Manufacturing method of internally-insulated IGBT (Insulated Gate Bipolar Translator) device

Abstract

The invention relates to the technical field of semiconductor devices, in particular to a manufacturing method of an internally-insulated IGBT (Insulated Gate Bipolar Translator) device, which comprises a blocking chamber, a base is fixedly connected to the bottom of the inner wall of the blocking chamber, and a conveying track for conveying the IGBT device is arranged at the top of the base. The IGBT device conveying device comprises a conveying crawler belt, a sliding column used for sudden stop of the conveying crawler belt is arranged in the conveying crawler belt, a conveying assembly used for overturning an IGBT device is arranged on one side of the conveying crawler belt, and a detection assembly used for detecting the IGBT device is arranged on one side of the conveying assembly. The conveying assembly is used for turning over the IGBT device, and the detection assembly is used for triggering and detecting the grid electrode of the IGBT device at the same time.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and more particularly, to a manufacturing method of an IGBT device with internal insulation. Background Art

[0002] IGBT is a power semiconductor device that combines the high input impedance of MOSFET and the low on-state voltage drop of GTR; it combines the advantages of high input impedance, small drive power, fast switching speed of MOSFET and low on-state voltage drop, large current-carrying capacity, and high breakdown voltage of GTR. It is one of the core devices in the field of power electronics. IGBT is widely used in many fields such as motor control, inverters, frequency converters, smart grids, and electric vehicles, and is an important part of the power semiconductor market;

[0003] Among them, after the IGBT device is manufactured, a packaging process is carried out. During the packaging process, after cleaning, bonding, potting, curing until the final molding, it needs to be transported by staff to other equipment for gate trigger testing and appearance inspection. This requires an additional process in the processing, consuming some manpower and time;

[0004] In view of this, we propose a manufacturing method of an IGBT device with internal insulation. Summary of the Invention

[0005] The purpose of the present invention is to provide a manufacturing method of an IGBT device with internal insulation to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the present invention provides a manufacturing method of an IGBT device with internal insulation, including the following steps:

[0007] S1. After the staff prepares the substrate, use an ion implantation device to implant B ions into the P-N junction;

[0008] S2. Then, form a mask insulation layer on the substrate through chemical vapor deposition technology, and through etching and degluing processes, precisely process the insulation film;

[0009] S3. Then, use the ion implantation device again to implant P ions, then form a trench on the substrate through etching technology, and then form an insulation film on the substrate through CVD technology and perform etching and degluing processes;

[0010] S4. Then, form an Emitter electrode on the insulation film through sputtering or evaporation technology, then form a P+FS layer and a B+ region on the substrate through an ion implantation device, and form a Collector on the substrate through sputtering or evaporation technology;

[0011] S5. Finally, encapsulate and cure the IGBT device, and perform inspections after final molding;

[0012] Among them: In S5, the inspection of the IGBT device is completed by an inspection component. The bottom of the inner wall of the barrier chamber is fixedly connected with a base. A conveyor track for conveying the IGBT device is arranged on the top of the base. A sliding column for emergency stop of the conveyor track is arranged inside the conveyor track. A conveying component for flipping the IGBT device is arranged on one side of the conveyor track. An inspection component for inspecting the IGBT device is arranged on one side of the conveying component. Among them:

[0013] Through the conveyance of the IGBT device by the conveyor track, the flipping of the IGBT device is completed by the conveying component, and at the same time, the gate trigger inspection of the IGBT device is completed by the inspection component;

[0014] The conveying component includes a first motor. The output end of the first motor is fixedly connected with a first rotating rod. The first rotating rod is fixedly connected with a rotating connecting rod at the end far from the first motor. The conveying component includes a first turntable. A second turntable is fixedly connected to the side of the first turntable far from the rotating connecting rod;

[0015] The inspection component includes a support plate. A third turntable is arranged above the support plate. An inspection piece is fixedly connected between the two third turntables. An inspection rod is slidably connected to the inside of the inspection piece.

