Integrated proximity-contact full-range sensing sensor and control method

Abstract

The invention provides an integrated proximity-contact full-range sensing sensor and a control method, and relates to the technical field of surgical robot sensing, and the sensor comprises an ultrasonic sensor, a capacitive sensor and a triboelectric tactile sensor. Wherein the ultrasonic sensor is used for realizing proximity sensing in a first distance range; the capacitance sensor is used for realizing proximity sensing in a second distance range; the triboelectric tactile sensor is used for realizing contact perception; the ultrasonic sensor, the capacitive sensor and the triboelectric tactile sensor are integrated on the flexible printed circuit board to form an integrated structure. The sensor has the advantages of capability of realizing multi-level accurate sensing, elimination of detection blind areas, small size, easiness in integration, no signal crosstalk among different sensors, high space utilization rate, high integration level and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of surgical robot perception, and particularly to an integrated proximity-contact full-range perception sensor and a control method thereof. Background Art

[0002] Minimally invasive surgical robots have performed excellently in the modern medical field, especially showing significant advantages in improving surgical precision, reducing patient trauma, and accelerating postoperative recovery. However, despite the remarkable progress made by minimally invasive surgical robots in visual feedback and mechanical operation, their deficiencies in perception ability still remain one of the important bottlenecks restricting their wide application and further development. Currently, the vast majority of surgical robots mainly rely on visual feedback for operation. Although visual feedback can provide surgical assistance to doctors to a certain extent, its limitations are obvious when dealing with complex or low-visibility anatomical environments. Especially in narrow and complex anatomical structures, it is difficult for the robot to accurately judge its distance from the vulnerable tissue, increasing the risk during operation.

[0003] During the operation, surgical robots lack the ability of proximity and contact perception, which easily leads to damage or scratching of patient tissues by the robot instruments. This problem is particularly prominent in minimally invasive surgery because the operation space in minimally invasive surgery is narrow and the distance between the surgical instruments and the surrounding tissues is very close. Any slight operation error may cause irreversible damage to the patient. Although existing sensor technologies can provide proximity or contact perception to a certain extent, there are still many deficiencies.

[0004] Currently, the mainstream sensors used to improve the proximity and contact perception ability of robots include force sensors, ultrasonic sensors, capacitive sensors, piezoelectric sensors, and fiber optic sensors, etc. However, these sensors have the following problems in practical applications:

[0005] Force sensor: It is mainly used to detect the force generated when the outer wall of the surgical robot instrument contacts the tissue and can provide real-time feedback of contact force information. However, the force sensor can only provide feedback when physical contact occurs and cannot perform distance measurement, resulting in potential damage to the tissue by the robot instrument before the tactile feedback is transmitted.

[0006] Ultrasonic sensor: It uses the reflection of ultrasonic waves to detect the distance and contact situation between the outer wall of the robot and the tissue. Although the ultrasonic sensor can provide accurate distance feedback under non-contact conditions, its measurement accuracy significantly decreases at extremely close distances and it cannot achieve contact perception. In addition, the ultrasonic sensor is relatively large in size and difficult to be integrated into minimally invasive surgical robots.

[0007] Capacitive sensor: It detects the contact between the robotic instrument and the tissue by measuring the change in capacitance. Capacitive sensors perform excellently in close-range sensing with extremely high sensitivity. However, their detection accuracy decreases significantly with increasing distance, limiting their application in long-range sensing.

[0008] Piezoelectric sensor: Utilizing the property of piezoelectric materials to generate charges when compressed or stressed, it can detect the tiny contact force between the outer wall of the surgical robot and the tissue. However, piezoelectric sensors are sensitive to temperature and humidity and require high-precision circuits for signal processing, with complex designs and high costs.

[0009] Fiber optic sensor: It detects the contact force by using the change in the optical signal in the optical fiber, with the advantage of strong anti-electromagnetic interference ability. However, fiber optic sensors are vulnerable to the light source and have extremely high requirements for installation accuracy, increasing the difficulty of practical applications.

