A self-rotating movable swing arm contour detection device and detection method

Abstract

The present invention relates to a self-rotating movable swing arm contour detection device and detection method, and relates to the field of advanced optical manufacturing technology. The self-rotating movable swing arm contour detection device includes: a machine tool, a swing arm contour detection device, a workpiece placement platform and a workpiece to be measured. The present invention constructs a swing arm contour detection device, and its core joint action arm model can realize the theoretical detection posture calculation of ultra-large aperture complex curved surface optical elements with different external dimensions, and guide them to perform posture adjustment detection. The self-rotating movable swing arm contour detection device and detection method of the present invention expand the application scenarios of the swing arm contour detection device, solve the difficult problem of in-situ high-precision contour detection of ultra-large aperture optical elements without rotational freedom, and realize universal fast, efficient and high-precision surface contour detection of ultra-large aperture optical elements with different shapes.

Description

Technical Field

[0001] The present invention relates to the field of advanced optical manufacturing technology, and in particular to a self-rotating movable swing arm contour detection device and detection method. Background Art

[0002] Large-aperture complex curved optical components are key components of high-end optical systems in the fields of space optics, astronomical optics, and national defense optics. The component aperture requirements are getting larger and larger, the surface accuracy is getting higher and higher, and the application needs are becoming wider and wider.

[0003] The swing-arm contour detection device is used in the grinding and rough polishing stages of optical components due to its non-contact, in-place detection, large dynamic range, and high detection accuracy. Its detection accuracy is well connected with the interference detection range, and it plays an important role in the manufacturing process of large-diameter optical components.

[0004] like Figure 10 As shown in the figure, the traditional swing-arm profile detection device consists of a tilted high-precision air-bearing turntable, a rigid measuring arm, and a high-precision non-contact displacement sensor probe (represented by the probe in the figure) at the end of the measuring arm. By constructing a sampling trajectory that is closest to a spherical surface on a complex surface, high-precision surface profile measurement is achieved. When the air-bearing turntable is tilted and the rotation axis passes through the reflector closest to the center of the sphere, the inclination angle θ1 satisfies:

[0005] θ1=sin -1 (L1 / R bfs );

[0006] Where, L1: the distance from the center of the mirror to the axis of the air bearing turntable; R bfs : The radius of the mirror closest to the sphere.

[0007] During the test, the measuring arm is fixed to the air-bearing turntable, and the displacement sensor probe is rotated around the rotation axis of the air-bearing turntable. The displacement sensor probe sweeps an arc on the mirror surface and measures the deviation between the aspheric surface and its closest spherical surface at the track position. After the detector measures an arc, the reflector rotates around the mirror turntable at a certain angle α, and the detector continues to measure the next arc. After the reflector rotates one circle, the following is obtained: Figure 11 The distribution diagram of the measurement points of the displacement sensor on the mirror surface is shown.

[0008] As space-based remote sensing evolves toward new imaging systems with wide fields of view, the dimensions of large-aperture, complex curved optical components have evolved from circular or near-circular apertures to those with large aspect ratios. This has led to significant space waste in traditional machine tools with rotary workpiece turrets. To meet the manufacturing needs of these large-aperture, high-aspect-ratio optical components, rotary workpiece turrets have been eliminated, and machine tools have been designed with linear gratings. Machine tools without rotary workpiece turrets present significant challenges for swing arm contour detection. Summary of the Invention

[0009] The present invention aims to solve the technical problem in the prior art of realizing swing-arm contour detection when a workpiece is stationary and not rotating, and provides a self-rotating movable swing-arm contour detection device and detection method.

[0010] In order to solve the above technical problems, the technical solutions of the present invention are as follows:

[0011] A self-rotating movable swing arm contour detection device, comprising: a machine tool, a swing arm contour detection device, a workpiece placement platform and a workpiece to be measured;

[0012] in:

[0013] The machine tool includes: a Y-axis crossbeam, a liftable Z-axis, a Z-axis support, a movable X-axis, a movable Y-axis, and an X-axis guide rail; a workpiece placement platform is set below the Y-axis crossbeam; the workpiece to be measured is placed on the workpiece placement platform;

[0014] The swing arm contour detection device is arranged on the Z axis and can move along the Y axis and the X axis. The swing arm contour detection device comprises, from top to bottom, a turntable B, a turntable A, an air-bearing turntable, an arm, and a displacement sensor probe. The displacement sensor probe is connected to the arm; the arm is connected to the air-bearing turntable; the air-bearing turntable is fixed to the turntable A; the turntable A is connected to the lower end of the turntable B and rotates with the turntable B; the upper end of the turntable B is connected to the Z axis.

