Optical fiber end face detector calibration device and manufacturing method

Abstract

The invention discloses an optical fiber end face detector calibration device and a manufacturing method, the optical fiber end face detector calibration device comprises a plurality of calibrators, each calibrator comprises a transparent substrate, the substrate is etched to form a calibration area and a view field area, the calibration area is located in the view field area, the view field area is provided with a first coating, the calibration area is provided with a simulation defect assembly, and the simulation defect assembly is provided with a second coating; the plurality of calibrators comprise a first calibrator used for calibrating measurement errors and measurement repeatability, a second calibrator used for calibrating discrimination conformity of an area where defects are located, and a third calibrator used for calibrating discrimination conformity of a view field range. The manufacturing method comprises the following steps: manufacturing the metal coating on the transparent substrate; the surface of a substrate with a metal coating is etched by adopting a laser photoetching exposure technology to form simulated defect components, the substrate is cut into target sizes to obtain calibrators, and a plurality of calibrators of different simulated defect components form the optical fiber end face detector calibration device. And the optical fiber end face detector can be accurately and efficiently calibrated.

Description

Technical Field

[0001] The present invention relates to the technical field of fiber optic detection equipment calibration, and particularly to a calibration device and manufacturing method for a fiber optic end face detector. Background Art

[0002] Surface scratches appearing on the end face of the ceramic ferrule of a fiber optic connector will change the transmission path of the optical signal, increase signal attenuation and reflection, thus affecting the transmission quality of the optical signal. Therefore, a fiber optic end face detector is often used to analyze the defects of the fiber optic end face of the fiber optic connector. The detection accuracy of the fiber optic end face detector is crucial for the defect analysis result.

[0003] However, there is currently no dedicated calibrator for checking the measurement performance of the fiber optic end face detector, and only fiber optic connection devices can be used to verify the status of the fiber optic end face detector. However, the fiber optic end face defects of the fiber optic connection devices are randomly generated, and the shape and size cannot be controlled, making it difficult to accurately determine the value, resulting in difficulty in accurately and efficiently calibrating the fiber optic end face detector. Summary of the Invention

[0004] The purpose of the present invention is to provide a calibration device for a fiber optic end face detector and a manufacturing method for the calibration device for a fiber optic end face detector, which can accurately and efficiently calibrate the fiber optic end face detector.

[0005] The technical solutions to achieve the above purpose include the following:

[0006] A calibration device for a fiber optic end face detector, comprising:

[0007] A plurality of calibrators, each calibrator including a transparent substrate, on which a calibration area and a viewing area are etched. The calibration area is located within the viewing area. The viewing area has a first coating, and the calibration area has an etched simulated defect component, and the simulated defect component has a second coating;

[0008] The plurality of calibrators include a first calibrator for calibrating measurement error and measurement repeatability, a second calibrator for calibrating the compliance of defect location discrimination, and a third calibrator for calibrating the compliance of viewing field range discrimination.

[0009] In one embodiment, the first calibrator includes a first measurement calibrator for calibrating the measurement error and measurement repeatability of the spot diameter and a second measurement calibrator for calibrating the measurement error and measurement repeatability of the scratch line width.

[0010] In one embodiment, the simulated defect component in the first measurement calibrator includes a plurality of circular blocks, and the circular blocks are imaged as circular spots in the fiber optic end face detector, and the diameter of the circular spots is one of 2μm, 3μm, 5μm, and 25μm.

[0011] In one embodiment, the analog defect components in the second measurement calibrator include a plurality of rectangular blocks, which are imaged as scratches in the optical fiber end face detector, and the width of the scratches is 3 μm or 4 μm.

[0012] In one embodiment, the second calibrator includes a first area calibrator for calibrating the discrimination compliance of the area where the scratch is located and a second area calibrator for calibrating the discrimination compliance of the area where the spot is located.

