Substrate storage container

Abstract

The invention provides a substrate storage container including a valve body for improving the reliability of valve opening and closing operation. A substrate storage container is provided with: a container main body for storing a substrate; a cover body for closing the opening of the container main body; and a valve body (40) for controlling the flow of gas to the container main body, the valve body (40) having: a block member (41) in which communication paths (416, 417) for communicating the outside and the inside of the container main body via a valve hole (466) are formed; and a plate-shaped valve member (45) that opens and closes the valve hole (466) and is elastically deformable, and a valve seat (467) around the valve hole (466) and a sealing surface (452a) of the valve member (45) are bent toward the downstream side in the gas flow direction and are in contact with each other.

Description

Technical Field

[0001] The present invention relates to a substrate storage container including a valve body that controls the flow of gas relative to a container body. Background Art

[0002] A substrate storage container for storing substrates includes: a container body, a lid that closes an opening of the container body, and a valve body that controls the flow of gas relative to the container body. This valve body has a check valve function and includes a valve body and a metallic elastic member that opens and closes the valve body (for example, refer to Patent Document 1 and Patent Document 2).

[0003] That is, in order to store substrates in an airtight state, gas is supplied from the valve body to the substrate storage container, and gas is discharged through the valve body. However, when processing the stored substrates, residual substances attached to the substrates may sometimes be discharged together with the supplied gas. Therefore, the metallic elastic member of the valve body or the like may be corroded by the residual substances.

[0004] Therefore, the inventors of the present invention proposed a valve body that uses an elastic valve body that opens and closes a gas passage without using a metallic member (refer to Patent Document 3). This valve body has a valve opening / closing mechanism that closes a valve opening formed in the elastic valve body by its own elastic force and opens with the pressure of gas exceeding the elastic force.

[0005] Patent Document 1: Japanese Patent Laid-Open No. 2008-066330

[0006] Patent Document 2: Japanese Patent Laid-Open No. 2004-179449

[0007] Patent Document 3: Japanese Patent Laid-Open No. 2020-088278

[0008] However, in the valve body described in Patent Document 3, there are concerns that: due to thermal stress during cleaning or the passage of time in the open valve state, the valve opening may not be fully closed; or when the check valve function is exerted, due to the pressure of gas, the edge portions of the valve opening are in close contact with each other, and the valve opening is not closed in a straight line, so that the check valve function does not work or does not open under a specified pressure. For example, when opening and closing a valve hole by the elastic force of a plate-shaped valve member, if the contact surface between the valve member and the valve seat is linear in a sectional view, there is a possibility that the closing force may decrease toward the front end side, and this possibility is cited as one of the reasons. Summary of the Invention

[0009] Therefore, the present invention is proposed in view of the above problems, and an object thereof is to provide a substrate storage container including a valve body with improved reliability of valve opening / closing operation.

[0010] (1) One aspect of the present invention is a substrate storage container, which includes: a container body for storing a substrate; a lid for closing an opening of the container body; and a valve body for controlling the flow of gas into and out of the container body. In the substrate storage container, the valve body has: a block member formed with a communication path that communicates the outside and the inside of the container body via a valve hole; and a plate-like valve member for opening and closing the valve hole and capable of elastic deformation, and a valve seat around the valve hole and a sealing surface of the valve member are bent and in contact with each other toward the downstream side in the gas flow direction.

[0011] (2) In the aspect of (1) above, the valve member may include a planar sealing surface that extends in one direction in a state without external force, and the valve member may be in contact with the valve hole in a state of being elastically deformed by bending toward the downstream side in the gas flow direction so as to close the valve hole.

[0012] (3) In the aspect of (1) above, the valve member may include a sealing surface that is inclined or bent from the vertical direction toward the upstream side in the gas flow direction in a state without external force, and the valve member may be in contact with the valve hole in a state of being elastically deformed by bending toward the downstream side in the gas flow direction so as to close the valve hole.

[0013] (4) In any one of the aspects of (1) to (3) above, the valve member may be formed of a plate-like sealing member and an elastic member that applies a force to the sealing member.

[0014] (5) In any one of the aspects of (1) to (4) above, the communication path may have an inflow path that extends in the vertical direction on the upstream side of the valve hole, and the inflow path includes an end wall that is inclined so as not to guide the fluid flowing in the vertical direction toward the valve hole when the fluid collides.

[0015] (6) In any one of the aspects of (1) to (5) above, the valve body may control the flow of gas from the inside of the container body to the outside.

[0016] (7) In any one of the aspects of (1) to (5) above, the valve body may control the flow of gas from the outside of the container body to the inside.

[0017] (8) In any one of the aspects of (1) to (7) above, the valve body may have a filter for filtering the gas.

[0018] (9) In any one of the aspects of (1) to (8) above, the communication path may have an outflow path that extends on the downstream side of the valve hole, and the outflow path includes an eaves that extends from the valve hole side in a direction crossing the vertical direction for the fluid passing through the valve hole to collide with.

[0019] (10) In any of the forms described in (1) to (9) above, the block member may have: a valve holder formed with the valve hole and a valve cover that clamps the valve member between the valve holder and the valve cover.

[0020] According to the present invention, a substrate storage container including a valve body with improved reliability of valve opening and closing operations can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is an exploded perspective view of a substrate storage container showing a first embodiment of the present invention.

[0022] Figure 2A It is an exploded perspective view of a valve body for supplying gas.

[0023] Figure 2B It is a top view of a valve body for supplying gas.

[0024] Figure 2C It is a front view of a valve body for supplying gas.

[0025] Figure 2D It is a bottom view of a valve body for supplying gas.

[0026] Figure 2E It is a side view of a valve body for supplying gas.

[0027] Figure 2F It is a sectional view of a valve body for supplying gas.

[0028] Figure 3A It is a perspective view of the handle of the valve body.

[0029] Figure 3B It is a side view of the handle of the valve body.

[0030] Figure 4A It is a perspective view of the valve member of the valve body.

[0031] Figure 4B It is a perspective view of the valve member of the valve body from the sealing surface side.

[0032] Figure 5A It is a top view of the valve holder of the valve body.

[0033] Figure 5B It is a front view of the valve holder of the valve body.

[0034] Figure 5C It is a bottom view of the valve holder of the valve body.

[0035] Figure 5DIt is a perspective view from above the valve opening side of the valve retainer of the valve body.

[0036] Figure 5E It is a side view of the valve retainer of the valve body.

[0037] Figure 5F It is a perspective view from below the valve opening side of the valve retainer of the valve body.

[0038] Figure 5G It is a perspective view from above the back side of the valve retainer of the valve body.

[0039] Figure 5H It is a rear view of the valve retainer of the valve body.

[0040] Figure 5I It is a perspective view from below the back side of the valve retainer of the valve body.

[0041] Figure 6A It is a top view of the valve cover of the valve body.

[0042] Figure 6B It is a front view of the valve cover of the valve body.

[0043] Figure 6C It is a bottom view of the valve cover of the valve body.

[0044] Figure 6D It is a side view of the valve cover of the valve body.

[0045] Figure 6E It is a rear view of the valve cover of the valve body.

[0046] Figure 6F It is a perspective view of the valve cover of the valve body.

