Acoustic test device, jig structure, test board and acoustic test method

Abstract

The invention discloses an acoustic test device, a jig structure, a test board and an acoustic test method. The acoustic test device comprises a substrate, an acoustic element, a jig element and an acoustic sensing element. The substrate has a first surface and a second surface opposite to the first surface, wherein the substrate has a substrate opening. The acoustic element is arranged on the first surface of the substrate and corresponds to the substrate opening. The jig element is disposed on the second surface of the substrate, wherein the first cavity is formed between the jig element and the substrate. The acoustic sensing element is fixed by the jig element. The substrate is between the acoustic element and the jig element. The first side of the acoustic element faces the second cavity and is subjected to test conditions maintained within the second cavity. The acoustic sensing element is configured to sense acoustic waves radiated from the second side of the acoustic element via the substrate opening while the first side of the acoustic element is subjected to the test condition.

Description

Technical Field

[0001] The present invention relates to an acoustic testing device, a fixture structure, a test board, and an acoustic testing method, and particularly to an acoustic testing device capable of obtaining the performance of an acoustic component at different temperatures, as well as a related fixture structure, test board, and acoustic testing method. Background Art

[0002] In today's society, acoustic devices can be widely used in various electronic devices. In order to improve the performance of acoustic devices, the acoustic components provided in the acoustic devices need to be tested to check the performance of the acoustic components.

[0003] Generally speaking, the performance of acoustic components will change due to temperature variations. Therefore, it is necessary to test the relationship between the performance of acoustic components and temperature. However, there are currently no devices and systems capable of dynamically testing the relationship between the performance of acoustic components and temperature. Accordingly, a device and system capable of dynamically testing this relationship are needed. Summary of the Invention

[0004] Therefore, the main object of the present invention is to provide an acoustic testing device with a specific design to obtain the performance of an acoustic component at different temperatures or under extreme high / low temperatures. In addition, the present invention also provides a related fixture structure, test board, and acoustic testing method.

[0005] An embodiment of the present invention provides an acoustic testing device, which includes a substrate, an acoustic component, a fixture component, and an acoustic sensing component. The substrate has a first surface and a second surface opposite to the first surface, wherein the substrate has a substrate opening. The acoustic component is disposed on the first surface of the substrate and corresponds to the substrate opening. The fixture component is disposed on the second surface of the substrate, wherein a first cavity is formed between the fixture component and the substrate. The acoustic sensing component is fixed by the fixture component. The substrate is between the acoustic component and the fixture component. The first side of the acoustic component faces a second cavity and is subjected to the test conditions maintained in the second cavity. While the first side of the acoustic component is subjected to the test conditions, the acoustic sensing component is used to sense the acoustic wave radiated from the second side of the acoustic component through the substrate opening.

[0006] Another embodiment of the present invention provides a fixture structure, which includes a fixture component, and the fixture component includes a first part and a second part. The first part includes a first inner wall, and the first inner wall surrounds a first space, wherein the first part has an acoustic inlet connected to the first space, and the acoustic inlet is defined by the first inner wall. The second part is connected to the first part and includes a second inner wall, and the second inner wall surrounds a second space connected to the first space, wherein the second space is used to accommodate the acoustic sensing component. The fixture structure is used to fix the acoustic sensing component.

[0007] Another embodiment of the present invention provides a test board, which includes a substrate. The substrate has a first surface and a second surface opposite to the first surface, wherein the substrate has a substrate opening. An acoustic element is disposed or to be disposed on the first surface of the substrate and corresponds to the substrate opening. The second surface faces an acoustic sensing element, and while the first side of the acoustic element is subjected to test conditions, the acoustic sensing element is used to sense acoustic waves radiated from the second side of the acoustic element through the substrate opening.

[0008] Another embodiment of the present invention provides an acoustic testing method, and the acoustic testing method includes: providing an acoustic testing device; performing a first testing process; and performing a second testing process. The acoustic testing device includes a substrate, an acoustic element, a jig element, an acoustic sensing element, and a cavity. The substrate has a first surface and a second surface opposite to the first surface, wherein the substrate has a substrate opening. The acoustic element is disposed on the first surface of the substrate and corresponds to the substrate opening. The jig element is disposed on the second surface of the substrate, wherein a first cavity is formed between the jig element and the substrate. The acoustic sensing element is fixed by the jig element. A second cavity exists in the cavity, and the substrate, the acoustic element, the jig element, and the acoustic sensing element are disposed in the cavity, and the substrate is between the first cavity and the second cavity. The first side of the acoustic element faces the second cavity and is subjected to the test conditions maintained in the second cavity. While the first side of the acoustic element is subjected to the test conditions, the acoustic sensing element is used to sense acoustic waves radiated from the second side of the acoustic element through the substrate opening. In the first testing process, after the temperature in the second cavity is adjusted to reach a first value, the acoustic sensing element senses the acoustic waves to obtain a first result. In the second testing process, after the temperature in the second cavity is adjusted to reach a second value different from the first value, the acoustic sensing element senses the acoustic waves to obtain a second result. The first testing process and the second testing process are iteratively performed.

[0009] Another embodiment of the present invention provides an acoustic testing method, and the acoustic testing method includes: providing a cavity, wherein test conditions are maintained in the cavity; disposing an acoustic element on the first surface of a substrate, wherein a substrate opening is formed on the substrate, and the first side of the acoustic element faces the cavity and is subjected to the test conditions maintained in the cavity; disposing a jig element on the second surface of the substrate, wherein the acoustic sensing element is fixed in the jig element; and sensing, by the acoustic sensing element, acoustic waves radiated from the second side of the acoustic element through the substrate opening.

