Central wavelength surface measuring device and method

Abstract

The present invention relates to an apparatus and a method for measuring a central wavelength plane, the apparatus comprising: a measured luminophor for emitting measured light; an optical filter switching unit which switches the first optical filter and the second optical filter so that the measured light respectively passes through the first optical filter and the second optical filter; the light sensing device detects the first light penetrating through the first light filter to obtain a first measurement value and detects the second light penetrating through the second light filter to obtain a second measurement value, the first light filter and the light sensing device form a first optical system, the second light filter and the light sensing device form a second optical system, and in the wavelength range of measured light, the first measurement value is obtained by detecting the first light penetrating through the first light filter, and the second measurement value is obtained by detecting the second light penetrating through the second light filter. The ratio of the spectral characteristic curves of the first optical system and the second optical system does not have a repetition value, and the central wavelength of the measured light is obtained through the ratio of the first measured value and the second measured value. As a result, the center wavelength of the light to be measured can be measured by a simple method.

Description

Technical Field

[0001] The present invention relates to the field of wavelength measurement, and in particular to a central wavelength plane measurement device and method. Background Art

[0002] Wavelength is one of the important characteristic indicators of display devices and light-emitting devices, and directly affects the optical quality of the product. It is known that there is a method of using a spectroscopic component, such as a spectroscope or a grating, to split the light and measure the wavelength based on the interference principle. However, due to the small field of view, this method has a slow speed in actual wavelength measurement and is a single-point measurement method.

[0003] Industries such as semiconductors, LEDs, flat panel displays, and photovoltaics often want to measure wavelengths quickly and over a large area in actual production. Therefore, it is hoped that the wavelength measurement method has a larger field of view and can measure one area at a time. This method is called the surface measurement method.

[0004] Patent document 1 invented a wavelength estimation method for a light source, which divides the measured light at a specific position into a long wavelength segment and a short wavelength segment, measures the brightness of the long wavelength segment and the short wavelength segment respectively, and estimates the central wavelength of the measured light based on the ratio of the brightness of the two.

[0005] Patent Document 2 proposes using a dichroic mirror to separate the measured light into a long wavelength band and a short wavelength band, and deriving color spot information of the light-emitting element based on the fluorescence images of the long wavelength band and the short wavelength band.

[0006] Prior art

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2015-10834

[0008] Patent Document 2: Chinese Patent Application No. 202080024982 Summary of the invention

[0009] Technical problem to be solved by the invention

[0010] However, in the above-mentioned prior art, in order to measure information such as the wavelength of the measured light, a high-pass and low-pass filter with a steep characteristic curve is used, or a linear dichroic mirror is used to divide the measured light into two beams and then use the results of the two measurements to infer the wavelength. Because the spectral characteristic curve of the current detector (photosensitive device) itself is not linear (usually a curve that is convex in the middle and concave on both sides), it is impossible to guarantee that the relationship between the wavelength of the measured light and the ratio of the measurement results of the two measurement systems is unique, resulting in poor wavelength measurement accuracy and applicability of the above-mentioned prior art. Even if the spectral characteristic curve of the detector itself is linear, after coupling with the filter or dichroic mirror, it may still be impossible to guarantee that the relationship between the wavelength of the measured light and the ratio of the measurement results of the two measurement systems is unique. For this reason, it is necessary to design the filter and the detector as a whole to ensure that the relationship between the wavelength of the measured light and the ratio of the measurement results of the two measurement systems is unique.

[0011] The present invention is made based on the above technical problems, and its purpose is to provide a central wavelength plane measurement device and method, which uses two optical systems whose ratios of overall spectral characteristic curves have no repeated values ​​to measure the central wavelength of the measured light.

[0012] Means for solving technical problems

[0013] A central wavelength plane measurement device according to one aspect of the present invention comprises: a light emitting body to be measured, which emits the light to be measured; a filter switching unit, which switches a first filter and a second filter, thereby allowing the light to be measured to pass through the first filter and the second filter respectively; a photosensitive device, which detects the first light passing through the first filter to obtain a first measurement value, and detects the second light passing through the second filter to obtain a second measurement value, wherein the first filter and the photosensitive device constitute a first optical system, and the second filter and the photosensitive device constitute a second optical system, and within the wavelength range of the light to be measured, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated values, and the central wavelength of the light to be measured is obtained by the ratio of the first measurement value to the second measurement value.

