High-precision lifting platform

Abstract

The invention discloses a high-precision lifting platform which comprises a top cover, a sliding block, a base, a piezoelectric motor, a connecting plate and a vertical guide rail. A base concave cavity is formed in the top surface of the base, the sliding block is mounted on the side wall of the base concave cavity through a vertical guide rail, and a machine body of the piezoelectric motor is mounted in the base concave cavity through a connecting plate, so that the output end of the piezoelectric motor is in contact with the sliding block; the thickness of the connecting plate can be changed according to the actual center position of the sliding block, so that the acting force point of the piezoelectric motor on the sliding block is located at the center position of the sliding block, and deviation generated by movement is reduced. The top cover is used for bearing the load of the high-precision lifting platform, located above the base and fixedly connected with the sliding block. Threaded holes of different sizes can be machined in the top cover, and the top cover can adapt to loads of different types. The lifting mechanism can realize high-precision lifting of a load mounted on the top cover, and has the advantage of simple and reliable transmission structure.

Description

Technical Field

[0001] The invention relates to a high-precision displacement platform, in particular to a high-precision lifting platform. Background Art

[0002] High-precision displacement platforms are mainly used to achieve micron or nanometer displacement positioning, and are mainly used in high-tech industries such as precision optics, ultra-precision machining motion platforms, large-scale integrated circuit processing, micro-electromechanical system device packaging and cell precision control. Precision displacement drive is a common supporting technology in the field of high-tech. Its indicators such as stroke, speed and accuracy will directly determine the detection accuracy, control accuracy and material processing accuracy of the instrument. Traditional precision drive is mainly achieved through electromagnetic drive, pneumatic and hydraulic principles. However, it has a large volume and mass due to the constraints of working principles and structures. Therefore, it is difficult to achieve micro- and nano-level positioning accuracy for the micro-drive needs in many high-end technology industries, and it can no longer meet the development requirements of precision technology in the above-mentioned fields of precision optical engineering, modern medicine, aerospace, etc. The piezoelectric displacement platform uses the inverse piezoelectric effect of piezoelectric materials in piezoelectric motors to easily achieve nanometer resolution, and has shown important scientific research value and broad engineering application prospects in micro- and nano-level positioning systems.

[0003] At present, the existing micro- and nano-displacement positioning platforms are of three types: single-degree-of-freedom, two-degree-of-freedom, and three-degree-of-freedom. The single-degree-of-freedom micro- and nano-displacement positioning platforms include two types: horizontal direction (X or Y direction) and vertical direction (Z direction). However, the existing Z-direction nano-displacement positioning platforms have complex transmission, low precision, high processing cost, small output force, and greater difficulty in installation and assembly errors when moving in the Z direction.

[0004] For example, Chinese invention patent 201811028673.2 discloses a high-precision lifting platform based on a flexible hinge, including a main support seat for carrying the remaining two parts, guide rails for providing guidance are provided on both sides of the support seat, guide rail plates are provided on both sides of the support seat, the guide rails on both sides are fixed to the guide rail plates on both sides by bolts, and a guide rail plate connector is also provided at one end of the support seat; a ball screw and a nut adapter are provided at the center position inside the support seat, the ball screw passes through the nut adapter, the ball screw is at the geometric center of the guide rails on both sides, and the driving force direction coincides with the guide rail motion geometry; the outer side of the guide rail plate is also provided with a table adapter block to provide adjustment points for table leveling during the later debugging process. This Chinese invention patent solves the redundant positioning of multiple guide rails through a flexible hinge structure, applies it to the lifting platform, reduces the yaw and pitch values ​​of the lifting platform for loads at different center positions, and improves its load capacity; effectively improves the straightness of the lifting platform. However, this Chinese invention patent has the following disadvantages: complex structure; the use of screw drive will result in mechanical errors such as clearance, which affects the accuracy. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a high-precision lifting platform.

[0006] To solve the above technical problems, the technical solution adopted by the present invention is as follows:

[0007] A high-precision lifting platform, characterized in that it comprises: a top cover, a slider, a base, a piezoelectric motor, a connecting plate and a vertical guide rail;

[0008] A base cavity is provided on the top surface of the base, and the slider is installed on the side wall of the base cavity through a vertical guide rail. The body of the piezoelectric motor is installed in the base cavity through a connecting plate, so that the output end of the piezoelectric motor is in contact with the slider. The thickness of the connecting plate can be changed according to the actual center position of the slider, so that the force point of the piezoelectric motor on the slider is at the center position of the slider to reduce the deviation caused by the movement.

