Driving device for vibration-type actuator and driving method thereof

Abstract

A drive device for a vibration-type actuator is provided with: a first vibration detection unit 241 and a second vibration detection unit 242 for detecting vibration of a vibrating body of the vibration-type actuator 100 independently of each other; a timing setting unit 251 that sets the detection timing of the second vibration detection unit 242 on the basis of the first output signal of the first vibration detection unit 241; a sampling unit (252) that samples the second output signal of the second vibration detection unit (242) at the timing set by the timing setting unit (251) and acquires a signed vibration amount; and an arithmetic calculation unit (253) that calculates a vibration vector in the direction of movement of the moving body of the vibration-type actuator (100) on the basis of the signed vibration amount acquired by the sampling unit (252).

Description

Technical Field

[0001] The present invention relates to a driving device of a vibration type actuator and a driving method thereof. Background Art

[0002] In certain types of drive devices for vibration-type actuators that include a vibrating body that is constructed to be excited by a piezoelectric element, a magnetostrictive element, etc. and a moving body that is in contact with the vibrating body, a vibration detection unit is provided for detecting the vibration of the vibrating body to improve speed stability, instant responsiveness, etc.

[0003] For example, Patent Document 1 discloses that a driving device configured to control the rotation speed of a vibration-type actuator to be constant includes a small circuit for controlling the vibration amplitude of a vibration body.

[0004] Specifically, in the vibration type actuator disclosed in Patent Document 1, a piezoelectric element for detecting the vibration of a vibrating body is provided, and an AC signal output by the piezoelectric element is input into an AC-DC converter to detect the vibration amplitude of the vibrating body. Then, in Patent Document 1, a small loop controls the amplitude of the applied voltage so that the vibration amplitude of the vibrating body follows the target amplitude, thereby improving the instant responsiveness and stability of the speed control.

[0005] In Patent Document 2, based on the premise that the moving speed of the moving body is proportional to the vibration amplitude of the vibrating body, the signed moving speed including the moving direction is estimated based on information on the phase difference between two-phase applied voltages and the vibration amplitude of the vibrating body.

[0006] In Patent Document 3, a small loop for controlling the speed of a moving body is inserted in a driving device for position control of a vibration type actuator in order to improve stability. In the small loop disclosed in Patent Document 1, the rotation speed in one direction is controlled by detecting the unsigned vibration amplitude, while in Patent Document 3, the speed control involving direction reversal is achieved by detecting the signed speed.

[0007] Citation List

[0008] Patent Literature

[0009] Patent Document 1: Japanese Patent No. 2874765

[0010] Patent Document 2: Japanese Patent Application Laid-Open No. 2003-33057

[0011] Patent Document 3: Japanese Patent Application Laid-Open No. 5-184167 Summary of the invention

[0012] Technical issues

[0013] However, in the small loop for controlling the vibration amplitude of the vibrating body disclosed in patent document 1, the sign of the vibration amplitude of the vibrating body does not change even if the moving direction of the moving body changes. Therefore, there is a problem that it cannot be used for position control involving changes in the moving direction as disclosed in patent document 3.

[0014] In Patent Document 2, the speed including the moving direction of the moving body is estimated by adding the sign of the phase difference between the two-phase applied voltages to the detected value of the vibration amplitude of the vibrating body. However, in Patent Document 2, the change in the detected value of the vibration amplitude of the vibrating body lags behind the change in the phase difference between the two-phase applied voltages in time, and therefore, there is a problem that the sign of the vibration amplitude of the vibrating body will be erroneously set, especially near the timing of the reversal of the moving direction.

[0015] When a small loop is used to control the speed of a moving body as disclosed in Patent Document 3, there is a problem that the control bandwidth cannot be expanded due to the influence of the backlash from the vibrating body to the speed sensor and the resonance system of the mechanism.

[0016] The present invention has been made in view of the above problems. An object of the present invention is to provide a means for correctly detecting the vibration state of a vibrating body even in a region where the moving direction of the moving body is reversed in a vibration-type actuator including a vibrating body and a moving body.

[0017] Solutions to the problem

[0018] A driving device of a vibration-type actuator according to the present invention is a driving device of a vibration-type actuator including a vibrating body and a moving body crimped with the vibrating body, the driving device comprising: a generating unit for generating a two-phase or more-phase AC signal to be applied to the vibrating body; a first vibration detecting unit and a second vibration detecting unit for detecting the vibration of the vibrating body independently of each other; a setting unit for setting the detection timing of the second vibration detecting unit based on a first output signal as an output signal of the first vibration detecting unit; a sampling unit for acquiring a signed vibration amount by sampling a second output signal as an output signal of the second vibration detecting unit or an output signal obtained by subtracting the first output signal from the second output signal at a timing set by the setting unit; and an arithmetic operation unit for calculating a vibration vector in a moving direction of the moving body based on the signed vibration amount.

[0019] The present invention includes a driving method for a vibration-type actuator performed by the driving device for the vibration-type actuator described above.

[0020] Beneficial effects of the present invention

[0021] According to the present invention, in a vibration-type actuator including a vibrating body and a moving body, the vibration state of the vibrating body can be accurately detected even in a region where the moving direction of the moving body is reversed. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] [ Figure 1 ] Figure 1 : is a diagram showing a schematic configuration example of a vibration-type actuator according to a first embodiment of the present invention.

[0023] [ Figure 2 ] Figure 2 It is shown by Figure 1 FIG. 1 is a diagram showing an example of an electrode structure of a plurality of piezoelectric bodies on the second surface of the piezoelectric element and their electrical connection wiring.

[0024] [ Figure 3 ] Figure 3 : is a diagram showing a first configuration example of a driving device for a vibration-type actuator according to a first embodiment of the present invention.

[0025] [ Figure 4 ] Figure 4 It is shown Figure 3 FIG. 1 is a diagram showing a first example of the relationship between a B-phase amplitude command from a CPU and an AC signal generated by an AC signal generating section in a driving device for a vibration-type actuator.

[0026] [ Figure 5 ] Figure 5 It is shown Figure 3 FIG. 1 is a diagram showing a second example of the relationship between the B-phase amplitude command from the CPU and the AC signal generated by the AC signal generating section in the driving device for the vibration-type actuator shown.

[0027] [ Fig. 6A ] Fig. 6A It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0028] [ Figure 6B ] Figure 6B It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0029] [ Figure 6C ] Figure 6C It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0030] [ Fig.6D ] Fig.6D It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0031] [ Fig. 6E ] Fig. 6E It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0032] [ Fig. 6F ] Fig. 6F It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0033] [ Figure 6G ] Figure 6G It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0034] [ Figure 6H ] Figure 6H It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a B-phase amplitude command from a CPU and a vibration vector output by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0035] [ Fig. 7A ] Fig. 7A It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0036] [ Figure 7B ] Figure 7B It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0037] [ Figure 7C ] Figure 7C It is used to illustrate Figure 3FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0038] [ Fig.7D ] Fig.7D It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0039] [ Fig. 7E ] Fig. 7E It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by the sampling section and the arithmetic operation section in a case where a plurality of E timings are set by the timing setting section in the driving device for a vibration-type actuator shown in FIG.

[0040] [ Figure 7F ] Figure 7F It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0041] [ Fig. 8A ] Fig. 8A It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0042] [ Figure 8B ] Figure 8B It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0043] [ Figure 8C ] Figure 8C It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0044] [ Fig.8D ] Fig.8D It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0045] [ Fig. 8E ] Fig. 8E It is used to illustrate Figure 3FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0046] [ Fig.8F ] Fig.8F It is used to illustrate Figure 3 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0047] [ Fig. 9 ] Fig. 9 It is shown by Figure 3 FIG. 1 is a flowchart showing an example of a processing procedure of a driving method performed by a driving device for a vibration-type actuator.

[0048] [ Fig.10 ] Fig.10 2 is a diagram showing a second configuration example of the driving device of the vibration-type actuator according to the first embodiment of the present invention.

[0049] [ Fig.11 ] Fig.11 It is shown Fig.10 FIG. 1 is a diagram showing an example of the relationship between a phase difference command from a CPU and an AC signal generated by an AC signal generating section in a driving device for a vibration-type actuator shown in FIG.

[0050] [ Fig. 12A ] Fig. 12A It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0051] [ Fig. 12B ] Fig. 12B It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0052] [ Fig. 12C ] Fig. 12C It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0053] [ Fig.12D ] Fig.12D It is shown Fig.10FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0054] [ Fig.12E ] Fig.12E It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0055] [ Fig.12F ] Fig.12F It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0056] [ Figure 12G ] Figure 12G It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0057] [ Fig.12H Fig.12H It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a detection value of a vibration detection signal associated with a phase difference command from a CPU and a vibration vector output by an arithmetic operation section in a driving device for a vibration-type actuator shown.

[0058] [ Fig.13A ] Fig.13A It is used to illustrate Fig.10 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0059] [ Fig. 13B ] Fig. 13B It is used to illustrate Fig.10 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0060] [ Fig. 13C ] Fig. 13C It is used to illustrate Fig.10 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0061] [ Fig.13D] Fig.13D It is used to illustrate Fig.10 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0062] [ Fig.13E ] Fig.13E It is used to illustrate Fig.10 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0063] [ Fig.13F ] Fig.13F It is used to illustrate Fig.10 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0064] [ Fig.14 ] Fig.14 It is shown by Fig.10 FIG. 1 is a flowchart showing an example of a processing procedure of a driving method performed by a driving device for a vibration-type actuator.

[0065] [ Fig.15 ] Fig.15 : is a diagram showing a third configuration example of the driving device of the vibration-type actuator according to the first embodiment of the present invention.

[0066] [ Fig.16 ] Fig.16 : is a diagram showing a fourth configuration example of the driving device of the vibration-type actuator according to the first embodiment of the present invention.

[0067] [ Fig.17A ] Fig.17A : is a diagram showing an example of a schematic configuration and a vibration shape of a vibration-type actuator according to a second embodiment of the present invention.

[0068] [ Fig. 17B ] Fig. 17B : is a diagram showing an example of a schematic configuration and a vibration shape of a vibration-type actuator according to a second embodiment of the present invention.

[0069] [ Fig. 17C ] Fig. 17C : is a diagram showing an example of a schematic configuration and a vibration shape of a vibration-type actuator according to a second embodiment of the present invention.

[0070] [ Fig.17D ] Fig.17D : is a diagram showing an example of a schematic configuration and a vibration shape of a vibration-type actuator according to a second embodiment of the present invention.

[0071] [ Fig.17E ] Fig.17E : is a diagram showing an example of a schematic configuration and a vibration shape of a vibration-type actuator according to a second embodiment of the present invention.

[0072] [ Fig.18 ] Fig.18 : is a diagram showing a first configuration example of a driving device for a vibration-type actuator according to a second embodiment of the present invention.

[0073] [ Fig.19A ] Fig.19A It is shown Fig.18 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0074] [ Fig.19B ] Fig.19B It is shown Fig.18 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0075] [ Fig.19C ] Fig.19C It is shown Fig.18 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0076] [ Fig.19D ] Fig.19D It is shown Fig.18 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0077] [ Fig.19E ] Fig.19E It is shown Fig.18 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0078] [ Fig.19F ] Fig.19F It is shown Fig.18 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0079] [ Figure 19G ] Figure 19G It is shown Fig.18FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0080] [ Fig.19H ] Fig.19H It is shown Fig.18 FIG. 1 is a diagram showing an example of a relationship between a detected value of a current related to a phase difference command from a CPU and a vibration vector outputted by an arithmetic operation unit in a driving device for a vibration-type actuator shown.

[0081] [ Fig. 20A ] Fig. 20A It is used to illustrate Fig.18 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0082] [ Fig. 20B ] Fig. 20B It is used to illustrate Fig.18 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0083] [ Fig. 20C ] Fig. 20C It is used to illustrate Fig.18 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0084] [ Fig.20D ] Fig.20D It is used to illustrate Fig.18 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0085] [ Fig.20E ] Fig.20E It is used to illustrate Fig.18 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0086] [ Fig.20F ] Fig.20F It is used to illustrate Fig.18 FIG. 1 is a diagram showing an example of processing by a sampling section and an arithmetic operation section in a case where a plurality of timings are set by a timing setting section in a driving device for a vibration-type actuator shown in FIG.

[0087] [ Fig.21 ] Fig.21 It is shown by Fig.18FIG. 1 is a flowchart showing an example of a processing procedure of a driving method performed by a driving device for a vibration-type actuator.

[0088] [ Fig. 22 ] Fig. 22 2 is a diagram showing a second configuration example of the driving device of the vibration-type actuator according to the second embodiment of the present invention.

[0089] [ Fig.23 ] Fig.23 2 is a diagram showing a third configuration example of the driving device of the vibration-type actuator according to the second embodiment of the present invention.

[0090] [ Fig.24 ] Fig.24 It is shown Fig.23 A diagram showing an example of the internal structure of an interpolation arithmetic operator.

[0091] [ Fig.25 ] Fig.25 : is a diagram showing a schematic configuration example of a vibration-type actuator according to a third embodiment of the present invention.

[0092] [ Fig.26 ] Fig.26 : is a diagram showing a first configuration example of a driving device for a vibration-type actuator according to a third embodiment of the present invention.

[0093] [ Fig. 27 ] Fig. 27 : is a diagram showing a second configuration example of the driving device of the vibration-type actuator according to the third embodiment of the present invention. DETAILED DESCRIPTION

[0094] Hereinafter, a mode (embodiment) for carrying out the present invention will be described while referring to the drawings.

[0095] (First embodiment)

[0096] First, a first embodiment of the present invention will now be described.

[0097] Figure 1 1 is a diagram showing a schematic configuration example of a vibration-type actuator 100 according to a first embodiment of the present invention. Specifically, the vibration-type actuator 100 according to the first embodiment is as follows: Figure 1 The ring-shaped vibration type actuator shown. Figure 1 A side view of the vibration-type actuator 100 according to the first embodiment is presented.

