A dry etching chamber vacuum door replacement device

Abstract

The present application provides a dry etching chamber vacuum door replacement device, belonging to the technical field of dry etching equipment, specifically including: a base; a mobile trolley that moves on the base; a lifting unit installed on the mobile trolley, with a clamping unit provided on the lifting unit; a carrier table installed on the mobile trolley, and the carrier table is used to receive the vacuum door; a clamping unit installed on the carrier table or the mobile trolley, and the clamping unit is used to clamp the pneumatic assembly box located on the carrier table; wherein, lifting units are provided on both sides of the carrier table, the positions of the lifting units correspond to the installation flange blocks on both sides, the clamping unit is used to clamp the installation flange blocks, the lifting unit is used to drive the clamping unit to lift and lower, the carrier table is used to abut against the bottom of the pneumatic assembly box, and the clamping unit is used to clamp the opposite sides of the pneumatic assembly box. Through the processing solution of the present application, the replacement efficiency and safety of the etching chamber vacuum door are improved.

Description

Technical Field

[0001] The present application relates to the field of dry etching equipment, and particularly to a device for replacing the vacuum door of a dry etching chamber. Background Art

[0002] When replacing the vacuum door of the existing dry etching equipment for liquid crystal panels, disassembly requires 3 - 4 people to operate simultaneously. Moreover, the vacuum door weighs about 500 Kg. Firstly, the operation is highly dangerous. Secondly, the operation intensity is high and the operation cost is high. When multiple people perform the replacement operation, dust and other pollutants are generated in the clean room, polluting the clean room. Summary of the Invention

[0003] In view of this, the present application provides a device for replacing the vacuum door of a dry etching chamber, which solves the problems in the prior art, improves the replacement efficiency of the vacuum door of the etching chamber, saves manpower, and improves safety.

[0004] The device for replacing the vacuum door of a dry etching chamber provided by the present application adopts the following technical solutions:

[0005] A device for replacing the vacuum door of a dry etching chamber, wherein the vacuum door of the dry etching chamber includes a sealing plate, a pneumatic assembly box, and an installation flange block. The pneumatic assembly box is fixedly connected to the lower part of the sealing plate, and the installation flange and the sealing plate are fixedly connected to the lower part. Installation flange blocks are provided on both sides of the pneumatic assembly box. The device for replacing the vacuum door of the dry etching chamber includes:

[0006] A base, located below the installation position of the vacuum door of the dry etching chamber;

[0007] A mobile trolley, moving on the base;

[0008] A lifting unit, installed on the mobile trolley, and a clamping unit is provided on the lifting unit;

[0009] A bearing platform, installed on the mobile trolley, and the bearing platform is used to receive the vacuum door;

[0010] A clamping unit, installed on the bearing platform or the mobile trolley, and the clamping unit is used to clamp the pneumatic assembly box located on the bearing platform;

[0011] Wherein, lifting units are provided on both sides of the bearing platform. The positions of the lifting units correspond to the installation flange blocks on both sides. The clamping unit is used to clamp the installation flange blocks. The lifting unit is used to drive the clamping unit to lift and lower. The bearing platform is used to abut against the bottom of the pneumatic assembly box. The clamping unit is used to clamp the opposite sides of the pneumatic assembly box.

[0012] Optionally, the mobile trolley includes a mobile vehicle and a walking drive assembly. A guide rail is provided on the base. The rollers of the mobile vehicle roll along the guide rail. The output end of the walking drive assembly is connected to the rollers of the mobile vehicle, and the walking drive assembly is used to drive the rollers to rotate.

[0013] Optionally, the dry etching chamber vacuum door replacement device further includes a master control unit. The lifting unit, the clamping unit, and the clamping unit are pneumatic or electric devices. The master control unit is used to control the movement of the mobile trolley, the lifting of the lifting unit, the clamping and releasing actions of the clamping unit, and the clamping and releasing actions of the clamping unit.

