Flow proportion control method and device and semiconductor processing equipment

Abstract

The invention provides a flow proportion control method and device and semiconductor processing equipment, and the method comprises the steps: determining the maximum value of the ventilation sectional areas of all air inlet pipelines in each air inlet pipeline group according to pre-configured hardware parameters; the area with the maximum flow ratio in the multiple areas is determined, and the target ventilation area corresponding to the area is set to be the maximum value; according to the maximum value and the flow ratio corresponding to each area, target ventilation areas corresponding to other areas are obtained through calculation; according to the target ventilation areas corresponding to the other areas, the optimal combination of on-off valves needing to be connected in the air inlet pipeline sets corresponding to the other areas is obtained through a preset algorithm; and the on-off valves on the air inlet pipeline with the largest ventilation sectional area in the air inlet pipeline set corresponding to the area with the largest flow ratio are controlled to be connected, and all the on-off valves in the optimal combination are controlled to be connected. The scheme can be suitable for various different hardware parameters, and the method adopted for obtaining the on-off valve combination needing to be connected is simpler.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular, to a flow rate ratio control method, device, semiconductor processing equipment, and computer-readable medium. Background Art

[0002] Plasma etching is one of the important processes to ensure the quality and technological advancement of integrated circuit manufacturing products. Its main application is to transfer the pattern exposed and developed on the photoresist layer to the target material, thereby forming the pattern and three-dimensional structure required by the design. The essential process of plasma etching is that the plasma undergoes a physical and chemical reaction with the target material to generate volatile by-products, thereby achieving pattern transfer. Therefore, it is crucial to provide highly active and reactive plasma, and a highly active gas source has become a necessary material source for the process steps of ultra-large-scale integrated circuit manufacturing. As the size of semiconductor devices approaches the physical limit, the etching results are becoming more and more sensitive to gas delivery.

[0003] In order to improve the uniformity of etching, it is usually necessary to zone the air intake of the process chamber of the etching machine, for example, the interior of the process chamber is divided into a central area, a middle area and an edge area, and the gas flow ratio introduced into each area is controlled. Specifically, a mass flow controller (MFC) is provided on the air intake pipeline corresponding to each area, and the flow of each MFC is controlled according to the preset total gas flow and the target value of the gas flow ratio of multiple areas, so that the gas flow ratio of multiple areas reaches the target value. However, the accuracy of the above flow ratio control method depends on the internal hardware PID parameter setting of the MFC, the control accuracy is not high, and stable control cannot be achieved for small flow ratios.

[0004] Another flow ratio control method is to set an air intake pipeline group for each area, each air intake pipeline group includes multiple air intake pipelines, and each air intake pipeline is provided with an on-off valve, and the gas flow ratio allocated to multiple areas is controlled by selectively controlling each on-off valve to be connected or disconnected. This control method has a fast response speed and can achieve stable control for small flow ratios. However, this method is currently not applicable to a variety of different hardware parameters, and in order to achieve the required gas flow ratio, the method of selecting the on-off valve combination that needs to be connected is more complicated. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a flow ratio control method, device and semiconductor processing equipment, which can be applicable to a variety of different hardware parameters, and the method used to obtain the on-off valve combination that needs to be connected is simpler.

[0006] To achieve the purpose of the present invention, a flow ratio control method is provided, which is applied to semiconductor processing equipment and is used to selectively control the on-off valves on each of the inlet pipelines in a plurality of inlet pipeline groups corresponding to a plurality of different areas in a process chamber to be turned on or off, so as to control the gas flow ratio distributed to the plurality of said areas, comprising:

[0007] Determining the maximum value of the ventilation cross-sectional areas of all the intake pipelines in each of the intake pipeline groups according to the pre-configured hardware parameters;

[0008] Determine the area with the largest flow ratio among the multiple areas, and set the target ventilation area corresponding to the area as the maximum value; the flow ratio corresponding to each area is equal to the ratio of the preset target flow value to the sum of the target flow values ​​of all the areas;

[0009] Calculate the target ventilation area corresponding to each of the other regions according to the maximum value and the flow ratio corresponding to each region;

[0010] According to the target ventilation areas corresponding to the other regions, a preset algorithm is used to obtain the optimal combination of on-off valves that need to be connected in the intake pipeline groups corresponding to the other regions;

[0011] The on-off valve on the intake pipeline with the largest ventilation cross-sectional area in the intake pipeline group corresponding to the area with the largest control flow ratio is turned on, each of the on-off valves in the optimal combination is controlled to be turned on, and other on-off valves not in the optimal combination are controlled to be disconnected, so that the gas flow ratio allocated to the multiple areas reaches the target gas flow ratio.

[0012] Optionally, the hardware parameters include the number of on-off valves of each of the intake pipeline groups and the ventilation cross-sectional area of ​​each of the intake pipelines when the on-off valve is in an on state;

[0013] The maximum value is greater than the sum of the ventilation cross-sectional areas of the other intake pipelines in the intake pipeline group except the intake pipeline with the largest ventilation cross-sectional area.

[0014] Optionally, the calculating, based on the maximum value and the flow ratio corresponding to each area, the target ventilation area corresponding to each other area includes:

[0015] Calculating the ratio of the maximum value to the maximum flow ratio as the total target ventilation area;

[0016] The product of the flow ratio corresponding to each area except the area with the largest flow ratio and the total target ventilation area is calculated as the target ventilation area corresponding to each area.

[0017] Optionally, a method for acquiring the target flow value corresponding to each of the areas includes:

[0018] Determining sub-target flow values ​​of the gas inlet channels corresponding to the respective areas in the gas distribution device according to the current process recipe;

[0019] The target flow value corresponding to each of the areas is obtained by calculation according to the number of air inlet channels corresponding to each of the areas in the pre-configured gas distribution device and the sub-target flow value corresponding to each of the areas.

[0020] Optionally, for each of the other regions, the preset algorithm includes:

[0021] Execute the calculation process n times to obtain n minimum differences, and take the valve combination corresponding to the smallest of the n minimum differences as the optimal combination; n is the number of on-off valves of the corresponding intake pipeline group;

[0022] The k-th calculation process, k=1, 2, ..., n, includes:

[0023] Arrange and combine the n on-off valves of the corresponding intake pipeline group to obtain a valve combination including k on-off valves that need to be connected;

[0024] Calculating the sum of ventilation cross-sectional areas corresponding to the k on-off valves included in each of the valve combinations;

[0025] Calculating the difference between the target ventilation area and the sum of the ventilation cross-sectional areas corresponding to each of the valve combinations;

[0026] The smallest one of the differences corresponding to the valve combinations is taken as the minimum difference.

