Positioning method, system and storage medium

Abstract

The present application provides a positioning method, system, and storage medium, comprising: obtaining multiple sets of measurement data during the rotational motion of a sample about a rotation axis, wherein each set of measurement data includes a measured distance between a positioning area and a reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis; determining at least a portion of the measurement data from the multiple sets of measurement data as fitting data; and fitting the correlation between the measured distance and the rotation angle using a preset fitting function based on the fitting data to obtain the positional relationship of the sample relative to the rotation axis. The present invention improves the accuracy and real-time performance of wafer inspection.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a positioning method, system and storage medium. Background Art

[0002] In the field of semiconductor manufacturing and inspection, locating the center and edge of the wafer is a key step, providing a position reference for other subsequent inspection processes. Traditional wafer positioning technology usually relies on optical alignment methods, using cameras or laser sensors to capture edge images of the wafer, and using image processing algorithms to calculate the center and radius of the wafer to complete positioning. Although non-contact measurement is possible, in actual applications, optical sensors are easily interfered with by factors such as ambient light, wafer surface reflections, and dust, resulting in inaccurate edge detection. At the same time, traditional image processing algorithms have a large amount of computation when processing high-resolution images, making it difficult to meet real-time requirements. Summary of the Invention

[0003] The technical solution of the present application is to provide a positioning method, system and storage medium for solving the problem of insufficient accuracy and real-time performance of wafer positioning in the prior art.

[0004] The present application provides a positioning method, in which a sample to be positioned includes a preset positioning area, and the positioning method includes: obtaining multiple sets of measurement data during the rotational movement of the sample around a rotation axis, wherein each set of measurement data includes a measured distance between the positioning area and a reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis; determining at least part of the measurement data from the multiple sets of measurement data as fitting data; and fitting the correlation between the measurement distance and the rotation angle using a preset fitting function based on the fitting data to obtain the positional relationship of the sample relative to the rotation axis.

[0005] The present application also provides a positioning system for locating a reference point and a rotation axis of a sample, wherein the sample includes a preset positioning area, and the reference point and the rotation axis are correspondingly arranged; a processor is configured to: obtain multiple sets of measurement data during the rotational movement of the sample around the rotation axis, wherein each set of measurement data includes a measured distance between the positioning area and the reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis; determine at least part of the measurement data from the multiple sets of measurement data as fitting data; and according to the fitting data, use a preset fitting function to fit the correlation relationship between the measured distance and the rotation angle to obtain the positional relationship of the sample relative to the rotation axis.

[0006] The present application also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the positioning method described above are implemented.

[0007] The technical solution of the present invention has the following beneficial effects.

[0008] In the invention provided by the technical solution of the present invention, multiple sets of measurement data are obtained during the sample's rotational motion around the rotation axis, wherein each set of measurement data includes the measured distance between the positioning area and the reference point along a preset direction, and the rotation angle of the sample relative to the rotation axis; at least part of the measurement data is determined from the multiple sets of measurement data as fitting data; and based on the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the positional relationship of the sample relative to the rotation axis. The accuracy and real-time performance of sample detection are improved through non-image processing methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0010] Figure 1 A schematic flow chart of the positioning method of the present invention;

[0011] Figure 2 A schematic diagram of the first hardware arrangement for sample positioning in the present invention;

[0012] Figure 3 This is a schematic diagram of a first embodiment of sample rotation in the present invention;

[0013] Figure 4 A second schematic diagram of the hardware arrangement for sample positioning in the present invention;

[0014] Figure 5 A third schematic diagram of the hardware arrangement for sample positioning in the present invention;

[0015] Figure 6 This is a schematic diagram of a second embodiment of sample rotation in the present invention;

[0016] Figure 7 This is a schematic diagram of a third embodiment of sample rotation in the present invention;

[0017] Figure 8 This is a schematic diagram of a first embodiment of a relationship curve in the present invention;

[0018] Figure 9 Schematic diagram of a second embodiment of the relationship curve in the present invention;

[0019] Figure 10 This is a schematic diagram of the fourth hardware arrangement for sample positioning in the present invention;

[0020] Figure 11 This is a fifth hardware layout diagram for sample positioning in the present invention;

[0021] Figure 12 This is a sixth hardware arrangement diagram for sample positioning in the present invention;

[0022] Figure 13 This is a seventh hardware arrangement diagram for sample positioning in the present invention;

[0023] Figure 14 This is a schematic diagram of the eighth hardware arrangement for sample positioning in the present invention;

[0024] Figure 15 Schematic diagram of a third embodiment of the relationship curve in the present invention;

[0025] Figure 16 It is a structural diagram of the control system in the present invention. DETAILED DESCRIPTION

[0026] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0027] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the present invention, "each" includes one and more than two quantities.

[0028] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0029] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other, and should all be considered to be within the scope of this specification.

[0030] For the sake of convenience, the basic process of the positioning method in the present invention is described below. Figure 1 , provides an embodiment of the positioning method in the present invention, which is specifically as follows:

[0031] 110. Acquire multiple sets of measurement data during the sample's rotational motion around the rotation axis, wherein each set of measurement data includes a measured distance between the positioning area and a reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis;

[0032] In this embodiment, a positioning area within the sample is defined as the first positioning area (hereinafter referred to as the positioning area or the first positioning area, the first positioning area being described solely to distinguish it from the second positioning area described below). Furthermore, any area within the sample is defined as the second positioning area. The measured distance refers to the distance between the first positioning area and the reference point, and the rotation angle refers to the rotation angle of the second positioning area relative to the rotation axis. The following describes the embodiments of the present invention using the first and second positioning areas within the sample as examples.

