Vacuum interconnection system, sample support and transfer device

Abstract

The invention discloses a sample support, a transfer device and a vacuum interconnection system, the vacuum interconnection system comprises the sample support, the sample support comprises a tray and a locking mechanism, the top surface of the tray is provided with a sample groove, the locking mechanism comprises a pressing claw, and the pressing claw is arranged on the tray; the pressing claw is rotationally mounted on the tray and is used for abutting against the top surface of a sample placed in the sample groove; the transfer device comprises an abutting rod and a bearing mechanism for bearing a sample, and the transfer device is used for transferring the sample into the sample groove; in the first state, the abutting rod is separated from the pressing claw; in the second state, the abutting rod abuts against the pressing claw, and the projection of the pressing claw on the plane where the bottom face of the sample groove is located is separated from the bottom face of the sample groove. According to the vacuum interconnection system, the sample can be transferred to the sample support, and the sample can be stably clamped.

Description

Technical Field

[0001] The present invention relates to the field of vacuum machinery, and particularly to a vacuum interconnection system, a sample holder and a transfer device. Background Art

[0002] The nano vacuum interconnection experimental station interconnects and docks all relevant equipment for material growth, device preparation, and performance detection by means of ultra-high vacuum pipelines, and arranges a magnetically driven sample transfer cart in the interconnected vacuum pipelines to transfer samples from one device to another, so that the transfer of the samples to be studied between devices will not expose to the atmosphere and introduce pollution.

[0003] The current ultra-high vacuum pipeline system can transfer 2-inch samples. A magnetic rod is used to control the sample fork to pick up the sample from the transfer cart and place it on the sample stage of different devices. For 2-inch samples with in-plane rotation and tilt angle requirements, angle correction needs to be performed in the vacuum interconnection system, that is, operations such as tilting and flipping the sample holder with the sample may be performed. The existing sample holder only provides a slot for placing the sample. When the sample holder carrying the sample is tilted, flipped or the like, the sample therein may be tilted, moved or dropped.

[0004] The information disclosed in this background art section is only for enhancing the understanding of the overall background of the present invention, and should not be regarded as an admission or any form of suggestion that this information constitutes the prior art already known to those of ordinary skill in the art. Summary of the Invention

[0005] An object of the present invention is to provide a vacuum interconnection system, which can transfer a sample to a sample holder and stably clamp the sample.

[0006] To achieve the above object, an embodiment of the present invention provides a vacuum interconnection system, including:

[0007] A sample holder, including a tray and a locking mechanism. The top surface of the tray is provided with a sample slot. The locking mechanism includes a pressing claw, and the pressing claw is rotatably mounted on the tray and is used to abut against the top surface of the sample placed in the sample slot;

[0008] A transfer device, including an abutting rod and a carrying mechanism for carrying a sample. The transfer device is used to transfer the sample into the sample slot;

[0009] Wherein, in the first state, a part of the projection of the pressing claw on the plane where the bottom surface of the sample slot is located coincides with the bottom surface of the sample slot, and the abutting rod is separated from the pressing claw; in the second state, the abutting rod abuts against the pressing claw, and the projection of the pressing claw on the plane where the bottom surface of the sample slot is located is separated from the bottom surface of the sample slot.

[0010] In one or more embodiments of the present invention, the pressing claw includes a clamping portion, an abutting portion and a connecting portion which are connected to each other. The connecting portion is rotatably connected to the tray. In a first state, at least a part of the projection of the clamping portion on the plane where the bottom surface of the sample groove is located coincides with the bottom surface of the sample groove. In a second state, an abutting rod of the transfer device abuts against the abutting portion.

[0011] In one or more embodiments of the present invention, the locking mechanism further includes an elastic member, and the elastic member is used to drive the pressing claw to tightly abut against the top surface of the sample.

[0012] In one or more embodiments of the present invention, an avoidance hole is further provided on the tray. In the second state, the abutting rod and the pressing claw are partially located in the avoidance hole.

[0013] In one or more embodiments of the present invention, a protrusion is provided on the top surface of the tray. The sample groove is arranged on the protrusion, and the protrusion is provided with a first notch and a second notch which are communicated with the sample groove.

