Laser lift-off device and method
In the manufacturing process of flexible display screen, the combined technology of eddy current heater and movable laser emitter is solved, and the thermal mismatch problem caused by temperature gradient during laser peeling is achieved, which can achieve safe peeling of the film layer, ensuring product integrity and luminous effect.
Patent Information
- Application Number
- CN202510181749.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-19
- Publication Date
- 2025-05-27
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
During the manufacturing process of flexible display screens, thermal mismatch caused by temperature gradient during laser peeling can easily cause cracks in the transparent polyimide film layer, affecting the integrity and luminous effect of the product.
A laser peeling device and method are adopted to heat the middle and four corners above the glass substrate through an eddy current heater, and move the transparent polyimide film layer in a straight or curved manner using a movable laser emitter. Combined with the action of heat and light, the hanging bond between the glass substrate and the film layer is interrupted, thereby realizing the peeling of the film layer.
By eliminating the temperature difference between the peeling point and the surrounding area, cracking caused by thermal mismatch is avoided, the luminous effect and yield of the flexible display screen is ensured, and the peeling operation is not limited by the linear path, and can peel along the curve and not easily cracked locally.
Smart Images
Figure CN120038439A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of laser lift-off, and more specifically, to a laser lift-off device and method. Background Art
[0002] In the manufacturing process of flexible display screens, a key step is to accurately separate the transparent polyimide film layer from the glass substrate. This operation typically relies on laser technology, where a focused beam irradiates a predetermined lift-off point. After the laser energy is absorbed, it is converted into heat energy, causing the temperature in the irradiated area to rise, thereby promoting the breaking of the chemical bonds between the glass substrate and the transparent polyimide film layer, achieving an effective separation between the two.
[0003] However, during this process, a significant temperature gradient will form between the laser-irradiated area and the non-irradiated surrounding area. This thermal mismatch phenomenon caused by the temperature difference is extremely likely to trigger local stress concentration at the moment of lift-off, thereby increasing the risk of film layer cracking. These cracks not only damage the integrity of the flexible display screen but also affect its light-emitting effect and the final product yield. Summary of the Invention
[0004] This application aims to at least solve one of the technical problems existing in the prior art. For this purpose, this application proposes a laser lift-off device and method, which can reduce the problem of local cracking that is likely to occur when separating the transparent polyimide film layer from the glass substrate.
[0005] A laser lift-off device includes a tray and a carrier mechanism. The tray is arranged below the glass substrate and is used to carry the glass substrate. An attitude adjustment mechanism is installed on the carrier mechanism, and a laser emitter is installed on the attitude adjustment mechanism. Driven by an external driver, the carrier mechanism drives the attitude adjustment mechanism and the laser emitter to move linearly along the X-axis, Y-axis, or Z-axis. The laser emitter can also move in a curve in space. The attitude adjustment mechanism can drive the laser emitter to swing around the X-axis and Y-axis to adjust the emission angle of the laser emitter.
[0006] The attitude adjustment mechanism includes a first support plate. The top of the first support plate is fixedly connected to a mounting seat. The outer wall of the first support plate is fixedly connected to a first servo motor. The output end of the first servo motor is fixedly connected to a first worm. The inner wall of the first support plate is rotatably connected to a first rotating shaft and a second rotating shaft. Gears are fixedly connected to the outer walls of the first rotating shaft and the second rotating shaft. The two gears mesh with each other. A first worm gear is fixedly connected to the outer wall of the first rotating shaft. The first worm meshes with the first worm gear. A second support plate is fixedly connected to the outer wall of the second rotating shaft.
[0007] The first servo motor drives the first worm to rotate, drives the first rotating shaft to rotate through the first worm, drives the second rotating shaft to rotate through the gear, and the second rotating shaft drives the second support plate to swing in the Y-axis direction;
[0008] A second servo motor is fixedly connected to the outer wall of the second support plate. The output end of the second servo motor is fixedly connected to a second worm. A support shaft is rotatably connected to the inner wall of the second support plate. A second worm gear is fixedly connected to the end of the support shaft. The second worm gear meshes with the second worm. A fixed seat is fixedly connected to the end of the support shaft. A laser emitter is fixedly connected to the inner wall of the fixed seat;
[0009] The second servo motor drives the second worm to rotate. The second worm drives the support shaft to rotate through the second worm gear. The support shaft drives the fixed seat to swing in the X-axis direction.
