Process flow control method, related device and medium
By setting marks in the process flow of the automated production line and performing anti-stupid verification, the problems of product process missing and algorithm calculation pressure are solved, and more efficient production and better products are achieved.
Patent Information
- Application Number
- CN202510130666.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-05
- Publication Date
- 2025-05-30
AI Technical Summary
In the production scenario of automated production lines, products frequently skip key processes, resulting in serious lack of product processes, and the algorithm calculation pressure during the production process is high, affecting production efficiency and product quality.
By setting the first mark and the second mark in the product process flow set, the process information of the first process that the product production unit has recently completed is recorded, and anti-duty verification is performed before the current process to ensure that the process flow is executed in sequence.
It effectively reduces the lack of product processes, intercepts and process remediation in a timely manner, reduces losses, and reduces algorithm calculation pressure, improves production efficiency and product quality.
Smart Images
Figure CN120065931A_ABST
Abstract
Description
Technical Field
[0001] The present disclosure belongs to the field of manufacturing technology, and particularly relates to a process flow control method, related devices, and media. Background Art
[0002] In the production scenario of an automated production line, due to many factors such as excessive process steps, uneven equipment stability, and loopholes in personnel management, products frequently skip key processes during production, and the phenomenon of missing product processes is quite common. For example, semiconductor chip manufacturing uses various manufacturing processes such as lithography, etching, and coating to build semiconductor components on a wafer, and then connects multiple semiconductor components through metal wires to form a chip. This manufacturing process is extremely complex, usually going through hundreds of process steps, and the entire process can take several months. Once a key step is missing, it may cause irreparable losses. At the same time, to balance the dual requirements of production capacity and quality, product process inspection generally adopts a sampling mode. This results in the lack of real-time and comprehensive quality data monitoring, and coupled with the imperfect supervision mechanism, products with missing processes cannot be discovered and effectively controlled in a timely manner. As a result, not only does it lead to waste of resources in subsequent process links, but it also seriously affects the overall quality of products, causing a series of quality anomaly problems. Moreover, during the high-speed operation of a large-scale automated production line, the system needs to process a huge amount of message data per second, and the data increment shows an explosive growth trend. However, limited by the performance of software algorithms and hardware computing resources, it is necessary to ensure the timing accuracy of production information while completing huge data query and processing tasks, which undoubtedly greatly increases the algorithm computing pressure of products produced by the automated production line, seriously restricting the further improvement of production efficiency and product quality. Summary of the Invention
[0003] In view of the above problems, the present disclosure provides a process flow control method, related devices, and media, aiming to reduce the phenomenon of missing product processes and the algorithm computing pressure of products produced in the production scenario of an automated production line.
[0004] According to the first aspect of the present disclosure, a process flow control method is provided, including:
[0005] Set a first mark for the first process that needs to perform process anti-fooling verification in the process flow set of the product;
[0006] Set a second mark for the product production unit of the product, and the second mark records the process information of the first process that was last executed and completed for the corresponding product production unit;
[0007] Based on the first mark and the second mark, perform foolproof verification on the first process before the current process in the process flow set. When the foolproof verification passes, execute the current process on the product production unit.
[0008] Optionally, after performing foolproof verification on the first process before the current process in the process flow set based on the first mark and the second mark, and when the foolproof verification passes, executing the current process on the product production unit, the process flow control method further includes:
[0009] When the current process has the first mark, update the process information recorded in the second mark to the process information of the current process.
[0010] Optionally, performing foolproof verification on the first process before the current process in the process flow set based on the first mark and the second mark, and when the foolproof verification passes, executing the current process on the product production unit includes:
[0011] For the processes in the process flow set, when the process information of the previous first process before the current process is equal to the process information recorded in the second mark, execute the current process on the product production unit.
[0012] Optionally, performing foolproof verification on the first process before the current process in the process flow set based on the first mark and the second mark, and when the foolproof verification passes, executing the current process on the product production unit includes:
[0013] For the processes in the process flow set, when the process information of the previous first process before the current process is not equal to the process information recorded in the second mark, stop executing the current process on the product production unit and perform alarm processing.
