Self-energized six-dimensional force vibration sensor based on multidirectional tenon-and-mortise structure

Abstract

The invention discloses a self-energized six-dimensional force vibration sensor based on a multidirectional tenon-and-mortise structure. A multidirectional tenon-and-mortise type elastic body, a resistance strain gauge and a multidirectional tenon-and-mortise type base are sequentially arranged from inside to outside. The multidirectional tenon-and-mortise type base is provided with a through hole, and a self-energized and signal detection circuit is distributed in the through hole; the elastic body and the base are interlocked to form a mortise and tenon joint structure; the six resistance strain gauges are arranged in the middle of the six side faces of the elastic body and connected with the integrated circuit board through the base through holes. A multidirectional tenon-and-mortise structure enables the sensor to adapt to the installation environment of each part of a workpiece; the self-energized circuit provides electric energy for the signal detection circuit; unique signal responses are generated under various deformations. The interlocking structure adapts to different installation environments and different stimuli, the environmental adaptability and the anti-interference capacity are enhanced, multi-dimensional decomposition and measurement of force are effectively achieved, meanwhile, self power supply is achieved through mechanical energy conversion, and dependence of an external power source is reduced. The sensor can generate unique signal response under complex working conditions, and the measurement stability and the environmental adaptability are improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of sensors, and in particular relates to a self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure. Background Art

[0002] In recent years, the importance of vibration sensors in the field of industrial fault diagnosis has become increasingly prominent. They are gradually replacing traditional fault detection methods and becoming a new focus of mechanical fault diagnosis research. Vibration sensors can capture force information and vibration signals and are suitable for a variety of scenarios, especially in key industries such as automobile manufacturing, body welding and painting, electronics industry, aerospace, and engine research and development. They show great application potential. However, since traditional vibration sensors can only monitor vibration in a single direction, it is difficult to accurately identify the direction of multi-dimensional forces and torques when faced with complex force stimulation or external interference, which limits their application in multi-axis motion strain detection and bending deformation detection.

[0003] At present, the fault diagnosis system based on vibration signals lacks the ability to identify multi-directional vibration signals and cannot detect different load states. Most vibration signals in complex industrial environments are six-dimensional signals, including x , y and z For multi-dimensional sensors, such as six-dimensional force sensors, six-dimensional force and torque information in three-dimensional space can be sensed simultaneously: along x , y , z The force components of the three coordinate axes and the three torque components around the coordinate axes can simultaneously identify vibration signals in complex vibration environments and provide more detailed data. However, the existing six-dimensional force decoupling methods are mainly divided into two categories: structural decoupling and software decoupling. Structural decoupling has problems such as processing errors, theoretical clearances and friction torques. The processing and assembly are too difficult, and the measurement accuracy is not ideal, resulting in inter-dimensional coupling. Software decoupling has high requirements on the linear relationship of the signal. Even if machine learning algorithms are used in the face of nonlinear variables, the calculations are complex and ill-conditioned matrices are prone to occur, resulting in reduced accuracy.

[0004] The patent document with publication number CN114235230A discloses a flexible six-dimensional force sensor based on a mortise and tenon structure, including a flexible boss, a PTFE film, an FPCB flexible printed circuit board and a flexible base arranged in sequence from top to bottom. Under different external stimuli, the independent deformation mechanism of the interlocking structure enables the sensor to decouple translational forces and torsional moments in the x, y and z directions, and is applied to robot fingertips and wearable medical devices. However, the sensor is structurally unable to adapt to complex industrial environments with multiple environmental factors and multiple installation methods. It is difficult to ensure accurate measurement under harsh conditions such as extreme temperature, strong electromagnetic interference, and high humidity. In the fields of automated production lines, chemical monitoring, and environmental monitoring, it poses severe challenges to the stability, installation location and method, and power supply requirements of the sensor. Summary of the invention

[0005] In order to solve the problems in the background technology, the present invention proposes a self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure, which effectively overcomes the limitations of traditional single-dimensional vibration sensors in industrial environments. The vibration sensor has a high degree of accuracy and can accurately determine the direction of stress changes and realize vibration signal monitoring. With its proprietary mortise and tenon interlocking structure and the deformation transmission ability between components, the present invention can detect the stress in three spatial dimensions ( x , y , z In addition, a notable feature of the present invention is that the MEMS process is used in the six-dimensional force vibration sensor to achieve the integration of self-power supply and signal measurement. This process and the mortise and tenon structure used enhance the adaptability of the vibration sensor in complex industrial environments and break through the limitations of the installation environment.

