Beam shaping light path system and control method

Abstract

The invention provides a light beam shaping light path system and a control method, and relates to the technical field of laser. The light beam shaping light path system comprises a laser transmitter, a beam expander, a light beam shaper, a laser galvanometer and a liquid field lens which are arranged in sequence, the liquid field lens comprises a liquid lens group and a pressure controller, and the pressure controller is used for applying pressure to the liquid lens group according to the curvature signal so as to adjust the curvature of the liquid lens group. The liquid field lens is applied to the beam shaping light path system, and the curvature of the liquid lens group in the liquid field lens is adjusted through the curvature signal, so that non-mechanical zooming can be realized, thereby avoiding the situation that the whole beam shaping light path system is moved to realize zooming, further avoiding vibration caused by mechanical moving zooming, and improving the zooming precision. The stability of the relative position of each device in the light beam shaping light path system is ensured, so that the stability of the whole light beam shaping light path system is good, and the collimation of the light path is high.

Description

Technical Field

[0001] The present disclosure relates to the field of laser technology, and particularly to a beam shaping optical path system and a control method therefor. Background Art

[0002] In the field of laser technology, a beam shaping optical path system is used to shape a laser beam and then emit it.

[0003] In related technologies, mechanical zoom is adopted in the beam shaping optical path system, and a mechanical structure capable of moving the entire beam shaping optical path system as a whole is added to adjust the focus of the laser output by the beam shaping optical path system.

[0004] However, the beam shaping optical path system has strict requirements on the relative positions of various devices on the optical path. Using the method of moving the beam shaping optical path system as a whole by a mechanical structure has the problem of poor stability, which easily causes deviation of beam transmission and results in low beam collimation.

[0005] It should be noted that the information disclosed in the above background art section is only used to enhance the understanding of the background of the present disclosure, and thus may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention

[0006] The present disclosure provides a beam shaping optical path system and a control method therefor, which at least overcome the problem of low beam collimation in related technologies to a certain extent.

[0007] Other features and advantages of the present disclosure will become apparent through the following detailed description, or will be partially learned through the practice of the present disclosure.

[0008] According to one aspect of the present disclosure, there is provided a beam shaping optical path system, including: a laser emitter, a beam expander, a beam shaper, a laser galvanometer, and a liquid field lens arranged in sequence; the liquid field lens includes a liquid lens group and a pressure controller, and the pressure controller is configured to apply pressure to the liquid lens group according to a curvature signal to adjust the curvature of the liquid lens group.

[0009] In an embodiment of the present disclosure, it further includes: a collimation calibrator, which is located between the laser emitter and the beam expander and is configured to adjust the incident angle and position of the laser incident on the beam expander.

[0010] In one embodiment of the present disclosure, the collimation calibrator includes: a semi-reflective and semi-transmissive lens group for reflecting and transmitting the laser emitted by the laser emitter, wherein the reflected laser is incident on the beam expander; a position detector for receiving the laser transmitted by the semi-reflective and semi-transmissive lens group and generating the position signal according to the transmitted laser; a collimation controller for generating a control signal according to the position signal; and a lens adjusting device for adjusting the mirror orientation and position of the semi-reflective and semi-transmissive lens group according to the control signal to adjust the incident angle and position of the laser incident on the beam expander.

[0011] In one embodiment of the present disclosure, it further includes: a folding mirror located between the position detector and the semi-reflective and semi-transmissive lens group.

[0012] In one embodiment of the present disclosure, it further includes: a ranging device for obtaining the distance information between the surface to be marked and the light-emitting surface of the liquid field lens; and a curvature controller for generating the curvature signal according to the distance information.

[0013] According to one aspect of the present disclosure, there is provided a method for controlling a beam shaping optical path, including: emitting a laser; performing beam expansion processing on the laser so that the spot size of the expanded laser meets a preset condition; shaping the expanded laser to obtain the shaped laser; deflecting the propagation direction of the shaped laser; and emitting the deflected laser through a liquid field lens, wherein the curvature of the liquid lens group in the liquid field lens is adjusted based on a curvature signal.