[0010] After reading the detailed description of the embodiments with various drawings shown below, the purpose of the present invention should be clear to those skilled in the art. Description of the Drawings

[0011] Figure 1 The figure shows a schematic diagram of an acoustic testing system with an acoustic testing device according to an embodiment of the present invention.

[0012] Figure 2 The figure shows a schematic diagram of a fixture structure and an acoustic sensing element according to an embodiment of the present invention.

[0013] Figure 3 The figure shows a cross-sectional schematic diagram of a fixture structure, an acoustic sensing element, and a test board according to an embodiment of the present invention.

[0014] Figure 4 The figure shows a schematic flow diagram of an acoustic testing method according to an embodiment of the present invention.

[0015] Reference numerals

[0016] 100 Test board

[0017] 110 Substrate

[0018] 110a First surface

[0019] 110b Second surface

[0020] 112 Substrate opening

[0021] 116 Substrate connection hole

[0022] 120 Acoustic element

[0023] 120a Front side

[0024] 120b Back side

[0025] 130 Temperature sensor

[0026] 200 Acoustic sensing element

[0027] 300 Fixture structure

[0028] 310 Fixture element

[0029] 310i Acoustic inlet

[0030] 312 First part

[0031] 312w First inner wall

[0032] 314 Second part

[0033] 314w Second inner wall

[0034] 316 Fixture connection hole

[0035] 320 First sealing ring

[0036] 330 Second sealing ring

[0037] 340 Third sealing ring

[0038] 400 Cavity

[0039] 410 Temperature Control Element

[0040] AD Acoustic Testing Device

[0041] ATS Acoustic Testing System

[0042] CP Connector

[0043] CV1 First Cavity

[0044] CV2 Second Cavity

[0045] PD Signal Processing Device

[0046] PDa Amplifier

[0047] PDp Signal Processing Element

[0048] PDs Sensing Processing Element

[0049] SP1 First Space

[0050] SP2 Second Space

[0051] ST1, ST2, ST3, ST4, ST5, ST6, ST7, ST8 Steps X, Y, Z Directions Detailed Implementation Manner

[0052] To enable those of ordinary skill in the art to further understand the present invention, the following will detail the preferred embodiments of the present invention, the typical materials or parameter ranges of key components, and will explain the composition and the intended effects of the present invention in conjunction with the marked drawings. It should be noted that the drawings are all simplified schematic diagrams, and based on the current technology, the material and parameter ranges of key components are illustrated. Therefore, only the components and combination relationships related to the present invention are shown to provide a clearer description of the basic structure, implementation method or operation of the present invention. The actual components and layouts may be more complex, and the material or parameter ranges used may change with the development of future technologies. In addition, for convenience of explanation, the components shown in the various drawings of the present invention may not be drawn in an equal proportion according to the actual number, shape, and size, and the details can be adjusted according to the design requirements.

[0053] In the following specification and claims, words such as "comprising", "containing", "having", etc. are open-ended terms and should therefore be construed to mean "including but not limited to...". Thus, when the terms "comprising", "containing", and / or "having" are used in the description of the present invention, they specify the presence of the corresponding features, regions, steps, operations, and / or components, but do not exclude the presence of one or more corresponding features, regions, steps, operations, and / or components.

[0054] In the following specification and claims, when a component or film layer is referred to as "connected to" another component or film layer, it may be directly connected to this other component or film layer, or there may be an intervening component or film layer between the two. In contrast, when a component is referred to as "directly connected to" another component or film layer, there is no intervening component or film layer between the two.

[0055] In the following specification and claims, when "component A1 is formed by B1", B1 is present in the formation of component A1 or B1 is used in the formation of component A1, and the formation of component A1 does not exclude the presence and use of one or more other features, regions, steps, operations, and / or components.

[0056] In the following specification and claims, the term "substantially" means that there may or may not be a minor deviation. For example, the terms "substantially parallel", "substantially along" mean that the angle between two components may be less than or equal to a specific angular threshold, such as 10 degrees, 5 degrees, 3 degrees, or 1 degree. For example, the term "substantially aligned" means that the deviation between two components may be less than or equal to a specific difference threshold, such as 2 micrometers (μm) or 1 micrometer. For example, the term "substantially the same" means that the deviation is within a given value or a given range, such as within 10%, 5%, 3%, 2%, 1%, or 0.5%.

[0057] In the following specification and claims, the term "horizontal direction" refers to a direction parallel to the horizontal plane, the term "horizontal plane" refers to a plane parallel to directions X and Y in the drawings (i.e., directions X and Y of the present invention can be regarded as horizontal directions), the terms "vertical direction", "top view direction" refer to directions parallel to direction Z and perpendicular to the horizontal direction in the drawings, where directions X, Y, and Z are perpendicular to each other. In the following specification and claims, the term "top view" refers to the viewing result along the vertical direction. In the following specification and claims, the term "section" refers to the viewing result of a structure cut along the vertical direction and viewed from the horizontal direction.

[0058] The ordinal numbers used in the specification and claims, such as "first", "second", etc., are used to modify elements. They do not inherently imply or represent that the element (or these elements) has any previous ordinal number, nor do they represent the order of one element relative to another element or the order in the manufacturing method. The use of these ordinal numbers is only to clearly distinguish an element with a certain name from another element with the same name. The terms used in the claims and the specification may not be the same. Accordingly, the first component in the specification may be the second component in the claim.

[0059] It should be noted that in the following examples, without departing from the spirit of the present invention, the features in several different embodiments can be replaced, reorganized, and mixed to complete other embodiments. As long as the features between the embodiments do not violate the spirit of the invention or conflict with each other, they can be arbitrarily mixed and used.

[0060] In the present invention, an acoustic testing system is used to test acoustic elements to obtain the performance of acoustic elements at different temperatures or under extreme high / low temperatures (e.g., from -40°C to 125°C). In the present invention, the acoustic elements are related to acoustic waves, such that the performance of the acoustic elements is the performance of the acoustic waves.

