Dust calibration device capable of controlling humidity

Abstract

The invention discloses a dust calibration device capable of controlling humidity, comprising: a spherical cavity, the top of which is provided with a dust inlet; the bottom of the ball cavity is provided with a calibration interface and a standard interface; an air nozzle of the aerosol generator is connected to the dust inlet; the humidity generation unit comprises a pure water passage, a diluent gas passage, a mixed evaporation box and a sprayer, the pure water passage and the diluent gas passage are respectively communicated with the mixed evaporation box, and the sprayer is arranged in the spherical cavity and is communicated with the mixed evaporation box; the weighing calibration unit comprises a filter membrane sampling assembly and a flow control assembly, the filter membrane sampling assembly is arranged in the spherical cavity, and the flow control assembly is arranged outside the spherical cavity and connected with the filter membrane sampling assembly; and an openable and closable mounting opening is formed in a position, corresponding to the filter membrane sampling assembly, of the spherical cavity. According to the invention, the particle size and uniformity of dust generation can be controlled, air flows with different humidity can be generated, the high-humidity dust working condition can be truly simulated, and the calibration of the dust meter can be realized through a weighing calibration method or a comparison calibration method.

Description

Technical Field

[0001] The present invention relates to the technical field of dust calibration, and in particular to a dust calibration device capable of controlling humidity. Background Art

[0002] The scattering dust meter detects the dust concentration based on the light scattering characteristics of particulate matter, and the light scattering characteristics of particulate matter are affected by the environmental humidity. Especially when the humidity is greater than 60%, the influence of humidity on the measurement result of the light scattering dust meter cannot be ignored.

[0003] Generally, when the dust meter leaves the factory, it needs to be calibrated for factory metrology. However, it is difficult for the manufacturer to provide a working condition of high humidity and low concentration as the factory test environment, resulting in the loss of practical significance of the factory metrology calibration and affecting the effectiveness of the instrument in on-site use.

[0004] Currently, before the dust meter is tested in the laboratory environment and before leaving the factory, it is only calibrated through a dust chamber that stably generates dust. However, the calibration test does not introduce the influence of the humidity factor, and the dust chamber cannot fully simulate the special working condition of high humidity in the actual field. Generally, the influence of humidity on the operation of the instrument is only effectively discovered during the user's use test. The defect convergence time is long, and serious defects may not converge, resulting in heavy losses in R & D costs. Therefore, it is necessary to complete the simulation environment of such working conditions before leaving the factory to test the operation reliability of the equipment, rather than simply avoiding this problem on a theoretical basis. Summary of the Invention

[0005] The present invention provides a dust calibration device capable of controlling humidity to solve the above technical problems.

[0006] To achieve the above object, the technical solution adopted by the present invention is as follows:

[0007] A dust calibration device capable of controlling humidity, comprising:

[0008] A spherical cavity, the spherical cavity is a hollow sphere, and a dust inlet is provided at the top of the spherical cavity; a calibration interface and a standard interface are provided at the bottom of the spherical cavity, the calibration joint is used to connect the dust meter to be calibrated, and the standard joint is used to connect the standard dust meter;

[0009] An aerosol generator, the jet port of the aerosol generator is connected to the dust inlet;

[0010] A humidity generating unit, the humidity generating unit includes a pure water passage, a dilution gas passage, a mixing evaporation box and a sprayer. The pure water passage and the dilution gas passage are respectively communicated with the mixing evaporation box, and the sprayer is arranged in the spherical cavity and communicated with the mixing evaporation box; the pure water passage is used to introduce a small flow of constant water into the mixing evaporation box, and the dilution gas passage is used to introduce a constant flow of dilution gas into the mixing evaporation box;

[0011] A weighing and calibration unit, the weighing and calibration unit includes a filter membrane sampling assembly and a flow control assembly, the filter membrane sampling assembly is arranged inside the spherical cavity, and the flow control assembly is arranged outside the spherical cavity and connected to the filter membrane sampling assembly; an openable and closable installation port is provided at a position corresponding to the spherical cavity and the filter membrane sampling assembly.

[0012] Further, the pure water passage is sequentially provided with a water storage container, a first flow meter, a filter, and a capillary tube, and the outlet of the capillary tube is communicated with the mixing and evaporation tank.

[0013] Further, the dilution gas passage is sequentially provided with a first nitrogen cylinder and a second flow meter, and the second flow meter is located between the first nitrogen cylinder and the mixing and evaporation tank.

