Laser beam splitter and application method thereof

By designing a shielding cavity structure in the laser beam splitter, integrating the beam splitter and using thermal insulation and thermal conductive layers, the stability problem of the laser beam splitter under temperature changes is solved, and higher working stability and temperature uniformity are achieved.

CN119987038APending Publication Date: 2025-05-13GUANGDONG INST OF LASER PLASMA ACCELERATOR TECH
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Patent Information

Application Number
CN202510351547.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-24
Publication Date
2025-05-13

AI Technical Summary

Technical Problem

In laser instruments, high-power laser beams need to be coupled separately after beam splitting, which requires the temperature and vibration stability of the beam splitter. However, temperature changes in the constant temperature environment controlled by air conditioning equipment will lead to a large displacement of the laser beam position, affecting the working stability of the beam splitter.

Method used

A laser beam splitter is designed, using a shielding cavity structure, integrating the beam splitter into the shielding cavity, and aligning the light path through the incident light hole and the exit light hole and its aperture, and using the thermal insulation and thermal conductivity layer structure of the shielding cavity to reduce the impact of temperature changes on the beam splitter.

Benefits of technology

Through the design of the shielding cavity structure, the impact of temperature changes on the laser beam splitter is reduced, the working stability is improved, and the design of the dual thermally conductive laminated thermal insulation layer is achieved, better thermal insulation and temperature homogenization effects are achieved.

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Abstract

The invention provides a laser beam splitter and an application method thereof. The laser beam splitter comprises a shielding cavity and a beam splitter body arranged in the shielding cavity. Wherein the shielding cavity is of an internal cavity structure; the shielding cavity is used for shielding heat exchange between the interior of the cavity and the external environment. An incident light hole and an emergent light hole are formed in the side surface of the shielding cavity; an incident light diaphragm is mounted on the incident light hole and is used for adjusting the laser beam for alignment and adjusting the size of the light hole; an emergent light diaphragm is mounted on the emergent light hole and is used for adjusting emergent light beams for alignment and adjusting the size of the light hole; a laser beam is adjusted and aligned through an incident light diaphragm, then passes through an incident light hole, enters the shielding cavity, and is split through a beam splitter to obtain a plurality of split light beams; the split light beam passes through the emergent light hole, is adjusted by the emergent light diaphragm and then is emitted out of the shielding cavity; according to the technical scheme, the influence of temperature change on the laser beam splitter can be reduced, and the working stability is improved.
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Description

Technical Field

[0001] The present application relates to the field of laser technology, and in particular to a laser beam splitter and an application method thereof. Background Art

[0002] In some laser instruments, a laser beam splitter is used to split a high-power laser beam into multiple laser beams. The split laser beams need to be coupled separately, and the coupling position accuracy reaches the sub-micron (μm) level, which places very high demands on the beam splitter. To ensure the stability of the position parameters of the two-branch lasers, it is necessary to eliminate the influence of environmental factors such as temperature and vibration. The conventional practice is usually to use air-conditioning equipment to control temperature changes so that the splitter works in a relatively stable constant temperature environment.

[0003] However, when using air conditioning equipment to achieve a constant temperature environment, the temperature periodic variation range is large, often reaching about 3°C. The temperature variation range will cause a large displacement of the laser beam position. In such a temperature variation range, the laser beam position will be displaced by more than μm, thereby affecting the working stability of the spectrometer. Summary of the invention

[0004] The purpose of the present application is to solve one of the above-mentioned technical defects and to provide a laser beam splitter and an application method thereof, which can improve the working stability of the laser beam splitter.

[0005] A laser beam splitter comprises: a shielding cavity and a beam splitter built in the shielding cavity; wherein the shielding cavity is an internal cavity structure;

[0006] The shielding cavity is used for heat exchange between the inside of the shielding cavity and the external environment;

[0007] An incident light hole and an exit light hole are provided on the side of the shielding cavity;

[0008] An incident light diaphragm is installed on the incident light hole, which is used to adjust the alignment of the laser beam and adjust the size of the light hole;

[0009] An exit light aperture is installed on the exit light hole, which is used to adjust the alignment of the exit light beam and adjust the size of the light hole;

[0010] The laser beam is adjusted and aligned by the incident light diaphragm, passes through the incident light hole and enters the shielding cavity, and is split by the beam splitter to obtain a plurality of split light beams; the split light beams pass through the exit light hole and are adjusted and aligned by the exit light diaphragm and then are emitted to the outside of the shielding cavity.

