A dual-differential single-axis gyro

Abstract

The present invention relates to the technical field of gyroscopes, and discloses a dual-differential single-axis gyroscope, which includes two single-differential structures. Each single-differential structure includes: two driving mass blocks; two coupling mass blocks, and the coupling mass blocks reciprocate along the second direction following the driving mass blocks; two detection components located between the two coupling mass blocks, and each detection component includes a detection mass block; two steering connection beam groups, and each steering connection beam group includes two obliquely arranged first steering elastic beams. One end of each first steering elastic beam is connected to the coupling mass block, and the other end is connected to the detection mass block; the four driving mass blocks of the two single-differential structures are orthogonally and symmetrically distributed. The dual-differential single-axis gyroscope disclosed by the present invention can improve the anti-impact ability of the gyroscope in the working direction, and at the same time solve the problem of inconsistent detection caused by the influence of the processing technology on the two coupling mass blocks, and improve the detection accuracy of the gyroscope.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a double-differential single-axis gyroscope. Background Art

[0002] As a key inertial sensor, gyroscopes play a vital role in many fields and are currently widely used in various fields such as aerospace and automotive industries. In actual working environments, gyroscopes will be impacted from all directions, and the existing gyroscopes on the market have poor impact resistance. When impacted, it is very easy to cause the internal structure of the gyroscope to shift and deform, affecting the accuracy and stability of the output signal, and reducing the accuracy and reliability of the gyroscope's angular velocity measurement. In order to improve the overall performance of the gyroscope, mainstream designs mostly use dual detection mass blocks and dual coupling mass block structures. In theory, this structure can improve the performance of the gyroscope to a certain extent. However, in actual applications, due to the level of processing technology, it is difficult for the dual coupling mass blocks to be completely consistent, which leads to different responses of the detection mass blocks to the same input, thereby reducing the detection accuracy, making this gyroscope unable to be used in application scenarios with high requirements for gyroscope performance. Therefore, how to overcome the above-mentioned problems existing in existing gyroscopes has become a technical problem that needs to be solved urgently. Summary of the invention

[0003] Based on the above, the purpose of the present invention is to provide a dual-differential single-axis gyroscope, which can improve the impact resistance of the gyroscope in all directions, while solving the detection inconsistency problem caused by the dual-coupled mass block affected by the processing technology, thereby improving the detection accuracy of the gyroscope.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] A dual-differential single-axis gyroscope defines a first direction, a second direction, and a third direction that are perpendicular to each other, wherein the dual-differential single-axis gyroscope comprises two single differential structures elastically connected along the second direction, each of the single differential structures comprising:

[0006] Two driving masses, the two driving masses are distributed along the first direction;

[0007] two coupling mass blocks, each of which is disposed in one of the driving mass blocks and the two are coupled and connected, and when the driving mass block performs reciprocating driving motion along the second direction, the coupling mass block also reciprocates along the second direction;

[0008] Two detection components, the two detection components are distributed along the second direction and are located between the two coupling mass blocks. Each detection component includes a detection mass block. Each detection mass block is rigidly connected to the substrate along the first direction and elastically connected along the second direction. Each detection mass block is connected to the two coupling mass blocks; a limiting groove is provided on one of the coupling mass block and the detection mass block, and a limiting boss matching with the limiting groove is provided on the other. When the coupling mass block moves a preset displacement along the second direction relative to the detection mass block, the limiting boss abuts against the limiting groove;

[0009] Two steering connection beam groups, the two steering connection beam groups correspond to the two coupling mass blocks one by one. Each steering connection beam group includes two obliquely arranged first steering elastic beams. One end of each first steering elastic beam is connected to the coupling mass block, and the other end is connected to the detection mass block. The two first steering elastic beams are symmetrically distributed about the first symmetry axis along the first direction;

[0010] The four driving mass blocks of the two single-differential structures are orthogonally symmetrically distributed. When detecting the angular velocity in the third direction, the coupling mass block is subjected to the Coriolis force along the first direction and moves along the first direction, and the detection mass block moves along the second direction under the drive of the steering connection beam group.

[0011] As a preferred solution of a double-differential single-axis gyroscope, each steering connection beam group further includes two obliquely arranged second steering elastic beams. One end of each second steering elastic beam is fixed on the substrate, and the other end is connected to the coupling mass block. The first steering elastic beam and the second steering elastic beam connected to each coupling mass block are symmetrically distributed about the second symmetry axis along the second direction, and the two second steering elastic beams of each steering connection beam group are symmetrically distributed about the first symmetry axis.

[0012] As a preferred solution of a double-differential single-axis gyroscope, the first steering elastic beam and the second steering elastic beam are both steering beams. The steering beam includes a first steering sub-beam, a second steering sub-beam and a steering connection beam. The first steering sub-beam and the second steering sub-beam are arranged in a parallel direction. The two ends of the steering connection beam are respectively connected to the same ends of the first steering sub-beam and the second steering sub-beam. The first steering sub-beam and the second steering sub-beam are symmetrically distributed about the central axis of the steering connection beam as the third symmetry axis. The first steering sub-beam is connected to the substrate or the detection mass block, and the second steering sub-beam is connected to the coupling mass block.

