Grid electric leakage detection device for SiC semiconductor device

Abstract

The invention relates to the technical field of semiconductor devices, in particular to a gate electric leakage detection device for a SiC semiconductor device, which comprises a detection chamber and a conveying assembly, and is characterized in that a support frame is arranged on the inner side of the detection chamber, a sliding sleeve for detection is arranged on the inner side of the support frame, and the conveying assembly is arranged on the inner side of the sliding sleeve. A first conveying table and a second conveying table which are used for conveying SiC semiconductors are arranged on the inner side of the detection chamber, a conveying assembly used for correcting the direction of the SiC semiconductors is arranged in the detection chamber, a conveying disc used for conveying is arranged in the conveying assembly, and connecting rod assemblies used for detection are arranged on the two sides of the conveying assembly. Through conveying of the conveying disc, correction of the direction of the SiC semiconductor is completed through the conveying assembly, and meanwhile detection of the SiC semiconductor is completed through the connecting rod assembly and the sliding sleeve.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and more particularly, to a gate leakage detection device for SiC semiconductor devices. Background Art

[0002] SiC semiconductor, namely silicon carbide semiconductor, is a semiconductor material composed of silicon (Si) and carbon (C), belonging to the wide bandgap material series. Silicon carbide has the characteristics of high temperature resistance, high frequency resistance, and high voltage resistance, which makes it widely used in the field of power electronics;

[0003] Chinese Publication No.: CN217278768U discloses a gate leakage detection device for SiC semiconductor devices, including a loading platform. The mounting seat is provided with a detection platform through a positioning sliding groove. A positioning cylinder is arranged in the middle of the end of the bearing plate. The driving end of the positioning cylinder is provided with a loading plate. Guide rods are symmetrically arranged on the left and right ends of the loading plate. Detection heads are symmetrically installed on the left and right sides inside the loading groove. A limiting knob rod is installed on the limiting plate. By sliding the detection platform and the positioning sliding groove, the pulling displacement of the detection platform is highly convenient, and the loading and unloading of semiconductor devices are highly convenient. By sliding the detection heads and the loading groove and the limiting groove in a matching manner, the distance between the detection heads can be adjusted conveniently, and the detection applicability of different sizes of semiconductor devices by the detection heads is high. By the limiting knob rod, the positioning stability of the detection heads is high, improving the detection quality and efficiency of semiconductor devices;

[0004] Although the above patent uses components such as a detection platform and a positioning sliding groove to make the detection heads detect and adapt to different sizes of semiconductor devices, considering that the gate of the SiC semiconductor device may be damaged under the action of external stress, including various factors such as electricity, heat, and mechanics. During the detection process of the SiC semiconductor device, if the position of the gate deviates, re-detection will cause irreversible damage to the gate.

[0005] In view of this, we propose a gate leakage detection device for SiC semiconductor devices. Summary of the Invention

[0006] The purpose of the present invention is to provide a gate leakage detection device for SiC semiconductor devices to solve the problems raised in the above background art.

[0007] To achieve the above object, the present invention provides a gate leakage detection device for SiC semiconductor devices, including a detection chamber and a conveying assembly. A support frame is arranged inside the detection chamber. A sliding sleeve for detection is arranged inside the support frame. A first conveying table and a second conveying table for conveying SiC semiconductors are arranged inside the detection chamber. A conveying assembly for conveying and correcting the direction of the SiC semiconductor is arranged inside the detection chamber. The conveying assembly includes a conveying disc for conveying. The conveying disc is slidably connected to the first conveying table and the second conveying table. Linkage assemblies for driving the sliding sleeve to slide are arranged on both sides of the conveying assembly;

[0008] An inlet is formed on one side of the detection chamber, and an outlet is formed on the side of the detection chamber away from the inlet;

