Acoustic wave device and method for manufacturing same

Abstract

An acoustic wave device includes a first bus bar section, a first finger electrode, and a second finger electrode. The bus bar section is disposed in a first direction. The first finger electrode extends parallel to the second direction from a first end to a second end, wherein the first end contacts the first bus bar section. The second finger electrode extends parallel to the second direction from a first end to a second end, wherein the first end contacts the first bus bar section. The second finger electrodes are spaced apart from the first finger electrodes, and the first bus bar section has a first size and a second size measured parallel to the second direction. The first size corresponds to the first finger electrode, the second size corresponds to the second finger electrode, and the first size is different from the second size.

Description

Technical Field

[0001] The present invention relates to an acoustic wave device and a manufacturing method thereof, and in particular to an acoustic wave device including a bus bar segment having two different sizes and a manufacturing method thereof. Background Art

[0002] Acoustic wave devices, such as surface acoustic wave (SAW) devices, can be used for the conversion and transmission of electrical and acoustic signals. Surface acoustic wave devices have many uses. For example, SAW devices can be used in filters, which can be used to filter out noise and retain wireless signals in a specific frequency band. They have the characteristics of low transmission loss, good anti-electromagnetic interference performance, and small size. In addition, SAW devices can also be used as resonators, oscillators, transformers, or sensors. For example, acoustic wave filters can be used in mobile phones. Acoustic wave filters can make the frequency range of radio reception narrower and more accurate. However, according to current technology, existing SAW devices may cause energy leakage due to spurious modes, resulting in a decrease in quality factor. In addition, it is quite difficult to reduce the size of acoustic wave devices, and reducing the noise of acoustic waves is also a challenge. Summary of the invention

[0003] An embodiment of the present invention provides an acoustic wave device, comprising a first bus bar segment, a first finger electrode, and a second finger electrode. The first bus bar segment is arranged along a first direction. The first finger electrode extends from a first end to a second end parallel to a second direction, wherein the first end of the first finger electrode contacts the first bus bar segment. The second finger electrode extends from a first end to a second end parallel to the second direction, wherein the first end of the second finger electrode contacts the first bus bar segment. The second finger electrode is arranged apart from the first finger electrode, and the first bus bar segment has a first size and a second size measured parallel to the second direction, the first size corresponds to the first finger electrode, the second size corresponds to the second finger electrode, and the first size is different from the second size.

[0004] An embodiment of the present invention provides a method for manufacturing an acoustic wave device, comprising forming a first bus bar segment, a first finger electrode, and a second finger electrode. The first bus bar segment is arranged along a first direction. The first finger electrode extends from a first end to a second end parallel to a second direction, wherein the first end of the first finger electrode contacts the first bus bar segment. The second finger electrode extends from a first end to a second end parallel to the second direction, wherein the first end of the second finger electrode contacts the first bus bar segment. The second finger electrode is arranged to be separated from the first finger electrode, and the first bus bar segment has a first size and a second size measured parallel to the second direction, the first size corresponds to the first finger electrode, the second size corresponds to the second finger electrode, and the first size is different from the second size. BRIEF DESCRIPTION OF THE DRAWINGS

[0005] Figure 1 FIG. 4 is a schematic diagram of an acoustic wave device according to an embodiment.

[0006] Figure 2 FIG. 4 is a partial schematic diagram of an acoustic wave device according to an embodiment.

[0007] Figure 3 FIG. 4 is another partial schematic diagram of an acoustic wave device according to an embodiment.

[0008] Figure 4A to Figure 7 Schematic diagram of various acoustic wave devices according to various embodiments.

[0009] Figure 8 is a schematic flow chart of a method for manufacturing an acoustic wave device according to an embodiment.

[0010] Explanation of symbols:

[0011] 100,400,500,600,700:Sound wave device

[0012] 110,120: Busbar section

[0013] 111-1,111-2,111-3,111-4,111-5,121-1,121-2,121-3: Finger-type electrodes

[0014] 112-1,112-2,112-3,122-1,122-2,122-3: dummy electrodes

[0015] 710: floating electrode

[0016] 800: Manufacturing method

[0017] 810,820: Steps

[0018] A11,A12,A21,A22,A41,A42,A51,A52: Corner

[0019] C11,C21,C41,C51: intersection

[0020] D1,D2: Direction

[0021] E11,E12,E21,E22,E41,E42,E51,E52: Edge

[0022] T1: First end

[0023] T2: Second end

[0024] g1,g2,g3,g4,g5,g6: gap

[0025] L11, L21, L41, L51: Center line

[0026] S1, S2: Side

[0027] S11,S21,S41,S51: Connection

[0028] W1,W2,W3,W4,W5,W6:Size DETAILED DESCRIPTION

[0029] Figure 1 Schematic diagram of an acoustic wave device 100 according to an embodiment. The acoustic wave device 100 may include a first bus bar segment 110, a first finger electrode 111-1, and a second finger electrode 111-2. The first bus bar segment 110 may be disposed along a first direction D1. The first finger electrode 111-1 may extend from a first end to a second end in parallel with a second direction D2, and its first end may contact the first bus bar segment 110. Similarly, the second finger electrode 111-2 may extend from a first end to a second end in parallel with the second direction D2, and its first end may contact the first bus bar segment 110. As shown in the figure, the second finger electrode 111-2 may be disposed apart from the first finger electrode 111-1. Furthermore, at a position corresponding to the first finger-shaped electrode 111-1, the first bus bar segment 110 may have a first dimension W1 measured parallel to the second direction D2, and at a position corresponding to the second finger-shaped electrode 111-2, the first bus bar segment 110 may have a second dimension W2 measured parallel to the second direction D2. For example, the first dimension W1 may be different from the second dimension W2.

[0030] In one embodiment, the acoustic wave device 100 may further include a third finger electrode 111-3, which may extend from the first end to the second end in parallel with the second direction D2, and whose first end may contact the first bus bar segment 110. In other words, the third finger electrode 111-3 may be parallel to the first finger electrode 111-1 and parallel to the second finger electrode 111-2. The third finger electrode 111-3 may be spaced apart from the first finger electrode 111-1 and may be spaced apart from the second finger electrode 111-2. Further, at a position corresponding to the third finger electrode 111-3, the first bus bar segment 110 may further have a third size W3 measured in parallel with the second direction D2.

[0031] In the above-mentioned embodiment, the acoustic wave device 100 may further include a piezoelectric layer (not shown), and the first bus bar segment 110, the first finger electrode 111-1, the second finger electrode 111-2, and the third finger electrode 111-3 may be disposed on the piezoelectric layer. For example, the piezoelectric layer may include a piezoelectric single crystal, a piezoelectric polycrystal (piezoelectric ceramic), a piezoelectric polymer, and a piezoelectric composite material. For example, the material of the piezoelectric layer may include at least one of the following: zinc oxide (ZnO), aluminum nitride (AlN), lithium tantalate (LiTaO3), lithium niobate (LN), quartz (QZ), lead titanate (PTO), lead zirconate titanate (PZT) and the like, or a combination thereof. In some embodiments, the piezoelectric layer may be doped with a rare earth element, such as scandium (Sc).

[0032] In one embodiment, the first bus bar segment 110, the first finger electrode 111-1, the second finger electrode 111-2, and the third finger electrode 111-3 may include the same conductive material, such as molybdenum (Mo), copper (Cu), aluminum (Al), gold (Au), platinum (Pt), tungsten (W), other suitable metals, and combinations thereof. However, the present invention is not limited thereto, and in other embodiments, the first bus bar segment 110, the first finger electrode 111-1, the second finger electrode 111-2, and the third finger electrode 111-3 may also include different conductive materials.

[0033] like Figure 1As shown, the second finger electrode 111-2 may be located between the first finger electrode 111-1 and the third finger electrode 111-3. For example, with respect to the plurality of finger electrodes extending from the first bus bar segment 110, the first finger electrode 111-1 and the third finger electrode 111-3 may be the two finger electrodes closest to the second finger electrode 111-2. That is, there may be no other finger electrodes extending from the first bus bar segment 110 between the first finger electrode 111-1 and the second finger electrode 111-2, and there may be no other finger electrodes extending from the first bus bar segment 110 between the second finger electrode 111-2 and the third finger electrode 111-3. However, the above configuration is for example only and is not intended to limit the present invention. In another embodiment, with respect to the plurality of finger electrodes extending from the first bus bar segment 110, the first finger electrode 111-1 and the third finger electrode 111-3 may not be defined as the finger electrodes closest to the second finger electrode 111-2. In other words, there may be other finger electrodes extending from the first bus bar segment 110 between the first finger electrode 111-1 and the second finger electrode 111-2.

[0034] Furthermore, in addition to the finger-shaped electrodes, other types of electrodes, such as dummy electrodes, may also extend from the first bus bar segment 110. Figure 3 As an example, in some embodiments, a dummy electrode may be additionally provided between the first electrode finger 111 - 1 and the second electrode finger 111 - 2 , or between the second electrode finger 111 - 2 and the third electrode finger 111 - 3 .