[0010] In summary, the existing sensor technologies have many limitations in the application of minimally invasive surgical robots, especially in proximity and contact sensing, and cannot meet the requirements of surgical robots for high-precision and full-range sensing. Therefore, there is an urgent need for a sensor that can achieve long-range, short-range, and full-range contact sensing to improve the operating accuracy and safety of surgical robots, reduce surgical risks, and promote the further development of minimally invasive surgery. Summary of the Invention

[0011] To this end, the embodiments of the present invention provide an integrated proximity-contact full-range sensing sensor and control method to solve the problems of long-range and short-range sensing blind areas, signal interference, and insufficient operating safety in the prior art due to the single function, large volume, and low integration degree of sensors in minimally invasive surgical robots.

[0012] To solve the above problems, the embodiments of the present invention provide an integrated proximity-contact full-range sensing sensor, including:

[0013] An ultrasonic sensor for achieving proximity sensing within a first distance range;

[0014] A capacitive sensor for achieving proximity sensing within a second distance range;

[0015] A triboelectric tactile sensor for achieving contact sensing;

[0016] The ultrasonic sensor, the capacitive sensor, and the triboelectric tactile sensor are integrated on a flexible printed circuit board to form an integrated structure.

[0017] Preferably, the ultrasonic sensor includes two layers of platinum electrodes, one layer of lead zirconate titanate piezoelectric layer, a silica layer, a top silicon layer and a back silicon layer. The lead zirconate titanate piezoelectric layer is sandwiched between the two layers of platinum electrodes and is used to realize the conversion between electrical energy and mechanical energy.

[0018] Preferably, the capacitive sensor includes an Ecoflex bottom layer, a liquid metal disc electrode, an Ecoflex intermediate dielectric layer, a liquid metal ring electrode and an Ecoflex top layer. The liquid metal disc electrode and the liquid metal ring electrode are separated by the dielectric layer to form a capacitive structure.

[0019] Preferably, the triboelectric tactile sensor shares an electrode with the capacitive sensor, detects the contact force through the triboelectric effect, and generates an electrical signal to reflect the contact information.

[0020] Preferably, the ultrasonic sensor adopts a transmit-receive separation design, including a transmitting end and a receiving end, which are respectively used for transmitting and receiving ultrasonic signals to reduce signal interference.

[0021] Preferably, the sensor is integrated at the end of the minimally invasive surgical robot, can real-time monitor the distance between the end of the robot and the surrounding tissues, and provide multi-level perception feedback of the first distance range, the second distance range and contact.

[0022] An embodiment of the present invention also provides a control method for an integrated proximity-contact full-range perception sensor, including:

[0023] In the first distance range, use the ultrasonic sensor to measure the distance;

[0024] In the second distance range, use the capacitive sensor to measure the distance;

[0025] In the contact range, use the triboelectric tactile sensor to detect contact;

[0026] According to the measurement results, adjust the position of the end of the robot in real time to avoid damaging the surrounding tissues.

[0027] Preferably, the first distance range is from 10 cm to 1.5 cm, and the second distance range is from 1.5 cm to 0 cm.

[0028] Preferably, the control method further includes:

[0029] When the object gradually approaches the end of the robot, first use the ultrasonic sensor to measure in the first distance range. When the distance is less than 1.5 cm, switch to the capacitive sensor to measure in the second distance range;

[0030] When the object gradually moves away from the robot end, first use the capacitive sensor to measure within the second distance range. When the distance is greater than 1.5 cm, switch to the ultrasonic sensor to measure within the first distance range.

[0031] From the above technical solutions, it can be seen that the present invention application has the following beneficial effects:

[0032] (1) Eliminate the perception blind area: Through the collaborative work of the ultrasonic sensor and the capacitive sensor, the present invention covers the full-range perception from long distance to contact, solving the functional limitations of a single sensor.

[0033] (2) Compact integration and high precision: The capacitive sensor and the triboelectric tactile sensor of the present invention adopt a common electrode design, greatly reducing the volume of the sensor. At the same time, signal crosstalk is avoided, improving the measurement accuracy and reliability.

