Photomask box with washable base

Abstract

The invention relates to the technical field of semiconductor carriers, in particular to a photomask box with a washable base, which comprises a base and a locking mechanism. The locking mechanism comprises a rotating disc, an elastic connecting piece and a locking plate. The rotating disc comprises a disc body, a connecting column and a sliding groove. Compared with the prior art, by arranging the elastic connecting piece made of the plastic or rubber material, opening, closing and self-locking are achieved, meanwhile, metal ion pollution generated in the acid pickling process is avoided, the base can be cleaned, and meanwhile the base is suitable for the acid-base environment. The arrangement direction of the elastic limiting columns is perpendicular to the movement direction of the locking plate, the length of the elastic connecting piece is shortened, and the structural strength of the elastic connecting piece made of plastic or rubber meets the use requirement. And through the arrangement of the rolling wheels and the locking inclined blocks, the situation that the elastic connecting pieces made of plastic or rubber materials are not enough in strength and cannot support the locking plates is prevented.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor carriers, and in particular to a photomask box with a washable base. Background Art

[0002] A mask box, also known as a photomask box or a photoresist box, is a special container used to store and protect masks in semiconductor manufacturing and lithography processes. The mask is a core component in photolithography technology, engraved with tiny patterns used to manufacture integrated circuits, so the integrity and cleanliness of the mask are critical to the success of the entire manufacturing process. The mask box ensures the safety of the mask during storage and transportation by providing a closed and clean environment to prevent dust, particles and other contaminants from invading the mask. In addition, during transportation within a semiconductor factory and between factories, the mask may be subjected to vibration and impact. The mask box can effectively absorb these external forces and prevent the mask from physical damage through its structure and material design.

[0003] For example, the Chinese utility model application No. 202323190743.3 discloses a wafer box compatible with multiple-size wafer racks, which uses an S-shaped elastic member to cooperate with a locking plate, and inserts the locking plate into the box cover to achieve locking. Although the box cover and the base are fixed, the friction of the locking plate is large, and a tight connection cannot be guaranteed after being inserted into the box cover. In addition, when the product needs to be pickled or is in an alkaline environment, conventional materials such as metal or stainless steel will have metal ions precipitated, which will affect the product. Summary of the invention

[0004] In view of this, the present invention provides a photomask box with a washable base to solve the above technical problems.

[0005] A photomask box with a washable base comprises a base, a box cover buckled on the base, and a locking mechanism arranged in the base. The base comprises a bottom plate. A rotating column, two elastic limiting columns arranged on both sides of the rotating column, two locking limiting areas arranged on both sides of the rotating column and the elastic limiting column, four locking limiting blocks arranged in the locking limiting area, and four locking oblique blocks arranged in the locking limiting area are arranged on the bottom plate. Each of the locking limiting blocks comprises two abutting tops, a connecting portion connected between the two abutting tops, and a buckle portion arranged on the abutting top near the rotating column. The buckle portion is located at the top of the abutting top away from the bottom plate. The locking mechanism comprises a rotating disk, two elastic connecting members arranged between the elastic limiting column and the rotating disk, and two locking plates arranged in the locking limiting area. The rotating disk comprises a disk body, two connecting columns symmetrically arranged on the disk body, and two sliding grooves symmetrically arranged on the disk body. The extended shape of the groove body of the two sliding grooves forms an ellipse. The two ends of the sliding groove are respectively located at the vertices of the major axis and the minor axis of the ellipse. Each of the elastic connectors includes an elastic body, a first connecting end located at one end of the elastic body, and a second connecting end located at the other end of the elastic body. The elastic body is an S-shaped structure made of plastic or rubber. A circular sleeve is arranged on each of the first connecting end and the second connecting end. The first connecting end is sleeved on the connecting column, and the second connecting end is sleeved on the elastic limiting column. Each of the locking plates includes a main board, a sliding end inserted in the sliding groove, two limiting holes opened on the main board, two rollers arranged on the main board, and two locking tongues arranged on the main board. A reinforcing plate is arranged at one end of the limiting hole close to the buckle portion, and when the locking tongue extends from the locking limiting area, it abuts against the buckle portion. The two rollers are arranged on the main board and coincide with the position of the locking bevel. The rotation direction of each roller is consistent with the movement direction of the locking plate where it is located.

[0006] Furthermore, the two locking limit areas are respectively arranged on both sides of the radial direction of the rotating column, and the arrangement direction of the two locking limit areas is perpendicular to the arrangement direction of the two elastic limit columns. The two locking limit areas are respectively arranged in a centrally symmetrical manner with the rotating column as the center of symmetry.

