A multi-sample rack compatible sample transfer robot in ultra-high vacuum and a sample transfer method thereof

Abstract

The present invention discloses a sample transfer robot compatible with multiple sample racks in an ultra-high vacuum and a sample transfer method thereof, relating to the technical field of sample transfer robots. The robot comprises a sample transfer fork, wherein the top of the sample transfer fork is provided with a 2-inch wafer gripper, the bottom of the sample transfer fork is provided with a 4-inch wafer gripper, and one side of the sample transfer fork is provided with a sample grabbing mechanism; the sample grabbing mechanism comprises a sleeve, and the sleeve is provided with a first card slot and a second card slot, respectively. The present invention manufactures a sample transfer robot and a sample storage mechanism compatible with four types of sample racks for ultra-high vacuum systems such as the Omicron MBE and STM system, the Unisoku MBE and STM system, the 2-inch wafer MBE, and the 4-inch wafer MBE. The robot is capable of grabbing four types of sample racks and storing them in the same vacuum chamber. Therefore, by simply using the robot to manufacture an ultra-high vacuum suitcase, the problem of transferring samples from the four different ultra-high vacuum systems directly into an argon-protected glove box without passing through the atmosphere can be solved.

Description

Technical Field

[0001] The present invention relates to the technical field of sample transfer robots, and in particular to an ultra-high vacuum multi-sample rack compatible sample transfer robot and a sample transfer method thereof. Background Art

[0002] Quantum computers require superconducting Josephson junctions and quantum dots as qubits. To fabricate a two-dimensional thin film into a superconducting Josephson junction device, it must be removed from an ultrahigh vacuum chamber and placed in an argon-protected glove box for electrode deposition and other procedures. During the process of removing the sample from the ultrahigh vacuum chamber to the atmosphere, it is subject to oxidation by oxygen in the air, deliquesce from water vapor, and contamination by dust, which significantly impacts the preparation and research of two-dimensional thin films. The ultrahigh vacuum environment provided by the stainless steel chamber used for molecular beam epitaxy (MBE) can reach a vacuum level of 1e-10 Torr. This serves as the ceiling for material growth and device fabrication, enabling atomic-scale flatness of the device surface. If the sample could be directly transferred from the ultrahigh vacuum chamber into the glove box via an ultrahigh vacuum suitcase, this problem would be overcome.

[0003] For the ultra-high vacuum systems of Omicron MBE and STM system, Unisoku MBE and STM system, 2-inch wafer MBE, and 4-inch wafer MBE, it is necessary to manufacture four ultra-high vacuum suitcases with different sample transfer mechanisms. A single sample rack is transferred from different systems to the suitcase at a time, and then to the transition chamber of the glove box, and then to the argon-protected glove box. For the ultra-high vacuum systems of Omicron MBE and STM system, Unisoku MBE and STM system, 2-inch wafer MBE, and 4-inch wafer MBE, it is necessary to manufacture four ultra-high vacuum suitcases with different sample transfer mechanisms. A single sample rack is transferred from different systems to the suitcase at a time, and then to the transition chamber of the glove box, and then to the argon-protected glove box. This operation method is relatively inefficient and cumbersome. Summary of the Invention

[0004] In order to solve the problems mentioned in the above background technology, the present invention provides a multi-sample rack compatible sample transfer robot and a sample transfer method thereof in an ultra-high vacuum.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] An ultra-high vacuum multi-sample rack compatible sample transfer robot comprises a sample transfer fork, a 2-inch wafer gripper is provided at the top of the sample transfer fork, a 4-inch wafer gripper is provided at the bottom of the sample transfer fork, and a sample grabbing mechanism is provided on one side of the sample transfer fork;

[0007] The sample grabbing mechanism comprises a sleeve, on which a first clamping slot and a second clamping slot are respectively provided, and a displacement stator and a reset spring are movably installed in the sleeve;

[0008] A rotating stator is installed inside the displacement stator, a third slot is provided on the displacement stator, a first limiting column is fixed on the rotating stator, the first limiting column extends to the outside of the displacement stator through the third slot, and the first limiting column extends to the outside of the sleeve through the first slot, a second limiting column is fixed on the displacement stator, and the second limiting column extends to the outside of the sleeve through the first slot.

[0009] Preferably, the displacement stator is provided with a rectangular opening at one end close to the sleeve opening, a rotating through hole is provided in the middle of the rectangular opening, and the rotating stator is provided with a clamping groove at one end close to the rectangular opening, and the width of the clamping groove matches the width of the rectangular opening.