[0014] According to an aspect of the present invention, the central wavelength plane measuring device does not need to use a wavelength plane measuring element such as an imaging colorimeter, and can use a simple method to quickly and accurately obtain the central wavelength of the measured light by reasonably selecting the first and second filters and the spectral characteristic curve of the photosensitive device. In addition, the central wavelength plane measuring device can be applied to various photosensitive devices and can be applied to various wavelength ranges.

[0015] The central wavelength plane measuring device of the present invention may also be such that, within the wavelength range of the light to be measured, the spectral characteristic curves of the first optical system and the second optical system have one and only one intersection point.

[0016] The central wavelength plane measuring device of the present invention may also be such that, within the wavelength range of the light to be measured, the spectral characteristic curve of one of the first optical system and the second optical system increases monotonically, and the spectral characteristic curve of the other of the first optical system and the second optical system decreases monotonically.

[0017] The central wavelength plane measuring device of the present invention may also be such that, assuming the central wavelength is λ c , the first measurement value is out1, the second measurement value is out2,

[0018] but,

[0019]

[0020] Among them, k1, k2, b1 and b2 are constants, which depend on the first filter, the second filter and the photosensitive device.

[0021] The central wavelength plane measuring device of the present invention may also be that the photosensitive device is at least one of a silicon photomultiplier tube (MPPC / SiPM), a single photon avalanche diode SPAD, a CCD image sensor, a CMOS image sensor, a TDI-CCD image sensor, an sCMOS image sensor, a qCMOS image sensor, a photomultiplier tube (PMT), a photodiode, a PIN photodiode, and an avalanche photodiode.

[0022] The central wavelength plane measuring device of the present invention may also be such that the spectral characteristic curves of the first optical system and the second optical system include a linear function, an exponential function, a monotonic polynomial function, or a power function.

[0023] In the center wavelength plane measuring device of the present invention, the first optical filter and the second optical filter may be wide-band filters, and the transmittance of the first optical filter and the second optical filter may be greater than 30%.

[0024] The center wavelength plane measuring device of the present invention may be such that the first measurement value and the second measurement value are light intensity values, or count values, voltage values, or current values ​​corresponding to the light intensity values.

[0025] The central wavelength plane measuring device of the present invention may also be configured such that the wavelength ranges of the first optical filter and the second optical filter are wider than the wavelength range of the photosensitive device.

[0026] The central wavelength plane measuring device of the present invention may also be configured such that an optical element for adjusting the optical path or polarization state of the light to be measured is arranged between the light source to be measured and the filter switching unit, and the optical element, the first filter, and the photosensitive device constitute the first optical system, and the optical element, the second filter, and the photosensitive device constitute the second optical system.

[0027] Another aspect of the present invention is a central wavelength plane measurement device, which includes: a measured luminous body, which emits the measured light; a dichroic mirror, which divides the measured light into transmitted light and reflected light; a first photosensitive device, which detects the transmitted light to obtain a first measurement value; and a second photosensitive device, which detects the reflected light to obtain a second measurement value; the dichroic mirror and the first photosensitive device constitute a first optical system, and the dichroic mirror and the second photosensitive device constitute a first optical system, within the wavelength range of the measured light, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated values, and the central wavelength of the measured light is obtained by the ratio of the first measurement value to the second measurement value. Therefore, the central wavelength of the measured light can also be obtained quickly and accurately using a simple method.

[0028] Another aspect of the present invention is a central wavelength plane measurement method, comprising: inputting the measured light into a first optical system and a second optical system; detecting the first light propagated through the first optical system to obtain a first measurement value, and detecting the second light propagated through the second optical system to obtain a second measurement value; and obtaining the central wavelength of the measured light by the ratio of the first measurement value to the second measurement value; wherein the first optical system is composed of a first filter and a photosensitive device, and the first optical system is composed of a second filter and a photosensitive device, and within the wavelength range of the measured light, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated values.

[0029] In addition, a collimating lens, and / or a condenser, and / or a polarizer can be installed at the front end of the optical measurement system constructed according to the present invention, so as to play the role of light beam parallelization, light beam convergence, polarization, etc. At this time, we need to consider the collimating lens, and / or the condenser, and / or the polarizer, as well as the filter or the dichroic mirror, and the photosensitive device as a measurement system as a whole to ensure that the relationship between the wavelength of the measured light and the ratio of the measurement results of the two measurement systems is unique.

