Miniature spectrometer based on Van der Waals heterostructure
By using α-In2Se3 and WSexS1-x materials to construct van der Waals heterostructure and optimization algorithms in micro spectrometers, the shortcomings of existing spectrometers in flexibility, portability and spectral resolution are solved, and high-precision spectral information reconstruction and higher photoelectric response performance are achieved.
Patent Information
- Application Number
- CN202510177757.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-18
- Publication Date
- 2025-05-23
AI Technical Summary
The flexibility and portability of existing spectrometers in the fields of smart wearable devices, drones and remote sensing are limited, and the spectral resolution is limited and the reconstruction accuracy is insufficient.
A miniature spectrometer based on the Van der Waals heterostructure was adopted to use a type II energy band arrangement heterojunction composed of α-In2Se3 and WSexS1-x materials to construct the heterostructure through dry transfer technology, and high-precision spectral information reconstruction was carried out in combination with the optimized algorithm.
It achieves higher photoelectric response performance and spectral resolution, improves the accuracy of spectral information reconstruction and the overall performance of the system, and is suitable for smart wearable devices, drones, and remote sensing.
Smart Images
Figure CN120035267A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of semiconductor devices, and in particular to a miniature spectrometer based on a van der Waals heterostructure. Background Art
[0002] A spectrometer is a scientific tool used to measure the electromagnetic spectrum. Its basic principle is to use optical elements (such as a spectroscope or grating) to decompose light into beams of different wavelengths, and record the light intensity corresponding to each wavelength through a detector (such as an infrared detector or a CCD camera). Therefore, this type of spectrometer usually relies on mechanical dispersion elements (such as electric gratings, interferometers) and large-scale detector arrays, which are bulky, heavy, complex and expensive. This feature limits their flexibility and portability requirements in the fields of smart wearable devices, drones and remote sensing.
[0003] In recent years, with the development of two-dimensional materials, the emergence of van der Waals heterojunctions has provided an important way for the miniaturization of spectrometers. On the one hand, the unique properties of two-dimensional semiconductor materials enable their optical absorption spectra to be regulated by external electric fields. This feature allows the absorption spectrum of a single photodetector to be dynamically adjusted under the action of an external electric field, so that different wavelength ranges can be gradually covered on different voltage axes; in addition, the use of computational reconstruction algorithms to replace traditional optical spectroscopic elements enables the detection and reconstruction of spectral information.
[0004] Although micro-spectrometers have made some progress in miniaturization, there are still problems such as limited spectral resolution and insufficient reconstruction accuracy, which limit the overall performance and application effect of the system. Summary of the invention
[0005] In view of this, an embodiment of the present application provides a miniature spectrometer based on a van der Waals heterostructure to solve the technical defects existing in the prior art.
[0006] According to a first aspect of an embodiment of the present application, a miniature spectrometer based on a van der Waals heterostructure is provided, comprising a Si substrate 1, a SiO 2 Substrate 2, α-In 2 Se 3 / WSe x S 1-x Van der Waals heterojunction 3, source 4, drain 5, wherein:
[0007] The SiO 2 The substrate 2 is arranged on the top of the Si substrate 1. 2 Se 3 / WSe x S 1-x The van der Waals heterojunction 3 is provided on the SiO 2The top of the substrate 2, the source 4 is arranged on the α-In 2 Se 3 / WSe x S 1-x WSe in van der Waals heterojunction 3 x S 1-x The drain electrode 5 is arranged at the α-In 2 Se 3 / WSe x S 1-x α-In van der Waals heterojunction 3 2 Se 3 end.
[0008] Optionally, the van der Waals heterostructure-based micro-spectrometer further includes a gate, wherein:
[0009] The gate is arranged at the bottom of the Si substrate 1, and the α-In 2 Se 3 / WSe x S 1-x The van der Waals heterojunction 3 adjusts the photoelectric response output in response to the voltage regulation of the gate.
[0010] Optionally, the van der Waals heterostructure-based micro-spectrometer further includes a packaging layer, wherein:
[0011] The encapsulation layer covers the Si substrate 1, the SiO 2 Substrate 2, the α-In 2 Se 3 / WSe x S 1-x Van der Waals heterojunction 3 , the source 4 and the drain 5 .