[0027] Optionally, for each of the other regions, the preset algorithm includes:

[0028] Execute the calculation process n times to obtain n minimum differences, and take the valve combination corresponding to the smallest of the n minimum differences as the optimal combination; n is the number of on-off valves of the corresponding intake pipeline group;

[0029] The k-th calculation process, k=1, 2, ..., n, includes:

[0030] Arrange and combine the corresponding n on-off valves of the intake pipeline group to obtain a valve combination including k on-off valves;

[0031] Calculating the sum of ventilation cross-sectional areas corresponding to the k on-off valves included in each of the valve combinations;

[0032] Sorting the sums of the ventilation cross-sectional areas corresponding to the valve combinations in ascending order;

[0033] According to the order of the sum of the ventilation cross-sectional areas, the differences between the sum of each ventilation cross-sectional area and the target ventilation area are calculated in turn, and when the difference obtained in this calculation is greater than the difference obtained in the previous calculation, the difference obtained in the previous calculation is used as the minimum difference, and the next calculation is stopped; when the difference obtained in this calculation is less than or equal to the difference obtained in the previous calculation, the next calculation is continued until the current difference is greater than the difference obtained in the previous calculation, and the difference obtained in the previous calculation is used as the minimum difference.

[0034] Optionally, when there are multiple smallest ones among the n minimum differences, the valve combination with the least number of on-off valves included in the valve combinations corresponding to all the smallest ones is selected as the optimal combination.

[0035] Optionally, for each of the other regions, the preset algorithm includes:

[0036] res[j]=0, j is the target ventilation area, and j=0, 1, 2, ..., target, target is the target ventilation area corresponding to the area; res[j] is the sum of the ventilation cross-sectional areas of the valve combination closest to j; res[0] indicates that all the on-off valves of the corresponding intake pipeline group are in the off state;

[0037] The following calculation process is performed on each on-off valve of the intake pipeline group to obtain the optimal combination:

[0038] Select the i-th on-off valve; i=1, 2, ..., n, where n is the number of on-off valves of the corresponding intake pipeline group;

[0039] Calculate and obtain sum, where sum = res[js[i]] + s[i], s[i] is the ventilation cross-sectional area of ​​the i-th on-off valve when it is turned on; res[js[i]] is the sum of the ventilation cross-sectional areas of the valve combination closest to js[i]; j = target;

[0040] When sum is greater than res[j], res[j]=sum, and record that when j=target, the i-th on-off valve needs to be opened, and when j is greater than 1, target-1 is set, and the i-th on-off valve is returned; when j is less than or equal to 1, i+1 is set, and the i-th on-off valve is returned;

[0041] When sum is less than or equal to res[j], i+1 is added and the selected i-th on-off valve is returned.

[0042] Optionally, after the on-off valve on the intake pipeline with the largest ventilation cross-sectional area in the intake pipeline group corresponding to the area with the largest control flow ratio is turned on, each on-off valve in the optimal combination is controlled to be turned on, and other on-off valves not in the optimal combination are controlled to be turned off, the method further includes:

[0043] Obtaining the actual flow value corresponding to each of the areas corresponding to the current process step;

[0044] Calculating and obtaining a flow adjustment value corresponding to each of the areas, the flow adjustment value being equal to the product of a difference between the actual flow value and the target flow value and a preset fine-tuning coefficient;

[0045] The target flow value corresponding to the next process step is replaced by the flow adjustment value.

[0046] As another technical solution, the present invention also provides a flow ratio control device, comprising:

[0047] at least one processor;

[0048] a memory having at least one program stored therein;

[0049] When the at least one program is executed by the at least one processor, the at least one processor implements the above-mentioned flow ratio control method provided by the present invention.

[0050] As another technical solution, the present invention further provides a semiconductor processing equipment, comprising a process chamber, a plurality of air intake pipeline groups, a gas distribution device and a controller, wherein the process chamber is divided into a plurality of different areas; the gas distribution device is provided with a plurality of air intake channels corresponding to each of the areas; the plurality of air intake pipeline groups correspond to the plurality of areas one by one, and each of the air intake pipeline groups introduces gas into the area through each of the air intake channels corresponding to the area corresponding to the area; each of the air intake pipeline groups comprises a plurality of air intake pipelines connected in parallel, and each of the air intake pipelines is provided with an on-off valve and a throttle valve, and the throttle valve is used to set the ventilation cross-sectional area of ​​the air intake pipeline where it is located when the on-off valve is turned on;

[0051] The controller adopts the flow ratio control method provided by the present invention to selectively control the on-off valves on each intake pipeline in each intake pipeline group to be turned on or off, so as to control the gas flow ratio distributed to the multiple areas.

[0052] As another technical solution, the present invention further provides a computer-readable medium having a computer program stored thereon, wherein the program, when executed by a processor, implements the above-mentioned flow ratio control method provided by the present invention.

[0053] The present invention has the following beneficial effects:

[0054] In the technical solution of the flow ratio control method and device provided by the present invention, the new hardware parameters can be pre-configured when the hardware parameters change, and can be adapted to a variety of different hardware parameters, thereby improving the configuration flexibility and having versatility. On this basis, by determining the maximum value of the ventilation cross-sectional areas of all the intake pipes in the intake pipe group, and determining the area with the largest flow ratio among multiple areas, and setting the target ventilation area corresponding to the area to the above maximum value, the target ventilation area of ​​the area with the largest flow ratio can be obtained, and then according to the maximum value and the flow ratio corresponding to each area, the target ventilation area corresponding to each other area can be calculated, and according to the target ventilation area corresponding to each other area, a preset algorithm is used to obtain the optimal combination of on-off valves that need to be connected in the intake pipe group corresponding to each other area. The present invention does not need to obtain the valve combination corresponding to the area with the largest flow ratio, but directly controls the on-off valve on the intake pipe with the largest ventilation cross-sectional area in the intake pipe group corresponding to the area to be connected, thereby eliminating the calculation of the valve combination of one area. At the same time, because the target ventilation area corresponding to the area with the largest flow ratio is known, the calculation method of the target ventilation areas corresponding to other areas is simpler, so there is no need to perform complex calculations and the algorithm is simpler.

[0055] The semiconductor processing equipment provided by the present invention can be applicable to a variety of different hardware parameters by adopting the above-mentioned flow ratio control device provided by the present invention, and the method used to obtain the valve combination that needs to be connected is simpler. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Figure 1 A schematic diagram of the structure of an air intake pipeline group in a semiconductor processing device provided by an embodiment of the present invention;

[0057] Figure 2 A flow chart of a flow rate ratio control method provided by an embodiment of the present invention;

[0058] Figure 3 A flowchart of a first algorithm used in an embodiment of the present invention;

[0059] Figure 4 A flowchart of a k-th calculation process in the first algorithm adopted in an embodiment of the present invention;

[0060] Figure 5 It is the combination diagram of the five valve combinations obtained in the first calculation process;

[0061] Figure 6 It is the combination diagram of 10 valve combinations obtained in the second calculation process;

[0062] Figure 7It is the combination diagram of 10 valve combinations obtained in the third calculation process;

[0063] Figure 8 It is the combination diagram of the five valve combinations obtained in the fourth calculation process;

[0064] Fig. 9 It is the combination diagram of a valve combination obtained in the fifth calculation process;

[0065] Fig.10 A flowchart of another k-th calculation process in the first algorithm adopted in an embodiment of the present invention;

[0066] Fig.11 A trend chart of the difference obtained from 5 calculation processes;

[0067] Fig.12 Another variation trend diagram of the difference obtained from the five calculation processes;

[0068] Fig.13 A flowchart of a second algorithm used in an embodiment of the present invention;

[0069] Fig.14 It is a flow chart of the calculation process of each on-off valve in the second algorithm adopted in the embodiment of the present invention;

[0070] Fig.15 It is a structural block diagram of the flow ratio control device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0071] In order to enable those skilled in the art to better understand the technical solution of the present invention, the flow ratio control method, device and semiconductor processing equipment provided by the present invention are described in detail below with reference to the accompanying drawings.