[0034] (3) Enhance surgical safety: The multi-modal real-time feedback significantly reduces the risk of misoperation caused by insufficient perception during minimally invasive surgery, improving the surgical success rate and patient safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly describe the drawings required in the embodiments. By referring to the drawings, the features and advantages of the present invention will be more clearly understood. The drawings are schematic and should not be construed as limiting the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts. Among them:

[0036] Figure 1 Schematic diagram of an integrated proximity-contact full-range perception sensor provided in the embodiment;

[0037] Figure 2 Schematic diagram of a flexible printed circuit board in the embodiment;

[0038] Figure 3 Schematic diagram of an ultrasonic sensor in the embodiment, where (a) is a schematic diagram of an ultrasonic sensor using LCC (leadless chip carrier) packaging technology, and (b) is a schematic diagram of a sound sensor chip;

[0039] Figure 4 Schematic diagram of the ultrasonic sensor chip structure in the embodiment;

[0040] Figure 5 Integrated structure diagram of a capacitive sensor and a triboelectric contact sensor in the embodiment;

[0041] Figure 6 Manufacturing process of the capacitive sensor in the embodiment;

[0042] Figure 7 Schematic diagram of the integrated proximity-contact full-range sensing sensor attached to the surface of a minimally invasive surgical robot in the embodiment;

[0043] Figure 8 Principle diagram of distance measurement of the capacitive sensor in the embodiment;

[0044] Figure 9 Principle diagram of the triboelectric tactile sensor working in the embodiment;

[0045] Figure 10 Flowchart of a control method for an integrated proximity-contact full-range sensing sensor provided in the embodiment. Detailed implementation manners

[0046] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0047] Embodiment 1

[0048] To solve the problems of long-distance and short-distance sensing blind areas, signal interference and insufficient operation safety of minimally invasive surgical robots in the prior art due to single sensor function, large volume and low integration. As Figure 1 shown, an integrated proximity-contact full-range sensing sensor is proposed in an embodiment of the present invention. The sensor includes:

[0049] An ultrasonic sensor for realizing proximity sensing within a first distance range;

[0050] A capacitive sensor for realizing proximity sensing within a second distance range;

[0051] A triboelectric tactile sensor for realizing contact sensing;

[0052] The ultrasonic sensor, the capacitive sensor and the triboelectric tactile sensor are integrated on a flexible printed circuit board to form an integrated structure.

[0053] It can be seen from the above technical solution that the present invention is an integrated proximity-contact full-range sensing sensor, which integrates an ultrasonic sensor, a capacitive sensor and a triboelectric tactile sensor on a flexible printed circuit board to form an integrated structure. Among them, the ultrasonic sensor is responsible for proximity sensing in the first distance range, the capacitive sensor is responsible for proximity sensing in the second distance range, and the triboelectric tactile sensor is responsible for contact sensing. This technical solution has many advantages: it realizes multi-level perception of long distance, short distance and contact, eliminates blind spots in distance detection, and has high measurement accuracy; the design is simple and compact, which is easy to attach or embed on the surface of a minimally invasive surgical robot, and accurately senses distance and contact; the ultrasonic sensor is based on mechanical waves, and the capacitive-triboelectric tactile sensor is based on electrical signals. There is no signal crosstalk between the two, and the measurement is more reliable; the capacitive sensor and the triboelectric contact sensor are integrated with a common electrode, which reduces the volume of the sensor, optimizes space utilization, and improves the integration of compact scenes.

[0054] The integrated proximity-contact full-range sensing sensor of the present invention is composed of an ultrasonic sensor, a capacitive sensor, and a triboelectric tactile sensor. The ultrasonic sensor is used for long-distance proximity sensing (10 cm to 1.5 cm), the capacitive sensor is used for short-distance proximity sensing (1.5 cm to 0 cm), and the triboelectric tactile sensor is used for contact sensing. In order to achieve a compact integrated design, these three types of sensors are integrated in Figure 2 The flexible printed circuit board is shown in FIG. The flexible printed circuit board is mainly arranged with metal pads and leads, and its function is to establish electrical connections with various sensors to achieve effective signal collection.

