Scroll pump and scroll pump inlet valve

Abstract

A scroll pump inlet valve and a scroll pump are disclosed. The scroll pump inlet valve includes: a valve seat formed of at least one of a stator and an inlet cover of a scroll pump; and a sealing mechanism mounted to the stator or the inlet cover. The seal mechanism includes an actuator configured to move the seal mechanism between an open position in which a scroll mechanism of the scroll pump is fluidly connected with the inlet port and a closed position in which the seal mechanism engages the valve seat to sealingly isolate the scroll mechanism from the inlet port.

Description

Technical Field

[0001] The field of the invention relates to scroll pumps, and in particular to inlet valves for scroll pumps. Background Art

[0002] The scroll pump may be provided with a non-return discharge valve to prevent fluid from flowing back into the pump from the discharge device, which may be at atmospheric pressure when the scroll pump is stopped. Such backflow may be particularly problematic where the scroll pump is used as a vacuum pump. For example, where the scroll pump is used to evacuate a semiconductor processing chamber and / or where it is used to support a turbomolecular pump (TMP), such backflow may cause a sudden change in pressure in the TMP and result in damage to the pump and / or it may result in contamination of the chamber.

[0003] This can be solved by providing an inlet valve instead of a discharge valve. This arrangement prevents fluid from within the vortex pump itself from leaking into a low pressure environment, such as a TMP or semiconductor processing chamber. Such an inlet valve can be provided as an accessory that can be mounted to the upstream side of the pump. This takes up valuable space and can be expensive.

[0004]

[0006] It would therefore be desirable to provide an apparatus that addresses one or more disadvantages associated with conventional valves. Summary of the invention

[0005] According to one aspect, a vortex pump inlet valve is provided, comprising: a valve seat formed by at least one of a stator and an inlet cover of the vortex pump; and a sealing mechanism mounted to the stator or the inlet cover, the sealing mechanism comprising an actuator configured to move the sealing mechanism between an open position and a closed position, wherein the open position is where a vortex mechanism and an inlet port of the vortex pump are fluidically connected, and the closed position is where the sealing mechanism engages the valve seat to seal and isolate the vortex mechanism from the inlet port.

[0006] In this way, an inlet valve is provided which is at least partially formed within the pump itself. This is a compact arrangement which eliminates the need for an external inlet valve, thereby reducing the number of connection fittings and additional components required, thereby saving space and money, and enabling a less complex system to be implemented. This may be particularly important where a scroll pump is used as part of a pumping system to evacuate a semiconductor processing chamber where space may be scarce. Furthermore, reducing the number of connections reduces the number of potential leak sites, thereby reducing the likelihood of leaks.

[0007] Compared to a discharge valve, providing a valve at the inlet prevents backflow from the scroll pump into the pumped environment (e.g., a process chamber) and helps maintain the environment at a low pressure and free from contaminants such as dust from the end seals of the scroll pump, especially when the pump is turned off.

[0008] In some embodiments, the sealing mechanism may be configured to cooperate with the stator and / or the inlet cover to define a portion of an inlet passage of the scroll pump when the sealing mechanism is in an open position, the inlet passage defining a flow passage between the inlet port and the scroll mechanism.

[0009] Using a sealing mechanism to help define the inlet passage provides an efficient way of incorporating a valve into a scroll pump with reduced additional components.

[0010] In some embodiments, the valve seat may be formed by a perimeter of a portion of the inlet passage. Using the perimeter of a portion of the inlet passage to create the valve seat allows the sealing mechanism to effectively seal over the entirety of the inlet passage defined by the perimeter.

[0011] In some embodiments, the actuator includes an electromagnetic coil.

[0012] The inlet valve may be a simple on / off valve with a solenoid providing the force to move the sealing mechanism between an open position and a closed position.

[0013] In some embodiments, the inlet valve comprises a valve body and the valve seat, the valve body and the valve seat being formed by at least one of the inlet cover and the stator. Forming the valve body within the stator and / or the inlet cover provides a compact arrangement requiring fewer additional components than would be required for an external inlet valve within the inlet passage. In this way, the number of additional components required to achieve an integrated valve at the inlet is reduced and a more compact pump may be provided.

[0014] In some embodiments, the valve body and valve seat are formed by machining them into the metal that forms the stator and / or inlet cover.

[0015] According to another aspect, there is provided a scroll pump comprising: an inlet port; a scroll mechanism formed by a stator and a rotor; an inlet cover; and the inlet valve according to the one aspect.