[0014] In one or more embodiments of the present invention, the carrying mechanism includes a driving motor, a transmission assembly and a plurality of pawls arranged at intervals; the pawls are connected to the driving motor through the transmission assembly;

[0015] Wherein, the driving motor drives the plurality of pawls to approach or separate from each other through the transmission assembly to carry or release the sample.

[0016] In one or more embodiments of the present invention, a receiving groove is further provided on the tray. The receiving groove is communicated with the sample groove and the second notch, and a part of the receiving groove is opened on the bottom surface of the sample groove.

[0017] In one or more embodiments of the present invention, the pawl includes a lifting portion for carrying the sample, the receiving groove is used to receive the lifting portion, and the distance between the bottom surface of the receiving groove and the bottom surface of the sample groove is greater than or equal to the thickness of the lifting portion.

[0018] An embodiment of the present invention provides a sample tray adapted to a transfer device. The sample tray includes a tray and a locking mechanism. A sample groove is provided on the top surface of the tray. The locking mechanism includes a pressing claw which is rotatably installed on the tray and is used to tightly abut against the top surface of the sample placed in the sample groove;

[0019] In the first state, a part of the projection of the pressing claw on the plane where the bottom surface of the sample groove is located coincides with the bottom surface of the sample groove, and the pressing claw is separated from the abutting rod in the transfer device; in the second state, the pressing claw abuts against the abutting rod in the transfer device, and the projection of the pressing claw on the plane where the bottom surface of the sample groove in the sample holder is located is separated from the bottom surface of the sample groove.

[0020] An embodiment of the present invention provides a transfer device adapted to a sample holder. The transfer device includes an abutting rod and a carrying mechanism for carrying a sample. The transfer device is used to transfer the sample into a sample groove in the sample holder.

[0021] Wherein, in the second state, the abutting rod abuts against the pressing claw in the sample holder, so that the projection of the pressing claw in the sample holder on the plane where the bottom surface of the sample groove in the sample holder is located is separated from the bottom surface of the sample groove.

[0022] Compared with the prior art, in the vacuum interconnection system according to the embodiment of the present invention, the sample is transferred into the sample groove through the transfer device, and through the cooperation of the abutting rod and the locking mechanism, the fixing effect on the sample is realized, and the sample is stably fixed in the sample groove. Description of the Drawings

[0023] Figure 1 is a schematic diagram of the vacuum interconnection system in the first state according to an embodiment of the present invention;

[0024] Figure 2 is a schematic diagram of the sample holder according to an embodiment of the present invention;

[0025] Figure 3 is a schematic diagram of the locking mechanism according to an embodiment of the present invention;

[0026] Figure 4 is a schematic diagram of the transfer device according to an embodiment of the present invention;

[0027] Figure 5 is a partial sectional view of the carrying mechanism according to an embodiment of the present invention;

[0028] Figure 6 is a schematic diagram of the vacuum interconnection system during the switching process from the first state to the second state according to an embodiment of the present invention;

[0029] Figure 7 is a schematic diagram of the vacuum interconnection system in the second state according to an embodiment of the present invention.

[0030] Description of the Main Reference Numerals:

[0031] 1. Sample holder; 11. Tray; 111. Sample slot; 112. Avoidance hole; 113. Protrusion; 1131. First notch; 1132. Second notch; 114. Receiving groove; 115. Connecting seat; 12. Locking mechanism; 121. Pressing claw; 1211. Clamping part; 1212. Abutting part; 1213. Connecting part; 122. Elastic member; 2. Transfer device; 21. Abutting rod; 22. Carrying mechanism; 221. Driving motor; 222. Transmission assembly; 2221. Double-headed bolt; 2222. Gear set; 223. Supporting claw; 2231. Lifting part; 224. Carrying seat; 2241. Bearing; 2242. Chute; 3. Sample. Detailed implementation manners

[0032] The following combines the accompanying drawings to describe the detailed implementation manners of the present invention in detail, but it should be understood that the protection scope of the present invention is not limited by the detailed implementation manners.

