Photovoltaic cell ALD process sheet loading and unloading machine and sheet loading and unloading method

Abstract

The invention relates to the field of photovoltaic cell ALD coating, in particular to a photovoltaic cell ALD process sheet loading and unloading machine and a sheet loading and unloading method, and the photovoltaic cell ALD process sheet loading and unloading machine comprises a fixed rack. The core transporter adopts a grinding helical rack and a ball linear guide rail, and a three-surface guide rail fixing mode is adopted due to large span, so that the rigidity is higher; the servo motor drives the bevel gear, so that the carrying mechanism stably moves in the X direction and the Y direction. Visual inspection is adopted for the incoming material baskets and the incoming material process boats, batch fragmentation caused by wafer missing, groove staggering, wafer stacking and the like of incoming materials of the baskets and the process boats is avoided, visual guidance is adopted for wafer guiding between the process boats and the baskets, repeated batch fragmentation caused by fragment residues is completely eradicated, and the utilization rate of the whole machine is higher. All the mechanism modules are reasonable in layout, the occupied area is small, the productivity is large, and the fragment rate is low; and the tool is clear and smooth in circulation, so that the mutual leading-in and leading-out functions of the silicon wafers from the process boat to the flower basket are realized, and the production cost is greatly reduced.

Description

Technical Field

[0001] The invention belongs to the field of photovoltaic cell ALD coating, and in particular to a photovoltaic cell ALD process film loading and unloading machine and film loading and unloading method. Background Art

[0002] The ALD coating process for photovoltaic cells is a method of manufacturing photovoltaic cells through atomic layer deposition technology. The ALD coating process for photovoltaic cells chemically reacts the surface of the silicon wafers used to form one or more dense passivation films, which is the core process for the preparation of solar photovoltaic cells. The ALD coating process requires that the silicon wafers in the basket (usually a wet basket) after the previous process is completed be loaded into the ALD process boat. After the ALD process is completed, the silicon wafers in the process boat are unloaded into the specified type of basket (usually a dry basket). This process is called loading and unloading wafers.

[0003] In the current existing technology, the silicon wafer material itself has the characteristics of being soft and fragile. If the fragments in the process boat and the basket are not cleaned in time, it will lead to secondary or even several batches of fragments, causing significant economic losses and affecting the utilization rate of the whole machine. The wafer loading capacity of the process boat is usually greater than the wafer loading capacity of the basket, and the relationship is multiple. The existing ALD wafer loading and unloading machine usually unloads the silicon wafer after the process and then loads the wafer before the process again, and repeats this until the loading and unloading action is completed. This results in the presence of both the wafer before and after the process in the process boat, causing great inconvenience to the production and processing of the fragments in the boat; In order to meet the needs of large production capacity, the existing ALD wafer loading and unloading machines occupy a large area and have redundant structures. In addition, as the industry progresses, the thickness of silicon wafers will become thinner and thinner, and the processing mechanism related to silicon wafers is not gentle enough, which is more likely to cause fragments, and there is no residual fragment detection function, resulting in the inefficiency and stability of the wafer loading and unloading machines.

[0004] To this end, the present invention provides a photovoltaic cell ALD process wafer loading and unloading machine and wafer loading and unloading method. Summary of the invention

[0005] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0006] In the first aspect, the technical solution adopted by the present invention to solve its technical problem is: a photovoltaic cell ALD process loading and unloading machine described in the present invention comprises a fixed frame; the interior of the fixed frame is respectively provided with a flower basket AGV car docking transmission mechanism, a seven-axis robot flower basket handling mechanism, a defective flower basket processing mechanism, a flower basket import and export mechanism, a silicon wafer regular combing mechanism, a process boat import and export mechanism, a silicon wafer suction and transfer mechanism, a process boat handling mechanism, a flower basket visual inspection mechanism, a process boat loading and unloading station visual inspection mechanism, a flower basket silicon wafer top sheet mechanism and a process boat silicon wafer top sheet mechanism; The flower basket AGV vehicle docking transmission mechanism includes a flower basket receiving track, a flower basket buffer track, a robot docking track, an aluminum profile and a guide part. The guide part is made of engineering plastic material. The guide part of the engineering plastic material is fixed on the upper surface of the aluminum profile. The two ends of the aluminum profile are respectively provided with a driving belt, a driving pulley, a driving motor and a driven pulley. The driven pulley adopts a top-push tensioning structure. The driving pulley and the driving motor are connected by a transmission shaft. The driving motor is fixed on the side of the aluminum profile. A horizontal adjustment mechanism is arranged inside each track. The side plate of the horizontal adjustment mechanism is embedded and fixed with the aluminum profile. A plurality of groups of track drive pulleys are arranged inside the driving pulley; each group of the track drive pulleys is closely adjacent to each other, and a flower basket is arranged on the top surface of the track drive pulley; a transmission line is arranged inside the track drive pulley, and a plurality of sensors are arranged inside the transmission line; a deceleration sensor is arranged on the surface of the flower basket buffer track and the robot docking track; The defective flower basket processing mechanism comprises a flower basket positioning cylinder module, a magnetic suction element and a guide unit; the defective flower basket processing mechanism is composed of a plurality of machined parts to form a bearing platform, the bearing platform is fixed on the guide unit, and position sensing sensors are provided at both ends of the guide unit; The flower basket import and export mechanism includes a flower basket carrier screw transmission module and a flower basket bearing platform. A flower basket positioning anti-fool module is arranged on the outer surface of the flower basket bearing platform. The flower basket import and export mechanism is composed of a plurality of machined parts to form a bearing platform. The bearing platform is fixed on the guide unit, one end of the sliding part of the guide unit is provided with a magnetic attraction element, and both ends of the guide unit are provided with position sensing sensors.

