Contact terminal, terminal assembly, and device testing apparatus

Abstract

The invention provides a contact terminal, a terminal assembly, and a device testing apparatus capable of improving design freedom. The contact terminal (50) is provided with: a contact part (70) that is detachably in contact with the pad (24); a pressing member (60) that presses the contact portion (70) against the pad (24); and an electrical connection member (80) provided with wires (85, 86) connected to the contact part (70), the pressing member (60) and the electrical connection member (80) being members independent from each other.

Description

Technical Field

[0001] The present invention relates to a contact terminal, a terminal assembly having the contact terminal, and a device testing apparatus having the terminal assembly. Background Art

[0002] A signal contact for connecting a flat cable to a printed circuit board is known (for example, see Patent Document 1). The signal contact includes a contact point that contacts a contact portion of a signal layer of the flat cable, and a terminal portion that connects to a connection portion of the printed circuit board. The signal contact is made of a conductive metal, electrically connects the contact portion of the flat cable to the connection portion of the printed circuit board, and also functions as a spring that presses the contact point to the contact portion of the flat cable. Prior Art Literature Patent Literature

[0003] Patent Document 1: Japanese Patent Application Publication No. 2014-225412 Summary of the invention Technical problem to be solved by the invention

[0004] The signal contact described above has both electrical and mechanical functions in one member. Therefore, the signal contact described above has two problems: electrical performance may be reduced if mechanical performance is improved, and electrical restrictions may be imposed on mechanical design.

[0005] An object of the present invention is to provide a contact terminal, a terminal assembly, and a device test apparatus capable of improving the degree of freedom in design. Technical solutions for solving technical problems

[0006] [1] A first aspect of the present invention is a contact terminal comprising: a contact portion that can be detachably contacted with a first conductive member; a pressing member that presses the contact portion relative to the first conductive member; and an electrical connection member that has a first conductive path connected to the contact portion, wherein the pressing member and the electrical connection member are independent components.

[0007] [2] A second aspect of the present invention may be a contact terminal according to the first aspect, wherein the pressing member includes an elastic deformation portion that elastically deforms when the contact portion is pressed relative to the first conductive member.

[0008] [3] A third aspect of the present invention may be a contact terminal according to the second aspect, wherein when the elastic deformation portion is deformed, the electrical length of the first conductive path is constant.

[0009] [4] A fourth aspect of the present invention may be a contact terminal according to the second or third aspect, wherein the electrical connection member includes an insulator surrounding the entire circumference of the first conductive path.

[0010] [5] A fifth aspect of the present invention may be a contact terminal according to the fourth aspect, wherein the insulator is made of a resin material.

[0011] [6] Mode 6 of the present invention may also be the following contact terminal, in which in any one of modes 2 to 5, the elastic deformation portion comprises a resin spring, a metal spring, or an air spring, the resin spring is made of a resin material and elastically deforms when the contact portion is relatively pressed relative to the first conductive member, the metal spring is made of a metal material and elastically deforms when the contact portion is relatively pressed relative to the first conductive member, and the air spring is compressed by the relative pressing of the contact portion relative to the first conductive member.

[0012] [7] Mode 7 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of any one of modes 2 to 5, the pressing member is made of a resin material, and the elastic deformation portion has a resin spring that elastically deforms when the contact portion is pressed relative to the first conductive member.

[0013] [8] Mode 8 of the present invention may also be the following contact terminal, in which in the contact terminal of mode 7, the contact terminal has a plurality of the contact parts, the electrical connection component has a plurality of the first conductive paths connected to the plurality of contact parts, the pressing component has a plurality of the elastic deformation parts corresponding to the plurality of contact parts, and the plurality of elastic deformation parts are formed integrally.

[0014] [9] Mode 9 of the present invention may also be the following contact terminal, in which, in any one of modes 1 to 8, the contact terminal has a plurality of contact portions, the electrical connection component includes a flexible printed wiring board having flexibility, and the flexible printed wiring board has a plurality of first conductive paths connected to the plurality of contact portions.

[0015]

[10] Mode 10 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 9, the flexible printed wiring board comprises a first insulating layer; the plurality of first conductive paths arranged on the first insulating layer; and a second insulating layer overlapping the first insulating layer in a manner covering the plurality of first conductive paths.

[0016]

[11] Aspect 11 of the present invention may be a contact terminal according to aspect 10, wherein the plurality of first conductive paths are arranged on the first insulating layer at intervals.

[0017]

[12] A twelfth aspect of the present invention may be a contact terminal according to the tenth or eleventh aspect, wherein the flexible printed wiring board has slits disposed between the plurality of first conductive paths.

[0018]

[13] A thirteenth aspect of the present invention may be a contact terminal according to the twelfth aspect, wherein the slit penetrates at least one of the first insulating layer and the second insulating layer.

[0019]

[14] A fourteenth aspect of the present invention may be a contact terminal according to the twelfth or thirteenth aspect, wherein the slit passes through the flexible printed wiring board.

[0020]

[15] A fifteenth aspect of the present invention may be a contact terminal according to any one of aspects 11 to 14, wherein the plurality of first conductive paths include a plurality of ground lines and a plurality of signal lines respectively arranged between the ground lines.

[0021]

[16] Mode 16 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 15, the flexible printed wiring board has a first ground layer, the first ground layer is arranged on the first insulating layer, and is opposite to the signal line via the first insulating layer.

[0022]

[17] Mode 17 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 15 or 16, the flexible printed wiring board has a second grounding layer, the second grounding layer is arranged on the second insulating layer, and is opposite to the signal line through the second insulating layer.

[0023]

[18] Mode 18 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of any one of modes 15 to 17, the contact portion includes a signal contact portion connected to the signal line and a ground contact portion connected to the ground line.

[0024]

[19] Mode 19 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 18, the contact terminal has a third grounding layer electrically connected to the grounding contact portion, the pressing member has a through hole for the signal contact portion to pass through, and the third grounding layer is arranged in the through hole in a manner opposite to the signal contact portion at a distance therefrom.

[0025]

[20] Mode 20 of the present invention may also be a contact terminal as follows, in which, in any one of modes 1 to 19, the contact portion includes a metal layer retained by the pressing member, and the metal layer is provided at a front end portion of the pressing member.

[0026]

[21] Mode 21 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 20, the pressing member has an elastic deformation portion, which is elastically deformed when the contact portion is relatively pressed relative to the first conductive member, and the contact portion is arranged at the front end portion of the elastic deformation portion.

[0027]

[22] Mode 22 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 20 or 21, the metal layer extends linearly at the front end portion and satisfies the following formula (1). L b <L a ×1 / 10···(1) In the above formula (1), L a is the length of the first conductive path, L b is the length of the above metal layer.

[0028]

[23] Mode 23 of the present invention may also be the following contact terminal, in any of modes 20 to 22, the above-mentioned contact terminal has a plurality of the above-mentioned contact parts, and the above-mentioned plurality of contact parts are provided in the single above-mentioned front end part.