[0009] A sliding sleeve is slidably connected inside the support frame. A telescopic detection member is fixedly connected to the middle position at the bottom of the sliding sleeve. A plurality of positioning sensors are installed at the peripheral position of the bottom of the detection member. The positioning sensors are located inside a calibration set. A calibration set is arranged around the detection member. The calibration set is fixedly connected to the bottom of the sliding sleeve;

[0010] The first conveying table is located at the middle top position of the second conveying table. The sliding sleeve is slidably connected to both the first conveying table and the second conveying table inside the support frame. The sliding sleeve is located above the first conveying table and the second conveying table. The sliding sleeve is parallel to the first conveying table and the second conveying table. A strip-shaped hole with the same diameter as the electric telescopic rod is also formed through the second conveying table.

[0011] Preferably, guard plates are fixedly connected to the peripheral positions of the inlet and the outlet of the detection chamber. The support frame is fixedly connected to the bottom of the inner wall of the detection chamber.

[0012] Preferably, the bottom of the first conveying table is attached to the top of the second conveying table. A third arched hole is formed through the first conveying table. Extension rods are fixedly connected to both sides at both ends of the first conveying table. The extension rods are slidably connected to the outer wall of the support frame, where:

[0013] A plurality of conveying rollers are rotatably connected to the outer walls at both ends of the second conveying table. Telescopic support columns are fixedly connected to the bottoms at both ends of the second conveying table.

[0014] Preferably, fixed columns are fixedly connected to the top parts on both sides of the support frame. The fixed columns are in a concave-shaped structure. A rotating rod is rotatably connected through the fixed columns. Both ends of the rotating rod are rotatably connected to the inner wall of the detection chamber.

[0015] Preferably in the present invention, a first motor is included in the conveying assembly. The first motor is fixedly connected to the outer wall of the detection chamber. The output end of the first motor is fixedly connected to a first threaded rod. A first fixed sleeve is arranged outside the first threaded rod. The bottom of the first fixed sleeve is fixedly connected to a column. The lower end of the column is fixedly connected to the inner wall bottom of the detection chamber. A first sliding column is slidably connected to the inside of the first fixed sleeve. The first sliding column is threadedly connected to the first threaded rod. The first sliding column is fixedly connected to a first arched member at the end far from the first motor. A first arched hole is formed on the surface of the first arched member, where:

[0016] The first threaded rod is vertically distributed with respect to the first conveying table, and the first arched member is horizontally distributed with respect to the first conveying table.

[0017] Preferably in the present invention, the conveying assembly further includes an L-shaped rod. A first protruding column is fixedly connected to the top of one end of the L-shaped rod. A second protruding column is fixedly connected to the end of the L-shaped rod far from the first protruding column.

[0018] Preferably in the present invention, an electric telescopic rod is fixedly connected to the top of the middle part of the L-shaped rod. A conveying disc is fixedly connected to the end of the electric telescopic rod far from the L-shaped rod. The diameter of the conveying disc matches the width of the third arched hole. The conveying disc is slidably connected to the inner wall of the third arched hole, where:

[0019] A blocking disc is fixedly connected to the outer wall of the middle part of the electric telescopic rod. The blocking disc is located at the bottom of the second conveying table.

[0020] Preferably in the present invention, the conveying assembly further includes a second motor. The second motor is fixedly connected to the outer wall of the detection chamber. The output end of the second motor is fixedly connected to a second threaded rod. A second fixed sleeve is arranged outside the second threaded rod. The second threaded rod is rotatably connected to the inside of the second fixed sleeve. A second sliding column is slidably connected to the inside of the second fixed sleeve. The second sliding column is threadedly connected to the second threaded rod. A third sliding column is slidably connected to the top of the second sliding column. A second arched member is fixedly connected to the end of the third sliding column close to the second motor. A second arched hole is formed on the surface of the second arched member, where:

[0021] The middle part of the L-shaped rod is fixedly connected to the top of the extending part of the second sliding column on the side close to the first conveying table. The second threaded rod is horizontally distributed with respect to the first conveying table, and the second arched member is vertically distributed with respect to the first conveying table.