[0013] In one embodiment, the calibration area of the first area calibrator has a single-mode core area, a single-mode cladding area, a multi-mode core area, and a multi-mode cladding area. The analog defect components of the first area calibrator include at least 4 rectangular blocks. Among them, one rectangular block is distributed in the single-mode core area, the single-mode cladding area, the multi-mode core area, and the multi-mode cladding area, and is imaged as a cross-area scratch in the optical fiber end face detector; one rectangular block is distributed in the single-mode core area and is imaged as a single-mode core area scratch in the optical fiber end face detector; one rectangular block is distributed in the single-mode cladding area and the multi-mode core area and is imaged as a single-mode cladding area scratch or a multi-mode core area scratch in the optical fiber end face detector; one rectangular block is distributed in the multi-mode cladding area and is imaged as a multi-mode cladding area scratch in the optical fiber end face detector.

[0014] In one embodiment, the calibration area of the second area calibrator has a single-mode core area, a single-mode cladding area, a multi-mode core area, and a multi-mode cladding area. The analog defect components of the second area calibrator include at least 5 circular blocks. Among them, one circular block is distributed at the boundary of the single-mode core area and is imaged as a single-mode cross-area spot in the optical fiber end face detector; one circular block is distributed at the boundary of the multi-mode core area and is imaged as a multi-mode cross-area spot in the optical fiber end face detector; one circular block is distributed in the single-mode core area and is imaged as a single-mode core area spot in the optical fiber end face detector; one circular block is distributed in the single-mode cladding area and the multi-mode core area and is imaged as a single-mode cladding area spot or a multi-mode core area spot in the optical fiber end face detector; one circular block is distributed in the multi-mode cladding area and is imaged as a multi-mode cladding area spot in the optical fiber end face detector.

[0015] In one embodiment, the third calibrator is a large field-of-view calibrator, and the analog defect components in the large field-of-view calibrator include circular blocks and a plurality of triangular blocks, and the triangular blocks are distributed along the circumferential direction of the circular blocks.

[0016] In one embodiment, a standard field-of-view calibrator is further included. The standard field-of-view calibrator includes a transparent substrate, and a calibration area is etched on the substrate, and the calibration area has a third coating.

[0017] The present invention also provides a method for manufacturing an optical fiber end face detector calibration device, including:

[0018] Fabricate a metal coating on a transparent substrate;

[0019] On the surface of the substrate with the metal coating, use laser lithography exposure technology for etching to form a simulated defect component, and the simulated defect component is used to simulate the fiber end face defect of an optical fiber connector;

[0020] Cut the substrate into a target size to obtain a calibrator, and multiple calibrators with different simulated defect components constitute a calibration device for an optical fiber end face detector.

[0021] The technical solution provided by the present invention has the following advantages and effects:

[0022] Through laser lithography exposure technology, a simulated defect component is etched and formed. The simulated defect component can be used for value traceability by a scanning electron microscope, and the value is accurate. Different simulated defect components can calibrate various aspects such as the measurement error, measurement repeatability, discrimination compliance of the defect area, and discrimination compliance of the field of view of the optical fiber end face detector. Therefore, accurate and efficient calibration of the optical fiber end face detector can be achieved. Description of the Drawings

[0023] The drawings here show specific examples of the technical solution of the present invention and form a part of the description together with the specific implementation manners, and are used to explain the technical solution, principle and effects of the present invention.

[0024] Unless otherwise specified or defined, in different drawings, the same reference numerals represent the same or similar technical features, and for the same or similar technical features, different reference numerals may also be used for representation.

[0025] Figure 1 It is a schematic diagram of the base;

[0026] Figure 2 It is a schematic diagram of the first measurement calibrator in the embodiment of the present invention;

[0027] Figure 3 It is a schematic diagram of the second measurement calibrator in the embodiment of the present invention;

[0028] Figure 4 It is a schematic diagram of the first area calibrator in the embodiment of the present invention;

[0029] Figure 5 It is a schematic diagram of the second area calibrator in the embodiment of the present invention;

[0030] Figure 6 It is a schematic diagram of the large field of view calibrator in the embodiment of the present invention;

[0031] Figure 7 For Figure 6Enlarged view of area A;

[0032] Figure 8 Schematic diagram of the standard field of view calibrator in the embodiment of the present invention;

[0033] Figure 9 Flow chart of the manufacturing method of the calibration device for the optical fiber end face detector.

