A precisely controlled laser beam splitting processing device

Abstract

The present invention discloses a precisely controlled laser beam splitting processing device, comprising a circular track, a rotating mirror module located at the center of the circular track, and N splitting optical path modules evenly distributed on the circular track; the laser is a pulsed laser, and the laser output laser beam frequency is fHz. The laser emits a laser beam, which enters the rotating mirror module after being collimated by a collimator. The rotating mirror module can rotate 360 ​​degrees around the center of the optical axis under the action of a driving device. The speed of the driving device is x revolutions per second. A control system is respectively connected to the laser and the driving device for controlling and controlling the laser output laser beam frequency and / or the driving device speed to satisfy the following formula: f=N·x, wherein f, N and x are all positive integers. The laser beam is emitted by the rotating mirror module, and the emitted laser beam is irradiated into each splitting optical path module while rotating. Each splitting optical path module receives a pulsed laser beam, thereby realizing precisely controlled splitting of the beam.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a precisely controlled laser beam splitting processing device. Background Art

[0002] The laser scribing process involves numerous parameter settings, placing high demands on the efficiency, precision, and flexibility of the laser processing equipment and its core optical path system. Currently, common laser processing equipment is categorized into two types: single-channel laser equipment and multi-channel laser equipment. Single-channel laser equipment relies on a single laser and a simple optical path design. While simple in structure and low in cost, it struggles to meet processing and detection requirements, resulting in low processing efficiency. Currently, laser beam splitting of a single-channel laser output path can be used to achieve parallel processing, thereby improving processing efficiency.

[0003] Laser beam splitting technology, by splitting a laser beam into multiple sub-beams, enables simultaneous execution of multiple workstations or multiple processing processes. Due to its high efficiency, high precision, and flexibility, laser beam splitting technology is widely used in various fields, particularly those requiring high precision and efficiency. It is widely used in electronics, automotive, aerospace, medical devices, precision instruments, 3D printing, packaging, energy and environmental protection, and other fields. It is particularly well-suited for high-precision and high-efficiency production requirements such as multi-hole processing, precision drilling, laser scribing, laser cutting, and surface treatment. Laser beam splitting methods primarily use optical beam splitters, fiber beam splitters, microlens arrays, polarization beam splitters, spatial light modulators (SLMs), and reflective beam splitters. Optical beam splitters split a laser beam into multiple sub-beams through reflection or transmission; fiber beam splitters distribute laser energy to different optical fibers; microlens arrays focus multiple beams using multiple small lenses; polarization beam splitters divide a beam based on its polarization state; spatial light modulators split the beam by dynamically adjusting the phase and intensity of the beam; and reflective beam splitters achieve light separation through reflection at different angles.

[0004] Patent publication number CN118664067A discloses a "laser beam splitting method and apparatus," comprising a laser, a beam expander, a reflector, a spatial light modulator, a focusing lens, a beam splitting array module, a collimating lens module, a reflector array module, and an F-Theta lens. This laser beam splitting system generates multiple focal points using a spatial light modulator, which is then spatially separated by a micromirror array to adjust the beam spacing. This laser beam splitting system not only splits the beam using a spatial light modulator but also incorporates a micromirror array to adjust the beam spacing.

[0005] Patent publication number CN117620472A discloses a "Laser Processing Apparatus, Electrode Processing Equipment, and Electrode Processing Method." The laser beam generated by a laser is split into multiple beams by a beam splitter. These beams are then adjusted by a galvanometer and rotating mirror systems before being focused on the processing plane by a focusing unit. The galvanometer and rotating mirror systems work together to control the exit positions of the split laser beams on the processing plane, ensuring that each laser beam produces a consistent pattern on the processing plane, effectively improving the consistency of laser beam splitting.

[0006] However, existing laser beam splitting technology has the following problems:

[0007] 1. Fixed beam splitting ratio: The optical-mechanical structure of the laser beam splitting device using an optical beam splitter and a polarization beam splitter prism is fixed, making it difficult to flexibly adjust according to actual needs, limiting application scenarios.

