Multi-dimensional adjustment optical detection device

Abstract

The invention relates to the technical field of semiconductor production, and particularly discloses a multi-dimensional adjustment optical detection device which comprises a supporting assembly, an adjustment assembly and an optical assembly. The optical assembly comprises a first optical fiber seat, a second optical fiber seat and a dichroscope. The optical assembly is arranged on the supporting assembly, and components on the supporting assembly can be driven to move along multiple axes through the adjusting assembly. In the scheme, the first optical fiber seat and the second optical fiber seat are both integrated on the supporting assembly, when optical detection of different wavelengths needs to be carried out on the detected device, detection of different wavelengths can be carried out on the detected device under the condition that equipment is not switched, and the detection efficiency is improved; meanwhile, the supporting assembly can move along multiple axes, it is ensured that the detected object can be irradiated by a light path, and therefore the detection effectiveness is ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production technology, and in particular to a multi-dimensional adjustable optical detection device. Background Art

[0002] In the process of semiconductor production and performance testing, it is necessary to detect the surface temperature of semiconductor devices, such as temperature detection of devices after photolithography and performance testing of optoelectronic semiconductor devices.

[0003] Common temperature detection methods include direct measurement and optical detection. Direct measurement requires contact with the semiconductor surface, which may cause contact failure. The principle of optical detection is to use an optical system to collect light signals and convert them into electrical signals to obtain parameter changes on the surface of the object being measured, thereby calculating the temperature of the object being measured. This method can avoid the above risks.

[0004] Existing optical detection devices generally use only one wavelength of light source through a single optical path to complete the collection of optical signals. Figure 1 and Figure 2 As shown, in Figure 1 and Figure 2 In the embodiment, the first light source 1 and the second light source 2 can respectively emit incident light of different wavelengths. After the incident light passes through the lens 3, it is reflected by the device under test 4 and then refracted by the lens 3 to form outgoing light.

[0005] When it is necessary to perform optical detection of different wavelengths on the device under test, the device under test needs to be switched between different devices, which increases the detection time and reduces the detection efficiency on the one hand, and increases the equipment cost on the other hand. Summary of the invention

[0006] In view of this, the purpose of the present application is to provide a multi-dimensional adjustable optical detection device, which is used to solve the problems of low detection efficiency and high equipment cost of existing optical detection devices when optical detection of different wavelengths is required for the device under test.

[0007] In order to achieve the above technical objectives, the present application provides a multi-dimensional adjustable optical detection device, comprising: a support component, an adjustment component and an optical component;

[0008] The support assembly comprises: a base, an adjustment seat, a lens barrel and an inner support;

[0009] The adjustment assembly includes: a support ball, a plurality of angle adjustment screws, a first translation adjustment screw, a first guide screw, a second translation adjustment screw and a second guide screw;

[0010] The supporting ball is arranged on the base;

[0011] The adjustment seat is arranged on the support ball, and the adjustment seat can rotate in the horizontal direction and the vertical direction relative to the support ball;

[0012] The base is provided with a countersunk hole;

[0013] The angle adjustment screw passes through the adjustment seat and extends into the countersunk hole, and the angle adjustment screw is threadedly connected to the adjustment seat;

[0014] The lens barrel can be lifted and lowered on the adjustment seat;

[0015] The inner support is fixed inside the lens barrel;

[0016] The optical assembly comprises: a first optical fiber holder, a second optical fiber holder and a dichroic mirror;

[0017] The dichroic mirror is fixed on the inner support;

[0018] The first optical fiber holder is movably arranged on the top surface of the lens barrel along the horizontal direction, and a first guide groove is arranged on the side surface of the first optical fiber holder along the horizontal direction;

[0019] The second optical fiber holder is movably arranged on the side of the lens barrel along the vertical direction, and a second guide groove is arranged on the side of the second optical fiber holder along the vertical direction;