[0006] In order to achieve the above purpose and solve the technical problem, the technical solution adopted by the present invention is as follows:

[0007] The present invention provides a self-powered six-dimensional force vibration sensor for fault detection based on vibration signals, which is characterized in that the vibration sensor is composed of a multi-directional mortise and tenon type elastic body, a resistance strain gauge and a mortise and tenon type base.

[0008] The multi-directional mortise and tenon elastomer is a three-dimensional multi-directional mortise and tenon structure, with eight corners arranged as rectangular convex bodies, and six faces forming a cross structure adapted to the mortise and tenon base, providing a variety of interlocking methods for packaging sensors using the mortise and tenon base, forming a multi-directional mortise and tenon structure.

[0009] The resistance strain gauge is an element used to measure strain. There are six resistance strain gauges respectively pasted on the middle parts of the six surfaces of the mortise and tenon type elastic body to obtain three-dimensional force and torque information.

[0010] The mortise and tenon type base is a three-dimensional multi-directional mortise and tenon structure, characterized in that a self-powered integrated circuit or a signal detection integrated circuit containing MEMS process elements is distributed on the surface, wherein the self-powered integrated circuit containing MEMS process elements has the function of converting mechanical energy into electrical energy, and the signal detection integrated circuit has the function of signal amplification and measurement output.

[0011] As a further technical solution, the present invention provides a self-powered six-dimensional force vibration sensor for fault detection based on vibration signals, which is also characterized in that the multi-directional mortise and tenon type elastomer adopts flexible silicone material, a more durable elastic material, a reinforcing agent is added to the silicone, and it is demolded after heating and curing.

[0012] As a further technical solution, the present invention provides a self-powered six-dimensional force vibration sensor for fault detection based on vibration signals, which is also characterized in that: the mortise and tenon type base is distributed with a self-powered integrated circuit or a signal detection integrated circuit containing MEMS process elements, the main body is made of silicone material, and the circuit made by FPC soft board technology is pasted on the surface.

[0013] The outer surface of the mortise and tenon type base used in the present invention can be adapted to the surface of the workpiece in different installation environments.

[0014] As a further technical solution, the present invention provides a self-powered six-dimensional force vibration sensor for fault detection based on vibration signals, which is also characterized in that: the MEMS self-powered integrated circuit includes an acceleration sensor that can sense external vibration signals, converts the sensed signals into electrical signals, and then processes and transmits them through electronic circuits to realize the collection of mechanical energy.

[0015] As a further technical solution, the present invention provides a self-powered six-dimensional force vibration sensor for fault detection based on vibration signals, which is also characterized in that the multi-directional mortise and tenon base is divided into two types, a mortise and tenon base containing only through holes, and a mortise and tenon base containing through holes and distributed integrated circuits.

[0016] Through holes provide a pathway for connection between strain gauges, components, and circuits.

[0017] The mortise and tenon type base having only through holes plays a supporting role when the sensor is packaged.

[0018] The mortise and tenon type base having through holes and distributed integrated circuits not only provides support when the bases are interlocked during sensor packaging, but also provides circuit support for vibration signal collection.

[0019] As a further technical solution, the present invention provides a self-powered six-dimensional force vibration sensor for fault detection based on vibration signals, which is also characterized in that each resistance strain gauge is pasted in the middle position of the six sides of the multi-directional mortise and tenon elastomer, and two metal electrodes are plated at the corresponding positions of each resistance strain gauge, and all electrodes are connected to the integrated circuit through a wire.

[0020] The signal generated by the deformation of the resistance strain gauge is collected by using the Wheatstone bridge method, using three pairs of unbalanced half-bridge circuits, in which three dimensions ( x , y , z ) are used as two resistor arms of a set of unbalanced half-bridge Wheatstone bridges, and the other two resistors are precision resistors.

[0021] As a further technical solution, the voltage signal generated by the resistance strain gauge enters the signal detection integrated circuit and is output after being filtered by hardware signal and subjected to noise suppression mechanism.

[0022] The six-dimensional forces are specifically: a three-dimensional coordinate system is constructed with the center of the mortise and tenon elastic body as the origin, and the six-dimensional forces are Fx , F , F , Mx , My , Mz , Fx , F They are mortise and tenon type elastic bodies. x Axis and y The lateral force in the axial direction is F The top surface of the mortise and tenon type elastic body is z The positive pressure in the axial direction is My , Mz Tenon-and-mortise elastic body x Axis and y The lateral torque force in the axial direction is Mx For the mortise and tenon type elastic body z The longitudinal torque force in the axial direction.

