Wafer dispatching management method and device based on real-time bin counting, medium and product

Abstract

The embodiment of the invention relates to the technical field of semiconductor manufacturing, and discloses a wafer dispatching management method and device based on real-time bin counting, a medium and a product. The method comprises the following steps: acquiring service process information of wafer dispatching, performing data field division according to the service process information, and establishing a fact table in each data field based on the service process information; establishing a dimension table in each data field; wherein the latest state data of each data field is synchronously updated in the dimension table; and completing calculation of a target index based on the fact table and the dimension table according to a wafer dispatching rule configuration requirement. By adopting the scheme, wafer dispatching management based on real-time calculation can be realized, and the real-time performance and accuracy of wafer dispatching are improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a wafer dispatch management method, equipment, medium and product based on a real-time data warehouse. Background Art

[0002] In recent years, with the rapid development of Internet technology, the field of semiconductor production has developed rapidly. The production scenarios of semiconductor wafer factories are complex and require high production continuity. The RTD system (Real Time Dispatch) needs to give the scheduling results of wafer dispatch within one to two seconds. The wafer dispatch scheduling results are determined by the set dispatch rules, which include the logical processing of MES table data. For complex process production scenarios, the dispatch rules need to complete complex MES table logical processing and a large amount of data calculation. At present, there are two ways to implement dispatch rules in complex scenarios: one is to directly write complex dispatch rules in RTD and calculate in real time; the other is to output the running results of dispatch rules regularly through non-real-time calculation. The former may directly reduce the dispatch efficiency due to the complex dispatch logic and long calculation time. The latter has poor real-time performance, insufficient accuracy and timeliness of the output results, and will also make the wafer dispatch efficiency not reach the best. Therefore, how to achieve real-time calculation with high calculation efficiency while ensuring accuracy and timeliness is a technical problem for those skilled in the art. Summary of the invention

[0003] One purpose of the present application is to provide a wafer dispatch management method, equipment, medium and product based on a real-time data warehouse, at least to solve the problems of large amount of calculation in the wafer dispatch process, inability to ensure real-time performance, and poor wafer dispatch accuracy in non-real-time dispatch. The present application obtains the business process information of wafer dispatch, divides the data domain according to the business process information, and establishes a fact table in each data domain based on the business process information; establishes a dimension table in each data domain; wherein the latest status data of each data domain is synchronously updated in the dimension table; and according to the wafer dispatch rule configuration requirements, the target indicator is calculated based on the fact table and the dimension table. By adopting this solution, it is possible to implement wafer dispatch management based on real-time calculation, thereby improving the real-time and accuracy of wafer dispatch.

[0004] To achieve the above objectives, some embodiments of the present application provide the following aspects:

[0005] In a first aspect, some embodiments of the present application further provide a wafer dispatch management method based on a real-time data warehouse, including:

[0006] Obtaining business process information of wafer dispatch, dividing data domains according to the business process information, and establishing a fact table in each data domain based on the business process information;

[0007] A dimension table is established in each data domain; wherein the dimension table synchronously updates the latest status data of each data domain;

[0008] According to the wafer dispatch rule configuration requirements, the target indicator is calculated based on the fact table and the dimension table.

[0009] In a second aspect, some embodiments of the present application further provide an electronic device, comprising: one or more processors; and a memory storing computer program instructions, wherein the computer program instructions, when executed, cause the processor to perform the steps of the method described above.

[0010] In a third aspect, some embodiments of the present application further provide a computer-readable medium having computer program instructions stored thereon, wherein the computer program instructions can be executed by a processor to implement the method as described above.

[0011] In a fourth aspect, some embodiments of the present application further provide a computer program product, comprising a computer program / instruction, which implements the steps of the method described above when executed by a processor.

[0012] Compared with the related art, in the solution provided by the embodiment of the present application, by obtaining the business process information of wafer dispatch, the data domain is divided according to the business process information, and a fact table is established in each data domain based on the business process information; a dimension table is established in each data domain; wherein the latest status data of each data domain is synchronously updated in the dimension table; according to the configuration requirements of the wafer dispatch rule, the target indicator is calculated based on the fact table and the dimension table. By adopting this solution, the management of wafer dispatch based on real-time calculation can be realized, which improves the real-time and accuracy of wafer dispatch. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0014] Figure 1 An exemplary flow chart of a wafer dispatch management method based on a real-time data warehouse provided according to some embodiments of the present application;

[0015] Figure 2 An exemplary flow chart of a wafer dispatch management method based on a real-time data warehouse provided according to some embodiments of the present application;

