A radio frequency tag axial single-shot rapid imaging device and method

Through the combination of radio frequency marking technology and dispersion objective lens, fast axial imaging within a large depth range is achieved, and the problems of small axial scanning range and slow imaging speed in the prior art are solved, achieving efficient axial single-shot fast imaging effect.

CN119985479BActive Publication Date: 2025-06-10TECH & ENG CENT FOR SPACE UTILIZATION CHINESE ACAD OF SCI
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Patent Information

Application Number
CN202510435971.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-04-09
Publication Date
2025-06-10
Estimated Expiration
2045-04-09

AI Technical Summary

Technical Problem

The existing axial scanning technology has the problems of small axial scanning range and slow imaging speed, making it difficult to achieve fast axial imaging within a large depth range.

Method used

Using radio frequency marking technology, a broad spectrum detection beam is emitted by a detection light source, and each spectral component is modulated at different frequencies in the radio frequency marking unit to form a detection beam after radio frequency marking. The light beam is focused to different depths in the axial direction of the sample through a dispersion objective lens, and excites different depths of the sample to generate signal light. The single-pixel detector identifies each signal light through the modulation frequency of the signal light.

Benefits of technology

Imaging speeds reaching the order of megahertz in the axial range of the millimeters are achieved and random rapid imaging is supported in the axial direction.

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Abstract

The present invention provides a radio-frequency tagged axial single-shot fast imaging device and method, comprising: a detection light source, a radio-frequency tagging unit, and a sample axial excitation detection unit; the radio-frequency tagging unit performs radio-frequency tagging on each spectral component in the detection light beam emitted by the detection light source to obtain a radio-frequency tagged detection light beam; the sample axial excitation detection unit includes an objective lens and a single-pixel detector. The objective lens is a dispersive objective lens that focuses each modulated spectral component in the radio-frequency tagged detection light beam to different depths along the axis of the sample, and the signal light generated at each depth is detected simultaneously in a single shot by the single-pixel detector. The radio-frequency tagged axial single-shot fast imaging device and method provided by the present invention can achieve fast axial imaging within a large depth range and simultaneously achieve random fast imaging along the axis.
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Description

Technical Field

[0001] The present invention belongs to the field of imaging technology, and particularly relates to a radio frequency tagged axial single-shot rapid imaging device and method. Background Art

[0002] In three-dimensional imaging, the scanning speed is a key factor for achieving rapid imaging, and the axial rapid scanning technology is still an important problem to be solved. At present, the axial scanning technology is mainly divided into the following several types: The first is the mechanical scanning technology, in which the axial scanning is realized by moving the objective lens or the sample. This technology is limited by mechanical inertia, and the scanning speed is difficult to reach kilohertz. In addition, only sequential measurement in the axial direction can be carried out by using this technology, and the target depth cannot be randomly selected for measurement; The second is the excitation light wavefront modulation technology, in which phase modulation devices such as current focusing lenses, MEMS deformable mirrors, spatial light modulators, and acousto-optic devices are used to realize the scanning in the depth direction, and there is a problem of small axial scanning range; The third is the axicon lens technology, in which the axicon lens is used to replace the traditional microscope objective lens. When parallel light passes through the axicon lens, it is focused into a line in the depth direction. According to the principle of reversibility of light path, the signals at different depths become parallel light in different radial directions after being transmitted through the axicon lens. The imaging speed of the axicon lens technology in the depth direction depends on the refresh speed of the camera, generally less than kilohertz.

[0003] It can be seen that the existing various axial scanning technologies generally have the problems of small axial scanning range and slow imaging speed. Summary of the Invention

[0004] In view of the defects existing in the prior art, the present invention provides a radio frequency tagged axial single-shot rapid imaging device and method, which can effectively solve the above problems.

[0005] The technical solution adopted by the present invention is as follows:

[0006] The present invention provides a radio frequency tagged axial single-shot rapid imaging device, including: a detection light source (1), a radio frequency tagging unit, and a sample axial excitation and detection unit;

[0007] The detection light source (1) is used to emit a detection beam, and the detection beam is a broadband detection beam;

[0008] The radio frequency tagging unit is used to modulate each spectral component in the detection beam emitted by the detection light source (1) with different frequencies, so that each modulated spectral component has different frequency domains and modulation frequencies, realizing the radio frequency tagging of each spectral component in the detection beam, and thus obtaining a radio frequency tagged detection beam;

[0009] The sample axial excitation detection unit includes an objective lens (13) and a single-pixel detector (15), and the objective lens (13) is a dispersive objective lens; through the dispersive objective lens, each of the modulated spectral components in the detection light beam after radio frequency labeling is focused to different depths along the axis of the sample, so as to simultaneously excite the sample at different depths to generate signal light respectively; the signal light generated at each depth is detected simultaneously by the single-pixel detector (15) once; wherein: since each of the modulated spectral components has a different modulation frequency, the signal lights generated by exciting the sample also have different modulation frequencies, therefore, the single-pixel detector (15) identifies each signal light in the modulation frequency domain through the modulation frequencies of the signal lights.

