Film coating device

Abstract

The invention discloses a thin film coating device. The thin film coating device comprises a conveying mechanism, a base plate arranged on the conveying mechanism and a plurality of coating units arranged above the base plate in a linear mode. The coating unit comprises a coating tool bit, a liquid injection mechanism, an adjusting mechanism and a detection mechanism; the liquid injection mechanism is communicated with the coating tool bit and is used for injecting liquid into the coating tool bit; and the detection mechanism is arranged in front of the coating unit and is used for detecting the distance between the coating tool bit and the glass arranged on the substrate in real time and feeding back the detected distance information to the adjusting mechanism in real time. A plurality of coating units are arranged to replace a long coating tool bit with poor straightness, and each coating unit is provided with a liquid injection mechanism, an adjusting mechanism and a detection mechanism, so that the uniformity of a perovskite film prepared by each coating unit can be ensured; therefore, the influence of the flatness of the glass and the straightness of the slit coating tool bit on the uniformity of the perovskite film is solved.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic cells, and in particular to a thin film coating device. Background Art

[0002] Perovskite cells have been widely studied. In the process of achieving mass production of perovskite, the problem of enlarging the area of ​​perovskite must be solved. At present, perovskite is generally prepared in a small area of ​​0.1cm2 or 1cm2 in laboratory research, but in order to achieve industrialization, the area of ​​perovskite needs to be enlarged. At present, the enlarged area of ​​perovskite is 1200*600mm, 2000*1000mm, and the GW-level size is 2400*1200mm. After the area is enlarged, the efficiency of perovskite is seriously attenuated. The main reason is that the chemical properties of the perovskite layer are inconsistent after large-scale preparation, which is mainly reflected in the different crystallization states caused by the different thickness of the perovskite film in various places. In order to achieve chemical consistency of large-area preparation of perovskite, it is necessary to achieve uniform preparation of the thickness of the perovskite film, but after the size is enlarged, the flatness of the glass and the straightness of the slit coating head will affect the preparation of uniform perovskite film.

[0003] Therefore, it is necessary to design a thin film coating device to solve the above problems. Summary of the invention

[0004] The purpose of the present invention is to propose a thin film coating device to solve the problem in the prior art that the flatness of the glass and the straightness of the slit coating blade will affect the uniformity of the preparation of the perovskite thin film.

[0005] The technical solution of the present invention is: a thin film coating device, including a transmission mechanism, a substrate placed on the transmission mechanism, and a plurality of coating units arranged in a line above the substrate; the coating unit includes a coating knife head, a liquid injection mechanism, an adjustment mechanism and a detection mechanism; the liquid injection mechanism is connected to the coating knife head and is used to inject liquid into the coating knife head; the detection mechanism is arranged in front of the coating unit, and is used to detect the distance between the coating knife head and the glass placed on the substrate in real time, and feed back the detected distance information to the adjustment mechanism in real time; the adjustment mechanism adjusts the distance between the coating knife head and the glass on the substrate in real time according to the distance information transmitted by the detection mechanism.

[0006] It also includes a fixing frame and a mounting seat fixed on the fixing frame; the mounting seat is provided with mounting areas with the same number as the coating units; the coating knife head is connected to the mounting area in an up-and-down sliding manner; the bottom of the mounting area is provided with a limit stop platform which is limited by the support plates on both sides of the top of the coating knife head.

[0007] The liquid injection mechanism comprises a liquid injection pump; one end of the liquid injection pump is communicated with the inner cavity of the coating blade head, and the other end is connected to a liquid supply source.

[0008] The adjustment mechanism comprises an electric cylinder arranged above the coating knife head, and the telescopic end of the electric cylinder is fixedly connected to the coating knife head.

[0009] The detection mechanism comprises a photoelectric sensor arranged on the coating blade head; the photoelectric sensor is electrically connected to the adjustment mechanism to keep the distance between the coating blade head and the substrate constant.

[0010] Each coating unit is controlled individually.

[0011] The length of the coating blade is 100-500 mm.

[0012] By adopting the above technical scheme, the present invention has the following beneficial effects: the present invention arranges a plurality of coating units to replace the long coating blade with poor straightness, and each coating unit is equipped with a liquid injection mechanism, an adjustment mechanism and a detection mechanism, so that the uniformity of the perovskite film prepared by each coating unit can be guaranteed, thereby solving the influence of the flatness of the glass and the straightness of the slit coating blade on the uniformity of the perovskite film. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments in conjunction with the accompanying drawings.

[0014] Figure 1 It is a schematic diagram of the structure of the present invention.

[0015] Figure 2 It is a schematic structural diagram of the fixing frame and the mounting seat of the present invention.

[0016] The reference numerals in the accompanying drawings are:

[0017] Conveying mechanism 1, substrate 2, coating unit 3, coating blade 3-1, liquid injection mechanism 3-2, adjustment mechanism 3-3, detection mechanism 3-4, fixing frame 3-5, mounting seat 3-6, mounting area 3-7, and limit stop 3-8. DETAILED DESCRIPTION

[0018] (Example 1)

[0019] See Figure 1 and Figure 2A thin film coating device of this embodiment includes a transmission mechanism 1, a substrate 2 placed on the transmission mechanism 1, and a plurality of coating units 3 arranged in a line above the substrate 2; the coating unit 3 includes a coating head 3-1, a liquid injection mechanism 3-2, an adjustment mechanism 3-3 and a detection mechanism 3-4; the liquid injection mechanism 3-2 is connected to the coating head 3-1 and is used to inject liquid into the coating head 3-1; the detection mechanism 3-4 is arranged in front of the coating unit 3, and is used to detect the distance between the coating head 3-1 and the glass placed on the substrate 2 in real time, and to feed back the detected distance information to the adjustment mechanism 3-3 in real time; the adjustment mechanism 3-3 adjusts the distance between the coating head 3-1 and the glass on the substrate 2 in real time according to the distance information transmitted by the detection mechanism 3-4.

