A parallelism adjustment method, device, equipment, storage medium and program product

Abstract

The present invention discloses a parallelism adjustment method, device, equipment, storage medium, and program product. The method is as follows: Obtain the pressure data of at least two adjustment points on the product to be adjusted and the point distances of each adjustment point from the center of the product to be adjusted; Determine the offset angles of each adjustment point according to each pressure data, each point distance, and the force balance condition; Determine the displacement compensation amount of each adjustment point according to each offset angle and each point distance, and adjust the parallelism of the corresponding adjustment point according to each displacement compensation amount. In the embodiments of the present invention, by using the force balance condition and integrating the pressure data and the point distance, the offset angles of each adjustment point can be accurately calculated, effectively avoiding the subjectivity of manual judgment and improving the accuracy of adjustment; Based on the calculated displacement compensation amount, clear displacement guidance can be provided for each adjustment point, accurately quantifying the displacement requirements and ensuring the accuracy of adjustment.

Description

Technical Field

[0001] The present invention relates to the field of data processing, and particularly to a parallelism adjustment method, device, equipment, storage medium and program product. Background Art

[0002] In the field of modern precision manufacturing, especially in industries such as semiconductor packaging, optical component assembly and high-precision machining, the double-plane fitting technology plays a crucial role. The traditional double-plane fitting method mainly realizes plane fitting by pressing a pressure-sensitive paper and manually adjusting the plane height by observing the depth of color change on the pressure-sensitive paper. However, the debugging method of the pressure-sensitive paper mainly relies on manual judgment of the color of the pressure-sensitive paper and manual adjustment of the plane height, with strong subjectivity and large errors, making it difficult to achieve precise control. Therefore, providing a parallelism adjustment method with high control precision and low operation difficulty has become an urgent technical problem to be solved. Summary of the Invention

[0003] The present invention provides a parallelism adjustment method, device, equipment, storage medium and program product, which effectively avoids the subjectivity of manual judgment, improves the accuracy of adjustment, precisely quantifies the displacement requirements, and ensures the precision of adjustment.

[0004] On the one hand, an embodiment of the present invention provides a parallelism adjustment method, including:

[0005] Obtaining the pressure data of at least two adjustment points on the product to be adjusted and the point distances from each adjustment point to the center of the product to be adjusted;

[0006] Determining the offset angle of each adjustment point according to each pressure data, each point distance and the force balance condition;

[0007] Determining the displacement compensation amount of each adjustment point according to each offset angle and each point distance, and adjusting the parallelism of the corresponding adjustment point according to each displacement compensation amount.

[0008] On the other hand, an embodiment of the present invention provides a parallelism adjustment device, including:

[0009] A data acquisition module, configured to obtain the pressure data of at least two adjustment points on the product to be adjusted and the point distances from each adjustment point to the center of the product to be adjusted;

[0010] An angle determination module, configured to determine the offset angle of each adjustment point according to each pressure data, each point distance and the force balance condition;

[0011] A parallelism adjustment module, configured to determine the displacement compensation amount of each adjustment point according to each offset angle and each point distance, and adjust the parallelism of the corresponding adjustment point according to each displacement compensation amount.

[0012] On the other hand, an embodiment of the present invention provides a device, including:

[0013] At least one processor;

[0014] And a memory communicatively connected to the at least one processor;

[0015] Wherein, the memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor so that the at least one processor can execute the parallelism adjustment method of any embodiment of the embodiments of the present invention.

[0016] On the other hand, an embodiment of the present invention provides a computer-readable storage medium, and the computer-readable storage medium stores including:

[0017] Computer instructions for causing a processor to execute the parallelism adjustment method of any embodiment of the embodiments of the present invention.

[0018] On the other hand, an embodiment of the present invention provides a computer program product, and the computer program product includes:

[0019] A computer program for executing the parallelism adjustment method of any embodiment of the embodiments of the present invention when being executed by a processor.

[0020] In an embodiment of the present invention, at least two adjustment points can be set on the product to be adjusted. The pressure data of each adjustment point can be obtained according to the pressure sensor or the deformation amount and rigidity coefficient of each adjustment point. The center of the product to be adjusted can be determined, and the coordinate system of the product to be adjusted can be constructed with the center of the product to be adjusted as the origin. The point distances of each adjustment point on the product to be adjusted from the center of the product to be adjusted can be determined within the constructed coordinate system. The obtained pressure data and point distances are used as inputs and input into the force balance condition. The output data of the force balance condition can be used as the offset angle of each adjustment point. The lateral offset angle and longitudinal offset angle in the point distance and offset angle of each adjustment point can be multiplied and added correspondingly to obtain the displacement compensation amount of each adjustment point. By utilizing the force balance condition and integrating the pressure data and point distances, the embodiment of the present invention can accurately calculate the offset angle of each adjustment point, effectively avoiding the subjectivity of manual judgment and improving the accuracy of adjustment; based on the calculated displacement compensation amount, a clear displacement guidance can be provided for each adjustment point, accurately quantifying the displacement requirement and ensuring the accuracy of adjustment.