[0014] Optionally, one end of the base is a loading and unloading station, and the other end of the base is a disassembly and assembly station. When the mobile trolley is located at the disassembly and assembly station, the clamping unit is aligned with the mounting flange block, or the vacuum door on the carrier table is aligned with the mounting position of the upper vacuum door of the dry etching chamber; when the mobile trolley is located at the loading and unloading station, the mobile trolley is located outside the installation position range of the upper vacuum door of the dry etching chamber;

[0015] First photoelectric sensors and second photoelectric sensors are provided at both ends of the base. The first photoelectric sensor is used to send a proximity signal to the master control unit when detecting that the mobile trolley is about to reach the loading and unloading station or the disassembly and assembly station, and the master control unit controls the mobile trolley to decelerate. The second photoelectric sensor is used to send a in-place signal to the master control unit when the mobile trolley reaches the loading and unloading station or the disassembly and assembly station, and the master control unit controls the mobile trolley to stop.

[0016] Optionally, positioning holes are provided on the base, pins are provided on the movement of the mobile trolley, a first cylinder is provided on the mobile trolley, and the output shaft of the first cylinder is fixedly connected to the pin. When the mobile trolley is located at the loading and unloading station or the disassembly and assembly station, the pin is aligned with the positioning hole. The solenoid valve of the first cylinder is electrically connected to the master control unit, and the master control unit controls the extension and retraction of the output shaft of the first cylinder through the solenoid valve of the first cylinder. The master control unit is used to control the extension of the telescopic shaft of the first cylinder when the mobile trolley is located at the loading and unloading station or the disassembly and assembly station;

[0017] The master control unit is used to control the retraction of the telescopic shaft of the first cylinder after the clamping unit clamps the pneumatic assembly box.

[0018] Optionally, a plurality of second cylinders are provided on the mobile trolley, suction cups are provided at the output ends of the second cylinders, a fixing plate is provided on the base, one side surface of the fixing plate is aligned with the adsorption surface of the suction cup, and the second cylinder is used to drive the adsorption surface of the suction cup to abut against or away from the fixing plate. The solenoid valves of the second cylinders and the solenoid valves of the suction cups are both connected to the master control unit, and the master control unit is used to control the second cylinders to drive the suction cups to abut against the fixing plate and control the ventilation of the suction cups when the mobile trolley is at the loading and unloading station or the disassembly and assembly station;

[0019] After the clamping unit clamps the pneumatic assembly box, the master control unit is used to control the solenoid valve of the suction cup to close and control the telescopic shaft of the second cylinder to retract.

[0020] Optionally, the suction cup is a Bernoulli suction cup.

[0021] Optionally, a distance sensor is provided on the lifting unit. The distance sensor is used to detect the distance between the clamping unit and the mounting flange block. The distance sensor, the lifting unit and the clamping unit are all electrically connected to the master control unit. The master control unit controls the lifting and stopping of the output shaft of the lifting unit and the clamping unit to perform a clamping action according to the distance information output by the distance sensor. After the clamping unit clamps the mounting flange block, the master control unit controls the output end of the lifting unit to descend.

[0022] Optionally, a proximity sensor is provided on the carrier table. The proximity sensor is used to detect whether the pneumatic assembly box enters the clamping range of the clamping unit. After the pneumatic assembly box enters the clamping range of the clamping unit, the master control unit controls the clamping unit to clamp the pneumatic assembly box.

[0023] In summary, the present application includes the following beneficial technical effects:

[0024] Using the replacement device of the present application to perform the replacement operation of the vacuum door can improve the operation safety. Moreover, only one person is required, compared with 4-5 people before, the personnel configuration is greatly reduced, and the time for replacing the vacuum door can be saved by 20-30%, thus saving costs.

[0025] At the same time, the original components of components such as the base, the mobile trolley, the lifting unit, the carrier table, the clamping unit and the holding unit are made of non-rusting materials, are low in dust emission, and the moving parts are all equipped with dust-proof covers, reaching the Class100 dust-free level, greatly reducing the generation of dust and particles during operation. Description of the Drawings

[0026] To more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings required for the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0027] Figure 1 It is a schematic diagram of the overall structure of the dry etching chamber vacuum door replacement device of the present application;

[0028] Figure 2 It is a schematic diagram of the structure of the mobile trolley clamping the vacuum door at the disassembly and assembly station of the present application;

[0029] Figure 3 It is a schematic diagram of the structure of the mobile trolley at the disassembly and assembly station of the present application;

