A multi-functional heat exchange phosphine tank

Abstract

The present invention relates to the field of chemical tank technology, specifically a multifunctional heat exchange phosphine tank. The technical problem to be solved by this technical solution is: a multifunctional heat exchange phosphine tank, comprising a tank body and a control system, wherein the tank body comprises a safety valve, a temperature transmitter, a pressure transmitter, and a radar level gauge, and the control system is divided into a normal data module and an abnormal data module based on the instruments and meters on the tank body, wherein the normal data module collects key data of the tank body in real time and summarizes them to form a normal operating parameter system of the tank body, wherein the parameter system forms a traceability path according to the classification of key parts of the tank body, the heat exchange system, and the pipeline, wherein the traceability path performs node classification on the abnormal data according to the classification of key parts to form path nodes, and the control system automatically adjusts the temperature, temperature feedback, pressure feedback, abnormal alarm, and end reminder functions according to the path nodes to ensure that the temperature in the container is controllable and the medium contained therein is kept in a safe state.

Description

Technical Field

[0001] The invention relates to the technical field of intelligent chemical tanks, in particular to a multifunctional heat exchange phosphine tank. Background Art

[0002] Phosphine (also known as phosphine) is an inorganic compound with the chemical formula PH3. It is a colorless, highly toxic, and flammable medium. When stored using cryogenic liquefaction technology, the boiling point of phosphine in liquid form is -87.5°C. To maintain its liquid state, the temperature inside the container must not exceed -87.5°C. The rapid development of related industries has placed increasingly stringent requirements on the storage and use of phosphine. Traditional phosphine tanks are gradually exposing their limitations when dealing with complex industrial environments and diverse process requirements. For example, in semiconductor processes requiring precise reaction temperature control, traditional phosphine tanks lack effective heat exchange capabilities, making it impossible to quickly and accurately regulate the temperature of the phosphine inside the tank. This makes it difficult to stably control the physical properties and chemical activity of phosphine, thereby affecting product quality and production efficiency. In the solar photovoltaic industry, if phosphine tanks cannot maintain stable operating conditions under varying ambient temperatures, the consistency of the silicon wafer diffusion process will be affected, reducing the yield rate of solar cells.

[0003] Therefore, the present invention designs an intelligent control phosphine tank with heat exchange function, which realizes the controllable and adjustable temperature in the container, converts the phosphine in the phosphine tank from gaseous to liquid state, and ensures that the contained medium is in a safe state. Summary of the Invention

[0004] To achieve the above objectives, the present invention adopts the following technical solutions:

[0005] A multifunctional heat exchange phosphine tank comprises a tank body, which includes a safety valve, a temperature transmitter, a pressure transmitter, a radar level gauge and a control system. The tank body is characterized in that: the tank body comprises an inner cylinder and an outer cylinder, the tank body is covered with a stainless steel skin, an aerogel felt is provided under the stainless steel skin, and the aerogel felt is adhered to the surface of the outer cylinder.

[0006] The outer cylinder is equipped with a dual-channel heat exchange structure, which is equipped with a condensate heat exchange channel and a fluorine heat exchange channel. The condensate heat exchange channel is equipped with a continuous spiral surface supporting the guide vane. The outer cylinder also includes an outer half-tube, which is located at the top of the condensate heat exchange channel. When the liquid in the inner cylinder exceeds the lowest gas level, the outer half-tube is filled with heating medium to quickly vaporize the liquid at the top of the inner cylinder. The outer half-tube includes an upper head outer half-tube and multiple straight arc outer half-tubes. The straight arc outer half-tubes are designed with multiple sections of back-and-forth curved paths. The upper head outer half-tube is equipped with a 180° short radius elbow and a sealing plate, and the straight arc outer half-tube is equipped with a 90° short radius elbow.

[0007] An internal coil is provided at the bottom of the inner cylinder, and the internal coil is immersed in the liquid at the bottom of the inner cylinder. The internal coil structure is a concentric serpentine structure divided into several groups, and each group is connected to form a whole by tie rods and pipes. The tank body is provided with an outer cylinder inlet and an outer cylinder outlet, an internal coil inlet and an internal coil outlet, the outer cylinder inlet and the outer cylinder outlet are connected to the dual-channel heat exchange structure, the internal coil inlet and the internal coil outlet are connected to the internal coil, the internal coil is a whole hollow circular tube filled with a medium, the pipe is a hollow circular tube, and the diameter of the pipe is smaller than the diameter of the internal coil; the inner cylinder is provided with a minimum liquid level line and a minimum gas level line, the minimum liquid level line is located at the bottom of the inner cylinder, and the minimum gas level line is located at the top of the inner cylinder.

[0008] The control system includes gas-liquid balance control, heat balance control and tank body operation data control in the tank. The gas-liquid balance control and heat balance control are combined to form a comprehensive control model in the tank.