[0098] like Figure 1 As shown, the vibration-type actuator 100 according to the first embodiment includes a vibration body 110 , a moving body 120 , and a rotating shaft 130 .

[0099] like Figure 1As shown, the vibration body 110 includes an elastic body 111, a piezoelectric element 112, and a friction member 113. The elastic body 111 has a protrusion structure, and the piezoelectric element 112 configured to awaken vibration is engaged with the elastic body 111. Figure 1 , a surface of the piezoelectric element 112 bonded to the elastic body 111 is shown as a first surface 112 a , and an opposite surface of the piezoelectric element 112 facing away from the first surface 112 a is shown as a second surface 112 b .

[0100] The moving body 120 is a rotor that is in contact with the vibration body 110 via the friction member 113 due to being pressed by a pressing mechanism not shown.

[0101] The rotation axis 130 is a rotation axis fixed to the center of the moving body 120 .

[0102] Figure 2 It is shown by Figure 1 FIG. 1 is a diagram showing an example of an electrode structure of a plurality of piezoelectric bodies on a second surface 112 b of a piezoelectric element 112 and its electrical connection wiring.

[0103] like Figure 2 As shown, 24 electrodes are arranged at equal intervals on the circumference of the piezoelectric element 112. The electrodes of the piezoelectric element 112 are electrically connected via connecting wires every four electrodes along the circumference. The electrodes in the connected electrode group are referred to herein as piezoelectric body 1121, piezoelectric body 1122, piezoelectric body 1123, and piezoelectric body 1124, respectively.

[0104] like Figure 2 As shown, when AC voltage A is applied to piezoelectric body 1121, six out-of-plane bending vibration waves are formed along the circumferential direction of vibrating body 110. Furthermore, when AC voltage B, AC voltage NA, and AC voltage NB, which are sequentially phase-shifted at 90° intervals with respect to AC voltage A, are applied to piezoelectric element 1122, piezoelectric element 1123, and piezoelectric element 1124, six out-of-plane traveling vibration waves are formed on vibrating body 110. Then, these six out-of-plane traveling vibration waves generate a relative force between moving body 120 and vibrating body 110, thereby rotating moving body 120 as a rotor.

[0105] A plurality of electrodes for vibration detection are provided in the piezoelectric element 112. These electrodes will be referred to as piezoelectric body 1125 and piezoelectric body 1126. Specifically, piezoelectric body 1125 detects vibrations excited by piezoelectric body 1121 and piezoelectric body 1123, and outputs a vibration detection signal Sa. Piezoelectric body 1126 detects vibrations excited by piezoelectric body 1122 and piezoelectric body 1124, and outputs a vibration detection signal Sb.

[0106] Figure 3 1 is a diagram showing a first configuration example of a driving device 10 for a vibration-type actuator according to a first embodiment of the present invention. Figure 3 In, with Figure 1 and Figure 2 The same components as those shown in FIG. 1 are given the same reference numerals.

[0107] Figure 3 The driving device 10 of the vibration-type actuator shown includes a vibration-type actuator 100 and a control device 200. Specifically, Figure 3 In the figure, only the interior of the vibration type actuator 100 is shown. Figure 1 and Figure 2 The piezoelectric element 112 is shown, and only the interior of the piezoelectric element 112 is shown. Figure 2 Piezoelectric bodies 1121 to 1124 are shown.

[0108] Figure 3 The illustrated control device 200 includes a CPU 210 , an oscillator 221 , an AC signal generating section 222 , an amplifying section 223 , a timing setting section 251 , a sampling section 252 , an arithmetic operation section 253 , and an amplitude detecting section 254 . Figure 3 The control device 200 shown further includes transformers 231 and 232 and resistors 241 and 242 .

[0109] CPU 210 is a centralized control Figure 3 The constituent units of the operation of the control device 200 are shown.

[0110] The oscillator 221 is an oscillator that sets the frequency of an output signal based on a frequency command from the CPU 210 .

[0111] The AC signal generating section 222 is a component that generates two-phase AC signals PA and PB in synchronization with the signal from the oscillator 221. Furthermore, the AC signal generating section 222 sets the pulse width of the AC signal PB based on the B-phase amplitude command from the CPU 210, for example.

[0112] Figure 4 It is shown Figure 3 FIG. 1 is a diagram showing a first example of the relationship between the B-phase amplitude command from the CPU 210 and the AC signals PA and PB generated by the AC signal generating section 222 in the vibration-type actuator driving device 10 . Figure 4 The B-phase amplitude command shown is a signal that commands the duty cycle of the AC signal PB to be between -50% and +50%. When the phase of the AC signal PB lags behind the phase of the AC signal PA by 90°, Figure 4 The sign of the B-phase amplitude command shown is positive. When the phase of the AC signal PB leads the AC signal PA, Figure 4 The sign of the Phase B amplitude command is shown to be negative.

[0113] In the present embodiment, in the AC signal generating section 222 , the B-phase amplitude command is specified based on the pulse width; however, the B-phase amplitude command may be specified based on the voltage, for example.

[0114] Figure 5 It is shown Figure 3 FIG. 1 is a diagram showing a second example of the relationship between the B-phase amplitude command from the CPU 210 and the AC signals PA and PB generated by the AC signal generating section 222 in the vibration-type actuator driving device 10 . Figure 5 The B-phase amplitude command shown is a signal with a command voltage between -50V and +50V. Figure 5 The AC signals PA and PB shown in FIG. 1 show the change in waveform when the B-phase amplitude command voltage is between -50 V and +50 V. When the phase of the AC signal PB lags behind the phase of the AC signal PA by 90°, Figure 5 The sign of the B-phase amplitude command shown is positive. When the phase of the AC signal PB leads the AC signal PA, Figure 5 The sign of the Phase B amplitude command is shown to be negative.

[0115] Now, return to the reference Figure 3 .

[0116] The amplifier 223 is a component that amplifies the AC signals PA and PB generated by the AC signal generator 222 and outputs AC signals VA and VB. The AC signal VA is further amplified by the transformer 231 and applied as an inverted driving voltage to the piezoelectric body 1121 and the piezoelectric body 1123 of the piezoelectric element 112. Similarly, the AC voltage VB is further amplified by the transformer 232 and applied as an inverted driving voltage to the piezoelectric body 1122 and the piezoelectric body 1124 of the piezoelectric element 112.

[0117] The inductance value of the transformer 231 and the transformer 232 on the side connected to the piezoelectric bodies 1121, 1122, 1123, 1124 of the piezoelectric element 112 matches the frequency of the damping capacitance of the piezoelectric body. The values ​​of the current Ia and the current Ib flowing through the transformer 231 and the transformer 232 are respectively approximately proportional to the values ​​of the manipulator current flowing through the piezoelectric bodies 1121, 1122, 1123, 1124. The term "manipulator current" used herein refers to the remainder after subtracting the current flowing through the damping capacitance of the piezoelectric body from the current flowing through the piezoelectric body.

[0118] The resistor 241 is an electronic component for measuring the current Ia (which can be regarded as the robot current) flowing due to the application of the driving voltage to the piezoelectric element of the vibrating body 110. The resistor 242 is an electronic component for measuring the current Ib (which can be regarded as the robot current) flowing due to the application of the driving voltage to the piezoelectric element of the vibrating body 110. Figure 3In the driving device 10 of the vibration-type actuator shown in FIG. 1 , the resistor 241 and the resistor 242 respectively correspond to the “first vibration detection unit” and the “second vibration detection unit” that detect the vibration of the vibration body 110 independently of each other. Figure 3 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the current Ia corresponds to the first output signal which is the output signal of the resistor 241 (the first vibration detection unit). Figure 3 In the driving device 10 of the vibration-type actuator shown in the figure, the current Ib corresponds to the second output signal which is the output signal of the resistor 242 (the second vibration detection unit).

[0119] Although in Figure 3 In the example shown, current Ia (which can be regarded as the robot current) and current Ib (which can be regarded as the robot current) are detected on the primary side of transformer 231 and transformer 232, respectively, but any other method can be used. For example, the robot current can be measured by applying the same voltage as the voltage of the piezoelectric body to a capacitor (whose electrostatic capacity is equivalent to the damping capacitance of the piezoelectric body) and subtracting the current flowing through the capacitor from the current flowing through the piezoelectric body.

[0120] The amplitude detection unit 254 is a component that detects the amplitude of the current Ia and outputs the A-phase current amplitude IA to the CPU 210 .

[0121] The timing setting section 251 is a component that sets the timing (timing of detection by the resistor 242 ) as to when the current Ib (second output signal) should be detected based on the waveform information of the current Ia (first output signal).

[0122] The sampling section 252 is a component that acquires a signed vibration amount by sampling the waveform of the current Ib at the timing set by the timing setting section 251 .

[0123] The arithmetic operation section 253 is a constituent element that calculates a vibration vector in the moving direction of the moving object 120 by using an arithmetic operation method specified by the CPU 210 based on the signed vibration amount acquired by the sampling section 252 .

[0124] 6A to 6H It is shown Figure 3 FIG. 1 is a diagram showing an example of a relationship between the detection values ​​of the current Ia and the current Ib associated with the B-phase amplitude command from the CPU 210 and the vibration vector output by the arithmetic operation section 253 in the driving device 10 of the vibration-type actuator shown. 6A to 6H Shows that "No treatment" is specified as Figure 3 The case of the arithmetic operation method of the CPU 210 input to the arithmetic operation section 253 is shown, in which the output of the sampling section 252 is output as it is according to “without processing”.

[0125] Fig. 6A , Figure 6B and Figure 6C A Lissajous waveform is shown in which the horizontal axis represents the current Ib and the vertical axis represents the current Ia. Fig. 6A , Figure 6B and Figure 6C In , the arrow indicates the direction of the Lissajous rotation. Specifically, Fig. 6A Shows Figure 6G The B-phase amplitude command shown is +50%. Figure 6B shows the state where the B phase amplitude command is 0%, and Figure 6C The state where the B phase amplitude command is -50% is shown. Fig. 6A , Figure 6B and Figure 6C In FIG. 1 , solid circle symbols 611, 621, and 631 respectively represent the timings set by the timing setting unit 251. Specifically, the timing setting unit 251 sets the time point when the current Ia crosses zero from negative to positive as FIG. 6A to FIG. 6C The timings represented by solid circle symbols 611 to 631 are respectively represented.

[0126] Fig.6D , Fig. 6E and Fig. 6F The waveforms of the current Ia (solid line) and the current Ib (dashed line) are shown. Specifically, Fig.6D Shows Figure 6G The B-phase amplitude command shown is +50%. Fig. 6E shows the state where the B phase amplitude command is 0%, and Fig. 6F The state where the B-phase amplitude command is -50% is shown. FIG. 6A to FIG. 6C The solid circle symbols 611 to 631 in the figure respectively represent the timings corresponding to FIG. 6D to FIG. 6F The solid circle symbols 641 to 661 in FIG. Fig.6D , Fig. 6E and Fig. 6F , the sampling unit 252 samples the current Ib (dashed line) at the above timing to obtain the value of the current Ib represented by each solid circle symbol 641, 651, and 661 as a vibration amount with a positive or negative sign.

[0127] Figure 6G Shown from Figure 3 The value of the B-phase amplitude command of the CPU 210 is shown in FIG. Figure 6H 2 shows the value of the vibration vector in the moving direction of the moving object 120 calculated by the arithmetic operation unit 253 based on the signed vibration amount acquired by the sampling unit 252. Figure 6HAmong the vibration vectors shown, (1) corresponds to the state where the B-phase amplitude command is +50%, (2) corresponds to the state where the B-phase amplitude command is 0%, and (3) corresponds to the state where the B-phase amplitude command is -50%.

[0128] 7A to 7F It is used to illustrate Figure 3 FIG. 2 is a diagram showing an example of processing by the sampling section 252 and the arithmetic operation section 253 when a plurality of timings are set by the timing setting section 251 in the vibration-type actuator driving device 10 shown in FIG. 7A to 7F The “average process” is specified as Figure 3 The CPU 210 shown is a case where the arithmetic operation method is input to the arithmetic operation section 253, wherein the average value of a plurality of signed vibration amounts output by the sampling section 252 is output according to the "average processing".

[0129] Fig. 7A , Figure 7B and Figure 7C The Lissajous waveform in which the horizontal axis represents the current Ib and the vertical axis represents the current Ia is shown. Fig. 7A , Figure 7B and Figure 7C In , the arrow indicates the direction of the Lissajous rotation. Specifically, Fig. 7A The B-phase amplitude command is +50%. Figure 7B shows the state where the B phase amplitude command is 0%, and Figure 7C The state where the B phase amplitude command is -50% is shown. Fig. 7A , Figure 7B and Figure 7C In FIG. 1 , five solid circle symbols 711, 721, and 731 respectively represent five timings set by the timing setting unit 251. Specifically, the timing setting unit 251 sets five points at equal time intervals or equal phase intervals, respectively as FIG. 7A to FIG. 7C The timings represented by the solid circle symbols 711 to 731 in FIG. 1 are shown in FIG. 2 , wherein two of the five points are before the center point of the time point that is the zero-crossing point of the current Ia, and two are after the center point.

[0130] Fig.7D , Fig. 7E and Figure 7F The waveforms of the current Ia (solid line) and the current Ib (dashed line) are shown. Specifically, Fig.7D The B-phase amplitude command is +50%. Fig. 7E shows the state where the B phase amplitude command is 0%, and Figure 7F The state where the B-phase amplitude command is -50% is shown. FIG. 7A to FIG. 7C The solid circle symbols 711 to 731 in the figure respectively represent the timings FIG. 7D to FIG. 7FThe five-point solid circle symbols 741 to 761 in FIG. FIG. 7D to FIG. 7F , the sampling section 252 samples the current Ib (dashed line) at the above timing to obtain the values ​​of the current Ib represented by the five-point solid circle symbols 741, 751 and 761 as the vibration amount with a positive or negative sign. The arithmetic operation section 253 calculates the vibration vector in the moving direction of the moving body 120 by cyclically averaging the following values, which are obtained by multiplying the five vibration amounts with signs obtained in one cycle of the current Ia at the sampling section 252 by predetermined coefficients, every cycle or longer.

