Multi-station crystal bar quality inspection equipment, system and method

Abstract

The invention discloses a multi-station crystal bar quality inspection device, system and method, and the device comprises a base which comprises a quality inspection table and a transfer table adjacent to the quality inspection table; the crystal bar input device is arranged in a feeding area of the quality inspection table and used for reading label information of the crystal bars to be subjected to quality inspection and attached with labels; the first quality inspection device is arranged in a first quality inspection area of the quality inspection table and is used for carrying out first quality inspection operation on the crystal bars; the second quality inspection device is arranged in a second quality inspection area of the quality inspection table and is used for carrying out second quality inspection operation on the crystal bars; the defect marking device is arranged in a blanking area of the quality inspection table and is used for carrying out defect marking on the crystal bar based on a defect marking instruction; and the crystal bar transfer device is arranged on the transfer table and is used for switching the crystal bars among the feeding area, the first quality inspection area, the second quality inspection area and the discharging area.

Description

Technical Field

[0001] The present application relates to the field of detection technology, and in particular to a multi-station crystal rod quality inspection device, system and quality inspection method. Background Art

[0002] At present, crystals of different materials are widely used in semiconductor, optics and other fields. Take sapphire crystal as an example. Sapphire crystal can be made into optical products such as infrared windows, lenses, prisms, etc., and can also be made into electronic products such as LED substrates and insulating layers of integrated circuits due to its advantages such as high stability and high hardness.

[0003] In the process of manufacturing various crystal products, it is usually necessary to use crystal rods (such as sapphire crystal rods) as raw materials for production and processing. In order to ensure the quality of the subsequent processed crystal products or facilitate the subsequent further processing of the crystal rods, it is usually necessary to conduct quality inspections on the crystal rods (such as bubble inspections on the crystal rods and appearance inspections on the crystal rods, etc.). At present, various inspections of crystal rods are usually carried out in different quality inspection equipment, and even require the use of manual handheld quality inspection equipment for inspection, resulting in low inspection efficiency.

[0004] In view of this, how to improve the detection efficiency of multiple detections on crystal rods is a technical problem that needs to be solved urgently. Summary of the invention

[0005] In view of the shortcomings of the above-mentioned related technologies, the purpose of the present application is to provide a multi-station crystal rod quality inspection device, system and quality inspection method to overcome the technical problem existing in the above-mentioned related technologies on how to improve the inspection efficiency of multiple inspections on crystal rods.

[0006] To achieve the above-mentioned purpose and other related purposes, the present application provides a multi-station crystal rod quality inspection device in a first aspect, comprising: a base, comprising a quality inspection table and a transfer table adjacent to the quality inspection table; a crystal rod input device, arranged at a loading position of the quality inspection table, for reading label information of a crystal rod to be inspected and attached with a label; a first quality inspection device, arranged at a first quality inspection position of the quality inspection table, for performing a first quality inspection operation on the crystal rod to generate a first quality inspection result associated with the label information; a second quality inspection device, arranged at a second quality inspection position of the quality inspection table, for performing a first quality inspection operation on the crystal rod to generate a first quality inspection result associated with the label information; and a second quality inspection device, arranged at a second quality inspection position of the quality inspection table. An inspection area is used to perform a second quality inspection operation on the crystal rod to generate a second quality inspection result associated with the label information; a defect marking device is arranged in the unloading area of ​​the quality inspection platform, and is used to mark defects on the crystal rod based on defect marking instructions; wherein the defect marking instructions are generated using the first quality inspection result and / or the second quality inspection result; a crystal rod transporting device is arranged on the transfer platform, and is used to transfer the crystal rod among the loading area, the first quality inspection area, the second quality inspection area, and the unloading area.

[0007] The second aspect of the present application provides a multi-station crystal rod quality inspection system, comprising: the multi-station crystal rod quality inspection equipment as described in the first aspect of the present application; a loading device, which is adjacent to the loading position of the multi-station crystal rod quality inspection equipment, and is used to transfer the crystal rod to the loading position; an unloading device, which is adjacent to the unloading position of the multi-station crystal rod quality inspection equipment, and is used to unload the defect-marked crystal rod located at the unloading position.

[0008] The third aspect of the present application provides a quality inspection method applied to the multi-station crystal rod quality inspection equipment as described in the first aspect of the present application, characterized in that the quality inspection method includes the following steps: when it is detected that there is a crystal rod with a label attached at the loading position, controlling the crystal rod entry device to read the label information of the label; when the crystal rod is transferred to the first quality inspection position, controlling the first quality inspection device to perform a first quality inspection operation on the crystal rod to generate a first quality inspection result associated with the label information; when the crystal rod is transferred to the second quality inspection position, controlling the second quality inspection device to perform a second quality inspection operation on the crystal rod to generate a second quality inspection result associated with the label information; when the crystal rod is transferred to the unloading position, controlling the defect marking device to mark the crystal rod for defects based on a defect marking instruction, wherein the defect marking instruction is generated using the first quality inspection result and / or the second quality inspection result.

[0009] In summary, the multi-station crystal rod quality inspection equipment, system and quality inspection method provided by the present application reads the label information of the crystal rod to be inspected with a label attached thereto by a crystal rod entry device arranged at a loading position of a quality inspection table in the multi-station crystal rod quality inspection equipment, and respectively performs a first quality inspection operation and a second quality inspection operation on the crystal rod by using a first quality inspection device arranged at a first quality inspection position of the quality inspection table and a second quality inspection device arranged at a second quality inspection position of the quality inspection table, so as to generate a first quality inspection result and a second quality inspection result associated with the label information, and performs a defect marking operation on the crystal rod by using a defect marking device arranged at a unloading position of the quality inspection table. Defect marking, and the crystal rod transfer device arranged on the transfer platform in the multi-station crystal rod quality inspection equipment can transfer the crystal rod among the loading position, the first quality inspection position, the second quality inspection position, and the unloading position. In this way, different types of inspections can be completed with the help of one quality inspection equipment, and there is no need for manual hand-held inspection equipment and manual transfer of the crystal rod between different positions, which improves the inspection efficiency. The defect marking device can realize automatic marking of defects, and the crystal rod entry device can read the label information to associate the quality inspection result with the label information, so as to realize automatic inspection of the crystal rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The specific features of the present application are shown in the attached claims. The features and advantages of the invention involved in the present application can be better understood by referring to the exemplary embodiments and drawings described in detail below. The drawings are briefly described as follows:

[0011] Figures 1 to 3 They respectively show the structure schematic diagrams of a multi-station crystal rod quality inspection device in one embodiment of the present application at different viewing angles.

[0012] Figure 4 and Figure 5 They respectively show the structural schematic diagrams of a multi-station crystal rod quality inspection device in another embodiment of the present application at different viewing angles.

[0013] Figure 6 Show this application Figure 3 A partial enlarged view of the F1 portion of the crystal rod quality inspection equipment of the illustrated embodiment.

[0014] Figure 7 Show this application Figure 2 A partial enlarged view of the F2 portion of the crystal rod quality inspection equipment of the illustrated embodiment.

[0015] Figure 8 Shown is a schematic structural diagram of the first supporting component in one embodiment of the present application.

[0016] Fig. 9 Shown is a schematic structural diagram of a second quality inspection device carrying a crystal rod in one embodiment of the present application.

[0017] Fig.10 Shown is a schematic structural diagram of a first transport mechanism in one embodiment of the present application.

[0018] Fig.11 Shown is a structural schematic diagram of a main control unit in one embodiment of the present application.

[0019] Fig.12 Shown is a structural schematic diagram of a multi-station crystal rod quality inspection system in one embodiment of the present application.

[0020] Fig.13 Shown is a flow chart of a quality inspection method applied to a multi-station crystal rod quality inspection device in one embodiment of the present application. DETAILED DESCRIPTION

[0021] The following specific embodiments are used to illustrate the embodiments of the present application, and those familiar with the technology can easily understand the advantages of the present application and the technical effects that can be achieved by the content disclosed in this specification. In the following description, some embodiments can refer to the accompanying drawings. It should be understood that other embodiments without drawing drawings can also be used, and specific structures, parts or mechanisms, components and operational changes can be made without departing from the spirit and scope of the present application. The following detailed description should not be considered restrictive, and the scope of the embodiments of the present application is limited only by the claims published in the present application. The terms used here are only for describing specific embodiments and are not intended to limit the present application.

[0022] It should be understood that, although in some embodiments the term first, second or third etc. can be used to describe various elements or parameters in this article, these elements or parameters should not be limited by these terms. These terms are only used to distinguish an element or parameter from another element or parameter, and are not used to limit the order, priority or importance of multiple elements. For example, the first quality inspection position can be referred to as the second quality inspection position, and similarly, the second quality inspection position can be referred to as the first quality inspection position, without departing from the scope of various described embodiments, the first quality inspection position and the second quality inspection position are both describing a quality inspection position, but unless the context is otherwise clearly indicated, they are not the same quality inspection position, and similar situations also include the first quality inspection device and the second quality inspection device, the first quality inspection result and the second quality inspection result, etc.