[0009] The gas-liquid balance control is based on the minimum liquid level line and the minimum gas level line on the inner cylinder. When the liquid is lower than the minimum liquid level line, the control system starts the medium cooling of the inner cylinder and the outer cylinder, and at the same time fills the tank with phosphine; when the liquid exceeds the minimum gas level line, the control system starts the medium heating of the inner cylinder and the outer cylinder.

[0010] The gas-liquid balance control can also be controlled based on the pressure inside the inner cylinder. In the gas-liquid balance state, the pressure inside the tank is

[0011] Related to the saturated vapor pressure of phosphine, under ideal conditions In actual situations, non-ideality needs to be considered, so the activity coefficient model is used: its expression is , The mole fraction of phosphine in the gas phase, Total pressure in the tank (Pa), The mole fraction of phosphine in the liquid phase, The activity coefficient of phosphine, The saturated vapor pressure of phosphine (Pa) was calculated using the Antoine equation.

[0012] The thermal balance control divides the total heat exchange capacity into three parts: condensate channel heat transfer control, fluorine channel heat transfer control and internal coil heat transfer control. The condensate channel heat transfer control includes the enhanced control of turbulence by the spiral surface supporting guide vanes, and the internal coil heat transfer control includes the forced convection heat exchange control between the internal concentric coils and the liquid.

[0013] Furthermore, the operation data control of the tank body is divided into a normal data module and an abnormal data module based on the instruments on the tank body. The normal data module collects the key data of the tank body in real time and summarizes them to form a normal operation parameter system of the tank body. The parameter system forms a traceability path based on the classification of key parts of the tank body, heat exchange system, and pipeline. The traceability path classifies the abnormal data into nodes based on the classification of key parts to form path nodes. The nodes include nodes based on the key parts of the tank body, nodes based on the key parts of the heat exchange system, and nodes based on the key parts of the pipeline.

[0014] Furthermore, the tank is equipped with flow control valves on the liquid and gas inlet and outlet pipes. Based on liquid level and pressure monitoring data, a control system can automatically adjust the valve opening to control the inflow and outflow of liquid phosphine and the discharge of gaseous phosphine, thereby maintaining a balance between the liquid and gas levels. The tank can also be connected to an external pressure-compensating device. When the gas pressure in the tank is too low or the pressure difference between the inner and outer cylinders is too large, the pressure-compensating device can replenish the tank with gas to restore the gas-liquid balance.

[0015] Furthermore, the internal coil includes an outer ring coil, a middle ring coil and an inner ring coil. The inner ring coil is provided with a starting point, the starting point is connected to the inner coil inlet, the outer ring coil is provided with an end point, the middle ring coil and the inner ring coil are provided with connecting pipes, the medium rotates clockwise from top to bottom from the inner ring coil to the bottom, the connecting pipe at the bottom of the inner ring coil is connected to the middle ring coil, the medium rotates clockwise from bottom to top from the middle ring coil to the top, and flows to the outer ring coil through the connecting pipe designed at the top of the middle ring coil.

[0016] Furthermore, the tank body is provided with a pressure branch pipe and a purge branch pipe. The pressure branch pipe has an equal-diameter tee, the equal-diameter tee has a reducer pipe, the reducer pipe has a 90° elbow, and the 90° elbow has an instrument connector. The purge branch pipe has a flange, the flange has an equal-diameter tee, and the purge branch pipe is also provided with a short-handled stop valve, which has an instrument connector.

[0017] Furthermore, the tank body is provided with a feed port, a drain port and a discharge port, the discharge port is provided with an inner extension pipe, the inner extension pipe extends from the discharge port to the bottom of the tank, and the tank body is also provided with a liquid level gauge interface and support legs.

[0018] The beneficial effects of this improved technical solution are:

[0019] 1. Efficient Heat Exchange System: The dual-channel heat exchange structure of the outer cylinder, including a condensate heat exchange channel and a fluorine heat exchange channel, provides powerful heat exchange capabilities for the phosphine tank. In particular, the spirally curved support vanes within the condensate heat exchange channel effectively enhance turbulence and improve heat exchange efficiency. Furthermore, the internal coil design further optimizes the heat exchange process.

[0020] 2. Intelligent Integrated Control System: This model integrates gas-liquid balance control with thermal balance control to form a complete control system. This model monitors the temperature, pressure, volume, and other state parameters of the phosphine in the tank in real time. Based on these parameters, it automatically adjusts the flow rate of the dual-channel medium and the heat transfer efficiency of the internal coils, thereby achieving precise control of the tank temperature. The control system generates abnormal paths based on node classification (tank, pipeline, heat exchange), ensuring data traceability and timely fault diagnosis and resolution, thereby ensuring tank safety.

[0021] 3. Safe and reliable liquid-gas conversion control in the tank: The minimum liquid level line and the minimum gas level line set on the tank body are combined with the internal coil at the bottom and the outer half of the cylinder at the top to form a simplified liquid level control, ensuring the balance of liquid level and gas level in the tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is the overall structural diagram of the present invention.