[0030] Figure 4 is Figure 3 an enlarged schematic diagram of part A in

[0031] Explanation of reference numerals: 1. Vacuum door; 11. Sealing plate; 12. Pneumatic assembly box; 13. Installation flange block; 2. Base; 21. Guide rail; 22. Loading and unloading station; 23. Disassembly and assembly station; 24. Positioning hole; 25. Fixed plate; 3. Mobile trolley; 31. Mobile vehicle; 311. First motor; 312. First reducer; 32. Roller; 33. Plug pin; 34. First cylinder; 35. Suction cup; 36. Second cylinder; 4. Lifting unit; 41. Second motor; 42. Second reducer; 43. Screw jack; 44. Installation plate; 5. Clamping unit; 6. Carrier table; 7. Clamping unit; 8. Total control unit. Detailed implementation manners

[0032] The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0033] The following specific examples illustrate the implementation manners of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of them. The present application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts belong to the scope of protection of the present application.

[0034] It should be noted that the following describes various aspects of embodiments within the scope of the appended claims. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number of aspects described herein can be used to implement a device and / or practice a method. Additionally, this device can be implemented and this method can be practiced using other structures and / or functions in addition to one or more of the aspects described herein.

[0035] It should also be noted that the diagrams provided in the following embodiments only illustrate the basic concept of this application schematically. The diagrams only show the components related to this application and are not drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0036] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the aspects described can be practiced without these specific details.

[0037] An embodiment of this application provides a dry etching chamber vacuum door replacement device. The dry etching chamber vacuum door 1 includes a sealing plate 11, a pneumatic assembly box 12, and a mounting flange block 13. The pneumatic assembly box 12 is fixedly connected below the sealing plate 11, and the mounting flange and the sealing plate 11 are fixedly connected below. The mounting flange blocks 13 are provided on both sides of the pneumatic assembly box 12. Among them, the mounting flange blocks 13 are not directly fitted and installed with the etching chamber, and the mounting flange blocks 13 only serve as auxiliary connection structures during the installation process.

[0038] As Figure 1 、 Figure 2 and Figure 3 shown, a dry etching chamber vacuum door replacement device includes:

[0039] A base 2, located below the installation position of the vacuum door 1 of the dry etching chamber. The base 2 can be fixed or placed on the workshop floor.

[0040] A mobile trolley 3, moving on the base 2.

[0041] A lifting unit 4, installed on the mobile trolley 3, and a clamping unit 5 is provided on the lifting unit 4.

[0042] A carrier 6, installed on the mobile trolley 3, and the carrier 6 is used to receive the vacuum door 1.

[0043] The clamping unit 7 is installed on the carrier table 6 or the mobile trolley 3, and the clamping unit 7 is used to clamp the pneumatic assembly box 12 located on the carrier table 6.

[0044] Among them, lifting units 4 are provided on both sides of the carrier table 6. The positions of the lifting units 4 correspond to the installation flange blocks 13 on both sides. The clamping unit 5 is used to clamp the installation flange blocks 13. The lifting unit 4 is used to drive the clamping unit 5 to lift and lower. The carrier table 6 is used to abut against the bottom of the pneumatic assembly box 12. The clamping unit 7 is used to clamp the opposite sides of the pneumatic assembly box 12.

[0045] The steps for replacing the vacuum door 1 include disassembling the old vacuum and installing the new vacuum door 1. One end of the base 2 is the loading and unloading station 22, and the other end of the base 2 is the disassembly and assembly station 23. When the mobile trolley 3 is located at the disassembly and assembly station 23, the clamping unit 5 and the installation flange block 13 are aligned, or the installation positions of the vacuum door 1 on the carrier table 6 and the vacuum door 1 on the dry etching chamber are aligned; when the mobile trolley 3 is located at the loading and unloading station 22, the mobile trolley 3 is located outside the installation position range of the vacuum door 1 on the dry etching chamber.