[0023] Furthermore, as used in this article, the singular forms "one", "an" and "the" are intended to also include plural forms, unless there is an indication to the contrary in the context. It should be further understood that the terms "comprising", "including" indicate the presence of the described features, steps, operations, elements, components, projects, kinds, and / or groups, but do not exclude the presence, occurrence or addition of one or more other features, steps, operations, elements, components, projects, kinds, and / or groups. For example, the process, method, system, product or equipment comprising a series of steps or units need not be limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or equipment. In addition, the term "and / or" that may be used hereinafter, describes the association relationship of associated objects, indicating that three kinds of relationships may exist, for example, A and / or B, which can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / ", if not otherwise specified, generally represents that the associated objects before and after are a kind of "and / or" relationship. In addition, in the description of the embodiments of the present application, "multiple" refers to two or more than two. Furthermore, the terms "or" and "and / or" used in this document are interpreted as inclusive, or mean any one or any combination. Exceptions to this definition will only occur when a combination of elements, functions, steps or operations are inherently mutually exclusive in some way.

[0024] It should also be understood that when an element such as a layer, region, or substrate is referred to as being "on" another element or extending "to" another element "above", the element may be directly on another element or directly extend to another element, or there may also be an intermediate element. Conversely, when an element is referred to as being "directly on" another element or "directly extending to" another element "above", there are no intermediate elements. It will also be understood that when an element is referred to as being "connected" or "coupled" to another element, it may be directly connected or coupled to another element, or there may be an intermediate element. Conversely, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intermediate elements. In addition, the term "coupled" generally means physical, mechanical, magnetic, and / or electrical coupling or connection, and in the absence of specific contrary language, does not exclude the presence of intermediate elements between items that are coupled or associated.

[0025] Relative terms such as "below" or "above" or "upper" or "lower" or "horizontal" or "vertical" may be used herein to describe the relationship of one element, layer or region to another element, layer or region as illustrated in the figure. It will be understood that these terms are intended to cover different device orientations other than the orientation depicted in the figure. In this application, the "vertical", "horizontal" and "parallel" are defined as: including the situation of ±10% on the basis of the standard definition. For example, vertical usually refers to an angle of 90° relative to a reference line, but in this application, vertical refers to the situation within 80° to 100°. Unless otherwise explicitly stated, comparative quantitative terms (such as "above" and "below") are intended to cover the concept of equality. As an example, "above" can not only mean "greater than" in a mathematical sense, but also "equal to".

[0026] The present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. The technical solutions in the embodiments of the present application are clearly and completely described. Obviously, the described embodiments are only embodiments of a part of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments and technical effects obtained by ordinary technicians in this field without making creative work should belong to the scope of protection of this application. "An implementation method", "implementation method" or similar words mentioned in the whole text of this specification mean that the specific features, structures or characteristics described together with the implementation method are included in at least one implementation method of the present application. Therefore, in the whole text of this specification, the appearance of the phrases "in one implementation method", "in an implementation method" and similar words may (but not necessarily) relate to the same implementation method.

[0027] As described in the background technology, how to improve the detection efficiency of multiple inspections on crystal rods is a technical problem that needs to be solved urgently. In view of this, the present application proposes a multi-station crystal rod quality inspection device, system and quality inspection method, through the crystal rod input device set at the loading position of the quality inspection table in the multi-station crystal rod quality inspection device to read the label information of the crystal rod with a label to be inspected, respectively using the first quality inspection device set at the first quality inspection position of the quality inspection table and the second quality inspection device set at the second quality inspection position of the quality inspection table to perform the first quality inspection operation and the second quality inspection operation on the crystal rod, so as to generate the first quality inspection result and the second quality inspection result associated with the label information, and using the defect marking device set at the unloading position of the quality inspection table to mark the crystal rod for defects, and the crystal rod transfer device set on the transfer table in the multi-station crystal rod quality inspection device can convert the crystal rod between the loading position, the first quality inspection position, the second quality inspection position, and the unloading position. In this way, different types of inspections can be completed with the help of one quality inspection device, and there is no need for manual hand-held inspection equipment or manual transfer of crystal rods between different locations, which improves the inspection efficiency. Automatic marking of defects can be achieved through the defect marking device, and the label information can be read through the crystal rod entry device to associate the quality inspection results with the label information, thereby realizing automatic inspection of crystal rods.

[0028] The crystal rod described in the present application is a columnar crystal including two opposite end faces, for example, the crystal rod is a cylindrical crystal. According to the actual production process and different requirements, the shape of the crystal rod can also be configured as other shapes such as a square column. In one example, the crystal rod is a cylindrical crystal, the two opposite end faces are two circular surfaces of the cylindrical crystal, and the surface connected to the two circular surfaces is the circumference of the crystal rod (also referred to as the side of the crystal rod). The crystal rod can be a crystal rod of a light-transmitting material such as a sapphire crystal rod and a quartz crystal rod. In one embodiment, a label is attached to the crystal rod, for example, the label is attached to the end face of the crystal rod, and the label can also be attached to the circumference of the crystal rod. Among them, the label contains basic information of the crystal rod, such as an identity code, and the basic information can be obtained by scanning the code. Examples of the label are QR codes, text, bar codes, etc.

[0029] See also Figures 1 to 3 , respectively, are schematic diagrams of the structure of a multi-station crystal rod quality inspection device in one embodiment of the present application at different viewing angles, such as Figures 1 to 3 As shown, the multi-station crystal ingot quality inspection device 1 includes a base 10, and a crystal ingot input device, a first quality inspection device 12, a second quality inspection device 13, a defect marking device 14, and a crystal ingot transfer device 15 arranged on the base 10. In order to clearly illustrate the relative positions of the various components in the multi-station crystal ingot quality inspection device in the embodiment of the present application, Figure 1Six directions, up, down, front, back, left, and right, are defined in , among which the up and down directions can also be called vertical directions, and any direction in a plane (i.e., horizontal plane) perpendicular to the up and down directions is called horizontal directions.

[0030] See also Figure 1 , the base 10 includes a quality inspection table 100 and a transfer table 101, and the transfer table 101 is adjacent to the quality inspection table 100. The transfer table 101 is adjacent to the quality inspection table 100, which means that the transfer table 101 is located near or around the quality inspection table 100 so that the two can interact. Further, the transfer table 101 is arranged in accordance with the process sequence of each quality inspection device on the quality inspection table 100 and is adjacent to the quality inspection table 100. In one example, the process sequence of each quality inspection device on the quality inspection table 100 is arranged in a linear manner, and the transfer table 101 is configured as follows Figure 1 In other examples, the process sequence of each quality inspection device on the quality inspection platform 100 is arranged in a circle, and the moving platform 101 can also be configured as a ring surrounding each quality inspection device.

[0031] In one embodiment, if Figure 1 As shown, the base 10 includes a support body 102 and a quality inspection table 100 and a transfer table 101 arranged on the upper side of the support body 102. The quality inspection table 100 and the transfer table 101 arranged on the support body 102 can be offset in a certain height in the up and down directions or can be at the same height. The two can be configured as independent platforms or as two different parts on one platform. In one example, the support body 102 includes a frame and a shell surrounding the outside of the frame, and the quality inspection table 100 and the transfer table 101 are arranged across the upper side of the frame. In other examples, the support body 102 may also include only a frame or only an shell.

[0032] It should be noted that the inspection platform and the transfer platform being supported by one supporting body is only an example. In other examples, the inspection platform and the transfer platform may also be respectively configured on different supporting bodies so that the base presents a split structure.

[0033] In one embodiment, see Figure 4 and Figure 5 Combined with Figure 1 , Figure 4 and Figure 5 They are schematic diagrams showing the structure of a multi-station crystal rod quality inspection device in another embodiment of the present application at different viewing angles, such as Figure 1 , Figure 4 , Figure 5As shown, the multi-station crystal rod quality inspection device 1 also includes a shell 103 enclosing the quality inspection platform 100 and the transfer platform 101. The shell 103 is provided with a loading port at a position corresponding to the loading position 1000, for example, Figure 4 As shown, a loading port 1030 is provided on the right side of the housing 103, and a staff member or a loading robot described in subsequent embodiments can move the crystal rod 2 into the multi-station crystal rod quality inspection device 1 through the loading port 1030 for quality inspection. The housing 103 is provided with a loading port at a position corresponding to the unloading position 1003, for example, Figure 5 As shown, a feeding port 1031 is provided on the left side of the housing 103, and a staff member or a feeding device described in subsequent embodiments can remove the crystal ingot 2 from the multi-station crystal ingot quality inspection device 1 through the feeding port 1031. Furthermore, in one embodiment, the housing 103 also includes a plurality of inspection doors to facilitate inspection of devices inside the housing 103 (such as a crystal ingot input device, a first quality inspection device 12, a second quality inspection device 13, a defect marking device 14, or a crystal ingot transfer device 15, etc.).

[0034] like Figure 3 As shown, the quality inspection station 100 includes a loading area 1000, a first quality inspection area 1001, a second quality inspection area 1002, and a unloading area 1003. The above four areas may be different areas on the surface of the quality inspection station 100, or there may be some overlaps. In one example, the loading area 1000, the first quality inspection area 1001, the second quality inspection area 1002, and the unloading area 1003 are arranged in sequence on the quality inspection station 100, for example, Figure 3 As shown, the loading position 1000, the first quality inspection position 1001, the second quality inspection position 1002, and the unloading position 1003 are arranged in sequence along the left and right direction of the quality inspection platform 100. In other examples, the four positions can also be transformed or changed, for example, the second quality inspection position is adjacent to the loading position, and the first quality inspection position is adjacent to the unloading position. In subsequent embodiments, the loading position 1000, the first quality inspection position 1001, the second quality inspection position 1002, and the unloading position 1003 are arranged in sequence along the left and right direction as an example for explanation, that is, the crystal rod input device, the first quality inspection device 12, the second quality inspection device 13, and the defect marking device 14 are arranged in sequence along the left and right direction as an example for explanation.