[0033] The first positioning area and the second positioning area set in the sample are used as key areas. Based on the positioning of these two key areas in physical space, the position of the entire sample in physical space can be determined. Exemplarily, the key areas include the sample's center area, edge area, edge scaling area, the intersection area of ​​horizontal and vertical ratios on a plane, and the translation area relative to the center area / edge area. Specific settings are made based on needs. For example, the first positioning area is the edge area and the second positioning area is the center area. After the positions of these two key areas are determined in physical space, the position of the entire sample in physical space is also determined.

[0034] In this embodiment, the reference point and the rotation axis are used to locate the first positioning area or also for the second positioning area; the first positioning area or the second positioning area has at least a relative position relationship, motion relationship, etc. relative to the reference point and the rotation axis. When the reference point and the rotation axis are set correspondingly and have known positions in the same physical space, the positions of the first positioning area and the second positioning area in the physical space can be calculated based on the aforementioned position relationship and motion relationship, etc.

[0035] Furthermore, the first positioning area has the characteristic of an unknown but measurable position in physical space, while the second positioning area has the characteristic of an unknown and directly measurable position in physical space. Furthermore, the first and second positioning areas have a fixed positional relationship. The first positioning area is used to associate the second positioning area with its relative position to the reference point and the rotation axis, allowing the second positioning area's position in physical space to be expressed in relation to the other three.

[0036] Specifically, the reference point and the rotation axis can be used as reference markers for the measurement data, and an additional acquisition device can be used to collect relative measurement data relative to the first positioning area and the second positioning area; the reference point and the rotation axis can also be used to directly set the measurement data acquisition device to collect absolute measurement data with the first positioning area and the second positioning area.

[0037] For example, Figure 2 As shown, the sample 210 includes a first positioning area 211 and a second positioning area 212. The reference point 220 can be used as a reference marker or a collection device to obtain the measured distance D1 relative to the first positioning area 211; the rotation axis 230 can be used as a reference marker or a collection device to obtain the rotation angle D2 relative to the first positioning area 211 and the second positioning area 212.

[0038] In one embodiment, a preset angle / preset cycle duration is set. Whenever the sample rotates along the rotation axis by this preset angle / preset cycle duration, a measurement data acquisition instruction is triggered, and measurement data is collected using a reference point and the rotation axis, or an additional measurement device. A preset angle threshold (e.g., 360°) / preset duration threshold is also set. When the sample rotates along the rotation axis and reaches the preset angle threshold / preset duration threshold, rotation and measurement data acquisition cease. In this case, the rotation axis, in addition to serving as a reference marker or acquisition device, also acts as an active rotation device, driving the sample's rotational motion.

[0039] In a preferred embodiment, the positioning method is applied to a positioning system, wherein the rotation axis is a carrier / active rotation device. The carrier is used to support a circular sample and can rotate about its own rotation center, driving the circular sample to rotate. The reference point is a measuring device, with the measurement direction oriented toward the carrier's rotation center. Each time the carrier rotates through a predetermined angle (e.g., any angle between 3° and 120°), the measuring device triggers a measurement operation to measure the distance to the edge of the circular sample. The carrier's rotation center and the measuring device maintain fixed positions in physical space.

[0040] The preset direction is a direction passing through the reference point, has a preset slope, or has a preset angle with the line connecting the reference point and the positioning area, or is parallel to the line connecting the reference point and the positioning area.

[0041] 120. Determine at least part of the measurement data from the multiple sets of measurement data as fitting data;

[0042] In this embodiment, when the sample rotates along the rotation axis, the first positioning area and the second positioning area maintain corresponding positional relationships, motion relationships, etc. relative to the reference point and the rotation axis. Specifically, the measured distance and the rotation angle in the measurement data have a preset correlation relationship, such as a fixed plane relationship curve (the two axis coordinates respectively represent the measured distance and rotation angle in the same set of measurement data).

[0043] Problems such as abnormal data collection in some measuring devices, sample defects, notches in the sample orientation mark, and flat edges in the sample orientation mark may cause at least one of the collected measurement distance and rotation angle to be abnormal. When establishing a correlation between the two, such as a relationship curve, jump fitting points or fitting segments may appear for the abnormal measurement data. The abnormal measurement data of the fitting point or fitting segment is discarded, and the other measurement data is used as the fitting data.

[0044] 130. According to the fitting data, use a preset fitting function to fit the correlation between the measured distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis.

[0045] In this embodiment, the positioning result of the first positioning area may include any of the following: position coordinates, offset, position change, size and other parameters; a fitting function is pre-built, which is at least related to the aforementioned parameters, measured distance and rotation angle, and the aforementioned parameters are solved by measuring distance and rotation angle.

[0046] In this embodiment, the second positioning area has an unknown position that cannot be directly measured. By adding the first positioning area, which can be directly measured, the position of the second positioning area is associated with the reference point and the rotation axis. This allows the position expression of the second positioning area to be included in the fitting function for locating the second positioning area.

[0047] At least two parameters including the first positioning area and the second positioning area are included, and the fitting function is set as a binary function, which also involves the three-point positioning representation of the first positioning area and the rotation axis to the second positioning area, as well as the two-point representation involving the first positioning area and the reference point. Specifically, it can be set as a binary function including trigonometric function representation and linear representation.

[0048] The following further describes the measurement data processing of the positioning method in the present invention, as shown in the following details:

[0049] During the rotation of the sample around the rotation axis, the measurement position in the aforementioned first positioning area will move linearly along the line connecting the reference point and the rotation axis, and the aforementioned second positioning area will rotate relative to the rotation axis, wherein the measurement position is the intersection position of the first positioning area and the line.