[0022] Preferably in the present invention, the diameter of the first convex column matches the width of the first arched hole, the first convex column is slidably connected in the first arched hole, the diameter of the second convex column matches the width of the second arched hole, and the second convex column is slidably connected in the second arched hole.

[0023] Preferably in the present invention, the link assembly includes a first link. One end of the first link is rotatably connected to the end of the extension rod away from the first conveying table. The first link is rotatably connected to a second link at the end away from the extension rod. The second link is fixedly connected to the outer walls on both sides of the rotating rod at the end away from the first link. The middle end of the rotating rod is fixedly connected to a third link. The third link is located in the groove of the fixed column. The third link is rotatably connected to a fourth link at the end away from the rotating rod. The fourth link penetrates through the support frame, and the fourth link is rotatably connected to the top of the sliding sleeve at the end away from the third link.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0025] 1. In the gate leakage detection device of the SiC semiconductor device, under the drive of the second motor, the second threaded rod rotates. The second threaded rod will drive the second sliding column, the L-shaped rod and the conveying disk to slide to the right together and complete the conveying. After determining the position through the positioning sensor, a signal is sent to the electric telescopic rod. At this time, when the electric telescopic rod extends, it will drive the first conveying table, the extension rod and the second conveying table to move upward together. At this time, the extension rod will drive the first link to move upward. At this time, under the transmission of the first link, the second link and the third link, the fourth link is pushed downward. During the downward movement of the fourth link, it will drive the sliding sleeve and the detection part to approach the first conveying table and the conveying disk below together, and finally make the detection part fit with the gate of the SiC semiconductor device and detect whether there is leakage.

[0026] 2. In the gate leakage detection device of the SiC semiconductor device, under the drive of the first motor, the first threaded rod rotates. As shown in the figure, when the first threaded rod rotates, it will drive the first sliding column and the first arched part to slide together. At this time, the first convex column in the first arched hole slides together. Under the sliding of the first convex column, the L-shaped rod will also rotate a certain angle. At this time, after the L-shaped rod rotates, it will drive the top conveying disk to rotate a certain angle. After aligning the gate of the SiC semiconductor device with the detection part, the information is transmitted to the electric telescopic rod through the positioning sensor, and finally the detection is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is an overall three-dimensional schematic diagram of the gate leakage detection device of the SiC semiconductor device of the present invention;

[0028] Figure 2Schematic cross-sectional view of the overall gate leakage detection device for the SiC semiconductor device of the present invention;

[0029] Figure 3 Internal three-dimensional schematic diagram of the gate leakage detection device for the SiC semiconductor device of the present invention;

[0030] Figure 4 Three-dimensional schematic diagram of the conveying table of the gate leakage detection device for the SiC semiconductor device of the present invention;

[0031] Figure 5 Three-dimensional schematic diagram of the conveying component of the gate leakage detection device for the SiC semiconductor device of the present invention;

[0032] Figure 6 Expanded three-dimensional schematic diagram of the conveying component of the gate leakage detection device for the SiC semiconductor device of the present invention;

[0033] Figure 7 Three-dimensional schematic diagram of the support frame of the gate leakage detection device for the SiC semiconductor device of the present invention;

[0034] Figure 8 Three-dimensional schematic diagram of the connecting rod assembly of the gate leakage detection device for the SiC semiconductor device of the present invention;

[0035] The meanings of each label in the figure are as follows:

[0036] 1, detection chamber; 11, feed inlet; 111, guard plate; 12, discharge outlet; 2, support frame; 21, sliding sleeve; 211, detection piece; 212, gauge set; 22, fixed column; 221, rotating rod; 23, first conveying table; 231, extension rod; 24, second conveying table; 232, third arched hole; 241, conveying roller; 242, support column;