[0035] See also Figure 6 Combined with Figure 3 , Figure 6 Show this application Figure 3The partial enlarged view of the crystal ingot quality inspection device at F1 in the embodiment shown in the figure, as shown in the figure, the crystal ingot recording device 11 is set at the loading position 1000 of the quality inspection table 100, which is used to read the label information of the crystal ingot with a label to be inspected. The crystal ingot can be manually or mechanically (such as a robot, a mechanical gripper, etc.) to turn the label of the crystal ingot toward the crystal ingot recording device for reading by the crystal ingot recording device.

[0036] In one embodiment, the crystal ingot recording device is a barcode reader, which can read the label information of the crystal ingot by scanning the label attached to the crystal ingot, so that the main control device described in the subsequent embodiments can associate the quality inspection result with the label information. In another embodiment, the crystal ingot recording device can also be a camera, which takes a picture of the label to obtain a label image, and then recognizes the label image through a processor to realize the reading of the label information. The processor can be configured in the main control device mentioned in the subsequent embodiments or directly configured in the crystal ingot recording device.

[0037] In one embodiment, see Figure 6 Combined with Figure 3 , the quality inspection platform 100 is provided with a scanning window 1005 at the loading position 1000, and the crystal ingot recording device 11 is arranged below the scanning window 1005. The scanning window is exemplified as an opening at the loading position 1000 on the quality inspection platform 100. In this embodiment, in order to enable the crystal ingot recording device 11 arranged below the scanning window 1005 to scan the label on the crystal ingot, the crystal ingot is clamped above the scanning window 1005 with the surface where the label is located facing downward so that the crystal ingot recording device 11 can scan the label through the scanning window 1005. For example, if the label is attached to the end face of the crystal ingot, the staff or the loading robot described in the subsequent embodiments will turn the end face of the crystal ingot with the label attached downward for scanning by the crystal ingot recording device 11. It should be noted that, although the above embodiment is described by taking the crystal rod entry device 11 as being arranged below the scanning window 1005, it is not limited to this. In other embodiments, the crystal rod entry device 11 may also be arranged on the quality inspection table 100, and the crystal rod entry device 11 may scan upward, downward, or in the front, back, left, and right directions.

[0038] In a specific embodiment, if Figure 6 As shown, a carrier 110 is disposed below the scanning window 1005, and the crystal rod recording device 11 is disposed on the carrier 110. The carrier 110 is, for example, an L-shaped carrier.

[0039] In one embodiment, please continue to refer to Figure 6 Combined with Figure 3As shown in the figure, the multi-station crystal rod quality inspection equipment also includes a temporary placement component 16 arranged in the loading area 1000, and the temporary placement component 16 is used to place the crystal rod 2 whose label information has been read for the crystal rod transfer device 15 to transfer it. Among them, the temporary placement component 16 is exemplified as a carrying platform, and the carrying platform can be a fixed carrying platform or a rotatable carrying platform. In this embodiment, after the label information of the crystal rod 2 is read by the crystal rod input device 11, the loading robot or staff described in the subsequent embodiments continues to transfer the crystal rod 2 to the temporary placement component 16.

[0040] In one embodiment, if Figure 3 As shown, the first quality inspection position 1001 is adjacent to the loading position 1000. In this embodiment, the crystal rod is transferred to the first quality inspection position 1001 after the label information is read at the loading position 1000. In the example where the multi-station crystal rod quality inspection equipment includes a temporary placement component, the crystal rod can be transported to the first quality inspection position 1001 by means of Figure 3 The crystal rod transfer device 15 shown transfers the crystal rod carried on the temporary storage component to the adjacent quality inspection device (e.g., the first quality inspection device) for quality inspection. In the example where the multi-station crystal rod quality inspection equipment does not include a temporary storage component, the crystal rod can be directly transferred to the adjacent quality inspection device (e.g., the first quality inspection device) for quality inspection after the label information is read by the crystal rod input device. In other embodiments, such as the embodiment in which other quality inspection locations are adjacent to the loading location, the crystal rod will be transferred to other locations adjacent to the loading location. The situation in which the location can be changed in the subsequent embodiments is also understood in this way and will not be repeated.

[0041] In one embodiment, in order to stably position the crystal rod in each position, the crystal rod is placed in each position with one end facing upward and the other end facing downward, but the invention is not limited thereto. According to different configurations of the quality inspection device or the defect marking device, the crystal rod may also be placed in each position with one end facing left and the other end facing right. In the following embodiments, the crystal rod is placed in each position with one end facing upward and the other end facing downward as an example.

[0042] See also Figure 7 Combined with Figure 2 and Figure 3 , Figure 7 Show this application Figure 2 A local enlarged view of F2 in the crystal rod quality inspection equipment of the illustrated embodiment, as shown in the figure, the first quality inspection device 12 is arranged at the first quality inspection position 1001 of the quality inspection table 100, which is used to perform a first quality inspection operation on the crystal rod 2 to generate a first quality inspection result associated with the label information.

[0043] Among them, being used to generate the first quality inspection result associated with the label information means that the first quality inspection operation performed by the first quality inspection device can be used to generate the first quality inspection result associated with the label information, and does not mean that the generation of the first quality inspection result must be performed by the first quality inspection device. In one embodiment, the first quality inspection device includes a first quality inspection information acquisition component (the first quality inspection information acquisition component, for example, corresponds to the projection measuring instrument 120 in the embodiment shown in 7), and the first quality inspection information acquisition component performs a first quality inspection operation on the crystal rod to obtain detection data and sends the detection data to the main control device in the subsequent embodiment, and the main control device generates the first quality inspection result associated with the label information according to the detection data. In another embodiment, the first quality inspection device includes a first quality inspection information acquisition component and a processing component, and the first quality inspection information acquisition component performs a first quality inspection operation on the crystal rod to obtain detection data and sends the detection data to the processing component, so that the processing component generates the first quality inspection result associated with the label information according to the detection data.

[0044] The first quality inspection result associated with the label information means that the first quality inspection result is stored in association with the label information, so as to obtain the corresponding first quality inspection result through the label information of the crystal rod.

[0045] In one embodiment, the first quality inspection device is an appearance quality inspection device. In this embodiment, the first quality inspection operation is an appearance quality inspection operation of the crystal rod. For example, the first quality inspection operation includes detecting any item of the diameter, verticality, parallelism, and grinding amount of the crystal rod. Among them, the diameter of the crystal rod refers to the diameter of the end face of the cylindrical crystal rod. The verticality of the crystal rod refers to the angle between adjacent side faces of the square columnar crystal rod or the angle difference between the angle and the right angle, wherein the side face refers to the surface between the two end faces of the square columnar crystal rod. The parallelism of the crystal rod refers to the degree of parallelism of the two end faces of the crystal rod, which can be expressed by the difference between the maximum distance and the minimum distance between the two end faces. The grinding amount of the crystal rod refers to the size of the end face of the crystal rod that needs to be ground.

[0046] In one embodiment, the first quality inspection result may only include the result of the first quality inspection operation, such as the specific value of any item among the diameter, verticality, parallelism, and grinding amount of the crystal rod. Further, the first quality inspection result includes not only the result of the first quality inspection operation, but also the position of the appearance defect in the crystal rod determined based on the result of the first quality inspection operation, for example, the first quality inspection result also includes the height position of the appearance defect on the crystal rod.

[0047] In one embodiment, see Figure 7 Combined with Figure 2The first quality inspection device 12 includes a projection measuring instrument 120, a first supporting component 121, and a first lifting mechanism 122. The projection measuring instrument 120 includes a projector 1201 and a receiver 1202 having a spacing space 1200, and the spacing space 1200 is used to receive the crystal ingot 2 transported by the crystal ingot transfer device 15. The first supporting component 121 is disposed on the quality inspection platform 100 and located in the spacing space 1200 to support the crystal ingot 2. The first lifting mechanism 122 is connected to the projection measuring instrument 120, and is used to drive the projection measuring instrument 120 to move up and down to obtain a projection image of the crystal ingot 2.

[0048] In one embodiment, if Figure 7 As shown, the projection measuring instrument 120 further includes a projection bracket 1203 for connecting the projector 1201 and the receiver 1202 . The projector 1201 and the receiver 1202 are arranged at two ends of the projection bracket 1203 to form the interval space 1200 therebetween.

[0049] In one embodiment, the projector is a light emitter, which is used to emit light toward the receiver. For example, the light emitter is an LED light source. The receiver is a camera, which includes a photosensitive sensor (such as CCD or CMOS), and the camera uses the photosensitive sensor to convert the light it receives that is not absorbed by the crystal rod (such as light that transmits the crystal rod or light that does not pass through the crystal rod) into the projection image. Specifically, during the up and down movement of the projection measuring instrument, the projector and the receiver cooperate to collect the projection image at a preset frequency (or in real time).

[0050] In one embodiment, the first lifting mechanism includes a guide rail and a lifting drive component. For the sake of distinction, in the following embodiments, the guide rail in the first lifting mechanism is referred to as the first guide rail, the guide rail in the second lifting mechanism is referred to as the second guide rail, the guide rail in the third lifting mechanism is referred to as the third guide rail, the guide rail in the carrier mechanism is referred to as the fourth guide rail, the guide rail in the conveying track is referred to as the fifth guide rail, the lifting drive component in the first lifting mechanism is referred to as the first lifting drive component, the lifting drive component in the second lifting mechanism is referred to as the second lifting drive component, and the lifting drive component in the third lifting mechanism is referred to as the third lifting drive component. Figure 7 As shown, the projector measuring instrument 120 is arranged on the first guide rail 1220, for example, the projection bracket 1203 of the projector measuring instrument 120 is arranged on the first guide rail 1220, and then the first lifting driving component 1221 drives the projector measuring instrument 120 to move up and down on the first guide rail 1220 to obtain a projection image containing at least one dimension information of the crystal rod. The first lifting driving component is, for example, a driving motor.