[0015] The B turntable rotation axis of the B turntable is along the vertical direction; the A turntable swing axis of the A turntable is parallel to the X-axis movement direction of the machine tool when the B turntable angle is zero degrees; the displacement sensor probe is used to rotate around the air-bearing turntable with the arm, sweeping a sampling trajectory above the workpiece to be measured, and measuring a contour line data; the swing arm contour detection device rotates around the B turntable rotation axis and moves along the X-axis, Y-axis, and Z-axis, so that the contour line detection zero position is always aligned with the center of the workpiece to be measured, and the sampling contour line data at other positions in the entire area of the workpiece to be measured are measured.

[0016] In the above technical solution, the machine tool can provide three-dimensional movement freedom in XYZ space; the swing-arm contour detection device realizes translational movement in the XYZ direction on the machine tool, and has rotational movement freedom around the B turntable and the A turntable; at the zero position, the displacement sensor probe is used to rotate with the arm around the air-floating turntable, sweeping a sampling trajectory above the workpiece to be measured, and measuring a contour line data; the swing-arm contour detection device realizes sampling contour line coverage of the full contour area of the workpiece to be measured through the rotation of the B turntable and the movement of the X-axis, Y-axis, and Z-axis of the machine tool.

[0017] In the above technical solution, the shape of the workpiece to be measured is circular, elongated or fan-shaped.

[0018] In the above technical solution, the surface of the workpiece to be measured is a concave surface, a convex surface or a flat surface.

[0019] A detection method applicable to the above-mentioned self-rotating movable swing arm contour detection device comprises the following steps:

[0020] Step 1: Calculate the theoretical tilt angle θ and theoretical arm length L of the air bearing turntable according to the surface parameters of the workpiece to be measured;

[0021] Step 2: Move turntable A to the theoretical tilt angle θ, extend the arm to the theoretical arm length L, and place turntable B at the zero-degree position.

[0022] Step 3: Measure the position coordinates of the displacement sensor probe relative to the center of the B turntable rotation axis (H B , -L B );

[0023] Step 4: Calculate the position coordinate change (dx, dy) of the displacement sensor probe center after relative rotation at a certain angle.

[0024] Step 5: Face contour detection;

[0025] During the inspection process, the swing axis angle of turntable A is fixed. Starting from the detection zero position, after measuring the first contour line, turntable B rotates a certain angle. The machine tool moves to make the zero point of the single contour arc return to the coordinate zero point, and then starts sampling the second contour line; this movement method is repeated until turntable B completes a 360° rotation, achieving full-scale contour coverage measurement of the workpiece to be measured.

[0026] In the above technical solution, the specific steps of step 4 are:

[0027] B turntable relative rotation After that, i is the number of rotation angles, and the value range of i is 1 to N-1, then the zero point O rotates to O i At point , the position coordinates in the B turntable coordinate system are:

[0028]

[0029] When i=1,

[0030]

[0031] N is the number of sampling contour lines;

[0032] The sampling zero point of the first sampling trajectory rotates around the rotation axis of the B turntable The point after the angle is O1, and the center point C0 of the first sampling trajectory rotates around the rotation axis of the B turntable The angle is C 1-0 point;

[0033] [x1, y1] is the coordinate value of point O1 in the B turntable coordinate system. The coordinate difference between the position of point O1 and the zero point O is:

[0034]

[0035] The above (dx1, dy1) is the sampling zero point of the first sampling trajectory rotating around the rotation axis of the B turntable The relative coordinate transformation value between the angle and the zero point O;

[0036] Correspondingly, the sampling zero point of the first sampling trajectory rotates around the rotation axis of the B turntable After that, the position coordinates of the zero point O relative to the coordinate origin change to:

[0037]

[0038]

[0039] In the above technical solution, the specific steps of step 5 are:

[0040] The swing arm contour detection device is in the initial zero position state and scans the first sampling track;