[0012] Optionally, the α-In 2 Se 3 / WSe x S 1-x The van der Waals heterojunction 3 is a type II band-aligned heterojunction.
[0013] Optionally, the process of reconstructing the spectrum information of the miniature spectrometer based on the van der Waals heterostructure includes:
[0014] The initial spectral information is linearly expanded by a preset Gaussian kernel function to obtain the spectral information to be processed;
[0015] Based on the voltage regulation of the gate, the photoelectric response output is obtained, and a spectral response matrix is determined;
[0016] The product of the spectral information to be processed and the spectral response matrix is processed by the Tikhonov regularization method to solve the response coefficients of the multiple incident lights constituting the initial spectral information.
[0017] Optionally, the linear expansion of the initial spectral information by a preset Gaussian kernel function to obtain the spectral information to be processed includes:
[0018] pass The Gaussian kernel function in the form of linear expansion is used to linearly expand the initial spectral information S(λ) to obtain the spectral information to be processed. Among them, α j is the response coefficient, and σ is the function width parameter.
[0019] Optionally, the processing of the product of the spectral information to be processed and the spectral response matrix by a Tikhonov regularization method to solve the response coefficients of multiple incident lights constituting the initial spectral information includes:
[0020] Calculate the spectral information to be processed With the spectral response matrix The product of , and imposes L2 norm constraints on the weights according to L2 regularization, where V gs is the gate voltage, λ j is the incident wavelength;
[0021] Determine the measured photocurrent value, and calculate the sum of squares of the difference between the product and the measured photocurrent value;
[0022] Introducing a regularization term into the sum of squares of the difference between the product and the measured photocurrent value;
[0023] The response coefficient is solved according to the sum of squares of the difference between the product of the regularization term introduced and the measured photocurrent value.
[0024] The present application provides a miniature spectrometer based on a van der Waals heterostructure, using α-In 2 Se 3 and WSe x S 1-x The van der Waals heterostructure composed of materials was transferred by dry transfer technology using a two-dimensional material transfer station to transfer α-In 2 Se 3 and WSe x S 1-x By stacking to form a heterostructure, the two form a type II band-arranged heterojunction, which achieves efficient separation and transmission of photogenerated carriers. Compared with a single two-dimensional material detector, it effectively improves the photoelectric response performance, and combines with the optimized algorithm to reconstruct and restore high-dimensional response data with high precision. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0026] Figure 1 is a schematic structural diagram of a miniature spectrometer based on a van der Waals heterostructure provided in one embodiment of the present application;
[0027] Figure 2 This is a flow chart of spectrum information reconstruction of a miniature spectrometer based on a van der Waals heterostructure provided by an embodiment of the present application;
[0028] Figure 3 It is a spectral response matrix of a miniature spectrometer based on a van der Waals heterostructure provided in one embodiment of the present application;
[0029] Figure 4 This is a spectral information reconstruction result of a miniature spectrometer based on a van der Waals heterostructure provided in one embodiment of the present application. DETAILED DESCRIPTION
[0030] Many specific details are described in the following description to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar generalizations without violating the connotation of the present application, so the present application is not limited by the specific implementation disclosed below.
[0031] The terms used in one or more embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit one or more embodiments of the present application. The singular forms of "a", "said" and "the" used in one or more embodiments of the present application and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings. It should also be understood that the term "and / or" used in one or more embodiments of the present application refers to and includes any or all possible combinations of one or more associated listed items.
[0032] It should be understood that, although the terms first, second, etc. may be used to describe various information in one or more embodiments of the present application, such information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of one or more embodiments of the present application, the first may also be referred to as the second, and similarly, the second may also be referred to as the first.
[0033] In the present application, a miniature spectrometer based on a van der Waals heterostructure is provided, which is described in detail in the following embodiments.