[0020] The first fiber holder and the second fiber holder are both facing the dichroic mirror;

[0021] The first translation adjustment screw is disposed on the lens barrel and abuts against the first optical fiber holder, and is used to push the first optical fiber holder to slide in a horizontal direction;

[0022] The first guide screw is disposed on the lens barrel and extends into the first guide slot, and is used to limit the first optical fiber holder from moving in a vertical direction;

[0023] The second translation adjustment screw is disposed on the lens barrel and abuts against the second optical fiber holder, and is used to push the second optical fiber holder to slide in a vertical direction;

[0024] The second guide screw is arranged on the lens barrel and extends into the second guide slot, so as to limit the second guide slot from moving in a horizontal direction.

[0025] Further, the adjustment assembly includes: two of the first translation adjustment screws, two of the first guide screws, two of the second translation adjustment screws and two of the second guide screws;

[0026] The first guide grooves are provided on two normal and perpendicular side surfaces of the first optical fiber holder;

[0027] The second guide grooves are provided on two normal and vertical side surfaces of the second optical fiber holder;

[0028] The two first translation adjustment screws abut against two normal and vertical side surfaces of the first optical fiber holder;

[0029] The two first guide screws are arranged on the other two side surfaces of the first optical fiber holder which are perpendicular to the normal direction;

[0030] The two second translation adjustment screws abut against two normal and vertical side surfaces of the second optical fiber holder;

[0031] The two second guide screws are arranged on the other two side surfaces of the second optical fiber holder which are perpendicular to the normal direction;

[0032] The first guide screw and the second guide screw are both elastic.

[0033] Further, the first guide screw and the second guide screw each include: an elastic column and a bolt body;

[0034] The elastic column and the bolt body are fixedly connected;

[0035] The bolt body is threadedly connected to the lens barrel;

[0036] The elastic column abuts against the lens barrel and extends into the first guiding groove or the second guiding groove.

[0037] Further, the support assembly includes: a lens barrel seat;

[0038] The lens barrel seat is arranged on the adjustment seat, and the lens barrel seat can be telescopically arranged;

[0039] The lens barrel is arranged on the lens barrel seat.

[0040] Furthermore, the lens barrel seat is threadedly connected to the adjustment seat.

[0041] Furthermore, the optical assembly further comprises: a light-transmitting mirror;

[0042] The light-transmitting mirror is arranged between the lens barrel seat and the adjusting seat, and is clamped and fixed by the lens barrel seat and the adjusting seat.

[0043] Furthermore, the optical assembly further comprises: a first aperture and a second aperture;

[0044] The first aperture is fixed between the first optical fiber holder and the dichroic mirror;

[0045] The second aperture is fixed between the second optical fiber holder and the dichroic mirror.

[0046] Furthermore, a mounting groove is provided on the lens barrel;

[0047] The first aperture is arranged in the mounting groove;

[0048] The inner support covers the mounting groove to press the first aperture into the mounting groove.

[0049] Furthermore, a second mounting groove is provided on the side of the lens barrel;

[0050] A portion of the second aperture extends into the second mounting groove, and another portion of the second aperture extends in a vertical direction to form a protruding block;

[0051] The protruding block is used to limit another part of the second aperture from extending into the second mounting groove;

[0052] The protruding block is clamped between the second optical fiber seat and the lens barrel.

[0053] Furthermore, the support assembly further comprises: a mobile platform;

[0054] The base is slidably arranged on the mobile platform along a horizontal direction;

[0055] The base is provided with a light-transmitting hole.