[0035] like Figure 1 As shown, in the above embodiment, the first bus bar segment 110 may have a first side S1 parallel to the first direction D1. The first finger electrode 111-1 may have a first center line L11, a first edge E11 and a second edge E12 parallel to the second direction D2. As shown in the figure, the first edge E11 and the first bus bar segment 110 may form a first corner A11, and the second edge E12 and the first bus bar segment 110 may form a second corner A12. The first corner A11 and the second corner A12 may form a first connecting line S11, and the intersection C11 of the first connecting line S11 and the first center line L11 may be defined as the first end of the first finger electrode 111-1. In this case, the first dimension W1 is the dimension measured from the first side S1 of the first bus bar segment 110 to the first end of the first finger electrode 111-1 (i.e., the intersection C11) parallel to the second direction D2. The second dimension W2 and the third dimension W3 may also be defined similarly.

[0036] In one embodiment, the third dimension W3 may be the same as or different from the first dimension W1. For example, the first dimension W1 may be larger than the second dimension W2, and the second dimension W2 may be larger than the third dimension W3, that is, W1>W2>W3. In this embodiment, the first dimension W1, the second dimension W2, and the third dimension W3 may be changed in an arithmetic difference or in a geometric ratio. Arithmetic difference is, for example, defined as the difference between the first dimension W1 and the second dimension W2 being equal to the difference between the second dimension W2 and the third dimension W3, which may be expressed as W1-W2=W2-W3. Geometric ratio is, for example, defined as the quotient of the first dimension W1 divided by the second dimension W2 being equal to the quotient of the second dimension W2 divided by the third dimension W3, which may be expressed as W1 / W2=W2 / W3.

[0037] However, the present invention is not limited thereto, and in other embodiments, the first size W1, the second size W2, and the third size W3 may also be non-equidistant or non-proportional. For example, the non-equidistant change may include a situation where the difference between the first size W1 and the second size W2 is greater than the difference between the second size W2 and the third size W3, which may be expressed as W1-W2>W2-W3. The non-proportional change may include a situation where the quotient of the first size W1 divided by the second size W2 is less than the quotient of the second size W2 divided by the third size W3, which may be expressed as W1 / W2<W2 / W3.

[0038] In other embodiments, the first size W1 may be greater than the second size W2, and the third size W3 may be greater than the second size W2, that is, W1>W2, and W3>W2. In still other embodiments, the first size W1 is not equal to the second size W2, and the third size W3 may be equal to the first size W1.

[0039] In one embodiment, the acoustic wave device 100 may further include a second bus bar segment 120, a fourth finger electrode 121-1, and a fifth finger electrode 121-2. The second bus bar segment 120 may be disposed along the first direction D1. The fourth finger electrode 121-1 may extend from a first end to a second end in parallel with the second direction D2, and its first end may contact the second bus bar segment 120. The fifth finger electrode 121-2 may extend from a first end to a second end in parallel with the second direction D2, and its first end may contact the second bus bar segment 120. As shown in the figure, the fifth finger electrode 121-2 may be disposed separately from the fourth finger electrode 121-1. Furthermore, at a position corresponding to the fourth finger electrode 121-1, the second bus bar segment 120 may have a fourth dimension W4 measured parallel to the second direction D2, and at a position corresponding to the fifth finger electrode 121-2, the second bus bar segment 120 may have a fifth dimension W5 measured parallel to the second direction D2.

[0040] In one embodiment, the acoustic wave device 100 may further include a sixth finger electrode 121-3, which may extend from the first end to the second end in parallel with the second direction D2, and the first end of which may contact the second bus bar segment 120. In other words, the sixth finger electrode 121-3 may be parallel to the fourth finger electrode 121-1 and to the fifth finger electrode 121-2. The sixth finger electrode 121-3 may be spaced apart from the fourth finger electrode 121-1 and spaced apart from the fifth finger electrode 121-2. Further, at a position corresponding to the sixth finger electrode 121-3, the second bus bar segment 120 may further have a sixth dimension W6 measured in parallel with the second direction D2. For example, the fifth finger electrode 121-2 may be located between the fourth finger electrode 121-1 and the sixth finger electrode 121-3.

[0041] Figure 1 For example, a portion of the acoustic wave device 100 is shown. In the acoustic wave device 100, a plurality of finger electrodes may form an interdigital structure. Specifically, the first finger electrode 111-1, the fourth finger electrode 121-1, the second finger electrode 111-2, the fifth finger electrode 121-2, the third finger electrode 111-3 and the sixth finger electrode 121-3 may be arranged in sequence along the first direction D1, and when observed along the first direction D1, they at least partially overlap. The first and / or second bus bar segments 110, 120 may also be referred to as busbars. In the above embodiment, the first direction D1 may be perpendicular to the second direction D2, but the present invention is not limited thereto. In other embodiments, the first direction D1 and the second direction D2 may form an angle other than 90°. Further, in the above embodiment, the dimensions W1, W2, and W3 may be the widths of the first bus bar segment 110 at different positions. Similarly, dimensions W4 , W5 , and W6 may be the widths of the second bus bar segment 120 at different locations.