[0010] Preferably, the first clamping slot includes a displacement guide slot for guiding the first limiting post and the second limiting post to move axially along the sleeve, and a rotation guide slot for guiding the first limiting post to rotate independently.

[0011] Preferably, the 2-inch wafer gripper includes a plurality of first limiting bolts, and the 4-inch wafer gripper includes a plurality of second limiting bolts.

[0012] Preferably, the support body of the sample transfer fork is made of 304L stainless steel, and a quick-release connector connected to the sample transfer rod is provided on the side of the sample transfer fork away from the sample grabbing mechanism.

[0013] A method for transferring samples in an ultra-high vacuum with multiple sample racks and a compatible sample transfer robot comprises the following steps:

[0014] S1: Transfer Omicron Sample Holder

[0015] First, insert the transfer positioning assembly of the Omicron sample holder into the clamping groove of the rotating stator through the rectangular opening. The transfer positioning assembly of the Omicron sample holder includes a connecting portion and a positioning portion. The connecting portion and the positioning portion have the same thickness, and the width of the connecting portion is smaller than the width of the positioning portion. The width of the connecting portion matches the diameter of the rotating through hole. Then, rotate the grasping mechanism ninety degrees so that the first limiting post rotates to the rotation guide slot position of the first slot. A limiting slot is provided at the end of the rotation guide slot position. The elastic force of the reset spring pushes the first limiting post to be stuck in the limiting slot. Since the positioning portion and the rectangular opening are rotationally misaligned, the width of the positioning portion is greater than the slot width of the rectangular opening, thereby locking the Omicron sample holder and realizing the grasping of the Omicron sample holder. Reverse the above operation to realize the operation of transferring the Omicron sample holder back to the sample storage position.

[0016] S2: Transfer the Unisoku sample holder

[0017] First, insert the positioning post of the Unisoku sample rack into the sleeve. Move the third limiting post on the positioning post into the second slot, pushing the displacement stator to compress the return spring. Both the first and second limiting posts move along the displacement guide groove of the first slot. Rotate the grasping mechanism 90 degrees counterclockwise. The return spring pushes the third limiting post to be stuck in the second slot, thus grasping and fixing the Unisoku sample rack. Reverse the above operation to return the Unisoku sample rack to the sample storage position.

[0018] S3: 2-inch wafer sample grabbing

[0019] Rotate the sample transfer rod so that the 2-inch wafer gripper side faces upward, and use the 2-inch wafer gripper to remove the 2-inch wafer sample from the sample storage table to achieve sample transfer;

[0020] S4: 4-inch wafer sample grabbing

[0021] Rotate the sample transfer rod so that the 4-inch wafer gripper side faces upward, and the 4-inch wafer gripper removes the 4-inch wafer sample from the sample storage table to achieve sample transfer.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. Strong compatibility: The sample transfer robot and sample storage mechanism manufactured for the ultra-high vacuum systems of Omicron MBE and STM systems, Unisoku MBE and STM systems, 2-inch wafer MBE, and 4-inch wafer MBE are compatible with four types of sample holders. They can grab four different sample holders and store them in the same vacuum chamber, solving the problem of transferring samples from different systems.

[0024] 2. Simplified Operational Process: Previously, four different ultra-high vacuum suitcases with different sample transfer mechanisms had to be manufactured for each of the aforementioned ultra-high vacuum systems, resulting in inefficient and cumbersome operation. The present invention utilizes only one ultra-high vacuum suitcase, enabling direct transfer of samples from the four different ultra-high vacuum systems into an argon-protected glove box without passing through the atmosphere, simplifying the operational process and improving work efficiency.

[0025] 3. Reasonable structural design: The top of the sample fork is equipped with a 2-inch wafer gripper, the bottom is equipped with a 4-inch wafer gripper, and one side is equipped with a sample grabbing mechanism. The sleeve, displacement stator, rotating stator and other components of the sample grabbing mechanism cooperate with each other, and different sample racks can be grabbed and fixed through structures such as slots and limit columns. The design is reasonable and the operation is reliable.