[0007] Furthermore, two lock tongue outlets are provided on the side wall of each locking limit zone at one end away from the rotating column, and the lock tongue outlets are rectangular through holes opened on the side wall of the locking limit zone.

[0008] Furthermore, the locking limit blocks are grouped in two and are respectively arranged in the two locking limit areas. The two locking limit blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is a line connecting the two locking limit areas through the rotating column.

[0009] Furthermore, the locking bevel blocks are grouped in two and are respectively arranged in the two locking limit areas. The two locking bevel blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is a line connecting the two locking limit areas through the rotating column.

[0010] Furthermore, two limiting parts are arranged on one side of the locking limit area on the side of the bottom plate away from the box cover. The limiting parts are arranged on the side of each locking limit area close to the rotating column, and the two limiting parts are centrally symmetrically arranged with the rotating column as the center of symmetry.

[0011] Furthermore, the base also includes a bottom cover that is buckled on the bottom plate, and two arc-shaped key slots are arranged on the bottom cover. The key slots are two through slots that penetrate the bottom cover, and the slot bodies are centrally symmetrically arranged with the center point of the bottom cover as the center of symmetry. The center of the key slot coincides with the center point of the bottom cover, and the extension direction of the slot bodies of the two key slots is located on the edge of the same circle.

[0012] Furthermore, four lock tongue insertion openings are arranged on the side wall of the box cover, and the positions and shapes of the lock tongue insertion openings correspond to the lock tongue outlets.

[0013] Furthermore, the rotating disk also includes a rotating hole arranged at the center point of the disk body, two locking holes symmetrically arranged on the disk body, and two limit baffles symmetrically arranged on the edge of the disk body, and a plurality of connecting sleeves sleeved in the rotating hole and on the connecting column.

[0014] Furthermore, the locking hole, the connecting column, the sliding groove and the limiting baffle are all centrally symmetrically arranged with the rotating hole as the symmetry center.

[0015] Compared with the prior art, the photomask box with a washable base provided by the present invention is elastically connected by setting the elastic connector made of plastic or rubber material, eliminating the use of metal or stainless steel parts, realizing self-locking when opening and closing while avoiding metal ion pollution during pickling, and setting the connecting sleeve made of polytetrafluoroethylene at the rotating connection, while reducing friction, so that the base can be cleaned without affecting the internal structure, and is suitable for acidic or alkaline environments. By setting the arrangement direction of the elastic limit column perpendicular to the movement direction of the locking plate, reducing the distance between the elastic limit column and the connecting column, shortening the length of the elastic connector, the structural strength of the elastic connector made of plastic or rubber meets the use requirements. And by setting the roller and the locking bevel block, the gap between the lock tongue and the lock tongue socket is filled instead of the elastic limit column, so as to prevent the situation that the elastic connector made of plastic or rubber material is not strong enough to support the locking plate. At the same time, by setting the locking limit block to limit the movement of the locking plate, the buckle portion cooperates with the reinforcing plate to prevent the force generated when the box cover is away from the base from being transmitted to the interior through the leverage of the locking plate and causing damage to the internal structural parts made of plastic or rubber. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the exploded structure of a photomask box with a washable base provided by the present invention.

[0017] Figure 2 for Figure 1 Schematic diagram of the exploded structure of the base washable photomask box from another perspective.

[0018] Figure 3 for Figure 1 A schematic diagram of a partial structure of a photomask box with a washable base.

[0019] Figure 4 for Figure 3 An enlarged schematic diagram of the base-cleanable photomask box at A.

[0020] Figure 5 for Figure 4 A schematic side view of the structure of a locking limit block of a photomask box with a washable base.

[0021] Figure 6 for Figure 1 Schematic diagram of the exploded structure of the locking mechanism of the base washable photomask box.

[0022] Figure 7 for Figure 1 A schematic diagram of the assembly structure of a rotating disk, an elastic connecting member and a locking plate of a base-cleanable photomask box in an upward viewing direction.

[0023] Explanation of the accompanying drawings: base 10, bottom plate 11, rotating column 111, elastic limiting column 112, locking limiting area 113, lock tongue outlet 1131, locking limiting block 114, top 1141, connecting part 1142, buckle part 1143, locking bevel block 115, limiting part 116, bottom cover 12, box cover 20, lock tongue socket 21, locking mechanism 30, rotating disk 31, disk body 311, rotating hole 312, locking hole 313, connecting column 314, sliding groove 315, limiting baffle 316, connecting shaft sleeve 317, elastic connecting member 32, elastic body 321, first connecting end 322, second connecting end 323, locking plate 33, main board 331, sliding end 332, limiting hole 333, reinforcing plate 3331, roller 334, lock tongue 335. DETAILED DESCRIPTION

[0024] The specific embodiments of the present invention are further described in detail below. It should be understood that the description of the embodiments of the present invention herein is not intended to limit the protection scope of the present invention.