[0042] Furthermore, in the above embodiments, the second bus bar section 120 may have a second side S2 parallel to the first direction D1. The fourth finger-shaped electrode 121-1 may have a fourth center line L41, a first edge E41, and a second edge E42 parallel to the second direction D2. As shown in the figure, the first edge E41 and the second bus bar section 120 may form a first corner A41, and the second edge E42 and the second bus bar section 120 may form a second corner A42. The first corner A41 and the second corner A42 may form a fourth connection line S41, and the intersection point C41 of the fourth connection line S41 and the fourth center line L41 may be defined as the first end of the fourth finger-shaped electrode 121-1. In this case, the fourth dimension W4 is the dimension measured parallel to the second direction D2 from the second side S2 of the second bus bar section 120 to the first end of the fourth finger-shaped electrode 121-1 (i.e., the intersection point C41). The fifth dimension W5 and the sixth dimension W6 may be defined similarly.

[0043] In some embodiments, the fourth dimension W4 and the fifth dimension W5 may be different or the same. In embodiments where the fourth dimension W4 and the fifth dimension W5 are the same, the width of the first bus bar section 110 may vary, while the width of the second bus bar section 120 may remain unchanged (e.g., W1≠W2, and W4 = W5). As described below with reference to FIG. 4B.

[0044] In embodiments where the fourth dimension W4 and the fifth dimension W5 are different, the width of the first bus bar section 110 may vary, and the width of the second bus bar section 120 may also vary. For example, the fourth dimension W4 may be less than the fifth dimension W5, and the fifth dimension W5 may be less than the sixth dimension W6, which may be expressed as W4 < W5 < W6. In this case, the fourth dimension W4, the fifth dimension W5, and the sixth dimension W6 may vary arithmetically or geometrically, for example.

[0045] In Figure 1 In the illustrated embodiments, the corners A11, A12, A41, and A42 are all shown as right angles, but the present invention is not limited thereto. In other embodiments, for example, at least one corner between the finger-shaped electrode and the bus bar section may be an acute corner, an obtuse corner, or an arc-shaped corner, as further described below.

[0046] Figure 2 FIG. 15 is a partial schematic view of an acoustic wave device according to an embodiment, schematically showing a part of the finger-shaped electrodes 111-1, 111-2, and the first bus bar section 110. In Figure 2, the first finger-shaped electrode 111-1 may have a first center line L11 parallel to the second direction D2, a first edge E11, and a second edge E12. An arc-shaped first corner may be formed between the first edge E11 and the first bus bar segment 110, and the middle position of the arc-shaped first corner is marked as A11. Similarly, an arc-shaped second corner may be formed between the second edge E12 of the first finger-shaped electrode 111-1 and the first bus bar segment 110, and the middle position of the arc-shaped second corner is marked as A12. The first corner A11 and the second corner A12 may form a first connecting line S11, and the intersection C11 of the first connecting line S11 and the first center line L11 may be defined as the first end of the first finger-shaped electrode 111-1 (i.e., located at the position of the intersection C11).

[0047] Similarly, the second electrode finger 111-2 may have a second center line L21, a first edge E21 and a second edge E22 parallel to the second direction D2. The first end of the second electrode finger 111-2 may also be defined similarly, such as Figure 2 As shown, the first corner A21, the second corner A22, the second line S21 and the intersection C21 may be similar to the first corner A11, the second corner A12, the first line S11 and the intersection C11, respectively, and are not described herein in detail.

[0048] Figure 3 FIG. 4 is a partial schematic diagram of an acoustic wave device according to an embodiment, which schematically shows the finger electrodes 121 - 1 , 121 - 2 and a portion of the second bus bar segment 120 . Figure 3 In the embodiment, the first end of the fourth finger electrode 121-1 and the first end of the fifth finger electrode 121-2 can be defined at intersections C41 and C51, respectively, which are similar to the description above. Figure 2 , I will not elaborate on this.

[0049] Figure 4A to Figure 5 Schematic diagram of various acoustic wave devices according to various embodiments.

