical vibration. 3 The flow of He gas and liquid may cause vibrations in the pipeline, which can have many negative effects on the operation of quantum computers. Therefore, how to provide a vibration-reducing structure has become a technical problem that needs to be solved urgently. Summary of the Invention

[0005] In view of this, the present invention provides a vibration isolation component for a dilution refrigerator and a dilution refrigerator, which can effectively extend and disperse the transmission path of vibration, so that the vibration can gradually dissipate during the transmission process.

[0006] To achieve the above-mentioned objectives, the present invention provides a vibration isolation component for a dilution refrigerator, comprising a vibration isolation body, wherein a plurality of cavities for absorbing vibration waves are formed inside the vibration isolation body; a connecting assembly, comprising: a first base and a second base, respectively connected to two ends of the vibration isolation body; a first set of side plates and a second set of side plates, arranged around the vibration isolation body, wherein a first end of the first set of side plates is connected to the first base, and a second end of the first set of side plates extends out of the second base and is connected to an isolation target; and a first end of the second set of side plates is connected to the second base, and a second end of the second set of side plates extends out of the first base and is connected to a vibration source.

[0007] According to an embodiment of the present invention, the upper end cover is suspended above the above-mentioned first base, and the above-mentioned second group of side plates are connected to the above-mentioned vibration source through the above-mentioned upper end cover; the lower end cover is suspended below the above-mentioned second base, and the above-mentioned first group of side plates are connected to the above-mentioned isolation target through the above-mentioned lower end cover.

[0008] According to an embodiment of the present invention, the first group of side plates includes a plurality of first side plates, the second group of side plates includes a plurality of second side plates, and the first side plates and the second side plates are alternately distributed along the circumferential direction.

[0009] According to an embodiment of the present invention, the first side plate and the second side plate are staggered with each other in the length direction of the vibration isolation body to form a tooth-shaped structure.

[0010] According to an embodiment of the present invention, a plurality of strip grooves are formed on the first side plate and the second side plate, which are suitable for extending the transmission path of the vibration wave on the first side plate and the second side plate.

[0011] According to an embodiment of the present invention, both the first side plate and the second side plate are configured as trapezoidal side plates.

[0012] According to an embodiment of the present invention, the strip-shaped groove extends from one side edge of the trapezoidal side plate to the other side edge.

[0013] According to an embodiment of the present invention, an extending direction of the strip-shaped groove is parallel to a bottom side of the trapezoidal side plate.

[0014] According to an embodiment of the present invention, the cross section of the vibration isolation body is configured in a honeycomb shape.

[0015] The present invention also provides a dilution refrigerator, comprising cold plates arranged in multiple stages along the length direction, each cold plate having a clearance hole in the middle thereof; a refrigerator body suspended in the clearance hole and suitable for cooling the cold plates; and a plurality of vibration isolation members as described in any of the above embodiments, arranged between two adjacent cold plates to prevent vibration from being transmitted between the two adjacent cold plates.

[0016] The vibration isolation structure for a dilution refrigerator provided by the present invention utilizes a conductive path extending from the second set of side panels to the second base, the isolation body, the first base, and the first set of side panels. This minimizes the transmission of vibration from the vibration source to the isolation target, allowing the vibration to be gradually absorbed by the isolation body during transmission. Furthermore, this connection method has a certain barrier effect on heat transfer, and offers high structural stability and strong tensile and compressive resistance. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of a vibration isolation component for a dilution refrigerator provided by the present invention;

[0018] Figure 2 is a schematic cross-sectional view of a vibration isolation component for a dilution refrigerator provided by the present invention;

[0019] Figure 3 yes Figure 1 A perspective schematic diagram of the exemplary embodiment shown in FIG. 1 with the vibration isolation body, a portion of the first side plate, and a portion of the second side plate removed;

[0020] Figure 4 It is a three-dimensional schematic diagram of the dilution refrigerator provided by the present invention.

[0021] In the drawings, the meanings of the reference numerals are as follows:

[0022] 1. Vibration isolation body;

[0023] 11. Cavity;

[0024] 2. Connect components;

[0025] 20. Strip groove;

[0026] 21. First base;

[0027] 22. Second base;

[0028] 23. The first set of side panels;

[0029] 24. Second set of side panels;

[0030] 25. Upper end cover;

[0031] 26. Lower end cover;

[0032] 3. Cold dishes;

[0033] 4. Refrigerator body;

[0034] 5. Vibration isolation components. DETAILED DESCRIPTION

[0035] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of embodiments of the present invention. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of the concept of the present invention.