[0056] 4. The optical detection device as claimed in claim 1, wherein the adjusting member is a first optical fiber holder, a second optical fiber holder and a second optical mirror. The fiber holder is movably arranged on the top surface of the lens barrel in the horizontal direction, and a first guide groove is arranged on the side surface of the first fiber holder in the horizontal direction; the second fiber holder is movably arranged on the side surface of the lens barrel in the vertical direction, and a second guide groove is arranged on the side surface of the second fiber holder in the vertical direction; the first fiber holder and the second fiber holder are both facing the dichroic mirror; the first translation adjustment screw is arranged on the lens barrel and abuts against the first fiber holder, and is used to push the first fiber holder to slide in the horizontal direction; the first guide screw is arranged on the lens barrel and extends into the first guide groove, and is used to limit the movement of the first fiber holder in the vertical direction; the second translation adjustment screw is arranged on the lens barrel and abuts against the second fiber holder, and is used to push the second fiber holder to slide in the vertical direction; the second guide screw is arranged on the lens barrel and extends into the second guide groove, and is used to limit the movement of the second guide groove in the horizontal direction.

[0057] In this solution, the first optical fiber holder and the second optical fiber holder are both integrated on the supporting assembly. When optical detection of different wavelengths is required for the device under test, detection of different wavelengths can be performed on the device under test without switching the device, thereby improving the detection efficiency and saving equipment costs. At the same time, the supporting assembly can move along multiple axes to ensure that the object under test can be illuminated by the light path, thereby ensuring the effectiveness of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0059] Figure 1A light path diagram of the existing optical device provided in the present application when performing optical detection;

[0060] Figure 2 An optical path diagram of another existing wavelength optical device provided by the present application when performing optical detection;

[0061] Figure 3 A schematic diagram of a multi-dimensional optical detection device provided in an embodiment of the present application

[0062] Figure 4 A cross-sectional view of a multi-dimensional adjustable optical detection device provided in an embodiment of the present application;

[0063] Figure 5 A light path diagram of a multi-dimensionally adjustable optical detection device provided in an embodiment of the present application when performing optical detection;

[0064] Figure 6 A partially enlarged cross-sectional view of a multi-dimensionally adjustable optical detection device provided in an embodiment of the present application;

[0065] Figure 7 A schematic diagram of some components of a multi-dimensional adjustable optical detection device provided in an embodiment of the present application;

[0066] Figure 8 A top view of a multi-dimensional adjustable optical detection device provided in an embodiment of the present application;

[0067] In the figure:

[0068] 1. First light source; 2. Second light source; 3. Lens; 4. Device under test;

[0069] 100, support assembly; 110, base; 111, countersunk hole; 112, light transmission hole; 120, adjustment seat; 130, lens barrel seat; 131, first seat body; 132, second seat body; 140, lens barrel; 141, first mounting groove; 142, second mounting groove; 150, inner support; 160, moving platform; 161, moving seat;

[0070] 200, adjustment assembly; 210, support ball; 220, angle adjustment screw; 230, first translation adjustment screw; 240, first guide screw; 250, second translation adjustment screw; 260, second guide screw; 270, spring;

[0071] 300, optical component; 310, first optical fiber holder; 311, first guide groove; 320, second optical fiber holder; 321, second guide groove; 330, dichroic mirror; 340, light-transmitting mirror; 350, first aperture; 360, second aperture; 361, raised block; 370, 633nm optical fiber plug. DETAILED DESCRIPTION

[0072] The technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the specification of the present application without creative efforts belong to the scope claimed by the present application.

[0073] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0074] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected", and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a replaceable connection, or an integral connection. It may be a mechanical connection or an electrical connection. It may be directly connected or indirectly connected through an intermediate medium. It may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0075] Please refer to Figures 3 to 8 , a multi-dimensional adjustable optical detection device provided in the embodiments of the present application includes: a support assembly 100, an adjustment assembly 200, and an optical assembly 300.

[0076] The support assembly 100 includes: a base 110, an adjustment seat 120, a lens barrel 140, and an inner support 150.

[0077] In application, the base 110 can be used as a support for the device under test 4, that is, the device under test 4 can be placed on the base 110.

