In-situ measurement device for thermal coupling of vibration force of reflecting mirror and use method of in-situ measurement device

Abstract

The invention discloses an in-situ measurement device for thermal coupling of a reflector vibration force and a use method, and belongs to the technical field of precision optical instrument measurement. The problem that a measuring device capable of comprehensively detecting the influence of vibration and temperature on the angle change of the reflector is lacked in the prior art is solved. The device comprises a central control system, a shell, and a vibration platform, an environment temperature control assembly, a local heating and temperature measuring assembly, an image processing device and three autocollimators which are arranged in the shell and are in signal connection with the central control system. By arranging the three mirrors and the three autocollimators, the vibration deviation in the three-degree-of-freedom direction can be measured at the same time, and then the measurement accuracy is effectively improved. By arranging the vibration platform, the environment temperature control assembly and the local heating and temperature measuring assembly, the stress and thermal load conditions of the reflector in actual working conditions can be simulated, multi-dimensional deformation synchronous monitoring is achieved, and then the real performance of the reflector under the dynamic condition can be accurately reflected.

Description

Technical Field

[0001] The invention relates to an in-situ measuring device for vibration and thermal coupling of a reflecting mirror and a using method thereof, belonging to the technical field of precision optical instrument measurement. Background Art

[0002] The importance of high-precision measurement is increasingly prominent in many key areas of modern science and technology, including but not limited to astronomy, laser ranging, mapping and aerospace engineering. These applications are highly dependent on the accuracy of optical systems, among which the reflector is one of the core components, and a small change in its angle may cause significant errors. Especially in ultra-long-distance observation and ranging, any small angular deviation will be magnified, which will seriously affect the accuracy and reliability of the final result.

[0003] Vibration and temperature changes are the main factors that affect the performance of the reflector. In the actual operating environment, especially when facing extreme conditions, strong vibrations may cause the connection between the reflector and the reflector seat to loosen, which in turn causes the angle of the reflector to change. In addition, with the development of laser technology, the application of high-power lasers increases the risk of local heating of the reflector. The thermal expansion characteristics of the material cause the reflector to deform, further causing the angle to shift. In addition, the different thermal expansion dimensions caused by the uneven thickness of the reflector structure will also cause the reflector to shift from the fitting surface, further causing the angle to shift. Because the temperature inside the equipment is very high in many cases, sometimes the reflector will be locally heated (for example, the laser hitting the reflector will cause the reflector to be locally heated, because the reflector material has thermal expansion, especially for mirrors of unequal thickness, the different values ​​of its thermal expansion dimensions will cause it to deviate unevenly from the fixing plate, and ultimately cause the reflector to have a slight angle shift).

[0004] However, in order to achieve the measurement of the reflector in the prior art, the reflector is generally separated from the reflector seat, the reflector is measured separately, and then the reflector is reinstalled back to the reflector seat after the measurement. This measurement method is not only time-consuming and labor-intensive, but may also introduce additional errors due to slight changes in the reinstallation process. In addition, most of the existing reflector measurement methods cannot simultaneously consider the impact of vibration and temperature changes on the reflector performance. Therefore, there is an urgent need for an in-situ measurement device for vibration and thermal coupling of the reflector to comprehensively detect the impact of vibration and temperature on the reflector angle change. Summary of the invention

[0005] The present invention is to solve the above technical problems and further provides an in-situ measurement device and a method for use of vibration-mechanical-thermal coupling of a reflector.

[0006] The technical solution adopted by the present invention to solve the above technical problems is: An in-situ measurement device for vibration and thermal coupling of a reflector comprises a central control system, a shell, and a vibration platform arranged in the shell and connected to the central control system by signal, an environmental temperature control component, a local heating and temperature measurement component, an image processing device and three autocollimators, wherein an L-shaped mounting plate is fixedly mounted on the vibration platform, a reflector seat on which a reflector is mounted is fixedly mounted on a horizontal plate of the L-shaped mounting plate, the reflector is arranged in parallel with a vertical plate of the L-shaped mounting plate, the first to third mirrors are attached to the L-shaped mounting plate, and the first mirror and the second mirror are arranged in parallel with the front side and the upper side of the reflector respectively, the third mirror is arranged in parallel with the left side or the right side of the reflector, three autocollimators are arranged in one-to-one correspondence with the first to third mirrors respectively, and each autocollimator is connected to the image processing device by signal, the change images of the three degrees of freedom X, Y and Z of the reflector are respectively measured by the three autocollimators, the temperature environment control inside the shell is realized by the environmental temperature control component, and the local heating and temperature measurement component is realized to locally heat the reflector.