[0036] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The terms "comprise", "include", etc. used herein indicate the presence of the features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

[0037] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0038] When expressions such as "at least one of A, B, and C, etc." are used, they should generally be interpreted in accordance with the meaning commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0039] Figure 1 is a three-dimensional schematic diagram of a vibration isolation component for a dilution refrigerator provided by the present invention. Figure 2 is a schematic cross-sectional view of a vibration isolation component for a dilution refrigerator provided by the present invention. Figure 3 yes Figure 1 The illustrated exemplary embodiment is a perspective view showing the removal of the vibration isolation body, a portion of the first side plate, and a portion of the second side plate. Figure 4 It is a three-dimensional schematic diagram of the dilution refrigerator provided by the present invention.

[0040] An exemplary embodiment of the present invention provides a vibration isolation member 5 for a dilution refrigerator, such as Figures 1-4As shown, it includes a vibration isolation body 1 and a connection component 2. A plurality of cavities 11 for absorbing vibration waves are formed inside the vibration isolation body 1. The connection component 2 includes a first base 21 and a second base 22, which are respectively connected to the two ends of the vibration isolation body 1. The connection component 2 also includes a first group of side panels 23 and a second group of side panels 24, which are arranged around the vibration isolation body 1. The first end of the first group of side panels 23 is connected to the first base 21, and the second end of the first group of side panels 23 extends out of the second base 22 and is connected to the isolation target. The first end of the second group of side panels 24 is connected to the second base 22, and the second end of the second group of side panels 24 extends out of the first base 21 and is connected to the vibration source.

[0041] In this embodiment, the two ends of the vibration isolation member 5 are respectively connected to the vibration source and the isolation target to prevent vibration from being transmitted to the isolation target. Specifically, the vibration source is connected to the second set of side panels 24, which are connected to the second base 22, which are connected to the vibration isolation body 1, which are connected to the first base 21, which are connected to the first set of side panels 23, which are connected to the isolation target. In terms of spatial position, the transmission path of the vibration wave is roughly N-shaped or S-shaped. Combined with the vibration-absorbing cavity 11 in the vibration isolation body 1, the transmission of vibration waves from the vibration source to the isolation target is effectively suppressed. At the same time, by connecting the first base 21 at each end of the vibration isolation body 1 to the isolation target and the second base 22 to the vibration source, and by rigidly connecting the first base 21 and the second base 22 through the vibration isolation body 1, the vibration wave can be effectively blocked regardless of the direction from which it enters, and the structure has high structural stability and strong tensile and compressive resistance.

[0042] In some other embodiments, the material of the vibration isolation body 1 includes but is not limited to copper, nickel, titanium and aluminum, preferably nickel, because nickel has good ductility and is easy to weld to the first base 21 and the second base 22.

[0043] Furthermore, the first and second sets of side panels 23, 24 are preferably made of stainless steel, while the first and second bases 21, 22 are preferably made of copper. Since the operating temperature of the dilution refrigerator is extremely low (typically below 100 mK), stainless steel, which has high stability at extremely low temperatures, is used to provide sufficient support strength. Furthermore, since the first and second bases 21, 22 need to be connected to the first and second sets of side panels 23, 24, for example, by screws, and also need to be connected to the vibration isolation body 1, for example, by soldering, copper, which has a relatively moderate thermal expansion coefficient, is used in combination with stainless steel.

[0044] In addition, in a dilution refrigerator, the vibration source and isolation target are usually the upper and lower cold plates (the upper cold plate has a higher temperature than the lower one). Therefore, while isolating vibration, it is also necessary to have a heat leakage prevention function. The low-temperature thermal conductivity of stainless steel is low, and the low-temperature thermal conductivity of nickel is also lower than that of copper. In addition, the length of the heat conduction path is about three times the actual length of the structure. Therefore, it can effectively reduce the heat transfer from the upper cold plate to the lower cold plate, avoiding affecting the cooling performance of the lower cold plate.

[0045] In an exemplary embodiment, Figure 2 and Figure 3 As shown, the vibration isolation member 5 further includes an upper end cover 25 and a lower end cover 26. The upper end cover 25 is suspended above the first base 21, and the second set of side plates 24 are connected to the vibration source via the upper end cover 25. The lower end cover 26 is suspended below the second base 22, and the first set of side plates 23 are connected to the isolation target via the lower end cover 26.

[0046] In such an embodiment, the upper end cover 25 and the lower end cover 26 are used as intermediate connecting members, so that the connection between the entire vibration isolation component 5 and the vibration source and the isolation target is more stable.

[0047] Exemplarily, the upper end cover 25 and the lower end cover 26 are also made of stainless steel. The upper end cover 25, the lower end cover 26 and the vibration source and the isolation target, as well as the upper end cover 25, the lower end cover 26 and the second group of side plates 24 and the first group of side plates 23 are all connected by bolts to improve the connection stability.