[0131] FIG. 8A to FIG. 8F It is used to illustrate Figure 3 FIG. 2 is a diagram showing an example of processing by the sampling section 252 and the arithmetic operation section 253 when a plurality of timings are set by the timing setting section 251 in the vibration-type actuator driving device 10 shown in FIG. FIG. 8A to FIG. 8F shows that "differential processing" is specified as Figure 3 The case of the arithmetic operation method of the CPU 210 shown is input to the arithmetic operation section 253, wherein the difference between the two signed vibration amounts output by the sampling section 252 within one cycle of the current Ia is output according to this "difference processing".

[0132] Fig. 8A , Figure 8B and Figure 8C The Lissajous waveform in which the horizontal axis represents the current Ib and the vertical axis represents the current Ia is shown. Fig. 8A , Figure 8B and Figure 8C In , the arrow indicates the direction of the Lissajous rotation. Specifically, Fig. 8A The B-phase amplitude command is +50%. Figure 8B shows the state where the B phase amplitude command is 0%, and Figure 8C The state where the B phase amplitude command is -50% is shown. Fig. 8A , Figure 8B and Figure 8C In FIG. 1 , the solid circle symbols 811, 821, 831 and the hollow circle symbols 812, 822, 832 respectively represent two timings set by the timing setting unit 251. Specifically, FIG. 8A to FIG. 8C , the timing setting section 251 sets the timings indicated by solid circle symbols 811 to 831 when the current Ia crosses zero from negative to positive, and sets the timings indicated by hollow circle symbols 812 to 832 when the current Ia crosses zero from positive to negative.

[0133] Fig.8D , Fig. 8E and Fig.8FThe waveforms of the current Ia (solid line) and the current Ib (dashed line) are shown. Specifically, Fig.8D The B-phase amplitude command is +50%. Fig. 8E shows the state where the B phase amplitude command is 0%, and Figure 8F The state where the B-phase amplitude command is -50% is shown. FIG. 8A to FIG. 8C The solid circle symbols 811 to 831 in the figure represent the timings respectively corresponding to FIG. 8D to FIG. 8F The timings represented by the solid circle symbols 841 to 861 correspond to each other. FIG. 8A to FIG. 8C The timings represented by the hollow circle symbols 812 to 832 are respectively FIG. 8D to FIG. 8F The hollow circle symbols 842 to 862 in FIG. FIG. 8D to FIG. 8F , the sampling section 252 samples the current Ib (dashed line) at the above timing to obtain the values ​​of the current Ib represented by solid circle symbols 841 to 861 and hollow circle symbols 842 to 862, respectively, as the vibration amount with a positive or negative sign. The arithmetic operation section 253 calculates the difference between the two signed vibration amounts obtained in one cycle of the current Ia at the sampling section 252 as the vibration vector in the moving direction of the moving body 120. For example, the arithmetic operation section 253 calculates the difference between the two signed vibration amounts obtained in one cycle of the current Ia at the sampling section 252 as the vibration vector in the moving direction of the moving body 120. Fig.8D In the state shown, the difference between the signed vibration amount represented by solid circle symbol 841 and the signed vibration amount represented by hollow circle symbol 842 acquired in one cycle of the current Ia is calculated as a vibration vector in the moving direction of the moving body 120 .

[0134] In the above description, the arithmetic operation method is switched based on the input from the CPU 210 to the arithmetic operation section 253 ; however, the arithmetic operation method may have been determined in advance regardless of the input from the CPU 210 .

[0135] use 7A to 7F The "average processing" performed by the arithmetic operation unit 253 and the use of FIG. 8A to FIG. 8F The "difference processing" performed by the arithmetic operation unit 253 described above can be interpreted as a process of calculating the sum after multiplying a plurality of signed vibration amounts acquired at the sampling device 252 by a predetermined coefficient. 7A to 7F The "average processing" performed by the arithmetic operation section 253 described above can be interpreted as a process of calculating the above-mentioned sum using a fractional coefficient having the number of the plurality of signed vibration amounts as a denominator as a coefficient to be multiplied by the plurality of signed vibration amounts. FIG. 8A to FIG. 8F The “difference processing” performed by the arithmetic operation section 253 that has been described can be interpreted as processing for calculating the above-mentioned sum using 1 or −1 as a coefficient to be multiplied by a plurality of signed vibration amounts.

[0136] Fig. 9It is shown by Figure 3 1 is a flowchart of an example of a processing procedure of a driving method performed by the driving device 10 of the vibration-type actuator shown.

[0137] First, in step S101, the CPU 210 sets the A-phase current amplitude command IAcom, which has been predetermined, the arithmetic operation method of the arithmetic operation section 253, and the vibration vector command SVcom from the command section not shown. The CPU 210 further sets the frequency command Frq to F0, which is the frequency at the time of activation, the A-phase amplitude command AA to +50%, and the B-phase amplitude command BA to 0%.

[0138] Next, in step S102, the CPU 210 determines whether the measurement timing has come. If it is determined that the measurement timing has not come (S102 / No), the process waits in step S102.

[0139] On the other hand, if the result of the determination in step S102 is that the measurement timing has come ( S102 / Yes), the process proceeds to step S103 .

[0140] Upon entering step S103, the CPU 210 acquires the A-phase current amplitude IA output from the amplitude detection section 254 and the vibration vector SV output from the arithmetic operation section 253. In subsequent steps, the A-phase current amplitude IA and the vibration vector SV acquired in step S103 are compared with the A-phase current amplitude command IAcom and the vibration vector command SVcom set in step S101 to perform control of the frequency command Frq and the B-phase amplitude command BA.

[0141] First, control of the frequency command Frq in steps S104 to S106 will now be described.

[0142] In step S104 , the CPU 210 compares the A-phase current amplitude command IAcom set in step S101 with the A-phase current amplitude IA acquired in step S103 .

[0143] If the comparison result in step S104 is that the A-phase current amplitude command IAcom is smaller than (<) the A-phase current amplitude IA, the process proceeds to step S105.

[0144] Upon entering step S105 , the CPU 210 adds a predetermined frequency dF to the frequency command Frq to deviate the frequency from the resonance frequency of the vibrating body 110 , thereby reducing the A-phase current amplitude IA .

[0145] If the comparison result in step S104 is that the A-phase current amplitude command IAcom is greater than (>) the A-phase current amplitude IA, the process proceeds to step S106.

[0146] Upon entering step S106 , CPU 210 subtracts a predetermined frequency dF from frequency command Frq to bring the frequency closer to the resonance frequency of vibration body 110 , thereby increasing A-phase current amplitude IA .

[0147] When the processing of step S105 ends, when the processing of step S106 ends, or if the comparison of step S104 indicates that the A-phase current amplitude command IAcom is equal to (=) the A-phase current amplitude IA, the processing proceeds to step S107. By repeating the operations of steps S104 to S106, the frequency command Frq is controlled so that the A-phase current amplitude IA approaches the A-phase current amplitude command IAcom.

[0148] Next, control of the B-phase amplitude command BA in steps S107 to S113 will now be described.

[0149] In step S107 , the CPU 210 compares the vibration vector command SVcom set in step S101 with the vibration vector SV acquired in step S103 .

[0150] If the comparison result in step S107 is that the vibration vector command SVcom is smaller than (<) the vibration vector SV, the process proceeds to step S108.

[0151] Upon entering step S108 , the CPU 210 subtracts a predetermined amplitude dA from the B-phase amplitude command BA.

[0152] Next, in step S109 , the CPU 210 determines whether the B-phase amplitude command BA is smaller than −50%.

[0153] If the result of the determination in step S109 is that the B-phase amplitude command BA is smaller than -50% (S109 / Yes), the process proceeds to step S110.

[0154] Upon entering step S110 , the CPU 210 sets the B-phase amplitude command BA to −50%.

[0155] If the comparison result in step S107 is that the vibration vector command SVcom is greater than (>) the vibration vector SV, the process proceeds to step S111.

[0156] Upon entering step S111 , the CPU 210 adds a predetermined amplitude dA to the B-phase amplitude command BA.

[0157] Next, in step S112, the CPU 210 determines whether the B-phase amplitude command BA is greater than +50%.

[0158] If the result of the determination in step S112 is that the B-phase amplitude command BA is greater than +50% ( S112 / Yes), the process proceeds to step S113 .

[0159] Upon entering step S113, the CPU 210 sets the B-phase amplitude command BA to +50%.

[0160] When the processing in step S110 ends, when the processing in step S113 ends, or if the comparison in step S107 indicates that the vibration vector command SVcom is equal to (=) the vibration vector SV, the processing proceeds to step S114. By repeating the operations in steps S107 to S113, the B-phase amplitude command BA is controlled so that the vibration vector SV approaches the vibration vector command SVcom. The CPU 210 that performs the operations in steps S107 to S113 constitutes a first control section that is configured to perform amplitude control on the two-phase AC signals PA and PB so that the vibration vector SV follows the vibration vector command SVcom (first vibration target value).

[0161] Next, in step S114, the CPU 210 determines whether a stop command has been input. If it is determined that a stop command has not been input (S114 / No), the process returns to step S102, and the processes in step S102 and subsequent steps are performed.

[0162] On the other hand, if the result of the determination in step S114 is that the stop command has been input (S114 / Yes), the process proceeds to step S115.

[0163] Upon entering step S115, the CPU 210 sets the A-phase amplitude command AA and the B-phase amplitude command BA to 0%. This causes the voltage applied to the piezoelectric bodies 1121 to 1124 in the piezoelectric element 112 of the vibration-type actuator 100 to become 0V, and the moving body 120 (rotor) of the vibration-type actuator 100 thus stops.

[0164] Then, once the processing in step S115 is completed, Fig. 9 The processing in the shown flowchart is completed.

[0165] Fig.10 1 is a diagram showing a second configuration example of the driving device 10 of the vibration-type actuator according to the first embodiment of the present invention. Fig.10 In, with Figure 3 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0166] Fig.10 The driving device 10 of the vibration type actuator shown in FIG. Figure 3The difference of the driving device 10 of the vibration type actuator shown in FIG. 1 is that the AC signal generating section 222 generates two-phase AC signals PA and PB based on the pulse width command and the phase difference command from the CPU 210. Specifically, Figure 3 In the driving device 10 of the vibration type actuator shown in FIG. 1 , vibration vector control is performed by means of the B-phase amplitude command, and Fig.10 In the driving device 10 of the vibration type actuator shown in FIG. 1 , vibration vector control is performed by means of a phase difference command. Figure 3 Another difference is that in Fig.10 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the vibration detection signal Sa from the piezoelectric body 1125 in the piezoelectric element 112 of the vibration type actuator 100 is input to the timing setting section 251 and the amplitude detection section 254. Figure 3 Another difference is that in Fig.10 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the vibration detection signal Sb from the piezoelectric body 1126 in the piezoelectric element 112 of the vibration type actuator 100 is input to the sampling unit 252. Figure 3 Another difference is that in Fig.10 In the illustrated driving device 10 for a vibration-type actuator, the A-phase vibration amplitude is output from the amplitude detection unit 254 to the CPU 210 .

[0167] exist Fig.10 In the driving device 10 of the vibration-type actuator shown in FIG. 1 , the piezoelectric body 1125 and the piezoelectric body 1126 respectively correspond to the “first vibration detection unit” and the “second vibration detection unit” that detect the vibration of the vibration body 110 independently of each other. Fig.10 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the vibration detection signal Sa corresponds to the first output signal, which is the output signal of the piezoelectric body 1125 (the first vibration detection unit). Fig.10 In the vibration-type actuator driving device 10 shown, the vibration detection signal Sb corresponds to the second output signal which is the output signal of the piezoelectric body 1126 (second vibration detection unit).

[0168] Fig.11 It is shown Fig.10 FIG. 1 is a diagram showing an example of a relationship between a phase difference command from the CPU 210 and the AC signals PA and PB generated by the AC signal generating section 222 in the vibration-type actuator driving device 10 shown. Fig.11 The phase difference command shown is a signal that sets the phase difference of the AC signal PB relative to the AC signal PA between -90° and +90°. When the phase of the AC signal PB leads the phase of the AC signal PA by 90°, Fig.11The sign of the phase difference command shown is positive. When the phase of the AC signal PB lags the phase of the AC signal PA by 90°, Fig.11 The sign of the phase difference command is shown to be negative.

[0169] FIG. 12A to FIG. 12H It is shown in Fig.10 FIG12 is a diagram showing an example of the relationship between the detection values ​​of the vibration detection signal Sa and the vibration detection signal Sb associated with the phase difference command from the CPU 210 and the vibration vector output from the arithmetic operation section 253 in the driving device 10 of the vibration type actuator shown in FIG12. Fig.10 The case of the arithmetic operation method of the CPU 210 input to the arithmetic operation section 253 is shown, wherein the output of the sampling section 252 is output as is according to “without processing”.

[0170] Fig. 12A , Fig. 12B and Fig. 12C The horizontal axis represents the vibration detection signal Sb and the vertical axis represents the Lissajous waveform of the vibration detection signal Sa. Fig. 12A , Fig. 12B and Fig. 12C In , the arrow indicates the direction of the Lissajous rotation. Specifically, Fig. 12A Shows Figure 12G The phase difference command shown in is +90°. Fig. 12B shows the state where the phase difference command is 0°, and Fig. 12C The state where the phase difference command is -90° is shown. Fig. 12A , Fig. 12B and Fig. 12C In FIG. 1 , solid circle symbols 1211, 1221, and 1231 respectively represent the timings set by the timing setting section 251. Specifically, the timing setting section 251 sets the time point when the vibration detection signal Sa crosses zero from negative to positive as FIG. 12A to FIG. 12C The timings represented by solid circle symbols 1211 to 1231 are respectively represented.