[0011] In one embodiment, the exit light hole comprises: a reflection light hole and a transmission light hole;

[0012] The split beam includes: a reflected beam and a transmitted beam;

[0013] A reflected light diaphragm is installed on the reflected light hole, which is used to adjust the alignment of the reflected light beam and adjust the size of the light hole;

[0014] A transmitted light diaphragm is installed on the transmitted light hole, which is used to adjust the alignment of the transmitted light beam and adjust the size of the light hole;

[0015] The reflected light beam passes through the reflecting light hole and is emitted to the outside of the shielding cavity, and the transmitted light beam passes through the transmitting light hole and is emitted to the outside of the shielding cavity.

[0016] In one embodiment, the shielding cavity is designed as a cubic cavity structure;

[0017] The incident light hole, the reflected light hole and the transmitted light hole are respectively located on three side surfaces of the shielding cavity; wherein the incident light hole and the transmitted light hole are respectively arranged on opposite sides of the shielding cavity, and the reflected light hole is arranged on the side of the shielding cavity adjacent to the incident light hole.

[0018] In one embodiment, the shielding cavity includes, from inside to outside, an inner heat-conducting layer, a heat-insulating layer, and an outer heat-conducting layer;

[0019] The inner heat-conducting layer is used to even out the heat inside the shielding cavity;

[0020] The heat insulation layer is used to insulate the interior of the cavity;

[0021] The outer heat-conducting layer is used to even out the heat outside the shielding cavity.

[0022] In one embodiment, the inner heat-conducting layer comprises a copper plate with high thermal conductivity, the heat-insulating layer comprises a foam plate or a heat-insulating ceramic layer, and the outer heat-conducting layer comprises a copper plate with high thermal conductivity.

[0023] In one embodiment, the beam splitter comprises: a beam splitter and an angle adjuster; wherein the beam splitter is arranged on the angle adjuster;

[0024] The beam splitter is built into the shielding cavity;

[0025] The angle adjuster is used to adjust the angle of the beam splitter to change the direction of the light path.

[0026] In one embodiment, the angle adjuster is fixedly connected to the bottom surface of the shielding cavity by means of bolts, and a shock absorber is provided between the angle adjuster and the bottom surface of the shielding cavity.

[0027] In one embodiment, the top surface of the shielding cavity is designed to be switchable; wherein, the top surface is in an open state under initial conditions, and is closed after the temperature in the shielding cavity reaches the ambient temperature.

[0028] A method for applying a laser beam splitter, applied to the laser beam splitter, the method comprising:

[0029] emitting a laser beam at a laser light source;

[0030] Adjust the incident light diaphragm and the exit light diaphragm to align the light path;

[0031] The angle adjuster is adjusted so that the outgoing light beam generated by the laser light beam entering the shielding cavity from the incident light aperture is aligned and output from the outgoing light aperture.

[0032] In one embodiment, before the laser light source emits the laser beam, the method further comprises:

[0033] Place the top surface of the shielding cavity in an open state;

[0034] When the split beam output by the laser beam splitter reaches a stable state, it also includes:

[0035] When the internal temperature of the shielding cavity reaches the ambient temperature, the top surface of the shielding cavity is placed in a closed state.

[0036] The technical solution of the above embodiment designs a shielding cavity, integrates the beam splitter in the shielding cavity, and achieves alignment by adjusting the size of the light holes of the diaphragm through the incident light hole and the exit light hole provided on the shielding cavity and their corresponding incident light diaphragm, and finally obtains the required split light beam for output; this technical solution utilizes the shielding effect of the shielding cavity on the beam splitter, which can reduce the impact of temperature changes on the laser beam splitter and improve the working stability.