[0014] Optionally, performing foolproof verification on the first process before the current process in the process flow set based on the first mark and the second mark, and when the foolproof verification passes, executing the current process on the product production unit further includes:
[0015] Before executing the current process on the product production unit, determine whether the second mark is empty. When the second mark is empty, execute the current process on the product production unit.
[0016] When the second mark is not empty, determine whether the process information of the previous first process before the current process is equal to the process information recorded in the second mark.
[0017] Optionally, according to the first mark and the second mark, perform a foolproof verification on the first process before the current process in the process flow set. If the foolproof verification passes, perform the current process on the product production unit, and further include:
[0018] After performing the current process on the product production unit, according to the first mark and the second mark, perform a foolproof verification on the first process before the next process of the current process in the process flow set. If the foolproof verification passes, perform the next process of the current process on the product production unit.
[0019] Optionally, the processes in the process flow set have a determined process execution order.
[0020] According to a second aspect of the present disclosure, there is provided a process flow control device, including:
[0021] A first mark setting unit for setting a first mark for the first process that needs to perform a process foolproof verification in the process flow set of the product;
[0022] A second mark setting unit for setting a second mark for the product production unit of the product, where the second mark records the process information of the first process that was most recently executed and completed by the corresponding product production unit;
[0023] A process execution unit for performing a foolproof verification on the first process before the current process in the process flow set according to the first mark and the second mark, and performing the current process on the product production unit if the foolproof verification passes.
[0024] According to a third aspect of the present disclosure, there is provided an electronic device, including: a processor, a memory, and a program stored on the memory and executable on the processor, where when the program is executed by the processor, the steps of the method described above are implemented.
[0025] According to a fourth aspect of the present disclosure, there is provided a storage medium on which a computer program or instruction is stored, and when the computer program or instruction is executed by a processor, the steps of the method described above are implemented.
[0026] The present disclosure brings the following beneficial effects:
[0027] The process flow control method provided by the present disclosure sets a first mark for the first process that needs to be subjected to process anti-fool verification in the process flow set of the product. For the product production unit of the product, a second mark is set. The second mark records the process information of the first process that was last executed and completed for the corresponding product production unit. According to the first mark and the second mark, anti-fool verification is performed on the first process before the current process in the process flow set. In the case where the anti-fool verification passes, the current process is executed on the product production unit. In this way, process anti-fool verification can be used to perform missing verification on the product process during the execution of the process flow, reducing the phenomenon of missing product processes in the automated production line scenario, without having to wait until the entire process flow is completely executed, ensuring that defective products are intercepted in a timely manner and process remedies are carried out, minimizing the losses caused by missing processes.
[0028] Other features and advantages of the present disclosure will be described in the following specification, and in part will be obvious from the specification, or will be understood by implementing the present disclosure. The objectives and other advantages of the present disclosure are achieved and obtained by the structures specifically pointed out in the specification and the drawings.
[0029] To make the above objectives, features, and advantages of the present disclosure more obvious and understandable, the following specific preferred embodiments are given, and in conjunction with the accompanying drawings, the detailed description is as follows. Description of the Drawings
[0030] Through the following description of the embodiments of the present disclosure with reference to the drawings, the above and other objectives, features, and advantages of the present disclosure will become clearer. In the drawings:
[0031] Figure 1 Shows a schematic structural diagram of a process flow control method provided by an embodiment of the present disclosure;
[0032] Figure 2 Shows a schematic diagram of an automaton for process flow control provided by an embodiment of the present disclosure;
[0033] Figure 3 Shows a schematic structural diagram of a process flow control method provided by an embodiment of the present disclosure;
[0034] Figure 4 Shows a schematic diagram of a process flow control device provided by an embodiment of the present disclosure;
[0035] Figure 5 Shows a schematic structural diagram of an electronic device provided by an embodiment of the present disclosure. Detailed Embodiments
[0036] Various embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. In the respective drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, the various parts in the drawings are not drawn to scale.