[0023] The self-powered six-dimensional force vibration sensor based on the multi-dimensional mortise and tenon structure is applied to fault detection in complex industrial sites, such as wind turbine fault detection, hydropower station turbine fault detection, aerospace engine fault detection and other fault diagnosis systems in complex environments.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0025] 1. The multi-directional mortise and tenon structure adopted by the present invention realizes the six-dimensional force ( Fx , F , F , Mx , My , Mz )’s decoupling measurement, the different modules of the sensor (mortise and tenon elastomer, mortise and tenon base) are designed as independently detachable units, which improves the flexibility and scalability of the system and facilitates the assembly and maintenance of the sensor.

[0026] 2. When the six-dimensional force vibration sensor described in the present invention is in use, due to the strong adaptability and small size of the multi-directional mortise and tenon base, all six sides can be attached to the object to be measured. The multi-directional mortise and tenon base can adopt different forms to adapt to different installation surfaces, making full use of the mortise and tenon structure's characteristic of eliminating inter-dimensional coupling. Only six resistance strain gauges pasted on the elastomer are needed to sense the vibration aging of the object to be measured, realizing the detection of three-dimensional torque information and three-dimensional force information, thereby obtaining the vibration signal of the object to be measured, and then monitoring the operating health status of the object to be measured.

[0027] 3. The overall shape of the six-dimensional force vibration sensor of the present invention is designed as a square body. Its structural symmetry makes the mechanical properties uniform, and the deformation is consistent when subjected to multi-dimensional forces, which improves the measurement accuracy and reliability. It is easy to install and fix, simplifies the installation process, ensures a firm and stable connection, and reduces installation errors and damage risks. The square body is conducive to signal processing and decoupling, each measurement channel has little interference, and accurately measures independent force and torque components in each dimension, providing rich and accurate data for vibration analysis. Especially in vibration detection, it can fully capture multi-dimensional vibration information, including linear and rotational vibrations, and because of its structural stability and symmetry, the deformation response of internal components is uniform, which improves vibration detection accuracy and reduces measurement errors. The square body structure enhances anti-interference ability, suppresses interference forces in complex environments, accurately detects target vibration signals, and improves detection reliability and stability.

[0028] 4. The self-powered six-dimensional force vibration sensor based on the multi-directional mortise and tenon structure described in the present invention adopts the MEMS process to manufacture the self-powered system, so that it does not rely on external power supply, can work in complex industrial environments, is suitable for complex industrial fault diagnosis, and can be applied to the health monitoring of large-scale mechanical equipment, vehicle-mounted health monitoring, gearbox fault diagnosis and other complex environments. Intelligent industrial equipment operation health detection. For example, the sensor is attached to multiple positions of a certain component of a large-scale mechanical equipment. When the equipment is in operation, the health index of the equipment is judged by observing the vibration signal detected by the sensor, and the location and type of the fault are judged, such as gear breakage, workpiece wear and aging, or component position deviation, etc. The six-dimensional force vibration sensor at each node will detect the force and torque generated by the decoupled vibration in three directions. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the explosion of the six-dimensional force vibration sensor of the present invention.

[0030] Figure 2 It is a schematic diagram of the explosion of the multi-directional mortise and tenon type elastic body of the six-dimensional force vibration sensor of the present invention.

[0031] Figure 3 It is a top view of the mortise and tenon type base of the six-dimensional force vibration sensor of the present invention.

[0032] Figure 4 It is a left view of the mortise and tenon type base of the six-dimensional force vibration sensor of the present invention.

[0033] Figure 5 It is a front view of the mortise and tenon type base of the six-dimensional force vibration sensor of the present invention.

[0034] Figure 6 It is a schematic diagram of the resistance strain gauges pasted on the six sides of the multi-directional mortise and tenon type elastic body in the present invention.

[0035] Figure 7 This is a schematic diagram of the vibration signal detection circuit of the six-dimensional force vibration sensor of the present invention.

[0036] Figure 8 This is a schematic diagram of the unbalanced Wheatstone bridge of the vibration signal detection circuit in the present invention.

[0037] Fig. 9 This is a schematic diagram of the strain gauge resistance change detection circuit in the present invention.

[0038] Fig.10 This is the strain gauge resistance change detection circuit PCB in the present invention.