[0009] The top cover is used to carry the load of the high-precision lifting platform. It is located above the base and fixedly connected to the slider. The top cover can be processed with threaded holes of different sizes to adapt to different types of loads.

[0010] Thus, the friction force generated by the contact between the output end of the piezoelectric motor and the slider is used to drive the slider to move up and down, so as to synchronously drive the top cover to move up and down, thereby realizing the lifting and lowering of the load installed on the top cover; wherein, the vertical guide rail serves to limit the stroke of the slider; since the output resolution of the piezoelectric motor is high, which can reach 50 nanometers, and since the transmission between the piezoelectric motor and the slider is achieved through friction, there is no mechanical error caused by the gap in the screw transmission. Therefore, the present invention can achieve high-precision lifting and lowering of the load installed on the top cover, and has the advantages of simple and reliable transmission structure.

[0011] Preferred: See Figure 5 An alumina ceramic strip is fixed on the surface of the slider, and the contact position between the output end of the piezoelectric motor and the slider is the alumina ceramic strip.

[0012] Therefore, since the alumina ceramic strip has sufficient strength, good wear resistance and processability, and since the movement mode of the slider during movement is to rely on the direct contact between the surfaces of the two components to generate friction to achieve lifting and lowering movement, if the same material is used for contact, the wear will increase, wear dust will be generated, and wear damage will be caused. Therefore, the present invention uses alumina ceramic strips as the contact surface between the output end of the piezoelectric motor and the slider, which can reduce wear and increase the life of parts.

[0013] Preferably, the vertical guide rail adopts a roller cross guide rail, which has good motion repeatability and can be used as a moving part to achieve lifting motion and ensure stability.

[0014] As a preferred embodiment of the present invention: Figures 2 to 4 , the high-precision lifting platform also includes a spring support device, the top surface of the base is also provided with a spring mounting hole, and the spring support device is installed in the spring mounting hole. The specific installation method is as follows: the spring support device is composed of a support guide column, an upper support spring, a sliding sleeve and a lower support spring, the support guide column is composed of a guide column large diameter portion and a guide column small diameter portion, the upper support spring, the sliding sleeve and the lower support spring are sequentially mounted on the guide column small diameter portion from top to bottom, the upper support spring is pressed between the guide column large diameter portion and the sliding sleeve, and the sliding sleeve is slidably matched with the guide column small diameter portion; the spring mounting hole is composed of an upper spring mounting hole and a lower spring mounting hole, the spring support device is arranged in the upper spring mounting hole, and the guide column large diameter portion is at least partially slidably matched with the upper spring mounting hole in the up and down direction, the upper end portion of the guide column large diameter portion can be exposed upward from the top surface of the base, the sliding sleeve is slidably matched with the upper spring mounting hole in the up and down direction, the lower support spring is pressed between the sliding sleeve and the bottom surface of the upper spring mounting hole, and the lower end portion of the guide column small diameter portion is slidably matched with the lower spring mounting hole in the up and down direction;

[0015] The top cover is fixedly connected to the guide post large diameter portion of the support guide post.

[0016] The cam is provided with a plurality of springs, each of which ...

[0017] Preferred: See Figure 2 The high-precision lifting platform is provided with two spring support devices and two vertical guide rails, the two spring support devices are symmetrically arranged about the vertical plane where the output end axis of the piezoelectric motor is located, and the two vertical guide rails are symmetrically arranged about the vertical plane where the output end axis of the piezoelectric motor is located. Thus, the lifting stability of the high-precision lifting platform can be improved.

[0018] As a preferred embodiment of the present invention: Figure 2The high-precision lifting platform also includes an adjustable displacement platform; the connecting plate is installed in the base cavity through the adjustable displacement platform, so that the adjustable displacement platform can drive the piezoelectric motor to move through the connecting plate to adjust the gap distance between the piezoelectric motor and the slider, thereby adjusting the contact pressure between the output end of the piezoelectric motor and the slider.

[0019] Therefore, the present invention can more simply and reliably adjust the contact pressure between the output end of the piezoelectric motor and the slider to adapt to the friction force required to drive the slider to move up and down, thereby reducing the difficulty of installation and assembly errors.