[0047] Figure 7A It is a sectional view of the valve body for exhaust.

[0048] Figure 7B It is a top view of the valve body for exhaust.

[0049] Figure 7C It is a bottom view of the valve body for exhaust.

[0050] Figure 8A It is a sectional view of the valve body for air supply in the second embodiment.

[0051] Figure 8B It is a sectional perspective view of the valve body for air supply in the second embodiment.

[0052] Figure 8C It is a top view of the valve body for air supply in the second embodiment.

[0053] Figure 8D It is the front view of the valve body for air supply of the second embodiment.

[0054] Figure 8E It is the bottom view of the valve body for air supply of the second embodiment.

[0055] Figure 8F It is the sectional view of the valve body for air supply of the second embodiment in the open valve state.

[0056] Figure 9A It is the sectional view of the valve body for exhaust of the second embodiment.

[0057] Figure 9B It is the sectional perspective view of the valve body for exhaust of the second embodiment.

[0058] Figure 9C It is the top view of the valve body for exhaust of the second embodiment.

[0059] Figure 9D It is the front view of the valve body for exhaust of the second embodiment.

[0060] Figure 9E It is the bottom view of the valve body for exhaust of the second embodiment.

[0061] Figure 9F It is the sectional view of the valve body for exhaust of the second embodiment in the open valve state.

[0062] Figure 10A It is the sectional view of the valve body having the valve member of the third embodiment.

[0063] Figure 10B It is the sectional perspective view of the valve body having the valve member of the third embodiment.

[0064] Figure 11 It is the sectional view of the valve body having the inflow path of the fourth embodiment. Detailed Embodiments

[0065] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of this specification, the same reference numerals are assigned to the same components throughout.

[0066] Figure 1 It is a schematic exploded perspective view of the substrate storage container 1 of the first embodiment of the present invention.

[0067] The substrate storage container 1 includes: a container body 10 for accommodating a substrate; a lid body 20 for closing the opening 11 of the container body 10; and an annular gasket 30 provided between the container body 10 and the lid body 20.

[0068] The container body 10 is a box-shaped body having an opening 11 formed on the front surface. The opening 11 is formed to be bent stepwise so as to expand outward, and the surface of the step is formed as a sealing surface 12 that contacts the gasket 30 on the inner periphery of the front surface of the opening 11. Furthermore, in terms of facilitating the insertion operation of a substrate with a diameter of 300 mm or 450 mm, the container body 10 is preferably a front-opening type.

[0069] Support bodies 13 are arranged on the left and right sides inside the container body 10. The support bodies 13 have the function of placing and positioning the substrate. The support bodies 13 are formed with a plurality of grooves in the height direction to constitute so-called grooved teeth. Moreover, the substrate is placed on the grooved teeth at the same height on the left and right. The material of the support bodies 13 may be the same as that of the container body 10, but different materials may also be used in order to improve cleanability and slidability.

[0070] In addition, a rear holder (not shown) is arranged at the rear (inner side) inside the container body 10. When the lid body 20 is closed, the rear holder and a front holder described later hold the substrate in pairs. Among them, it is not necessary to include a rear holder as in the present embodiment. The support body 13 has a substrate holding portion in a shape like a Japanese character "ㄑ" or a linear shape inside the grooved teeth, and thus the front holder and the substrate holding portion hold the substrate. These support bodies 13 and the rear holder can be provided in the container body 10 by insert molding or fitting.

[0071] The substrate is supported by the support bodies 13 and stored in the container body 10. Furthermore, as an example of the substrate, a silicon wafer can be cited, but there is no particular limitation. For example, it can also be a quartz wafer, a gallium arsenide wafer, etc.

[0072] A robot flange 14 is detachably provided at the center of the ceiling of the container body 10. The substrate storage container 1 that hermetically stores the substrate in a clean state is held by a transfer robot in the factory by gripping the robot flange 14 and is transferred to a processing device for each step of processing the substrate.

[0073] In addition, manual handles 15 that are held by an operator are respectively detachably assembled at the central portions of the outer surfaces on both sides of the container body 10.

[0074] Moreover, an air supply portion 16 and an exhaust portion 17 are provided on the inner bottom surface of the container body 10, and valve bodies 40 and 50 described later are mounted on the outer bottom surface of the container body 10. They supply an inert gas such as nitrogen or dry air from the air supply portion 16 to the inside of the substrate storage container 1 closed by the lid body 20, and discharge it from the exhaust portion 17 as needed, thereby replacing the gas inside the substrate storage container 1, or maintaining a low-humidity airtight state, or blowing away impurities on the substrate to keep the inside of the substrate storage container 1 clean. Furthermore, not only is gas supplied from the air supply portion 16, but sometimes the exhaust portion 17 is connected to a negative pressure (vacuum) generating device to forcibly discharge gas from the exhaust portion 17.

[0075] Furthermore, by detecting the gas discharged from the exhaust portion 17, it is possible to confirm whether the inside of the substrate storage container 1 has been replaced with the introduced gas. Moreover, the air supply portion 16 and the exhaust portion 17 are preferably located at positions far from the position where the substrate is projected onto the bottom surface, but the number or position of the air supply portion 16 and the exhaust portion 17 is not limited to the illustrated number or position, and they may also be located at the four corners of the bottom surface of the container body 10. In addition, the air supply portion 16 and the exhaust portion 17 may also be mounted on one side of the lid body 20.

[0076] On the other hand, the lid body 20 is a substantially rectangular lid body mounted on the front surface of the opening 11 of the container body 10. The lid body 20 has a locking mechanism (not shown), and is locked by inserting a locking piece into a locking hole (not shown) formed in the container body 10.

[0077] In addition, an elastic front retainer (not shown) that horizontally holds the front periphery of the substrate is detachably assembled in the central portion of the lid body 20 by fitting or the like, or the front retainer is integrally formed by insert molding or the like. Since this front retainer is a part that directly contacts the wafer, like the groove teeth of the support body 13 and the substrate holding portion, a material with good cleanability and slidability can be used.

[0078] Moreover, a mounting groove 21 for mounting the gasket 30 is formed in the lid body 20. For example, by forming a convex portion 22 smaller than the step portion of the opening 11 in a ring shape on the surface of the lid body 20 on the side of the container body 10, the mounting groove 21 having a substantially U-shaped cross section is formed in a ring shape. When the lid body 20 is mounted on the container body 10, the convex portion 22 enters deeper than the step portion of the opening 11.

[0079] Examples of the materials for these container body 10 and lid body 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetheretherketone, and liquid crystal polymer. Conductive agents containing conductive carbon, conductive fibers, metal fibers, conductive polymers, various antistatic agents, ultraviolet absorbers, etc. can also be appropriately added to this thermoplastic resin.

[0080] Next, the gasket 30 is an annular gasket corresponding to the front shape of the lid body 20 (and the shape of the opening 11 of the container body 10). In this embodiment, it is a rectangular frame-shaped gasket. Among them, the annular gasket 30 may also be in the shape of a circular ring (ring) in the state before being installed on the lid body 20.