[0030] Effects of the Invention

[0031] According to the present invention, a central wavelength plane measuring device and method are provided, which can quickly obtain the central wavelength of the measured light by only calculating the ratio of the first measurement value and the second measurement value without using a spectrophotometer, a Michelson interferometer, an imaging colorimeter, etc. Moreover, the central wavelength plane measuring device can be applied to various photosensitive devices and can be applied to various wavelength ranges. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 1 is a schematic diagram showing the structure of a central wavelength plane measurement device according to a first embodiment of the present invention.

[0033] Figure 2 It is shown Figure 1 The flowchart of the central wavelength plane measuring method of the central wavelength plane measuring device is shown.

[0034] Figure 3 (a) to (e) are diagrams showing examples of spectral characteristic curves of the first optical system and the second optical system in the central wavelength plane measurement device according to the first embodiment.

[0035] Figure 4 1 is a schematic diagram showing the structure of a center wavelength plane measurement device according to a second embodiment of the present invention.

[0036] Figure 5 It is shown Figure 4 The flowchart of the central wavelength plane measuring method of the central wavelength plane measuring device is shown. DETAILED DESCRIPTION

[0037] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings. Obviously, the described implementation is a part of the implementation of the present invention, not all of the implementations. Based on the implementation of the present invention, all other implementations obtained by ordinary technicians in this field belong to the scope of protection of the present invention.

[0038] The terms "first", "second", etc. in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first" and "second" are generally of the same type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally represents that the objects associated with each other are in an "or" relationship.

[0039] <First Embodiment>

[0040] Figure 1 Schematic diagram showing the structure of the center wavelength plane measuring device in the first embodiment of the present invention. Figure 1 As shown, the central wavelength plane measuring device 100 of the first embodiment includes: a measured luminous body 1, which emits the measured light; a collimating lens 2, which converges the measured light into parallel light; a filter switching unit 3, which switches the first filter 31 and the second filter 32, thereby allowing the above parallel light to pass through the first filter 31 and the second filter 32 respectively; a photosensitive device 4, which detects the first light passing through the first filter 31 to obtain a first measurement value, and detects the second light passing through the second filter 32 to obtain a second measurement value. The collimating lens 2, the first filter 31, and the photosensitive device 4 constitute a first optical system, and the collimating lens 2, the second filter 32, and the photosensitive device 4 constitute a second optical system. Within the wavelength range of the measured light, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated value, and the central wavelength of the measured light is obtained by the ratio of the first measurement value and the second measurement value.

[0041] Figure 2 It is shown Figure 1 Flow chart of the center wavelength plane measurement method of the center wavelength plane measurement device shown in FIG. Figure 2 As shown, the central wavelength plane measurement method includes: the light emitted by the measured luminous body 1 is converted into parallel light after passing through the collimating lens 2 (step S1); the filter switching unit 3 switches the filter to the first filter 31 (step S2); after the parallel light passes through the first filter 31, it is detected by the photosensitive device 4 to obtain a first measurement value out1 (step S3); the measured luminous body 1 keeps emitting light, and the filter switching unit 3 switches the filter to the second filter 32 (step S4); the light emitted by the measured luminous body 1 is converted into parallel light after being adjusted by the collimating lens 2, and is detected by the photosensitive device 4 to obtain a second measurement value out2 (step S5); according to the ratio of the first measurement value to the second measurement value, the central wavelength of the measured luminous body 1 is calculated (step S6).

[0042] [Spectral characteristic curves of the first and second optical systems]

[0043] In the above-mentioned central wavelength plane measuring device, represents the spectrum of the measured light, then the luminous flux within the wavelength range λ1~λ2 of the measured light can be expressed as:

[0044]

[0045] Then the central wavelength of the measured light can be expressed as

[0046]

[0047] Assume that the transmittance curves of the collimating lens 2 and the first filter 31 are F1(λ), ​​the transmittance curves of the collimating lens 2 and the second filter 32 are F2(λ), and the system response curve of the photosensitive device 4 is S1(λ), ​​then

[0048] The relationship between the first measured value out1 and the luminous flux flux of the luminous body 1 to be measured can be expressed as:

[0049]

[0050] The relationship between the second measured value out2 and the luminous flux flux of the luminous body 1 to be measured can be expressed as:

[0051]

[0052] In order to calculate the central wavelength of the measured light by the ratio of the measured values, the spectral characteristic curves of the first optical system and the second optical system must satisfy the following requirements: within the wavelength range of the measured light, there is no repeated value in the ratio of the spectral characteristic curve F1(λ)×S1(λ) of the first optical system to the spectral characteristic curve F2(λ)×S1(λ) of the second optical system.