[0014] Further, the filter membrane sampling assembly includes a sampling fixing head and a weighing filter membrane, the sampling fixing head is fixed inside the spherical cavity, and the weighing filter membrane is placed on the sampling fixing head;

[0015] The flow control assembly includes a pump and a third flow meter, the pump is connected to the sampling fixing head through an air pipe, and the third flow meter is arranged between the pump and the sampling fixing head.

[0016] Further, it further includes a dust emission concentration adjustment unit, the dust emission concentration adjustment unit includes a laser dust sensor, a second nitrogen cylinder, and a proportional valve, the laser dust sensor is arranged inside the spherical cavity, and the laser dust sensor is electrically connected to the control terminal;

[0017] The second nitrogen cylinder is connected to the spherical cavity, and the proportional valve is connected between the second nitrogen cylinder and the spherical cavity; the proportional valve is electrically connected to the control terminal.

[0018] Further, it further includes a particulate matter cutter, and the particulate matter cutter is connected between the spherical cavity and the aerosol generator.

[0019] Further, a circular honeycomb plate is provided near the dust inlet inside the spherical cavity, the honeycomb plate is horizontally arranged, and the edge of the honeycomb plate is fixedly connected to the inner wall of the spherical cavity.

[0020] Further, a fan is also provided inside the spherical cavity, and the fan is electrically connected to the control terminal.

[0021] Further, a pressure sensor and a temperature and humidity sensor are provided inside the spherical cavity, and the pressure sensor and the temperature and humidity sensor are respectively electrically connected to the control terminal.

[0022] Further, a heating element is provided inside the mixing and evaporation tank.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The dust calibration device capable of controlling humidity disclosed by the present invention can fully avoid the loss of particulate matter and make the internal flow field more uniform by setting the dust generation chamber in a spherical shape, and can better mix the particulate matter evenly; by setting the aerosol generator connected to the spherical cavity, its gas supply interface can select different aerosol sources, so as to directly generate dust particles with the required particle size, realizing a variety of choices for the particle size range of the generated dust; through the humidity generation unit, a small flow of constant water is introduced into the mixing evaporation box through the pure water passage, and a constant flow of dilution gas is introduced into the mixing evaporation box through the dilution gas passage, and then heated and evaporated in the mixing evaporation box. By respectively controlling the flow rates of the pure water passage and the dilution gas passage, the control of humidity can be realized, and the particulate matter concentration under different humidity conditions can be manufactured; by setting a calibration interface and a standard interface at the bottom of the spherical cavity to connect the dust instrument to be calibrated and the standard dust instrument respectively, the calibrated dust instrument can be calibrated by comparing the detected concentrations of the samples taken; through the weighing calibration unit, the filter membrane sampling assembly is used for sampling, the flow control assembly controls the sampling flow rate, and the concentration is compared and calibrated by using the weighing sampling method, and then the calibrated dust instrument can be calibrated. This application can control the particle size and uniformity of the generated dust, generate air flows with different humidities, truly simulate the high-humidity dust working conditions, and calibrate the dust instrument through the weighing calibration method or the comparison calibration method. Description of the Drawings

[0025] Figure 1 is the overall structural schematic diagram of the dust calibration device capable of controlling humidity of the present invention;

[0026] Figure 2 is the top view of the honeycomb board of the present invention;

[0027] Figure 3 is the structural schematic diagram of the humidity generation unit of the present invention.

[0028] Reference Signs in the Drawings: 1 - spherical cavity, 11 - honeycomb board, 12 - fan, 13 - pressure sensor, 14 - temperature and humidity sensor, 2 - aerosol generator, 3 - standard dust instrument, 4 - dust instrument to be calibrated, 5 - pure water passage, 6 - dilution gas passage, 51 - mixing evaporation box, 52 - sprayer, 53 - water storage container, 54 - first flowmeter, 55 - filter, 56 - capillary tube, 61 - first nitrogen cylinder, 62 - second flowmeter, 71 - sampling fixing head, 72 - pump, 73 - third flowmeter, 81 - laser dust sensor, 82 - second nitrogen cylinder, 83 - proportional valve, 84 - control terminal, 9 - particulate matter cutter. Detailed Embodiments

[0029] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the embodiments and the accompanying drawings. The illustrative embodiments of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0030] Embodiment

[0031] As Figures 1-3 shown, a dust calibration device capable of controlling humidity includes:

