Force feedback micro clamp and preparation method thereof

Abstract

The force feedback micro clamp comprises an optical fiber and a clamping mechanism, the clamping mechanism comprises a sensing arm and a driving arm which are both arranged on one side of the optical fiber, one end of the sensing arm and one end of the driving arm are both fixed relative to the optical fiber, and clamp bodies are arranged on the side faces of the other ends of the sensing arm and the driving arm; the optical fiber can transmit light into the sensing arm, the end face, deviating from the optical fiber, of the sensing arm is a reflecting face, the reflecting face can reflect light into the optical fiber, and the reflected light can interfere with the light emitted by the optical fiber and generate an interference spectrum capable of being monitored; the driving arm can move in the direction close to or away from the sensing arm under the action of an external magnetic field, so that the two clamps can clamp or loosen an object; when the two clamps clamp an object, the sensing arm can deflect and deform relative to the optical fiber under the action of force applied by the object to the clamps, so that an interference spectrum drifts. According to the force feedback micro clamp and the preparation method thereof provided by the invention, intervention operation in a narrow space can be met, and meanwhile, real-time monitoring of force can be met.

Description

Technical Field

[0001] The invention relates to the technical field of micro clamps, and in particular to a force feedback micro clamp and a preparation method thereof. Background Art

[0002] Microgrippers can be divided into two types according to the operation mode: non-contact microgrippers and contact microgrippers. Non-contact microgrippers use local energy fields such as sound waves, magnetic fields, and light forces to achieve non-contact micromanipulation, avoiding damage caused by direct contact with micro-objects. However, the temperature increase and vibration caused by laser beams and ultrasonic waves may also damage biological samples. In addition, when the volume of the local energy field is large, it is difficult for non-contact micromanipulation to selectively clamp a single target object among a group of micro-objects. Compared with non-contact microgrippers, contact microgrippers can accurately clamp and transport a single target object among many tiny objects. Contact microgrippers can accurately clamp and transport a single target object among many tiny objects. However, fragile micro-objects, such as cells, are easily damaged during contact operations, so it is necessary to accurately detect and reliably control the force applied to the object.

[0003] Common force detection solutions include micro-electromechanical systems, atomic force microscope-assisted, and vision-based. Fitting the elastic strain gauge tightly to the clamping arm is the most common force sensing solution for micro-electromechanical systems. However, the electrical-based micro-motor solution is difficult to adapt to the conductive liquid environment. Furthermore, the micro-gripper based on micro-motor is usually long and thin (millimeter size), which is difficult to deploy in small areas such as circulatory blood vessels, eyes, and hair follicles. In addition, atomic force microscope-assisted and vision-based solutions usually require expensive and bulky external equipment, so it is difficult to work in a small environment or blind spot. Summary of the invention

[0004] The purpose of the present invention is to provide a force feedback micro-clamp and a preparation method thereof to solve the problems existing in the above-mentioned prior art, so as to meet the requirements of interventional operations in narrow spaces and real-time monitoring of force.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a force feedback micro-clamp, comprising an optical fiber and a clamping mechanism, wherein the clamping mechanism comprises a sensing arm and a driving arm both of which are arranged on one side of the optical fiber, wherein one end of the sensing arm and the driving arm are fixed relatively to the optical fiber, and the other end side surfaces of the sensing arm and the driving arm are both provided with clamps capable of clamping an object; the optical fiber can transmit light to the sensing arm, and the end surface of the sensing arm away from the optical fiber is a reflecting surface, and the reflecting surface can reflect the light emitted by the optical fiber into the optical fiber, and the reflected light can interfere with the light emitted by the optical fiber and generate an interference spectrum that can be monitored; the driving arm can move in a direction approaching or away from the sensing arm under the action of an external magnetic field, so that the two clamps can clamp or release the object; when the two clamps clamp the object, the sensing arm can deflect and deform relative to the optical fiber under the action of the force applied by the object to the clamp, so that the interference spectrum drifts.

[0007] Preferably, the sensing arm is configured as a columnar structure and is arranged opposite to the core of the optical fiber.

[0008] Preferably, the sensing arm and the driving arm are both fixedly connected to the optical fiber via a base; and the cross-sectional dimensions of the base are larger than the cross-sectional dimensions of the sensing arm and the driving arm.