[0034] Explanation of reference numerals:

[0035] 10. Base,

[0036] 20. Substrate, 21. Calibration area, 211. Single-mode core area, 212. Single-mode cladding area, 213. Multi-mode core area, 214. Multi-mode cladding area, 22. Field of view area,

[0037] 30. Simulated defect component,

[0038] 40. First measurement calibrator,

[0039] 50. Second measurement calibrator,

[0040] 60. First area calibrator, 61. First rectangular block, 62. Second rectangular block, 63. Third rectangular block, 64. Fourth rectangular block,

[0041] 70. Second area calibrator, 71. First circular block, 72. Second circular block, 73. Third circular block, 74. Fourth circular block, 75. Fifth circular block,

[0042] 80. Large field of view calibrator,

[0043] 90. Standard field of view calibrator. Detailed implementation manners

[0044] For the convenience of understanding the present invention, the specific embodiments of the present invention will be described in more detail below with reference to the accompanying drawings of the specification.

[0045] Unless otherwise specified or defined, the "first, second..." used herein are only for distinguishing names and do not represent specific quantities or orders.

[0046] Unless otherwise specified or defined, the term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0047] It should be noted that when an element is considered to be "fixed to" another element, it can be directly fixed to the other element or there can be an intermediate element; when an element is considered to be "connected to" another element, it can be directly connected to the other element or there can be an intermediate element at the same time; when an element is considered to be "mounted on" another element, it can be directly mounted on the other element or there can be an intermediate element at the same time. When an element is considered to be "provided in" another element, it can be directly provided in the other element or there can be an intermediate element at the same time.

[0048] In order to calibrate the measurement performance of the optical fiber end face detector efficiently and accurately, the present invention designs a set of optical fiber end face detector calibration devices. By means of laser lithography exposure technology, different simulated defect components are etched on different substrates to form a plurality of calibrators, and then the calibrators are fixed on the base, inserted into the measurement hole of the optical fiber end face detector for measurement and calibration. Among them, the base 10 is as Figure 1 shown, made of metal, with threads at the bottom and used to fix the calibrator at the top. After the calibrator is fixed on the base, it can be fixed on the workbench of the precision instrument during traceability and value determination through the threads at the bottom, which is convenient for traceability and value determination. The optical fiber end face detector calibration device of the present invention can be used to calibrate various aspects of the measurement performance of the optical fiber end face detector, such as measurement error and measurement repeatability, discrimination compliance of the defect area, discrimination compliance of the field of view range, etc. It has the characteristics of accurate quantity value and wide measurement range.

[0049] Specifically, the optical fiber end face detector is mainly used for the appearance inspection of the ferrule of the optical fiber connector. The optical fiber connector is divided into two categories: single-core and multi-core. The ferrule of the connector has two sizes of φ2.5mm and φ1.25mm, and the material is ceramic. The optical fiber wire with a diameter of φ125μm is in the middle of the ferrule. When observing the end face with an image, the central φ125μm optical fiber area is a dark area, and the surrounding ceramic is bright white. The optical fiber end face detector is a device with an automatic measurement program. After clicking the measurement button, it will search for the φ125μm characteristic circle contour in the measurement field of view area and focus clearly, and use the center of the circle as the coordinate origin. The optical fiber end face detector identifies defects by checking the change range of the pixel contrast in the image. When there is no defect, the contrast change of each pixel in the target range is less. When the contrast change exceeds the set threshold, the pixel is set as the defect edge point.

[0050] To adapt to the above determination criteria, the present invention innovatively designs the structure of the calibrator: the main body is a transparent substrate 20 with a metal coating. On the substrate 20, a calibration area 21 and a viewing area 22 are etched through laser lithography exposure technology. The calibration area 21 is located within the viewing area 22. The viewing area 22 has a first coating (such as chromium). When the fiber end face detector images, the viewing area 22 appears bright white in the image, and the viewing area 22 corresponds to the ceramic around the connector ferrule. The calibration area 21 is a blank transparent substrate. When the fiber end face detector images, the calibration area 21 is a dark area, corresponding to the optical fiber filaments, forming a background color relative to the simulated defect components. Simulated defect components 30 are etched in the calibration area 21. The simulated defect components 30 have a second coating (such as chromium). These simulated defect components 30 can be recognized by the fiber end face detector. When the fiber end face detector images, the simulated defect components 30 appear bright white, and the change in the image pixel contrast with the background color of the calibration area 21 will exceed the set threshold. That is to say, the simulated defect components 30 correspond to the optical fiber end face defects of the optical fiber connection device.