[0032] A spherical cavity 1, the spherical cavity 1 is a hollow sphere, and a dust inlet is provided at the top of the spherical cavity 1; a calibration interface and a standard interface are provided at the bottom of the spherical cavity 1. The calibration connector is used to connect the dust analyzer 4 to be calibrated, and the standard connector is used to connect the standard dust analyzer 3;

[0033] An aerosol generator 2, the jet port of the aerosol generator 2 is connected to the dust inlet;

[0034] A humidity generating unit, the humidity generating unit includes a pure water passage 5, a dilution gas passage 6, a mixing and evaporation tank 51, and a sprayer 52. The pure water passage 5 and the dilution gas passage 6 are respectively communicated with the mixing and evaporation tank 51, and the sprayer 52 is arranged in the spherical cavity 1 and communicated with the mixing and evaporation tank 51; the pure water passage 5 is used to introduce a small flow of constant water into the mixing and evaporation tank 51, and the dilution gas passage 6 is used to introduce a constant flow of dilution gas into the mixing and evaporation tank 51;

[0035] A weighing and calibration unit, the weighing and calibration unit includes a filter membrane sampling component and a flow control component. The filter membrane sampling component is arranged inside the spherical cavity 1, and the flow control component is arranged outside the spherical cavity 1 and connected to the filter membrane sampling component; an openable and closable installation port is provided at the position of the spherical cavity 1 corresponding to the filter membrane sampling component.

[0036] Next, a dust calibration device capable of controlling humidity in the present exemplary embodiment will be further described.

[0037] In an embodiment of the present application, the above-mentioned spherical cavity 1 is a hollow sphere. Compared with general cylindrical or cuboid cabins, the sphere has neither corners nor edges, fully avoiding the loss of particulate matter at the corners. And due to the characteristic that the geometric structure of the sphere is consistent everywhere, the internal flow field can be made more uniform, so as to better mix the particulate matter evenly.

[0038] As an example, the material of the above-mentioned spherical cavity 1 is selected as acrylic, and the light transmittance can reach 93%, and there is no need to add a window for easy observation. A polyurethane-type antistatic coating can be applied to the inner wall of the spherical cavity 1 to prevent electrostatic adsorption loss of particulate matter, and the antistatic effect is not affected by humidity.

[0039] As an example, a dust inlet is provided at the top of the above-mentioned spherical cavity 1, and the dust inlet is arranged in a horn shape. The horn-shaped dust inlet enables the air flow to form a turbulent flow and enter the interior of the spherical cavity 1.

[0040] As an example, a circular honeycomb plate 11 is provided near the dust inlet inside the above-mentioned spherical cavity 1. The honeycomb plate 11 is horizontally arranged and the edge of the honeycomb plate 11 is fixedly connected to the inner wall of the spherical cavity 1. The turbulent flow diffuses through the honeycomb plate 11 to make the dust evenly diffuse inside the spherical cavity 1, which can improve the uniformity of the air flow and the dust, and the flow field loss inside the sphere is smaller and more uniform, and the uniformity and stability of the generated dust are higher.

[0041] In an embodiment of the present application, the jet port of the above-mentioned aerosol generator 2 is connected to the dust inlet, and its air supply interface is connected to an air supply source, and the airflow with particulate matter generated enters from the dust inlet. By setting the aerosol generator 2, different aerosol sources can be selected, so as to directly generate dust particles with the required particle size.

[0042] As an example, a particulate cutter 9 is also connected between the above-mentioned spherical cavity 1 and the aerosol generator 2. By selectively installing cutters with different particle sizes, the dust particle size is screened, so as to generate the required particle size to match and adapt to the calibration of dust concentration measurement under different working conditions. Cooperating with the aerosol generator 2, dust with different particle sizes can be selectively generated, realizing a wide variety of choices for the particle size range of the generated dust and a large particle size selection range.

[0043] In an embodiment of the present application, the above-mentioned humidity generating unit includes a pure water passage 5, a dilution gas passage 6, a mixing evaporation box 51 and a sprayer 52. The pure water passage 5 and the dilution gas passage 6 are respectively communicated with the mixing evaporation box 51, and the sprayer 52 is arranged inside the spherical cavity 1 and communicated with the mixing evaporation box 51; the pure water passage 5 is used to introduce a small flow of constant water into the mixing evaporation box 51, and the dilution gas passage 6 is used to introduce a constant flow of dilution gas into the mixing evaporation box 51. The two are mixed in the mixing evaporation box 51, heating and evaporating the introduced pure water and mixing it with the dilution gas to obtain an air flow with a certain water content. By controlling the flow rate of the introduced pure water and the flow rate of the dilution gas, air flows with different relative humidities can be generated, which can truly reproduce the high-humidity dust working conditions on site and test the equipment quality and R & D technical solutions during the product R & D process.