[0016] As a preference of the present invention, a feeding port is opened on one side of the barrier chamber. A discharging port is opened on the side of the barrier chamber far from the feeding port. A first square hole is opened on the top of the barrier chamber. The positions of the feeding port and the discharging port are in line with the positions of the conveyor tracks on both sides.

[0017] As a preference of the present invention, a support frame, a guard plate, a first support column and a second support column are fixedly connected to the top of the base. A first strip-shaped groove is opened inside the guard plate. The conveyor track is arranged inside the guard plate. A plurality of second square holes are opened on the outer wall of the conveyor track. A circular gear is arranged inside the conveyor track. The rack of the circular gear is in line with the plurality of second square holes.

[0018] As a preference of the present invention, a transmission belt is arranged inside the conveyor track. A connecting column is fixedly connected between the transmission belt and the conveyor track. A first convex column is fixedly connected to the outside of the connecting column. The diameter of the first convex column is in line with the width of the first strip-shaped groove.

[0019] As a preference of the present invention, a sliding column is slidably connected to the inside of the second support column. A first spring is sleeved on the outer wall between the two ends of the sliding column and the second support column.

[0020] Preferably in the present invention, one end of the rotating connecting rod is fixedly connected with a second convex column, and one end of the rotating connecting rod far from the second convex column is fixedly connected with a first sector member.

[0021] Preferably in the present invention, a second strip-shaped groove is formed on one side of the first turntable close to the rotating connecting rod. The diameter of the second convex column fits the width of the second strip-shaped groove. A second sector member is fixedly connected to one side of the first turntable close to the rotating connecting rod. An arc-shaped groove is formed on the outer wall of the second sector member, and the arc-shaped groove fits the first sector member.

[0022] Preferably in the present invention, a plurality of third square holes are formed on the outer wall of the second turntable, and the third square holes are arranged in an array on the second turntable.

[0023] Preferably in the present invention, the support plate is fixedly connected to the inner side of the first support column. A baffle is fixedly connected to the top of the support plate. A second motor is fixedly connected to the outer wall of the baffle. The output end of the second motor is fixedly connected with a threaded rod. A sliding block is threadedly connected to the outer wall of the threaded rod. The top of the sliding block is rotatably connected with a telescopic connecting rod.

[0024] Preferably in the present invention, a second rotating rod is rotatably connected to the inner side of the upper end of the first support column. Two third turntables are fixedly connected to one ends of the two second rotating rods far from the first support column. A pressure rod is fixedly connected between the two third turntables. A pressure plate is fixedly connected to one end of the detection rod close to the third turntable. A second spring is sleeved between the pressure plate of the detection rod and the outer wall of the detection member. Among them:

[0025] The telescopic connecting rod is rotatably connected to the bottom of the detection member at the end far from the sliding block.

[0026] Compared with the prior art, the beneficial effects of the present invention are:

[0027] 1. In the motor rotor forming and processing device, driven by the first motor, the first rotating rod and the rotating connecting rod rotate together. At this time, during the rotation of the rotating connecting rod, the second convex column will be driven to rotate together. At this time, the second convex column will drive the first turntable and the second turntable to rotate by a certain angle. At this time, the second turntable will drive the IGBT device to rotate to the top of the second turntable, and make the three terminals of the IGBT device contact and be detected by the three detection rods. After the detection is completed, the second turntable is driven by the first motor to rotate by a certain angle again, and the IGBT device is conveyed to the conveying track on the other side and conveyed out from the discharge port.

[0028] 2. In the motor rotor forming and processing device, the threaded rod rotates driven by the second motor. The threaded rod drives the sliding block to slide. During the sliding of the sliding block, the vertical detection rod is pulled to turn into the horizontal direction, so that the three detection rods are aligned with the three terminals of the IGBT device. Driven by electricity, the second rotating rod rotates, causing the third turntable to rotate. At the same time, during the rotation of the third turntable, the pressure rod is driven to push the pressure plate and the upper end of the detection rod to slide towards the detection piece, and the detection rod is driven to penetrate into the three terminals of the IGBT device for gate trigger detection. After the detection is completed, driven by the second motor and electricity again, the three horizontal detection rods rotate to the vertical direction and then stop.