[0037] Furthermore, by designing a shielding cavity with a double thermal conductive laminate and a thermal insulation layer, better thermal insulation and temperature homogenization effects can be achieved, and the temperature distribution inside and outside the cavity can be uniform.

[0038] Furthermore, the beam splitter integrated with the beam splitter, angle adjuster and shock absorber in the shielding cavity reduces the influence of temperature stress and the influence of environmental vibration, and has high stability.

[0039] Additional aspects and advantages of the present application will be partially given in the following description, which will become apparent from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0041] Figure 1 is a schematic diagram of the structure of a laser beam splitter according to an embodiment;

[0042] Figure 2is a schematic diagram of the external structure of a shielding cavity of an embodiment;

[0043] Figure 3 is a perspective view of a laser beam splitter according to an embodiment;

[0044] Figure 4 is a layered schematic diagram of an example shielding cavity;

[0045] Figure 5 is an exploded diagram of a beam splitter of an embodiment;

[0046] Figure 6 is an exploded view of a laser beam splitter of one embodiment;

[0047] Figure 7 is a schematic diagram of the external structure of the shielding cavity of another embodiment;

[0048] Figure 8 The present invention is a flow chart of an application method of a laser beam splitter according to an embodiment. DETAILED DESCRIPTION

[0049] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be interpreted as limiting the present application.

[0050] Those skilled in the art will appreciate that, unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, but does not exclude the presence or addition of one or more other features, integers, steps, operations.

[0051] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.

[0052] refer to Figure 1 As shown, Figure 1 is a schematic diagram of the structure of a laser beam splitter according to an embodiment of the present invention. Figure 1It is a top view, mainly including: a shielding cavity 01 and a beam splitter 02; wherein the shielding cavity 01 is an internal cavity structure, and the shielding cavity 01 is used for heat exchange between the inside of the shielding cavity and the external environment, so as to stabilize the internal temperature change; the beam splitter 02 is built in the shielding cavity 01, and an incident light hole 11 and an exit light hole 12 are provided on the side 101 of the shielding cavity 01, and an incident light aperture 31 is installed on the incident light hole 11, which can be used to adjust the laser beam for alignment and adjust the size of the light hole to connect the laser beam and adjust the size of the beam; the exit light hole 12 is provided on the side 101 of the shielding cavity 01, and the incident light aperture 31 is provided on the incident light hole 11, which can be used to adjust the laser beam for alignment and adjust the size of the light hole to connect the laser beam and adjust the size of the beam; An exit light diaphragm 32 is installed on 12, which can adjust the exit light beam for alignment and adjust the size of the light hole, so as to adjust the size of the light beam and output the split light beam to the external optical device; the laser light beam is adjusted by the incident light diaphragm 31 and then passes through the incident light hole 11 to enter the inside of the shielding cavity 01, and then is split by the beam splitter 02 to obtain several split light beams, and the split light beams then pass through the exit light hole 12 and are adjusted by the exit light diaphragm 32 and then are emitted to the outside of the shielding cavity 01, and the split light beams are each coupled to the corresponding device for application. Specifically, the incident light diaphragm 31 and the exit light diaphragm 32 can be adjusted according to the size of the laser light beam, which is convenient for aligning the optical paths of the laser light beam and the exit light beam when the optical path is constructed, and after the optical path alignment is completed, the incident light diaphragm 31 and the exit light diaphragm 32 are increased to a size that the laser light beam and the exit light beam just pass through completely, thereby ensuring that the actual openings at the incident light hole 11 and the exit light hole 12 of the shielding cavity 01 are not too large, thereby ensuring that a better closed state is formed inside the shielding cavity 01, and at the same time, the alignment state of the laser light beam and the exit light beam can also be recorded, which is convenient for restoring the optical path to the initial state.

[0053] As in the technical solution of the above-mentioned embodiment, a shielding cavity is designed, and the beam splitter is integrated in the shielding cavity. The incident light hole and the exit light hole and their corresponding incident light diaphragm and exit light diaphragm are arranged on the shielding cavity, and the alignment is achieved by adjusting the light hole size of the diaphragm, and finally the required split light beam is obtained for output; the shielding effect of the shielding cavity on the beam splitter can reduce the influence of temperature changes on the laser beam splitter, thereby improving the working stability.