[0051] This embodiment provides a calibration device for a fiber end face detector, which is mainly divided into three categories: a first calibrator for calibrating measurement error and measurement repeatability, a second calibrator for calibrating the compliance of defect location discrimination, and a third calibrator for calibrating the compliance of viewing field range discrimination. The shapes of the calibration areas 21 of the first calibrator and the second calibrator are both circles with a diameter of φ125μm, the background is transparent, and they appear dark in the image. The shape of the viewing area 22 is an annular ring with a diameter of φ(125 - 250)μm, chrome-plated, and appears bright white in the image. Since the standard viewing field range requirement of the fiber end face detector is not less than 250μm, the overall chrome-plated area is φ(125 - 250)μm. Various shapes of simulated defect components 30 are etched in the calibration area 21, and the surfaces of the simulated defect components 30 are chrome-plated. They are divided into corresponding categories according to the functions of the simulated defect components 30. It should be noted that when the fiber end face detector images, the thickness or height of the simulated defect components 30 will not affect the imaged image. Therefore, the thickness of the simulated defect components 30 is not considered, and only the shape of the simulated defect components 30 is considered.

[0052] Specifically, the first calibrator includes a first measurement calibrator for calibrating the measurement error and measurement repeatability of the spot diameter and a second measurement calibrator for calibrating the measurement error and measurement repeatability of the scratch line width. Thus, the measurement error and measurement repeatability are calibrated from two angles: the spot diameter and the scratch line width.

[0053] Such as Figure 2As shown, the simulated defect component 30 of the first measurement calibrator 40 includes a plurality of circular blocks. When the fiber optic end face detector images, the circular blocks are imaged as circular spots, which simulate the circular spot defects on the fiber optic end face of the fiber optic connection device. In this embodiment, there are 4 circular blocks, which are imaged as 4 circular spots, and the diameters of the circular spots are 2μm, 3μm, 5μm, and 25μm respectively. When calibrating the measurement error and measurement repeatability of the spot diameter, the first measurement calibrator fixed in the base is inserted into the measurement hole of the fiber optic end face detector. The fiber optic end face detector will automatically focus and align, and automatically measure the diameters of the 4 circular spots of φ2μm, φ3μm, φ5μm, and φ25μm at the center of the first measurement calibrator. The φ25μm circular spot is measured 10 times repeatedly, and the standard deviation is calculated as the measurement repeatability of the spot diameter of the fiber optic end face detector.

[0054] As Figure 3 shown, the simulated defect component 30 of the second measurement calibrator 50 includes a plurality of rectangular blocks. The rectangular blocks are imaged as scratches in the fiber optic end face detector, which simulate the scratch defects on the fiber optic end face of the fiber optic connection device. In this embodiment, there are 2 rectangular blocks, which are symmetrically distributed with the center of the calibration area as the center, and the widths of the scratches are 3μm or 4μm respectively. When calibrating the measurement error and measurement repeatability of the scratch line width, the second measurement calibrator fixed in the base is inserted into the measurement hole of the fiber optic end face detector. The fiber optic end face detector will automatically focus and align, and automatically measure the 3μm and 4μm scratches in the second measurement calibrator. The 4μm line width scratch is measured 10 times repeatedly, and the standard deviation is calculated as the measurement repeatability of the scratch line width of the fiber optic end face detector.

[0055] According to the relevant standards of fiber optic connectors, for single-mode fibers, the core area is centered on φ25μm, and (φ25μm to φ125μm) is the cladding area. For multi-mode fibers, the core area is centered on φ65μm, and (φ65μm to φ125μm) is the cladding area. The defect control in the core area is strict, and both the number and size of defects are strictly restricted; there is no restriction on scratches in the cladding area, and for spots, only the size is restricted, not the number. When a defect crosses the core area and the cladding area, the defect is divided according to the area, and the defect size is calculated. Therefore, the accurate determination of the area where the defect is located affects whether the product is qualified. At present, not all end face detectors can divide defects according to the area, which also needs to be checked and verified.