[0008] 2. Complex design and manufacturing process: Although the microlens array can realize multi-beam splitting, its design and manufacturing process is complex, the cost is high, and the uniformity of the beam after splitting is difficult to ensure;

[0009] 3. Large energy loss: Spatial light modulators and diffractive optical elements achieve beam splitting by dynamically adjusting the phase and intensity of the light beam, but their diffraction efficiency is low and the energy loss is large, especially in high-power laser applications, where they perform poorly and cannot meet the requirements of efficient beam splitting. Summary of the Invention

[0010] In response to the defects of existing laser beam splitting technology, the present invention provides a precisely controlled laser beam splitting processing device with a flexible and adjustable splitting ratio, which can realize precise control of multi-path laser beam splitting, ensuring that each splitting optical path can receive a pulsed laser, and the resulting focused light spot is consistent. In addition, the optical path structure is simple, which can improve the utilization rate of laser energy.

[0011] In order to achieve the above object, the present invention adopts the following technical solutions:

[0012] The present invention provides a precisely controlled laser beam splitting processing device, comprising a laser, a collimator, a rotating mirror module, a circular track, N beam splitting optical path modules and a control system;

[0013] The annular track is composed of an inner track and an outer track that are located in the same plane and are arranged concentrically. The rotating mirror module is located at the center of the annular track. N splitting optical path modules are evenly distributed on the annular track. In actual application, the number of splitting optical path modules and the diameter of the annular track can be adjusted to obtain different numbers and positions of split laser beams.

[0014] The laser is a pulsed laser, and the laser beam output frequency of the laser is fHz. The laser emits a laser beam, which is collimated by a collimator and then enters the rotating mirror module. The center of the optical axis inside the rotating mirror module is perpendicular to the plane of the circular track. The rotating mirror module can rotate 360 ​​degrees around the center of the optical axis under the action of a driving device. The speed of the driving device is x revolutions per second. The control system is respectively connected to the laser and the driving device for controlling and regulating the laser beam output frequency and / or the driving device speed to satisfy the following formula: f=N·x, wherein f, N and x are all positive integers. The laser beam is emitted by the rotating mirror module, and the emitted laser beam is simultaneously irradiated into each splitting optical path module while rotating. Each splitting optical path module receives a pulsed laser beam, thereby achieving precise control and splitting of the beam.

[0015] The light splitting optical path module focuses the received laser beam to form a plurality of split laser beams, and the emission frequency of each split laser beam is the same as the frequency of the laser output by the laser.

[0016] Using the above technical solution:

[0017] The core of the laser beam splitting processing device of the present invention lies in precisely matching the rotational speed of the drive device with the laser output repetition rate, ensuring that each split optical path receives a single laser pulse. This function is achieved through synchronous control by the control system. The control system simultaneously controls the rotational speed of the drive device and the repetition rate of the laser output. In specific operation, the control system first activates the drive device. When, after a time Δt, the rotational speed of the drive device reaches the set value x rpm, the laser is turned on, causing it to output pulsed laser light. Once the split optical path module receives the pulsed laser light and forms a focused beam, the control system immediately adjusts the laser output repetition rate to fHz, following the relationship f = Nx (where f, N, and x are all positive integers). This matching relationship is key to the laser beam splitting function. In this case, the laser emits f laser pulses per second, and the corresponding drive device rotates x revolutions per second. Since the drive device passes through N split optical paths per rotation, the frameless torque motor passes through a total of Nx split optical paths within one second. When f = Nx, each split optical path receives exactly one laser pulse, thus achieving precise control of multi-path laser beam splitting.

[0018] Furthermore, the laser output beam frequency f is adjustable within the range of 1 to 4000 kHz.

[0019] Specifically, the laser in the present invention is a pulsed laser. The repetition frequency f of the laser output is adjustable within the range of 1 to 4000 kHz, and the control of the laser repetition frequency is achieved through computer software control. The wavelength of the laser used in the present invention is consistent with the optical path. For example, the wavelength of the laser beam emitted by the laser is 1064 nm, and the specifications suitable for 1064 nm are also required for the mirrors and lenses in the optical path structure.

[0020] Further, during the processing, the rotational speed x of the driving device is adjustable within the range of 0 to 70 revolutions per second.

[0021] Specifically, when the driving device uses a frameless torque motor, the maximum rotational speed of the frameless torque motor is 4200 revolutions per minute. During the processing, its rotational speed is regulated by the control system to maintain a rotational speed of x revolutions per second (0 < x ≤ 70). It is also possible to use a motor + gear + bearing to replace the frameless torque motor, and use gear speed change to achieve high-speed output, so as to match a higher pulse repetition frequency.