[0061] In some embodiments, the acoustic element may include an acoustic transducer for performing acoustic transformation, where the acoustic transformation can convert a signal (e.g., an electrical signal) into an acoustic wave. For example, the acoustic transducer can be a sound-emitting element, a speaker, a micro speaker, or other suitable devices to convert an electrical signal into an acoustic wave (i.e., the acoustic transducer can generate an acoustic wave), but not limited thereto. For example, since the acoustic element may include an acoustic transducer capable of generating an acoustic wave, the performance of the acoustic wave can be determined by the sound pressure level (SPL), but not limited thereto.

[0062] Please refer to Figures 1 to 3 , Figure 1 which shows a schematic diagram of an acoustic testing system with an acoustic testing device according to an embodiment of the present invention. Figure 2 which shows a schematic diagram of a jig structure and an acoustic sensing element according to an embodiment of the present invention. Figure 3 which shows a cross-sectional schematic diagram of a jig structure, an acoustic sensing element, and a test board according to an embodiment of the present invention. As Figures 1 to 3 shown, the acoustic testing system ATS includes an acoustic testing device AD and at least one signal processing device PD. The signal processing device PD is used to provide a control signal to the electronic components in the acoustic testing device AD and is used to receive and analyze the sensing signal to obtain the performance of the acoustic wave generated by the acoustic element in the acoustic testing device AD.

[0063] As Figure 1 shown in Figure 3 FIGS. and, the acoustic test device AD includes a test board 100. In Figure 1 and Figure 3 , the test board 100 includes a substrate 110, where the substrate 110 can be designed according to requirements. The substrate 110 can be rigid or flexible, and the substrate 110 can include silicon, germanium, glass, plastic, quartz, sapphire, metal, polymer (e.g., polyimide (PI), polyethylene terephthalate (PET)), any suitable material or a combination thereof. In one example, the substrate 110 can be a circuit board including a laminate (e.g., a copper clad laminate (CCL)), a land grid array board (LGA board) or any other suitable board containing conductive materials, but not limited thereto. In Figure 3 , the normal direction of the substrate 110 can be parallel to the direction Z.

[0064] As Figure 1 shown in Figure 3 FIGS. and, the substrate 110 has a first surface 110a and a second surface 110b opposite to the first surface 110a. In Figure 3 , the first surface 110a and the second surface 110b are opposite to each other in the direction Z. Additionally, in Figure 3 , the substrate 110 has at least one substrate opening 112, and the substrate opening 112 penetrates through the substrate 110, where the shape and size of the substrate opening 112 can be designed according to requirements.

[0065] As Figure 1 shown in Figure 3 FIGS. and, the test board 100 of the acoustic test device AD can have an acoustic element 120 disposed thereon, and the acoustic element 120 can be a device under test (DUT). The acoustic element 120 can be disposed on the first surface 110a of the substrate 110 and correspond to the substrate opening 112. In some embodiments, the acoustic element 120 can be a sound generating element.

[0066] In some embodiments, the acoustic element 120 has a front surface 120a and a back surface 120b opposite to the front surface 120a, wherein the back surface 120b faces the substrate 110. In some embodiments, a first acoustic wave is generated by the front surface 120a of the acoustic element 120, and a second acoustic wave is generated by the back surface 120b of the acoustic element 120, wherein the first acoustic wave and the second acoustic wave are generated by the acoustic element 120 simultaneously. For example, the phase difference between the first acoustic wave and the second acoustic wave can be 180 degrees, but is not limited thereto. Additionally, the second acoustic wave propagates through the substrate opening 112 of the substrate 110.

[0067] In some embodiments, the acoustic element 120 can be driven and controlled by a first control signal provided by a signal processing element PDp of the signal processing device PD. For example, in Figure 1 , the first control signal provided by the signal processing element PDp can be transmitted to the acoustic element 120 after passing through the amplifier PDa of the signal processing device PD, but is not limited thereto. For example, the signal processing element PDp can be a computer, but is not limited thereto.

[0068] The acoustic element 120 can include an anchoring structure, a diaphragm, and an actuator. The diaphragm is anchored to the anchoring structure, and the actuator is used to actuate the diaphragm to generate the first acoustic wave and the second acoustic wave. In some embodiments, the anchoring structure can be disposed outside the diaphragm, and the actuator can be disposed on the diaphragm.

[0069] The diaphragm and the anchoring structure can include any suitable material. In some embodiments, the diaphragm and the anchoring structure can each include silicon (such as, single-crystalline silicon or polycrystalline silicon), silicon compounds (such as, silicon carbide, silicon oxide), germanium, germanium compounds, gallium, gallium compounds (such as, gallium nitride, gallium arsenide), stainless steel, other suitable materials, or a combination thereof, but is not limited thereto. In some embodiments, the diaphragm and the anchoring structure can have the same material.

[0070] During the operation of the acoustic element 120, the diaphragm can be actuated to move, and the anchoring structure can be stationary. In other words, during the operation of the acoustic element 120, the anchoring structure can be a fixed end (or fixed edge) relative to the diaphragm. In some embodiments, the diaphragm can be actuated to oscillate in one direction to generate the first acoustic wave and the second acoustic wave simultaneously. For example, the diaphragm can be actuated to oscillate in the normal direction of the substrate 110 (such as, in Figure 3 , the diaphragm substantially moves along the direction Z).

[0071] The diaphragm can be designed according to requirements. For example, the diaphragm can include a plurality of sub-parts and at least one slit, wherein the sub-parts can be separated from each other by the slit, but is not limited thereto. It should be noted that the slit has a width small enough to be a narrow slit.