[0072] The flow ratio control method provided by the embodiment of the present invention is applied to semiconductor processing equipment, and is used to selectively control the on-off valves on each of the multiple inlet pipelines in the multiple inlet pipeline groups corresponding to multiple different areas in the process chamber to connect or disconnect, so as to control the gas flow ratio allocated to the multiple areas. Figure 1 The semiconductor processing equipment includes, for example, a process chamber (not shown in the figure), a plurality of gas inlet pipeline groups, a gas distribution device (not shown in the figure) and a controller, wherein the process chamber is divided into a plurality of different areas, for example, divided into three areas, namely a center area (center), a middle area (middle) and an edge area (edge), but the embodiment of the present invention is not limited to this, and in practical applications, it can also be divided into two areas, four areas or more areas.

[0073] A plurality of air inlet channels are provided for each area in the gas distribution device. The gas distribution device includes, for example, a spray plate provided at the top of the process chamber. The air inlet channels are, for example, air inlet holes provided in the spray plate. The air outlets of the air inlet holes are connected to the corresponding areas. A plurality of air inlet pipeline groups correspond to a plurality of areas one by one, and each air inlet pipeline group introduces gas into the area through each air inlet channel corresponding to the area corresponding to the area. Each air inlet pipeline group includes a plurality of air inlet pipelines 1 connected in parallel, and each air inlet pipeline 1 is provided with an on-off valve 2. When the on-off valve 2 is turned on, gas can be introduced into the corresponding area through the air inlet pipeline 1 where the on-off valve 2 is located. When the on-off valve 2 is turned off, gas is not introduced into the air inlet pipeline 1 where the on-off valve 2 is located. In some embodiments of the present invention, each intake pipeline 1 in each intake pipeline group is usually provided with a throttle valve 3, which is used to set the ventilation cross-sectional area of ​​each intake pipeline 1 when the on-off valve 2 is connected. The larger the ventilation cross-sectional area, the greater the gas flow rate flowing through the intake pipeline 1.

[0074] In a specific embodiment of the present invention, Figure 1 As shown, the process chamber is divided into three areas, namely the center area (center), the middle area (middle) and the edge area (edge). Correspondingly, there are three groups of air intake pipeline groups, each of which includes seven air intake pipelines 1 connected in parallel, and each air intake pipeline 1 is provided with an on-off valve 2 and a throttle valve 3. Among them, seven on-off valves (V11-V17) are respectively provided on the seven air intake pipelines 1 corresponding to the center area (center), seven on-off valves (V21-V27) are respectively provided on the seven air intake pipelines corresponding to the middle area (middle), and seven on-off valves (V31-V37) are respectively provided on the seven air intake pipelines corresponding to the edge area (edge).

[0075] The controller adopts the flow ratio control method provided by the embodiment of the present invention to selectively control the on-off valve 2 on each intake pipeline 1 in each intake pipeline group to be turned on or off, so as to control the gas flow ratio allocated to multiple areas. The gas flow ratio can be set according to specific needs. For example, the improvement of the uniformity of gas distribution in multiple areas can be achieved by controlling the gas flow ratio allocated to multiple areas.

[0076] See also Figure 2 , the flow ratio control method provided by the embodiment of the present invention includes:

[0077] S1. Determine the maximum value of the ventilation cross-sectional areas of all the intake pipes in each intake pipe group according to the pre-configured hardware parameters;

[0078] In the same intake pipeline group, the throttle valve parameters of multiple intake pipelines are different, and there is a maximum value in the ventilation cross-sectional area, which can be determined according to the pre-configured hardware parameters. The hardware parameters of different intake pipeline groups are the same.

[0079] In some embodiments of the present invention, the above-mentioned hardware parameters include the number of on-off valves of each intake pipe group and the ventilation cross-sectional area of ​​each intake pipe when the on-off valve is in the on state. In this case, the above-mentioned maximum value is greater than the sum of the ventilation cross-sectional areas of other intake pipes except the intake pipe with the largest ventilation cross-sectional area. In this way, the target ventilation area of ​​the area with the largest flow ratio can be set to the above-mentioned maximum value in subsequent steps without the need to perform complex calculations on the target ventilation area of ​​the area, such as selecting a suitable combination from a variety of different valve combinations that need to be connected, and calculating the sum of the ventilation cross-sectional areas of the combination as the target ventilation area of ​​the area with the largest flow ratio. Since there are many valve combinations, the calculation method is very cumbersome.

[0080] Through the above step S1, the new hardware parameters can be pre-configured when the hardware parameters change, and the maximum value of the ventilation area adapted to the hardware parameters can be determined, so that it can be adapted to a variety of different hardware parameters, thereby improving configuration flexibility and versatility.

[0081] S2. Determine the area with the largest flow ratio among the multiple areas, and set the target ventilation area corresponding to the area to the above maximum value; the flow ratio corresponding to each area is equal to the ratio of the preset target flow value to the sum of the target flow values ​​of all areas;

[0082] For example, taking the process chamber divided into a center area (center), a middle area (middle) and an edge area (edge), the target flow values ​​of the three areas are c1, m1 and e1 respectively, the sum of the target flow values ​​of all areas sum = c1 + m1 + e1, the flow ratio rc corresponding to the center area (center) = c1 / sum, the flow ratio rm corresponding to the middle area (middle) = m1 / sum, and the flow ratio re corresponding to the edge area (edge) = e1 / sum. Therefore, the flow ratios of multiple areas can be calculated based on the target flow values ​​of the three areas, and the area with the largest flow ratio can be determined.

[0083] The target flow value corresponding to each area is obtained in advance. In some embodiments of the present invention, in the above step S2, the method for obtaining the target flow value corresponding to each area includes:

[0084] S21, determining sub-target flow values ​​of the gas inlet channels corresponding to each area in the gas distribution device according to the current process recipe;

[0085] S22. Calculate and obtain the target flow value corresponding to each area according to the number of air inlet channels corresponding to each area in the pre-configured gas distribution device and the sub-target flow value corresponding to each area.

[0086] The above hardware parameters also include the number of intake channels corresponding to each area in the gas distribution device, so that the number of new intake channels can be pre-configured when changing, so that the flow ratio control method of this embodiment can be adapted to a variety of different numbers of intake channels.

[0087] For example, taking the process chamber divided into the center area (center), the middle area (middle) and the edge area (edge), the sub-target flow values ​​corresponding to the three areas are c, m and e respectively, and the values ​​can be obtained from the process recipe. The number of inlet channels corresponding to the three areas is h1, h2 and h3 respectively, from which it can be calculated that: the target flow value c1 = c × h1 corresponding to the center area (center), the target flow value m1 = m × h2 corresponding to the middle area (middle), and the target flow value e1 = e × h3 corresponding to the edge area (edge).

