Positioning method and system and storage medium

Abstract

The invention provides a positioning method and system and a storage medium, and the method comprises the steps: obtaining a plurality of groups of measurement data of a sample in a rotating motion process around a rotating shaft, and enabling each group of measurement data to comprise a measurement distance between a positioning region and a reference point in a preset direction, and a rotation angle of the sample relative to the rotating shaft; determining at least part of measurement data from the multiple groups of measurement data as fitting data; according to the fitting data, a preset fitting function is used for fitting the incidence relation between the measurement distance and the rotation angle, so that the position relation of the sample relative to the rotation shaft is obtained. According to the invention, the accuracy and real-time performance of wafer detection are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly to a positioning method, system and storage medium. Background Art

[0002] In the fields of semiconductor manufacturing and detection, the positioning of the center and edge of a wafer is a key step, providing a position reference for subsequent other detection processes. Traditional wafer positioning technologies usually rely on optical alignment methods. By using a camera or a laser sensor to capture the edge image of the wafer, image processing algorithms are used to calculate the center and radius of the wafer to complete the positioning. Although non-contact measurement can be achieved, in practical applications, optical sensors are easily interfered by factors such as ambient light, wafer surface reflection and dust, resulting in inaccurate edge detection. At the same time, traditional image processing algorithms have a large amount of calculation when processing high-resolution images, making it difficult to meet the real-time requirements. Summary of the Invention

[0003] The technical solution of the present application is to provide a positioning method, system and storage medium for solving the problems of insufficient accuracy and real-time performance of wafer positioning in the prior art.

[0004] The present application provides a positioning method. The sample to be positioned includes a preset positioning area. The positioning method includes: obtaining multiple groups of measurement data during the rotational movement of the sample around the rotation axis, where each group of measurement data includes the measurement distance between the positioning area and the reference point along a preset direction, and the rotation angle of the sample relative to the rotation axis; determining at least part of the measurement data from the multiple groups of measurement data as fitting data; according to the fitting data, using a preset fitting function to fit the correlation between the measurement distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis.

[0005] The present application also provides a positioning system for positioning the reference point and the rotation axis of a sample. The sample includes a preset positioning area, and the reference point and the rotation axis are correspondingly arranged; a processor configured to: obtain multiple groups of measurement data during the rotational movement of the sample around the rotation axis, where each group of measurement data includes the measurement distance between the positioning area and the reference point along a preset direction, and the rotation angle of the sample relative to the rotation axis; determine at least part of the measurement data from the multiple groups of measurement data as fitting data; according to the fitting data, use a preset fitting function to fit the correlation between the measurement distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis.

[0006] The present application also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the positioning method described above are implemented.

[0007] The technical solution of the present invention has the following beneficial effects.

[0008] In the invention provided by the technical solution of the present invention, by obtaining multiple groups of measurement data during the rotational movement of the sample around the rotation axis, where each group of measurement data includes the measurement distance between the positioning area and the reference point along a preset direction, and the rotation angle of the sample relative to the rotation axis; determining at least part of the measurement data from the multiple groups of measurement data as fitting data; and according to the fitting data, using a preset fitting function to fit the correlation between the measurement distance and the rotation angle, so as to obtain the positional relationship of the sample relative to the rotation axis. The accuracy and real-time performance of sample detection are improved through a non-image processing method. Description of the Drawings

[0009] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0010] Figure 1 It is a flow schematic diagram of the positioning method in the present invention; Figure 2 It is the first hardware layout schematic diagram of sample positioning in the present invention; Figure 3 It is the first embodiment schematic diagram of sample rotation in the present invention; Figure 4 It is the second hardware layout schematic diagram of sample positioning in the present invention; Figure 5 It is the third hardware layout schematic diagram of sample positioning in the present invention; Figure 6 It is the second embodiment schematic diagram of sample rotation in the present invention; Figure 7 It is the third embodiment schematic diagram of sample rotation in the present invention; Figure 8 It is the first embodiment schematic diagram of the relationship curve in the present invention; Figure 9 It is the second embodiment schematic diagram of the relationship curve in the present invention; Figure 10 It is the fourth hardware layout schematic diagram of sample positioning in the present invention; Figure 11 This is the fifth schematic diagram of the hardware layout for sample positioning in the present invention; Figure 12 This is the sixth schematic diagram of the hardware layout for sample positioning in the present invention; Figure 13 This is the seventh schematic diagram of the hardware layout for sample positioning in the present invention; Figure 14 This is the eighth schematic diagram of the hardware layout for sample positioning in the present invention; Figure 15 This is the third schematic diagram of the embodiment of the relationship curve in the present invention; Figure 16 This is a schematic diagram of the structure of the control system in the present invention. Detailed implementation manners

[0011] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0012] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the present invention, "each" includes a quantity of one and more than two.

[0013] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0014] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other, and all should be considered as within the scope described in this specification.

[0015] For the sake of convenience of description, the basic process of the positioning method in the present invention will be described below. Please refer to Figure 1 to provide an embodiment of the positioning method in the present invention, which is specifically as follows: 110. Obtain multiple sets of measurement data during the rotational movement of the sample around the rotation axis. Each set of measurement data includes the measurement distance between the positioning area and the reference point along a preset direction, and the rotation angle of the sample relative to the rotation axis; In this embodiment, the positioning area in the sample is used as the first positioning area (hereinafter described as the positioning area or the first positioning area. The description of the first positioning area is only for distinguishing the following second positioning area), and any area in the sample is further used as the second positioning area. The measurement distance refers to the measurement distance between the first positioning area and the reference point, and the rotation angle can be the rotation angle of the second positioning area relative to the rotation axis. The following takes the first positioning area and the second positioning area in the sample as examples to describe the embodiments of the present invention.