[0072] The actuator has a monotonic electromechanical conversion function for the movement of the diaphragm. In some embodiments, the actuator may include a piezoelectric actuator, an electrostatic actuator, a nanoscopic - electrostatic - drive (NED) actuator, an electromagnetic actuator, or any other suitable actuator. For example, in one embodiment, the actuator may include a piezoelectric actuator, which may include, for example, two electrodes and a piezoelectric material layer disposed between the two electrodes (e.g., lead zirconate titanate (PZT)), where the piezoelectric material layer can actuate the diaphragm according to the driving signal received by the electrodes (e.g., driving voltage and / or the driving voltage difference between the two electrodes), but not limited thereto. For example, in another embodiment, the actuator may include an electromagnetic actuator (e.g., a planar coil), where the electromagnetic actuator can actuate the diaphragm according to the received driving signal (e.g., driving current) and the magnetic field (i.e., the diaphragm can be actuated by the electromagnetic force), but not limited thereto. For example, in another embodiment, the actuator may include an electrostatic actuator (e.g., a conductive plate) or an NED actuator, where the electrostatic actuator or the NED actuator can actuate the diaphragm according to the received driving signal (e.g., driving voltage) and the electric field (i.e., the diaphragm can be actuated by the electrostatic force), but not limited thereto.

[0073] For example, the acoustic element 120 can be a micro electro mechanical system (MEMS) speaker, which is a sound - generating element, such that the acoustic element 120 can have a small size and is formed by at least one semiconductor process, but not limited thereto.

[0074] In some embodiments, a covering structure may be included in the test board 100 of the acoustic test device AD, where the covering structure is disposed on the first surface 110a of the substrate 110 and on the acoustic element 120. The covering structure can cover the acoustic element 120 (i.e., the acoustic element 120 is disposed between the covering structure and the substrate 110, and the front surface 120a of the acoustic element 120 faces the covering structure), thereby protecting the acoustic element 120.

[0075] The covering structure can be designed according to requirements. In the present invention, the covering structure can be an integrally formed structure or a structure composed of multiple sub - structures. The covering structure can include any suitable material, such as metal, glass, silicon, germanium, plastic, polymer, or a combination thereof, but not limited thereto. In addition, the covering structure can have at least one top opening that passes through the covering structure, such that the first acoustic wave can propagate through the top opening of the covering structure.

[0076] As Figures 1 to 3As shown, the acoustic testing device AD includes an acoustic sensing element 200 for sensing a second acoustic wave. In some embodiments, the acoustic sensing element 200 can sense the sound pressure level of the second acoustic wave. For example, the acoustic testing device AD can be a microphone, but is not limited thereto. In Figure 1 and Figure 3 In, since the acoustic sensing element 200 senses the second acoustic wave, the acoustic sensing element 200 is disposed on the back surface 120b of the acoustic element 120, and the substrate 110 is disposed between the acoustic sensing element 200 and the acoustic element 120. In other words, the second surface 110b of the substrate 110 faces the acoustic sensing element 200.

[0077] In the present invention, since the acoustic sensing element 200 senses the second acoustic wave at different temperatures within the test temperature range, the acoustic sensing element 200 needs to withstand this test temperature range. In other words, the upper limit value of the operating temperature of the acoustic sensing element 200 is greater than or equal to the highest temperature in the test temperature range, and the lower limit value of the operating temperature of the acoustic sensing element 200 is less than or equal to the lowest temperature in the test temperature range. For example, the upper limit value of the operating temperature of the acoustic sensing element 200 can be greater than or equal to 100 °C, but is not limited thereto.

[0078] In some embodiments, the acoustic sensing element 200 can be driven and controlled by a second control signal provided by a sensing processing element PDs of the signal processing device PD, and the sensing result sensed by the acoustic sensing element 200 can be transmitted to the signal processing device PD (e.g., the sensing result can be transmitted to the sensing processing element PDs and / or the signal processing element PDp). For example, the sensing processing element PDs can be a microphone driving module, but is not limited thereto.

[0079] To fix and support the acoustic sensing element 200 to maintain its position, as Figures 1 to 3 shown, the acoustic testing device AD further includes a jig element 310. In Figures 1 to 3 In, the jig element 310 is disposed on the second surface 110b of the substrate 110 such that the substrate 110 is between the acoustic element 120 and the jig element 310, and the substrate 110 is between the acoustic element 120 and the acoustic sensing element 200 fixed by the jig element 310.

[0080] As Figure 3 shown, when the jig element 310 is disposed on the second surface 110b of the substrate 110 and connected to the second surface 110b of the substrate 110, the jig element 310 covers the substrate opening 112 of the substrate 110. In Figure 3In [description], the fixture element 310 has an acoustic inlet 310i. And when the fixture element 310 is disposed on the second surface 110b of the substrate 110 and connected to the second surface 110b of the substrate 110, the acoustic inlet 310i corresponds to the substrate opening 112 of the substrate 110. Accordingly, the second acoustic wave propagates through the acoustic inlet 310i towards the acoustic sensing element 200 fixed by the fixture element 310.

[0081] In Figure 2 and Figure 3 In [description], the fixture element 310 may include a first portion 312 and a second portion 314 connected to the first portion 312. The first portion 312 may include a first inner wall 312w that surrounds a first space SP1. The second portion 314 may include a second inner wall 314w that surrounds a second space SP2 connected to the first space SP1. The first portion 312 may have an acoustic inlet 310i, where the acoustic inlet 310i may be defined by the first inner wall 312w and connected to the first space SP1. The second space SP2 is used to accommodate the acoustic sensing element 200 to fix and support the acoustic sensing element 200. Thus, the second acoustic wave propagates through the acoustic inlet 310i, the first space SP1, and the second space SP2 towards the acoustic sensing element 200 fixed by the fixture element 310.