[0039] Fig.11 The figure is a schematic diagram of the position distribution of six resistance strain gauges pasted on the multi-directional mortise and tenon type elastic body in the present invention.

[0040] Fig.12 It is a schematic diagram of the overall structure of the six-dimensional force vibration sensor of the present invention.

[0041] Fig.13 This is a schematic diagram of the internal structure of the six-dimensional force vibration sensor of the present invention.

[0042] Fig.14 This is the experimental data of the six-dimensional force vibration sensor of the present invention. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all embodiments obtained by ordinary technicians in this field without making creative work belong to the protection scope of the present application.

[0044] The embodiments of the present invention are further described in detail below with reference to the accompanying drawings.

[0045] See also Figure 1 and Figure 4 The embodiment of the present invention includes a multi-directional mortise and tenon type elastic body 1, a resistance strain gauge 2, and a mortise and tenon type base 3, which are interlocked from the inside to the outside to form a vibration sensor.

[0046] The multi-directional mortise and tenon type elastic body 1 and the mortise and tenon type base 3 are designed based on the inspiration of the mortise and tenon structure of traditional Chinese ancient buildings, and the concave and convex structures of the elastic body and the base are interlocked.

[0047] The elastomer and base with mortise and tenon structure are cast and demolded in a customized mold using silicone material. They are soft throughout. When subjected to external force, the resistance strain gauge 2 deforms and then exerts a feedback force. A resistance strain gauge 2 is pasted on the middle part of each of the six sides of the multi-directional mortise and tenon elastomer 1.

[0048] See also Figure 2 The multi-directional tenon-and-mortise elastic body 1 comprises a six-sided cross structure composed of rectangular convex bodies and six resistance strain gauges 2. In order to make the six-dimensional force reflect on the middle rectangular elastic body and deform evenly, the middle elastic body and the rectangular elastic bodies at the eight corners are as square as possible; the distance between each adjacent two elastic bodies in the rectangular elastic bodies at the eight corners is equal; the distance between the strain gauge 2 attached to each face of the middle elastic body and each corner elastic body is equal.

[0049] The mortise and tenon type base 3 comprises a protruding tenon structure and a concave mortise structure.

[0050] See also Figure 3 , Figure 4 and Figure 5 The upper surface of the multi-directional mortise and tenon base 3 is a convex cross structure, a concave groove, and a mortise and tenon interlocking structure from the inside to the outside.

[0051] The convex cross structure and concave groove in the center of the mortise and tenon base 3 precisely match the six-sided cross structure of the multi-directional mortise and tenon elastomer 1, together forming a composite mortise and tenon structure, which not only enhances the stability of the base, but also provides additional support force to ensure the reliability of the structure.

[0052] The surrounding concave-convex interlocking structure enables the mortise and tenon type bases 3 to form mortise and tenon structures with each other. When the workpiece is packaged, the six-sided mortise and tenon type bases 3 can fit together to make the whole more stable.

[0053] A through hole 4 is designed on the middle cross beam of the mortise and tenon type base 3 to provide a wire connection space for the sensing electrical signal generated by the resistance strain gauge 2.

[0054] The mortise and tenon structure used in the present invention is not limited to the rectangular mortise and tenon structure. The mortise and tenon structure here has two functions: one is to make the force applied to the outer surface of the six-dimensional force vibration sensor evenly fed back to the middle multi-directional mortise and tenon elastic body 1, and then the resistance strain gauge 2 is deformed to obtain forces and moments in three directions; the second is to make the sensor base more stable, which helps to reduce the stress inside each part and reduce the impact on the accuracy of six-dimensional force measurement.

[0055] See also Figure 6 The resistance strain gauge 2 is a commercially available sensing unit, which is composed of a sensitive grid 5, an insulating substrate 6 and an electrode 7. When in use, the solvent after vacuuming is mixed by stirring PDMS and a curing agent (10:1) as an adhesive, and the six sensing units are respectively adhered to the middle parts of the six surfaces of the middle elastic body of the mortise and tenon type elastic body 3. The sensitive grid 5 is designed to be serpentine and can accumulate deformation. At the same time, in order to accurately reflect the deformation, the sensitive grid 5 of the resistance strain gauge 2 should be perpendicular to the surface of the workpiece. For example, refer to Fig. 9 ,lie in XY When the flat mortise and tenon base is attached to the workpiece surface, the sensitive grids of the resistance strain gauges R1, R2, R3, and R4 are Z Axis in the same direction.