[0029]

[24] Mode 24 of the present invention may also be a contact terminal as follows, in which, in any one of modes 1 to 23, the pressing member comprises: an elastic deformation portion that is elastically deformed when the contact portion is pressed relative to the first conductive member; and a supporting portion that supports the elastic deformation portion.

[0030]

[25] A 25th aspect of the present invention may be a contact terminal according to the 24th aspect, wherein the pressing member is made of a resin material, and the elastic deformation portion and the support portion are formed integrally.

[0031]

[26] Mode 26 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 24 or 25, an imaginary straight line passing through the front end of the pressing member and parallel to the center line of the supporting portion deviates from the center line.

[0032]

[27] Mode 27 of the present invention may also be a contact terminal as follows, in which, in any one of modes 1 to 26, the pressing member comprises: an elastic deformation portion that is elastically deformed when the contact portion is pressed relative to the first conductive member; and a deformation limiting portion that limits the elastic deformation of the elastic deformation portion by abutting against the first conductive member.

[0033]

[28] Mode 28 of the present invention may also be a contact terminal as follows, in which, in the contact terminal of mode 27, the pressing member is made of a resin material, and the elastic deformation portion and the deformation limiting portion are formed integrally.

[0034]

[29] Mode 29 of the present invention may also be a contact terminal as follows, wherein in the contact terminal of mode 28, the pressing member comprises a supporting portion for supporting the elastic deformation portion and the deformation limiting portion, and the elastic deformation portion, the deformation limiting portion and the supporting portion are formed integrally.

[0035]

[30] A 30th aspect of the present invention may be a contact terminal according to any one of aspects 1 to 29, wherein the contact portion abuts against the first conductive member as the contact terminal moves relative to the first conductive member.

[0036]

[31] Mode 31 of the present invention may also be a contact terminal as follows, in which, in the contact terminal of mode 30, the pressing direction of the above-mentioned contact portion based on the above-mentioned pressing member is parallel to the direction in which the above-mentioned contact terminal moves relative to the above-mentioned first conductive member.

[0037]

[32] A 32nd aspect of the present invention may be a contact terminal according to any one of aspects 1 to 31, wherein the signal passing through the first conductive path is a high frequency signal of 1 GHz or higher.

[0038]

[33] Mode 33 of the present invention may also be a contact terminal as follows, in which, in any one of modes 1 to 32, the contact terminal is a terminal that electrically connects the first conductive component and the second conductive component, and the first conductive path is electrically connected to the second conductive component.

[0039]

[34] A 34th aspect of the present invention is a terminal assembly comprising: a plurality of contact terminals according to any one of aspects 1 to 33; and a supporting member that supports the plurality of contact terminals.

[0040]

[35] Mode 35 of the present invention may also be a terminal assembly as follows, wherein in the terminal assembly of mode 34, the supporting member includes a wiring board having a second conductive path, and the first conductive path is connected to the second conductive path.

[0041]

[36] A 36th aspect of the present invention may be a terminal assembly in which, in the terminal assembly of the 35th aspect, the second conductive member is connected to the second conductive path.

[0042]

[37] A 37th aspect of the present invention may be a terminal assembly according to any one of aspects 34 to 36, wherein the plurality of contact terminals are arranged so that the pressing members are opposed to each other.

[0043]

[38] Mode 38 of the present invention is a device testing device, which is a device testing device for testing a DUT, and comprises: a first conductive component, a second conductive component and a terminal assembly of any one of modes 34 to 37, wherein the first conductive path of the contact terminal is electrically connected to the second conductive component, and the contact terminal electrically connects the first conductive component to the second conductive component. Effects of the Invention

[0044] In the present invention, the pressing member and the electrical connecting member are independent of each other, so that the mutual constraints between the design of the pressing member and the design of the electrical connecting member can be reduced, and the degree of freedom in the design of the contact terminal can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a schematic cross-sectional view showing the overall structure of a device testing apparatus according to an embodiment of the present invention. Figure 2 is an exploded cross-sectional view showing a DSA and a motherboard in an embodiment of the present invention, and is Figure 1 The corresponding figure of Part II. Figure 3 This is a perspective view of the terminal assembly according to the embodiment of the present invention as viewed from the front. Figure 4 This is a perspective view of the terminal assembly according to the embodiment of the present invention as viewed from the rear. Figure 5 is a cross-sectional view showing a terminal assembly in an embodiment of the present invention, taken along Figure 3 Figure 1. VV line. Figure 6 It is a plan view showing a contact terminal and a wiring board in the embodiment of the present invention. Figure 7 It is an exploded perspective view showing a contact terminal in the embodiment of the present invention. Figure 8 It is a side view showing a pressing member in the embodiment of the present invention. Fig. 9 It is a bottom view showing the electrical connecting member in the embodiment of the present invention. Fig.10 is a partial cross-sectional view showing an electrical connection member in an embodiment of the present invention, taken along Fig. 9 The graph of the XX line. Fig.11It is a partial cross-sectional view showing a first modified example of the electrical connecting member in the embodiment of the present invention. Fig.12 It is a plan view showing a second modified example of the electrical connecting member in the embodiment of the present invention. Fig.13 It is a perspective view showing a contact portion formed at a front end portion of a pressing member in another embodiment of the present invention. Fig.14 is a cross-sectional view of the front end portion of the pressing member in another embodiment of the present invention, taken along Fig.13 Diagram of the XIV-XIV line. Fig.15 (a)~ Fig.15 (c) is a cross-sectional view showing first to third modified examples of the contact terminal in the embodiment of the present invention. DETAILED DESCRIPTION

[0046] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0047] Figure 1 is a schematic cross-sectional view showing the overall structure of a device testing apparatus 1 according to an embodiment of the present invention. Figure 2 is an exploded cross-sectional view showing the DSA 20 and the motherboard 30 in this embodiment. Figure 1 The corresponding figure of Part II.

[0048] The device test apparatus 1 in this embodiment is an apparatus for testing a device under test (hereinafter also referred to as "DUT") 200. Although not particularly limited, specific examples of the DUT 200 to be tested include, for example, a memory device, a logic device, or a semiconductor device such as a SoC (System on Chip). The device test apparatus 1 tests the electrical characteristics of the semiconductor device 200.

[0049] like Figure 1 As shown, the device test apparatus 1 includes: a tester 10 that performs a test on a DUT 200; and a processor 130 that processes the DUT 200 and presses the DUT 200 against a test socket 21. The tester 10 includes a DSA 20, a motherboard 30, a test head 110, and a main frame 120. It should be noted that the structure of the tester 10 is not particularly limited to the following structure as long as it includes a terminal assembly 40 described later.