[0021] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0023] Figure 1 It is a flowchart of a parallelism adjustment method provided according to Embodiment 1 of the present invention;

[0024] Figure 2 It is another flowchart of a parallelism adjustment method provided according to Embodiment 2 of the present invention;

[0025] Figure 3 It is a schematic diagram of the relative position of a pressure sensor and a product to be adjusted provided according to Embodiment 3 of the present invention;

[0026] Figure 4 It is a schematic diagram of the force on a product to be adjusted provided according to Embodiment 3 of the present invention;

[0027] Figure 5 It is a schematic diagram of the structure of a parallelism adjustment device provided according to Embodiment 4 of the present invention;

[0028] Figure 6 It is a block diagram of a device for performing the parallelism adjustment method provided according to Embodiment 5 of the present invention. Detailed implementation manners

[0029] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of the present invention.

[0030] It should be noted that the terms "first", "second", etc. in the description, claims and above-mentioned drawings of the present invention are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present invention described here can be implemented in an order other than those illustrated or described here. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0031] Embodiment 1

[0032] Figure 1 FIG. 1 is a flowchart of a parallelism adjustment method provided by Embodiment 1 of the present invention. The embodiment of the present invention is applicable to the situation where the product level needs to be automatically adjusted and the adjustment accuracy requirement is relatively high. This method can be executed by a parallelism adjustment device, which can be implemented in the form of hardware and / or software, and the parallelism adjustment device can be configured in the equipment. As Figure 1 shown, the method includes:

[0033] S101. Obtain the pressure data of at least two adjustment points on the product to be adjusted and the point distances of each adjustment point from the center of the product to be adjusted.

[0034] The product to be adjusted refers to a component that needs to be calibrated by physical parameters such as pressure, displacement, and angle. For example, the product to be adjusted can be a wafer product or a glass product, etc.

[0035] The adjustment point can be understood as the physical position where pressure is applied to the product to be adjusted and / or displacement adjustment is performed. It can be understood that the number of adjustment points on the product to be adjusted is at least two to determine the offset angle of the product to be adjusted. The adjustment points of the product to be adjusted can be selected according to the structure and / or key stress area of the product to be adjusted. For example, if the product to be adjusted is a wafer product, the structure of the wafer product to be adjusted is a circular thin sheet and a centrally symmetric structure, and the key stress area of the wafer product to be adjusted is at the center point and six points on the edge of the wafer product to be adjusted, then the adjustment points of the wafer product to be adjusted can be set at the six points on the edge of the wafer product to be adjusted; if the product to be adjusted is a glass product and the glass product to be adjusted is a rectangular structure, then the adjustment points of the glass product to be adjusted can be set at the upper left corner, lower left corner, upper right corner, and lower right corner of the product to be adjusted respectively.

[0036] The pressure data can be understood as a physical quantity, which can reflect the external pressure value received at the adjustment points on the product to be adjusted. For example, the methods for obtaining the pressure data of each adjustment point can include: directly collecting the pressure data of each adjustment point by installing pressure sensors at each adjustment point, or indirectly deriving the pressure data of each adjustment point through the deformation amount and rigidity coefficient of each adjustment point, etc.

[0037] The point distance refers to the straight-line distance from each adjustment point to the geometric center of the product to be adjusted. The distance relationship matrix of the product to be adjusted can be constructed based on the point distance, and then the offset angle of the product to be adjusted can be determined. For example, the steps for constructing the distance relationship matrix of the product to be adjusted according to the point distance can include: constructing the distance relationship matrix of the product to be adjusted by using each point distance as a vector element. It can be understood that if the product to be adjusted is an asymmetric product, a reference for the geometric center of the product to be adjusted needs to be defined. For example, the reference for the geometric center of the asymmetric product to be adjusted can include: the centroid of the product to be adjusted or the design reference point of the product to be adjusted.

[0038] Specifically, at least two adjustment points can be set on the product to be adjusted. The pressure data of each adjustment point can be obtained according to the pressure sensor or the deformation amount and rigidity coefficient of each adjustment point. The center of the product to be adjusted can be determined, and the coordinate system of the product to be adjusted can be constructed with the center of the product to be adjusted as the origin. The straight-line distance from each adjustment point to the origin of the coordinate system can be determined within the constructed coordinate system, that is, the point distance from each adjustment point on the product to be adjusted to the center of the product to be adjusted can be determined within the constructed coordinate system.

[0039] S102. Determine the offset angle of each adjustment point according to each pressure data, each point distance, and the force balance condition.

[0040] Among them, the force balance condition refers to the physical condition that the acting forces in each direction satisfy when the product to be adjusted is in a balanced state. The force balance condition can be used as the basis for adjusting the levelness of the product to be adjusted.

[0041] The offset angle refers to the angular displacement of each adjustment point relative to the theoretical position, which can be used to reflect the offset degree of the product to be adjusted. For example, the offset angle at least includes: the lateral offset angle and the longitudinal offset angle.

[0042] Specifically, the pressure data of each adjustment point and the point distance from each adjustment point to the center of the product to be adjusted can be obtained. The obtained pressure data and point distance can be used as inputs and input into the force balance condition. The output data of the force balance condition can be used as the offset angle of each adjustment point.