[0016] In some embodiments, the scroll pump includes a control circuit configured to control the actuator to move the sealing mechanism between the open position and the closed position. The control circuit may be a separate circuit from the circuit that controls the general operation of the motor and pump, or it may be incorporated into the general control circuit that controls the motor that drives the pump.

[0017] In some embodiments, the control circuit is configured to control the actuator to move the sealing mechanism to the closed position in response to the vortex pump closing. In this way, the vortex mechanism is no longer fluidically connected to the inlet port and any other pump or processing chamber to which the pump is attached. This prevents the fluid in the vortex pump from leaking to a lower pressure environment, such as another pump or processing chamber to which the vortex pump is connected. It will be appreciated that, in the case where the vortex pump is connected to a higher pressure environment, it can also reduce the fluid flowing into the vortex pump in the opposite direction.

[0018] In some embodiments, the control circuit can be configured to control the actuator to move the sealing mechanism to the open position in response to the pump being turned on.

[0019] In some embodiments, the control circuit may be configured to control the actuator to move the sealing mechanism to the open position at a predetermined time after the pump is turned on. Opening the inlet valve immediately at startup when the pressure in the vortex pump may be at atmospheric pressure may allow the gas in the vortex pump to flow through the inlet into an evacuated environment, such as another pump and / or a processing chamber. Opening the valve inlet after a predetermined time allows the vortex pump to have time to evacuate the fluid in the pump and reduce the pressure, thereby alleviating backflow to the pumped environment. A control circuit that provides a simple time delay is low cost, reliable and simple.

[0020] In some embodiments, the control circuitry may provide an adjustable time delay such that the predetermined time may be varied in response to an input. The input may be provided by an operator. In this regard, the appropriate time delay may vary depending on the system being pumped and other factors (e.g., whether a discharge valve is present), and being able to adjust the time delay provides a flexible pump that may be configured to operate effectively under different conditions.

[0021] In other embodiments, the control circuit may be configured to control the actuator to move to the open position in response to receiving a signal indicating that the pump is operating normally.

[0022] Some vortex pumps may include sensors and circuits configured to generate signals indicating that the pump is operating normally after startup. Such signals can be used for the safe operation of the vortex pump and provide an alarm when the pump is not operating correctly. For example, it can be used by the control circuit of the control motor to stop the motor-driven pump before damage occurs if the signal is not received within a predetermined time. Since the signal appears after the pump has been started and seems to be operating normally, this is a highly appropriate time point for opening the inlet valve. In addition, by using the signal to control when to open the inlet valve after startup, no additional circuit is needed to generate an additional control signal for controlling the opening of the inlet valve, thereby reducing circuits and reducing costs, and potentially making the pump more reliable.

[0023] In some embodiments, the signal includes an indication that the pump has reached a predetermined rotational speed. For example, the predetermined rotational speed may be a normal operating speed. The pump reaching a certain speed is a highly appropriate point to open the inlet valve because once the pump reaches the certain speed, the pressure within the pump will have dropped and opening the inlet valve will produce less backflow. The scroll pump may include a sensor for measuring the rotational speed, which sends a signal to the control circuit.

[0024] In some embodiments, the vortex pump also includes a first pressure sensor installed in the inlet port and a second pressure sensor installed between the inlet valve and the vortex mechanism, wherein the control circuit is configured to control the actuator to move the sealing mechanism to the open position when the pressure measured by the second pressure sensor is equal to or lower than the pressure measured at the first sensor.

[0025] By providing a pressure sensor, backflow into the process chamber or TMP to which the scroll pump is connected is mitigated, as the inlet valve will only open if the pressure in the scroll mechanism is equal to or lower than the pressure at the inlet port. This provides an effective way of reducing or eliminating backflow, but does require an additional active component in the form of a pressure sensor.

[0026] In some embodiments, the control circuit is configured to control a motor configured to drive the scroll mechanism. A control circuit within the pump generates a control signal, which is transmitted to the motor, indicating that the motor should be started, and which control signal can also be used to control the opening of the inlet valve. In this way, a combined control circuit can be used to control both the motor and the inlet valve. This ensures good synchronization between the two operations, reduces the need for additional components and improves reliability.

[0027] Although the control circuit is described above with reference to the control of an inlet valve according to an embodiment, such a control circuit may also be used to control other types of inlet valves located at the inlet of a scroll pump.

[0028] In some embodiments, the scroll pump is a vacuum pump. The vacuum pump can be used to evacuate a processing chamber used in semiconductor manufacturing.