[0023] Figure 2 This is a structural diagram of the condensed water heat exchange channel of the present invention.

[0024] Figure 3 This is a structural diagram of the outer half tube of the cylinder of the present invention.

[0025] Figure 4 This is a diagram of the internal coil structure of the present invention.

[0026] Figure 5 This is a structural diagram of the outer ring coil, middle ring coil and inner ring coil of the invention.

[0027] Figure 6 This is a structural diagram of the pressure branch pipe of the present invention.

[0028] Figure 7 This is a structural diagram of the purge branch pipe of the present invention.

[0029] Figure 8This is the comprehensive control model diagram of the present invention.

[0030] Figure 9 This is a traceability path diagram generated based on the normal data module of the present invention.

[0031] Figure 10 It is an operation flow chart of the present invention. DETAILED DESCRIPTION

[0032] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory and should not have any limiting effect on the scope of protection of the present invention.

[0033] refer to Figure 1-10 The multifunctional heat exchange phosphine tank includes a tank body and a control system. The tank body includes a safety valve a, a temperature transmitter b, a radar level gauge c, and a pressure transmitter d. The control system is divided into a normal data module and an abnormal data module based on the instrumentation on the tank body. The normal data module collects key tank data in real time and summarizes it to form a normal operating parameter system for the tank. The parameter system is classified according to the key parts of the tank body, heat exchange system, and pipeline to form a traceability path. The traceability path classifies abnormal data according to the key parts to form path nodes. The nodes include nodes based on key parts of the tank body, key parts of the heat exchange system, and key parts of the pipeline. The control system also includes gas-liquid balance control and heat balance control within the tank. The gas-liquid balance control and heat balance control are combined to form a comprehensive control model within the tank. The gas-liquid balance control calculates the phosphine saturated vapor pressure based on the Antoine equation coupled with the UNIQUAC model, and corrects non-idealities through the activity coefficient to improve prediction accuracy. The heat balance control uses multi-source heat exchange quantity splitting and a PID algorithm dynamic strategy to adjust the medium flow and thus control the temperature within the tank.

[0034] The gas-liquid balance control can be based on the minimum liquid level and the minimum gas level on the inner cylinder. When the liquid is lower than the minimum liquid level, the control system starts the cooling medium of the inner and outer cylinders, and fills the tank with phosphine at the same time. When the liquid exceeds the minimum gas level, the control system starts the heating medium of the inner and outer cylinders. The gas-liquid balance control can also be based on the pressure inside the inner cylinder. Under equilibrium conditions, the pressure inside the tank is related to the saturated vapor pressure of phosphine. Under ideal conditions, In actual situations, non-ideality needs to be considered, so the activity coefficient model is used, which is expressed as , The mole fraction of phosphine in the gas phase, Total pressure in the tank (Pa), The mole fraction of phosphine in the liquid phase, The activity coefficient of phosphine, The saturated vapor pressure of phosphine (Pa) was calculated using the Antoine equation.

[0035] The thermal balance control divides the total heat exchange volume into three parts: condensate channel heat transfer control, fluorine channel heat transfer control and internal coil heat transfer control. The condensate channel heat transfer control includes the enhanced control of turbulence by the spiral surface supporting guide vanes, and the internal coil heat transfer control includes the forced convection heat exchange control between the internal concentric coils and the liquid.

[0036] like Figure 1-7 As shown in the structural diagram, the tank body is provided with an inner cylinder 1 and an outer cylinder. The inner cylinder 1 adopts a cylindrical structure, and the outer cylinder is a double-channel heat exchange structure, including a condensed water heat exchange channel 2 and a fluorine heat exchange channel 21. Figure 1 and 2 As shown, the condensate heat exchange channel 2 is provided with a continuous spiral surface supporting guide vane 22, the outer cylinder is also provided with an outer half-tube 23, and the outer cylinder is provided with an insulation structure 20 composed of stainless steel and aerogel felt. The inner cylinder 1 is provided with a minimum liquid level line 10 and a minimum gas level line 11 as well as an internal coil 3. The minimum liquid level line 10 is located at the bottom of the inner cylinder 1, and the minimum gas level line 11 is located at the top of the inner cylinder 1. The internal coil 3 is immersed in the liquid at the bottom of the inner cylinder 1. The outer half-tube 23 is located in the condensate heat exchange channel 2. It is a semicircular tube structure spirally evenly distributed and wound and welded above the lowest gas level line 11 at the top of the inner cylinder 1. When the liquid in the inner cylinder 1 exceeds the lowest gas level line 11, the outer half-tube 23 can be filled with heating medium to quickly vaporize the liquid at the top of the inner cylinder 1.