[0009] Preferably, one end of the driving arm connected to the corresponding base is configured as a wedge-shaped end, and a small end surface of the wedge-shaped end is fixedly connected to the base.

[0010] Preferably, the driving arm includes an arm body and a magnetic actuator, wherein the magnetic actuator is arranged on the arm body, one end of the arm body is fixed relative to the optical fiber, and the other end is provided with the clamp; the magnetic actuator can apply a torque to the arm body under the drive of an external magnetic field, so that the arm body is deflected and deformed relative to the optical fiber, so that the two clamps can clamp or release the object.

[0011] Preferably, the magnetic actuator includes a fixed seat and a metal ball arranged on one side of the fixed seat, and the side of the fixed seat facing away from the metal ball is fixedly connected to the arm body; the metal ball can apply torque to the arm body through the fixed seat under the drive of an external magnetic field.

[0012] Preferably, the calculation method of the clamping force of the object is as follows:

[0013] F=-F arm

[0014]

[0015] Where: F is the clamping force on the object, F armis the force on the sensor arm, Δλ is the wavelength offset of the trough of the interference spectrum, S is the force sensitivity of the sensor arm, and λ m is the wavelength of the trough of the interference spectrum, n is the refractive index of the sensor arm material, L is the length of the sensor arm, and Δn and ΔL are the changes in the refractive index and length of the sensor arm caused by deformation, respectively.

[0016] Preferably, the opposite clamping surfaces between the two clamps are both configured as concave surfaces.

[0017] The present invention also provides a method for preparing a force feedback micro-clamp, comprising the following steps:

[0018] Fix the optical fiber on the platform;

[0019] A preliminary clamping mechanism is formed on the end face of the optical fiber, wherein a reinforcing crossbeam is arranged between the driving arm and the sensing arm, and finally the reinforcing crossbeam is removed to form the clamping mechanism.

[0020] Preferably, the driving arm comprises an arm body and a magnetic actuator, the magnetic actuator comprises a fixing seat and a metal ball arranged on one side of the fixing seat, and a side of the fixing seat facing away from the metal ball is fixedly connected to the arm body;

[0021] Photoresist is dripped onto the end face of the optical fiber, and the photoresist is polymerized to form the arm body and the fixed seat of the sensing arm and the driving arm. At this time, the reinforcing beam is arranged between the arm body and the sensing arm, and then immersed in a remover to remove the unpolymerized photoresist, and then the metal ball is glued to the fixed seat by glue and cured to form the preliminary clamping mechanism, and then the reinforcing beam is removed to obtain the clamping mechanism.

[0022] Compared with the prior art, the present invention has achieved the following technical effects:

[0023] The force feedback micro-clamp provided by the present invention has an optical fiber capable of transmitting light to a sensing arm, a reflective surface of the sensing arm capable of reflecting light emitted by the optical fiber into the optical fiber, and the reflected light can interfere with the light emitted by the optical fiber and generate an interference spectrum that can be monitored; that is, the optical fiber end face and the reflective surface form a Fabry-Perot interferometer, and the interference spectrum is obtained by an interference reflection spectrum graph obtained by a spectrometer connected to the optical fiber; the driving arm can move in a direction approaching or away from the sensing arm under the action of an external magnetic field, so that the two clamps can clamp or release an object, and when the two clamps clamp an object, the sensing arm can deflect and deform relative to the optical fiber under the action of the force applied by the object to the clamp, so that the interference spectrum drifts, so that the clamping force of the object is monitored in real time through the monitored interference spectrum, avoiding the output of excessive clamping force to damage the fragile micro-object; because the optical fiber is small in size and the force is monitored through spectral monitoring, the size of the clamping mechanism can meet the micrometer level, and can enter some narrow and long channels with a micrometer width, such as small areas such as circulatory blood vessels, eyes and hair follicles, and then perform interventional micro-operations in narrow spaces.

