Air floatation light source capable of isolating vibration and film detection equipment

Abstract

The invention relates to an air floatation light source capable of isolating vibration and film detection equipment, and the air floatation light source comprises a shell which is of a hollow structure and is internally provided with an air floatation cavity; the ventilation block is embedded in the upper part of the shell, a plurality of air floatation holes are uniformly distributed in the upper surface of the ventilation block, and an air channel communicated with each air floatation hole from the air floatation cavity is formed in the ventilation block; the light guide glass is of a vertical thin plate structure, is embedded in the ventilation block and penetrates through the thickness direction of the ventilation block; the line light source is tightly attached to the lower portion of the light guide glass, and the length direction of the line light source is in the length direction of the light guide glass. The air floating light source not only can provide backlight, but also can provide airflow enabling the thin film to float, and vibration is prevented from being transmitted to the thin film. The film detection equipment comprises an unwinding mechanism, a front reversing roller set, an air floating light source, a rear reversing roller set and a winding mechanism which are sequentially arranged, and a visual mechanism is arranged above the air floating light source. According to the thin film detection equipment, under the condition that the conveying speed of the thin film is high, the high detection precision can still be kept.

Description

Technical Field

[0001] The present invention relates to the technical field of lighting devices, and in particular to a vibration-insulated air-floating light source and a film detection device. Background Art

[0002] At present, domestic semiconductor film products have higher and higher requirements for visual inspection accuracy and inspection efficiency. Under the condition of ensuring continuous operation without stopping inspection, the camera has extremely high requirements for the depth of field of the product. In theory, although the faster the semiconductor film is conveyed, the higher the inspection efficiency, the semiconductor film is generally attached to the camera lens during the winding process to complete the image acquisition, but the faster the conveying speed, the higher the vibration frequency will be. The equipment frame will transmit the vibration to the camera, and the conveying roller will also transmit the vibration to the semiconductor film. The method to reduce the vibration of the camera is to use a large depth of field camera, but the vibration of the film will still cause image blur, which restricts the improvement of inspection accuracy.

[0003] Chinese patent CN220084721U discloses a thin film defect detection device that can detect internal defects, upper surface defects and lower surface defects during the film conveying process. The film here is not a semiconductor film, and the defects are holes, black spots, crystal points, scratches, spots, impurities and other appearance defects that can be clearly observed by the naked eye, and the detection accuracy requirements are not high. When the conveying speed is not high, the slight vibration of the equipment will not have a great impact on the detection accuracy.

[0004] Japanese patent JP1995022992B2 discloses an air flotation rod for positioning, drying or curing continuous flat flexible materials. However, this air flotation rod can only provide gas and heat, but not light, and the heat generated is not conducive to protecting the semiconductor film.

[0005] Chinese patent CN210775277U discloses a combined light source for detecting glass scratches, dirt and bubbles. Here, the light emitted by six line light sources is refracted by a diffuser plate and then emitted from the light outlet, thereby irradiating the glass to be inspected. This light source is aimed at glass, a hard plate with a large mass, and the influence of vibration on accuracy does not need to be considered.

[0006] Therefore, it is necessary to provide a new light source to solve the above problems. Summary of the invention

[0007] The main purpose of the present invention is to provide a vibration-insulated air-floating light source, which can suspend a film by blowing air upward through a breathable block, and provide light upward to the center of the breathable block through a light-guiding glass, thereby providing high-brightness lighting while avoiding transmission of vibration to the film.

[0008] The present invention achieves the above-mentioned purpose through the following technical scheme: A vibration-isolated air-floating light source, comprising: The shell is a hollow structure with an air flotation cavity inside; A breathable block is embedded in the upper part of the shell, and has a plurality of evenly distributed air flotation holes on its upper surface, and has an air passage inside thereof connecting each air flotation hole from the air flotation cavity; The light-guiding glass is in a vertical thin plate structure, which is embedded in the air-permeable block and runs through the thickness direction of the air-permeable block; The line light source is closely arranged below the light-guiding glass, and the length direction of the line light source is along the length direction of the light-guiding glass.

[0009] Specifically, the air channel is formed by nano-pores in the air-permeable block.

[0010] Specifically, the line light source includes a strip-shaped bottom plate and a plurality of LED lamp beads arranged along the length direction of the bottom plate.

