Sputtering film pressure sensor

Abstract

The invention, which belongs to the technical field of the pressure sensor, provides a sputtering film pressure sensor comprising a sensor base body, a protection ring and a cable. One end of the sensor base body is provided with a first mounting hole and a second mounting hole which are communicated in sequence, and the first mounting hole penetrates through the end face of the sensor base body; the aperture of the second mounting hole is greater than that of the first mounting hole; the protection ring is arranged in the first mounting hole, and the peripheral wall of the protection ring abuts against the hole wall of the first mounting hole; a protruding structure protruding inwards is arranged on the inner circumferential wall of the protection ring. One end of the cable passes through the protection ring and is arranged in the second mounting hole; the outer peripheral wall of the cable abuts against and is fixed to the protruding structure. The sputtering film pressure sensor provided by the invention can prevent the sensor base body and the cable from being damaged, and is long in service life.

Description

Technical Field

[0001] The present invention belongs to the technical field of pressure sensors, and more specifically, relates to a sputtering thin film pressure sensor. Background Art

[0002] Pressure sensor is one of the most commonly used sensors in industrial practice. Sputtered thin film pressure sensor is less affected by temperature. When the temperature changes by 100°C, the zero drift is only 0.5%. Therefore, it is widely used in harsh environments of high temperature and high pressure such as engine combustion chambers. Among them, the cable in the pressure sensor is responsible for transmitting the pressure signal detected by the sensor to the control unit or display device. The installation quality of the cable directly affects the service life of the sensor and the quality of signal transmission.

[0003] In the prior art, the cable is usually directly plugged into the sensor housing, or a protective sleeve is directly set outside the connection between the cable and the housing to protect the joint part. However, the end of the cable will still be directly squeezed against the housing, the housing is prone to deformation, and the outer peripheral surface of the cable near the end is easily damaged, which will reduce the service life of the pressure sensor. Summary of the invention

[0004] The purpose of the present invention is to provide a sputtered thin film pressure sensor, aiming to solve the technical problem that the cable installation structure in the existing pressure sensor is unreasonable, which easily causes damage to the external shell and the cable, thereby affecting the service life of the pressure sensor.

[0005] To achieve the above object, the technical solution adopted by the present invention is: to provide a sputtered thin film pressure sensor, comprising:

[0006] The sensor base has a first mounting hole and a second mounting hole connected in sequence at one end, wherein the first mounting hole passes through the end surface of the sensor base; and the aperture of the second mounting hole is larger than the aperture of the first mounting hole;

[0007] A protective ring is disposed in the first mounting hole, and the outer peripheral wall of the protective ring abuts against the hole wall of the first mounting hole; the inner peripheral wall of the protective ring is provided with a protruding structure protruding inward; and

[0008] One end of the cable passes through the protective ring and is placed in the second mounting hole; the outer peripheral wall of the cable is abutted and fixed to the protruding structure.

[0009] In a possible implementation, the protrusion structure includes a plurality of first protrusion rings arranged at intervals along the axis of the protection ring, and each of the first protrusion rings is arranged around the axis of the protection ring.

[0010] In a possible implementation manner, the protrusion structure includes a second protrusion ring that is spirally arranged around the inner circumferential wall of the protection ring.

[0011] In some embodiments, a plurality of clearance notches are provided on the inner circumferential wall of the protective ring, and the plurality of clearance notches are arranged at intervals along the circumference of the protective ring; wherein the clearance notches penetrate the protruding structure along the axial direction of the protective ring to separate the protruding structure into multiple parts.

[0012] In a possible implementation, the sensor substrate includes:

[0013] The mounting shell has the first mounting hole and the second mounting hole; the mounting shell is also provided with a receiving cavity connected with the second mounting hole;

[0014] A sputtering film core is disposed at the bottom of the accommodating cavity and fixed to the inner peripheral wall of the mounting shell; and

[0015] The circuit component is arranged in the accommodating cavity and placed above the sputtering film core; the circuit component and the sputtering film core are welded and interconnected.