[0050] In this embodiment, the shape of the sample can be circular, elliptical, rectangular, square, trapezoidal, parallelogram, etc., and can be specifically configured according to the sample shape requirements. The first positioning area is arranged in a circular shape around the rotation axis, so that when the sample rotates along the rotation axis, the measurement position at the intersection of the first positioning area and the connecting line can move linearly relative to the reference point, for example, the first positioning area is an edge area. The second positioning area is arranged in a non-circular shape at a predetermined distance from the rotation axis, so that when the sample rotates along the rotation axis, the second positioning area rotates relative to the rotation axis, for example, the center of the sample.

[0051] For example, the following describes an embodiment of the present invention by taking a circular sample as an example, wherein the first positioning area is the edge area and the second positioning area is the center of the sample. Figure 3As shown, the sample 310 includes a first positioning area 320 (edge ​​area) and a second positioning area 330 (sample center); a reference point 340 and a rotation axis 350 are set in the physical space, and a connecting line 360 ​​is included between the two; the intersection position of the first positioning area 320 and the connecting line 360 ​​is the measurement position 321 of the first positioning area 320; when the sample 310 rotates relative to the rotation axis 350, the first positioning area of ​​the sample rotates from the first area 370 to the first positioning area 320, and its measurement position is translated from the first position 371 to the measurement position 321 on the connecting line 360; the second positioning area of ​​the sample rotates from the second area 380 to the second positioning area 330, wherein the second positioning area rotates along the circular trajectory 390 of the rotation axis 350.

[0052] In one embodiment, the first positioning area is the edge of the sample, or the first positioning area is the identification area on the sample, and the second positioning area is the center of the sample. The identification area is proportionally scaled with the sample edge and has the same sample center as the sample edge.

[0053] For example, Figure 4 As shown, the samples may include circular samples 410, square samples 420 and triangular samples 430 according to different shapes; the first positioning area of ​​the circular sample 410 may be the first sample edge 411 or any one of the first identification area 412, the second positioning area is the first sample center 413, the first sample edge 411 and the first identification area 412 are scaled in proportion and have the same first sample center 413; the first positioning area of ​​the square sample 420 may be the second sample edge 421 or any one of the second identification area 422, the second positioning area is the second sample center 423, the second sample edge 421 and the second identification area 422 are scaled in proportion and have the same second sample center 423; the first positioning area of ​​the circular sample 430 may be the third sample edge 431 or any one of the third identification area 432, the second positioning area is the third sample center 433, the third sample edge 431 and the third identification area 432 are scaled in proportion and have the same third sample center 433.

[0054] For further information, see Figure 4If the first positioning area of ​​the circular sample 410 is the first sample edge 411, then it is the first measurement position 441; if the first positioning area of ​​the circular sample 410 is any one of the first identification areas 412, then it is any one of the second measurement positions 442; if the first positioning area of ​​the square sample 420 is the second sample edge 421, then it is the third measurement position 451; if the first positioning area of ​​the square sample 420 is any one of the second identification areas 422, then it is any one of the fourth measurement positions 452; if the first positioning area of ​​the triangular sample 430 is the third sample edge 431, then it is the fifth measurement position 461; if the first positioning area of ​​the triangular sample 430 is any one of the third identification areas 432, then it is any one of the sixth measurement positions 462.

[0055] Furthermore, when the measuring position makes a linear motion on the line connecting the reference point and the rotation axis, the measured distance between the measuring position and the reference point is collected; when the second positioning area makes a rotational motion relative to the rotation axis, the rotation angle of the second positioning area relative to the measuring position and the rotation axis is collected.

[0056] For example, Figure 5 As shown, when the sample 510 rotates to the current position following the reference point, the measurement position 511 moves linearly along the line connecting the reference point 520 and the rotation axis 530 to reach the current position, and the measurement distance L between the measurement position 511 and the reference point 520 is collected; the second positioning area 512 rotates relative to the rotation axis 530 to the area 513, and the rotation angle θ of the area 513 relative to the measurement position 511 and the rotation axis 530 is collected.

[0057] In one embodiment, the reference point includes at least one measuring device, the measuring direction of which is at least oriented toward the rotation axis. Acquiring the measured distance between the measurement position and the reference point includes determining the measured distance of the sample edge or the marked area in the measurement direction using the measuring device. This means that the reference point directly serves as the measuring device, and the measurement direction is the direction of a one-way line connecting the measuring device to the rotation axis. Specifically, the sample is rotated about the rotation axis, and the measured distances are acquired multiple times using the measuring device during this rotational motion. The preset direction is the measurement direction of the measuring device. In other words, in this embodiment, the measured distances are acquired while both the rotation axis and the measuring device remain in position.

[0058] In one embodiment, the sample and the rotation axis are controlled to rotate relative to the measuring device so that the sample rotates at the same angle but in the opposite direction as the sample rotates along the rotation axis, and the measurement direction changes in accordance with the rotation of the rotation axis relative to the measuring device. In other words, in this embodiment, the measured distance is acquired while the measuring device remains in a fixed position and the rotation axis rotates about the measuring device.

[0059] In this embodiment, the measured distance of the entire first positioning area relative to the measuring device is collected, and the sample is rotated by the rotating axis by the same angle but in opposite directions, thereby ensuring that the rotation angles of the rotating axis relative to the first and second positioning areas remain unchanged, and that the measured position of the first positioning area remains unchanged (i.e., the measured distance between the first positioning area and the measuring device remains unchanged). Simultaneously, the measurement direction is also changed, so that the measuring direction of the measuring device remains in the direction of the one-way line toward the rotating axis.

[0060] For example, Figure 6 As shown, sample 610 and rotation axis 621 rotate relative to measuring device 631. Specifically, a motion track 640 is provided for rotation axis 621. Motion track 640 is a circular track centered on measuring device 631. When rotation axis 621 rotates along motion track 640 to rotation axis position 622, first positioning area 611 rotates to area 612 by an angle A1. At this point, measurement position 651 rotates to first position 652, but remains in the same position relative to measuring device 631 and rotation axis 621. The rotation angles of rotation axis 621 relative to first position 652 and the second positioning area also remain unchanged (not shown).