[0034] Figure 1 The schematic diagram of the structure of a micro-spectrometer based on a van der Waals heterostructure according to an embodiment of the present application is shown, which specifically includes a Si substrate 1, a SiO 2 Substrate 2, α-In 2 Se 3 / WSe x S 1-x Van der Waals heterojunction 3, source 4, drain 5, wherein:
[0035] The SiO 2 The substrate 2 is arranged on the top of the Si substrate 1. 2 Se 3 / WSe x S 1-x The van der Waals heterojunction 3 is provided on the SiO 2 The top of the substrate 2, the source 4 is arranged on the α-In 2 Se 3 / WSe x S 1-x WSe in van der Waals heterojunction 3 x S 1-x The drain electrode 5 is arranged at the α-In 2 Se 3 / WSe x S 1-x α-In van der Waals heterojunction 3 2 Se 3 end.
[0036] Among them, the source electrode 4 and the drain electrode 5 can be made of metal materials such as gold, platinum / gold or chromium / gold. It should be noted that the metals available for selection are diverse, and the metals selected for the electrodes at both ends can also be different; using α-In 2 Se 3 and WSe x S 1-x Material composition α-In 2 Se 3 / WSe x S 1-x The process of van der Waals heterojunction 3 is to use a two-dimensional material transfer station to transfer α-In 2 Se 3 and WSe x S 1-x By stacking to form heterostructures, such as Figure 1 As shown, the dotted box is α-In 2 Se 3 / WSe x S 1-x Van der Waals heterojunction 3, α-In 2 Se 3 The material is connected to the drain 5 on the left, WSe x S 1-x The material is connected to the source 4 on the right. V ds is the voltage difference between the source and drain, V g is the voltage between the gate and the source, also known as V gs .
[0037] Based on this, WSe x S 1-x Due to the tunability of its chemical composition and controllability of its band gap, it shows high sensitivity to external regulation and has similar properties to WS 2 The bipolar characteristics of single-layer WS 2 or WSe 2 The significant difference is that WSe x S 1-x The electrical properties can be found in WS 2 n-type behavior and WSe 2 The flexible adjustment between the p-type behavior of α-In provides an important possibility for the design of pn junctions in electronic devices, and has the ability to be regulated by an external electric field. 2 Se 3 As a two-dimensional material with ferroelectric properties, it not only has a high light absorption coefficient, a wide band gap and good electron mobility, but its unique ferroelectricity can also introduce additional functions in the heterojunction, such as enhancing the interface built-in electric field and improving the separation efficiency of photogenerated carriers.
[0038] Furthermore, α-In 2 Se 3 / WSe x S 1-x The van der Waals heterojunction 3 is a type II band-aligned heterojunction.
[0039] Among them, α-In 2 Se 3 and WSe x S 1-x The constructed van der Waals heterostructure significantly enhances the separation and transmission efficiency of photogenerated carriers due to the formation of a type II band-aligned heterojunction. Compared with a single two-dimensional material detector, this heterojunction achieves higher photoelectric response performance. x S 1-x The bipolar characteristics further broaden the adjustable dimension of the device's spectral response and provide a higher-dimensional response data matrix for subsequent calculation of spectral information.
[0040] Based on this, only the dry transfer method needs to be performed during the manufacturing process without immersing the sample, so the production process is also simpler, showing excellent versatility and application prospects, and further demonstrating the high efficiency of optoelectronic devices.
[0041] Furthermore, the micro-spectrometer based on the van der Waals heterostructure further includes a gate, wherein the gate is arranged at the bottom end of the Si substrate 1, and the α-In 2 Se 3 / WSe x S 1-x The van der Waals heterojunction 3 adjusts the photoelectric response output in response to the voltage regulation of the gate.
[0042] Among them, realizing gate voltage control according to the gate can significantly increase the output data dimension of the detector. The control method is simple and can obtain response curves with significant differences under different gate voltages, providing high-quality input for accurate reconstruction.
[0043] Based on this, according to the measured results, by adjusting the voltage of the gate, different response values of the same incident light beam can be obtained, which improves the density of the prior data. On this basis, broadband spectrum reconstruction (500-750nm) was successfully achieved, and a high spectral resolution of 5nm was achieved, with a peak wavelength error of only 0.011nm.