[0010] Preferably, the radio frequency labeling unit includes an acousto-optic deflector (2), a first plane total reflector (3), a second plane total reflector (4), a spatial filter, a third plane total reflector (8) and a beam combiner (9);

[0011] The acousto-optic deflector (2) is located on the transmission path of the detection light beam of the detection light source (1);

[0012] The acousto-optic deflector (2) outputs first-order diffracted light and zero-order transmitted light; the second plane total reflector (4) is arranged on the transmission path of the first-order diffracted light of the acousto-optic deflector (2);

[0013] The first plane total reflector (3) is arranged on the transmission path of the zero-order transmitted light of the acousto-optic deflector (2);

[0014] The spatial filter is arranged on the reflection path of the second plane total reflector (4); the third plane total reflector (8) is arranged on the transmission path of the output light beam of the spatial filter;

[0015] The beam combiner (9) is arranged at the intersection position of the reflection path of the first plane total reflector (3) and the reflection path of the third plane total reflector (8).

[0016] Preferably, the spatial filter includes a first focusing lens (5), a diaphragm (6) and a collimating lens (7) arranged in sequence along the optical path transmission direction.

[0017] Preferably, the sample axial excitation detection unit further includes a beam splitter (10), a first scanning galvanometer (11) and a second scanning galvanometer (12);

[0018] The beam splitter (10) is arranged on the output beam transmission path of the beam combiner (9); the transmission path of the beam splitter (10) is arranged with the first scanning galvanometer (11), the reflection path of the first scanning galvanometer (11) is arranged with the second scanning galvanometer (12), and the reflection path of the second scanning galvanometer (12) is arranged with the objective lens (13); the reflection path of the beam splitter (10) is arranged with the single-pixel detector (15).

[0019] Preferably, the sample axial excitation detection unit further includes a second focusing lens (14) and a data acquisition circuit (16); the second focusing lens (14) is arranged on the path between the single-pixel detector (15) and the beam splitter (10), and the single-pixel detector (15) is located at the focal plane position of the second focusing lens (14); the output end of the single-pixel detector (15) is connected to the data acquisition circuit (16).

[0020] The present invention also provides an imaging method for the radio frequency labeled axial single-shot rapid imaging device as described above, including the following steps:

[0021] Step S1, the detection light source (1) emits a detection beam and transmits it to the radio frequency labeling unit; wherein, the detection beam is a broadband detection beam;

[0022] Step S2, the radio frequency labeling unit modulates each spectral component in the detection beam with different frequencies, so that each modulated spectral component has different frequency domains and modulation frequencies, realizing radio frequency labeling of each spectral component in the detection beam, thereby obtaining a radio frequency labeled detection beam and transmitting it to the sample axial excitation detection unit;

[0023] Step S3, the sample axial excitation detection unit includes an objective lens (13) and a single-pixel detector (15), and the objective lens (13) is a dispersive objective lens; through the dispersive objective lens, each of the modulated spectral components in the radio frequency labeled detection beam is focused to different depths along the axis of the sample, so as to simultaneously excite signal lights generated at different depths of the sample respectively; the signal lights generated at each depth are detected by the single-pixel detector (15) simultaneously in a single shot; wherein: since each of the modulated spectral components has different modulation frequencies, the signal lights generated by exciting the sample also have different modulation frequencies, therefore, the single-pixel detector (15) identifies each signal light in the modulation frequency domain through the modulation frequency of each signal light.

[0024] Preferably, step S2 is specifically:

[0025] Step S2.1, the radio frequency marking unit includes an acousto-optic deflector (2), a first plane total reflector (3), a second plane total reflector (4), a spatial filter, a third plane total reflector (8), and a beam combiner (9);

[0026] Step S2.2, after the detection light beam emitted by the detection light source (1) acts on the acousto-optic deflector (2), zero-order transmitted light and first-order diffracted light are output;

[0027] Among them: the transmission directions of the spectral components in the zero-order transmitted light are all the same as the incident light direction incident on the acousto-optic deflector (2), and the spectral components in the first-order diffracted light have different angular offsets from the incident light direction and have a frequency shift with respect to the corresponding spectral components in the zero-order transmitted light, and the frequency shift amount is equal to the driving frequency of the acousto-optic deflector (2);

[0028] By controlling the acousto-optic deflector (2) to load driving signals of multiple frequencies, first-order diffracted light containing multiple spectral components and with different frequency shift amounts of various spectral components with respect to their zero-order transmitted light is obtained; specifically, for each spectral component in the zero-order transmitted light, it can correspond to the spectral components in multiple first-order diffracted lights with different frequency shift amounts;