[0050] like Figure 4AAs shown, in the acoustic wave device 400, with respect to the plurality of finger electrodes extending from the first bus bar section 110, the first finger electrode 111-1 and the third finger electrode 111-3 are not the finger electrodes closest to the second finger electrode 111-2. As shown, the finger electrode 111-4 is disposed between the first finger electrode 111-1 and the second finger electrode 111-2, and at least one finger electrode 111-5 is disposed between the second finger electrode 111-2 and the third finger electrode 111-3. In this embodiment, the first dimension W1 may be greater than the second dimension W2, and the third dimension W3 may be greater than the second dimension W2. That is, the distance between the first end of the first finger electrode 111-1 and the first side S1 of the first bus bar segment 110 may be greater than the distance between the first end of the second finger electrode 111-2 and the first side S1, and the distance between the first end of the third finger electrode 111-3 and the first side S1 may be greater than the distance between the first end of the second finger electrode 111-2 and the first side S1. Similarly, with respect to the plurality of finger electrodes extending from the second bus bar segment 120, as shown in FIG. Figure 4A As shown, the fourth dimension W4 may be smaller than the fifth dimension W5, and the sixth dimension W6 may be smaller than the fifth dimension W5.

[0051] In some embodiments, taking the first bus bar segment 110 as an example, a dummy electrode may be additionally extended from the first bus bar segment 110. Figure 5 As shown, the acoustic wave device 500 may additionally include a dummy electrode, for example, a first dummy electrode 112-1 may extend from a first end to a second end in parallel with the second direction D2, and its first end may contact the first bus bar segment 110. The first dummy electrode 112-1 may be disposed between the first finger electrode 111-1 and the second finger electrode 111-2. Further, the first dummy electrode 112-1 may correspond to the fourth finger electrode 121-1, for example, may be disposed to be substantially aligned with the fourth finger electrode 121-1 along the second direction D2. Similarly, the second dummy electrode 112-2 may extend from a first end to a second end in parallel with the second direction D2, and its first end may contact the first bus bar segment 110. The second dummy electrode 112-2 may be disposed between the second finger electrode 111-2 and the third finger electrode 111-3, and may correspond to the fifth finger electrode 121-2. For example, the second dummy electrode 112-2 may be substantially aligned with the fifth finger electrode 121-2 along the second direction D2. The third dummy electrode 112-3 may extend from a first end to a second end in parallel with the second direction D2, and its first end may contact the first bus bar segment 110. The third dummy electrode 112-3 may be disposed to be substantially aligned with the sixth finger electrode 121-3 along the second direction D2.

[0052] As shown in FIG. 4B , the acoustic wave device 400 ′ is similar to the acoustic wave device 400 of FIG. 4A , with the main difference being that the width of the second bus bar segment 120 ′ remains unchanged, ie, the fourth dimension W4 may be equal to the fifth dimension W5 and equal to the sixth dimension W6 .

[0053] exist Figure 5 In the illustrated implementation, for example, the first dummy electrode 112-1 may be disposed corresponding to the fourth finger electrode 121-1, and a first gap g1 may exist between the second end of the first dummy electrode 112-1 and the second end of the fourth finger electrode 121-1. Similarly, a second gap g2 may be spaced apart from the second end of the second dummy electrode 112-2 and the second end of the fifth finger electrode 121-2, and / or a third gap g3 may be spaced apart from the second end of the third dummy electrode 112-3 and the second end of the sixth finger electrode 121-3.

[0054] In the above embodiment, the first gap g1, the second gap g2, and the third gap g3 may have the same size along the second direction D2, but this is only an example and does not limit the present invention. In other embodiments, the first, second, and third gaps g1, g2, and g3 may have different sizes. Further, the first, second, and third dummy electrodes 112-1, 112-2, 112-3 may extend the same or different sizes or distances (e.g., lengths) along the second direction D2.

[0055] like Figure 5 As shown, the acoustic wave device 500 may further include a fourth dummy electrode 122-1, a fifth dummy electrode 122-2, and a sixth dummy electrode 122-3 extending parallel to the second direction D2, which may extend from the second bus bar segment 120 and are disposed to correspond to the first finger electrode 111-1, the second finger electrode 111-2, and the third finger electrode 111-3, respectively. Further, the fourth gap g4, the fifth gap g5, and the sixth gap g6 may be disposed between the fourth dummy electrode 122-1 (e.g., the second end thereof) and the first finger electrode 111-1 (e.g., the second end thereof), between the fifth dummy electrode 122-2 and the second finger electrode 111-2, and between the sixth dummy electrode 122-3 and the third finger electrode 111-3, respectively.

[0056] In the above embodiment, additional descriptions about the dummy electrodes 122 - 1 ˜ 122 - 3 and the gaps g4 ˜ g6 may refer to the dummy electrodes 112 - 1 ˜ 112 - 3 and the gaps g4 ˜ g6 , which are not repeated here.

[0057] Return to reference Figure 4A , Figure 4B and / or Figure 5In these embodiments, the first finger electrode 111-1, the second finger electrode 111-2, and the third finger electrode 111-3 may extend along the second direction D2 to the same size or distance (e.g., the length from the first end to the second end of each finger electrode). The fourth finger electrode 121-1, the fifth finger electrode 121-2, and the sixth finger electrode 121-3 may extend along the second direction D2 to the same size or distance. However, the present invention is not limited thereto. In other embodiments, for example, at least two of the first finger electrode 111-1, the second finger electrode 111-2, and the third finger electrode 111-3 may have different lengths.