[0014] In one embodiment of the present disclosure, before performing the beam expansion processing on the laser, it further includes: adjusting the propagation direction of the laser so that the adjusted propagation direction meets a preset beam expansion condition.

[0015] In one embodiment of the present disclosure, adjusting the propagation direction of the laser includes: performing transmission and reflection processing on the laser to obtain the transmitted laser and the reflected laser, and the reflected laser is used for beam expansion; receiving and analyzing the incident position of the transmitted laser by the position detector to obtain position information; generating a control signal corresponding to the position information; and adjusting the propagation direction of the reflected laser according to the control signal.

[0016] In one embodiment of the present disclosure, before receiving and determining the incident position of the transmitted laser by the position detector to obtain position information, it further includes: increasing the optical path length of the transmitted laser incident on the position detector.

[0017] In one embodiment of the present disclosure, it further includes: obtaining the distance information between the surface to be marked and the light-emitting surface of the liquid field lens; generating a curvature signal corresponding to the distance information to facilitate adjusting the curvature of the liquid lens group based on the curvature signal.

[0018] The technical solutions provided by the embodiments of the present disclosure at least include the following beneficial effects:

[0019] In the technical solutions provided by the embodiments of the present disclosure, by applying a liquid field lens in the beam shaping optical path system and adjusting the curvature of the liquid lens group in the liquid field lens through a curvature signal, non-mechanical zoom can be achieved, thereby avoiding moving the entire beam shaping optical path system to achieve zoom, and further avoiding the vibration caused by mechanical moving zoom, ensuring the stability of the relative positions of the various components in the beam shaping optical path system, and making the entire beam shaping optical path system have good stability and high collimation of the optical path.

[0020] Furthermore, the speed of zooming by changing the curvature of the liquid field lens is fast and the accuracy is high, which can meet the requirements of high-speed zooming.

[0021] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings herein are incorporated into the specification and form a part of the specification, showing embodiments consistent with the present disclosure and used together with the specification to explain the principles of the present disclosure. Obviously, the drawings in the following description are only some embodiments of the present disclosure, and those of ordinary skill in the art can obtain other drawings based on these drawings without creative efforts.

[0023] Figure 1 Schematic diagram of a beam shaping optical path system in an embodiment of the present disclosure;

[0024] Figure 2 Schematic diagram of a liquid field lens in an embodiment of the present disclosure;

[0025] Figure 3 Schematic diagram of a beam shaping optical path system in another embodiment of the present disclosure;

[0026] Figure 4 Schematic diagram of a semi-reflective semi-transmissive lens group and a position detector in an embodiment of the present disclosure;

[0027] Figure 5 Flowchart of a beam shaping optical path control method in an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in various forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The features, structures, or characteristics described may be combined in any suitable manner in one or more embodiments.

[0029] In addition, the accompanying drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus repeated descriptions thereof will be omitted. Some of the block diagrams shown in the drawings are functional entities and do not necessarily correspond to physically or logically independent entities. These functional entities may be implemented in software, or in one or more hardware modules or integrated circuits, or in different networks and / or processor devices and / or microcontroller devices.

[0030] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules, or units, and are not used to limit the order or interdependence relationship of the functions performed by these devices, modules, or units.

[0031] It should be noted that the modifiers "a" and "multiple" mentioned in the present disclosure are illustrative rather than restrictive. Those skilled in the art should understand that, unless clearly specified otherwise in the context, it should be understood as "one or more".

[0032] In the related art, since the formed surface after spot shaping is only available within a certain range (a relatively small range) on the focal plane, the height requirement of the working surface relative to the beam shaping optical path system is very strict. By mechanically moving the zoom (i.e., moving the entire beam shaping optical path system up and down as a whole) to make the height of the working surface located on the focal plane, the relative positions between the various components in the beam shaping optical path system will change due to the vibration generated during the movement, resulting in poor collimation of the optical path in the beam shaping optical path system (wherein, the poor collimation is mainly reflected in the deviation of the transmission position of the beam).