[0044] Furthermore, the micro-spectrometer based on the van der Waals heterostructure further includes a packaging layer, wherein the packaging layer covers the Si substrate 1, the SiO 2 Substrate 2, the α-In 2 Se 3 / WSe x S 1-x Van der Waals heterojunction 3 , the source 4 and the drain 5 .
[0045] The encapsulation layer may be made of a wide bandgap semiconductor material, or other materials that can exist stably in a complex environment without affecting the optical response range of the device, so that the miniature spectrometer based on the van der Waals heterostructure provided by the embodiment of the present disclosure can work more stably in a complex environment.
[0046] Furthermore, the process of reconstructing the spectrum information of the miniature spectrometer based on the van der Waals heterostructure is specifically implemented as follows in this embodiment:
[0047] The initial spectral information is linearly expanded by a preset Gaussian kernel function to obtain the spectral information to be processed; based on the voltage regulation of the gate, the photoelectric response output is obtained to determine the spectral response matrix; through the Tikhonov regularization method, the product of the spectral information to be processed and the spectral response matrix is processed to solve the response coefficients of the multiple incident lights that constitute the initial spectral information.
[0048] Furthermore, the initial spectral information is linearly expanded by a preset Gaussian kernel function to obtain the spectral information to be processed. In this embodiment, the specific implementation process is as follows:
[0049] pass The Gaussian kernel function in the form of linear expansion is used to linearly expand the initial spectral information S(λ) to obtain the spectral information to be processed. Among them, α j is the response coefficient, and σ is the function width parameter.
[0050] Furthermore, the product of the spectral information to be processed and the spectral response matrix is processed by the Tikhonov regularization method to solve the response coefficients of the multiple incident lights constituting the initial spectral information. In this embodiment, the specific implementation process is as follows:
[0051] Calculate the spectral information to be processed With the spectral response matrix The product of , and imposes L2 norm constraints on the weights according to L2 regularization, where V gs is the gate voltage, λ j is the incident wavelength; determines the measured photocurrent value, and calculates the sum of squares of the difference between the product and the measured photocurrent value; introduces a regularization term for the sum of squares of the difference between the product and the measured photocurrent value; solves the response coefficient according to the sum of squares of the difference between the product and the measured photocurrent value with the regularization term introduced.
[0052] In order to improve the stability and accuracy of spectral information reconstruction, radial basis functions are used to approximate functions using Gaussian kernel functions, and the Tikhonov regularization method is used to solve the ill-posed problem of non-unique solutions. Figure 2 The spectral information reconstruction flow chart of a miniature spectrometer based on van der Waals heterostructure is shown in the following figure. The input measurement current I i The steps of the spectral response matrix R can be understood as the measured current I i Spectral response matrix for gate voltage control That is, the spectral response matrix R, where the spectral response matrix is as follows Figure 3 A spectral response matrix of a van der Waals heterostructure-based micro-spectrometer is provided; Figure 2 The steps of expanding the unknown spectrum S using the radial basis function shown in FIG. 1 can be understood as using the radial basis function of multivariate interpolation in the form of The Gaussian kernel function of is used to linearly expand the initial spectral information S(λ), that is, the unknown spectrum S, to obtain the spectral information to be processed α jis the response coefficient of each incident light that makes up the unknown spectrum, and σ is the function width parameter.
[0053] like Figure 2 The steps shown are similar to those of I by calculating the product of S and R through adaptive Tikhonov regularization. i The least constrained square solution of . Specifically, since the Gaussian kernel function only depends on the real-valued function of the distance from the origin, it can be expressed as a linear combination of infinite kernel functions, so it can be used to solve the problem of nonlinear light response value. Therefore, the spectral response matrix As the prior information of data processing, V gs is the detector grid voltage, i.e., the grid voltage, λ j for different incident wavelengths.
[0054] This matrix and the expanded representation of the spectral information to be processed The result is multiplied by the actual measured photocurrent value, that is, I i By comparison, the calculation minimizes the sum of squares of the differences. j Since the value selection process is a process of solving a non-unique solution, in order to further enhance the generalization ability of the algorithm, the Tikhonov regularization method is used in this step, and L2 regularization is used to impose L2 norm constraints on the weights.