[0024] The preparation method of the force feedback micro clamp provided by the present invention forms a clamping mechanism on an optical fiber, wherein when forming a driving arm and a transmission arm, a reinforcing crossbeam can be firstly arranged between the driving arm and the transmission arm to ensure the overall stability, and finally the reinforcing crossbeam is removed to realize the forming of the entire micro clamp. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A schematic diagram of the structure of the force feedback micro-clamp provided in Example 1;

[0027] Figure 2 A side view schematic diagram of the force feedback micro-clamp provided in Example 1;

[0028] Figure 3 A schematic top view of the force feedback micro-clamp provided in Example 1;

[0029] Figure 4 A schematic diagram of the dimensions of the force feedback micro-clamp provided in Example 1;

[0030] Figure 5 The interference reflection spectrum diagram of the force feedback micro-clamp provided in Example 1;

[0031] Figure 6 This is a schematic diagram of the preliminary clamping mechanism provided in Example 2.

[0032] In the figure: 1-clamping mechanism; 11-sensing arm; 111-reflecting surface; 12-driving arm; 121-wedge-shaped end; 122-arm body; 123-magnetic actuator; 124-fixed seat; 125-metal ball; 13-clamp; 14-base; 2-optical fiber; 21-fiber core; 3-reinforcement beam. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] The purpose of the present invention is to provide a force feedback micro-clamp and a preparation method thereof to solve the problems existing in the above-mentioned prior art, so as to meet the requirements of interventional operations in narrow spaces and real-time monitoring of force.

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] Embodiment 1

[0037] This embodiment provides a force feedback micro clamp 13, see Figure 1-Figure 3 , including an optical fiber 2 and a clamping mechanism 1, the clamping mechanism 1 includes a sensing arm 11 and a driving arm 12 both placed on one side of the optical fiber 2, one end of the sensing arm 11 and the driving arm 12 are fixed relatively to the optical fiber 2, and the other end side surfaces of the sensing arm 11 and the driving arm 12 are provided with clamps 13 capable of clamping objects.

[0038] The optical fiber 2 can transmit light to the sensor arm 11. The end face of the sensor arm 11 facing away from the optical fiber 2 is a reflection surface 111. The reflection surface 111 can reflect the light emitted by the optical fiber 2 into the optical fiber 2. The reflected light can interfere with the light emitted by the optical fiber 2 and generate an interference spectrum that can be monitored. The driving arm 12 can move in a direction close to or away from the sensor arm 11 under the action of an external magnetic field, so that the two clamps 13 can clamp or release an object. When the two clamps 13 clamp an object, the sensor arm 11 can be deflected and deformed relative to the optical fiber 2 under the action of the force applied by the object to the clamps 13, so that the interference spectrum drifts.

[0039] The optical fiber 2 can transmit light to the sensor arm 11, and the reflective surface 111 of the sensor arm 11 can reflect the light emitted by the optical fiber 2 into the optical fiber 2, and the reflected light can interfere with the light emitted by the optical fiber 2 and generate an interference spectrum that can be monitored; that is, the end face of the optical fiber 2 and the reflective surface 111 form a Fabry-Perot interferometer, and the interference spectrum is obtained by the interference reflection spectrum graph obtained by the spectrometer connected to the optical fiber 2; the driving arm 12 can move in the direction of approaching or moving away from the sensor arm 11 under the action of the external magnetic field, so that the two clamps 13 can clamp or release the object. When the two clamps When the object is clamped by the clamp 13, the sensing arm 11 can be deflected and deformed relative to the optical fiber 2 under the action of the force applied by the object to the clamp 13, so that the interference spectrum drifts. In this way, the real-time monitoring of the clamping force of the object can be achieved through the monitored interference spectrum, avoiding the output of excessive clamping force and damaging the fragile micro-object; since the optical fiber 2 is small in size and the force is monitored by spectral monitoring, the size of the clamping mechanism 1 can meet the micron level, and it can enter some narrow and long channels with a width of microns, such as small areas such as circulatory blood vessels, eyes and hair follicles, and then perform invasive micro-operations in narrow spaces.

[0040] In the optional scheme of this embodiment, it is more preferred that the sensing arm 11 is configured as a columnar structure and is arranged relative to the core 21 of the optical fiber 2 so that light can be coupled into the sensing arm 11. The columnar structure is relatively regular, which is convenient for preparation and force analysis and monitoring according to size.