[0013] As a preferred solution of a double-differential single-axis gyroscope, each of the single-differential structures further includes a first anchor point and two anti-vibration elastic beams. The first anchor point and the two anti-vibration elastic beams are both located between the two detection mass blocks of a single-differential structure. The two anti-vibration elastic beams are located on both sides of the first anchor point along the first direction. Each anti-vibration elastic beam includes a central anti-vibration coupling straight beam extending along the first direction and two central anti-vibration coupling elastic beams capable of deforming along the second direction. The central anti-vibration coupling straight beams of the two anti-vibration elastic beams are respectively located on both sides of the first anchor point along the first direction. One end of the central anti-vibration coupling straight beam is connected to the first anchor point, and the other end is simultaneously connected to the two central anti-vibration coupling elastic beams. Each central anti-vibration coupling elastic beam is connected to the detection mass block.

[0014] As a preferred solution of a double-differential single-axis gyroscope, each of the single-differential structures further includes a drive connection beam and a second anchor point. The two ends of the drive connection beam are respectively connected to the two drive mass blocks of the single-differential structure. The drive connection beam includes a drive connection cross beam and a drive deformation beam. The drive connection cross beam can rotate around the second anchor point along the third direction. The drive deformation beam can deform along the first direction and its two ends are respectively connected to the drive connection cross beam and the drive mass block.

[0015] As a preferred solution of a double-differential single-axis gyroscope, the double-differential single-axis gyroscope includes a single-differential elastic beam. The single-differential elastic beam can deform along the second direction and one end thereof is connected to the drive mass block of a single-differential structure, and the other end is connected to the drive mass block of another single-differential structure.

[0016] As a preferred solution of a double-differential single-axis gyroscope, the double-differential single-axis gyroscope further includes a central connection beam. One end of the central connection beam is connected to the detection mass block of a single-differential structure, and the other end of the central connection beam is connected to the detection mass block of another single-differential structure.

[0017] As a preferred solution of a double-differential single-axis gyroscope, the central connection beam includes a first central cross beam, a central longitudinal beam, and a second central cross beam. The first central cross beam and the second central cross beam are arranged in a parallel direction and both extend along the first direction. The first central cross beam and the second central cross beam can both deform along the second direction. The first central cross beam is fixed on the detection mass block of a single-differential structure, and the second central cross beam is fixed on the detection mass block of another single-differential structure. The central longitudinal beam extends along the second direction and its two ends are respectively connected to the first central cross beam and the second central cross beam.

[0018] As a preferred solution of a double-differential single-axis gyroscope, the line connecting the centers of mass of the driving mass block and the coupling mass block of each single-differential structure is the center-of-mass line, the center-of-mass line extends along the first direction, and the two detection mass blocks are symmetrically distributed with respect to the center-of-mass line.

[0019] The beneficial effects of the present invention are as follows:

[0020] For the double-differential single-axis gyroscope disclosed in the present invention, the two steering connection beam groups can change the detection direction of the detection mass block. This steering design makes the driving direction and the detection direction of the double-differential single-axis gyroscope the same, both being the second direction. When the gyroscope is impacted in the first direction, since the detection mass block is rigidly connected to the substrate in the first direction, the displacement of the detection mass block in the first direction is very small, improving the anti-impact ability of the gyroscope in the first direction without affecting the detection result. When the gyroscope is impacted in the second direction, the design of the limiting groove and the limiting boss limits the moving displacement of the detection mass block and the coupling mass block, and further limits the movement displacement of the driving mass block along the second direction, improving the anti-impact ability of the double-differential single-axis gyroscope in the second direction. Since each detection mass block is connected to two coupling mass blocks, it avoids the situation that the detection mass block of each single-differential structure is only affected by one coupling mass block, increasing the consistency of the movement of the two detection mass blocks of each single-differential structure, improving the detection accuracy and sensitivity of the gyroscope. In addition, the double-differential design formed by the two single-differential structures can also cancel out the interference signals during differential output, has strong anti-interference ability, is suitable for high-impact scenarios, and increases the detection stability of the double-differential single-axis gyroscope. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present invention and these drawings.

[0022] Figure 1 is a schematic diagram of a double-differential single-axis gyroscope provided by a specific embodiment of the present invention;

[0023] Figure 2 is a schematic diagram of the driving mass block, driving electrode and driving and detecting electrode of a double-differential single-axis gyroscope provided by a specific embodiment of the present invention;

[0024] Figure 3 is a schematic diagram of a single-differential elastic beam of a double-differential single-axis gyroscope provided by a specific embodiment of the present invention;

[0025] Figure 4Schematic diagram of the first anchor point of the dual-differential single-axis gyroscope and the anti-vibration elastic beam provided by a specific embodiment of the present invention;

[0026] Figure 5 is Figure 1 Local enlarged view at A;

[0027] Figure 6 Schematic diagram of the first steering elastic beam and the detection component of the dual-differential single-axis gyroscope provided by a specific embodiment of the present invention;

[0028] Figure 7 is Figure 1 Local enlarged view at B;

[0029] Figure 8 Schematic diagram of the movement of the dual-differential single-axis gyroscope in the driving mode provided by a specific embodiment of the present invention;

[0030] Figure 9 Schematic diagram of the movement of the dual-differential single-axis gyroscope in the detection mode provided by a specific embodiment of the present invention.