[0029] Step S2.3, after the first-order diffracted light is reflected by the second plane total reflector (4), a filtering operation is performed through the spatial filter, so that the spectral components meeting a specific angle pass through the spatial filter, and the spatial filter transmits the filtered first-order diffracted light; after the filtered first-order diffracted light is reflected by the third plane total reflector (8), it is incident on the beam combiner (9);

[0030] The zero-order transmitted light is incident on the beam combiner (9) after being reflected by the first plane total reflector (3);

[0031] Step S2.4, the beam combiner (9) combines and beats the zero-order transmitted light and the filtered first-order diffracted light, that is: the spectral components in the filtered first-order diffracted light are beat with the corresponding spectral components in the zero-order transmitted light, so as to realize the radio frequency marking of each spectral component and obtain the detected light beam after radio frequency marking.

[0032] Preferably, the spatial filter includes a first focusing lens (5), a diaphragm (6), and a collimating lens (7); the filtering operation of the spatial filter is specifically:

[0033] The first-order diffracted light reflected by the second plane total reflector (4) is focused on the diaphragm (6) through the first focusing lens (5), and the diaphragm (6) restricts only the spectral components meeting a specific angle to pass through. After the spectral components passing through the diaphragm (6) pass through the collimating lens (7), they are incident on the third plane total reflector (8).

[0034] Preferably, step S3 is specifically as follows:

[0035] Step S3.1: The detected light beam after RF marking passes through the beam splitter (10), and then is reflected by the first scanning galvanometer (11) and the second scanning galvanometer (12) in sequence, and then is transmitted to the objective lens (13);

[0036] The objective lens (13) is a dispersive objective lens; through the dispersive objective lens, each modulated spectral component in the detected light beam after RF marking is focused to different depths along the axial direction of the sample, so as to simultaneously excite the sample to generate signal light at different depths respectively;

[0037] Step S3.2: The signal light generated at each depth is incident on the objective lens (13), and after being transmitted by the objective lens (13), it is reflected by the second scanning galvanometer (12), the first scanning galvanometer (11) and the beam splitter (10) in sequence and then transmitted to the second focusing lens (14); it is focused on the single-pixel detector (15) through the second focusing lens (14), and the output of the single-pixel detector (15) is connected to the data acquisition circuit (16);

[0038] Since each modulated spectral component has a different modulation frequency, and the respective signal lights generated by exciting the sample also have different modulation frequencies, therefore, the single-pixel detector (15) identifies each signal light through the modulation frequency of each signal light, and realizes axial single-shot rapid imaging in the modulation frequency domain.

[0039] Preferably, the axial single-shot rapid imaging further includes:

[0040] By adjusting the drive signal of the acousto-optic deflector (2), the spectral components passing through the aperture (6) are adjusted, and further the focusing depths of the respective modulated spectral components after passing through the objective lens (13) are adjusted, so as to realize random rapid imaging in the axial direction.

[0041] The RF marking axial single-shot rapid imaging device and method provided by the present invention have the following advantages:

[0042] The RF marking axial single-shot rapid imaging device and method provided by the present invention can realize rapid axial imaging within a large depth range, and at the same time realize random rapid imaging in the axial direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 is a structural diagram of the RF marking axial single-shot rapid imaging device provided by the present invention;

[0044] Figure 2 is an implementation case diagram of the RF marking axial single-shot rapid imaging device provided by the present invention.

[0045] Wherein:

[0046] A is a radio frequency tagged axial single-shot rapid imaging device;

[0047] 1 is a detection light source, 2 is an acousto-optic deflector, 3 is a first plane total reflector, 4 is a second plane total reflector, 5 is a first focusing lens, 6 is a diaphragm, 7 is a collimating lens, 8 is a third plane total reflector, 9 is a beam combiner, 10 is a beam splitter, 11 is a first scanning galvanometer, 12 is a second scanning galvanometer, 13 is an objective lens, 14 is a second focusing lens, 15 is a single-pixel detector, 16 is a data acquisition circuit, L1 is the first layer of the layered sample, and L2 is the second layer of the layered sample. Detailed implementation manners

[0048] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0049] A radio frequency tagged axial single-shot rapid imaging device and method provided by the present invention can achieve rapid axial imaging within a large depth range and simultaneously achieve random rapid imaging in the axial direction, and have the following characteristics: (1) using a light source with different wavelengths after different frequency modulations as the excitation light source; (2) using a dispersive objective lens to achieve simultaneous excitation in the depth direction; (3) using a single-pixel detector to identify signals in the modulation frequency domain.