[0016] The first positioning area and the second positioning area set in the sample are used as key areas. Based on the positioning of these two key areas in physical space, the position of the entire sample in physical space can be determined. Exemplarily, the key areas include the central area, edge area, edge scaling area, horizontal and vertical ratio intersection area on the plane, translation area relative to the central area / edge area, etc., which are specifically set according to requirements. For example, the first positioning area is the edge area and the second positioning area is the central area. After the positions of these two key areas in physical space are determined, the position of the entire sample in physical space is also determined accordingly.

[0017] In this embodiment, the reference point and the rotation axis are used to position the first positioning area or also used for the second positioning area; the first positioning area or the second positioning area has at least relative positional relationships, motion relationships, etc. with respect to the reference point and the rotation axis. When the reference point and the rotation axis are correspondingly set and at known positions in the same physical space, based on the foregoing positional relationships and motion relationships, etc., the positions of the first positioning area and the second positioning area in this physical space can be obtained.

[0018] Furthermore, the first positioning area has the characteristic that its position in physical space is unknown but can be measured, and the second positioning area has the characteristic that its position in physical space is unknown and cannot be directly measured. At the same time, the first positioning area and the second positioning area have a fixed positional relationship. Through the first positioning area, the second positioning area is associated with the relative positions of the reference point and the rotation axis, so that the position of the second positioning area in physical space can be associated and expressed by the other three.

[0019] Specifically, the reference point and the rotation axis can be used as reference markers for the measurement data, and the relative measurement data with respect to the first positioning area and the second positioning area can be collected by an additional acquisition device; the reference point and the rotation axis can also directly set the acquisition device for the measurement data to collect the absolute measurement data of the first positioning area and the second positioning area.

[0020] Exemplarily, as Figure 2 shown, the sample 210 includes a first positioning area 211 and a second positioning area 212. The reference point 220 can be used as a reference marker or an acquisition device to obtain the measurement distance D1 with respect to the first positioning area 211; the rotation axis 230 can be used as a reference marker or an acquisition device to obtain the rotation angle D2 with respect to the first positioning area 211 and the second positioning area 212.

[0021] In one implementation, a preset angle / preset cycle duration is set. Whenever the sample rotates by the preset angle / preset cycle duration following the rotation axis, a collection instruction for the measurement data is triggered, and the measurement data is collected through the reference point and the rotation axis, or an additional measurement device. At the same time, a preset angle threshold (such as 360°) / preset duration threshold is set. When the sample rotates to reach the preset angle threshold / preset duration threshold following the rotation axis, the rotation and the collection of the measurement data are stopped. Among them, at this time, in addition to being used as a reference marker or an acquisition device, the rotation axis also serves as an active rotation device to drive the sample to perform a rotational motion.

[0022] In a preferred implementation, the positioning method is applied to a positioning system. The rotation axis is a carrying device / active rotation device. The carrying device is used to carry a circular sample and can rotate around its own rotation center to drive the circular sample to perform a rotational motion; the reference point is a measurement device, and the measurement direction is towards the rotation center of the carrying device. When the carrying device rotates by a preset rotation angle (such as any angle between 3° and 120°) each time, the measurement operation of the measurement device is triggered to measure the distance to the edge of the circular sample. Among them, the rotation center of the carrying device and the measurement device maintain fixed positions in physical space.

[0023] Among them, the preset direction is the direction passing through the reference point, having a preset slope, or having a preset included angle with the line connecting the reference point and the positioning area, or being parallel to the line connecting the reference point and the positioning area.

[0024] 120. Determine at least part of the measurement data from the multiple groups of the measurement data as fitting data; In this embodiment, when the sample rotates along the rotation axis, the first positioning region and the second positioning region maintain corresponding positional relationships, motion relationships, etc. relative to the reference point and the rotation axis. Specifically, it is reflected in that the measured distance and the rotation angle in the measurement data have a preset correlation relationship, such as having a fixed planar relationship curve (the two axis coordinates respectively represent the measured distance and the rotation angle in the same set of measurement data).

[0025] For problems such as abnormal partial data acquisition of the measuring device, sample defects, sample direction marking notches, sample direction marking flats, etc., at least one of the measured distance and the rotation angle collected will be abnormal; when establishing the correlation relationship between the two, such as the relationship curve, for the abnormal part of the measurement data, there will be jumping fitting points or fitting segments; the abnormal measurement data of the fitting points or fitting segments is removed, and the other measurement data is used as fitting data.

[0026] 130. According to the fitting data, use a preset fitting function to fit the correlation relationship between the measured distance and the rotation angle, so as to obtain the positional relationship of the sample relative to the rotation axis.

[0027] In this embodiment, the positioning result of the first positioning region may include any one of the following parameters: position coordinates, offset, position transformation amount, size, etc.; a fitting function is pre-established, which is at least related to the foregoing parameters, measured distance and rotation angle, and the foregoing parameters are solved through the measured distance and rotation angle.

[0028] In this embodiment, the second positioning region has the characteristics of unknown position and cannot be directly measured. By adding the first positioning region that can be directly measured, the position of the second positioning region is associated with the reference point and the rotation axis. So that the position expression of the second positioning region can be added to the fitting function for positioning the second positioning region.

[0029] At least two parameters including the first positioning region and the second positioning region are set, and the fitting function is set as a binary function, which involves the three-point positioning representation of the second positioning region by the first positioning region and the rotation axis, and the two-point representation involving the first positioning region and the reference point. Specifically, it can be set as a binary function including trigonometric function representation and linear representation.

[0030] The measurement data processing of the positioning method in the present invention will be further described below, specifically as follows: During the rotation of the sample around the rotation axis, the measurement position in the foregoing first positioning region will move linearly along the connection line between the reference point and the rotation axis, and the foregoing second positioning region will rotate relative to the rotation axis, where the measurement position is the intersection position of the first positioning region and the connection line.