[0011] Furthermore, the shell also includes a cooling cavity located below the LED lamp bead, the lower part of the air flotation cavity and the upper part of the cooling cavity are separated by the bottom plate, and the air flotation cavity and the cooling cavity are connected by a curved pipe at the same end.

[0012] Furthermore, the shell includes an upper shell, a middle shell and a lower shell which are sequentially spliced ​​from top to bottom, the upper shell and the lower shell are respectively connected to the middle shell by a plurality of screws, a first sealing ring is clamped between the upper shell and the middle shell, the first sealing ring surrounds the air flotation cavity, a second sealing ring is clamped between the middle shell and the lower shell, the second sealing ring surrounds the cooling cavity.

[0013] Furthermore, the shell body also includes a bottom shell arranged below the lower shell, an air dividing cavity is formed between the lower shell and the bottom shell, the lower shell is provided with an air dividing branch connecting the outlet section of the cooling cavity and the air dividing cavity, and the bottom shell is provided with a plurality of air outlets.

[0014] Furthermore, a muffler is provided on the gas distribution branch, and the gas outlet is arranged close to the muffler.

[0015] Furthermore, an air intake connector is provided at the outer end of the bottom shell, and the air intake connector is connected to the inlet of the cooling chamber through a hose, and the hose is surrounded in the air distribution chamber and bypasses the muffler.

[0016] Another main purpose of the present invention is to provide a film detection device that can maintain high detection accuracy while the film is being conveyed at a high speed.

[0017] The present invention achieves the above-mentioned purpose through the following technical scheme: a film detection device includes an unwinding mechanism, a front reversing roller group, the air floating light source, a rear reversing roller group and a rewinding mechanism arranged in sequence, and a visual mechanism for shooting the film downward is provided above the air floating light source.

[0018] Specifically, it also includes an encoder for measuring the film conveying speed, a photoelectric sensor for detecting whether the film is broken, and a distance sensor for detecting the winding thickness of the winding mechanism.

[0019] The beneficial effects of the technical solution of the present invention are: 1. The air permeable block disperses the airflow evenly to its upper surface through the air channel and sprays it out through the air flotation holes, so that the film does not directly contact the air flotation light source. The light guide glass provides a very long and thin light transmission channel. The light emitted from the LED lamp beads can only pass through the light guide glass upward or reflect multiple times on the side wall of the light guide glass to reach the top, thereby illuminating the film near the middle area of ​​the air permeable block, thus meeting the brightness requirements of the detection backlight.

[0020] 2. The film detection equipment uses the air floating light source to provide backlight for the detection area on the one hand, and uses the air flow to float the film on the other hand, so that the detection area on the film does not directly contact any part of the film detection equipment, so that the impact of the equipment vibration on the film can be ignored. Therefore, even if the film conveying speed is relatively high, it can still maintain a high detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional front view of the film detection equipment; Figure 2 A three-dimensional diagram of an air-floating light source according to an embodiment; Figure 3 It is the main cross-sectional view of the air-floating light source; Figure 4 It is a left sectional view of the air floating light source; Figure 5 A stereogram of a line light source.

[0022] The numbers in the figure represent: 100-Thin film testing equipment, 1-air floating light source, 11-shell, 11a-air floating cavity, 11b-cooling cavity, 11c-air dividing cavity, 111-upper shell, 112-middle shell, 113-lower shell, 114-bottom shell, 1141-air outlet, 12-air permeable block, 13-light-guiding glass, 14-line light source, 141-bottom plate, 142-LED lamp beads, 15a-first sealing ring, 15b-second sealing ring, 16-muffler, 17-air inlet connector, 18-hose, 19-screw; 2- Unwinding mechanism; 3-Front reversing roller group; 4-rear reversing roller group; 5-Rewinding mechanism; 6- Visual mechanism; 7- encoder; 8-Photoelectric sensor; 9- Distance sensor.

[0023] 200-film. DETAILED DESCRIPTION

[0024] The present invention is further described in detail below with reference to specific embodiments.

[0025] Example: like Figure 1 As shown, a film detection device 100 of the present invention comprises an unwinding mechanism 2, a front reversing roller group 3, an air floating light source 1, a rear reversing roller group 4 and a rewinding mechanism 5 which are arranged in sequence. A visual mechanism 6 for photographing the film downward is provided above the air floating light source 1.