[0037] The following terms are used herein:
[0038] Finite Automata (FA) is a concept in computer science and theory, used to describe and analyze certain behavioral patterns in computer programs and algorithms. It is an abstract computational model that can be used to represent and recognize string patterns, that is, to determine whether a given string belongs to a certain specific language or pattern. A finite automaton consists of the following five parts:
[0039] Set of states (Q): A finite automaton has a set of states, and each state represents a specific "situation" or "stage" when the automaton processes input symbols. The number of states in the set of states is finite.
[0040] Input alphabet (Σ): It is the set of input symbols that the automaton can recognize. Each symbol in the alphabet is a character or a sequence of characters. When the automaton processes the input, it selects symbols from this alphabet for matching.
[0041] Transition function (δ): Defines the transition rules between states when the automaton reads an input symbol. For each state and each input symbol in the finite automaton, the transition function specifies the next state that the automaton should transition to. The transition function can be represented as a mapping: δ: Q×Σ→Q, that is, mapping from the current state and input symbol to the next state.
[0042] Initial state (q0): It is the state in which the automaton starts processing the input. The initial state is a specific state in the set of states, and the automaton starts performing state transitions from this state.
[0043] Set of accepting states (F): It is a subset of the set of states, indicating that if the automaton is in one of these states after processing the input string, then the string is considered to be accepted. If the automaton is in a non-accepting state after processing the input string, then the string is considered not to be accepted.
[0044] Deterministic Finite Automata (DFA): For each state and each input symbol, the transition function uniquely specifies the next state. That is to say, in any given state, for any given input symbol, the behavior of the automaton is deterministic, and there is only one possible transition.
[0045] Nondeterministic Finite Automata (NFA): The transition function can specify multiple possible next states. This means that when processing the input, the automaton can be in multiple states simultaneously, or in some cases, the automaton can choose different transition paths.
[0046] Poka - Yoke is a technique used to avoid human errors and aims to ensure that every step in the process is executed correctly.
[0047] Figure 1 A structural schematic diagram showing a process flow control method provided according to an embodiment of the present disclosure is as follows. Figure 1 As shown, the process flow control method of the embodiment of the present disclosure may include:
[0048] In step S110, a first mark is set for the first process that needs to be subjected to process Poka - Yoke verification in the process flow set of the product.
[0049] In some embodiments, in an automated production line production scenario, the specified process flow for product production is a set of process flows of a series of processes, and the processes in the process flow set must be executed in a certain order. The phenomenon of process omission can be monitored by performing process Poka - Yoke verification on the important processes (also referred to as the first processes) in the process flow set to ensure that each process in the process flow set is executed in the specified order. In some embodiments, a first mark can be set for the first process that needs to be subjected to process Poka - Yoke verification in the process flow set of the product. The first process that needs to be subjected to process Poka - Yoke verification should cover as many process technologies in the process flow set as possible. Since the inspection process itself does not affect the product quality, the process Poka - Yoke verification may not be performed on the inspection process. In one example, the process flow set includes processes p1 to p10. Among them, processes p1, p3, and p10 are the first processes that need to be subjected to process Poka - Yoke verification, then marks are set for processes p1, p3, and p10 in the process flow set.
[0050] In step S120, for the product production unit of the product, a second mark is set, and the second mark records the process information of the first process that was last executed and completed corresponding to the product production unit.
[0051] In some embodiments, in the production scenario of an automated production line, a product production unit generally refers to a lot of wafers that can be processed at one time. Each lot contains multiple wafers, and each wafer contains multiple dies. Therefore, a product production unit can be regarded as a set containing multiple wafers, and these wafers go through the same process steps in the same batch. In some embodiments, a second label can be set for the product production unit of the product, and the second label records the process information of the first process that was last completed for the corresponding product production unit. Figure 2 A schematic diagram showing an automaton for process flow control according to an embodiment of the present disclosure is shown. As Figure 2 shown, the process flow set includes processes p1 to pn, where n is a positive integer. The state set Q = {q0, q1, q2,... qn, qf}, q0 is the initial state and no task process has been performed on the product yet; qf is the abnormal termination state and requires alarm control; q1, q2,... qn-1 are normal states during the product production process, and qn is the normal end state. Since the number of processes in the process flow set is finite, the automaton for process flow control in the embodiments of the present disclosure also satisfies the finiteness of states and inputs. The input alphabet ∑ = {p1, p2,... pn}, that is, the specified process flow for product production, and the processes must be performed on the product in this sequence. Among them, p1, p2, p3,... pn are different from each other. It can be understood that the automaton can reach the normal end state qn only when the product is processed according to the specified process sequence. In the case of a process missing phenomenon, the automaton reaches the abnormal termination state qf. As long as the correctness of the current state and input is satisfied, the automaton can normally reach the next state. When performing each process, if the correctness of the current state and input can be ensured, the process continuity during the process from the input to the output of the product can be ensured.