[0050] Refer to Figure 1 , the present invention provides a radio frequency tagged axial single-shot rapid imaging device, including: a detection light source 1, a radio frequency tagging unit, and a sample axial excitation and detection unit;

[0051] The detection light source 1 is used to emit a detection beam, and the detection beam is a broadband detection beam;

[0052] The radio frequency tagging unit is used to perform different frequency modulations on each spectral component in the detection beam emitted by the detection light source 1, so that each modulated spectral component has different frequency domains and modulation frequencies, and realizes radio frequency tagging of each spectral component in the detection beam, thereby obtaining a radio frequency tagged detection beam;

[0053] The sample axial excitation detection unit includes an objective lens 13 and a single-pixel detector 15. The objective lens 13 is a dispersive objective lens. Through the dispersive objective lens, each modulated spectral component in the detection beam after radio frequency labeling is focused to different depths along the sample axis, so as to simultaneously excite the sample to generate signal light at different depths respectively. The signal light generated at each depth is detected by the single-pixel detector 15 simultaneously in one shot. Among them: Since each modulated spectral component has a different modulation frequency, the signal lights generated by exciting the sample also have different modulation frequencies. Therefore, the single-pixel detector 15 identifies each signal light in the modulation frequency domain through the modulation frequencies of the signal lights.

[0054] The structures of the radio frequency labeling unit and the sample axial excitation detection unit are introduced in detail below:

[0055] (1) Radio frequency labeling unit

[0056] The radio frequency labeling unit includes an acousto-optic deflector 2, a first plane total reflector 3, a second plane total reflector 4, a spatial filter, a third plane total reflector 8, and a beam combiner 9.

[0057] The acousto-optic deflector 2 is located on the transmission path of the detection beam of the detection light source 1.

[0058] The acousto-optic deflector 2 outputs first-order diffracted light and zero-order transmitted light. A second plane total reflector 4 is arranged on the transmission path of the first-order diffracted light of the acousto-optic deflector 2.

[0059] A first plane total reflector 3 is arranged on the transmission path of the zero-order transmitted light of the acousto-optic deflector 2.

[0060] A spatial filter is arranged on the reflection path of the second plane total reflector 4. A third plane total reflector 8 is arranged on the transmission path of the output beam of the spatial filter. Among them, the spatial filter includes a first focusing lens 5, a diaphragm 6, and a collimating lens 7 arranged in sequence along the optical path transmission direction.

[0061] A beam combiner 9 is arranged at the intersection of the reflection path of the first plane total reflector 3 and the reflection path of the third plane total reflector 8.

[0062] (2) Sample axial excitation detection unit

[0063] The sample axial excitation detection unit includes an objective lens 13 and a single-pixel detector 15, and also includes a beam splitter 10, a first scanning galvanometer 11, and a second scanning galvanometer 12.

[0064] The beam splitter 10 is arranged on the output beam transmission path of the beam combiner 9; the transmission path of the beam splitter 10 is arranged with the first scanning galvanometer 11, the reflection path of the first scanning galvanometer 11 is arranged with the second scanning galvanometer 12, and the reflection path of the second scanning galvanometer 12 is arranged with the objective lens 13; the reflection path of the beam splitter 10 is arranged with the single-pixel detector 15.

[0065] The sample axial excitation detection unit further includes a second focusing lens 14 and a data acquisition circuit 16; the second focusing lens 14 is arranged on the path between the single-pixel detector 15 and the beam splitter 10, and the single-pixel detector 15 is located at the focusing focal plane position of the second focusing lens 14; the output end of the single-pixel detector 15 is connected to the data acquisition circuit 16.

[0066] The present invention also provides a radio frequency labeled axial single-shot fast imaging method, including the following steps:

[0067] Step S1, the detection light source 1 emits a detection beam and transmits it to the radio frequency labeling unit; wherein, the detection beam is a broadband detection beam;

[0068] Step S2, the radio frequency labeling unit modulates each spectral component in the detection beam at different frequencies, so that each modulated spectral component has a different frequency domain and modulation frequency, realizing the radio frequency labeling of each spectral component in the detection beam, thereby obtaining the radio frequency labeled detection beam and transmitting it to the sample axial excitation detection unit;

[0069] Step S2 is specifically:

[0070] Step S2.1, the radio frequency labeling unit includes an acousto-optic deflector 2, a first plane total reflector 3, a second plane total reflector 4, a spatial filter, a third plane total reflector 8 and a beam combiner 9;

[0071] Step S2.2, after the detection beam emitted by the detection light source 1 acts on the acousto-optic deflector 2, zero-order transmitted light and first-order diffracted light are output;

[0072] Wherein: the transmission directions of each spectral component in the zero-order transmitted light are the same as the incident light direction incident on the acousto-optic deflector 2, and each spectral component in the first-order diffracted light has a different angular offset from the incident light direction and has a frequency shift from the corresponding spectral component in the zero-order transmitted light, and the frequency shift amount is equal to the driving frequency of the acousto-optic deflector 2;