[0016] Figure 3 An exemplary structural diagram of the electronic device is disclosed. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0018] First embodiment

[0019] The first embodiment of the present application relates to a wafer dispatch management method based on real-time data warehouse. Figure 1 As shown, the method may include the following steps:

[0020] Step S101, obtaining business process information of wafer dispatch, dividing data domains according to the business process information, and establishing a fact table in each data domain based on the business process information;

[0021] Among them, wafer dispatch refers to the process of allocating wafers to different production equipment and processes for processing according to production plans and order requirements. It involves the scheduling, arrangement and tracking of wafers to ensure the efficient production process and on-time delivery of products.

[0022] The wafer dispatch process can include the following steps:

[0023] Order reception and analysis: First, receive customer orders and analyze the product specifications, quantity, delivery date and other information in the order. Determine the required wafer quantity and specifications based on the order requirements.

[0024] Production plan formulation: According to the order analysis results and the existing production resources, the production plan is formulated. The production plan includes the wafer input time, production process, equipment arrangement, etc.

[0025] Wafer scheduling: According to the production plan, wafers are taken out from the warehouse or the previous process and assigned to the corresponding production equipment for processing. In the scheduling process, factors such as equipment availability, processing capacity, and priority need to be considered.

[0026] Process tracking and monitoring: Track and monitor the processing of wafers in each production process to keep track of production progress. If problems are found in the production process, such as equipment failure, quality abnormalities, etc., timely measures need to be taken to deal with them.

[0027] Finished and put into storage: When the wafer has completed all the production processes, it will be inspected for quality. Qualified wafers will be put into storage and wait to be shipped to customers.

[0028] The wafer dispatching strategy can adopt priority dispatching, which determines the priority of wafers according to the urgency and importance of the order. Wafers with high priority are arranged for production first to ensure on-time delivery. Shortest processing time dispatching selects wafers with the shortest processing time for processing first to reduce the production cycle. Earliest delivery date dispatching dispatches in the order of delivery date of orders to ensure that the orders that expire first are produced first. Equipment balanced dispatching considers the load of the equipment and evenly distributes the wafers to different equipment for processing to avoid overloading some equipment and affecting production efficiency.

[0029] Wafer dispatching is a key link in the semiconductor manufacturing process. It requires comprehensive consideration of factors such as order demand, production equipment, process flow and quality requirements, and the formulation of a reasonable dispatching strategy to improve production efficiency, reduce costs and meet customer needs.

[0030] In this solution, specifically, a fact table is established in each data domain based on the business process information, including:

[0031] The data of the MES table is collected, and a fact table is established in each data field based on the business process information and the data of the MES table.

[0032] Among them, MES forms are used to record, track and manage various data and information in the production and manufacturing process.

[0033] This solution uses real-time data warehouse technology to divide data domains, establish fact tables, and establish dimension tables for data from data sources such as MES. It can capture changes in data flows in real time and calculate application-layer indicators by adding incremental data to existing data, greatly reducing computational redundancy in dispatching rules.

[0034] In a preferred embodiment, the division results of the data domain include: Lot, EQP, Flow, Reticle, Recipe, Carrier and Chamber.

[0035] Among them, Lot (batch), in the process of manufacturing or experiment, refers to a group of products or samples with the same characteristics and processed in the same time period. For example, in semiconductor manufacturing, the same batch of wafers is usually regarded as a lot. It is used for product classification management, quality control and traceability.

[0036] EQP (Equipment) refers to various tools, machines or devices used to complete specific tasks. Different types of EQP play a key role in different fields. For example, in industrial production, there are processing equipment, testing equipment, etc.; in laboratories, there are analytical instruments, experimental devices, etc.

[0037] Flow can be understood as a series of orderly activities or operational steps to achieve a specific goal. It is widely used in the fields of manufacturing, business management, scientific experiments, etc. For example, the production process includes raw material procurement, processing, assembly, testing and other links; the workflow may involve task allocation, execution, review and other steps.

[0038] Reticle (mask, mask), in the field of semiconductor manufacturing and microelectronics, is a transparent glass plate or quartz plate with a specific pattern. It is used to transfer the pattern to a substrate such as a wafer during the photolithography process, which determines the layout and structure of electronic components such as integrated circuits.

[0039] Recipe (formula, process procedure) usually refers to a set of specific operating parameters, steps and conditions. In the chemical industry, a recipe may be a synthesis formula for a certain product, including raw material ratio, reaction temperature, time, etc.; in the manufacturing industry, it may be a production process procedure for a specific product, guiding the operation of the equipment and the production process.