[0031] In the figure:

[0032] 101, the first driving mass block; 102, the second driving mass block; 103, the third driving mass block; 104, the fourth driving mass block; 11, the driving mass block; 111, the first driving sub-mass block; 112, the second driving sub-mass block; 113, the first counterweight mass block; 114, the second counterweight mass block; 115, the connecting mass block; 12, the driving electrode; 13, the driving and detecting electrode; 14, the driving straight beam;

[0033] 201, the first coupling mass block; 202, the second coupling mass block; 203, the third coupling mass block; 204, the fourth coupling mass block; 21, the coupling mass block; 210, the limiting groove; 22, the coupling connecting straight beam;

[0034] 301, the first detecting mass block; 302, the second detecting mass block; 303, the third detecting mass block; 304, the fourth detecting mass block; 31, the detecting mass block; 311, the limiting boss; 32, the detecting electrode; 33, the detecting elastic beam;

[0035] 401, the first steering sub-beam; 402, the second steering sub-beam; 403, the steering connecting beam; 41, the first steering elastic beam; 42, the second steering elastic beam;

[0036] 51, the first anchor point; 52, the second anchor point; 53, the third anchor point; 54, the fourth anchor point;

[0037] 6, the anti-vibration elastic beam; 61, the central anti-vibration coupling straight beam; 62, the central anti-vibration coupling elastic beam;

[0038] 7. Driving connection beam; 71. Driving connection cross beam; 72. Driving deformation beam; 73. Driving connection straight beam;

[0039] 8. Single differential elastic beam;

[0040] 9. Central connection beam; 91. First central cross beam; 92. Central longitudinal beam; 93. Second central cross beam. Detailed implementation manner

[0041] To make the technical problems solved by the present invention, the technical solutions adopted and the achieved technical effects clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present invention.

[0042] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0043] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] This embodiment provides a double-differential single-axis gyroscope, as Figures 1 to 9As shown in the figure, a first direction, a second direction, and a third direction that are perpendicular to each other in pairs are defined. The double-differential single-axis gyroscope includes two single-differential structures elastically connected along the second direction. Each single-differential structure includes two driving mass blocks 11, two coupling mass blocks 21, two detection components, and two steering connection beam groups. The two driving mass blocks 11 are distributed along the first direction. Each coupling mass block 21 is disposed within one driving mass block 11 and the two are coupled. When the driving mass block 11 makes a reciprocating driving motion along the second direction, the coupling mass block 21 reciprocates along the second direction accordingly. The two detection components are distributed along the second direction and are located between the two coupling mass blocks 21. Each detection component includes a detection mass block 31. Each detection mass block 31 is rigidly connected to the substrate along the first direction and elastically connected along the second direction. Each detection mass block 31 is connected to the two coupling mass blocks 21 of this single-differential structure. The two steering connection beam groups correspond to the two coupling mass blocks 21 one by one. Each steering connection beam group includes two obliquely arranged first steering elastic beams 41. One end of each first steering elastic beam 41 is connected to the coupling mass block 21, and the other end is connected to the detection mass block 31. The two first steering elastic beams 41 are symmetrically distributed along the first symmetry axis in the first direction.

[0045] As Figure 1 shown, a limiting groove 210 is provided on the coupling mass block 21 of this embodiment, and a limiting boss 311 that cooperates with the limiting groove 210 is provided on the detection mass block 31. When the coupling mass block 21 moves a preset displacement relative to the detection mass block 31 along the second direction, the limiting boss 311 can abut against the limiting groove 210. This limiting design can further improve the anti-impact ability of the double-differential single-axis gyroscope in the second direction. It should be noted that the preset displacement in the present invention is specifically set according to actual needs to ensure that the detection mass block 31 can move a certain displacement along the second direction. In other embodiments, a limiting boss 311 can also be provided on the coupling mass block 21, and a limiting groove 210 corresponding to the limiting boss 311 can be provided on the detection mass block 31, which is specifically set according to actual needs.

[0046] Specifically, the four driving mass blocks 11 of the two single-differential structures of this embodiment are orthogonally and symmetrically distributed. In the driving mode, the driving mass block 11 moves along the second direction, and the coupling mass block 21 moves along the second direction with the driving mass block 11, while the detection mass block 31 does not move along the second direction with the coupling mass block 21. In the detection mode, when detecting the angular velocity in the third direction, the coupling mass block 21 is subjected to a Coriolis force along the first direction and moves along the first direction, and the detection mass block 31 turns under the drive of the steering connection beam group and moves along the second direction, so that the detection mass block 31 makes a reciprocating motion along the second direction relative to the substrate.

[0047] Specifically, as Figure 1As shown, the first direction of this embodiment is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. It should be noted that in other embodiments of the present invention, the first direction can also be the Y-axis direction. In this case, the second direction is the X-axis direction, and the third direction is the Z-axis direction, which is specifically set according to actual needs.