[0081] The gasket 30 is disposed between the sealing surface 12 of the container body 10 and the lid body 20. When the lid body 20 is installed on the container body 10, it is in close contact with the sealing surface 12 and the lid body 20 to ensure the airtightness of the substrate storage container 1, reduce the intrusion of dust, moisture, etc. from the outside into the substrate storage container 1, and reduce the leakage of gas from the inside to the outside.

[0082] The gasket 30 can be formed of an elastic material such as a thermoplastic elastomer including a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, etc., a fluororubber, an ethylene propylene rubber, a silicone-based rubber, etc. In order to add other functions, various additives can be added to these materials.

[0083] Next, the valve body 40 for gas supply will be described.

[0084] Figures 2A - 2F Fig. shows the valve body 40 for gas supply, Figure 2A is an exploded perspective view, Figure 2B is a top view, Figure 2C is a front view, Figure 2D is a bottom view, Figure 2E is a side view, Figure 2F is a sectional view. Furthermore, Figure 2F the bottom surface portion of the container body 10 is also depicted.

[0085] The valve body 40 controls the flow of gas relative to the container body 10. When installed on the container body 10, it is communicated with the gas supply portion 16 via a gas flow path (not shown). As Figure 2F shown, the valve body 40 has a block member 41, and the block member 41 is inserted into a through hole 18 formed by ribs on the bottom surface of the container body 10 (or a bottom plate assembled to the bottom surface of the container body 10). Furthermore, a plurality of ventilation ribs 19 for ensuring the flow of gas relative to the container body 10 are formed on the base end side of the through hole 18.

[0086] The block member 41 is formed of a cylindrical first cylinder portion 411 and a second cylinder portion 412 having a central axis shifted with respect to the central axis of the first cylinder portion 411 (see Figure 2F ).

[0087] One or more annular ribs 413 are formed on the outer peripheral surface of the first cylindrical portion 411. The annular rib 413 fixes the valve body 40 to the substrate storage container 1 by fitting into the through-hole 18 of the container body 10, and also has the function of ensuring airtightness between the block member 41 and the through-hole 18.

[0088] Among them, instead of the annular rib 413, a ring groove or the like may be formed on the outer peripheral surface, and a sealing ring formed of materials such as fluororubber, natural rubber, urethane rubber, ethylene propylene rubber, etc. is fitted (refer to Figure 8A ).

[0089] In addition, on the upper surface 41a of the first cylindrical portion 411 on the side of the container body 10, partition ribs 419 extending radially from the ventilation hole 416 are erected (refer to Figure 2B ). The ventilation hole 416 is formed such that the central axis is displaced from the central axis of the first cylindrical portion 411.

[0090] Furthermore, a storage hole 417 communicating with the ventilation hole 416 is also formed in the first cylindrical portion 411 (refer to Figure 2F ). The storage hole 417 has an inner diameter larger than that of the ventilation hole 416.

[0091] In addition, an annular locking rib 418 is formed near the opening edge of the storage hole 417 on the side of the second cylindrical portion 412. Moreover, the valve assembly described later is stored in the storage hole 417 between the ventilation hole 416 and the locking rib 418. Furthermore, in the valve body 40, the ventilation hole 416 and the storage hole 417 respectively function as an outflow path and an inflow path that are part of the communication path.

[0092] On the other hand, a pair of support shafts 414 are protrudingly provided on the outer peripheral surface of the second cylindrical portion 412 along a direction substantially orthogonal to the central axis. The upper cylindrical portion of the support shaft 414 is chamfered (refer to Figure 2E ). Furthermore, since the second cylindrical portion 412 is displaced relative to the first cylindrical portion 411, a stepped portion 41c is formed on one side and a protruding portion 41d is formed on the opposite side. In addition, the protruding portion 41d is formed in a square shape.

[0093] The block member 41 of this shape is formed, for example, from a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, or liquid crystal polymer.

[0094] The handle 43 is rotatably mounted on a pair of support shafts 414 of the block member 41.

[0095] Figure 3A and Figure 3B show the handle 43 of the valve body 40, Figure 3A is a perspective view, Figure 3B is a side view.

[0096] The handle 43 is formed in a substantially U shape, having an arcuate main body portion 431 and bearings 432 provided at both ends of the main body portion 431. For this bearing 432, a shaft hole 432a (refer to Figure 3A ) is formed for inserting the support shaft 414 of the block member 41.

[0097] In addition, the bearing 432 is formed with a protruding piece 433 on the side opposite to the side connected to the main body portion 431. This protruding piece 433 is utilized when assembling the valve body 40 to the container main body 10. By rotating the handle 43 to the storage state, according to the lever principle with the installation part of the container main body 10 as the fulcrum, the valve body 40 is fitted into the through hole 18 (for details, refer to Patent Document 1).

[0098] The handle 43 is formed of, for example, a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, or liquid crystal polymer.

[0099] Here, on the upper surface 41a (on the partition rib 419) of the block member 41, one or more filters 44 are arranged in a manner of being clamped between the ventilation ribs 19 of the container main body 10 (refer to Figure 2F ). Among them, the filter 44 can also be installed on the upper surface 41a of the container main body 10 or the block member 41 by adhesion or welding, for example.

[0100] The filter 44 filters the supplied or discharged gas and is selected from porous membranes including tetrafluoroethylene, polyester fiber, fluororesin, etc., molecular filters including glass fiber, etc., chemical filters in which a chemical adsorbent is loaded on a filter material such as activated carbon fiber, etc.

[0101] Furthermore, when multiple filters 44 are used, they can be of the same type, but combining filters with different properties can prevent contamination of organic substances in addition to particles, so it is better. For example, when cleaning the container main body 10, in order to also play a function of suppressing the retention of liquids such as water or cleaning liquid or suppressing the passage of liquids, a hydrophobic or hydrophilic material can be used for one of the filters 44 to suppress the permeation of liquids.

[0102] Moreover, the valve assembly composed of the valve member 45, the valve holder 46, and the valve cover 47 is housed in the housing hole 417 of the block member 41.

[0103] Figure 4A and Figure 4B The valve member 45 representing the valve body 40, where Figure 4A is a perspective view, Figure 4B is a perspective view from the side of the sealing surface 452a.

[0104] The valve member 45 is installed on the valve seat 467 of a valve holder 46 described later. The valve member 45 opens and closes the valve hole 466 and is elastically deformable, and is formed of a thick-walled base portion 451 and a thin sealing portion 452 (see Figure 4A ).

[0105] The base portion 451 is formed with a fitting recess 451a on the side of the sealing surface 452a, and is clamped and fixed between the valve holder 46 and the valve cover 47 by being fitted to a fitting projection 464 of the valve holder 46 described later (see Figure 4B ). Here, as long as the fitting recess 451a has a shape that can be fitted and locked with the fitting projection, it is not limited to the described elongated groove shape, and may be one or more cylindrical or prismatic recesses, or other shapes.

[0106] On the other hand, the sealing portion 452 is formed in a tongue shape (reed shape) extending from the base portion 451. The thickness of the sealing portion 452 may be uniform as a whole, but in the present embodiment, it is formed to have a constant thickness until a certain point up to the outer edge, and gradually thins from a certain point toward the outer edge.