[0040] Carrier is an object or device that has the function of carrying or transporting. It has different meanings in different fields. For example, in the field of logistics, it may be a pallet or container for transporting goods; in the field of biotechnology, it may be a carrier molecule that carries genes or drugs.

[0041] Chamber, a closed space or container. It is used in many fields. For example, in vacuum technology, there are vacuum chambers for specific experiments or processing; in chemical experiments, there may be reaction chambers for chemical reactions.

[0042] According to the main bodies in the wafer processing and production process, multiple data domains are divided, namely: Lot, EQP, Flow, Reticle, Recipe, Carrier, Chamber. The business process of each main body is shown in the following table. In each data domain, a fact table corresponding to each business process is established. For example, in the Lot data domain, lot_start, lot_downGrade, lot_waferOut, lot_transfer, lot_hold / release, lot_process, lot_mark, lot_rework, lot_split / merge, lot_runCard, lot_scrap fact tables are established to record the state changes of the lot during the production and processing process.

[0043]

[0044] Through the above division method, this solution can better divide the data domain of wafer dispatch data information and provide data support for the subsequent calculation of target indicators.

[0045] Step S102, establishing a dimension table in each data domain; wherein the dimension table synchronously updates the latest status data of each data domain;

[0046] Dimension tables usually contain attribute information used to analyze and describe business entities. They provide a stable foundation for data analysis and report generation, allowing users to observe and understand data from different perspectives.

[0047] Using dimension tables can ensure data accuracy. The status data of each data domain may change over time. Synchronous updating of dimension tables can ensure data accuracy. If the data in the dimension table is outdated, the analysis and decision-making based on it may be biased. For example, in sales data analysis, the status of customers (such as active customers and lost customers) may change. Timely updating of customer status information in the dimension table can ensure that the analysis results reflect the latest business situation.

[0048] Dimension tables can be used to support real-time decision making, which is becoming increasingly important in today's rapidly changing business environment. Synchronous updates to dimension tables enable decision makers to obtain the latest status data, allowing them to make more timely and accurate decisions. For example, in supply chain management, real-time updates of supplier delivery status, inventory levels and other data can help companies adjust production plans and procurement strategies in a timely manner.

[0049] Using dimension tables can improve data consistency. When multiple systems or data sources use the same dimension table, synchronous updates can ensure data consistency. Avoid errors and confusion caused by inconsistent data between different systems. For example, a company's financial system and sales system may both use customer dimension tables. If the customer's status information is updated in one system but not synchronized to the other system, data inconsistency may occur, affecting the accuracy of financial statements and sales analysis.

[0050] In a preferred embodiment, the latest status data includes the current priority of the data domain, whether it is in the runCard process, the site, product name, product version, plan name, plan version and the stepper_code information of the most recent binding.

[0051] The dimension tables corresponding to each data domain (Lot, EQP, Flow, Reticle, Recipe, Carrier, Chamber) record the latest status of each entity. For example, the dim_lot dimension table records the current priority of the lot, whether it is in the runCard process, the site (stepId), product (product name), product_version (product version), plan (plan name), plan_version (plan version), stepper_code (the most recently bound stepper_code), and other information.

[0052] By collecting the above information, this solution can provide the real-time status of the wafer based on the dimension table and determine the collection of real-time status information.

[0053] Step S103, according to the wafer dispatch rule configuration requirements, the target indicator is calculated based on the fact table and the dimension table.

[0054] Specifically, this solution can complete the calculation of relevant indicators based on the actual needs of rule configuration and according to the fact table and dimension table.

[0055] In a preferred solution, according to the wafer dispatch rule configuration requirements, the target indicator is calculated based on the fact table and the dimension table, including:

[0056] According to the wafer dispatch rule configuration requirements, an application layer table of target indicators is established at the application layer based on the fact table and the dimension table;

[0057] The target indicator is calculated based on the application layer table.

[0058] In this solution, by creating an application layer table, the moves similar to targetstep completed in the current shift can be automatically counted through the data warehouse, and the result data can be updated to the application layer table in real time.

[0059] Then, by performing calculations through application layer tables, the purpose of efficiently obtaining the calculation results of the target indicators can be achieved.

[0060] In a preferred solution, the application layer table extracts data associated with the target indicator from the fact table and the dimension table.