[0007] Preferably, the silicon wafer regular combing mechanism includes a regular opening and closing mechanism, the regular opening and closing mechanism is driven by translation on the bottom surface of the regular opening and closing mechanism, the silicon wafer regular ceramic side comb teeth are arranged on the top inner wall surface of the regular opening and closing mechanism, the silicon wafer regular ceramic side comb teeth are composed of upper and lower layers of side comb teeth, and the length of the lower layer of side comb teeth is greater than that of the upper layer of side comb teeth, the regular side combing mechanism and the opening and closing mechanism are arranged on the inner side of the regular opening and closing mechanism, the opening and closing mechanism is respectively provided with a synchronous belt, a driven wheel and a synchronous pulley, the driven wheel is provided with a tensioning mechanism, an active synchronous pulley, a synchronous belt driving wheel and a transmission shaft, the active synchronous pulleys at both ends are connected by a transmission shaft, and one end of the transmission shaft is connected to the driving motor through a coupling; Regular translation guide rails are arranged on the edge positions on both sides of the regularization mechanism translation drive, and a moving slider is installed on the surface of the regularization mechanism translation guide rail, the moving slider is connected to the synchronous belt, the synchronous belt is meshed with the corresponding synchronous belt pulley, the synchronous belt driving wheels at both ends are connected through a transmission shaft, and one side of the transmission shaft is connected to the driving motor through a coupling, and a regular translation transmission is arranged on the top surface of the regularization mechanism translation drive, and a regular translation tooth pitch adjustment mechanism is arranged on the top surface of the regularization mechanism translation drive and at the edge positions on both ends of the regular translation transmission.

[0008] Preferably, the process boat import and export mechanism includes a process boat flipping platform, a process boat carrier and a process boat flipping drive are fixedly installed on the surface of the process boat flipping platform, a process boat translation platform is fixedly installed on the top surface of the process boat flipping platform, a process boat translation platform is arranged on the outer surface of one end of the process boat flipping platform, a process boat translation platform is arranged on the top surface of the process boat carrier and the process boat flipping drive and on the edge positions on both sides, a plurality of positioning mechanisms are arranged on the process boat translation platform to position the process boat with high precision, and a process boat translation platform guide mechanism and a process boat guide drive are fixedly installed on the surface of the process boat translation platform.

[0009] Preferably, the silicon wafer suction and delivery transfer mechanism includes a welding base, which is fixed on a welding base, and the welding base is fastened to the ground by chemical bolts, a six-axis articulated robot is arranged on the top surface of the welding base, a vacuum control module is installed on the forearm of the six-axis articulated robot, a vacuum control module is fixedly installed on the output end of the six-axis articulated robot, a vacuum suction cup group is arranged on the output end of the vacuum control module, a ceramic suction cup group is arranged on the outer surface of the vacuum suction cup group, the ceramic suction cup group is composed of a plurality of ceramic suction cups, and the number of ceramic sheets corresponds to the amount of sheets loaded in each column of the flower basket.

[0010] Preferably, the process boat transport mechanism includes an X-direction gear rack drive, a Y-direction gear rack drive is arranged on the outer surface of the X-direction gear rack drive, a Z-direction screw drive is slidably sleeved on the outer surface of the Y-direction gear rack drive, a screw module is arranged on the outer surface of the Z-direction screw drive, a process boat clamp is arranged on the sliding seat of the screw module, the process boat clamp is opened and closed by a cylinder drive, and a process boat visual inspection module is arranged on the outer surface of the process boat clamp and at the top edge position.

[0011] Preferably, the flower basket visual inspection mechanism includes a light source, a groove is provided on the outer surface of the light source, and an area array camera is installed inside the groove. The flower basket visual inspection mechanism is used to detect whether there are defects such as missing silicon wafers, misaligned grooves, and multiple wafers per groove inside the flower basket; the process boat visual inspection is used to detect whether there are residual debris inside the process boat and on the surface of the silicon wafers.

[0012] Preferably, the flower basket silicon wafer top sheet mechanism includes flower basket top sheet comb teeth, a top sheet comb tooth fixing piece is fixedly connected to the bottom surface of the flower basket top sheet comb teeth, a lifting drive is slidably sleeved on the back side of the top sheet comb tooth fixing piece, and a lateral translation drive and a translation auxiliary guide rail are respectively provided on the back side of the lifting drive.

[0013] Preferably, the process boat silicon wafer top sheet mechanism includes a vertical lifting drive mechanism, the outer surface of the vertical lifting drive mechanism is provided with process boat top sheet comb teeth, the back of the vertical lifting drive mechanism is provided with a lateral translation auxiliary guide rail, and the outer surface of the lateral translation auxiliary guide rail is provided with a lateral translation drive module.

[0014] Preferably, the seven-axis robot flower basket transporting mechanism includes a seventh-axis driving mechanism, a six-axis robot is arranged on the inner wall surface of the seventh-axis driving mechanism, a flower basket clamping mechanism is arranged on the output end of the six-axis robot, a horizontal adjustment mechanism is fixedly connected to the two side surfaces of the seventh-axis driving mechanism, and a seven-axis robot frame is arranged on the outer surface of the horizontal adjustment mechanism.