[0078] In the embodiment provided by the present application, the device under test 4 can be placed below the base 110. Specifically, please refer to Figure 4 , a light-transmitting hole 112 is provided on the base 110. When detecting the device under test 4, the device under test 4 can be placed below the light-transmitting hole 112. Correspondingly, other placement members for placing the device under test 4 can be placed below the light-transmitting hole 112.

[0079] In this embodiment, the adjustment seat 120 is disposed on the base 110 and can rotate relative to the base 110 in the horizontal direction and the vertical direction; the lens barrel 140 can be raised and lowered on the adjustment seat 120; and the inner support 150 is fixed inside the lens barrel 140.

[0080] Specifically, the optical component 300 includes: a first fiber optic holder 310, a second fiber optic holder 320 and a dichroic mirror 330; the dichroic mirror 330 is fixed on the inner support 150; the first fiber optic holder 310 is movably arranged on the top surface of the lens barrel 140 along the horizontal direction; the second fiber optic holder 320 is movably arranged on the side of the lens barrel 140 along the vertical direction; the first fiber optic holder 310 and the second fiber optic holder 320 are both facing the dichroic mirror 330.

[0081] In practical applications, the first fiber holder 310 and the second fiber holder 320 are used to emit light of different wavelengths. For example, the first fiber holder 310 can be a fiber FC holder, and is connected to a 633nm fiber plug 370, which can emit incident light of 633nm wavelength. The second fiber holder 320 can be a fiber SMA905 holder, and is connected to a 905nm fiber plug, which can emit incident light of 905nm wavelength. The dichroic mirror 330 is used to allow incident light to pass through or reflect incident light, and specifically, the dichroic mirror 330 can allow both incident lights to irradiate the device under test 4.

[0082] In one embodiment provided in the present application, the dichroic mirror 330 is configured to be located directly above the device under test 4, specifically, the dichroic mirror 330 is located directly above the light-transmitting hole 112. The first fiber holder 310 is located directly above the dichroic mirror 330; the second fiber holder 320 is located on the side of the dichroic mirror 330 on the same horizontal line. The dichroic mirror 330 is placed with the normal facing downward and at an angle of 45° to the vertical plane.

[0083] The optical path between the optical component 300 and the device under test 4 provided in this embodiment is as follows: Figure 5 As shown in FIG. 1 , the incident light emitted by the first optical fiber holder 310 passes through the dichroic mirror 330, irradiates the device under test 4, and then passes through the dichroic mirror 330 to return the outgoing light after being reflected by the device under test 4. Figure 5 The incident light emitted by the second fiber holder 320 is refracted by the dichroic mirror 330 and irradiated onto the device under test 4, and then reflected by the device under test 4 and refracted by the dichroic mirror 330 to form an outgoing light. Figure 5 As shown by the arrow numbered 2.

[0084] The multi-dimensional adjustable optical detection device improved by the embodiment of the present application can perform multi-optical path detection on the device under test 4 without switching equipment, thereby improving the production detection efficiency of semiconductor devices.

[0085] After the optical assembly 300 is arranged on the lens barrel 140 and the inner support 150, since the lens barrel 140 can be raised and lowered, the lens barrel 140 can drive the optical assembly 300 and the inner support 150 to rise and fall, thereby adjusting the distance between the optical assembly 300 and the device under test 4. In addition, the lens barrel 140 can follow the adjustment seat 120 to adjust the angle, realize multi-axis adjustment of the position of the optical assembly 300, improve the flexibility and applicability of the device in actual application, and ensure the effectiveness of the optical assembly 300 in detecting the device under test 4.

[0086] In one embodiment, the adjustment assembly 200 includes: a support ball 210, a plurality of angle adjustment screws 220, a first translation adjustment screw 230, a first guide screw 240, a second translation adjustment screw 250, and a second guide screw 260; the support ball 210 is disposed on the base 110; the adjustment seat 120 is disposed on the support ball 210, and the adjustment seat 120 can rotate in the horizontal direction and the vertical direction relative to the support ball 210; the base 110 is provided with a countersunk hole 111. The angle adjustment screw 220 passes through the adjustment seat 120 and extends into the countersunk hole 111, and the angle adjustment screw 220 is threadedly connected with the adjustment seat 120.