[0041] In the optional scheme of this embodiment, it is more preferred that the sensing arm 11 and the driving arm 12 are fixedly connected to the optical fiber 2 through the base 14; and the cross-sectional size of the base 14 is larger than the cross-sectional size of the sensing arm 11 and the driving arm 12; by setting the base 14, the stable connection of the sensing arm 11 and the driving arm 12 to the optical fiber 2 is facilitated.

[0042] In the optional scheme of this embodiment, it is more preferred that one end of the driving arm 12 connected to the corresponding base 14 is set as a wedge-shaped end 121, and the small end face of the wedge-shaped end 121 is fixedly connected to the base 14. Setting it as the wedge-shaped end 121 facilitates the driving arm 12 to be deflected and deformed under the action of the external magnetic field.

[0043] In the optional scheme of this embodiment, it is more preferred that the driving arm 12 includes an arm body 122 and a magnetic actuator 123, the magnetic actuator 123 is arranged on the arm body 122, one end of the arm body 122 is relatively fixed to the optical fiber 2, and the other end is provided with a clamp 13; the magnetic actuator 123 can apply a torque to the arm body 122 under the drive of an external magnetic field, so that the arm body 122 is deflected and deformed relative to the optical fiber 2, so that the two clamps 13 can clamp or release the object; the magnetic actuator 123 can apply a torque to the arm body 122 in the magnetic field, and can adjust the magnitude of the torque by adjusting the magnitude of the magnetic field, thereby adjusting the magnitude of the clamping force.

[0044] In the optional scheme of this embodiment, it is more preferred that the magnetic actuator 123 includes a fixed seat 124 and a metal ball 125 arranged on one side of the fixed seat 124, and the side of the fixed seat 124 facing away from the metal ball 125 is fixedly connected to the arm body 122; the metal ball 125 can apply a torque to the arm body 122 through the fixed seat 124 under the drive of an external magnetic field; wherein the metal ball 125 can be set as an iron ball, which can apply a force to the fixed seat 124 under the drive of the magnetic field.

[0045] In the optional scheme of this embodiment, it is more preferred that when the micro-object is clamped, the sensing arm 11 is squeezed by the micro-object and slightly bent, resulting in changes in the length and refractive index of the Fabry-Perot cavity. The length of the Fabry-Perot cavity is the vertical distance between the reflection surface 111 and the end face of the optical fiber 2, thereby affecting the wavelength of the trough of the reflection spectrum, and the force F exerted by the micro-object on the sensing arm 11 is arm The clamping force F exerted on the micro-object is equal in magnitude and opposite in direction, so the clamping force exerted on the micro-object can be monitored in real time through the sensing arm 11 and the optical fiber 2. Specifically,

[0046] The clamping force of an object is calculated as follows:

[0047] F=-F arm

[0048]

[0049] Where: F is the clamping force on the object, F arm is the force on the sensor arm 11, Δλ is the wavelength offset of the trough of the interference spectrum, S is the force sensitivity of the sensor arm 11, and λ m is the wavelength of the trough of the interference spectrum, n is the refractive index of the material of the sensor arm 11, L is the length of the sensor arm 11 which can be understood as the vertical distance between the reflection surface 111 and the end face of the optical fiber 2 in the initial state, Δn and ΔL are the changes in the refractive index and length of the sensor arm 11 caused by deformation, respectively;

[0050] In the optional scheme of this embodiment, it is more preferred that the clamping surfaces relative to each other between the two clamps 13 are both set to be concave surfaces, so as to facilitate stable clamping of the object.

[0051] Specifically, a specific size of the force feedback micro clamp is as follows, see Figure 4The optical fiber 2 is a single-mode optical fiber, the diameter a of the core 21 and the diameter b of the cladding are 10 μm and 125 μm respectively, the dimension c between the clamps 13 is 12 μm, the length k of the clamps 13 is 16 μm, the distance j between the sensing arm 11 and the driving arm 12 is 16 μm, the length d, width e and height f of the sensing arm 11 are 62 μm, 5 μm and 5 μm respectively; the length, width h and height of the arm body 122 of the driving arm 12 including the clamps 13 are 74 μm, 5 μm and 5 μm respectively, the length g and width l of the fixing seat 124 are 10 μm and 125 μm respectively, The length m, width n, and height o of the base 124 are 22 microns, and the height i is 15 microns. There is an 8-micron groove on one side of the fixing seat 124, and a metal ball 125 with a diameter k of 25 microns is installed in the groove. The base 14 is 20 microns in length m, width n, and 4 microns in height o. The width p of the wedge-shaped end 121 is 1 micron and the height q is 4 microns. The force feedback micro-gripper of the above size meets the micron-level size and can be easily deployed in small areas such as circulatory blood vessels, eyes, and hair follicles to perform invasive micro-operations in narrow spaces. The reflection spectrum monitored by the experimental simulation is shown in the figure Figure 5 As shown, the force sensitivity is high.