[0043] Exemplarily, taking the obtained pressure data and the point position distance as inputs and inputting them into the force balance condition, the steps of taking the output data of the force balance condition as the offset angle of each adjustment point may include: obtaining the rigidity coefficient of each adjustment point, and taking the mapping relationship where the product result of each point position distance, each rigidity coefficient, the offset angle, and the resultant force data is equal to the pressure data as the force balance condition; inputting each pressure data, each point position distance, each rigidity coefficient, and the resultant force data of the product to be adjusted into the mapping relationship included in the force balance condition to obtain the offset angle of each adjustment point.

[0044] S103. Determine the displacement compensation amount of each adjustment point according to each offset angle and each point position distance, and adjust the parallelism of the corresponding adjustment point according to each displacement compensation amount.

[0045] Among them, the displacement compensation amount can be understood as a correction amount, which refers to the distance that each adjustment point needs to move and can be used to eliminate the offset angle.

[0046] Parallelism can be understood as an accuracy index and can be used to describe the parallel degree of each adjustment point.

[0047] Specifically, the offset angle of each adjustment point can be obtained. It can be understood that the offset angle of each adjustment point at least includes the horizontal offset angle and the vertical offset angle. Multiply and add the point position distance of each adjustment point corresponding to the horizontal offset angle and the vertical offset angle in the offset angle to obtain the displacement compensation amount that each adjustment point needs to move to eliminate the offset angle.

[0048] In the embodiment of the present invention, at least two adjustment points can be set on the product to be adjusted. The pressure data of each adjustment point can be obtained according to the pressure sensor or the deformation amount and rigidity coefficient of each adjustment point. The center of the product to be adjusted can be determined, and the coordinate system of the product to be adjusted can be constructed with the center of the product to be adjusted as the origin. The point position distance of each adjustment point on the product to be adjusted from the center of the product to be adjusted can be determined within the constructed coordinate system. Taking the obtained pressure data and the point position distance as inputs and inputting them into the force balance condition, the output data of the force balance condition can be used as the offset angle of each adjustment point. Multiply and add the point position distance of each adjustment point corresponding to the horizontal offset angle and the vertical offset angle in the offset angle to obtain the displacement compensation amount of each adjustment point. By using the force balance condition and integrating the pressure data and the point position distance in the embodiment of the present invention, the offset angle of each adjustment point can be accurately calculated, effectively avoiding the subjectivity of manual judgment and improving the accuracy of adjustment; based on the calculated displacement compensation amount, a clear displacement guidance can be provided for each adjustment point, accurately quantifying the displacement requirement and ensuring the accuracy of adjustment.

[0049] On the basis of the above embodiments, the embodiments of the present invention further include: determining that the difference between the pressure data of each adjustment point is less than a preset threshold, and ending the adjustment of the parallelism of each adjustment point.

[0050] Among them, the preset threshold can be understood as a numerical boundary, which can be used to determine whether the adjustment of each adjustment point reaches the adjustment standard.

[0051] Specifically, after adjusting each adjustment point based on the displacement compensation amount, the current pressure data of each adjustment point can be obtained synchronously, and the difference between the current pressure data can be calculated. The difference can be compared with the preset threshold. When it is determined that the difference is less than the preset threshold, the adjustment of the parallelism of each adjustment point is ended. By setting the preset threshold and using the condition that the pressure difference is less than the preset threshold as the termination condition, invalid adjustment operations can be reduced, the adjustment cycle can be shortened, and the adjustment cost can be reduced.

[0052] Embodiment 2

[0053] Figure 2 The following is a flowchart of another parallelism adjustment method provided by the embodiments of the present invention. On the basis of the above embodiments, the embodiments of the present invention provide another parallelism adjustment method. As Figure 2 shown, the method includes:

[0054] S201. Obtain the pressure data of at least two adjustment points on the product to be adjusted and the point distances of each adjustment point from the center of the product to be adjusted.

[0055] S202. Obtain the deformation amount data of each adjustment point, and use the ratio of the pressure data of each adjustment point to the deformation amount data as the rigidity coefficient of the corresponding adjustment point.

[0056] Among them, the deformation amount data refers to the elastic displacement change amount of the adjustment point under the action of pressure. For example, the acquisition method of the deformation amount data of each adjustment point can include: obtaining through a displacement sensor or through a finite element analysis method, etc.

[0057] The rigidity coefficient can be understood as a quantitative index, which can reflect the anti-deformation ability of the product to be adjusted. The ratio of the pressure data to the deformation amount data can be used as the rigidity coefficient.

[0058] Specifically, the pressure data of each adjustment point can be obtained, the deformation amount data of each adjustment point can be obtained through a displacement sensor or a finite element analysis method, etc., the pressure data of each adjustment point and the deformation amount data can be subjected to a ratio operation, and the result of the ratio operation can be used as the rigidity coefficient of the corresponding adjustment point.

[0059] S203. Use the pressure data of each adjustment point as vector elements to construct a pressure vector of the product to be adjusted.

[0060] Among them, the pressure vector refers to a vector formed by arranging the pressure data of each adjustment point in a certain order into a column, which can be used to construct the force balance condition of the product to be adjusted.