[0020] As a preferred embodiment of the present invention: Figures 6 to 8 , the connecting plate is capable of mounting at least one piezoelectric motor;

[0021] In the case where only one piezoelectric motor is installed on the connecting plate: the connecting plate is only provided with a connecting plate base, the connecting plate base is installed in the base cavity, and the mounting surface of the connecting plate base fixes the body of the piezoelectric motor;

[0022] For the case where N piezoelectric motors are installed on the connecting plate, N≥2: the connecting plate is provided with a connecting plate base and N-1 connecting plate extension seats which are arranged at intervals along a straight line and fixed by connecting parts, the connecting plate base is installed in the concave cavity of the base, and the mounting surfaces of the connecting plate base and the N-1 connecting plate extension seats respectively fix the body of the piezoelectric motor.

[0023] Therefore, for occasions with smaller motion loads, the present invention can use a connecting plate base to install only one piezoelectric motor to reduce the volume of the high-precision lifting platform. For occasions with larger motion loads, a connecting plate expansion seat can be added to install multiple piezoelectric motors to increase the output load.

[0024] Preferably: the connecting plate base is provided with a connecting plate base boss, and the end face of the connecting plate base boss serves as the mounting surface of the connecting plate base; the connecting plate extension seat is provided with a connecting plate extension seat boss, and the end face of the connecting plate extension seat boss serves as the mounting surface of the connecting plate extension seat.

[0025] Therefore, the connecting plate base boss and the connecting plate extension seat boss serve as mounting surfaces, which can facilitate the installation of the piezoelectric motor, and they protrude relative to the connecting plate base and the connecting plate extension seat respectively, which can prevent the piezoelectric motor from generating friction with the connecting plate base and the connecting plate extension seat during movement.

[0026] As a preferred embodiment of the present invention: Figure 2 The high-precision lifting platform also includes a grating reading head sensor; the grating reading head sensor is fixed on the base, and a grating ruler is fixed on the slider. The grating reading head sensor is aligned with the grating ruler through a through hole on the base. Therefore, the lifting distance of the slider and the load can be accurately read by the grating reading head sensor.

[0027] As a preferred embodiment of the present invention: a notch is provided on the side of the base, and a detachable right rear support and a left rear support are installed in the notch for closing, so that the right rear support and the left rear support can be removed during assembly to facilitate the installation of various components in the base, and after the assembly is completed, the right rear support and the left rear support are put into the notch to maintain the side closure and the integrity of the appearance of the base; and a protective cover covering the piezoelectric motor is installed in the base cavity of the base to protect the piezoelectric motor and maintain the appearance design.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] First, the present invention drives the slider 3 to move up and down through the friction force generated by the contact between the output end of the piezoelectric motor 6 and the slider 3, so as to synchronously drive the top cover 1 to move up and down, and can realize the lifting and lowering of the load installed on the top cover 1; wherein, the vertical guide rail 12 serves to limit the stroke of the slider 3; since the output resolution of the piezoelectric motor 6 is high, which can reach 50 nanometers, and since the transmission between the piezoelectric motor 6 and the slider 3 is achieved through friction, there is no mechanical error caused by the gap in the screw transmission, therefore, the present invention can realize high-precision lifting and lowering of the load installed on the top cover 1, and has the advantages of simple and reliable transmission structure.

[0030] Second, the present invention adopts a spring support device 2 composed of a support guide column 201, an upper support spring 202, a sliding sleeve 203 and a lower support spring 204, and a spring mounting hole 501 composed of an upper spring mounting hole and a lower spring mounting hole is arranged on the top surface of the base 5. The sliding fit between the large diameter portion 201d of the guide column and the upper spring mounting hole, the sliding fit between the sliding sleeve 203 and the small diameter portion 201x of the guide column, and the sliding fit between the small diameter portion 201x of the guide column and the lower spring mounting hole play a guiding role in the upward and downward movement of the support guide column 201; the base 5 sequentially supports the top cover 1 through the bottom surface of the upper spring mounting hole, the lower support spring 204, the sliding sleeve 203, the upper support spring 202 and the large diameter portion 201d of the guide column 201. and the load they carry, so that the upper support spring 202 and the lower support spring 204 can balance the gravity of the top cover 1 and part of the load, so as to reduce the overturning moment, prevent the slider 3 from overturning, and improve the smoothness of the movement of the slider 3 along the Z direction. In addition, the combination of the upper support spring 202, the sliding sleeve 203 and the lower support spring 204 can prevent the left and right twisting phenomenon that may be caused by using only one support spring, further ensuring the smoothness of the movement of the slider 3 along the Z direction. In addition, by using the upper support spring 202 and the lower support spring 204 with corresponding stiffness coefficients, the loads of different gravity conditions can be balanced. Therefore, the present invention is suitable for high-precision lifting in the Z direction, and has the advantage of easy adjustment of the gravity balance point of different loads.