[0171] Fig.12D , Fig.12E and Fig.12F 1 shows the waveforms of the vibration detection signal Sa (solid line) and the vibration detection signal Sb (dashed line). Specifically, Fig.12D Shows Figure 12G The phase difference command shown in is +90°. Fig.12E shows the state where the phase difference command is 0°, and Fig.12F The state where the phase difference command is -90° is shown. FIG. 12A to FIG. 12C The solid circle symbols 1211 to 1231 in the figure represent the timings respectively corresponding to FIG. 12D to FIG. 12FThe solid circle symbols 1241 to 1261 in FIG. Fig.12D , Fig.12E and Fig.12F , the sampling section 252 samples the vibration detection signal Sb (dashed line) at the above timing to obtain the value of the vibration detection signal Sb represented by each solid circle symbol 1241 to 1261 as a vibration amount with a positive sign or a negative sign.

[0172] Figure 12G Shown from Fig.10 The value of the phase difference command of the CPU 210 is shown in . Fig.12H 2 shows the value of the vibration vector in the moving direction of the moving object 120 calculated by the arithmetic operation unit 253 based on the signed vibration amount acquired by the sampling unit 252. Fig.12H Among the vibration vectors shown, (1) corresponds to the state where the phase difference command is +90°, (2) corresponds to the state where the phase difference command is 0°, and (3) corresponds to the state where the phase difference command is -90°.

[0173] FIG. 13A to FIG. 13F It is used to illustrate Fig.10 FIG. 2 is a diagram showing an example of processing by the sampling section 252 and the arithmetic operation section 253 when a plurality of timings are set by the timing setting section 251 in the vibration-type actuator driving device 10 shown in FIG. FIG. 13A to FIG. 13F shows that "differential processing" is specified as Fig.10 The case of the arithmetic operation method of the CPU 210 shown is input to the arithmetic operation section 253, wherein the difference between the two signed vibration amounts output by the sampling section 252 within one cycle of the vibration detection signal Sa is output according to this "difference processing".

[0174] Fig.13A , Fig. 13B and Fig. 13C The horizontal axis represents the vibration detection signal Sb and the vertical axis represents the Lissajous waveform of the vibration detection signal Sa. Fig.13A , Fig. 13B and Fig. 13C In , the arrow indicates the direction of the Lissajous rotation. Specifically, Fig.13A The phase difference command is +90°. Fig. 13B shows the state where the phase difference command is 0°, and Fig. 13C The state where the phase difference command is -90° is shown. Fig.13A , Fig. 13B and Fig. 13C In FIG. 1 , the solid circle symbols 1311, 1321 and 1331 and the hollow circle symbols 1312, 1322 and 1332 respectively represent two timings set by the timing setting unit 251. Specifically, FIG. 13A to FIG. 13CIn FIG. 13, the timing setting unit 251 sets the timing at which the vibration detection signal Sa crosses zero from negative to positive, represented by solid circle symbols 1311 to 1331. FIG. 13A to FIG. 13C In FIG. 13 , the timing setting unit 251 sets the timing indicated by hollow circle symbols 1312 to 1332 at which the vibration detection signal Sa crosses zero from positive to negative.

[0175] Fig.13D , Fig.13E and Fig.13F 1 shows the waveforms of the vibration detection signal Sa (solid line) and the vibration detection signal Sb (dashed line). Specifically, Fig.13D The phase difference command is +90°. Fig.13E shows the state where the phase difference command is 0°, and Fig.13F The state where the phase difference command is -90° is shown. FIG. 13A to FIG. 13C The solid circle symbols 1311 to 1331 in the figure respectively represent the timings FIG. 13D to FIG. 13F The timings represented by the solid circle symbols 1341 to 1361 correspond to each other. FIG. 13A to FIG. 13C The timings represented by the hollow circle symbols 1312 to 1332 are respectively FIG. 13D to FIG. 13F The sampling section 252 samples the vibration detection signal Sb (dashed line) at the above timing to obtain the values ​​of the vibration detection signal Sb represented by the solid circle symbols 1341 to 1361 and the hollow circle symbols 1342 to 1362, respectively, as the vibration amount with a positive sign or a negative sign. The arithmetic operation section 253 calculates the difference between the two vibration amounts with a sign obtained in one cycle of the vibration detection signal Sa at the sampling section 252 as the vibration vector in the moving direction of the moving body 120.

[0176] Fig.14 It is shown by Fig.10 1 is a flowchart of an example of a processing procedure of a driving method performed by the driving device 10 of the vibration-type actuator shown.

[0177] First, in step S201, the CPU 210 sets the A-phase amplitude command AScom, the arithmetic operation method of the arithmetic operation section 253, and the rotation speed command SPcom from the command section not shown, which have been determined in advance. The CPU 210 further sets the frequency command Frq to F0, which is the frequency at the time of activation, sets the pulse width command PW to 50%, and sets the phase difference command PH to 0°.

[0178] Next, in step S202, the CPU 210 determines whether the measurement timing has come. If it is determined that the measurement timing has not come (S202 / No), the process waits in step S202.

[0179] On the other hand, if the result of the determination in step S202 is that the measurement timing has come (S202 / Yes), the process proceeds to step S203.

[0180] Upon entering step S203 , the CPU 210 acquires the A-phase vibration amplitude AS output from the amplitude detection section 254 and the vibration vector SV output from the arithmetic operation section 253 .

[0181] Next, in step S204, the CPU 210 calculates the rotation speed SP of the moving body 120 (rotor) based on the values ​​of the vibration vector SV and the A-phase vibration amplitude AS acquired in step S203 by means of a function f defined by a data table or a calculation formula, etc. In subsequent steps, the above-mentioned A-phase vibration amplitude AS and rotation speed SP are compared with the A-phase vibration amplitude command AScom and the rotation speed command SPcom set in step S201 to control the frequency command Frq and the phase difference command PH.

[0182] First, the control of the frequency command Frq in steps S205 to S207 is described.

[0183] In step S205 , the CPU 210 compares the A-phase vibration amplitude command AScom set in step S201 with the A-phase vibration amplitude AS acquired in step S203 .

[0184] If the comparison result in step S205 is that the A-phase vibration amplitude command AScom is smaller than (<) the A-phase vibration amplitude AS, the process proceeds to step S206.

[0185] Upon entering step S206 , the CPU 210 adds a predetermined frequency dF to the frequency command Frq to deviate the frequency from the resonance frequency of the vibration body 110 , thereby reducing the A-phase vibration amplitude AS.

[0186] If the comparison result in step S205 is that the A-phase vibration amplitude command AScom is greater than (>) the A-phase vibration amplitude AS, the process proceeds to step S207.

[0187] Upon entering step S207 , the CPU 210 subtracts a predetermined frequency dF from the frequency command Frq to bring the frequency closer to the resonance frequency of the vibration body 110 , thereby increasing the A-phase vibration amplitude AS.

[0188] When the processing in step S206 ends, when the processing in step S207 ends, or if the comparison in step S205 indicates that the A-phase vibration amplitude command AScom is equal to (=) the A-phase vibration amplitude AS, the processing proceeds to step S208. By repeating the operations in steps S205 to S207, the frequency command Frq is controlled so that the A-phase vibration amplitude AS approaches the A-phase vibration amplitude command AScom.

[0189] Next, control of the phase difference command PH in steps S208 to S214 will now be described.

[0190] In step S208, CPU 210 compares rotation speed command SPcom set in step S201 with rotation speed SP calculated in step S204.

[0191] If the comparison result in step S208 is that rotational speed command SPcom is smaller than (<) rotational speed SP, the process proceeds to step S209.

[0192] Upon entering step S209, the CPU 210 subtracts a predetermined phase dP from the phase difference command PH.

[0193] Next, in step S210, the CPU 210 determines whether the phase difference command PH is smaller than -90°.

[0194] If the result of determination in step S210 is that the phase difference command PH is smaller than -90° (S210 / Yes), the process proceeds to step S211.

[0195] Upon entering step S211, the CPU 210 sets the phase difference command PH to -90°.

[0196] If the comparison result in step S208 is that rotational speed command SPcom is greater than (>) rotational speed SP, the process proceeds to step S212.

[0197] Upon entering step S212, the CPU 210 adds a predetermined phase dP to the phase difference command PH.

[0198] Next, in step S213, the CPU 210 determines whether the phase difference command PH is greater than +90°.

[0199] If the result of determination in step S213 is that the phase difference command PH is greater than +90° (S213 / Yes), the process proceeds to step S214.

[0200] Upon entering step S214, the CPU 210 sets the phase difference command PH to +90°.

[0201] When the processing in step S211 ends, when the processing in step S214 ends, or if the comparison in step S208 indicates that the rotation speed command SPcom is equal to (=) the rotation speed SP, the processing proceeds to step S215. By repeating the operations in steps S208 to S214, the phase difference command PH is controlled so that the rotation speed SP approaches the rotation speed command SPcom.

[0202] Next, in step S215, the CPU 210 determines whether a stop command has been input. If it is determined that a stop command has not been input (S215 / No), the process returns to step S202, and the processes in step S202 and subsequent steps are performed.

[0203] On the other hand, if the result of the determination in step S215 is that the stop command has been input (S215 / Yes), the process proceeds to step S216.

[0204] Once entering step S216, the CPU 210 sets the pulse width command PW to 0% and the phase difference command PH to 0°. This makes the voltage applied to the piezoelectric bodies 1121 to 1124 in the piezoelectric element 112 of the vibration type actuator 100 become 0V, and the moving body 120 (rotor) of the vibration type actuator 100 stops accordingly.

[0205] Then, once the processing in step S216 is completed, Fig.14 The processing in the illustrated flowchart ends.

[0206] Fig.15 1 is a diagram showing a third configuration example of the driving device 10 of the vibration-type actuator according to the first embodiment of the present invention. Fig.15 In, with Figure 3 and Fig.10 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0207] The driving device 10 of the vibration type actuator is depicted Fig.15 Mainly shows Fig.10 Detailed illustration of the internal structure of the CPU 210 in the driving device 10 of the vibration-type actuator is shown.

[0208] exist Fig.15 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the CPU 210 includes a PI controller 211, a PI controller 212, a speed estimation unit 213, a comparison unit 214, and a comparison unit 215. Specifically, in Fig.15 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the PI controller 211 and the PI controller 212 are respectively used to control the vibration type actuator 10. Fig.14The setting operation of the frequency command Frq and the phase difference command PH in the flowchart shown.

[0209] exist Fig.15 In the arithmetic operation unit 253 shown in FIG. FIG. 13A to FIG. 13F The "difference processing" shown is specified as an arithmetic operation method that has been predetermined. Specifically, in Fig.15 In the arithmetic operation section 253 shown in the figure, the arithmetic operation method is set so that the vibration vector changes substantially in proportion to the rotation speed of the moving body 120 (rotor).

[0210] Fig.15 The illustrated speed estimation section 213 is a constituent unit that estimates the speed of the moving body 120 by multiplying the vibration vector output from the arithmetic operation section 253 by a gain set according to the value of the A-phase vibration amplitude output from the amplitude detection section 254 .

[0211] Fig.15 The illustrated comparison section 215 and the PI controller 212 configured to perform proportional integral calculation constitute a speed control system. Fig.15 The illustrated comparison section 215 and the PI controller 212 control the phase difference between the AC signal VA and the AC signal VB so that the speed output by the speed estimation section 213 follows the speed command from the command section not shown.

[0212] Fig.15 The comparison unit 214 and the PI controller 211 shown perform frequency control on the AC signals VA and VB based on the A-phase amplitude command from the command unit not shown, so that the amplitude of the vibration detection signal Sa matches the A-phase amplitude command. Specifically, Fig.15 The illustrated PI controller 211 constitutes a second control section configured to frequency-control the two-phase AC signal so that the A-phase vibration amplitude detected by the amplitude detection section 254 follows the A-phase amplitude command (second vibration target value).

[0213] Fig.16 1 is a diagram showing a fourth configuration example of the driving device 10 of the vibration-type actuator according to the first embodiment of the present invention. Fig.16 In, with Figure 3 , Fig.10 and Fig.15 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0214] Fig.16 The illustrated driving apparatus 10 of a vibration-type actuator includes a vibration-type actuator 100 , a control device 200 , and a position sensor 300 . Fig.16The driving device 10 of the vibration type actuator shown has a configuration according to which control of a vibration vector is inserted into a small loop of position control using a position sensor 300. Specifically, the position sensor 300 is a sensor that detects the rotation position of a moving body 120 (rotor) of the vibration type actuator 100.

[0215] exist Fig.16 In the illustrated driving device 10 for a vibration-type actuator, a CPU 210 includes a PI controller 211 , a PI controller 212 , a comparison section 214 , a comparison section 215 , a PI controller 216 , and a comparison section 217 .

[0216] Fig.16 The illustrated comparison unit 215 is a component that compares a position command from a command unit (not shown) with the rotation position of the moving body 120 (rotor) detected by the position sensor 300 , and outputs a position deviation to the PI controller 216 . Fig.16 The PI controller 216 shown is a component that performs proportional integral calculation on the position deviation input from the comparison unit 215 and outputs a vibration vector command to the comparison unit 217. Specifically, Fig.16 The illustrated PI controller 216 determines a vibration vector command (first vibration target value) so that the position of the mobile body 120 (the position of a member directly or indirectly connected to the mobile body 120 ) detected by the position sensor 300 follows a desired position (predetermined position). Fig.16 The illustrated comparison unit 217 is a component that compares the vibration vector command output by the PI controller 216 with the value of the vibration vector output by the arithmetic operation unit 253 , and outputs a vibration vector deviation to the PI controller 212 . Fig.16 The PI controller 212 shown performs proportional-integral calculation on the input of the vibration vector deviation from the comparison unit 217 , and outputs a B-phase amplitude command to the AC signal generation unit 222 .