[0010] Preferably, the vehicle mechanism includes two first electric slide rails. Brackets are fixedly connected to the sliding parts of the two first electric slide rails. Second electric slide rails are fixedly connected to the ends of the brackets. A third electric slide rail is fixedly connected to the sliding part of the second electric slide rail. An installation seat is fixedly connected to the sliding part of the third electric slide rail.
[0011] Preferably, it further includes a glass substrate and a transparent polyimide film layer. A first eddy current induction area is arranged in the middle of the top surface of the glass substrate. Second eddy current induction areas are respectively arranged at the four corners of the top surface of the glass substrate. The transparent polyimide film layer is located above the glass substrate.
[0012] Preferably, an eddy current heater is arranged below the glass substrate, which can heat the first eddy current induction area and the second eddy current induction area.
[0013] Preferably, the laser emitter is movably arranged above the transparent polyimide film layer, and the laser emitter can emit laser towards the transparent polyimide film layer.
[0014] Preferably, a plurality of first graphite rings are arranged in the first eddy current induction area, and the first graphite rings are arranged in an array. A second graphite ring is arranged in each second eddy current induction area, and the diameter of the second graphite ring is larger than that of the first graphite ring. The laser emitter can move up and down, left and right, front and back, and can swing left and right, front and back.
[0015] Preferably, it further includes a lower periodic anti-oxidation layer, which is located above the top surface of the glass substrate. A transparent flexible layer is arranged above the top surface of the lower periodic anti-oxidation layer. An upper periodic anti-oxidation layer is arranged above the top surface of the transparent flexible layer. The transparent polyimide film layer is located above the top surface of the upper periodic anti-oxidation layer.
[0016] Preferably, the lower periodic anti-oxidation layer and the upper periodic anti-oxidation layer are silicon oxide or silicon nitride, and the transparent flexible layer is polydimethylsiloxane or polymethyl methacrylate.
[0017] Preferably, it further includes an anode layer located above the top surface of the transparent polyimide film layer, a light-emitting layer is provided above the top surface of the anode layer, and a cathode layer is provided above the top surface of the light-emitting layer.
[0018] A peeling method of a laser peeling device includes the following steps:
[0019] S1. Heat the first eddy current induction area and the second eddy current induction area by means of an eddy current heater, and the first eddy current induction area heats the middle part of the transparent polyimide film layer;
[0020] S2. The second eddy current induction areas at the four corners heat the four corners of the transparent polyimide film layer respectively;
[0021] S3. The laser emitter moves linearly or curvilinearly above the transparent polyimide film layer and emits laser light to the transparent polyimide film layer;
[0022] S4. The laser and heat break the dangling bonds between the glass substrate and the surface of the transparent polyimide film layer to peel the transparent polyimide film layer from the glass substrate.
[0023] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0024] Heat the first eddy current induction area and the second eddy current induction area by means of an eddy current heater. The first eddy current induction area heats the middle part of the transparent polyimide film layer, and the second eddy current induction areas at the four corners heat the four corners of the transparent polyimide film layer respectively. The laser emitter moves linearly or curvilinearly above the transparent polyimide film layer and emits laser light to the transparent polyimide film layer. The laser and heat break the dangling bonds between the glass substrate and the surface of the transparent polyimide film layer to peel the transparent polyimide film layer from the glass substrate. Since the temperature difference between the peeling point and the surrounding area is eliminated, the cracking phenomenon caused by thermal mismatch between the peeling point and the surrounding area is avoided, thereby ensuring the light-emitting effect and yield of the flexible display screen. In addition, this improvement also makes the peeling operation no longer restricted by a straight path. Even when peeling along a curve, local cracking is not likely to occur. At the same time, by using the heated first eddy current induction area and the second eddy current induction area, the breaking of the dangling bonds can be more effectively promoted, further facilitating the smooth progress of the peeling process. Description of the Drawings
[0025] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.
[0026] Figure 1 Schematic diagram of the installation structure of the first support plate of the present invention;
[0027] Figure 2 Schematic diagram of the installation structure of the second support plate of the present invention;
[0028] Figure 3 Schematic diagram of the installation structure of the laser emitter of the present invention;
[0029] Figure 4 Schematic diagram of the installation structure of the first worm gear of the present invention;
[0030] Figure 5 Schematic diagram of the partial structure of the present invention;
[0031] Figure 6 Schematic diagram of the structure of the glass substrate of the present invention.