[0058] Figure 6-7 Schematic diagram of various acoustic wave devices according to various embodiments.

[0059] exist Figure 6 In the acoustic wave device 600 shown, taking the first finger electrode 111-1 as an example, its length can be measured as the dimension from its first end T1 to its second end T2 along the second direction D2. As shown in the figure, the length of the first finger electrode 111-1 can be less than the length of the second finger electrode 111-2, and the length of the second finger electrode 111-2 can be less than the length of the third finger electrode 111-3. Further, when viewed along the first direction D1, the second end E2 of the first finger electrode 111-1, the second end of the second finger electrode 111-2, and the second end of the third finger electrode 111-3 can be aligned. Similarly, when viewed along the first direction D1, the second end of the fourth finger electrode 121-1, the second end of the fifth finger electrode 121-2, and the second end of the sixth finger electrode 121-3 can be aligned.

[0060] exist Figure 7 The acoustic wave device 700 shown may further include a floating electrode 710. The floating electrode 710 may extend from the first end to the second end in parallel with the second direction D2. As shown in the figure, the floating electrode 710 does not contact the first bus bar segment 110 and does not contact the first bus bar segment 120. The floating electrode 710 may help reduce spurious modes.

[0061] Figure 8 8 is a schematic flow chart of a method 800 for manufacturing an acoustic wave device according to an embodiment. The method 800 may include steps 810 to 820, wherein a bus bar segment is formed at step 810, and a finger electrode is formed at step 820. It should be noted that steps 810 and 820 may be performed sequentially or simultaneously.

[0062] In detail, in step 810, forming the bus bar segment may include forming the first bus bar segment 110 and the second bus bar segment 120. In step 820, forming the finger electrodes may include forming the first finger electrode 111-1, the second finger electrode 111-2, the third finger electrode 111-3, the fourth finger electrode 121-1, the fifth finger electrode 121-2 and / or the sixth finger electrode 121-3.

[0063] At least one acoustic wave device according to an embodiment of the present invention may have an inter-digital transducer (IDT), which can be used to achieve at least one of the following advantages: reducing the size of the acoustic wave device, reducing spurious modes, reducing surface acoustic wave noise, etc.

[0064] The above descriptions are only preferred embodiments of the present invention. All equivalent changes and modifications made within the scope of the claims of the present invention should fall within the scope of the present invention.

Claims

1. A sound wave device, It is characterized in that Include: a first bus bar section disposed along a first direction; a first finger-shaped electrode extending from a first end to a second end in parallel with a second direction, wherein the first end of the first finger-shaped electrode contacts the first bus bar segment; as well as a second finger-shaped electrode extending from a first end to a second end parallel to the second direction, wherein the first end of the second finger-shaped electrode contacts the first bus bar segment; The second finger-shaped electrode is separated from the first finger-shaped electrode, and the first bus bar section has a first size and a second size measured parallel to the second direction. The first size corresponds to the first finger-shaped electrode, the second size corresponds to the second finger-shaped electrode, and the first size is different from the second size.

2. The acoustic wave device according to claim 1, It is characterized in that in: The first finger-shaped electrode has a first center line parallel to the second direction and a first edge and a second edge parallel to the first center line, the first edge of the first finger-shaped electrode and the first bus bar section form a first corner, the second edge of the first finger-shaped electrode and the first bus bar section form a second corner, with respect to the first finger-shaped electrode, the first corner and the second corner form a first connecting line, and an intersection point of the first connecting line and the first center line is defined as the first end of the first finger-shaped electrode; The second finger-shaped electrode has a second center line parallel to the second direction and a first edge and a second edge parallel to the second center line, the first edge of the second finger-shaped electrode forms a first corner with the first bus bar segment, the second edge of the second finger-shaped electrode forms a second corner with the first bus bar segment, and for the second finger-shaped electrode, the first corner and the second corner form a second connecting line, and the intersection of the second connecting line and the second center line is defined as the first end of the second finger-shaped electrode; and The first bus bar section has a first side parallel to the first direction, the first dimension is the dimension measured from the first side of the first bus bar section to the first end of the first finger-shaped electrode parallel to the second direction, and the second dimension is the dimension measured from the first side of the first bus bar section to the first end of the second finger-shaped electrode parallel to the second direction.