[0056] When the six-dimensional force vibration sensor is in use, due to its excellent characteristics of small size (10mm×10mm×10mm), light weight, portability and high resolution, any surface can be attached to the object to be detected. When the sensor object is pressed or twisted from the outside, the six piezoresistive sensing units located in the sensor will receive stimulation, causing the sensor to produce a resistance change.

[0057] See also Figure 1 The multi-directional mortise and tenon type elastomer 1 is processed according to the overall special mortise and tenon structure, and its purpose is to facilitate the monitoring of the deformation of the six resistance strain gauges 2. At the same time, the special structure of the mortise and tenon is used to decouple the six-dimensional force, so that the vibration sensor can maintain the stability of the structure while undergoing a certain deformation in any environment and any placement position, breaking the previous planar design thinking and single base thinking, and improving the assembly method of the vibration sensor is one of the cores of the present invention.

[0058] The six mortise and tenon type bases 3 can all be used as bases close to the surface of the workpiece. When the workpiece vibrates or is subjected to external force, the other five mortise and tenon type bases 3 will vibrate at a certain frequency. When one of the bases is fixed, the present invention can detect the six-dimensional force in space by decoupling the four deformations ( Fx , F , F , Mx , My , Mz) of external stimuli: axial pressure, axial tension, clockwise torque perpendicular to the axial direction, and counterclockwise torque perpendicular to the axial direction.

[0059] In the example of the present invention, the vibration sensor uses six strain gauges to detect six-dimensional force. Compared with the currently common six-dimensional force sensors, the number of strain gauges used is reduced, the six-dimensional force detection method is simplified, and reducing production costs is one of the core of the present invention.

[0060] As a further technical solution, the present invention integrates the circuit with the mortise and tenon type base 3. The circuit includes a signal detection circuit and a self-powered integrated circuit based on MEMS process elements. This design breaks the limitations of environmental conditions and enables the six-dimensional force vibration sensor to realize vibration signal detection in a variety of complex industrial environments and under passive conditions. The great environmental tolerance of the vibration sensor is one of the core of the present invention.

[0061] See also Figure 7 ,With the operation of the mechanical equipment, the workpiece with the six-dimensional force vibration sensor attached vibrates regularly, causing the mortise and tenon base 3 of the six-dimensional force vibration sensor to deform, and then the deformation is reflected to the multi-directional mortise and tenon elastic body 1. Since the elastic body is a single body, the six resistance strain gauges 2 undergo different deformations due to different attachment positions, and their resistance changes ( ΔR ) is also different, using a Wheatstone bridge in an unbalanced state to convert the resistance change of a pair of resistance strain gauges 2 on each axis into a voltage change ( ΔU ), and because the change signal is relatively weak, additional filters and amplifiers are used to suppress noise and amplify the signal, and the obtained f ( ΔU ), and then display and record the detected vibration signal.

[0062] See also Figure 8 and Fig. 9 , use STM32 as the main control chip to build the control circuit, use HX711 as the A / D conversion chip, where R4 and R5 refer to X The two resistance strain gauges 2 of the axis form a Wheatstone bridge with R9 and R10. R13 and R14 are Y The two resistance strain gauges 2 of the axis form a Wheatstone bridge with R17 and R18. R19 and R20 are Z The two resistive strain gauges 2 of the axis form a Wheatstone bridge with R21 and R22.

[0063] As a further technical solution, see Fig.10 The multi-directional mortise and tenon elastic body 1 has three pairs of parallel surfaces, corresponding to X axis, Y axis, ZAxles each have a pair of resistance strain gauges 2 pasted on parallel surfaces, and each pair of resistance strain gauges 2 and two precision resistors form a set of unbalanced half-bridge Wheatstone bridge circuits.

[0064] There are two ways to build an unbalanced half-bridge Wheatstone bridge: R x1 and R x3 For electricity Strain gauge 2, R x2 and R x4 is a precision resistor; the other is a resistor in each group of Wheatstone bridge R x1 and R x2 is the resistance strain gauge, R x3 and R x4 It is a precision resistor.

[0065] There are three sets of unbalanced half-bridge Wheatstone bridge circuits, according to the balance condition When the vibration sensor is deformed, the resistance strain gauge 2 is also deformed. The resistance of the strain gauge is equal to the bridge balance. R x Changes to R x +ΔR , causing the voltage across the resistor to change. By observing the voltage e The vibration of the workpiece can be obtained by the change of the vibration, and then the health status of the equipment can be monitored.