[0029] 3. In the motor rotor forming and processing device, due to the influence of the slight slope at the top of the guard plate, the conveying track is pressed down at the entrance of the third square hole. Due to the influence of the first convex column and the first strip groove, the connecting column always slides along the first strip groove. During the bending of the conveying track, the first convex column is driven to rotate. At this time, the conveying track and the transmission belt are misaligned, and the circular gear tightens with the conveying track, causing the conveying track and the transmission belt to stop rotating and producing an emergency stop effect to prevent the three terminals of the IGBT device from not being aligned with the detection rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is the overall three-dimensional schematic diagram of the motor rotor forming and processing device of the present invention;

[0031] Figure 2 is the overall sectional schematic diagram of the motor rotor forming and processing device of the present invention;

[0032] Figure 3 is the overall internal three-dimensional schematic diagram of the motor rotor forming and processing device of the present invention;

[0033] Figure 4 is the three-dimensional schematic diagram of the conveying component of the motor rotor forming and processing device of the present invention;

[0034] Figure 5 is the detailed schematic diagram of the conveying component of the motor rotor forming and processing device of the present invention;

[0035] Figure 6 is the detailed schematic diagram of the conveyor belt of the motor rotor forming and processing device of the present invention;

[0036] Figure 7 is the unfolded three-dimensional schematic diagram of the conveying component of the motor rotor forming and processing device of the present invention;

[0037] Figure 8 is the three-dimensional schematic diagram of the detection component of the motor rotor forming and processing device of the present invention;

[0038] Figure 9Schematic three-dimensional view of the detection component of the motor rotor forming and processing device of the present invention;

[0039] Figure 10 Schematic cross-sectional three-dimensional view of the detection component of the motor rotor forming and processing device of the present invention;

[0040] The meanings of each label in the figure are as follows:

[0041] 1. Barrier chamber; 11. Feed inlet; 12. Discharge outlet; 13. First square hole; 2. Base; 21. Support frame; 22. Guard plate; 221. First strip-shaped groove; 23. Conveyor track; 231. Second square hole; 232. Circular gear; 233. Transmission belt; 234. Connecting column; 2341. First protruding column; 24. First support column; 25. Second support column; 251. Sliding column; 252. First spring;

[0042] 3. Conveying component; 31. First motor; 32. First rotating rod; 321. Fixed column; 33. Rotating connecting rod; 331. Second protruding column; 332. First sector; 34. First turntable; 341. Second strip-shaped groove; 342. Second sector; 3421. Arc-shaped groove; 35. Second turntable; 351. Third square hole; 4. Detection component; 41. Support plate; 411. Baffle; 412. Second motor; 413. Threaded rod; 4131. Sliding block; 414. Telescopic connecting rod; 42. Third turntable; 421. Second rotating rod; 422. Pressure rod; 43. Detection piece; 44. Detection rod; 441. Second spring; 442. Pressure plate. Specific embodiments

[0043] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0044] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0045] Embodiment 1

[0046] Please refer to Figures 1 - 10 As shown, this embodiment provides a manufacturing method for an IGBT device with internal insulation, including the following steps:

[0047] S1. After the staff prepares the substrate, use an ion implantation device to implant B ions into the P-N junction;

[0048] S2. Then, form a mask insulating layer on the substrate through chemical vapor deposition technology, and perform precise processing on the insulating film through etching and de-glueing processes;

[0049] S3. Then, use the ion implantation device again to implant P ions, form a trench on the substrate through etching technology, and then form an insulating film on the substrate through CVD technology and perform etching and de-glueing processes again;

[0050] S4. Then, form an Emitter electrode on the insulating film through sputtering or evaporation technology, then form a P+FS layer and a B+ region on the substrate through an ion implantation device, and form a Collector on the substrate through sputtering or evaporation technology;