3. The acoustic wave device according to claim 1, It is characterized in that Also includes: a third finger-shaped electrode extending from a first end to a second end in parallel with the second direction, wherein the first end of the third finger-shaped electrode contacts the first bus bar section, and the third finger-shaped electrode is spaced apart from the first finger-shaped electrode; wherein the second finger-shaped electrode is located between the first finger-shaped electrode and the third finger-shaped electrode; and The first bus bar section further has a third dimension measured parallel to the second direction, wherein the third dimension corresponds to the third finger-shaped electrode.

4. The acoustic wave device according to claim 3, It is characterized in that The first size is larger than the second size, and the second size is larger than the third size.

5. The acoustic wave device according to claim 3, It is characterized in that The first size is larger than the second size, and the third size is larger than the second size.

6. The acoustic wave device according to claim 3, It is characterized in that in: The first finger electrode and the third finger electrode are two finger electrodes that are closest to the second finger electrode and extend from the first bus bar segment, and A difference between the first size and the second size is equal to a difference between the second size and the third size, or a quotient of the first size divided by the second size is equal to a quotient of the second size divided by the third size.

7. The acoustic wave device according to claim 3, It is characterized in that in: The first finger electrode and the third finger electrode are two finger electrodes that are closest to the second finger electrode and extend from the first bus bar segment, and A difference between the first size and the second size is not equal to a difference between the second size and the third size, or a quotient of the first size divided by the second size is not equal to a quotient of the second size divided by the third size.

8. The acoustic wave device according to claim 3, It is characterized in that Also includes: a second bus bar section disposed along the first direction; a fourth finger-shaped electrode extending from a first end to a second end in parallel with the second direction, wherein the first end of the fourth finger-shaped electrode contacts the second bus bar segment; and a fifth finger-shaped electrode extending parallel to the second direction from a first end to a second end, wherein the first end of the fifth finger-shaped electrode contacts the second bus bar segment, The fifth finger-shaped electrode is separated from the fourth finger-shaped electrode, and the second bus bar section has a fourth dimension and a fifth dimension measured parallel to the second direction, the fourth dimension corresponds to the fourth finger-shaped electrode, the fifth dimension corresponds to the fifth finger-shaped electrode, and the fourth dimension is different from the fifth dimension.

9. The acoustic wave device according to claim 8, It is characterized in that in: The fourth finger-shaped electrode has a fourth center line parallel to the second direction and a first edge and a second edge parallel to the fourth center line, the first edge of the fourth finger-shaped electrode forms a first corner with the second bus bar section, the second edge of the fourth finger-shaped electrode forms a second corner with the second bus bar section, and as far as the fourth finger-shaped electrode is concerned, the first corner and the second corner form a fourth connecting line, and an intersection point of the fourth connecting line and the fourth center line is defined as the first end of the fourth finger-shaped electrode; The fifth finger-shaped electrode has a fifth center line parallel to the second direction and a first edge and a second edge parallel to the fifth center line, the first edge of the fifth finger-shaped electrode forms a first corner with the second bus bar segment, the second edge of the fifth finger-shaped electrode forms a second corner with the second bus bar segment, and for the fifth finger-shaped electrode, the first corner and the second corner form a fifth connecting line, and an intersection point of the fifth connecting line and the fifth center line is defined as the first end of the fifth finger-shaped electrode; and The second bus bar section has a second side parallel to the first direction. The fourth dimension is the dimension measured parallel to the second direction from the second side of the second bus bar section to the first end of the fourth finger-shaped electrode. The fifth dimension is the dimension measured parallel to the second direction from the second side of the second bus bar section to the first end of the fifth finger-shaped electrode.

10. The acoustic wave device according to claim 8, characterized in that, further comprising: a sixth finger-shaped electrode extending from a first end to a second end parallel to the second direction, wherein the first end of the sixth finger-shaped electrode contacts the second bus bar section, and the sixth finger-shaped electrode is parallel to the fourth finger-shaped electrode and is spaced apart from the fourth finger-shaped electrode; wherein the fifth finger-shaped electrode is located between the fourth finger-shaped electrode and the sixth finger-shaped electrode; and wherein the second bus bar section further has a sixth dimension measured parallel to the second direction, and the sixth dimension corresponds to the sixth finger-shaped electrode.

11. The acoustic wave device according to claim 10, characterized in that, wherein the fourth dimension is less than the fifth dimension, and the fifth dimension is less than the sixth dimension.

12. The acoustic wave device according to claim 10, characterized in that, wherein the fourth dimension is less than the fifth dimension, and the sixth dimension is less than the fifth dimension.

13. The acoustic wave device according to claim 10, characterized in that, wherein: a dimension of the first finger-shaped electrode along the second direction, a dimension of the second finger-shaped electrode along the second direction, and a dimension of the third finger-shaped electrode along the second direction are equal to each other; and a dimension of the fourth finger-shaped electrode along the second direction, a dimension of the fifth finger-shaped electrode along the second direction, and a dimension of the sixth finger-shaped electrode along the second direction are equal to each other.