[0041] Then turntable B rotates relative to zero position Angle, the X-axis and Y-axis of the machine tool move relative to each other (-dx1, -dy1), the contour line sampling zero point returns to the zero point O of the center of the workpiece to be measured, the center of the rotation axis of the B turntable moves from point B0 to point B1, and the center point of the sampling contour line is moved from point C 1-0 The point moves to point C1, and the swing arm contour detection device scans the second sampling track; then the B turntable rotates relative to the zero position The X-axis and Y-axis of the machine tool move relative to each other (-dx2, -dy2), and the swing arm profile detection device scans the third sampling trajectory;

[0042] And so on, until the B turntable rotates relative to the zero position The swing arm contour detection device completes the measurement of the Nth sampling trajectory and completes the full contour measurement of the workpiece to be measured.

[0043] The present invention has the following beneficial effects:

[0044] The self-rotating, mobile swing-arm profile detection device of the present invention expands its application to high-precision profile measurement of large-aperture, complex-curved optical components, even when large workpieces cannot rotate. The device can be applied to irregular workpiece shapes, such as circular, rounded-corner rectangular, and sector-shaped, and can be used on complex curved surfaces, including concave, flat, and convex surfaces.

[0045] The present invention constructs a swing-arm contour detection device, whose core joint action arm model can realize the theoretical detection posture calculation of ultra-large aperture complex curved surface optical elements of different dimensions, and guide their posture adjustment detection.

[0046] The self-rotating movable swing arm contour detection device and detection method of the present invention expand the application scenarios of the swing arm contour detection device, solve the difficult problem of in-situ high-precision contour detection of ultra-large aperture complex curved surface optical components with no rotational freedom, and can realize universal fast, efficient and high-precision surface contour detection of ultra-large aperture complex curved surface optical components with different shapes such as circular, elongated, and fan-shaped. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0048] Figure 1 It is a schematic diagram of the machine tool structure of the self-rotating movable swing arm contour detection device of the present invention.

[0049] Figure 2 This is a structural schematic diagram of the detection zero-position state of the self-rotating movable swing arm contour detection device of the present invention, and the surface of the workpiece being measured is a concave surface.

[0050] Figure 3 It is a top view schematic diagram of the detection zero position state trajectory relationship of the self-rotating movable swing arm contour detection device of the present invention.

[0051] Figure 4 This is a top view schematic diagram of the relationship between the swing arm contour detection trajectory after the B turntable of the self-rotating movable swing arm contour detection device of the present invention rotates by an angle.

[0052] Figure 5 It is a top view schematic diagram of the relationship between the swing arm contour detection trajectories after calibration of the self-rotating movable swing arm contour detection device of the present invention.

[0053] Figure 6 This is a structural schematic diagram of the self-rotating movable swing arm contour detection device of the present invention when the rotation axis of the B turntable rotates to the 180° position.

[0054] Figure 7 Schematic diagram of the process of the self-rotating movable swing arm contour detection method of the present invention.

[0055] Figure 8 Schematic diagram of the zero position of the measurement plane of the self-rotating movable swing arm contour detection device of the present invention.

[0056] Figure 9 This is a schematic diagram of the zero position of the self-rotating movable swing arm contour detection device of the present invention when measuring a convex surface.

[0057] Figure 10It is a structural diagram of a traditional swing-arm contour detection device.

[0058] Figure 11 The distribution diagram of the measurement points of the displacement sensor on the mirror surface obtained using a traditional swing-arm contour detection device.

[0059] The reference numerals in the figures indicate:

[0060] 1-machine tool; 2-X axis; 3-Y axis; 4-Z axis; 5-B turntable; 6-A turntable; 7-workpiece placement platform; 8-workpiece to be measured; 9-swing arm contour detection device; 10-air bearing turntable; 11-arm; 12-displacement sensor probe;

[0061] 101-Y-axis crossbeam; 102-Z-axis support; 103-X-axis guide rail;

[0062] 5-1 is the rotation axis of turntable B; 5-2 is the projection of turntable B on the XY plane; 6-1 is the swing axis of turntable A; 6-2 is the projection of the rotation axis of turntable A on the XY plane; 8-1 is the center axis of the workpiece to be measured;