[0217] for Fig.16 The AC signal output by the AC signal generating unit 222 shown in FIG. 1 is obtained by using the B-phase amplitude command output by the PI controller 212, as shown in FIG. Figure 4 The pulse width and phase of the AC signal PB are set as shown. As a result, the Lissajous waveform of the vibration generated at the contact portion between the vibrating body 110 and the moving body 120 (rotor) is as follows: 6A to 6H The rotation speed and the rotation direction of the moving body 120 (rotor) are controlled by changing the position vector as shown. Then, the rotation position of the moving body 120 (rotor) is controlled in a manner following the position command from the command section not shown. By inserting the control of the vibration vector as a small loop in this way, the vibration of the vibrating body 110 can be controlled at high speed without being affected by the mechanism including the position sensor 300. Compared with the case where there is no such small loop, high-speed position control is stably achieved.

[0218] In the present embodiment, the resistors 241 and 242 or the piezoelectric bodies 1125 and 1126 are used as the "first vibration detection unit" and the "second vibration detection unit" that detect the vibration of the vibration body 110 independently of each other; however, this does not mean any limitation. For example, an optical sensor or the like may be used as the vibration detection unit configured to detect the vibration of the vibration body 110.

[0219] Although the vibration type actuator 100 using two different out-of-plane direction bending vibrations is applied to the present embodiment, in the case where a vibration type actuator using two different modes of vibration is applied to the present embodiment, an effect similar to that of the present embodiment can be obtained. For example, even in the case of a vibration type actuator using a vertical vibration plus torsional vibration scheme, a vertical vibration plus bending vibration scheme, etc., the vibration vector can be detected and controlled similarly to the present embodiment by separately detecting the vibrations in each mode.

[0220] In the present embodiment, the AC signal generating unit 222 generates two-phase AC signals PA and PB, and the amplifier 223 amplifies the two-phase AC signals to output a two-phase driving voltage to be applied to the vibrating body 110; however, the present invention is not limited to this embodiment. For example, an embodiment in which the AC signal generating unit 222 generates AC signals of more than three phases and the amplifier 223 amplifies these AC signals of more than three phases to output driving voltages of more than three phases to be applied to the vibrating body 110 may also be applicable to the present invention. That is, in the present invention, as long as the AC signal generating unit 222 generates AC signals of more than two phases and the amplifier 223 amplifies these AC signals of more than two phases to output driving voltages of more than two phases to be applied to the vibrating body 110, it will suffice.

[0221] As described above, in the driving device 10 of the vibration type actuator according to the first embodiment, the AC signal generating section 222 generates two-phase AC signals PA and PB, and the amplifying section 223 amplifies these two-phase AC signals to output a two-phase driving voltage to be applied to the vibration body 110. The driving device 10 of the vibration type actuator according to the first embodiment includes the resistors 241 and 242 or the piezoelectric body 1125 and the piezoelectric body 1126 as the first vibration detecting section and the second vibration detecting section that detect the vibration of the vibration body 110 independently of each other. In the driving device 10 of the vibration type actuator according to the first embodiment, based on the first output signal (i.e., the signal output from the first vibration detecting section), the timing setting section 251 sets the detection timing of the second vibration detecting section. Next, in the driving device 10 of the vibration type actuator according to the first embodiment, the sampling section 252 obtains the signed vibration amount by sampling the second output signal (i.e., the signal output from the second vibration detecting section) at the timing set by the timing setting section 251. Then, in the driving device 10 of the vibration-type actuator according to the first embodiment, the arithmetic operation section 253 calculates the vibration vector in the moving direction of the moving body 120 based on the signed vibration amount acquired by the sampling section 252 .

[0222] By the above-mentioned configuration, in the vibration type actuator 100 including the vibration body 110 and the moving body 120, the vibration state of the vibration body 110 can also be correctly detected in the region where the moving direction of the moving body 120 is reversed. This improves the accuracy of estimating the speed of the moving body 120 in the speed region including the reversal of the moving direction of the moving body 120, for example. Moreover, for example, the control device 200 with high instant responsiveness can be constructed by using a vibration vector control system as a small loop of a control system configured to control the position, speed, and force of the vibration type actuator 100. In addition, by configuring the first vibration detection unit and the second vibration detection unit that detect the vibration of the vibration body 110 independently of each other by means of the resistor 241 and the resistor 242 or the piezoelectric body 1125 and the piezoelectric body 1126, the vibration detection unit is realized at a low cost.

[0223] (Second embodiment)

[0224] Next, a second embodiment will now be described. In the second embodiment described below, descriptions of matters identical to those described in the above-described first embodiment will be omitted, and descriptions of matters different from those described in the above-described first embodiment will be focused on.

[0225] FIG. 17A to FIG. 17E 2 is a diagram showing a schematic configuration and an example of a vibration shape of a vibration-type actuator 100 according to a second embodiment of the present invention. FIG. 17A to FIG. 17E , a schematic configuration and an operating principle of a vibration-type actuator 100 according to a second embodiment will now be described.

[0226] like Fig. 17C As shown, the vibration type actuator 100 according to the second embodiment includes a vibrating body 140 and a moving body 150. The vibrating body 140 is a plate-shaped vibrating body made of a conductive material, such as Fig.17A and Fig. 17C As shown, the piezoelectric element 141 and two protrusions 142 on the plate surface that contact the moving body 150 are included. The piezoelectric element 141 is a component unit that is a part of the vibrating body 140 and awakens the vibration of the vibrating body 140.

[0227] like Fig. 17B As shown, two electrodes 1411 and 1412 are formed on the surface of the piezoelectric element 141. Alternating voltages whose phases change independently of each other are applied to the two electrodes 1411 and 1412, and electrical insulation is provided between the two electrodes.

[0228] The back side of the piezoelectric element 141 is configured as an electrode extending over the entire surface, and a current can be applied from the front side of the piezoelectric element 141 through a through hole (not shown) provided in a portion of the electrode 1411 and a portion of the electrode 1412. In the following description, the electrode 1411 and the electrode 1412 are referred to as the piezoelectric body 1411 and the piezoelectric body 1412, respectively.

[0229] Fig. 17C The moving body 150 shown is a slider which is pressed against the protrusion 142 of the vibrating body 140 with a constant pressing force by means of a pressing mechanism not shown. The moving body 150 (slider) is configured to relatively move due to vibration excited in the vibrating body 140.

[0230] Fig.17D and Fig.17E 1 and 2 are diagrams each showing an example of a vibration mode of the vibration body 140 .

[0231] Specifically, Fig.17D A vibration shape of the vibrating body 140 according to a vibration mode of vibration excited in the vibrating body 140 when an AC voltage of the same phase is applied to the piezoelectric body 1411 and the piezoelectric body 1412 is shown. Fig.17E FIG. 1 shows a vibration shape of the vibrating body 140 according to a vibration mode of vibration excited in the vibrating body 140 when an AC voltage of opposite phase is applied to the piezoelectric body 1411 and the piezoelectric body 1412. That is, when the phase difference between the AC voltages applied to the piezoelectric body 1411 and the piezoelectric body 1412 of the vibrating body 140 is 0°, the vibration mode of vibration excited in the vibrating body 140 is 0°. Fig.17D When the phase difference between the AC voltages applied to the piezoelectric body 1411 and the piezoelectric body 1412 of the vibrating body 140 is 180°, the excitation according to Fig.17EIn addition, when the phase difference between the AC voltages applied to the piezoelectric body 1411 and the piezoelectric body 1412 of the vibrating body 140 is any phase other than 0° and 180° (in practice, a range of ±120° is used), the vibration modes shown in FIG. Fig.17D and Fig.17E In this case, the moving body 150 (slider) pressed against the protrusion 142 provided in the vibrating body 140 moves in the long side direction of the rectangular shape of the vibrating body 140 .

[0232] Fig.18 1 is a diagram showing a first configuration example of a driving device 10 for a vibration-type actuator according to a second embodiment of the present invention. Fig.18 In, with Figure 3 , Fig.10 , Fig.15 and Fig.16 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0233] Fig.18 The driving device 10 of the vibration type actuator shown in FIG. 1 includes a vibration type actuator 100, a control device 200, and a position sensor 300. Specifically, Fig.18 In the figure, only the interior of the vibration type actuator 100 is shown. FIG. 17A to FIG. 17E The piezoelectric element 141 is shown, and only the inside of the piezoelectric element 141 is shown. FIG. 17A to FIG. 17E Piezoelectric bodies 1411 and 1412 are shown.

[0234] Fig.18 The illustrated control device 200 includes a CPU 210 , an oscillator 221 , an AC signal generating section 222 , an amplifying section 223 , a timing setting section 251 , a sampling section 252 , an arithmetic operation section 253 , and an amplitude detecting section 254 . Fig.18 The illustrated control device 200 further includes transformers 231 and 232 , resistors 241 and 242 , an adding section 261 , and a subtracting section 262 .

[0235] AC voltages amplified according to the AC signal VA and the AC signal VB from the amplifying section 223 at the transformer 231 and the transformer 232 are applied as driving voltages to the piezoelectric bodies 1411 and 1412 in the piezoelectric element 141 of the vibration type actuator 100 , respectively.

[0236] The secondary side inductance values ​​of transformer 231 and transformer 232 are frequency matched with the damping capacitance of piezoelectric bodies 1411 and 1412. The values ​​of primary side current Ia and primary side current Ib flowing through transformer 231 and transformer 232 are approximately proportional to the values ​​of the robot arm current flowing through piezoelectric bodies 1411 and 1412, respectively. Fig.18In the driving device 10 of the vibration-type actuator shown in FIG. 1 , the resistor 241 and the resistor 242 respectively correspond to the “first vibration detection unit” and the “second vibration detection unit” that detect the vibration of the vibrating body 140 independently of each other. Fig.18 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the current Ia corresponds to the first output signal which is the output signal of the resistor 241 (the first vibration detection unit). Fig.18 In the driving device 10 of the vibration-type actuator shown in the figure, the current Ib corresponds to the second output signal which is the output signal of the resistor 242 (the second vibration detection unit).

[0237] The adding section 261 is a component that adds the voltage waveform of the current Ia converted to voltage at the resistor 241 and the voltage waveform of the current Ib converted to voltage at the resistor 242 and outputs the current Ia+Ib. The output waveform of the adding section 261 is shown in FIG. Fig.17D The vibration state shown is a state of vibration (vibration in the push-up direction) that pushes the moving body 150 (slider) and the vibrating body 140 upward. Then, the amplitude detection section 254 detects the amplitude of the vibration in the push-up direction, that is, the amplitude of the output signal (current Ia+Ib) of the adding section 261, and outputs it as the push-up amplitude TA to the CPU 210. The timing setting section 251 sets the timing by using the output signal (current Ia+Ib) of the adding section 261.

[0238] The subtraction unit 262 is a component that subtracts the voltage waveform of the current Ib converted into a voltage at the resistor 242 from the voltage waveform of the current Ia converted into a voltage at the resistor 241, and outputs the current Ia-Ib. The output waveform of the subtraction unit 262 represents Fig.17E The vibration state shown is a vibration state including the vibration in the moving direction (vibration in the feeding direction) of the moving body 150 (slider). The sampling unit 252 acquires the signed vibration amount by sampling using the output signal (current Ia-Ib) of the subtraction unit 262. Then, the arithmetic operation unit 253 calculates the vibration vector in the moving direction of the moving body 150 (slider) based on the signed vibration amount acquired by the sampling unit 252.

[0239] FIG. 19A to FIG. 19H It is shown in Fig.18 FIG. 1 is a diagram showing an example of a relationship between the detection values ​​of the current Ia+Ib and the current Ia-Ib related to the phase difference command from the CPU 210 and the vibration vector output by the arithmetic operation section 253 in the driving device 10 of the vibration type actuator shown. FIG. 19A to FIG. 19H Shows that "No treatment" is specified as Fig.18The case of the arithmetic operation method of the CPU 210 input to the arithmetic operation section 253 is shown, in which the output of the sampling section 252 is output as it is according to “without processing”.

[0240] Fig.19A , Fig.19B and Fig.19C The Lissajous waveform in which the horizontal axis represents the current Ia-Ib and the vertical axis represents the current Ia+Ib is shown. Fig.19A , Fig.19B and Fig.19C In , the arrow indicates the direction of the Lissajous rotation. Specifically, Fig.19A Shows Figure 19G The phase difference command shown in is +90°. Fig.19B shows the state where the phase difference command is 0°, and Fig.19C The state where the phase difference command is -90° is shown. Fig.19A , Fig.19B and Fig.19C , solid circle symbols 1911, 1921, and 1931 respectively represent the timings set by the timing setting section 251.

[0241] Fig.19D , Fig.19E and Fig.19F The waveforms of the current Ia+Ib (solid line), the current Ia-Ib (dashed line), and the differential of the current Ia+Ib (long and short alternating dashed lines) are shown. Specifically, Fig.19D Shows Figure 12G The phase difference command shown in is +90°. Fig.19E shows the state where the phase difference command is 0°, and Fig.19F The phase difference command is -90°. The timing setting unit 251 sets FIG. 19D to FIG. 19F The time points at which the differential waveform of the current Ia+Ib (long and short alternating dashed lines) crosses zero from positive to negative are set as FIG. 19A to FIG. 19C The solid circle symbols 1911 to 1931 represent the timing. FIG. 19A to FIG. 19C The solid circle symbols 1911 to 1931 in the figure represent the timings respectively FIG. 19D to FIG. 19F The solid circle symbols 1941 to 1961 in FIG. FIG. 19D to FIG. 19F , the sampling unit 252 samples the current Ia-Ib (dashed line) at the above timing to obtain the value of the current Ia-Ib represented by each solid circle symbol 1941 to 1961 as a vibration amount with a positive or negative sign.