[0087] The adjusting seat 120 is rotatable relative to the base 110 through the supporting ball 210. The adjusting seat 120 can be driven to tilt in different directions through multiple angle adjustment screws 220.

[0088] For the sake of convenience, taking four angle adjustment screws 220 as an example, in the top view of the adjustment seat 120, the four angle adjustment screws 220 can be respectively arranged at the upper left corner, lower left corner, upper right corner and lower right corner of the adjustment seat 120. After all four angle adjustment screws 220 are loosened, tightening any angle adjustment screw 220 can drive the adjustment seat 120 to tilt in any direction, and then the other angle adjustment screws 220 are adaptively tightened to achieve the angle adjustment of the angle adjustment screws 220.

[0089] For more details, see Figure 3 , Figure 4 , Figure 6 and Figure 8The first optical fiber holder 310 is provided with a first guide groove 311 on the side surface in the horizontal direction; the second optical fiber holder 320 is provided with a second guide groove 321 on the side surface in the vertical direction; the first translation adjustment screw 230 is provided on the lens barrel 140 and abuts against the first optical fiber holder 310, and is used to push the first optical fiber holder 310 to slide in the horizontal direction; the first guide screw 240 is provided on the lens barrel 140 and extends into the first guide groove 311, and is used to limit the movement of the first optical fiber holder 310 in the vertical direction; the second translation adjustment screw 250 is provided on the lens barrel 140 and abuts against the second optical fiber holder 320, and is used to push the second optical fiber holder 320 to slide in the vertical direction; the second guide screw 260 is provided on the lens barrel 140 and extends into the second guide groove 321, and is used to limit the movement of the second guide groove 321 in the horizontal direction.

[0090] In this embodiment, after the first fiber holder 310 and the second fiber holder 320 are mounted on the lens barrel 140, the first guide screw 240 and the second guide screw 260 can be locked into the lens barrel 140, so that the first fiber holder 310 and the second fiber holder 320 are limited on the lens barrel 140 and cannot be separated from the lens barrel. When the position of the first fiber holder 310 and / or the second fiber holder 320 needs to be adjusted, the first translation adjustment screw 230 and / or the second translation adjustment screw 250 can be rotated accordingly to ensure that the first fiber holder 310 and the second fiber holder 320 can be aligned with the dichroic mirror 330.

[0091] In one embodiment, see Figure 4 and Figure 7 The adjustment assembly 200 also includes: a plurality of springs that can make the connection between the adjustment seat 120 and the base 110 more stable, and at the same time help maintain the stability of the adjustment seat 120 during the turning process of the angle adjustment screw 220.

[0092] In a more specific embodiment, the adjustment assembly 200 includes: two first translation adjustment screws 230, two first guide screws 240, two second translation adjustment screws 250 and two second guide screws 260; the first fiber optic holder 310 is provided with a first guide groove 311 on two normal vertical side surfaces; the second fiber optic holder 320 is provided with a second guide groove 321 on two normal vertical side surfaces; the two first translation adjustment screws 230 abut against two normal vertical side surfaces of the first fiber optic holder 310; the two first guide screws 240 are provided on the other two normal vertical side surfaces of the first fiber optic holder 310; the two second translation adjustment screws 250 abut against two normal vertical side surfaces of the second fiber optic holder 320; the two second guide screws 260 are provided on the other two normal vertical side surfaces of the second fiber optic holder 320; the first guide screws 240 and the second guide screws 260 are both elastic.

[0093] The first fiber holder 310 and the second fiber holder 320 are both able to move in two directions by means of the two first guide screws 240 and the two second guide screws 260 .