[0046] In this application, when disassembling the old vacuum door 1, move the mobile trolley 3 on the base 2 to below the old vacuum door 1, and adjust the position of the mobile trolley 3 so that the clamping unit 5 is aligned with the installation flange block 13 on the old vacuum door 1. The mobile trolley 3 is located at the disassembly and assembly station 23. Then control the output end of the lifting unit 4 to rise, so that the clamping unit 5 rises accordingly until the clamping part of the clamping unit 5 surrounds the outer periphery of the installation flange block 13. Start the clamping unit 5 to clamp the installation flange block 13; after determining that the clamping unit 5 clamps the installation flange block 13, the worker disassembles the connecting components between the vacuum door 1 and the etching chamber to mechanically separate the vacuum door 1 and the etching chamber. Control the output end of the lifting unit 4 to descend, and the clamping unit 5 drives the vacuum door 1 to descend until the vacuum door 1 descends to contact the carrier table 6 at the bottom of the pneumatic assembly box 12; control the clamping unit 7 to clamp the pneumatic assembly box 12 to ensure the stability of the entire vacuum door 1 during subsequent movement. Finally, control the mobile trolley 3 to move on the base 2. The mobile trolley 3 moves the old vacuum door 1 to outside the installation position range of the vacuum door 1 on the dry etching chamber, and the mobile trolley 3 is located at the loading and unloading station 22. Connect the hook of the overhead crane to the lifting point of the old vacuum door 1, release the clamping of the old vacuum door 1 by the clamping unit 5 and the clamping unit 7, and then the overhead crane lifts the old vacuum door 1 and moves the old vacuum door 1 to a predetermined position. The disassembly of the old vacuum door 1 is completed.

[0047] After removing the old vacuum door 1 with a traveling crane, the moving trolley 3 remains at the loading and unloading station 22. Use the traveling crane to move the new vacuum door 1 above the moving trolley 3, and control the position of the new vacuum door 1 to align the mounting flange block 13 and the clamping unit 5. Then control the output end of the lifting unit 4 to rise, so that the clamping unit 5 rises accordingly until the clamping part of the clamping unit 5 surrounds the outer periphery of the mounting flange block 13. Start the clamping unit 5 to clamp the mounting flange block 13; after determining that the clamping unit 5 has clamped the mounting flange block 13, release the connection between the traveling crane and the new vacuum door 1, and control the output end of the lifting unit 4 to descend. The clamping unit 5 drives the vacuum door 1 to descend until the bottom of the vacuum door 1 touches the bearing platform 6 when it reaches the bottom of the pneumatic assembly box 12; control the clamping unit 7 to clamp the pneumatic assembly box 12 to ensure the stability of the entire vacuum door 1 during subsequent movement; control the moving trolley 3 to move to the disassembly and assembly station 23. At this time, the installation positions of the new vacuum door 1 and the etching chamber vacuum door 1 are aligned vertically; release the clamping of the pneumatic assembly box 12 by the clamping unit 7, control the output end of the lifting unit 4 to rise, so that the clamping unit 5 rises accordingly, driving the new vacuum door 1 to rise to the installation position, and the worker connects the new vacuum door 1 and the etching chamber to complete the installation of the new vacuum door 1. Finally, loosen the clamping of the mounting flange block 13 by the clamping unit 5 and move the moving trolley 3 to the loading and unloading position.

[0048] The moving trolley 3 includes a moving vehicle 31 and a traveling drive assembly. A guide rail 21 is provided on the base 2. The rollers 32 of the moving vehicle 31 roll along the guide rail 21. The output end of the traveling drive assembly is connected to the rollers 32 of the moving vehicle 31. The traveling drive assembly is used to drive the rollers 32 to rotate. The guide rail 21 is in the shape of a triangular prism, with one edge of the triangular prism facing upward. The outer periphery of the roller 32 is provided with an annular groove, and the annular groove is in the shape of a V. The V-shaped groove of the roller 32 cooperates with the two side walls of one edge of the triangular prism; the traveling drive assembly is a combination of a first motor 311 and a first speed reducer 312. The output of the first motor 311 is connected to the input shaft of the first speed reducer 312, and the output end of the first speed reducer 312 is connected to the roller 32; the lifting unit 4, the clamping unit 5 and the clamping unit 7 are pneumatic or electric devices.

[0049] The dry etching chamber vacuum door replacement device further includes a master control unit 8. The lifting unit 4, the clamping unit 5 and the clamping unit 7 are pneumatic or electric devices. The master control unit 8 is used to control the movement of the moving trolley 3, the lifting and lowering of the lifting unit 4, the clamping and releasing actions of the clamping unit 5, and the clamping and releasing actions of the clamping unit 7.

[0050] Using the replacement device of the present application for replacing the vacuum door 1 can improve the operation safety. Moreover, only one person is required, compared with 4-5 people before, the personnel configuration is greatly reduced, and the time for replacing the vacuum door 1 can be saved by 20-30%, thus saving costs.