[0033] In addition, it is difficult to ensure that the entire beam shaping optical path system moves vertically up and down relative to the working surface by the way of mechanical moving zoom. There is usually a certain deviation when the beam shaping optical path system moves up and down relative to the working surface, resulting in the size and shape of the spot emitted from the beam shaping optical path system on the working surface not meeting the requirements. Moreover, when there are many components included in the beam shaping optical path system, the platform carrying the beam shaping optical path system will be difficult to maintain the verticality during the overall up and down movement of the beam shaping optical path system due to the large number of components and heavy load, and it is more likely to deviate, affecting the spot quality.

[0034] In addition, in long-term applications, mechanical moving zoom may also result in insufficient accuracy and poor verticality during movement due to wear, thus leading to poor spot quality (for example, the shape and size of the spot do not meet the requirements, the energy distribution is uneven, etc.).

[0035] In the related art, it is difficult to maintain the stability of the optical path collimation of the beam shaping optical path system in the face of influences such as vibration and ambient temperature changes. After the optical path deflects, manual adjustment by the debugging personnel is required, which has high requirements for the debugging personnel and the debugging process is complex and time-consuming.

[0036] In response to this, the present disclosure provides a beam shaping optical path system that realizes non-mechanical zoom through a liquid field lens. A pressure controller in the liquid field lens applies pressure to the liquid lens group, thereby changing the curvature of the liquid lens group, and thus changing the focal plane of the beam shaping optical path system to match the focal plane of the beam shaping optical path system with the working surface. In this way, there is no need to move the entire beam shaping optical path system, avoiding vibrations caused by movement, which is beneficial to maintaining the relative positions of the various components in the beam shaping optical path system stable, thus ensuring the collimation of the optical path.

[0037] Furthermore, non-mechanical zoom also does not need to consider the verticality when moving the entire beam shaping optical path system, and there is no mechanical structure wear caused by moving the entire beam shaping optical path system, thereby ensuring that the spot can have high quality.

[0038] Furthermore, the method of adjusting the curvature of the liquid lens group using a pressure controller has a faster zoom speed and higher accuracy compared to mechanical zoom.

[0039] As Figure 1 shown, a beam shaping optical path system in an embodiment of the present disclosure may include: a laser emitter 101, a beam expander 102, a beam shaper 103, a laser galvanometer 104, and a liquid field lens 105 arranged in sequence.

[0040] As Figure 2 shown, the liquid field lens 105 includes a liquid lens group 1051 and a pressure controller 1502. The pressure controller 1052 is used to apply pressure to the liquid lens group 1051 according to the curvature signal to adjust the curvature of the liquid lens group 1501.

[0041] Regarding the specific form in which the curvature signal controls the pressure controller 1052, the embodiments of the present disclosure do not impose any restrictions. For example, the curvature signal controls the pressure controller 1052 through voltage, and controls the pressure controller 1052 through curvature signals of different voltages, so that the pressure controller 1052 applies different pressures to the liquid lens group 1051 according to different voltages, thereby enabling the liquid lens group 1051 to have different curvatures. For another example, the curvature signal controls the pressure controller 1052 through current, and controls the pressure controller 1052 through curvature signals of different currents, so that the pressure controller 1052 applies different pressures to the liquid lens group 1051 according to different current magnitudes, thereby enabling the liquid lens group 1051 to have different curvatures.

[0042] Among them, the curvature signal is input to the pressure controller 1052 through the control line 1053 outside the liquid field lens.

[0043] Regarding how the curvature signal is determined, the embodiments of the present disclosure do not impose any restrictions. For example, the distance information between the working surface and the liquid lens group 1051 can be determined in advance, and then the processing device determines the specific curvature signal information (for example, specific voltage value or current value) according to this distance information. Then, the curvature controller that generates the curvature signal generates a curvature signal according to this curvature signal information. Among them, the processing device that determines the specific curvature signal according to the distance can be the same device as the curvature controller or different devices, and the embodiments of the present disclosure do not impose any restrictions on this. When the processing device and the curvature controller are not the same device, the processing device is used to receive the distance information between the working surface and the liquid lens group 1051, and determine the specific curvature signal information according to this distance information. Then, this specific curvature signal information is sent to the curvature controller, and the curvature controller generates a corresponding curvature signal.