[0026] This invention, targeting ultrahigh vacuum systems for Omicron MBE and STM systems, Unisoku MBE and STM systems, 2-inch wafer MBE systems, and 4-inch wafer MBE systems, has developed a sample transfer robot and sample storage mechanism compatible with four different sample holders. This robot can handle all four types of sample holders and store them within the same vacuum chamber. Therefore, a single ultrahigh vacuum suitcase can be constructed using this technology to transfer samples from these four different ultrahigh vacuum systems directly into an argon-protected glove box without passing through the atmosphere. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 This is a front view of the sample transfer fork of the present invention;

[0029] Figure 2 This is a first-perspective stereoscopic view of the sample transfer fork of the present invention;

[0030] Figure 3 This is a second perspective view of the sample transfer fork of the present invention;

[0031] Figure 4 This is a first-perspective stereoscopic view of the sample grabbing mechanism of the present invention;

[0032] Figure 5 This is a front view of the sample grabbing mechanism of the present invention;

[0033] Figure 6 It is a right side view of the sample grabbing mechanism of the present invention;

[0034] Figure 7 This is a second perspective view of the sample grabbing mechanism of the present invention;

[0035] Figure 8 An exploded view of the sample grabbing mechanism of the present invention;

[0036] Figure 9 This is a cross-sectional view from the main perspective of the sample grabbing mechanism of the present invention;

[0037] Figure 10 This is a schematic diagram of the structure of the Unisoku sample holder of the present invention;

[0038] Figure 11 This is a schematic diagram of the Omicron sample holder structure of the present invention;

[0039] Figure 12Schematic diagram of the matching between the sample transfer fork and each sample rack of the present invention;

[0040] Figure 13 This is a schematic diagram of a 2-inch wafer gripper of the present invention grabbing a 2-inch wafer sample;

[0041] Figure 14 This is a schematic diagram of a 4-inch wafer gripper of the present invention grabbing a 4-inch wafer sample;

[0042] Figure 15 This is a schematic diagram of the sample grabbing mechanism of the present invention grabbing the Omicron sample rack;

[0043] Figure 16 This is a schematic diagram of the sample grabbing mechanism of the present invention grabbing the Unisoku sample rack;

[0044] In the figure: 1. Sample transfer fork; 101. 2-inch wafer gripper; 1011. First limiting bolt; 102. 4-inch wafer gripper; 1021. Second limiting bolt; 2. Sample grabbing mechanism; 201. Sleeve; 2011. First slot; 2012. Second slot; 203. Displacement stator; 2031. Second limiting column; 2032. Third slot; 2033. Rectangular opening; 2034. Rotating through hole; 204. Rotating stator; 2041. First limiting column; 2042. Clamping groove; 3. Unisoku sample rack; 4. Omicron sample rack; 5. 4-inch wafer sample; 6. 2-inch wafer sample. DETAILED DESCRIPTION

[0045] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0046] Example 1

[0047] Reference Figure 1-16 A multi-sample rack compatible sample transfer robot in an ultra-high vacuum environment includes a sample transfer fork 1, a 2-inch wafer gripper 101 is provided at the top of the sample transfer fork 1, a 4-inch wafer gripper 102 is provided at the bottom of the sample transfer fork 1, and a sample grabbing mechanism 2 is provided on one side of the sample transfer fork 1;

[0048] The sample grabbing mechanism 2 includes a sleeve 201, which is provided with a first slot 2011 and a second slot 2012. A displacement stator 203 and a return spring 202 are movably mounted in the sleeve 201.

[0049] A rotating stator 204 is installed inside the displacement stator 203. A third slot 2032 is provided on the displacement stator 203. A first limiting column 2041 is fixed on the rotating stator 204. The first limiting column 2041 extends to the outside of the displacement stator 203 through the third slot 2032, and the first limiting column 2041 extends to the outside of the sleeve 201 through the first slot 2011. A second limiting column 2031 is fixed on the displacement stator 203. The second limiting column 2031 extends to the outside of the sleeve 201 through the first slot 2011.

[0050] Among them, a rectangular opening 2033 is opened at one end of the displacement stator 203 close to the opening of the sleeve 201, a rotating through hole 2034 is opened in the middle of the rectangular opening 2033, and a clamping groove 2042 is opened at one end of the rotating stator 204 close to the rectangular opening 2033, and the width of the clamping groove 2042 matches the width of the rectangular opening 2033.

[0051] The first slot 2011 includes a displacement guide groove for guiding the first limiting column 2041 and the second limiting column 2031 to move axially along the sleeve 201 and a rotation guide groove for guiding the first limiting column 2041 to rotate independently.