[0031] In this embodiment, the shape of the sample can be circular, oval, rectangular, square, trapezoidal, parallelogram, etc., and is specifically set according to the shape requirements of the sample. The first positioning region presents a surrounding shape around the rotation axis, so that when the sample rotates along with the rotation axis, the measurement position at the intersection of the first positioning region and the connection line can move linearly relative to the reference point. For example, the first positioning region is an edge region. The second positioning region presents a non-surrounding shape at a preset distance from the rotation axis, so that when the sample rotates along with the rotation axis, the second positioning region rotates relative to the rotation axis. For example, the sample center.

[0032] Exemplarily, next, taking a circular sample as an example, the first positioning region is an edge region, and the second positioning region is the sample center, the embodiments of the present invention will be described. As Figure 3 shown, the sample 310 includes a first positioning region 320 (edge region) and a second positioning region 330 (sample center); a reference point 340 and a rotation axis 350 are set in the physical space, and a connection line 360 is included therebetween; the intersection position of the first positioning region 320 and the connection line 360 is the measurement position 321 of the first positioning region 320; when the sample 310 rotates relative to the rotation axis 350, the first positioning region of the sample rotates from the first region 370 to the first positioning region 320, and its measurement position translates from the first position 371 on the connection line 360 to the measurement position 321; the second positioning region of the sample rotates from the second region 380 to the second positioning region 330, wherein the second positioning region rotates along the circular trajectory 390 of the rotation axis 350.

[0033] In one implementation manner, the first positioning region is the sample edge, or the first positioning region is an identification region on the sample, the second positioning region is the sample center, the identification region is scaled proportionally to the sample edge, and has the same sample center as the sample edge.

[0034] Exemplarily, as Figure 4As shown, the samples can include a circular sample 410, a square sample 420, and a triangular sample 430 according to different shapes; the first positioning area of the circular sample 410 can be either the first sample edge 411 or any one of the first identification areas 412, the second positioning area is the first sample center 413, the first sample edge 411 and the first identification area 412 are scaled proportionally and have the same first sample center 413; the first positioning area of the square sample 420 can be either the second sample edge 421 or any one of the second identification areas 422, the second positioning area is the second sample center 423, the second sample edge 421 and the second identification area 422 are scaled proportionally and have the same second sample center 423; the first positioning area of the circular sample 430 can be either the third sample edge 431 or any one of the third identification areas 432, the second positioning area is the third sample center 433, the third sample edge 431 and the third identification area 432 are scaled proportionally and have the same third sample center 433.

[0035] Further, continue to refer to Figure 4 , if the first positioning area of the circular sample 410 is the first sample edge 411, it is the first measurement position 441, if the first positioning area of the circular sample 410 is any one of the first identification areas 412, it is any one of the second measurement positions 442; if the first positioning area of the square sample 420 is the second sample edge 421, it is the third measurement position 451, if the first positioning area of the square sample 420 is any one of the second identification areas 422, it is any one of the fourth measurement positions 452; if the first positioning area of the triangular sample 430 is the third sample edge 431, it is the fifth measurement position 461, if the first positioning area of the triangular sample 430 is any one of the third identification areas 432, it is any one of the sixth measurement positions 462.

[0036] Further, when the measurement position moves linearly along the line connecting the reference point and the rotation axis, the measurement distance between the measurement position and the reference point is collected; when the second positioning area rotates relative to the rotation axis, the rotation angle of the second positioning area relative to the measurement position and the rotation axis is collected.

[0037] Exemplarily, as Figure 5 shown, when the sample 510 rotates to the current position following the reference point, the measurement position 511 moves linearly along the line connecting the reference point 520 and the rotation axis 530 to reach the current position, and the measurement distance L between the measurement position 511 and the reference point 520 is collected; the second positioning area 512 rotates relative to the rotation axis 530 to the area 513, and the rotation angle θ of the area 513 relative to the measurement position 511 and the rotation axis 530 is collected.

[0038] In one embodiment, the reference point includes at least one measuring device, and the measuring direction of the measuring device is at least towards the rotation axis; collecting the measuring distance between the measuring position and the reference point includes: determining the measuring distance of the sample edge or the identification area in the measuring direction by the measuring device. That is, the reference point directly serves as the measuring device, and the measuring direction is the one-way connection direction from the measuring device to the rotation axis. That is, the sample is rotated around the rotation axis, and the measuring distance is obtained multiple times by the measuring device during the rotation movement, and the preset direction is the measuring direction of the measuring device. That is, in this embodiment, the measuring distance is collected while the rotation axis and the measuring device remain in place.

[0039] In one embodiment, the sample and the rotation axis are controlled to perform a rotation movement relative to the measuring device, such that there is the same rotation angle and opposite direction compared with the rotation movement of the sample following the rotation axis, wherein the measuring direction changes following the rotation movement of the rotation axis relative to the measuring device. That is, in this embodiment, the measuring distance is collected while the measuring device remains in place and the rotation axis rotates around the measuring device.

[0040] In this embodiment, the measuring distance of the entire first positioning area relative to the measuring device is collected. The sample is driven by the rotation axis to rotate by the same angle and in the opposite direction, avoiding the rotation angles of the rotation axis with the first positioning area and the second positioning area remaining unchanged respectively, and the measuring position of the first positioning area remaining unchanged (i.e., the measuring distance between the first positioning area and the measuring device remaining unchanged). At the same time, the measuring direction also changes accordingly, so that the measuring direction of the measuring device remains in the one-way connection direction towards the rotation axis.

[0041] Exemplarily, as Figure 6 shown, the sample 610 and the rotation axis 621 perform a rotation movement relative to the measuring device 631. Specifically, a movement track 640 is set for the rotation axis 621, and the movement track 640 is a circular track centered on the measuring device 631; when the rotation axis 621 rotates along the movement track 640 to the position of the rotation axis position 622, the first positioning area 611 rotates to the position of the area 612, and the rotation angle is A1. At this time, the measuring position 651 rotates to the first position 652, but remains unchanged relative to the positions of the measuring device 631 and the rotation axis 621; the rotation angles of the rotation axis 621 with the first position 652 and the second positioning area also remain unchanged (not shown in the figure).