[0048] In an exemplary embodiment, Figure 1 and Figure 3 As shown, the first group of side plates 23 includes a plurality of first side plates, and the second group of side plates 24 includes a plurality of second side plates, and the first side plates and the second side plates are alternately distributed along the circumferential direction.

[0049] In this embodiment, the vibration isolation body 1 is constructed in a cylindrical shape. The first and second side panels surrounding the vibration isolation body 1 are curved and spaced apart circumferentially. In a projection plane along the axial direction of the vibration isolation body 1, the first and second side panels are alternately arranged circumferentially, ensuring a more dispersed and uniform transmission of vibration waves or heat along the side panels.

[0050] In some other embodiments, such as Figure 2 and Figure 3 As shown, the surfaces of the first base 21 and the second base 22 facing the vibration isolation body 1 are formed with receiving grooves for receiving the end of the vibration isolation body 1. Accordingly, the cross section of the receiving groove is configured to be circular to match the vibration isolation body 1.

[0051] According to an embodiment of the present invention, the first side plate and the second side plate are staggered with each other in the length direction of the vibration isolation body 1 to form a tooth-shaped structure.

[0052] In such an embodiment, see Figure 1 As shown, along the length of the vibration isolation body 1, the first end of the first side plate is roughly flush with the first base 21, and the second end of the first side plate is roughly flush with the lower end cover 26. The first end of the second side plate is roughly flush with the second base 22, and the second end of the second side plate is roughly flush with the upper end cover 25. The upper end cover 25 is higher than the first base 21, and the lower end cover 26 is lower than the second base 22. The toothed structure thus formed helps extend the vibration transmission path and improve structural stability.

[0053] In an exemplary embodiment, Figure 1 and Figure 3 As shown, a plurality of strip grooves 20 are formed on the first side plate and the second side plate, which are suitable for extending the transmission path of the vibration wave on the first side plate and the second side plate.

[0054] In such an embodiment, the strip grooves 20 are provided to allow the vibration wave and heat to deviate from the original single path during transfer, that is, transfer from the first end to the second end of the first side plate or the second side plate, and become an irregular transfer path.

[0055] According to an embodiment of the present invention, Figure 1 and Figure 3 As shown, the first side panel and the second side panel are both configured as trapezoidal side panels.

[0056] In such an embodiment, the trapezoidal side panels have better stability when subjected to bending and torsion forces, a more reasonable stiffness distribution, and a reduced probability of resonance. Figure 1 and Figure 3 As shown, the first side plate and the second side plate are both trapezoidal side plates with a certain curvature to surround the vibration isolation body 1. The longer bottom side of the trapezoidal side plate is close to the upper end cover 25 / lower end cover 26, and the shorter bottom side is close to the second base 22 / first base 21.

[0057] In some other embodiments, the first side plate and the second side plate may also be rectangular plates or other shapes that are easy to manufacture.

[0058] According to an embodiment of the present invention, the strip-shaped groove 20 extends from one side of the trapezoidal side plate to the other side.

[0059] In such an embodiment, Figure 1 and Figure 3As shown, the strip groove 20 extends from one side of the trapezoidal side panel to the other side, so that the entire trapezoidal side panel is constructed into an S shape or a shape of multiple Ss connected end to end. This can reduce the design difficulty, while reducing the structural complexity of the trapezoidal side panel and reducing the occurrence of abnormal vibration transmission or resonance.

[0060] According to an embodiment of the present invention, the extending direction of the strip groove 20 is parallel to the bottom side of the trapezoidal side plate.

[0061] In such an embodiment, by making the strip groove 20 parallel to the bottom side of the trapezoidal side plate, the design and processing difficulty of the trapezoidal side plate and the strip groove 20 is further reduced.

[0062] In an exemplary embodiment, the cross section of the vibration isolation body 1 is configured in a honeycomb shape.

[0063] In this embodiment, the vibration isolation body 1 is composed of the isolation material and the cavity 11. When one end of the isolation body 1 is subjected to vibration excitation, the honeycomb structure formed by the material and the cavity 11 disperses the vibration energy and converts it into heat energy through the elastic deformation of the material itself, effectively preventing the vibration from being transmitted from one end of the isolation body 1 to the other. Furthermore, the honeycomb structure is lightweight and structurally stable, capable of withstanding strong impacts.

[0064] For example, the cross section of the cavity 11 in the vibration isolation body 1 is preferably a hexagon, because its production and manufacturing technology is mature, the cost is low, and it is easy to promote.