[0016] In some embodiments, the mounting housing comprises:

[0017] The base has a first accommodating cavity which is recessed downward from the top surface, and the sputtering film core is fixed in the first accommodating cavity; a probe is provided at the bottom of the base, and a first channel which is connected with the first accommodating cavity is provided in the probe;

[0018] A mounting cylinder connected to the upper end of the base; a second accommodating cavity extending vertically is formed in the mounting cylinder; the circuit assembly is arranged in the second accommodating cavity; and

[0019] A wire fixing cover connected to the top of the mounting cylinder; the wire fixing cover is provided with the first mounting hole and the second mounting hole;

[0020] Wherein, the first accommodating cavity and the second accommodating cavity are connected up and down to form the accommodating cavity; the second mounting hole is connected to the second accommodating cavity.

[0021] Exemplarily, the first accommodating cavity includes a first connecting hole, a second connecting hole and a third connecting hole which are connected in sequence and have gradually increasing apertures, and the first connecting hole is connected to the first channel; a first step surface is formed at the junction of the first connecting hole and the second connecting hole;

[0022] An annular mounting portion is protruding from the outer peripheral wall of the sputtering film core, the annular mounting portion is placed in the second connecting hole, and the bottom is limited on the first step surface; one end of the sputtering film core extends into the third connecting hole, and the other end extends into the first connecting hole.

[0023] Exemplarily, a second step surface is formed at the junction of the second connecting hole and the third connecting hole; the top of the annular mounting portion is flush with the second step surface and is welded and fixed to the second step surface.

[0024] In some embodiments, a heat shrink tube is provided on the outside of the cable, and the lower end of the heat shrink tube extends downward and covers the outer peripheral wall of the wire fixing cover.

[0025] In a possible implementation manner, a shielding net is provided at one end of the first channel away from the first accommodating cavity.

[0026] Compared with the prior art, the solution shown in the embodiment of the present application is that a protective ring is provided between the sensor base and the cable, so that the cable can be separated from the sensor base, thereby achieving protection of the cable; specifically, a protrusion structure is provided on the protective ring in the present application, and the cable can be clamped by the protrusion structure to ensure the stability of the cable connection, and the cable is provided with expansion and contraction space by the recessed part in the protrusion structure to avoid the cable being crushed during the clamping process, thereby achieving protection of the cable; in addition, a second mounting hole is also provided in the present application to ensure the extension length of the cable and avoid the cable end being clamped in the protrusion structure of the protective ring, thereby ensuring the cable end; the pressure sensor provided by the present application can avoid damage to the sensor base and the cable, and has a long service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 A schematic diagram of the structure of a sputtered thin film pressure sensor provided by an embodiment of the present invention;

[0029] Figure 2 A schematic cross-sectional structure diagram of a sputtered thin film pressure sensor provided by an embodiment of the present invention;

[0030] Figure 3 A schematic cross-sectional structure diagram of an installation housing provided in an embodiment of the present invention;

[0031] Figure 4Schematic diagram of the structure of the protection ring used in the embodiment of the present invention Figure 1 ;

[0032] Figure 5 Schematic diagram of the structure of the protection ring used in the embodiment of the present invention Figure 2 ;

[0033] Figure 6 Schematic diagram of the structure of the protection ring used in the embodiment of the present invention Figure 3 .

[0034] In the figure:

[0035] 1. Sensor substrate; 11. Mounting shell; 111. Base; 112. Mounting cylinder; 113. Wire fixing cover; 1131. First mounting hole; 1132. Second mounting hole; 12. Sputtering film core; 121. Annular mounting portion; 13. Circuit assembly; 14. Accommodating cavity; 141. First accommodating cavity; 1141. First connecting hole; 1142. Second connecting hole; 1143. Third connecting hole; 1144. First step surface; 1145. Second step surface; 142. Second accommodating cavity; 15. Probe; 151. First channel; 152. Shielding net; 2. Protective ring; 21. Raised structure; 22. Make way notch; 3. Cable; 4. Heat shrink tube. DETAILED DESCRIPTION

[0036] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0037] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or indirectly on the other element. It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0038] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "several" is two or more, unless otherwise clearly and specifically defined.