[0051] In one embodiment, see Figure 8 Combined with Figure 7 , Figure 8 The structure diagram of the first supporting assembly in one embodiment of the present application is shown. As shown in the figure, the first supporting assembly 121 includes a turntable 1210, and the turntable 1210 is used to cooperate with the lifting and lowering of the projector measuring instrument 120 to drive the crystal rod 2 to rotate so that the projector measuring instrument 120 can obtain a projection image containing three-dimensional information of the crystal rod 2. Further, the first supporting assembly 121 also includes a support seat 1211 for supporting the turntable 1210. For the convenience of distinction, in the following embodiments, the turntable in the first supporting assembly is referred to as the first turntable, the turntable in the second supporting assembly is referred to as the second turntable, the turntable in the third supporting assembly is referred to as the third turntable, the support seat in the first supporting assembly is referred to as the first support seat, the support seat in the second supporting assembly is referred to as the second support seat, and the support seat in the third supporting assembly is referred to as the third support seat.

[0052] For example, the first turntable may drive the crystal rod to rotate all the time during the process of the projection measuring instrument being raised and lowered, or may drive the crystal rod to rotate once every time the projection measuring instrument is at a fixed height, or may drive the crystal rod to rotate by an angle after the projection measuring instrument completes a scan of the crystal rod from top to bottom or from bottom to top, and then perform the next scan. In this way, the projection measuring instrument can obtain a projection image containing the three-dimensional information of the crystal rod through the lifting and lowering of the projection measuring instrument and the rotation of the crystal rod. In other words, the multiple projection images obtained by the projection measuring instrument can reflect the three-dimensional information of the crystal rod.

[0053] It should be noted that, in some embodiments, the first supporting assembly may not have the first turntable, the crystal rod may be directly set on the first support seat, and the projection measuring instrument can obtain the projection image of the crystal rod under the drive of the first lifting mechanism. In other embodiments, the first supporting assembly does not have the first turntable, and the first lifting mechanism is further connected to a rotating mechanism, and the rotating mechanism can drive the projection measuring instrument to rotate so that the projection measuring instrument obtains the projection image containing the three-dimensional information of the crystal rod.

[0054] In one embodiment, see Fig. 9 Combined with Figure 3 , Fig. 9 Shown is a structural schematic diagram of a second quality inspection device carrying a crystal rod in one embodiment of the present application. As shown in the figure, the second quality inspection device 13 is arranged at the second quality inspection position 1002 of the quality inspection table 100, and is used to perform a second quality inspection operation on the crystal rod 2 to generate a second quality inspection result associated with the label information.

[0055] Among them, being used to generate a second quality inspection result associated with the label information means that the second quality inspection operation performed by the second quality inspection device can be used to generate a second quality inspection result associated with the label information, and does not mean that the generation of the second quality inspection result must be performed by the second quality inspection device. In one embodiment, the second quality inspection device includes a second quality inspection information acquisition component (the second quality inspection information acquisition component, for example, corresponds to the measurement component 131 in the embodiment shown in Figure 9), and the second quality inspection information acquisition component performs a second quality inspection operation on the crystal rod to obtain detection data and sends the detection data to the main control device in the subsequent embodiment, and the main control device generates the second quality inspection result associated with the label information based on the detection data. In another embodiment, the second quality inspection device includes a second quality inspection information acquisition component and a processing component, and the second quality inspection information acquisition component performs a second quality inspection operation on the crystal rod to obtain detection data and sends the detection data to the processing component, so that the processing component generates the second quality inspection result associated with the label information based on the detection data.

[0056] The second quality inspection result associated with the label information means that the second quality inspection result is stored in association with the label information, so as to obtain the corresponding second quality inspection result through the label information of the crystal rod.

[0057] In one embodiment, the second quality inspection device is an internal defect detection device. In this embodiment, the second quality inspection operation is an internal defect quality inspection operation of the crystal rod. For example, the second quality inspection operation includes detecting any item of bubbles, cracks, and impurities in the crystal rod.

[0058] In one embodiment, the second quality inspection result includes the location of internal defects in the crystal rod, for example, the second quality inspection result includes the height position of the internal defects on the crystal rod, and further, the second quality inspection result also includes the type and quantity of the internal defects.

[0059] In one embodiment, see Fig. 9 Combined with Figure 3 ,like Figure 3 and Fig. 9As shown, the second quality inspection device 13 includes a second supporting assembly 130, a measuring assembly 131, and a second lifting mechanism 132. The second supporting assembly 130 is placed in the second quality inspection position 1002 to support the crystal ingot 2 transported by the crystal ingot transfer device 15. The measuring assembly 131 includes at least one laser 1310 disposed on the side of the second supporting assembly 130 and an image capturing mechanism 1311 disposed opposite to the second supporting assembly 130. The second lifting mechanism 132 is connected to the laser 1310, and is used to drive the laser 1310 to move up and down so that the image capturing mechanism 1311 can obtain the end face image of the crystal ingot 2 when the laser 1310 projects laser light at different heights of the crystal ingot.

[0060] In one embodiment, when there are internal defects in the crystal rod, the laser will produce optical effects such as scattering inside the crystal rod, and then defect features such as light spots or light points will exist in the end face image. In this way, by identifying the end face image, it can be determined whether there are internal defects in the crystal rod, and the quality inspection defect position of the internal defect can be determined based on the height of the laser when taking the end face image.

[0061] In one embodiment, if Fig. 9 As shown, the number of the lasers 1310 is four and the four lasers 1310 are evenly distributed within the 1 / 3 circumference of the crystal rod. Among them, the 1 / 3 circumference of the crystal rod refers to the 120° fan angle range with the axis of the crystal rod as the center line. Although the above embodiment is described by taking the number of the lasers as four and the four lasers evenly distributed within the 1 / 3 circumference of the crystal rod as an example, the present application does not limit the number and distribution of lasers. In some other embodiments, the number of lasers can also be configured as one, two, three or more than four. In other embodiments, multiple lasers can also be unevenly distributed, or distributed within a range greater than 1 / 3 of the circumference or less than 1 / 3 of the circumference.

[0062] In one embodiment, if Fig. 9 As shown, the second quality inspection device 13 further includes a laser connector 133, which is used to carry at least one laser 1310 and to connect with the second lifting mechanism 132. Fig. 9 As shown, the laser connecting member 133 includes a horizontal supporting portion 1330 for supporting at least one laser 1310 and a vertical connecting portion 1331 for connecting with the second lifting mechanism 132 .

[0063] In one embodiment, if Fig. 9As shown, the second quality inspection device 13 also includes a shading plate 134 arranged opposite to the at least one laser 1310 for shielding the laser emitted by the laser 1310. In this way, it can be avoided that the laser passes through other components in the multi-station crystal rod quality inspection equipment after passing through the crystal rod to cause false detection, and the laser can also be focused on the crystal rod to improve the accuracy of detection.

[0064] like Fig. 9 As shown, the image capturing mechanism 1311 is arranged opposite to the second supporting assembly 130 to obtain the end face image of the crystal rod 2 on the upper side of the crystal rod 2. In one embodiment, the image capturing mechanism 1311 is arranged on the second lifting mechanism 132, and then the image capturing mechanism 1311 can move up and down driven by the second lifting mechanism 132, so that the end face image of the crystal rods at different heights can be obtained. In other embodiments, the image capturing mechanism can also be fixedly arranged on the upper side of the second supporting assembly. Among them, the image capturing mechanism 1311 includes a photosensitive sensor (such as CCD or CMOS), and the image capturing mechanism 1311 uses the photosensitive sensor to convert the laser emitted from the end face of the crystal rod received by it into an end face image.

[0065] In one embodiment, if Fig. 9 As shown, the second lifting mechanism 132 includes two second guide rails 1320 arranged in sequence along the up-down direction and a second lifting driving component 1321 respectively connected to the two second guide rails 1320. The at least one laser 1310 is arranged on the lower second guide rail 1320, for example Fig. 9 The four lasers 1310 shown are arranged on the second guide rail 1320 at the lower side through the laser connector 133, and then the second lifting drive component 1321 drivingly connected to the second guide rail 1320 at the lower side drives the at least one laser 1310 to move up and down on the second guide rail 1320 at the lower side, so that the image capture mechanism 1311 can obtain the end face image of the crystal rod 2 when the laser 1310 projects the laser at different heights of the crystal rod 2. The image capture mechanism 1311 is arranged on the second guide rail 1320 at the upper side, and then the second lifting drive component 1321 drivingly connected to the second guide rail 1320 at the upper side drives the image capture mechanism 1311 to move up and down on the second guide rail 1320 at the upper side, so that the end face images of the crystal rods at different heights can be obtained. Among them, the second lifting drive component is exemplified by a drive motor.