[0052] Embodiment 2

[0053] This embodiment provides a method for preparing a force feedback micro-clamp as in the first embodiment, comprising the following steps:

[0054] Fixing the optical fiber 2 on the platform;

[0055] A preliminary clamping mechanism is formed on the end face of the optical fiber 2, wherein a reinforcing beam 3 is arranged between the driving arm 12 and the sensing arm 11, and finally the reinforcing beam 3 is removed to form the clamping mechanism 1; photoresist is dripped onto the end face of the optical fiber 2, and the photoresist is polymerized to form the arm body 122 and the fixing seat 124 of the sensing arm 11 and the driving arm 12, at this time a reinforcing beam 3 is arranged between the arm body 122 and the sensing arm 11, and then immersed in a remover to remove the unpolymerized photoresist, and then a metal ball 125 is glued to the fixing seat 124 by glue and cured to form a preliminary clamping mechanism, and then the reinforcing beam 3 is removed to obtain the clamping mechanism 1.

[0056] Specifically, first, a single-mode optical fiber 2 is fixed on a multi-axis electric platform, and the electric platform is operated so that the end face of the single-mode optical fiber 2 is located below the 60x objective lens in the femtosecond laser system; a drop of photoresist (model: Moji Nano Technology, HyM4350-E37) is dropped on the end face of the optical fiber; then the electric platform is adjusted to focus the laser on the end face of the optical fiber, the 3D model of the micro-clamp is imported into the control software, and the program is started, and the femtosecond laser system polymerizes the photoresist into a micro-clamp structure according to the 3D model; wherein the central wavelength of the laser (model: Newport SpOne-8-SHG) is 520nm, and the laser power, pulse frequency and scanning speed are optimized to 5.61nJ, 5kHz and 0.25mm / s respectively; then, the semi-finished product just printed is immersed in the remover, namely acetone and isopropanol, for 1 hour each, to remove the unpolymerized photoresist; Figure 6 As shown, there is a reinforcing crossbeam 3 between the driving arm 12 and the sensing arm 11, which can strengthen the micro-clamp structure and prevent the surface tension during immersion from damaging the micro-clamp structure.

[0057] In the next operation, it is necessary to stick a magnetic iron ball to the groove on the side of the driving arm 12. First, to ensure that the iron ball is firmly adhered to the groove on the driving arm 12, a small amount of ultraviolet glue is applied to the groove, and then the iron ball is placed in the groove coated with glue with the help of a microscope. After the iron ball is adhered to the groove, it is immediately irradiated with an ultraviolet lamp for 10 minutes to completely cure the ultraviolet glue. Finally, the micro-clamp with the iron ball attached is placed under the femtosecond laser system again, and the reinforcing beam 3 between the driving arm 12 and the sensor arm 11 is fixed with a femtosecond laser to obtain Figure 1 The micro clamp is shown.

[0058] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A force feedback micro clamp, characterized in that: include: Optical fiber (2); A clamping mechanism (1) comprises a sensing arm (11) and a driving arm (12) both disposed on one side of the optical fiber (2); one end of each of the sensing arm (11) and the driving arm (12) is relatively fixed to the optical fiber (2); and the other end side surfaces of each of the sensing arm (11) and the driving arm (12) are provided with a clamp (13) capable of clamping an object; The optical fiber (2) is capable of transmitting light to the sensor arm (11); the end face of the sensor arm (11) facing away from the optical fiber (2) is a reflection surface (111); the reflection surface (111) is capable of reflecting light emitted by the optical fiber (2) into the optical fiber (2); the reflected light is capable of interfering with the light emitted by the optical fiber (2) and generating an interference spectrum that can be monitored; the driving arm (12) is capable of moving in a direction approaching or moving away from the sensor arm (11) under the action of an external magnetic field, so that the two clamps (13) can clamp or release an object; when the two clamps (13) clamp an object, the sensor arm (11) is capable of deflecting and deforming relative to the optical fiber (2) under the action of a force applied by the object to the clamps (13), so that the interference spectrum drifts.