[0053] Specifically, since the measured light With a fixed spectral shape, the central wavelength of the measured light is λ c Corresponding to a fixed For the measured light For example, the central wavelength λ c The change in (Δλ) is equivalent to At this time, the first measurement value out1 and the second measurement value out2 also change with Δλ. When different Δλ corresponds to different When The value of λ uniquely determines c For a specific Δλ, the change in the first measurement value out1 depends on the spectral shape of F1(λ)×S1(λ), ​​and the change in the second measurement value out1 depends on the spectral shape of F2(λ)×S1(λ). If the ratio of F1(λ)×S1(λ) to F2(λ)×S1(λ) has no repeated value in the wavelength range λ1 to λ2 (equivalent to is monotonic within the wavelength range λ1~λ2), then It is also monotonic within the wavelength range λ1 to λ2, so With λ c The value of is uniquely corresponding.

[0054] Below, as an example, the calculation principle of the central wavelength is explained by taking the spectral characteristic curve F1(λ)×S1(λ) of the first optical system as a monotonically increasing linear function and the spectral characteristic curve F2(λ)×S1(λ) of the second optical system as a monotonically decreasing linear function.

[0055] F1(λ)×S1(λ)=k1λ+b1 (5)

[0056] F2(λ)×S1(λ)=k2λ+b2 (6)

[0057] but:

[0058]

[0059] Divide the fraction line on the right side of the equation by the luminous flux. We can get:

[0060]

[0061]

[0062]

[0063] After transformation, we can get:

[0064]

[0065] In formula (7), k1, k2, b1 and b2 are constants, which only depend on the first filter, the second filter and the photosensitive device.

[0066] As described above, the central wavelength can be calculated by calculating the ratio of the first measurement value to the second measurement value Come and ask for it.

[0067] The above is just an example of the first and second optical systems being monotonically increasing and decreasing linear functions. When the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated values, that is, the ratio of the first measured value to the second measured value There are no repeated values ​​in the wavelength range of the measured light, and this ratio can be used To find the central wavelength.

[0068] In addition, it should be understood that the collimating lens is not necessary in the first and second optical systems, and the collimating lens can be omitted according to circumstances.

[0069] Figure 3 (a) to (e) are examples of spectral characteristic curves of the first optical system and the second optical system.

[0070] exist Figure 3In (a) to (c), within the wavelength range λ1 to λ2 of the measured light, the ratio of the spectral characteristic curve SP1 of the first optical system to the spectral characteristic curve SP2 of the second optical system has no repeated value, that is, the solution for calculating the central wavelength using the ratio of the measured values ​​can be guaranteed to be unique, thereby ensuring the accuracy of the measurement result. The central wavelength of the measured light can be calculated using calibration technology or supervised learning technology.

[0071] Specifically, in Figure 3 In (a), the spectral characteristic curve SP1 of the first optical system decreases linearly, and the spectral characteristic curve SP2 of the first optical system increases linearly. Although the two have no intersection in the wavelength range λ1~λ2, the ratio of SP1 and SP2 is a monotonic function, which can ensure the uniqueness of the solution for the central wavelength.

[0072] exist Figure 3 In (b), the spectral characteristic curve SP1 of the first optical system decreases monotonically, and the spectral characteristic curve SP2 of the second optical system increases monotonically. The two have only one intersection point in the wavelength range λ1~λ2, which can also ensure that the solution of the central wavelength is unique.

[0073] exist Figure 3 In (c), the spectral characteristic curves SP1 and SP2 of the first optical system and the second optical system are both monotonically rising, but the slope of the spectral characteristic curve SP1 of the first optical system is larger. The two have only one intersection point in the wavelength range λ1~λ2, which can also ensure that the solution of the central wavelength is unique.

[0074] exist Figure 3 In (d), the spectral characteristic curves SP1 and SP2 of the first and second optical systems both rise monotonically, but they have two intersection points in the wavelength range λ1 to λ2. At this time, the solution of the central wavelength cannot be guaranteed to be unique. Therefore, Figure 3 In case (d), the central wavelength cannot be accurately determined by the ratio of SP1 to SP2, and the measurement error becomes larger.

[0075] In addition, in actual production, due to the difficulty in manufacturing optical components and the existence of errors, the overall system response curve may be a monotonic curve, but there may be small "ripples" in the details. Figure 3 (e) shows such an example. Although the spectral characteristic curves SP1 and SP2 of the first optical system and the second optical system are monotonically rising as a whole, due to the presence of small "ripples", the ratio of the two is not unique, so the measurement result has a large error.