[0055] Figure 3 (a) is a schematic diagram of an ultrasonic sensor using LCC (leadless chip carrier) packaging technology. Figure 3 (b) is a schematic diagram of an ultrasonic sensor chip. The size of the ultrasonic sensor chip is 1.2×1.2mm, and the main six-layer structure is as follows: Figure 4 The exploded diagram on the right shows two layers of platinum (Pt) electrodes, a layer of lead zirconate titanate (PZT) piezoelectric layer, a silicon dioxide layer, a top silicon layer and a back silicon layer. Among them, the lead zirconate titanate (PZT) piezoelectric layer sandwiched between the two layers of platinum (Pt) electrodes is its main functional component. Based on the piezoelectric effect, the PZT piezoelectric layer can effectively realize the mutual conversion of electrical energy and mechanical energy, thereby achieving the generation and detection of ultrasonic waves, and this layer has a high receiving sensitivity. Figure 4 The lower left is a cross-sectional view of the ultrasonic sensor structure. The white hole in the middle of the ultrasonic sensor chip is the package exhaust hole, which connects the internal cavity of the chip with the atmosphere, allowing the film to vibrate and sense vibration signals under the excitation of sound waves. The aluminum layer in the figure is used as an electrode layer to achieve electrical connection. Silicon nitride is used as a barrier layer, mainly to provide insulation protection for the electrode and prevent dust and water vapor from damaging the electrode.

[0056] Since the ultrasonic sensor chip needs to be encapsulated and protected and lead wires need to be led out to read signals, the LCC package is adopted. The LCC package is a leadless chip carrier packaging technology. After encapsulation, two metal electrodes are provided at the bottom of the ultrasonic chip. Welding it to the metal pads on the flexible printed circuit board can achieve electrical connection. The size of the encapsulated ultrasonic chip is 2.8 mm × 2.8 mm. In view of the fact that when a single ultrasonic sensor simultaneously performs the tasks of transmitting and receiving signals, the transmitted ultrasonic signal may interfere with the received reflected signal, resulting in measurement errors. Therefore, a transmit-receive separation design is adopted, that is, one ultrasonic sensor is used as the transmitter and the other as the receiver respectively. Due to the spacing between the two ultrasonic sensors, the propagation distance of the ultrasonic wave is not twice the distance between the obstacle and the sensor, and the influence of this spacing needs to be considered. The calculation formula for the ultrasonic wave propagation distance l is where L is the spacing between the two ultrasonic sensors, D is the distance between the obstacle and the ultrasonic sensor, v is the speed of sound, and t is the flight time. By transforming this formula, the distance between the obstacle and the sensor can be obtained

[0057] The ultrasonic sensor adopts micro-nano manufacturing technology. First, a platinum bottom electrode layer, a PZT piezoelectric layer, and a platinum top electrode layer are deposited on the SOI wafer with a cavity. The platinum top electrode layer is patterned by dry etching. Subsequently, silicon nitride is deposited, and the PZT piezoelectric layer is etched to open the electrode connection path. Then, an aluminum layer is deposited to form leads to achieve electrical connection. Finally, etching holes are formed through the etching process to connect the cavity with the atmosphere, enabling the diaphragm to vibrate under the excitation of sound waves.

[0058] Since the measurement error of the ultrasonic sensor increases gradually as the measurement distance decreases when measuring an object, it is impossible to achieve short-distance and contact sensing. Therefore, the present invention designs an integrated capacitive sensor and triboelectric contact sensor, and the overall structure is as shown in Figure 5 shown. Among them, the triboelectric tactile sensor and the capacitive sensor share electrodes. It realizes contact sensing through the triboelectric effect and reflects contact information by generating electrical signals..

[0059] Furthermore, the capacitive sensor is composed of an Ecoflex bottom layer, a liquid metal disc electrode, an Ecoflex intermediate dielectric layer, a liquid metal ring electrode, and an Ecoflex top layer. The manufacturing process of the capacitive sensor is as shown in Figure 6Shown as follows: First, apply an Ecoflex bottom layer with a thickness of 200 μm on the mold; then, apply a liquid metal disc electrode with a diameter of 2 mm through the circular hole of the mold, and connect a metal wire to this electrode; subsequently, apply Ecoflex with a thickness of 200 μm again above the liquid metal disc electrode as the intermediate dielectric layer; after that, use the hole with a diameter of 5 mm and the metal circular disc with a diameter of 3 mm in the mold to apply a liquid metal ring electrode on the intermediate dielectric layer and connect a metal wire; finally, apply Ecoflex with a thickness of 200 μm as the top layer encapsulation.

[0060] The triboelectric sensor and the capacitive sensor adopt an integrated integration method, and its manufacturing process is the first three steps of the capacitive sensor manufacturing process. This integrated design can achieve close proximity detection and contact detection, effectively making up for the defects that the ultrasonic sensor has reduced accuracy and cannot sense contact when measuring at extremely close distances.