[0037] 3, conveying component; 31, first motor; 32, first threaded rod; 321, first fixed sleeve; 33, column; 34, first sliding column; 341, first arched member; 3411, first arched hole; 35, L-shaped rod; 351, first protruding column; 352, second protruding column; 353, electric telescopic rod; 354, conveying disc; 36, second motor; 361, second threaded rod; 37, second fixed sleeve; 371, second sliding column; 372, third sliding column; 373, second arched member; 3731, second arched hole;

[0038] 4, connecting rod assembly; 41, first connecting rod; 42, second connecting rod; 43, third connecting rod; 44, fourth connecting rod. Detailed implementation manners

[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0040] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0041] Embodiment 1

[0042] Please refer to Figures 1-8 As shown in the figure, this embodiment provides a gate leakage detection device for SiC semiconductor devices, including a detection chamber 1 and a conveying assembly 3. A support frame 2 is arranged inside the detection chamber 1. A sliding sleeve 21 for detection is arranged inside the support frame 2. A first conveying table 23 and a second conveying table 24 for conveying SiC semiconductors are arranged inside the detection chamber 1. A conveying assembly 3 for conveying and correcting the direction of the SiC semiconductor is arranged inside the detection chamber 1. The conveying assembly 3 includes a conveying disk 354 for conveying. The conveying disk 354 is slidably connected to the first conveying table 23 and the second conveying table 24. Link assemblies 4 for driving the sliding sleeve 21 to slide are arranged on both sides of the conveying assembly 3. An inlet 11 is opened on one side of the detection chamber 1, and an outlet 12 is opened on the side of the detection chamber 1 away from the inlet 11. The sliding sleeve 21 is slidably connected to the inside of the support frame 2. A telescopic detection member 211 is fixedly connected to the middle position at the bottom of the sliding sleeve 21. A plurality of positioning sensors are installed at the peripheral position of the bottom of the detection member 211. The positioning sensors are located inside the regulating set 211. A regulating set 212 is arranged around the detection member 211. The regulating set 212 is fixedly connected to the bottom of the sliding sleeve 21. The first conveying table 23 is located at the middle top position of the second conveying table 24. And the sliding sleeve 21 is slidably connected to both the first conveying table 23 and the second conveying table 24 inside the support frame 2. The sliding sleeve 21 is located above the first conveying table 23 and the second conveying table 24. The sliding sleeve 21 is in a parallel state with the first conveying table 23 and the second conveying table 24.

[0043] As Figure 2As shown in the figure, a guard plate 111 is fixedly connected to the peripheral positions of the inlet 11 and the outlet 12 of the detection chamber 1, and the support frame 2 is fixedly connected to the bottom of the inner wall of the detection chamber 1.

[0044] As Figures 2-3 shown, the bottom of the first conveyor table 23 is in contact with the top of the second conveyor table 24. A third arched hole 232 is formed through the first conveyor table 23. Extension rods 231 are fixedly connected to both sides of the two ends of the first conveyor table 23. The extension rods 231 are slidably connected to the outer wall of the support frame 2. Among them: A plurality of conveyor rollers 241 are rotatably connected to the outer walls of the two ends of the second conveyor table 24. Telescopic support columns 242 are fixedly connected to the bottoms of the two ends of the second conveyor table 24. Fixed columns 22 are fixedly connected to the tops of both sides of the support frame 2. The fixed columns 22 are in a concave-shaped structure. A rotating rod 221 is rotatably connected through the fixed columns 22. Both ends of the rotating rod 221 are rotatably connected to the inner wall of the detection chamber 1.