[0061] At this point, the control sample 610 rotates along the rotation axis 621 by the same rotation angle A2 (A1=A2), but in the opposite direction, so that the first position 652 of the region 612 is adjusted to the second position 653. Furthermore, the measuring device 631 can maintain its position and only adjust the measurement direction, or it can adjust its position to the measuring device position 632, thereby changing the measurement direction. For the latter case, for example, if the viewing angle range of the measurement direction is [0°, 180°], at least one position adjustment is required when measuring the distance of all measurement positions in the first positioning area. For the former case, for example, if the viewing angle range of the measurement direction is [0°, 360°], no position adjustment is required when measuring the distance of all measurement positions in the first positioning area.

[0062] In another embodiment of multiple sets of measurement data, a measuring device is caused to rotate about the rotation axis, and the measured distances are acquired multiple times by the measuring device during this rotational motion. Specifically, the measuring device is controlled to rotate about the rotation axis, with the rotation angle being the angle of rotation of the measuring device relative to the rotation axis, wherein the measurement direction changes in accordance with the rotational motion of the measuring device about the rotation axis; and the measured distances are acquired multiple times by the measuring device during this change in the measurement direction. That is, in this embodiment, the measured distances are acquired while the rotation axis remains in a fixed position and the measuring device rotates about the rotation axis.

[0063] For example, Figure 7 As shown, measuring device 711 rotates relative to sample 720 and rotation axis 730. Specifically, a motion track 740 is provided for measuring device 711. Motion track 740 is a circular track centered on rotation axis 730. When measuring device 711 rotates along motion track 740 to position 712, a rotation angle A is determined. Measuring direction 751 then changes to direction 752.

[0064] In one embodiment of selecting fitting data, at least part of the measurement data is determined from multiple groups of measurement data as fitting data, including: establishing a relationship curve of the measurement distance changing with the rotation angle; determining a jump segment from the relationship curve, and based on the jump segment, determining the jump data in the measurement data; eliminating the jump data in the measurement data to obtain fitting data; the jump segment is the relationship curve area corresponding to the sample opening position.

[0065] Specifically, such as Figure 8 As shown, the horizontal axis represents the rotation angle (150°-450°), and the vertical axis represents the increment of the measured distance; a relationship curve 810 of the measured distance relative to the rotation angle is established. It can be seen that the first segment 820 in the relationship curve has a sudden drop and a sudden increase in the measured distance, which can be determined to be a jump segment. The measurement data of the rotation angle and the measured distance fitted in this segment are eliminated to obtain the fitting data.

[0066] For further information, see Figure 8, the relationship curve 810 can be further compared with the standard relationship curve to avoid the first segment 820 belonging to the normal measurement distance change; the rotation angle is normalized to between [0, -6], and the vertical axis is adjusted to the measurement distance. The relationship curve is regenerated by the normalized rotation angle and the measurement distance, and then compared with the standard relationship curve to align the two in space; according to the comparison result, it is determined that the first segment 820 has an abnormal rise and fall compared with the second segment 830 of the standard relationship curve at the same rotation angle, then it can be guaranteed that the first segment 820 is a jump segment.

[0067] In another embodiment of selecting fitting data, the left slope and right slope of each measurement position in each measurement data are calculated, and relationship curves are generated for the left slope and the right slope and the normalized rotation angle respectively; the four measurement positions with the largest difference between the left slope and the right slope are taken, among which the measurement position with the smallest slope difference among the four measurement positions is the starting position of the jump segment, and the measurement position with the largest slope difference is the ending position of the jump segment.

[0068] For example, Figure 9 As shown, the horizontal axis represents the normalized rotation angle, and the vertical axis represents the slope, showing segments of two relationship curves generated by the left slope and the right slope, including a first measurement position 910 with the largest slope difference and a second measurement position 920 with the smallest slope difference. The segment between the first measurement position 910 and the second measurement position 920 is the jump segment.

[0069] The fitting function of the positioning method in the present invention is further explained below, as shown below:

[0070] In this embodiment, the preset fitting function also includes preset parameters and parameters to be fitted, and the parameters to be fitted include the positional relationship of the sample relative to the rotation axis; wherein the positional relationship includes at least one of a center starting position and an eccentric distance, the center starting position is the position of the sample center when the rotation angle is zero, and the eccentric distance is the distance between the sample center and the rotation axis; the preset parameters include: one or more combinations of: sample size, the slope of the preset direction, the position information of the reference point, and the position information of the rotation axis.

[0071] Specifically, the preset parameters are the constant part of the fitting function, which can be set to a fixed value or a fixed variable value. The parameters to be fitted are the variable part of the fitting function, which need to be optimized and determined based on the measurement data. They are mainly used to locate the position relationship of the sample relative to the rotation axis.

[0072] In one embodiment, the positional relationship includes the center starting position (x0, y0); the fitting relationship of the fitting function is: the measured distance is equal to the distance between the intersection point to be measured and the reference point, and the intersection point to be measured is the intersection of the positioning area and the preset direction when the center of the sample rotates around the rotation axis.

[0073] In this embodiment, the intersection to be measured corresponds to the previously measured position. The measured distance is output by the measuring device as the measurement result of the intersection to be measured. The distance between the intersection to be measured and the reference point can also be calculated using a fitting function consisting of the parameters to be fitted (here, the center starting position (x0, y0)) and preset parameters. The former is the actual measurement result, while the latter is the indirect prediction result based on the center starting position (x0, y0). The fitting function also includes the rotation angle, and the actual measurement result and the indirect prediction result vary based on the rotation angle.