[0054] In one embodiment, Figure 1 In the figure, the beam splitter 02 can split the incident laser beam into two split beams, namely a reflected beam and a transmitted beam. Correspondingly, the output light hole 12 opened on the shielding cavity 01 includes a reflected light hole 12a and a transmitted light hole 12b; accordingly, the reflected light beam passes through the reflected light hole 12a and is emitted to the outside of the shielding cavity 01, and the transmitted light beam passes through the transmitted light hole 12b and is emitted to the outside of the shielding cavity 01.

[0055] In one embodiment, the shielding cavity 01 is designed as a cavity structure; its external structure can be designed into a specific shape, such as a sphere, a polyhedron, etc. In this embodiment, a cubic cavity structure is used as an example; Figure 1 and Figure 2 As shown, Figure 2 It is a schematic diagram of the external structure of the shielding cavity of an embodiment. In this embodiment, the incident light hole 11, the reflected light hole 12a and the transmitted light hole 12b are respectively located on three side surfaces 101 of the shielding cavity 01; wherein, the incident light hole 11 and the transmitted light hole 12b are respectively arranged on the side surfaces 101 opposite to the shielding cavity 01, and the reflected light hole 12a is arranged on the side surface 101 of the shielding cavity 01 adjacent to the incident light hole 11.

[0056] In one embodiment, Figure 3 As shown, Figure 3 is a perspective view of a laser beam splitter according to an embodiment of the present invention, Figure 3 As shown in the perspective view, an incident light diaphragm 31 is installed on the incident light hole 11 of the shielding cavity 01 for adjusting the size of the incident light beam; correspondingly, a reflected light diaphragm 32a is installed on the reflected light hole 12a, and a transmitted light diaphragm 32b is installed on the transmitted light hole 12b. The reflected light diaphragm 32a and the transmitted light diaphragm 32b can be adjusted according to the sizes of the reflected light beam and the transmitted light beam, respectively, so that it is convenient to align the light paths of the reflected light beam and the transmitted light beam when the light path is constructed, and after the light path alignment is completed, the reflected light diaphragm 32a and the transmitted light diaphragm 32b are increased to a size that the reflected light beam and the transmitted light beam just pass through completely, thereby ensuring that the actual openings of the reflected light hole 12a and the transmitted light hole 12b of the shielding cavity 01 are not too large, thereby ensuring that a better closed state is formed inside the shielding cavity 01, and at the same time, the alignment state of the laser beam and the outgoing light beam can also be recorded, so as to restore the light path to the initial state.

[0057] Specifically, the aperture can be adjusted to different opening sizes, thereby adjusting the size of the laser beam, thereby facilitating alignment of the optical path of the laser beam during use.

[0058] In one embodiment, Figure 4 As shown, Figure 4 It is a schematic diagram of the layers of an exemplary shielding cavity, wherein the shielding cavity 01 includes an inner heat-conducting layer 011 and a heat-insulating layer 012 from the inside to the outside; illustratively, the heat-insulating layer 012 may further include a shaping layer, such as a plastic plate, etc.; preferably, the heat-insulating layer 012 includes an outer heat-conducting layer 013; wherein, the inner heat-conducting layer 011 is used to homogenize the heat inside the shielding cavity 01, the heat-insulating layer 012 is used to insulate the inside of the cavity, and the outer heat-conducting layer 013 is used to homogenize the heat outside the shielding cavity 01; through the design of double heat-conducting laminated heat-insulating layers, the shielding cavity can achieve better heat insulation and temperature homogenization effects, and make the temperature distribution inside and outside the cavity uniform, thereby ensuring the stability of temperature changes.