[0050] like Figure 1 and Figure 2As shown, a DSA (Device Specific Adapter) 20 includes a test socket 21 and a wiring board 23. The DSA 20 is electrically connected to a test head 110 via a motherboard 30. The DSA 20 can be loaded and unloaded relative to the motherboard 30. The DSA 20 is designed according to the type of DUT 200, and when the type of DUT 200 is switched, the DSA 20 is replaced with a DSA corresponding to the type. It should be noted that there is no particular limitation on the number of DSAs 20 mounted on the motherboard 30, and a plurality of DSAs 20 may be mounted on the motherboard 30.

[0051] When the DUT 200 is tested, the DUT 200 is pressed against the test socket 21 by the processor 130, thereby the DUT 200 is electrically connected to the test socket 21. The test socket 21 includes a plurality of contactors 22 that are in contact with the terminals 210 of the DUT 200. Although not particularly limited, specific examples of the contactors 22 include, for example, spring pins, vertical probes, cantilever probes, anisotropic conductive rubber sheets, protrusions provided on a film, or contactors manufactured using MEMS technology.

[0052] The wiring board 23 is a rigid wiring board on the upper surface of which the test socket 21 is mounted. Although not particularly shown, a test socket guide for positioning the DUT 200 relative to the test socket 21 may also be mounted on the test socket 21. The wiring board 23 has a plurality of pads 24 on the lower surface of the wiring board 23. The plurality of pads 24 are arranged on the lower surface of the wiring board 23 in a manner corresponding to a plurality of contact portions 70 (described later) of the terminal assembly 40 of the motherboard 30. The test socket 21 and the pads 24 are electrically connected via a wiring pattern, a through hole or other conductive path (not shown) formed on the wiring board 23.

[0053] It should be noted that Figure 1 and Figure 2 In the embodiment, only one test socket 21 is mounted on the wiring board 23, but in fact, a plurality of test sockets 21 are mounted on one wiring board 23. Therefore, in the present embodiment, tens of thousands of pads 24 are provided on the lower surface of the wiring board 23. In addition, the wiring board 23 of the present embodiment has a size of about 1200 mm×500 mm, for example. It should be noted that the number of pads 24 of the wiring board 23 and the size of the wiring board 23 are not particularly limited to the above.

[0054] The motherboard 30 is a repeater that electrically connects the DSA 20 and the test head 110. The motherboard 30 includes a housing 31, a terminal assembly 40, and a plurality of coaxial cables 100. Figure 2The contact portion 70 of the terminal assembly 40 is pressed against the pad 24 of the DSA 20, and the contact portion 70 is in contact with the pad 24, so that the wiring board 23 of the DSA 20 is electrically connected to the coaxial cable 100. It should be noted that the structure of the terminal assembly 40 will be described in detail later.

[0055] like Figure 1 As shown, the test head 110 contains a test assembly (pin circuit card) 111 for testing the DUT 200. The test assembly 111 is a wiring board on which electronic components such as test devices for testing the DUT 200 are installed. The test assembly 111 is electrically connected to the coaxial cable 100 via a connector (not shown) connected to the other end of the coaxial cable 100 of the motherboard 30. The test assembly 111 transmits and receives test signals to and from the DUT 200 via the DSA 20 and the motherboard 30, thereby testing the DUT 200. The test head 110 is connected to the main frame 120 via a cable 112.

[0056] The main frame (tester body) 120 is, for example, a computer that executes a program, and communicates with each test unit 111 in the test head 110 according to the program to control each test unit 111. Each test unit 111 generates a test signal according to an instruction from the main frame 120 and outputs the test signal to the DUT 200.

[0057] Although not specifically shown in the figure, the processor 130 includes, for example: a conveying device that conveys the test tray carrying the DUT 200 to the top of the DSA 20; a pressing device that presses the DUT 200 against the test socket 21 of the DSA 20; and a sorting device that takes out the DUT 200 from the test tray and sorts them according to the test results.

[0058] In addition, the processor 130 includes a chamber 131 as a temperature adjustment device for applying high temperature or low temperature thermal stress to the DUT 200. The chamber 131 is composed of a constant temperature chamber that can maintain the temperature in the chamber at a desired temperature. Therefore, the device test apparatus 1 can test the DUT 200 in a state where thermal stress is applied to the DUT 200, and can perform so-called high temperature tests and low temperature tests.

[0059] The DSA 20 enters the chamber 131 through the opening 132 formed in the handler 130, and the test socket 21 of the DSA 20 is disposed in the chamber 131. The DUT 200 is pressed against the test socket 21 of the DSA 20 by the pressing device of the handler 130, so that the DUT 200 and the test socket 21 are electrically connected.

[0060] It should be noted that the handler 130 may be of the type that does not use a test tray but has a contact arm that absorbs and holds the DUT 200 and moves it, and the contact arm presses the DUT 200. In this case, the handler 130 may also have a heater or a heat sink provided at the front end of the contact arm as a temperature adjustment device instead of the chamber 131. Alternatively, the handler 130 may also have a heater or a heat sink provided at the front end of the contact arm as a temperature adjustment device in addition to the chamber 131.

[0061] Next, refer to Figures 3 to 10 The structure of the terminal assembly 40 included in the above-mentioned motherboard 30 will be described in detail.

[0062] Figure 3 This is a perspective view of the terminal assembly 40 in this embodiment as viewed from the front. Figure 4 This is a perspective view of the terminal assembly 40 according to the present embodiment as viewed from the rear. Figure 5 is a cross-sectional view showing a terminal assembly 40 in this embodiment, taken along Figure 3 Figure 1. VV line. Figure 6 FIG. 4 is a plan view showing the contact terminal 50 and the wiring board 90 in the present embodiment. Figure 7 It is an exploded perspective view showing the contact terminal 50 in this embodiment. Figure 8 It is a side view showing the pressing member 60 in this embodiment. Fig. 9 It is a bottom view showing the electrical connecting member 80 in this embodiment. Fig.10 is a partial cross-sectional view showing the electrical connection member 80 in this embodiment, taken along Fig. 9 The graph of the XX line.

[0063] like Figures 3 to 5 As shown, the motherboard 30 includes a plurality of terminal assemblies 40. As described above, the terminal assemblies 40 electrically connect the pads 24 of the wiring board 23 of the DSA 20 and the coaxial cables 100 of the motherboard 30. The wiring board 23 is equivalent to an example of the "first conductive member" in the embodiment of the present invention, and the coaxial cable 100 is equivalent to an example of the "second conductive member" in the embodiment of the present invention. Each terminal assembly 40 includes a contact terminal 50 and a wiring board 90 supporting the contact terminal 50.

[0064] It should be noted that Figures 3 to 5 In the figure, only two terminal assemblies 40 are shown, and each terminal assembly 40 has only one or two contact terminals 50. However, in reality, the motherboard 30 has a plurality of terminal assemblies 40, each of which has a plurality of contact terminals 50. As a result, the motherboard 30 has a number of contact portions 70 corresponding to the number of pads 24 of the DSA 20 (tens of thousands in this embodiment).