[0088] S3, calculating the target ventilation area corresponding to each other area according to the above maximum value and the flow ratio corresponding to each area;

[0089] The ventilation area is defined as the sum of the ventilation cross-sectional areas of the intake pipes whose on-off valves are in the on state in the intake pipe group corresponding to the area, and the target ventilation area is the target value of the ventilation area required by the process.

[0090] Based on the fact that the larger the ventilation cross-sectional area of ​​the intake pipe is, the larger the gas flow rate flowing through the intake pipe is, the above flow ratio can be equivalent to the ventilation area ratio, so that the target ventilation area corresponding to other areas can be calculated based on the above maximum value and the flow ratio corresponding to each area.

[0091] In some embodiments of the present invention, the above step S3 includes:

[0092] S31, calculating the ratio of the maximum value to the maximum flow ratio as the total target ventilation area;

[0093] S32, calculating the product of the flow ratio corresponding to each area except the area with the largest flow ratio and the total target ventilation area as the target ventilation area corresponding to each area.

[0094] Taking the process chamber divided into the center area (center), the middle area (middle) and the edge area (edge) as an example, if the flow ratio of the middle area (middle) is the largest, the above maximum value is Amid, the flow ratio corresponding to the middle area (middle) is rm, and the total target ventilation area Asum = Amid / rm; the flow ratio corresponding to the center area (center) is rc, and the target ventilation area Acenter corresponding to the center area (center) is Asum×rc; the flow ratio corresponding to the edge area (edge) is re, and the target ventilation area Aedge corresponding to the edge area (edge) is Asum×re. If the flow ratio of the edge area (edge) is the largest, the above maximum value is Aedge, the flow ratio corresponding to the edge area (edge) is re, and the total target ventilation area Asum = Aedge / re; the flow ratio corresponding to the center area (center) is rc, and the target ventilation area Acenter corresponding to the center area (center) is Asum×rc; the flow ratio corresponding to the middle area (middle) is rm, and the target ventilation area Amid corresponding to the middle area (middle) is Asum×rm.

[0095] S4. According to the target ventilation areas corresponding to the other regions, a preset algorithm is used to obtain the optimal combination of on-off valves that need to be connected in the intake pipeline groups corresponding to the other regions;

[0096] The above optimal combination satisfies: the sum of the ventilation cross-sectional areas of the air intake pipelines where the on-off valves are located in the combination is close to or equal to the target ventilation area of ​​the corresponding area.

[0097] S5. Control the on-off valve on the intake pipeline with the largest ventilation cross-sectional area in the intake pipeline group corresponding to the area with the largest flow ratio to be turned on, control the on-off valves in the optimal combination to be turned on, and control the other on-off valves not in the optimal combination to be turned off, so that the gas flow ratio allocated to the multiple areas reaches the target gas flow ratio.

[0098] In the intake pipe group corresponding to the area with the largest flow ratio, only the on-off valve on the intake pipe with the largest ventilation cross-sectional area is connected, while the on-off valves on other intake pipes are disconnected. In the intake pipe groups corresponding to other areas, only the on-off valves in the optimal combination are connected, while other on-off valves not in the optimal combination are disconnected.

[0099] In the above step S4, there are multiple algorithms for obtaining the above optimal combination. In some embodiments of the present invention, for the above other regions (except the region with the largest flow ratio), please refer to Figure 3 , the above preset algorithms include:

[0100] S41a, executing the calculation process n times to obtain n minimum difference values;

[0101] S42a, taking the valve combination corresponding to the smallest of the n minimum differences as the optimal combination; n is the number of on-off valves of the corresponding intake pipeline group;

[0102] Among them, see Figure 4 , the kth calculation process, k=1,2,...,n, includes:

[0103] S411, arrange and combine the n on-off valves of the corresponding intake pipeline group to obtain C n k a valve combination comprising k on-off valves;

[0104] S412, calculating the sum of ventilation cross-sectional areas corresponding to k on-off valves included in each valve combination;

[0105] S413, calculate the target ventilation area and C n k The difference between the sum of the ventilation cross-sectional areas corresponding to the valve combinations;

[0106] S414, C n k The smallest difference among the differences corresponding to the valve combinations is taken as the minimum difference.

[0107] For example, the target flow area corresponding to the other regions is 3 (units omitted), the number of on-off valves of the corresponding intake pipe group is n=5, and the ventilation cross-sectional area of ​​the intake pipe where the 5 on-off valves are located is s[i]={1,2,3,4,5}. The first calculation process (k=1) includes: arranging and combining the n on-off valves of the corresponding intake pipe group to obtain C n 1 A valve combination including one on-off valve to be connected, that is, a 5-valve combination, such as Figure 5 As shown, the five valve combinations each contain five on-off valves that need to be connected, represented by gray boxes, namely valves 1 to 5. In this case, the sum of the ventilation cross-sectional areas of each valve combination is the ventilation cross-sectional area of ​​the intake pipe where the one on-off valve it contains is located. Then, the difference between the target ventilation area and the ventilation cross-sectional area of ​​the intake pipe where the one on-off valve contained in the five valve combinations is located is calculated, that is, the difference between 3 and s[i]. After traversing five times, five differences can be obtained, from which the minimum value is determined as the above-mentioned minimum difference, that is, 3-3=0. At this time, the minimum difference diff1 obtained in the first calculation process is 0. In the above step S42a, the valve combination {3} corresponding to the minimum difference diff1 is taken as the optimal combination.

[0108] The second calculation process (k=2) includes:

[0109] Arrange and combine the n on-off valves of the corresponding intake pipeline group to obtain C n 2 A valve combination including two on-off valves to be connected, that is, a valve combination of 10 valves, such as Figure 6 As shown, the valve 1 represented by the gray box in the first row can form 4 valve combinations with the valves 2 to 5 represented by the 4 gray boxes in the second row; the valve 2 represented by the gray box in the first row can form 3 valve combinations with the valves 3 to 5 represented by the 3 gray boxes in the second row; the valve 3 represented by the gray box in the first row can form 2 valve combinations with the valves 4 to 5 represented by the 2 gray boxes in the second row; the valve 4 represented by the gray box in the first row can form 1 valve combination with the valve 5 represented by the 1 gray box in the second row, which adds up to 10 valve combinations. In this case, the sum of the ventilation cross-sectional areas of each valve combination is the sum of the ventilation cross-sectional areas of the intake pipes where the 2 on-off valves contained therein are located. Then, the difference between the sum of the target ventilation areas and the sum of the ventilation cross-sectional areas of the intake pipes where the two on-off valves included in the 10 valve combinations are located is calculated, that is, the difference between 3 and (s[i]+s[j]), where i=1,2,3,4,5, j=i+1, j=2,3,4,5. After 10 traversals, 10 differences can be obtained, from which the minimum value is determined as the above minimum difference, that is, 3-(1+2)=0. At this time, the minimum difference diff2 obtained in the second calculation process is 0. In the above step S42a, the valve combination {1,2} corresponding to the minimum difference diff2 is taken as the optimal combination.