14. The acoustic wave device according to claim 10, characterized in that, wherein: the first finger-shaped electrode, the fourth finger-shaped electrode, the second finger-shaped electrode, the fifth finger-shaped electrode, the third finger-shaped electrode, and the sixth finger-shaped electrode are arranged in sequence along the first direction, and at least partially overlap when observed along the first direction.

15. The acoustic wave device according to claim 14, characterized in that, further comprising: a first dummy electrode extending from a first end to a second end parallel to the second direction, wherein the first end of the first dummy electrode contacts the first bus bar section, and the first dummy electrode corresponds to the fourth finger-shaped electrode; a second dummy electrode extending from a first end to a second end parallel to the second direction, wherein the first end of the second dummy electrode contacts the first bus bar section, and the second dummy electrode corresponds to the fifth finger-shaped electrode; and a third dummy electrode extending from a first end to a second end parallel to the second direction, wherein the first end of the third dummy electrode contacts the first bus bar section, and the third dummy electrode corresponds to the sixth finger-shaped electrode, wherein: a first gap is provided between the second end of the first dummy electrode and the second end of the fourth finger-shaped electrode; a second gap is provided between the second end of the second dummy electrode and the second end of the fifth finger-shaped electrode; A third gap is spaced apart between the second end of the third dummy electrode and the second end of the sixth finger-shaped electrode; and The first gap, the second gap and the third gap are equal to each other.

16. The acoustic wave device according to claim 14, It is characterized in that Also includes: a fourth dummy electrode extending from a first end to a second end in parallel with the second direction, wherein the first end of the fourth dummy electrode contacts the second bus bar segment, and the fourth dummy electrode corresponds to the first finger-shaped electrode; a fifth dummy electrode extending from a first end to a second end in parallel with the second direction, wherein the first end of the fifth dummy electrode contacts the second bus bar segment, and the fifth dummy electrode corresponds to the second finger electrode; and a sixth dummy electrode extending from a first end to a second end parallel to the second direction, wherein the first end of the sixth dummy electrode contacts the second bus bar segment, and the sixth dummy electrode corresponds to the third finger-shaped electrode, wherein: A fourth gap is spaced between the second end of the fourth dummy electrode and the second end of the first finger-shaped electrode; A fifth gap is spaced between the second end of the fifth dummy electrode and the second end of the second finger electrode; A sixth gap is spaced between the second end of the sixth dummy electrode and the second end of the third finger-shaped electrode; and The fourth gap, the fifth gap and the sixth gap are equal to each other.

17. The acoustic wave device according to claim 10, It is characterized in that in: The second end of the first finger-shaped electrode, the second end of the second finger-shaped electrode, and the second end of the third finger-shaped electrode are aligned along the first direction; and The second end of the fourth finger-shaped electrode, the second end of the fifth finger-shaped electrode and the second end of the sixth finger-shaped electrode are aligned along the first direction.

18. The acoustic wave device according to claim 8, It is characterized in that Also includes: a floating electrode extending from a first end to a second end parallel to the second direction, The floating electrode does not contact the first bus bar section and does not contact the second bus bar section.

19. The acoustic wave device according to claim 3, It is characterized in that Also includes: a second bus bar section disposed along the first direction; a fourth finger-shaped electrode extending from a first end to a second end in parallel with the second direction, wherein the first end of the fourth finger-shaped electrode contacts the second bus bar segment; and a fifth finger-shaped electrode extending parallel to the second direction from a first end to a second end, wherein the first end of the fifth finger-shaped electrode contacts the second bus bar segment, The fifth finger-shaped electrode is separated from the fourth finger-shaped electrode, and the second bus bar section has a fourth dimension and a fifth dimension measured parallel to the second direction, the fourth dimension corresponds to the fourth finger-shaped electrode, the fifth dimension corresponds to the fifth finger-shaped electrode, and the fourth dimension is equal to the fifth dimension.

20. A method for manufacturing an acoustic wave device, It is characterized in that Include A first bus bar section, a first finger-shaped electrode, and a second finger-shaped electrode are formed, wherein: The first bus bar section is arranged along a first direction; The first finger-shaped electrode extends from a first end to a second end in parallel with a second direction, wherein the first end of the first finger-shaped electrode contacts the first bus bar segment; The second finger-shaped electrode extends from a first end to a second end parallel to the second direction, wherein the first end of the second finger-shaped electrode contacts the first bus bar segment; and The second finger-shaped electrode is separated from the first finger-shaped electrode, and the first bus bar section has a first size and a second size measured parallel to the second direction, the first size corresponds to the first finger-shaped electrode, the second size corresponds to the second finger-shaped electrode, and the first size is different from the second size.

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