[0107] In addition, one side of the sealing portion 452 is formed as a sealing surface 452a. The sealing surface 452a is formed to coincide with a plane extending in the vertical direction, for example, in a state without an external force (monomer state). Here, in a state without an external force, the sealing surface 452a may be inclined or bent toward the opposite side of the sealing surface 452a. Furthermore, the shape of the sealing portion 452 is not limited to an oval shape, and may be a rectangular shape (long strip shape) according to the shape of the valve hole 466.

[0108] According to the magnitude of the desired elastic (recovery) force, such a valve member 45 can be formed using various rubbers or thermoplastic resins, etc. As these rubbers or resins, for example, rubbers such as fluororubber and ethylene propylene rubber, or thermoplastic elastomers including polyester-based elastomers, polyolefin-based elastomers, fluorine-based elastomers, urethane-based elastomers, etc., or resins such as polyether ether ketone, polybutylene terephthalate, and polycarbonate can be used. In addition, the material can also be selected according to performance conditions such as whether priority is given to the sealing (close contact) with the valve seat 467, whether priority is given to the anti-adhesion to the valve seat 467, or whether priority is given to the cleaning and drying properties, etc.

[0109] Figures 5A - 5I The valve holder 46 showing the valve body 40, Figure 5A is a top view, Figure 5B is a front view, Figure 5C is a bottom view, Figure 5D is a perspective view from above the valve opening side, Figure 5E is a side view, Figure 5F is a perspective view from below the valve opening side, Figure 5Gis a perspective view from the upper side of the back side, Figure 5H is a rear view, Figure 5I is a perspective view from the lower side of the back side.

[0110] Next, the valve holder 46 is formed in a substantially semi-cylindrical shape cut by a valve seat forming surface 46a that intersects the central axis, so as to form a substantially cylindrical or barrel shape in combination with a valve cover 47 and a valve member 45 described later (refer to Figure 5F ). That is, a cavity 468 for gas flow is formed by a cylindrical surface that is the outer surface of the valve holder 46, one end face 461, the other end face 462, and the valve seat forming surface 46a.

[0111] The valve holder 46 has an outer peripheral surface (outer diameter) equal to or slightly larger than the inner peripheral surface (inner diameter) of the receiving hole 417 of the block member 41, and is formed with a length equal to or slightly larger than the height of the receiving hole 417 (the height from the ventilation hole 416 to the locking rib 418). Furthermore, a ring-shaped rib or the like may be added to the outer peripheral surface of the valve holder 46 to increase the fitting friction force.

[0112] One end face 461 is substantially circular, and is formed with a semi-circular (strictly speaking, larger than semi-circular) inlet 461a connected to the cavity 468 (refer to Figure 5C ). In addition, the other end face 462 is semi-circular, and a small-diameter and semi-circular eaves 463 is protrudingly provided on the diameter side (refer to Figure 5A ). The eaves 463 extends on the same plane as the end face 462 (i.e., in a direction orthogonal to the vertical direction), but is not limited to being orthogonal. For example, it may also extend in a direction intersecting the vertical direction such as being inclined or bent toward the valve hole 466 side.

[0113] In addition, as described later, the valve holder 46 is a shared part in the valve body 40 on the air supply side and the valve body 50 on the exhaust side. Therefore, in order to distinguish the uses (the flow direction of the gas), words, numbers, graphics, etc. such as "IN" may be added to the end face 461 and "OUT" may be added to the end face 462 by engraving, printing, coloring, etc.

[0114] The valve seat forming surface 46a is provided with a tongue-shaped valve hole 466 connected to the cavity 468 (refer to Figure 5B ). The opening area of the valve hole 466 may be, for example, 30 mm 2 or more and 100 mm 2 or less on the left and right.

[0115] A valve seat 467 is formed at the opening edge of the valve hole 466. The valve seat 467 does not exist on the plane after the parallel movement of the valve seat forming surface 46a, but exists on the curved surface that protrudes on the end face 462 side compared to the end face 461 side in the side view of the valve seat forming surface 46a. Therefore, the sealing area where the valve member 45 contacts the valve seat 467 also becomes a curved state (also refer to Figure 8A and Figure 8B ).

[0116] As the curve forming the curved surface, for example, it can coincide with a part of a parabola such as a quadratic function, a cubic function, a quartic function, a part of a circular arc, or a part of a catenary. In addition, the displacement amount of the portion corresponding to the front end of the valve member 45 can be, for example, below the thickness of the valve member 45, but is not limited thereto.

[0117] In addition, a rectangular fitting convex portion 464 for locking the valve member 45 described later is formed to protrude on the end face 461 side of the valve seat forming surface 46a. Further, on the end face 462 side of the valve seat forming surface 46a, locking concave portions 465 serving as a locking mechanism for locking the valve cover 47 described later are formed at two places.

[0118] Such a valve holder 46 is formed of a material that is difficult to adhere to the material forming the valve member 45, and is formed of, for example, cycloolefin polymer, polyetheretherketone, polyolefin methacrylate, polypropylene, polybutylene terephthalate, or polycarbonate.

[0119] Figures 6A - 6F The valve cover 47 showing the valve body 40 Figure 6A is a top view, Figure 6B is a front view, Figure 6C is a bottom view, Figure 6D is a side view, Figure 6E is a rear view, Figure 6F is a perspective view.

[0120] Moreover, the valve cover 47 is in a substantially semi-cylindrical shape, and both end face portions of the semi-circle are open, and one end side thereof is an outflow port 471a through which gas can flow (refer to Figure 6F ). In addition, the end of the peripheral wall of the valve holder 46 is inclined or curved to fit the shape of the valve seat forming surface 46a.

[0121] The valve cover 47 is provided with a locking convex portion 475 as a locking mechanism above the inner surface on one end side of the valve holder 46. By fitting with the locking concave portion 465 of the valve holder 46, the valve holder 46 and the valve cover 47 can be locked and integrated via the valve member 45.

[0122] In addition, below the inner surface on the other end side of the valve holder 46, a valve pressing member 474 is protrudingly provided on the valve cover 47. Furthermore, reinforcing ribs or the like are also formed on the inner surface of the valve cover 47, and excessive deformation of the valve member 45 can be suppressed by the contact of the valve member 45.

[0123] The valve cover 47 is molded from a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, or liquid crystal polymer, similarly to the valve holder 46.

[0124] Finally, the situation where the valve body 40 controls the gas flow is described.

[0125] For the valve body 40, when no positive pressure is applied to the inflow port (inflow path) 461a (or cavity 468) of the storage hole 417, the valve member 45 is in close contact with the valve seat 467, blocking the gas flow on either side. Moreover, for example, when a positive pressure equal to or higher than a specified value is applied to the inflow port 461a, the valve member 45 deforms toward the outflow port 471a (outflow path) (or vent hole 416) according to the magnitude of the positive pressure, thereby opening the valve hole 466. In this way, the gas supplied from the outside of the container body 10 is supplied to the inside of the container body 10 through the valve hole 466.

[0126] Furthermore, in the case where a negative pressure equal to or higher than a specified value is applied to the outflow path, it is the same as the case where a positive pressure equal to or higher than a specified value is applied to the inflow path, so the valve body 40 performs the same valve opening operation.

[0127] Conversely, in the case where a positive pressure is applied to the outflow path, the valve member 45 is further pushed while maintaining close contact with the valve seat 467, so the gas does not pass through the valve hole 466, and the flow is blocked.