[0110] The third calculation process (k=3) includes:

[0111] Arrange and combine the n on-off valves of the corresponding intake pipeline group to obtain C n 3 A valve combination including 3 on-off valves to be connected, that is, 10 valve combinations, such as Figure 7As shown, the valve 1 represented by the gray box in the first row and the valve 2 represented by the gray box in the second row can form three valve combinations with the valves 3 to 5 represented by the three gray boxes in the third row; the valve 2 represented by the gray box in the first row and the valve 3 represented by the gray box in the second row can form two valve combinations with the valves 4 to 5 represented by the two gray boxes in the third row; the valve 2 represented by the gray box in the first row and the valve 4 represented by the gray box in the second row can form one valve combination with the valve 5 represented by the gray box in the third row; the valve 3 represented by the gray box in the first row and the valve 4 represented by the gray box in the second row can form one valve combination with the valve 5 represented by the gray box in the third row, and there are 10 valve combinations in total. In this case, the sum of the ventilation cross-sectional areas of each valve combination is the sum of the ventilation cross-sectional areas of the intake pipes where the three on-off valves contained therein are located. Then, the difference between the sum of the target ventilation areas and the sum of the ventilation cross-sectional areas of the intake pipes where the three on-off valves included in the 10 valve combinations are located is calculated, that is, the difference between 3 and (s[i]+s[j]+s[m]), where i=1,2,3,4,5, j=i+1, j=2,3,4,5, m=j+1, m=3,4,5. After 10 traversals, 10 differences can be obtained, from which the minimum value is determined as the above minimum difference, that is, 3-(1+2+3)=-3. At this time, the minimum difference diff3 obtained in the third calculation process is 3 (taking the absolute value). In the above step S42a, the valve combination {1,2,3} corresponding to the minimum difference diff3 is taken as the optimal combination.

[0112] Similarly, the valve combinations corresponding to the 4th calculation process (k=4) and the 5th calculation process (k=5) are as follows: Figure 8 and Fig. 9 As shown, the minimum difference diff4 and the minimum difference diff5 can be obtained by calculation, and in the above step S42a, the valve combinations corresponding to the minimum difference diff4 and the minimum difference diff5 are taken as the optimal combination.

[0113] In some embodiments of the present invention, when there are multiple minimum values ​​among the n minimum differences, the valve combination with the least number of on-off valves included in the valve combinations corresponding to all the minimum values ​​is selected as the optimal combination. For example, the valve combinations corresponding to the minimum difference diff5 obtained in the fifth calculation process are {3} and {1,2}. In this case, the valve combination with the least number of on-off valves included in the valve combination can be selected as the optimal combination, that is, the valve combination {3}.

[0114] In other embodiments of the present invention, in order to reduce the number of unnecessary traversals in each calculation process, the above preset algorithm can be improved. Specifically, the improved preset algorithm improves the above steps S413 and S414, while the other steps are the same as the above embodiment. Specifically, please refer to Fig.10 After the above step S412 is completed, the method further includes:

[0115] S413', in order from small to large, n k The sum of the ventilation cross-sectional areas corresponding to the valve combinations is sorted;

[0116] S414', according to the order of the sum of the ventilation cross-sectional areas, calculate the difference between the sum of each ventilation cross-sectional area and the target ventilation area in turn, and when the difference obtained in this calculation is greater than the difference obtained in the previous calculation, take the difference obtained in the previous calculation as the minimum difference and stop the next calculation; when the difference obtained in this calculation is less than or equal to the difference obtained in the previous calculation, continue the next calculation until the current difference is greater than the difference obtained in the previous calculation, and take the difference obtained in the previous calculation as the minimum difference.

[0117] By sorting, as the number of calculations increases, C n k The sum of the ventilation cross-sectional areas corresponding to the valve combinations is increasing. Based on this, the trend of the difference change can be judged by comparing the difference obtained in this calculation with the difference obtained in the previous calculation. Specifically, if the difference obtained in this calculation is greater than the difference obtained in the previous calculation, it means that the difference change is monotonically increasing. At this time, the minimum difference is obtained and the next calculation is not required. If the difference obtained in this calculation is less than the difference obtained in the previous calculation, it means that the difference change is monotonically decreasing. At this time, the next calculation needs to be continued until the difference change increases, that is, the minimum difference is obtained.

[0118] For example, the target flow area corresponding to the other regions is 3 (units omitted), the number of on-off valves in the corresponding intake pipe group is n=5, and the ventilation cross-sectional area of ​​the intake pipe where the 5 on-off valves are located is s[i]={1,2,3,4,5}. Fig.11 As shown, the five triangular points are the ventilation cross-sectional areas of the intake pipes where the five on-off valves are located; the five circular points are the differences obtained from the five calculation processes. Among them, the difference obtained from the first calculation is 2, and the difference obtained from the second calculation is 1. The difference changes in a decreasing manner. At this time, the third calculation needs to be continued. The difference obtained from the third calculation is 0, and the difference changes in a decreasing manner. At this time, the fourth calculation needs to be continued. The difference obtained from the fourth calculation is 1, and the difference changes in an increasing manner. Then the difference obtained from the third calculation is taken as the minimum difference. In addition, there is no need to perform the fifth calculation.

[0119] For example, Fig.12 As shown, the difference obtained by the first calculation is 1, and the difference obtained by the second calculation is 2, and the difference changes are increasing, so the difference obtained by the first calculation is taken as the minimum difference. In addition, there is no need to perform the second calculation.

[0120] In other embodiments of the present invention, in order to reduce valve action and further improve the response speed, it is particularly suitable for the case where the number of on-off valves n of the intake pipeline group is large (for example, n is greater than 10), please refer to Fig.13 For the other areas mentioned above (except for the area with the largest flow ratio), the preset algorithms that can be used include:

[0121] S41b, res[j]=0, j is the target ventilation area, and j=0, 1, 2, ..., target, target is the target ventilation area corresponding to the area; res[j] is the sum of the ventilation cross-sectional areas of the valve combination closest to i; res[0] indicates that all the on-off valves of the corresponding intake pipeline group are in the off state;

[0122] The above step S41b is used to initialize res[j] corresponding to all values ​​of j.

[0123] S42b, performing the following calculation process on each on-off valve of the intake pipeline group to obtain the optimal combination, that is, each on-off valve performs the following calculation process to determine whether to connect the on-off valve. After all on-off valves complete the calculation process, the on-off valves that are connected constitute the optimal combination.

[0124] Specifically, see Fig.14 , the calculation process includes:

[0125] S421, selecting the i-th on-off valve, i=1, 2, ..., n, where n is the number of on-off valves of the corresponding intake pipeline group;

[0126] S422, calculate and obtain sum, where sum = res[js[i]] + s[i], s[i] is the ventilation cross-sectional area of ​​the i-th on-off valve when it is turned on; res[js[i]] is the sum of the ventilation cross-sectional areas of the valve combination closest to js[i]; j = target;

[0127] S423, compare sum with res[j]. If sum is greater than res[j], execute step S424; if sum is less than or equal to res[j], execute step S425;

[0128] S424, set res[j] = sum, and record that when j = target, the i-th on-off valve needs to be opened, and determine whether j is less than or equal to 1. If j is less than or equal to 1, execute step S425; if j is greater than 1, set target - 1, and return to execute the above step S421;

[0129] S425, add i+1, and return to execute the above step S421.