[0037] like Figure 1 and 3 As shown, the outer half of the cylinder 23 comprises an upper end outer half 231 and multiple straight outer half 232. Upper end outer half 231 is equipped with a 180° short-radius elbow 234 and a sealing plate 235, while straight outer half 232 is equipped with a 90° short-radius elbow 236. The medium enters from upper end outer half 231 and passes through the 180° short-radius elbow 234 and the 90° short-radius elbow 236 to enhance heat exchange. The straight outer half 232 is designed with multiple sections of curved paths of varying sizes to maximize the heat exchange area and improve heat exchange efficiency while not occupying the top instrument interface space.

[0038] like Figure 1 and 4As shown, the inner cylinder 1 houses the internal coil 3, which is a concentric coil structure divided into several groups. Each group is connected to form a single unit by tie bars 33 and a connecting pipe 34, a hollow circular tube. The connecting pipe 34 is slightly smaller in diameter than the internal coil 3. Support angles 35 are also installed inside the inner cylinder 1, with U-bolts 36 attached to them. The internal coil 3 is secured to the inner cylinder 1 by the support angles 35, U-bolts 36, and tie bars 33, preventing vibration or movement during operation.

[0039] like Figure 4 and 5 As shown, the internal coil 3 comprises an outer coil 3a, a middle coil 3b, and an inner coil 3c. The inner coil 3c has a starting point connected to the inner coil inlet 31. The outer coil 3a has an end point. Both the middle coil 3b and the inner coil 3c have connecting pipes 34. One section of the connecting pipe 34 has a 45° elbow 34a, and the end point has a 90° elbow 34b, which connects to the inner coil outlet 32. The medium flows clockwise from the top of the inner coil 3c to the bottom. The connecting pipe at the bottom of the inner coil 3c connects to the middle coil 3b. The medium then flows clockwise from the bottom of the middle coil 3b to the top, passing through the connecting pipe designed at the top of the middle coil 3b and into the outer coil 3a.

[0040] like Figure 1 and Figure 6 As shown, the pressure transmitter d on the tank body is provided with a pressure branch pipe d1, the pressure branch pipe d1 has an equal-diameter tee d2, the equal-diameter tee d2 has a reducer pipe d3, the reducer pipe d3 has a 90° elbow d4, and the 90° elbow d4 has an instrument connector.

[0041] like Figure 1 and Figure 7 As shown, the safety valve a of the tank body is provided with a purge branch pipe a1, the purge branch pipe a1 is provided with a flange a2, the flange a2 is provided with an equal-diameter tee d2, the purge branch pipe a1 is provided with a short-handled stop valve a3, and the short-handled stop valve a3 is provided with an instrument connector.

[0042] like Figure 1 As shown, the tank body is provided with a feed port A, a drain port B and a discharge port C. The discharge port C is provided with an inner extension pipe C1, which extends from the discharge port C to the bottom of the tank. The tank body is also provided with a liquid level gauge interface and support legs.

[0043] The internal coil 3 is constructed from a single round tube, bent through a specific tooling die into the required concentric coil structure. This maximizes the flow area, ensuring full contact between the heat exchange medium within the coil and the phosphine within the tank, improving heat exchange efficiency. Considering the internal coil's contact with the internal medium of the container, its material is chosen to be consistent with the container shell. The internal coil 3 is fabricated into three groups with different center circle diameters. Due to its long unfolded length, the coil cannot be formed using a single pipe; multiple pipes are required. Therefore, the butt joints between the pipes must undergo 100% RT nondestructive testing to ensure weld quality. Each group is welded together using elbows and pipes, forming a single unit. This design fully utilizes the internal container space and maximizes the heat exchange area. The internal coil is secured to the tank via U-bolts 36 and support angles 35, preventing contact with the tank wall. This ensures full heat exchange between the phosphine and the coil within the tank, improving temperature regulation. The inner coil is secured to the support angle 35 with U-bolts 36. This prevents vibration or movement during coil operation, ensuring coil stability and reliability. This prevents damage to the coil or loose connections due to vibration, ensuring the proper operation of the heat exchange system. The inner coil 3 operates within the container. Considering the risk of accidental leakage and the ultra-low temperature requirements, the inner coil is filled with liquid nitrogen. Due to its inert nature, it does not contaminate the container's internal fluid. Furthermore, liquid nitrogen, typically at -196°C, provides an excellent refrigerant for the low-temperature environment within the container. If the container needs to maintain a higher temperature, a heat medium such as saturated steam or thermal oil can be introduced into the inner coil 3. These heat media effectively maintain the container's internal temperature within the design range.

[0044] Among them, the outer half tube 23 of the cylinder is mainly used for the circulation of heat exchange medium. Therefore, a semicircular tube structure is selected (which can be spliced into a whole tube according to the length requirement). It is evenly distributed with a spiral-like spacing and welded around the surface of the inner cylinder 1. It can circulate hot or cold media, so that the temperature inside the container can be adjusted by medium circulation and heat exchange when the temperature is too low or too high.

[0045] The thermal insulation structure 20 composed of stainless steel skin and aerogel felt has a thermal conductivity as low as 0.02 W / (m·K), reducing environmental thermal interference.