[0015] In a second aspect, a method for loading and unloading a photovoltaic cell ALD process comprises the following steps: Step 1. After being transferred to the designated position inside the machine through the AGV docking transmission mechanism, the seven-axis robot adjusts the appropriate posture to grab the flower basket and transfer it to the flower basket visual inspection mechanism for visual inspection. If the visual inspection result meets the use requirements, the flower basket handling robot will continue to transfer the flower basket to the flower basket import and export mechanism. If the visual inspection result does not meet the use requirements, the flower basket handling robot will transfer the flower basket to the defective flower basket processing mechanism, and then return to the AGV track to take another flower basket and continue to transfer it to the flower basket visual inspection position for inspection until an appropriate number of wet flower baskets that meet the requirements are obtained. In the above actions, the defective flower baskets on the defective flower basket mechanism are taken away by the staff for processing, and the qualified wet flower baskets are imported into the flower basket silicon wafer lifting mechanism to prepare the guide; Step 2: The process boat transport mechanism is ready to be transferred to the corresponding position of the process equipment to prepare to transport the full process boat. Before transporting the process boat, the process boat visual line scanning detection module on the transport mechanism scans the process boat up and down. If the scanned process boat does not meet the use requirements, the gripper will not grab it and prompt the host; Step 3, if the scanned process boat meets the use requirements, the transport mechanism will transfer the silicon wafer to the import and export mechanism, the import and export mechanism will transfer the process boat to the position of the silicon wafer top mechanism of the process boat, and the visual inspection mechanism of the process boat loading and unloading position will inspect the boat to check whether there are silicon wafers flat on the surface of the process boat. If there are fragments flat on the surface of the silicon wafer in the boat, an alarm will be issued to prompt manual processing; Step 4. If the visual inspection shows that the process boat meets the requirements, the silicon wafer top sheet mechanism rises to push the silicon wafers out of the process boat. After the silicon wafer regularization comb mechanism regularizes the pushed-out silicon wafers, the silicon wafer suction and transfer mechanism sucks and transfers the silicon wafers to the flower basket silicon wafer top sheet mechanism. After the silicon wafer regularization comb mechanism regularizes the silicon wafers, the flower basket silicon wafer top sheet mechanism falls and brings the silicon wafers into the dry flower basket until the silicon wafers are unloaded.

[0016] The beneficial effects of the present invention are as follows: 1. A photovoltaic cell ALD process wafer loading and unloading machine and wafer loading and unloading method described in the present invention, by setting bevel racks and ball linear guides in the X and Y directions, and the Y direction adopts a three-sided guide fixing method because of the larger span, the rigidity is greater, the bevel racks and bevel gears are meshed with the corresponding ball linear guide sliders and the mechanism moving parts are fixed, and the servo motor drives the bevel gears to enable the transport mechanism to achieve stable movement in the X and Y directions, and at the same time cooperate with the flower basket visual inspection mechanism to detect whether there are defects such as missing silicon wafers, misaligned slots, and multiple wafers per slot in the internal position of the flower basket; and then the process boat visual inspection is used to detect whether there are debris residues in the process boat and on the surface of the silicon wafers, and the debris residues are automatically cleaned; 2. A wafer loading and unloading machine and wafer loading and unloading method for the photovoltaic cell ALD process described in the present invention, wherein the upper and lower layers of side comb teeth are attached to the surface of the silicon wafer, and then the lower layer of side comb teeth are pre-clamped with the silicon wafer through a regular opening and closing drive to achieve initial regularization of the silicon wafer, and then the regular opening and closing mechanism drives the side comb teeth to further clamp the upper layer of short side teeth and the silicon wafer to achieve final regularization of the silicon wafer, and the double-layer side comb tooth regularization mechanism makes the silicon wafer regularization gentle and impact-free, adopts the form of double-sided synchronous belt drive, has high regularization positioning accuracy, greatly reduces the debris caused by regularization, adopts auxiliary guide slide rails to increase the overall rigidity, and the top sheet comb teeth of the process boat can be horizontally translated to multiple points to adapt to the specifications of the process boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below in conjunction with the accompanying drawings.

[0018] Figure 1 is a stereogram of the present invention; Figure 2 It is a three-dimensional diagram of the basket AGV vehicle docking transmission mechanism in the present invention; Figure 3 It is a three-dimensional diagram of the robot docking track in the present invention; Figure 4 It is a three-dimensional diagram of the flower basket clamp mechanism of the present invention; Figure 5 It is a stereoscopic diagram of the flower basket positioning cylinder module of the present invention; Figure 6 It is a stereoscopic diagram of the screw transmission module of the flower basket carrier in the present invention; Figure 7 It is a stereoscopic diagram of the regular ceramic side comb teeth of the silicon wafer in the present invention; Figure 8 It is a three-dimensional diagram of the process boat flip platform in the present invention; Fig. 9 is a three-dimensional diagram of the vacuum control module of the present invention; Fig.10 It is a stereogram of the X-direction gear rack drive in the present invention; Fig.11 It is a stereoscopic diagram of the flower basket visual detection mechanism of the present invention; Fig.12 is a stereoscopic diagram of the translation auxiliary guide rail in the present invention; Fig.13 It is a three-dimensional diagram of the silicon wafer top sheet mechanism of the process boat in the present invention; Fig.14 It is a schematic diagram of the process of the present invention.