[0044] Regarding how to obtain this distance information and input the distance information to the processing device, the embodiments of the present disclosure do not impose any restrictions. For example, the distance information can be manually obtained and then input to the processing device.

[0045] In another embodiment, the beam shaping optical path system further includes a ranging device and a curvature controller. The ranging device can obtain the distance information between the surface to be marked (working surface) and the light-emitting surface of the liquid field lens (liquid lens group 1051), and send this distance information to the curvature controller. Among them, the curvature controller can generate a curvature signal according to this distance information. That is to say, the curvature controller has the ability to convert the distance information into specific curvature signal information and generate a curvature signal according to the specific curvature signal information.

[0046] Among them, the surface to be marked is the surface to be marked by the laser spot emitted by the beam shaping optical path system. This surface can be a plane or a curved surface, and the embodiments of the present disclosure do not limit this. The surface to be marked is also the working surface.

[0047] Regarding how the distance measuring device specifically realizes the measurement of the distance, the embodiments of the present disclosure do not limit this. In one embodiment, the distance measuring device is a laser distance measuring device. The laser distance measuring device measures the distance between the surface to be marked and the light-emitting surface of the liquid field lens through laser, and then obtains the distance information. The laser distance measuring device can quickly determine the distances between multiple positions on the surface to be marked and the light-emitting surface of the liquid field lens, and can meet the requirements for distance information when the liquid field lens 105 quickly zooms. In addition, the laser distance measuring device can obtain the distance information between the surface to be marked and the light-emitting surface of the liquid field lens in real time, so that the beam shaping optical path system can more quickly and efficiently realize marking on the surface to be marked.

[0048] Regarding how the curvature controller generates a curvature signal according to the distance information, the embodiments of the present disclosure do not limit this. In one embodiment, a correspondence relationship between the curvature signal information and the distance information is configured in the curvature controller. Through this correspondence relationship, the curvature controller can determine the specific curvature signal information according to the distance information, and then generate the corresponding curvature signal.

[0049] The curvature signal is input to the pressure controller 1052 through the control line 1053. The pressure controller 1052 adjusts the pressure applied to the liquid lens group 1051 according to the curvature signal, thereby changing the curvature of the liquid lens group 1051, further changing the focal length of the liquid lens group 1051, and further changing the position of the focal plane of the liquid lens group 1051 (i.e., the focal plane of the entire beam shaping optical path system), so that the focal plane corresponds to the surface to be marked, facilitating marking.

[0050] In one embodiment, as Figure 3 shown, the beam shaping optical path system further includes: a collimation and calibration device 301. Among them, the collimation and calibration device 301 is located between the laser emitter 101 and the beam expander 102, and is used to adjust the incident angle of the laser incident on the beam expander 102.

[0051] The requirements for the incident position and incident angle of the beam on the beam expander 102 and the beam shaper 103 are extremely high. Both the incident angle and the incident position will affect the quality of the spot emitted by the beam shaping optical path system. Whether the beam shaping optical path system is moved as a whole for the convenience of marking, or the device expands and contracts due to environmental temperature changes, it will cause changes in the position and angle of the laser beam incident on the beam expander 102, and further affect the incident position and incident angle of the laser emitted from the beam expander 102 when entering the beam shaper 103, and further affect the quality of the spot emitted by the beam shaping optical path system.

[0052] By arranging a collimation calibrator 301 between the laser emitter 101 and the beam expander 102, it is possible to automatically calibrate the incident position and incident angle of the laser before it exits the laser emitter 101 and enters the beam expander 102, thereby ensuring the collimation of the optical path and the quality of the light spot emitted by the beam shaping optical path system. Compared with manually adjusting and calibrating the optical path to keep it collimated, using the collimation calibrator 301 to calibrate the incident angle and position of the laser has higher efficiency and can be calibrated in real time without shutting down the beam shaping optical path system for calibration.

[0053] Regarding how the collimation calibrator 301 specifically achieves this, the embodiments of the present disclosure do not make any limitations. In one embodiment, as Figure 3 shown, the collimation calibrator 301 includes: a semi-reflective semi-transmissive lens group 3011, a position detector 3012, a collimation controller 3013, and a lens adjustment device 3014.