[0074] In a specific embodiment, Figure 10 As shown, the sample is circular; the coordinates (x, y) of the intersection to be measured satisfy: (xx θ ) 2 +(yy θ ) 2 =r 2 , and y=k(xx r )+y r ; where x θ =x0cosθ-y0sinθ,y θ =x0sinθ-y0cosθ; the measuring distance L satisfies: ; Wherein, (x0, y0) is the coordinate of the starting position of the center, (x θ ,y θ ) is the coordinate of the sample center after rotating from the center starting position around the rotation axis by the rotation angle θ, (x r ,y r ) is the coordinate of the reference point, k is the slope of the preset direction S, and r is the radius of the sample.

[0075] In this embodiment, the coordinates of the reference point (x r ,y r ) are known coordinates. After determining the coordinates (x, y) of the intersection point to be measured, the distance between the two can be determined and the relationship between them and the measured distance L can be established. The coordinates (x, y) of the intersection point to be measured serve as the intermediate hub between the circular sample and the reference point. On the one hand, they establish a first relationship with the center starting position (x0, y0) of the circular sample, and on the other hand, they establish a first relationship with the coordinates (x r ,y r) establishes a second relationship, and the first and second relationships are combined to solve the binary function to obtain the coordinates (x, y) of the intersection point to be measured, thereby determining the indirect prediction result of the measured distance L.

[0076] In a specific embodiment, Figure 11 As shown, the sample is still circular; when the starting position O1 is located in the preset direction S, and the preset direction S is the same as the direction of the line between the reference point and the rotation axis, the coordinates (x, y) of the intersection point to be measured satisfy: ; Wherein, the measured distance L satisfies: M is the distance between the rotation axis and the reference point, A is the distance from the end position O2 to the nearest point on the preset direction S, the end position O2 is the position of the sample after rotating around the rotation axis by the rotation angle θ, (x r ,y r ) is the coordinate of the reference point, k is the slope of the preset direction S, and r is the radius of the sample.

[0077] In a preferred embodiment, the preset direction is the same as the direction of the line between the reference point and the rotation axis, and the preset parameters include: the sample size, the slope of the preset direction and the position information of the reference point; the slope of the preset direction is 1, and the rotation axis position or the reference point position is the origin position, so that the rotation axis position and the reference point are both located on the horizontal coordinate axis, which is convenient for calculating the aforementioned fitting function.

[0078] In a preferred embodiment, one or more combinations of the sample size, the slope of the preset direction, the position information of the reference point, and the position information of the rotation axis can be used as preset parameters in addition to being preset parameters. By fitting the correlation between the measured distance and the rotation angle using a preset fitting function based on the fitting data, the optimal value of the parameter to be fitted can be obtained.

[0079] In one embodiment, the positional relationship also includes the eccentric distance; the fitting relationship of the fitting function includes: the measured distance is equal to the distance between the intersection point to be measured and the reference point, the intersection point to be measured is the intersection of the first positioning area and the preset direction when the center of the sample rotates around the rotation axis, and the preset direction is the same as the direction of the line between the reference point and the rotation axis.

[0080] In a specific embodiment, Figure 12 As shown, the fitting function satisfies: the measured distance L satisfies: L=MK; wherein, Or M is a known value, M is the distance between the rotation axis and the reference point, (x1, x2) is the position information of the reference point, (y1, y2) is the position information of the rotation axis, where K is the distance between the rotation axis and the intersection point to be measured, and K is the distance between d, θ, R (R is in Figure 12 is a function of (not shown in FIG), θ is the rotation angle, d is the eccentric distance, and R is the sample size.

[0081] In this embodiment, the reference point and the rotation axis are at known positions in the physical space, and the intersection position of the line between the two and the first positioning area is the intersection point to be measured. A fitting function can be established based on this: (1) The distance K represents the positional relationship between the intersection point to be measured and the interior of the sample. In addition to representing the rotation angle θ associated with the second positioning area and the rotation axis, it can also represent the sample size R related to the first positioning area (not shown in the figure, which can be used as a preset parameter or a parameter to be fitted) and the eccentric distance d related to the second positioning area (not shown in the figure). Therefore, K=f(θ, d, R), that is, the distance K is expressed as a function related to the rotation angle θ, the sample size R and the eccentric distance d; (2) The measured distance L represents the positional relationship between the intersection point to be measured and the reference point, which can be directly obtained through measurement data.

[0082] In a specific embodiment of obtaining the distance K, as shown in FIG. Figure 13 As shown, the sample is circular; the distance K satisfies: , that is, the measured distance L, satisfies: wherein a circle 1320 of the sample is set with the rotation axis 1310 as the center and the distance K as the radius, The distance between the sample center at the end position 1330 of the sample rotation and the starting intersection 1340 of the circle, the direction of the line connecting the starting intersection 1340 and the circle center passes through the starting position 1350 of the sample rotation, and the sample size R includes the distance .

[0083] In another specific embodiment of the aforementioned distance K acquisition, as Figure 14 As shown, the starting position is located in the preset direction, and the distance K (not shown in the figure) satisfies: K=K1+K2; K1 is the distance from the rotation axis to the nearest point 1410, and satisfies: K1=d*cosθ; K2 is the distance from the intersection point to be measured to the nearest point 1410, and satisfies: , that is, the measured distance L, satisfies: Wherein, the closest point is the closest point 1410 from the end position 1420 to the preset direction (the foot of the perpendicular from the end position 1420 to the preset direction), is the sample radius, the sample size R includes the sample radius .