[0063] 13-1 is the first sampling trajectory; 13-2-0 is the second sampling trajectory; 13-2 is the second sampling trajectory; 13-3 is the third sampling trajectory; 13-N / 2+1 is the N / 2+1th sampling trajectory; 13-N is the Nth sampling trajectory;

[0064] 14-1 Angle; 15-1 is the X-axis position coordinate of point O1 in the detection coordinate system XOY; 15-2 is the Y-axis position coordinate of point O1 in the detection coordinate system XOY. DETAILED DESCRIPTION

[0065] The inventive concept of the present invention is:

[0066] In the self-rotating movable swing arm contour detection device of the present invention, the processing machine tool provides the tilt degree of freedom of the swing axis of the A turntable and the rotation degree of freedom of the rotation axis of the B turntable. By constructing a relative position relationship model of the probe end relative to the swing axis of the A turntable and the rotation axis of the B turntable in the swing arm contour detection device, combined with the theoretical surface shape vector height distribution of the complex curved optical element to be measured, the X, Y, Z, A, and B axis motion position parameters of the machine tool are theoretically calculated, thereby realizing the measurement of the equivalent traditional workpiece turntable rotation sampling trajectory. The main structure of the self-rotating movable swing arm contour detection device of the present invention is a swing arm air-floating turntable, a swing arm rocker, a non-contact displacement probe, and a processing machine tool with the degrees of freedom of the X, Y, Z, A, and B axes.

[0067] The present invention will be described in detail below with reference to the accompanying drawings.

[0068] like Figure 1 and 2As shown, the self-rotating movable swing arm contour detection device of the present invention includes: a machine tool 1, a swing arm contour detection device 9, a workpiece placement platform 7 and a workpiece to be measured 8.

[0069] in:

[0070] Machine tool 1 includes: Z-axis supports 102, positioned below each end of a Y-axis beam 101, and X-axis guide rails 103, positioned below each Z-axis support 102. A swing-arm contour detection device 9 is mounted on Z-axis 4; a workpiece placement platform 7 is positioned below Y-axis beam 101 and between X-axis guide rails 103; and a workpiece 8 to be measured is placed on workpiece placement platform 7. Workpiece placement platform 7 does not rotate during contour measurement.

[0071] The swing arm contour detection device 9 comprises, from top to bottom, the B turntable 5, the A turntable 6, the air-bearing turntable 10, the arm 11, and the displacement sensor probe 12. The displacement sensor probe 12 is connected to the arm 11 via a probe connection fixture; the arm 11 is connected to the air-bearing turntable 10 via an arm fixing fixture; the air-bearing turntable 10 is fixed to the A turntable 6 via a turntable fixture; the A turntable 6 is connected to the lower end of the B turntable 5 and rotates with the B turntable 5. The upper end of the B turntable 5 is connected to the Z-axis 4. When the angle of rotation of the A turntable 6 about the A turntable swing axis 6-1 is 0 degrees, the rotation axis of the air-bearing turntable 10 is parallel to the Z-axis 4 and the B turntable rotation axis 5-1. During actual installation, the rotation axis of the air-bearing turntable 10 does not overlap with the rotation axis 5-1 of the B turntable, but is offset relative to it. The detection coordinate system XOY takes the geometric center of the workpiece 8 to be measured as its origin, and the X axis 2 and Y axis 3 of the machine tool 1 are X and Y directions respectively.

[0072] The self-rotating movable swing arm contour detection device of the present invention has three linear axis motion degrees of freedom, which are perpendicular to each other: X-axis 2, Y-axis 3, and Z-axis 4, and two degrees of freedom of rotation around the axis: B turntable rotation axis 5-1 and A turntable swing axis 6-1. Among them, X-axis 2 is a horizontal direction perpendicular to the length direction of the Y-axis beam 101 of the machine tool 1, Y-axis 3 is parallel to the length direction of the Y-axis beam 101 of the machine tool 1, and Z-axis 4 is a vertical direction perpendicular to the length direction of the Y-axis beam 101 of the machine tool 1; B turntable rotation axis 5-1 is parallel to the direction of Z-axis 4; A turntable 6 rotates with the rotation of B turntable 5. At the zero position of B turntable 5, as shown Figure 2 As shown in , the A turntable swing axis 6-1 is parallel to the X axis 2.