[0032] Explanation of the reference numerals in the figure: 1. Glass substrate; 2. First eddy current induction area; 3. First graphite ring; 4. Second eddy current induction area; 5. Second graphite ring; 6. Transparent polyimide film layer; 7. Eddy current heater; 8. Laser emitter; 9. Lower periodic anti-oxidation layer; 10. Transparent flexible layer; 11. Upper periodic anti-oxidation layer; 12. Anode electrode layer; 13. Light-emitting layer; 14. Cathode electrode layer; 15. First electric slide rail; 16. Bracket; 17. Second electric slide rail; 18. Third electric slide rail; 19. Mounting seat; 20. First support plate; 201. First servo motor; 202. First worm; 203. First rotating shaft; 204. Second rotating shaft; 205. First worm gear; 206. Gear; 21. Second support plate; 210. Second servo motor; 211. Second worm; 212. Second worm gear; 22. Fixed seat; 23. Support shaft; 24. Tray. Specific embodiments
[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the following will clearly and completely describe the technical solutions in the embodiments of this application in conjunction with the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, rather than all of them. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of this application. The following will make a detailed description of the specific embodiments of the present invention in conjunction with the drawings of the specification.
[0034] As Figures 1 - 6 shown, a laser stripping device includes a tray 24 and a carrier mechanism. The tray 24 is disposed below the glass substrate 1 and is used to carry the glass substrate 1. An attitude adjustment mechanism is installed on the carrier mechanism, and a laser emitter 8 is installed on the attitude adjustment mechanism. Driven by an external driver, the carrier mechanism drives the attitude adjustment mechanism and the laser emitter 8 to move linearly along the X-axis, Y-axis, or Z-axis. The laser emitter 8 can also move in a curve in space. The attitude adjustment mechanism can drive the laser emitter 8 to swing around the X-axis and Y-axis to adjust the emission angle of the laser emitter 8.
[0035] The attitude adjustment mechanism includes a first support plate 20. The top of the first support plate 20 is fixedly connected to a mounting seat 19. The outer wall of the first support plate 20 is fixedly connected to a first servo motor 201. The output end of the first servo motor 201 is fixedly connected to a first worm 202. The inner wall of the first support plate 20 is rotatably connected to a first rotating shaft 203 and a second rotating shaft 204. Gears 206 are fixedly connected to the outer walls of the first rotating shaft 203 and the second rotating shaft 204. The two gears 206 mesh with each other. A first worm gear 205 is fixedly connected to the outer wall of the first rotating shaft 203. The first worm 202 meshes with the first worm gear 205. A second support plate 21 is fixedly connected to the outer wall of the second rotating shaft 204.
[0036] In the above structure, the first servo motor 201 drives the first worm 202 to rotate. The first worm 202 drives the first rotating shaft 203 to rotate. The first rotating shaft 203 drives the second rotating shaft 204 to rotate through the gears 206. The second rotating shaft 204 drives the second support plate 21 to swing in the Y-axis direction.
[0037] In this embodiment, a second servo motor 210 is fixedly connected to the outer wall of the second support plate 21. The output end of the second servo motor 210 is fixedly connected to a second worm 211. A support shaft 23 is rotatably connected to the inner wall of the second support plate 21. A second worm gear 212 is fixedly connected to the end of the support shaft 23. The second worm gear 212 meshes with the second worm 211. A fixed seat 22 is fixedly connected to the end of the support shaft 23. The laser emitter 8 is fixedly connected to the inner wall of the fixed seat 22.
[0038] In the above structure, the second servo motor 210 drives the second worm 211 to rotate. The second worm 211 drives the support shaft 23 to rotate through the second worm gear 212, and the support shaft 23 drives the fixed seat 22 to swing in the X-axis direction.
[0039] The vehicle mechanism includes two first electric slide rails 15. Brackets 16 are fixedly connected to the sliding parts of the two first electric slide rails 15. Second electric slide rails 17 are fixedly connected to the ends of the brackets 16. A third electric slide rail 18 is fixedly connected to the sliding part of the second electric slide rail 17, and a mounting seat 19 is fixedly connected to the sliding part of the third electric slide rail 18.
[0040] In this embodiment, the above laser peeling device further includes a lower periodic anti-oxidation layer 9, a glass substrate 1, and a transparent polyimide film layer 6. A first eddy current induction area 2 is provided in the middle of the top surface of the glass substrate 1, and second eddy current induction areas 4 are respectively provided at the four corners of the top surface of the glass substrate 1. The transparent polyimide film layer 6 is located above the glass substrate 1. An eddy current heater 7 is provided below the glass substrate 1, which can heat the first eddy current induction area 2 and the second eddy current induction areas 4. The laser emitter 8 is movably arranged above the transparent polyimide film layer 6, and the laser emitter 8 can emit laser light towards the transparent polyimide film layer 6.