[0061] The ultrasonic sensor, capacitive sensor and triboelectric tactile sensor of the present invention are integrated on a flexible printed circuit board and can be attached to the surface of a minimally invasive surgical robot, such as Figure 7 shown. When the end clamp of the minimally invasive surgical robot operates within human tissue, this sensor can accurately detect and feedback the long-distance, short-distance and contact states between the end of the robot and the surrounding tissue to ensure a safe distance between the robot and human tissue and provide precise safety protection in real time.

[0062] Furthermore, the principle of the present invention is as follows: The integrated proximity-contact full-range sensing sensor designed by the present invention has the ability to comprehensively sense three states: long distance, short distance and contact. In terms of the long-distance ranging function, this sensor is realized by two ultrasonic sensors respectively serving as the "transmitting" end and the "receiving" end. Among them, the working principle of the "transmitting" end ultrasonic sensor is based on the inverse piezoelectric effect. Specifically, when an alternating electric field in the vertical direction is applied to its upper and lower electrodes, the piezoelectric material will generate a lateral stress in the horizontal direction. This stress causes a stress mismatch between the piezoelectric layer and the structural layer, and then forces the film to flex at the neutral plane, causing vibration. In this process, the conversion of electrical energy - mechanical energy - acoustic energy is realized, and the vibration frequency is consistent with the frequency of the applied alternating current. The working principle of the "receiving" end ultrasonic sensor is based on the direct piezoelectric effect. When excited by an external sound wave, the piezoelectric film will undergo bending vibration, thereby converting acoustic energy into mechanical energy and then into electrical energy.

[0063] The short-distance ranging function is realized by the capacitive sensor, and its working principle is based on the sensor capacitance change mechanism. As Figure 8As shown in the figure, the capacitive sensor includes a liquid metal circular ring electrode and a disc electrode, which are separated by a dielectric layer. The disc electrode and the circular ring electrode are coupled to each other to form a vertically projected field, thereby generating a capacitance C. M When a finger (analogous to human tissue) as the third electrode approaches the disc electrode and the circular ring electrode, it will be coupled with the sensor to generate a capacitance C. F When the finger approaches the sensor, the finger, as a conductor, will change the distribution of the electric field. Part of the electric field originally concentrated between the electrodes is attracted by the finger, resulting in a weakening of the electric field intensity. This redistribution of the electric field enables the electric field coupling between the finger and the sensor (i.e., C F ) to increase, while the original capacitance of the sensor (i.e., C M ) decreases. Therefore, as the finger approaches, the capacitance value of the sensor gradually decreases. To achieve the ranging purpose of the capacitive sensor, it is necessary to record the capacitance change amounts at multiple different distances and use the quartic polynomial fitting method to obtain the functional relationship between the distance and the capacitance change amount. With the help of this relationship, the distance information can be accurately read within a short distance range.

[0064] Contact detection is responsible for the triboelectric tactile sensor, and its working mechanism is based on the triboelectric effect, as shown in Figure 9 the figure. When the surfaces of materials rub or come into contact with each other, charge separation will occur, thereby generating a potential difference. The triboelectric tactile sensor usually uses two materials with different electronegativities. During the contact or relative movement of these two materials, transfer charges will be generated on their surfaces. These charges are converted into measurable electrical signals through a specific circuit, and this electrical signal can reflect the contact information. Based on this contact information, contact feedback can be obtained to adjust the pose of the robot in real time to ensure the accuracy and safety of the robot operation.

[0065] Embodiment 2

[0066] As Figure 10 shown in the figure, the present invention provides a control method for an integrated proximity-contact full-range perception sensor, including the following steps:

[0067] Within the first distance range, use an ultrasonic sensor for distance measurement;

[0068] Within the second distance range, use a capacitive sensor for distance measurement;

[0069] Within the contact range, use a triboelectric tactile sensor for contact detection;

[0070] According to the measurement results, adjust the position of the robot end in real time to avoid damage to surrounding tissues.

[0071] Further, the first distance range is 10 cm to 1.5 cm, and the second distance range is 1.5 cm to 0 cm.