[0044] As an example, the above-mentioned pure water passage 5 is successively provided with a water storage container 53, a first flowmeter 54, a filter 55 and a capillary 56. The outlet of the capillary 56 is communicated with the mixing evaporation tank 51. The above-mentioned structures are all connected through pipe bodies. Among them, a heating element is arranged in the mixing evaporation tank 51 for heating and evaporating pure water. The heating element is connected to the control terminal 84 and can control the heating. The water storage container 53 is filled with pure water (with a conductivity of more than 2 MΩ / cm). The outflow of pure water in the water storage container 53 is controlled by the first flowmeter 54. Under the action of an external pressure, the pure water is filtered by a porous filter to remove impurities, and then introduced into the capillary 56 (a quartz tube with an inner diameter of 0.25 mm). By controlling the pressure difference of the capillary 56, a stable small flow of water supply is obtained and introduced into the mixing evaporation tank 51 for heating and evaporation.

[0045] As an example, the above-mentioned dilution gas passage 6 is successively provided with a first nitrogen cylinder 61 and a second flowmeter 62. The second flowmeter 62 is located between the first nitrogen cylinder 61 and the mixing evaporation tank 51. The first nitrogen cylinder 61 releases nitrogen, and the nitrogen flow is controlled by the second flowmeter 62. The nitrogen is introduced into the mixing evaporation tank 51 through a gas pipe and mixed with the evaporated water vapor to dilute it, so that the air flow flowing out of the mixing evaporation tank 51 contains a constant amount of water vapor.

[0046] Specifically, the humidity control principle:

[0047] According to Poiseuille's law,

[0048] In the formula: Q - fluid flow rate, u - fluid viscosity, R - pipe radius, L - pipe length, P 1 — inlet pressure, P 2 — outlet pressure.

[0049] The flow rate (Q) of the fluid is proportional to the pressure difference (P 1 -P 2 ) between the two ends of the capillary 56 and inversely proportional to the length (L). By selecting a capillary 56 with a certain length and accurately controlling the pressure difference at both ends, a stable small flow of water supply can be obtained, and then a constant humidity air flow can be obtained by diluting with a constant flow of gas. The outlet of the capillary 56 is located in the center of the air flow.

[0050] By controlling the pressure and air flow rate, air flows with different water contents can be obtained:

[0051] Water vapor content added to the air flow:

[0052] Residual water vapor content in the diluted air:

[0053] Calculation of relative humidity in the output air flow:

[0054] where: C—the water vapor content added to the air stream, g / m 3 ; △P—the pressure difference across the capillary, kPa; K—the pressure difference and water delivery flow coefficient, mg / (h·Pa); Q—the air flow rate, m 3 / h; C′—the residual water vapor content in the dilution air, g / m 3 ; P—the partial pressure of the residual water vapor in the dilution air, Pa; T—the temperature, °C; RH—the relative humidity of the output air stream, %; C 饱 —the saturated water vapor content at a certain temperature, g / m 3 . When the dilution air is dried to completely remove moisture, C′ = 0.

[0055] In an embodiment of the present application, the above weighing and calibration unit includes a filter membrane sampling assembly and a flow control assembly. The filter membrane sampling assembly is disposed inside the spherical cavity 1, and the flow control assembly is disposed outside the spherical cavity 1 and connected to the filter membrane sampling assembly; an openable and closable installation port is provided at a position corresponding to the filter membrane sampling assembly on the spherical cavity 1. The extraction flow rate of the filter membrane sampling assembly is controlled by the flow control assembly, and dust particles are collected into the filter membrane sampling assembly. It is taken out through the openable and closable installation port for weighing comparison before and after collection. By calculation, the dust concentration under different humidity conditions can be obtained, and weighing comparison calibration can be achieved.