[0052] The 2-inch wafer gripper 101 includes a plurality of first limiting bolts 1011 , and the 4-inch wafer gripper 102 includes a plurality of second limiting bolts 1021 .

[0053] The support body of the sample transfer fork 1 is made of 304L stainless steel, and a quick-release connector connected to the sample transfer rod is provided on the side of the sample transfer fork 1 away from the sample grabbing mechanism 2 .

[0054] Example 2

[0055] Reference Figure 1-16 A method for transferring samples in an ultra-high vacuum with multiple sample racks and a compatible sample transfer robot comprises the following steps:

[0056] S1: Transfer Omicron sample holder 4

[0057] First, insert the transfer positioning assembly of the Omicron sample holder 4 into the clamping groove 2042 of the rotating stator 204 through the rectangular opening 2033. The transfer positioning assembly of the Omicron sample holder 4 includes a connecting portion 401 and a positioning portion 402. The thickness of the connecting portion 401 and the positioning portion 402 are the same, and the width of the connecting portion 401 is smaller than the width of the positioning portion 402. The width of the connecting portion 401 matches the diameter of the rotating through hole 2034. Then rotate the grasping mechanism 2 90 degrees so that the first limiting column 2041 rotates to the first limiting column 2041. A rotation guide groove position of a locking slot 2011 is provided at the end of the rotation guide groove position. The elastic force of the return spring 202 pushes the first limiting post 2041 to be stuck in the limiting groove. Since the positioning portion 402 is rotationally misaligned with the rectangular opening 2033, the width of the positioning portion 402 is greater than the slot width of the rectangular opening 2033, thereby locking the Omicron sample rack 4 and achieving the grasping of the Omicron sample rack 4. The above operation is reversed to achieve the operation of returning the Omicron sample rack 4 to the sample storage position;

[0058] S2: Transfer Unisoku Sample Holder 3

[0059] First, insert the positioning post 301 of the Unisoku sample rack 3 into the sleeve 201. The third limiting post 302 on the positioning post 301 moves into the second slot 2012, pushing the displacement stator 203 to compress the return spring 202 and move it. The first limiting post 2041 and the second limiting post 2031 both move along the displacement guide groove of the first slot 2011. Rotate the grasping mechanism 2 90 degrees counterclockwise. The return spring 202 pushes the third limiting post 302 to be stuck in the second slot 2012, thus grasping and fixing the Unisoku sample rack 3. Reverse the above operation to return the Unisoku sample rack 3 to the sample storage position.

[0060] S3: 2-inch wafer sample 6 grab

[0061] Rotate the sample transfer rod so that the 2-inch wafer gripper 101 is facing upward, and remove the 2-inch wafer sample 6 from the sample storage table through the 2-inch wafer gripper 101 to achieve sample transfer;

[0062] S4: 4-inch wafer sample 5 grab

[0063] The sample transfer rod is rotated so that one side of the 4-inch wafer gripper 102 faces upward, and the 4-inch wafer gripper 102 takes the 4-inch wafer sample 5 from the sample storage table to realize sample transfer.

[0064] Among them, MBE is molecular beam epitaxy (epitaxial film formation method), and STM is scanning tunneling microscope.

[0065] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0066] In the present invention, unless otherwise expressly specified or limited, terms such as "disposed," "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; they may refer to mechanical connections, direct connections, or indirect connections through an intermediate medium; they may refer to internal communication between two elements or interaction between two elements. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0067] The control method of the present invention is automatic control through a controller. The control circuit of the controller can be implemented by simple programming by a person skilled in the art. The provision of power is also common knowledge in the art. The present invention is mainly used to protect mechanical devices, so the control method and circuit connection are not explained in detail in the present invention.

[0068] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A multi-sample rack compatible sample transfer robot in ultra-high vacuum, comprising a sample transfer fork (1), characterized in that: The top end of the sample transfer fork (1) is provided with a 2-inch wafer gripper (101), the bottom end of the sample transfer fork (1) is provided with a 4-inch wafer gripper (102), and one side of the sample transfer fork (1) is provided with a sample grabbing mechanism (2); The sample grabbing mechanism (2) comprises a sleeve (201), the sleeve (201) is provided with a first card slot (2011) and a second card slot (2012), and a displacement stator (203) and a return spring (202) are movably installed in the sleeve (201); A rotating stator (204) is installed inside the displacement stator (203), a third slot (2032) is provided on the displacement stator (203), a first limiting column (2041) is fixed on the rotating stator (204), the first limiting column (2041) extends to the outside of the displacement stator (203) through the third slot (2032), and the first limiting column (2041) extends to the outside of the sleeve (201) through the first slot (2011), a second limiting column (2031) is fixed on the displacement stator (203), and the second limiting column (2031) extends to the outside of the sleeve (201) through the first slot (2011).