[0066] In one embodiment, if Fig. 9As shown, the second supporting assembly 130 includes a second turntable 1300, and the second turntable 1300 is used to drive the crystal rod 2 to rotate by a preset angle to scan the next position when the laser 1310 completes scanning of one position. Specifically, the crystal rod 2 is driven by the second turntable 1300 at different positions (i.e., different circumferential regions of the crystal rod) thereof toward the laser 1310. When one position of the crystal rod 2 is toward the laser 1310, the laser 1310 irradiates the crystal rod 2 at different heights of the position of the crystal rod 2 during the up and down movement, so that the image capturing mechanism 1311 acquires multiple end surface images, and then the laser 1310 completes the scanning of the position. At this time, the second turntable 1300 drives the crystal rod 2 to rotate by a preset angle so that other positions of the crystal rod are toward the laser 1310, so that the laser 1310 can scan at other positions. In one example, the preset angle is 30°, 35°, 40°, or 45°, etc.

[0067] Furthermore, in one embodiment, the second supporting assembly 130 also includes a second supporting seat 1301 for supporting the second turntable 1300 .

[0068] It should be noted that, in some embodiments, the second supporting assembly may not have a second turntable, and the second lifting mechanism is also connected to a rotating mechanism, which can drive the at least one laser to rotate so that when the laser completes scanning at one position, the rotating mechanism drives the at least one laser to rotate a preset angle to scan the next position.

[0069] In one embodiment, if Figure 3 As shown, the quality inspection station 100 further includes a third quality inspection area 1004, and the third quality inspection area 1004 is used to set a third quality inspection device (not shown). The third quality inspection area 1004 can be as follows Figure 3 It is shown as being located between the first quality inspection position 1001 and the second quality inspection position 1002, and may also be located between the loading position 1000 and the first quality inspection position 1001, or between the second quality inspection position 1002 and the unloading position 1003. In the following embodiments, the loading position 1000, the first quality inspection position 1001, the third quality inspection position 1004, the second quality inspection position 1002, and the unloading position 1003 are arranged in order from right to left as an example for description.

[0070] In an embodiment where the quality inspection platform also includes a third quality inspection location, the multi-station crystal rod quality inspection equipment also includes a third quality inspection device arranged in the third quality inspection location, and the third quality inspection device is used to perform a third quality inspection operation on the crystal rod to generate a third quality inspection result associated with the label information.

[0071] Among them, being used to generate a third quality inspection result associated with the label information means that the third quality inspection operation performed by the third quality inspection device can be used to generate a third quality inspection result associated with the label information, and does not mean that the generation of the third quality inspection result must be performed by the third quality inspection device. In one embodiment, the third quality inspection device includes a third quality inspection information acquisition component (the third quality inspection information acquisition component corresponds to an electron microscope, for example), and the third quality inspection information acquisition component performs a third quality inspection operation on the crystal rod to obtain detection data and sends the detection data to the main control device in the subsequent embodiment, and the main control device generates the third quality inspection result associated with the label information according to the detection data. In another embodiment, the third quality inspection device includes a third quality inspection information acquisition component and a processing component, and the third quality inspection information acquisition component performs a third quality inspection operation on the crystal rod to obtain detection data and sends the detection data to the processing component, so that the processing component generates a third quality inspection result associated with the label information according to the detection data.

[0072] The third quality inspection result associated with the label information means that the third quality inspection result is stored in association with the label information, so as to obtain the corresponding third quality inspection result through the label information of the crystal rod.

[0073] In one embodiment, the third quality inspection operation is, for example, detecting the crystal orientation of the crystal rod, and in this embodiment, the third quality inspection device is a crystal orientation detection device, wherein the crystal orientation detection device is, for example, a crystal orientation detection device based on X-ray diffraction, a crystal orientation detection device based on an electron microscope, and the like.

[0074] After all quality inspection devices have completed the quality inspection work, the crystal rod transfer device transfers the crystal rod from the quality inspection device to the defect marking device. For example, after the first and second quality inspection devices have completed the quality inspection work, the crystal rod transfer device transfers the crystal rod from the second quality inspection device to the defect marking device.

[0075] like Figure 1 As shown, the defect marking device 14 is arranged at the unloading position 1003 of the quality inspection table 100, and is used to mark defects on the crystal rod 2 based on defect marking instructions. Among them, the defect marking instructions are used to control the defect marking device 14 to reach the defect marking position to mark defects on the crystal rod 2. It should be noted that the defect marking instructions are not necessarily generated by the defect marking device. In one embodiment, the defect marking instructions are generated by the main control device in the subsequent embodiments. In another embodiment, the defect marking device also includes a processing component, and the defect marking instructions can also be generated by the processing component of the defect marking device. In this embodiment, the processing component in the defect marking device is also communicatively connected to the processing component in the first quality inspection device and / or the second quality inspection device.

[0076] The defect marking instruction is generated using the first quality inspection result and / or the second quality inspection result. For example, the defect marking instruction can be generated using the position of the defect (external defect) in the crystal rod in the first quality inspection result, and the defect marking instruction can be generated using the position of the defect (internal defect) in the crystal rod in the second quality inspection result, and the defect marking instruction can also be generated using the position of the defect (internal defect and external defect) in the crystal rod in the first and second quality inspection results.

[0077] In one embodiment, if Figure 1 As shown, the defect marking device 14 includes a coding mechanism 140 and a third lifting mechanism 141 connected to the coding mechanism 140. The third lifting mechanism 141 is used to drive the coding mechanism 140 to move to the quality inspection defect position based on the defect marking instruction, and when the coding mechanism 140 is driven to the quality inspection defect position, it sprays a mark toward the quality inspection defect position based on the defect marking instruction. The quality inspection defect position is a mark position on a crystal rod determined based on the position of the defect of the crystal rod, and the coding mechanism 140 arrives at the quality inspection defect position means that the coding mechanism 140 can just spray to form a mark at the mark position of the crystal rod.

[0078] In some embodiments, the sprayed mark is a color mark, for example, an ink mark or a dye mark. Further, the sprayed mark can also be a graphic mark, for example, a circular mark or a square mark formed around the crystal rod.

[0079] In one embodiment, the third lifting mechanism includes a third guide rail and a third lifting drive component. The inkjet printer is arranged on the third guide rail, and then the third lifting drive component drives the inkjet printer to move up and down on the third guide rail to reach the quality inspection defect position. The third lifting drive component is exemplified by a drive motor.

[0080] In one embodiment, if Figure 1 As shown, the defect marking device 14 further includes a third supporting assembly 142, and the third supporting assembly 142 is used to carry the crystal rod 2. Further, in order to facilitate the staff to identify the mark, the third supporting assembly 142 includes a third turntable (not numbered), and the third turntable drives the crystal rod 2 to rotate after the coding mechanism 140 reaches the quality inspection defect position so that the coding mechanism 140 forms a circular mark or a square mark around the circumference of the crystal rod 2. Further, in one embodiment, the third supporting assembly also includes a third support seat for supporting the third turntable.

[0081] like Figure 3As shown, the crystal rod transfer device 15 is arranged on the transfer platform 101, and is used to transfer the crystal rod 2 between the loading position 1000, the first quality inspection position 1001, the second quality inspection position 1002, and the unloading position 1003. In one embodiment, the crystal rod transfer device 15 includes a conveying track 150 arranged along each position and at least one carrier arranged on the conveying track 150, and the carrier moves on the conveying track 150 to transfer the crystal rod 2 between each position. Specifically, the extension direction of the conveying track 150 arranged along each position is the same as the arrangement direction of each position. For example Figure 2 The locations shown are arranged sequentially along the left-right direction, and accordingly, the extending direction of the conveying track 150 is the left-right direction.

[0082] In one embodiment, a carrier mechanism is provided between each two adjacent positions for transporting the crystal rod between the two adjacent positions. Among them, a carrier mechanism provided between two adjacent positions means that the moving range of the carrier mechanism in the transport working stage is between the two adjacent positions. In one example, taking the quality inspection platform 100 including a loading position 1000, a first quality inspection position 1001, a second quality inspection position 1002, and a unloading position 1003, and the crystal rod transport device 15 including three carrier mechanisms as an example, the first carrier mechanism 151 is used to transport the crystal rod from the loading position 1000 to the first quality inspection position 1001, the second carrier mechanism 152 is used to transport the crystal rod from the first quality inspection position 1001 to the second quality inspection position 1002, and the third carrier mechanism 153 is used to transport the crystal rod from the second quality inspection position 1002 to the unloading position 1003. In another example, taking the quality inspection platform 100 including a loading position 1000, a first quality inspection position 1001, a second quality inspection position 1002, an unloading position 1003, and a third quality inspection position 1004, and the crystal rod transfer device 15 including four transport mechanisms as an example, the first transport mechanism 151 is used to transfer the crystal rod from the loading position 1000 to the first quality inspection position 1001, the fourth transport mechanism 154 is used to transfer the crystal rod from the first quality inspection position 1001 to the third quality inspection position 1004, the second transport mechanism 152 is used to transfer the crystal rod from the third quality inspection position 1004 to the second quality inspection position 1002, and the third transport mechanism 153 is used to transfer the crystal rod from the second quality inspection position 1002 to the unloading position 1003.