[0082] In Figure 3 In [description], due to the existence of the first space SP1 surrounded by the first portion 312 of the fixture element 310 and connected to the acoustic inlet 310i, when the fixture element 310 is disposed on the second surface 110b of the substrate 110 and connected to the second surface 110b of the substrate 110, a first cavity CV1 is formed between the fixture element 310 and the second surface 110b of the substrate 110. In other words, when the fixture element 310 is disposed on the second surface 110b of the substrate 110 and connected to the second surface 110b of the substrate 110, the first space SP1 surrounded by the first portion 312 of the fixture element 310 is transformed into the first cavity CV1. It should be noted that the first cavity CV1 is an empty space existing between the fixture element 310 and the substrate 110. It should be noted that the first cavity CV1 has a first temperature and a first humidity.

[0083] In Figure 3 In [description], the acoustic element 120 is connected to the first cavity CV1 through the substrate opening 112. Thus, the second acoustic wave generated by the acoustic element 120 propagates through the substrate opening 112 towards the first cavity CV1, and the acoustic sensing element 200 senses the second acoustic wave in the first cavity CV1. In some embodiments, such as Figure 3As shown, when the second acoustic wave propagates in the first cavity CV1, a pressure field related to the second acoustic wave is formed, and the acoustic sensing element 200 senses this pressure field. For example, the acoustic sensing element 200 can be a pressure field microphone, thereby improving the sensing accuracy of the acoustic sensing element 200, but not limited thereto.

[0084] The first inner wall 312w and the second inner wall 314w of the jig element 310 can be designed according to requirements, so that the first space SP1, the second space SP2, and the first cavity CV1 have a suitable design. In Figure 2 and Figure 3 the inner cross-sectional dimension of the second inner wall 314w can approximate and / or correspond to the cross-sectional dimension of the acoustic sensing element 200 to well fix and support the acoustic sensing element 200. For example, the second inner wall 314w can substantially form a cylindrical second space SP2.

[0085] In Figure 2 and Figure 3 the inner cross-sectional dimension of the first inner wall 312w can be larger than the inner cross-sectional dimension of the second inner wall 314w to increase the area of the acoustic inlet 310i. For example, in Figure 2 and Figure 3 the inner cross-sectional dimension of the first inner wall 312w can gradually narrow from the acoustic inlet 310i to the second inner wall 314w, so that the cross-sectional dimension of the first cavity CV1 (i.e., the first space SP1) can gradually narrow from the acoustic inlet 310i (i.e., the substrate 110) to the acoustic sensing element 200 to converge the second acoustic wave, but not limited thereto. For example, in Figure 2 and Figure 3 the first cavity CV1 (i.e., the first space SP1) can approximate a conical shape, but not limited thereto.

[0086] The first part 312 and the second part 314 of the jig element 310 can be designed according to requirements. For example, in Figure 2 and Figure 3 the cross-sectional dimension of the first part 312 can be larger than the cross-sectional dimension of the second part 314 to conform to the above design of the first inner wall 312w and the second inner wall 314w.

[0087] In the present invention, the jig element 310 can be connected to the substrate 110 by any suitable means. As Figure 3As shown, the fixture element 310 can be connected to the substrate 110 through a plurality of connecting members CP. Specifically, the substrate 110 has a plurality of substrate connection holes 116, and the first portion 312 of the fixture element 310 can have a plurality of fixture connection holes 316. After the substrate connection holes 116 and the fixture connection holes 316 correspond to each other, the connecting member CP passes through the substrate connection holes 116 and the fixture connection holes 316 to connect the fixture element 310 and the substrate 110 to each other. For example, the connecting member CP can be a screw, but is not limited thereto. For example, in Figure 3 , a plurality of substrate connection holes 116 can surround the acoustic element 120, and a plurality of fixture connection holes 316 can surround the acoustic inlet 310i (i.e., the connecting member CP can surround the acoustic element 120 and the acoustic inlet 310i), but is not limited thereto.

[0088] In addition, when the acoustic sensing element 200 senses the pressure field related to the second acoustic wave, this pressure field needs to be well maintained. Therefore, the first cavity CV1 can be designed as an airtight cavity or almost an airtight cavity. For example, the fixture element 310 and the substrate 110 can be tightly connected to improve the airtightness of the first cavity CV1.

[0089] Optionally, the acoustic test device AD can also include other suitable elements to improve the airtightness of the first cavity CV1. For example, as Figure 2 and Figure 3 shown, the acoustic test device AD can also include at least one first sealing ring 320, which is arranged on the first portion 312 of the fixture element 310 and surrounds the acoustic inlet 310i, and the first sealing ring 320 can be arranged between the first portion 312 of the fixture element 310 and the substrate 110. For example, in Figure 2 and Figure 3 , the acoustic test device AD can include two first sealing rings 320, but is not limited thereto. In Figure 3 , due to the presence of the first sealing ring 320, the possibility of air leakage from the connection between the fixture element 310 and the substrate 110 is reduced, thereby maintaining the pressure field of the first cavity CV1. Accordingly, the airtightness of the first cavity CV1 is improved.

[0090] For example, the acoustic test device AD can also include at least one second sealing ring 330, which is arranged on the second inner sidewall 314w of the fixture element 310 and surrounded by the second inner sidewall 314w, and the second sealing ring 330 can surround the second space SP2. In Figure 2 and Figure 3 , the second sealing ring 330 can be arranged between the fixture element 310 and the acoustic sensing element 200. For example, in Figure 2 and Figure 3 , the acoustic test device AD can include three second sealing rings 330, but is not limited thereto. InFigure 3 In this case, due to the presence of the second sealing ring 330, the possibility of air leakage from the second space SP2 is reduced, thereby maintaining the pressure field in the first cavity CV1. Accordingly, the airtightness of the first cavity CV1 is improved.