[0076] Therefore, the system response curves of the first and second optical systems of the present invention are preferably monotonic anisotropic curves (one rises and the other falls). When the monotonic anisotropic curves are guaranteed, even if there are small ripples, the overall error is smaller than in other cases. Therefore, it is preferred that the first optical system and the second optical system have opposite monotonic characteristics. In addition, the spectral characteristic curves of the first optical system and the second optical system are not limited to linear functions, and can be exponential functions, monotonic polynomial functions, power functions, etc. when the spectral shape of the measured light remains unchanged.

[0077] [Selection of photosensitive devices and filters]

[0078] The photosensitive device 4 may be at least one of a silicon photomultiplier tube (MPPC / SiPM), a single photon avalanche diode SPAD, a CCD image sensor, a CMOS image sensor, a TDI-CCD image sensor, an sCMOS image sensor, a qCMOS image sensor, a photomultiplier tube (PMT), a photodiode, a PIN photodiode, and an avalanche photodiode. Depending on the photosensitive device, the first measurement value out1 and the second measurement value out2 may be a light intensity value, or a count value, a voltage value, or a current value corresponding to the light intensity value.

[0079] In addition, the first filter 31 and the second filter 32 may be wide-band filters, and their transmittance is, for example, 30% or more. In addition, the wavelength range of the first filter 31 and the second filter 32 is preferably wider than the wavelength range of the photosensitive device. Thus, the central wavelength can be measured more accurately.

[0080] [Computing unit and storage unit]

[0081] The central wavelength plane measurement device of the present invention may include a calculation unit and a storage unit. In the storage unit, calculation functions for different optical measurement systems (for example, formula (7) including the above coefficients k1, k2, b1 and b2) may be stored. The calculation unit calculates the central wavelength based on the calculation function stored in the storage unit and the ratio of the measurement values ​​of the different optical measurement systems.

[0082] In addition, the calculation function for different optical measurement systems can also be obtained by curve fitting of the calculated value and the real value, and the fitted function is stored in the storage unit in advance. The fitting method can adopt conventional methods such as the least square method, which will not be described here.

[0083] <Second Embodiment>

[0084] Figure 4 Schematic diagram showing the structure of a center wavelength plane measuring device in a second embodiment of the present invention. Figure 4As shown, the central wavelength plane measuring device 200 of the second embodiment comprises: a measured luminous body 1, which emits measured light; a collimating lens 2, which converges the measured light into parallel light; a dichroic mirror 7, which separates the parallel light into transmitted light and reflected light; a first photosensitive device 4, which detects the transmitted light to obtain a first measurement value; and a second photosensitive device 6, which detects the reflected light to obtain a second measurement value; the collimating lens 2, the dichroic mirror 7, and the first photosensitive device 4 constitute a first optical system, and the collimating lens 2, the dichroic mirror 7, and the second photosensitive device 6 constitute a second optical system. Within the wavelength range of the measured light, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated value, and the central wavelength of the measured light is obtained by the ratio of the first measurement value out1 and the second measurement value out2. According to the central wavelength plane measuring device 200 of the second embodiment, the same effect as the central wavelength plane measuring device 100 of the first embodiment can be achieved.

[0085] In addition, a lens 8 may be provided between the dichroic mirror 7 and the first photosensitive device 4, and a lens 5 may be provided between the dichroic mirror 7 and the second photosensitive device 6. In this case, the collimating lens 2, the dichroic mirror 7, the lens 8, and the first photosensitive device 4 constitute a first optical system; the collimating lens 2, the dichroic mirror 7, the lens 5, and the second photosensitive device 6 constitute a second optical system.

[0086] Figure 5 It is shown Figure 4 Flow chart of the center wavelength plane measurement method of the center wavelength plane measurement device shown in FIG. Figure 5 As shown, the central wavelength plane measurement method includes: the light emitted by the measured luminous body 1 is converted into parallel light after passing through the collimating lens 2 (step S21); a part of the parallel light passes through the dichroic mirror 7 and is detected by the first photosensitive device 4 to obtain a first measurement value out1 (step S22); another part of the parallel light passes through the dichroic mirror 7 and is detected by the second photosensitive device 6 to obtain a second measurement value out2 (step S23); according to the ratio of the first measurement value to the second measurement value, the central wavelength of the measured luminous body 1 is calculated (step S24). According to the central wavelength plane measurement method of this embodiment, the same effect as the central wavelength plane measurement method of the first embodiment can be achieved.