[0025] like Figures 1 to 7 As shown, it is a schematic diagram of the structure of the base-washable photomask box provided by the present invention. The base-washable photomask box includes a base 10, a box cover 20 buckled on the base 10, and a locking mechanism 30 arranged in the base 10. It can be imagined that the base-washable photomask box also includes some other functional modules such as a valve on the inflation port, a limit buckle for fixing the product, etc., which are well known to those skilled in the art and will not be described one by one here.

[0026] The base 10 includes a rectangular box-shaped bottom plate 11 and a bottom cover 12 buckled on the bottom plate 11 .

[0027] The bottom plate 11 may be a rectangular box-shaped structure, which may be integrally formed by injection molding, and one side is buckled with the box cover 20 and used to place the product. The bottom plate 11 is provided with an opening on the other side away from the box cover 20, and the bottom cover 12 can be buckled on the opening, so that a receiving cavity for setting the locking mechanism 30 is formed inside the bottom plate 11. Figure 3 As shown, the accommodating cavity is provided with a rotating column 111 located at the center point, two elastic limiting columns 112 arranged on both sides of the rotating column 111, two locking limiting areas 113 arranged on both sides of the rotating column 111 and the elastic limiting column 112, four locking limiting blocks 114 arranged in the locking limiting area 113, four locking bevel blocks 115 arranged in the locking limiting area 113, and two limiting parts 116 arranged on one side of the locking limiting area 113.

[0028] The rotating column 111 is a columnar protrusion arranged at the center point of the bottom plate 11, and the protrusion direction is from the bottom plate 11 toward the side away from the box cover 20, so as to serve as a rotation center for the rotating disk 31 of the locking mechanism 30 described below to rotate around it, which will be described in detail below in conjunction with the corresponding components of the locking mechanism 30.

[0029] The two elastic limit columns 112 are both columnar protrusions arranged on the base plate 11, parallel to and spaced apart from the rotating column 111, and respectively located on both sides of the radial direction of the rotating column 111, and both are centrally symmetrically arranged with the rotating column 111 as the center of symmetry, so as to be used for setting the elastic connecting member 32 described below of the locking mechanism 30, which will be described in detail below in conjunction with the corresponding components of the locking mechanism 30.

[0030] The two locking limit areas 113 are used to set the locking plate 33 of the locking mechanism 30 described below. The two locking limit areas 113 are respectively set on both sides of the radial direction of the rotating column 111, and the arrangement direction of the two locking limit areas 113 is perpendicular to the arrangement direction of the two elastic limit columns 112. The specific reason will be explained below in conjunction with the elastic connector 32. The two locking limit areas 113 are respectively centrally symmetrically arranged with the rotating column 111 as the symmetry center, so that the corresponding components arranged in the two locking limit areas 113 can move synchronously. In addition, two lock tongue outlets 1131 are provided on the side wall of each locking limit area 113 away from the rotating column 111. The lock tongue outlet 1131 is a rectangular through hole opened on the side wall of the locking limit area 113, so that the lock tongue 335 of the locking mechanism 30 described below can be extended or retracted, which will be described in detail below in conjunction with the corresponding components of the locking mechanism 30.

[0031] Among the four locking limit blocks 114, two are set in a group and are respectively arranged in the two locking limit areas 113, so as to limit the corresponding components arranged in the two locking limit areas 113. The two locking limit blocks 114 in the same locking limit area 113 are arranged axially symmetrically, and the axis of symmetry is the line connecting the two locking limit areas 113 through the center of the rotating column 111, so as to ensure that the corresponding components arranged in the two locking limit areas 113 are uniformly resisted.

[0032] Each locking limit block 114 is composed of two T-shaped structures connected together, and each includes two abutting tops 1141, a connecting portion 1142 connected between the two abutting tops 1141, and a buckle portion 1143 arranged on the abutting top 1141 on the side close to the rotating column 111. The abutting top 1141 is a protruding structure arranged on the bottom plate 11, and the two abutting tops 1141 are arranged at intervals and in parallel to play a role of abutting. The connecting portion 1142 is connected and supported between the two abutting tops 1141, and the extending direction of the connecting portion 1142 is parallel to the arrangement direction of the two locking limit areas 113 to obtain a more stable abutting force. The buckle portion 1143 is arranged on the side of the abutting top 1141 facing the rotating column 111, and is located at the top of the abutting top 1141 away from the bottom plate 11. The buckle portion 1143 is a block-shaped protrusion with a right-angled trapezoidal cross-section. Specifically, the lower base of the buckle portion 1143 is connected to the abutting top portion 1141, the upper base is arranged toward the rotating column 111, and the right-angle waist is toward the side where the bottom plate 11 is located, so as to abut and buckle the corresponding components arranged in the locking mechanism 30, which will be specifically described in detail below in conjunction with the corresponding components of the locking mechanism 30.