[0033] Unless otherwise clearly stated, throughout the specification and claims, the term "comprise" or its variations such as "comprising" or "including" etc. will be understood to include the stated elements or components, without excluding other elements or other components.

[0034] As described in the background art, a magnetic force-driven sample transfer cart is arranged in the vacuum pipeline of the nano vacuum interconnection experimental station to transfer samples from one device to another, so that the transfer of the samples to be studied between devices will not expose to the atmosphere and introduce pollution. The vacuum interconnection system of the present invention is used to receive and fix the samples transferred from the transfer cart.

[0035] As Figures 1 to 7 shown, the vacuum interconnection system according to a preferred embodiment of the present invention includes a sample holder 1 and a transfer device 2; the sample holder 1 includes a tray 11 and a locking mechanism 12. The top surface of the tray 11 is provided with a sample slot 111. The locking mechanism 12 includes a pressing claw 121. The pressing claw 121 is rotatably installed on the tray 11 and is used to abut against the top surface of the sample 3 placed in the sample slot 111; the transfer device 2 includes an abutting rod 21 and a carrying mechanism 22 for carrying the sample 3. The transfer device 2 is used to transfer the sample 3 into the sample slot 111.

[0036] Among them, as Figure 1 and 2 shown, in the first state, a part of the projection of the pressing claw 121 on the plane where the bottom surface of the sample slot 111 is located coincides with the bottom surface of the sample slot 111, and the abutting rod 21 is separated from the pressing claw 121. As Figure 7 shown, in the second state, the abutting rod 21 abuts against the pressing claw 121, and the projection of the pressing claw 121 on the plane where the bottom surface of the sample slot 111 is located is separated from the bottom surface of the sample slot 111.

[0037] As Figure 1 , 6 and as shown in Fig. 7, it can be understood that the transfer device 2 can approach or move away from the sample holder 1 in the first direction. During the process of the transfer device 2 approaching the sample holder 1 in the first direction, the abutting rod 21 first abuts against the clamping jaw 121 and causes the clamping jaw 121 to rotate until the projection of the clamping jaw 121 on the plane where the bottom surface of the sample groove 111 is located is separated from the bottom surface of the sample groove 111. Then, the transfer device 2 continues to approach the sample holder 1 in the first direction until the sample 3 on the transfer device 2 is placed into the sample groove 111. Then, the carrying mechanism 22 releases the sample 3, and the transfer device 2 moves away from the sample holder 1 in the first direction. When the transfer device 2 moves away from the sample holder 1 in the first direction, the relative position between the abutting rod 21 and the clamping jaw 121 gradually changes, and the clamping jaw 121 rotates in the direction of pressing the sample 3 until the clamping jaw 121 presses the sample 3 tightly in the sample groove 111 and the transfer device 2 is completely separated from the tray 11.

[0038] In a specific embodiment, the clamping jaw 121 includes a clamping portion 1211, an abutting portion 1212 and a connecting portion 1213 which are connected. The connecting portion 1213 is rotatably connected to the tray 11. In the first state, at least part of the projection of the clamping portion 1211 on the plane where the bottom surface of the sample groove 111 is located coincides with the bottom surface of the sample groove 111. In the second state, the abutting rod 21 of the transfer device 2 abuts against the abutting portion 1212.

[0039] It can be understood that, as Figure 2 and 3 shown, the volume of the clamping portion 1211 on the clamping jaw 121 is larger than the volume of the abutting portion 1212. It can be considered that the weight of the clamping portion 1211 is greater than the weight of the abutting portion 1212. That is, taking the axis of the rotation process of the clamping jaw 121 as the dividing line, the center of gravity of the clamping jaw 121 should be located on the side of the clamping portion 1211. Therefore, when the relative position between the abutting rod 21 and the clamping jaw 121 gradually changes, the clamping jaw 121 rotates in the direction of pressing the sample 3.

[0040] A connecting seat 115 can be provided on the tray 11, and the connecting portion 1213 is rotatably inserted into the connecting seat 115. As Figure 2 and 3 shown, a connecting portion 1213 is provided at each end of the clamping portion 1211, so as to play a role in rotatably mounting the clamping jaw 121 on the tray 11.