[0065] like Figures 5 to 7 As shown, the contact terminal 50 includes a pressing member 60, a contact portion 70, and an electrical connection member 80. The contact portion 70 can be detachably contacted with the solder pad 24 of the wiring board 23 of the above-mentioned DSA 20. The pressing member 60 holds the contact portion 70 at the front end portion 611 of the pressing member 60, and presses (pressurizes) the contact portion 70 relative to the solder pad 24. In the present embodiment, the pressing member 60 pushes the contact portion 70 back toward the solder pad 24 when the solder pad 24 is pressed against the contact portion 70. The electrical connection member 80 is connected to the contact portion 70, and is electrically connected to the coaxial cable 100 via the wiring board 90. All the contact terminals 50 provided to the motherboard 30 basically have the same structure, and therefore, in Figure 5 Among the three contact terminals 50 shown, the structure of the central contact terminal 50 will be described as a representative example.

[0066] like Figure 7 and Figure 8 As shown in the figure, the pressing member 60 includes an elastic deformation portion 61, a deformation limiting portion 62 and a supporting portion 63. The pressing member 60 is made of a material that has electrical insulation and can be elastically deformed. Although there is no particular limitation, as a specific material constituting the pressing member 60, for example, a resin material can be exemplified. The elastic deformation portion 61, the deformation limiting portion 62 and the supporting portion 63 are integrally formed by resin molding. It should be noted that the pressing member 60 can also be made of a metal material. In this case, an insulating layer is formed by performing an insulating treatment on the surface of the pressing member 60.

[0067] In contrast, as described later, the electrical connection member 80 is a flexible printed wiring board. Therefore, in the present embodiment, the pressing member 60 and the electrical connection member 80 are composed of completely independent components. In this way, by making the pressing member 60 and the electrical connection member 80 independent of each other, the electrical constraints on the mechanical design can be minimized, and the pressing member 60 can be freely designed. For example, the elastic stroke (elastic deformation amount along the Z direction in the figure) of the pressing member 60 can be extended while minimizing the impact on the electrical performance, thereby expanding the range of the height deviation of the pad 24 caused by the warping and processing accuracy of the wiring board 23 of the DSA 20.

[0068] In addition, when a low temperature test (e.g., a test of a DUT at -50°C to -40°C) is performed in a device test apparatus, if the contact terminal is made of a metal material, heat is transferred to the motherboard via the conductor of the coaxial cable and the contact terminal, and the inside of the motherboard may be cooled and condensed. In contrast, by making the pressing member 60 of a resin material, heat transfer from the cavity 131 of the processor 130 to the inside of the motherboard 30 can be suppressed, and condensation can be suppressed inside the motherboard 30. In addition, since the Young's modulus of the resin material is relatively low, a large elastic stroke can be ensured even in a narrow space.

[0069] The elastic deformation portion 61 is a portion extending along the pressing direction of the pressing member 60 (Z direction in the figure). The deformation limiting portion 62 is also a portion extending along the pressing direction of the pressing member 60 (Z direction in the figure). In addition, the rear end portion of the elastic deformation portion 61 (the end on the -Z side in the figure) is connected to the support portion 63, and the rear end portion of the deformation limiting portion 62 (the end on the -Z side in the figure) is also connected. That is, the elastic deformation portion 61 and the deformation limiting portion 62 are supported by the support portion 63. It should be noted that in the contact terminal 50, the pad 24 side (the +Z direction side in the figure) is the front, and in the contact terminal 50, the coaxial cable 100 side is the rear (the -Z direction side in the figure), so the above-mentioned pressing direction is also the front-to-back direction of the contact terminal 50.

[0070] like Figure 6 and Figure 7 As shown, a plurality of (seven in this embodiment) contact portions 70 are provided at the front end portion 611 of the elastic deformation portion 61. Each contact portion 70 extends linearly from the front end 611b of the front end portion 611 to the rear of the elastic deformation portion 61, and has a length L b (Refer to Figure 5 ). The plurality of contact portions 70 are arranged at intervals from each other. It should be noted that the number of contact portions 70 provided in the contact terminal 50 is not particularly limited to the above.

[0071] Each contact portion 70 is a thin film formed on the surface of the front end portion 611, that is, the front end region 611a. The front end region 611a refers to an area extending from the front end 611b to the rear side in the front end portion 611 of the elastic deformation portion 61, and the front end 611b is included in the front end region 611a. The thin film is made of a conductive material. Although not particularly limited, as a material constituting the contact portion 70, a metal material such as copper can be exemplified. The thin film is, for example, a plating layer formed by a plating method such as electrolytic plating and electroless plating. It should be noted that the method for forming the thin film of the contact portion 70 is not limited to the above-mentioned plating method. For example, the contact portion 70 can also be formed by a physical vapor deposition method (PVD) such as vacuum evaporation and sputtering, or a chemical vapor deposition method (CVD).

[0072] In addition, the contact portion 70 may be formed of a metal foil instead of the above-mentioned film. Although not particularly limited, examples of the metal foil forming the contact portion 70 include copper foil and silver-plated foil. In this case, the pressing member 60 and the contact portion 70 are integrated by insert molding. Alternatively, the contact portion 70 may be fixed to the pressing member 60 by an adhesive.

[0073] In this embodiment, the plurality of contact portions 70 include three signal contact portions 71 and four ground contact portions 72. Each signal contact portion 71 is disposed between the ground contact portions 72. The signal contact portion 71 is connected to a signal line 85 (described later) of the electrical connection member 80. On the other hand, the ground contact portion 72 is connected to a ground line 86 (described later) of the electrical connection member 80.

[0074] like Figure 8 As shown, the elastic deformation portion 61 is a leaf spring and has a generally bow-shaped (generally arc-shaped) shape that protrudes as a whole in the +X direction in the figure. The elastic deformation portion 61 includes: the above-mentioned front end portion 611 on which the contact portion 70 is provided, and a spring portion 612 that elastically deforms to press the front end portion 611 toward the pad 24. The front end portion 611 and the spring portion 612 are formed integrally. The front end portion 611 holds a plurality of contact portions 70. That is, a plurality of contact portions 70 are provided in a single (one) front end portion 611 (the same front end portion 611). Therefore, the relative positional relationship between the contact portions 70 can be ensured with high precision, and the occurrence of short circuits between adjacent pads 24 caused by the contact portions 70 can be suppressed. As shown Figure 8 As shown by the dotted line, the spring portion 612 of the elastic deformation portion 61 can be elastically deformed when the front end 611b of the elastic deformation portion 61 is pressed by the pad 24. That is, the elastic deformation portion 61 has a resin spring. On the other hand, when the pressing member 60 is made of a metal material, the elastic deformation portion 61 has a metal spring. Figure 8 , the contact portion 70 is omitted.

[0075] Here, if Figure 8 As shown, the imaginary straight line VL passing through the front end 611b of the elastic deformation portion 61 deviates from the center line CL of the support portion 63. More specifically, the imaginary straight line VL deviates from the center line CL in the direction opposite to the protruding direction of the bow shape of the elastic deformation portion 61 (-X direction in the figure). Therefore, the contact portion 70 can be rubbed (scrubbed) with the pad 24, and a good electrical connection between the contact terminal 50 and the pad 24 can be ensured. It should be noted that the above-mentioned imaginary straight line VL and the center line CL are both straight lines parallel to the pressing direction (Z direction in the figure) of the pressing member 60.