[0033] Among the four locking bevel blocks 115, two are set in a group and are respectively arranged in the two locking limit areas 113. The two locking bevel blocks 115 in the same locking limit area 113 are arranged axially symmetrically, and the axis of symmetry is the line connecting the two locking limit areas 113 passing through the rotating column 111. Each locking bevel block 115 is a block-shaped protrusion with a right-angled trapezoidal cross section arranged on the bottom plate 11. Specifically, the upper base of the locking bevel block 115 is connected to the bottom plate 11, and the lower base is arranged on the side away from the bottom plate 11. The waist is facing the side where the rotating column 111 is located, so as to cooperate with the roller 334 of the locking mechanism 30 described below, which will be described in detail below in conjunction with the corresponding components of the locking mechanism 30.

[0034] The limiting portion 116 is arranged on one side of each of the locking limiting areas 113 close to the rotating column 111, and the two limiting portions 116 are centrally symmetrically arranged with the rotating column 111 as the center of symmetry, so as to cooperate with the rotation of the rotating disk 31 described below of the locking mechanism 30, and to limit and block. The position of the limiting portion 116 is determined by the elastic force and size of the elastic connecting member 32, which will be described in detail below in conjunction with the corresponding components of the locking mechanism 30.

[0035] The bottom cover 12 may be a rectangular plate-shaped structure, which may be integrally formed by injection molding, and connected and fixed to the opening of the bottom plate 11 by elastic buckles, so as to cover the accommodating cavity of the locking mechanism 30. In addition, the bottom cover 12 is also provided with a plurality of other components, including but not limited to positioning components, check valves, and equipment nameplates, etc., which are all common technologies used in the field of semiconductor carriers and are not the main content of this application, so they will not be described in detail one by one here.

[0036] The bottom cover 12 is provided with two arc-shaped key slots 121. The key slots 121 are through slots that penetrate the bottom cover 12, and the slot bodies are centrally symmetrically arranged with the central axis of the rotating column 111 as the symmetry center. The center of the key slots 121 is located on the central axis of the rotating column 111, and the slot bodies of the two key slots 121 extend in the same circle, so that locking and unlocking can be performed with one unlocking key, which is a well-known technology for those skilled in the art and will not be described in detail here.

[0037] The box cover 20 is a rectangular box with a single-side opening, and has a receiving cavity for placing the photomask storage box 20. The opening of the box cover 20 is snapped onto the base 10 to form a closed rectangular box, so that the photomask can be placed in the wafer storage box 20 and will not be contaminated by dust or other substances during transportation. Accordingly, a circle of sealing gaskets is also provided on the edge where the box cover 20 contacts the base 10, or on the base 10, to ensure the sealing performance of the interior formed by the box cover 20 and the base 10 after the two are in contact.

[0038] Four lock tongue insertion holes 21 are provided on the side wall of the box cover 20, and the positions and shapes of the lock tongue insertion holes 21 correspond to the lock tongue outlet 1131, so that the lock tongue 335 extending from the lock tongue outlet 1131 can be inserted, so that when the box cover 20 is buckled on the base 10, it is locked to prevent the box cover 20 from being separated from the base 10.

[0039] The locking mechanism 30 includes a rotating disk 31 disposed on the rotating column 111 , two elastic connecting members 32 respectively disposed between the elastic limiting columns 112 and the rotating disk 31 , and two locking plates 33 respectively disposed in the locking limiting areas 113 .

[0040] The rotating disk 31 can be made of hard plastic injection molding and integrally formed to prevent the base 10 from being affected by an acid or alkaline environment when cleaning. Figure 6As shown, the rotating disk 31 includes a disk-shaped disk body 311, a rotating hole 312 set at the center point of the disk body 311, two locking holes 313 symmetrically set on the disk body 311, two connecting pillars 314 symmetrically set on the disk body 311, two sliding grooves 315 symmetrically set on the disk body 311, and two limit blocking pieces 316 symmetrically set on the edge of the disk body 311, and a plurality of connecting sleeves 317 sleeved in the rotating hole 312 and on the connecting pillars 314. The locking hole 313, connecting pillars 314, sliding grooves 315 and limit blocking pieces 316 are all centrally symmetrically set with the rotating hole 312 as the symmetric center, so as to rotate together with the rotating disk 31.