[0061] Specifically, to obtain the production volume (move) that has been completed in the current shift for a specific step (i.e., targetstep), the actual data relationship between the application layer table, dimension table, and fact table is as follows:

[0062] The fact table of the Lot data domain stores the in and out flow records of the lot in the step (for example, if a lot has a trackout record in a certain step, it means that the lot has been processed in that step);

[0063] The dimension table of the lot data domain stores relevant information such as lot products;

[0064] Combine the data in the fact table and dimension table to generate stage-step-product-historymove related data at the application layer.

[0065] Through such a configuration in this embodiment, the user can directly query the application layer data during use, thereby improving efficiency and reducing repeated queries.

[0066] In the solution provided by the embodiment of the present application, by obtaining the business process information of wafer dispatch, the data domain is divided according to the business process information, and a fact table is established in each data domain based on the business process information; a dimension table is established in each data domain; wherein the latest status data of each data domain is synchronously updated in the dimension table; according to the configuration requirements of the wafer dispatch rule, the calculation of the target indicator is completed based on the fact table and the dimension table. By adopting this solution, the management of wafer dispatch based on real-time calculation can be realized, which improves the real-time and accuracy of wafer dispatch.

[0067] In a preferred solution, the target indicator is calculated based on the application layer table, including:

[0068] Create an SQL statement to obtain the target indicator;

[0069] The calculation result of the target indicator is read from the application layer table based on the SQL acquisition statement.

[0070] Specifically, for some common general indicators, unified summary calculations are performed for direct use in rule configuration to reduce repeated calculations; and streaming technology is used to collect changing incremental data in real time and superimpose it on the existing data to complete indicator calculations, reducing calculation redundancy.

[0071] For example, to obtain the production volume (move) of a specific step (target step) that has been completed in the current shift, the following SQL statement is usually used: first string the table, then filter out the lots that have been processed in the current shift, and accumulate the number of wafers in these lots to get the move. When dispatching lots on the target step, the move needs to be calculated repeatedly, and in the traditional RTD dispatching rules, each time the move is calculated, it must be accumulated again from the start time of the shift.

[0072] SELECT

[0073] IFNULL(SUM(LotQuantity),0)AS historyMove

[0074] FROM

[0075] fwwipstephistory wipstep LEFT JOIN fwwiphistory wipONwipstep.lotobject=wip.WipId

[0076] WHERE unix_timestamp(wipstep.trackintime)BETWEENunix_timestamp({targetStartTime})AND(unix_timestamp({targetEndTime}))

[0077] AND ProductId={productId}

[0078] AND stagename={stageId}

[0079] AND stepid = {stepId};

[0080] In the present invention, the moves completed by the target step in the current shift will be automatically counted through the data warehouse, and the result data will be updated in real time to the table of the application layer. Users only need to obtain it through the following SQL statement, which is convenient and fast. Moreover, when multiple lots need to calculate moves, the amount of repeated calculations will not be increased.

[0081] SELECT historyMove

[0082] FROM ads_stepMove

[0083] WHERE

[0084] AND ProductId={productId}

[0085] AND stagename={stageId}

[0086] AND stepid = {stepId};

[0087] The technical solution provided by the present invention, a wafer dispatching method based on real-time data warehouse, solves the problem of poor real-time performance of the running results of dispatching rules in complex scenarios. By referring to the real-time data warehouse technology, data domains are divided, fact tables and dimension tables are established for data from data sources such as MES. The changes in data streams can be captured in real time, and the calculation of application layer indicators is completed by the incremental superposition of inventory operations, which greatly reduces the calculation redundancy in the dispatching rules, outputs the calculation results of the dispatching rules in a fast and real-time manner, reduces the user's usage complexity, improves the wafer dispatching efficiency, and thereby reduces the production cost of the FAB factory.

[0088] Second embodiment

[0089] The second embodiment of the present application relates to a wafer dispatch management method based on a real-time data warehouse. In order to solve the problem of implementing dispatch rules in complex scenarios, the present invention introduces a real-time data warehouse. Use the full synchronization tool to initialize the full snapshot of the MES table data, and then use the incremental tool to capture and synchronize the incremental data after the full volume in real time; according to the business, pre-associate and widen the data stream and perform data warehouse stratification to reduce data association queries in the dispatch process, realize data reuse, and pre-calculate business indicators of different granularities and time periods based on the reused data.

[0090] By establishing a real-time data warehouse and transferring the complex MES data calculations in the dispatch rules to the dimension tables of each layer, relevant data and business indicators can be generated quickly and in real time for users to use directly when configuring dispatch rules, thereby improving the dispatch efficiency of the dispatch rules.