[0042] At this time, control the sample 610 to rotate by the same rotation angle A2 (A1 = A2) but in the opposite direction along with the rotation axis 621, so that the first position 652 of the region 612 is adjusted to the second position 653. In addition, the measuring device 631 can keep its position unchanged and only adjust the measuring direction, or can be adjusted to the measuring device position 632, and the measuring direction changes accordingly. Among them, for the latter, for example, the viewing angle range of the measuring direction is [0°, 180°]. At this time, when measuring the distances of all the measuring positions in the first positioning region, the position needs to be adjusted at least once; for the former, for example, the viewing angle range of the measuring direction is [0°, 360°]. At this time, when measuring the distances of all the measuring positions in the first positioning region, there is no need to adjust the position.

[0043] In another embodiment of multiple groups of measurement data, make the measuring device rotate around the rotation axis, and obtain the measurement distance multiple times through the measuring device during the rotation movement. Specifically, by controlling the measuring device to rotate around the rotation axis, the rotation angle is the rotation angle of the measuring device relative to the rotation axis. Among them, the measuring direction changes along with the rotation movement of the measuring device around the rotation axis; the measurement distance is obtained multiple times through the measuring device during the change of the measuring direction. That is, in this embodiment, the measurement distance is collected when the rotation axis keeps its position unchanged and the measuring device rotates around the rotation axis.

[0044] Exemplarily, as Figure 7 shown, the measuring device 711 rotates relative to the sample 720 and the rotation axis 730 rotates. Specifically, a motion track 740 is set for the measuring device 711, and the motion track 740 is a circular track with the rotation axis 730 as the center; when the measuring device 711 rotates along the motion track 740 to the position of the device 712, the rotation angle is determined to be A. The measuring direction 751 changes to the position of the direction 752 accordingly.

[0045] In one embodiment of selecting fitting data, determine at least part of the measurement data from multiple groups of the measurement data as fitting data, including: establishing a relationship curve of the measurement distance changing with the rotation angle; determining a jump segment from the relationship curve, and based on the jump segment, determining the jump data in the measurement data; removing the jump data in the measurement data to obtain the fitting data; the jump segment is the region of the relationship curve corresponding to the opening position of the sample.

[0046] Specifically, as Figure 8As shown, the horizontal axis coordinate represents the rotation angle (150° - 450°), and the vertical axis coordinate represents the increment of the measured distance; a relationship curve 810 of the measured distance with respect to the rotation angle is established. It can be seen that in the first segment 820 of this relationship curve, there are sudden drops and increases in the measured distance, which can be determined as a jump segment. The measured data of the rotation angle and the measured distance fitted in this segment are excluded to obtain the fitted data.

[0047] Further, continue to refer to Figure 8 , for the relationship curve 810, it can be further compared with the standard relationship curve to avoid the situation that the first segment 820 belongs to the normal change of the measured distance; the rotation angle is normalized to between [0, -6], and at the same time, the vertical axis is adjusted to the measured distance. A relationship curve is regenerated through the normalized rotation angle and the measured distance, and then compared with the standard relationship curve to make the two spatially aligned; according to the comparison result, if it is determined that the first segment 820 has abnormal rises and falls compared with the second segment 830 of the standard relationship curve at the same rotation angle, it can be ensured that the first segment 820 is a jump segment.

[0048] In another implementation manner of selecting the fitted data, calculate the left slope and the right slope at each measurement position in each measurement data, and generate relationship curves of the left slope and the right slope with respect to the normalized rotation angle respectively; select the four measurement positions with the largest difference between the left slope and the right slope. Among these four measurement positions, the measurement position with the smallest slope difference is the starting position of the jump segment, and the measurement position with the largest slope difference is the ending position of the jump segment.

[0049] Exemplarily, as Figure 9 shown, the horizontal axis coordinate represents the normalized rotation angle, and the vertical axis coordinate represents the slope, showing segments of two relationship curves generated by the left slope and the right slope, including a first measurement position 910 with the largest slope difference and a second measurement position 920 with the smallest slope difference. The segment between the first measurement position 910 and the second measurement position 920 is the jump segment.

[0050] Next, the fitting function of the positioning method in the present invention will be further described, specifically as follows: In this embodiment, the preset fitting function further includes preset parameters and parameters to be fitted. The parameters to be fitted include the positional relationship of the sample relative to the rotation axis; wherein, the positional relationship includes at least one of the central starting position and the eccentric distance. The central starting position is the position of the sample center when the rotation angle is zero, and the eccentric distance is the distance between the sample center and the rotation axis; the preset parameters include: one or a combination of the sample size, the slope in the preset direction, the position information of the reference point, and the position information of the rotation axis.

[0051] Specifically, the preset parameter is the constant part in the fitting function and can be set to a fixed value or a fixed variable value. The parameter to be fitted is the variable part in the fitting function and needs to be optimized and determined based on measurement data, mainly for positioning the relative position of the sample with respect to the rotation axis.

[0052] In one embodiment, the positional relationship includes the central starting position (x 0 , y 0 ); the fitting relationship of the fitting function is: the measured distance is equal to the distance between the intersection point to be measured and the reference point, and the intersection point to be measured is the intersection point of the positioning area and the preset direction when the sample center rotates around the rotation axis.

[0053] In this embodiment, the intersection point to be measured is equivalent to the previous measurement position. The measured distance is the output of the measurement result of the intersection point to be measured by the measuring device; while the distance between the intersection point to be measured and the reference point can also be calculated by the fitting function composed of the parameter to be fitted (here, the central starting position (x 0 , y 0 )) and the preset parameter. The former belongs to the actual measurement result, and the latter belongs to the indirect prediction result based on the central starting position (x 0 , y 0 ). Among them, the fitting function also includes the rotation angle, and the actual measurement result and the indirect prediction result vary based on the rotation angle.