[0022] Further, the rotating mirror module includes a rotating mirror barrel and a first mirror; the rotating mirror barrel is driven by the driving device and can rotate 360° around the center of the optical axis. A first mirror is fixedly installed inside the rotating mirror barrel along the center of the optical axis and is inclined at 45°. The laser beam enters vertically into the rotating mirror barrel and is reflected by the first mirror, and then a horizontally transmitted laser beam is emitted backward.

[0023] Specifically, the first mirror and the driving device are fixed inside the rotating mirror barrel. The rotating mirror barrel is drivingly connected to the driving device and rotates with the driving device. The laser beam enters vertically into the rotating mirror barrel and is reflected and emitted by the first mirror located at the bottom of the rotating mirror barrel, and will rotate 360° around the center of the optical axis. The emitted laser irradiates on the beam splitting optical path module while rotating.

[0024] Further, the beam splitting optical path module includes a beam splitting mirror barrel, a second mirror and a lens; the second mirror and the lens are sequentially installed inside the beam splitting mirror barrel along the center of the optical axis from top to bottom. The second mirror is inclined at 45°, and the second mirror is horizontally facing the first mirror. The second mirror changes the horizontally transmitted laser beam emitted by the rotating mirror module into a vertically transmitted laser beam, and the vertically transmitted laser beam is focused by the lens.

[0025] Further, the central axis of the rotating mirror barrel coincides with the center of the internal optical axis.

[0026] Further, a third mirror inclined at 45° is provided between the collimator and the rotating mirror module. The third mirror changes the horizontally laser beam collimated by the collimator into a vertically transmitted laser beam.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] (1) The rotating mirror module is located at the center of the circular track, and multiple splitting optical path modules are evenly distributed on the circular track outside the rotating mirror module. The number and position of the splitting optical path modules can be reasonably arranged according to the number of splitting and the focal position. The rotating mirror module can rotate at high speed and emit a 360° laser at the center of the circular track. After the laser is emitted, it can scan the space to the position of each splitting optical path module to realize the splitting of the light beam;

[0029] (2) The control system controls the rotation speed of the driving device to match the repetition frequency of the laser output, ensuring that each splitting optical path module can receive a pulsed laser, and each split laser beam is consistent, the spot is consistent, and no manual adjustment is required; each split laser beam is generated by changing the emission direction of the laser by rotating the mirror module, so laser beam splitting can be achieved by adjusting the repetition frequency of the laser and the rotation speed of the mirror, without the need for manual adjustment of each path. At the same time, the optical imaging system is consistent, and the resulting focused spot is also consistent;

[0030] (3) The optical splitter in the present invention is realized only by a driving device and three reflectors, and fewer optical devices are used, thereby reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] Figure 1 This is a diagram showing the spatial positions of 16 laser beam splittings in the embodiment;

[0033] Figure 2 Schematic diagram of the structure of the laser beam splitting processing device in the embodiment;

[0034] Figure 3 Flow chart of the control system for N-beam laser beam splitting in the embodiment.

[0035] Among them, the specific drawings are marked as follows:

[0036] Laser 1, collimator 2, third reflector 3, rotating mirror module 4, rotating mirror barrel 5, driving device 6, first reflector 7, annular track 8, splitter optical path module 9, splitter barrel 10, second reflector 11, lens 12, control system 13. DETAILED DESCRIPTION

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0038] The embodiment of the present invention discloses a precisely controlled laser beam splitting processing device, such as Figure 1 and Figure 2 As shown, it includes a laser 1, a collimator 2, a rotating mirror module 4, a ring track 8, N light splitting path modules 9 and a control system 13;

[0039] The annular track 8 is composed of an inner track and an outer track that are located in the same plane and are concentrically arranged. The rotating mirror module 4 is located at the center of the annular track 8. N splitting optical path modules 9 are evenly distributed on the annular track 8. In actual application, the number of splitting optical path modules 9 and the diameter of the annular track 8 can be adjusted to obtain different numbers and positions of split laser beams. In this embodiment, 16 splitting optical path modules 9 are evenly distributed on the annular track 8.

[0040] The laser 1 is a pulsed laser. The frequency of the laser beam output by the laser 1 is fHz. The laser 1 emits a laser beam, which enters the rotating mirror module 4 after being collimated by the collimator 2. The center of the optical axis inside the rotating mirror module 4 is perpendicular to the plane of the circular track 8. The rotating mirror module 4 can rotate 360° around the center of the optical axis under the action of the driving device 6. The speed of the driving device 6 is x revolutions per second. The control system 13 is respectively connected to the laser 1 and the driving device 6 to control the frequency of the laser beam output by the laser 1 and / or the speed of the driving device 6 to meet the following formula: f=N·x, where f, N and x are all positive integers. The laser beam is emitted by the rotating mirror module 4. The emitted laser beam is irradiated into each splitting optical path module 9 while rotating. Each splitting optical path module 9 receives a pulsed laser beam to achieve precise control and splitting of the beam.