[0059] Preferably, the inner heat-conducting layer 011 may include a copper plate with high thermal conductivity, the heat-insulating layer 012 may include a foam plate or a heat-insulating ceramic layer, and the outer heat-conducting layer 013 may include a copper plate with high thermal conductivity, etc. Among them, the copper plate with high thermal conductivity of the inner heat-conducting layer 011 has the characteristics of high specific heat capacity and high thermal conductivity, and can quickly homogenize the heat into the internal space of the cavity, and the foam plate can form an effective heat-insulating effect. When used in a room with a relatively constant temperature, after adding the heat-insulating layer 012, the temperature change in the shielding cavity 01 slows down, and the amplitude of the periodic temperature change can be greatly reduced. Preferably, the heat-insulating layer 012 of the bottom surface 102 of the shielding cavity 01 may be a heat-insulating ceramic layer, which can have a better supporting effect and heat-insulating effect, and the heat-insulating layer 012 of the side surface 101 and the top surface 103 of the shielding cavity 01 may be a foam plate. At the same time, the copper plate of the outer heat conducting layer 013 also has the characteristics of high specific heat capacity and high thermal conductivity, which can effectively homogenize the temperature inside the cavity, make the temperature inside the cavity evenly distributed, form a stable working environment, and reduce the impact of temperature changes on the beam splitter 02.

[0060] In one embodiment, Figures 1 to 5 As shown, Figure 5 It is an exploded view of a beam splitter of an embodiment, and the beam splitter 02 may include a beam splitter 21 and an angle adjuster 22; wherein the beam splitter 21 is arranged on the angle adjuster 22, and the beam splitter 21 is built in the shielding cavity 01; wherein the angle adjuster 22 is used to adjust the angle of the beam splitter 21 to change the direction of the light path.

[0061] In one embodiment, Figures 1 to 6 As shown, Figure 6 It is an exploded view of a laser beam splitter of an embodiment. Exemplarily, the angle adjuster 22 can be fixedly connected to the bottom surface 102 of the shielding cavity 01 by bolts and screws; Exemplarily, a shock absorber 23 can also be arranged between the angle adjuster 22 and the bottom surface 102 of the shielding cavity 01 to reduce the impact of vibration.

[0062] Specifically, Figure 6 As shown, the angle adjuster 22 is installed on the bottom surface 102 of the shielding cavity 01 through the shock absorber 23, and the beam splitter 21 is installed on the angle adjuster 22; when in use, the laser beam enters the shielding cavity 01 through the incident light hole 11 and irradiates the beam splitter 21, wherein the transmitted light beam passes through the shielding cavity 01 through the transmitted light hole 12b along the original light path, and the reflected light beam passes through the shielding cavity 01 from the reflected light hole 12a.

[0063] In one embodiment, reference Figure 7 As shown, Figure 71 is a schematic diagram of the external structure of the shielding cavity of another embodiment, wherein the top surface 103 of the shielding cavity 01 is designed to be switchable; wherein the top surface 103 is in an open state under initial conditions, and is closed after the temperatures inside and outside the shielding cavity 01 are consistent.

[0064] Specifically, during initial use, after adjusting the beam splitter 02, the top surface 103 of the shielding cavity 01 is opened. At this time, after the indoor environment drops to a stable temperature, for example, the indoor environment temperature needs to be maintained at 20 degrees. When the temperature in the shielding cavity 01 reaches 20 degrees, the top surface 103 of the shielding cavity 01 is closed, so that the shielding cavity 01 is in a heat-insulating shielding state. During operation, the temperature change value in the shielding cavity 01 is low, thereby maintaining a stable working state.

[0065] As in the scheme of the above embodiment, the top surface 103 of the shielding cavity 01 can be opened before entering into stable operation so that the temperature inside the shielding cavity 01 is consistent with the ambient temperature. After entering into a stable working state, the top surface 103 of the shielding cavity 01 is closed so that a stable shielding space is formed inside the shielding cavity 01 to maintain a stable state.

[0066] refer to Figure 8 As shown, Figure 8 The present invention is a flow chart of an application method of a laser beam splitter according to an embodiment, which mainly includes the following steps:

[0067] S1, a laser light source emits a laser beam.

[0068] Exemplarily, the top surface 103 of the shielding cavity 01 may be placed in an open state first, so that the shielding cavity 01 is connected to the surrounding environment, so that the temperature is adjusted to be consistent.

[0069] S2, adjusting the sizes of the incident light aperture 31 and the outgoing light aperture 32 to align the light paths.