[0073] The workpiece 8 to be measured is a reflector to be measured, which is placed on the workpiece placement platform 7. Figure 1As shown, the workpiece 8 is circular when viewed from above. It should be noted that the self-rotating, movable swing-arm profile detection device of the present invention is not limited to being suitable for reflectors with circular shapes; other shapes, such as elongated strips and sectors, are also applicable. The workpiece 8 remains stationary during the surface profile measurement process.

[0074] like Figure 2 As shown, at this time, the self-rotating movable swing arm contour detection device of the present invention has a detection coordinate XYZ center point located at the center zero point O of the workpiece to be measured 8, the coordinate system XY direction is consistent with the XY direction of the machine tool 1, and the direction of the center axis 8-1 of the workpiece to be measured is consistent with the direction of the Z axis 4; during the actual installation process, there is a position offset between the air-floating turntable 10 of the swing arm contour detection device 9 and the center of the B turntable rotation axis 5-1. At the detection zero position, the projection point of the B turntable rotation axis 5-1 on the detection coordinate XY plane is point B0.

[0075] In such Figure 2 In the illustrated zero detection position, turntable B 5 is rotated to 0 degrees and is fixedly connected to turntable A 6. Air bearing turntable 10 is tilted at a certain angle, and displacement sensor probe 12 is now positioned at the center of workpiece 8. As displacement sensor probe 12 rotates around air bearing turntable 10 with arm 11, it sweeps a first sampling trajectory 13-1 over workpiece 8, measuring a single contour line.

[0076] like Figure 3 As shown, we can see the projection 5-2 of the B turntable on the XY plane and the projection 6-2 of the A turntable rotation axis on the XY plane; point B0 is the projection point of the B turntable rotation axis 5-1 on the detection coordinate XY plane, and the coordinates of point B0 are (H B , -L B Point C0 is the projection point of the center of the first sampling trajectory 13-1 on the detection coordinate XY plane.

[0077] like Figure 4 As shown, the B turntable 5 is at the starting zero position, the displacement sensor probe 12 of the swing arm profile detection device 9 rotates around the air-floating turntable 10 on the mirror surface to scan the first sampling track 13-1, and the B turntable 5 rotates around the B turntable rotation axis 5-1 After the angle 14-1, the position of the first sampling track 13-1 changes to the second sampling track 13-2-0, and the center point of the contour arc moves from point C0 to point C 1-0The arc sampling scan zero point rotates from the zero point O to the point O1, and the position change of the point O1 relative to the zero point O can be obtained: the X-axis position coordinate of the point O1 under the detection coordinate system XOY is 15-1, that is, dx, and the Y-axis position coordinate of the point O1 under the detection coordinate system XOY is 15-2, that is, dy. The scanning starting point O1 of the second sampling trajectory 13-2-0 is translated (-dx, -dy) back to the zero point O, and the resulting scanning contour line is the second sampling trajectory 13-2. The corresponding center point C of the second contour arc is 1-0 Move the point to point C1.

[0078] like Figure 5 As shown, B0, B1, B2, B N / 2 and B N-1 The points are the top projection positions of the center of the B turntable rotation axis 5-1 corresponding to the first sampling trajectory 13-1, the second sampling trajectory 13-2, the third sampling trajectory 13-3, the N / 2+1th sampling trajectory 13-N / 2+1 and the Nth sampling trajectory 13-N in the XY plane; C0, C1, C2, C N / 2 、C N-1 The points are respectively the top projection points of the centers of the first sampling trajectory 13 - 1 , the second sampling trajectory 13 - 2 , the third sampling trajectory 13 - 3 , the N / 2+1 th sampling trajectory 13 - N / 2+1 and the N th sampling trajectory 13 - N on the XY plane.

[0079] The detection method of the self-rotating movable swing arm contour detection device of the present invention is applicable to the above-mentioned invention, and its process is as follows: Figure 7 shown. Figure 7 Only an outline of the steps is shown. For ease of illustration, the displacement sensor probe is simply referred to as the probe, the A turntable swing axis 6-1 is referred to as the A axis, and the B turntable rotation axis 5-1 is referred to as the B axis. The detection method includes the following steps:

[0080] Step 1: According to the aspherical surface parameters of the workpiece 8 to be measured, the theoretical tilt angle θ and the theoretical arm length L of the air-bearing turntable 10 corresponding to the closest spherical surface are calculated;

[0081] Step 2: Rotate the A turntable 6 around the A turntable swing axis 6-1 to the theoretical tilt angle θ, extend the arm 11 to the theoretical arm length L, rotate the B turntable 5 around the B turntable rotation axis 5-1 to the zero degree position, and align the displacement sensor probe 12 with the center of the workpiece placement platform 7, as shown in the following figure: Figure 2 shown.