[0026] The film 200 is unwound from the unwinding mechanism 2, bypasses the front reversing roller group 3 and the rear reversing roller group 4, and is then rewound by the rewinding mechanism 5. During this process, the film 200 is naturally tightened. When the film 200 is between the front reversing roller group 3 and the rear reversing roller group 4, it passes through the detection area between the air floating light source 1 and the visual mechanism 6. The air floating light source 1 provides backlight for the detection area on the one hand, and uses the air flow to float the film 200 on the other hand, so that the detection area on the film 200 does not directly contact any part of the film detection device 100. Because the contact part closest to the detection area on the film 200 is on the front reversing roller group 3 and the rear reversing roller group 4, even if the front reversing roller group 3 and the rear reversing roller group 4 have a small vibration in the vertical direction, it will not have a great impact on the lateral direction of the film 200; and the vibration of the air floating light source 1 will not have a great impact on the air flow velocity acting on the film 200, so the impact of the equipment vibration on the film 200 can be ignored. Therefore, even if the conveying speed of the film 200 is relatively high, a high detection accuracy can still be maintained.

[0027] like Figure 1 As shown, the film detection device 100 further includes an encoder 7 for measuring the conveying speed of the film 200 , a photoelectric sensor 8 for detecting whether the film 200 is broken, and a distance sensor 9 for detecting the winding thickness of the winding mechanism 5 .

[0028] The encoder 7 includes a roller pressed on the film 200, and the reverse side of the film 200 can be supported by the film roll, the front reversing roller group 3 or the rear reversing roller group 4. During the conveying process of the film 200, it will generate friction on the roller, so that the roller rotates at the same linear speed, so that the encoder 7 can measure the real-time transmission speed of the film 200, so that the unwinding speed of the unwinding mechanism 2 and the rewinding speed of the rewinding mechanism 5 can be controlled to be balanced and reach the required speed range. When the film 200 is conveyed normally, it will block the light path of the photoelectric sensor 8, and the photoelectric sensor 8 will not output an abnormal signal; once the material is broken, the photoelectric sensor 8 can sense the light emitted by itself, thereby outputting an abnormal signal and controlling the film detection device 100 to stop immediately. The distance sensor 9 can monitor the rewinding radius of the film 200. If the raw material roll is finished and the rewinding radius is insufficient, the material can be connected and then the rewinding can be continued; if the rewinding radius is sufficient, the raw material roll can be cut and then the roll can be changed. The encoder 7, the photoelectric sensor 8 and the distance sensor 9 can ensure the stability of the device during operation.

[0029] like Figures 2 to 4 As shown, the air-floating light source 1 includes a shell 11, a breathable block 12, a light-guiding glass 13 and a linear light source 14. The shell 11 is a hollow structure, and has an air-floating cavity 11a, a cooling cavity 11b and an air-dividing cavity 11c inside. The air-permeable block 12 is embedded in the upper part of the shell 11, and has a number of evenly distributed air-floating holes on its upper surface, and has an air passage connecting each air-floating hole from the air-floating cavity 11a inside. The light-guiding glass 13 is a vertical thin plate structure, which is embedded in the breathable block 12 and runs through the thickness direction of the breathable block 12. The linear light source 14 is closely arranged below the light-guiding glass 13, and the length direction of the linear light source 14 is along the length direction of the light-guiding glass 13.

[0030] The air channel is formed by nano-micropores in the air permeable block 2. The main purpose of the air permeable block 12 is to disperse the air flow more evenly to its upper surface through the air channel and spray it out through the air flotation holes, so that the film 200 does not directly contact the air flotation light source 1. Because the air permeable block 12 will occupy most of the area above the air flotation light source 1, the position of the line light source 14 can only be set below the air permeable block 12, and the light is transmitted to a position close to the upper surface of the air permeable block 12 by the light guide glass 13. The light guide glass 13 provides a very long and thin light-transmitting channel. The light emitted from the LED lamp beads 142 can only pass through the light guide glass 13 upwards or reflect multiple times on the side walls of the light guide glass 13 to reach the top, thereby illuminating the film 200 near the middle area of ​​the air permeable block 12, thus meeting the brightness requirements for detecting the backlight.