[0070] Specifically, the incident light diaphragm 31, the reflected light diaphragm 32a and the transmitted light diaphragm 32b can be adjusted; thereby, the incident light diaphragm 31, the reflected light diaphragm 32a and the transmitted light diaphragm 32b can be adjusted according to the size of the laser beam, the optical paths of the laser beam, the reflected light beam and the transmitted light beam can be aligned, and after the optical path alignment is completed, the incident light diaphragm 31, the reflected light diaphragm 32a and the transmitted light diaphragm 32b can be increased to a size that the laser beam, the reflected light beam and the transmitted light beam can just pass through completely.

[0071] S3 , adjusting the angle adjuster 22 so that the reflected light beam generated by the laser light beam entering the shielding cavity 01 from the incident light aperture 31 is aligned and output from the outgoing light aperture 32 .

[0072] Specifically, it can be used to assist in beam alignment when building a laser beam splitter. The laser beam and the split beam can be accurately aligned with the help of a spot machine, that is, the optical paths of the reflected beam and the transmitted beam are aligned, and the split beam can be accurately passed through the light hole of the aperture by adjusting the angle.

[0073] As in the scheme of the above-mentioned embodiment, when the internal temperature of the shielding cavity 01 reaches the ambient temperature, the top surface 103 of the shielding cavity 01 is placed in a closed state, so that the interior remains shielded from the outside, thereby maintaining a stable temperature; during normal use, the sizes of the light holes of the incident light aperture 31, the reflected light aperture 32a and the transmitted light aperture 32b can also be adjusted to adjust the incident laser beam and the outgoing output beam.

[0074] Based on the schemes of the above embodiments, a shielding cavity 01 with a heat insulation function is designed, and an incident light diaphragm 31, a transmitted light diaphragm 32b and a reflected light diaphragm 32a are installed at the light hole position; different sizes can be adjusted through the diaphragms, so as to facilitate the alignment of the optical path of the laser beam; in addition, the six surfaces of the shielding cavity 01 are composed of a three-layer structure including an inner heat-conducting layer 011, a heat-insulating layer 012 and an outer heat-conducting layer 013, and from the inside to the outside, a high-thermal-conductivity copper plate, a foam plate and a high-thermal-conductivity copper plate can be used respectively; the high-thermal-conductivity copper plate of the inner heat-conducting layer 011 can homogenize the internal temperature of the shielding cavity 01, and when used in a room with a constant temperature, the temperature change in the shielding cavity 01 becomes slower, and the high specific heat capacity of the high-thermal-conductivity copper plate is utilized. As well as high thermal conductivity, the amplitude of periodic temperature changes in the cavity can be greatly reduced, and the temperature in the cavity can be evenly distributed. At the same time, the high thermal conductivity copper plate of the outer thermal conductive layer 013 can greatly reduce the amplitude of periodic temperature changes outside the cavity, so that the temperature of the environment outside the cavity remains stable; furthermore, the beam splitter 21, angle adjuster 22 and shock absorber 23 of the beam splitter 02 adopt an integrated design scheme, and the beam splitter 21, angle adjuster 22 and shock absorber 23 are integrated and installed in the temperature-stable shielding cavity 01, thereby reducing the influence of thermal stress on the beam splitter 21 caused by periodic changes in ambient temperature, thereby obtaining a laser beam splitter with simple design, convenient installation and stable performance.

[0075] The above description is only a partial implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A laser beam splitter, characterized in that: include: A shielding cavity (01) and a beam splitter (02) built into the shielding cavity (01); wherein the shielding cavity (01) is an internal cavity structure; The shielding cavity (01) is used for heat exchange between the inside of the shielding cavity and the external environment; An incident light hole (11) and an exit light hole (12) are provided on the side surface (101) of the shielding cavity (01); An incident light aperture (31) is installed on the incident light hole (11) for adjusting the alignment of the laser beam and adjusting the size of the light hole; An exit light aperture (32) is installed on the exit light hole (12) and is used to adjust the alignment of the exit light beam and the size of the light hole; The laser beam is adjusted and aligned through the incident light aperture (31) and then passes through the incident light hole (11) to enter the shielding cavity (01), and is split by the beam splitter (02) to obtain a plurality of split light beams; the split light beams pass through the exit light aperture (12) and are adjusted and aligned through the exit light aperture (32) and then are emitted to the outside of the shielding cavity (01).