[0054] Among them, the semi-reflective semi-transmissive lens group 3011 is used to reflect and transmit the laser emitted by the laser emitter 101. Among them, the reflected laser is incident on the beam expander 102. The position detector 3012 is used to receive the laser transmitted by the semi-reflective semi-transmissive lens group 3011 and generate a position signal based on the transmitted laser. The position detector 3012 can send the position information to the collimation controller 3013, and this position signal can represent the incident angle and incident position when the laser is incident on the beam expander 102. Among them, the position detector 3012 and the collimation controller 3013 can be connected by wire or wirelessly, so that the position detector 3012 can send the position information to the collimation controller 3013.

[0055] The collimation controller 3013 is used to generate a control signal based on this position signal, and the collimation controller 3013 can send this control signal to the lens adjustment device 3014. Among them, the lens adjustment device 3014 and the collimation controller 3013 can be connected by wire or wirelessly, so that the collimation controller 3013 can send the control signal to the lens adjustment device 3014.

[0056] The lens adjustment device 3014 is used to adjust the mirror orientation and position of the semi-reflective semi-transmissive lens group 3011 according to this control signal to adjust the incident angle and incident position of the laser incident on the beam expander 102.

[0057] It should be noted that Figure 3 the position of the collimation controller 3013 is only exemplary. Regarding the specific position of the collimation controller 3013, it can be determined according to the specific design of the beam shaping optical path system, and the present disclosure does not make any limitations in this regard.

[0058] It should be noted that the semi-reflective semi-transmissive lens group 3011 can be arranged on the lens adjusting device 3014, so as to facilitate the lens adjusting device 3014 to adjust the orientation of the semi-reflective semi-transmissive lens group 3011.

[0059] Among them, the semi-reflective semi-transmissive lens group 3011 and the position detector 3012 can be as Figure 4 shown.

[0060] Among them, since the positions of the laser emitter 101 and the position detector 3012 are fixed, therefore, according to the position where the laser transmitted from the semi-reflective semi-transmissive lens group 3011 falls on the position detector 3012, the orientation of the current mirror surface of the semi-reflective semi-transmissive lens group 3011 and the landing point of the laser on the semi-reflective semi-transmissive lens group 3011 can be determined. Furthermore, since the position of the beam expander 102 is fixed, the incident position and incident angle of the laser reflected by the semi-reflective semi-transmissive lens group 3011 on the beam expander 102 can be further determined. Based on this, the mirror surface orientation and position of the semi-reflective semi-transmissive lens group 3011 can be controlled through a control signal, so as to adjust the incident angle and incident position of the laser reflected by the semi-reflective semi-transmissive lens group 3011 incident on the beam expander 102.

[0061] In another embodiment, the semi-reflective semi-transmissive lens group 3011 can be replaced by a beam splitting device, and the laser emitted from the laser emitter 101 is split into at least two laser beams by the beam splitting device, one of which is used to enter the position detector 3012 to facilitate generating a position signal; and another one is selected from the other laser beams to enter the beam expander 102. Since the relative positions between the beams split by the beam splitting device are determined, therefore, the position signal generated by the position detector 3012 can represent the incident angle and incident position when the laser is incident on the beam expander 102. Furthermore, the lens adjusting device 3014 can adjust the incident angle and incident position of the laser incident on the beam expander 102 by adjusting the orientation of the beam splitting device.

[0062] Regarding the specific structure of the lens adjusting device 3014, the embodiments of the present disclosure do not make any limitations, and it can be determined according to the specific design of the beam shaping optical path system. In one embodiment, the lens adjusting device 3014 is a device that can achieve three-dimensional adjustment, for example, a three-dimensional electric adjusting bracket.

[0063] When it is analyzed through the position information generated by the position detector 3012 that the incident angle and incident position of the laser incident on the beam expander 102 do not meet the design requirements, the generated control signal can adjust the orientation of the semi-reflective semi-transmissive lens group 3011 (or the beam splitting device, or other devices that can achieve beam splitting and the positions between the split beams can be determined relative to each other), so as to adjust the incident angle and incident position of the laser incident on the beam expander 102, thereby ensuring the collimation of the optical path in the beam shaping optical path system in real time and ensuring the quality of the light spot emitted by the beam shaping optical path system.