[0130] For example, taking the target flow area corresponding to the other regions as 3 (units omitted), the number of on-off valves of the corresponding intake pipeline group as n=3, and the ventilation cross-sectional area s[i]={1,2,5} of the intake pipeline where the three on-off valves are located when connected as an example, in the above step S41b, res[j]=0 is set so that all the on-off valves of the corresponding intake pipeline group are in the off state; wherein j=0,1,2,...,target, target=3. In the above step S42b, the following calculation process is performed on the three on-off valves of the intake pipeline group:

[0131] In the above step S421, the first on-off valve is selected, i.e., i=1;

[0132] In the above step S422, sum is calculated, where sum=res[js[i]]+s[i], s[1] is the ventilation cross-sectional area of ​​the first on-off valve when it is turned on, s[1]=1; j=target=3, from which it can be deduced that:

[0133] sum=res[js[i]]+s[i]=res[3-s[1]]+s[1]=res[3-1]+1=res[2]+1=1, where the initial value of res[2] is 0.

[0134] In the above step S423, sum is compared with res[j], where res[j]=res[3]=0, and the initial value of res[3] is 0. Since sum=1>0, the above step S424 is executed;

[0135] In the above step S424, res[j]=sum=1, and when j=target (ie =3), it is necessary to open the first on-off valve, and determine whether j is less than or equal to 1. Since j=3>1, set target-1, and return to execute the above step S421.

[0136] Then, the above step S422 is performed again for the first on-off valve (target=2 at this time), and sum is calculated, where, since j=target=2, it can be deduced that:

[0137] sum=res[js[i]]+s[i]=res[2-s[1]]+s[1]=res[2-1]+1=res[1]+1=1, where the initial value of res[1] is 0.

[0138] Execute the above step S423 again, compare sum with res[j], where res[j]=res[target]=res[2]=0, and the initial value of res[2] is 0. Since sum=1>0, execute the above step S424 again, make res[j]=sum=1, and record that when j=target (i.e., =2), it is necessary to open the first on-off valve, and determine whether j is less than or equal to 1. Since j=2>1, make target-1, and return to execute the above step S421.

[0139] Then, the above step S422 is performed for the third time for the first on-off valve (target=1 at this time), and sum is calculated, where, since j=target=1, it can be deduced that:

[0140] sum=res[js[i]]+s[i]=res[1-s[1]]+s[1]=res[1-1]+1=res[0]+1=1, where the initial value of res[0] is 0.

[0141] Execute step S423 for the third time, compare sum with res[j], where res[j]=res[target]=res[1]=0, and the initial value of res[1] is 0. Since sum=1>0, execute step S424 again, make res[j]=sum=1, and record that when j=target (i.e., =1), the first on-off valve needs to be opened, and determine whether j is less than 1. Since j=1, execute step S425.

[0142] In the above step S425, i+1 is added, and the process returns to execute the above step S421. At this time, i=2, that is, the above calculation process is started for the second on-off valve. After the third on-off valve completes the above calculation process, the optimal combination is finally obtained as {1,2}. It should be noted that during the calculation process of the third on-off valve, res[3]=res[-2]-2 occurs. Since res[-2] is meaningless, the process is abnormally exited. At this time, the state of the third on-off valve is still disconnected.

[0143] In some embodiments of the present invention, when multiple valve combinations are obtained, the valve combination containing the least number of on-off valves is selected as the optimal combination.

[0144] The above calculation process can effectively simplify the calculation process because it does not need to fully arrange the number n of on-off valves of the corresponding intake pipeline group. The above preset algorithm (including steps S41b and S42b) can effectively reduce valve action and further improve the response speed, especially for the case where the number n of on-off valves of the intake pipeline group is large (for example, n is greater than 10). However, this calculation process is only applicable to the case where target and s[i] are integers. For this reason, when target and s[i] are decimals, target and s[i] can be simultaneously expanded by integer multiples in the same proportion until target and s[i] are integers. In addition, after expanding by integer multiples in the same proportion, if the integer obtained is too large, it will cause the order of magnitude of the calculation to increase. For this, an offset offset (<0) can be added to target and s[i] at the same time, so that target and s[i] are simultaneously offset downward to reduce the order of magnitude, thereby further reducing the amount of calculation. For example, if s[i] = {0.0125, 0.0234, 0.0412}, target = 0.051, then it can be scaled up 10,000 times in the same proportion to get s[i] = {125, 234, 412}, target = 510. In addition, if it is necessary to shift downward, an offset = -100 can be added to both target and s[i] to get s[i] = {25, 134, 312}, target = 410.

[0145] The two preset algorithms are respectively a first algorithm including steps S41b and S42b, and a second algorithm including steps S41b and S42b. In some embodiments of the present invention, whether to use the first algorithm or the second algorithm can be selected according to the number n of on-off valves of the intake pipeline group in practice. For example, before executing the above step S4, it also includes:

[0146] It is determined whether the number n of the on-off valves of the intake pipeline group is less than a preset number (for example, 10). If so, the first algorithm is used; if not, the second algorithm is used.

[0147] In some embodiments of the present invention, after the above step S5, the method further includes:

[0148] S6. Obtaining the actual flow value corresponding to each area corresponding to the current process step;

[0149] S7, calculating and obtaining the flow adjustment value corresponding to each area, where the flow adjustment value is equal to the product of the difference between the actual flow value and the target flow value and a preset fine-tuning coefficient;

[0150] S8. Replace the target flow value corresponding to the next process step with the flow adjustment value.

[0151] With the aid of the above steps S6 to S8, the target flow value corresponding to the next process step can be fine-tuned, thereby avoiding errors introduced by hardware and bringing beneficial effects to the matching between chambers or the adjustment between processes.

[0152] In summary, in the technical solution of the flow ratio control method and device provided by the embodiment of the present invention, the new hardware parameters can be pre-configured when the hardware parameters change, and can be adapted to a variety of different hardware parameters, thereby improving the configuration flexibility and having versatility. On this basis, by determining the maximum value of the ventilation cross-sectional areas of all the intake pipes in the intake pipe group, and determining the area with the largest flow ratio among multiple areas, and setting the target ventilation area corresponding to the area to the above maximum value, the target ventilation area of ​​the area with the largest flow ratio can be obtained, and then according to the maximum value and the flow ratio corresponding to each area, the target ventilation area corresponding to each other area can be calculated, and according to the target ventilation area corresponding to each other area, a preset algorithm is used to obtain the optimal combination of on-off valves that need to be connected in the intake pipe group corresponding to each other area. The present invention does not need to obtain the valve combination corresponding to the area with the largest flow ratio, but directly controls the on-off valve on the intake pipe with the largest ventilation cross-sectional area in the intake pipe group corresponding to the area to be connected, thereby eliminating the calculation of the valve combination of one area. At the same time, because the target ventilation area corresponding to the area with the largest flow ratio is known, the calculation method of the target ventilation areas corresponding to other areas is simpler, so there is no need to perform complex calculations and the algorithm is simpler.