[0094] Taking the first optical fiber holder 310 as an example, please refer to Figure 8 In the top view, a first translation adjustment screw 230 is arranged on the left side of the lens barrel 140, another first translation adjustment screw 230 is arranged on the front side of the lens barrel 140, a first guide screw 240 is arranged on the right side of the lens barrel 140, and another first guide screw 240 is arranged on the rear side of the lens barrel 140. Rotating the first translation adjustment screw 230 on the left side can push the first optical fiber holder 310 to move to the left or right side, during which the first guide screw 240 on the right side will elastically expand and contract, and the first guide screw 240 on the rear side plays a guiding role. Rotating the first translation adjustment screw 230 on the front side can push the first optical fiber holder 310 to move to the front or rear side, during which the first guide screw 240 on the rear side will elastically expand and contract, and the first guide screw 240 on the right side plays a guiding role.

[0095] For more specific examples, see Figure 6 The first guide screw 240 and the second guide screw 260 both include: an elastic column 241 and a bolt body 242; the elastic column 241 and the bolt body 242 are fixedly connected; the bolt body 242 is threadedly connected to the lens barrel 140; the elastic column 241 abuts against the lens barrel 140 and extends into the first guide groove 311 or the second guide groove 321.

[0096] The elastic column 241 is elastic and can allow the first fiber holder 310 or the second fiber holder 320 to move closer to or farther away from the first fiber holder 310 or the second fiber holder 320 , while maintaining contact with the first fiber holder 310 or the second fiber holder 320 during the process.

[0097] In one embodiment, the support assembly 100 includes: a lens barrel seat 130; the lens barrel seat 130 is disposed on the adjustment seat 120, and the lens barrel seat 130 is retractable; and the lens barrel 140 is disposed on the lens barrel seat 130. That is, in this embodiment, the lens barrel 140 can be raised and lowered by the retractable lens barrel seat 130.

[0098] As an embodiment, the lens barrel seat 130 includes: a first seat body 131 and a second seat body 132; the second seat body 132 can be raised and lowered on the first seat body 131. The lens barrel 140 is arranged on the first seat body 131; the second seat body 132 is arranged on the adjustment seat 120. The second seat body 132 is provided with a bolt buckle that can adjust its inner diameter. When the first seat body 131 and the second seat body 132 need to be fixed, the first seat body 131 can be fixed by tightening the bolt buckle. When the height of the first seat body 131 needs to be adjusted, the bolt buckle can be loosened.

[0099] In one embodiment, the lens barrel seat 130 is threadedly connected to the adjustment seat 120. Specifically, the second seat body 132 is threadedly connected to the adjustment seat 120 to facilitate the assembly of the entire device.

[0100] In one embodiment, the optical assembly 300 further includes: a light-transmitting mirror 340 ; the light-transmitting mirror 340 is disposed between the lens barrel seat 130 and the adjustment seat 120 , and is clamped and fixed by the lens barrel seat 130 and the adjustment seat 120 .

[0101] In this embodiment, the threaded connection between the lens barrel seat 130 and the adjustment seat 120 can simultaneously press and fix the light-transmitting mirror 340, thereby reducing the use of assembly parts and simplifying the assembly process.

[0102] In one embodiment, the optical assembly 300 further includes: a first aperture 350 and a second aperture 360 ​​; the first aperture 350 is fixed between the first fiber holder 310 and the dichroic mirror 330 ; the second aperture 360 ​​is fixed between the second fiber holder 320 and the dichroic mirror 330 .

[0103] In a further improved embodiment, a mounting groove 141 is provided on the lens barrel 140 ; ​​the first aperture 350 is disposed in the mounting groove 141 ; and the inner support 150 covers the mounting groove 141 to press the first aperture 350 tightly into the mounting groove 141 .