[0128] In the valve body 40, the specified value of the pressure at which the gas can flow can be adjusted by changing the material, hardness, shape and size, thickness of the valve member 45, or the opening area (width and length) of the valve hole 466.

[0129] Next, the valve body 50 for exhaust is described. Furthermore, the valve body 50 for exhaust is basically composed of the same parts except for the insertion direction of the valve assembly housed in the storage hole 417 of the block member 41 of the valve body 40 for air supply, so the description of each part is appropriately omitted.

[0130] Figures 7A - 7C Shows the valve body 50 for exhaust, Figure 7A is a sectional view, Figure 7B is a top view, Figure 7C is a bottom view. Furthermore, Figure 7A also shows a part of the container body 10 equipped with the valve body 50.

[0131] As shown in Figure 7A , the valve body 50 controls the flow of gas with respect to the container main body 10. When installed in the container main body 10, it communicates with the exhaust portion 17 via a gas flow path (not shown). Further, in the valve body 50, contrary to the valve body 40, gas can be discharged from the container main body 10 to the outside, but gas cannot be supplied to the inside of the container main body 10, and it is used for the exhaust portion 17.

[0132] The valve body 50 is formed by inserting the valve components (valve member 45, valve holder 46, and valve cover 47) of the valve body 40 substantially upside down. That is, the inlet port 461a of the valve holder 46 is located above (the side of the container main body 10), and the outlet port 471a of the valve cover 47 is located below (the outside) (see Figure 7A ).

[0133] Regarding the case where the valve body 50 for exhaust controls the gas flow, since it is basically in the opposite direction to the valve body 40 for gas supply, the description thereof is omitted. Furthermore, the pressure at the time of valve opening of the valve body 50 may also be different from the pressure at the time of valve opening of the valve body 40.

[0134] Next, the valve bodies 140 and 150 of the second embodiment will be described.

[0135] The valve body 40 of the first embodiment inserts the valve member 45, valve holder 46, and valve cover 47 that constitute the reed valve as one valve assembly into the block member 41, and further fits the block member 41 into the through hole 18. However, the valve body 140 of the second embodiment is different in that the block member 141 directly including the valve member 45 is fitted into the through hole 18.

[0136] Figures 8A - 8F The valve body 140 for gas supply is shown, Figure 8A is a sectional view, Figure 8B is a sectional perspective view, Figure 8C is a top view, Figure 8D is a front view, Figure 8E is a bottom view, Figure 8F is a sectional view showing the valve open state. Further, Figure 8A also shows a part of the container main body 10 in which the valve body 140 is assembled.

[0137] The valve body 140 controls the flow of gas from the outside of the container main body 10 toward the inside. When installed in the container main body 10, it communicates with the gas supply portion 16 via a gas flow path (not shown).

[0138] As shown in Figure 8AAs shown, the valve body 140 is inserted into the through-hole 18 formed by the ribs on the bottom surface of the container body 10 (or the bottom plate assembled to the bottom surface of the container body 10). Further, a plurality of ventilation ribs 19 for ensuring the flow of gas relative to the container body 10 are formed on the proximal end side of the through-hole 18.

[0139] The block member 141 is a cylindrical member having a first annular groove 1411 and a second annular groove 1412 formed on its outer peripheral surface. In addition, the block member 141 includes: a first circular surface (hereinafter referred to as the "upper surface") 141a facing the container body 10 side and a second circular surface (hereinafter referred to as the "lower surface") 141b facing away from the container body 10 side.

[0140] On the upper surface 141a of the block member 141, partition ribs 1419 extending radially from near the central axis are protrudingly provided (refer to Figure 8C ).

[0141] In addition, a communication path 1413 is formed around the central axis of the block member 141. The communication path 1413 includes an inflow path 1414 opening on the lower surface 141b, a valve hole 1416, and an outflow path 1418 opening on the upper surface 141a.

[0142] The inflow path 1414 is a semi-cylindrical cavity, and the valve hole 1416 is on the planar side. In addition, the end of the inflow path 1414 on the upper surface 141a side is formed with an end wall 1415 having a substantially quarter-spherical shape, which guides the inflowing gas to the valve hole 1416. Among them, the valve hole 1416 does not accurately exist on the plane passing through the central axis, but as will be described later, it exists on a curved surface that bends from the upper surface 141a side toward the outflow path 1418 side.

[0143] On the other hand, the outflow port of the outflow path 1418 facing the upper surface 141a is semi-circular (refer to Figure 8C ), and forms a wall surface that bends in a manner of narrowing toward the valve hole 1416 and the lower surface 141b. The cross-sectional areas of these inflow path 1414 and outflow path 1418 are appropriately designed according to the flow rate and pressure of the gas, or according to the maximum opening amount of the valve hole 1416 and / or the flow coefficient Cv value.

[0144] Moreover, a semi-circular stepped portion 141c is formed on the lower surface 141b of the block member 141, which is located on the opposite side of the inflow path 1414 across the central axis.

[0145] Such a block member 141 is formed, for example, from a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, or liquid crystal polymer.

[0146] Next, a circular first sealing ring 142 is fitted in the first annular groove 1411 of the block member 141. The first sealing ring 142 has an annular convex portion 1421 on its inner circumference that fits into the first annular groove 1411.

[0147] When the block member 141 is inserted into the through hole 18 of the container body 10, the first sealing ring 142 ensures the airtightness between the block member 141 and the through hole 18, and also has the function of fixing the block member 141 by fitting with the through hole 18 (see Figure 8A ).

[0148] On the other hand, a bottomed circular second sealing ring 143 is fitted in the second annular groove 1412 of the block member 141. The second sealing ring 143 has an annular convex portion 1432 on its inner circumference that fits into the second annular groove 1412. In addition, the second sealing ring 143 has a circular through hole 143a formed at the center of the bottom plate (see Figure 8A ).

[0149] When the substrate storage container 1 is placed on the loading port, the second sealing ring 143 ensures the airtightness between the valve body 140 and the nozzle of the loading port.

[0150] Furthermore, a U-shaped handle can be foldably attached to the second sealing ring 143 to facilitate the disassembly and assembly of the valve body 140.

[0151] These first sealing ring 142 and second sealing ring 143 can be formed of materials such as fluororubber, natural rubber, urethane rubber, ethylene propylene rubber, etc. Furthermore, for example, in order to externally identify the gas supply valve body 140 and the exhaust valve body 150 described later, words, numbers, marks or colors can be added to these first sealing ring 142 and second sealing ring 143 (or the block member 141 itself) by engraving, printing, coloring, etc.

[0152] Here, one or more filters 44 are arranged on the upper surface 141a (on the partition rib 1419) of the block member 141 in a manner of being clamped between the ventilation ribs 19 of the container body 10 (see Figure 8A ). Among them, the filter 44 can also be installed on the upper surface 141a of the container body 10 or the block member 141 by adhesion or welding, for example.

[0153] The filter 44 filters the supplied or discharged gas and is selected from porous membranes containing polytetrafluoroethylene, polyester fibers, fluororesins, etc., molecular filters containing glass fibers, etc., chemical filters in which a chemical adsorbent is loaded on a filter material such as activated carbon fiber.