[0031] Third, the present invention adopts an adjustable displacement stage 10, which can more simply and reliably adjust the contact pressure between the output end of the piezoelectric motor 6 and the slider 3 to adapt to the friction force required to drive the slider 3 up and down, thereby reducing the error difficulty of installation and assembly.

[0032] Fourth, for occasions with smaller motion loads, the present invention can use a connecting plate base 1101 to install only one piezoelectric motor 6 to reduce the volume of the high-precision lifting platform. For occasions with larger motion loads, a connecting plate expansion seat 1102 can be added to install multiple piezoelectric motors 6 to increase the output load. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments:

[0034] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0035] Figure 2 It is a structural explosion diagram of the present invention;

[0036] Figure 3 It is a structural schematic diagram of the base in the present invention;

[0037] Figure 4 It is a structural schematic diagram of the spring support device in the present invention;

[0038] Figure 5 It is a structural schematic diagram of the slider in the present invention;

[0039] Figure 6 It is a structural schematic diagram of a connecting plate example 1 in the present invention;

[0040] Figure 7 This is a schematic diagram of the structure of the second example of the connecting plate in the present invention;

[0041] Figure 8 This is a schematic diagram of the structure when the piezoelectric motor is installed in the second connecting plate example of the present invention. DETAILED DESCRIPTION

[0042] The present invention is described in detail below in conjunction with the embodiments and the accompanying drawings to help those skilled in the art better understand the inventive concept of the present invention. However, the protection scope of the claims of the present invention is not limited to the following embodiments. For those skilled in the art, all other embodiments obtained without creative work without departing from the inventive concept of the present invention belong to the protection scope of the present invention.

[0043] Embodiment 1

[0044] like Figures 1 to 8As shown, the present invention discloses a high-precision lifting platform, comprising: a top cover 1, a slider 3, a base 5, a piezoelectric motor 6, a connecting plate 11 and a vertical guide rail 12;

[0045] A base cavity is provided on the top surface of the base 5, and the slider 3 is installed on the side wall of the base cavity through a vertical guide rail 12. The body of the piezoelectric motor 6 is installed in the base cavity through a connecting plate 11, so that the output end of the piezoelectric motor 6 is in contact with the slider 3; wherein, the thickness of the connecting plate 11 can be changed according to the actual center position of the slider 3, so that the force point of the piezoelectric motor 6 on the slider 3 is at the center position of the slider 3, so as to reduce the deviation caused by the movement.

[0046] The top cover 1 is used to bear the load of the high-precision lifting platform, which is located above the base 5 and fixedly connected to the slider 3. The top cover 1 can be processed with threaded holes of different sizes to adapt to different types of loads.

[0047] Thus, through the friction force generated by the contact between the output end of the piezoelectric motor 6 and the slider 3, the slider 3 is driven to move up and down, so as to synchronously drive the top cover 1 to move up and down, and the lifting and lowering of the load installed on the top cover 1 can be realized; wherein, the vertical guide rail 12 serves to limit the stroke of the slider 3; since the output resolution of the piezoelectric motor 6 is high, which can reach 50 nanometers, and since the transmission between the piezoelectric motor 6 and the slider 3 is realized by friction, there is no mechanical error caused by the gap in the screw transmission. Therefore, the present invention can realize high-precision lifting and lowering of the load installed on the top cover 1, and has the advantages of simple and reliable transmission structure.

[0048] The above is a basic implementation of the first embodiment of the present invention, and further optimization, improvement and limitation can be made on the basis of the basic implementation:

[0049] Preferred: See Figure 5 An alumina ceramic strip 301 is fixed to the surface of the slider 3 , and the contact position between the output end of the piezoelectric motor 6 and the slider 3 is the alumina ceramic strip 301 .

[0050] Therefore, since the alumina ceramic strip 301 has sufficient strength, good wear resistance and processability, and since the movement mode of the slider during movement is to rely on the direct contact between the surfaces of the two components to generate friction to achieve lifting and lowering movement, if the same material is used for contact, the wear will increase, wear dust will be generated, and wear damage will be caused. Therefore, the present invention uses the alumina ceramic strip 301 as the contact surface between the output end of the piezoelectric motor 6 and the slider 3, which can reduce wear and increase the life of parts.