[0007] Furthermore, the autocollimator is installed at the bottom of the shell through a two-dimensional moving platform to adjust the test position of the reflector.

[0008] Furthermore, the local heating and temperature measuring assembly includes a rotating turntable and a local heating device and a temperature measuring device installed on the rotating turntable.

[0009] Furthermore, the environmental temperature control component includes a refrigeration module, a heating module and a temperature sensor.

[0010] Furthermore, an air quality detection module and a fan are also provided inside the shell, and the fan is signal-connected to the air quality detection module.

[0011] Furthermore, the shell includes a bottom plate and a protective cover mounted on the bottom plate, and the autocollimator, the vibration platform, and the local heating and temperature measurement components are all installed on the bottom plate.

[0012] Furthermore, the protective cover is made of transparent or translucent material.

[0013] Furthermore, an electrical connection interface is provided on the protective cover for electrical connection between the inside and outside of the protective cover.

[0014] Furthermore, a window is provided on the shell.

[0015] A method for using the above-mentioned in-situ measurement device for vibration and thermal coupling of a reflector, first, the reflector to be measured and the reflector seat on which it is located are fixedly mounted on the horizontal plate of an L-shaped mounting plate, and then the L-shaped mounting plate is fixedly mounted on a vibration platform between three autocollimators; then, the mounting angle of the autocollimator is adjusted so that the image formed by the mirror and the image formed by the reflector are both in the middle of the field of view of the corresponding autocollimator; finally, the vibration platform is started, and during the vibration process, the reflection angle of the mirror and the change of the reflection angle of the reflector are monitored in real time, and the vibration deviation of the reflector is judged based on the reflection angle of the mirror.

[0016] Compared with the prior art, the present invention has the following effects: The first mirror, the second mirror and the third mirror are all used as reference mirrors, and the vibration deviation of the reflector is determined based on the reflection angle of the mirror. The first mirror is parallel to the mirror surface with reflection function on the reflector to form a group, and the second mirror and the third mirror are parallel to the top and side surfaces without reflection function on the reflector to form a group to detect the vibration deviation. By setting up three mirrors and three autocollimators, the vibration deviation in three degrees of freedom directions can be measured simultaneously, thereby effectively improving the measurement accuracy.

[0017] Vibration is applied through the vibration platform to simulate the vibration of the reflector in actual working conditions; the thermal load of the reflector in actual working conditions, such as the overall temperature of the environment or the local heating conditions, is simulated through the environmental temperature control component and the local heating and temperature measurement component. By setting up the vibration platform, environmental temperature control component and local heating and temperature measurement component, the stress and thermal load of the reflector in actual working conditions can be simulated, and multi-dimensional deformation synchronous monitoring can be achieved, thereby accurately reflecting the true performance of the reflector under dynamic conditions.

[0018] During the test, the reflector and the reflector holder are not separated, which enables in-situ measurement and effectively avoids additional errors introduced by minor changes during the reinstallation process.

[0019] The vibration platform is started by the central control system, and the change of the angle between the reflector and the mirror is monitored in real time during the vibration process. The change images of the three degrees of freedom X, Y, and Z are measured by three sets of autocollimators, and the obtained change images of the degrees of freedom are transmitted to the image processing device through the data acquisition card. After the image processing device calculates, the relationship between time and the offset of the reflector caused by vibration is obtained.

[0020] The present invention can realize accurate measurement and control of the angular deviation of the reflector under vibration and temperature change conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the first three-dimensional structure of the in-situ measurement device for vibration-mechanical-thermal coupling of a reflector according to the present invention; Figure 2 It is a second three-dimensional structural schematic diagram of the in-situ measurement device for vibration-mechanical-thermal coupling of a reflector according to the present invention (the housing is not shown); Figure 3 is a schematic diagram of the positional relationship between the reflecting mirror and the first mirror, the second mirror and the third mirror; Figure 4 It is a schematic diagram of the three-dimensional structure of the local heating and temperature measurement component.