[0048] The double-differential single-axis gyroscope provided in this embodiment has two steering connection beam groups that can change the detection direction of the detection mass block 31. This steering design makes the driving direction and the detection direction of the double-differential single-axis gyroscope the same, both being the second direction. When the gyroscope is impacted in the first direction, since the detection mass block 31 and the substrate are rigidly connected in the first direction, the displacement of the detection mass block 31 in the first direction is very small, improving the anti-impact ability of the gyroscope in the first direction without affecting the detection result. When the gyroscope is impacted in the second direction, the design of the limiting groove 210 and the limiting boss 311 limits the moving displacement of the detection mass block 31 and the coupling mass block 21, and further limits the moving displacement of the driving mass block 11 along the second direction, improving the anti-impact ability of the double-differential single-axis gyroscope in the second direction. Since each detection mass block 31 is connected to two coupling mass blocks 21, it avoids the situation where the detection mass block 31 of each single-differential structure is only affected by one coupling mass block 21, increasing the consistency of the movement of the two detection mass blocks 31 in each single-differential structure, improving the detection accuracy and sensitivity of the gyroscope. In addition, the double-differential design formed by the two single-differential structures can also cancel out the interference signals during differential output, has a strong anti-interference ability, is suitable for high-impact scenarios, and increases the stability of the detection of the double-differential single-axis gyroscope.

[0049] Furthermore, as Figure 1 shown, each steering connection beam group of this embodiment further includes two second steering elastic beams 42 that are inclined. One end of each second steering elastic beam 42 is fixed on the substrate, and the other end of each second steering elastic beam 42 is connected to the coupling mass block 21. The first steering elastic beam 41 and the second steering elastic beam 42 connected to each coupling mass block 21 are symmetrically distributed along the second symmetry axis in the second direction, and the two second steering elastic beams 42 of each steering connection beam group are symmetrically distributed about the first symmetry axis.

[0050] Specifically, the masses of the two driving mass blocks 11 of each single-differential structure are the same and the structures are symmetric, the masses of the two coupling mass blocks 21 are the same and the structures are symmetric, and the masses of the two detection mass blocks 31 are the same and the structures are symmetric. The double-differential single-axis gyroscope with this structure can ensure that the Coriolis forces received by the two coupling mass blocks 21 have good consistency, thereby ensuring that the two detection mass blocks 31 finally receive the same force, guaranteeing the consistency of detection and increasing the detection accuracy.

[0051] As Figure 1As shown, each coupling mass block 21 corresponds to two first steering elastic beams 41 and two second steering elastic beams 42. The two first steering elastic beams 41 and the two second steering elastic beams 42 are respectively arranged at the four corner positions of the coupling mass block 21. In this embodiment, the angle between the first steering elastic beam 41 and the first direction is 30°, and the angle between the second steering elastic beam 42 and the first direction is also 30°. It should be noted that in other embodiments of the present invention, the angles between the first steering elastic beam 41 and the second steering elastic beam 42 and the first direction are not limited to 30° defined in this embodiment, and can also be any angle value between 25° and 35°, or other angle values less than 25° or greater than 35°, as long as the first steering elastic beam 41 and the second steering elastic beam 42 can play a steering role, and it is specifically set according to actual needs, and this embodiment does not make specific limitations.

[0052] As Figure 1 shown, each coupling mass block 21 of this embodiment is provided with four coupling connection straight beams 22. The coupling connection straight beams 22 extend along the second direction. One end of the coupling connection straight beam 22 is connected to the coupling mass block 21, and the other end is connected to the driving mass block 11. The coupling connection straight beam 22 enables the movement of the driving mass block 11 in the Y-axis direction to be synchronously transmitted to the coupling mass block 21, realizing the synchronous movement of the coupling mass block 21 and the driving mass block 11 in the Y-axis direction.

[0053] As Figure 1 and Figure 2 shown, each driving mass block 11 of this embodiment is provided with a driving electrode 12 and a driving detection electrode 13. The driving electrode 12 can drive the driving mass block 11 to move along the second direction, and the driving detection electrode 13 can reflect the movement of the driving mass block 11, so as to facilitate adjusting the movement of the driving mass block 11 driven by the driving electrode 12 and ensure the stability of the movement of the driving mass block 11 in the driving mode.

[0054] As Figure 1 and Figure 3As shown in the figure, the double-differential single-axis gyroscope of this embodiment includes a single-differential elastic beam 8. The single-differential elastic beam 8 can deform along the second direction, and one end of it is connected to the driving mass block 11 of a single-differential structure, and the other end of the single-differential elastic beam 8 is connected to the driving mass block 11 of another single-differential structure. The single-differential elastic beam 8 can associate the two driving mass blocks 11 of the two single-differential structures to ensure that the two driving mass blocks 11 move synchronously along the second direction. The number of single-differential elastic beams 8 in this embodiment is two, and the two driving mass blocks 11 of each single-differential structure correspond to the two single-differential elastic beams 8 one by one. Each single-differential elastic beam 8 is composed of two square frames, and the square frames can deform along the second direction. When the single-differential elastic beam 8 composed of square frames deforms along the second direction, the force is balanced and it is not easy to deflect. It should be noted that in other embodiments of the present invention, the structure of the single-differential elastic beam 8 is not limited to this limitation in this embodiment, and it can also be a serpentine beam or an elastic beam of other structures, which is specifically set according to actual needs.