[0153] As another technical solution, the embodiment of the present invention further provides a semiconductor processing device, see Figure 1 The semiconductor processing equipment includes a process chamber, multiple air inlet pipeline groups, a gas distribution device and a controller, wherein the process chamber is divided into multiple different areas, for example, divided into three areas, namely a center area (center), a middle area (middle) and an edge area (edge), but the embodiments of the present invention are not limited to this. In actual applications, it can also be divided into two areas, four areas or more areas.

[0154] A plurality of air inlet channels are provided for each area in the gas distribution device. The gas distribution device includes, for example, a spray plate provided at the top of the process chamber. The air inlet channels are, for example, air inlet holes provided in the spray plate. The air outlets of the air inlet holes are connected to the corresponding areas. A plurality of air inlet pipeline groups correspond to a plurality of areas one by one, and each air inlet pipeline group introduces gas into the area through each air inlet channel corresponding to the area corresponding to the area. Each air inlet pipeline group includes a plurality of air inlet pipelines 1 connected in parallel, and each air inlet pipeline 1 is provided with an on-off valve 2. When the on-off valve 2 is connected, gas can be introduced into the corresponding area through the air inlet pipeline 1 where the on-off valve 2 is located. When the on-off valve 2 is disconnected, gas is not introduced into the air inlet pipeline 1 where the on-off valve 2 is located. In some embodiments of the present invention, each intake pipeline 1 in each intake pipeline group is usually provided with a throttle valve 3, which is used to set the ventilation cross-sectional area of ​​each intake pipeline 1 when the on-off valve 2 is connected. The larger the ventilation cross-sectional area, the greater the gas flow rate flowing through the intake pipeline 1.

[0155] In a specific embodiment of the present invention, Figure 2 As shown, the process chamber is divided into three areas, namely the center area (center), the middle area (middle) and the edge area (edge). Correspondingly, there are three groups of air intake pipeline groups, each of which includes seven air intake pipelines 1 connected in parallel, and each air intake pipeline 1 is provided with an on-off valve 2 and a throttle valve 3. Among them, seven on-off valves (V11-V17) are respectively provided on the seven air intake pipelines corresponding to the center area (center), seven on-off valves (V21-V27) are respectively provided on the seven air intake pipelines corresponding to the middle area (middle), and seven on-off valves (V31-V37) are respectively provided on the seven air intake pipelines corresponding to the edge area (edge).

[0156] The controller adopts the flow ratio control method provided by the embodiment of the present invention to selectively control the on-off valve on each intake pipeline in each intake pipeline group to be turned on or off, so as to control the gas flow ratio allocated to multiple areas. The gas flow ratio can be set according to specific needs. For example, the improvement of the uniformity of gas distribution in multiple areas can be achieved by controlling the gas flow ratio allocated to multiple areas.

[0157] The semiconductor processing equipment provided by the embodiment of the present invention can be applicable to a variety of different hardware parameters by adopting the above-mentioned flow ratio control device provided by the embodiment of the present invention, and the method used to obtain the valve combination that needs to be connected is simpler.

[0158] Fig.15 : is a structural block diagram of a flow rate ratio control device provided in an embodiment of the present invention, such as Fig.15As shown, the flow ratio control device includes: at least one processor 301, a memory 302, and at least one I / O interface 303. The memory 302 stores at least one program, and when the at least one program is executed by the at least one processor 301, the at least one processor implements the steps in the flow ratio control method provided in any of the above embodiments and applied to the embodiments of the present invention; at least one I / O interface 303 is connected between the processor and the memory, and is configured to implement information interaction between the processor and the memory.

[0159] Among them, the processor 301 is a device with data processing capabilities, including but not limited to a central processing unit (CPU), etc.; the memory 302 is a device with data storage capabilities, including but not limited to random access memory (RAM, more specifically SDRAM, DDR, etc.), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory (FLASH); the I / O interface (read-write interface) 303 is connected between the processor 301 and the memory 302, and can realize information interaction between the processor 301 and the memory 302, including but not limited to a data bus (Bus), etc.

[0160] In some embodiments, the processor 301 , the memory 302 , and the I / O interface 303 are connected to each other via a bus 304 , and further connected to other components of the computing device.

[0161] In some embodiments, the processor 301 includes an FPGA.

[0162] According to an embodiment of the present disclosure, a computer-readable medium is further provided. The computer-readable medium stores a computer program, wherein when the program is executed by a processor, the steps in any flow ratio control method in the above-mentioned embodiment are implemented.

[0163] In particular, according to an embodiment of the present disclosure, the process described above with reference to the flowchart can be implemented as a computer software program. For example, an embodiment of the present disclosure includes a computer program product, which includes a computer program carried on a machine-readable medium, and the computer program contains a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through a communication part, and / or installed from a removable medium. When the computer program is executed by a central processing unit (CPU), the above-mentioned functions defined in the system of the present disclosure are executed.

[0164] It should be noted that the computer-readable medium shown in the present disclosure may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with at least one wire, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present disclosure, a computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device. In the present disclosure, a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, in which a computer-readable program code is carried. This propagated data signal may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer-readable signal media may also be any computer-readable medium other than computer-readable storage media, which may send, propagate or transmit a program for use by or in conjunction with an instruction execution system, apparatus or device. The program code contained on the computer-readable medium may be transmitted using any appropriate medium, including but not limited to: wireless, wire, optical cable, RF, etc., or any suitable combination of the above.

[0165] The flow chart and block diagram in the accompanying drawings illustrate the possible architecture, function and operation of the system, method and computer program product according to various embodiments of the present disclosure. In this regard, each box in the flow chart or block diagram can represent a module, a program segment or a part of the code, and the aforementioned module, program segment or a part of the code contains at least one executable instruction for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs the specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0166] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A flow ratio control method, applied to semiconductor processing equipment, for selectively controlling the on / off valves on each of the multiple inlet pipelines in the multiple inlet pipeline groups corresponding to multiple different areas in the process chamber to be turned on or off, so as to control the gas flow ratio allocated to the multiple areas, characterized in that: include: Determining the maximum value of the ventilation cross-sectional areas of all the intake pipelines in each of the intake pipeline groups according to the pre-configured hardware parameters; Determine the area with the largest flow ratio among the multiple areas, and set the target ventilation area corresponding to the area as the maximum value; the flow ratio corresponding to each area is equal to the ratio of the preset target flow value to the sum of the target flow values ​​of all the areas; Calculate the target ventilation area corresponding to each of the other regions according to the maximum value and the flow ratio corresponding to each region; According to the target ventilation areas corresponding to the other regions, a preset algorithm is used to obtain the optimal combination of on-off valves that need to be connected in the intake pipeline groups corresponding to the other regions; The on-off valve on the intake pipeline with the largest ventilation cross-sectional area in the intake pipeline group corresponding to the area with the largest control flow ratio is turned on, each of the on-off valves in the optimal combination is controlled to be turned on, and other on-off valves not in the optimal combination are controlled to be disconnected, so that the gas flow ratio allocated to the multiple areas reaches the target gas flow ratio.