[0041] Further, the locking mechanism 12 further includes an elastic member 122, and the elastic member 122 is used to drive the pressing claw 121 to abut against the top surface of the sample 3. That is, when the transfer device 2 approaches the sample holder 1 along the first direction, the abutting rod 21 first abuts against the pressing claw 121 and causes the pressing claw 121 to rotate. At this time, the elastic member 122 will be in an elastically deformed state, thus having a tendency to drive the pressing claw 121 to recover, and driving the pressing claw 121 to return to the state when it is not in contact with the abutting rod 21.

[0042] Specifically, the elastic member 122 can be a spring, which is installed between the pressing claw 121 and the tray 11. For example, a compression spring is installed between the abutting portion 1212 and the tray 11; or, a tension spring is installed between the clamping portion 1211 and the tray 11; or, a torsion spring (twisting spring) is sleeved on the connecting portion 1213, and the two ends of the torsion spring can be respectively connected to or abutted against the pressing claw 121 and the tray 11.

[0043] In a specific embodiment, the tray 11 is further provided with an avoidance hole 112. In the second state, a part of the abutting rod 21 and the pressing claw 121 is located in the avoidance hole 112. The avoidance hole 112 provides space for the abutting rod 21 and the pressing claw 121 during movement.

[0044] In a specific embodiment, the top surface of the tray 11 is provided with a protrusion 113, the sample groove 111 is arranged on the protrusion 113, and the protrusion 113 is provided with a first notch 1131 and a second notch 1132 that communicate with the sample groove 111. Among them, the first notch 1131 is for facilitating the pressing claw 121 to extend into the sample groove 111. That is, in the first state, a part of the pressing claw 121 is located in the first notch 1131. The second notch 1132 is for facilitating the transfer device 2 to place the sample 3 into the sample groove 111, and can be considered to play a role of avoiding and / or accommodating part of the transfer device 2.

[0045] In a specific embodiment, the carrying mechanism 22 includes a driving motor 221, a transmission assembly 222, and a plurality of spaced-apart pawls 223; the pawls 223 are connected to the driving motor 221 through the transmission assembly 222; wherein, the driving motor 221 drives the plurality of pawls 223 to approach or move away from each other through the transmission assembly 222 to carry or release the sample 3.

[0046] It can be understood that the carrying mechanism 22 can be arranged directly above the tray 11, that is, the carrying mechanism 22 can be arranged directly above the tray 11 along the first direction. The first direction can be perpendicular to the plane where the bottom surface of the sample groove 111 is located, or can be slightly inclined at an appropriate degree and not perpendicular to the plane where the bottom surface of the sample groove 111 is located.

[0047] It should be noted that, as described in the background art, in the nano-vacuum interconnection experimental station, a magnetic rod can be used to control the sample fork to remove the sample 3 from the transfer trolley and place the sample 3 on the pawls 223 of the bearing mechanism 22. The multiple pawls 223 support the sample 3 from the bottom of the sample 3 and restrict the sample 3 in the horizontal direction of the sample 3, thereby serving to bear the sample 3.

[0048] Specifically, the bearing mechanism 22 includes a bearing seat 224, and a driving motor 221, a transmission component 222, and multiple pawls 223 arranged at intervals are all installed on the bearing seat 224. Among them, as Figure 5 shown, the driving motor 221 and the transmission component 222 can be both installed inside the bearing seat 224.

[0049] Furthermore, a receiving groove 114 is also provided on the tray 11. The receiving groove 114 is communicated with the sample groove 111 and the second notch 1132, and a part of the receiving groove 114 is opened on the bottom surface of the sample groove 111. The receiving groove 114 serves to receive the pawls 223 in the second state, so that the pawls 223 can place the sample 3 in the sample groove 111 along the first direction.