[0051] S5. Finally, fill the IGBT device with glue and cure it, and perform detection after final molding;

[0052] Such as Figures 1 - 2As shown in the figure, where: in S5, the detection of the IGBT device is completed by the detection component 4. A base 2 is fixedly connected to the bottom of the inner wall of the barrier chamber 1. A conveying track 23 for conveying the IGBT device is arranged on the top of the base 2. A sliding column 251 for emergency stop of the conveying track 23 is arranged inside the conveying track 23. A conveying component 3 for flipping the IGBT device is arranged on one side of the conveying track 23. A detection component 4 for detecting the IGBT device is arranged on one side of the conveying component 3. Among them: through the conveying of the IGBT device by the conveying track 23, the flipping of the IGBT device is completed by the conveying component 3, and at the same time, the gate trigger detection of the IGBT device is completed by the detection component 4. The conveying component 3 includes a first motor 31. The output end of the first motor 31 is fixedly connected to a first rotating rod 32. The first rotating rod 32 is fixedly connected to a rotating connecting rod 33 at the end far from the first motor 31. The conveying component 3 includes a first turntable 34. A second turntable 35 is fixedly connected to the side of the first turntable 34 far from the rotating connecting rod 33. The detection component 4 includes a support plate 41. A third turntable 42 is arranged above the support plate 41. A detection piece 43 is fixedly connected between the two third turntables 42. A detection rod 44 is slidably connected to the inner side of the detection piece 43. A feeding port 11 is opened on one side of the barrier chamber 1. A discharging port 12 is opened on the side of the barrier chamber 1 far from the feeding port 11. A first square hole 13 is opened on the top of the barrier chamber 1. The positions of the feeding port 11 and the discharging port 12 coincide with the positions of the two conveying tracks 23.

[0053] As Figure 4 and Figure 6 shown in the figure, a support frame 21, a guard plate 22, a first support column 24 and a second support column 25 are fixedly connected to the top of the base 2. A first strip-shaped groove 221 is opened on the inner side of the guard plate 22. The conveying track 23 is arranged on the inner side of the guard plate 22. A plurality of second square holes 231 are opened on the outer wall of the conveying track 23. A circular gear 232 is arranged inside the conveying track 23. The rack of the circular gear 232 coincides with the plurality of second square holes 231. A transmission belt 233 is arranged inside the conveying track 23. A connecting column 234 is fixedly connected between the transmission belt 233 and the conveying track 23. A first protruding column 2341 is fixedly connected to the outside of the connecting column 234. The diameter of the first protruding column 2341 coincides with the width of the first strip-shaped groove 221. A sliding column 251 is slidably connected to the inner side of the second support column 25. A first spring 252 is sleeved on the outer wall between the two ends of the sliding column 251 and the second support column 25.

[0054] As Figures 3 - 5 and Figure 7As shown in the figure, one end of the rotating connecting rod 33 is fixedly connected with a second convex column 331. At the end of the rotating connecting rod 33 far from the second convex column 331, a first sector 332 is fixedly connected. On the side of the first turntable 34 close to the rotating connecting rod 33, a second strip-shaped groove 341 is formed. The diameter of the second convex column 331 fits the width of the second strip-shaped groove 341. On the side of the first turntable 34 close to the rotating connecting rod 33, a second sector 342 is fixedly connected. An arc-shaped groove 3421 is formed on the outer wall of the second sector 342, and the arc-shaped groove 3421 fits the first sector 332. A plurality of third square holes 351 are formed on the outer wall of the second turntable 35, and the third square holes 351 are arranged in an array on the second turntable 35.