[0091] It should be noted that the fixture element 310, the first sealing ring 320, and the second sealing ring 330 can form a fixture structure 300. In other words, the fixture structure 300 can use the fixture element 310 to fix and support the acoustic sensing element 200 and form the first cavity CV1, and the fixture structure 300 can use the first sealing ring 320 and the second sealing ring 330 to maintain the pressure field in the first cavity CV1.

[0092] As Figure 1 shown, the acoustic testing device AD includes a cavity 400, in which a second cavity CV2 exists. The second cavity CV2 is an empty space within the cavity 400, and the cavity 400 is the outer shell of the second cavity CV2. In Figure 1 and Figure 3 , at least a part of the substrate 110, the acoustic element 120, the fixture element 310, and at least a part of the acoustic sensing element 200 are disposed in the cavity 400. The substrate 110 is between the first cavity CV1 and the second cavity CV2, and the front surface 120a of the acoustic element 120 and the first surface 110a of the substrate 110 face the second cavity CV2. It should be noted that the second cavity CV2 has a second temperature and a second humidity.

[0093] In the present invention, the second temperature of the second cavity CV2 can be controlled by any suitable means. In some embodiments, the cavity 400 can include a temperature control element 410 for controlling the second temperature of the second cavity CV2. For example, a signal processing device PD (such as, a signal processing element PDp) can provide a third control signal to the temperature control element 410 so that the temperature control element 410 adjusts and / or controls the second temperature of the second cavity CV2 according to the third control signal, but not limited thereto.

[0094] In addition, in the present invention, the second humidity of the second cavity CV2 can be controlled by any suitable means. For example, the second humidity of the second cavity CV2 can be controlled by the signal processing device PD, but not limited thereto.

[0095] In the present invention, since the front surface 120a of the acoustic element 120 faces the second cavity CV2 of the cavity 400, the temperature of the acoustic element 120 is mainly affected by the second cavity CV2, so that the temperature of the acoustic element 120 may be the same as or similar to the second temperature of the second cavity CV2. On the contrary, if the back surface 120b of the acoustic element 120 faces the second cavity CV2 of the cavity 400, the temperature of the acoustic element 120 may be different from or not similar to the second temperature of the second cavity CV2, making it difficult to determine the temperature of the acoustic element 120, thereby increasing the difficulty of testing.

[0096] In the present invention, if Figure 1 and Figure 3 As shown, since the substrate 110 is between the first cavity CV1 and the second cavity CV2, there is a temperature difference between the first cavity CV1 and the second cavity CV2 during the test. However, based on the heat conduction effect, the first temperature of the first cavity CV1 will gradually be affected by the second temperature of the second cavity CV2. In other words, if the first temperature of the first cavity CV1 is lower than the second temperature of the second cavity CV2, the first temperature of the first cavity CV1 will gradually increase; if the first temperature of the first cavity CV1 is higher than the second temperature of the second cavity CV2, the first temperature of the first cavity CV1 will gradually decrease.

[0097] Optionally, in order to sense the first temperature of the first cavity CV1 to confirm whether the first temperature of the first cavity CV1 is within the operating temperature of the acoustic sensing element 200, the acoustic testing device AD ​​may include a temperature sensor 130 for sensing the first temperature of the first cavity CV1. Figure 3 In some embodiments, the temperature sensor 130 may belong to the test board 100 and be disposed on the second surface 110b of the substrate 110, so that the temperature sensor 130 may be disposed in the first cavity CV1, and the substrate 110 may be between the acoustic element 120 and the temperature sensor 130. Figure 1 In the embodiment, the sensing result of the temperature sensor 130 may be transmitted to the signal processing element PDp of the signal processing device PD.

[0098] In some embodiments, Figure 1 As shown, a portion of the fixture element 310 may be disposed outside the cavity 400 so that the acoustic sensing element 200 is electrically connected to the sensing processing element PDs of the signal processing device PD. Figure 1 In the embodiment, a portion of the second portion 314 of the fixture element 310 may be disposed outside the cavity 400. Figure 1 In the embodiment, a portion of the acoustic sensing element 200 may be disposed outside the cavity 400, but the present invention is not limited thereto. Figures 1 to 3As shown, since a part of the second portion 314 of the jig element 310 can be disposed outside the cavity 400, the acoustic testing device AD may selectively include at least one third sealing ring 340 that surrounds the second portion 314 of the jig element 310, where the third sealing ring 340 can be disposed between the second portion 314 of the jig element 310 and the cavity 400. For example, in Figure 2 and Figure 3 , the acoustic testing device AD may include four third sealing rings 340, but not limited thereto. In Figures 1 to 3 , due to the presence of the third sealing ring 340, the possibility of air leakage from the connection between the jig element 310 and the cavity 400 is reduced, thereby maintaining the temperature of the acoustic testing device AD (i.e., maintaining the second temperature of the second cavity CV2 of the cavity 400). It should be noted that the third sealing ring 340 can be an element belonging to the jig structure 300, such that the jig structure 300 can use the third sealing ring 340 to maintain the second temperature.

[0099] In other words, while the front surface 120a of the acoustic element 120 is subjected to test conditions, the acoustic sensing element 200 can sense the second acoustic wave radiated from the back surface 120b of the acoustic element 120 via the substrate opening 112. The test conditions can be the second temperature and / or the second humidity maintained in the second cavity CV2.

[0100] Hereinafter, the details of the acoustic testing method will be exemplarily described.

[0101] Please refer to Figure 4 , Figure 4 , which shows a schematic flow chart of the acoustic testing method according to an embodiment of the present invention. It should be understood that Figure 4 the shown flow chart is only an exemplary example. In some embodiments, some steps can be performed simultaneously or executed in a different order from Figure 4 shown. In some embodiments, any other suitable steps can be added before or after an existing step in the Figure 4 shown acoustic testing method. Regarding the following content, the acoustic testing method will be described with reference to Figure 4 , however, the acoustic testing method is not limited to the embodiments described below.