[0031] like Figure 5As shown, the line light source 14 includes a strip-shaped bottom plate 141 and a plurality of LED lamp beads 142 arranged along the length direction of the bottom plate 141. The cooling chamber 11b is located below the LED lamp beads 142, the lower part of the air flotation chamber 11a and the upper part of the cooling chamber 11b are separated by the bottom plate 141, and the air flotation chamber 11a and the cooling chamber 11b are connected by a bend pipe at the same end.

[0032] The LED lamp beads 142 will be located in the enclosed space of the shell 11, and will inevitably generate heat when emitting light. In order to prevent heat from accumulating in the shell 11 and causing the air flow temperature to rise, which in turn affects the film 200, the air source is used as a refrigerant here at the same time. Because heat is generated by the LED lamp beads 142, the air flow cannot pass directly from bottom to top through the LED lamp beads 142, so the upper part of the cooling chamber 11b must be close to the area where the LED lamp beads 142 are located on the bottom plate 141. The flow direction of the air flow in the air flotation chamber 11a and the cooling chamber 11b is generally horizontal, but in opposite directions. This not only makes rational use of the air flow, but also ensures the safety of the working temperature.

[0033] like Figures 2 to 4 As shown, the shell 11 includes an upper shell 111, a middle shell 112 and a lower shell 113 which are sequentially spliced ​​from top to bottom. The upper shell 111 and the lower shell 113 are respectively connected to the middle shell 112 by a plurality of screws 19. A first sealing ring 15a is clamped between the upper shell 111 and the middle shell 112, and the first sealing ring 15a surrounds the air flotation cavity 11a. A second sealing ring 15b is clamped between the middle shell 112 and the lower shell 113, and the second sealing ring 15b surrounds the cooling cavity 11b.

[0034] Because the interior of the shell 11 has a complex structure, an assembled structure is generally adopted. The upper shell 111 and the middle shell 112 can clamp the air-permeable block 12, and the middle shell 112 and the lower shell 113 can clamp the bottom plate 141, so that the lower wall of the air-permeable block 12, the inner wall of the upper shell 111, the inner wall of the middle shell 112 and the upper wall of the bottom plate 141 can surround and form the air flotation chamber 11a, and at the same time, the lower wall of the bottom plate 141 and the inner wall of the lower shell 113 surround and form the cooling chamber 11b. However, the contact surface between the upper shell 111 and the middle shell 112 may form an air leakage channel, and the contact surface between the middle shell 112 and the lower shell 113 may form an air leakage channel, so it is necessary to seal with two sealing rings. Here, the upper and lower surfaces of the middle shell 112 are provided with a round-shaped sealing groove for accommodating the sealing ring, and the round-shaped sealing groove can also be provided on the bottom surface of the upper shell 111 or the top surface of the lower shell 113.

[0035] like Figures 2 to 4As shown, the housing 11 further includes a bottom shell 114 disposed below the lower shell 113, and an air dividing cavity 11c is formed between the lower shell 113 and the bottom shell 114. The lower shell 113 is provided with an air dividing branch connecting the outlet section of the cooling cavity 11b and the air dividing cavity 11c, and the bottom shell 114 is provided with a plurality of air outlets 1141. A muffler 16 is provided on the air dividing branch, and the air outlets 1141 are arranged near the muffler 16. An air inlet connector 17 is provided at the outer end of the bottom shell 114, and the air inlet connector 17 is connected to the inlet of the cooling cavity 11b through a hose 18, and the hose 18 is surrounded in the air dividing cavity 11c and bypasses the muffler 16.

[0036] In the case of compatible air flotation and cooling functions, the air flow required to cool the LED lamp beads 142 will be much greater than the air flow required to make the film 200 float upward. In the case where the air channel of the air permeable block 12 is only nano-micropores, the flow resistance will also be very large. If the air is compressed in the shell 11, it will cause the assembled shell 11 to crack and create a danger, so it is necessary to set up a split air chamber 11c to separate the excess air on the outlet side of the cooling chamber 11b, and then discharge it to the outside of the air flotation light source 1 through the air outlet 1141. Because the flow rate of this separated air flow in the air branch is very fast, it is easy to generate noise during operation, and the muffler 16 can reduce the working noise. Because the joints (air inlet joint 17 and the connecting elbow between the air flotation chamber 11a and the cooling chamber 11b) of the air flotation light source 1 are generally set on the outside during installation, and the inlet of the cooling chamber 11b is close to the inside, so a pipeline connection is required. However, a hard pipe will conflict with the position of the muffler 16, so a hose 18 is used here for connection. The bottom shell 114 has the function of protecting the muffler 16 and the hose 18, and can also block noise to make the device quieter during operation. In order to increase the air flow rate, the bottom shell 114 is provided with air outlets 1141 on the two side surfaces and the bottom surface close to the muffler 16, and the air outlets 1141 on each surface are radially distributed, so that the ventilation area can be increased and the excess air can be quickly discharged.