[0054] In a specific embodiment, as Figure 10 shown, the sample is circular; the coordinates (x, y) of the intersection point to be measured satisfy: (x - x θ ) 2 +(y - y θ ) 2 = r 2 and y = k(x - x r ) + y r ; where x θ = x 0 cosθ - y 0 sinθ, y θ = x 0 sinθ - y 0 cosθ; the measured distance L satisfies: L = ; where (x 0 , y 0 ) are the coordinates of the central starting position, (x θ , y θ ) are the coordinates after the sample center rotates the rotation angle θ around the rotation axis from the central starting position, (x r , y r) are the coordinates of the reference point, k is the slope of the preset direction S, and r is the radius of the sample.

[0055] In this embodiment, the coordinates (x r , y r ) of the reference point are known coordinates. After determining the coordinates (x, y) of the intersection point to be measured, the distance between the two can be determined, and the relationship with the measured distance L can be established. The coordinates (x, y) of the intersection point to be measured, as the intermediate hub between the circular sample and the reference point, on the one hand, establish a first relationship with the starting position (x 0 , y 0 ) of the center of the circular sample, and on the other hand, establish a second relationship with the coordinates (x r , y r ) of the reference point. The first relationship and the second relationship are combined to solve the binary function to obtain the coordinates (x, y) of the intersection point to be measured, thereby determining the indirect prediction result of the measured distance L.

[0056] In a specific embodiment, as Figure 11 shown, the sample is still circular; when the starting position O 1 is located on the preset direction S and the preset direction S is the same as the direction of the line connecting the reference point and the rotation axis, the coordinates (x, y) of the intersection point to be measured satisfy: ; where the measured distance L satisfies: L ; M is the distance between the rotation axis and the reference point, A is the distance from the termination position O 2 to the nearest point on the preset direction S, the termination position O 2 is the position of the sample after rotating the rotation angle θ around the rotation axis, (x r , y r ) are the coordinates of the reference point, k is the slope of the preset direction S, and r is the radius of the sample.

[0057] In a preferred embodiment, the preset direction is the same as the direction of the line connecting the reference point and the rotation axis, and the preset parameters include: the sample size, the slope of the preset direction, and the position information of the reference point; the slope of the preset direction is 1, and the position of the rotation axis or the reference point is the origin position, so that both the rotation axis position and the reference point are located on the horizontal coordinate axis, which is convenient for calculating the aforementioned fitting function.

[0058] In a preferred embodiment, one or more combinations of the sample size, the slope of the preset direction, the position information of the reference point, and the position information of the rotation axis can be used not only as preset parameters but also as parameters to be fitted. By fitting the correlation between the measured distance and the rotation angle using a preset fitting function based on the fitting data, it is also used to obtain the optimal values of the parameters to be fitted.

[0059] In one embodiment, the positional relationship further includes the eccentricity distance; the fitting relationship of the fitting function includes: the measured distance is equal to the distance between the intersection point to be measured and the reference point, and the intersection point to be measured is the intersection point of the first positioning area and the preset direction when the sample center rotates around the rotation axis, and the preset direction is the same as the direction of the line connecting the reference point and the rotation axis.

[0060] In a specific embodiment, as Figure 12 shown, the fitting function satisfies: the measured distance L satisfies: L = M - K; where, M = or M is a known value, M is the distance between the rotation axis and the reference point, (x 1 , x 2 ) is the position information of the reference point, (y 1 , y 2 ) is the position information of the rotation axis, where K is the distance between the rotation axis and the intersection point to be measured, and K is a function of d, θ, R (R is not shown in Figure 12 ), θ is the rotation angle, d is the eccentricity distance, and R is the sample size.

[0061] In this embodiment, the reference point and the rotation axis have known positions in physical space, and the intersection position of the line connecting the two and the first positioning area is the intersection point to be measured. A fitting function can be established based on this: (1) The distance K represents the positional relationship of the intersection point to be measured inside the sample. In addition to representing the rotation angle θ associated with the second positioning area and the rotation axis, it can also represent the sample size R (not shown in the figure, which can be used as a preset parameter or a parameter to be fitted) related to the first positioning area and the eccentricity distance d (not shown in the figure) related to the second positioning area. Therefore, K = f(θ, d, R), that is, the distance K is expressed as a function related to the rotation angle θ, the sample size R, and the eccentricity distance d; (2) The measured distance L represents the positional relationship between the intersection point to be measured and the reference point and can be directly obtained from the measurement data.

[0062] In a specific embodiment of obtaining the foregoing distance K, as Figure 13 shown, the sample is circular; the distance K satisfies: , that is, the measured distance L satisfies: L = M - ; wherein, a circle 1320 of the sample is set with the rotation axis 1310 as the center and the distance K as the radius, is the distance from the center of the sample to the termination position 1330 of the sample rotation and the starting intersection point 1340 of the circle, the direction of the line connecting the starting intersection point 1340 and the center passes through the starting position 1350 of the sample rotation, and the sample size R includes the distance .

[0063] In another specific embodiment obtained at the foregoing distance K, as Figure 14 shown, the starting position is located in the preset direction, and the distance K (not shown in the figure) satisfies: K = K1 + K2; K1 is the distance from the rotation axis to the nearest point 1410, and satisfies: K1 = d * cosθ; K2 is the distance from the intersection point to be measured to the nearest point 1410, and satisfies: , that is, the measured distance L satisfies: L = M - (d * cosθ + ); wherein, the nearest point is the nearest point 1410 from the termination position 1420 to the preset direction (the foot of the perpendicular from the termination position 1420 to the preset direction), is the radius of the sample, and the sample size R includes the radius of the sample .