[0022] In the figure: 100. Reflector; 101. Reflector seat; 1. Central control system; 2. Shell; 201. Bottom plate; 202. Protective cover; 3. Vibration platform; 4. Local heating and temperature measurement assembly; 401. Rotating turntable; 402. Local heating device; 403. Temperature measurement device; 5. Image processing device; 6. Autocollimator; 7. L-shaped mounting plate; 8. First mirror; 9. Second mirror; 10. Third mirror; 11. Data acquisition card; 12. Two-dimensional mobile platform; 13. Electrical connection interface; 14. Refrigeration module; 15. Heating module; 16. Temperature sensor. DETAILED DESCRIPTION

[0023] Specific implementation method 1: Combination Figure 1~Figure 4 This embodiment is explained, and the technical scheme in the embodiment of the present invention is clearly and completely described. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. Based on the embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0024] It should be noted that the descriptions of the present invention regarding directions such as "front", "back", "left", "right", "inside", "outside", "left side", "right side", "upper", "lower", "top", "bottom", etc. are all defined based on the relationship between the orientations or positions shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the structure must be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In the description of the present invention, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0025] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] An in-situ measurement device for vibration and thermal coupling of a reflector, comprising a central control system 1, a housing 2, a vibration platform 3 arranged in the housing 2 and connected to the central control system 1 by signal, an environmental temperature control component, a local heating and temperature measurement component 4, an image processing device 5 and three autocollimators 6, wherein an L-shaped mounting plate 7 is fixedly mounted on the vibration platform 3, a reflector seat 101 on which a reflector 100 is mounted is fixedly mounted on a horizontal plate of the L-shaped mounting plate 7, the reflector 100 is arranged in parallel with a vertical plate of the L-shaped mounting plate 7, the L-shaped mounting plate 7 is provided with first to third mirrors, and the first mirror The mirror 8 and the second mirror 9 are arranged in parallel with the front side and the upper side of the reflector 100 respectively, the third mirror 10 is arranged in parallel with the left side or the right side of the reflector 100, the three autocollimators 6 are arranged in one-to-one correspondence with the first to the third mirrors respectively, and each autocollimator 6 is connected to the image processing device 5 by signal, and the changing images of the reflector 100 in the three degrees of freedom of X, Y, and Z are measured respectively by the three autocollimators 6, the temperature environment inside the shell 2 is controlled by the environmental temperature control component, and the local heating and temperature measurement component 4 is used to realize local heating of the reflector 100.

[0027] The in-situ measurement device for vibration and thermal coupling of a reflector of the present invention can also be provided with a data acquisition card 11 to improve multi-channel parallel monitoring, and transmit the signals monitored by each device (such as the first to third autocollimators 6 and the image processing device 5, etc.) to the central control system 1 for processing to obtain relevant detection data.

[0028] The central control system 1 and the data acquisition card 11 can be installed inside or outside the housing 2 according to actual needs. The central control system 1, the data acquisition card 11 and the image processing device 5 are all prior art, and their working principles are not described here.

[0029] The autocollimator 6 is mainly used to measure small angle deviations. It works on the principle of optical autocollimation, that is, light is emitted from the instrument, reflected by the reflector 100 and returned to the detector inside the instrument. If there is a slight angular deviation in the reflector 100, this deviation will cause the position of the returned light to change, so that the angle deviation can be calculated. The specific angle deviation calculation method is a prior art and will not be repeated here. The autocollimator 6 used in the present invention is a large-caliber autocollimator. During the test, the image formed by the mirror and the image formed by the reflector 100 are both in the middle of the corresponding field of view of the autocollimator 6 to record the angle between the mirror and the reflector 100.

[0030] The environmental temperature control component and the local heating and temperature measurement component 4 are both non-contact.

[0031] The L-shaped mounting plate 7 is provided to facilitate the installation of the reflector 100 and the installation of each mirror.

[0032] The first mirror 8, the second mirror 9 and the third mirror 10 are all used as reference mirrors, and the vibration deviation of the reflector 100 is determined based on the reflection angle of the mirror. The first mirror 8 is parallel to the mirror surface with reflection function on the reflector 100 to form a group, and the second mirror 9 and the third mirror 10 are parallel to the top and side surfaces without reflection function on the reflector 100 to form a group to detect the vibration deviation. By setting three mirrors and three autocollimators 6, the vibration deviation in three degrees of freedom directions can be measured simultaneously, thereby effectively improving the measurement accuracy.

[0033] Vibration is applied through the vibration platform 3 to simulate the vibration of the reflector 100 in actual working conditions; the thermal load of the reflector 100 in actual working conditions, such as the overall temperature of the environment or the local heating condition, is simulated through the environmental temperature control component and the local heating and temperature measurement component 4. By setting the vibration platform 3, the environmental temperature control component and the local heating and temperature measurement component 4, the stress and thermal load of the reflector 100 in actual working conditions can be simulated, and multi-dimensional deformation synchronous monitoring can be achieved, thereby accurately reflecting the true performance of the reflector 100 under dynamic conditions.