[0051] At the same time, the original components of components such as the base 2, the mobile trolley 3, the lifting unit 4, the carrying platform 6, the clamping unit 5, and the holding unit are made of non-rusting materials, are low-dust-emitting, and the moving parts are all equipped with dust covers, reaching the Class 100 dust-free level, greatly reducing the generation of dust and particles during operation.

[0052] For the movement and stop of the mobile trolley 3:

[0053] Specifically, first photoelectric sensors and second photoelectric sensors are provided at both ends of the base 2. The first photoelectric sensor is used to send a proximity signal to the master control unit 8 when the mobile trolley 3 is about to reach the loading / unloading station 22 or the disassembly / assembly station 23, and the master control unit 8 controls the mobile trolley 3 to decelerate. The second photoelectric sensor is used to send a in-place signal to the master control unit 8 when the mobile trolley 3 reaches the loading / unloading station 22 or the disassembly / assembly station 23, and the master control unit 8 controls the mobile trolley 3 to stop.

[0054] The first photoelectric sensor and the second photoelectric sensor can be infrared sensors or laser sensors. The first photoelectric sensor and the second photoelectric sensor are arranged in sequence along the moving direction of the mobile trolley 3 at the loading / unloading station 22. When the mobile trolley 3 moves from the disassembly / assembly station 23 to the loading / unloading station 22, it first passes through the first photoelectric sensor and just blocks the second photoelectric sensor when in place; similarly, the first photoelectric sensor and the second photoelectric sensor are arranged in sequence along the moving direction of the mobile trolley 3 at the disassembly / assembly station 23. When the mobile trolley 3 moves from the loading / unloading station 22 to the disassembly / assembly station 23, it first passes through the first photoelectric sensor and just blocks the second photoelectric sensor when in place. The distance between the two photoelectric sensors at each station is determined according to the vehicle speed and the performance of the braking mechanism. When the mobile trolley 3 passes through the first photoelectric sensor, the mobile trolley 3 blocks the light, and the signal at the receiving end of the first photoelectric sensor changes, so as to detect the proximity position of the mobile trolley 3 before reaching the in-place position. The first photoelectric sensor sends the signal to the master control unit 8, and the PLC of the master control unit 8 gives a signal to the traveling drive assembly of the mobile trolley 3 to control the mobile trolley 3 to start decelerating. The mobile trolley 3 moves slowly. When the mobile trolley 3 just blocks the second photoelectric sensor, it means that the mobile trolley 3 is in place. The second photoelectric sensor sends the signal to the master control unit 8, and the master control unit 8 then controls the mobile trolley 3 to stop. Mechanical limit position stoppers are provided at both ends of the base 2 to block the movement of the mobile trolley 3 and prevent the mobile trolley 3 from running out of the base 2.

[0055] For the positioning and fixing of the mobile trolley 3:

[0056] Such as Figure 1 、 Figure 3 And Figure 4As shown, a positioning hole 24 is provided on the base 2, a plug pin 33 is provided on the moving trolley 3, a first cylinder 34 is provided on the moving trolley 3, the output shaft of the first cylinder 34 is fixedly connected to the plug pin 33, and when the moving trolley 3 is located at the loading and unloading station 22 or the disassembly and assembly station 23, the plug pin 33 is aligned with the positioning hole 24. The solenoid valve of the first cylinder 34 is electrically connected to the master control unit 8, and the master control unit 8 controls the telescopic movement of the output shaft of the first cylinder 34 through the solenoid valve of the first cylinder 34. The master control unit 8 is used to control the telescopic shaft of the first cylinder 34 to extend when the moving trolley 3 is located at the loading and unloading station 22 or the disassembly and assembly station 23; the plug pin 33 is inserted into the positioning hole 24 to position and preliminarily fix the moving trolley 3. The master control unit 8 is used to control the telescopic shaft of the first cylinder 34 to retract after the clamping unit 7 clamps the pneumatic assembly box 12, facilitating the movement of the moving trolley 3.

[0057] In the embodiment of the present application, plug pins 33 are provided at both the front and rear ends of the moving trolley 3, two positioning holes 24 corresponding to the plug pins 33 at both ends are provided at the loading and unloading station 22 of the base 2, and two positioning holes 24 corresponding to the plug pins 33 at both ends are also provided at the disassembly and assembly station 23 of the base 2. Among them, the front and rear direction of the moving trolley 3 is the moving direction of the moving trolley 3. The plug pin 33 and the positioning hole 24 are vertically arranged, and the telescopic direction of the telescopic shaft of the first cylinder 34 is the vertical direction.