[0045] As Figures 4-6 shown, the conveying assembly 3 includes a first motor 31. The first motor 31 is fixedly connected to the outer wall of the detection chamber 1. The output end of the first motor 31 is fixedly connected to a first threaded rod 32. A first fixed sleeve 321 is arranged on the outer side of the first threaded rod 32. A column 33 is fixedly connected to the bottom of the first fixed sleeve 321. The lower end of the column 33 is fixedly connected to the bottom of the inner wall of the detection chamber 1. A first sliding column 34 is slidably connected to the inner side of the first fixed sleeve 321. The first sliding column 34 is threadedly connected to the first threaded rod 32. The first sliding column 34 is fixedly connected to a first arched member 341 at the end far from the first motor 31. A first arched hole 3411 is formed on the surface of the first arched member 341. Among them: The first threaded rod 32 and the first conveyor table 23 are vertically distributed. The first arched member 341 and the first conveyor table 23 are parallelly distributed. The conveying assembly 3 further includes an L-shaped rod 35. A first protruding column 351 is fixedly connected to the top of one end of the L-shaped rod 35. A second protruding column 352 is fixedly connected to the end of the L-shaped rod 35 far from the first protruding column 351. An electric telescopic rod 353 is fixedly connected to the top of the middle end of the L-shaped rod 35. A conveying disc 354 is fixedly connected to the end of the electric telescopic rod 353 far from the L-shaped rod 35. The diameter of the conveying disc 354 is matched with the width of the third arched hole 232. The conveying disc 354 is slidably connected to the inner wall of the third arched hole 232. Among them: A blocking disc is fixedly connected to the outer wall of the middle end of the electric telescopic rod 353. The blocking disc is located at the bottom position of the second conveyor table 24.

[0046] Among them, a strip-shaped hole with the same width as the electric telescopic rod 353 is also penetrated in the second conveying table 24, and a blocking disk for supporting the first conveying table 23 and the second conveying table 24 is fixed on the outer wall of the electric telescopic rod 353. The position of the blocking disk is at the bottom of the second conveying table 24. When the electric telescopic rod 353 extends, the first conveying table 23 will be driven to move upward by using the blocking disk and the conveying disk 354. Moreover, the support column 242 is also an electrically driven telescopic rod. The support column 242 and the electric telescopic rod 353 are used together to drive the first conveying table 23 and the second conveying table 24 to move up and down.

[0047] As Figures 5-6 shown in the figure, the conveying assembly 3 further includes a second motor 36. The second motor 36 is fixedly connected to the outer wall of the detection chamber 1. The output end of the second motor 36 is fixedly connected with a second threaded rod 361. A second fixing sleeve 37 is arranged outside the second threaded rod 361. The second threaded rod 361 is rotatably connected to the inside of the second fixing sleeve 37. A second sliding column 371 is slidably connected to the inside of the second fixing sleeve 37. The second sliding column 371 is threadedly connected to the second threaded rod 361. The top of the second sliding column 371 is slidably connected to a third sliding column 372. One end of the third sliding column 372 close to the second motor 36 is fixedly connected with a second arched member 373. A second arched hole 3731 is formed on the surface of the second arched member 373. Among them: the middle end of the L-shaped rod 35 is fixedly connected to the top of the extended part on the side of the second sliding column 371 close to the first conveying table 23. The second threaded rod 361 and the first conveying table 23 are arranged in parallel. The second arched member 373 and the first conveying table 23 are arranged perpendicularly. The diameter of the first convex column 351 fits the width of the first arched hole 3411. The first convex column 351 is slidably connected in the first arched hole 3411. The diameter of the second convex column 352 fits the width of the second arched hole 3731. The second convex column 352 is slidably connected in the second arched hole 3731.

[0048] As Figure 8 shown in the figure, the connecting rod assembly 4 includes a first connecting rod 41. One end of the first connecting rod 41 is rotatably connected to the end of the extension rod 231 away from the first conveying table 23. One end of the first connecting rod 41 away from the extension rod 231 is rotatably connected to a second connecting rod 42. One end of the second connecting rod 42 away from the first connecting rod 41 is fixedly connected to the outer walls on both sides of the rotating rod 221. The middle end of the rotating rod 221 is fixedly connected with a third connecting rod 43. The third connecting rod 43 is located in the groove of the fixed column 22. One end of the third connecting rod 43 away from the rotating rod 221 is rotatably connected to a fourth connecting rod 44. The fourth connecting rod 44 penetrates through the support frame 2, and one end of the fourth connecting rod 44 away from the third connecting rod 43 is rotatably connected to the top of the sliding sleeve 21.