[0083] In this way, a transport mechanism is arranged between each two adjacent positions, and the crystal ingots 2 located at different positions can be synchronously moved through the synchronous movement of multiple transport mechanisms to realize assembly line operation. Taking the quality inspection platform 100 including the loading position 1000, the first quality inspection position 1001, the second quality inspection position 1002, and the unloading position 1003, as an example, the crystal ingot transfer device 15 includes three transport mechanisms, when the first transport mechanism 151 arranged between the loading position 1000 and the first quality inspection position 1001 moves to the loading position 1000 to clamp the crystal ingot 2 at the loading position 1000, the first quality inspection position 1001 and the second quality inspection position 1002 move to the loading position 1000 to clamp the crystal ingot 2 at the loading position 1000, and the first quality inspection position 1001 and the second quality inspection position 1002 move to the loading position 1003 to realize assembly line operation. The second transport mechanism 152 arranged between the quality inspection positions 1002 also moves to the first quality inspection position 1001 at the same time to clamp the crystal rod 2 at the first quality inspection position 1001. Subsequently, the first transport mechanism 151 moves to the first quality inspection position 1001 to place the clamped crystal rod 2 in the first quality inspection position 1001, and at the same time, the second transport mechanism 152 moves to the second quality inspection position 1002 to place the clamped crystal rod in the second quality inspection position 1002.

[0084] Although the above embodiments are described by taking one carrier mechanism between each two adjacent locations as an example, the present application does not limit the number of carrier mechanisms. In some other embodiments, the number of the carrier mechanisms may also be configured as one, that is, one carrier mechanism moves on the conveying track to transport the crystal rod between the locations. In other embodiments, the number of the carrier mechanisms may also be redundant, for example, the number of the carrier mechanisms is equal to the number of locations. In the following embodiments, one carrier mechanism is described by taking one carrier mechanism between each two adjacent locations as an example.

[0085] In one embodiment, see Figure 3, the conveying track 150 includes a track driving component 1500 and a fifth guide rail 1501. The conveying track 150 is connected to the carrying mechanism, for example, connected to the carrying mechanism through a slider 155 arranged on the conveying track 150, for example, the number of the sliders 152 is the same as the number of the carrying mechanism. The fifth guide rail 1501 is arranged in the left and right directions, and the track driving component 1500 is used to drive the slider 152 to slide synchronously on the fifth guide rail 1501 to drive the carrying mechanism to move synchronously. Among them, the track driving component 1500 is exemplified as a driving motor. It should be noted that, although the above embodiment is described by taking the conveying track including the track driving component and the fifth guide rail, and the conveying track is connected to the carrying mechanism through the slider as an example, the present application does not limit the structure of the conveying track and the connection method thereof with the carrying mechanism, as long as it can drive the carrying mechanism arranged thereon to move (for example, drive multiple carrying mechanisms to move synchronously). In some other embodiments, the conveying track may also be a conveying structure including a synchronous belt or a chain, and the carrying mechanism is fixedly arranged on the synchronous belt or the chain, and then the synchronous belt or the chain is driven to move to drive the carrying mechanism to move (for example, drive multiple carrying mechanisms to move synchronously).

[0086] In one embodiment, the structures of the transport mechanisms disposed between every two adjacent locations are the same or similar. In the following embodiments, the structures of the transport mechanisms are described in detail by taking the first transport mechanism as an example.

[0087] In one embodiment, see Fig.10 Combined with Figure 3 , Fig.10 The structure diagram of the first carrier mechanism in one embodiment of the present application is shown. As shown in the figure, the first carrier mechanism 151 includes a carrier 1510 and a fourth lifting mechanism 1511 connected to the carrier 1510. The fourth lifting mechanism 1511 is used to drive the carrier 1510 to move up and down to adapt to the crystal rods 2 of different heights or to raise or lower the height of the crystal rod 2. The carrier 1510 is used to clamp the crystal rod 2. For example, when the heights of the supporting components supporting the crystal rods in the crystal rod quality inspection equipment are different, such as when the heights of the first supporting components and the second supporting components are different, the fourth lifting mechanism 1511 drives the carrier 1510 to move up and down to raise or lower the height of the crystal rod 2, so as to transfer the crystal rod 2 located on the first supporting component to the second supporting component. For another example, when the heights of the crystal rods to be inspected are different, in order to stably clamp the crystal rods, the fourth lifting mechanism 1511 drives the carrier 1510 to move up and down to clamp the crystal rod 2. For example, by driving the carrier 1510 to move up and down, the middle area of ​​the crystal rod can be clamped when the heights of the crystal rods are different.

[0088] In one embodiment, if Fig.10As shown, the fourth lifting mechanism 1511 includes a fourth guide rail 15110, a carrier mounting member 15111 slidably disposed on the fourth guide rail 15110, and a mounting member driving component 15112. The carrier 1510 is disposed on the carrier mounting member 15111, and the carrier mounting member 15111 can move up and down on the fourth guide rail 15110 under the drive of the mounting member driving component 15112, so as to drive the carrier 1510 carried by it to move up and down. The mounting member driving component is exemplified by a driving motor.

[0089] In one embodiment, please continue to refer to Fig.10 The carrier 1510 includes a carrier body 15100 and at least two clamping members 15101 disposed on the carrier body 15100. The at least two clamping members 15101 can be opened and closed to clamp or release the crystal rod 2. In some examples, some or all of the at least two clamping members 15101 can be movably disposed on the carrier body 15100 to achieve the opening and closing action. For example, a part of the clamping members 15101 is fixedly disposed on the carrier body 15100, and another part of the clamping members 15101 is movably disposed on the carrier body 15100; for another example, all the clamping members 15101 are movably disposed on the carrier body 15100. The number of the clamping members 15101 can be as follows: Fig.10 In one example, the number of the clamping members 15101 is two and all of them are movably arranged on the carrier body 15101 to illustrate the opening and closing action of at least two clamping members 15101, such as Fig.10 As shown, the two clamping members 15101 are symmetrically arranged along the left-right direction, and the carrier body 15100 is provided with a sliding groove 151000 for the clamping members 15101 to slide. In this embodiment, the carrier 1510 also includes a clamping member driving mechanism (not shown), and the clamping member driving mechanism is connected to the two clamping members 15101 for driving the two clamping members 15101 to move in the sliding groove 151000 on the carrier body 15100, thereby realizing the two clamping members 15101 to move toward or away from each other, so as to realize the opening and closing action to clamp or release the crystal rod 2. Specifically, in the process of clamping the crystal rod 2, the clamp driving mechanism drives the two clamps 15101 to move toward each other on the carrier body 15100 to reduce the distance between the two clamps 15101 to clamp the crystal rod 2, and in the process of releasing the crystal rod 2, the clamp driving mechanism drives the two clamps 15101 to move in opposite directions on the carrier body 15100 so that there is a gap between the two clamps 15101 and the crystal rod 2 to release the crystal rod 2. The clamp driving mechanism includes, for example, a cylinder or a drive motor.

[0090] In one embodiment, in order to clamp the crystal rod more stably, the contour of the inner surface of the clamp is adapted to the contour of the surface of the crystal rod. The inner surface of the clamp is a surface for contacting the crystal rod. In one example, the crystal rod is cylindrical, and the contour of the inner surface of the clamp is approximately arc-shaped. In other examples, the crystal rod is square columnar, and the contour of the inner surface of the clamp can be approximately square.

[0091] In one embodiment, in order to prevent the clamping member from damaging the surface of the crystal rod during the process of clamping the crystal rod, a buffer component is further provided on the inner surface of the clamping member, and the buffer component is used to prevent the crystal rod from being damaged during the process of clamping the crystal rod. The anti-knock protection structure is made of a flexible material, and the flexible material is exemplified by silicone, rubber or thermoplastic polyurethane.

[0092] In one embodiment, the multi-station crystal rod quality inspection equipment further includes a main control unit, which is used to execute the steps of controlling the first and second quality inspection devices to perform quality inspection operations, generating first and second quality inspection results based on the detection data detected by the first and second quality inspection devices during the quality inspection operations, generating defect marking instructions based on the first quality inspection results and / or the second quality inspection results, and controlling the defect marking device to perform defect marking. Further, when the loading device described below loads the crystal rod inspection device and the unloading device loads the crystal rod inspection device, the main control unit is also used to communicate with the loading device and the unloading device to control the loading device and the unloading device to perform corresponding transfer tasks, etc.

[0093] See also Fig.11 , which is a schematic diagram of the structure of a main control unit in one embodiment of the present application, wherein the main control unit includes a storage device 170 and a processing device 171 connected to the storage device 170. Furthermore, the main control unit also includes a communication interface 172.

[0094] In some embodiments, the storage device 170 is used to store at least one program, and the at least one program can be executed by the processing device 171 to coordinate the storage device 170 to implement the steps of controlling the first and second quality inspection devices to perform quality inspection operations, generating first and second quality inspection results based on data detected by the first and second quality inspection devices during the quality inspection operation, generating defect marking instructions based on the first quality inspection result and / or the second quality inspection result, and controlling the defect marking device to perform defect marking in the above-mentioned embodiments. Here, the storage device 170 includes but is not limited to: read-only memory (ROM), random access memory (RAM), non-volatile RAM (NVRAM). For example, the storage device 170 includes a flash memory device or other non-volatile solid-state storage device. In some embodiments, the storage device 170 may also include a memory away from one or more processing devices 171, such as a network attached memory accessed via an RF circuit or an external port and a communication network, wherein the communication network may be the Internet, one or more intranets, local area networks, wide area networks, storage area networks, etc., or a suitable combination thereof. The memory controller controls access to memory by other components of the device, such as the CPU and peripheral interfaces.

[0095] In some embodiments, the processing device 171 includes one or more processors. The processing device 171 can be operable to perform data read and write operations with the storage device 170. The processing device 171 includes one or more general-purpose microprocessors, one or more application-specific processors (ASICs), one or more digital signal processors (Digital Signal Processors, referred to as DSPs), one or more field programmable gate arrays (Field Programmable Gate Arrays, referred to as FPGAs), or any combination thereof.