[0091] like Figure 2 As shown, the method may include the following steps:

[0092] S1: According to the business process of wafer dispatch, divide the data domain and establish a fact table.

[0093] Specifically, according to the production process when wafers are dispatched, the entities involved are divided into data domains, including Lot, EQP, Flow, Reticle, Recipe, Carrier, and Chamber. Data from related systems such as MES are collected, and corresponding fact tables are established in each data domain based on the business process.

[0094] S2: Create a dimension table corresponding to each data domain.

[0095] Specifically, corresponding to each data field in S1, a dimension table representing the latest status of each subject (Lot, EQP, Flow, Reticle, Recipe, Carrier, Chamber) is established, and the latest status data of each subject is synchronously updated in the dimension table.

[0096] S3: Establish application layer statistical indicators. This solution dynamically adjusts the compression strategy according to the current traffic environment to optimize data transmission efficiency and reduce unnecessary network burden.

[0097] Specifically, based on the actual needs of rule configuration, the calculation of relevant indicators is completed according to the fact table and dimension table.

[0098] The present invention introduces a real-time data warehouse, and its innovation lies in realizing real-time and rapid calculation of complex MES logic in the dispatching rules, and reducing repeated calculation of intermediate indicators in the dispatching rules.

[0099] In addition, some embodiments of the present application also provide an electronic device. The electronic device may be a digital computer in various forms, such as a laptop computer, a desktop computer, a workbench, a personal digital assistant, a server, a blade server, a mainframe computer, etc. The electronic device may also be a mobile device in various forms, such as a personal digital assistant, a cellular phone, a smart phone, a wearable device, and other similar computing devices.

[0100] The electronic device includes: one or more processors; and a memory storing computer program instructions, wherein when the computer program instructions are executed, the processor executes the steps of the method provided in any one or more of the above embodiments. Figure 3 An exemplary structural diagram of the electronic device is disclosed. Figure 3As shown, the electronic device includes: one or more processors 301, a memory 302, and an interface for connecting each component, including a high-speed interface and a low-speed interface. The various components are connected to each other using different buses and can be installed on a common mainboard or installed in other ways as needed. The processor can process instructions executed in the electronic device, including instructions stored in or on the memory to display graphical information of the GUI on an external input / output device (such as a display device coupled to the interface). In some other embodiments, if necessary, multiple processors and / or multiple buses can be used together with multiple memories and multiple memories. Similarly, multiple electronic devices can be connected, and each device provides some necessary operations (for example, as a server array, a group of blade servers, or a multi-processor system). Among them, the components shown in this article, their connections and relationships, and their functions are only used as examples, and are not intended to limit the implementation of the present application described and / or required herein.

[0101] The electronic device may further include: an input device 303 and an output device 304. The processor 301, the memory 302, the input device 303 and the output device 304 may be connected via a bus or other means. Figure 3 The example of connecting through bus is taken in the following.

[0102] The input device 303 can receive input digital or character information, and generate key signal input related to the user settings and function control of the electronic device, such as a touch screen, a keypad, a mouse, a track pad, a touch pad, an indicator bar, one or more mouse buttons, a trackball, a joystick and other input devices. The output device 304 may include a display device, an auxiliary lighting device (e.g., an LED) and a tactile feedback device (e.g., a vibration motor), etc. The display device may include, but is not limited to, a liquid crystal display (LCD), a light emitting diode (LED) display and a plasma display. In some embodiments, the display device may be a touch screen.

[0103] To provide interaction with a user, the electronic device may be a computer. The computer has: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or a trackball), through which the user can provide input to the computer. Other types of devices may also be used to provide interaction with the user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0104] In the embodiments of the present application, a computer program / instruction is stored on a computer-readable medium, and when the computer program / instruction is executed by a processor, the steps of the method provided by any one or more of the above embodiments are implemented. The computer-readable medium may be included in the electronic device described in the above embodiments; or it may exist independently without being assembled into the device. The above computer-readable medium carries one or more computer-readable instructions.

[0105] The memory 302 can be used as a non-transient computer-readable storage medium, which can be used to store non-transient software programs, non-transient computer executable programs and modules. The processor 301 executes various functional applications and data processing of the server by running the non-transient software programs, instructions and modules stored in the memory 302, so as to implement the program instructions / modules corresponding to the method provided by any one or more of the above embodiments in the embodiments of the present application.