[0055] As Figure 1 and Figure 4 shown in the figure, each single-differential structure of this embodiment further includes a first anchor point 51 and two anti-vibration elastic beams 6. The first anchor point 51 and the two anti-vibration elastic beams 6 are both located between the two detection mass blocks 31 of the same single-differential structure. The two anti-vibration elastic beams 6 are located on both sides of the first anchor point 51 along the first direction. Each anti-vibration elastic beam 6 includes a central anti-vibration coupling straight beam 61 extending along the first direction and two central anti-vibration coupling elastic beams 62 that can deform along the second direction. The two central anti-vibration coupling straight beams 61 of each single-differential structure are respectively located on both sides of the first anchor point 51 along the first direction. One end of the central anti-vibration coupling straight beam 61 is connected to the first anchor point 51, and the other end of the central anti-vibration coupling straight beam 61 is connected to the two central anti-vibration coupling elastic beams 62 at the same time. Each central anti-vibration coupling elastic beam 62 is connected to the detection mass block 31 to associate the two detection mass blocks 31 of each single-differential structure. When the double-differential single-axis gyroscope is impacted, the movement directions of the two detection mass blocks 31 of each single-differential structure are the same. The central anti-vibration coupling straight beam 61 can inhibit the same-direction movement of the two detection mass blocks 31 and improve the anti-impact performance of the double-differential single-axis gyroscope.

[0056] As Figure 1As shown, each single-differential structure of this embodiment further includes a driving connection beam 7 and a second anchor point 52. The two ends of the driving connection beam 7 are respectively connected to the two driving mass blocks 11 of the same single-differential structure. The driving connection beam 7 includes a driving connection cross beam 71 and a driving deformation beam 72. The driving connection cross beam 71 can rotate around the second anchor point 52 along the third direction, which can not only ensure the consistency of the movement amplitudes of the two driving mass blocks 11 of each single-differential structure, but also suppress the in-phase movement of the two driving mass blocks 11 of the two single-differential structures along the second direction, improving the anti-impact ability of the double-differential single-axis gyroscope. The driving deformation beam 72 of this embodiment can deform along the first direction and its two ends are respectively connected to the driving connection cross beam 71 and the driving mass block 11. Specifically, as Figure 1 shown, each driving connection beam 7 of this embodiment includes four driving deformation beams 72. The two driving deformation beams 72 of each driving connection beam 7 correspond to one driving mass block 11, that is, each driving mass block 11 corresponds to four driving deformation beams 72, and the four driving deformation beams 72 are respectively arranged at the four corner positions of the driving mass block 11.

[0057] As Figure 1 shown, the driving connection beam 7 of this embodiment further includes four driving connection straight beams 73. One end of each driving connection straight beam 73 is connected to the second anchor point 52, and the other end is connected to the driving connection cross beam 71. Two of the driving connection straight beams 73 extend along the first direction and are located on both sides of the second anchor point 52 along the first direction, and the other two driving connection straight beams 73 extend along the second direction and are located on both sides of the second anchor point 52 along the second direction. In the driving mode, the two driving mass blocks 11 move synchronously and in opposite directions along the second direction, the driving connection cross beam 71 rotates with the center of the second anchor point 52 as the rotation point, and the driving deformation beam 72 and the driving connection straight beam 73 deform, further ensuring the consistency of the movement of the two driving mass blocks 11. In addition, this structure of the driving connection beam 7 also endows it with the ability to resist impact.

[0058] As Figure 1 and Figure 7As shown in the figure, the double-differential single-axis gyroscope of this embodiment further includes a third anchor point 53, a fourth anchor point 54, a driving straight beam 14, and a detection elastic beam 33 that can expand and contract along the second direction. Each detection mass block 31 corresponds to two detection elastic beams 33 and two third anchor points 53. The detection elastic beam 33 and the central anti-vibration coupling elastic beam 62 of the anti-vibration elastic beam 6 are respectively located on both sides of the detection mass block 31. The two detection elastic beams 33 and the two central anti-vibration coupling elastic beams 62 corresponding to each detection mass block 31 are respectively located at the four corner positions of the detection mass block 31. One end of each detection elastic beam 33 is fixed on the third anchor point 53, and the other end of each detection elastic beam 33 is connected to the detection mass block 31. Each driving mass block 11 corresponds to two third anchor points 53, two fourth anchor points 54, and four driving straight beams 14. Each driving straight beam 14 corresponds to one third anchor point 53 or one fourth anchor point 54. The two third anchor points 53 and the two fourth anchor points 54 are respectively arranged at the four corner positions of the coupling mass block 21. One end of each second steering elastic beam 42 is connected to a fourth anchor point 54 to realize the fixed connection between the second steering elastic beam 42 and the substrate.