[0041] The light splitting optical path module 9 focuses the received laser beam to form a plurality of split laser beams, and the emission frequency of each split laser beam is the same as the frequency of the laser output by the laser 1 .

[0042] The core of the laser beam splitting processing device of the present invention is to achieve a precise match between the rotation speed of the driving device 6 and the repetition frequency of the laser output by the laser 1, thereby ensuring that each split light path can receive a pulse of laser light. This function is achieved through the synchronous control of the control system 13. The control system 13 simultaneously controls the rotation speed of the driving device 6 and the repetition frequency of the laser output by the laser 1. Figure 3As shown, during specific operation, first, the control system 13 controls the startup of the driving device 6. After Δt time, the rotational speed of the driving device 6 reaches the set x revolutions per second. At this time, the laser 1 is turned on to output pulsed laser. When the beam splitting optical path module 9 can receive the pulsed laser to form a focused beam, the control system 13 immediately adjusts the output laser repetition frequency of the laser 1 to be set at f Hz, and the system follows the relationship f = Nx (f, N, and x are all positive integers). This matching relationship is the key to the laser beam splitting function. In this case, the laser 1 emits f pulsed lasers per second, and the corresponding driving device 6 rotates x revolutions per second. Since the driving device 6 passes through the beam splitting optical path N times per revolution, within 1 second, the frameless torque motor passes through the beam splitting optical path Nx times in total. When f = Nx, each beam splitting optical path exactly receives one pulsed laser, thereby achieving precise control of multi-channel laser beam splitting.

[0043] Among them, the output laser beam frequency f of the laser 1 is adjustable within the range of 1 - 4000 kHz. Specifically, the laser 1 in the present invention is a pulsed laser, the repetition frequency f of the laser 1 output laser is adjustable within the range of 1 - 4000 kHz, and the control of the repetition frequency of the laser 1 is achieved through computer software control. The wavelength of the laser 1 adopted in the present invention is consistent with the optical path. For example, the wavelength of the laser beam emitted by the laser 1 is 1064 nm, and the reflectors and the lens 12 in the optical path structure also need to adopt specifications suitable for 1064 nm.

[0044] Among them, the rotational speed x of the driving device 6 during processing is adjustable within the range of 0 - 70 revolutions per second. Specifically, when the driving device 6 adopts a frameless torque motor, the maximum rotational speed of the frameless torque motor is 4200 revolutions per minute, and during processing, its rotational speed is regulated by the control system 13 to maintain a rotational speed of x revolutions per second (0 < x ≤ 70). It is also possible to use a motor + gear + bearing to replace the frameless torque motor and utilize gear speed change to achieve high rotational speed output, thereby matching a higher pulse repetition frequency.

[0045] Among them, the rotating mirror module 4 includes a rotating mirror barrel 5 and a first reflector 7; the rotating mirror barrel 5 is driven by the driving device 6 and can rotate 360° around the optical axis center. Inside the rotating mirror barrel 5, a first reflector 7 is fixedly installed along the optical axis center at an inclination of 45°. The laser beam enters vertically into the inside of the rotating mirror barrel 5 and is reflected by the first reflector 7, and then a horizontally transmitted laser beam is emitted backward. Specifically, the first reflector 7 and the driving device 6 are fixed inside the rotating mirror barrel 5, the rotating mirror barrel 5 is drivingly connected to the driving device 6, and the rotating mirror barrel 5 rotates with the driving device 6. The laser beam enters vertically into the inside of the rotating mirror barrel 5, is reflected by the first reflector 7 located at the bottom of the rotating mirror barrel 5 and emitted, and will rotate 360° around the optical axis center. The emitted laser irradiates on the beam splitting optical path module 9 while rotating.

[0046] Among them, the spectroscopic optical path module 9 includes a spectroscopic tube 10, a second reflector 11 and a lens 12; the second reflector 11 and the lens 12 are installed in the spectroscopic tube 10 along the center of the optical axis, from top to bottom. The second reflector 11 is set at an angle of 45°, and the second reflector 11 is set horizontally opposite to the first reflector 7. The second reflector 11 converts the horizontally transmitted laser beam emitted by the rotating mirror module 4 into a vertically transmitted laser beam, and the vertically transmitted laser beam is focused by the lens 12.