[0041] The disk body 311 is a disk-shaped structure and is used as a main body connecting the two elastic connecting members 32 and the two locking plates 33 .

[0042] The rotating hole 312 is a through hole that passes through the center of the disk body 311, and a snap-fitting step is provided on the inner wall of the rotating hole 312 to facilitate snapping, so as to facilitate the disk body 311 to be fixedly sleeved on the rotating column 111 for rotation. A snap spring can be provided on the snap-fitting step to fix the positional relationship between the disk body 311 and the rotating column 111.

[0043] The two lock holes 313 are respectively arranged on both sides of the rotating hole 312, and are two circular holes with closed bottoms, so that the lock holes 313 are exposed and inserted with keys, and external garbage will not enter the locking mechanism 30 from the lock holes 313. The line connecting the centers of the two lock holes 313 coincides with the diameter of the rotating hole 312, and the positions of the lock holes 313 and the key slots 121 coincide, so that when the key is used, the key passes through the key slots 121 and is inserted into the lock holes 313, and the rotating disk 31 can be driven to rotate by turning the key. The connection line of the two lock holes 313 and the connection of the two connecting posts 314 have a certain angle, which is determined by the positions of the lock holes 313, the connecting posts 314, and the sliding slots 315, which will be described in detail below.

[0044] like Figure 4As shown, the connecting posts 314 are respectively arranged on both sides of the rotating hole 312, and are two columnar protrusions arranged on the disk body 311, which are used to respectively connect one end of the two elastic connecting members 32. The connecting posts 314 are arranged on the other side of the hole of the lock hole 313, that is, the extending direction of the connecting posts 314 is opposite to the extending direction of the opening of the lock hole 313, so that the connecting structure of the locking mechanism 30 is inside the assembly structure of the base 10, and the position where the key is inserted is outside the assembly structure of the base 10 exposed on the surface, so as to prevent external dust or impurities from affecting the operation of the connecting structure of the locking mechanism 30. The center line of the two connecting posts 314 coincides with the diameter of the rotating hole 312, so that when the disk body 311 rotates, the two elastic connecting members 32 are respectively driven to rotate simultaneously.

[0045] The sliding grooves 315 are arranged on both sides of the rotating hole 312, and are two grooves arranged on the disk body 311, so as to cooperate with the locking plate 33. The notch directions of the two sliding grooves 315 are consistent with the protruding directions of the connecting column 314, so as to facilitate the insertion of the corresponding parts of the locking plate 33, which will be described in detail below in conjunction with the corresponding parts of the locking plate 33. The extended shape of the groove body of the two sliding grooves 315 forms an ellipse, and the two ends of the sliding groove 315 are respectively located at the vertices of the major axis and the minor axis of the ellipse, that is, one end of the sliding groove 315 is farthest from the rotating hole 312, and the other end of the sliding groove 315 is closest to the rotating hole 312, so that when the locking plate 33 is connected to the rotating disk 31, by rotating the rotating disk 31, the distance between the locking plate 33 and the rotating hole 312 will change accordingly, thereby realizing the reciprocating motion of the locking plate 33 in the locking limit area 113.

[0046] The two limit baffles 316 are both arranged on the radial sidewalls of the disk body 311 and are hook-shaped structures protruding radially along the disk body 311. When the rotating disk 31 is sleeved on the rotating column 111, the distance from the limit portion 116 to the rotating hole 312 is smaller than the distance from the free end where the upper bottom of the limit baffle 316 is located to the rotating hole 312, so that when the rotating disk 31 rotates, the limit baffle 316 will abut against the limit portion 116, so that the limit portion 116 can limit the rotation angle of the rotating disk 31, prevent the elastic limit range of the elastic connector 32 from being exceeded due to excessive rotation, and avoid elastic fatigue of the elastic connector 32.

[0047] The connecting sleeve 317 is arranged between the rotating hole 312 and the rotating column 111, and between the elastic connecting piece 32 and the connecting column 314. The connecting sleeve 317 can be made of polytetrafluoroethylene to utilize the low friction coefficient of polytetrafluoroethylene itself, so that when the rotating disk 31 is sleeved on the rotating column 111 and rotates, the friction force is small. At the same time, since polytetrafluoroethylene has better acid and alkali resistance and resistance to various organic solvents, the connecting sleeve will not be deformed or damaged when the product is pickled or in an alkaline environment. It replaces metal or stainless steel materials, avoids metal ion contamination, and improves the cleanliness of the mask box.

[0048] Each of the elastic connecting members 32 may be integrally formed and include an elastic body 321 , a first connecting end 322 located at one end of the elastic body 321 , and a second connecting end 323 located at the other end of the elastic body 321 .