[0059] The detection elastic beam 33 of this embodiment has the same structure as the above-mentioned central anti-vibration coupling elastic beam 62. The detection elastic beam 33 includes two detection connection frames arranged along the second direction and connected at one end. The detection elastic beam 33 with this structure can deform along the second direction to realize the elastic connection between the detection mass block 31 and the substrate along the second direction, ensuring that the detection mass block 31 can move along the second direction. The detection elastic beam 33 can also realize the rigid connection between the detection mass block 31 and the substrate in the first direction. When the double-differential single-axis gyroscope is subjected to vibration impact in the first direction, the detection elastic beam 33 can ensure that its displacement in the first direction is very small, achieving the anti-vibration effect without affecting the detection result. It should be noted that in other embodiments of the present invention, the detection elastic beam 33 may also include one detection connection frame or at least three detection connection frames arranged along the second direction and connected in sequence, as long as it can realize the function of rigid connection between each detection mass block 31 and the substrate in the first direction and elastic connection in the second direction, which is specifically set according to actual needs and is not limited in this embodiment.

[0060] According to the simulation results, as long as the structures, materials, and stiffness of the first steering elastic beam 41, the second steering elastic beam 42, the coupling connection straight beam 22, the detection elastic beam 33, and the anti-vibration elastic beam 6 are designed reasonably, the detection displacement of the detection mass block 31 can be amplified, so that it is greater than the displacement of the coupling mass block 21, further improving the detection sensitivity of the double-differential single-axis gyroscope.

[0061] In this embodiment, the line connecting the centers of mass of the driving mass block 11 and the coupling mass block 21 of each single differential structure is the center-of-mass line, which extends along the X-axis direction and the two detection mass blocks 31 are symmetrically distributed with respect to this center-of-mass line. Specifically, to ensure that the center of mass of the driving mass block 11 satisfies the above conditions, as Figure 2 shown, the driving mass block 11 of this embodiment includes a first driving sub-mass block 111, a second driving sub-mass block 112, a first counterweight mass block 113, a second counterweight mass block 114, and a connecting mass block 115. The first driving sub-mass block 111 and the second driving sub-mass block 112 have equal masses and are respectively located at both ends of the coupling mass block 21 along the second direction. The first counterweight mass block 113 is located on one side of the first driving sub-mass block 111, the second counterweight mass block 114 is located on one side of the second driving sub-mass block 112, and the connecting mass block 115 is located on the other side of the first driving sub-mass block 111 and the second driving sub-mass block 112 and connects the first driving sub-mass block 111 and the second driving sub-mass block 112. The mass of the connecting mass block 115 is equal to the sum of the masses of the first counterweight mass block 113 and the second counterweight mass block 114. It should be noted that in other embodiments of the present invention, the structure of the driving mass block 11 is not limited to the above limitations of this embodiment and can also be other structures, as long as the line connecting the centers of mass of the driving mass block 11 and the coupling mass block 21 of each single differential structure extends along the X-axis direction.

[0062] As Figure 1 and Figure 5 shown, the double-differential single-axis gyroscope of this embodiment further includes a central connecting beam 9. One end of the central connecting beam 9 is connected to the detection mass block 31 of one single differential structure, and the other end of the central connecting beam 9 is connected to the detection mass block 31 of another single differential structure. Specifically, the central connecting beam 9 includes a first central cross beam 91, a central longitudinal beam 92, and a second central cross beam 93. The first central cross beam 91 and the second central cross beam 93 are arranged in a parallel direction and both extend along the first direction. The first central cross beam 91 and the second central cross beam 93 can both deform along the second direction. The first central cross beam 91 is fixed on the detection mass block 31 of one single differential structure, the second central cross beam 93 is fixed on the detection mass block 31 of another single differential structure, and the central longitudinal beam 92 extends along the second direction and its two ends are respectively connected to the first central cross beam 91 and the second central cross beam 93, so that the central connecting beam 9 is formed into an I-beam.

[0063] In the detection mode, when the two detection mass blocks 31 of one single differential structure move towards each other along the second direction, the two detection mass blocks 31 of the other single differential structure move away from each other along the second direction. At this time, the detection mass block 31 where the first central cross beam 91 is located and the detection mass block 31 where the second central cross beam 93 is located move in the same direction.

[0064] As Figure 1 and Figure 6 shown, a detection electrode 32 is provided on each detection mass 31 of this embodiment. The detection electrode 32 includes a detection positive electrode and a detection negative electrode that are asymmetrically distributed. This design can effectively suppress the capacitance change introduced by the rotation of the detection mass 31, increasing the detection sensitivity. The two detection electrodes 32 of the two detection masses 31 of each single differential structure are symmetrically distributed, and this setting plays a role in suppressing the common-mode error, improving the anti-interference ability and detection sensitivity of the gyroscope.

[0065] The first steering elastic beam 41 and the second steering elastic beam 42 of this embodiment are both steering beams, as Figure 6 shown. The steering beam includes a first steering sub-beam 401, a second steering sub-beam 402, and a steering connection beam 403. The first steering sub-beam 401 and the second steering sub-beam 402 are arranged in a parallel direction. The two ends of the steering connection beam 403 are respectively connected to the same end of the first steering sub-beam 401 and the second steering sub-beam 402. The first steering sub-beam 401 and the second steering sub-beam 402 are symmetrically distributed with respect to the central axis of the steering connection beam 403 as the third axis of symmetry. The first steering sub-beam 401 is connected to the substrate or the detection mass 31, and the second steering sub-beam 402 is connected to the coupling mass 21.