[0073] By controlling the acousto-optic deflector 2 to load driving signals of multiple frequencies, first-order diffracted light containing multiple spectral components and with different frequency shift amounts for each spectral component relative to its zero-order transmitted light is obtained; specifically, for each spectral component in the zero-order transmitted light, multiple spectral components in the first-order diffracted light with different frequency shift amounts can correspond;

[0074] Step S2.3: After the first-order diffracted light is reflected by the second plane total reflector 4, it passes through a spatial filter for filtering operation, enabling the spectral components that meet a specific angle to pass through the spatial filter, and the spatial filter transmits the filtered first-order diffracted light; after the filtered first-order diffracted light is reflected by the third plane total reflector 8, it is incident on the beam combiner 9; the zero-order transmitted light is reflected by the first plane total reflector 3 and then incident on the beam combiner 9.

[0075] The spatial filter includes a first focusing lens 5, a diaphragm 6, and a collimating lens 7; the filtering operation of the spatial filter is specifically as follows: the first-order diffracted light reflected by the second plane total reflector 4 is focused on the diaphragm 6 through the first focusing lens 5, and the diaphragm 6 restricts only the spectral components that meet a specific angle to pass through. Each spectral component that passes through the diaphragm 6 is incident on the third plane total reflector 8 after passing through the collimating lens 7.

[0076] Step S2.4: The beam combiner 9 combines and beats the zero-order transmitted light and the filtered first-order diffracted light, that is: each spectral component in the filtered first-order diffracted light beats with the corresponding spectral component in the zero-order transmitted light, thereby realizing the radio frequency marking of each spectral component and obtaining the detected beam after radio frequency marking.

[0077] Step S3: The sample axial excitation detection unit includes an objective lens 13 and a single-pixel detector 15, and the objective lens 13 uses a dispersive objective lens; through the dispersive objective lens, each modulated spectral component in the detected beam after radio frequency marking is focused on different depths along the sample axis, thereby simultaneously exciting the sample to generate signal light at different depths respectively; the signal light generated at each depth is detected simultaneously by the single-pixel detector 15 once; among them: since each modulated spectral component has a different modulation frequency, the signal lights generated by exciting the sample also have different modulation frequencies. Therefore, the single-pixel detector 15 identifies each signal light in the modulation frequency domain through the modulation frequencies of the signal lights.

[0078] Step S3 is specifically as follows:

[0079] The detected beam after radio frequency marking passes through the beam splitter 10, and then is reflected by the first scanning galvanometer 11 and the second scanning galvanometer 12 in sequence, and then transmitted to the objective lens 13.

[0080] The objective lens 13 uses a dispersive objective lens; through the dispersive objective lens, each modulated spectral component in the detected beam after radio frequency marking is focused on different depths along the sample axis, thereby simultaneously exciting the sample to generate signal light at different depths respectively.

[0081] Step S3.2: The signal light generated at each depth is incident on the objective lens 13. After being transmitted by the objective lens 13, it is reflected by the second scanning galvanometer 12, the first scanning galvanometer 11, and the beam splitter 10 in sequence and then reaches the second focusing lens 14; it is focused on the single-pixel detector 15 through the second focusing lens 14, and the output of the single-pixel detector 15 is connected to the data acquisition circuit 16;

[0082] Since each modulated spectral component has a different modulation frequency, the signal lights generated by exciting the sample also have different modulation frequencies. Therefore, the single-pixel detector 15 identifies each signal light in the modulation frequency domain through the modulation frequencies of the signal lights, achieving axial single-shot rapid imaging.

[0083] Furthermore, by adjusting the drive signal of the acousto-optic deflector 2, the spectral components passing through the aperture 6 are adjusted, and then the focusing depths of the modulated spectral components after passing through the objective lens 13 are adjusted, achieving axial random rapid imaging.

[0084] An axial single-shot rapid imaging device and method provided by the present invention have the following advantages:

[0085] (1) Achieving an imaging speed of the order of megahertz within an axial range of millimeters

[0086] In the present invention, a dispersive objective lens is used to achieve axial simultaneous excitation. The dispersion range of the objective lens can reach several millimeters. The single-pixel detector measures once and performs Fourier transform to identify the signal, ensuring that the signal is not distorted within a sampling time of the order of microseconds, and the signal recognition speed can reach the order of megahertz. Therefore, the present invention can achieve an imaging speed of the order of megahertz within an axial range of millimeters.