[0019] In the figure: 1. Flower basket AGV car docking transmission mechanism; 1-01. Flower basket receiving track; 1-02. Flower basket buffer track; 1-03. Robot docking track; 2. Seven-axis robot flower basket handling mechanism; 2-01. Flower basket gripper mechanism; 2-02. Six-axis robot; 2-03. Seventh axis drive mechanism; 2-04. Horizontal adjustment mechanism; 2-05. Seven-axis robot frame; 3. Defective flower basket processing mechanism; 3-01. Flower basket positioning cylinder module; 3-02. Magnetic suction original; 3-03. Guide unit; 4. Flower basket import and export mechanism; 4-01. Flower basket carrier screw transmission module; 4-02. Flower basket bearing platform; 4-021. Flower basket positioning foolproof module; 5. Silicon wafer regular combing mechanism; 5-01. Regular opening and closing mechanism; 5-02 , regular mechanism translation drive; 5-03, silicon wafer regular ceramic side comb teeth; 5-021, regular translation guide rail; 5-022, regular translation pitch adjustment mechanism; 5-023, regular translation transmission; 6, process boat import and export mechanism; 6-01, process boat flip platform; 6-02, process boat flip drive; 6-03, process boat translation platform; 6-04, process boat translation platform guide mechanism; 6-05, process boat guide drive; 7. Silicon wafer suction and delivery mechanism; 7-01. Welding base; 7-02. Six-axis joint robot; 7-03. Vacuum control module; 7-04. Vacuum suction cup group; 8. Process boat handling mechanism; 8-01. X-direction gear rack drive; 8-02. Y-direction gear rack drive; 8-03. Z-direction screw drive; 8-04. Process boat clamp; 8-05. Process boat visual inspection module; 9. Flower basket visual inspection mechanism; 9-01. Light source; 9-02. Area array camera; 10. Process Visual inspection mechanism for wafer boat loading and unloading station; 11. Silicon wafer top sheet mechanism for flower basket; 11-01. Comb teeth for top sheet of flower basket; 11-02. Comb teeth fixing part for top sheet; 11-03. Lifting drive; 11-04. Lateral translation drive; 11-05. Auxiliary translation guide rail; 12. Silicon wafer top sheet mechanism for process boat; 12-01. Comb teeth for top sheet of process boat; 12-02. Vertical lifting drive mechanism; 12-03. Auxiliary lateral translation guide rail; 12-04. Horizontal translation drive module; 14. Fixed frame. DETAILED DESCRIPTION