[0066] As a further technical solution, the resistance change of the resistance strain gauge 2 conforms to the following formula: , is the strain gauge coefficient, which reflects the sensitivity of the strain gauge resistance to shape changes, and ε is the absolute value of strain. By detecting the change in strain gauge resistance and combining this formula, the deformation of the strain gauge can be accurately calculated.

[0067] According to Kirchhoff's current law (KCL) and Kirchhoff's voltage law (KVL), combined with the unbalanced Wheatstone bridge, there are two ways to build the bridge. The first one is R x1 and R x3 is the resistance strain gauge, R x2 and R x4 is a precision resistor, ; The second type, namely Rx1 and R x2 is the resistance strain gauge, R x3 and R x4 is a precision resistor, , the voltage signal here is e The voltage signal is the final required signal. By collecting and displaying this signal, it can reflect the vibration of the workpiece and thus monitor the health of the workpiece.

[0068] See also Fig.13 When applying six-dimensional calibration force to the six-dimensional force vibration sensor for calibration, there are six calibration situations, which are distinguished by the base attached to the workpiece. R 6 The corresponding substrate and workpiece bonding are used as an example to calibrate the sensor with longitudinal force, lateral force, longitudinal torque and lateral torque. Fig. 9 When a six-dimensional calibration force is applied to the six-dimensional force vibration sensor for calibration, there are six calibration situations, namely, the substrate adhered to the workpiece is used as the distinction. Taking the bonding of the corresponding substrate and the workpiece as an example, the sensor is calibrated with longitudinal force, lateral force, longitudinal torque and lateral torque respectively.

[0069] When using longitudinal force calibration, that is, the Z The base of the shaft applies pressure, R 1 , R 2 , R 3 , R 4 The four pressure sensing units are deformed by force, and the data acquisition device recognizes the change in voltage signal. When the data acquisition device cannot recognize the change in voltage signal, the calibration stops. When using lateral force calibration, that is, the pressure sensor is perpendicular to the X axis( Y axis) to apply pressure to the base, R 2 , R 4 , R 5 , R 6 ( R 1 , R 3 , R 5 , R 6 ) The four pressure sensing units are deformed by force, and the data acquisition device recognizes the change in voltage signal. When the data acquisition device cannot recognize the change in voltage signal, the calibration stops; longitudinal torque ( Mz The calibration principle of the calibrator is to generate torque through the force arm. R 1 , R 2 , R 3 , R 4 The four pressure sensing units will produce data signal changes when they are stressed. When the data collector cannot recognize the voltage signal changes, it stops. M x or M y ) is calibrated in a similar way as above, using the Z-axis torque calibration device to calibrate the longitudinal torque of the sensor M z , when rotation is applied to the sensor, R 2 , R 4 , R 5 ( R 1 , R 3 , R 5 ) The three sensing units will produce data signal changes. When the data logger cannot identify the voltage signal changes, the calibration stops.

[0070] Two methods can be used for force detection of six-dimensional force vibration sensors: the first is to implement the static calibration algorithm of the orthogonal parallel six-dimensional force vibration sensor to calculate the six-dimensional calibration force and the corresponding calibration voltage signal, thereby establishing a mapping relationship matrix between the force and the voltage signal. Using this matrix, combined with the voltage signal output by the sensor in actual detection, the force acting on the six-dimensional force vibration sensor can be accurately calculated; the second is to calibrate the six-dimensional force vibration sensor multiple times, collect the applied six-dimensional force and the corresponding calibration voltage signal, form a sample set, and divide it into a training set and a test set. These sample sets are used to train a deep neural network. After the training is completed, the voltage signal output by the vibration sensor during actual work is input into the trained deep neural network. The network will predict the actual force borne by the six-dimensional force vibration sensor, thereby playing a role in fault prediction.

[0071] See also Fig.12 , is the relationship curve between the three-dimensional deformation variables and the external force components when the six-dimensional force vibration sensor is subjected to external force: X Axial displacement change S x " is the sensor in x The deformation of the dimension is related to the xThe correspondence of forces in direction; Y Axial displacement change S y " is the sensor in y The deformation of the dimension is related to the y The correspondence of forces in direction; Z Axial displacement change S z " is the sensor in z The deformation of the dimension is related to the z The correspondence of forces in direction; X Torque variation in the axial direction M x " is the sensor in x The change of the torque in the dimension is related to the x The correspondence of forces in direction; Y Torque variation in the axial direction M y " is the sensor in y The change of the torque in the dimension is related to the y The correspondence of forces in direction; Z Torque variation in the axial direction M z " is the sensor in z The change of the torque in the dimension is related to the z The correspondence of forces in direction.