[0039] Please also read Figures 1 to 6 The sputtered thin film pressure sensor provided by the present invention is now described. The sputtered thin film pressure sensor comprises a sensor substrate 1, a protective ring 2 and a cable 3; one end of the sensor substrate 1 is provided with a first mounting hole 1131 and a second mounting hole 1132 which are connected in sequence, and the first mounting hole 1131 passes through the end surface of the sensor substrate 1; the aperture of the second mounting hole 1132 is larger than the aperture of the first mounting hole 1131; the protective ring 2 is arranged in the first mounting hole 1131, and the outer peripheral wall of the protective ring 2 abuts against the hole wall of the first mounting hole 1131; the inner peripheral wall of the protective ring 2 is provided with a protruding structure 21 protruding inwardly; one end of the cable 3 passes through the protective ring 2 and is placed in the second mounting hole 1132; the outer peripheral wall of the cable 3 abuts against the protruding structure 21 and is fixed.

[0040] It should be understood that the first mounting hole 1131 and the second mounting hole 1132 form a step hole along the axial direction of the sensor base 1, wherein the step surface of the step hole is used as a dividing surface, the first mounting hole 1131 is set on one side, and the second mounting hole 1132 is set on the other side; and, the first mounting hole 1131 is used to install the protective ring 2, and the cable 3 is inserted into the second mounting hole 1132 from the first mounting hole 1131, so that the second mounting hole 1132 provides the cable 3 with expansion and contraction space to avoid the end being directly clamped in the protruding structure 21 of the protective ring 2; preferably, a step shaft is provided at the upper end of the sensor base 1, and the above-mentioned step hole is correspondingly provided in the step shaft, and the step shaft is provided so as to ensure the wall thickness of the sensor base 1 and thus ensure its supporting strength.

[0041] Optionally, the protective ring 2 uses a copper ring structure; further, the raised structure 21 is chamfered to ensure that the transition surface of the raised structure 21 is smooth to avoid scratching the cable 3 and to ensure that the cable 3 after crimping can withstand a tensile force of at least 200N.

[0042] Specifically, the cable 3 is made of a high temperature resistant material, and the cable 3 is fixed in the sensor matrix 1 by crimping. Optionally, the outer skin of the high temperature resistant cable 3 is made of Teflon material, and the surface is smooth, and can be directly crimped.

[0043] Compared with the prior art, the sputtered thin film pressure sensor provided by the present invention can separate the cable 3 from the sensor substrate 1 by providing a protective ring 2 between the sensor substrate 1 and the cable 3, thereby protecting the cable 3; specifically, a protrusion structure 21 is provided on the protective ring 2 in the present application, and the cable 3 can be clamped by the protrusion structure 21 to prevent the cable 3 from falling out, thereby ensuring the stability of the connection of the cable 3, and the cable 3 is provided with an expansion and contraction space by the recessed part in the protrusion structure 21, thereby preventing the cable 3 from being crushed during the clamping process, thereby protecting the cable 3; in addition, a second mounting hole 1132 is also provided in the present application, which is used to ensure the extension length of the cable 3 and prevent the end of the cable 3 from being clamped in the protrusion structure 21 of the protective ring 2, thereby ensuring the end of the cable 3; the pressure sensor provided by the present application can avoid damage to the sensor substrate 1 and the cable 3, and has a long service life.

[0044] See also Figure 5 In some possible embodiments, the protruding structure 21 includes a plurality of first protruding rings arranged around the axis of the protective ring 2 , and the plurality of first protruding rings are arranged at intervals along the axis of the protective ring 2 .

[0045] By providing a plurality of groups of first convex rings to form the above-mentioned convex structure 21, the cable 3 is compressed, and the relatively concave areas between adjacent first convex rings are used to provide the cable 3 with expansion and contraction space to prevent the cable 3 from being crushed.

[0046] See also Figure 6 In some possible embodiments, the protruding structure 21 includes a second protruding ring that is spirally arranged around the inner circumferential wall of the protective ring 2 .

[0047] Since the second convex ring is set in a spiral shape, when crimping the cable 3, the cable 3 can be slightly rotated along the spiral direction of the second convex ring to facilitate the installation of the cable 3 while ensuring the connection strength and protection quality of the cable 3.

[0048] See also Figure 5 and Figure 6 In some embodiments, a plurality of clearance notches 22 are provided on the inner circumferential wall of the protective ring 2, and the plurality of clearance notches 22 are arranged at intervals along the circumference of the protective ring 2; wherein the clearance notches 22 penetrate the protruding structure 21 along the axial direction of the protective ring 2 to separate the protruding structure 21 into multiple parts.