[0064] In one embodiment, the beam shaping optical path system may further include: a folding mirror. The folding mirror is located between the position detector 3012 and the semi-reflective and semi-transmissive lens group 3011. It should be noted that the application of the semi-reflective and semi-transmissive lens group 3011 in this embodiment is only exemplary, and any device that can split light and whose relative positions of the split laser beams can be determined can be applied here.

[0065] By disposing a folding mirror between the position detector 3012 and the semi-reflective and semi-transmissive lens group 3011, the optical path length of the laser transmitted through the semi-reflective and semi-transmissive lens group 3011 can be increased, so that the change in the position of the laser spot on the position detector 3012 can be more easily detected. Thus, a more accurate control signal can be generated based on this position information, and then the incident angle and incident position of the laser incident on the beam expander 102 can be better adjusted according to this control signal, thereby better ensuring the collimation of the optical path and the quality of the spot output by the beam shaping optical path system.

[0066] In another embodiment, to detect the quality of the spot (such as shape, energy distribution uniformity, and size) output by the beam shaping optical path system, the beam shaping optical path system may further include: a spot detector.

[0067] In another embodiment, to detect whether the energy of the spot output by the beam shaping optical path system is uniform over a period of time, the beam shaping optical path system may further include: a power meter; or, a power meter and an attenuator. The attenuator is used to reduce the power of the laser beam so that the power of the spot incident on the power meter can meet the design requirements of the power meter.

[0068] In another embodiment, the beam shaping optical path system further includes a fixing structure for fixing each device in the beam shaping optical path system to keep the relative positions of each device in the beam shaping optical path system fixed.

[0069] In another aspect, an embodiment of the present disclosure also provides a method for controlling a beam shaping optical path, as Figure 5 shown, the method includes S501 to S505. The specific implementation of S501 to S505 can refer to the specific implementation of the above beam shaping optical path system.

[0070] S501, emit laser light.

[0071] In one embodiment, the laser light can be emitted by a laser emitter.

[0072] S502, perform beam expansion processing on the laser light so that the spot size of the expanded laser light meets the preset conditions.

[0073] In one embodiment, the laser can be beam-expanded by a beam expander so that the spot size of the laser meets the preset conditions.

[0074] The specific size of the spot size corresponding to the preset conditions is not limited in the embodiments of the present disclosure. It can be determined according to the specific design of the beam shaping optical path system.

[0075] To expand the laser, the laser needs to be expanded to meet the incident size requirements of the beam shaper. The incident angle and incident position of the laser on the beam expander have a great influence on the beam expansion effect. In one embodiment, before expanding the laser, it further includes: adjusting the propagation direction of the laser so that the adjusted propagation direction meets the preset beam expansion conditions.

[0076] Among them, the preset beam expansion conditions are used to limit the incident angle and position of the laser on the beam expander. For example, the beam expander is designed to require that the angle between the incident laser and the light incident surface of the beam expander is within a predetermined angle range (or a predetermined angle), and the incident position is also within a predetermined range (or a predetermined position). The incident angle and incident position of the laser that meets the preset beam expansion conditions when entering the beam expander can meet the design requirements of the beam expander, thereby ensuring the beam expansion effect. In addition, the incident angle and position on the beam expander will also affect the propagation direction of the expanded laser. To meet the design requirements, the expanded laser also needs to have a preset propagation direction. In some embodiments, the incident angle and incident position of the laser that meets the preset beam expansion conditions when entering the beam expander can also meet the requirement that the propagation direction of the expanded laser meets the requirements of the entire beam shaping optical path system.

[0077] The embodiments of the present disclosure do not limit how to automatically adjust the propagation direction of the laser. In one embodiment, a collimation calibrator capable of automatically calibrating the propagation direction of the laser can be applied to adjust the propagation direction of the laser. The specific structure of the collimation calibrator is not limited in the embodiments of the present disclosure. For details, reference can be made to the description of the collimation calibrator in the corresponding embodiments of the above beam shaping optical path system.