[0084] In the actual fitting process, according to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis, including: setting a starting value for the parameter to be fitted; obtaining the fitting distance between the intersection point to be measured and the reference point based on the starting value, the preset parameter and the rotation angle; obtaining an error according to the fitting distance and the measured distance, and optimizing the parameter to be fitted based on the error; and obtaining the position relationship of the sample relative to the rotation axis based on the optimization result of the parameter to be fitted.

[0085] In this embodiment, the starting value is obtained in the calibration stage, specifically, a standard size sample placed on the rotating axis is used for calibration, the coordinates of the reference point relative to the rotating axis are calculated, and the known positions of the reference point and the rotating axis in the physical space (the known distance from M) are obtained; the starting value input in the positioning stage, such as the eccentric distance sample radius r, is the standard radius of the standard size sample; the eccentric distance d or the center starting position (x0, y0) initially input in the positioning stage can be calculated based on the sample radius r, the distance M and the relationship curve (the measured distance y relative to the rotation angle θ).

[0086] For example, Figure 15 As shown, the lowest point 1510 and the highest point 1520 are determined by the relationship curve; the lowest point 1510 indicates that the distance between the edge of the sample and the reference point is the shortest, that is, the distance between the center of the sample and the reference point is the shortest, at this time the center of the sample is located on the line connecting the reference point and the rotation axis, r+d+y=M, d=Myr; the highest point 1520 indicates that the distance between the edge of the sample and the reference point is the maximum, that is, the distance between the center of the sample and the reference point is the maximum, at this time the center of the sample is located on the extension line of the line connecting the reference point toward the rotation axis, r-d+y=M, d=r+yM.

[0087] If the parameter to be fitted only includes at least one of the center starting position and the eccentric distance, the compensation of the actual fitting process includes: obtaining the eccentricity compensation from the center of the sample to the rotation center based on the optimization result of the parameter to be fitted; and obtaining the position relationship of the sample relative to the rotation axis based on the eccentricity compensation, wherein the eccentricity compensation is used to adjust the measurement distance in the measurement data so that the center of the sample moves toward the direction of the rotation axis.

[0088] If the parameters to be fitted also include the sample size, the compensation of the actual fitting process also includes: obtaining radial compensation from the center of the sample to the rotation center based on the optimization results of the parameters to be fitted; determining the positional relationship of the sample relative to the rotation axis based on the radial compensation, wherein the radial compensation is used to adjust the measurement distance in the measurement data so that the size of the sample is scaled.

[0089] Specifically, the optimization results of the parameters to be fitted include the optimization results of the eccentric distance, or further include the optimization results of the sample radius; based on the eccentric distance and the rotation angle, the eccentric vector from the sample center to the rotation center is calculated and used as eccentricity compensation; based on the initially input sample radius and the optimized sample radius, the difference vector between the two is calculated (the direction is the direction of the line connecting the reference point and the rotation axis) to obtain radial compensation.

[0090] Overlay eccentricity compensation and radial compensation onto the positioning data (the direction of the distance measurement is also the direction of the line connecting the reference point and the rotation axis), and overlay eccentricity compensation onto the center starting position so that the sample center and the rotation center overlap. Note that the eccentricity compensation overlay must be converted to the compensation distance in the direction of the distance measurement.

[0091] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the division of the above-mentioned functional units and modules is used as an example for illustration. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules based on needs, that is, the internal structure of the application device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiment can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units. In addition, the specific names of the functional units and modules are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of the present invention. The specific working process of the units and modules in the above-mentioned system can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here.

[0092] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0093] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present invention.

[0094] In the embodiments provided by the present invention, it should be understood that the disclosed devices / terminal equipment and methods can be implemented in other ways. For example, the device / terminal equipment embodiments described above are merely illustrative. For example, the division of the modules or units is merely a logical function division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0095] The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected based on actual needs to achieve the purpose of this embodiment.

[0096] In addition, the functional units in the various embodiments of the present invention may be integrated into a single processing unit, each unit may exist physically separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or software functional units.

[0097] If the integrated module / unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the present invention can implement all or part of the process steps in the above-mentioned method embodiments by using a computer program to instruct the relevant hardware. The computer program can be stored in a computer-readable storage medium. When executed by a processor, the computer program can implement the steps of each of the above-mentioned method embodiments. The computer program includes computer program code, which can be in source code form, object code form, executable file, or some intermediate form. The computer-readable medium can include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard drive, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier signal, telecommunication signal, and software distribution medium. It should be noted that the content contained in the computer-readable medium can be appropriately increased or decreased based on the requirements of legislation and patent practice in a jurisdiction. For example, in some jurisdictions, based on legislation and patent practice, computer-readable media does not include electric carrier signals and telecommunication signals.

[0098] The present application also provides a control system. Figure 16 , which shows a schematic diagram of the structure of a control system provided by an embodiment of the present application. Figure 16 As shown, the control system 1600 includes: a processor 160, a memory 161, a bus 162 and a communication interface 163, and the processor 160, the communication interface 163 and the memory 161 are connected via the bus 162; the memory 161 stores computer program instructions that can be executed by the processor 160, and when the processor 160 executes the computer program instructions, it executes the positioning method provided by any of the aforementioned embodiments of the present application.

[0099] Memory 161 may include high-speed random access memory (RAM) and may also include non-volatile memory, such as at least one disk drive. Communication between the device network element and at least one other network element is achieved through at least one communication interface 163 (which may be wired or wireless), and may utilize the Internet, a wide area network, a local area network, a metropolitan area network, or the like.

[0100] The bus 162 may be an ISA bus, a PCI bus, or an EISA bus. The bus may be divided into an address bus, a data bus, a control bus, etc. The memory 161 is used to store programs. The processor 160 executes the programs upon receiving execution instructions. The positioning method disclosed in any of the aforementioned embodiments of the present application may be applied to or implemented by the processor 160.