[0064] In the actual fitting process, according to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the positional relationship of the sample relative to the rotation axis, including: setting a starting value for the parameter to be fitted; obtaining the fitting distance between the intersection point to be measured and the reference point based on the starting value, the preset parameter, and the rotation angle; obtaining an error according to the fitting distance and the measured distance, and optimizing the parameter to be fitted based on the error; and obtaining the positional relationship of the sample relative to the rotation axis according to the optimal result of the parameter to be fitted.

[0065] In this embodiment, the starting value is obtained in the calibration stage. Specifically, a standard size sample placed on the rotation axis is used for calibration, the coordinates of the reference point relative to the rotation axis are calculated, and the known positions of the reference point and the rotation axis in the physical space (the known distance of the distance M) are obtained; in the positioning stage, the starting value such as the eccentricity distance and the sample radius r are the standard radius of the standard size sample; the initially input eccentricity distance d or the center starting position (x 0 , y 0 ) can be calculated based on the sample radius r, the distance M, and the relationship curve (the measured distance y relative to the rotation angle θ).

[0066] Exemplarily, as Figure 15As shown, the lowest point 1510 and the highest point 1520 are determined through the relationship curve; the lowest point 1510 indicates that the distance between the sample edge and the reference point is the shortest, that is, the distance between the sample center and the reference point is the shortest. At this time, the sample center is located on the line connecting the reference point and the rotation axis, r + d + y = M, d = M - y - r; the highest point 1520 indicates that the distance between the sample edge and the reference point is the longest, that is, the distance between the sample center and the reference point is the longest. At this time, the sample center is located on the extension line of the line connecting the reference point towards the rotation axis, r - d + y = M, d = r + y - M.

[0067] If the fitting parameters to be fitted only include at least one of the center starting position and the eccentricity distance, the compensation in the actual fitting process includes: obtaining the eccentricity compensation from the sample center to the rotation center according to the optimization result of the fitting parameter to be fitted; obtaining the position relationship of the sample relative to the rotation axis according to the eccentricity compensation, where the eccentricity compensation is used to adjust the measurement distance in the measurement data so that the sample center moves towards the rotation axis.

[0068] If the fitting parameter to be fitted further includes the sample size, the compensation in the actual fitting process further includes: obtaining the radial compensation from the sample center to the rotation center according to the optimization result of the fitting parameter to be fitted; determining the position relationship of the sample relative to the rotation axis according to the radial compensation, where the radial compensation is used to adjust the measurement distance in the measurement data so that the size of the sample is scaled.

[0069] Specifically, the optimization result of the fitting parameter to be fitted includes the optimization result of the eccentricity distance, or further includes the optimization result of the sample radius; based on the eccentricity distance and the rotation angle, calculate the eccentricity vector from the sample center to the rotation center and use it as the eccentricity compensation; based on the initially input sample radius and the optimized sample radius, calculate the difference vector between the two (the direction is the direction of the line connecting the reference point and the rotation axis) to obtain the radial compensation.

[0070] Superimpose the eccentricity compensation and the radial compensation on the positioning data (the direction of the measurement distance is also the direction of the line connecting the reference point and the rotation axis), and superimpose the eccentricity compensation on the center starting position so that the sample center overlaps with the rotation center. It should be noted that the superimposition of the eccentricity compensation needs to be converted into the compensation distance in the measurement distance direction.

[0071] Those skilled in the art can clearly understand that, for the convenience and conciseness of description, only the above division of each functional unit and module is used as an example. In actual applications, the above functions can be allocated to different functional units and modules as needed, that is, the internal structure of the application device can be divided into different functional units or modules to complete all or part of the functions described above. Each functional unit and module in the embodiments can be integrated into a processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above integrated unit can be implemented in the form of hardware or in the form of a software functional unit. In addition, the specific names of each functional unit and module are only for the convenience of mutual distinction and do not limit the protection scope of the present invention. The specific working processes of the units and modules in the above system can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0072] In the above embodiments, the descriptions of the various embodiments have their own emphases. For the parts not detailed or recorded in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0073] Those of ordinary skill in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware, or by a combination of computer software and electronic hardware. Whether these functions are executed in the form of hardware or software depends on the specific application and design constraints of the technical solution. Professionals can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of the present invention.

[0074] In the embodiments provided by the present invention, it should be understood that the disclosed device / terminal device and method can be implemented in other ways. For example, the device / terminal device embodiments described above are only illustrative. For example, the division of the module or unit is only a logical function division. In actual implementation, there can be other division methods. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection to each other can be through some interfaces. The indirect coupling or communication connection of the device or unit can be in an electrical, mechanical or other form.

[0075] The unit described as a separated component may or may not be physically separated, and the component displayed as a unit may or may not be a physical unit, that is, it can be located in one place or distributed to multiple network units. Some or all of the units can be selected based on actual needs to achieve the purpose of the solution of this embodiment.

[0076] In addition, in each embodiment of the present invention, each functional unit can be integrated into a processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above integrated unit can be implemented in the form of hardware or in the form of a software functional unit.

[0077] If the integrated module / unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on such an understanding, to implement all or part of the processes in the above-described embodiment methods of the present invention, it can also be completed by a computer program instructing relevant hardware. The computer program can be stored in a computer-readable storage medium. When the computer program is executed by a processor, the steps of the above-described method embodiments can be implemented. Among them, the computer program includes computer program code, and the computer program code can be in the form of source code, object code, executable file, or some intermediate form, etc. The computer-readable medium can include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), electrical carrier signal, telecommunication signal, and software distribution medium, etc. It should be noted that the content included in the computer-readable medium can be appropriately increased or decreased based on the requirements of legislation and patent practice within the jurisdiction. For example, in some jurisdictions, based on legislation and patent practice, the computer-readable medium does not include electrical carrier signals and telecommunication signals.