[0049] It can be seen from this that when it is necessary to detect the SiC semiconductor device, as Figures 2-3As shown, the staff places the SiC semiconductor device on the second conveyor table 24 on the side of the feeding port 11. Through the conveyance of the conveying rollers 241, the SiC semiconductor device is conveyed to the conveying tray 354 of the first conveyor table 23 (the initial position of the conveying tray 354 is the end position of the third arched hole 232 close to the feeding port 11). At this time, under the drive of the second motor 36, the second threaded rod 361 rotates, and at the same time, the second threaded rod 361 drives the second sliding column 371 to slide within the second fixed sleeve 37, as Figure 4 shown. At this time, driven by the second threaded rod 361, the second sliding column 371 slides to the right, causing the L-shaped rod 35 and the conveying tray 354 to slide to the right together until the SiC semiconductor device is conveyed directly below the detecting member 211. After the position is determined by the positioning sensors around the detecting member 211, a signal is sent to the electric telescopic rod 353. At this time, when the electric telescopic rod 353 extends, it drives the first conveyor table 23, the extension rod 231, and the second conveyor table 24 to move upward together. At this time, the extension rod 231 drives the first connecting rod 41 to move upward. At this time, the first connecting rod 41 uses the rotating rod 221 as a fulcrum. Under the transmission of the second connecting rod 42 and the third connecting rod 43, the fourth connecting rod 44 is pushed downward. During the downward movement of the fourth connecting rod 44, it drives the sliding sleeve 21 and the detecting member 211 to approach the first conveyor table 23 and the conveying tray 354 below together, and finally makes the detecting member 211 fit with the gate of the SiC semiconductor device and detects whether there is leakage. It should be noted that the detecting member 211 is also a telescopic component. When the detecting member 211 fits with the gate of the SiC semiconductor device, the regulating set 212 wraps the SiC semiconductor device to prevent other dangerous situations from occurring. After the detection is completed, again under the drive of the second motor 36, the conveying tray 354 is conveyed to the rightmost end and finally conveyed out from the discharging port 12.

[0050] Embodiment 2

[0051] When it is necessary to adjust the direction of the SiC semiconductor device on the conveying tray 354, as Figures 5-6 shown, similarly, after the SiC semiconductor device is conveyed to the bottom position of the detecting member 211, the positioning sensors detect the direction of the SiC semiconductor device. If there is an inclination, the information will be transmitted to the first motor 31. At this time, under the drive of the first motor 31, the first threaded rod 32 rotates, as Figure 5As shown, while the first threaded rod 32 rotates, it will drive the first sliding column 34 and the first arched member 341 to slide together. At this time, the first convex column 351 in the first arched hole 3411 will slide together. Under the sliding of the first convex column 351, the L-shaped rod 35 will also rotate a certain angle. At this time, after the L-shaped rod 35 rotates, it will drive the top conveying plate 354 to rotate a certain angle. After aligning the gate of the SiC semiconductor device with the detecting member 211, the information is transmitted to the electric telescopic rod 353 through the positioning sensor, and the detection is finally completed.

[0052] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of the present invention claimed is defined by the appended claims and their equivalents.