[0242] Figure 19G Shown from Fig.18 The value of the phase difference command of the CPU 210 is shown in . Fig.19H2 shows the value of the vibration vector in the moving direction of the moving object 150 calculated by the arithmetic operation unit 253 based on the signed vibration amount acquired by the sampling unit 252. Fig.19H Among the vibration vectors shown, (1) corresponds to the state where the phase difference command is +90°, (2) corresponds to the state where the phase difference command is 0°, and (3) corresponds to the state where the phase difference command is -90°.

[0243] FIG. 20A to FIG. 10 F is used to indicate Fig.18 FIG. 2 is a diagram showing an example of processing by the sampling section 252 and the arithmetic operation section 253 when a plurality of timings are set by the timing setting section 251 in the vibration-type actuator driving device 10 shown in FIG. FIG. 20A to FIG. 20F The “average process” is specified as Fig.18 The CPU 210 shown in FIG. 1 is input to the arithmetic operation method of the arithmetic operation section 253 , wherein the average value of the plurality of signed vibration amounts output by the sampling section 252 is output according to the “average processing”.

[0244] Fig. 20A , Fig. 20B and Fig.10 C shows a Lissajous waveform in which the horizontal axis represents the current Ia-Ib and the vertical axis represents the current Ia+Ib. Fig. 20A , Fig. 20B and Fig. 20C In , the arrow indicates the direction of the Lissajous rotation. Specifically, Fig. 20A The phase difference command is +90°. Fig. 20B shows the state where the phase difference command is 0°, and Fig. 20C The state where the phase difference command is -90° is shown. Fig. 20A , Fig. 20B and Fig. 20C In the figure, five-point solid circle symbols 2011, 2021, and 2031 respectively represent five timings set by the timing setting unit 251.

[0245] Fig.20D , Fig.20E and Fig.20F The waveforms of the current Ia+Ib (solid line), the current Ia-Ib (dashed line), and the differential of the current Ia+Ib (long and short alternating dashed lines) are shown. Specifically, Fig.20D The phase difference command is +90°. Fig.20E shows the state where the phase difference command is 0°, and Fig.20F The timing setting unit 251 sets five points at equal time intervals or equal phase intervals as timing, wherein two of the five points are in the timing intervals as FIG. 20D to FIG. 20FThe timing setting unit 251 sets the time before the center point of the time when the differential of the current Ia+Ib (long and short alternating dashed lines) crosses zero from positive to negative, and the two points are after the center point. FIG. 20A to FIG. 20C The timing shown by the solid circle symbol 2011 to Figure 2031. FIG. 20A to FIG. 20C The timings represented by the solid circle symbols 2011 to 2031 are respectively FIG. 20D to FIG. 20F The timings represented by the solid circle symbols 2041 to 2061 in FIG. FIG. 20D to FIG. 20F In the example, the sampling section 252 samples the current Ia-Ib (dashed line) at the above timing to obtain the values ​​of the current Ia-Ib represented by the solid circle symbols 2011 to 2031 as the vibration amount with a positive or negative sign. Then, the arithmetic operation section 253 performs cyclic averaging processing every predetermined one cycle or longer on the values ​​obtained by multiplying the five signed vibration amounts obtained by the sampling section 252 during one cycle of the current Ia+Ib by a predetermined coefficient. Through this processing, the arithmetic operation section 253 calculates the vibration vector in the moving direction of the moving body 150.

[0246] Fig.21 It is shown by Fig.18 1 is a flowchart of an example of a processing procedure of a driving method performed by the driving device 10 of the vibration-type actuator shown.

[0247] First, in step S301, the CPU 210 sets the push-up amplitude command TAcom, the arithmetic operation method of the arithmetic operation section 253, and the position command POScom from the command section not shown, which have been determined in advance. The CPU 210 also sets the vibration vector command SVcom to 0, sets the frequency command Frq to F0 which is the frequency at the time of activation, sets the pulse width command PW to 50%, and sets the phase difference command PH to 0° as the initial setting.

[0248] Next, in step S302, the CPU 210 determines whether the measurement timing has come. If it is determined that the measurement timing has not come (S302 / No), the process waits in step S302.

[0249] On the other hand, if the determination result of step S302 is that the measurement timing has come (S302 / Yes), the process proceeds to step S303.

[0250] Upon entering step S303 , the CPU 210 acquires the push-up amplitude TA output from the amplitude detection section 254 , the vibration vector SV output from the arithmetic operation section 253 , and the current position POS.

[0251] Next, in step S304 , the CPU 210 compares the position command POScom set in step S301 with the current position POS acquired in step S303 .

[0252] If the comparison result in step S304 is that the position command POScom is smaller than (<) the current position POS, the process proceeds to step S305.

[0253] Upon entering step S305, CPU 210 subtracts a predetermined vibration vector dSV from vibration vector command SVcom.

[0254] If the comparison result in step S304 is that the position command POScom is greater than (>) the current position POS, the process proceeds to step S306.

[0255] Upon entering step S306, CPU 210 adds a predetermined vibration vector dSV to vibration vector command SVcom.

[0256] When the processing in step S305 ends, when the processing in step S306 ends, or if the comparison in step S304 indicates that the position command POScom is equal to (=) the current position POS, the processing proceeds to step S307. In subsequent steps, the push-up amplitude TA and the vibration vector SV are compared with the push-up amplitude command TAcom and the vibration vector command SVcom to perform control of the frequency command Frq and the phase difference command PH.

[0257] First, control of the frequency command Frq in steps S307 to S309 will now be described.

[0258] In step S307 , the CPU 210 compares the push-up amplitude command TAcom set in step S301 with the push-up amplitude TA acquired in step S303 .

[0259] If the comparison result in step S307 is that the push-up amplitude command TAcom is smaller than (<) the push-up amplitude TA, the process proceeds to step S308.

[0260] Upon entering step S308, the CPU 210 adds a predetermined frequency dF to the frequency command Frq to deviate the frequency from the resonance frequency of the vibration body 140, thereby reducing the push-up amplitude TA.

[0261] If the comparison result in step S307 is that the push-up amplitude command TAcom is greater than (>) the push-up amplitude TA, the process proceeds to step S309.

[0262] Upon entering step S309, the CPU 210 subtracts a predetermined frequency dF from the frequency command Frq to bring the frequency closer to the resonance frequency of the vibration body 140, thereby increasing the push-up amplitude TA.

[0263] When the processing in step S308 ends, when the processing in step S309 ends, or if the comparison in step S307 indicates that the push-up amplitude command TAcom is equal to (=) the push-up amplitude TA, the processing proceeds to step S310. By repeating the operations in steps S307 to S309, the frequency command Frq is controlled so that the push-up amplitude TA approaches the push-up amplitude command TAcom.

[0264] Next, control of the phase difference command PH in steps S310 to S316 will now be described.

[0265] In step S310 , the CPU 210 compares the vibration vector command SVcom set in steps S304 to S306 with the vibration vector SV acquired in step S303 .

[0266] If the comparison result in step S310 is that the vibration vector command SVcom is smaller than (<) the vibration vector SV, the process proceeds to step S311.

[0267] Upon entering step S311, the CPU 210 subtracts a predetermined phase dP from the phase difference command PH.

[0268] Next, in step S312, the CPU 210 determines whether the phase difference command PH is smaller than -90°.

[0269] If the result of the determination in step S312 is that the phase difference command PH is smaller than -90° (S312 / Yes), the process proceeds to step S313.

[0270] Upon entering step S313, the CPU 210 sets the phase difference command PH to -90°.

[0271] If the comparison result in step S310 is that the vibration vector command SVcom is greater than (>) the vibration vector SV, the process proceeds to step S314.

[0272] Upon entering step S314, the CPU 210 adds a predetermined phase dP to the phase difference command PH.

[0273] Next, in step S315, the CPU 210 determines whether the phase difference command PH is greater than +90°.

[0274] If the result of determination in step S315 is that the phase difference command PH is greater than +90° (S315 / Yes), the process proceeds to step S316.

[0275] Upon entering step S316, the CPU 210 sets the phase difference command PH to +90°.

[0276] When the processing in step S313 ends, when the processing in step S316 ends, or if the comparison in step S310 indicates that the vibration vector command SVcom is equal to (=) the vibration vector SV, the processing enters step S317. By repeating the operations in steps S310 to S316, the phase difference command PH is controlled so that the vibration vector SV approaches the vibration vector command SVcom. The CPU 210 that performs the operations in steps S310 to S316 constitutes a first control unit, which is configured to control the phase difference between the two-phase AC signals PA and PB so that the vibration vector SV follows the vibration vector command SVcom (first vibration target value). The signs of the vibration vector SV and the phase difference command PH correspond to the thrust direction of the moving body 150 (slider), and the position is controlled by controlling the phase difference command PH according to the deviation between the current position POS and the position command POScom.

[0277] Next, in step S317, the CPU 210 determines whether a stop command has been input. If it is determined that a stop command has not been input (S317 / No), the process returns to step S302, and the processes in step S302 and subsequent steps are performed.

[0278] On the other hand, if the result of the determination in step S317 is that the stop command has been input (S317 / Yes), the process proceeds to step S318.

[0279] Once entering step S318, the CPU 210 sets the pulse width command PW to 0% and the phase difference command PH to 0°. This makes the voltage applied to the piezoelectric bodies 1411 to 1412 in the piezoelectric element 141 of the vibration type actuator 100 become 0V, and the moving body 150 (slider) of the vibration type actuator 100 stops accordingly.

[0280] Then, once the processing in step S318 is completed, Fig.21 The processing in the illustrated flowchart ends.

[0281] In the present embodiment, a small loop is used for controlling the vibration vector SV by means of a phase difference, and thus the vibration of the vibration body 140 can be controlled at high speed and stably without being affected by the mechanism including the position sensor 300. In addition, the immediate responsiveness of the position control can be improved compared to the case where the phase difference is directly controlled according to the position deviation.

[0282] Fig. 221 is a diagram showing a second configuration example of the driving device 10 of the vibration-type actuator according to the second embodiment of the present invention. Fig. 22 In, with Figure 3 , Fig.10 , Fig.15 , Fig.16 and Fig.18 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0283] Fig. 22 The driving device 10 of the vibration type actuator shown in FIG. 1 includes the vibration type actuator 100, the control device 200 and the force sensor 310. Fig.18 Compared with the driving device 10 of the vibration type actuator shown in FIG. Fig. 22 The driving device 10 of the vibration-type actuator shown has a configuration for performing force control using a force sensor 310 instead of performing position control using a position sensor 300 .

[0284] exist Fig. 22 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the CPU 210 includes a PI controller 211, a PI controller 212, a comparison unit 214, a comparison unit 215, a PI controller 216, and a comparison unit 217. Fig. 22 In the example, PI controller 211, PI controller 212 and PI controller 216 are used to control Fig.21 The setting operation of the frequency command Frq, the phase difference command PH and the vibration vector command SVcom in the flowchart shown in FIG. Fig. 22 The illustrated PI controller 216 determines a vibration vector command (first vibration target value) so that the force experienced by the moving body 150 and detected by the force sensor 310 (the force experienced by a component directly or indirectly connected to the moving body 150) follows the desired force (predetermined force). Fig. 22 The PI controller 211 shown constitutes a second control section configured to frequency control the two-phase AC signal so that the push-up amplitude detected by the amplitude detection section 254 based on the output signal of the addition section 261 follows the push-up amplitude command (second vibration target value).

[0285] Fig.23 1 is a diagram showing a third configuration example of the driving device 10 of the vibration-type actuator according to the second embodiment of the present invention. Fig.23 In, with Figure 3 , Fig.10 , Fig.15 , Fig.16 , Fig.18 and Fig. 22 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0286] Fig.23 The illustrated driving apparatus 10 of a vibration-type actuator includes a vibration-type actuator 100 , a control device 200 , and a position sensor 300 .

[0287] Fig.23 The illustrated control device 200 includes a CPU 210 , an oscillator 221 , an AC signal generating section 222 , an amplifying section 223 , transformers 231 and 232 , resistors 241 and 242 , an adding section 261 , and a subtracting section 262 . Fig.23 The control device 200 shown also includes A / D converters 271 and 276, BPFs 272 and 277, interpolation arithmetic operators 273 and 278, absolute value arithmetic operator 274, LPF 275, and sampling section plus arithmetic operation section 252 + 253. BPFs 272 and 277 are bandpass filters. LPF 275 is a lowpass filter.

[0288] exist Fig.23 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the CPU 210 includes a PI controller 211, a PI controller 212, a comparison unit 214, a comparison unit 215, a PI controller 216, and a comparison unit 217. Specifically, in Fig.23 In the example, PI controller 211, PI controller 212 and PI controller 216 are used to control Fig.21 The setting operations of the frequency command Frq, the phase difference command PH and the vibration vector command SVcom in the flowchart shown.

[0289] exist Fig.18 and Fig. 22 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the addition unit 261 adds the current Ia and the current Ib and the subtraction unit 262 subtracts the current Ia and the current Ib in the analog signal state. Fig.23 In the vibration actuator driving device 10 shown, after the A / D converters 271 and 276 convert the currents Ia and Ib into digital signals, addition is performed by the adding section 261 and subtraction is performed by the subtracting section 262 .

[0290] The A / D converter 271 is a component that converts the current Ia, which is an analog signal, into a digital signal. The A / D converter 276 is a component that converts the current Ib, which is an analog signal, into a digital signal. At this time, the currents Ia and Ib include harmonic distortion and a DC component. In order to detect the fundamental wave components of the currents Ia and Ib, the BPF 272 generates a signal while cutting off the DC component and the harmonic component of the current Ia, and the BPF 277 generates a signal while cutting off the DC component and the harmonic component of the current Ib. A low-pass filter having a cutoff frequency equal to or lower than half the A / D conversion sampling frequency is inserted at the input terminals of the A / D converters 271 and 276.

[0291] Fig.23 The adding section 261 shown adds the waveform of the current Ia and the waveform of the current Ib, each converted into a time-series digital data string, to output time-series data of the current Ia+Ib. Fig.23 The subtraction section 262 shown subtracts the current Ib from the current Ia each converted into a time-series digital data string, thereby outputting time-series data of the current Ia-Ib.