[0020] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods. Example 1

[0021] like Figures 1 to 14As shown, a photovoltaic cell ALD process loading and unloading machine according to an embodiment of the present invention comprises a fixed frame 14; a basket AGV vehicle docking transmission mechanism 1, a seven-axis robot basket handling mechanism 2, a defective basket processing mechanism 3, a basket import and export mechanism 4, a silicon wafer regularizing combing mechanism 5, a process boat import and export mechanism 6, a silicon wafer suction and transfer mechanism 7, a process boat handling mechanism 8, a basket visual inspection mechanism 9, a process boat loading and unloading station visual inspection mechanism 10, a basket silicon wafer top sheet mechanism 11 and a process boat silicon wafer top sheet mechanism 12 are respectively arranged inside the fixed frame 14; The flower basket AGV vehicle docking transmission mechanism 1 includes a flower basket receiving track 1-01, a flower basket buffer track 1-02, a robot docking track 1-03, an aluminum profile and a guide part. The guide part is made of engineering plastics. The guide part of engineering plastics is fixed on the upper surface of the aluminum profile. A driving belt, a driving pulley, a driving motor and a driven pulley are respectively arranged at both ends of the aluminum profile. The driven pulley adopts a top-push tensioning structure. The driving pulley and the driving motor are connected by a transmission shaft. The driving motor is fixed on the side of the aluminum profile. A horizontal adjustment mechanism is arranged inside each track. The side plate of the horizontal adjustment mechanism is embedded and fixed with the aluminum profile. The internal design of the driving pulley There are multiple sets of track drive pulleys; each set of track drive pulleys is closely adjacent to each other, and a flower basket is arranged on the top surface of the track drive pulley; a transmission line is arranged inside the track drive pulley, and multiple sensors are arranged inside the transmission line; a deceleration sensor is arranged on the surface of the flower basket cache track 1-02 and the robot docking track 1-03; the defective flower basket processing mechanism 3 includes a flower basket positioning cylinder module 3-01, a magnetic suction original 3-02 and a guide unit 3-03; the defective flower basket processing mechanism 3 is composed of multiple machined parts to form a bearing platform, the bearing platform is fixed on the guide unit, and position sensing sensors are arranged at both ends of the guide unit; The flower basket import and export mechanism 4 includes a flower basket carrier screw transmission module 4-01 and a flower basket bearing platform 4-02. A flower basket positioning anti-fool module 4-021 is provided on the outer surface of the flower basket bearing platform 4-02. The basket import and export mechanism 4 is composed of a plurality of machined parts to form a bearing platform, which is fixed on the guide unit. One end of the sliding part of the guide unit is provided with a magnetic suction element 3-02, and both ends of the guide unit are provided with position sensing sensors; the silicon wafer regular combing mechanism 5 includes a regular opening and closing mechanism 5-01, a regular mechanism translation drive 5-02 is arranged on the bottom surface of the regular opening and closing mechanism 5-01, and a silicon wafer regular ceramic side combing mechanism 5-01 is arranged on the top inner wall surface of the regular opening and closing mechanism 5-01. -03, the silicon wafer regular ceramic side comb teeth 5-03 are composed of upper and lower layers of side comb teeth, and the length of the lower layer of side comb teeth is greater than that of the upper layer of side comb teeth. The regular side comb teeth mechanism and the opening and closing mechanism are arranged on the inner side of the regular opening and closing mechanism 5-01. The two ends of the opening and closing mechanism are respectively arranged with a synchronous belt, a driven wheel and a synchronous pulley. The driven wheel is provided with a tensioning mechanism, an active synchronous pulley, a synchronous belt driving wheel and a transmission shaft. The active synchronous pulleys at both ends are connected by a transmission shaft, and one end of the transmission shaft is connected to the drive motor through a coupling;Regular translation guide rails 5-021 are arranged on the edge positions of both sides of the regular translation drive 5-02, and a moving slider is installed on the surface of the regular translation guide rail 5-021, and the moving slider is connected to the synchronous belt, and the synchronous belt is meshed with the corresponding synchronous belt pulley, and the synchronous belt driving wheels at both ends are connected through a transmission shaft, and one side of the transmission shaft is connected to the driving motor through a coupling, and a regular translation transmission 5-023 is arranged on the top surface of the regular translation drive 5-02, and a regular translation gear pitch adjustment mechanism 5-022 is arranged on the top surface of the regular translation drive 5-02 and at the edge positions of both ends of the regular translation transmission 5-023, and the process boat import and export mechanism 6 includes a process boat flip platform 6-01, a process boat flip platform 6- A process boat carrier and a process boat flip drive 6-02 are fixedly installed on the surface of 01, a process boat translation platform 6-03 is fixedly installed on the top surface of the process boat flip platform 6-01, a process boat translation platform 6-03 is arranged on the outer surface of one end of the process boat flip platform 6-01, a process boat translation platform 6-03 is arranged on the top surface of the process boat carrier and the process boat flip drive 6-02 and on the edge positions on both sides, a plurality of positioning mechanisms are arranged on the process boat translation platform 6-03 to enable high-precision positioning of the process boat, a process boat translation platform guide mechanism 6-04 and a process boat guide drive 6-05 are fixedly installed on the surface of the process boat translation platform 6-03, a silicon wafer suction and delivery transfer mechanism 7 includes a welding base 7-01, a welding base 7-01 is fixed on a welding base, which is fastened to the ground by chemical bolts. A six-axis articulated robot 7-02 is arranged on the top surface of the welding base 7-01. A vacuum control module is installed on the forearm of the six-axis articulated robot 7-02. A vacuum control module 7-03 is fixedly installed on the output end of the six-axis articulated robot 7-02. A vacuum suction cup group 7-04 is arranged on the output end of the vacuum control module 7-03. A ceramic suction cup group is arranged on the outer surface of the vacuum suction cup group 7-04. The ceramic suction cup group consists of a plurality of ceramic suction cups. The number of ceramic sheets corresponds to the amount of sheets loaded in each column of the flower basket. The process boat handling mechanism 8 includes an X-direction gear rack drive 8-01. A Y-direction gear rack drive 8-01 is arranged on the outer surface. The outer surface of the gear rack drive 8-02 in the Y direction is slidably sleeved with the Z direction screw drive 8-03, and the outer surface of the Z direction screw drive 8-03 is provided with a screw module, and the sliding seat of the screw module is provided with a process boat clamp 8-04, and the process boat clamp 8-04 is driven by a cylinder to realize opening and closing, and the outer surface of the process boat clamp 8-04 and the top edge position are provided with a process boat visual inspection module 8-05, and the flower basket visual inspection mechanism 9 includes a light source 9-01, and a notch is provided on the outer surface of the light source 9-01, and a surface array camera 9-02 is installed inside the notch, and the flower basket visual inspection mechanism 9 is used to detect whether there are defects such as missing silicon wafers, misaligned slots, and multiple wafers per slot in the inner position of the flower basket;The process boat visual inspection is used to detect whether there are debris residues inside the process boat and on the surface of the silicon wafer. The flower basket silicon wafer top sheet mechanism 11 includes a flower basket top sheet comb teeth 11-01, and a top sheet comb tooth fixing piece 11-02 is fixedly connected to the bottom surface of the flower basket top sheet comb teeth 11-01. A lifting drive 11-03 is slidably sleeved on the back of the top sheet comb tooth fixing piece 11-02. A lateral translation drive 11-04 and a translation auxiliary guide rail 11-05 are respectively arranged on the back of the lifting drive 11-03. The process boat silicon wafer top sheet mechanism 12 includes a vertical lifting drive mechanism 12-02, and the outer surface of the vertical lifting drive mechanism 12-02 is provided with a process boat top sheet comb tooth 12 -01, a lateral translation auxiliary guide rail 12-03 is arranged on the back of the vertical lifting drive mechanism 12-02, and a lateral translation drive module 12-04 is arranged on the outer surface of the lateral translation auxiliary guide rail 12-03. The seven-axis robot transporting flower basket mechanism 2 includes a seventh-axis driving mechanism 2-03, a six-axis robot 2-02 is arranged on the inner wall of the seventh-axis driving mechanism 2-03, and a flower basket clamping mechanism 2-01 is arranged on the output end of the six-axis robot 2-02. The horizontal adjustment mechanism 2-04 is fixedly connected to the two side surfaces of the seventh-axis driving mechanism 2-03, and the seven-axis robot frame 2-05 is arranged on the outer surface of the horizontal adjustment mechanism 2-04. ;