[0101] The processor 160 may be an integrated circuit chip with signal processing capabilities. During implementation, each step of the above method can be completed by hardware integrated logic circuits in the processor 160 or by software instructions. The processor 160 may be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. It can implement or execute the various methods, steps, and logic block diagrams disclosed in the embodiments of this application. The general-purpose processor may be a microprocessor or any conventional processor. The steps of the method disclosed in the embodiments of this application can be directly implemented and executed by a hardware decoding processor, or by a combination of hardware and software modules in the decoding processor. The software module can be located in a storage medium mature in the art, such as random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, etc. The storage medium is located in the memory 161 , and the processor 160 reads the information in the memory 161 and completes the steps of the above method in combination with its hardware.

[0102] The control system provided in the embodiment of the present application and the positioning method provided in the embodiment of the present application are based on the same inventive concept and have the same beneficial effects as the methods adopted, operated or implemented therein.

[0103] An embodiment of the present application further provides a computer-readable storage medium corresponding to the positioning method provided in the aforementioned embodiment, on which computer program instructions are stored. When the computer program instructions are executed by a processor, the positioning method provided in any of the aforementioned embodiments is implemented.

[0104] It should be noted that examples of the computer-readable storage medium may include, but are not limited to, optical discs, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other optical or magnetic storage media, which are not listed here one by one.

[0105] The computer-readable storage medium provided in the above-mentioned embodiment of the present application and the positioning method provided in the embodiment of the present application are based on the same inventive concept and have the same beneficial effects as the method adopted, run or implemented by the application program stored therein.

[0106] An embodiment of the present application provides a computer program product. When the computer program product is run on a mobile terminal, the mobile terminal can implement the steps in the above-mentioned various method embodiments when executing the computer program product.

[0107] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A positioning method, characterized in that: The sample to be positioned includes a preset positioning area, and the positioning method includes: Acquiring multiple sets of measurement data during the sample's rotational motion around the rotation axis, wherein each set of measurement data includes a measured distance between the positioning area and a reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis, the reference point serving as a reference marker for the measurement data; determining at least part of the measurement data from the plurality of sets of the measurement data as fitting data; According to the fitting data, based on at least the slope of the preset direction, or at least based on the distance r1, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the positional relationship of the sample relative to the rotation axis; wherein: The intersection point to be measured is the intersection of the positioning area and the preset direction when the sample center rotates around the rotation axis, and the coordinates are (x, y); the positioning area is (x θ ,y θ ) as the center, the preset direction is a straight line; θ =x0cos θ -y0sin θ ,y θ =x0sinθ-y0cosθ; (x0, y0) is the coordinate of the center starting position, the center starting position is the position of the sample center when the rotation angle θ is zero, the straight line is: y=k(xx r )+y r , (x r ,y r ) is the coordinate of the reference point, and k is the slope of the preset direction; or, The measuring distance L satisfies: L=MK; M is the distance between the rotation axis and the reference point, and K is the distance between the rotation axis and the intersection point to be measured; the distance K satisfies: ; wherein, a circle of the sample is set with the rotation axis as the center and the distance K as the radius, The distance between the sample center and the starting intersection of the sample rotation end position and the circle center. The direction of the line connecting the starting intersection and the circle center passes through the starting position of the sample rotation. is the sample size, θ is the rotation angle, d is the eccentric distance, and the eccentric distance is the distance between the sample center and the rotation axis.

2. The positioning method according to claim 1, wherein: Determining at least part of the measurement data from the plurality of sets of measurement data as fitting data comprises: Establishing a relationship curve between the measured distance and the rotation angle; determining a transition segment from the relationship curve, and determining transition data in the measurement data based on the transition segment; Eliminating jump data in the measurement data to obtain fitting data; The jump segment is the relationship curve area corresponding to the sample opening position.

3. The positioning method according to claim 1, wherein: The preset fitting function further includes preset parameters and parameters to be fitted, wherein the parameters to be fitted include the positional relationship of the sample relative to the rotation axis; The positional relationship includes at least one of a center starting position and an eccentric distance; and the preset parameters include a combination of multiple ones of the sample size, the slope of the preset direction, the position information of the reference point, and the position information of the rotation axis.

4. The positioning method according to claim 3, characterized in that: The positional relationship includes the center starting position; the fitting relationship of the fitting function is: the measured distance is equal to the distance between the intersection point to be measured and the reference point.

5. The positioning method according to claim 4, characterized in that: The sample is circular; The coordinates (x, y) of the intersection point to be measured also satisfy: (x θ ) 2 +(yy θ ) 2 =r 2 ; The measuring distance L satisfies: L= ; Where r is the radius of the sample.

6. The positioning method according to claim 4, characterized in that: The sample is circular; When the starting position is in the preset direction, and the preset direction is the same as the direction of the line between the reference point and the rotation axis, the coordinates (x, y) of the intersection point to be measured satisfy: ; Wherein, the measured distance L satisfies: L ; M is the distance between the rotation axis and the reference point, A is the distance from the end position to the nearest point in the preset direction, the end position is the position of the sample after rotating around the rotation axis by the rotation angle θ, and r is the radius of the sample.

7. The positioning method according to claim 3, characterized in that: The preset direction is the same as the direction of the line between the reference point and the rotation axis, and the preset parameters include: the sample size, the slope of the preset direction and the position information of the reference point; the slope of the preset direction is 1, and the position of the rotation axis or the position of the reference point is the origin position.

8. The positioning method according to claim 3, characterized in that: The parameters to be fitted further include a combination of multiple items including sample size, the slope of the preset direction, the position information of the reference point, and the position information of the rotation axis; According to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle, which is also used to obtain the parameter to be fitted.