[0078] In one embodiment, adjusting the propagation direction of the laser includes: performing transmission and reflection processing on the laser to obtain transmitted laser and reflected laser, and the reflected laser is used for beam expansion; receiving and analyzing the incident position of the transmitted laser by a position detector to obtain position information; generating a control signal corresponding to the position information; and adjusting the propagation direction of the reflected laser according to the control signal.

[0079] In one embodiment, a semi-reflective and semi-transmissive lens group can be applied to transmit and reflect the laser. In one embodiment, a collimation controller can be applied to generate a control signal corresponding to the position information. For why the position information can generate a control signal, reference can be made to the description in the corresponding embodiment of the above beam shaping optical path system. In one embodiment, the lens adjusting device in the corresponding embodiment of the above beam shaping optical path system can be applied to adjust the propagation direction of the reflected laser according to the control signal.

[0080] In one embodiment, before receiving and determining the incident position of the transmitted laser by the position detector to obtain the position information, it further includes: increasing the optical path length of the transmitted laser entering the position detector. By increasing the optical path length of the transmitted laser, the change in the position of the laser spot on the position detector can be more easily detected, so that a more accurate control signal can be generated according to the position information, and then the incident angle and incident position of the laser incident on the beam expander can be better adjusted according to the control signal, thereby better ensuring the collimation of the optical path and the quality of the spot output by the beam shaping optical path system.

[0081] The embodiments of the present disclosure do not limit how to increase the optical path length of the transmitted laser entering the position detector. For example, the optical path length is increased by adding a folding mirror.

[0082] By adjusting the incident angle and position of the laser, it is possible to automatically calibrate the incident position and incident angle before the laser is emitted from the laser emitter and enters the beam expander, thereby ensuring the collimation of the optical path and the quality of the spot emitted by the beam shaping optical path system. Compared with manually adjusting and calibrating the optical path to keep the optical path collimated, calibrating the incident angle and position of the laser using a collimation calibrator has higher efficiency and can be calibrated in real time without shutting down the beam shaping optical path system for calibration.

[0083] S503, shape the expanded laser to obtain the shaped laser.

[0084] In one embodiment, a beam shaper can be applied to shape the expanded laser to obtain the shaped laser.

[0085] The embodiments of the present disclosure do not limit the specific shape of the shaped laser spot. For example, the spot shape of the shaped laser is rectangular, or circular, or elliptical, or other shapes.

[0086] S504, deflect the propagation direction of the shaped laser.

[0087] In one embodiment, a laser galvanometer can be applied to deflect the propagation direction of the shaped laser.

[0088] In another embodiment, a lens group capable of realizing optical path deflection can also be applied to deflect multiple beams of shaped laser in the propagation direction.

[0089] S505, emit the deflected laser through the liquid field lens, and adjust the curvature of the liquid lens group in the liquid field lens based on the curvature signal.

[0090] In one embodiment, the control method further includes: obtaining distance information between the surface to be marked and the light-emitting surface of the liquid field lens; generating a curvature signal corresponding to the distance information, so as to adjust the curvature of the liquid lens group based on the curvature signal.

[0091] Among them, for the meanings of the surface to be marked and the light-emitting surface of the liquid field lens, reference can be made to the corresponding descriptions in the above-mentioned beam shaping optical path system.

[0092] In one embodiment, the liquid field lens includes a pressure controller and a liquid lens group. The pressure controller can identify the curvature signal and apply a corresponding pressure to the liquid lens group according to the curvature signal, thereby realizing the adjustment of the curvature of the liquid lens group.

[0093] Regarding how to obtain the distance information, reference can be made to the corresponding descriptions in the above-mentioned beam shaping optical path system. Regarding the curvature signal, reference can be made to the corresponding descriptions in the above-mentioned beam shaping optical path system.