[0292] The interpolation arithmetic operator 273 is a component that upsamples the timing data of the current Ia+Ib output by the addition unit 261 and outputs a timing interpolation signal. The interpolation arithmetic operator 273 includes a two-stage differential unit and a two-stage integral unit. In addition to the interpolation signal, it also outputs a differential signal that is 90° offset in phase with the interpolation signal. The differential signal is output to the sampling unit plus the arithmetic operation unit 252+253. Fig.23 In the driving device 10 of the vibration type actuator shown in FIG. 1 , the interpolation arithmetic operator 273 configured to output a differential signal to the sampling unit plus arithmetic operation unit 252+253 is connected to the sampling unit plus arithmetic operation unit 252+253. Fig. 22 etc. corresponds to the timing setting unit 251 shown in the figure.

[0293] Fig.24 It is shown Fig.23 A diagram showing an example of the internal configuration of the interpolation arithmetic operator 273 is shown.

[0294] The interpolation arithmetic operator 273 includes two differential sections 2731 and 2732 connected in series and configured to operate synchronously with the output of the A / D converter 271, and two integral sections 2733 and 2734 configured to operate at a sampling rate of 2 to 2 to the Nth power (N is a positive integer). Fig.24 In the interpolation arithmetic operator 273 shown, the output of the first-stage integration section 2733 is output as a differential signal.

[0295] Now, return to the reference Fig.23 .

[0296] The absolute value arithmetic operator 274 is a component that calculates and outputs the absolute value of the current Ia+Ib output by the interpolation arithmetic operator 273 .

[0297] LPF 275 is a constituent unit that acquires the amplitude of current Ia+Ib by smoothing the absolute value of current Ia+Ib output from absolute value arithmetic operator 274. The amplitude of current Ia+Ib acquired at LPF 275 is compared with a push-up amplitude command from a command section not shown by comparison section 214, and is controlled in a manner that follows the push-up amplitude command.

[0298] The interpolation arithmetic operator 278 is a component that up-samples the time series data of the current Ia-Ib outputted from the subtraction unit 262 and outputs a time series interpolation signal.

[0299] The sampling unit + arithmetic operation unit 252 + 253 samples the interpolated time series data of the current Ia-Ib at the timing when the differential signal of the current Ia + Ib input from the interpolation arithmetic operator 273 crosses zero from positive to negative, and calculates and outputs the above-mentioned vibration vector. The vibration vector calculated at the sampling unit + arithmetic operation unit 252 + 253 is compared with the vibration vector command output by the PI controller 216 by the comparison unit 217, and the phase difference between the AC signals VA and VB is controlled in a manner that follows the vibration vector command.

[0300] In the driving device 10 of the vibration type actuator according to the second embodiment, the AC signal generating section 222 generates two-phase AC signals PA and PB, and the amplifying section 223 amplifies these two-phase AC signals to output a two-phase driving voltage to be applied to the vibration body 140. The driving device 10 of the vibration type actuator according to the second embodiment includes a resistor 241 and a resistor 242 as a first vibration detecting section and a second vibration detecting section that detect the vibration of the vibration body 140 independently of each other. Then, in the driving device 10 of the vibration type actuator according to the second embodiment, the timing setting section 251 (including the interpolation arithmetic operator 273) sets the detection timing of the second vibration detecting section by using the output signal of the adding section 261. Next, in the driving device 10 of the vibration type actuator according to the second embodiment, the sampling section 252 samples the output signal of the subtracting section 262 at the timing set by the above-mentioned timing setting section 251, thereby acquiring the vibration amount with a sign. Then, in the driving device 10 of the vibration-type actuator according to the second embodiment, the arithmetic operation section 253 calculates the vibration vector in the moving direction of the moving body 150 based on the signed vibration amount acquired by the sampling section 252 .

[0301] By the above configuration, in the vibration type actuator 100 including the vibrating body 140 and the moving body 150, the vibration state of the vibrating body 140 can be correctly detected also in the region where the moving direction of the moving body 150 is reversed. This improves the accuracy of estimating the speed of the moving body 150 in the speed region including the reversal of the moving direction of the moving body 150, for example.

[0302] In the second embodiment, the vibrations of the two vibration modes of the vibrating body 140 are detected, and the vibrations in the push-up direction and the vibrations in the feed direction are detected by addition and subtraction; however, this does not mean any limitation. As a vibration detection unit for detecting the vibration of the vibrating body 140, for example, an optical sensor or the like can be used to directly detect the vibrations in the push-up direction and the vibrations in the feed direction, and the vibration vector can be calculated without addition and subtraction.

[0303] In the driving device 10 of the vibration-type actuator according to the second embodiment, for example, it is possible to provide Fig.15 The speed estimation section 213 shown is an internal component of the CPU 210. In this case, for the speed estimation section 213 according to the second embodiment, a configuration is adopted in which the speed of the moving body 150 is estimated based on the amplitude of the output signal of the adding section 261 detected by the amplitude detecting section 254 and based on the vibration vector calculated by the arithmetic operation section 253. When this configuration is adopted, a component that determines a vibration vector command (first vibration target value) so that the moving speed of the moving body 150 (a member directly or indirectly connected to the moving body 150) follows a desired speed (predetermined speed) can be added as an internal component of the CPU 210.

[0304] (Third Embodiment)

[0305] In the third embodiment described below, descriptions of the same matters as those described in the first and second embodiments described above will be omitted, and descriptions of matters different from those described in the first and second embodiments described above will be focused on.

[0306] Fig.25 is a diagram showing a schematic configuration example of a vibration-type actuator 100 according to a third embodiment of the present invention. Fig.25 In, with FIG. 17A to FIG. 17E The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0307] like Fig.25 As shown, the vibration type actuator 100 according to the third embodiment includes three vibration bodies 140-1 to 140-3 and a moving body 160. The vibration bodies 140-1 to 140-3 each have the same Fig.17A and Fig. 17BIn the vibration type actuator 100 according to the third embodiment, as shown in FIG. Fig.25 As shown, the vibration bodies 140 - 1 to 140 - 3 are arranged in a ring shape.

[0308] The moving body 160 is a rotor that is pressed against the vibrating bodies 140-1 to 140-3 and rotates due to the vibration of the vibrating bodies 140-1 to 140-3. The moving body 160 (rotor) is pressed by a pressing portion not shown to contact the protrusions 142 provided in the vibrating bodies 140-1 to 140-3. Fig.25 In the vibration-type actuator 100 shown, since three vibration bodies 140 - 1 to 140 - 3 are used, a larger torque can be output compared to the case where a single vibration body 140 is used.

[0309] Fig.26 1 is a diagram showing a first configuration example of a driving device 10 for a vibration-type actuator according to a third embodiment of the present invention. Fig.26 In, with Figure 3 , Fig.10 , Fig.15 , Fig.16 , Fig.18 , Fig. 22 and Fig.23 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0310] Fig.26 The driving device 10 of the vibration type actuator shown in FIG. 1 includes a vibration type actuator 100, a control device 200, and a position sensor 300. Specifically, Fig.26 In the figure, only the internal structure of the vibration type actuator 100 is shown. Fig.25 More specifically, in the three vibrating bodies 140-1 to 140-3 shown in FIG. Fig.26 In the driving device 10 of the vibration type actuator shown in FIG. 1 , an example is shown in which the vibration bodies 140 - 1 to 140 - 3 are connected in series. Fig.26 In the driving device 10 of the vibration type actuator shown in the figure, an example of a small loop in which a vibration vector is inserted into the position feedback control is shown.

[0311] Fig.26 The illustrated control device 200 includes a CPU 210 , an oscillator 221 , an AC signal generating section 222 , an amplifying section 223 , a timing setting section 251 , a sampling section 252 , an arithmetic operation section 253 , and an amplitude detecting section 254 . Fig.26 The illustrated control device 200 further includes transformers 233 to 238 , resistors 241 and 242 , an adding section 261 , and a subtracting section 262 .

[0312] exist Fig.26In the illustrated driving device 10 for a vibration-type actuator, a CPU 210 includes a PI controller 211 , a PI controller 212 , a comparison section 214 , a comparison section 215 , a PI controller 216 , and a comparison section 217 . Fig.26 The internal components (211, 212 and 214 to 217) of the CPU 210 shown have the same Fig.23 The functions of the internal components (211, 212, and 214 to 217) of the CPU 210 are shown to be the same as those of the internal components (211, 212, and 214 to 217) of the CPU 210.

[0313] Each transformer 233 to 235 is provided for a corresponding vibrating body among the vibrating bodies 140-1 to 140-3. Two vibration awakening piezoelectric bodies ( Fig. 17B The A-phase side vibration awakening piezoelectric body 1411 and piezoelectric body 1412 shown are connected to the secondary side of each transformer in transformers 233 to 235. The winding wires are connected in series at the primary side of transformers 233 to 235, an AC signal VA is applied to one end of the winding wire, and the other end of the winding wire is connected to a resistor 241 for detecting current Ia.

[0314] Each transformer 236 to 238 is provided for a corresponding vibrating body among the vibrating bodies 140-1 to 140-3. Two vibration awakening piezoelectric bodies ( Fig. 17B The B-phase side vibration awakening piezoelectric body 1411 and the piezoelectric body 1412 shown are connected to the secondary side of each transformer of the transformers 236 to 238. The winding wires are connected in series at the primary side of the transformers 236 to 238, the AC signal VB is applied to one end of the winding wire, and the other end of the winding wire is connected to the resistor 242 for detecting the current Ib.

[0315] The resistor 241 detects the current Ia flowing through the primary side of the transformers 233 to 235. The resistor 242 detects the current Ib flowing through the primary side of the transformers 236 to 238.

[0316] The capacitors connected in parallel on the secondary sides of the respective transformers 233 to 238 are capacitors for frequency matching adjustment.

[0317] exist Fig.26 In the embodiment, by adjusting the individual characteristics of the vibration bodies 140-1 to 140-3, the plurality of vibration bodies 140-1 to 140-3 are regarded as a single vibration body 140, and the vibration vector is calculated by using the addition signal and the subtraction signal of the current Ia and the current Ib for control. With the above configuration, by inserting a small loop of the vibration vector, the stability and immediate responsiveness of the position control using the position sensor 300 can be improved.

[0318] Fig. 27 1 is a diagram showing a second configuration example of the driving device 10 of the vibration-type actuator according to the third embodiment of the present invention. Fig. 27 In, with Figure 3 , Fig.10 , Fig.15 , Fig.16 , Fig.18 , Fig. 22 , Fig.23 and Fig.26 The same components as those shown in FIG. 1 are given the same reference numerals, and a detailed description thereof is omitted.

[0319] Fig. 27 The driving device 10 of the vibration-type actuator shown in FIG. 1 includes a vibration-type actuator 100, a control device 200, a position sensor 300, and a torque sensor 320. Specifically, in Fig. 27 In the driving device 10 of the vibration type actuator shown in FIG. Fig.26 The structure of the driving device 10 of the vibration type actuator shown in the figure is inserted into a torque control circuit using a torque sensor 320. In addition, Fig. 27 The driving device 10 of the vibration-type actuator shown is configured to allow manual rotation of the moving body 160 (rotor) when the position control gain is zero.

[0320] The torque sensor 320 is a sensor that detects torque applied to the moving body 160 (rotor).

[0321] exist Fig. 27 In the driving device 10 of the vibration type actuator shown, the CPU 210 includes a PI controller 211, a PI controller 212, a comparison unit 214, a comparison unit 215, a PI controller 216, a comparison unit 217, a gain switching unit 218, and an adding unit 219. The gain switching unit 218 is a constituent unit that switches the gain of the position control according to a gain command from a command unit not shown.

[0322] The setting of the gain by the gain switching unit 218 and the operation according to the setting will be described below. The gain switching unit 218 sets the gain within a range of zero and greater. When the gain set by the gain switching unit 218 is zero, the moving body 160 (rotor) can be manually rotated by controlling the vibration vector so that the torque applied to the moving body 160 (rotor) is zero. When the gain set by the gain switching unit 218 is greater than zero, position control is performed according to the position command. If a smaller gain is set by the gain switching unit 218, the moving body 160 (rotor) can be rotated by hand with less force. If a larger gain is set by the gain switching unit 218, a larger force is required. In both cases, when the hand is released from the moving body 160 (rotor), the moving body 160 (rotor) will rotate to a position consistent with the position command from the command unit not shown.

[0323] In the driving device 10 of the vibration type actuator according to the third embodiment, the AC signal generating section 222 generates two-phase AC signals PA and PB, and the amplifying section 223 amplifies these two-phase AC signals to output a two-phase driving voltage to be applied to the vibration body 140. The driving device 10 of the vibration type actuator according to the third embodiment includes a resistor 241 and a resistor 242 as a first vibration detecting section and a second vibration detecting section that detect the vibration of the vibration body 140 independently of each other. Then, in the driving device 10 of the vibration type actuator according to the third embodiment, the timing setting section 251 sets the detection timing of the second vibration detecting section by using the output signal of the adding section 261. Next, in the driving device 10 of the vibration type actuator according to the third embodiment, the sampling section 252 samples the output signal of the subtracting section 262 at the timing set by the above-mentioned timing setting section 251, thereby acquiring the signed vibration amount. Then, in the driving device 10 of the vibration-type actuator according to the third embodiment, the arithmetic operation section 253 calculates the vibration vector in the moving direction of the moving body 160 based on the signed vibration amount acquired by the sampling section 252 .

[0324] By the above configuration, in the vibration type actuator 100 including the vibrating body 140 and the moving body 160, the vibration state of the vibrating body 140 can be correctly detected also in the region where the moving direction of the moving body 160 is reversed. This improves the accuracy of estimating the speed of the moving body 160 in the speed region including the reversal of the moving direction of the moving body 160, for example.