[0046] The tank has flow control valves on the liquid and gas inlet and outlet pipes. Based on liquid level and pressure monitoring data, the control system automatically adjusts the valve opening to control the inflow and outflow of liquid phosphine and the discharge of gaseous phosphine, thereby maintaining a balance between the liquid and gas levels. The tank can be connected to an external pressure-boosting device. When the gas pressure in the tank is too low or the pressure difference between the inner and outer cylinders is too large, the pressure-boosting device can replenish the tank to restore the gas-liquid balance.

[0047] The tank is equipped with instruments such as a temperature transmitter (b), a pressure transmitter (d), and a radar level gauge (c). These instruments provide timely feedback to the control system via a 4-20 mA signal, including the temperature and water level of the aqueous solution within the tank. The temperature transmitter (b) accurately measures the temperature of the phosphine within the tank and converts the temperature signal into an electrical signal, transmitting it to the control system, allowing operators to monitor the tank's temperature in real time. The pressure transmitter (d) monitors pressure changes within the tank to ensure it remains within a safe range. If pressure abnormalities occur, the control system can take timely action to adjust the pressure. The radar level gauge (c) accurately measures the phosphine level within the tank, providing crucial data support for production operations. The coordinated operation of these instruments enables the control system to provide timely and accurate feedback on operating conditions, ensuring the safe operation of the phosphine tank and the smooth progress of the production process. Furthermore, an on-site level gauge is installed on the tank, providing a visual display of the water level within the tank, facilitating on-site observation and operation by operators. This serves as a backup level monitoring method, improving the reliability of level monitoring.

[0048] The process of forming a traceability path based on the normal data module in the control system is as follows:

[0049] (1) Data collection and storage

[0050] Sensor network layout: Various sensors such as temperature, pressure, liquid level, and flow are densely deployed in key locations such as the multifunctional heat exchange phosphine tank, including the tank body, heat exchange system, and pipelines, to ensure comprehensive and real-time collection of operating data.

[0051] Data storage architecture: Utilizing distributed database technology, the massive amount of normal data collected by sensors is categorized and stored. This data is organized by data type (such as temperature and pressure), collection time, and collection location, creating an efficient data index.

[0052] (2) Tracing Path Construction Algorithm

[0053] Data Association Analysis: Data mining algorithms are introduced to deeply analyze the associations between various data types within normal data modules. By mining frequent item sets, potential connections between different parameter data are discovered. For example, analysis revealed that when the tank temperature rises within a specific time period, the coolant flow rate in the heat exchange system typically increases accordingly, and the pressure also fluctuates to a certain extent. These associations provide key clues for constructing traceability paths.

[0054] Path modeling: Based on the results of data association analysis, a traceability path model is constructed using graph theory. Each data collection point is considered a node in the graph, and the associations between data are considered edges. The weight of the edges can be set based on the closeness of the association.

[0055] Among them, the node classification method of abnormal data by tracing the path in the control system is as follows:

[0056] 1. Abnormal Data Identification

[0057] Data Flow Tracking: In the control system of a multifunctional heat exchange phosphine tank, data collected from sensors is transmitted along a specific path through various modules and systems. By establishing a data flow model, the data flow trajectory can be clearly depicted. When abnormal data is detected, this trajectory can be traced back to determine the specific link where the abnormality occurred. For example, if abnormal liquid level data is detected, the data can be checked starting from the liquid level sensor and then at each stage of transmission, such as the liquid level display module and the data processing center, to determine whether the cause is a sensor failure, transmission line interference, or an error in the data processing algorithm.

[0058] Timestamp Correlation Analysis: Accurate timestamps are added to each data point. This allows for chronological analysis of the generation of abnormal data when tracing back the path. For example, if pressure data suddenly rises and exceeds a threshold, the timestamp allows for analysis of changes in other relevant data (such as temperature and flow) before and after the pressure anomaly, as well as the operation records of each path node at the corresponding time. This allows for determination of whether other factors triggered the abnormal pressure change, or whether a node performed an incorrect operation at a specific time.

[0059] Multi-source data fusion positioning: In addition to sensor data, the system may also collect data from other sources, such as equipment operation logs and operation instruction records. Fusion of this multi-source data allows for a more comprehensive tracing of the path of abnormal data. For example, by combining maintenance records in equipment operation logs with parameter adjustment information in operation instruction records, it is possible to determine whether the abnormal data was caused by a recent equipment maintenance or parameter adjustment, and identify the path nodes related to these operations.

[0060] (2) Node classification method

[0061] Positioning based on traceability paths: When abnormal data appears, the traceability path model is used to quickly locate the data within the entire data flow process and determine the path node to which it belongs. Nodes include those based on key parts of the tank, the heat exchange system, and pipelines.