[0055] As Figures 8 - 10 shown, the support plate 41 is fixedly connected to the inner side of the first support column 24. At the top of the support plate 41, a baffle 411 is fixedly connected. On the outer wall of the baffle 411, a second motor 412 is fixedly connected. The output end of the second motor 412 is fixedly connected with a threaded rod 413. A sliding block 4131 is threadedly connected to the outer wall of the threaded rod 413. The top of the sliding block 4131 is rotatably connected with a telescopic connecting rod 414. The upper end inner side of the first support column 24 is rotatably connected with a second rotating rod 421. Two third turntables 42 are fixedly connected to the ends of the two second rotating rods 421 far from the first support column 24. A pressure rod 422 is fixedly connected between the two third turntables 42. At the end of the detection rod 44 close to the third turntable 42, a pressure plate 442 is fixedly connected. A second spring 441 is sleeved between the pressure plate 442 of the detection rod 44 and the outer wall of the detection piece 43. Among them: the telescopic connecting rod 414 is rotatably connected to the bottom of the detection piece 43 at the end far from the sliding block 4131.

[0056] It can be seen from this that as Figures 2 - 8As shown, the IGBT device from the previous process is flipped and conveyed onto the conveying track 23 inside the barrier chamber 1. Under the conveyance of the conveying track 23, the IGBT device is conveyed into the third square hole 351 of the second turntable 35. At this time, driven by the first motor 31, the first rotating rod 32 and the rotating connecting rod 33 rotate together. At this time, during the rotation of the rotating connecting rod 33, the second convex column 331 rotates together. At this time, the second convex column 331 slides in the second strip-shaped groove 341, and during the rotation of the second convex column 331, it is restricted by the second strip-shaped groove 341 to drive the first turntable 34 to rotate together. At this time, the second convex column 331 slides out of the second strip-shaped groove 341 on one side, and then slides into the second strip-shaped groove 341 on the next side and drives the first turntable 34 to rotate by 90 degrees. At the same time, the first turntable 34 drives the second turntable 35 to rotate by 90 degrees. At this time, the second turntable 35 drives the IGBT device to rotate to the top of the second turntable 35, and makes the three terminals of the IGBT device contact the three detection rods 44 for detection. After the detection is completed, driven by the first motor 31 again, the second turntable 35 rotates by 90 degrees, conveys the IGBT device to the conveying track 23 on the other side and conveys it out from the discharge port 12;

[0057] It should be noted that after the IGBT device is conveyed into the third square hole 351 on the side of the feeding port 11, the IGBT device will push the sliding column 251, causing the sliding column 251 to slide to the other side. At this time, the sliding column 251 will push the IGBT device near the discharge port 12 out of the third square hole 351, so that the conveying track 23 on the side from the third square hole 351 to the discharge port 12 conveys the IGBT device out, and rebounds under the action of the first spring 252 when the IGBT device is conveyed to the top of the second turntable 35;

[0058] Among them, when the IGBT device is conveyed to the top of the second turntable 35 for detection, driven by the second motor 412, the threaded rod 413 rotates. The threaded rod 413 drives the sliding block 4131 to slide. During the sliding of the sliding block 4131, it pulls the vertical detection rod 44 to turn to the horizontal direction, aligning the three detection rods 44 with the three terminals of the IGBT device. Driven by electricity, the second rotating rod 421 rotates, causing the third turntable 42 to rotate. At the same time, during the rotation of the third turntable 42, it drives the pressure rod 422 to push the pressure plate 442 and the upper end of the detection rod 44 to slide towards the detection part 43, and drives the detection rod 44 to penetrate deeper into the three terminals of the IGBT device for gate trigger detection. After the detection is completed, driven by the second motor 412 and electricity again, the three horizontal detection rods 44 rotate to the vertical direction and stop;

[0059] In addition, when there is a foreign object blocking during the conveyance of IGBT devices by the conveying track 23, under normal circumstances, the conveying track 23 and the conveyor belt 233 will rotate together to continuously convey the IGBT devices. However, when the IGBT device is blocked, affected by the slight inclined plane at the top of the guard plate 22, the conveying track 23 will be pressed down at the entrance position of the third square hole 351. Due to the influence of the first raised column 2341 and the first strip-shaped groove 221, the connecting column 234 will always slide along the first strip-shaped groove 221. During the bending process of the conveying track 23, it will drive the first raised column 2341 to rotate. At this time, the conveying track 23 and the conveyor belt 233 are misaligned, and the circular gear 232 and the conveying track 23 are tightened, causing the conveying track 23 and the conveyor belt 233 to stop rotating and producing an emergency stop effect to prevent the three terminals of the IGBT device from not being aligned with the detection rod 44.