[0022] Helical racks and ball linear guides are set in the X and Y directions, and the Y direction adopts a three-sided guide fixing method because of the larger span, which has greater rigidity. The helical racks and helical gears are meshed with the ball linear guide slider and the mechanism moving parts are fixed. The servo motor drives the helical gears to enable the transport mechanism to achieve stable movement in the X and Y directions. At the same time, the flower basket visual inspection mechanism is used to detect whether there are defects such as missing silicon wafers, misaligned slots, and multiple wafers per slot in the internal position of the flower basket; and the process boat visual inspection is used to detect whether there are debris residues inside the process boat and on the surface of the silicon wafers. If there are debris residues, the debris can be automatically cleaned; The upper and lower layers of side comb teeth are attached to the surface of the silicon wafer, and then the lower layer of side comb teeth are pre-clamped with the silicon wafer through the regular opening and closing drive to achieve initial regularization of the silicon wafer. Subsequently, the regular opening and closing mechanism drives the side comb teeth to further clamp the upper short side teeth and the silicon wafer to achieve final regularization of the silicon wafer. The double-layer side comb tooth regularization mechanism makes the silicon wafer regularization gentle and impact-free. It adopts the form of double-sided synchronous belt drive, with high regularization positioning accuracy, which greatly reduces the debris caused by regularization. The auxiliary guide slide rail is used to increase the overall rigidity. The process boat top sheet comb teeth 12-01 can be horizontally translated to multiple points to adapt to the specifications of the process boat. Example 2

[0023] like Fig.14 As shown, a photovoltaic cell ALD process loading and unloading method includes the following steps: Step 1. After being transferred to the designated position inside the machine through the AGV docking transmission mechanism, the seven-axis robot adjusts the appropriate posture to grab the flower basket and transfer it to the flower basket visual inspection mechanism for visual inspection. If the visual inspection result meets the use requirements, the flower basket handling robot will continue to transfer the flower basket to the flower basket import and export mechanism. If the visual inspection result does not meet the use requirements, the flower basket handling robot will transfer the flower basket to the defective flower basket processing mechanism, and then return to the AGV track to take another flower basket and continue to transfer it to the flower basket visual inspection position for inspection until an appropriate number of wet flower baskets that meet the requirements are obtained. In the above actions, the defective flower baskets on the defective flower basket mechanism are taken away by the staff for processing, and the qualified wet flower baskets are imported into the flower basket silicon wafer lifting mechanism to prepare the guide; Step 2: The process boat transport mechanism is ready to be transferred to the corresponding position of the process equipment to prepare to transport the full process boat. Before transporting the process boat, the process boat visual line scanning detection module on the transport mechanism scans the process boat up and down. If the scanned process boat does not meet the use requirements, the gripper will not grab it and prompt the host; Step 3, if the scanned process boat meets the use requirements, the transport mechanism will transfer the silicon wafer to the import and export mechanism, the import and export mechanism will transfer the process boat to the position of the silicon wafer top mechanism of the process boat, and the visual inspection mechanism of the process boat loading and unloading position will inspect the boat to check whether there are silicon wafers flat on the surface of the process boat. If there are fragments flat on the surface of the silicon wafer in the boat, an alarm will be issued to prompt manual processing; Step 4. If the visual inspection shows that the process boat meets the requirements, the silicon wafer top sheet mechanism rises to push the silicon wafers out of the process boat. After the silicon wafer regularization comb mechanism regularizes the pushed-out silicon wafers, the silicon wafer suction and transfer mechanism sucks and transfers the silicon wafers to the flower basket silicon wafer top sheet mechanism. After the silicon wafer regularization comb mechanism regularizes the silicon wafers, the flower basket silicon wafer top sheet mechanism falls and brings the silicon wafers into the dry flower basket until the silicon wafers are unloaded.

[0024] Working principle: After the dry flower basket of the later process is transferred to the designated position inside the machine through the AGV docking transmission mechanism, the seven-axis robot adjusts the appropriate posture to grab the flower basket and transfer it to the flower basket import and export mechanism. The flower basket export mechanism transfers the flower basket to the position of the flower basket silicon wafer top mechanism, and the flower basket silicon wafer top mechanism rises and is ready to load the wafers; at the same time, the process boat transport mechanism is ready to be transferred to the corresponding position of the process equipment to prepare to transport the full-wafer process boat; before transporting the process boat, the process boat visual line scanning detection module on the transport mechanism scans the process boat up and down. If the scanned process boat does not meet the use requirements, the gripper will not grab it and prompt the host; if the scanned process boat meets the use requirements, the transporter will The structure transfers the silicon wafer to the import and export mechanism, the import and export mechanism transfers the process boat to the position of the silicon wafer top mechanism of the process boat, the visual inspection mechanism of the process boat loading and unloading position inspects the boat to detect whether there are silicon wafers flat on the surface of the process boat, if there are fragments flat on the surface of the silicon wafers in the boat, then an alarm will be issued to prompt manual processing; if the visual inspection shows that the process boat meets the requirements, then the silicon wafer top mechanism will rise to push the silicon wafers out of the process boat, after the silicon wafer regularization comb mechanism regularizes the pushed out silicon wafers, the silicon wafer suction and transfer mechanism absorbs the silicon wafers and transfers them to the silicon wafer top mechanism of the flower basket, after the silicon wafer regularization comb mechanism regularizes the silicon wafers, the silicon wafer top mechanism of the flower basket falls to bring the silicon wafers into the dry flower basket until the silicon wafers are unloaded.