[0052] In an example, the process flow set includes processes p1 to p20. Among them, processes p1, p3, and p10 are the first processes that require process foolproof verification. The current process to be executed is pi, where i is an integer greater than 0 and less than or equal to 20. When i = 5, the second label records the process information of the first process that was last completed for the corresponding product production unit as the process information 3 of process p3. When i = 15, the second label records the process information of the first process that was last completed for the corresponding product production unit as the process information 10 of process p10. When i = 20, the second label records the process information of the first process that was last completed for the corresponding product production unit as the process information 10 of process p10.
[0053] In step S130, according to the first mark and the second mark, perform anti-fooling verification on the first process before the current process in the process flow set. When the anti-fooling verification passes, execute the current process on the product production unit.
[0054] In some embodiments, before executing the current process on the product production unit, determine whether the second mark is empty. When the second mark is empty, execute the current process on the product production unit. When the second mark is not empty, determine whether the process information of the previous first process before the current process is equal to the process information recorded in the second mark. In some embodiments, for the processes in the process flow set, when the process information of the previous first process before the current process is equal to the process information recorded in the second mark, execute the current process on the product production unit. When the process information of the previous first process before the current process is not equal to the process information recorded in the second mark, stop executing the current process on the product production unit and perform an alarm process. It can be understood that the processes in the process flow set of the product include the first process and other processes other than the first process. The first process and other processes other than the first process are numbered according to a certain process number, and these processes are executed in the order of the numbers. Therefore, the previous first process before the current process is the first process with the largest process number and a process number smaller than that of the current process in the process flow set.
[0055] In an example, the process flow set includes processes p1 to p20. When processes p1, p3, and p10 are the first processes that require process anti-fooling verification, when the process information of the current process pi to be executed currently is i = 5, the process information of the previous first process p3 before the current process p5 is 3. If the process information recorded in the second mark is 3, then the process information of the previous first process p3 before the current process p5 is equal to the process information recorded in the second mark, and the first process before the current process p5 is not missing, and the current process p5 is executed on the product production unit. If the process information recorded in the second mark is 1, then the process information of the previous first process p3 before the current process p5 is not equal to the process information recorded in the second mark, and it can be determined that the first process p3 before the current process p5 is missing, and the execution of the current process p5 on the product production unit is stopped and an alarm process is performed.
[0056] In some embodiments, after performing the current process on the product production unit, when the current process has a first mark, the process information recorded in the second mark is updated to the process information of the current process. In some embodiments, after performing the current process on the product production unit, according to the first mark and the second mark, a foolproof verification is performed on the first process before the next process of the current process in the process flow set. When the foolproof verification passes, the next process of the current process is performed on the product production unit. In one example, the process flow set includes processes p1 to p20. When processes p1, p3, and p10 are the first processes that require process foolproof verification, when i = 1 or 3 or 10, the process information recorded in the second mark is updated to the process information of the current process pi. In one example, after performing the current process p10 on the product production unit, according to the first mark and the second mark, a foolproof verification is performed on the first process before the next process p11 of the current process p10 in the process flow set. When the foolproof verification passes, the next process p11 of the current process p10 is performed on the product production unit.
[0057] It can be understood that, according to the first mark and the second mark, a foolproof verification is performed on the first process before the current process in the process flow set. When the foolproof verification passes, the current process is performed on the product production unit. In this way, during the execution of the process flow, the process foolproof verification can be used to verify the missing process of the product, reducing the phenomenon of missing product processes in the automated production line scenario, without having to wait until the entire process flow is completed, ensuring that defective products are intercepted in a timely manner and process remedies are carried out, minimizing the losses caused by missing processes.