[0049] The elastic body 321 is an S-shaped structure and can be made of plastic or rubber material with strong elasticity to replace the metal or stainless steel used in traditional equipment, so that the product can avoid metal ion precipitation when pickling or in an alkaline environment.

[0050] A circular sleeve is disposed on each of the first connection end 322 and the second connection end 323 . The first connection end 322 is sleeved on the connection column 314 , and the second connection end 323 is sleeved on the elastic limiting column 112 , so as to elastically limit the rotating disk 31 .

[0051] As the rotating disk 31 rotates, when the arrangement direction of the two connecting columns 314 on an elastic connecting member 32 coincides with the arrangement direction of the two elastic limiting columns 112, the distance between the connecting column 314 and the elastic limiting column 112 is the shortest, and the elastic connecting member 32 is in a compressed state. As the rotating disk 31 continues to rotate, the distance between the connecting column 314 and the elastic limiting column 112 increases, and the elasticity of the elastic connecting member 32 is released until the rotation ends. At this time, the elastic connecting member 32 is in a relaxed state, so that the elastic connecting member 32 only deforms during the rotation of the rotating disk 31, and is in a relaxed state after unlocking or locking. At the same time, since the rotation of the rotating disk 31 causes the elastic connecting member 32 to deform elastically, the locking mechanism 30 can be kept in an open state or a locked state, and no locking or unlocking occurs when the rotating disk 31 is rotated without a key.

[0052] In order to achieve pickling of the product or use it in an alkaline environment, the elastic connector 32 is made of plastic or rubber instead of conventional metal materials on the market, which reduces the structural strength of the elastic connector 32. Therefore, the arrangement direction of the elastic limit column 112 is perpendicular to the movement direction of the locking plate 33. On the one hand, the distance between the elastic limit column 112 and the connecting column 314 can be adjusted, the length of the elastic connector 32 can be shortened, and the requirements for the structural strength of the elastic connector 32 can be reduced. On the other hand, the locking plate 33 can be prevented from squeezing the elastic limit column 112 in the axial direction of the rotating disk 31.

[0053] Since the arrangement direction of the elastic limiting column 112 is perpendicular to the movement direction of the locking plate 33, the elastic connecting member 32 will not directly act on the locking plate 33, and the locking plate 33 is directly driven by the rotating disk 31, so the rotating disk 31 is provided with two sliding grooves 315. The two sliding grooves 315 are located on both sides of the arrangement direction of the two elastic limiting columns 112. At the same time, when the elastic connecting member 32 is in a free state, the locking plate 33 is either in a locked state or an unlocked state, so the positions of the two connecting columns 314 must meet the above requirements. Therefore, after the positions of the two connecting columns 314 are determined, the positions of the two locking holes 313 are determined. Thus, the setting of the positions and sizes of the elastic limiting column 112, the sliding groove 315, the connecting column 314, and the locking hole 313 is completed.

[0054] Each locking plate 33 includes a main board 331 as a main body, a sliding end 332 inserted in the sliding groove 315, two limiting holes 333 opened on the main board 331, two rollers 334 arranged on the main board 331, and two locking tongues 335 arranged on the main board 331.

[0055] The main board 331 is disposed in the locking limit area 113 , and can move in two directions, approaching and moving away from the rotating column 111 , in the locking limit area 113 .

[0056] The sliding end 332 is located at one end of the main board 331 close to the rotating column 111, and is provided with a columnar protrusion perpendicular to the main board 331, the protrusion direction is toward the rotating disk 31, so as to be inserted into the sliding groove 315, and when the rotating disk 31 rotates, the columnar protrusion of the sliding end 332 slides along the groove body of the sliding groove 315, thereby driving the locking plate 33 away from and close to the rotating column 111, and realizing the reciprocating movement of the locking plate 33 in the locking limit area 113. Correspondingly, a connecting shaft sleeve 317 can be sleeved on the columnar protrusion of the sliding end 332 to reduce the friction between the sliding end 332 and the sliding groove 315.