[0050] Furthermore, the pawl 223 includes a lifting part 2231 for bearing the sample 3. The receiving groove 114 is used to receive the lifting part 2231, and the distance between the bottom surface of the receiving groove 114 and the bottom surface of the sample groove 111 is greater than or equal to the thickness of the lifting part 2231. With such a setting, it is to place the sample 3 on the bottom surface of the sample groove 111 along the first direction by the pawl 223, and then increase the distance between the multiple pawls 223, so that the projection of the lifting part 2231 on the bottom surface of the sample groove 111 is separated from the bottom surface of the sample groove 111, and then control the entire transfer device 2 to move away from the tray 11 along the first direction, avoiding the pawl 223 touching the sample 3 in the sample groove 111 during the process of the pawl 223 withdrawing from the receiving groove 114 and moving away from the tray 11.

[0051] In a specific embodiment, the transmission component 222 can include a double-headed bolt 2221 and a gear set 2222. The double-headed bolt 2221 has no thread in the middle, and external threads with opposite thread directions are provided at both ends. The external threads at both ends of the double-headed bolt 2221 are respectively threadedly connected to a pawl 223. One gear in the gear set 2222 is fixedly installed at the output end of the driving motor 221, and the other gear is fixedly sleeved on the middle of the double-headed bolt 2221. A sliding groove 2242 is provided on the bearing seat 224. The middle of the transmission component 222 can be rotatably installed in the sliding groove 2242 through a bearing 2241 (fixedly installed in the sliding groove 2242) or other structures, and the part of the pawl 223 located in the sliding groove 2242 is threadedly connected to the double-headed bolt 2221. With such a setting, it serves to control the multiple pawls 223 to approach or move away from each other.

[0052] In other embodiments, the transmission assembly 222 may further include an electric slider (not shown in the figure) installed in the chute 2242. The gripper 223 is connected to the electric slider, and the drive motor 221 is configured to control the electric slider to move along the extending direction of the chute 2242, so as to control the multiple grippers 223 to approach or move away from each other.

[0053] In the embodiments such as Figure 4 and 5 shown, the functions of carrying and releasing the sample 3 can be achieved through the cooperation of the drive motor 221, the transmission assembly 222, and the gripper 223. In other embodiments, the carrying mechanism 22 may further include a robotic arm, and the end of the robotic arm is provided with an electric gripper, so as to clamp and release the sample 3.

[0054] In a specific embodiment, the vacuum interconnection system further includes a drive mechanism (not shown in the figure), and the drive mechanism is configured to drive the transfer device 2 to approach or move away from the sample holder 1 along the first direction.

[0055] Specifically, the drive mechanism may include a motor, a lead screw assembly extending along the first direction, and a slide rail. The lead screw assembly includes a lead screw and a slider connected by a thread. The slider is slidably connected to the slide rail, and the carrier seat 224 is connected to the slider, so as to achieve the function of driving the transfer device 2 to approach or move away from the sample holder 1 along the first direction.

[0056] In other embodiments, the drive mechanism may further include a connected motor and an electric slider (not shown in the figure). The carrier seat 224 is connected to the electric slider, so as to achieve the function of driving the transfer device 2 to approach or move away from the sample holder 1 along the first direction.

[0057] In addition, the drive mechanism may also be other mechanisms available on the market, as long as it can drive the transfer device 2 to approach or move away from the sample holder 1 along the first direction.

[0058] In a specific embodiment, the vacuum interconnection system further includes a sample stage, a photographing mechanism, and a controller (not shown in the figure); the sample stage has a movable mounting seat, and the sample holder 1 is mounted on the mounting seat; the photographing mechanism is configured to photograph the sample stage on which the sample 3 is placed; the controller is electrically connected to the photographing mechanism and the sample stage, and is configured to receive the image from the photographing mechanism and control the rotation of the mounting seat. With such a setting, when the sample 3 is fixedly placed in the sample slot 111, the photographing mechanism photographs the image of the sample stage on which the sample 3 is placed, and the controller calculates the offset angle of the sample 3 (such as the offset angle of the positioning edge of a 2-inch wafer) according to the image sent by the photographing mechanism, and the control device controls the rotation of the sample stage, so as to correct the offset angle.