[0056] As an example, the above filter membrane sampling assembly includes a sampling fixing head 71 and a weighing filter membrane. The sampling fixing head 71 is fixed inside the spherical cavity 1, and the weighing filter membrane is placed on the sampling fixing head 71; the above flow control assembly includes a pump 72 and a third flowmeter 73. The pump 72 is connected to the sampling fixing head 71 through an air pipe, and the third flowmeter 73 is disposed between the pump 72 and the sampling fixing head 71. The pump 72 provides suction force and controls the extraction flow rate through the third flowmeter 73, adsorbing dust particles onto the weighing filter membrane. The weighing filter membrane is weighed before sampling, and then the weighing filter membrane is taken out after sampling and weighed to obtain the weighing comparison result before and after. By calculating the weight and volume, the dust concentration under a certain humidity condition can be obtained, and thus compared with the calibrated dust meter 4 to achieve the calibration of the calibrated dust meter 4.

[0057] In an embodiment of the present application, a calibration interface and a standard interface are provided at the bottom of the above spherical cavity 1. The calibration connector is used to connect the calibrated dust meter 4, and the standard connector is used to connect the standard dust meter 3. The standard dust meter 3 is a dust meter that has been verified or calibrated and has the same or higher accuracy and sensitivity. By comparing the standard dust meter 3 and the calibrated dust meter 4, the calibrated dust meter 4 can be calibrated. Considering that the humidity is too high and the particulate matter is affected by gravity, the calibrated dust meter 4 and the standard dust meter 3 are disposed at the bottom of the spherical cavity 1, so that sampling can be carried out under the action of gravity or by adsorption sampling through the dust meter, and calibration can be quickly performed to achieve daily calibration in the laboratory.

[0058] In this application, a weighing calibration unit is set up, filter membrane sampling is configured, and the weighing sampling method is used for comparison and calibration (bench calibration method). By setting up a standard dust meter 3 for comparison, a standard dust meter 3 that has been verified or calibrated and has the same or higher accuracy and sensitivity is used to calibrate the dust meter 4 to be calibrated (comparison calibration method). The calibration of the dust meter can be achieved by simultaneously implementing the bench calibration method and the comparison calibration method.

[0059] In an embodiment of this application, it further includes a dust emission concentration adjustment unit. The above-mentioned dust emission concentration adjustment unit includes a laser dust sensor 81, a second nitrogen cylinder 82, and a proportional valve 83. The laser dust sensor 81 is arranged inside the spherical cavity 1, and the laser dust sensor 81 is electrically connected to the control terminal 84, and is used to monitor the dust value inside the spherical cavity 1 in real time and transmit the data to the control terminal 84;

[0060] The above-mentioned second nitrogen cylinder 82 is connected to the spherical cavity 1, and the proportional valve 83 is connected between the second nitrogen cylinder 82 and the spherical cavity 1; the proportional valve 83 is electrically connected to the control terminal 84. The data received by the control terminal 84 is fed back to the proportional valve 83 to adjust the opening degree, accurately control the nitrogen dilution ratio, achieve adjustable and sufficiently stable concentration, and realize the closed-loop adjustment control of the dust emission concentration.

[0061] In an embodiment of this application, a fan 12 is further arranged inside the spherical cavity 1. The fan 12 is electrically connected to the control terminal 84, and the fan 12 is located at the lower part of the spherical cavity 1 to achieve a uniform flow field.

[0062] In an embodiment of this application, a pressure sensor 13 and a temperature and humidity sensor 14 are arranged inside the spherical cavity 1. The pressure sensor 13 and the temperature and humidity sensor 14 are respectively electrically connected to the control terminal 84, and are used to detect and control the internal environmental parameters of the spherical cavity 1.

[0063] In a specific embodiment, the airflow with particulate matter generated by the aerosol generator 2 is introduced through the dust inlet at the top of the spherical cavity 1. The inlet is in a horn shape, forming a turbulent flow that diffuses through the honeycomb plate 11 to evenly disperse the dust inside the spherical cavity 1. The opening degree of the proportional valve 83 is controlled to adjust the flow rate of the introduced pure nitrogen, so as to dilute when the concentration is high inside the spherical cavity 1. A laser dust sensor 81 is disposed inside the spherical cavity, which real-time detects the dust concentration inside and transmits the concentration signal to the computer system software in real time. The system automatically controls the action of the proportional valve 83 according to the concentration deviation, and implements continuous feedback adjustment; temperature and humidity sensors 14 and pressure sensor 13 are configured inside to detect and control the internal environment parameters of the sphere; the fan 12 realizes a uniform flow field. The second flowmeter 62 in the dilution gas passage 6 controls the flow rate of pure nitrogen, and the pure water passage 5 obtains a stable low flow rate of pure water through differential pressure control by the capillary 56. The two are mixed in the mixing and evaporation box 51, the water is heated and evaporated and mixed with the dilution air flow to obtain air flows with different water contents, and the relative humidity of the air flow can be calculated according to data such as pressure, air flow rate, and temperature. The pump 72 provides suction force and controls the extraction flow rate through the third flowmeter 73, adsorbing the dust particles on the weighing filter membrane, and realizing weighing and comparison calibration under different humidity conditions. The calibrated dust meter 4 and the standard dust meter 3 are disposed at the bottom of the spherical cavity 1, and can realize the comparison and calibration of the dust meters under different humidity conditions. This application can inspect the equipment quality during the product R & D process by simulating the on-site operating conditions of the equipment; at the same time, it can verify whether the technical solution for dealing with the humidity impact during the R & D process of the equipment is reasonable, and corresponding improvements can be made.