[0087] It should be noted that, in this article, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise one..." do not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0088] The implementation modes and examples of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation modes and examples. The above-mentioned specific implementation modes and examples are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the scope of protection of the purpose of the present application and the claims, all of which are within the protection of the present application.

Claims

1. A central wavelength plane measuring device, characterized in that: include: The luminous body to be measured emits the light to be measured; a filter switching unit for switching the first filter and the second filter, thereby allowing the measured light to pass through the first filter and the second filter respectively; and a photosensitive device, detecting the first light passing through the first filter to obtain a first measurement value, and detecting the second light passing through the second filter to obtain a second measurement value, The first filter and the photosensitive device constitute a first optical system. The second filter and the photosensitive device constitute a second optical system. In the wavelength range of the measured light, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated value, The central wavelength of the measured light is obtained by the ratio of the first measured value to the second measured value.

2. The central wavelength plane measuring device according to claim 1, characterized in that: Within the wavelength range of the measured light, the spectral characteristic curves of the first optical system and the second optical system have one and only one intersection point.

3. The central wavelength plane measuring device according to claim 1, characterized in that: In the wavelength range of the measured light, the spectral characteristic curve of one of the first optical system and the second optical system increases monotonically, and the spectral characteristic curve of the other of the first optical system and the second optical system decreases monotonically.

4. The central wavelength plane measuring device according to any one of claims 1 to 3, characterized in that: Let the central wavelength be λ c , the first measurement value is out1, the second measurement value is out2, but, Among them, k1, k2, b1 and b2 are constants, which depend on the first filter, the second filter and the photosensitive device.

5. The central wavelength plane measuring device according to any one of claims 1 to 3, characterized in that: The photosensitive device is at least one of a silicon photomultiplier tube (MPPC / SiPM), a single photon avalanche diode SPAD, a CCD image sensor, a CMOS image sensor, a TDI-CCD image sensor, an sCMOS image sensor, a qCMOS image sensor, a photomultiplier tube (PMT), a photodiode, a PIN photodiode, and an avalanche photodiode.

6. The central wavelength plane measuring device according to any one of claims 1 to 3, characterized in that: The spectral characteristic curves of the first optical system and the second optical system include a linear function, an exponential function, a monotone polynomial function, and a power function.

7. The central wavelength plane measuring device according to any one of claims 1 to 3, characterized in that: The first filter and the second filter are wide-band filters, The transmittance of the first filter and the second filter is greater than 30%.

8. The central wavelength plane measuring device according to any one of claims 1 to 3, characterized in that: The first measurement value and the second measurement value are light intensity values, or count values, voltage values, or current values ​​corresponding to the light intensity values.

9. The central wavelength plane measuring device according to any one of claims 1 to 3, characterized in that: The wavelength ranges of the first filter and the second filter are wider than the wavelength range of the photosensitive device.

10. The central wavelength plane measuring device according to any one of claims 1 to 9, characterized in that: An optical element for adjusting the optical path or polarization state of the light to be measured is arranged between the light emitting body to be measured and the filter switching unit. The optical element, the first filter, and the photosensitive device constitute the first optical system. The optical element, the second filter, and the photosensitive device constitute the second optical system.

11. A central wavelength plane measuring device, characterized in that: include: The luminous body to be measured emits the light to be measured; A dichroic mirror, which separates the measured light into transmitted light and reflected light; A first photosensitive device, detecting the transmitted light to obtain a first measurement value; and A second photosensitive device detects the reflected light to obtain a second measurement value, The dichroic mirror and the first photosensitive device constitute a first optical system. The dichroic mirror and the second photosensitive device constitute a second optical system. In the wavelength range of the measured light, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated value, The central wavelength of the measured light is obtained by the ratio of the first measured value to the second measured value.

12. A method for measuring a central wavelength plane, characterized in that: include: inputting the measured light into the first optical system and the second optical system; Detecting the first light propagated through the first optical system to obtain a first measurement value, and detecting the second light propagated through the second optical system to obtain a second measurement value; as well as The central wavelength of the measured light is obtained by the ratio of the first measured value to the second measured value. The first optical system is composed of a first filter and a photosensitive device, and the second optical system is composed of a second filter and a photosensitive device. Within the wavelength range of the measured light, the ratio of the spectral characteristic curves of the first optical system and the second optical system has no repeated values.

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