[0087] (2) Axial random rapid imaging

[0088] In the present invention, by adjusting the drive signal of the acousto-optic deflector, the focusing depth of the excitation light after passing through the dispersive objective lens is adjusted. Since the drive signal can be randomly changed, the focusing depth can be randomly changed, achieving axial random rapid imaging. Embodiment

[0089] The implementation device of the embodiment of the present invention is as Figure 1 shown, and the specific solution includes the following parts:

[0090] The first part is radio frequency marking:

[0091] In the present invention, each wavelength component of the excitation light source is modulated at different frequencies. After modulation, each wavelength component has different modulation frequencies in addition to being different in the frequency domain, achieving radio frequency marking of the excitation light. Figure 1The radio frequency marking of the detection light emitted by the detection light source 1 is realized through a spatial filter composed of an acousto-optic deflector 2, a first plane total reflector 3, a second plane total reflector 4, a first focusing lens 5, a diaphragm 6, a collimating lens 7, a third plane total reflector 8 and a beam combiner 9. Among them, the detection light source 1 is an excitation light source, specifically a broadband detection light source.

[0092] The second part is axial simultaneous excitation:

[0093] Due to the existence of optical material dispersion, it is difficult to focus broadband detection light onto the same plane. The present invention exactly utilizes this inherent property to focus different wavelength components to different depths, realizing simultaneous excitation of different depths. Since the modulation frequencies of each wavelength component are different, the modulation frequencies of the generated signal light are also different, and the generated signal light can be distinguished according to the modulation frequency. Figure 1 In the present invention, axial simultaneous excitation of the sample is realized through the objective lens 13. The axial excitation range depends on the dispersion range of the objective lens 13, generally reaching the millimeter level. Among them, the objective lens 13 is a dispersive objective lens.

[0094] The third part is axial single-shot fast imaging:

[0095] Since the signals generated in the present invention are modulation signals and the modulation frequencies at different depths are different, the signal recognition of the present invention can be realized through the modulation frequency on a single detection pixel. The present invention uses a single-pixel detector 15 to simultaneously measure the signals at different depths and performs signal analysis in the modulation frequency domain through Fourier transform. Figure 1 In the present invention, axial single-shot fast imaging is realized through a single-pixel detector 15 and a data acquisition circuit 16.

[0096] The scheme for the present invention to realize axial random fast imaging is as follows:

[0097] By adjusting the driving signal of the acousto-optic deflector 2, the wavelength component of the excitation light passing through the diaphragm 6 is adjusted, and then the focusing depth of the excitation light after passing through the objective lens 13 is adjusted to realize axial random fast imaging. Embodiment

[0098] The present invention can be used for axial fast imaging of layered samples. Figure 2 This is a schematic diagram of an embodiment of the present invention for imaging a layered sample. Among them, L1 and L2 are the first layer and the second layer of the layered sample respectively, and A is a radio frequency marking axial single-shot fast imaging device.

[0099] Wherein:

[0100] The detection light source 1 uses a broadband detection light source. Its output beam is divided into a zero-order transmitted light and a first-order diffracted light by an acousto-optic deflector 2. Among them, the transmission directions of the spectral components in the zero-order transmitted light are all the same as the incident light direction. The spectral components in the first-order diffracted light have different angular offsets from the incident light direction and have a frequency shift compared to their corresponding zero-order transmitted light. The frequency shift amount is equal to the driving frequency of the acousto-optic deflector 2.

[0101] The second plane total reflector 4 reflects the first-order diffracted light to a spatial filter composed of a first focusing lens 5, a diaphragm 6, and a collimating lens 7. After that, only the spectral components at a specific angle pass through the spatial filter.

[0102] The first plane total reflector 3, the third plane total reflector 8, and the beam combiner 9 are used to combine the zero-order transmitted light and the first-order diffracted light passing through the spatial filter for beat frequency to realize radio frequency tagging. The radio frequency is the frequency shift between the first-order diffracted light passing through the spatial filter and its corresponding zero-order transmitted light. When the driving of the acousto-optic deflector 2 contains multiple frequencies, the first-order diffracted light passing through the spatial filter contains multiple spectral components and the frequency shift amounts of the spectral components relative to their zero-order transmitted lights are all different. When this first-order diffracted light is combined with the zero-order transmitted light, each spectral component beats with its corresponding zero-order transmitted light to realize the radio frequency tagging of each spectral component.

[0103] The excitation light after radio frequency tagging passes through the beam splitter 10 and is then reflected by the first scanning galvanometer 11 and the second scanning galvanometer 12 and focused on the sample by the objective lens 13. Among them, the spectral components of the excitation light are focused on different layers of the sample. The sample signal light collected by the objective lens 13 is reflected by the second scanning galvanometer 12, the first scanning galvanometer 11, and the beam splitter 10 in sequence to the single-pixel detector 15. The output of the single-pixel detector 15 is connected to the data acquisition circuit 16. Since the radio frequency tagging frequencies of the spectral components of the excitation light are different, the radio frequencies of the sample signal lights excited at different depths in the sample are also different. In the single-pixel detector 15, the sample signal lights can be distinguished according to the radio frequency, so as to realize single-shot rapid imaging in the axial direction of radio frequency tagging.