2. The laser beam splitter according to claim 1, characterized in that: The exit light hole (12) comprises: a reflection light hole (12a) and a transmission light hole (12b); The split beam includes: a reflected beam and a transmitted beam; The reflecting light hole (12a) is provided with a reflecting light diaphragm (32a) for adjusting the alignment of the reflected light beam and adjusting the size of the light hole; The transmission light hole (12b) is provided with a transmission light diaphragm (32b) for adjusting the alignment of the transmission light beam and adjusting the size of the light hole; The reflected light beam passes through the reflecting light hole (12a) and is emitted to the outside of the shielding cavity (01), and the transmitted light beam passes through the transmitting light hole (12b) and is emitted to the outside of the shielding cavity (01).

3. The laser beam splitter according to claim 2, characterized in that: The shielding cavity (01) is designed to be a cubic cavity structure; The incident light hole (11), the reflected light hole (12a) and the transmitted light hole (12b) are respectively located on three side surfaces (101) of the shielding cavity (01); wherein the incident light hole (11) and the transmitted light hole (12b) are respectively arranged on the side surfaces (101) opposite to the shielding cavity (01), and the reflected light hole (12a) is arranged on the side surface (101) of the shielding cavity (01) adjacent to the incident light hole (11).

4. The laser beam splitter according to claim 1, characterized in that: The shielding cavity (01) comprises, from inside to outside, an inner heat-conducting layer (011), a heat-insulating layer (012) and an outer heat-conducting layer (013); The inner heat-conducting layer (011) is used to homogenize the heat inside the shielding cavity (01); The heat insulation layer (012) is used to insulate the interior of the cavity; The outer heat-conducting layer (013) is used to homogenize the heat outside the shielding cavity (01).

5. The laser beam splitter according to claim 5, characterized in that: The inner heat-conducting layer (011) comprises a copper plate with high thermal conductivity, the heat-insulating layer (012) comprises a foam plate or a heat-insulating ceramic layer, and the outer heat-conducting layer (013) comprises a copper plate with high thermal conductivity.

6. The laser beam splitter according to any one of claims 1 to 5, characterized in that: The beam splitter (02) comprises: a beam splitter (21) and an angle adjuster (22); wherein the beam splitter (21) is arranged on the angle adjuster (22); The beam splitter (21) is built into the shielding cavity (01); The angle adjuster (22) is used to adjust the angle of the beam splitter (21) to change the direction of the light path.

7. The laser beam splitter according to claim 6, characterized in that: The angle adjuster (22) is fixedly connected to the bottom surface (102) of the shielding cavity (01) by means of bolts, and a shock absorber (23) is provided between the angle adjuster (22) and the bottom surface (102) of the shielding cavity (01).

8. The laser beam splitter according to claim 1, characterized in that: The top surface (103) of the shielding cavity (01) is designed to be switchable; wherein the top surface (103) is in an open state under initial conditions, and is closed after the temperature in the shielding cavity (01) reaches the ambient temperature.

9. A method for applying a laser beam splitter, characterized in that: Applied to the laser beam splitter of claims 6-8, the method comprising: emitting a laser beam at a laser light source; Adjusting the incident light diaphragm (31) and the outgoing light diaphragm (32) to align the light paths; The angle adjuster (22) is adjusted so that the reflected light beam generated by the laser light beam entering the shielding cavity (01) from the incident light aperture (31) is aligned and output from the exit light aperture (32).

10. The application method of the laser beam splitter according to claim 9, characterized in that: Before the laser light source emits a laser beam, it also includes: placing the top surface (103) of the shielding cavity (01) in an open state; When the split beam output by the laser beam splitter reaches a stable state, it also includes: When the internal temperature of the shielding cavity (01) reaches the ambient temperature, the top surface (103) of the shielding cavity (01) is placed in a closed state.

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