[0072] To analyze the force loading of the six-dimensional force vibration sensor of the present invention, a coordinate system is first defined. The center of the elastic body inside the six-dimensional force vibration sensor is used as the force measuring body. Combined with the actual pasting situation of the six-dimensional force vibration sensor and the workpiece, the substrate pasted with the workpiece is called the lower substrate. The coordinate axis is established with the center of the six-dimensional force vibration sensor ( X axis, Y axis, Z axis), the three coordinate axes are perpendicular to the base, and the origin of the coordinate system is built at the center of the six-dimensional force vibration sensor.

[0073] The sensor unit attached to the multi-directional mortise and tenon elastic body 1 is analyzed to Fig.11 The coordinate system is established as shown in the figure. The vibration sensor is extended Z When external pressure is applied in the axial direction, it is equivalent to squeezing the entire sensor from top to bottom, and the multi-directional mortise and tenon elastic body 1 changes, and the four piezoresistive sensing units ( R 1 , R 2 , R 3 , R 4) resistances change, the output voltages of the two sets of unbalanced Wheatstone bridge circuits change, and the corresponding signal values ​​are output; the six-dimensional force vibration sensor is subjected to horizontal tangential ( X Axis or Y When the external force is applied to the axis, four piezoresistive sensing units receive signals according to the load direction. X When the horizontal force of the axis is applied, there will be four corresponding piezoresistive sensing units ( R 2 , R 4 , R 5 , R 6 ) produces a signal change; when the vibration sensor is Y When the horizontal force of the axis is applied, there are also four piezoresistive sensing units ( R 1 , R 3 , R 5 , R 6 ) produces a signal change.

[0074] The six-dimensional force vibration sensor is subjected to external torsional force ( M x , M y , M z ), the deformation under torque will be more complicated than the deformation under force. R 6 The corresponding mortise and tenon type base 3 is pasted with the workpiece as an example, along X , Y , Z The torque of the three axes will cause the base to rotate. Z When the shaft is twisted in the positive direction, R 6 The corresponding mortise and tenon base remains stable and the vibration sensor is Z The shaft rotates, and the extrusion deformation caused by the rotation stimulates the piezoresistive sensor unit to output a changing signal value to the outside. When torque is applied, R 1 , R 2 , R 3 , R 4 The four piezoresistive sensing units generate signals; when the sensor is subjected to X axis( Y When the vibration sensor is subjected to a tangential torque (axial), the deformation is similar to that under a tangential force.R 2 , R 4 , R 5 ( R 1 , R 3 , R 5 ) Three piezoresistive sensing units generate signals.

[0075] As a further technical solution, the energy conversion integrated circuit adopted in the present invention utilizes MEMS technology to realize the collection of vibration mechanical energy, and utilizes MEMS technology to accurately control the mechanical structure at the micron or even nanometer level, thereby optimizing the crystal structure of the piezoelectric material, enhancing the efficiency of internal charge movement when subjected to mechanical stress, and thereby improving the generation of electric potential, so that the energy conversion circuit can not only extract power from a wider range of vibration frequencies, but also realize accurate control and conversion of piezoelectric energy, providing a more efficient and reliable energy solution for powering small electronic devices or large power grids.

[0076] Vibration energy harvesters are designed and manufactured using MEMS technology. The most common types are piezoelectric and electromagnetic. Piezoelectric vibration energy harvesters generate electric charges through piezoelectric materials under mechanical stress and convert vibration energy into electrical energy. Electromagnetic vibration energy harvesters generate electrical energy through the relative movement of the magnet and coil caused by vibration using the principle of electromagnetic induction.

[0077] The collected weak electrical energy is converted into direct current through a rectifier circuit, and then the voltage is increased through a boost circuit to meet the power supply needs of the integrated circuit. At the same time, an efficient energy management circuit is used to achieve precise control and conversion of energy and improve energy utilization efficiency.