[0154] Furthermore, in the case of using multiple filters 44, they may be of the same type, but combining filters with different properties can prevent contamination by organic substances in addition to particles, so it is even better. For example, when cleaning the container body 10, in order to also perform the function of suppressing the retention of liquids such as water or cleaning liquid or suppressing the passage of liquids, a hydrophobic or hydrophilic material may be used for one of the filters 44 to suppress the passage of liquids.

[0155] Next, the valve member 145, the valve hole 1416, and the valve seat 1417 will be described together.

[0156] The valve member 145 opens and closes the valve hole 1416 and is elastically deformable, and is formed by a semi-circular plate-shaped base portion 1451 and a reed-shaped (or tongue-shaped) sealing portion 1452 (see Figure 8A ). In a sectional view in a direction orthogonal to the flow direction of the gas passing through the valve hole 1416, these base portion 1451 and sealing portion 1452 are connected in an L shape at a right angle or approximately a right angle.

[0157] The base portion 1451 is formed to have a uniform thickness equal to or slightly thicker than the height of the stepped portion 141c of the block member 141, and is clamped and fixed between the block member 141 and the second sealing ring 143 by being assembled to the stepped portion 141c.

[0158] On the other hand, the thickness of the sealing portion 1452 may be uniform as a whole, but in the present embodiment, it is formed to have a certain thickness up to a certain point toward the outer edge, and gradually thins from a certain point toward the outer edge.

[0159] In addition, the sealing portion 1452 includes a sealing surface 1452a on the side opposite to the extending direction of the base portion 1451. The sealing surface 1452a is formed to be flush with a plane extending in the vertical direction along the central axis of the block member 141 in a state without external force (monomer state). Among them, the sealing surface 1452a may also be inclined or curved from the vertical direction toward the upstream (inflow path 1414) side of the gas flow direction so as to form an obtuse angle with respect to the base portion 1451 in a state without external force.

[0160] According to the magnitude of the desired elastic (recovery) force, such a valve member 145 can be formed using various rubbers or thermoplastic resins, etc. As these rubbers or resins, for example, rubbers such as fluororubber and ethylene propylene rubber, or thermoplastic elastomers including polyester-based elastomers, polyolefin-based elastomers, fluorine-based elastomers, urethane-based elastomers, etc., or resins such as polyether ether ketone, polybutylene terephthalate, and polycarbonate can be used. In addition, the material can also be selected according to performance conditions such as whether priority is given to the sealing (close contact) property with the valve seat 1417, whether priority is given to the anti-adhesion property to the valve seat 1417, or whether priority is given to the cleaning and drying property, etc.

[0161] Return Figure 8A and explain the valve hole 1416 and the valve seat 1417. The valve hole 1416 opened and closed by the valve member 145 is semicircular on the upper surface 141a side of the block member 141, and a valve seat 1417 is formed around the valve hole 1416.

[0162] The valve hole 1416 and the valve seat 1417 do not exist on the plane (vertical plane) passing through the central axis of the block member 141, but in the sectional view in the direction orthogonal to the central axis of the block member 141, they exist on a curve that bends from the upper surface 141a side toward the outflow path 1418 side.

[0163] As the curve forming the curved surface, for example, it can coincide with a part of a parabola such as a quadratic function, a cubic function, a quartic function, a part of a circular arc, or a part of a catenary. In addition, the displacement amount of the front end of the valve member 145 toward the outflow path 1418 side can be, for example, less than or equal to the thickness of the sealing portion 452, but is not limited thereto.

[0164] Moreover, the sealing surface where the valve member 145 contacts the valve seat 1417 also becomes a state of bending from the upper surface 141a side toward the outflow path 1418 side in the sectional view in the direction orthogonal to the central axis of the block member 141. At this time, the valve member 145 is in a state of elastically deforming by swinging with the base portion 1451 side as the pivot axis and contacts the valve seat 1417 to close the valve hole 1416.

[0165] Next, explain the situation where the valve body 140 controls the flow of gas.

[0166] When no positive pressure is applied to the inflow path 1414, the valve member 145 of the valve body 140 is in close contact with the valve seat 1417, blocking the flow of gas on either side. Moreover, for example, when a positive pressure equal to or greater than a specified value is applied to the inflow path 1414, the valve member 145 deforms toward the outflow path 1418 according to the magnitude of the positive pressure, thereby opening the valve hole 1416 (see Figure 8F ). In this way, the gas supplied from the outside of the container main body 10 is supplied to the inside of the container main body 10 through the valve hole 1416.

[0167] Furthermore, in the case where a negative pressure equal to or greater than a specified value is applied to the outflow path 1418, it is the same as the case where a positive pressure equal to or greater than a specified value is applied to the inflow path 1414, so the valve body 140 performs the same valve opening operation.

[0168] Conversely, in the case where a positive pressure is applied to the outflow path 1418, the valve member 145 is further pushed while maintaining close contact with the valve seat 1417, so the gas does not pass through the valve hole 1416, and the blockage of the flow is maintained.

[0169] In the valve body 140, the specified value of the pressure that enables gas flow can be adjusted by changing the material, hardness, shape and size, thickness of the valve member 145, or the opening area (width and length) of the valve hole 1416.

[0170] Next, the valve body 150 for exhaust will be described. Furthermore, the valve body 150 for exhaust is basically composed of the same parts as the block member 141 of the valve body 140 for air supply. Therefore, the description of each part is appropriately omitted.

[0171] Figures 9A - 9F It shows the valve body 150 for exhaust, Figure 9A is a sectional view, Figure 9B is a sectional perspective view, Figure 9C is a top view, Figure 9D is a front view, Figure 9E is a bottom view, Figure 9F is a sectional view showing the valve open state. Furthermore, Figure 9A a part of the container body 10 equipped with the valve body 150 is also shown therein.

[0172] As Figure 9A shown, the valve body 150 controls the flow of gas with respect to the container body 10 and is connected to the exhaust portion 17 via a gas flow path (not shown) when installed in the container body 10. Moreover, in the valve body 150, contrary to the valve body 140, gas can be discharged from the container body 10 to the outside, but gas cannot be supplied to the inside of the container body 10, and it is used for the exhaust portion 17.

[0173] The valve body 150 is formed by making the structure of the valve body 140 (the communication path 1413 of the valve member 145 and the block member 141) basically upside down (symmetric). That is, the inflow path 1414 opens on the upper surface 151a of the block member 151, the outflow path 1418 opens on the lower surface 151b, and the valve hole 1416 is provided between them.

[0174] Regarding the situation where the valve body 150 for exhaust controls the gas flow, since it is basically in the opposite direction to the valve body 140 for air supply, the description is omitted. Furthermore, the pressure when the valve body 150 is opened can also be different from the pressure when the valve body 140 is opened.

[0175] Here, the valve member 245 of the third embodiment will be described. Figure 10A And Figure 10B It shows the valve body 240 having the valve member 245 of the third embodiment, Figure 10A is a sectional view, Figure 10B is a sectional perspective view. Furthermore, the parts other than the valve member 245 have the same structure as the valve body 140, so the reference numerals are omitted.