9. The positioning method according to claim 3, characterized in that: The positional relationship also includes the eccentric distance; The fitting relationship of the fitting function includes: the measured distance is equal to the distance between the intersection point to be measured and the reference point, and the preset direction is the same as the direction of the line between the reference point and the rotation axis.

10. The positioning method according to claim 9, characterized in that: The distance M satisfies: M= Or M is a known value, (x2, y2) is the position information of the rotation axis.

11. The positioning method according to claim 10, characterized in that: The starting position is located in the preset direction, and the distance K satisfies: K=K1+K2; K1 is the distance from the rotation axis to the nearest point, and satisfies: K1=d*cosθ; K2 is the distance from the intersection point to be measured to the nearest point, and it satisfies: ; The closest point is the closest point from the end position to the preset direction. is the sample radius, the sample size R includes the sample radius .

12. The positioning method according to any one of claims 4-6, 9-10, characterized in that: According to the fitting data, a preset fitting function is used to fit the correlation between the measured distance and the rotation angle to obtain the position relationship of the sample relative to the rotation axis, including: Setting a starting value for the parameter to be fitted; Based on the starting value, the preset parameter and the rotation angle, obtaining a fitting distance between the intersection point to be measured and the reference point; Obtaining an error according to the fitting distance and the measured distance, and optimizing the parameter to be fitted based on the error; According to the optimization result of the parameter to be fitted, the position relationship of the sample relative to the rotation axis is obtained.

13. The positioning method according to claim 12, characterized in that: If the parameters to be fitted only include at least one of the center starting position and the eccentric distance, after obtaining the positional relationship of the sample relative to the rotation axis according to the optimization result of the parameters to be fitted, the method further includes: Obtaining eccentricity compensation from the center of the sample to the rotation axis according to the optimization result of the parameter to be fitted; The positional relationship of the sample relative to the rotation axis is obtained according to the eccentricity compensation, wherein the eccentricity compensation is used to adjust the measurement distance in the measurement data so that the center of the sample moves toward the rotation axis.

14. The positioning method according to claim 12, characterized in that: If the parameters to be fitted also include the sample size, after obtaining the positional relationship of the sample relative to the rotation axis according to the optimization result of the parameters to be fitted, the method further includes: Obtaining radial compensation from the center of the sample to the rotation axis according to the optimization result of the parameter to be fitted; The positional relationship of the sample relative to the rotation axis is determined according to the radial compensation, wherein the radial compensation is used to adjust the measurement distance in the measurement data so that the size of the sample is scaled.

15. The positioning method according to claim 1, characterized in that: The positioning area is the edge of the sample, or the positioning area is a marking area on the sample, and the marking area is scaled in the same proportion as the sample edge and has the same sample center as the sample edge.

16. The positioning method according to claim 15, characterized in that: Acquiring multiple sets of measurement data during the sample's rotational motion around the rotation axis includes: causing the sample to rotate around the rotation axis, and obtaining the measurement distance multiple times through a measuring device during the rotational motion, wherein the preset direction is the measurement direction of the measuring device; or causing the measuring device to rotate around the rotation axis, and obtaining the measurement distance multiple times through the measuring device during the rotational motion, wherein the preset direction is the measurement direction of the measuring device.

17. The positioning method according to claim 16, characterized in that: The method further comprises: causing the measuring device to rotate about the rotation axis and obtaining the measured distance multiple times by the measuring device during the rotation. The method further comprises: controlling the measuring device to rotate about the rotation axis, wherein the rotation angle is the rotation angle of the measuring device relative to the rotation axis, wherein the measuring direction changes following the rotation of the measuring device about the rotation axis; The measuring distance is acquired multiple times by the measuring device during the change of the measuring direction.

18. A positioning system, characterized in that: The positioning system comprises: A reference point and a rotation axis for locating a sample, wherein the sample includes a preset positioning area, and the reference point and the rotation axis are correspondingly arranged; processor, and is configured to: Acquiring multiple sets of measurement data during the sample's rotational motion around the rotation axis, wherein each set of measurement data includes a measured distance between the positioning area and a reference point along a preset direction, and a rotation angle of the sample relative to the rotation axis, the reference point serving as a reference marker for the measurement data; Determine at least part of the measurement data from the plurality of sets of measurement data as fitting data; and fit the correlation between the measurement distance and the rotation angle using a preset fitting function based on at least the slope of the preset direction or at least the distance r1 according to the fitting data to obtain the positional relationship of the sample relative to the rotation axis; wherein: The intersection point to be measured is the intersection of the positioning area and the preset direction when the sample center rotates around the rotation axis, and the coordinates are (x, y); the positioning area is (x θ ,y θ ) as the center, the preset direction is a straight line; θ =x0cos θ -y0sin θ ,y θ =x0sinθ-y0cosθ; (x0, y0) is the coordinate of the center starting position, the center starting position is the position of the sample center when the rotation angle θ is zero, the straight line is: y=k(xx r )+y r , (x r ,y r ) is the coordinate of the reference point, and k is the slope of the preset direction; or, The measuring distance L satisfies: L=MK; M is the distance between the rotation axis and the reference point, and K is the distance between the rotation axis and the intersection point to be measured; the distance K satisfies: ; wherein, a circle of the sample is set with the rotation axis as the center and the distance K as the radius, The distance between the sample center and the starting intersection of the sample rotation end position and the circle center. The direction of the line connecting the starting intersection and the circle center passes through the starting position of the sample rotation. is the sample size, θ is the rotation angle, d is the eccentric distance, and the eccentric distance is the distance between the sample center and the rotation axis.

19. The positioning system according to claim 18, further comprising a measuring device arranged at the reference point, the measuring device comprising a laser rangefinder, an interferometer and a dispersive confocal instrument.

20. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the positioning method according to any one of claims 1 to 17 is implemented.

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