[0055] At this time, in order to avoid the analysis results being too close or accurate to the prior data and unable to fit other data for reliability calculation, a regularization term is introduced based on the sum of squared differences to prevent the function derivative value from fluctuating too much within a narrow wavelength range. The equation that needs to be solved in the whole process is transformed from solving the initial spectral information S(λ) to solving the incident light response coefficients α that make up the unknown spectrum. j , and finally converted into the solution Implement as Figure 2 The output at this time is the S step.
[0056] In summary, the above weight decay processing method makes the algorithm highly portable and reusable. For example, when replacing the detector module or light source module in a miniature spectrometer based on van der Waals heterostructure, there is no need to make major adjustments to the spectral information reconstruction process. Only new photocurrent test values and high-density spectral response matrices need to be provided to obtain high-precision spectral reconstruction results, thereby significantly improving the applicability and efficiency of spectral information reconstruction. The spectral reconstruction results are as follows: Figure 4 The spectral information reconstruction results of a miniature spectrometer based on a van der Waals heterostructure are shown in the figure. Under the condition of 5 nm bandwidth, the spectral reconstruction results of the miniature spectrometer based on a van der Waals heterostructure provided in this embodiment are shown as the dotted line, and the existing conventional commercial spectrometer is shown as the solid line, achieving high-precision spectral reconstruction, thereby significantly improving the applicability and efficiency of the experiment.
[0057] It should be noted that the hardware part of the process of spectral information reconstruction of the miniature spectrometer based on van der Waals heterostructure is realized by computing equipment, and the software part uses MATLAB adaptive Tikhonov regularization algorithm to process the detector output data and reconstruct the spectral information. The algorithm side uses MATLAB algorithm to replace the complex mechanical structure for spectroscopy, thereby reducing the overall volume and weight of the spectrometer while obtaining high reconstruction accuracy results.
[0058] In addition, the components of the computing device include, but are not limited to, memory and processor. The processor is connected to the memory via a bus, and the database is used to store data. The computing device also includes an access device, which enables the computing device to communicate via one or more networks. Examples of these networks include a combination of a public switched telephone network (PSTN), a local area network (LAN), a wide area network (WAN), a personal area network (PAN), or a communication network such as the Internet. The access device may include one or more of any type of network interface (e.g., a network interface card (NIC)) of wired or wireless, such as IEEE802.11 wireless local area network (WLAN) wireless interface, a global interconnection for microwave access (Wi-MAX) interface, an Ethernet interface, a universal serial bus (USB) interface, a cellular network interface, a Bluetooth interface, a near field communication (NFC) interface, and the like.
[0059] In one embodiment of the present application, other components not shown in the above components of the computing device may also be connected to each other, for example, through a bus. It should be understood that those skilled in the art may add or replace other components of the computing device as needed.
[0060] The computing device may be any type of stationary or mobile computing device, including a mobile computer or mobile computing device (e.g., a tablet computer, a personal digital assistant, a laptop computer, a notebook computer, a netbook, etc.), a mobile phone (e.g., a smart phone), a wearable computing device (e.g., a smart watch, smart glasses, etc.), or other types of mobile devices, or a stationary computing device such as a desktop computer or PC. The computing device may also be a mobile or stationary server.
[0061] The processor is used to execute computer executable instructions for implementing a process of reconstructing spectral information of a micro-spectrometer based on a van der Waals heterostructure.
[0062] An embodiment of the present application further provides a computer-readable storage medium storing computer instructions, which, when executed by a processor, are used to implement a process of reconstructing spectral information of a micro-spectrometer based on a van der Waals heterostructure.
[0063] An embodiment of the present application further provides a chip storing a computer program, which, when executed by the chip, implements the steps of a process for reconstructing spectral information of a micro-spectrometer based on a van der Waals heterostructure.
[0064] The above describes specific embodiments of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.
[0065] The computer instructions include computer program codes, which may be in source code form, object code form, executable files or some intermediate forms, etc. The computer-readable medium may include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier signal, telecommunication signal and software distribution medium, etc. It should be noted that the content contained in the computer-readable medium may be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable media do not include electric carrier signals and telecommunication signals.