[0102] In Figure 4 step ST1, the aforementioned acoustic testing device AD is provided. The acoustic testing device AD is as described above and will not be repeated here.

[0103] In step ST1, at least one electronic component in the acoustic testing device AD can be calibrated to improve the test accuracy of the acoustic testing method. For example, the acoustic sensing element 200 can be calibrated to improve the sensing accuracy of the acoustic sensing element 200.

[0104] In Figure 4 step ST2, a new test process is started. For example, a first test process is started and executed according to the following procedure.

[0105] In Figure 4 step ST3, the second temperature of the second cavity CV2 of the cavity 400 is set, where the temperature set value is within the test temperature range of the acoustic test method. The test temperature range of the acoustic test method can be designed according to requirements. For example, the test temperature range can be -40°C to 125°C, but is not limited thereto. In some embodiments, the signal processing device PD can provide a third control signal to the temperature control element 410 in the cavity 400 to set and control the second temperature of the second cavity CV2 of the cavity 400. For example, in the first test process, the second temperature is set to a first value.

[0106] In addition, the second humidity of the second cavity CV2 of the cavity 400 can also be set in step ST3. In some embodiments, the signal processing device PD can set and control the second humidity of the second cavity CV2 of the cavity 400.

[0107] In Figure 4 step ST4, the second temperature of the second cavity CV2 of the cavity 400 is sensed to determine whether the second temperature reaches its target value. In some embodiments, the temperature control element 410 in the cavity 400 can sense the second temperature of the second cavity CV2 in the cavity 400. For example, in the first test process, the second temperature of the second cavity CV2 of the cavity 400 is sensed to determine whether the second temperature reaches the first value.

[0108] If the second temperature does not reach its target value, step ST4 is executed again to determine the second temperature again. If the second temperature reaches its target value, the next step (e.g., step ST5) is executed.

[0109] In addition, step ST4 can also sense the second humidity of the second cavity CV2 of the cavity 400 to determine whether the second humidity reaches its target value. If the second humidity does not reach its target value, step ST4 is executed again to determine the second humidity again. If the second humidity reaches its target value, the next step (e.g., step ST5) is executed.

[0110] In Figure 4 step ST5, the first temperature of the first cavity CV1 is sensed to determine whether the first temperature is lower than the upper limit value of the operating temperature of the acoustic sensing element 200. In some embodiments, the first temperature is sensed by the temperature sensor 130.

[0111] If the first temperature does not fall below the upper limit value of the operating temperature of the acoustic sensing element 200, step ST3 is executed again to reset the second temperature. If the second temperature is lower than the upper limit value of the operating temperature of the acoustic sensing element 200, the next step (e.g., step ST6) is executed.

[0112] In Figure 4 Step ST6, the acoustic element 120 is tested, where the acoustic element 120 is driven to generate a first acoustic wave at the front surface 120a and a second acoustic wave at the back surface 120b, and the acoustic sensing element 200 senses the second acoustic wave to obtain a sensing result, and the sensing result is transmitted to the signal processing element PDp of the signal processing device PD for appropriate processing (e.g., calculation).

[0113] For example, in the first test process, the acoustic sensing element 200 senses the second acoustic wave to obtain a first result. In other words, after the second temperature in the second cavity CV2 is adjusted to reach a first value, the acoustic sensing element 200 senses the acoustic wave to obtain a first result.

[0114] After the acoustic element 120 is tested, this test process ends.

[0115] In Figure 4 Step ST7, it is necessary to determine whether to execute the next test process. If the next test process is to be executed, step ST2 is executed again to execute the next test process. For example, a second test process is executed, where after the second temperature in the second cavity CV2 is adjusted to reach a second value different from the first value, the acoustic sensing element 200 senses the second acoustic wave to obtain a second result. It should be noted that the first test process and the second test process are iterated and / or continuous.

[0116] If the next test process is not to be executed, the acoustic test method ends (i.e., step ST8). For example, when the acoustic element 120 is completely tested within the test temperature range, the acoustic test method ends, but not limited thereto

[0117] In the present invention, the acoustic test method can dynamically test the acoustic element 120 at different temperatures within the test temperature range.

[0118] By executing the acoustic test method, the performance of the acoustic element 120 at different temperatures can be obtained. In other words, the relationship between the performance of the acoustic element 120 and temperature can be tested and obtained. For example, if the temperature change of the acoustic element 120 causes an offset in the sound pressure level and / or total harmonic distortion (THD) of the second acoustic wave, these offsets can be obtained through the sensing and testing of the acoustic test device AD and the acoustic test method.

[0119] During the testing process of the present invention, one or more acoustic elements 120 can be tested, and multiple acoustic elements 120 can be tested simultaneously or separately. Moreover, the number of acoustic sensing elements 200 can be designed according to the testing requirements.

[0120] In summary, the performance of the acoustic elements at different temperatures can be obtained by the acoustic testing device and the acoustic testing method of the present invention.

[0121] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An acoustic testing device, characterized in that: include: A substrate having a first surface and a second surface opposite to the first surface, wherein the substrate has a substrate opening; an acoustic element, disposed on the first surface of the substrate and corresponding to the substrate opening; a fixture element disposed on the second surface of the substrate, wherein a first cavity is formed between the fixture element and the substrate; and an acoustic sensing element, fixed by the fixture element; wherein the substrate is between the acoustic element and the fixture element; wherein a first side of the acoustic element faces a second cavity and is subjected to a test condition maintained in the second cavity; While the first side of the acoustic element is subjected to the test condition, the acoustic sensing element is used to sense an acoustic wave radiated from a second side of the acoustic element through the substrate opening.