[0076] The deformation restricting portion 62 has a contact portion 621 at the front end of the deformation restricting portion 62. The contact portion 621 is located at a position closer to the rear end side (-Z direction side in the figure) than the front end 611b of the elastic deformation portion 61. Figure 8 As shown by the middle dotted line, when the front end 611 b of the elastic deformation portion 61 is pressed by the pad 24 , the abutment portion 621 abuts against the pad 24 , thereby suppressing damage to the elastic deformation portion 61 due to excessive deformation.

[0077] In the present embodiment, a plurality of pressing members that independently hold a plurality of contact portions 70 are integrated as one pressing member 60. Therefore, the relative positional relationship between the contact portions 70 can be ensured with high precision, and the occurrence of short circuits between adjacent pads 24 caused by the contact portions 70 can be suppressed. In addition, by forming a plurality of pressing members as one pressing member 60 from a resin material, the contact terminal 50 can be made low-cost. It should be noted that the contact terminal 50 may also include a plurality of pressing members that independently hold a plurality of contact portions 70. Alternatively, for example, the pressing member may include a plurality of elastic deformation portions that independently hold a plurality of contact portions 70, a plurality of deformation limiting portions may be integrated into one deformation limiting portion 62, a plurality of supporting portions may also be integrated into one supporting portion 63, and one supporting portion 63 may support a plurality of elastic deformation portions and one deformation limiting portion 62.

[0078] The electrical connection member 80 is composed of a flexible printed circuit board (FPC). In the present embodiment, as described above, the pressing member 60 and the electrical connection member 80 are independent members, so the FPC can be used as the electrical connection member 80, and a transmission line with transmission performance for transmitting high-frequency signals can be designed independently of the design of the pressing member 60.

[0079] like Fig. 9 and Fig.10 As shown, the electrical connection component 80 (hereinafter also referred to as "FPC80") comprises: first to fourth insulating layers 81 to 84, multiple (3 in this embodiment) signal lines 85, multiple (4 in this embodiment) grounding lines 86, and a first grounding layer 87 and a second grounding layer 88.

[0080] The first to fourth insulating layers 81 to 84 are all flexible films made of electrically insulating materials. Specific examples of materials constituting the first to fourth insulating layers 81 to 84 include polyimide (PI), liquid crystal polymer (LCP), and polyethylene terephthalate (PET).

[0081] like Fig.10As shown, a signal line 85 and a ground line 86 are provided on the lower surface of the first insulating layer 81. The signal line 85 functions as a transmission path for transmitting an electrical signal between the test head 110 and the DUT 200. On the other hand, the ground line 86 is connected to the ground line and functions as an electromagnetic shielding layer for shielding noise. In the above-mentioned device test apparatus 1, the electrical signal flowing through the signal line 85 is a high-frequency electrical signal, which is an electrical signal of 1 GHz or more or an electrical signal of 10 GHz or more.

[0082] The signal line 85 and the ground line 86 are formed, for example, by etching the copper foil stacked on the first insulating layer 81 into a given shape. Figure 6 , 7 As shown in FIG. 9 , the signal line 85 and the ground line 86 extend linearly from the end of the front end side (+Z direction side in the figure) of the electrical connection member 80 to the end of the rear end side (-Z direction side in the figure), and each has a length L a (Refer to Figure 5 and Fig. 9 ).

[0083] It should be noted that the number of wirings 85 and 86 provided in the FPC 80 is not particularly limited to the above number, and can be set according to the number of contact portions 70 provided in the contact terminal 50, for example. In addition, the shape and arrangement of the wirings 85 and 86 provided in the FPC 80 are not particularly limited to the above. Instead of replacing (swapping) the coaxial cable 100, the shape and arrangement of the wirings 85 and 86 of the FPC 80 can be changed.

[0084] like Fig.10 As shown in FIG. 1 , the second insulating layer 82 overlaps the lower surface of the first insulating layer 81 in a manner covering the signal line 85 and the ground line 86. The signal line 85 and the ground line 86 are arranged at intervals. Therefore, the entire periphery of the signal line 85 is surrounded by the resin material (insulator). It should be noted that the first insulating layer 81 and the second insulating layer 82 may be bonded by an adhesive having electrical insulation properties.

[0085] Thus, in this embodiment, the entire circumference of the signal line 85 is surrounded by the resin material, so even if the elastic stroke of the pressing member 60 is extended, the dielectric constant and thickness of the insulator existing around the signal line 85 do not change. Therefore, even when the pressing member 60 is elastically deformed, the electrical length of the signal line 85 is always constant, and the change of the impedance in the signal line 85 can be suppressed, so that the deviation of the transmission characteristics in the plurality of signal lines 85 can be suppressed. In addition, the entire circumference of the signal line 85 is surrounded by the resin material, thereby suppressing the generation of leakage current between the signal line 85 and the ground line 86.

[0086] The first ground layer 87 is arranged on the upper surface of the first insulating layer 81. Furthermore, the third insulating layer 83 overlaps the upper surface of the first insulating layer 81 in a manner covering the first ground layer 87. It should be noted that the first insulating layer 81 and the third insulating layer 83 may be bonded by an adhesive having electrical insulation properties. The first ground layer 87 is a so-called solid pattern, which is formed by etching a copper foil into a given shape. The first ground layer 87 is opposite to the signal line 85 via the first insulating layer 81. The first ground layer 87 is electrically connected to the ground line 86 via a through hole 871, and functions as an electromagnetic shielding layer for shielding noise.

[0087] On the other hand, the second grounding layer 88 is arranged on the lower surface of the second insulating layer 82. Furthermore, the fourth insulating layer 84 overlaps with the lower surface of the second insulating layer 82 in a manner covering the second grounding layer 88. It should be noted that the second insulating layer 82 and the fourth insulating layer 84 may be bonded by an adhesive having electrical insulation properties. The second grounding layer 88 is a so-called solid pattern, which is formed by etching a copper foil into a given shape. The second grounding layer 88 is opposite to the signal line 85 via the second insulating layer 82. In addition, the second grounding layer 88 is electrically connected to the grounding line 86 via the through hole 881, and functions as an electromagnetic shielding layer for shielding noise.

[0088] As described above, the FPC 80 of the present embodiment has a stripline structure in which the signal line 85 is surrounded by the ground line 86 and the ground layers 87 and 88. Thus, good shielding performance can be ensured, and even if the elastic stroke of the pressing member 60 is extended, the generation of crosstalk between the signal lines 85 can be suppressed, and the deviation of the transmission characteristics among the plurality of signal lines 85 can be suppressed. In addition, even if the signal lines 85 are densely arranged in the motherboard 30, the reduction of the crosstalk characteristics can be suppressed, so that both high density and wide bandwidth can be achieved. In addition, in the present embodiment, the electrical connection member 80 is an FPC, so the contact terminal 50 with high-density wiring can be made low-cost.