[0029] According to another aspect, a vacuum pump system is provided, comprising a scroll pump according to the other aspect and a turbomolecular pump, the scroll pump being arranged as a fore pump of the turbomolecular pump.

[0030] Preventing backflow is particularly important when a scroll pump is used as a backing pump for a turbomolecular pump, because exposing the turbomolecular pump to higher pressures (eg, atmospheric pressure) can significantly slow the turbomolecular pump, which is detrimental to its pumping and can damage the pump.

[0031] According to another aspect, a method for controlling the inlet valve of a vortex vacuum pump is provided, the method comprising the following steps: energizing a motor that drives the rotor of the vortex pump; determining whether an inlet valve opening condition has been met, the inlet valve opening condition comprising one of the following: a predetermined time has passed or a control signal has been received indicating that the rotor has reached a predetermined speed; in response to meeting the condition, opening the inlet valve of the vortex pump.

[0032] In some embodiments, the inlet valve is an inlet valve according to one aspect.

[0033] According to a further aspect, there is provided a computer program comprising instructions operable when executed by a processor on a scroll pump to control the scroll pump to perform the steps of the method of the further aspect.

[0034] Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate and in combinations different from those explicitly set out in the claims.

[0035] Where an apparatus feature is described as being operable to provide a certain function, it will be appreciated that this includes equipment features that provide that function or that are adapted or configured to provide that function. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Embodiments of the present invention will now be further described with reference to the accompanying drawings, in which:

[0037] Figure 1 shows a cross-sectional view of a scroll pump inlet valve in a closed position according to an embodiment;

[0038] Figure 2A and 2B The open and closed positions are shown accordingly. Figure 1 A cross-sectional view of an inlet valve of a vortex pump;

[0039] Figure 3 shows a vacuum pump system according to an embodiment; and

[0040] Figure 4 A flow chart illustrating steps in a method according to an embodiment is shown. DETAILED DESCRIPTION

[0041] Before discussing the embodiments in more detail, an overview will first be provided.

[0042] An embodiment provides a vortex pump inlet valve, wherein the valve body is integrated into the pump stator or inlet cover to save cost and space. The vortex pump inlet valve includes a valve seat and a sealing mechanism or device for selectively sealing against the valve seat to block the inlet passage defined between the inlet and the vortex mechanism of the vortex pump. The valve seat is formed by at least one of the stator and the inlet cover of the vortex pump. The sealing mechanism is mounted to the stator or the inlet cover and includes an actuator configured to move the sealing mechanism between an open position and a closed position, in which the vortex mechanism and the inlet port of the vortex pump are fluidically connected, and in the closed position, the sealing mechanism engages the valve seat to seal and isolate the vortex mechanism from the inlet port.

[0043] By integrating the body of the inlet valve within the scroll pump, at least some of the connection fittings are eliminated and the additional space required for the valve is reduced. A solenoid may be used to actuate the valve due to its simplicity of operation and low cost. The valve body and valve seat may be machined into the scroll stator or inlet cover. A sealing mechanism, which may include a solenoid actuator coil and an armature, may be mounted on the stator / inlet cover to complete the assembly.

[0044] In use, the valve opens when the pump is running and closes when the pump is stopped. The valve coil may be connected to a motor power supply. A time delay circuit may be included to delay the opening of the valve for a few seconds to allow the pump to accelerate to full speed and the pump's own inlet space to be evacuated before opening.

[0045] Figure 1 A portion of a scroll pump 1 including an integrated inlet valve 10 is shown. The inlet valve 10 is located downstream of an inlet port 18 of the scroll pump 1 and upstream of a scroll mechanism of the scroll pump 1, which is formed by a rotor 14 and a stator 12, as is known in the art. The inlet valve 10 is configured to allow fluid to enter the scroll pump as shown by arrow A when in an open position. The scroll mechanism is enclosed by an inlet cover 15 mounted to the stator 12. The scroll pump 1 is a vacuum pump that can be used as a backing pump for a turbomolecular pump (TMP).

[0046] The inlet valve 10 includes a valve seat 11, a valve body 16 and a sealing mechanism 13, wherein the sealing mechanism 13 includes an actuator configured to move the sealing mechanism in an open position ( Figure 2A ) and the closed position ( Figure 1 and 2B ), in which the scroll mechanism of the scroll pump 1 is fluidly connected to the inlet port 18, and in which the sealing mechanism 13 engages the valve seat 11 to seal and isolate the scroll mechanism from the inlet port 18.