[0325] (Other embodiments)

[0326] The present invention can also be implemented by providing a program that implements one or more functions of the above-mentioned embodiments to a system or device via a network or storage medium, and by causing one or more processors in a computer of the system or device to read out and run the program. The present invention can also be implemented by means of a circuit (e.g., ASIC) that implements one or more functions.

[0327] The program and a computer-readable storage medium storing the program are encompassed by the present invention.

[0328] All the embodiments of the present invention described above are only some examples of specific embodiments of the present invention. The technical scope of the present invention should not be interpreted restrictively by these examples. That is, the present invention can be implemented in various ways without departing from its technical ideas or its main features.

[0329] The disclosure of the embodiments of the present invention includes the following structures and methods.

[0330] [Structure 1]

[0331] A driving device for a vibration type actuator, the vibration type actuator comprising a vibrating body and a moving body pressed against the vibrating body, the driving device comprising:

[0332] a generating section for generating two-phase or more-phase AC signals to be applied to the vibrating body;

[0333] A first vibration detecting section and a second vibration detecting section for detecting vibration of the vibration body independently of each other;

[0334] a setting section for setting a detection timing of the second vibration detection section based on the first output signal which is the output signal of the first vibration detection section;

[0335] a sampling section for acquiring a signed vibration amount by sampling a second output signal as an output signal of the second vibration detecting section or an output signal obtained by subtracting the first output signal from the second output signal at a timing set by the setting section; and

[0336] The arithmetic operation unit is configured to calculate a vibration vector in a moving direction of the moving body based on the signed vibration amount.

[0337] [Construction 2]

[0338] According to the driving device of the vibration-type actuator of Configuration 1, the driving device further includes:

[0339] an adding unit, configured to add the first output signal and the second output signal; and

[0340] A subtraction unit, which is used to subtract the first output signal from the second output signal, wherein,

[0341] The setting section sets the timing by using the output signal of the adding section, and the sampling section acquires the signed vibration amount by sampling the output signal of the subtracting section.

[0342] [Construction 3]

[0343] The driving device of the vibration type actuator according to configuration 1 or 2, wherein:

[0344] The first vibration detection unit and the second vibration detection unit are piezoelectric bodies included in the vibration body.

[0345] [Construction 4]

[0346] The driving device of the vibration type actuator according to configuration 1 or 2, wherein:

[0347] The first vibration detection unit and the second vibration detection unit are electronic components for measuring the robot current flowing due to application of an AC signal to the vibrating body.

[0348] [Structure 5]

[0349] The driving device of the vibration-type actuator according to any one of Configurations 1 to 4, wherein:

[0350] The arithmetic operation unit calculates a vibration vector by multiplying a plurality of signed vibration amounts obtained as a result of sampling by the sampling unit at a plurality of timings by a predetermined coefficient and summing the multiplied values, wherein the plurality of signed vibration amounts are each a signed vibration amount and the plurality of timings are each a timing.

[0351] [Construction 6]

[0352] The driving device of the vibration-type actuator according to any one of Configurations 1 to 5, wherein:

[0353] The arithmetic operation unit calculates a vibration vector by averaging a plurality of signed vibration amounts obtained as a result of sampling by the sampling unit at a plurality of timings for each detection period of the first vibration detection unit, wherein the plurality of signed vibration amounts are each a signed vibration amount and the plurality of timings are each a timing.

[0354] [Construction 7]

[0355] The driving device of the vibration-type actuator according to any one of Configurations 1 to 6, further comprising:

[0356] an amplitude detection unit, configured to detect the amplitude of the first output signal; and

[0357] The speed estimation unit estimates the speed of the moving object based on the vibration vector and the amplitude detected by the amplitude detection unit.

[0358] [Construction 8]

[0359] According to the driving device of the vibration-type actuator of Configuration 2, the driving device further includes:

[0360] an amplitude detection unit configured to detect the amplitude of an output signal of the adding unit; and

[0361] The speed estimation unit estimates the speed of the moving object based on the vibration vector and the amplitude detected by the amplitude detection unit.

[0362] [Construction 9]

[0363] The driving device of the vibration type actuator according to configuration 7 or 8, wherein:

[0364] The speed estimation section estimates the speed of the moving object by multiplying the vibration vector by a gain set according to the amplitude detected by the amplitude detection section.

[0365] [Structure 10]

[0366] The driving device of the vibration-type actuator according to any one of Configurations 1 to 9, further comprising:

[0367] The first control section controls at least one of a phase difference and an amplitude of the two-phase or more-phase AC signal generated by the generating section so that the vibration vector follows a first vibration target value.

[0368] [Structure 11]

[0369] According to the driving device of the vibration type actuator of configuration 10, wherein

[0370] The first control section determines the first vibration target value so that the position of a member directly or indirectly connected to the moving body follows a predetermined position.

[0371] [Structure 12]

[0372] According to the driving device of the vibration type actuator of configuration 10, wherein

[0373] The first control section determines the first vibration target value so that a moving speed of a member directly or indirectly connected to the moving body follows a predetermined speed.

[0374] [Structure 13]

[0375] According to the driving device of the vibration type actuator of configuration 10, wherein

[0376] The first control unit determines the first vibration target value so that a force received by a member directly or indirectly connected to the moving body complies with a predetermined force.

[0377] [Structure 14]

[0378] The driving device of the vibration-type actuator according to any one of Configurations 1 to 13, the driving device further includes:

[0379] an amplitude detection unit, configured to detect the amplitude of the first output signal; and

[0380] The second control section is configured to control the frequency of the two-phase or more-phase AC signal generated by the generating section so that the amplitude detected by the amplitude detecting section follows the second vibration target value.

[0381] [Structure 15]

[0382] According to the driving device of the vibration-type actuator of Configuration 2, the driving device further includes:

[0383] an amplitude detection unit configured to detect the amplitude of an output signal of the adding unit; and

[0384] The second control section is configured to control the frequency of the two-phase or more-phase AC signal generated by the generating section so that the amplitude detected by the amplitude detecting section follows the second vibration target value.

[0385] [Construction 16]

[0386] The driving device of the vibration-type actuator according to any one of Configurations 1 to 15, further comprising:

[0387] The amplifier is configured to amplify the two-phase or more-phase AC signals to output two-phase or more-phase driving voltages to be applied to the vibrating body.

[0388] [Method 1]

[0389] A method for driving a vibration type actuator, the vibration type actuator comprising a vibrating body and a moving body pressed against the vibrating body, the driving method comprising:

[0390] a generating step of generating a two-phase or more-phase AC signal to be applied to the vibrating body;

[0391] a detection step of detecting the vibration of the vibrating body independently of each other using the first vibration detection unit and the second vibration detection unit;

[0392] a setting step of setting a detection timing of the second vibration detection section based on the first output signal which is the output signal of the first vibration detection section;

[0393] a sampling step of acquiring a signed vibration amount by sampling a second output signal as an output signal of the second vibration detecting section or an output signal obtained by subtracting the first output signal from the second output signal at the timing set in the setting step; and

[0394] The arithmetic operation step calculates a vibration vector in the moving direction of the moving body based on the signed vibration amount.

[0395] [Method 2]

[0396] According to the driving method of the vibration-type actuator of method 1, the driving method further comprises:

[0397] The amplification step amplifies the two-phase or more-phase AC signals to output two-phase or more-phase driving voltages to be applied to the vibrating body.

[0398] The present invention is not limited to the above embodiments, and various changes and modifications may be made without departing from the spirit and scope of the present invention. The following claims are attached hereto to disclose the scope of protection required by the present invention.

[0399] This application claims the benefit of priority based on Japanese Patent Application No. 2022-162336 filed on October 7, 2022, the entire contents of which are incorporated herein by reference.

[0400] Reference numerals list

[0401] 100 Vibration Actuator

[0402] 110 Vibrating body

[0403] 111 Elastomer

[0404] 112 Piezoelectric element

[0405] 1121 to 1126 Piezoelectric

[0406] 113 Friction components

[0407] 120 mobile body

[0408] 130 Rotation axis

[0409] 200 control devices

[0410] 210CPU

[0411] 221 Oscillator

[0412] 222 AC signal generation unit

[0413] 223 Amplification

[0414] 231 to 232 transformer

[0415] 241 to 242 resistor

[0416] 251 Timing Setting Unit

[0417] 252 Sampling Department

[0418] 253 Arithmetic Operation Department

[0419] 254 Amplitude detection unit.

Claims

1. A driving device for a vibration-type actuator, the vibration-type actuator comprising a vibrating body and a moving body pressed against the vibrating body, the driving device comprising: a generating section for generating two-phase or more-phase AC signals to be applied to the vibrating body; A first vibration detecting section and a second vibration detecting section for detecting vibration of the vibration body independently of each other; a setting section for setting a detection timing of the second vibration detection section based on the first output signal which is the output signal of the first vibration detection section; a sampling section for acquiring a signed vibration amount by sampling a second output signal as an output signal of the second vibration detecting section or an output signal obtained by subtracting the first output signal from the second output signal at a timing set by the setting section; and The arithmetic operation unit is configured to calculate a vibration vector in a moving direction of the moving body based on the signed vibration amount.

2. The driving device of the vibration-type actuator according to claim 1, further comprising: an adding unit, configured to add the first output signal and the second output signal; as well as A subtraction unit is used to subtract the first output signal from the second output signal, wherein The setting section sets the timing by using the output signal of the adding section, and The sampling unit acquires a signed vibration amount by sampling the output signal of the subtraction unit.

3. The driving device of the vibration type actuator according to claim 1, wherein: The first vibration detection unit and the second vibration detection unit are piezoelectric bodies included in the vibration body.

4. The driving device of the vibration type actuator according to claim 1, wherein: The first vibration detection unit and the second vibration detection unit are electronic components for measuring the robot current flowing due to application of an AC signal to the vibrating body.

5. The driving device of the vibration type actuator according to claim 1, wherein: The arithmetic operation unit calculates a vibration vector by multiplying a plurality of signed vibration amounts obtained as a result of sampling by the sampling unit at a plurality of timings by a predetermined coefficient and summing the multiplied values, wherein the plurality of signed vibration amounts are each a signed vibration amount and the plurality of timings are each a timing.

6. The driving device of a vibration type actuator according to claim 1, wherein: The arithmetic operation unit calculates a vibration vector by averaging a plurality of signed vibration amounts obtained as a result of sampling by the sampling unit at a plurality of timings for each detection period of the first vibration detection unit, wherein the plurality of signed vibration amounts are each a signed vibration amount and the plurality of timings are each a timing.

7. The driving device of the vibration type actuator according to claim 1, further comprising: an amplitude detection unit, configured to detect the amplitude of the first output signal; as well as The speed estimation unit estimates the speed of the moving object based on the vibration vector and the amplitude detected by the amplitude detection unit.

8. The driving device of the vibration type actuator according to claim 2, further comprising: an amplitude detection unit for detecting the amplitude of the output signal of the adding unit; as well as The speed estimation unit estimates the speed of the moving object based on the vibration vector and the amplitude detected by the amplitude detection unit.

9. The driving device for a vibration type actuator according to claim 7 or 8, wherein: The speed estimation section estimates the speed of the moving object by multiplying the vibration vector by a gain set according to the amplitude detected by the amplitude detection section.

10. The driving device of the vibration type actuator according to claim 1, further comprising: The first control section controls at least one of a phase difference and an amplitude of the two-phase or more-phase AC signal generated by the generating section so that the vibration vector follows a first vibration target value.

11. The driving device of a vibration type actuator according to claim 10, wherein: The first control section determines the first vibration target value so that the position of a member directly or indirectly connected to the moving body follows a predetermined position.

12. The driving device of the vibration type actuator according to claim 10, wherein: The first control section determines the first vibration target value so that a moving speed of a member directly or indirectly connected to the moving body follows a predetermined speed.

13. The driving device of a vibration type actuator according to claim 10, wherein: The first control unit determines the first vibration target value so that a force received by a member directly or indirectly connected to the moving body complies with a predetermined force.

14. The driving device of the vibration type actuator according to claim 1, further comprising: an amplitude detection unit, configured to detect the amplitude of the first output signal; as well as The second control section is configured to control the frequency of the two-phase or more-phase AC signal generated by the generating section so that the amplitude detected by the amplitude detecting section follows the second vibration target value.

15. The driving device of the vibration type actuator according to claim 2, further comprising: an amplitude detection unit for detecting the amplitude of the output signal of the adding unit; as well as The second control section is configured to control the frequency of the two-phase or more-phase AC signal generated by the generating section so that the amplitude detected by the amplitude detecting section follows the second vibration target value.

16. The driving device of the vibration type actuator according to claim 1, further comprising: The amplifier is configured to amplify the two-phase or more-phase AC signals to output two-phase or more-phase driving voltages to be applied to the vibrating body.

17. A method for driving a vibration type actuator, the vibration type actuator comprising a vibrating body and a moving body pressed against the vibrating body, the driving method comprising: a generating step of generating a two-phase or more-phase AC signal to be applied to the vibrating body; a detection step of detecting the vibration of the vibrating body independently of each other using the first vibration detection unit and the second vibration detection unit; a setting step of setting a detection timing of the second vibration detection section based on the first output signal which is the output signal of the first vibration detection section; a sampling step of acquiring a signed vibration amount by sampling a second output signal as an output signal of the second vibration detecting section or an output signal obtained by subtracting the first output signal from the second output signal at the timing set in the setting step; and The arithmetic operation step calculates a vibration vector in the moving direction of the moving body based on the signed vibration amount.

18. The driving method of the vibration type actuator according to claim 17, further comprising: The amplification step amplifies the two-phase or more-phase AC signals to output two-phase or more-phase driving voltages to be applied to the vibrating body.

19. A vibration type actuator comprising: vibrating body; A moving body pressed against the vibrating body; as well as A drive device according to claim 1.

20. An apparatus comprising: The vibration type actuator according to claim 19; and a member configured to be moved by the vibration-type actuator.

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