[0065] An exemplary embodiment of the present invention further provides a dilution refrigerator, such as Figure 4 As shown, the system comprises cold plates 3 arranged in multiple stages along the length of the system, a refrigerator body 4, and multiple vibration isolation members 5, such as those described in any of the above embodiments. A clearance hole is defined in the center of each cold plate 3, and the refrigerator body 4 is suspended within the clearance hole, suitable for cooling the cold plates 3. Multiple vibration isolation members 5 are positioned between adjacent cold plates 3 to prevent vibration from being transferred between the two adjacent cold plates 3.

[0066] In this embodiment, more specifically, the cold plate 3 is provided with four levels. The high-temperature cold plate (usually 20K-50K level) is cooled by an external refrigerator (such as a pulse tube refrigerator) to provide pre-cooling for the next level cold plate. The intermediate cold plate (usually 4K level) is cooled by liquid 4 He evaporative cooling, the temperature dropped to about 4K. Low temperature cold plate (usually 1K level) is used 4 He is cooled by evaporation under reduced pressure, and the temperature drops to about 1K. The ultra-low temperature cold plate (usually milliK level) is cooled by 3 He- 4He dilution refrigeration reduces the temperature to 0.8 mK or even lower. Since each cold plate 3 is in direct contact with the refrigerator body 4, effective vibration isolation measures are required, especially for the ultra-low temperature cold plates used to cool quantum chips. Vibration isolation components 5 are provided between adjacent cold plates 3 to prevent vibration from transmitting between adjacent cold plates 3. The top high-temperature cold plate is subject to more vibration from the external refrigerator, so the provision of vibration isolation components 5 can also gradually attenuate this vibration as it transmits downward.

[0067] In addition, the vibration isolation component 5 can also prevent the heat of the upper cold plate from being transferred to the lower cold plate by extending the heat transfer path, thereby ensuring the cooling effect.

[0068] It will be understood by those skilled in the art that the features described in the various embodiments of the present invention may be combined and / or coupled in various ways, even if such combinations or couplings are not explicitly described in the present invention. In particular, the features described in the various embodiments of the present invention may be combined and / or coupled in various ways without departing from the spirit and teachings of the present invention. All such combinations and / or couplings fall within the scope of the present invention.

[0069] The above describes embodiments of the present invention. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Although each embodiment has been described separately above, this does not mean that the measures in each embodiment cannot be advantageously used in combination. Without departing from the scope of the present invention, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. A vibration isolation member for a dilution refrigerator, characterized in that: include: A vibration isolation body, wherein a plurality of cavities are formed inside the vibration isolation body for absorbing vibration waves; Connectivity components, including: A first base and a second base are connected to two ends of the vibration isolation body respectively; A first set of side plates and a second set of side plates are arranged around the vibration isolation body, wherein a first end of the first set of side plates is connected to the first base, and a second end of the first set of side plates extends out of the second base and is connected to an isolation target; a first end of the second set of side plates is connected to the second base, and a second end of the second set of side plates extends out of the first base and is connected to a vibration source; The first set of side panels includes a plurality of first side panels, and the second set of side panels includes a plurality of second side panels; A plurality of strip grooves are formed on each of the first side plate and the second side plate, which are suitable for extending the transmission path of the vibration wave on the first side plate and the second side plate.

2. The vibration isolation member according to claim 1, wherein Also includes: an upper end cover suspended above the first base, wherein the second set of side plates is connected to the vibration source via the upper end cover; The lower end cover is suspended below the second base, and the first set of side plates is connected to the isolation target through the lower end cover.

3. The vibration isolation member according to claim 1, wherein The first side plates and the second side plates are alternately distributed along the circumferential direction.

4. The vibration isolation member according to claim 3, wherein The first side plate and the second side plate are staggered with each other in the length direction of the vibration isolation body to form a tooth-shaped structure.

5. The vibration isolation member according to claim 1, wherein The first side panel and the second side panel are both configured as trapezoidal side panels.

6. The vibration isolation member according to claim 5, wherein: The strip groove extends from one side edge of the trapezoidal side plate to the other side edge.

7. The vibration isolation member according to claim 6, wherein: The extending direction of the strip groove is parallel to the bottom edge of the trapezoidal side plate.

8. The vibration isolation member according to claim 1, wherein The cross section of the vibration isolation body is configured in a honeycomb shape.

9. A dilution refrigerator, characterized in that: include: The cold plates are arranged in multiple stages along the length direction, and a clearance hole is opened in the middle of each stage of the cold plate; The refrigerator body is suspended in the said clearance hole and is suitable for cooling the said cold plate; A plurality of vibration isolation members according to any one of claims 1 to 8 are provided between two adjacent stages of the cold plates to prevent vibration from being transmitted between the two adjacent stages of the cold plates.

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