[0096] In some embodiments, the communication interface 172 includes at least one interface unit, each of which is used to output a visual interface, receive a human-computer interaction event generated according to the operation of a technician, etc. For example, the communication interface 172 includes but is not limited to: a serial interface such as an HDMI interface or a USB interface, or a parallel interface, etc. In one embodiment, the communication interface 172 also includes a network communication unit, which is a device for data transmission using a wired or wireless network, examples of which include but are not limited to: an integrated circuit including a network card, a local area network module such as a WiFi module or a Bluetooth module, a wide area network module such as a mobile network, etc.

[0097] This application also provides a multi-station crystal rod quality inspection system, please refer to Fig.12, which is a structural schematic diagram of a multi-station crystal rod quality inspection system in one embodiment of the present application. As shown in the figure, the multi-station crystal rod quality inspection system includes a multi-station crystal rod quality inspection device 1, a loading device 3, and an unloading device 4.

[0098] The multi-station crystal rod quality inspection device 1 and its structure and function are the same or similar to the structure and function of the multi-station crystal rod quality inspection device disclosed in any of the above embodiments. Figures 1 to 11 Any embodiment described in the related description will not be repeated here.

[0099] The loading device 3 is adjacent to the loading area of ​​the multi-station crystal rod quality inspection device 1, and is used to transfer the crystal rod to the loading area. In one embodiment, the multi-station crystal rod quality inspection device 1 is in communication connection with the loading device 3, and the main control unit of the multi-station crystal rod quality inspection device 1 issues a loading instruction to the loading device 3. For example, after the crystal rod located on the temporary placement component is unloaded by the crystal rod transfer device, the main control unit issues a loading instruction to the loading device 3. The loading instruction is used to instruct the loading device 3 to perform the loading operation, and then the loading device 3 transfers the crystal rod to the loading area after receiving the loading instruction, for example, transfers the crystal rod from the loading port to the loading area and clamps the crystal rod in the loading area so that the crystal rod entry device can read the label information of the crystal rod. Further, in the embodiment where the multi-station crystal rod quality inspection device also includes a temporary placement component, the loading device 3 is also used to transfer the crystal rod from the crystal rod entry device to the temporary placement component.

[0100] The unloading device 4 is disposed adjacent to the unloading area of ​​the multi-station crystal rod quality inspection device 1, and is used to unload the crystal rod that has been defect-marked and is located in the unloading area. In one embodiment, the multi-station crystal rod quality inspection device 1 is in communication connection with the unloading device 4, and the main control unit of the multi-station crystal rod quality inspection device 1 sends an unloading instruction to the unloading device 4, for example, after the multi-station crystal rod quality inspection device 1 completes the defect marking of the crystal rod, the unloading instruction is sent to the unloading device 4, and the unloading instruction is used to instruct the unloading device 4 to perform the unloading operation, and then the unloading device 4 unloads the crystal rod that has been defect-marked from the unloading area after receiving the unloading instruction, for example, unloading the crystal rod from the defect marking device and transporting it out of the multi-station crystal rod quality inspection device through the unloading port.

[0101] In one embodiment, see Fig.12, the loading equipment 3 includes at least one loading platform (not numbered) for storing multiple crystal rods and a loading robot 31. The loading robot 31 transfers the crystal rods stored in the loading platform to the loading location. In one example, the loading platform is exemplified as a transfer vehicle, and the transfer vehicle includes a plurality of receiving slots for storing crystal rods that match the size of the crystal rods. In one example, the loading robot 31 includes an articulated arm 310 and a manipulator (not shown) for clamping the crystal rod disposed at the far end of the articulated arm 310, and the articulated arm 310 is used to provide the manipulator with freedom of movement so that the manipulator can drive the clamped crystal rod to move. The structure and function of the manipulator are the same or similar to those of the carrier described above, and will not be repeated here.

[0102] In one embodiment, in order to prevent the loading robot from colliding with the staff during movement, the loading device further includes a guardrail arranged around the loading platform and the loading robot. For the sake of distinction, in the following embodiments, the guardrail in the loading device is referred to as the first guardrail, and the guardrail in the unloading device is referred to as the second guardrail. In one example, in order to facilitate the loading platform to enter and exit the first guardrail 32, the first guardrail 32 is further provided with an opening 320 on the side away from the multi-station crystal rod quality inspection device 1 to allow the upper loading platform to enter and exit.

[0103] In one embodiment, please continue to refer to Fig.12 The unloading equipment 4 includes at least one unloading platform 40 for placing the crystal rod and an unloading robot 41. The unloading robot 41 transfers the crystal rod 2 that has been defect-marked to the unloading platform 40. The structure and function of the unloading platform 40 and the unloading robot 41 are the same or similar to the loading platform 30 and the loading robot 31 described above, and will not be repeated here.

[0104] In one embodiment, in order to prevent the unloading robot from colliding with the staff during movement, Fig.12 As shown, the unloading device 4 further includes a second guardrail 42 disposed around the unloading platform 40 and the unloading robot 41. In one example, in order to facilitate the unloading platform 40 to enter and exit the second guardrail 42, an opening 420 allowing the upper loading platform 40 to enter and exit is further disposed on the side of the second guardrail 42 away from the multi-station crystal rod quality inspection device 1.

[0105] The present application also provides a quality inspection method applied to a multi-station crystal rod quality inspection device. The multi-station crystal rod quality inspection device may be the multi-station crystal rod quality inspection device described in any of the above embodiments of the present application. For details, please refer to Figures 1 to 11Any embodiment described in the related description thereof will not be repeated here. The quality inspection method applied to the multi-station crystal rod quality inspection equipment can be executed by the main control device described above, the processor in each device in the multi-station crystal rod quality inspection equipment, or other main control devices that can execute the quality inspection method applied to the multi-station crystal rod quality inspection equipment. In the following embodiments, taking the execution of the quality inspection method applied to the multi-station crystal rod quality inspection equipment by the main control device described above as an example, the main control device is communicatively connected with the crystal rod input device, the first quality inspection device, the second quality inspection device, the defect marking device, and the crystal rod transport device to control the crystal rod input device, the first quality inspection device, the second quality inspection device, the defect marking device, and the crystal rod transport device to work together to realize the quality inspection method applied to the multi-station crystal rod quality inspection equipment described in any of the following embodiments.

[0106] See also Fig.13 , which is a flow chart of a quality inspection method for a multi-station crystal rod quality inspection device in one embodiment of the present application. As shown in the figure, the quality inspection method for the multi-station crystal rod quality inspection device includes step S110, step S120, step S130, and step S140.

[0107] In step S110, when the main control device detects that there is a crystal ingot with a label attached at the loading location, it controls the crystal ingot input device to read the label information of the label.

[0108] In one embodiment, the main control device is connected in communication with the aforementioned loading robot. When the loading robot is detected to clamp the crystal rod in the loading position, for example, clamping the crystal rod above the crystal rod input device, the main control device can determine that the loading position has a crystal rod with a label attached, and then control the crystal rod input device to read the label information of the label. In another embodiment, when the staff clamps the crystal rod with a label in the loading position, the staff inputs the in-position information through the input device connected in communication with the main control device. When the main control device receives the in-position information, it can be determined that the loading position has a crystal rod with a label attached.

[0109] In step S120, when the crystal ingot is transported to the first quality inspection location, the main control device controls the first quality inspection device to perform a first quality inspection operation on the crystal ingot to generate a first quality inspection result associated with the label information.

[0110] In one embodiment, the main control device is connected to the crystal rod transfer device in communication. When the main control device determines that the crystal rod transfer device transfers the crystal rod to the first quality inspection location (for example, the crystal rod is transferred to the first supporting assembly in the first quality inspection device and the crystal rod transfer device is away from the spacing space of the projection measuring instrument), the main control device controls the first lifting mechanism in the first quality inspection device to drive the projection measuring instrument to move up and down, and controls the projection measuring instrument to obtain the projection image to perform the first quality inspection operation during the up and down movement of the projection measuring instrument, and then the main control unit performs image analysis based on the projection image to obtain the first quality inspection result. Further, in the embodiment where the first supporting assembly includes a first turntable, the main control device is also used to control the rotation of the first turntable, for example, the first turntable can be controlled to rotate all the time during the lifting and lowering of the projection measuring instrument, or the first turntable can be controlled to rotate once when the projection measuring instrument is at a fixed height, or the first turntable can be controlled to rotate an angle after the projection measuring instrument completes a scan of the crystal rod from top to bottom or from bottom to top, and then the next scan is performed.

[0111] In step S130, when the crystal ingot is transported to the second quality inspection location, the main control device controls the second quality inspection device to perform a second quality inspection operation on the crystal ingot to generate a second quality inspection result associated with the label information.

[0112] In one embodiment, when the main control device determines that the crystal rod transfer device transfers the crystal rod to the second quality inspection location (for example, the crystal rod is transferred to the second supporting assembly in the second quality inspection device and the crystal rod transfer device is away from the image capture mechanism directly below), the main control device controls the second lifting mechanism in the second quality inspection device to drive the laser to move up and down so that the image capture mechanism can obtain the end face image of the crystal rod when the laser projects the laser at different heights of the crystal rod to perform the second quality inspection operation, and then the main control device performs image analysis based on the end face image to obtain the second quality inspection result. Further, in an embodiment where the second supporting assembly also includes a second turntable, the main control device is also used to control the rotation of the second turntable, for example, when the laser completes scanning of one position, the second turntable is controlled to rotate by a preset angle so that the laser scans the crystal rod at the next position.