[0062] Among them, the node classification based on the key parts of the tank includes the following:

[0063] Temperature-Related Nodes: If abnormal data is recorded at a specific temperature measurement point on the tank, such as when the top temperature sensor indicates a temperature outside the normal range, this can be attributed to an abnormality at the tank's top temperature node. This is because the tank's top may exhibit unique heat dissipation or absorption during heat exchange, which is closely related to heat transfer processes such as convection within the tank. If the bottom temperature is abnormal, this indicates an issue with the tank's bottom temperature node, potentially affected by factors such as medium sedimentation and uneven heat exchange.

[0064] Pressure-Related Nodes: If a pressure sensor on the tank wall detects an abnormal pressure, it can be identified as an abnormality at the tank wall pressure node based on its location. For example, an abnormal pressure sensor near the feed port may be related to factors such as feed rate and pressure; while an abnormal pressure near the discharge port may be related to factors such as poor discharge or internal blockage. Abnormal pressure at the pressure relief port on the tank top can be considered a problem at the tank top pressure relief node, potentially indicating a malfunction in the pressure relief device or excessive internal pressure that cannot be released normally.

[0065] Liquid level related nodes: The liquid level sensor on the side of the tank is used to monitor the liquid level. If the liquid level data is abnormal, it can be divided into high liquid level node, middle liquid level node and low liquid level node abnormalities according to the height of the sensor.

[0066] Among them, the node classification based on the key parts of the heat exchange system includes the following:

[0067] Heat exchanger nodes: If the heat exchanger's temperature sensor detects abnormalities in the temperature exchange between the hot and cold media, it can be classified as a hot-side temperature anomaly node or a cold-side temperature anomaly node. For example, if the hot-side temperature fails to drop, it could be due to scaling inside the heat exchanger or excessive heat medium flow. If the cold-side temperature fails to rise, it could be due to insufficient cold medium supply or insufficient heat exchange area. If the heat exchanger's pressure sensor detects abnormal pressure, such as abnormally high inlet pressure, it could be due to a blockage in the inlet pipe; abnormally low outlet pressure could indicate a leak within the heat exchanger.

[0068] Circulation pump node: If the circulation pump's speed sensor reports abnormal speed, it can be classified as either an overspeed node or an underspeed node. Overspeed may indicate a control signal error or motor failure; underspeed may indicate insufficient motor power or impeller damage. If the circulation pump's pressure sensor detects abnormal outlet pressure, excessively high pressure may indicate a blockage in the outlet pipe; underpressure may indicate a poor pump seal or air in the suction line.

[0069] Coolant / Heater Storage Tank Node: If the tank's liquid level sensor indicates an abnormal liquid level, it is classified as either a high or low level node. A high level may indicate a replenishment system failure or poor reflux; a low level may indicate a leak or rapid consumption. If the tank's temperature sensor detects an abnormal temperature, a high temperature may indicate poor heat dissipation or a malfunctioning heating device; a low temperature may indicate poor insulation or a malfunctioning cooling device.

[0070] Among them, the node classification based on the key parts of the pipeline includes the following:

[0071] Pipeline connection nodes: Leaks at pipeline flange connections, resulting in abnormal pressure or flow, can be considered a flange connection node anomaly, potentially caused by damaged flange gaskets or loose bolts. Cracks or leaks at pipeline welds, resulting in abnormal pressure and flow data, can be attributed to weld node issues, potentially due to welding quality issues or excessive pipeline stress.

[0072] Pipeline valve nodes: If a regulating valve fails to regulate flow properly, resulting in abnormal pipeline flow, these issues can be categorized as either abnormal valve opening or loose closure. Abnormal opening may indicate a control signal failure or damage to the valve actuator; loose closure may indicate damage to the valve sealing surface or a foreign object. If a globe valve fails to fully open or close, causing abnormal pipeline pressure and flow, this can be considered a globe valve node issue, potentially due to valve core damage or stem failure.

[0073] Pipeline branch nodes: If flow distribution is abnormal at a pipeline branch, it can be classified as a branch node abnormality based on the specific branch situation. For example, if the flow from the main pipeline to a branch is too low, it may be due to a branch pipeline blockage or a small opening of the branch valve; if the flow is too high, it may be due to blockage or closed valves in other branches.

[0074] Node Risk Level Classification: In addition to classifying nodes based on their function, each node category can be further assigned a risk level. Critical nodes, such as those controlling temperature and pressure, which directly impact the safe operation of phosphine tanks, are assigned a high risk level. Auxiliary nodes, such as those used to monitor ambient humidity, are assigned a relatively low risk level. When abnormal data appears at nodes of different risk levels, different levels of response and attention are implemented.

[0075] Dynamic classification adjustment: As the phosphine tank operates and the system evolves, the importance and relationships of nodes may change. Therefore, classification rules need to be able to dynamically adjust. For example, if the heat exchange system is upgraded, the original coolant circulation node may have new relationships with other nodes, or its impact on tank temperature control may change. In this case, its classification needs to be reassessed and adjusted.