[0041] A plurality of first graphite rings 3 are provided in the first eddy current induction area 2, and the first graphite rings 3 are arranged in an array. A second graphite ring 5 is provided in each second eddy current induction area 4, and the diameter of the second graphite ring 5 is larger than that of the first graphite ring 3. The laser emitter 8 can move up and down, left and right, front and back, and can swing left and right, front and back.
[0042] The lower periodic anti-oxidation layer 9 is located above the top surface of the glass substrate 1. The glass substrate 1 can be non-deformable glass or flexible ultra-thin glass. A transparent flexible layer 10 is provided above the top surface of the lower periodic anti-oxidation layer 9, and an upper periodic anti-oxidation layer 11 is provided above the top surface of the transparent flexible layer 10. The transparent polyimide film layer 6 is located above the top surface of the upper periodic anti-oxidation layer 11.
[0043] The lower periodic anti-oxidation layer 9 and the upper periodic anti-oxidation layer 11 are silicon oxide or silicon nitride, and the transparent flexible layer 10 is polydimethylsiloxane or polymethyl methacrylate.
[0044] It further includes an anode electrode layer 12. The anode electrode layer 12 is located above the top surface of the transparent polyimide film layer 6. A light-emitting layer 13 is provided above the top surface of the anode electrode layer 12, and a cathode electrode layer 14 is provided above the top surface of the light-emitting layer 13.
[0045] The first eddy current induction area 2 and the second eddy current induction area 4 are heated by an eddy current heater 7. The first eddy current induction area 2 heats the middle part of the transparent polyimide film layer 6, and the second eddy current induction areas 4 at the four corners respectively heat the four corners of the transparent polyimide film layer 6. The laser emitter 8 moves linearly or curvilinearly above the transparent polyimide film layer 6 and emits laser to the transparent polyimide film layer 6. The laser and heat break the dangling bonds between the glass substrate 1 and the surface of the transparent polyimide film layer 6, so as to peel the transparent polyimide film layer 6 from the glass substrate 1.
[0046] Since the temperature difference between the peeling point and the surrounding area is eliminated, the cracking phenomenon caused by thermal mismatch between the peeling point and the surrounding area is avoided, thus ensuring the light-emitting effect and yield of the flexible display screen. In addition, this improvement also makes the peeling operation no longer restricted by a straight path. Even when peeling along a curve, local cracking is not likely to occur. At the same time, by using the heated first eddy current induction area 2 and the second eddy current induction area 4, the breaking of the dangling bonds can be more effectively promoted, further facilitating the smooth progress of the peeling process.
[0047] The above shows and describes the basic principle, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.
Claims
1. A laser lift-off device, characterized in that: include: A glass substrate (1) and a transparent polyimide film layer (6), wherein a first eddy current induction area (2) is arranged in the middle of the top surface of the glass substrate (1), and second eddy current induction areas (4) are arranged at the four corners of the top surface of the glass substrate (1), the transparent polyimide film layer (6) is located above the glass substrate (1), and an eddy current heater (7) is arranged below the glass substrate (1) to generate heat in the first eddy current induction area (2) and the second eddy current induction area (4); A tray (24), the tray (24) being arranged below the glass substrate (1) and being used to carry the glass substrate (1); A carrier mechanism, wherein a posture adjustment mechanism is installed on the carrier mechanism, and a laser emitter (8) is installed on the posture adjustment mechanism; The carrier mechanism, driven by an external driver, drives the posture adjustment mechanism and the laser emitter (8) to move linearly along the X-axis, the Y-axis or the Z-axis, and the laser emitter (8) can also move in a curve in space; The posture adjustment mechanism can drive the laser emitter (8) to swing around the X-axis and the Y-axis, so as to adjust the emission angle of the laser emitter (8).
2. The laser lift-off device according to claim 1, characterized in that: The posture adjustment mechanism comprises a first support plate (20), the top of the first support plate (20) is fixedly connected to the mounting seat (19), the outer wall of the first support plate (20) is fixedly connected to a first servo motor (201), the output end of the first servo motor (201) is fixedly connected to a first worm gear (202), the inner wall of the first support plate (20) is rotatably connected to a first rotating shaft (203) and a second rotating shaft (204), the outer walls of the first rotating shaft (203) and the second rotating shaft (204) are both fixedly connected to gears (206), the two gears (206) are meshed with each other, the outer wall of the first rotating shaft (203) is fixedly connected to a first worm gear (205), the first worm gear (202) is meshed with the first worm gear (205), and the outer wall of the second rotating shaft (204) is fixedly connected to a second support plate (21).