[0056] According to this principle, a second calibrator for calibrating the discrimination compliance of the area where the defect is located is designed in this embodiment, including a first area calibrator 60 for calibrating the discrimination compliance of the area where the scratch is located and a second area calibrator 70 for calibrating the discrimination compliance of the area where the spot is located. The calibration areas 21 of the first area calibrator 60 and the second area calibrator 70 both have a single-mode core area 211, a single-mode cladding area 212, a multimode core area 213, and a multimode cladding area 214. The single-mode core area 211 is a circular area with a diameter of φ25μm, the single-mode cladding area 212 is an annular area with a diameter ranging from φ25μm to φ125μm, the multimode core area 213 is a circular area with a diameter of φ65μm, and the multimode cladding area 214 is an annular area with a diameter ranging from φ65μm to φ125μm.

[0057] As Figure 4 shown, the simulated defect component 30 of the first area calibrator 60 includes 4 rectangular blocks. Among them, the first rectangular block 61 is distributed in the single-mode core area 211, the single-mode cladding area 212, as well as the multimode core area 213 and the multimode cladding area 214, that is, the first rectangular block 60 is long enough to extend from the single-mode core area 211 to the multimode cladding area 214, and is imaged as a cross-region scratch in the optical fiber end face detector; the second rectangular block 62 is distributed in the single-mode core area 211 and is imaged as a single-mode core area scratch in the optical fiber end face detector; the third rectangular block 63 is distributed in the single-mode cladding area 212 and the multimode core area 213, that is, this rectangular block is located in the annular area with a diameter of φ25μm to φ65μm, and is imaged as a single-mode cladding area scratch or a multimode core area scratch in the optical fiber end face detector as needed. That is, when the simulated optical fiber end face detector detects the single-mode core, it is imaged as a single-mode cladding area scratch, and when the simulated optical fiber end face detector detects the multimode core, it is imaged as a multimode core area scratch; the fourth rectangular block 64 is distributed in the multimode cladding area 214 and is imaged as a multimode cladding area scratch in the optical fiber end face detector. It should be noted that the simulated defect component 30 of the first area calibrator 60 may also include more rectangular blocks.

[0058] As Figure 5As shown, the simulated defect component 30 of the second region calibrator 70 includes five circular blocks. Among them, the first circular block 71 is distributed on the boundary of the single-mode core region 211 and forms a single-mode cross-region spot in the fiber end face detector. The second circular block 72 is distributed on the boundary of the multi-mode core region 213 and forms a multi-mode cross-region spot in the fiber end face detector. The single-mode cross-region spot and the multi-mode cross-region spot are collectively referred to as cross-region spots. The third circular block 73 is distributed in the single-mode core region 211 and forms a single-mode core region spot in the fiber end face detector. The fourth circular block 74 is distributed in the single-mode cladding region 212 and the multi-mode core region 213, that is, this circular block is located in the annular region of φ25μm to φ65μm and forms a single-mode cladding region spot or a multi-mode core region spot in the fiber end face detector as needed. That is, when the simulated fiber end face detector detects the single-mode core, it forms a single-mode cladding region spot, and when the simulated fiber end face detector detects the multi-mode core, it forms a multi-mode core region spot. The fifth circular block 75 is distributed in the multi-mode cladding region 214 and forms a multi-mode cladding region spot in the fiber end face detector. It should be noted that the simulated defect component 30 of the second region calibrator 70 may also include more circular blocks.

[0059] In order to calibrate the compliance of the field of view range discrimination, a large field of view calibrator, that is, the third calibrator, is designed in this embodiment, as Figure 6 shown. The field of view area 22 of the large field of view calibrator 80 is rectangular and its surface is chrome-plated, that is, Figure 6 the shaded part in. The size of the field of view area 22 is 6.4×2.5mm. The simulated defect component 30 of the large field of view calibrator 80 includes a circular block and four triangular blocks. As Figure 7 shown, the size of the circular block is 10μm, and the triangular blocks are distributed along the circumference of the circular block. The four triangular blocks form four prominent triangular arrows around the circular hole, and the intersection point of the arrows is the position where the circular block is located, which can quickly locate the circular block. If a complete rectangular contour can be observed in the measurement image of the fiber end face detector and a 10μm circular hole in the middle can be observed by the naked eye, that is, the field of view range ≥ (6.4×2.5)mm and the resolution < 10μm, which meets the relevant industry requirements. It should be noted that the number of triangular blocks is not limited and can also be two, three, five, etc.