[0034] During the test, the reflector 100 and the reflector seat 101 are not separated, so in-situ measurement can be achieved, effectively avoiding additional errors introduced by minor changes during the reinstallation process.

[0035] The vibration platform 3 is started by the central control system 1. During the vibration process, the change of the angle between the reflector 100 and the mirror is monitored in real time. The change images of the three degrees of freedom X, Y, and Z are measured by three sets of autocollimators 6. The obtained change images of the degrees of freedom are transmitted to the image processing device 5 through the data acquisition card 11. After the image processing device 5 calculates, the relationship between time and the offset of the reflector 100 caused by vibration is obtained. In combination with the change law of vibration over time, the equation of vibration, time, and offset is obtained. The calculation process and equations can be realized by existing technologies and will not be repeated here.

[0036] The present invention can realize accurate measurement and control of the angular deviation of the reflector 100 under vibration and temperature change conditions.

[0037] The autocollimator 6 is installed at the bottom of the housing 2 through a two-dimensional mobile platform 12 to adjust the test position of the reflector 100. With such a design, the autocollimator 6 can be adjusted in the up-down, left-right and right-right directions through the two-dimensional mobile platform 12, thereby adjusting the test position of the reflector 100. The two-dimensional mobile platform 12 includes a longitudinal angle adjustment component and a transverse angle adjustment component, and the longitudinal angle adjustment component is used to adjust the angle of the autocollimator 6 on it in the up-down direction, and the transverse angle adjustment component is used to adjust the angle of the autocollimator 6 on it in the left-right direction.

[0038] The longitudinal angle adjustment component and the transverse angle adjustment component are fixedly connected up and down as a whole. Specifically, the longitudinal angle adjustment component is fixed on the transverse angle adjustment component, or the transverse angle adjustment component is fixed on the longitudinal angle adjustment component. The specific structures of the longitudinal angle adjustment component and the transverse angle adjustment component are existing technologies and are not repeated here. For example, the first mounting plate can be driven by the horizontally arranged drive motor output shaft to achieve up and down swinging, thereby driving the device (such as the autocollimator 6 or the transverse angle adjustment component) fixed on the first mounting plate to adjust the angle in the up and down directions. The second mounting plate can be driven by the vertically arranged drive motor output shaft to achieve left and right swinging, thereby driving the device (such as the autocollimator 6 or the longitudinal angle adjustment component) fixed on the second mounting plate to adjust the angle in the left and right directions.

[0039] The local heating and temperature measuring assembly 4 comprises a rotating turntable 401 and a local heating device 402 and a temperature measuring device 403 mounted on the rotating turntable 401. The temperature measuring device 403 may be an existing conventional device capable of realizing temperature measurement. The rotating turntable 401 can realize a small range of circumferential rotation.

[0040] The environmental temperature control assembly includes a cooling module 14, a heating module 15, and a temperature sensor 16. In this design, the ambient temperature in the housing 2 is adjusted by the cooling module 14 and the heating module 15, thereby providing the required temperature environment for the reflector 100. Specifically, the data of the temperature sensor 16 is transmitted to the central control system 1, and the central control system 1 issues a command to the cooling module 14 or the heating module 15 to achieve temperature adjustment.

[0041] An air quality detection module and a fan are also provided inside the housing 2, and the fan is signal-connected to the air quality detection module. With such a design, when the measuring device is not in operation, the dust level inside the housing 2 is detected by the air quality detection module. When dust is detected, the fan is started to clean the dust to ensure the cleanliness inside the measuring device. At the same time, during the measurement process, the fan can also be used to cool down.

[0042] The housing 2 includes a bottom plate 201 and a protective cover 202 mounted on the bottom plate 201. The autocollimator 6, the vibration platform 3, and the local heating and temperature measurement component 4 are all mounted on the bottom plate 201. The protective cover 202 can be made of transparent (such as glass), translucent (such as acrylic plate) or opaque (such as metal plate) material, and its main purpose is to provide a protective environment for the various devices inside it.

[0043] The protective cover 202 is made of transparent or translucent material, such as acrylic plate or glass, so as to facilitate observation of the internal situation of the protective cover 202.

[0044] An electrical connection interface 13 is provided on the protective cover 202 for electrical connection between the inside and outside of the protective cover 202.