[0089] Here, as shown in the following formula (2), the length L of the signal contact portion 71 is b (Refer to Figure 5 ) relative to the length L of the signal line 85 of the FPC 80 a (Refer to Figure 5 and Fig. 9 That is, in the present embodiment, the strip line structure is maintained to the vicinity of the pad 24, so that good shielding performance can be ensured. L b <L a ×1 / 10···(2)

[0090] It should be noted that the structure of FPC80 is not particularly limited to the above. Fig.11As shown, the FPC 80 may also have a microstrip line structure. Fig.11 FIG. 1 is a partial cross-sectional view showing a first modified example of the electrical connection member 80 in the present embodiment. Fig.11 The FPC80 shown is Fig.10 The FPC 80 shown differs in that Fig.11 The FPC 80 shown does not include the fourth insulating layer 84 , the second ground layer 88 , and the through hole 881 .

[0091] In addition, if Fig.12 As shown, the FPC 80 may also have a slit 89 . Fig.12 80 in this embodiment. The slit 89 is arranged between the signal line 85 and the ground line 86, and penetrates the first to fourth insulating layers 81 to 84 in the thickness direction. Thus, the FPC 80 having a multi-layer structure can be made more flexible. It should be noted that the slit 89 only needs to be formed in at least one of the first to fourth insulating layers 81 to 84. In addition, the position of the slit 89 in the FPC 80 is not particularly limited to the above position.

[0092] In addition, if Fig.13 and Fig.14 As shown, a microstrip line structure may also be formed at the contact portion 70 . Fig.13 2 is a perspective view showing a contact portion 70 formed at a front end portion 611 of a pressing member 60 in another embodiment of the present invention. Fig.14 is a cross-sectional view of a front end portion 611 of a pressing member 60 in another embodiment of the present invention, taken along Fig.13 Diagram of the XIV-XIV line.

[0093] Specifically, if Fig.13 and Fig.14 As shown, a through hole 613 is formed in the front end portion 611 of the pressing member 60, a signal contact portion 71 is formed on one inner surface (-Z direction side in the figure) of the through hole 613, and a third ground layer 73 is formed on the other inner surface (+Z direction side in the figure) of the through hole 613. Therefore, the third ground layer 73 is spaced apart from the signal contact portion 71. The third ground layer 73 is electrically connected to the ground contact portion 72 adjacent to the signal contact portion 71 via the connecting portion 74. Thus, good shielding performance closer to the pad 24 can be ensured.

[0094] like Fig. 9 As shown, the FPC 80 does not have the second and fourth insulating layers 82 and 84 and the second ground layer 88 at both ends (both ends in the Z direction in the figure), and the signal line 85 and the ground line 86 are exposed in the -X direction in the figure.

[0095] Further, if Figures 5 to 7 As shown, the FPC 80 is mounted on the pressing member 60 in such a manner that the fourth insulating layer 84 is opposed to the elastic deformation portion 61. At this time, one end 851 (on the +Z direction side in the figure) of the signal line 85 is opposed to the signal contact portion 71, and one end 861 (on the +Z direction side in the figure) of the ground line 86 is opposed to the ground contact portion 72. Moreover, the end 851 of the signal line 85 is connected to the signal contact portion 71, for example, via a conductive film (ACF). Similarly, the end 861 of the ground line 86 is also connected to the ground contact portion 72, for example, via a conductive film (ACF). One end (on the +Z direction side in the figure) of the FPC 80 is fixed to the pressing member 60 via the conductive film.

[0096] It should be noted that the contact portions 71 and 72 may be connected to the wirings 85 and 86 by a conductive adhesive instead of a conductive film. Alternatively, the end of the FPC 80 may be fixed to the pressing member 60 by mechanical means such as screws and clamps, thereby connecting the contact portions 71 and 72 to the wirings 85 and 86. Alternatively, the end of the FPC 80 may be fixed to the pressing member 60 and the contact portions 71 and 72 may be connected to the wirings 85 and 86 by reducing the pressure in the tube surrounding the end of the FPC 80 and the pressing member 60. Alternatively, in the case where the contact portions 71 and 72 are thin films, the contact portions 71 and 72 may be connected to the wirings 85 and 86 during the above-mentioned insert molding.

[0097] As described above, the pressing member 60 and the electrical connection member 80 are fixed only at the front end portion of the electrical connection member 80, and are not fixed at the portion other than the front end portion. Therefore, the electrical connection member (FPC) 80 can be deformed relatively freely relative to the pressing member 60. It should be noted that the pressing member 60 and the electrical connection member 80 may also be fixed at the portion other than the front end portion of the electrical connection member 80 by an adhesive or the like.

[0098] The contact terminal 50 described above is supported by the wiring board 90. Although not particularly limited, the support portion 63 of the pressing member 60 is fixed to the edge of the wiring board 90 via the fixing member 95, so that the contact terminal 50 is supported by the wiring board 90. It should be noted that the method of fixing the contact terminal 50 to the wiring board 90 is not particularly limited to the above method.

[0099] The wiring board 90 is a rigid wiring board having a substrate 91, a signal line 92, and a ground line 93. The substrate 91 is made of an electrically insulating material such as glass epoxy resin. The signal line 92 and the ground line 93 are provided on the upper surface of the substrate 91. The signal line 92 and the ground line 93 extend linearly from the end of the front end side (the +Z direction side in the figure) of the wiring board 90 toward the rear end side (the -Z direction side in the figure), and are arranged at intervals. The signal line 92 and the ground line 93 are formed by etching copper foil into a given shape. Although not specifically shown in the figure, the wiring board 90 has a ground layer inside. It should be noted that the signal line 92 and the ground line 93 can also pass through the inside of the wiring board 90.

[0100] It should be noted that the number of wirings 92 and 93 provided on the wiring board 90 is not particularly limited to the above number, and can be set according to the number of contact portions 70 provided on the contact terminal 50, for example. In addition, the shape and arrangement of the wirings 92 and 93 provided on the wiring board 90 are not particularly limited to the above. Instead of replacing (swapping) the coaxial cable 100, the shape and arrangement of the wirings 92 and 93 of the wiring board 90 may be changed.

[0101] Furthermore, the FPC 80 supported by the contact terminal 50 of the wiring board 90 is connected to the wiring board 90. Specifically, Figure 6 As shown, the other end 852 (-Z direction side in the figure) of the signal line 85 of the FPC 80 is opposite to the one end 921 (+Z direction side in the figure) of the signal line 92 of the wiring board 90, and the other end 862 (-Z direction side in the figure) of the ground line 86 of the FPC 80 is opposite to the one end 931 (+Z direction side in the figure) of the ground line 93 of the wiring board 90. In addition, the ends 852 and 921 of the signal lines 85 and 92 are connected to each other via a conductive film (ACF), for example. Similarly, the ends 862 and 931 of the ground lines 86 and 93 are also connected to each other via a conductive film (ACF), for example.