[0094] Multiple beams of shaped laser deflected and emitted through the liquid field lens can realize non-mechanical zoom of the beam shaping optical path system. Compared with mechanical zoom, it avoids the vibration caused by mechanical movement zooming, ensures the stability of the relative positions of various components in the beam shaping optical path system, and makes the whole beam shaping optical path system have good stability and high collimation of the optical path. Further, the speed of zooming by changing the curvature of the liquid field lens is fast and the accuracy is high, which can meet the requirements of high-speed zooming.

[0095] It should be understood that the various steps recorded in the method embodiments of the present disclosure can be executed in different orders and / or executed in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present disclosure is not limited in this regard.

[0096] Those skilled in the art will readily think of other embodiments of the present disclosure after considering the specification and practicing the invention disclosed herein. The present disclosure is intended to cover any variations, uses, or adaptations of the present disclosure, which follow the general principles of the present disclosure and include known common knowledge or conventional technical means in the technical field not disclosed by the present disclosure. The specification and embodiments are only regarded as exemplary, and the true scope of the present disclosure is pointed out by the appended claims.

Claims

1. A beam shaping optical path system, characterized in that: include: A laser emitter, a beam expander, a beam shaper, a laser galvanometer and a liquid field mirror are arranged in sequence; The liquid field mirror comprises a liquid lens group and a pressure controller, and the pressure controller is used to apply pressure to the liquid lens group according to a curvature signal to adjust the curvature of the liquid lens group.

2. The beam shaping optical path system according to claim 1, characterized in that: Also includes: A collimator is located between the laser emitter and the beam expander, and is used to adjust the incident angle and position of the laser beam incident on the beam expander.

3. The beam shaping optical path system according to claim 2, characterized in that: The collimator comprises: A half-reflecting and half-mirror group, used for reflecting and transmitting the laser light emitted by the laser transmitter, wherein the reflected laser light is injected into the beam expander; A position detector, used for receiving the laser light transmitted by the semi-reflective and semi-mirror group, and generating a position signal according to the transmitted laser light; A collimation controller, configured to generate a control signal according to the position signal; The lens adjustment device is used to adjust the mirror direction and position of the half-reflective and half-mirror group according to the control signal, so as to adjust the incident angle and position of the laser incident on the beam expander.

4. The beam shaping optical path system according to claim 3, characterized in that: Also includes: The folding mirror is located between the position detector and the half-reflecting half-mirror group.

5. The beam shaping optical path system according to any one of claims 1 to 4, characterized in that: Also includes: A distance measuring device, used to obtain distance information between the surface to be dotted and the light emitting surface of the liquid field mirror; A curvature controller is used to generate the curvature signal according to the distance information.

6. A beam shaping optical path control method, characterized in that: include: Firing lasers; Performing beam expansion processing on the laser so that the spot size of the laser after beam expansion meets the preset conditions; shaping the beam-expanded laser to obtain a shaped laser; Deflecting the propagation direction of the shaped laser; The deflected laser light is emitted through a liquid field mirror, and the curvature of a liquid lens group in the liquid field mirror is adjusted based on a curvature signal.

7. The method for controlling the light path of a beam shaping according to claim 6, characterized in that: Before adjusting the spot size of the laser, the method further includes: Adjust the propagation direction of the laser so that the adjusted propagation direction meets the preset beam expansion condition.

8. The beam shaping optical path control method according to claim 7, characterized in that: The adjusting the propagation direction of the laser comprises: Performing transmission and reflection processing on the laser to obtain transmitted laser and reflected laser, wherein the reflected laser is used for beam expansion; Receiving and analyzing the incident position of the transmitted laser by the position detector to obtain position information; generating a control signal corresponding to the position information; The propagation direction of the reflected laser light is adjusted according to the control signal.

9. The method for controlling the light path of beam shaping according to claim 8, characterized in that: Before the position detector receives and determines the incident position of the transmitted laser and obtains the position information, the method further includes: Increase the optical path length of the transmitted laser beam entering the position detector.

10. The method for controlling the light path of a beam shaping according to any one of claims 6 to 9, characterized in that: Also includes: Acquiring distance information between the surface to be dotted and the light emitting surface of the liquid field mirror; A curvature signal corresponding to the distance information is generated so as to adjust the curvature of the liquid lens assembly based on the curvature signal.

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