[0076] Fault mode association: Node classifications are associated with possible fault modes. For example, when a temperature node experiences an anomaly, possible fault modes include heating system failure, cooling system failure, and temperature sensor failure. By analyzing the characteristics of the abnormal data, the possible fault mode can be further determined, allowing for more targeted troubleshooting and resolution.

[0077] Among them, path node monitoring includes the following:

[0078] Real-time status monitoring: Utilizing real-time data collection and transmission technology, the operating status of each path node is continuously monitored, including its operating parameters and data transmission status. This ensures that any node anomalies, such as offline nodes, data transmission interruptions or delays, can be detected promptly.

[0079] Performance Indicator Evaluation: A series of performance indicators are set for each path node, such as data processing speed, data accuracy, and response time. These indicators are evaluated to determine whether the node is functioning properly. If the data processing speed of a data processing node decreases significantly, it may indicate a hardware failure or software issue at that node.

[0080] Abnormal Behavior Warning: Build an early warning model for abnormal node behavior. Based on historical data and experience, determine the range and patterns of normal node behavior. When node behavior falls outside the normal range, a warning signal is issued promptly to indicate a potential problem. For example, if a node experiences frequent and abnormal data fluctuations within a short period of time, and these fluctuations do not conform to normal operating patterns, this warrants attention and further analysis.

[0081] The specific implementation work and action sequence of the phosphine tank container are as follows:

[0082] (1) Preparation stage

[0083] 1. Piping system inspection: Ensure that all valves in the pipeline are properly closed or in standby mode. The valves' tightness and flexibility must be rigorously checked to prevent leakage or sticking. Instruments such as temperature sensors, pressure sensors, and level gauges must be in normal working order, and some must be within their calibration period to ensure accurate measurement data. Power equipment, such as refrigerant circulation pumps, must also be in standby mode, ready for immediate activation. All electrical connections and mechanical components must be inspected for correct operation.

[0084] 2. Container Leakage Inspection: Conduct a comprehensive inspection of all connections on the phosphine tank container to confirm that they are properly sealed. This can be done by performing an airtight test, such as by filling the container with a certain pressure of an inert gas, such as nitrogen, and then using a leak detector to inspect all connections to ensure there are no leaks.

[0085] 3. Control System: The control system must be debugged in advance to ensure it is in standby mode and can accurately receive and process various sensor signals. The control system software program must be inspected and optimized to ensure its stability and reliability. The control system's user interface must also be checked to ensure easy operation and monitoring by the operator.

[0086] (2) Tank pre-cooling stage

[0087] When the tank is at room temperature, open the refrigerant inlet valves on the outer cylinder and internal coils, allowing the refrigerant, such as liquid nitrogen or other cryogenic coolant, to circulate through the coils and outer cylinder. The refrigerant absorbs heat from the tank walls through heat exchange, gradually lowering the tank temperature. During the pre-cooling process, the tank temperature must be closely monitored, and data is transmitted to the control system in real time via temperature sensors. This allows for timely adjustments to the refrigerant flow rate and circulation speed to ensure even and stable cooling of the tank.

[0088] (III) Frozen phosphine gas delivery stage

[0089] When the temperature monitoring system detects that the temperature inside the container has reached a certain low temperature, such as -50°C (the specific temperature is determined by process requirements), the valve in the feed line is opened to begin feeding the chilled phosphine gas into the tank. During this process, the delivery speed must be controlled to avoid safety hazards such as excessive tank pressure fluctuations or static electricity caused by excessive gas flow. Simultaneously, the temperature and pressure inside the container are continuously monitored to ensure they remain within a safe range.

[0090] (IV) Liquid phosphine filling stage

[0091] As the refrigerated phosphine gas is continuously delivered, the temperature inside the container continues to drop. When temperature monitoring indicates that the temperature inside the container has reached near the operating low temperature, such as -80°C (the specific temperature is determined by process requirements), liquid phosphine can be added to the container. The filling volume of liquid phosphine must be strictly controlled, with the liquid level monitored in real time using a level gauge. When the normal filling capacity is reached, the filling operation is immediately stopped and the filling valve is closed. During the filling process, the temperature and pressure inside the container must also be closely monitored to ensure a safe and stable filling process.

[0092] (V) Normal work monitoring stage

[0093] Once the container enters normal operation, an online monitoring system monitors the temperature, pressure, and liquid level inside the container in real time. Temperature sensors, pressure sensors, and liquid level gauges transmit the collected data in real time to the control system, which analyzes and processes the data. If any abnormal fluctuations in temperature, pressure, or liquid level are detected, the control system will immediately take appropriate measures, such as adjusting the refrigerant flow rate or starting or stopping related equipment, to maintain stability within the container and ensure that phosphine storage remains in normal operation.