2. The force feedback micro-gripper according to claim 1, characterized in that: The sensing arm (11) is configured as a columnar structure and is arranged opposite to the core of the optical fiber (2).

3. The force feedback micro-gripper according to claim 1, characterized in that: The sensing arm (11) and the driving arm (12) are both fixedly connected to the optical fiber (2) via a base (14); and the cross-sectional dimensions of the base (14) are larger than the cross-sectional dimensions of the sensing arm (11) and the driving arm (12).

4. The force feedback micro-gripper according to claim 3, characterized in that: One end of the driving arm (12) connected to the corresponding base (14) is arranged as a wedge-shaped end (121), and a small end surface of the wedge-shaped end (121) is fixedly connected to the base (14).

5. The force feedback micro-gripper according to claim 1, characterized in that: The driving arm (12) comprises an arm body (122) and a magnetic actuator (123), wherein the magnetic actuator (123) is arranged on the arm body (122), one end of the arm body (122) is relatively fixed to the optical fiber (2), and the other end is provided with the clamp (13); the magnetic actuator (123) can apply a torque to the arm body (122) under the drive of an external magnetic field, so that the arm body (122) deflects and deforms relative to the optical fiber (2), so that the two clamps (13) can clamp or release an object.

6. The force feedback micro-gripper according to claim 5, characterized in that: The magnetic actuator (123) comprises a fixed seat (124) and a metal ball (125) arranged on one side of the fixed seat (124); a side of the fixed seat (124) facing away from the metal ball (125) is fixedly connected to the arm body (122); the metal ball (125) can apply a torque to the arm body (122) through the fixed seat (124) under the drive of an external magnetic field.

7. The force feedback micro-gripper according to claim 1, characterized in that: The clamping force of an object is calculated as follows: F=-F arm Where: F is the clamping force on the object, F arm is the force applied to the sensor arm (11), Δλ is the wavelength offset of the trough of the interference spectrum, S is the force sensitivity of the sensor arm (11), and λ m is the wavelength of the trough of the interference spectrum, n is the refractive index of the material of the sensing arm (11), L is the length of the Fabry-Perot cavity, and Δn and ΔL are the changes in the refractive index and length of the sensing arm (11) caused by deformation, respectively.

8. The force feedback micro-gripper according to claim 1, characterized in that: The opposite clamping surfaces between the two clamps (13) are both arranged as concave surfaces.

9. A method for preparing a force feedback micro-gripper according to any one of claims 1 to 8, characterized in that: The steps include: Fixing the optical fiber (2) on the platform; A preliminary clamping mechanism is formed on the end face of the optical fiber (2), wherein a reinforcing crossbeam (3) is arranged between the driving arm (12) and the sensing arm (11), and finally the reinforcing crossbeam (3) is removed to form the clamping mechanism (1).

10. The preparation method according to claim 9, characterized in that: The driving arm (12) comprises an arm body (122) and a magnetic actuator (123); the magnetic actuator (123) comprises a fixing seat (124) and a metal ball (125) arranged on one side of the fixing seat (124); a side of the fixing seat (124) facing away from the metal ball (125) is fixedly connected to the arm body (122); Photoresist is dripped onto the end surface of the optical fiber (2), and the photoresist is polymerized to form the arm body (122) and the fixing seat (124) of the sensing arm (11) and the driving arm (12), at which time the reinforcing crossbeam (3) is arranged between the arm body (122) and the sensing arm (11), and then immersed in a remover to remove the unpolymerized photoresist, and then the metal ball (125) is glued to the fixing seat (124) and cured to form the preliminary clamping mechanism, and then the reinforcing crossbeam (3) is removed to obtain the clamping mechanism (1).

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