[0057] The limiting hole 333 is provided on the main board 331. When the locking plate 33 is assembled in the locking limiting area 113, the limiting hole 333 and the locking limiting block 114 are overlapped in position, and the length of the limiting hole 333 in the movement direction of the locking plate 33 is greater than the distance between the outer sides of the two abutting tops 1141 of the locking limiting block 114, so that when the locking plate 33 moves in the locking limiting area 113, the movement range of the locking plate 33 is limited. A reinforcing plate 3331 is provided at one end of the limiting hole 333 close to the buckle portion 1143, so as to be clamped and abutted with the buckle portion 1143 when the locking tongue 335 extends out of the locking limiting area 113. Because there must be tolerances between the box cover 20 and the locking tongue 335, and between the locking tongue 335 and the bottom plate 11, and the locking plate 33 is not directly driven by the elastic connector 32, in order to ensure the structural stability between the box cover 20 and the locking plate 33, and between the locking plate 33 and the bottom plate 11, that is, to prevent them from loosening, the locking limit block 114, the roller 334, and the locking bevel block 115 are provided. When the roller 334 rolls onto the locking bevel block 115, it becomes a fulcrum to form a lever structure between the buckle portion 1143, the roller 334, and the locking tongue 335. The lever structure can ensure the structural stability between the box cover 20 and the locking plate 33, and between the locking plate 33 and the bottom plate 11, and prevent shaking. The downward pressure of the box cover 20 on the locking tongue 335 will be converted into pressure toward the rotating disk 31 at the sliding end 332, which will not only affect the rotation efficiency of the rotating disk 31, but excessive pressure will also damage the internal structural parts made of plastic or rubber materials. Therefore, the reinforcement plate 3331 and the buckle part 1143 are provided to effectively prevent this situation.

[0058] The two rollers 334 are both arranged on the main board 331 and coincide with the position of the locking bevel block 115. The rotation direction of each roller 334 is consistent with the movement direction of the locking plate 33, so that when the locking plate 33 moves in the locking limit area 113, the roller 334 moves on the bevel of the locking bevel block 115 to reduce the friction of the movement of the locking plate 33. It can be imagined that in the prior art, the locking plate 33 and the elastic connector 32 are arranged to overlap, and the locking plate 33 is supported by the elastic connector 32 to prevent the locking plate 33 from being displaced in the axial direction of the rotating disk 31. However, in order to achieve pickling of the product or use in an alkaline environment, the elastic connector 32 made of plastic or rubber material cannot effectively support the locking plate 33. Therefore, the roller 334 and the locking bevel block 115 are arranged to make up the gap to prevent the locking plate 33 from being displaced in the axial direction of the rotating disk 31. During locking, due to the provision of the locking bevel 115, when the locking tongue 335 is inserted into the locking tongue socket 21, the distance between the locking tongue 335 and the bottom plate 11 will gradually increase, thereby abutting against the edge of the locking tongue socket 21, thereby filling the gap between the locking tongue 335 and the locking tongue socket 21, and preventing abnormal noise due to vibration during transportation. In addition, during unlocking, when the locking plate 33 moves toward the rotating column 111, the roller 334 will roll down along the locking bevel 115 due to the effect of gravity, ensuring that the locking tongue 335 is completely retracted from the locking tongue outlet 1131, and will not hinder the removal of the box cover 20.

[0059] The two locking tongues 335 are both arranged at the end of the main board 331 away from the sliding end 332, and correspond to the positions of the two locking tongue outlets 1131 respectively, and can completely pass through the locking tongue outlets 1131. The free ends of the two locking tongues 335 away from the main board 331 are also chamfered to play a guiding role when passing through the locking tongue outlets 1131 and inserting into the locking tongue socket 21.

[0060] Compared with the prior art, the photomask box with a washable base provided by the present invention is elastically connected by setting the elastic connector 32 made of plastic or rubber material, eliminating the use of metal or stainless steel parts, realizing self-locking when opening and closing while avoiding metal ion pollution during pickling, and setting the connecting sleeve 317 made of polytetrafluoroethylene at the rotating connection, while reducing friction, so that the base 10 can be cleaned without affecting the internal structure, and is suitable for acidic or alkaline environments. By setting the arrangement direction of the elastic limit column 112 to be perpendicular to the movement direction of the locking plate 33, reducing the distance between the elastic limit column 112 and the connecting column 314, shortening the length of the elastic connector 32, the structural strength of the elastic connector 32 made of plastic or rubber meets the use requirements. And by setting the roller 334 and the locking bevel 115, the gap between the lock tongue 335 and the lock tongue socket 21 is made up instead of the elastic limit column 112, so as to prevent the elastic connector 32 made of plastic or rubber from being insufficiently strong and unable to support the locking plate 33. At the same time, by setting the locking limit block 114 to limit the movement of the locking plate 33, the buckle portion 1143 cooperates with the reinforcing plate 3331 to prevent the force generated when the box cover 20 is away from the base 10 from being transmitted to the inside through the leverage of the locking plate 33, thereby preventing the internal structural parts made of plastic or rubber from being damaged.

[0061] The above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modification, equivalent substitution or improvement within the spirit of the present invention is included in the scope of the claims of the present invention.