[0051] Preferably, the vertical guide rail 12 is a roller cross guide rail, which has good motion repeatability and can ensure stability when used as a moving component to achieve lifting motion.

[0052] Embodiment 2

[0053] On the basis of the above-mentioned embodiment 1, this embodiment 2 also adopts the following preferred implementation manner:

[0054] See also Figures 2 to 4 The high-precision lifting platform also includes a spring support device 2. The top surface of the base 5 is also provided with a spring mounting hole 501. The spring support device 2 is installed in the spring mounting hole 501. The specific installation method is: the spring support device 2 is composed of a support guide column 201, an upper support spring 202, a sliding sleeve 203 and a lower support spring 204. The support guide column 201 is composed of a guide column large diameter portion 201d and a guide column small diameter portion 201x. The upper support spring 202, the sliding sleeve 203 and the lower support spring 204 are sequentially mounted on the guide column small diameter portion 201x from top to bottom. The upper support spring 202 abuts against the guide column large diameter portion 201d and the sliding sleeve 2 03, the sliding sleeve 203 and the guide column small diameter portion 201x are slidably matched; the spring mounting hole 501 is composed of an upper spring mounting hole and a lower spring mounting hole, the spring support device 2 is arranged in the upper spring mounting hole, and the guide column large diameter portion 201d is at least partially slidably matched with the upper spring mounting hole in the up-down direction, the upper end portion of the guide column large diameter portion 201d can be exposed upward from the top surface of the base 5, the sliding sleeve 203 and the upper spring mounting hole are slidably matched, the lower support spring 204 is pressed between the sliding sleeve 203 and the bottom surface of the upper spring mounting hole, and the lower end portion of the guide column small diameter portion 201x is slidably matched with the lower spring mounting hole in the up-down direction;

[0055] The top cover 1 is fixedly connected to the guide post large diameter portion 201 d of the support guide post 201 .

[0056] Thus, the sliding fit between the large diameter portion 201d of the guide post and the upper spring mounting hole, the sliding fit between the sliding sleeve 203 and the small diameter portion 201x of the guide post, and the sliding fit between the small diameter portion 201x of the guide post and the lower spring mounting hole play a guiding role in supporting the guide post 201 to move in the up and down directions; the base 5 supports the top cover 1 and the load it carries through the bottom surface of the upper spring mounting hole, the lower support spring 204, the sliding sleeve 203, the upper support spring 202 and the large diameter portion 201d of the guide post of the support guide post 201 in sequence, so that the upper support spring 202 and the lower support spring 204 can balance the top cover 1 and part of it. The gravity of the load can reduce the overturning moment, prevent the slider 3 from overturning, and improve the smoothness of the movement of the slider 3 along the Z direction. In addition, the combination of the upper support spring 202, the sliding sleeve 203 and the lower support spring 204 can prevent the left-right twisting phenomenon that may be caused by using only one support spring, further ensuring the smoothness of the movement of the slider 3 along the Z direction. Moreover, by using the upper support spring 202 and the lower support spring 204 with corresponding stiffness coefficients, the loads under different gravity conditions can be balanced. Therefore, the present invention is suitable for high-precision lifting in the Z direction, and has the advantage of easy adjustment of the gravity balance point of different loads.

[0057] The above is the basic implementation manner of the second embodiment, and further optimizations, improvements, and limitations can be made on the basis of this basic implementation manner:

[0058] Preferably: Refer to Figure 2 , the high-precision lifting table is provided with two spring support devices 2 and two vertical guide rails 12. The two spring support devices 2 are symmetrically arranged with respect to the vertical plane where the axis of the output end of the piezoelectric motor 6 is located, and the two vertical guide rails 12 are symmetrically arranged with respect to the vertical plane where the axis of the output end of the piezoelectric motor 6 is located. Thus, the lifting stability of the high-precision lifting table can be improved.

[0059] Embodiment Three

[0060] On the basis of the above Embodiment One or Embodiment Two, the following preferred implementation manner is also adopted in this Embodiment Three:

[0061] Refer to Figure 2 , the high-precision lifting table further includes an adjustable displacement table 10; the connecting plate 11 is installed in the base cavity through the adjustable displacement table 10, so that the adjustable displacement table 10 can drive the piezoelectric motor 6 to move through the connecting plate 11 to adjust the clearance distance between the piezoelectric motor 6 and the slider 3, and realize the adjustment of the contact pressure between the output end of the piezoelectric motor 6 and the slider 3.