[0061] Specifically, the pressure data of each obtained adjustment point can be used as vector elements and arranged in a certain order into a first-column vector, and this first-column vector can be used as the pressure vector of the product to be adjusted.

[0062] For example, the product to be adjusted can be a rectangular structure, and the length of the product to be adjusted is set as and the width is . Four adjustment points can be set at the four corners of the product to be adjusted, and the pressure data of each obtained adjustment point can be respectively , , and . , , and can be arranged in a certain order to form a pressure vector, and then the expression form of the pressure vector can be .

[0063] S204. Use the distances of each point as vector elements to construct the distance relationship matrix of the product to be adjusted.

[0064] Among them, the distance relationship matrix is a matrix constructed with the point distances of each adjustment point as elements, which can be used to construct the force balance condition of the product to be adjusted and can be used to describe the spatial position relationship between each adjustment point and the center of the product to be adjusted.

[0065] Specifically, the obtained point distances of each adjustment point can be used as vector elements and arranged in a certain order into a second-column vector, and this second-column vector can be used as the distance relationship matrix of the product to be adjusted.

[0066] For example, taking the center of the product to be adjusted as the origin, a coordinate system can be established on the product to be adjusted. The point distances of the four obtained adjustment points from the center of the product to be adjusted can be respectively ( ), ( ), ( ) and ( ). Then, the distance relationship matrix of the product to be adjusted can be , where and are respectively the length and width of the product to be adjusted.

[0067] S205. Use the rigidity coefficients of each adjustment point as vector elements to construct the rigidity coefficient vector of the product to be adjusted.

[0068] Among them, the stiffness coefficient vector refers to a vector formed by arranging the stiffness coefficients of each adjustment point in a certain order in a column, which can be used to construct the force balance condition of the product to be adjusted.

[0069] Specifically, the obtained stiffness coefficients of each adjustment point can be used as vector elements and arranged in a certain order to form a third column vector, and this third column vector can be used as the stiffness coefficient vector of the product to be adjusted.

[0070] For example, the obtained stiffness coefficients of 4 adjustment points can be respectively 、 、 and , and 、 、 and can be arranged in a certain order to form a stiffness coefficient vector, and the expression form of the stiffness coefficient vector can be .

[0071] S206. Add the pressure data of each adjustment point to obtain the resultant force data of the product to be adjusted.

[0072] Among them, the resultant force data is the algebraic sum of the pressure data of each adjustment point, which can be used to construct the force balance condition of the product to be adjusted and can reflect the overall force state of the product to be adjusted.

[0073] Specifically, the pressure data of each adjustment point can be obtained, the pressure data of each adjustment point can be added, and the addition result of the pressure data of each adjustment point can be used as the resultant force data of the product to be adjusted.

[0074] S207. Use the resultant force data, the lateral offset angle of the offset angle, and the longitudinal offset angle of the offset angle as vector elements to construct a first vector.

[0075] Among them, the first vector refers to a vector formed by arranging the resultant force data, the lateral offset angle of the offset angle, and the longitudinal offset angle of the offset angle in a certain order, which can be used to construct the force balance condition of the product to be adjusted.

[0076] Specifically, the obtained resultant force data, the lateral offset angle of the offset angle, and the longitudinal offset angle of the offset angle can be used as vector elements and arranged in a certain order to form a first vector.

[0077] For example, the obtained resultant force data can be represented by , the lateral offset angle of the offset angle can be represented by , and the longitudinal offset angle of the offset angle can be represented by , then the first vector can be represented as .

[0078] S208. Take the mapping relationship that the product result of the distance relationship matrix, the stiffness coefficient vector, and the first vector is equal to the pressure vector as the force balance condition.

[0079] Specifically, the obtained distance relationship matrix, stiffness coefficient vector, and first vector can be used as column vectors respectively, and arranged in a certain order to obtain the first row vector. The first row vector can be made equal to the pressure vector, and the mapping relationship formed by the first row vector being equal to the pressure vector can be taken as the force balance condition.

[0080] Exemplarily, the distance relationship matrix , the stiffness coefficient vector , and the first vector can be obtained. It can be understood that the distance relationship matrix can be transformed into . is multiplied by the stiffness coefficient vector and the first vector to obtain the first row vector . Then, the force balance condition can be expressed as , where , , , and are the pressure data of each adjustment point respectively, , , , and can be the stiffness coefficients of each adjustment point respectively, and are the length and width of the product to be adjusted respectively, represents the resultant force data, is the lateral offset angle of the offset angle, is the longitudinal offset angle of the offset angle.

[0081] S209. Obtain the force balance condition of the product to be adjusted, and input the pressure data, the distances of each point, the stiffness coefficients, and the resultant force data of the product to be adjusted into the mapping relationship of the force balance condition to obtain the offset angles of each adjustment point.

[0082] Specifically, the force balance condition of the adjustment product, the pressure data, the distances of each point, the stiffness coefficients, and the resultant force data can be obtained. The pressure data, the distances of each point, the stiffness coefficients, and the resultant force data can be used as inputs and input into the force balance condition. According to the mapping relationship included in the force balance condition and combined with the input of the force balance condition, the offset angles of each adjustment point can be obtained.