[0104] In this embodiment, during the process of installing the inner support 150 on the lens barrel 140, the first aperture 350 can be pressed by the inner support 150 to prevent the first aperture 350 from shaking inside the lens barrel 340, while simplifying the number of assembly parts and the assembly process.

[0105] Furthermore, a second mounting groove 142 is provided on the side of the lens barrel 140; a portion of the second aperture 360 ​​extends into the second mounting groove 142, and another portion of the second aperture 360 ​​extends in the vertical direction to form a protrusion block 361; the protrusion block 361 is used to limit the other portion of the second aperture 360 ​​from extending into the second mounting groove 142; the protrusion block 361 is clamped between the second optical fiber holder 320 and the lens barrel 140.

[0106] In this embodiment, before installing the second fiber optic holder 320 on the lens barrel 140, the second aperture 360 ​​can be installed into the second installation groove 142 until the protruding block 361 abuts against the lens barrel 140. After that, the second fiber optic holder 320 is installed to tighten the second aperture 360, thereby achieving a stable installation of the second aperture 360 ​​without the need for assembly tools such as screws and glue.

[0107] In one embodiment, the support assembly 100 further includes: a moving platform 160 ; and the base 110 is slidably disposed on the moving platform 160 along a horizontal direction.

[0108] Specifically, if Figure 4 As shown, a moving seat 161 may be provided on the moving platform 160; the moving seat 161 is connected to a driving member such as a cylinder, so that the moving seat 161 can slide linearly relative to the moving platform 160. The base 110 is provided on the moving seat 161 and can slide with the moving seat 161.

[0109] The above are only preferred embodiments of the present application and are not intended to limit the present invention. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A multi-dimensional adjustable optical detection device, characterized in that: include: A supporting assembly (100), an adjusting assembly (200), and an optical assembly (300); The support assembly (100) comprises: a base (110), an adjustment seat (120), a lens barrel (140) and an inner support seat (150); The adjustment assembly (200) comprises: a support ball (210), a plurality of angle adjustment screws (220), a first translation adjustment screw (230), a first guide screw (240), a second translation adjustment screw (250) and a second guide screw (260); The supporting ball (210) is arranged on the base (110); The adjustment seat (120) is arranged on the support ball (210), and the adjustment seat (120) is capable of rotating in a horizontal direction and a vertical direction relative to the support ball (210); The base (110) is provided with a countersunk hole (111); The angle adjustment screw (220) passes through the adjustment seat (120) and extends into the countersunk hole (111), and the angle adjustment screw (220) is threadedly connected to the adjustment seat (120); The lens barrel (140) is arranged on the adjustment seat (120) in a liftable manner; The inner support (150) is fixed inside the lens barrel (140); The optical component (300) comprises: a first optical fiber holder (310), a second optical fiber holder (320) and a dichroic mirror (330); The dichroic mirror (330) is fixed on the inner support (150); The first optical fiber seat (310) is movably arranged on the top surface of the lens barrel (140) in the horizontal direction, and a first guide groove (311) is arranged on the side surface of the first optical fiber seat (310) in the horizontal direction; The second optical fiber holder (320) is movably arranged on the side of the lens barrel (140) in the vertical direction, and a second guide groove (321) is arranged on the side of the second optical fiber holder (320) in the vertical direction; The first optical fiber holder (310) and the second optical fiber holder (320) are both facing the dichroic mirror (330); The first translation adjustment screw (230) is arranged on the lens barrel (140) and abuts against the first optical fiber holder (310), and is used to push the first optical fiber holder (310) to slide in a horizontal direction; The first guide screw (240) is arranged on the lens barrel (140) and extends into the first guide groove (311), and is used to limit the first optical fiber holder (310) from moving in a vertical direction; The second translation adjustment screw (250) is arranged on the lens barrel (140) and abuts against the second optical fiber holder (320), and is used to push the second optical fiber holder (320) to slide in a vertical direction; The second guide screw (260) is arranged on the lens barrel (140) and extends into the second guide slot (321), and is used to limit the movement of the second guide slot (321) in a horizontal direction.