Claims

1. A photomask box with a washable base, characterized in that: The photomask box with a washable base includes a base, a box cover that is buckled on the base, and a locking mechanism arranged in the base. The base includes a bottom plate, a rotating column is arranged on the side of the bottom plate away from the box cover, two elastic limiting columns are arranged on both sides of the rotating column, two locking limiting areas are arranged on both sides of the rotating column and the elastic limiting column, four locking limiting blocks are arranged in the locking limiting area, and four locking oblique blocks are arranged in the locking limiting area. Each of the locking limiting blocks includes two abutting tops, a connecting portion connected between the two abutting tops, and a buckle portion arranged on the abutting top close to the rotating column. The buckle portion is located at the top of the abutting top away from the bottom plate. The locking mechanism includes a rotating disk, two elastic connecting members arranged between the elastic limiting column and the rotating disk, and two locking plates arranged in the locking limiting area. The rotating disk includes a disk body, two connecting columns symmetrically arranged on the disk body, and two sliding grooves symmetrically arranged on the disk body. The grooves of the two sliding grooves The extended shape of the body forms an ellipse, and the two ends of the sliding groove are respectively located at the vertices of the major axis and the minor axis of the ellipse. Each of the elastic connecting members includes an elastic body, a first connecting end located at one end of the elastic body, and a second connecting end located at the other end of the elastic body. The elastic body is an S-shaped structure made of plastic or rubber material. A circular sleeve is arranged on the first connecting end and the second connecting end. The first connecting end is sleeved on the connecting column, and the second connecting end is sleeved on the elastic limiting column. Each of the locking plates includes a main board, a sliding end inserted in the sliding groove, two limiting holes opened on the main board, two rollers arranged on the main board, and two locking tongues arranged on the main board. A reinforcing plate is arranged at one end of the limiting hole close to the buckle portion. When the locking tongue extends from the locking limiting area, it is pressed against the buckle portion. The two rollers are arranged on the main board and coincide with the position of the locking bevel. The rotation direction of each roller is consistent with the movement direction of the locking plate.

2. The photomask box with a washable base as claimed in claim 1, characterized in that: The two locking limit areas are respectively arranged on both sides of the radial direction of the rotating column, and the arrangement direction of the two locking limit areas is perpendicular to the arrangement direction of the two elastic limit columns. The two locking limit areas are respectively arranged in a centrally symmetrical manner with the rotating column as the symmetry center.

3. The photomask box with a washable base as claimed in claim 2, characterized in that: Two lock tongue outlets are arranged on the side wall of each locking limit zone at one end away from the rotating column, and the lock tongue outlets are rectangular through holes opened on the side wall of the locking limit zone.

4. The photomask box with a washable base as claimed in claim 1, characterized in that: The locking limit blocks are grouped into two and are respectively arranged in the two locking limit areas. The two locking limit blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is the line connecting the two locking limit areas through the rotating column.

5. The photomask box with a washable base as claimed in claim 1, characterized in that: The locking bevel blocks are grouped into two and are respectively arranged in the two locking limit areas. The two locking bevel blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is the line connecting the two locking limit areas through the rotating column.

6. The photomask box with a washable base as claimed in claim 1, characterized in that: Two limiting parts are also provided on one side of the locking limit area on the side of the bottom plate away from the box cover. The limiting parts are provided on one side of each locking limit area close to the rotating column, and the two limiting parts are centrally symmetrically arranged with the rotating column as the center of symmetry.

7. The photomask box with a washable base as claimed in claim 1, characterized in that: The base also includes a bottom cover that is buckled on the bottom plate, and two arc-shaped key slots are arranged on the bottom cover. The key slots are two through slots that penetrate the bottom cover, and the slot bodies are centrally symmetrically arranged with the center point of the bottom cover as the symmetry center. The center of the key slot coincides with the center point of the bottom cover, and the extension direction of the slot bodies of the two key slots is located on the edge of the same circle.

8. The photomask box with a washable base as claimed in claim 3, characterized in that: Four locking tongue insertion openings are arranged on the side wall of the box cover, and the positions and shapes of the locking tongue insertion openings correspond to the locking tongue outlets.

9. The photomask box with a washable base as claimed in claim 1, characterized in that: The rotating disk also includes a rotating hole arranged at the center point of the disk body, two locking holes symmetrically arranged on the disk body, two limit baffles symmetrically arranged on the edge of the disk body, and a plurality of connecting sleeves sleeved in the rotating hole and on the connecting column.

10. The photomask box with a washable base as claimed in claim 9, characterized in that: The locking hole, the connecting column, the sliding groove and the limiting baffle are all centrally symmetrically arranged with the rotating hole as the symmetry center.

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