[0083] Exemplarily, the force balance condition of the product to be adjusted can be obtained. It can be understood that in the force balance condition, the pressure vector , The element values and resultant force data in are all known quantities. Based on the obtained known quantities, the offset angle can be calculated. , where , , and are the pressure data of each adjustment point respectively, , , and can be the stiffness coefficients of each adjustment point respectively, and are the length and width of the product to be adjusted respectively, represents the resultant force data, is the lateral offset angle of the offset angle, is the longitudinal offset angle of the offset angle.

[0084] It can be understood that in the product to be adjusted with a rectangular structure, a coordinate system is constructed with the center of the product to be adjusted as the origin. The offset angles of the upper left and lower left corners of the product to be adjusted relative to the coordinate axes are the same, and the offset angles of the upper right and lower right corners of the product to be adjusted relative to the coordinate axes are also the same.

[0085] S210. Multiply and add the matrix elements in the distance relationship matrix corresponding to the lateral offset angle and the longitudinal offset angle in the offset angle to obtain the displacement compensation amount of each adjustment point.

[0086] Specifically, the distance relationship matrix and the offset angle can be obtained. The matrix elements in the obtained distance relationship matrix can be multiplied and added corresponding to the lateral offset angle and the longitudinal offset angle in the offset angle, and the sum of the multiplied and added matrix elements and the offset angle can be used as the displacement compensation amount of the adjustment point.

[0087] For example, the distance relationship matrix and the lateral offset angle and the longitudinal offset angle of the offset angle can be obtained. The matrix elements in the distance relationship matrix can be multiplied and added corresponding to the lateral offset angle and the longitudinal offset angle in the offset angle to obtain the displacement compensation amount of each adjustment point. Among them, the displacement compensation amount of an adjustment point can be + .

[0088] S211. Adjust the parallelism of the corresponding adjustment points according to each displacement compensation amount.

[0089] In the embodiments of the present invention, pressure data of at least two adjustment points on the product to be adjusted and the point distances of each adjustment point from the center of the product to be adjusted can be obtained. The deformation data of each adjustment point can be obtained by means of a displacement sensor or finite element analysis method, etc. The pressure data of each adjustment point and the deformation data can be subjected to a ratio operation, and the result of the ratio operation can be used as the rigidity coefficient of the corresponding adjustment point. The obtained pressure data of each adjustment point can be used as vector elements and arranged in a certain order to form a pressure vector. The obtained point distances of each adjustment point can be used as vector elements and arranged in a certain order to form a distance relationship matrix. The obtained rigidity coefficients of each adjustment point can be used as vector elements and arranged in a certain order to form a rigidity coefficient vector. The sum of the pressure data of each adjustment point can be used as the resultant force data of the product to be adjusted. The obtained resultant force data, the lateral offset angle of the offset angle, and the longitudinal offset angle of the offset angle can be used as vector elements and arranged in a certain order to form a first vector. The obtained distance relationship matrix, rigidity coefficient vector, and first vector can be used as column vectors and arranged in a certain order to obtain a first row vector. The first row vector can be made equal to the pressure vector. The mapping relationship formed by making the first row vector equal to the pressure vector can be used as the force balance condition. The pressure data, point distances, rigidity coefficients, and resultant force data can be used as inputs and input into the force balance condition. According to the mapping relationship included in the force balance condition and combined with the input of the force balance condition, the offset angles of each adjustment point can be obtained. The matrix elements in the obtained distance relationship matrix can be multiplied and added corresponding to the lateral offset angle and the longitudinal offset angle in the offset angle. The sum of the multiplication and addition of the matrix elements and the offset angle can be used as the displacement compensation amount of the adjustment point. The parallelism of the corresponding adjustment point can be adjusted according to each displacement compensation amount. In the embodiments of the present invention, by converting the pressure data, point distances, and rigidity coefficients of each adjustment point into vector forms, the mechanical property differences at different positions of the product to be adjusted can be intuitively reflected, and the efficiency of the adjustment method is improved. A standard can be constructed based on the unified force balance condition, and the mapping relationship in the force balance condition can be adaptively adjusted according to the actual specifications of the product to be adjusted, ensuring the consistency of the adjustment method. By using the force balance condition and integrating the pressure data and point distances, the offset angles of each adjustment point can be accurately calculated. Based on the calculated displacement compensation amounts, clear displacement guidance can be provided for each adjustment point, avoiding the subjectivity of manual judgment and improving the accuracy of adjustment. In actual operation, the parallelism adjustment method provided by the embodiments of the present invention can automatically calculate the displacement compensation amounts of each adjustment point based on the pressure data and point distances, and can automatically complete the adjustment work of the product to be adjusted based on the displacement compensation amounts, realizing the full-automatic adjustment of the product to be adjusted, improving the adjustment efficiency, and reducing the adjustment complexity. In addition, the adjustment processes of each adjustment point on the product to be adjusted can follow the same adjustment standard, ensuring the consistency of the adjustment effects of each adjustment point and guaranteeing the stability of the product quality.