[0066] Furthermore, as Figure 6 shown, the first steering sub-beam 401 and the second steering sub-beam 402 of this embodiment are both square frame beams, and the steering connection beam 403 is a U-shaped connection beam. The two ends of the U-shaped connection beam are respectively connected to the same end of the first steering sub-beam 401 and the second steering sub-beam 402. When the steering beam to which the first steering sub-beam 401 belongs is the first steering elastic beam 41, the other end is connected to the detection mass 31. When the steering beam to which the first steering sub-beam 401 belongs is the second steering elastic beam 42, the other end is connected to the substrate; regardless of whether the steering decoupling beam to which the second steering sub-beam 402 belongs is the first steering elastic beam 41 or the second steering elastic beam 42, the other end is connected to the coupling mass 21. It should be noted that in other embodiments of the present invention, the structures of the first steering sub-beam 401 and the second steering sub-beam 402 are not limited to the square frame beam design of this embodiment, and may also be U-shaped beams or elastic beams of other structures, which are specifically set according to actual needs and are not limited in this embodiment.

[0067] Specifically, as Figure 8 and Figure 9As shown, the four driving mass blocks 11 in this embodiment are respectively the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104. The four coupling mass blocks 21 are respectively the first coupling mass block 201, the second coupling mass block 202, the third coupling mass block 203, and the fourth coupling mass block 204. The first driving mass block 101 corresponds to the first coupling mass block 201, the second driving mass block 102 corresponds to the second coupling mass block 202, the third driving mass block 103 corresponds to the third coupling mass block 203, and the fourth driving mass block 104 corresponds to the fourth coupling mass block 204. The four detection mass blocks 31 are respectively the first detection mass block 301, the second detection mass block 302, the third detection mass block 303, and the fourth detection mass block 304. The first detection mass block 301 is respectively connected to the first coupling mass block 201 and the second coupling mass block 202. The second detection mass block 302 is also simultaneously connected to the first coupling mass block 201 and the second coupling mass block 202. The third detection mass block 303 is respectively connected to the third coupling mass block 203 and the fourth coupling mass block 204. The fourth detection mass block 304 is also simultaneously connected to the third coupling mass block 203 and the fourth coupling mass block 204.

[0068] Specifically, when the detection mass block 31 moves, the capacitance change of the detection positive electrode is opposite to the capacitance change of the detection negative electrode. The arrangement directions of the detection positive electrodes and the detection negative electrodes on the two detection mass blocks 31 are opposite. Specifically, Figure 1 in the first detection mass block 301, the left part is the detection positive electrode and the right part is the detection negative electrode. In the second detection mass block 302, the left part is the detection negative electrode and the right part is the detection positive electrode. This arrangement can further improve the detection accuracy.

[0069] In the driving mode, the driving electrode 12 drives the corresponding driving mass block 11 to reciprocate along the second direction, and the coupling mass block 21 reciprocates synchronously therewith. Specifically, as Figure 8As shown, when the first driving mass block 101 and the third driving mass block 103 move away from each other, the second driving mass block 102 and the fourth driving mass block 104 move closer to each other. At the same time, the first coupling mass block 201 and the third coupling mass block 203 move away from each other, and the second coupling mass block 202 and the fourth coupling mass block 204 move closer to each other, causing the driving connection cross beam 71 of the driving connection beam 7 to rotate, and the rotation directions of the two driving connection cross beams 71 are opposite. Similarly, when the first driving mass block 101 and the third driving mass block 103 move closer to each other, the second driving mass block 102 and the fourth driving mass block 104 move away from each other. At the same time, the first coupling mass block 201 and the third coupling mass block 203 move closer to each other, and the second coupling mass block 202 and the fourth coupling mass block 204 move away from each other.

[0070] In the detection mode, when detecting the angular velocity in the third direction, the coupling mass block 21 is subjected to the Coriolis force in the first direction and moves along the first direction, and the detection mass block 31 reciprocates synchronously with the coupling mass block 21 in the second direction, as Figure 9 shown, when the first coupling mass block 201 and the second coupling mass block 202 move away from each other in the first direction, the third coupling mass block 203 and the fourth coupling mass block 204 move closer to each other. At the same time, the first detection mass block 301 and the second detection mass block 302 move closer to each other, and the third detection mass block 303 and the fourth detection mass block 304 move away from each other, and at this time, the movement directions of the second detection mass block 302 and the third detection mass block 303 are the same. Similarly, when the first coupling mass block 201 and the second coupling mass block 202 move closer to each other in the first direction, the third coupling mass block 203 and the fourth coupling mass block 204 move away from each other. At the same time, the first detection mass block 301 and the second detection mass block 302 move away from each other, and the third detection mass block 303 and the fourth detection mass block 304 move closer to each other.