[0062] Thus, the present invention can more simply and reliably adjust the contact pressure between the output end of the piezoelectric motor 6 and the slider 3 to adapt to the friction force required for driving the slider 3 to move up and down, and reduce the error difficulty of installation and assembly.

[0063] Embodiment Four

[0064] On the basis of any one of the above Embodiments One to Three, the following preferred implementation manner is also adopted in this Embodiment Four:

[0065] Refer to Figures 6 to 8 , the connecting plate 11 can install at least one piezoelectric motor 6;

[0066] For the case where only one piezoelectric motor 6 is installed on the connecting plate 11: the connecting plate 11 only has a connecting plate base body 1101. The connecting plate base body 1101 is installed in the base cavity, and the installation surface of the connecting plate base body 1101 fixes the body of the piezoelectric motor 6;

[0067] For the case where N piezoelectric motors 6 are installed on the connecting plate 11, N≥2: the connecting plate 11 is provided with a connecting plate base 1101 and N-1 connecting plate extension seats 1102 which are arranged at intervals along a straight line direction and connected and fixed by connecting members 1103. The connecting plate base 1101 is installed in a concave cavity of the base, and the mounting surfaces of the connecting plate base 1101 and the N-1 connecting plate extension seats 1102 respectively fix the body of the piezoelectric motor 6.

[0068] Therefore, for occasions with smaller motion loads, the present invention can use a connecting plate base 1101 to install only one piezoelectric motor 6 to reduce the volume of the high-precision lifting platform. For occasions with larger motion loads, a connecting plate expansion seat 1102 can be added to install multiple piezoelectric motors 6 to increase the output load.

[0069] The above is a basic implementation of the fourth embodiment, and further optimization, improvement and limitation can be made on the basis of the basic implementation:

[0070] Preferably: the connecting plate base 1101 is provided with a connecting plate base boss 1104, and the end face of the connecting plate base boss 1104 serves as the mounting surface of the connecting plate base 1101; the connecting plate extension seat 1102 is provided with a connecting plate extension seat boss 1105, and the end face of the connecting plate extension seat boss 1105 serves as the mounting surface of the connecting plate extension seat 1102.

[0071] Therefore, the connecting plate base boss 1104 and the connecting plate extension seat boss 1105 serve as mounting surfaces, which can facilitate the installation of the piezoelectric motor 6, and they protrude relative to the connecting plate base 1101 and the connecting plate extension seat 1102 respectively, which can prevent the piezoelectric motor 6 from generating friction with the connecting plate base 1101 and the connecting plate extension seat 1102 during movement.

[0072] Embodiment 5

[0073] Based on any one of the above embodiments 1 to 4, this embodiment 5 also adopts the following preferred implementation modes:

[0074] See also Figure 2 The high-precision lifting platform further includes a grating reading head sensor 4; the grating reading head sensor 4 is fixed on the base 5, and a grating ruler is fixed on the slider 3. The grating reading head sensor 4 is aligned with the grating ruler through the through hole on the base 5. Therefore, the lifting distance of the slider 3 and the load can be accurately read by the grating reading head sensor 4.

[0075] Embodiment 6

[0076] Based on any one of the above embodiments 1 to 5, this embodiment 6 also adopts the following preferred implementation modes:

[0077] A notch is provided on the side of the base 5, and a detachable right rear support 7 and left rear support 8 are installed in the notch for closing. During assembly, the right rear support 7 and the left rear support 8 can be removed to facilitate the installation of various components in the base 5. After the assembly is completed, the right rear support 7 and the left rear support 8 are inserted into the notch to keep the side closed and the appearance of the base 5 intact. In addition, a protective cover 9 covering the piezoelectric motor 6 is installed in the base cavity of the base 5 to protect the piezoelectric motor 6 and maintain the appearance design.

[0078] Preferably, the high-precision lifting platform of the present invention preferably adopts the following specific structural design:

[0079] The spring support device 2, slider 3, and vertical guide rail 12 are arranged on the front side of the base cavity of the base 5, the piezoelectric motor 6, connecting plate 11, and adjustable displacement platform 10 are arranged on the rear side of the base cavity of the base 5, and the grating reading head sensor 4 is arranged on the left side of the base cavity of the base 5.