[0078] The embodiment of the present application also provides a control system. Please refer to Figure 16 , which shows a schematic structural diagram of the control system provided by an embodiment of the present application. As Figure 16 shown, the control system 1600 includes: a processor 160, a memory 161, a bus 162, and a communication interface 163. The processor 160, the communication interface 163, and the memory 161 are connected through the bus 162; computer program instructions executable by the processor 160 are stored in the memory 161, and when the processor 160 executes the computer program instructions, it executes the positioning method provided by any one of the foregoing embodiments of the present application.

[0079] Among them, the memory 161 may include a high-speed random access memory (RAM), and may also include a non-volatile memory, such as at least one disk memory. The communication connection between the device network element and at least one other network element is realized through at least one communication interface 163 (which can be wired or wireless), and the Internet, wide area network, local area network, metropolitan area network, etc. can be used.

[0080] The bus 162 can be an ISA bus, a PCI bus, an EISA bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc. Among them, the memory 161 is used to store a program. After receiving an execution instruction, the processor 160 executes the program. Any implementation manner of the positioning method disclosed in any implementation manner of the foregoing embodiments of the present application can be applied to the processor 160 or implemented by the processor 160.

[0081] The processor 160 may be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method can be completed by the integrated logic circuit in the hardware of the processor 160 or the instructions in the form of software. The above-mentioned processor 160 can be a general-purpose processor, including a central processing unit (CPU for short), a network processor (NP for short), etc.; it can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components. It can implement or execute the various methods, steps, and logic block diagrams disclosed in the embodiments of the present application. The general-purpose processor can be a microprocessor, or the processor can also be any conventional processor, etc. The steps of the method disclosed in combination with the embodiments of the present application can be directly embodied as being executed and completed by the hardware decoding processor, or executed and completed by the combination of the hardware and software modules in the decoding processor. The software module can be located in a mature storage medium in the art such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory, or an electrically erasable programmable memory, a register, etc. This storage medium is located in the memory 161, and the processor 160 reads the information in the memory 161 and combines its hardware to complete the steps of the above method.

[0082] The control system provided by the embodiments of the present application and the positioning method provided by the embodiments of the present application are based on the same inventive concept and have the same beneficial effects as the methods adopted, run, or implemented by them.

[0083] The embodiments of the present application also provide a computer-readable storage medium corresponding to the positioning method provided in the foregoing embodiments, on which computer program instructions are stored. When the computer program instructions are executed by a processor, the positioning method provided in any of the foregoing embodiments will be implemented.

[0084] It should be noted that examples of the computer-readable storage medium may include, but are not limited to, optical discs, phase change memories (PRAMs), static random access memories (SRAMs), dynamic random access memories (DRAMs), other types of random access memories (RAMs), read-only memories (ROMs), electrically erasable programmable read-only memories (EEPROMs), flash memories, or other optical and magnetic storage media, which will not be elaborated here one by one.

[0085] The computer-readable storage medium provided in the above embodiments of the present application and the positioning method provided in the embodiments of the present application are based on the same inventive concept and have the same beneficial effects as the methods adopted, run, or implemented by the application programs stored thereon.

[0086] The embodiments of the present application provide a computer program product. When the computer program product runs on a mobile terminal, the mobile terminal is enabled to implement the steps in the above-mentioned method embodiments when executed.

[0087] Obviously, the above embodiments are merely examples for clear illustration and are not limitations on the embodiments. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is not necessary and impossible to enumerate all the embodiments here. And the obvious changes or variations derived therefrom are still within the protection scope of the present invention.

Claims

1. A positioning method, characterized in that: The sample to be positioned includes a preset positioning area, and the positioning method includes: Acquire multiple sets of measurement data during the sample's rotational movement around the rotation axis, wherein each set of measurement data includes a measured distance between the positioning area and a reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis; Determining at least part of the measurement data from the plurality of sets of the measurement data as fitting data; According to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis.

2. The positioning method according to claim 1, characterized in that: Determining at least part of the measurement data from the plurality of sets of the measurement data as fitting data comprises: Establishing a relationship curve between the measured distance and the rotation angle; Determine a transition segment from the relationship curve, and determine transition data in the measurement data based on the transition segment; Eliminate the jump data in the measurement data to obtain fitting data; The jump segment is a relationship curve area corresponding to the sample opening position.

3. The positioning method according to claim 1, characterized in that: The preset fitting function also includes preset parameters and parameters to be fitted, and the parameters to be fitted include the position relationship of the sample relative to the rotation axis; Wherein, the position relationship includes at least one of a center starting position and an eccentric distance, the center starting position is the position of the sample center when the rotation angle is zero, and the eccentric distance is the distance between the sample center and the rotation axis; the preset parameters include: one or more combinations of sample size, the slope of the preset direction, the position information of the reference point, and the position information of the rotation axis.

4. The positioning method according to claim 3, characterized in that: The positional relationship includes the center starting position; the fitting relationship of the fitting function is: the measurement distance is equal to the distance between the intersection point to be measured and the reference point, and the intersection point to be measured is the intersection of the positioning area and the preset direction when the center of the sample rotates around the rotation axis.

5. The positioning method according to claim 4, characterized in that: The sample is circular; The coordinates (x, y) of the intersection point to be measured satisfy: (x θ ) 2 +(yy θ ) 2 =r 2 , and y=k(xx r )+y r ; among them, x θ =x0cosθ-y0sinθ,y θ =x0sinθ-y0cosθ; The measuring distance L satisfies: L= ; Among them, (x0, y0) is the coordinate of the starting position of the center, (x θ ,y θ ) is the coordinate of the sample center after rotating from the center starting position around the rotation axis by the rotation angle θ, (x r ,y r ) is the coordinate of the reference point, k is the slope of the preset direction, and r is the radius of the sample.