[0058] It can be understood that the process flow control method of the embodiments of the present disclosure only needs to set the first mark of the first process that requires process foolproof verification in the process flow set of the product, update the second mark that records the process information of the first process that the corresponding product production unit has recently completed, and compare the process information of the previous first process before the current process with the process information recorded in the second mark, so as to realize the process foolproof verification of the first process in the process flow set, determine whether the product process is missing, reduce the message data that the system needs to process, reduce the algorithm calculation pressure of producing products on the automated production line, and improve the production efficiency and product quality of the products.
[0059] Figure 3 A structural schematic diagram showing a process flow control method provided according to an embodiment of the present disclosure is shown. As Figure 3 shown, the process flow control method of the embodiments of the present disclosure may include:
[0060] In step S310, a first mark is set for the first process that needs to be subjected to process foolproof verification in the process flow set of the product.
[0061] In step S320, for the product production unit of the product, a second mark is set, and the second mark records the process information of the first process that was last executed and completed for the corresponding product production unit.
[0062] In step S330, before executing the current process on the product production unit, it is determined whether the second mark is empty. If the second mark is empty, step S340 is executed. If the second mark is not empty, step S350 is executed.
[0063] In step S340, the current process is executed on the product production unit.
[0064] In step S350, it is determined whether the process information of the previous first process before the current process is equal to the process information recorded in the second mark. If they are equal, step S340 is executed. If they are not equal, step S360 is executed.
[0065] In step S360, the execution of the current process on the product production unit is stopped, and an alarm process is carried out.
[0066] In step S370, after executing the current process on the product production unit, if the current process has a first mark, the process information recorded in the second mark is updated to the process information of the current process. After the process of the current process is incremented by 1, return to execute step S330.
[0067] Figure 4 Shows a schematic diagram of a process flow control device according to an embodiment of the present disclosure. As Figure 4 shown, the process flow control device 400 includes a first mark setting unit 410, a second mark setting unit 420, and a process execution unit 430.
[0068] The first mark setting unit 410 is used to set a first mark for the first process that needs to be subjected to process foolproof verification in the process flow set of the product.
[0069] The second mark setting unit 420 is used to set a second mark for the product production unit of the product, and the second mark records the process information of the first process that was last executed and completed for the corresponding product production unit.
[0070] The process execution unit 430 is used to perform foolproof verification on the first process before the current process in the process flow set according to the first mark and the second mark, and execute the current process on the product production unit when the foolproof verification passes.
[0071] Since the process of performing process anti-foolproof verification using the process flow control method of the embodiments of the present disclosure has been described in detail in the method embodiments above, it will not be repeated here.
[0072] The embodiments of the present disclosure further provide an electronic device 500, as Figure 5 shown, including a memory 520, a processor 510, and a program stored on the memory 520 and executable on the processor 510. When the program is executed by the processor 510, it can implement each process of the above-mentioned process flow control method embodiments and achieve the same technical effects. To avoid repetition, it will not be repeated here.
[0073] Those of ordinary skill in the art can understand that all or part of the steps in the above-mentioned various methods can be completed by instructions or by controlling relevant hardware through instructions. The instructions can be stored in a computer-readable storage medium and loaded and executed by a processor. For this reason, the embodiments of the present disclosure further provide a storage medium on which a computer program or instructions are stored. When the computer program or instructions are executed by a processor, they can implement each process of the above-mentioned process flow control method embodiments.
[0074] Since the instructions stored in the storage medium can execute the steps in the process flow control method provided by the embodiments of the present disclosure, the beneficial effects that can be achieved by the process flow control method provided by the embodiments of the present disclosure can be realized. For details, see the previous embodiments and will not be repeated here. The specific implementation of each of the above operations can refer to the previous embodiments and will not be repeated here.