Claims

1. A gate leakage detection device for a SiC semiconductor device, comprising a detection chamber (1) and a conveying assembly (3), characterized in that: A support frame (2) is arranged on the inner side of the detection chamber (1), a sliding sleeve (21) for detection is arranged on the inner side of the support frame (2), a No. 1 conveying platform (23) and a No. 2 conveying platform (24) for conveying SiC semiconductors are arranged on the inner side of the detection chamber (1), a conveying assembly (3) for conveying and correcting the direction of SiC semiconductors is arranged in the detection chamber (1), the conveying assembly (3) comprises a conveying disc (354) for conveying, the conveying disc (354) is slidably connected to the No. 1 conveying platform (23) and the No. 2 conveying platform (24), and connecting rod assemblies (4) for driving the sliding sleeve (21) to slide are arranged on both sides of the conveying assembly (3); A material inlet (11) is provided on one side of the detection chamber (1), and a material outlet (12) is provided on a side of the detection chamber (1) away from the material inlet (11); A sliding sleeve (21) is slidably connected to the inner side of the support frame (2); a retractable detection member (211) is fixedly connected to the middle position of the bottom of the sliding sleeve (21); a plurality of positioning sensors are installed at the peripheral position of the bottom of the detection member (211); a regular sleeve (212) is arranged around the detection member (211); the regular sleeve (212) is fixedly connected to the bottom of the sliding sleeve (21); and the positioning sensor is located on the inner side of the regular sleeve (212); The first conveyor platform (23) is located at the middle top position of the second conveyor platform (24), and the sliding sleeve (21) is slidably connected to the first conveyor platform (23) and the second conveyor platform (24) on the inner side of the support frame (2), the sliding sleeve (21) is located above the first conveyor platform (23) and the second conveyor platform (24), and the sliding sleeve (21) is in a parallel state with the first conveyor platform (23) and the second conveyor platform (24).

2. A gate leakage detection device for SiC semiconductor devices according to claim 1, characterized in that: The detection chamber (1) is fixedly connected with a guard plate (111) at a peripheral position of the material inlet (11) and the material outlet (12), and the support frame (2) is fixedly connected to the bottom of the inner wall of the detection chamber (1).

3. A gate leakage detection device for SiC semiconductor devices according to claim 2, characterized in that: The bottom of the No. 1 conveying platform (23) is in contact with the top of the No. 2 conveying platform (24), and the No. 1 conveying platform (23) is provided with a No. 3 arched hole (232) through it. Both sides of the two ends of the No. 1 conveying platform (23) are fixedly connected with extension rods (231), and the extension rods (231) are slidably connected to the outer wall of the support frame (2), wherein: The outer walls at both ends of the No. 2 conveying platform (24) are rotatably connected to a plurality of conveying rollers (241), and the bottoms at both ends of the No. 2 conveying platform (24) are fixedly connected to retractable support columns (242).

4. A gate leakage detection device for SiC semiconductor devices according to claim 3, characterized in that: The tops of both sides of the support frame (2) are fixedly connected with fixed columns (22), the fixed columns (22) are in a concave-shaped structure, and the fixed columns (22) are rotatably connected with a rotating rod (221), and both ends of the rotating rod (221) are rotatably connected to the inner wall of the detection chamber (1).

5. A gate leakage detection device for SiC semiconductor devices according to claim 4, characterized in that: The conveying assembly (3) includes a No. 1 motor (31), the No. 1 motor (31) is fixedly connected to the outer wall of the detection chamber (1), the output end of the No. 1 motor (31) is fixedly connected to the No. 1 threaded rod (32), the outer side of the No. 1 threaded rod (32) is provided with a No. 1 fixing sleeve (321), the bottom of the No. 1 fixing sleeve (321) is fixedly connected to a column (33), the lower end of the column (33) is fixedly connected to the bottom of the inner wall of the detection chamber (1), the inner side of the No. 1 fixing sleeve (321) is slidably connected to a No. 1 sliding column (34), the No. 1 sliding column (34) is threadedly connected to the No. 1 threaded rod (32), the No. 1 sliding column (34) is fixedly connected to an arched member (341) at one end away from the No. 1 motor (31), and the surface of the No. 1 arched member (341) is provided with a No. 1 arched hole (3411), wherein: The No. 1 threaded rod (32) is vertically distributed with respect to the No. 1 conveying platform (23), and the No. 1 arched member (341) is parallelly distributed with respect to the No. 1 conveying platform (23).