[0104] The above is only the preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A radio frequency labeling axial single-shot rapid imaging device, characterized in that: include: A detection light source (1), a radio frequency tag unit and a sample axial excitation detection unit; The detection light source (1) is used to emit a detection light beam, and the detection light beam is a wide-spectrum detection light beam; The radio frequency tagging unit is used to modulate each spectral component in the detection light beam emitted by the detection light source (1) at different frequencies, so that each modulated spectral component has a different frequency domain and modulation frequency, thereby achieving radio frequency tagging of each spectral component in the detection light beam, thereby obtaining a detection light beam after radio frequency tagging; The sample axial excitation detection unit comprises an objective lens (13) and a single-pixel detector (15), wherein the objective lens (13) is a dispersive objective lens; each of the modulated spectral components in the detection light beam after radio frequency labeling is focused to different depths in the sample axis by the dispersive objective lens, thereby simultaneously exciting the sample at different depths to generate signal light; the signal light generated at each depth is detected simultaneously by the single-pixel detector (15); wherein: since each of the modulated spectral components has a different modulation frequency, each of the signal lights generated by the sample when it is excited also has a different modulation frequency, and therefore, the single-pixel detector (15) recognizes each of the signal lights in the modulation frequency domain by the modulation frequency of each of the signal lights.

2. The radio frequency labeling axial single-shot rapid imaging device according to claim 1, characterized in that: The radio frequency tag unit comprises an acousto-optic deflector (2), a first plane total reflection mirror (3), a second plane total reflection mirror (4), a spatial filter, a third plane total reflection mirror (8) and a beam combiner (9); The acousto-optic deflector (2) is located on the detection light beam transmission path of the detection light source (1); The acousto-optic deflector (2) outputs first-order diffracted light and zero-order transmitted light; the second plane total reflection mirror (4) is arranged on the transmission path of the first-order diffracted light of the acousto-optic deflector (2); Arranging the first plane total reflection mirror (3) on the zero-order transmission light transmission path of the acousto-optic deflector (2); The spatial filter is arranged on the reflection path of the second plane total reflection mirror (4); and the third plane total reflection mirror (8) is arranged on the output light beam transmission path of the spatial filter; The beam combiner (9) is arranged at a position where a reflection path of the first planar total reflection mirror (3) and a reflection path of the third planar total reflection mirror (8) intersect.

3. The radio frequency labeling axial single-shot rapid imaging device according to claim 2, characterized in that: The spatial filter comprises a first focusing lens (5), a diaphragm (6) and a collimating lens (7) which are arranged in sequence along the light path transmission direction.

4. The radio frequency labeling axial single-shot rapid imaging device according to claim 2, characterized in that: The sample axial excitation detection unit further comprises a beam splitter (10), a first scanning galvanometer (11), and a second scanning galvanometer (12); The beam splitter (10) is arranged on the output light beam transmission path of the beam combiner (9); the first scanning galvanometer (11) is arranged on the transmission path of the beam splitter (10), the second scanning galvanometer (12) is arranged on the reflection path of the first scanning galvanometer (11), and the objective lens (13) is arranged on the reflection path of the second scanning galvanometer (12); and the single pixel detector (15) is arranged on the reflection path of the beam splitter (10).

5. The radio frequency labeling axial single-shot rapid imaging device according to claim 4, characterized in that: The sample axial excitation detection unit further comprises a second focusing lens (14) and a data acquisition circuit (16); the second focusing lens (14) is arranged in a path between the single pixel detector (15) and the beam splitter (10), and the single pixel detector (15) is located at a focusing focal plane position of the second focusing lens (14); an output end of the single pixel detector (15) is connected to the data acquisition circuit (16).

6. An imaging method of the radio frequency labeling axial single-shot rapid imaging device according to any one of claims 1 to 5, characterized in that: The following steps are involved: Step S1, a detection light source (1) emits a detection light beam and transmits it to a radio frequency tag unit; wherein the detection light beam is a wide-spectrum detection light beam; Step S2, the radio frequency tagging unit modulates each spectral component in the detection light beam with different frequencies, so that each modulated spectral component has a different frequency domain and modulation frequency, thereby achieving radio frequency tagging of each spectral component in the detection light beam, thereby obtaining a detection light beam after radio frequency tagging, and transmitting it to the sample axial excitation detection unit; Step S3, the sample axial excitation detection unit comprises an objective lens (13) and a single pixel detector (15), wherein the objective lens (13) is a dispersive objective lens; through the dispersive objective lens, each of the modulated spectral components in the detection light beam after the radio frequency tag is focused to different depths in the sample axis, thereby simultaneously exciting the sample at different depths to generate signal light; the signal light generated at each depth is detected simultaneously by the single pixel detector (15); wherein: since each of the modulated spectral components has a different modulation frequency, each of the signal lights generated by the sample when it is excited also has a different modulation frequency, and therefore, the single pixel detector (15) recognizes each of the signal lights in the modulation frequency domain through the modulation frequency of each of the signal lights.