[0176] The valve member 245 of the third embodiment is formed of two different members, namely, a sealing member 246 including a base portion and a sealing portion, and an elastic member 247 that applies a biasing force (restoring force) to the sealing member (see Figure 10A ). In addition, in the valve member 45 of the first embodiment, it is also possible to form it of two different members, namely, the sealing member 246 and the elastic member 247, as in the third embodiment.

[0177] Similar to the valve member 45 described above, the sealing member 246 can be formed of various rubbers, thermoplastic resins, etc. For example, the material can be selected according to performance conditions such as whether priority is given to the sealing (close contact) property with the valve seat 1417, whether priority is given to the anti-adhesion property to the valve seat 1417, or whether priority is given to the cleaning and drying property.

[0178] On the other hand, the elastic member 247 can be formed of various rubbers, thermoplastic resins, etc. according to the magnitude of the desired elastic (restoring) force. As such rubbers or resins, for example, rubbers such as fluororubber and ethylene propylene rubber, or thermoplastic elastomers including polyester-based elastomers, polyolefin-based elastomers, fluorine-based elastomers, urethane-based elastomers, etc., or resins such as polyether ether ketone, polybutylene terephthalate, and polycarbonate can be used. Furthermore, by selecting a resin material for the elastic member 247, the thickness can be made thinner.

[0179] Furthermore, a leaf spring made of metal can also be used as the core material for the elastic member 247. In such a case, it is desirable to completely cover the metal part with a rubber or resin material so that even a part does not protrude to the outside.

[0180] These sealing member 246 and elastic member 247 can be bonded or welded to each other, or can simply be in contact with each other in a force-applying manner. Therefore, the entire valve member 245 has substantially the same shape and dimensions as the valve member 45.

[0181] Finally, the valve body 340 having the inflow path 1414 of the fourth embodiment will be described.

[0182] Figure 11 It is a cross-sectional view showing the valve body 340 having the inflow path 1414 of the fourth embodiment.

[0183] Generally, when using the substrate storage container 1, gas is supplied from the inflow path 1414 of the valve body 140. However, when cleaning the substrate storage container 1, a cleaning liquid is sometimes supplied. After cleaning, if the cleaning liquid remains inside the valve body 140, etc., it may be carried into the inside of the substrate storage container 1 and adhere to the substrate when gas is supplied.

[0184] Therefore, the valve body 340 (block member 341) of the fourth embodiment has a structure that is not easily penetrated even when the cleaning liquid intrudes. Specifically, the inflow path 1414 includes an end wall 3415 that is inclined so as not to guide the fluid toward the valve hole 1416 when the fluid flowing in the vertical direction collides (see Figure 11 ).

[0185] The end wall 3415 is an inclined surface that intersects at an angle of 90 degrees or more, preferably 100 degrees or more, on the front end side with respect to the sealing line between the valve member 145 and the valve seat 1417 (when observing the sealing area in the sectional direction, it is actually curved, so it is an imaginary line connecting the front end side and the base end side with a straight line).

[0186] Furthermore, the inflow path 1414 is formed to extend in the vertical direction on the upstream side of the valve hole 1416, similar to the valve body 140 for supplying gas.

[0187] In such a valve body 340, when the cleaning liquid intrudes into the inflow path 1414 formed in the vertical direction, after the cleaning liquid collides with the end wall 3415, it is reflected in a direction away from the valve hole 1416 and the valve member 145. Therefore, it is difficult for the cleaning liquid to be guided toward the valve member 145. Furthermore, in the valve body 340 of the fourth embodiment, an eaves 463 of the valve body 40 of the first embodiment can also be added on the downstream side of the valve hole 1416.

[0188] As described above, the substrate storage container 1 of the embodiment of the present invention includes: a container main body 10 for storing a substrate, a lid body 20 for closing the opening 11 of the container main body 10, and valve bodies 40, 50 (140, 150) for controlling the flow of gas relative to the container main body 10. In the substrate storage container 1, the valve bodies 40, 50 have: a block member 41 (141) formed with a communication path (1413) that communicates the outside and the inside of the container main body 10 via a valve hole 466 (1416); and a plate-like valve member 45 that opens and closes the valve hole 466 (1416) and can be elastically deformed, and the valve seat 467 (1417) around the valve hole 466 (1416) and the sealing surface 452a (1452a) of the valve member 45 (145) are bent and in contact with each other toward the downstream side of the gas flow direction.

[0189] Thus, for example, when gas is introduced from one side (inflow path 1414) of valve bodies 40 and 50 (140 and 150) to create a positive pressure and reaches a specified pressure value, the valve member 45 elastically deforms and moves away from the valve seat 467 (1417). As a result, the introduced gas is supplied to the other side (outflow path 1418) of valve bodies 40 and 50 (140 and 150). In particular, the contact area between the valve member 45 (145) and the valve seat 467 (1417) when the valve is closed is curved in a cross-sectional view, and the front end of the valve member 45 (145) deforms the most. Therefore, the elastic restoring force on the front end side becomes larger, and the sealing force of the valve member 45 (145) relative to the valve seat 467 (1417) does not have a large difference between the front end side and the base 451 (1451) side.

[0190] In addition, the substrate storage container 1 includes valve bodies 40 and 50 (140 and 150) that do not use metallic members. Therefore, even if there are metal-corrosive residual substances in the stored substrates, problems of metal corrosion will not occur, and it is not easy for valve bodies 40 and 50 (140 and 150) to malfunction.

[0191] Furthermore, as a result of conducting a humidity retention test using the substrate storage container 1 of the embodiment, no particularly large difference was found in the humidity reduction over time compared to conventional products.

[0192] The valve member 45 (145) of the embodiment includes a planar sealing surface 452a (1452a) that extends in one direction (e.g., the vertical direction) in a state without external force. The valve member 45 elastically deforms and bends toward the downstream side in the gas flow direction and contacts to close the valve hole 466 (1416). Thus, the valve member 45 (145) is in close contact with the valve seat 467 (1417) with a uniform elastic force (elastic restoring force) up to the front end of the sealing portion 452 (1452), and therefore the opening and closing of the valve hole 466 (1416) can be reliably performed.

[0193] The valve member 45 (145) of the embodiment includes a sealing surface 452a that is inclined or curved from the vertical direction toward the upstream side in the gas flow direction in a state without external force. The valve member 45 elastically deforms and bends toward the downstream side in the gas flow direction and contacts to close the valve hole 466 (1416). Thus, the valve member 45 (145) is in close contact with the valve seat 467 (1417) with a uniform elastic reaction force up to the front end of the sealing portion 452 (1452), and therefore the opening and closing of the valve hole 466 (1416) can be reliably performed.

[0194] The valve member 245 of the embodiment is formed by a plate-shaped sealing member 246 and an elastic member 247 that applies force to the sealing member 246. Thereby, it is possible to easily design the valve member 245 with desired properties such as close contact, anti-adhesion, and elastic force, and it is also possible to easily change the opening and closing pressure conditions of the valve.

[0195] The inflow path 1414 of the embodiment includes an end wall 3415 that is inclined in such a way that when a fluid flowing in the vertical direction collides, the fluid is not guided in the direction of the valve hole 1416. Thereby, even if the cleaning liquid invades the inflow path 1414 formed in the vertical direction, when it collides with the end wall 3415, it will be reflected in a direction away from the valve hole 1416 and the valve member 145, so it is possible to prevent the cleaning liquid from entering the downstream side of the valve hole 1416.