[0066] It should be noted that, for the above-mentioned method embodiments, for the sake of simplicity of description, they are all expressed as a series of action combinations, but those skilled in the art should be aware that the present application is not limited by the described action sequence, because according to the present application, certain steps can be performed in other sequences or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by the present application.
[0067] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0068] The preferred embodiments of the present application disclosed above are only used to help explain the present application. The optional embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of the present application. The present application selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present application, so that those skilled in the art can understand and use the present application well. The present application is only limited by the claims and their full scope and equivalents.
Claims
1. A miniature spectrometer based on van der Waals heterostructure, characterized in that: Including Si substrate (1), SiO2 substrate (2), α-In2Se3 / WSe x S 1-x Van der Waals heterojunction (3), source (4), drain (5), wherein: The SiO2 substrate (2) is arranged on the top of the Si substrate (1), and the α-In2Se3 / WSe x S 1-x The van der Waals heterojunction (3) is arranged on the top of the SiO2 substrate (2), and the source electrode (4) is arranged on the α-In2Se3 / WSe x S 1-x WSe in van der Waals heterojunction (3) x S 1-x The drain electrode (5) is arranged on the α-In2Se3 / WSe x S 1-x α-In2Se3 end of a van der Waals heterojunction (3).
2. The micro-spectrometer based on van der Waals heterostructure according to claim 1, characterized in that: The miniature spectrometer based on van der Waals heterostructure further comprises a gate, wherein: The gate is arranged at the bottom of the Si substrate (1), and the α-In2Se3 / WSe x S 1-x The van der Waals heterojunction (3) adjusts the photoelectric response output in response to the voltage regulation of the gate.
3. The micro-spectrometer based on van der Waals heterostructure according to claim 1, characterized in that: The miniature spectrometer based on van der Waals heterostructure further comprises a packaging layer, wherein: The encapsulation layer covers the Si substrate (1), the SiO2 substrate (2), the α-In2Se3 / WSe x S 1-x A van der Waals heterojunction (3), the source electrode (4) and the drain electrode (5).
4. The micro-spectrometer based on van der Waals heterostructure according to claim 1, characterized in that: The α-In2Se3 / WSe x S 1-x The van der Waals heterojunction (3) is a type II band-aligned heterojunction.
5. The miniature spectrometer based on van der Waals heterostructure according to claim 1, characterized in that: The process of reconstructing the spectrum information of the micro-spectrometer based on the van der Waals heterostructure includes: The initial spectral information is linearly expanded by a preset Gaussian kernel function to obtain the spectral information to be processed; Based on the voltage regulation of the gate, the photoelectric response output is obtained, and a spectral response matrix is determined; The product of the spectral information to be processed and the spectral response matrix is processed by the Tikhonov regularization method to solve the response coefficients of the multiple incident lights constituting the initial spectral information.
6. The micro-spectrometer based on van der Waals heterostructure according to claim 5, characterized in that: The initial spectral information is linearly expanded by a preset Gaussian kernel function to obtain the spectral information to be processed, including: pass The Gaussian kernel function in the form of linear expansion is used to linearly expand the initial spectral information S(λ) to obtain the spectral information to be processed. Among them, α j is the response coefficient, and σ is the function width parameter.
7. The miniature spectrometer based on van der Waals heterostructure according to claim 6, characterized in that: The method of processing the product of the spectral information to be processed and the spectral response matrix by the Tikhonov regularization method to solve the response coefficients of multiple incident lights constituting the initial spectral information includes: Calculate the spectral information to be processed With the spectral response matrix The product of , and imposes L2 norm constraints on the weights according to L2 regularization, where V gs is the gate voltage, λ j is the incident wavelength; Determine the measured photocurrent value, and calculate the sum of squares of the difference between the product and the measured photocurrent value; Introducing a regularization term into the sum of squares of the difference between the product and the measured photocurrent value; The response coefficient is solved according to the sum of squares of the difference between the product of the regularization term introduced and the measured photocurrent value.