2. The acoustic testing device according to claim 1, characterized in that: The device also includes a first sealing ring disposed between the fixture element and the substrate, wherein the first sealing ring is used to maintain a pressure field in the first cavity.

3. The acoustic testing device according to claim 1, characterized in that: The device further comprises a second sealing ring disposed between the fixture element and the acoustic sensing element, wherein the second sealing ring is used to maintain the pressure field in the first cavity.

4. The acoustic testing device according to claim 1, characterized in that: A third sealing ring is also included, surrounding the fixture element, wherein the third sealing ring is used to maintain the temperature of the acoustic testing device.

5. The acoustic testing device according to claim 1, characterized in that: A cross-sectional dimension of the first cavity gradually narrows from the substrate toward the acoustic sensing element.

6. The acoustic testing device according to claim 1, characterized in that: The upper limit value of the operating temperature of the acoustic sensing element is greater than or equal to 100° C.

7. The acoustic testing device according to claim 1, characterized in that: The acoustic sensing element is a pressure field microphone.

8. The acoustic testing device according to claim 1, characterized in that: Also includes: a cavity, wherein the second cavity exists within the cavity; The acoustic element is disposed in the cavity, and the substrate is between the first cavity and the second cavity.

9. The acoustic testing device according to claim 8, characterized in that: The cavity includes a temperature control element for controlling the temperature of the second cavity.

10. The acoustic testing device according to claim 1, characterized in that: The system further includes a temperature sensor disposed on the second surface of the substrate, wherein the substrate is between the acoustic element and the temperature sensor.

11. The acoustic testing device according to claim 1, characterized in that: The test conditions include the temperature or humidity maintained in the second cavity.

12. A fixture structure, characterized in that: include: A fixture component, comprising: a first portion, comprising a first inner sidewall, the first inner sidewall surrounding a first space, wherein the first portion has an acoustic inlet connected to the first space, and the acoustic inlet is defined by the first inner sidewall; and a second portion connected to the first portion and comprising a second inner sidewall, wherein the second inner sidewall surrounds a second space connected to the first space, wherein the second space is used to accommodate the acoustic sensing element; The fixture structure is used to fix the acoustic sensing element.

13. The fixture structure according to claim 12, characterized in that: The inner cross-sectional dimension of the first inner sidewall is larger than the inner cross-sectional dimension of the second inner sidewall, and the inner cross-sectional dimension of the first inner sidewall gradually narrows from the acoustic inlet toward the second inner sidewall.

14. The fixture structure according to claim 12, characterized in that: The cross-sectional dimension of the first portion is greater than the cross-sectional dimension of the second portion.

15. The fixture structure according to claim 12, characterized in that: A first sealing ring is also included, wherein the first sealing ring is disposed on the first portion of the fixture element and surrounds the acoustic inlet.

16. The fixture structure according to claim 12, characterized in that: It also includes a second sealing ring, wherein the second sealing ring is arranged on the second inner side wall and surrounded by the second inner side wall.

17. The fixture structure according to claim 12, characterized in that: A third sealing ring is also included, surrounding the second portion of the fixture element.

18. The fixture structure according to claim 12, characterized in that: When the fixture structure and the acoustic element are disposed on a substrate, the acoustic sensing element is used to sense an acoustic wave radiated from a second side of the acoustic element while a first side of the acoustic element is subjected to a test condition.

19. A test board, characterized in that: include: A substrate having a first surface and a second surface opposite to the first surface, wherein the substrate has a substrate opening; wherein the acoustic element is disposed or is to be disposed on the first surface of the substrate and corresponds to the substrate opening; The second surface faces an acoustic sensing element, and while a first side of the acoustic element is subjected to a test condition, the acoustic sensing element is used to sense an acoustic wave radiated from a second side of the acoustic element through the substrate opening.

20. The test board according to claim 19, characterized in that The system further includes a temperature sensor disposed on the second surface of the substrate, wherein the substrate is between the acoustic element and the temperature sensor.

21. The test board according to claim 19, characterized in that The acoustic element is a micro-electromechanical system speaker.

22. An acoustic testing method, characterized in that: include: An acoustic testing device is provided, wherein the acoustic testing device comprises: A substrate having a first surface and a second surface opposite to the first surface, wherein the substrate has a substrate opening; an acoustic element, disposed on the first surface of the substrate and corresponding to the substrate opening; a fixture element disposed on the second surface of the substrate, wherein a first cavity is formed between the fixture element and the substrate; an acoustic sensing element fixed by the jig element; and a cavity, wherein a second cavity exists in the cavity, the substrate, the acoustic element, the fixture element and the acoustic sensing element are arranged in the cavity, and the substrate is between the first cavity and the second cavity; wherein a first side of the acoustic element faces the second cavity and is subjected to a test condition maintained in the second cavity; wherein the acoustic sensing element is used to sense an acoustic wave radiated from a second side of the acoustic element through the substrate opening while the first side of the acoustic element is subjected to the test condition; performing a first test process, wherein after the temperature of the second cavity is adjusted to reach a first value, the acoustic sensing element senses the acoustic wave to obtain a first result; and performing a second test process, wherein after the temperature of the second cavity is adjusted to a second value different from the first value, the acoustic sensing element senses the acoustic wave to obtain a second result; The first test process and the second test process are performed iteratively.

23. An acoustic testing method, characterized in that: include: providing a cavity, wherein a test condition is maintained within the cavity; Disposing an acoustic element on a first surface of a substrate, wherein a substrate opening is formed on the substrate, and a first side of the acoustic element faces the cavity and is subjected to the test condition maintained in the cavity; Disposing a fixture element on a second surface of the substrate, wherein the acoustic sensing element is fixed in the fixture element; as well as An acoustic wave radiated from a second side of the acoustic element through the substrate opening is sensed by the acoustic sensing element.

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