[0037] The operating principle of the air-floating light source 1 is as follows: when the LED lamp bead 142 is powered, the light irradiates upward through the light-guiding glass 13, the airflow enters the hose 18 from the air inlet joint 17, and then passes through the cooling chamber 11b, thereby absorbing the heat generated by the LED lamp bead 142, wherein a small amount of airflow enters the air-floating chamber 11a through the connecting elbow, and then is evenly sprayed upward through the nano-micropores in the air-permeable block 12, thereby achieving the purpose of air floatation and lighting on the upper part, and a large amount of airflow enters the air-dividing chamber 11c through the muffler 16, and then is discharged from the air outlet 1141.

[0038] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the creative concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A vibration-isolated air-floating light source, characterized in that include: The shell is a hollow structure with an air flotation cavity inside; A breathable block is embedded in the upper part of the shell, and has a plurality of evenly distributed air flotation holes on its upper surface, and has an air passage inside thereof connecting each air flotation hole from the air flotation cavity; The light-guiding glass is in a vertical thin plate structure, which is embedded in the air-permeable block and runs through the thickness direction of the air-permeable block; The line light source is closely arranged below the light-guiding glass, and the length direction of the line light source is along the length direction of the light-guiding glass.

2. The vibration-isolating air-floating light source according to claim 1, characterized in that: The air channel is formed by nano-pores in the air-permeable block.

3. The vibration-isolating air-floating light source according to claim 1, characterized in that: The line light source comprises a strip-shaped bottom plate and a plurality of LED lamp beads arranged along the length direction of the bottom plate.

4. The vibration-isolating air-floating light source according to claim 3, characterized in that: The shell also includes a cooling cavity located below the LED lamp bead. The lower part of the air flotation cavity is separated from the upper part of the cooling cavity by the bottom plate. The air flotation cavity and the cooling cavity are connected at the same end by a bend pipe.

5. The vibration-insulated air-floating light source according to claim 4, characterized in that: The shell includes an upper shell, a middle shell and a lower shell which are sequentially spliced ​​from top to bottom. The upper shell and the lower shell are respectively connected to the middle shell by a plurality of screws. A first sealing ring is sandwiched between the upper shell and the middle shell, and the first sealing ring surrounds the air flotation cavity. A second sealing ring is sandwiched between the middle shell and the lower shell, and the second sealing ring surrounds the cooling cavity.

6. The vibration-insulated air-floating light source according to claim 5, characterized in that: The shell also includes a bottom shell arranged below the lower shell, an air dividing cavity is formed between the lower shell and the bottom shell, an air dividing branch connecting the outlet section of the cooling cavity and the air dividing cavity is provided on the lower shell, and a plurality of air outlets are provided on the bottom shell.

7. The vibration-isolating air-floating light source according to claim 6, characterized in that: The gas distribution branch is provided with a muffler, and the gas outlet is arranged close to the muffler.

8. The vibration-isolating air-floating light source according to claim 7, characterized in that: An air intake connector is provided at the outer end of the bottom shell, and the air intake connector is connected to the inlet of the cooling chamber through a hose. The hose is surrounded in the air distribution chamber and bypasses the muffler.

9. A thin film detection device, characterized in that: It comprises an unwinding mechanism, a front reversing roller group, an air floating light source according to any one of claims 1 to 8, a rear reversing roller group and a rewinding mechanism which are arranged in sequence, and a visual mechanism for shooting the film downward is arranged above the air floating light source.

10. The thin film detection device according to claim 9, characterized in that: It also includes an encoder for measuring the film conveying speed, a photoelectric sensor for detecting whether the film is broken, and a distance sensor for detecting the winding thickness of the winding mechanism.

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