6. The positioning method according to claim 4, characterized in that: The sample is circular; When the starting position is located in the preset direction, and the preset direction is the same as the direction of the line between the reference point and the rotation axis, the coordinates (x, y) of the intersection point to be measured satisfy: ; Wherein, the measured distance L satisfies: ; M is the distance between the rotation axis and the reference point, A is the distance from the end position to the nearest point in the preset direction, and the end position is the position of the sample after rotating around the rotation axis by the rotation angle θ, (x r ,y r ) is the coordinate of the reference point, k is the slope of the preset direction, and r is the radius of the sample.

7. The positioning method according to claim 3, characterized in that: The preset direction is the same as the direction of the line between the reference point and the rotation axis, and the preset parameters include: the sample size, the slope of the preset direction and the position information of the reference point; the slope of the preset direction is 1, and the rotation axis position or the reference point position is the origin position.

8. The positioning method according to claim 3, characterized in that: The parameters to be fitted also include one or more combinations of the sample size, the slope of the preset direction, the position information of the reference point, and the position information of the rotation axis; According to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle, and is also used to obtain the parameter to be fitted.

9. The positioning method according to claim 3, characterized in that: The positional relationship also includes the eccentric distance; The fitting relationship of the fitting function includes: the measured distance is equal to the distance between the intersection point to be measured and the reference point, the intersection point to be measured is the intersection of the positioning area and the preset direction when the center of the sample rotates around the rotation axis, and the preset direction is the same as the direction of the line between the reference point and the rotation axis.

10. The positioning method according to claim 9, characterized in that: The fitting function satisfies: The measuring distance L satisfies: L=MK; Where M= Or M is a known value, M is the distance between the rotation axis and the reference point, (x1, x2) is the position information of the reference point, (y1, y2) is the position information of the rotation axis, Wherein, K is the distance between the rotation axis and the intersection point to be measured, and K is a function of d, θ, and R, θ is the rotation angle, d is the eccentric distance, and R is the sample size.

11. The positioning method according to claim 10, characterized in that: The sample is circular; The distance K satisfies: ; Wherein, a circle of the sample is set with the rotation axis as the center and the distance K as the radius, The sample size R includes the distance between the sample center at the end position of the sample rotation and the starting intersection of the circle. The direction of the line connecting the starting intersection and the circle center passes through the starting position of the sample rotation. .

12. The positioning method according to claim 11, characterized in that: The starting position is located in the preset direction, and the distance K satisfies: K=K1+K2; K1 is the distance from the rotation axis to the nearest point, and satisfies: K1=d*cosθ; K2 is the distance from the intersection point to be measured to the nearest point, and satisfies: ; The closest point is the closest point from the end position to the preset direction. is the sample radius, and the sample size R includes the sample radius .

13. The positioning method according to any one of claims 4-6 and 9-11, characterized in that: According to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis, including: Setting a starting value for the parameter to be fitted; Based on the starting value, the preset parameter and the rotation angle, obtaining a fitting distance between the intersection point to be measured and the reference point; Obtaining an error according to the fitting distance and the measured distance, and optimizing the parameter to be fitted based on the error; According to the optimization result of the parameter to be fitted, the position relationship of the sample relative to the rotation axis is obtained.

14. The positioning method according to claim 13, characterized in that: If the parameter to be fitted only includes at least one of the center starting position and the eccentric distance, after obtaining the position relationship of the sample relative to the rotation axis according to the optimization result of the parameter to be fitted, the method further includes: According to the optimization result of the parameter to be fitted, obtaining the eccentricity compensation from the center of the sample to the rotation axis; The positional relationship of the sample relative to the rotation axis is obtained according to the eccentricity compensation, wherein the eccentricity compensation is used to adjust the measurement distance in the measurement data so that the center of the sample moves toward the direction of the rotation axis.

15. The positioning method according to claim 13, characterized in that: If the parameters to be fitted also include the sample size, after obtaining the positional relationship of the sample relative to the rotation axis according to the optimization result of the parameters to be fitted, the method further includes: According to the optimization result of the parameter to be fitted, obtaining radial compensation from the center of the sample to the rotation axis; The positional relationship of the sample relative to the rotation axis is determined according to the radial compensation, wherein the radial compensation is used to adjust the measurement distance in the measurement data so that the size of the sample is scaled.

16. The positioning method according to claim 1, characterized in that: The positioning area is a sample edge, or the positioning area is a marking area on the sample, the marking area is proportionally scaled with the sample edge, and has the same sample center as the sample edge.

17. The positioning method according to claim 16, characterized in that: Acquiring multiple sets of measurement data during the sample's rotational movement around the rotation axis includes: causing the sample to rotate around the rotation axis, and acquiring the measurement distance multiple times through a measuring device during the rotational movement, wherein the preset direction is the measurement direction of the measuring device; or causing the measuring device to rotate around the rotation axis, and acquiring the measurement distance multiple times through the measuring device during the rotational movement, wherein the preset direction is the measurement direction of the measuring device.

18. The positioning method according to claim 17, characterized in that: The measuring device is caused to rotate about the rotation axis, and the measuring distance is obtained multiple times by the measuring device during the rotation, including: Controlling the measuring device to rotate around the rotation axis, the rotation angle being the rotation angle of the measuring device relative to the rotation axis, wherein the measuring direction changes following the rotation of the measuring device around the rotation axis; The measuring distance is acquired multiple times by the measuring device during the change of the measuring direction.

19. A positioning system, characterized in that: The positioning system comprises: A reference point and a rotation axis for locating a sample, wherein the sample includes a preset positioning area, and the reference point and the rotation axis are correspondingly arranged; processor, and is configured to: Acquire multiple sets of measurement data during the sample's rotational movement around the rotation axis, wherein each set of measurement data includes a measured distance between the positioning area and a reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis; Determining at least part of the measurement data from the plurality of sets of the measurement data as fitting data; According to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis.

20. The positioning system according to claim 19, further comprising a measuring device arranged at the reference point, wherein the measuring device comprises a laser rangefinder, an interferometer and a dispersive confocal instrument.

21. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the positioning method according to any one of claims 1 to 18 is implemented.

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