[0020] Furthermore, in order to facilitate the installation of the coating unit 3, the thin film coating device of this embodiment also includes a fixing frame 3-5 and a mounting seat 3-6 fixed on the fixing frame 3-5; the mounting seat 3-6 is provided with a number of mounting areas that is consistent with the number of coating units 3; the coating blade head 3-1 is connected to the mounting area 3-7 by sliding up and down; the bottom of the mounting area is provided with a limit stop 3-8 that is limited by the support plates on both sides of the top of the coating blade head 3-1.

[0021] Furthermore, the injection mechanism 3 - 2 includes an injection pump; one end of the injection pump is connected to the inner cavity of the coating blade head 3 - 1, and the other end is connected to the liquid supply source.

[0022] Furthermore, in order to facilitate accurate adjustment of the position of the coating blade head 3-1, the adjustment mechanism 3-3 includes an electric cylinder disposed above the coating blade head 3-1, and the telescopic end of the electric cylinder is fixedly connected to the coating blade head 3-1.

[0023] Furthermore, the detection mechanism 3-4 includes a photoelectric sensor disposed on the coating blade head 3-1; the photoelectric sensor is electrically connected to the adjustment mechanism 3-3 to keep the distance between the coating blade head 3-1 and the substrate 2 constant. This embodiment uses the photoelectric sensor to detect the distance between the coating blade head 3-1 and the substrate 2 in real time, and then uses the adjustment mechanism 3-3 to adjust the distance between the coating blade head 3-1 and the substrate 2, thereby ensuring the uniformity of film production.

[0024] Furthermore, each coating unit 3 is controlled individually, and different numbers of coating units 3 can be opened according to production requirements, so that samples of different sizes can be plated, or multiple samples can be plated at one time. Furthermore, under normal circumstances, each coating unit 3 can plate a continuous film, and a gasket can be installed at the outlet of the inner cavity of the coating blade 3-1 of each coating unit 3 to divide its inner cavity into multiple sections, so that it can plate a non-continuous film.

[0025] Preferably, the length of the coating blade head 3 - 1 is 100-500 mm.

[0026] The thin film coating device of this embodiment is provided with a plurality of coating units 3 to replace the long coating blade 3-1 with poor straightness. Each coating unit 3 is equipped with a liquid injection mechanism 3-2, an adjustment mechanism 3-3 and a detection mechanism 3-4, so that the uniformity of the perovskite film prepared by each coating unit 3 can be guaranteed, thereby solving the influence of the flatness of the glass and the straightness of the slit coating blade 3-1 on the uniformity of the perovskite film.

[0027] The specific embodiments described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A thin film coating device, characterized in that: The invention comprises a transmission mechanism (1), a substrate (2) placed on the transmission mechanism (1), and a plurality of coating units (3) arranged in a line above the substrate (2); the coating unit (3) comprises a coating blade (3-1), a liquid injection mechanism (3-2), an adjustment mechanism (3-3), and a detection mechanism (3-4); the liquid injection mechanism (3-2) is connected to the coating blade (3-1) and is used to inject liquid into the coating blade (3-1); the detection mechanism (3-4) is arranged in front of the coating unit (3) and is used to detect the distance between the coating blade (3-1) and the glass placed on the substrate (2) in real time, and to feed back the detected distance information to the adjustment mechanism (3-3) in real time; the adjustment mechanism (3-3) adjusts the distance between the coating blade (3-1) and the glass on the substrate (2) in real time according to the distance information transmitted by the detection mechanism (3-4).

2. A thin film coating device according to claim 1, characterized in that: It also includes a fixing frame (3-5) and a mounting seat (3-6) fixed on the fixing frame (3-5); the mounting seat (3-6) is provided with mounting areas whose number is the same as the number of coating units (3); the coating blade head (3-1) is connected to the mounting area (3-7) in an up-and-down sliding manner; and the bottom of the mounting area is provided with a limit stopper (3-8) which is limited by the support plates on both sides of the top of the coating blade head (3-1).

3. A thin film coating device according to claim 2, characterized in that: The liquid injection mechanism (3-2) comprises a liquid injection pump; one end of the liquid injection pump is connected to the inner cavity of the coating blade head (3-1), and the other end is connected to a liquid supply source.

4. A thin film coating device according to claim 1, characterized in that: The adjustment mechanism (3-3) comprises an electric cylinder arranged above the coating knife head (3-1), and the telescopic end of the electric cylinder is fixedly connected to the coating knife head (3-1).

5. A thin film coating device according to claim 1, characterized in that: The detection mechanism (3-4) comprises a photoelectric sensor arranged on the coating blade head (3-1); the photoelectric sensor is electrically connected to the adjustment mechanism (3-3) to keep the distance between the coating blade head (3-1) and the substrate (2) constant.

6. A thin film coating device according to claim 1, characterized in that: Each coating unit (3) is controlled individually.

7. A thin film coating device according to claim 1, characterized in that: The length of the coating blade head (3-1) is 100-500 mm.

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