[0196] The valve bodies 40 and 140 of the embodiment control the flow of gas from the outside of the container body 10 to the inside, and the valve bodies 50 and 150 of the embodiment control the flow of gas from the inside of the container body 10 to the outside. Thereby, the flow of gas with respect to the substrate storage container 1 can be controlled separately.

[0197] The valve bodies 40, 50, 140, and 150 of the embodiment have a filter 44 for filtering gas. Thereby, the gas passing through the valve bodies 40, 50, 140, and 150 can be filtered. In addition, by sandwiching the filter 44 between the block member 41, the partition rib 419 of the block member 141, and the ventilation rib 19 of the container body 10, the detachment of the filter 44 can be prevented.

[0198] The outflow path of the embodiment includes an eaves 463 that extends in a direction crossing the vertical direction from the side of the valve hole 466 for the fluid passing through the valve hole 466 to collide. Thereby, in the valve body 40, even if the cleaning liquid enters through the valve hole 466, since it collides with the eaves 463, it will not reach the filter 44 and it is possible to prevent it from entering the container body 10. In addition, in the valve bodies 40 and 50, the gas for supply or exhaust can be dispersed by the eaves.

[0199] The block member 41 of the embodiment has: a valve holder 46 in which a valve hole 466 is formed, and a valve cover 47 that sandwiches the valve member 45 between the valve holder 46. Thereby, between the valve body 40 for gas supply and the valve body 50 for gas exhaust, the block member 41, the valve member 45, the valve holder 46, and the valve cover 47 can be used as shared parts, and by simply changing the insertion direction of the valve assembly including the valve member 45, the valve holder 46, and the valve cover 47 with respect to the block member 41, the flow direction of gas from the outside of the substrate storage container 1 to the inside or from the inside of the substrate storage container 1 to the outside can be selected.

[0200] As described above in detail, the preferred embodiments of the present invention have been described, but the present invention is not limited to the described embodiments, and various modifications and changes can be made within the scope of the gist of the present invention described in the claims.

[0201] (Variant example)

[0202] In the above-described embodiment, the filter 44 may also be configured as a structure separate from the valve bodies 40, 50, 140, and 150, and may be disposed in the gas flow path from the gas supply source to the container body 10.

[0203] In the above-described embodiment, the valve bodies 40, 50, 140, and 150 are configured to be installed in the through-hole 18 formed in at least one of the container body 10 and the lid body 20. However, like the valve bodies described in Patent Document 3, the valve bodies 40, 50, 140, and 150 may be configured to be installed in the gas flow path (pipe) provided in the container body 10 or the like, for example, in the middle of the gas flow path communicating with at least one of the gas supply portion 16 and the exhaust portion 17.

[0204] Description of reference numerals

[0205] 1 Substrate storage container

[0206] 10 Container body 11 Opening 12 Sealing surface 13 Support body 14 Robot flange 15 Manual handle 16 Gas supply portion 17 Exhaust portion 18 Through-hole 19 Ventilation rib

[0207] 20 Lid body 21 Mounting groove 22 Protrusion

[0208] 30 Gasket

[0209] 40 Valve body

[0210] 41 Block member 411 First cylindrical portion 412 Second cylindrical portion 413 Annular rib 414 Support shaft

[0211] 416 Ventilation hole 417 Storage hole 418 Locking rib 419 Partition rib 41a Upper surface 41b Lower surface 41c Step portion 41d Protrusion

[0212] 43 Handle

[0213] 44 Filter

[0214] 45 Valve member 451 Base portion 452 Sealing portion 452a Sealing surface

[0215] 46 Valve holder 461 End face 461a Inlet port 462 End face 463 Eaves

[0216] 464 fitting convex part, 465 locking concave part, 466 valve hole, 467 valve seat

[0217] 466 cavity

[0218] 47 valve cover, 471a outlet, 474 valve pressing part, 475 locking convex part

[0219] 46a valve seat forming surface

[0220] 50 valve body

[0221] 51 block member

[0222] 140 valve body

[0223] 141 block member, 1411 first annular groove, 1412 second annular groove, 1413 communication path

[0224] 1414 inflow path, 1415 end wall, 1416 valve hole, 1417 valve seat

[0225] 1418 outflow path, 1419 partition rib, 141a upper surface, 141b lower surface

[0226] 141c step part

[0227] 142 first sealing ring, 421 annular convex part

[0228] 143 second sealing ring, 432 annular convex part, 43a through hole

[0229] 145 valve member, 1451 base part, 1452 sealing part, 1452a sealing surface, 150 valve body

[0230] 151 block member, 151a upper surface, 151b lower surface, 240 valve body

[0231] 245 valve member, 246 sealing member, 247 elastic member, 340 valve body

[0232] 341 block member, 3415 end wall

Claims

1. A substrate storage container, characterized in that, comprising: a container body for storing a substrate; a lid for closing an opening of the container body; and a valve body for controlling the flow of gas relative to the container body, wherein the valve body has: a block member formed with a communication path that communicates the outside and the inside of the container body via a valve hole; and a plate-like valve member that opens and closes the valve hole and is elastically deformable, and a valve seat around the valve hole and a sealing surface of the valve member are bent and in contact toward the downstream side in the gas flow direction.

2. The substrate storage container according to claim 1, characterized in that, the valve member includes a planar sealing surface that extends in one direction in a state without an external force, and the valve member contacts in a state of being elastically deformed by bending toward the downstream side in the gas flow direction so as to close the valve hole.

3. The substrate storage container according to claim 1, characterized in that, the valve member includes a sealing surface that is inclined or bent from the vertical direction toward the upstream side in the gas flow direction in a state without an external force, and the valve member contacts in a state of being elastically deformed by bending toward the downstream side in the gas flow direction so as to close the valve hole.

4. The substrate storage container according to any one of claims 1 to 3, characterized in that, the valve member is formed of a plate-like sealing member and an elastic member that applies a force to the sealing member.

5. The substrate storage container according to any one of claims 1 to 3, characterized in that, the communication path has an inflow path that extends in the vertical direction on the upstream side of the valve hole, and the inflow path includes an end wall that is inclined so as not to guide the fluid toward the valve hole when the fluid flowing in the vertical direction collides.

6. The substrate storage container according to any one of claims 1 to 3, characterized in that, the valve body controls the flow of gas from the inside of the container body to the outside.

7. The substrate storage container according to any one of claims 1 to 3, characterized in that, the valve body controls the flow of gas from the outside of the container body to the inside.

8. The substrate storage container according to any one of claims 1 to 3, characterized in that, the valve body has a filter for filtering the gas.

9. The substrate storage container according to any one of claims 1 to 3, characterized in that, the communication path has an outflow path that extends on the downstream side of the valve hole, and the outflow path includes an eaves that extends from the valve hole side in a direction intersecting the vertical direction for the fluid passing through the valve hole to collide.

10. The substrate storage container according to any one of claims 1 to 3, characterized in that, the block member has: a valve holder formed with the valve hole and a valve cover that sandwiches the valve member between the valve holder.

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