3. The laser lift-off device according to claim 2, characterized in that: The first servo motor (201) drives the first worm (202) to rotate, and the first worm (202) drives the first rotating shaft (203) to rotate, and the first rotating shaft (203) drives the second rotating shaft (204) to rotate through the gear (206), and the second rotating shaft (204) drives the second support plate (21) to swing around the Y-axis direction.
4. The laser lift-off device according to claim 3, characterized in that: The outer wall of the second support plate (21) is fixedly connected to a second servo motor (210), the output end of the second servo motor (210) is fixedly connected to a second worm (211), the inner wall of the second support plate (21) is rotatably connected to a support shaft (23), the end of the support shaft (23) is fixedly connected to a second worm gear (212), the second worm gear (212) is meshed with the second worm gear (211), the end of the support shaft (23) is fixedly connected to a fixed seat (22), and the inner wall of the fixed seat (22) is fixedly connected to a laser emitter (8).
5. The laser lift-off device according to claim 4, characterized in that: The second servo motor (210) drives the second worm (211) to rotate, the second worm (211) drives the support shaft (23) to rotate through the second worm gear (212), and the support shaft (23) drives the fixed seat (22) to swing around the X-axis direction.
6. The laser lift-off device according to claim 5, characterized in that: The carrier mechanism comprises two first electric slide rails (15), the sliding parts of the two first electric slide rails (15) are fixedly connected to brackets (16), the ends of the brackets (16) are fixedly connected to second electric slide rails (17), the sliding parts of the second electric slide rails (17) are fixedly connected to third electric slide rails (18), and the sliding parts of the third electric slide rails (18) are fixedly connected to mounting seats (19).
7. The laser lift-off device according to claim 6, characterized in that: An eddy current heater (7) is arranged below the glass substrate (1) and can heat the first eddy current induction zone (2) and the second eddy current induction zone (4). The laser emitter (8) is movably arranged above the transparent polyimide film layer (6). The laser emitter (8) can emit laser light toward the transparent polyimide film layer (6). A plurality of first graphite rings (3) are arranged in the first eddy current induction zone (2). The first graphite rings (3) are arranged in an array. A second graphite ring (5) is arranged in each of the second eddy current induction zones (4). The diameter of the second graphite ring (5) is larger than that of the first graphite ring (3). The laser emitter (8) can move up, down, left, right, forward, and backward, and can swing forward, backward, left, and right.
8. The laser lift-off device according to claim 7, characterized in that: The invention also comprises a lower periodic anti-oxidation layer (9), wherein the lower periodic anti-oxidation layer (9) is located above the top surface of the glass substrate (1), a transparent flexible layer (10) is arranged above the top surface of the lower periodic anti-oxidation layer (9), an upper periodic anti-oxidation layer (11) is arranged above the top surface of the transparent flexible layer (10), the transparent polyimide film layer (6) is located above the top surface of the upper periodic anti-oxidation layer (11), the lower periodic anti-oxidation layer (9) and the upper periodic anti-oxidation layer (11) are silicon oxide or silicon nitride, and the transparent flexible layer (10) is polydimethylsiloxane or polymethyl methacrylate.
9. The laser lift-off device according to claim 8, characterized in that: It also comprises an anode electrode layer (12), the anode electrode layer (12) being located above the top surface of the transparent polyimide film layer (6), a light-emitting layer (13) being arranged above the top surface of the anode electrode layer (12), and a cathode electrode layer (14) being arranged above the top surface of the light-emitting layer (13).
10. A stripping method of a laser stripping device, applicable to the laser stripping device of claim 9, characterized in that: The following steps are involved: S1, using an eddy current heater (7) to heat the first eddy current induction zone (2) and the second eddy current induction zone (4), so that the first eddy current induction zone (2) heats the middle part of the transparent polyimide film layer (6); S2, the second eddy current induction zones (4) at the four corners heat the four corners of the transparent polyimide film layer (6) respectively; S3, the laser emitter (8) moves in a straight line or a curve above the transparent polyimide film layer (6) and emits laser light toward the transparent polyimide film layer (6); S4, laser and heat are used to break the dangling bonds between the glass substrate (1) and the surface of the transparent polyimide film layer (6), so as to peel the transparent polyimide film layer (6) from the glass substrate (1).