[0058] A number of second cylinders 36 are provided on the moving trolley 3, a suction cup 35 is provided at the output end of the second cylinder 36, a fixing plate 25 is provided on the base 2, one side surface of the fixing plate 25 is aligned with the adsorption surface of the suction cup 35, the second cylinder 36 is used to drive the adsorption surface of the suction cup 35 to abut against or away from the fixing plate 25, the solenoid valves of the second cylinder 36 and the suction cup 35 are both connected to the master control unit 8, and the master control unit 8 is used to control the second cylinder 36 to drive the suction cup 35 to abut against the fixing plate 25 and control the suction cup 35 to be ventilated when the moving trolley 3 is located at the loading and unloading station 22 or the disassembly and assembly station 23. The suction cup 35 generates an adsorption force on the fixing plate 25 to stably position the moving trolley 3 on the base 2, providing a stable foundation for the subsequent lifting of the lifting unit 4, the clamping of the mounting flange block 13 by the clamping unit 5, and the driving of the vacuum door 1 to lift; the master control unit 8 is used to control the solenoid valve of the suction cup 35 to close after the clamping unit 7 clamps the pneumatic assembly box 12, stop the adsorption force of the suction cup 35, and control the telescopic shaft of the second cylinder 36 to retract, separating the suction cup 35 from the fixing plate 25, and the moving trolley 3 can move.

[0059] In the embodiment of the present application, the fixing plate 25 extends from the loading and unloading station 22 to the disassembly and assembly station 23. That is, the moving trolley 3 can be stably moved by adsorbing the fixing plate 25 through the suction cup 35 at both the loading and unloading station 22 and the disassembly and assembly station 23. The adsorption surface of the suction cup 35 faces downward, and the telescopic direction of the second cylinder 36 is the vertical direction. The method for judging the action of the clamping unit 7 clamping the pneumatic assembly box 12 is as follows: The clamping unit 7 can be a pneumatic fixture, and the core drive is a cylinder. After the clamping unit 7 clamps the pneumatic assembly box 12, the cylinder magnetic switch signal is fed back to the master control unit 8, and the master control unit 8 judges whether the clamping unit 7 clamps the pneumatic assembly box 12 according to the cylinder magnetic switch signal.

[0060] The suction cup 35 is a Bernoulli suction cup 35, and the suction cup 35 is connected to a gas supply device, and the gas supply device provides compressed air for the suction cup 35. Four positions of the moving trolley 3 are provided with second cylinders 36, and two suction cups 35 arranged in parallel are connected to the output end of each second cylinder 36.

[0061] The first photoelectric sensor, the second photoelectric sensor, the positioning pin 33, and the fixing suction cup 35 of the present application improve the positioning accuracy of installation and transportation, do not require manual adjustment by personnel, and improve the operation efficiency.

[0062] A distance sensor is provided on the lifting unit 4. The distance sensor is used to detect the distance between the clamping unit 5 and the mounting flange block 13. The distance sensor is a laser sensor. The distance sensor, the lifting unit 4, and the clamping unit 5 are all electrically connected to the master control unit 8. The master control unit 8 controls the elevation and stop of the output shaft of the lifting unit 4 and the clamping unit 5 to perform a clamping action according to the distance information output by the distance sensor. After the clamping unit 5 clamps the mounting flange block 13, the master control unit 8 controls the output end of the lifting unit 4 to descend. The clamping unit 5 is a pneumatic jaw, and the clamping end of the clamping unit 5 matches the shape of the mounting flange block 13. The core drive is a cylinder. The master control unit 8 controls the grasping and releasing actions of the clamping unit 5 by controlling the intake and exhaust of the cylinder solenoid valve. The master control unit 8 judges the clamping of the clamping unit 5 on the mounting flange block 13 according to the magnetic switch signal fed back by the cylinder of the clamping unit 5.