[0060] It should be noted that when the bottom of the IGBT device is affected by foreign objects, after the IGBT device enters the third square hole 351, under the regularization of the third square hole 351, the foreign objects at its bottom are squeezed. At this time, the squeezed foreign objects also squeeze the conveying track 23, causing the part of the conveying track 23 being squeezed to approach the conveyor belt 233. At this time, the connecting column 234 between the conveyor belt 233 and the conveying track 23 will be slightly inclined during the squeezing process and produce a pulling effect on the conveyor belt 233. Considering that there are multiple connecting columns 234 distributed between the conveyor belt 233 and the conveying track 23, the two connecting columns 234 near the squeezing part will shift in different directions. Under the restriction of the first strip-shaped groove 221 on the first raised column 2341, the two connecting columns 234 that are inclined in different directions will pull the conveyor belt 233 and the conveying track 23, causing a deviation in the rotation stroke of the conveyor belt 233 and the conveying track 23, that is, they will stop rotating at this time, forming an emergency stop effect.

[0061] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art of this industry should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection required by the present invention is defined by the appended claims and their equivalents.

Claims

1. A method for manufacturing an internally insulated IGBT device, characterized in that: The steps include: S1. After the staff prepares the substrate, they use ion implantation equipment to implant B ions into the PN junction; S2, forming a mask insulating layer on the substrate by chemical vapor deposition technology, and performing precise processing on the insulating film by etching and degumming; S3, then use the ion implantation equipment to implant P ions again, then use the etching technology to form a groove on the substrate, and then use the CVD technology to form an insulating film and etch and remove the glue on the substrate again; S4, then forming an emitter electrode on the insulating film by sputtering or evaporation technology, and then forming a P+FS layer and a B+ region on the substrate by ion implantation equipment, and forming a collector on the substrate by sputtering or evaporation technology; S5. Finally, the IGBT device is glued and cured, and finally tested after forming; Wherein: in S5, the IGBT device is tested by the testing component (4); the bottom of the inner wall of the barrier chamber (1) is fixedly connected to a base (2); the top of the base (2) is provided with a conveying crawler (23) for conveying the IGBT device; a sliding column (251) for emergency stopping the conveying crawler (23) is provided in the conveying crawler (23); a conveying component (3) for flipping the IGBT device is provided on one side of the conveying crawler (23); and a testing component (4) for testing the IGBT device is provided on one side of the conveying component (3); wherein: The IGBT device is transported by the transport crawler (23), the IGBT device is turned over by the transport component (3), and the gate trigger detection of the IGBT device is completed by the detection component (4); The conveying assembly (3) includes a No. 1 motor (31), the output end of the No. 1 motor (31) is fixedly connected to a No. 1 rotating rod (32), the No. 1 rotating rod (32) is fixedly connected to a rotating connecting rod (33) at one end away from the No. 1 motor (31), and the conveying assembly (3) includes a No. 1 rotating disk (34), and the No. 2 rotating disk (35) is fixedly connected to the side of the No. 1 rotating disk (34) away from the rotating connecting rod (33); The detection assembly (4) comprises a support plate (41), a third turntable (42) is arranged above the support plate (41), a detection member (43) is fixedly connected between the third turntables (42) on both sides, and a detection rod (44) is slidably connected to the inner side of the detection member (43).