[0078] Through the application of MEMS technology, the performance of the energy conversion circuit has been significantly improved, and the efficient use of piezoelectric energy has been achieved. By integrating the MEMS vibration energy harvester inside the sensor, the environmental vibration energy is converted into electrical energy. After being processed by the energy conversion circuit, a stable power supply is provided for the electronic circuit of the sensor. Therefore, the vibration sensor does not require an external battery to power it and can work stably for a long time in a vibration environment. It is suitable for occasions where it is difficult to replace the battery or long-term monitoring is required, such as industrial equipment monitoring, bridge health monitoring, etc. This is one of the core of the present invention.

[0079] As a further technical solution, the piezoelectric material used in the resistance strain gauge 2 and the durability based on the MEMS process enable it to withstand harsh environmental conditions and be suitable for use in remote or inaccessible places. The processing technology of the six-dimensional force vibration sensor is improved and the processing cost is reduced. The mortise and tenon type six-dimensional force vibration sensor can be applied to industrial-grade detection equipment such as mechanical health monitoring, engine gearbox health monitoring, and other complex environmental detection stimulation occasions according to its characteristics.

[0080] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure, characterized in that: The six-dimensional force vibration sensor is formed by connecting a multi-directional mortise and tenon type elastic body (1), a resistance strain gauge (2), and a multi-directional mortise and tenon type base (3) from the inside to the outside according to the mortise and tenon structure; The multi-directional mortise and tenon type elastic body (1) is a three-dimensional multi-directional mortise and tenon structure, with eight corners being arranged as rectangular convex bodies, and six sides forming a cross structure adapted to the mortise and tenon type base (3), providing a variety of interlocking modes for packaging sensors using the mortise and tenon type base (3), thereby forming a multi-directional mortise and tenon structure; The resistance strain gauge (2) is an element used to measure strain, and a total of six resistance strain gauges (2) are respectively attached to the middle parts of six surfaces of the mortise and tenon type elastic body (1) to obtain three-dimensional force and torque information; The mortise and tenon type base (3) is a three-dimensional multi-directional mortise and tenon structure, and a self-powered integrated circuit or a signal detection integrated circuit containing MEMS process elements is distributed on the surface, wherein the self-powered integrated circuit containing MEMS process elements has the function of converting mechanical energy into electrical energy, and the signal detection integrated circuit has the function of signal amplification and measurement output.

2. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 1, characterized in that: The multi-directional mortise and tenon type elastic body (1) is made of alloy steel, and its overall outer contour is a cube.

3. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 1, characterized in that: The mortise and tenon type elastic body (1) and the resistance strain gauge (2) form a force sensing elastic body, and the force sensing elastic body and the mortise and tenon type base (3) are fixed by an interlocking manner.

4. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 1, characterized in that: The mortise and tenon type bases (3) all contain through holes (4) and are distributed with integrated circuits; any mortise and tenon type base (3) can be adapted to the surface of a workpiece and can adopt different forms to adapt to different installation surfaces.

5. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 4, characterized in that: The integrated circuit includes a MEMS self-powered integrated circuit and a signal detection integrated circuit.

6. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 5, characterized in that: The MEMS self-powered integrated circuit contains acceleration sensor elements and peripheral circuits that can sense external vibration signals using MEMS technology. The sensed signals are converted into electrical signals, which are then processed and transmitted through electronic circuits to achieve the collection of mechanical energy.

7. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 5, characterized in that: Each resistance strain gauge (2) in the signal detection integrated circuit is plated with two electrodes, and is connected to the signal detection integrated circuit via two lead wires through a mortise and tenon type base (3) with through holes.

8. A self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 7, characterized in that: The signal detection integrated circuit uses a Wheatstone bridge to detect the signal. The Wheatstone bridge used is an unbalanced half-bridge type. The parallel resistance strain gauges (2) on each dimension of the mortise and tenon type elastic body surface serve as the two arms of the Wheatstone bridge.

9. The self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 1, characterized in that: A three-dimensional coordinate system is constructed with the center of the mortise and tenon base (3) attached to the surface of the workpiece as the origin. The six-dimensional forces are Fx , F , F , Mx , My , Mz ,in Fx , F The vibration sensors are respectively x Axis and y The lateral force in the axial direction is F Vibration sensor z The positive pressure in the axial direction is My , Mz The vibration sensors are respectively x Axis and y The lateral torque force in the axial direction is Mx Vibration sensor z The longitudinal torque force in the axial direction.

10. The self-powered six-dimensional force vibration sensor based on a multi-directional mortise and tenon structure according to claim 1, characterized in that: The six-dimensional force vibration sensor is applied to industrial machinery engines, wind power generation gearboxes, and aerospace engines.

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