[0072] Furthermore, when the object gradually approaches the end of the robot, the ultrasonic sensor is first used to measure within the first distance range, and when the distance is less than 1.5 cm, the capacitive sensor is switched to measure within the second distance range. When the object gradually moves away from the end of the robot, the capacitive sensor is first used to measure within the second distance range, and when the distance is greater than 1.5 cm, the ultrasonic sensor is switched to measure within the first distance range.

[0073] A control method for an integrated proximity-contact full-range sensing sensor in this embodiment is used to control the aforementioned integrated proximity-contact full-range sensing sensor. Therefore, the specific implementation method of the control method for the integrated proximity-contact full-range sensing sensor can be seen in the implementation example of the integrated proximity-contact full-range sensing sensor mentioned above. In order to avoid redundancy, it will not be repeated here.

[0074] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment in combination with software and hardware. Moreover, the present application may adopt the form of a computer program product implemented in one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that include computer-usable program code.

[0075] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0076] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1The functions specified in one or more boxes. These computer program instructions can also be loaded onto a computer or other programmable data processing device, so that a series of operation steps are executed on the computer or other programmable device to generate a computer-implemented process, and thus the instructions executed on the computer or other programmable device provide for implementing in the process Figure 1 One process or more processes and / or boxes Figure 1 The steps of the functions specified in one box or more boxes.

[0077] Obviously, the above embodiments are only examples for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the present invention.

Claims

1. An integrated proximity-contact full-range sensing sensor, characterized in that: include: An ultrasonic sensor, used to achieve proximity sensing within a first distance range; A capacitive sensor for realizing proximity sensing within a second distance range; Triboelectric tactile sensors for touch sensing; The ultrasonic sensor, the capacitive sensor and the triboelectric tactile sensor are integrated on a flexible printed circuit board to form an integrated structure.

2. The integrated proximity-contact full-range sensing sensor according to claim 1, characterized in that: The ultrasonic sensor includes two layers of platinum electrodes, a lead zirconate titanate piezoelectric layer, a silicon dioxide layer, a top silicon layer and a back silicon layer. The lead zirconate titanate piezoelectric layer is sandwiched between the two layers of platinum electrodes to realize the conversion of electrical energy and mechanical energy.

3. The integrated proximity-contact full-range sensing sensor according to claim 1, characterized in that: The capacitive sensor comprises an Ecoflex bottom layer, a liquid metal disc electrode, an Ecoflex middle dielectric layer, a liquid metal ring electrode and an Ecoflex top layer. The liquid metal disc electrode and the liquid metal ring electrode are separated by a dielectric layer to form a capacitive structure.

4. The integrated proximity-contact full-range sensing sensor according to claim 1, characterized in that: The triboelectric tactile sensor shares electrodes with the capacitive sensor, detects contact force through triboelectric effect, and generates an electrical signal to reflect contact information.

5. The integrated proximity-contact full-range sensing sensor according to claim 1, characterized in that: The ultrasonic sensor adopts a separate transmitting and receiving design, including a transmitting end and a receiving end, which are respectively used for transmitting and receiving ultrasonic signals to reduce signal interference.

6. The integrated proximity-contact full-range sensing sensor according to claim 1, characterized in that: The sensor is integrated into the end of the minimally invasive surgical robot, and can monitor the distance between the end of the robot and surrounding tissues in real time, and provide multi-level perception feedback of a first distance range, a second distance range and contact.

7. A control method of the integrated proximity-contact full-range sensing sensor according to any one of claims 1 to 6, characterized in that: The following steps are involved: Within a first distance range, using an ultrasonic sensor to perform distance measurement; In the second distance range, the capacitive sensor is used to measure the distance; Within the contact range, a triboelectric tactile sensor is used for contact detection; Based on the measurement results, the position of the robot end is adjusted in real time to avoid damage to surrounding tissues.

8. The control method according to claim 7, characterized in that: The first distance ranges from 10 cm to 1.5 cm, and the second distance ranges from 1.5 cm to 0 cm.

9. The control method according to claim 7, characterized in that: The control method further comprises: When the object gradually approaches the end of the robot, the ultrasonic sensor is first used to measure within the first distance range. When the distance is less than 1.5 cm, the capacitive sensor is switched to measure within the second distance range. When the object gradually moves away from the end of the robot, the capacitive sensor is first used to measure within the second distance range. When the distance is greater than 1.5 cm, the ultrasonic sensor is switched to measure within the first distance range.

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