[0059] The foregoing description of the specific exemplary embodiments of the present invention is for purposes of illustration and exemplification. These descriptions are not intended to limit the invention to the precise forms disclosed, and it is apparent that many modifications and variations are possible in light of the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical applications, so that those skilled in the art can implement and utilize the various different exemplary embodiments of the present invention, as well as various different selections and modifications. The scope of the present invention is intended to be defined by the claims and their equivalents.

Claims

1. A vacuum interconnection system, characterized in that, it includes: A sample holder, including a tray and a locking mechanism. The top surface of the tray is provided with a sample groove. The locking mechanism includes a clamping claw. The clamping claw is rotatably installed on the tray and is used to abut against the top surface of the sample placed in the sample groove; A transfer device, including an abutting rod and a carrying mechanism for carrying a sample. The transfer device is used to transfer the sample into the sample groove; Wherein, in the first state, a part of the projection of the clamping claw on the plane where the bottom surface of the sample groove is located coincides with the bottom surface of the sample groove, and the abutting rod is separated from the clamping claw; in the second state, the abutting rod abuts against the clamping claw, and the projection of the clamping claw on the plane where the bottom surface of the sample groove is located is separated from the bottom surface of the sample groove.

2. The vacuum interconnection system according to claim 1, characterized in that, The clamping claw includes a clamping part, an abutting part and a connecting part connected to each other. The connecting part is rotatably connected to the tray. In the first state, at least a part of the projection of the clamping part on the plane where the bottom surface of the sample groove is located coincides with the bottom surface of the sample groove. In the second state, the abutting rod of the transfer device abuts against the abutting part.

3. The vacuum interconnection system according to claim 1, characterized in that, The locking mechanism further includes an elastic member, and the elastic member is used to drive the clamping claw to abut against the top surface of the sample.

4. The vacuum interconnection system according to claim 1, characterized in that, The tray is further provided with an avoidance hole. In the second state, a part of the abutting rod and the clamping claw is located in the avoidance hole.

5. The vacuum interconnection system according to claim 1, characterized in that, The top surface of the tray is provided with a protrusion. The sample groove is arranged on the protrusion. The protrusion is provided with a first notch and a second notch communicating with the sample groove.

6. The vacuum interconnection system according to claim 1, characterized in that, The carrying mechanism includes a driving motor, a transmission assembly and a plurality of spaced-apart holding claws; the holding claws are connected to the driving motor through the transmission assembly; Wherein, the driving motor drives the plurality of holding claws to approach or separate from each other through the transmission assembly to carry or release the sample.

7. The vacuum interconnection system according to claim 6, characterized in that, The tray is further provided with a receiving groove. The receiving groove communicates with the sample groove and the second notch, and a part of the receiving groove is opened on the bottom surface of the sample groove.

8. The vacuum interconnection system according to claim 7, characterized in that, The holding claw includes a lifting part for carrying the sample. The receiving groove is used to receive the lifting part. The distance between the bottom surface of the receiving groove and the bottom surface of the sample groove is greater than or equal to the thickness of the lifting part.

9. A sample holder adapted to a transfer device, characterized in that, The sample holder includes a tray and a locking mechanism. The top surface of the tray is provided with a sample groove. The locking mechanism includes a clamping claw. The clamping claw is rotatably installed on the tray and is used to abut against the top surface of the sample placed in the sample groove; In the first state, a part of the projection of the clamping jaw on the plane where the bottom surface of the sample slot is located coincides with the bottom surface of the sample slot, and the clamping jaw is separated from the abutting rod in the transfer device; in the second state, the clamping jaw abuts against the abutting rod in the transfer device, and the projection of the clamping jaw on the plane where the bottom surface of the sample slot is located is separated from the bottom surface of the sample slot.

10. A transfer device adapted to a sample carrier Characterized in that The transfer device includes an abutting rod and a carrying mechanism for carrying a sample, and the transfer device is used to transfer the sample into a sample slot in the sample carrier; Wherein, in the second state, the abutting rod abuts against the clamping jaw in the sample carrier, so that the projection of the clamping jaw in the sample carrier on the plane where the bottom surface of the sample slot in the sample carrier is located is separated from the bottom surface of the sample slot.

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