2. The multi-dimensional adjustable optical detection device according to claim 1, characterized in that: The adjustment assembly (200) comprises: two first translation adjustment screws (230), two first guide screws (240), two second translation adjustment screws (250) and two second guide screws (260); The first guide groove (311) is provided on two normal and perpendicular side surfaces of the first optical fiber seat (310); The second guide groove (321) is provided on two normal and perpendicular side surfaces of the second optical fiber seat (320); The two first translation adjustment screws (230) abut against two normal and perpendicular side surfaces of the first optical fiber holder (310); The two first guide screws (240) are arranged on the other two side surfaces of the first optical fiber holder (310) which are perpendicular to the normal direction; The two second translation adjustment screws (250) abut against two normal and perpendicular side surfaces of the second optical fiber holder (320); The two second guide screws (260) are arranged on the other two side surfaces of the second optical fiber holder (320) which are perpendicular to the normal direction; The first guide screw (240) and the second guide screw (260) are both elastic.

3. The multi-dimensional adjustable optical detection device according to claim 2, characterized in that: The first guide screw (240) and the second guide screw (260) both comprise: an elastic column (241) and a bolt body (242); The elastic column (241) and the bolt body (242) are fixedly connected; The bolt body (242) is threadedly connected to the lens barrel (140); The elastic column (241) abuts against the lens barrel (140) and extends into the first guide groove (311) or the second guide groove (321).

4. The multi-dimensional adjustable optical detection device according to claim 1, characterized in that: The support assembly (100) comprises: a lens barrel seat (130); The lens barrel seat (130) is arranged on the adjustment seat (120), and the lens barrel seat (130) is telescopically arranged; The lens barrel (140) is arranged on the lens barrel seat (130).

5. The multi-dimensional adjustable optical detection device according to claim 4, characterized in that: The lens barrel seat (130) is threadedly connected to the adjustment seat (120); The optical component (300) further includes: a light-transmitting mirror (340); The light-transmitting mirror (340) is arranged between the lens barrel seat (130) and the adjustment seat (120), and is clamped and fixed by the lens barrel seat (130) and the adjustment seat (120).

6. The multi-dimensional adjustable optical detection device according to claim 1, characterized in that: The adjustment assembly (200) further includes: a plurality of springs (270); Two ends of the spring (270) are respectively connected to the base (110) and the adjustment base (120); The spring (270) is in a tensioned state.

7. The multi-dimensional adjustable optical detection device according to claim 1, characterized in that: The optical component (300) further comprises: a first aperture (350) and a second aperture (360); The first aperture (350) is fixed between the first optical fiber holder (310) and the dichroic mirror (330); The second diaphragm (360) is fixed between the second optical fiber holder (320) and the dichroic mirror (330).

8. The multi-dimensional adjustable optical detection device according to claim 7, characterized in that: The lens barrel (140) is provided with a mounting groove (141); The first aperture (350) is arranged in the mounting groove (141); The inner support (150) covers the installation groove (141) to press the first diaphragm (350) into the installation groove (141).

9. The multi-dimensional adjustable optical detection device according to claim 7 or 8, characterized in that: A second mounting groove (142) is provided on the side surface of the lens barrel (140); A portion of the second diaphragm (360) extends into the second mounting groove (142), and another portion of the second diaphragm (360) extends in a vertical direction to form a protruding block (361); The protruding block (361) is used to limit another part of the second aperture (360) from extending into the second mounting groove (142); The protruding block (361) is clamped between the second optical fiber seat (320) and the lens barrel (140).

10. The multi-dimensional adjustable optical detection device according to claim 1, characterized in that: The support assembly (100) further comprises: a moving platform (160); The base (110) is slidably disposed on the movable platform (160) along a horizontal direction; The base (110) is provided with a light-transmitting hole (112).

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