[0025] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A photovoltaic cell ALD process loading and unloading machine, comprising a fixed frame (14); characterized in that: The fixed frame (14) is provided with a flower basket AGV vehicle docking transmission mechanism (1), a seven-axis robot flower basket handling mechanism (2), a defective flower basket processing mechanism (3), a flower basket import and export mechanism (4), a silicon wafer regularization combing mechanism (5), a process boat import and export mechanism (6), a silicon wafer suction and transfer mechanism (7), a process boat handling mechanism (8), a flower basket visual inspection mechanism (9), a process boat loading and unloading station visual inspection mechanism (10), a flower basket silicon wafer top sheet mechanism (11) and a process boat silicon wafer top sheet mechanism (12); The flower basket AGV vehicle docking transmission mechanism (1) comprises a flower basket receiving track (1-01), a flower basket buffer track (1-02), a robot docking track (1-03), an aluminum profile and a guide part, wherein the guide part is made of engineering plastic material, and the guide part made of engineering plastic material is fixed on the upper surface of the aluminum profile, and a driving belt, a driving pulley, a driving motor and a driven pulley are respectively arranged at both ends of the aluminum profile, and the driven pulley adopts a top-push tensioning structure, and the driving pulley and the driving motor are connected by a transmission shaft, and the driving motor is fixed on the side of the aluminum profile, and a horizontal adjustment mechanism is arranged inside each track, and the side plate of the horizontal adjustment mechanism is embedded and fixed with the aluminum profile, and a plurality of groups of track transmission pulleys are arranged inside the driving pulley; each group of the track transmission pulleys is closely adjacent to each other, and a flower basket is arranged on the top surface of the track transmission pulley; a transmission line is arranged inside the track transmission pulley, and a plurality of sensors are arranged inside the transmission line; a deceleration sensor is arranged on the surface of the flower basket buffer track (1-02) and the robot docking track (1-03); The defective flower basket processing mechanism (3) comprises a flower basket positioning cylinder module (3-01), a magnetic suction element (3-02) and a guide unit (3-03); the defective flower basket processing mechanism (3) is composed of a plurality of machined parts combined to form a bearing platform, the bearing platform is fixed on the guide unit, and position sensing sensors are provided at both ends of the guide unit; The flower basket import / export mechanism (4) comprises a flower basket carrier screw transmission module (4-01) and a flower basket bearing platform (4-02); a flower basket positioning foolproof module (4-021) is arranged on the outer surface of the flower basket bearing platform (4-02); and the flower basket import / export mechanism (4) is composed of a plurality of machined parts to form a bearing platform; The bearing platform is fixed on the guide unit, one end of the sliding part of the guide unit is provided with a magnetic attraction element (3-02), and both ends of the guide unit are provided with position sensing sensors.

2. A photovoltaic cell ALD process loading and unloading machine according to claim 1, characterized in that: The silicon wafer regular combing mechanism (5) comprises a regular opening and closing mechanism (5-01), a regular mechanism translation drive (5-02) on the bottom surface of the regular opening and closing mechanism (5-01), a silicon wafer regular ceramic side combing teeth (5-03) are arranged on the top inner wall surface of the regular opening and closing mechanism (5-01), the silicon wafer regular ceramic side combing teeth (5-03) are composed of upper and lower layers of side combing teeth, and the length of the lower layer of side combing teeth is greater than that of the upper layer of side combing teeth, the regular side combing teeth mechanism and the opening and closing mechanism are arranged on the inner side of the regular opening and closing mechanism (5-01), and the opening and closing mechanism is respectively arranged with a synchronous belt, a driven wheel and a synchronous pulley at both ends of the opening and closing mechanism, and the driven wheel is provided with a tensioning mechanism, an active synchronous pulley, a synchronous belt driving wheel and a transmission shaft, the active synchronous pulleys at both ends are connected by a transmission shaft, and one end of the transmission shaft is connected to a driving motor through a coupling; The regular translation guide rails (5-021) are arranged on the edge positions of both sides of the regular translation drive (5-02), and a moving slider is installed on the surface of the regular translation guide rail (5-021), and the moving slider is connected to the synchronous belt, and the synchronous belt is meshed with the corresponding synchronous belt pulley. The synchronous belt driving wheels at both ends are connected through a transmission shaft, and one side of the transmission shaft is connected to the driving motor through a coupling. The regular translation transmission (5-023) is arranged on the top surface of the regular translation drive (5-02), and the regular translation tooth pitch adjustment mechanism (5-022) is arranged on the top surface of the regular translation drive (5-02) and at the edge positions of both ends of the regular translation transmission (5-023).

3. A photovoltaic cell ALD process loading and unloading machine according to claim 2, characterized in that: The process boat import and export mechanism (6) comprises a process boat flip platform (6-01), a process boat supporting process boat flip drive (6-02) is fixedly mounted on the surface of the process boat flip platform (6-01), a process boat translation platform (6-03) is fixedly mounted on the top surface of the process boat flip platform (6-01), a process boat translation platform (6-03) is arranged on the outer surface of one end of the process boat flip platform (6-01), a process boat translation platform (6-03) is arranged on the top surface of the process boat supporting process boat flip drive (6-02) and at the edge positions on both sides, a plurality of positioning mechanisms are arranged on the process boat translation platform (6-03) to enable high-precision positioning of the process boat, and a process boat translation platform guide mechanism (6-04) and a process boat guide drive (6-05) are fixedly mounted on the surface of the process boat translation platform (6-03).

4. A photovoltaic cell ALD process loading and unloading machine according to claim 3, characterized in that: The silicon wafer suction and transfer mechanism (7) comprises a welding base (7-01), the welding base (7-01) is fixed on a welding base, the welding base is fastened to the ground by chemical bolts, a six-axis articulated robot (7-02) is arranged on the top surface of the welding base (7-01), a vacuum control module is installed on the forearm of the six-axis articulated robot (7-02), a vacuum control module (7-03) is fixedly installed on the output end of the six-axis articulated robot (7-02), a vacuum suction cup group (7-04) is arranged on the output end of the vacuum control module (7-03), a ceramic suction cup group is arranged on the outer surface of the vacuum suction cup group (7-04), the ceramic suction cup group is composed of a plurality of ceramic suction cups, and the number of ceramic sheets corresponds to the number of sheets loaded in each column of the flower basket.