[0047] In this embodiment, the inlet valve 10 is integrated into the scroll pump 1 by forming the valve seat 11 and the valve body 16 in the stator 12. The valve seat 11 is formed by the outer periphery of the portion of the inlet passage extending into the space 17 defined by the valve body 16 and the sealing mechanism 13. The space 17 forms a part of the inlet passage. The sealing mechanism 13 is configured to cooperate with the stator 12, in particular with the valve body 16, to define a portion of the inlet passage, including the space 17, when the sealing mechanism 13 is in the open position. In the closed position, the sealing mechanism 13 is located in the space 17 to seal against the valve seat 11.

[0048] The valve seat 11 and valve body 16 are formed by machining into the stator 12. It will be appreciated that the valve seat 11 and valve body 16 need not be formed by machining, but may be manufactured using any suitable technique (e.g., additive manufacturing) to create a flow passage between the inlet port 18 and the scroll mechanism via the sealing mechanism 13. It will also be appreciated that the inlet port 18, valve seat 11, and valve body 16 may be partially or entirely defined in the inlet cover 15, rather than in the stator 12.

[0049] The sealing mechanism 13 also includes an attachment device 23 configured to mount the sealing mechanism 13 to the stator 12. The attachment device 23 may include a screw structure configured to mate with a complementary structure defined on the stator 12. The attachment device 23 may include a seal, such as an O-ring, to form a fluid-tight attachment. It will be appreciated that any attachment device that forms a fluid-tight seal between the valve body 16 and the sealing mechanism 13 when the sealing mechanism is mounted to the valve body 16 may be used. For example, a push-fit or snap-fit ​​attachment device may be used.

[0050] The inlet valve 10 is a magnetically actuated valve. The actuator of the sealing mechanism 13 includes an electromagnetic coil configured to move an armature 20 so that a rubber pad 22 (shown in FIG. 2 ) attached to one end of the armature 20 engages the valve seat 11 when in the closed position, and to keep the rubber pad 22 and the armature 20 away from the valve seat 11 in the open position to create an inlet passage, thereby defining a flow channel between the inlet port 18 and the scroll mechanism.

[0051] In this embodiment, there are also pressure sensors 26 and 27 for sensing the pressure on either side of the inlet valve 10. In some embodiments, they can send a signal to a control circuit (not shown) that controls the valve opening. In this way, the opening can be controlled to occur when the pressure on the pump side of the inlet valve 10 is the same as or lower than the pressure on the other side of the inlet valve 10.

[0052] Figure 2AThe armature is shown supporting a rubber pad 22 when in the closed position so as to seal with the valve seat 11 to prevent fluid flow between the inlet port 18 and the scroll mechanism. The portion of the armature 20 including the rubber pad 22 is biased toward the valve seat 11 by a biasing member 21 including a coil spring to help create and maintain a fluid-tight seal when the sealing mechanism 13 is in the closed position. It will be appreciated that the entire armature can be biased to achieve substantially the same effect.

[0053] Figure 2B It is shown how the sealing mechanism 13 of the inlet valve is fixed to the pump using attachment means 23. The valve seat 11 is within the stator 12. The sealing mechanism comprises an armature 20 for driving the sealing mechanism 13 towards the open position and biasing means 21 for biasing the sealing mechanism towards the closed position when the armature is not driven. Figure 2B The sealing mechanism is shown in a closed position.

[0054] Figure 3 A vacuum pumping system is schematically shown, which includes a vortex pump 1 supporting a turbomolecular pump 34. The vortex pump 1 has an inlet valve 10, which is combined in a vortex pump mechanism 36, which includes at least a stator 12 and a rotor 14. The vortex pump 1 also includes a control circuit 30, which is configured to control an actuator so that the sealing mechanism 13 of the inlet valve 10 moves between an open position and a closed position. The control circuit 30 also controls a motor 32 to drive the rotor of the vortex pump. The control circuit 30 can control the start of the motor and the opening of the inlet valve in a coordinated manner. In some embodiments, the control circuit 30 can receive a signal from a sensor associated with the vortex pump, the signal indicating when a predetermined rotational speed of the rotor has been achieved after startup. The signal can be used by the control circuit 30 to determine that the pump is in normal operation, and if the signal is not received within a predetermined time, the control circuit 30 can turn off the motor 32.

[0055] The motor 32 is configured to drive the rotor 14. Furthermore, the actuator of the sealing mechanism 13 may be connected to the power supply of the motor 32, or it may have its own dedicated power supply.