[0049] By providing the clearance notch 22 , the crimping surface of the cable 3 is reduced, thereby enhancing the protection of the cable 3 and preventing the cable 3 from being damaged.

[0050] See also Figure 2In some possible embodiments, the sensor substrate 1 includes a mounting shell 11, a sputtered film core 12 and a circuit assembly 13; the mounting shell 11 has a first mounting hole 1131 and a second mounting hole 1132; the mounting shell 11 is also provided with a receiving cavity 14 connected to the second mounting hole 1132; the sputtered film core 12 is arranged at the bottom of the receiving cavity 14 and is fixed to the inner wall of the mounting shell 11; the circuit assembly 13 is arranged in the receiving cavity 14 and is placed above the sputtered film core 12; the circuit assembly 13 is welded and interconnected with the sputtered film core 12.

[0051] Specifically, the sputtered thin film core 12 is assembled in the mounting housing 11 by laser welding and can withstand a pressure of 80 MPa; the sputtered thin film core 12 can withstand a high temperature of 250°C.

[0052] Optionally, the mounting shell 11 is made of stainless steel to ensure supporting strength.

[0053] Specifically, the circuit assembly 13 includes a circuit substrate and a circuit unit, wherein the circuit substrate is arranged close to the sputtered film core 12, and the circuit unit is placed between the circuit substrate and the end of the cable 3; the mounting shell 11 and the circuit substrate and the circuit unit are respectively glued and bonded, the sputtered film core 12 and the circuit substrate are welded and interconnected, and the circuit substrate and the circuit unit are interconnected by pins.

[0054] Optionally, the circuit substrate is made of high-temperature resistant polyimide material, and the patch of the circuit substrate is made of high-temperature resistant solder paste, which can work normally at a high temperature of 200°C; further, the middle of the circuit substrate is hollowed out, and is welded and interconnected with the sputtered thin film core 12 through high-temperature resistant wires, which is easy to operate and has high reliability; in addition, among the components of the circuit substrate, such as peripheral resistors, capacitors and other devices, high-temperature resistant devices are selected.

[0055] In addition, it should be noted that the circuit assembly 13 composed of the circuit substrate and the circuit unit, as well as the specific structure and working principle for realizing pressure detection and transmission between the circuit assembly 13, the sputtered film core 12 and the cable 3, and the connection method are all existing technologies, and this part of the content is not the protection subject of this application, so it will not be repeated.

[0056] Optionally, electronic epoxy glue is potted inside the sensor substrate 1 to improve the vibration resistance of the sensor.

[0057] See also Figure 2In some embodiments, the mounting shell 11 includes: a base 111, a mounting cylinder 112 and a wire fixing cover 113; the base 111 has a first accommodating chamber 141 which is recessed downward from the top surface, and a sputtering film core 12 is fixed in the first accommodating chamber 141; a probe 15 is provided at the bottom of the base 111, and a first channel 151 which is connected to the first accommodating chamber 141 is provided in the probe 15; the mounting cylinder 112 is connected to the upper end of the base 111; a second accommodating chamber 142 which passes through from top to bottom is surrounded by the mounting cylinder 112; a circuit component 13 is provided in the second accommodating chamber 142; the wire fixing cover 113 is connected to the top of the mounting cylinder 112; a first mounting hole 1131 and a second mounting hole 1132 are provided on the wire fixing cover 113; wherein the first accommodating chamber 141 and the second accommodating chamber 142 are connected from top to bottom to form an accommodating chamber 14; the second mounting hole 1132 is connected to the second accommodating chamber 142.

[0058] The first accommodating cavity 141 and the second accommodating cavity 142 are respectively provided to contain the corresponding circuit assembly 13 and the sputtered film core 12; specifically, the base 111 and the mounting cylinder 112 are welded and fixed, and the mounting cylinder 112 and the wire fixing cover 113 are welded and fixed.

[0059] It should be understood that the first channel 151, the first accommodating cavity 141, the second accommodating cavity 142, the second mounting hole 1132 and the first mounting hole 1131 are interconnected in the axial direction of the mounting housing 11. In addition, the upper and lower arrangements referred to in this application are also based on the axial direction of the mounting housing 11.

[0060] Specifically, by configuring the mounting shell 11 to be a structure consisting of three separate parts, namely, a base 111, a mounting cylinder 112 and a wire fixing cover 113, it is possible to facilitate the separate installation of the internal circuit assembly 13, the sputtered film core 12 and the cable 3 while ensuring the overall connection strength.