7. The imaging method of the radio frequency labeling axial single-shot rapid imaging device according to claim 6, characterized in that: Step S2 is specifically as follows: Step S2.1, the radio frequency tag unit comprises an acousto-optic deflector (2), a first plane total reflection mirror (3), a second plane total reflection mirror (4), a spatial filter, a third plane total reflection mirror (8) and a beam combiner (9); Step S2.2, after the detection light beam emitted by the detection light source (1) is acted upon by the acousto-optic deflector (2), a zero-order transmitted light and a first-order diffracted light are output; wherein: the transmission direction of each spectral component in the zero-order transmitted light is the same as the direction of the incident light incident on the acousto-optic deflector (2); each spectral component in the first-order diffracted light is offset from the direction of the incident light at different angles and has a frequency shift with the corresponding spectral component in the zero-order transmitted light, and the frequency shift is equal to the driving frequency of the acousto-optic deflector (2); By controlling the acousto-optic deflector (2) to load driving signals of multiple frequencies, first-order diffraction light containing multiple spectral components and each spectral component having a different frequency shift relative to its zero-order transmitted light is obtained; specifically, for each spectral component in the zero-order transmitted light, multiple spectral components in the first-order diffraction light with different frequency shifts can correspond; Step S2.3, after the first-order diffraction light is reflected by the second plane total reflection mirror (4), it is filtered by the spatial filter, so that the spectral component that meets the specific angle passes through the spatial filter, and the spatial filter transmits the filtered first-order diffraction light; after the filtered first-order diffraction light is reflected by the third plane total reflection mirror (8), it is incident on the beam combiner (9); The zero-order transmitted light is reflected by the first plane total reflection mirror (3) and then incident on the beam combiner (9); In step S2.4, the beam combiner (9) performs beam combining and beating on the zero-order transmitted light and the filtered first-order diffraction light, that is, each spectral component in the filtered first-order diffraction light is beat with the corresponding spectral component in the zero-order transmitted light, thereby achieving radio frequency tagging of each spectral component and obtaining a radio frequency tagged detection light beam.

8. The imaging method of the radio frequency labeling axial single-shot rapid imaging device according to claim 7, characterized in that: The spatial filter comprises a first focusing lens (5), an aperture (6) and a collimating lens (7); the spatial filter performs a filtering operation, specifically: The first-order diffracted light reflected by the second plane total reflection mirror (4) is focused onto the aperture (6) through the first focusing lens (5); the aperture (6) limits the transmission of spectral components that meet only a specific angle; and each spectral component that passes through the aperture (6) passes through the collimating lens (7) and is incident on the third plane total reflection mirror (8).

9. The imaging method of the radio frequency labeling axial single-shot rapid imaging device according to claim 8, characterized in that: Step S3 is specifically as follows: Step S3.1, the detection light beam after the radio frequency tag passes through the beam splitter (10), and then is reflected by the first scanning galvanometer (11) and the second scanning galvanometer (12) in sequence, and then transmitted to the objective lens (13); The objective lens (13) is a dispersive objective lens; through the dispersive objective lens, each modulated spectral component in the detection light beam after the radio frequency labeling is focused to different depths in the axial direction of the sample, thereby simultaneously exciting different depths of the sample to generate signal light respectively; Step S3.2, the signal light generated at each depth is incident on the objective lens (13), is transmitted through the objective lens (13), and then sequentially passes through the second scanning galvanometer (12), the first scanning galvanometer (11) and the beam splitter (10) to be reflected to the second focusing lens (14); the signal light is focused to the single pixel detector (15) through the second focusing lens (14), and the output of the single pixel detector (15) is connected to the data acquisition circuit (16); Since each modulated spectral component has a different modulation frequency, each signal light generated by exciting the sample also has a different modulation frequency. Therefore, the single-pixel detector (15) recognizes each signal light in the modulation frequency domain through the modulation frequency of each signal light, thereby achieving axial single-shot rapid imaging.

10. The imaging method of the radio frequency labeling axial single-shot rapid imaging device according to claim 9, characterized in that: The axial single-shot rapid imaging further comprises: By adjusting the driving signal of the acousto-optic deflector (2), the spectral components passing through the aperture (6) are adjusted, and then the focusing depth of each modulated spectral component after passing through the objective lens (13) is adjusted, thereby achieving axial random rapid imaging.

Citation Information

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