[0113] In step S140, the main control device controls the defect marking device to mark the crystal ingot based on the defect marking instruction when the crystal ingot is transported to the unloading location; wherein the defect marking instruction is generated using the first quality inspection result and / or the second quality inspection result.

[0114] In one embodiment, the main control device generates the defect marking instruction based on the first quality inspection result and / or the second quality inspection result. When the main control device determines that the crystal ingot transfer device transfers the crystal ingot to the unloading location (for example, when the crystal ingot is transferred to the defect marking device), the main control device controls the third lifting mechanism to drive the coding mechanism to move to the quality inspection defect position based on the defect marking instruction, and when the coding mechanism reaches the quality inspection defect position, controls the coding mechanism to spray the mark toward the quality inspection defect position based on the defect marking instruction. The defect marking instruction is the same or similar to that described above and will not be repeated here.

[0115] In summary, the multi-station crystal rod quality inspection equipment, system and quality inspection method disclosed in the present application reads the label information of the crystal rod to be quality inspected by a crystal rod input device arranged at the loading position of the quality inspection table in the multi-station crystal rod quality inspection equipment, and respectively performs the first quality inspection operation and the second quality inspection operation on the crystal rod using the first quality inspection device arranged at the first quality inspection position of the quality inspection table and the second quality inspection device arranged at the second quality inspection position of the quality inspection table, so as to generate the first quality inspection result and the second quality inspection result associated with the label information, and performs the defect marking operation on the crystal rod using the defect marking device arranged at the unloading position of the quality inspection table. Defect marking, and the crystal rod transfer device arranged on the transfer platform in the multi-station crystal rod quality inspection equipment can transfer the crystal rod among the loading position, the first quality inspection position, the second quality inspection position, and the unloading position. In this way, different types of inspections can be completed with the help of one quality inspection equipment, and there is no need for manual hand-held inspection equipment and manual transfer of the crystal rod between different positions, which improves the inspection efficiency. The defect marking device can realize automatic marking of defects, and the crystal rod entry device can read the label information to associate the quality inspection result with the label information, so as to realize automatic inspection of the crystal rod.

[0116] The above embodiments are merely illustrative of the inventive essence of the present application and the beneficial effects obtained, and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the principles and scope of the present application. Therefore, all equivalent modifications or changes achieved by a person with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A multi-station crystal rod quality inspection equipment, characterized in that: include: A base, comprising a quality inspection table and a transfer table adjacent to the quality inspection table; A crystal ingot input device, arranged at the loading area of ​​the quality inspection table, for reading label information of the crystal ingot with a label to be inspected; A first quality inspection device, disposed at a first quality inspection position of the quality inspection table, for performing a first quality inspection operation on the crystal rod to generate a first quality inspection result associated with the label information; A second quality inspection device, disposed at a second quality inspection position of the quality inspection table, for performing a second quality inspection operation on the crystal rod to generate a second quality inspection result associated with the label information; A defect marking device, disposed at a material unloading area of ​​the quality inspection table, for marking defects on the crystal rod based on a defect marking instruction; wherein the defect marking instruction is generated using the first quality inspection result and / or the second quality inspection result; A crystal rod transport device is arranged on the transfer platform and is used to transfer the crystal rod between the loading position, the first quality inspection position, the second quality inspection position, and the unloading position.

2. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: The crystal rod is a sapphire crystal rod.

3. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: The crystal rod input device is arranged below the scanning window opened on the quality inspection table and located at the loading area. The crystal rod is clamped above the scanning window with its end face where the label is located facing downward so that the crystal rod input device can scan the label through the scanning window.

4. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: It also includes a temporary placement component arranged in the loading area, which is used to place the crystal rods with read label information so that the crystal rod transfer device can transfer them.

5. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: The first quality inspection device is an appearance quality inspection device, and the first quality inspection operation includes inspecting any item of the diameter, verticality, parallelism, and grinding amount of the crystal rod.

6. The multi-station crystal rod quality inspection equipment according to claim 1 or 5, characterized in that: The first quality inspection device comprises: A projection measuring instrument, comprising a projector and a receiver with a separation space, wherein the separation space is used to receive the crystal ingot transported by the crystal ingot transporting device; A first supporting component is disposed on the quality inspection table and located in the spacing space to support the crystal rod; The first lifting mechanism is connected to the projection measuring instrument and is used to drive the projection measuring instrument to move up and down to obtain a projection image of the crystal rod.

7. The multi-station crystal rod quality inspection equipment according to claim 6, characterized in that: The first supporting assembly includes a turntable, and the turntable is used to cooperate with the lifting and lowering of the projection measuring instrument to drive the crystal rod to rotate so that the projection measuring instrument can obtain a projection image containing three-dimensional information of the crystal rod.

8. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: The second quality inspection device is an internal defect detection device, and the second quality inspection operation includes detecting any item of bubbles, cracks, and impurities in the crystal rod.

9. The multi-station crystal rod quality inspection equipment according to claim 8, characterized in that: The second quality inspection device comprises: A second supporting assembly is disposed in the second quality inspection area to support the crystal ingot transported by the crystal ingot transporting device; A measuring assembly, comprising at least one laser disposed on a side of the second supporting assembly and an image capturing mechanism disposed opposite to the second supporting assembly; The second lifting mechanism is connected to the laser and is used to drive the laser to move up and down to project the laser toward the crystal rod so that the image capturing mechanism can obtain the end face image of the crystal rod when the laser projects the laser at different heights of the crystal rod.

10. The multi-station crystal rod quality inspection equipment according to claim 9, characterized in that: The second supporting assembly includes a turntable, and the turntable is used to drive the crystal rod to rotate by a preset angle to scan the next position when the laser completes scanning of one position.

11. The multi-station crystal rod quality inspection equipment according to claim 9, characterized in that: The lasers are configured as four lasers evenly distributed within 1 / 3 of the circumference of the crystal rod.

12. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: It also includes a third quality inspection device disposed at a third quality inspection area of ​​the quality inspection platform, and configured to perform a third quality inspection operation on the crystal rod to generate a third quality inspection result associated with the label information.

13. The multi-station crystal rod quality inspection equipment according to claim 12, characterized in that: The third quality inspection location is located between the first quality inspection location and the second quality inspection location.

14. The multi-station crystal rod quality inspection equipment according to claim 12, characterized in that: The third quality inspection device is a crystal orientation detection device.

15. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: The defect marking device comprises: The coding mechanism, when driven to the quality inspection defect position, sprays a mark toward the quality inspection defect position based on the defect marking instruction; The third lifting mechanism is connected to the coding mechanism and is used to drive the coding mechanism to move to the quality inspection defect position based on the defect marking instruction.

16. The multi-station crystal rod quality inspection equipment according to claim 1, characterized in that: The crystal rod transport device includes a conveying track arranged along each location and at least one carrier arranged on the conveying track, and the carrier moves on the conveying track to transport the crystal rod between each location.

17. The multi-station crystal rod quality inspection equipment according to claim 16, characterized in that: A transport mechanism is arranged between every two adjacent locations to transport the crystal rods between the two adjacent locations.

18. The multi-station crystal rod quality inspection equipment according to claim 16, characterized in that: The transport mechanism includes a carrier and a fourth lifting mechanism connected to the carrier, and the fourth lifting mechanism is used to drive the carrier to move up and down to adapt to crystal rods of different heights or to raise or lower the height of the crystal rod.

19. A multi-station crystal rod quality inspection system, characterized in that: include: The multi-station crystal rod quality inspection equipment according to any one of claims 1 to 18; A loading device, disposed adjacent to a loading area of ​​the multi-station crystal rod quality inspection device, and used for transporting the crystal rod to the loading area; The unloading equipment is arranged adjacent to the unloading area of ​​the multi-station crystal rod quality inspection equipment, and is used for unloading the crystal rods that have been defect-marked and are located at the unloading area.

20. The multi-station crystal ingot quality inspection system according to claim 19, characterized in that: The loading equipment includes at least one loading platform for storing a plurality of crystal rods and a loading robot, and the loading robot transfers the crystal rods stored in the loading platform to the loading location.

21. The multi-station crystal ingot quality inspection system according to claim 20, characterized in that: The feeding equipment also includes a guardrail arranged around the feeding platform and the feeding robot.

22. The multi-station crystal ingot quality inspection system according to claim 19, characterized in that: The unloading equipment includes at least one unloading platform for placing the crystal rod and a unloading robot, and the unloading robot transfers the crystal rod that has been defect-marked to the unloading platform.

23. The multi-station crystal rod quality inspection system according to claim 22, characterized in that: The unloading equipment also includes a guardrail arranged around the unloading platform and the unloading robot.

24. A quality inspection method applied to the multi-station crystal rod quality inspection equipment according to any one of claims 1 to 18, characterized in that: The quality inspection method comprises the following steps: When a crystal ingot with a label attached is detected at the loading location, the crystal ingot input device is controlled to read label information of the label; When the crystal ingot is transported to the first quality inspection location, controlling a first quality inspection device to perform a first quality inspection operation on the crystal ingot to generate a first quality inspection result associated with the label information; When the crystal ingot is transported to the second quality inspection location, controlling the second quality inspection device to perform a second quality inspection operation on the crystal ingot to generate a second quality inspection result associated with the label information; When the crystal rod is transported to the unloading location, a defect marking device is controlled to mark defects on the crystal rod based on a defect marking instruction; wherein the defect marking instruction is generated using the first quality inspection result and / or the second quality inspection result.

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