[0082] Step 3: Measure the position coordinates of the displacement sensor probe 12 relative to the projection point B0 of the B turntable rotation axis 5-1 (H B , -L B );

[0083] The laser tracker is used to measure the relative position coordinates of the displacement sensor probe 12 relative to the B turntable 5 of the swing arm profile detection device 9 under the theoretical tilt angle θ and the theoretical arm length L, as shown in FIG. Figure 3 The specific operation is as follows: take the B turntable rotation axis 5-1 as the center and the X axis 2 as the X direction, and measure and construct the B axis coordinate system X B B0Y B The laser tracker measures the coordinates of the zero point O of the displacement sensor probe 12, which is the position coordinate of the center of the displacement sensor probe 12 relative to the rotation axis 5-1 of the B turntable (H B , -L B ).

[0084] Step 4: Calculate the position coordinate change (dx, dy) of the center of the displacement sensor probe 12 after relative rotation at a certain angle;

[0085] The position coordinates (H) of the displacement sensor probe 12 relative to the center of the rotation axis 5-1 of the B turntable B , -L B ) as a reference, calculate the position coordinates of the swing arm contour detection device 9 at other sampling positions. The specific operation is: Figure 5 As shown, the equivalent global sampling trajectory is achieved by the relative rotation of the B turntable 5 and the relative movement of the X axis 2, Y axis 3, and Z axis 4. After that, i is the number of rotation angles, i is a positive integer, and its value range is 1 to N-1, then the original contour line sampling zero point O is rotated to O i Point ( Figure 4 Not shown in O i , only O1 when i=1 is shown, as Figure 4 As shown, in the B turntable 5 coordinate system X B B0Y B The position coordinates are:

[0086]

[0087] When i=1,

[0088]

[0089] N is the number of sampling contour lines, generally N = 72; it can also be 36, 144 or other even values.

[0090] The sampling zero point of the first sampling track 13-1 rotates around the rotation axis 5-1 of the B turntable The point after the angle 14-1 is O1. The center point C0 of the first sampling trajectory 13-1 rotates around the rotation axis 5-1 of the B turntable Angle 14-1 is C 1-0 point;

[0091] [x1,y1] is Figure 4 The coordinate value of point O1 in the coordinate system of turntable B 5 is as follows:

[0092]

[0093] The above (dx1, dy1) is the first sampling trajectory 13-1 sampling zero point rotating around the B turntable rotation axis 5-1 The relative coordinate transformation value of the angle 14-1 and the coordinate origin zero point O.

[0094] Correspondingly, the sampling zero point of the first sampling trajectory 13-1 rotates around the rotation axis 5-1 of the B turntable After that, the position coordinates of the zero point O relative to the coordinate origin change to:

[0095]

[0096]

[0097] Step 5: Face contour detection.

[0098] During the detection process, the angle of the A turntable swing axis 6-1 of the A turntable 6 is fixed. Starting from the detection zero position, after measuring the first contour line, as shown in the first sampling trajectory 13-1, the B turntable 5 rotates a certain angle, and the X-axis 2 and Y-axis 3 of the machine tool 1 move so that the zero point of the single contour arc returns to the coordinate zero point, and then the second contour line sampling is started. This movement mode is followed until the B turntable 5 completes a 360° rotation, thereby realizing full-scale contour coverage measurement of the workpiece 8 to be measured.