[0090] Embodiment 3

[0091] Based on the above embodiments, an embodiment of the present invention provides a parallelism adjustment method applied to a wafer product to be adjusted. The method process includes:

[0092] Four pressure sensors can be respectively placed at four marked points of the wafer product to be adjusted, namely the upper left corner, the lower left corner, the upper right corner and the lower right corner of the wafer product to be adjusted, as Figure 3 shown. Taking the center of the wafer product to be adjusted as the origin, a coordinate system can be established on the wafer product to be adjusted, the coordinates of the four pressure sensors can be determined, and the length of the wafer product to be adjusted is set as , and the width is . Then the length of the lever arm of the upper left corner sensor from the center of the wafer product to be adjusted is ( ), the length of the lever arm of the upper right corner sensor from the center of the wafer product to be adjusted is ( ), the length of the lever arm of the lower left corner sensor from the center of the wafer product to be adjusted is ( ), and the length of the lever arm of the lower right corner sensor from the center of the wafer product to be adjusted is ( ). According to the force balance condition, a force balance equation set of the wafer product to be adjusted can be constructed, as shown in formula (1):

[0093] (1)

[0094] Wherein, , , , are the pressure values of the upper left corner, the upper right corner, the lower left corner and the lower right corner of the wafer product to be adjusted obtained by the four pressure sensors respectively, is the rigidity coefficient of the wafer product to be adjusted, is the resultant force of the wafer product to be adjusted, is the offset angle of the wafer product to be adjusted in the axis direction, is the offset angle of the wafer product to be adjusted in the axis direction. The rigidity coefficient of the wafer product to be adjusted can be obtained according to the deformation amount and the pressure value of the wafer product to be adjusted: Obtain the deformation amounts of the four marked points of the wafer product to be adjusted, perform a ratio operation on the pressure values of the four marked points respectively with the corresponding deformation amounts, use the result of the ratio operation as the rigidity coefficients of the four marked points, and sum and average the rigidity coefficients of the four marked points to obtain the rigidity coefficient of the wafer product to be adjusted. The resultant force of the wafer product to be adjusted, wherein, the resultant force and the pressure value received by the wafer product to be adjusted are as Figure 4As shown. Let = A, and transform formula (1) into formula (2):

[0095] (2)

[0096] The offset angle of the wafer product to be adjusted can be obtained according to formula (2). and . The calculated offset angles and can be substituted into formula (3) to obtain the Z-axis offset amounts of the 4 marking points.

[0097] (3)

[0098] The Z-axis offset amount can be compared with the preset standard compensation range. If the calculated Z-axis offset amount does not exceed the preset standard compensation range, the flatness of the wafer product to be adjusted can be adjusted according to the Z-axis offset amount. After waiting for the adjustment to be in place, the current pressure value can be obtained synchronously, and the next iteration loop can be entered until the pressure difference at the four corners tends to be close to 0.001 N, ensuring uniform force on the overall plane. The current four-axis position of the teaching can be saved and marked as the best parallel position of the double plane.

[0099] Example 4

[0100] Figure 5 A parallelism adjustment device provided in Example 4 of the present invention is as Figure 5 shown. The device includes:

[0101] A data acquisition module 301 for acquiring the pressure data of at least two adjustment points on the product to be adjusted and the point distances of each adjustment point from the center of the product to be adjusted;

[0102] An angle determination module 302 for determining the offset angles of each adjustment point according to the pressure data, the point distances, and the force balance condition;

[0103] A parallelism adjustment module 303 for determining the displacement compensation amounts of each adjustment point according to the offset angles and the point distances, and adjusting the parallelism of the corresponding adjustment points according to the displacement compensation amounts.

[0104] In an embodiment of the present invention, at least two adjustment points can be set on the product to be adjusted. The pressure data of each adjustment point can be obtained based on the pressure sensor or the deformation amount and rigidity coefficient of each adjustment point. The center of the product to be adjusted can be determined, and a coordinate system of the product to be adjusted can be constructed with the center of the product to be adjusted as the origin. The position distance of each adjustment point on the product to be adjusted from the center of the product to be adjusted can be determined within the constructed coordinate system. The obtained pressure data and position distance are used as inputs and input into the force balance condition. The output data of the force balance condition can be used as the offset angle of each adjustment point. The lateral offset angle and longitudinal offset angle in the position distance and offset angle of each adjustment point can be multiplied and added correspondingly to obtain the displacement compensation amount of each adjustment point. By utilizing the force balance condition and integrating the pressure data and position distance, the embodiment of the present invention can accurately calculate the offset angle of each adjustment point, effectively avoiding the subjectivity of manual judgment and improving the accuracy of adjustment. Based on the calculated displacement compensation amount, a clear displacement guidance can be provided for each adjustment point, accurately quantifying the displacement requirement and ensuring the accuracy of adjustment.

[0105] Based on the above embodiment, the embodiment of the present invention further includes determining that the difference between the pressure data of each adjustment point is less than a preset threshold, and ending the adjustment of the parallelism of each adjustment point.

[0106] Based on the above embodiment, the angle determination module 302 of the embodiment of the present invention is specifically configured to obtain the deformation amount data of each adjustment point, and use the ratio of the pressure data of each adjustment point to the deformation amount data as the rigidity coefficient of the corresponding adjustment point.