[0061] Furthermore, a limiting step is provided on the top of the base 111 , and the bottom of the circuit assembly 13 is provided on the limiting step; specifically, the bottom of the circuit substrate abuts against the limiting step to ensure the distance between the circuit substrate and the sputtered film core 12 .

[0062] Specifically, after the sputtered film core 12 is installed in the base 111, the circuit substrate is installed, and then the pins of the circuit unit and the circuit substrate are interconnected, and the external protection is performed by installing the cylinder 112, and then the wire fixing cover 113 and the protective ring 2 are provided, and the cable 3 is crimped, which is convenient to install and simple to operate.

[0063] It should be understood that the wire fixing cover 113 is provided with the above-mentioned first mounting hole 1131 and the second mounting hole 1132. The second mounting hole 1132 can provide expansion and contraction space for the cable 3. At the same time, due to the step structure formed by the different apertures of the first mounting hole 1131 and the second mounting hole 1132, deformation of the wire fixing cover 113 when crimping the cable 3 can be avoided, thereby improving the stability of the installation of the wire fixing cover 113 and enhancing the protection of the wire fixing cover 113.

[0064] See also Figure 2 and Figure 3 Exemplarily, the first accommodating cavity 141 includes a first connecting hole 1141, a second connecting hole 1142 and a third connecting hole 1143 which are connected in sequence and have gradually increasing apertures, and the first connecting hole 1141 is connected to the first channel 151; a first step surface 1144 is formed at the junction of the first connecting hole 1141 and the second connecting hole 1142; an annular mounting portion 121 is protrudingly provided on the outer peripheral wall of the sputtering film core 12, the annular mounting portion 121 is placed in the second connecting hole 1142, and the bottom is limited on the first step surface 1144; one end of the sputtering film core 12 extends into the third connecting hole 1143, and the other end extends into the first connecting hole 1141.

[0065] By providing the first step surface 1144 , the annular mounting portion 121 is abutted against the corresponding first step surface 1144 , thereby supporting the sputtering film core 12 .

[0066] See also Figure 2 and Figure 3 , illustratively, a second step surface 1145 is formed at the junction of the second connection hole 1142 and the third connection hole 1143 ; the top of the annular mounting portion 121 is flush with the second step surface 1145 and is welded and fixed to the second step surface 1145 .

[0067] By setting the second step surface 1145, the welding fixation between the annular mounting part 121 and the second step surface 1145 can be achieved; compared with the side welding method in the traditional technology, the welding between the top of the annular mounting part 121 and the second step surface 1145 in the present application can effectively shorten the welding height, which is conducive to the miniaturization of the pressure sensor.

[0068] In addition, the diameter of the third connecting hole 1143 is larger than the diameters of the first connecting hole 1141 and the second connecting hole 1142, which can conveniently hold the welding head and improve the convenience of welding.

[0069] See also Figure 1 In some embodiments, a heat shrink tube 4 is provided on the outside of the cable 3 , and the lower end of the heat shrink tube 4 extends downward and covers the outer peripheral wall of the wire fixing cover 113 .

[0070] By providing the heat shrink tube 4, the cable 3 can be connected stably while improving the aesthetics; further, glue is applied to the bottom of the heat shrink tube 4 to ensure that the heat shrink tube 4 does not fall off in a high temperature environment.

[0071] See also Figure 2 In some possible embodiments, a shielding net 152 is provided at one end of the first channel 151 away from the first accommodating cavity 14, and the shielding net 152 is used to shield smoke and dust.

[0072] By providing the shielding net 152, it is possible to prevent large particles of smoke and dust from entering from the outside, thereby improving the precision of the instrument; further, the shielding net 152 is an integrated structure with the probe 15 and the base 111, which is convenient for processing.

[0073] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A sputtered thin film pressure sensor, characterized in that: include: A sensor base (1) is provided with a first mounting hole (1131) and a second mounting hole (1132) which are connected in sequence at one end, wherein the first mounting hole (1131) passes through the end surface of the sensor base (1); and the aperture of the second mounting hole (1132) is larger than the aperture of the first mounting hole (1131); A protective ring (2) is arranged in the first mounting hole (1131), and the outer peripheral wall of the protective ring (2) abuts against the hole wall of the first mounting hole (1131); a protruding structure (21) protruding inwards is provided on the inner peripheral wall of the protective ring (2); and One end of the cable (3) passes through the protective ring (2) and is placed in the second mounting hole (1132); the outer peripheral wall of the cable (3) is abutted and fixed to the protruding structure (21).