[0075] In summary, for the process flow control method provided by the present disclosure, a first mark is set for the first process that needs to perform process anti-foolproof verification in the process flow set of the product. For the product production unit of the product, a second mark is set. The second mark records the process information of the first process that was last executed and completed for the corresponding product production unit. According to the first mark and the second mark, anti-foolproof verification is performed on the first process before the current process in the process flow set. In the case where the anti-foolproof verification passes, the current process is executed on the product production unit. In this way, process anti-foolproof verification can be used to perform missing verification on the product process during the execution of the process flow, reducing the phenomenon of missing product processes in the automated production line production scenario. It is not necessary to wait until the entire process flow is completely executed, ensuring that defective products are intercepted in a timely manner and process remedies are carried out, minimizing the losses caused by missing processes.
[0076] Finally, it should be noted that: Obviously, the above embodiments are only examples for clearly illustrating the present disclosure, rather than limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. And the obvious changes or modifications derived therefrom still fall within the protection scope of the present disclosure.
Claims
1. A process control method, comprising: Setting a first mark for the first process in the process flow set of the product that needs to be verified for process fool-proofing; For the product production unit of the product, a second mark is set, where the second mark records the process information of the first process that was most recently completed by the corresponding product production unit; According to the first mark and the second mark, the first process before the current process in the process flow set is subjected to fool-proof verification, and when the fool-proof verification passes, the current process is executed on the product production unit.
2. The process control method according to claim 1, wherein: The process flow control method further comprises: performing fool-proofing verification on the first process before the current process in the process flow set according to the first mark and the second mark, and after executing the current process on the product production unit if the fool-proofing verification passes. When the current process has the first tag, the process information recorded in the second tag is updated to the process information of the current process.
3. The process control method according to claim 2, wherein: The step of performing fool-proofing verification on the first process before the current process in the process flow set according to the first mark and the second mark, and executing the current process on the product production unit if the fool-proofing verification passes, includes: For the processes in the process flow set, when the process information of the first process before the current process is equal to the process information recorded in the second mark, the current process is executed on the product production unit.
4. The process control method according to claim 2, wherein: The step of performing fool-proofing verification on the first process before the current process in the process flow set according to the first mark and the second mark, and executing the current process on the product production unit if the fool-proofing verification passes, includes: For the processes in the process flow set, when the process information of the previous first process before the current process is not equal to the process information recorded in the second mark, stop executing the current process on the product production unit and perform alarm processing.
5. The process control method according to claim 3 or 4, wherein: The step of performing fool-proofing verification on the first process before the current process in the process flow set according to the first mark and the second mark, and executing the current process on the product production unit if the fool-proofing verification passes, further includes: Before executing the current process on the product production unit, determining whether the second mark is empty, and executing the current process on the product production unit when the second mark is empty, When the second mark is not empty, it is determined whether the process information of the first process before the current process is equal to the process information recorded in the second mark.
6. The process control method according to claim 5, wherein: The step of performing fool-proofing verification on the first process before the current process in the process flow set according to the first mark and the second mark, and executing the current process on the product production unit if the fool-proofing verification passes, further includes: After executing the current process on the product production unit, based on the first mark and the second mark, fool-proofing is performed on the first process before the next process of the current process in the process flow set; if the fool-proofing passes the fool-proofing, the next process of the current process is executed on the product production unit.
7. The process control method according to claim 1, wherein: The processes in the process flow set have a determined process execution order.
8. A process control device, comprising: A first mark setting unit, used for setting a first mark for a first process in a process flow set of a product that needs to undergo process fool-proofing verification; A second mark setting unit, used to set a second mark for a product production unit of the product, wherein the second mark records process information of the first process that was most recently executed by the corresponding product production unit; The process execution unit is used to perform fool-proof verification on the first process before the current process in the process flow set according to the first mark and the second mark, and execute the current process on the product production unit when the fool-proof verification passes.
9. An electronic device, comprising: A processor, a memory, and a program stored in the memory and executable on the processor, wherein the program implements the steps of the method according to any one of claims 1 to 7 when executed by the processor.
10. A storage medium having a computer program or instruction stored thereon, wherein the computer program or instruction, when executed by a processor, implements the steps of the method according to any one of claims 1 to 7.