[0107] Based on the above embodiment, the angle determination module 302 of the embodiment of the present invention is further specifically configured to construct a pressure vector of the product to be adjusted with the pressure data of each adjustment point as vector elements; construct a distance relationship matrix of the product to be adjusted with each position distance as vector elements; construct a rigidity coefficient vector of the product to be adjusted with the rigidity coefficient of each adjustment point as vector elements; add the pressure data of each adjustment point to obtain the resultant force data of the product to be adjusted; construct a first vector with the resultant force data, the lateral offset angle of the offset angle, and the longitudinal offset angle of the offset angle as vector elements; and use the mapping relationship that the product of the distance relationship matrix, the rigidity coefficient vector, and the first vector is equal to the pressure vector as the force balance condition.

[0108] Based on the above embodiment, the angle determination module 302 of the embodiment of the present invention is further specifically configured to obtain the force balance condition of the product to be adjusted; input the pressure data, position distances, rigidity coefficients, and resultant force data of the product to be adjusted into the mapping relationship of the force balance condition to obtain the offset angle of each adjustment point.

[0109] Based on the above embodiments, the parallelism adjustment module 303 of the embodiments of the present invention is specifically configured to multiply and add the matrix elements in the distance relationship matrix with the lateral offset angle and the longitudinal offset angle in the offset angle to obtain the displacement compensation amount of each adjustment point.

[0110] Embodiment Five

[0111] Embodiments of the present invention provide a device for performing a parallelism adjustment method, a computer-readable storage medium, and a computer program product.

[0112] Figure 6 The structural schematic diagram of the device that can be used to implement the embodiments of the present invention is shown. The device is intended to represent various forms of digital computers, such as, laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The device can also represent various forms of mobile devices, such as, personal digital processing, cellular phones, smart phones, wearable devices (such as helmets, glasses, watches, etc.) and other similar computing devices. The components shown in the embodiments of the present invention, their connections and relationships, and their functions are only examples and are not intended to limit the implementation of the embodiments of the present invention described and / or claimed herein.

[0113] As Figure 6 shown, the device includes at least one processor 11, and a memory communicatively connected to the at least one processor 11, such as a read-only memory (ROM) 12, a random access memory (RAM) 13, etc. Among them, the memory stores a computer program executable by the at least one processor. The processor 11 can execute various appropriate actions and processes according to the computer program stored in the ROM 12 or the computer program loaded from the storage unit 18 into the RAM 13. In the RAM 13, various programs and data required for the operation of the device 10 can also be stored. The processor 11, the ROM 12, and the RAM 13 are connected to each other through a bus 14. The input / output (I / O) interface 15 is also connected to the bus 14.

[0114] Multiple components in the device are connected to the I / O interface 15, including: an input unit 16, such as a keyboard, a mouse, etc.; an output unit 17, such as various types of displays, speakers, etc.; a storage unit 18, such as a magnetic disk, an optical disc, etc.; and a communication unit 19, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 19 allows the device to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks.

[0115] The processor 11 may be various general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the processor 11 include, but are not limited to, a central processing unit, a graphics processing unit, various dedicated artificial intelligence computing chips, various processors running machine learning model algorithms, a digital signal processor, and any suitable processor, controller, microcontroller, etc. The processor 11 executes the various methods and processes described above, for example, the parallelism adjustment method.

[0116] In some embodiments, the parallelism adjustment method may be implemented as a computer program tangibly embodied in a computer-readable storage medium, such as the storage unit 18. In some embodiments, part or all of the computer program may be loaded and / or installed onto the device via the ROM 12 and / or the communication unit 19. When the computer program is loaded into the RAM 13 and executed by the processor 11, one or more steps based on the parallelism adjustment method may be executed. Alternatively, in other embodiments, the processor 11 may be configured for the parallelism adjustment method by any other suitable means (e.g., by means of firmware).

[0117] Various embodiments of the systems and techniques described above in the embodiments of the present invention may be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays, application-specific integrated circuits, application-specific standard products, systems-on-a-chip, programmable logic devices with load, computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include: implemented in one or more computer programs that may be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a special-purpose or general-purpose programmable processor, and may receive data and instructions from a storage system, at least one input device, and at least one output device, and transmit the data and instructions to the storage system, the at least one input device, and the at least one output device.

[0118] The computer programs for implementing the methods of the embodiments of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to the processors of general-purpose computers, special-purpose computers, or other programmable data processing devices, such that when the computer programs are executed by the processors, the functions / operations specified in the flowcharts and / or block diagrams are implemented. The computer programs may be executed entirely on the machine, partially on the machine, as an independent software package partially on the machine and partially on a remote machine, or entirely on a remote machine or server.

[0119] In the context of embodiments of the present invention, a computer-readable storage medium may be a tangible medium that can contain or store a computer program for use by or in connection with an instruction execution system, apparatus, or device. The computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination of the foregoing. Alternatively, the computer-readable storage medium may be a machine-readable signal medium. More specific examples of the machine-readable storage medium would include an electrical connection based on one or more wires, a portable computer diskette, a hard disk, a RAM, a ROM, an erasable programmable read-only memory (EPROM or Flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0120] In order to provide interaction with a user, the systems and techniques described herein can be implemented on a device having: a display device (e.g., a cathode ray tube or a liquid crystal display monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or a trackball) by which the user can provide input to the device. Other kinds of devices can also be used to provide interaction with the user; for example, the feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including: acoustic input, voice input, or tactile input).