[0047] The central axis of the rotating mirror barrel 5 coincides with the center of the internal optical axis.

[0048] A third reflector 3 tilted at 45° is provided between the collimator 2 and the rotating mirror module 4 . The third reflector 3 converts the horizontal laser beam collimated by the collimator 2 into a vertically transmitted laser beam.

[0049] In the present invention, the rotating mirror module 4 is located at the center of the circular track 8, and multiple splitting optical path modules 9 are evenly distributed on the circular track 8 outside the rotating mirror module 4. The number and position of the splitting optical path modules 9 can be reasonably arranged according to the number of splittings and the focal position. The rotating mirror module 4 can rotate at high speed and emit a 360-degree laser at the center of the circular track 8. After the laser is emitted, it can scan the space to the position of each splitting optical path module 9 to achieve beam splitting. The control system 13 controls the rotation speed of the driving device 6 to match the repetition frequency of the laser output by the laser 1, ensuring that each splitting optical path module 9 can receive a pulse of laser light. Each splitting laser beam is consistent and has a consistent spot, and no manual adjustment is required. Each splitting laser beam is generated by changing the emission direction of the laser beam by rotating the rotating mirror module 4. Therefore, laser beam splitting can be achieved by adjusting the repetition frequency of the laser 1 to match the rotation speed of the rotating mirror, without the need for manual adjustment of each beam. At the same time, the optical imaging system is consistent, and the resulting focused spot is also consistent. The splitting device in the present invention is realized only by the driving device 6 and three reflectors, using fewer optical devices, reducing costs.

[0050] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A precisely controlled laser beam splitting processing device, characterized in that: It includes laser, collimator, rotating mirror module, circular track, N beam splitting optical path modules and control system; The annular track is composed of an inner track and an outer track that are located in the same plane and are arranged concentrically. The rotating mirror module is located at the center of the annular track, and N light splitting optical path modules are evenly distributed on the annular track. The laser is a pulsed laser, and the laser beam output frequency of the laser is fHz. The laser emits a laser beam, which is collimated by a collimator and then enters the rotating mirror module. The center of the optical axis inside the rotating mirror module is perpendicular to the plane of the circular track. The rotating mirror module can rotate 360 ​​degrees around the center of the optical axis under the action of a driving device. The speed of the driving device is x revolutions per second. The control system is respectively connected to the laser and the driving device for controlling and regulating the laser beam output frequency and / or the driving device speed to satisfy the following formula: f=N·x, wherein f, N and x are all positive integers. The laser beam is emitted by the rotating mirror module, and the emitted laser beam is simultaneously irradiated into each splitting optical path module while rotating. Each splitting optical path module receives a pulsed laser beam, thereby achieving precise control and splitting of the beam. The light splitting optical path module focuses the received laser beam to form a plurality of split laser beams; The rotating mirror module includes a rotating mirror barrel and a first reflector; the rotating mirror barrel is driven by a driving device and can rotate 360° around the center of the optical axis. A first reflector is fixedly installed inside the rotating mirror barrel along the center of the optical axis at an angle of 45°. The central axis of the rotating mirror barrel coincides with the center of the internal optical axis. The laser beam enters the rotating mirror barrel vertically, is reflected by the first reflector, and emits a horizontally transmitted laser beam backward.

2. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: The laser beam frequency f output by the laser is adjustable within the range of 1 to 4000 kHz.

3. The precisely controlled laser beam splitting processing device according to claim 1 or 2, characterized in that: The rotation speed x of the driving device is adjustable in the range of 0 to 70 rpm during the processing.

4. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: The spectroscopic optical path module includes a spectroscopic tube, a second reflector and a lens; the second reflector and the lens are installed in sequence from top to bottom along the center of the optical axis inside the spectroscopic tube, the second reflector is set at an angle of 45 degrees, and the second reflector is set horizontally opposite to the first reflector. The second reflector converts the horizontally transmitted laser beam emitted by the rotating mirror module into a vertically transmitted laser beam, and the vertically transmitted laser beam is focused by the lens.

5. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: A third reflector tilted at 45° is provided between the collimator and the rotating mirror module. The third reflector converts the horizontal laser beam collimated by the collimator into a vertically transmitted laser beam.

6. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: The driving device is a frameless torque motor or a motor, gear and bearing matching structure.

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