[0099] Specifically, if Figure 2 、 5 , 6, 8 and 9, the swing arm profile detection device 9 is located at Figure 2 The starting zero position shown in FIG. 1 scans the first contour line, i.e., the first sampling track 13-1; then the B turntable 5 rotates relative to the zero position. Angle 14-1, the X-axis 2 and Y-axis 3 of the machine tool 1 move relative to each other (-dx1, -dy1), the contour sampling zero point returns to the zero point O of the center of the workpiece 8 to be measured, the center of the rotating axis 5-1 of the B turntable moves from point B0 to point B1, and the center point of the sampling contour line moves from point C 1-0 The point moves to point C1, and the arm contour detection device 9 scans the second sampling track 13-2; then the B turntable 5 rotates relative to the zero position The X-axis 2 and Y-axis 3 of the machine tool 1 move relative to each other (-dx2, -dy2), and the swing arm contour detection device 9 scans the third sampling track 13-3. This process is repeated until the B turntable 5 rotates relative to the zero position. The swing arm contour detection device 9 completes the measurement of the Nth sampling track 13-N and completes the full contour measurement of the workpiece 8 to be measured. Figure 5 For ease of understanding, Figure 6 A schematic diagram of the position of the swing arm contour detection device 9 when the B turntable 5 rotates 180° relative to the swing arm is given.

[0100] The self-rotating movable swing arm contour detection device of the present invention has been put into practical experimental trials and the detection accuracy is comparable to that of the traditional workpiece rotary swing arm, which verifies the feasibility and effectiveness of the present invention.

[0101] Simulations show that the self-rotating movable swing arm contour detection method of the present invention is practical and effective.

[0102] The self-rotating movable swing arm profile detection device of the present invention realizes the expanded application of the swing arm detection device for high-precision profile measurement of large-diameter complex curved optical components when large workpieces cannot rotate. The implementation case of the present invention takes a complex curved optical component with a circular shape and a concave surface as an example. It is also applicable to flat and convex surfaces. It only needs to adjust the tilt angle of the turntable A 6 accordingly, such as Figure 8 and 9 As shown; the solution of the present invention is also applicable to workpieces with non-circular shapes such as rectangles and sectors, and the maximum circumscribed envelope circle of the workpiece shape is implemented as a virtual circular detection range.

[0103] By constructing a core joint action arm model of a swing-arm contour detection device, the present invention can realize theoretical detection posture calculation of ultra-large aperture complex curved surface optical elements of different dimensions, and guide their posture adjustment detection.

[0104] The self-rotating movable swing arm contour detection device of the present invention expands the application scenarios of the swing arm contour detection device, solves the difficult problem of in-situ high-precision contour detection of ultra-large aperture complex curved surface optical elements with no rotational freedom, and realizes universal fast, efficient and high-precision surface contour detection of ultra-large aperture complex curved surface optical elements with different shapes.

[0105] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A self-rotating movable swing arm contour detection device, characterized in that: include: A machine tool (1), a swing arm contour detection device (9), a workpiece placement platform (7), and a workpiece to be measured (8); in: The machine tool (1) comprises: a Y-axis beam (101), a liftable Z-axis (4), a Z-axis support (102), a movable X-axis (2), a movable Y-axis (3), and an X-axis guide rail (103); a workpiece placement platform (7) is arranged below the Y-axis beam (101); and a workpiece (8) to be measured is placed on the workpiece placement platform (7); The swing arm profile detection device (9) is arranged on the Z axis (4) and can move along the Y axis (3) and the X axis (2); the swing arm profile detection device (9) comprises, from top to bottom, a B turntable (5), an A turntable (6), an air-floating turntable (10), an arm (11) and a displacement sensor probe (12); the displacement sensor probe (12) is connected to the arm (11); the arm (11) is connected to the air-floating turntable (10); the air-floating turntable (10) is fixed on the A turntable (6); the A turntable (6) is connected to the lower end of the B turntable (5) and rotates with the B turntable (5); the upper end of the B turntable (5) is connected to the Z axis (4); The B turntable rotation axis (5-1) of the B turntable (5) is in the vertical direction; the A turntable swing axis (6-1) of the A turntable (6) is parallel to the movement direction of the X axis (2) of the machine tool (1) when the angle of the B turntable (5) is zero degrees; the displacement sensor probe (12) is used to rotate around the air-floating turntable (10) along with the arm (11), sweeping a sampling trajectory above the workpiece to be measured (8), and measuring a contour line data; the swing arm contour detection device (9) rotates around the B turntable rotation axis (5-1) and moves along the X axis (2), Y axis (3), and Z axis (4), so that the contour line detection zero position is always aligned with the center of the workpiece to be measured (8), and the sampling contour line data at other positions in the entire area of the workpiece to be measured (8) are measured.