[0060] For the calibration of the compliance of the field of view range discrimination, a standard field of view calibrator is also designed in this embodiment, as Figure 8 shown. The standard field of view calibrator 90 includes a transparent substrate 20, and a calibration area 21 is etched on the substrate 20. The shape of the calibration area 21 is circular with a diameter of 250μm, and the entire surface of the calibration area 21 is chrome-plated. If a complete circular contour can be observed in the measurement image of the fiber end face detector, that is, the field of view range ≥ 250μm.

[0061] Based on the above-mentioned labeler, a calibration device for a fiber optic end face detector is formed by combining multiple calibrators for different purposes, so as to calibrate the measurement error, measurement repeatability, regional discrimination compliance, and field of view range of the fiber optic end face detector. It is easy to understand that the number of calibrators specifically included in the calibration device for the fiber optic end face detector is not limited, preferably at least 6, which can achieve comprehensive calibration in various aspects such as the measurement error and measurement repeatability of the spot diameter, the measurement error and measurement repeatability of the scratch line width, the compliance of the discrimination of the area where the scratch is located, the compliance of the discrimination of the area where the spot is located, the large field of view, and the standard field of view.

[0062] It should be noted that although in this embodiment, chromium plating is used to form the first coating, the second coating, and the third coating on the substrate, it is not limited to the chromium plating method, and laser cladding technology or multi-layer composite infiltration layer process can also be used to form the coating.

[0063] To sum up, the calibration device for the fiber optic end face detector in this embodiment forms a simulated defect component through laser lithography exposure technology. The simulated defect component can be used for value traceability by a scanning electron microscope, and the value is accurate. Different simulated defect components can calibrate various aspects such as the measurement error and measurement repeatability of the fiber optic end face detector, the compliance of the discrimination of the area where the defect is located, and the compliance of the discrimination of the field of view range. Therefore, accurate and efficient calibration of the fiber optic end face detector can be achieved.

[0064] Based on the above calibration device for the fiber optic end face detector, as Figure 9 shown, this embodiment also provides a method for manufacturing a calibration device for a fiber optic end face detector, including:

[0065] Step S100: Fabricate a metal coating on a transparent substrate;

[0066] Step S200: Use laser lithography exposure technology to etch on the surface of the substrate with the metal coating to form a simulated defect component, where the simulated defect component is used to simulate the fiber end face defect of the fiber optic connector;

[0067] Step S300: Cut the substrate into a target size to obtain a calibrator, and multiple calibrators with different simulated defect components constitute the calibration device for the fiber optic end face detector.

[0068] Specifically, in this embodiment, a layer of chromium is plated on a transparent substrate. Through laser lithography exposure technology, the residual part is finally etched to form a simulated defect component. The substrate is cut into the target size and fixed on a special base, and then the fiber end face detector can be calibrated. Multiple calibrators with different simulated defect components constitute a calibration device for the fiber end face detector, which is used to calibrate various aspects such as the measurement error and measurement repeatability of the fiber end face detector, the discrimination compliance of the defect area, and the discrimination compliance of the field of view range. The size accuracy of the simulated defect component is within ±0.2μm, with high calibration accuracy; and it covers the main technical indicators of the fiber end face detector.

[0069] When referring to the drawings, new features that appear are described; in order to avoid the description being not concise enough due to repeated reference to the drawings, features that have been described are not cited one by one in the drawings when the description is clear.

[0070] The purpose of the above embodiments is to exemplarily reproduce and deduce the technical solutions of the present invention, and to completely describe the technical solutions, purposes, and effects of the present invention. The purpose is to make the public understand the disclosed content of the present invention more thoroughly and comprehensively, and it does not limit the protection scope of the present invention.

[0071] The above embodiments are not exhaustive listings based on the present invention. In addition, there may be multiple other embodiments not listed. Any substitution and improvement made on the basis of not violating the concept of the present invention fall within the protection scope of the present invention.

Claims

1. A calibration device for an optical fiber end face detector, characterized in that: include: A plurality of calibrators, each comprising a transparent substrate, a calibration area and a viewing area being etched on the substrate, the calibration area being located in the viewing area, the viewing area having a first coating, and a simulated defect component being etched in the calibration area, the simulated defect component having a second coating; The multiple calibrators include a first calibrator for calibrating measurement errors and measurement repeatability, a second calibrator for calibrating compliance of defect area determination, and a third calibrator for calibrating compliance of field of view range determination.