[0063] A proximity sensor is provided on the carrier table 6. The proximity sensor is a capacitive sensor. The working principle of the proximity sensor is based on the capacitive principle. When an object approaches, the capacitance value increases. The proximity sensor triggers a signal by measuring the capacitance change and can detect metals and non-metals. The proximity sensor is used to detect whether the pneumatic assembly box 12 enters the clamping range of the clamping unit 7. After the pneumatic assembly box 12 enters the clamping range of the clamping unit 7, the master control unit 8 controls the clamping unit 7 to clamp the pneumatic assembly box 12. The clamping unit 7 is a pneumatic fixture, and the core drive is a cylinder. The master control unit 8 controls the intake and exhaust of the cylinder through a solenoid valve to control the clamping and releasing actions of the clamping unit 7.

[0064] In this application, the lifting unit 4 includes a mounting plate 44, a second motor 41, a second speed reducer 42, and a screw jack 43. The mounting plate 44 is fixed on the moving trolley 3. The outer shells of the motor and the screw jack 43 are mounted on the mounting plate 44. The second motor 41 drives the screw jack 43 through the second speed reducer 42. There is a telescopic dust protection cover outside the lifting screw rod of the screw jack 43 to prevent the fine dust generated during the movement of the screw rod from leaking outside the screw lifting device and avoid polluting the environment. When selecting the screw jack 43, a type with a locking device is selected to ensure that it will not fall during the lifting process. In the embodiment of this application, one lifting unit 4 includes one second motor 41, one second speed reducer 42, and two screw jacks 43. The second speed reducer 42 has two output shafts respectively driving different screw jacks 43. The two screw jacks 43 are spaced along the moving direction of the moving trolley 3. A clamping unit 5 is provided at the output end of each screw jack 43; that is, in this application, two liftable clamping units 5 are provided on each side of the carrier table 6. The distances between every two of the four clamping units 5 are different, and different specifications of mounting flange blocks 13 with different spacings on the vacuum door 1 can be used to adapt to vacuum doors 1 of different sizes, saving the cost of manufacturing different devices and reducing the space occupied by placing different devices in the clean room, thereby improving the utilization rate of the clean room space.

[0065] The master control unit 8 is electrically connected to the motors of the lifting unit 4. The PLC of the master control unit 8 gives signals to the motors to control the start and stop of the motors, thereby controlling the lifting of the clamping unit 5.

[0066] The above is only the specific implementation manner of this application, but the protection scope of this application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in this application should be covered within the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims

1. A dry etching chamber vacuum door replacement device, the dry etching chamber vacuum door (1) includes a sealing plate (11), a pneumatic assembly box (12) and a mounting flange block (13), the pneumatic assembly box (12) and the sealing plate (11) are fixedly connected below, the mounting flange block (13) and the sealing plate (11) are fixedly connected below, and the mounting flange blocks (13) are provided on both sides of the pneumatic assembly box (12), characterized in that, The dry etching chamber vacuum door replacement device includes: A base (2), located below the installation position of the vacuum door of the dry etching chamber; A mobile trolley (3), moving on the base (2); A lifting unit (4), installed on the mobile trolley (3), and a clamping unit (5) is provided on the lifting unit (4); A carrier table (6), installed on the mobile trolley (3), and the carrier table (6) is used to hold the vacuum door (1); A clamping unit (7), installed on the carrier table (6) or the mobile trolley (3), and the clamping unit (7) is used to clamp the pneumatic assembly box (12) located on the carrier table (6); Wherein, lifting units (4) are provided on both sides of the carrier table (6), the positions of the lifting units (4) correspond to the installation flange blocks (13) on both sides, the clamping unit (5) is used to clamp the installation flange blocks (13), the lifting unit (4) is used to drive the clamping unit (5) to lift and lower, the carrier table (6) is used to abut against the bottom of the pneumatic assembly box (12), and the clamping unit (7) is used to clamp the opposite sides of the pneumatic assembly box (12); The dry etching chamber vacuum door replacement device further includes a master control unit (8), the lifting unit (4), the clamping unit (5) and the clamping unit (7) are pneumatic or electric devices, and the master control unit (8) is used to control the movement of the mobile trolley (3), the lifting and lowering of the lifting unit (4), the clamping and releasing actions of the clamping unit (5), and the clamping and releasing actions of the clamping unit (7); One end of the base (2) is a loading and unloading station (22), and the other end of the base (2) is a disassembly and assembly station (23). When the mobile trolley (3) is located at the disassembly and assembly station (23), the clamping unit (5) is aligned with the installation flange block (13), or the vacuum door (1) on the carrier table (6) is aligned with the installation position of the vacuum door on the dry etching chamber; when the mobile trolley (3) is located at the loading and unloading station (22), the mobile trolley (3) is outside the installation position range of the vacuum door on the dry etching chamber; A plurality of second cylinders (36) are provided on the mobile trolley (3), a suction cup (35) is provided at the output end of the second cylinder (36), a fixing plate (25) is provided on the base (2), one side surface of the fixing plate (25) is aligned with the adsorption surface of the suction cup (35), the second cylinder (36) is used to drive the adsorption surface of the suction cup (35) to abut against or away from the fixing plate (25), the solenoid valves of the second cylinder (36) and the suction cup (35) are both connected to the master control unit (8), and the master control unit (8) is used to control the second cylinder (36) to drive the suction cup (35) to abut against the fixing plate (25) and control the ventilation of the suction cup (35) when the mobile trolley (3) is located at the loading and unloading station (22) or the disassembly and assembly station (23); The master control unit (8) is used to control the solenoid valve of the suction cup (35) to close and control the telescopic shaft of the second cylinder (36) to retract after the clamping unit (7) clamps the pneumatic assembly box (12).