[0045] A window is provided on the housing 2. With such a design, it is convenient for the installation and position adjustment of each device inside the housing 2.

[0046] A method for using the above-mentioned in-situ measurement device for the vibration force-thermal coupling of a mirror. First, fixedly install the mirror 100 to be measured and its mirror base 101 on the horizontal plate of the L-shaped mounting plate 7, and then fixedly install the L-shaped mounting plate 7 on the vibration platform 3 between three autocollimators 6; then, adjust the installation angle of the autocollimators 6 so that the images formed by the mirrors and the image formed by the mirror 100 are both in the middle of the fields of view of the corresponding autocollimators 6; finally, start the vibration platform 3, and during the vibration process, monitor in real time the changes in the reflection angles of the mirrors and the mirror 100. Based on the reflection angle of the mirrors, judge the vibration deviation amount of the mirror 100.

[0047] As described above, only the preferred specific embodiments of the present invention are given, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and all should be covered by the protection scope of the present invention.

Claims

1. An in-situ measurement device for vibration and thermal coupling of a reflector, characterized in that: The invention comprises a central control system (1), a housing (2), a vibration platform (3) arranged in the housing (2) and connected to the central control system (1) by signal, an environmental temperature control component, a local heating and temperature measurement component (4), an image processing device (5) and three autocollimators (6), wherein an L-shaped mounting plate (7) is fixedly mounted on the vibration platform (3), a reflector seat (101) on which a reflector (100) is mounted is fixedly mounted on a horizontal plate of the L-shaped mounting plate (7), the reflector (100) is arranged in parallel with a vertical plate of the L-shaped mounting plate (7), the L-shaped mounting plate (7) is provided with first to third mirrors, and the first mirror (8) and the second mirror (101) are connected to each other. The mirrors (9) are arranged in parallel with the front side and the upper side of the reflector (100), respectively; the third mirror (10) is arranged in parallel with the left side or the right side of the reflector (100); the three autocollimators (6) are arranged in one-to-one correspondence with the first to third mirrors, respectively; each autocollimator (6) is connected to the image processing device (5) by signal; the images of changes in the three degrees of freedom X, Y, and Z of the reflector (100) are measured respectively by the three autocollimators (6); the temperature environment inside the housing (2) is controlled by the environmental temperature control component; and the reflector (100) is locally heated by the local heating and temperature measurement component (4).

2. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 1, characterized in that: The autocollimator (6) is installed on the bottom of the housing (2) via a two-dimensional moving platform (12) to adjust the test position of the reflector (100).

3. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 1, characterized in that: The local heating and temperature measurement assembly (4) comprises a rotating turntable (401) and a local heating device (402) and a temperature measurement device (403) mounted on the rotating turntable (401).

4. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 1, characterized in that: The environmental temperature control component comprises a refrigeration module (14), a heating module (15) and a temperature sensor (16).

5. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 1, characterized in that: An air quality detection module and a fan are also provided inside the housing (2), and the fan is signal-connected to the air quality detection module.

6. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 1, characterized in that: The housing (2) comprises a bottom plate (201) and a protective cover (202) mounted on the bottom plate (201); the autocollimator (6), the vibration platform (3) and the local heating and temperature measurement component (4) are all mounted on the bottom plate (201).

7. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 6, characterized in that: The protective cover (202) is made of transparent or translucent material.

8. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 6, characterized in that: The protective cover (202) is provided with an electrical connection interface (13) for electrical connection between the inside and outside of the protective cover (202).

9. The in-situ measurement device for vibration and thermal coupling of a reflector according to claim 1, characterized in that: The shell (2) is provided with a window.

10. A method for using an in-situ measurement device for vibration and thermal coupling of a reflector, characterized in that: The in-situ measuring device for vibration and thermal coupling of a reflector as described in any one of claims 1 to 9 is used. First, the reflector (100) to be measured and the reflector seat (101) on which it is located are fixedly mounted on the horizontal plate of an L-shaped mounting plate (7), and then the L-shaped mounting plate (7) is fixedly mounted on a vibration platform (3) between three autocollimators (6); then, the mounting angle of the autocollimator (6) is adjusted so that the image formed by the mirror and the image formed by the reflector (100) are both in the middle of the field of view of the corresponding autocollimator (6); finally, the vibration platform (3) is started, and during the vibration process, the reflection angle of the mirror and the reflection angle of the reflector (100) are monitored in real time, and the vibration deviation of the reflector (100) is judged based on the reflection angle of the mirror.

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