[0106] The memory 302 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the electronic device, etc. In addition, the memory 302 may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage devices. In some embodiments, the memory 302 may optionally include a memory remotely arranged relative to the processor 301, and these remote memories may be connected to the electronic device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0107] It should be noted that the computer-readable medium described in the present application may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present application, a computer-readable medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device.

[0108] Computer readable media include permanent and non-permanent, removable and non-removable media, and can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, modules of programs or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, read-only compact disk (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape disk storage or other magnetic storage devices or any other non-transmission medium that can be used to store information that can be accessed by a computing device.

[0109] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages, such as Java, Smalltalk, C++, and conventional procedural programming languages, such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving a remote computer, the remote computer may be connected to the user's computer via any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0110] In the above-described embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. For example, it can be implemented by using an application specific integrated circuit (ASIC), a general-purpose computer or any other similar hardware device. In certain embodiments, the software program of the present application can be executed by a processor to implement the above steps or functions. Similarly, the software program of the present application (including relevant data structures) can be stored in a computer-readable recording medium, for example, a RAM memory, a magnetic or optical drive or a floppy disk and similar devices. In addition, some steps or functions of the present application can be implemented by hardware, for example, as a circuit that cooperates with a processor to perform each step or function.

[0111] The computer program product provided in the embodiment of the present application includes one or more computer programs / instructions, and when the computer program / instructions are executed by the processor, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions may be stored in a computer-readable storage medium, or transmitted from a computer-readable storage medium to another computer-readable storage medium, for example, the computer instructions may be transmitted from a website site, a computer, a server or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, server or data center. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or a data center that includes one or more available media integrations. The available medium may be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid state disk (SSD)), etc.

[0112] The flow chart or block diagram in the accompanying drawings shows the possible architecture, function and operation of the equipment, method and computer program product according to various embodiments of the present application. In this regard, each box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented with a dedicated system for hardware that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0113] The scope of the present application is defined by the appended claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present application. Any figure mark in the claims should not be regarded as limiting the claims involved. In addition, it is clear that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices stated in the device claim may also be implemented by one unit or device through software or hardware. The words "first", "second", etc. are only used to distinguish the description, and do not indicate any particular order, nor can they be understood as indicating or implying relative importance.

[0114] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily mention changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims, and the above embodiments should be regarded as exemplary and non-restrictive.

Claims

1. A wafer dispatch management method based on real-time data warehouse, characterized in that: The method comprises: Obtaining business process information of wafer dispatch, dividing data domains according to the business process information, and establishing a fact table in each data domain based on the business process information; A dimension table is established in each data domain; wherein the dimension table synchronously updates the latest status data of each data domain; According to the wafer dispatch rule configuration requirements, the target indicator is calculated based on the fact table and the dimension table.

2. The method according to claim 1, characterized in that The division results of the data domain include: Lot, EQP, Flow, Reticle, Reci pe, Carri er and Chamber.

3. The method according to claim 2, characterized in that A fact table is established in each data domain based on the business process information, including: The data of the MES table is collected, and a fact table is established in each data field based on the business process information and the data of the MES table.

4. The method according to claim 1, characterized in that: The latest status data includes the current priority of the data domain, whether it is in the runCard process, the site where it is located, the product name, product version, plan name, plan version and the stepper_code information of the most recent binding.

5. The method according to claim 1, characterized in that According to the wafer dispatch rule configuration requirements, the target indicator is calculated based on the fact table and the dimension table, including: According to the wafer dispatch rule configuration requirements, an application layer table of target indicators is established at the application layer based on the fact table and the dimension table; The target indicator is calculated based on the application layer table.

6. The method according to claim 5, characterized in that The application layer table extracts data associated with the target indicator from the fact table and the dimension table.

7. The method according to claim 5, characterized in that Calculating the target indicator based on the application layer table includes: Create an SQL statement to obtain the target indicator; The calculation result of the target indicator is read from the application layer table based on the SQL acquisition statement.

8. An electronic device, characterized in that: The electronic device comprises: one or more processors; and A memory storing computer program instructions, which, when executed, cause the processor to perform the steps of the method as claimed in any one of claims 1 to 7.

9. A computer readable medium having a computer program / instructions stored thereon, characterized in that: When the computer program / instructions are executed by a processor, the steps of the method according to any one of claims 1 to 7 are implemented.

10. A computer program product comprising a computer program / instructions, characterized in that When the computer program / instructions are executed by a processor, the steps of the method according to any one of claims 1 to 7 are implemented.

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