2. The dry etching chamber vacuum door replacement device according to claim 1, wherein The mobile trolley (3) includes a mobile vehicle (31) and a traveling drive assembly. A guide rail (21) is provided on the base (2). The rollers (32) of the mobile vehicle (31) roll along the guide rail (21). The output end of the traveling drive assembly is connected to the rollers (32) of the mobile vehicle (31), and the traveling drive assembly is used to drive the rollers (32) to rotate.

3. The dry etching chamber vacuum door replacement device according to claim 2, wherein First photoelectric sensors and second photoelectric sensors are provided at both ends of the base (2). The first photoelectric sensor is used to send a proximity signal to the master control unit (8) when the mobile trolley (3) is about to reach the loading / unloading station (22) or the disassembly / assembly station (23), and the master control unit (8) controls the mobile trolley (3) to decelerate. The second photoelectric sensor is used to send a in-place signal to the master control unit (8) when the mobile trolley (3) reaches the loading / unloading station (22) or the disassembly / assembly station (23), and the master control unit (8) controls the mobile trolley (3) to stop.

4. The dry etching chamber vacuum door replacement device according to claim 3, wherein, A positioning hole (24) is provided on the base (2). A plug pin (33) is provided on the movement of the mobile trolley (3). A first cylinder (34) is provided on the mobile trolley (3). The output shaft of the first cylinder (34) is fixedly connected to the plug pin (33). When the mobile trolley (3) is located at the loading / unloading station (22) or the disassembly / assembly station (23), the plug pin (33) is aligned with the positioning hole (24). The solenoid valve of the first cylinder (34) is electrically connected to the master control unit (8). The master control unit (8) controls the extension and retraction of the output shaft of the first cylinder (34) through the solenoid valve of the first cylinder (34). The master control unit (8) is used to control the extension of the telescopic shaft of the first cylinder (34) when the mobile trolley (3) is located at the loading / unloading station (22) or the disassembly / assembly station (23); The master control unit (8) is used to control the retraction of the telescopic shaft of the first cylinder (34) after the clamping unit (7) clamps the pneumatic assembly box (12).

5. The dry etching chamber vacuum door replacement device according to claim 1, characterized in that, The suction cup (35) is a Bernoulli suction cup (35).

6. The dry etching chamber vacuum door replacement device according to claim 1, characterized in that A distance sensor is provided on the lifting unit (4). The distance sensor is used to detect the distance between the clamping unit (5) and the mounting flange block (13). The distance sensor, the lifting unit (4), and the clamping unit (5) are all electrically connected to the master control unit (8). The master control unit (8) controls the elevation and stop of the output shaft of the lifting unit (4) and the clamping unit (5) to perform a clamping action according to the distance information output by the distance sensor. After the clamping unit (5) clamps the mounting flange block (13), the master control unit (8) controls the output end of the lifting unit (4) to descend.

7. The dry etching chamber vacuum door replacement device according to claim 1, characterized in that, A proximity sensor is provided on the carrier table (6). The proximity sensor is used to detect whether the pneumatic assembly box (12) enters the clamping range of the clamping unit (7). After the pneumatic assembly box (12) enters the clamping range of the clamping unit (7), the master control unit (8) controls the clamping unit (7) to clamp the pneumatic assembly box (12).

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