[0080] See also Figure 2 The body of the piezoelectric motor 6 is fixedly connected to the connecting plate 11, and the connecting plate 11 is fixedly connected to the adjustable displacement stage 10 by bolts. The right rear support 7 is fixedly connected to the base 5 by bolts; the left rear support 8 is fixedly connected to the base 5 by bolts; and the protective cover 9 is fixedly connected to the base 5 by bolts.

[0081] See also Figure 3 The grating reading head sensor 4 is installed on the grating scale mounting seat 505 on the side of the base 5 by bolts, and the adjustable displacement stage 10 is installed on the displacement stage mounting hole 502 of the base 5 by bolts; the wiring groove 503 of the base 5 plays a role in protecting the cables and can ensure the normal wiring of the piezoelectric motor; the positioning mounting hole 504 of the base 5 can be connected to the platform or instrument and other devices by bolts to achieve an accurate installation effect.

[0082] See also Figure 5 The top cover 1 is connected to the top cover mounting hole 304 of the slider 3 by bolts. The vertical guide rail 12 is fixedly connected to the cross roller guide mounting hole 303 of the slider 3 by bolts, and the vertical guide rail 12 is fixedly connected to the base 5 by bolts. The grating ruler is installed and fixed in the grating ruler mounting groove 302 of the slider 3.

[0083] See also Figure 6 The connecting plate base 1101 of the connecting plate 11 is provided with a wiring groove 1101a for conveniently installing the input and control cables of the piezoelectric motor 6.

[0084] Preferably, the high-precision lifting platform of the present invention preferably adopts the following materials:

[0085] The base 5 is made of 6061 aluminum alloy and is processed by CNC.

[0086] The material of the support guide column 201 is preferably 6061 aluminum profile, CNC processed; the upper support spring 202 and the lower support spring 204 are preferably alloy steel; the material of the sliding sleeve 203 is preferably brass, CNC processed.

[0087] The slider 3 is preferably made of 6061 aluminum alloy CNC machined.

[0088] The connecting plate 11 is made of 6061 aluminum alloy and processed by CNC.

[0089] Preferably, the assembly process of the high-precision lifting platform of the present invention is as follows:

[0090] First, the vertical guide rail 12 is installed to the base 5 by bolts;

[0091] Secondly, independently assemble and debug the piezoelectric motor 6, the adjustable displacement stage 10, and the connecting plate 11, install and connect them, and fix them to the threaded holes on the side of the base 5 by bolts;

[0092] Next, place the spring support device 2 until it reaches the mounting hole of the base 5;

[0093] Then, the top cover 1 is installed on the slider 3 by bolts, and the parallelism and pre-tightening degree are debugged. After the required parallelism and reasonable pre-tightening degree are achieved, the translation stage is locked;

[0094] Finally, the grating reading head sensor 4, the protective cover 9, the right rear support 7 and the left rear support 8 are installed in sequence.

[0095] The present invention is not limited to the above-mentioned specific implementation modes. According to the above-mentioned contents, in accordance with the common technical knowledge and customary means in the field, without departing from the above-mentioned basic technical ideas of the present invention, the present invention can also make other various forms of equivalent modifications, replacements or changes, all of which fall within the protection scope of the present invention.

Claims

1. A high-precision lifting platform, characterized in that: include: A top cover (1), a slider (3), a base (5), a piezoelectric motor (6), a connecting plate (11) and a vertical guide rail (12); The top surface of the base (5) is provided with a base cavity, the slider (3) is mounted on the side wall of the base cavity via a vertical guide rail (12), and the body of the piezoelectric motor (6) is mounted in the base cavity via a connecting plate (11), so that the output end of the piezoelectric motor (6) contacts the slider (3); The top cover (1) is used to bear the load of the high-precision lifting platform, and is located above the base (5) and fixedly connected to the slider (3).

2. The high-precision lifting platform according to claim 1, characterized in that: An alumina ceramic strip (301) is fixed to the surface of the slider (3), and the contact position between the output end of the piezoelectric motor (6) and the slider (3) is the alumina ceramic strip (301).

3. The high-precision lifting platform according to claim 1, characterized in that: The vertical guide rail (12) is a roller cross guide rail.