[0071] Note that the above is only the preferred embodiment of the present invention and the applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here, and various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments only. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A dual-differential single-axis gyroscope, characterized in that: A first direction, a second direction and a third direction which are perpendicular to each other are defined, and the dual-differential single-axis gyroscope includes two single differential structures elastically connected along the second direction, and each of the single differential structures includes: Two driving masses, the two driving masses are distributed along the first direction; two coupling mass blocks, each of which is disposed in one of the driving mass blocks and the two are coupled and connected, and when the driving mass block performs reciprocating driving motion along the second direction, the coupling mass block also reciprocates along the second direction; Two detection components, the two detection components are distributed along the second direction and are located between the two coupling mass blocks, each of the detection components includes a detection mass block, each of the detection mass blocks is rigidly connected to the substrate along the first direction and elastically connected along the second direction, and each of the detection mass blocks is connected to the two coupling mass blocks; one of the coupling mass block and the detection mass block is provided with a limiting groove, and the other is provided with a limiting boss matched with the limiting groove, and when the coupling mass block moves a preset displacement relative to the detection mass block along the second direction, the limiting boss abuts against the limiting groove; Two steering connection beam groups, the two steering connection beam groups correspond to the two coupling mass blocks one by one, each of the steering connection beam groups comprises two first steering elastic beams arranged obliquely, one end of each of the first steering elastic beams is connected to the coupling mass block, and the other end is connected to the detection mass block, and the two first steering elastic beams are symmetrically distributed along the first symmetry axis of the first direction; The four driving mass blocks of the two single differential structures are orthogonally symmetrically distributed. When detecting the angular velocity in the third direction, the coupling mass block moves along the first direction due to the Coriolis force along the first direction, and the detection mass block moves along the second direction driven by the steering connecting beam group.

2. The dual differential single-axis gyroscope according to claim 1, characterized in that: Each of the steering connecting beam groups also includes two second steering elastic beams that are arranged obliquely, one end of each of the second steering elastic beams is fixed on the substrate, and the other end is connected to the coupling mass block, the first steering elastic beam and the second steering elastic beam connected to each of the coupling mass blocks are symmetrically distributed along the second symmetry axis of the second direction, and the two second steering elastic beams of each steering connecting beam group are symmetrically distributed about the first symmetry axis.

3. The dual differential single-axis gyroscope according to claim 2, characterized in that: The first steering elastic beam and the second steering elastic beam are both steering beams, and the steering beam includes a first steering sub-beam, a second steering sub-beam and a steering connecting beam. The first steering sub-beam and the second steering sub-beam are arranged in parallel directions, and the two ends of the steering connecting beam are respectively connected to the same end of the first steering sub-beam and the second steering sub-beam. The first steering sub-beam and the second steering sub-beam are symmetrically distributed with the central axis of the steering connecting beam as the third symmetry axis. The first steering sub-beam is connected to the substrate or the detection mass block, and the second steering sub-beam is connected to the coupling mass block.

4. The dual differential single-axis gyroscope according to claim 1, characterized in that: Each of the single differential structures also includes a first anchor point and two anti-vibration elastic beams, the first anchor point and the two anti-vibration elastic beams are both located between the two detection mass blocks of one of the single differential structures, the two anti-vibration elastic beams are located on both sides of the first anchor point along the first direction, each of the anti-vibration elastic beams includes a central anti-vibration coupling straight beam extending along the first direction and two central anti-vibration coupling elastic beams that can be deformed along the second direction, the central anti-vibration coupling straight beams of the two anti-vibration elastic beams are respectively located on both sides of the first anchor point along the first direction, one end of the central anti-vibration coupling straight beam is connected to the first anchor point, and the other end is simultaneously connected to the two central anti-vibration coupling elastic beams, and each of the central anti-vibration coupling elastic beams is connected to the detection mass block.

5. The dual differential single-axis gyroscope according to claim 1, characterized in that: Each of the single differential structures also includes a driving connection beam and a second anchor point, and the two ends of the driving connection beam are respectively connected to the two driving mass blocks of the single differential structure. The driving connection beam includes a driving connection beam and a driving deformation beam. The driving connection beam can rotate along the third direction around the second anchor point, and the driving deformation beam can be deformed along the first direction and its two ends are respectively connected to the driving connection beam and the driving mass block.

6. The dual differential single-axis gyroscope according to claim 1, characterized in that: The dual-differential single-axis gyroscope includes a single-differential elastic beam, which can be deformed along the second direction and has one end connected to the driving mass block of one of the single-differential structures and the other end connected to the driving mass block of another of the single-differential structures.

7. The dual-differential single-axis gyroscope according to claim 1, characterized in that: The dual-differential single-axis gyroscope further includes a central connecting beam, one end of which is connected to the detection mass block of one of the single differential structures, and the other end of which is connected to the detection mass block of another single differential structure.

8. The dual-differential single-axis gyroscope according to claim 7, characterized in that: The central connecting beam includes a first central crossbeam, a central longitudinal beam and a second central crossbeam. The first central crossbeam and the second central crossbeam are arranged in parallel directions and both extend along the first direction. The first central crossbeam and the second central crossbeam can be deformed along the second direction. The first central crossbeam is fixed on the detection mass block of one of the single differential structures, and the second central crossbeam is fixed on the detection mass block of another single differential structure. The central longitudinal beam extends along the second direction and its two ends are respectively connected to the first central crossbeam and the second central beam.

9. The dual-differential single-axis gyroscope according to claim 1, characterized in that: A line connecting the center of mass of the driving mass block and the center of mass of the coupling mass block of each single differential structure is a center of mass line, the center of mass line extends along the first direction and the two detection masses are symmetrically distributed relative to the center of mass line.

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