2. The self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The machine tool (1) can provide three-dimensional movement freedom in XYZ space; the swing arm contour detection device (9) realizes translation movement in XYZ directions on the machine tool (1) and has rotational movement freedom around the B turntable (5) and the A turntable (6); at the zero position, the displacement sensor probe (12) is used to rotate around the air-floating turntable (10) along with the arm (11), sweeping a sampling trajectory above the workpiece to be measured (8) to measure a contour line data; the swing arm contour detection device (9) realizes sampling contour line coverage of the full contour area of the workpiece to be measured (8) through the rotation of the B turntable (5) and the movement of the X-axis (2), Y-axis (3) and Z-axis (4) of the machine tool (1).

3. The self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The shape of the workpiece (8) to be measured is circular, strip-shaped or fan-shaped.

4. The self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The surface of the workpiece (8) to be measured is a concave surface, a convex surface or a flat surface.

5. A detection method applicable to the self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The following steps are involved: Step 1: Calculate the theoretical tilt angle θ and theoretical arm length L of the air-bearing turntable (10) according to the surface parameters of the workpiece (8) to be measured; Step 2: Move the A turntable (6) to the theoretical tilt angle θ, extend the arm (11) to the theoretical arm length L, and place the B turntable (5) at the zero angle position; Step 3: Measure the position coordinates (H) of the displacement sensor probe (12) relative to the center of the B turntable rotation axis (5-1). B , -L B ); Step 4, calculating the position coordinate change (dx, dy) of the center of the displacement sensor probe (12) after relative rotation by a certain angle; Step 5: Face contour detection; During the detection process, the angle of the swing axis (6-1) of the A turntable is fixed. Starting from the detection zero position, after measuring the first contour line, the B turntable (5) rotates a certain angle, and the machine tool (1) moves so that the zero point of the single contour arc returns to the coordinate zero point, and then starts sampling the second contour line; in this way, until the B turntable (5) completes a 360-degree rotation, the full-face contour coverage measurement of the workpiece (8) to be measured is achieved.

6. The detection method according to claim 5, characterized in that The specific steps of step 4 are: B turntable (5) relative rotation After that, i is the number of rotation angles, and the value range of i is 1 to N-1, then the zero point O rotates to O i At point , the position coordinates in the B turntable (5) coordinate system are: When i=1, N is the number of sampling contour lines; The sampling zero point of the first sampling trajectory (13-1) rotates around the rotation axis (5-1) of the B turntable After the angle (14-1), it is point O1. The center point C0 of the first sampling trajectory (13-1) rotates around the rotation axis (5-1) of the B turntable. The angle (14-1) is C 1-0 point; [x1, y1] is the coordinate value of point O1 in the coordinate system of turntable B (5). The difference between the position of point O1 and the position of zero point O is: The above (dx1, dy1) is the sampling zero point of the first sampling trajectory (13-1) rotating around the rotation axis (5-1) of the B turntable. The relative coordinate transformation value with respect to the zero point O after the angle (14-1); Correspondingly, the sampling zero point of the first sampling trajectory (13-1) rotates around the rotation axis (5-1) of the B turntable After that, the position coordinates of the zero point O relative to the coordinate origin change to:

7. The detection method according to claim 6, characterized in that The specific steps of step 5 are: The swing arm contour detection device (9) is in a starting zero position state and scans the first sampling track (13-1); Then the B turntable (5) rotates relative to the zero position Angle (14-1), the X axis (2) and Y axis (3) of the machine tool (1) move relative to each other (-dx1, -dy1), the contour sampling zero point returns to the center zero point O of the workpiece (8) to be measured, the center of the B turntable rotation axis (5-1) moves from point B0 to point B1, and the center point of the sampling contour line is moved from point C 1-0 The point moves to point C1, and the arm contour detection device (9) scans the second sampling track (13-2); then the B turntable (5) rotates relative to the zero position The X-axis (2) and the Y-axis (3) of the machine tool (1) move relative to each other (-dx2, -dy2), and the swing arm profile detection device (9) scans the third sampling trajectory (13-3); And so on, until the B turntable (5) rotates relative to the zero position The swing arm contour detection device (9) completes the measurement of the Nth sampling track (13-N), and completes the full contour measurement of the workpiece (8) to be measured.

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