[0094] (VI) Continuous circulation of refrigerant media

[0095] To maintain the low temperature inside the container, the refrigerant must continuously circulate within the outer cylinder and internal coils. The refrigerant circulation pump operates continuously, delivering the refrigerant to the coils and outer cylinder. After heat exchange with the tank, the refrigerant is returned to the refrigerant storage device for cooling or replenishment. During the refrigerant circulation process, parameters such as the refrigerant level, temperature, and pressure must be regularly checked to ensure refrigerant quality and circulation effectiveness.

[0096] (7) Temperature regulation stage

[0097] When phosphine is filled or discharged, the temperature inside the container fluctuates. At this point, the control system automatically adjusts the refrigerant flow rate based on temperature data fed back by the temperature sensor. When the temperature rises, the refrigerant flow rate and circulation rate are increased to enhance heat exchange and lower the temperature inside the container. When the temperature drops, the refrigerant flow rate and circulation rate are appropriately reduced to prevent adverse effects of low temperatures on the equipment and phosphine storage. This automatic adjustment mechanism ensures that the internal temperature of the container remains within a controllable range. The entire process is automatically controlled by an automated control system and is equipped with multiple safety protection devices, such as safety valves and emergency shut-off valves, to ensure the proper storage of phosphine and the safe operation of the equipment.

[0098] It should be noted that, in this article, the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements that are inherent to such process, method, article or apparatus.

[0099] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. The above is only a preferred implementation method of the present invention. It should be pointed out that due to the limitations of textual expression, there are objectively infinite specific structures. For ordinary technicians in this technical field, without departing from the principles of the present invention, they can make several improvements, modifications or changes, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the inventive concept and technical solution to other occasions without improvement, should be regarded as the scope of protection of the present invention.

Claims

1. A multifunctional heat exchange phosphine tank, comprising a tank body, the tank body including a safety valve, a temperature transmitter, a pressure transmitter, a radar level gauge and a control system, characterized in that: The tank body comprises an inner cylinder and an outer cylinder, and the control system comprises gas-liquid balance control, heat balance control and tank body operation data control in the tank; The outer cylinder is provided with a dual-channel heat exchange structure and an outer half-tube of the cylinder. The dual-channel heat exchange structure is provided with a condensate heat exchange channel and a fluorine heat exchange channel. The condensate heat exchange channel is provided with a continuous spiral surface supporting guide vane. The outer half-tube of the cylinder is located at the top of the condensate heat exchange channel. The outer half-tube of the cylinder includes an upper head outer half-tube and a plurality of straight arc outer half-tubes. An internal coil is provided at the bottom of the inner cylinder, and the internal coil is immersed in the liquid at the bottom of the inner cylinder. The internal coil structure is a concentric serpentine structure divided into several groups, and each group is connected to form a whole by tie rods and pipes. The internal coil is a whole hollow circular tube filled with a medium, and the pipe is a hollow circular tube. The diameter of the pipe is smaller than the diameter of the internal coil; a minimum liquid level line and a minimum gas level line are provided on the inner cylinder, the minimum liquid level line is located at the bottom of the inner cylinder, and the minimum gas level line is located at the top of the inner cylinder.

2. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The outer half pipe of the upper head is provided with a 180° short radius elbow and a sealing plate, and the outer half pipe of the straight arc is provided with a 90° short radius elbow.

3. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The operation data control of the tank body is divided into a normal data module and an abnormal data module based on the instruments on the tank body. The normal data module collects the key data of the tank body in real time and summarizes them to form a normal operation parameter system of the tank body. The parameter system forms a traceability path based on the classification of key parts of the tank body, heat exchange system, and pipeline. The traceability path classifies the abnormal data into nodes based on the classification of key parts to form path nodes. The nodes include nodes based on key parts of the tank body, nodes based on key parts of the heat exchange system, and nodes based on key parts of the pipeline.

4. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The gas-liquid balance control is based on the lowest liquid level line and the lowest gas level line on the inner cylinder. When the liquid is lower than the lowest liquid level line, the control system starts the medium refrigeration of the inner cylinder and the outer cylinder, and at the same time fills the tank with phosphine; When the liquid exceeds the lowest gas level line, the control system starts heating the media in the inner and outer cylinders.

5. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The gas-liquid balance control can also be controlled based on the pressure inside the inner cylinder, and its expression is: , The mole fraction of phosphine in the gas phase, Total pressure in the tank (Pa), The mole fraction of phosphine in the liquid phase, The activity coefficient of phosphine, The saturated vapor pressure (Pa) of phosphine at the temperature was calculated by the Antoine equation.

6. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The thermal balance control divides the total heat exchange capacity into three parts: condensate channel heat transfer control, fluorine channel heat transfer control and internal coil heat transfer control. The condensate channel heat transfer control includes the enhanced control of turbulence by the spiral surface supporting guide vanes, and the internal coil heat transfer control includes the forced convection heat exchange control between the internal concentric coils and the liquid.

7. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: A stainless steel skin is provided on the tank body, an aerogel felt is provided under the stainless steel skin, and the aerogel felt is adhered to the surface of the outer cylinder.

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