2. The sputtered thin film pressure sensor according to claim 1, characterized in that: The protruding structure (21) comprises a plurality of first protruding rings arranged at intervals along the axial direction of the protective ring (2), and each of the first protruding rings is arranged around the inner circumferential wall of the protective ring (2).

3. The sputtered thin film pressure sensor according to claim 1, characterized in that: The protruding structure (21) comprises a second protruding ring which is arranged in a spiral shape around the inner peripheral wall of the protective ring (2).

4. The sputtered thin film pressure sensor according to claim 2 or 3, characterized in that: A plurality of clearance notches (22) are provided on the inner circumferential wall of the protective ring (2), and the plurality of clearance notches (22) are arranged at intervals along the circumference of the protective ring (2); wherein the clearance notches (22) penetrate the protruding structure (21) along the axial direction of the protective ring (2) to separate the protruding structure (21) into a plurality of parts.

5. The sputtered thin film pressure sensor according to claim 1, characterized in that: The sensor substrate (1) comprises: A mounting shell (11) having the first mounting hole (1131) and the second mounting hole (1132); a receiving cavity (14) communicating with the second mounting hole (1132) is also provided in the mounting shell (11); A sputtering thin film core (12) is disposed at the bottom of the accommodating cavity (14) and is fixed to the inner peripheral wall of the mounting housing (11); and The circuit component (13) is arranged in the accommodating cavity (14) and is placed above the sputtered thin film core (12); the circuit component (13) and the sputtered thin film core (12) are interconnected by welding.

6. The sputtered thin film pressure sensor according to claim 5, characterized in that: The mounting housing (11) comprises: The base (111) has a first accommodating cavity (141) recessed downward from the top surface, the sputtering thin film core (12) being fixed in the first accommodating cavity (141); a probe (15) is provided at the bottom of the base (111), and a first channel (151) communicating with the first accommodating cavity (141) is provided in the probe (15); A mounting cylinder (112) is connected to the upper end of the base (111); a second accommodating chamber (142) is arranged inside the mounting cylinder (112) and is connected vertically; the circuit assembly (13) is arranged inside the second accommodating chamber (142); and A wire fixing cover (113) connected to the top of the installation cylinder (112); the wire fixing cover (113) is provided with the first installation hole (1131) and the second installation hole (1132); Wherein, the first accommodating cavity (141) and the second accommodating cavity (142) are connected up and down to form the accommodating cavity (14); and the second mounting hole (1132) is connected to the second accommodating cavity (142).

7. The sputtered thin film pressure sensor according to claim 6, characterized in that: The first accommodating cavity (141) comprises a first connecting hole (1141), a second connecting hole (1142) and a third connecting hole (1143) which are connected in sequence and whose apertures gradually increase, and the first connecting hole (1141) is connected to the first channel (151); a first step surface (1144) is formed at the junction of the first connecting hole (1141) and the second connecting hole (1142); An annular mounting portion (121) is protrudingly provided on the outer peripheral wall of the sputtering film core (12); the annular mounting portion (121) is placed in the second connecting hole (1142), and the bottom is limited on the first step surface (1144); one end of the sputtering film core (12) extends into the third connecting hole (1143), and the other end extends into the first connecting hole (1141).

8. The sputtered thin film pressure sensor according to claim 7, characterized in that: A second step surface (1145) is formed at the junction of the second connecting hole (1142) and the third connecting hole (1143); the top of the annular mounting portion (121) is flush with the second step surface (1145) and is welded and fixed to the second step surface (1145).

9. The sputtered thin film pressure sensor according to claim 6, characterized in that: The cable (3) is externally sheathed with a heat shrink tube (4), and the lower end of the heat shrink tube (4) extends downward and covers the outer peripheral wall of the wire fixing cover (113).

10. The sputtered thin film pressure sensor according to claim 6, characterized in that: A shielding net (152) is provided at one end of the first channel (151) away from the first accommodating cavity (14).

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