[0056] In this embodiment, the scroll pump 1 is used as a backing pump of the TMP 34 .

[0057] In use, the control circuit 30 of the vortex pump 1 controls the actuator to move the sealing mechanism 13 to an open position in response to the pump 1 being turned on, so that normal pumping operation can be carried out. The inlet valve 10 may be opened immediately in response to the pump 1 being turned on, or preferably at some time after the pump 1 is turned on, to allow residual fluid in the pump to be evacuated before the vortex mechanism is fluidly connected to the TMP or processing chamber to which the vortex pump 1 is attached. In this way, backflow to the TMP or processing chamber is alleviated. This can be achieved by opening the inlet valve 10 a predetermined time after the pump 1 is turned on or after the control circuit 30 receives a signal indicating that the pump 1 is operating normally. The signal may indicate that the pump 1 has reached a predetermined rotational speed. Alternatively, this can be achieved using a pressure sensor, such as Figure 1 The pressure sensor shown in the embodiment of . In this embodiment, the vortex pump includes a first pressure sensor 26 installed in the inlet port 18 and a second pressure sensor 27 installed in a portion of the inlet passage between the inlet valve 10 and the vortex mechanism (i.e., on the other side of the inlet valve relative to the first pressure sensor). The control circuit 30 is configured to control the actuator to move the sealing mechanism 13 to the open position when the pressure measured by the second pressure sensor 27 is equal to or lower than the pressure measured at the first sensor 26. This ensures that the pressure within the vortex mechanism is less than or equal to the pressure at the inlet port 18 before the inlet valve 10 is opened. In this way, fluid backflow through the inlet port 18 toward any connected processing chamber or TMP can be alleviated.

[0058] When the scroll pump 1 is turned off, the control circuit 30 controls the actuator to move the sealing mechanism 13 to the closed position to prevent the fluid movement between the TMP or processing chamber and the scroll mechanism. In this way, the backflow from the scroll mechanism to the TMP or processing chamber at a lower pressure is prevented.

[0059] Figure 4 A flow chart illustrating the steps in a method of operating an inlet valve in a scroll pump according to one embodiment is shown. Initially at step S10, a control signal is received to start the pump. Then, at S20, the motor of the pump is energized. At step D5, it is determined whether an inlet valve opening condition is met. The opening condition may be that a predetermined time has passed, or a normal operating condition signal has been received. The normal operating condition signal may be generated in response to the rotor reaching a predetermined speed within a predetermined time after startup.

[0060] In response to determining that the operating condition has been met, a step S30 of opening the inlet valve is performed.The predetermined time may be adjustable so that in some embodiments there may be an initial step when setting up the pump of setting the predetermined time to a value suitable for the particular planned operation of the pump.

[0061] In other embodiments, there may not be such an inlet valve opening condition, and the inlet valve may simply open in response to a control signal to start the pump. This has the advantage of simplicity, but has the following disadvantages: when initially connected to the chamber being pumped, the pump will be at or near atmospheric pressure, and the chamber being pumped may be at a high vacuum.

[0062] The scroll pump will then operate normally until a signal is received to stop the motor at S40 , in response to which the inlet valve may be closed at step S50 .

[0063] Figure 3 The control circuit 30 may be configured according to Figure 4 The control signal is generated according to the steps of the method described in order to control the operation of the inlet valve.

[0064] Various modifications to the embodiments described herein will be apparent to those skilled in the art. For example, the rubber pad 11 may be any surface suitable for sealing with the valve seat 11. Furthermore, the biasing member 21 need not be a coil spring, and may be any suitable biasing member configured to push the armature 20 toward the valve seat 11 when in the closed position.

[0065] In summary, the valve body 16 is integrated into the pump stator 12 to save cost and space. The body 16 of the inlet valve is integrated into the vortex pump 1, thereby eliminating the connection fittings and additional space required for a separate external inlet valve. The inlet valve 10 can be a magnetically actuated valve, such as a solenoid valve. Solenoid valves are used because of their simple operation and low cost. The valve body 16 and the valve seat 11 are machined into the vortex stator 12 or the inlet cover 15.

[0066] In use, valve 10 opens when pump 1 is running, and closes when pump 1 is stopped. The valve coil (sealing mechanism 13) may be connected to the motor power supply of pump 1. A delay circuit, referred to above as a control circuit, may be included to delay the opening of valve 10 for a few seconds to allow pump 1 to accelerate to full speed and to evacuate the inlet space of pump 1 before opening valve 10.