[0102] exist Figures 3 to 5 In the embodiment, the lower terminal assembly 40 has two contact terminals 50 connected to the upper and lower surfaces of the wiring board 90, respectively, so the wiring board 90 has wiring 92 and 93 on the upper and lower surfaces. The two contact terminals 50 are arranged in a manner that the deformation limiting portion 62 of the pressing member 60 contacts each other. Figures 3 to 5 In the embodiment, the upper terminal assembly 40 may also include two upper and lower contact terminals 50. Figure 3 and Figure 4In the figure, only one contact terminal 50 is arranged in the longitudinal direction (Y direction in the figure) of the wiring board 90, but in fact, a plurality of contact terminals 50 are arranged in the longitudinal direction (Y direction in the figure) of the wiring board 90. Alternatively, one contact terminal 50 may have a width corresponding to the entire area of ​​the wiring board 90 in the longitudinal direction (Y direction in the figure).

[0103] The coaxial cable 100 is connected to the terminal assembly 40 described above. Figure 5 and Figure 6 As shown, the inner conductor 101 of the coaxial cable 100 is connected to the other end 922 (-Z direction side in the figure) of the signal line 92 of the wiring board 90 by welding or the like. In addition, the outer conductor 102 (for example, a braided shield) of the coaxial cable 100 is connected to the other end 932 (-Z direction side in the figure) of the ground line 93 of the wiring board 90 via the connecting member 105.

[0104] In addition, if Figure 2 As shown, the wiring board 23 of the DSA 20 is fixed to the wiring board 90 of the terminal assembly 40 by the bolts 25, thereby mounting the DSA 20 on the motherboard 30. With the fixing of the bolts 25, all the pads 24 of the DSA 20 are simultaneously contacted with and pressed by all the contact portions 70 provided in all the terminal assemblies 40, and the contact portions 70 electrically connect the DSA 20 to the motherboard 30. It should be noted that the method of fixing the DSA 20 to the motherboard 30 is not particularly limited to the above method, and for example, mechanical clamping or the like may also be used.

[0105] As described above, in this embodiment, the pressing member 60 and the electrical connecting member 80 are independent members, so the mutual constraints between the designs of the pressing member 60 and the electrical connecting member 80 can be reduced, and the degree of freedom in the design of the contact terminal 50 can be improved.

[0106] In addition, in the present embodiment, the pressing member 60 and the electrical connection member 80 are independent members. Therefore, by changing the shape of the pressing member 60 without changing the electrical connection member 80 , various pressing forces and elastic strokes can be achieved while maintaining electrical performance.

[0107] In addition, in this embodiment, the pressing member 60 and the electrical connection member 80 are independent components, so FPC can be used as the electrical connection member 80, and a transmission line with transmission performance for transmitting high-frequency signals (the above-mentioned impedance matching, shielding performance, etc.) can be designed independently from the design of the pressing member 60.

[0108] It should be noted that the above-described embodiments are described to facilitate understanding of the present invention, and are not described to limit the present invention. Therefore, each element disclosed in the above-described embodiments also includes all design changes and equivalents that belong to the technical scope of the present invention.

[0109] For example, in the above-described embodiment, the elastic deformation portion 61 of the pressing member 60 of the contact terminal 50 includes a resin spring, but the elastic deformation portion 61 may include a metal spring or an air spring. Fig.15 (a) to 15(c) are cross-sectional views showing pressing members 60B to 60D as first to third modified examples of the pressing member in the present embodiment.

[0110] Fig.15 The elastic deformation portion 61B of the pressing member 60B shown in (a) includes a front end member (front end portion) 614 and a leaf spring (spring portion) 615. The front end member 614 is fixed to the front end of the leaf spring 615. The front end member 614 is made of a material having electrical insulation properties. Although not particularly limited, as a specific material constituting the front end member 614, for example, a resin material can be exemplified. The contact portion 70 is provided in the front end region 611a of the front end member 614. Figure 6 and Figure 7 Similarly to the elastic deformation portion 61 shown, a plurality of contact portions 70 are provided on a single (one) front end member 614 (the same front end member 614). Therefore, the relative positional relationship between the contact portions 70 can be ensured with high precision, and the occurrence of short circuits between adjacent pads 24 caused by the contact portions 70 can be suppressed. Furthermore, the electrical connection member 80 is connected to the contact portion 70 provided on the front end member 614.

[0111] On the other hand, the leaf spring 615 is made of a metal material and can be elastically deformed when the front end member 614 is pressed by the pad 24. That is, the pressing member 60B includes a metal spring. The rear end portion of the leaf spring 615 is supported by the support portion 63.

[0112] Fig.15 The elastic deformation portion 61C of the pressing member 60C shown in (b) includes a front end member (front end portion) 614, a shaft 616, and a coil spring (spring portion) 617. The front end member 614 is fixed to the front end of the shaft 616. On the other hand, the rear end of the shaft 616 is supported by the support portion 63. The shaft 616 can be extended and retracted in the pressing direction (Z direction in the figure) of the pressing member 60C.

[0113] The coil spring 617 is made of a metal material, and the shaft 616 is inserted into the coil spring 617. The coil spring 617 is sandwiched between the front end member 614 and the support portion 63 in a compressed state. That is, the pressing member 60C includes a metal spring. It should be noted that the coil spring 617 may also be made of a resin material, in which case the pressing member 60C includes a resin spring.

[0114] Fig.15 The elastic deformation portion 61D of the pressing member 60D shown in (c) includes a front end member (front end portion) 614 and an air spring 618 (spring portion). The air spring 618 includes a front plate portion 618a, a rear plate portion 618b and a bellows portion 618c. The bellows portion 618c is a cylinder that expands and contracts in the pressing direction of the pressing member 60C (Z direction in the figure). The bellows portion 618c is located between the front plate portion 618a and the rear plate portion 618b, and an air chamber (enclosed space) 618d that airtightly contains air is formed by the front plate portion 618a, the rear plate portion 618b and the bellows portion 618c. The front end member 614 is fixed to the front plate portion 618a of the air spring 618. When the front end member 614 is pressed by the pad 24, the air spring 618 is compressed by the air chamber 618d to push the contact portion 70 back toward the pad 24. Fig.15 In the example shown in (c), the air spring 618 is supported by the support portion 63 via the pipe 65 , but the present invention is not limited thereto, and the air spring 618 may be directly fixed to the support portion 63 .

[0115] like Fig.15 As shown in (c), the air supply device 66 may also be connected to the air spring 618 via a pipe 65. A valve 67 is provided on the pipe 65, and by opening and closing the valve 67, the air chamber 618d of the air spring 618 can be sealed, or the air chamber 618d can be connected to the air supply device 66. By opening the valve 67 and supplying air from the air supply device 66, the pressure in the air chamber 618d can be adjusted. As a specific example of the air supply device 66, a pump can be exemplified. It should be noted that when the air supply device 66 is not connected to the air spring 618, the air chamber 618d is a closed space filled with air.