2. The optical fiber end face detector calibration device according to claim 1, characterized in that: The first calibrator includes a first measurement calibrator for calibrating the measurement error and measurement repeatability of the spot diameter and a second measurement calibrator for calibrating the measurement error and measurement repeatability of the scratch line width.

3. The optical fiber end face detector calibration device according to claim 2, characterized in that: The simulated defect component in the first measurement calibrator includes a plurality of circular blocks, which are imaged as circular spots in the optical fiber end face detector, and the diameter of the circular spot is one of 2 μm, 3 μm, 5 μm, and 25 μm.

4. The optical fiber end face detector calibration device according to claim 2, characterized in that: The simulated defect component in the second measurement calibrator includes a plurality of rectangular blocks, which are imaged as scratches in the optical fiber end face detector, and the width of the scratches is 3 μm or 4 μm.

5. The optical fiber end face detector calibration device according to claim 1, characterized in that: The second calibrator includes a first area calibrator for calibrating compliance of a region where a scratch is located and a second area calibrator for calibrating compliance of a region where a spot is located.

6. The optical fiber end face detector calibration device according to claim 5, characterized in that: The calibration area of ​​the first-region calibrator has a single-mode fiber core area, a single-mode cladding area, a multi-mode fiber core area and a multi-mode cladding area. The simulated defect component of the first-region calibrator includes at least 4 rectangular blocks, wherein one rectangular block is distributed in the single-mode fiber core area, the single-mode cladding area, and the multi-mode fiber core area and the multi-mode cladding area, and is imaged as a cross-region scratch in the optical fiber end face detector; one rectangular block is distributed in the single-mode fiber core area, and is imaged as a single-mode fiber core area scratch in the optical fiber end face detector; one rectangular block is distributed in the single-mode cladding area and the multi-mode fiber core area, and is imaged as a single-mode cladding area scratch or a multi-mode fiber core area scratch in the optical fiber end face detector; one rectangular block is distributed in the multi-mode cladding area, and is imaged as a multi-mode cladding area scratch in the optical fiber end face detector.

7. The optical fiber end face detector calibration device according to claim 5, characterized in that: The calibration area of ​​the second-region calibrator has a single-mode fiber core area, a single-mode fiber cladding area, a multi-mode fiber core area and a multi-mode fiber cladding area. The simulated defect component of the second-region calibrator includes at least 5 circular blocks, wherein one circular block is distributed at the boundary of the single-mode fiber core area and is imaged as a single-mode cross-region spot in the optical fiber end face detector, one circular block is distributed at the boundary of the multi-mode fiber core area and is imaged as a multi-mode cross-region spot in the optical fiber end face detector; one circular block is distributed in the single-mode fiber core area and is imaged as a single-mode fiber core area spot in the optical fiber end face detector; one circular block is distributed in the single-mode cladding area and the multi-mode fiber core area and is imaged as a single-mode cladding area spot or a multi-mode fiber core area spot in the optical fiber end face detector; one circular block is distributed in the multi-mode cladding area and is imaged as a multi-mode cladding area spot in the optical fiber end face detector.

8. The optical fiber end face detector calibration device according to claim 1, characterized in that: The third calibrator is a large-field-of-view calibrator, and the simulated defect component in the large-field-of-view calibrator includes a circular block and a plurality of triangular blocks, and the triangular blocks are distributed along the circumference of the circular block.

9. The optical fiber end face detector calibration device according to any one of claims 1 to 8, characterized in that: The device also includes a standard field of view calibrator, which includes a transparent substrate, a calibration area is etched on the substrate, and the calibration area has a third coating.

10. A method for manufacturing a calibration device for an optical fiber end face detector, characterized in that: include: Creating metallic coatings on transparent substrates; On the surface of the substrate with the metal coating, etching is performed by using laser photolithography exposure technology to form a simulated defect component, wherein the simulated defect component is used to simulate the optical fiber end face defect of the optical fiber connector; The substrate is cut into a target size to obtain a calibrator, and a plurality of calibrators with different simulated defect components constitute a calibration device for an optical fiber end face detector.

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