4. The high-precision lifting platform according to any one of claims 1 to 3, characterized in that: The high-precision lifting platform also includes a spring support device (2). The top surface of the base (5) is also provided with a spring installation hole (501). The spring support device (2) is installed in the spring installation hole (501). The specific installation method is as follows: the spring support device (2) is composed of a support guide column (201), an upper support spring (202), a sliding sleeve (203) and a lower support spring (204). The support guide column (201) is composed of a guide column large diameter portion (201d) and a guide column small diameter portion (201x). The upper support spring (202), the sliding sleeve (203) and the lower support spring (204) are sequentially mounted on the guide column small diameter portion (201x) from top to bottom. The upper support spring (202) is pressed against the guide column large diameter portion (201d). 1d) and a sliding sleeve (203), the sliding sleeve (203) and the small diameter portion (201x) of the guide column are slidably matched; the spring mounting hole (501) is composed of an upper spring mounting hole and a lower spring mounting hole, the spring support device (2) is arranged in the upper spring mounting hole, and the large diameter portion (201d) of the guide column is at least partially slidably matched with the upper spring mounting hole in the up-down direction, the upper end portion of the large diameter portion (201d) of the guide column can be exposed upward from the top surface of the base (5), the sliding sleeve (203) and the upper spring mounting hole are slidably matched in the up-down direction, the lower support spring (204) is pressed between the sliding sleeve (203) and the bottom surface of the upper spring mounting hole, and the lower end portion of the small diameter portion (201x) of the guide column is slidably matched with the lower spring mounting hole in the up-down direction; The top cover (1) is fixedly connected to the guide column large diameter portion (201d) of the support guide column (201).

5. The high-precision lifting platform according to claim 4, characterized in that: The high-precision lifting platform is provided with two spring support devices (2) and two vertical guide rails (12), the two spring support devices (2) are symmetrically arranged about the vertical plane where the output end axis of the piezoelectric motor (6) is located, and the two vertical guide rails (12) are symmetrically arranged about the vertical plane where the output end axis of the piezoelectric motor (6) is located.

6. The high-precision lifting platform according to any one of claims 1 to 3, characterized in that: The high-precision lifting platform also includes an adjustable displacement platform (10); the connecting plate (11) is installed in the base cavity through the adjustable displacement platform (10), so that the adjustable displacement platform (10) can drive the piezoelectric motor (6) to move through the connecting plate (11), so as to adjust the gap distance between the piezoelectric motor (6) and the slider (3), thereby adjusting the contact pressure between the output end of the piezoelectric motor (6) and the slider (3).

7. The high-precision lifting platform according to any one of claims 1 to 3, characterized in that: The connecting plate (11) is capable of mounting at least one piezoelectric motor (6); In the case where only one piezoelectric motor (6) is installed on the connecting plate (11): the connecting plate (11) is provided with only a connecting plate base (1101), the connecting plate base (1101) is installed in the base cavity, and the installation surface of the connecting plate base (1101) fixes the body of the piezoelectric motor (6); In the case where the connecting plate (11) is installed with N piezoelectric motors (6), N≥2: the connecting plate (11) is provided with a connecting plate base (1101) and N-1 connecting plate extension seats (1102) which are arranged at intervals in a straight line direction and connected and fixed by a connecting piece (1103); the connecting plate base (1101) is installed in a concave cavity of the base, and the installation surfaces of the connecting plate base (1101) and the N-1 connecting plate extension seats (1102) respectively fix the body of the piezoelectric motor (6).

8. The high-precision lifting platform according to claim 7, characterized in that: The connecting plate base (1101) is provided with a connecting plate base boss (1104), and the end surface of the connecting plate base boss (1104) serves as the mounting surface of the connecting plate base (1101); the connecting plate extension seat (1102) is provided with a connecting plate extension seat boss (1105), and the end surface of the connecting plate extension seat boss (1105) serves as the mounting surface of the connecting plate extension seat (1102).

9. The high-precision lifting platform according to any one of claims 1 to 3, characterized in that: The high-precision lifting platform also includes a grating reading head sensor (4); the grating reading head sensor (4) is fixed on the base (5), a grating ruler is fixed on the slider (3), and the grating reading head sensor (4) is aligned with the grating ruler through a through hole on the base (5).

10. The high-precision lifting platform according to any one of claims 1 to 3, characterized in that: A notch is provided on the side of the base (5), and a detachable right rear support (7) and a left rear support (8) are installed in the notch to seal the notch; and a protective cover (9) covering the piezoelectric motor (6) is installed in the base cavity of the base (5).

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