[0121] The systems and techniques described herein can be implemented in a computing system that includes backend components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes frontend components (e.g., a user computer having a graphical user interface or a web browser through which the user can interact with an implementation of the systems and techniques described herein), or a computing system that includes any combination of such backend components, middleware components, or frontend components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: local area networks, wide area networks, blockchain networks, and the Internet.

[0122] A computing system may include a client and a server. The client and the server are generally far from each other and usually interact via a communication network. The client-server relationship is created by computer programs running on respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or a cloud host, which is a host product in the cloud computing service system, and solves the defects of difficult management and weak business scalability existing in traditional physical hosts and virtual private server services.

[0123] It should be understood that various forms of processes shown above can be used, steps can be reordered, added or deleted. For example, the steps recited in the present invention can be executed in parallel, sequentially or in a different order, as long as the desired results of the technical solution of the present invention can be achieved, and this is not limited herein.

[0124] The above specific embodiments do not constitute a limitation on the protection scope of the embodiments of the present invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A parallelism adjustment method, characterized in that, The method includes: Obtaining the pressure data of at least two adjustment points on the product to be adjusted, the rigidity coefficient of each of the adjustment points, and the point distance of each of the adjustment points from the center of the product to be adjusted; Determining the offset angle of each of the adjustment points according to the pressure data, the rigidity coefficient, the point distance, and the force balance condition; Determining the displacement compensation amount of each of the adjustment points according to the offset angle and the point distance of each of the adjustment points, and adjusting the parallelism of the corresponding adjustment points according to the displacement compensation amount, including: determining that the difference between the pressure data of each of the adjustment points is less than a preset threshold, and ending the adjustment of the parallelism of each of the adjustment points.

2. The method according to claim 1, wherein Before determining the offset angle of each of the adjustment points according to the pressure data, the rigidity coefficient, the point distance, and the force balance condition, it includes: Obtaining the deformation amount data of each of the adjustment points, and taking the ratio of the pressure data of each of the adjustment points to the deformation amount data as the rigidity coefficient of the corresponding adjustment point.

3. The method according to claim 2, wherein Before determining the offset angle of each of the adjustment points according to the pressure data, the point distance, and the force balance condition, it further includes: Constructing a pressure vector of the product to be adjusted with the pressure data of each of the adjustment points as vector elements; Constructing a distance relationship matrix of the product to be adjusted with the point distances as vector elements; Constructing a rigidity coefficient vector of the product to be adjusted with the rigidity coefficients of each of the adjustment points as vector elements; Adding the pressure data of each of the adjustment points to obtain the resultant force data of the product to be adjusted; Constructing a first vector with the resultant force data, the lateral offset angle of the offset angle, and the longitudinal offset angle of the offset angle as vector elements; Taking the mapping relationship that the product of the distance relationship matrix, the rigidity coefficient vector, and the first vector is equal to the pressure vector as the force balance condition.

4. The method according to claim 1, characterized in that Determining the offset angle of each of the adjustment points according to the pressure data, the point distance, and the force balance condition, including: Obtaining the force balance condition of the product to be adjusted; Inputting the pressure data, the point distance, the rigidity coefficient of each of the adjustment points, and the resultant force data of the product to be adjusted into the mapping relationship of the force balance condition to obtain the offset angle of each of the adjustment points.

5. The method according to claim 1, characterized in that, Determining the displacement compensation amount of each of the adjustment points according to the offset angle and the point distance of each of the adjustment points, including: Multiplying and adding the matrix elements in the distance relationship matrix of the product to be adjusted corresponding to the lateral offset angle and the longitudinal offset angle in the offset angle to obtain the displacement compensation amount of each of the adjustment points.

6. A parallelism adjustment device, characterized in that, The device includes: A data acquisition module for obtaining the pressure data of at least two adjustment points on the product to be adjusted, the rigidity coefficient of each of the adjustment points, and the point distance of each of the adjustment points from the center of the product to be adjusted; An angle determination module for determining the offset angle of each of the adjustment points according to the pressure data, the rigidity coefficient, the point distance, and the force balance condition; The parallelism adjustment module is used to determine the displacement compensation amount of each adjustment point according to each of the offset angles and each of the point distances, and adjust the parallelism of the corresponding adjustment point according to each of the displacement compensation amounts, including: determining that the difference between the pressure data of each adjustment point is less than a preset threshold, and ending the adjustment of the parallelism of each adjustment point.

7. A device, characterized in that, The device includes: At least one processor; And a memory communicatively connected to the at least one processor; Wherein, the memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor so that the at least one processor can execute the parallelism adjustment method according to any one of claims 1-5.

8. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores including: Computer instructions, the computer instructions are used to enable the processor to implement the parallelism adjustment method according to any one of claims 1-5 when executed.

9. A computer program product, characterized in that, The computer program product includes: A computer program, which implements the parallelism adjustment method according to any one of claims 1-5 when executed by a processor.

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