2. The ultra-high vacuum multi-sample rack compatible sample transfer robot according to claim 1, characterized in that: A rectangular opening (2033) is provided at one end of the displacement stator (203) close to the opening of the sleeve (201); a rotating through hole (2034) is provided in the middle of the rectangular opening (2033); a clamping groove (2042) is provided at one end of the rotating stator (204) close to the rectangular opening (2033); the width of the clamping groove (2042) matches the width of the rectangular opening (2033).

3. The ultra-high vacuum multi-sample rack compatible sample transfer robot according to claim 2, characterized in that: The first clamping slot (2011) comprises a displacement guide slot for guiding the first limiting column (2041) and the second limiting column (2031) to axially displace along the sleeve (201), and a rotation guide slot for guiding the first limiting column (2041) to rotate independently.

4. The ultra-high vacuum multi-sample rack compatible sample transfer robot according to claim 3, characterized in that: The 2-inch wafer gripper (101) includes a plurality of first limiting bolts (1011), and the 4-inch wafer gripper (102) includes a plurality of second limiting bolts (1021).

5. The ultra-high vacuum multi-sample rack compatible sample transfer robot according to claim 1, characterized in that: The support body of the sample transfer fork (1) is made of 304L stainless steel. A quick-release connector connected to the sample transfer rod is provided on the side of the sample transfer fork (1) away from the sample grabbing mechanism (2).

6. A method for transferring samples using a multi-sample rack compatible sample transfer robot in an ultra-high vacuum, the method being implemented by using the multi-sample rack compatible sample transfer robot in an ultra-high vacuum according to any one of claims 1 to 5, characterized in that: The following steps are involved: S1: Transfer Omicron Sample Holder (4) First, the transfer positioning component of the Omicron sample holder (4) is inserted into the clamping groove (2042) of the rotating stator (204) through the rectangular opening (2033). The transfer positioning component of the Omicron sample holder (4) includes a connecting portion (401) and a positioning portion (402). The thickness of the connecting portion (401) and the positioning portion (402) are the same, and the width of the connecting portion (401) is smaller than the width of the positioning portion (402). The width of the connecting portion (401) matches the diameter of the rotating through hole (2034). Then, the grasping mechanism (2) is rotated ninety degrees so that the first limiting column (2041) ) is rotated to the rotation guide groove position of the first card slot (2011), and a limit groove is provided at the end of the rotation guide groove position. The elastic force of the reset spring (202) pushes the first limit column (2041) to be stuck in the limit groove. Since the positioning portion (402) and the rectangular opening (2033) are rotationally misaligned, the width of the positioning portion (402) is greater than the slot width of the rectangular opening (2033), so that the Omicron sample rack (4) can be locked, and the Omicron sample rack (4) can be grabbed. The above operation is reversed to realize the operation of returning the Omicron sample rack (4) to the sample storage position; S2: Transfer Unisoku sample holder (3) First, the positioning column (301) of the Unisoku sample rack (3) is inserted into the sleeve (201), and the third limiting column (302) on the positioning column (301) is moved into the second card slot (2012), pushing the displacement stator (203) to compress the return spring (202) to move, and the first limiting column (2041) and the second limiting column (2031) are both moved along the displacement guide groove of the first card slot (2011), and the grasping mechanism (2) is rotated ninety degrees counterclockwise, and the return spring (202) pushes the third limiting column (302) to be stuck in the second card slot (2012), thereby realizing the grasping and fixing of the Unisoku sample rack (3), and the above operation is reversed to realize the operation of returning the Unisoku sample rack (3) to the sample storage position; S3: 2-inch wafer sample (6) grabbing Rotate the sample transfer rod so that one side of the 2-inch wafer gripper (101) faces upward, and remove the 2-inch wafer sample (6) from the sample storage table through the 2-inch wafer gripper (101) to achieve sample transfer; S4: 4-inch wafer sample (5) grabbing The sample transfer rod is rotated so that one side of the 4-inch wafer gripper (102) faces upward, and the 4-inch wafer gripper (102) removes the 4-inch wafer sample (5) from the sample storage table to achieve sample transfer.

Images