[0116] In the above-mentioned present embodiment, the electrical connection member 80 is composed of a single FPC, but the electrical connection member 80 may be divided. In this case, the contact terminal 50 includes a plurality of FPCs. Alternatively, a thin-wire coaxial cable may be used as the electrical connection member 80 instead of the FPC. Description of Reference Numerals

[0117] 1…Device test equipment 10…Tester 20…DSA 21…Test socket 23…Wiring board 24…Pad 30…Motherboard 40…Terminal assembly 50…Contact terminal 60, 60B~60D…Pressing member 61, 61B to 61D… elastic deformation portion 611…Front end 612…Spring part 614…Front-end components 615…Leaf spring 616…Axis 617…Coil spring 618…Air spring 62…Deformation limiting part 621…butt part 63…Support 70…Contact Department 71...Signal contact part 72…Ground contact 73…Third ground layer 74…Connection 80…Electrical connection components (FPC) 81 to 84 ... first to fourth insulating layers 85…Signal line 851, 852...end 86…Ground wire 87, 88…First and second ground layers 90...Wiring board 91…Base material 92…Signal line 921, 922...end 93…Ground wire 931, 932...end 100···Coaxial cable 110…Test head 120…Main frame 130…Processor 200…DUT.

Claims

1. A contact terminal, comprising: a contact portion that can detachably contact the first conductive member; a pressing member that presses the contact portion relatively with respect to the first conductive member; and an electrical connection member having a first conductive path connected to the contact portion, The pressing member and the electrical connecting member are independent members from each other.

2. The contact terminal according to claim 1, wherein: The pressing member includes an elastic deformation portion that is elastically deformed when the contact portion is pressed relative to the first conductive member.

3. The contact terminal according to claim 2, wherein: When the elastic deformation portion is deformed, the electrical length of the first conductive path is constant.

4. The contact terminal according to claim 2, wherein: The electrical connection member includes an insulator surrounding the entire circumference of the first conductive path.

5. The contact terminal according to claim 2, wherein: The elastic deformation part includes a resin spring, a metal spring, or an air spring. The resin spring is made of resin material and elastically deforms when the contact part is relatively pressed relative to the first conductive member. The metal spring is made of metal material and elastically deforms when the contact part is relatively pressed relative to the first conductive member. The air spring is compressed by the relative pressing of the contact part relative to the first conductive member.

6. The contact terminal according to claim 2, wherein: The pressing member is made of a resin material. The elastic deformation portion includes a resin spring that elastically deforms when the contact portion is pressed relative to the first conductive member.

7. The contact terminal according to claim 6, wherein: The contact terminal includes a plurality of contact portions. The electrical connection member includes a plurality of the first conductive paths connected to the plurality of contact portions. The pressing member includes a plurality of elastic deformation portions corresponding to the plurality of contact portions. The plurality of elastic deformation portions are integrally formed.

8. The contact terminal according to claim 1, wherein: The contact terminal includes a plurality of contact portions. The electrical connection member includes a flexible printed wiring board having flexibility, The flexible printed wiring board includes a plurality of the first conductive paths connected to the plurality of contact portions.

9. The contact terminal according to claim 8, wherein: The flexible printed wiring board comprises: a first insulating layer; the plurality of first conductive paths being disposed on the first insulating layer; and A second insulating layer overlaps the first insulating layer in a manner of covering the plurality of first conductive paths.

10. The contact terminal according to claim 9, wherein: The plurality of first conductive paths are arranged on the first insulating layer at intervals.

11. The contact terminal according to claim 9, wherein: The flexible printed wiring board has slits arranged between the plurality of first conductive paths.

12. The contact terminal according to claim 10, wherein: The plurality of first conductive paths include: Multiple ground wires; and A plurality of signal lines are respectively arranged between the ground lines.

13. The contact terminal according to claim 12, wherein: The flexible printed wiring board includes a first ground layer provided on the first insulating layer and facing the signal line via the first insulating layer.

14. The contact terminal according to claim 12, wherein: The flexible printed wiring board includes a second ground layer provided on the second insulating layer and facing the signal line via the second insulating layer.

15. The contact terminal according to claim 12, wherein: The contact portion comprises: a signal contact portion connected to the signal line; and A ground contact portion connected to the ground line.

16. The contact terminal according to claim 15, wherein: The contact terminal includes a third ground layer electrically connected to the ground contact portion. The pressing member has a through hole through which the signal contact portion passes. The third ground layer is disposed in the through hole so as to face the signal contact portion with a gap therebetween.

17. The contact terminal according to claim 1, wherein: The contact portion includes a metal layer held by the pressing member, The metal layer is disposed at a front end portion of the pressing member.

18. The contact terminal according to claim 17, wherein: The metal layer extends linearly at the front end portion, And satisfy the following formula (1), L b <L a ×1 / 10···(1) In the above formula (1), L a is the length of the first conductive path, L b is the length of the metal layer.

19. The contact terminal according to claim 17, wherein: The contact terminal includes a plurality of contact portions. The plurality of contact portions are provided at a single front end portion.

20. The contact terminal according to claim 1, wherein: The pressing member comprises: an elastic deformation portion that is elastically deformed when the contact portion is relatively pressed against the first conductive member; and A supporting portion supports the elastic deformation portion.

21. The contact terminal according to claim 20, wherein: The pressing member is made of a resin material. The elastic deformation portion and the support portion are integrally formed.

22. The contact terminal according to claim 20, wherein: An imaginary straight line passing through the front end of the pressing member and parallel to the center line of the support portion is offset from the center line.

23. The contact terminal according to claim 1, wherein: The pressing member comprises: an elastic deformation portion that is elastically deformed when the contact portion is relatively pressed against the first conductive member; and A deformation restricting portion restricts elastic deformation of the elastic deformation portion by abutting against the first conductive member.

24. The contact terminal according to claim 23, wherein: The pressing member is made of a resin material. The elastic deformation portion and the deformation restricting portion are integrally formed.

25. The contact terminal according to claim 24, wherein: The pressing member includes a supporting portion that supports the elastic deformation portion and the deformation restriction portion. The elastic deformation portion, the deformation restriction portion, and the support portion are integrally formed.

26. A terminal assembly comprising: A plurality of contact terminals according to any one of claims 1 to 25; and A supporting member supports the plurality of contact terminals.

27. The terminal assembly according to claim 26, wherein: The supporting member includes a wiring board having a second conductive path. The first conductive path is connected to the second conductive path.

28. A device testing apparatus, which is a device testing apparatus for testing a DUT and comprises: a first conductive member; a second conductive member; and The terminal assembly according to claim 26, The first conductive path of the contact terminal is electrically connected to the second conductive member, The contact terminal electrically connects the first conductive member and the second conductive member.

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