[0064] Of course, the present invention can also have many other implementation manners. Without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding changes and deformations should all fall within the protection scope of the appended claims of the present invention.

Claims

1. A dust calibration device capable of controlling humidity, characterized in that: include: The spherical cavity is a hollow sphere, and a dust inlet is provided at the top of the spherical cavity; a calibration interface and a standard interface are provided at the bottom of the spherical cavity, the calibration interface is used to connect the calibrated dust meter, and the standard interface is used to connect the standard dust meter; an aerosol generator, wherein the jet outlet of the aerosol generator is connected to the dust inlet; A humidity generating unit, the humidity generating unit comprising a pure water passage, a dilution gas passage, a mixed evaporation box and a sprayer, the pure water passage and the dilution gas passage are respectively connected to the mixed evaporation box, the sprayer is arranged in the spherical cavity and connected to the mixed evaporation box; the pure water passage is used to pass a small flow of constant flow water into the mixed evaporation box, and the dilution gas passage is used to pass a constant flow of dilution gas into the mixed evaporation box; A weighing calibration unit, the weighing calibration unit includes a membrane sampling component and a flow control component, the membrane sampling component is arranged inside the ball cavity, and the flow control component is arranged outside the ball cavity and connected to the membrane sampling component; an openable and closable installation port is opened at the corresponding position of the ball cavity and the membrane sampling component.

2. The humidity controllable dust calibration device according to claim 1, characterized in that: The pure water passage is provided with a water storage container, a first flow meter, a filter and a capillary tube in sequence, and the outlet of the capillary tube is communicated with the mixing evaporation box.

3. The humidity controllable dust calibration device according to claim 1, characterized in that: The dilution gas passage is provided with a first nitrogen bottle and a second flow meter in sequence, and the second flow meter is located between the first nitrogen bottle and the mixing evaporation box.

4. The humidity controllable dust calibration device according to claim 1, characterized in that: The filter membrane sampling assembly comprises a sampling fixed head and a weighing filter membrane, wherein the sampling fixed head is fixed inside the spherical cavity, and the weighing filter membrane is placed on the sampling fixed head; The flow control component includes a pump and a third flow meter. The pump is connected to the sampling fixed head through an air pipe, and the third flow meter is arranged between the pump and the sampling fixed head.

5. The humidity controllable dust calibration device according to claim 1, characterized in that: It also includes a dust concentration adjustment unit, which includes a laser dust sensor, a second nitrogen bottle and a proportional valve. The laser dust sensor is arranged inside the spherical cavity, and the laser dust sensor is electrically connected to the control terminal; The second nitrogen bottle is connected to the spherical cavity, and the proportional valve is connected between the second nitrogen bottle and the spherical cavity; the proportional valve is electrically connected to the control terminal.

6. The humidity-controllable dust calibration device according to claim 1 or 5, characterized in that: It also includes a particle cutter, which is connected between the ball cavity and the aerosol generator.

7. The humidity controllable dust calibration device according to claim 1, characterized in that: A circular honeycomb panel is provided in the spherical cavity near the dust inlet, the honeycomb panel is arranged horizontally and the edge of the honeycomb panel is fixedly connected to the inner wall of the spherical cavity.

8. The dust calibration device with controllable humidity according to claim 1, characterized in that: A fan is also provided in the spherical cavity, and the fan is electrically connected to the control terminal.

9. The humidity-controllable dust calibration device according to claim 1 or 8, characterized in that: A pressure sensor and a temperature and humidity sensor are arranged in the spherical cavity, and the pressure sensor and the temperature and humidity sensor are electrically connected to the control terminal respectively.

10. The dust calibration device with controllable humidity according to claim 1, characterized in that: A heating element is arranged in the mixing evaporator box.

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