5. A photovoltaic cell ALD process loading and unloading machine according to claim 4, characterized in that: The process boat transport mechanism (8) comprises an X-direction gear rack drive (8-01), a Y-direction gear rack drive (8-02) is arranged on the outer surface of the X-direction gear rack drive (8-01), a Z-direction screw drive (8-03) is slidably sleeved on the outer surface of the Y-direction gear rack drive (8-02), a screw module is arranged on the outer surface of the Z-direction screw drive (8-03), a process boat clamp (8-04) is arranged on the sliding seat of the screw module, the process boat clamp (8-04) is opened and closed by a cylinder drive, and a process boat visual inspection module (8-05) is arranged on the outer surface of the process boat clamp (8-04) and located at the top edge.

6. A photovoltaic cell ALD process loading and unloading machine according to claim 1, characterized in that: The flower basket visual inspection mechanism (9) comprises a light source (9-01), a notch is provided on the outer surface of the light source (9-01), an area array camera (9-02) is installed inside the notch, and the flower basket visual inspection mechanism (9) is used to detect whether there are defects such as missing silicon wafers, misaligned slots, multiple wafers per slot, etc. in the interior of the flower basket; the process boat visual inspection is used to detect whether there are debris residues inside the process boat and on the surface of the silicon wafers.

7. The photovoltaic cell ALD process loading and unloading machine according to claim 1, characterized in that: The flower basket silicon wafer top sheet mechanism (11) comprises flower basket top sheet comb teeth (11-01), a top sheet comb tooth fixing piece (11-02) is fixedly connected to the bottom surface of the flower basket top sheet comb teeth (11-01), a lifting drive (11-03) is slidably sleeved on the back of the top sheet comb tooth fixing piece (11-02), and a lateral translation drive (11-04) and a translation auxiliary guide rail (11-05) are respectively arranged on the back of the lifting drive (11-03).

8. The photovoltaic cell ALD process loading and unloading machine according to claim 1, characterized in that: The process boat silicon wafer top sheet mechanism (12) comprises a vertical lifting drive mechanism (12-02), the outer surface of the vertical lifting drive mechanism (12-02) is provided with process boat top sheet comb teeth (12-01), the back surface of the vertical lifting drive mechanism (12-02) is provided with a lateral translation auxiliary guide rail (12-03), and the outer surface of the lateral translation auxiliary guide rail (12-03) is provided with a lateral translation drive module (12-04).

9. The photovoltaic cell ALD process loading and unloading machine according to claim 1, characterized in that: The seven-axis robot flower basket transporting mechanism (2) comprises a seventh-axis driving mechanism (2-03); a six-axis robot (2-02) is arranged on the inner wall surface of the seventh-axis driving mechanism (2-03); a flower basket clamping mechanism (2-01) is arranged on the output end of the six-axis robot (2-02); horizontal adjustment mechanisms (2-04) are fixedly connected to the two side surfaces of the seventh-axis driving mechanism (2-03); and a seven-axis robot frame (2-05) is arranged on the outer surface of the horizontal adjustment mechanism (2-04).

10. A photovoltaic cell ALD process loading and unloading method, applicable to a photovoltaic cell ALD process loading and unloading machine according to any one of claims 1 to 9, characterized in that: The following steps are involved: Step 1. After being transferred to the designated position inside the machine through the AGV docking transmission mechanism, the seven-axis robot adjusts the appropriate posture to grab the flower basket and transfer it to the flower basket visual inspection mechanism for visual inspection. If the visual inspection result meets the use requirements, the flower basket handling robot will continue to transfer the flower basket to the flower basket import and export mechanism. If the visual inspection result does not meet the use requirements, the flower basket handling robot will transfer the flower basket to the defective flower basket processing mechanism, and then return to the AGV track to take another flower basket and continue to transfer it to the flower basket visual inspection position for inspection until an appropriate number of wet flower baskets that meet the requirements are obtained. In the above actions, the defective flower baskets on the defective flower basket mechanism are taken away by the staff for processing, and the qualified wet flower baskets are imported into the flower basket silicon wafer lifting mechanism to prepare the guide; Step 2: The process boat transport mechanism is ready to be transferred to the corresponding position of the process equipment to prepare to transport the full process boat. Before transporting the process boat, the process boat visual line scanning detection module on the transport mechanism scans the process boat up and down. If the scanned process boat does not meet the use requirements, the gripper will not grab it and prompt the host; Step 3, if the scanned process boat meets the use requirements, the transport mechanism will transfer the silicon wafer to the import and export mechanism, the import and export mechanism will transfer the process boat to the position of the silicon wafer top mechanism of the process boat, and the visual inspection mechanism of the process boat loading and unloading position will inspect the boat to check whether there are silicon wafers flat on the surface of the process boat. If there are fragments flat on the surface of the silicon wafer in the boat, an alarm will be issued to prompt manual processing; Step 4. If the visual inspection shows that the process boat meets the requirements, the silicon wafer top sheet mechanism rises to push the silicon wafers out of the process boat. After the silicon wafer regularization comb mechanism regularizes the pushed-out silicon wafers, the silicon wafer suction and transfer mechanism sucks and transfers the silicon wafers to the flower basket silicon wafer top sheet mechanism. After the silicon wafer regularization comb mechanism regularizes the silicon wafers, the flower basket silicon wafer top sheet mechanism falls and brings the silicon wafers into the dry flower basket until the silicon wafers are unloaded.

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