2. The flow rate ratio control method according to claim 1, characterized in that: The hardware parameters include the number of on-off valves of each of the intake pipeline groups and the ventilation cross-sectional area of ​​each of the intake pipelines when the on-off valves are in an on state; The maximum value is greater than the sum of the ventilation cross-sectional areas of the other intake pipelines in the intake pipeline group except the intake pipeline with the largest ventilation cross-sectional area.

3. The flow rate ratio control method according to claim 1, characterized in that: The step of calculating the target ventilation area corresponding to each of the other regions according to the maximum value and the flow ratio corresponding to each region includes: Calculating the ratio of the maximum value to the maximum flow ratio as the total target ventilation area; The product of the flow ratio corresponding to each area except the area with the largest flow ratio and the total target ventilation area is calculated as the target ventilation area corresponding to each area.

4. The flow rate ratio control method according to claim 1, characterized in that: The method for obtaining the target flow value corresponding to each of the areas includes: Determining sub-target flow values ​​of the gas inlet channels corresponding to the respective areas in the gas distribution device according to the current process recipe; The target flow value corresponding to each of the areas is obtained by calculation according to the number of air inlet channels corresponding to each of the areas in the pre-configured gas distribution device and the sub-target flow value corresponding to each of the areas.

5. The flow rate ratio control method according to any one of claims 1 to 4, characterized in that: For each of the other regions, the preset algorithm includes: Execute the calculation process n times to obtain n minimum differences, and take the valve combination corresponding to the smallest of the n minimum differences as the optimal combination; n is the number of on-off valves of the corresponding intake pipeline group; The k-th calculation process, k=1, 2, ..., n, includes: Arrange and combine the corresponding n on-off valves of the intake pipeline group to obtain C n k A valve combination including k on-off valves to be connected; Calculating the sum of ventilation cross-sectional areas corresponding to the k on-off valves included in each of the valve combinations; Calculate the target ventilation area and C n k The difference between the sum of the ventilation cross-sectional areas corresponding to the valve combinations; C n k The smallest one of the differences corresponding to the valve combinations is used as the minimum difference.

6. The flow rate ratio control method according to any one of claims 1 to 4, characterized in that: For each of the other regions, the preset algorithm includes: Execute the calculation process n times to obtain n minimum differences, and take the valve combination corresponding to the smallest of the n minimum differences as the optimal combination; n is the number of on-off valves of the corresponding intake pipeline group; The k-th calculation process, k=1, 2, ..., n, includes: Arrange and combine the corresponding n on-off valves of the intake pipeline group to obtain C n k a valve combination comprising k on-off valves; Calculating the sum of ventilation cross-sectional areas corresponding to the k on-off valves included in each of the valve combinations; In order from smallest to largest, n k sorting by the sum of the ventilation cross-sectional areas corresponding to the valve combinations; According to the order of the sum of the ventilation cross-sectional areas, the differences between the sum of each ventilation cross-sectional area and the target ventilation area are calculated in turn, and when the difference obtained in this calculation is greater than the difference obtained in the previous calculation, the difference obtained in the previous calculation is used as the minimum difference, and the next calculation is stopped; when the difference obtained in this calculation is less than or equal to the difference obtained in the previous calculation, the next calculation is continued until the current difference is greater than the difference obtained in the previous calculation, and the difference obtained in the previous calculation is used as the minimum difference.

7. The flow rate ratio control method according to claim 5, characterized in that: In the case where there are multiple smallest ones among the n minimum differences, the valve combination with the least number of on-off valves included in the valve combinations corresponding to all the smallest ones is selected as the optimal combination.

8. The flow rate ratio control method according to any one of claims 1 to 4, characterized in that: For each of the other regions, the preset algorithm includes: res[j]=0, j is the target ventilation area, and j=0, 1, 2, ..., target, target is the target ventilation area corresponding to the area; res[j] is the sum of the ventilation cross-sectional areas of the valve combination closest to j; res[0] indicates that all the on-off valves of the corresponding intake pipeline group are in the off state; The following calculation process is performed on each on-off valve of the intake pipeline group to obtain the optimal combination: Select the i-th on-off valve; i=1, 2, ..., n, where n is the number of on-off valves of the corresponding intake pipeline group; Calculate and obtain sum, where sum = res[js[i]] + s[i], s[i] is the ventilation cross-sectional area of ​​the i-th on-off valve when it is turned on; res[js[i]] is the sum of the ventilation cross-sectional areas of the valve combination closest to js[i]; j = target; When sum is greater than res[j], res[j]=sum, and record that when j=target, the i-th on-off valve needs to be opened, and when j is greater than 1, target-1 is set, and the i-th on-off valve is returned; when j is less than or equal to 1, i+1 is set, and the i-th on-off valve is returned; When sum is less than or equal to res[j], i+1 is added and the selected i-th on-off valve is returned.

9. The flow rate ratio control method according to any one of claims 1 to 4, characterized in that: After the on-off valve on the intake pipeline with the largest ventilation cross-sectional area in the intake pipeline group corresponding to the area with the largest control flow ratio is turned on, each on-off valve in the optimal combination is controlled to be turned on, and other on-off valves not in the optimal combination are controlled to be turned off, the method further includes: Obtaining the actual flow value corresponding to each of the areas corresponding to the current process step; Calculating and obtaining a flow adjustment value corresponding to each of the areas, the flow adjustment value being equal to the product of a difference between the actual flow value and the target flow value and a preset fine-tuning coefficient; The target flow value corresponding to the next process step is replaced by the flow adjustment value.

10. A flow ratio control device, comprising: at least one processor; a memory having at least one program stored therein; When the at least one program is executed by the at least one processor, the at least one processor implements the flow ratio control method as described in any one of claims 1 to 9.

11. A semiconductor processing device, comprising a process chamber, a plurality of gas inlet pipeline groups, a gas distribution device and a controller, wherein: The process chamber is divided into a plurality of different areas; a plurality of air inlet channels are provided in the gas distribution device corresponding to each of the areas; a plurality of air inlet pipeline groups correspond to the plurality of areas one by one, and each air inlet pipeline group introduces gas into the area through each air inlet channel corresponding to the area corresponding to the area; each air inlet pipeline group includes a plurality of air inlet pipelines connected in parallel, and each air inlet pipeline is provided with an on-off valve and a throttle valve, and the throttle valve is used to set the ventilation cross-sectional area of ​​the air inlet pipeline where the air inlet pipeline is located when the on-off valve is turned on; The controller adopts the flow ratio control method described in any one of claims 1 to 9 to selectively control the on-off valves on each intake pipeline in each intake pipeline group to be connected or disconnected, so as to control the gas flow ratio distributed to the multiple areas.

12. A computer readable medium having a computer program stored thereon, wherein: When the program is executed by a processor, the flow ratio control method as described in any one of claims 1 to 9 is implemented.

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