6. A gate leakage detection device for SiC semiconductor devices according to claim 5, characterized in that: The conveying assembly (3) further comprises an L-shaped rod (35), wherein a first protruding column (351) is fixedly connected to the top of one end of the L-shaped rod (35), and a second protruding column (352) is fixedly connected to the end of the L-shaped rod (35) away from the first protruding column (351).

7. A gate leakage detection device for a SiC semiconductor device according to claim 6, characterized in that: The top of the middle end of the L-shaped rod (35) is fixedly connected to an electric telescopic rod (353), and the electric telescopic rod (353) is fixedly connected to a conveying plate (354) at one end away from the L-shaped rod (35), the diameter of the conveying plate (354) matches the width of the third arch hole (232), and the conveying plate (354) is slidably connected to the inner wall of the third arch hole (232), wherein: A blocking plate is fixedly connected to the outer wall of the middle end of the electric telescopic rod (353), and the blocking plate is located at the bottom of the second conveying platform (24). The second conveying platform (24) is also penetrated by a strip hole with a width equal to the diameter of the electric telescopic rod (353).

8. A gate leakage detection device for SiC semiconductor devices according to claim 7, characterized in that: The conveying assembly (3) further comprises a No. 2 motor (36), wherein the No. 2 motor (36) is fixedly connected to the outer wall of the detection chamber (1), and an output end of the No. 2 motor (36) is fixedly connected to a No. 2 threaded rod (361), and a No. 2 fixing sleeve (37) is arranged on the outer side of the No. 2 threaded rod (361), and the No. 2 threaded rod (361) is rotatably connected to the inner side of the No. 2 fixing sleeve (37), and a No. 2 sliding column (371) is slidably connected to the inner side of the No. 2 fixing sleeve (37), and the No. 2 sliding column (371) is threadedly connected to the No. 2 threaded rod (361), and a No. 3 sliding column (372) is slidably connected to the top of the No. 2 sliding column (371), and the No. 3 sliding column (372) is fixedly connected to a No. 2 arched member (373) at one end of the No. 3 sliding column (372) close to the No. 2 motor (36), and a No. 2 arched hole (3731) is provided on the surface of the No. 2 arched member (373), wherein: The middle end of the L-shaped rod (35) is fixedly connected to the top of the extension portion of the second sliding column (371) close to the first conveying platform (23), the second threaded rod (361) and the first conveying platform (23) are arranged in parallel, and the second arched member (373) and the first conveying platform (23) are arranged in perpendicular relation.

9. A gate leakage detection device for a SiC semiconductor device according to claim 8, characterized in that: The diameter of the No. 1 protruding column (351) matches the width of the No. 1 arched hole (3411), and the No. 1 protruding column (351) is slidably connected in the No. 1 arched hole (3411). The diameter of the No. 2 protruding column (352) matches the width of the No. 2 arched hole (3731), and the No. 2 protruding column (352) is slidably connected in the No. 2 arched hole (3731).

10. A gate leakage detection device for a SiC semiconductor device according to claim 9, characterized in that: The connecting rod assembly (4) includes a No. 1 connecting rod (41), one end of the No. 1 connecting rod (41) is rotatably connected to the end of the extension rod (231) away from the No. 1 conveying platform (23), the No. 1 connecting rod (41) is rotatably connected to the No. 2 connecting rod (42) at the end away from the extension rod (231), the No. 2 connecting rod (42) is fixedly connected to the outer walls on both sides of the rotating rod (221) at the end away from the No. 1 connecting rod (41), the middle end of the rotating rod (221) is fixedly connected to the No. 3 connecting rod (43), the No. 3 connecting rod (43) is located in the groove of the fixed column (22), the No. 3 connecting rod (43) is rotatably connected to the No. 4 connecting rod (44) at the end away from the rotating rod (221), the No. 4 connecting rod (44) passes through the support frame (2), and the No. 4 connecting rod (44) is rotatably connected to the top of the sliding sleeve (21) at the end away from the No. 3 connecting rod (43).

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