[0067] Although illustrative embodiments of the present invention have been disclosed herein in detail with reference to the accompanying drawings, it is to be understood that the present invention is not limited to the specific embodiments and that various changes and modifications may be implemented therein by those skilled in the art without departing from the scope of the present invention as defined by the appended claims and their equivalents.

[0068] Reference numerals

[0069] 1 Vortex pump

[0070] 10 Inlet valve

[0071] 11 Valve seat

[0072] 12 Stator

[0073] 13 Sealing mechanism

[0074] 14 Rotor

[0075] 15 Inlet cover

[0076] 16 Valve body

[0077] 17 Space

[0078] 18 Entry Port

[0079] 20 Armature

[0080] 21 Offset member

[0081] 22 pads

[0082] 23 Attachment

[0083] 25 Pump housing

[0084] 26, 27 Pressure sensor

[0085] 30 Control circuit

[0086] 32 Motor

[0087] 34 Turbomolecular pump

[0088] 36 Vortex pump mechanism

Claims

1. A vortex pump inlet valve, comprising: a valve seat formed by at least one of a stator and an inlet cover of the scroll pump; as well as a sealing mechanism mounted to the stator or the inlet cover, the sealing mechanism including an actuator configured to move the sealing mechanism between an open position in which a scroll mechanism of the scroll pump and an inlet port are fluidly connected and a closed position in which the sealing mechanism engages the valve seat to seal the scroll mechanism from the inlet port.

2. The inlet valve according to claim 1, wherein: The sealing mechanism is configured to cooperate with at least one of the stator and the inlet cover to define a portion of an inlet passage of the scroll pump when the sealing mechanism is in the open position, the inlet passage defining a flow passage between the inlet port and the scroll mechanism.

3. The inlet valve according to claim 2, wherein: The valve seat is formed by a perimeter of a portion of the inlet passage.

4. An inlet valve according to any preceding claim, wherein: The actuator includes an electromagnetic coil.

5. An inlet valve according to any preceding claim, wherein: The inlet valve includes a valve body and the valve seat, and the valve body and the valve seat are formed by at least one of the inlet cover and the stator.

6. A vortex pump, comprising: Entry port; A scroll mechanism formed by a stator and a rotor; Inlet cover; as well as An inlet valve as claimed in any preceding claim.

7. The scroll pump of claim 6, further comprising a control circuit configured to control the actuator to move the sealing mechanism between the open position and the closed position.

8. The vortex pump according to claim 7, wherein: The control circuit is configured to control the actuator to move the sealing mechanism to the closed position in response to the scroll pump being closed.

9. The vortex pump according to claim 7 or claim 8, wherein: The control circuit is configured to control the actuator to move the sealing mechanism to the open position in response to the pump being turned on.

10. A vortex pump according to any one of claims 7 to 9, wherein: The control circuit is configured to control the actuator to move the sealing mechanism to the open position a predetermined time after the pump is turned on.

11. A vortex pump according to any one of claims 7 to 9, wherein: The control circuit is configured to control the actuator to move the sealing mechanism to the open position in response to receiving a signal indicating that the pump is operating normally.

12. The scroll pump according to claim 11, wherein: The signal includes an indication that the pump has reached a predetermined rotational speed.

13. The vortex pump according to claim 7 or claim 8, further comprising: a first pressure sensor installed in the inlet port and a second pressure sensor installed between the inlet valve and the scroll mechanism, wherein the control circuit is configured to control the actuator to move the sealing mechanism to the open position when the pressure measured by the second pressure sensor is equal to or lower than the pressure measured at the first sensor.

14. A vortex pump according to any one of claims 7 to 13, wherein: The control circuit is configured to control a motor configured to drive the scroll mechanism.

15. A vortex pump according to any one of claims 6 to 14, wherein: The scroll pump is a vacuum pump. 16 . A vacuum pump system comprising a scroll pump according to claim 6 and a turbomolecular pump, wherein the scroll pump is arranged as a backing pump of the turbomolecular pump.

17. A method for controlling an inlet valve of a scroll vacuum pump, comprising the following steps: energizing a motor that drives a rotor of a scroll pump; determining whether an inlet valve opening condition has been satisfied, the inlet valve opening condition comprising one of: a predetermined time has elapsed or a control signal has been received indicating that the rotor has reached a predetermined speed; In response to the condition being met, the inlet valve of the scroll pump is opened.

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