2. The method for manufacturing an internally insulated IGBT device according to claim 1, characterized in that: A material inlet (11) is provided on one side of the barrier chamber (1), a material outlet (12) is provided on a side of the barrier chamber (1) away from the material inlet (11), and a square hole (13) is provided on the top of the barrier chamber (1). The positions of the material inlet (11) and the material outlet (12) coincide with the positions of the conveying crawlers (23) on both sides.

3. The method for manufacturing an internally insulated IGBT device according to claim 2, characterized in that: The top of the base (2) is fixedly connected with a support frame (21), a guard plate (22), a first support column (24) and a second support column (25); the inner side of the guard plate (22) is provided with a first strip groove (221); the conveying crawler (23) is arranged on the inner side of the guard plate (22); the outer wall of the conveying crawler (23) is provided with a plurality of second square holes (231); the inner side of the conveying crawler (23) is provided with a circular gear (232); the rack of the circular gear (232) fits with the plurality of second square holes (231).

4. The method for manufacturing an internally insulated IGBT device according to claim 3, characterized in that: A transmission belt (233) is arranged on the inner side of the conveying crawler belt (23), a connecting column (234) is fixedly connected between the transmission belt (233) and the conveying crawler belt (23), and a No. 1 protruding column (2341) is fixedly connected to the outer side of the connecting column (234), and the diameter of the No. 1 protruding column (2341) matches the width of the No. 1 strip groove (221).

5. The method for manufacturing an internally insulated IGBT device according to claim 4, characterized in that: The inner side of the No. 2 support column (25) is slidably connected to a sliding column (251), and the outer wall between the two ends of the sliding column (251) and the No. 2 support column (25) is sleeved with a No. 1 spring (252).

6. The method for manufacturing an internally insulated IGBT device according to claim 5, characterized in that: One end of the rotating connecting rod (33) is fixedly connected to a No. 2 protruding column (331), and the end of the rotating connecting rod (33) away from the No. 2 protruding column (331) is fixedly connected to a No. 1 fan-shaped member (332).

7. The method for manufacturing an internally insulated IGBT device according to claim 6, characterized in that: The first rotating disk (34) is provided with a second strip groove (341) on a side close to the rotating connecting rod (33), and the diameter of the second protruding column (331) matches the width of the second strip groove (341). The first rotating disk (34) is fixedly connected with a second fan-shaped member (342) on a side close to the rotating connecting rod (33), and an arc groove (3421) is provided on an outer wall of the second fan-shaped member (342), and the arc groove (3421) matches the first fan-shaped member (332).

8. The method for manufacturing an internally insulated IGBT device according to claim 7, characterized in that: The outer wall of the No. 2 rotating disk (35) is provided with a plurality of No. 3 square holes (351), and the No. 3 square holes (351) are distributed in an array on the No. 2 rotating disk (35).

9. The method for manufacturing an internally insulated IGBT device according to claim 8, characterized in that: The support plate (41) is fixedly connected to the inner side of the first support column (24); a baffle (411) is fixedly connected to the top of the support plate (41); a second motor (412) is fixedly connected to the outer wall of the baffle (411); a threaded rod (413) is fixedly connected to the output end of the second motor (412); a sliding block (4131) is threadedly connected to the outer wall of the threaded rod (413); and a telescopic connecting rod (414) is rotatably connected to the top of the sliding block (4131).

10. The method for manufacturing an internally insulated IGBT device according to claim 9, characterized in that: The inner side of the upper end of the No. 1 support column (24) is rotatably connected to a No. 2 rotating rod (421); the two No. 3 rotating disks (42) are fixedly connected to the ends of the No. 2 rotating rods (421) on both sides away from the No. 1 support column (24); a pressure rod (422) is fixedly connected between the No. 3 rotating disks (42) on both sides; the detection rod (44) is fixedly connected to a pressure plate (442) at one end close to the No. 3 rotating disk (42); the detection rod (44) is sleeved with a No. 2 spring (441) between the pressure plate (442) and the outer wall of the detection member (43), wherein: The telescopic connecting rod (414) is rotatably connected to the bottom of the detection member (43) at one end away from the sliding block (4131).

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