High-voltage and high-frequency pulse power supply device for driving excimer lamp

Abstract

The invention discloses a high-voltage high-frequency pulse power supply device for driving an excimer lamp, and the device comprises a rectification filtering module which is used for accessing a 220V AC power supply, rectifying the accessed 220V AC power supply into a 400V DC voltage, carrying out the filtering processing of the 400V DC voltage, and supplying power to a high-frequency boost conversion module; the intelligent control unit is used for calculating the voltage required for luminance build-up or discharge maintenance of the excimer lamp in real time and controlling the high-frequency boost conversion module to adjust the output voltage into the voltage required by the excimer lamp; the high-frequency boost conversion module is used for adjusting the 400V direct-current voltage into the voltage required by the excimer lamp; and the pulse intelligent control unit is used for generating a pulse signal from the voltage required by the excimer lamp converted by the high-frequency boost conversion module and transmitting the pulse signal to the shaping matching module. The device solves the problems that an existing driving power source is long in luminance build-up time, low in efficiency, poor in output waveform stability and the like, the sterilization efficiency and intelligence are improved, and the application range of the excimer lamp is widened.

Description

Technical Field

[0001] The present invention relates to the technical field of excimer lamps, and particularly to a high-voltage high-frequency pulse power supply device for driving an excimer lamp. Background Art

[0002] Compared with the traditional 254nm ultraviolet sterilization technology, the 222nm ultraviolet sterilization lamp is harmless to the human body and has been widely used for the sanitation and disinfection in public places. However, most general excimer driving power supplies output sine waves, which do not have as high excitation efficiency as high-frequency pulses. The excitation efficiency of the sine-wave drive for 222nm is only about 5% to 6%. Most of the power is dissipated through heat and does not become useful light waves. Therefore, it is necessary to design a high-voltage high-frequency pulse excimer lamp power supply to improve the excitation efficiency, ensure uniform light emission of the ultraviolet sterilization lamp, quickly and effectively kill microorganisms, and improve the sterilization effect. Summary of the Invention

[0003] To solve the technical problems in the background art, the present invention proposes a high-voltage high-frequency pulse power supply device for driving an excimer lamp.

[0004] The high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention includes:

[0005] A rectification and filtering module, which is used to connect to a 220V AC power supply, rectify the connected 220V AC power supply into a 400V DC voltage, and then filter the 400V DC voltage to supply power to the high-frequency boost conversion module;

[0006] An intelligent control unit, which is used to calculate in real time the voltage required when the excimer lamp starts or discharges and maintains, and control the high-frequency boost conversion module to adjust the output voltage to the voltage required by the excimer lamp;

[0007] A high-frequency boost conversion module, which is used to adjust the 400V DC voltage to the voltage required by the excimer lamp;

[0008] A pulse intelligent control unit, which is used to generate a pulse signal from the voltage required by the excimer lamp after being converted by the high-frequency boost conversion module and transmit it to the shaping and matching module;

[0009] A shaping and matching module, which is used to receive the pulse signal from the pulse intelligent control unit, optimize the edge characteristics of the pulse signal, and at the same time achieve the best impedance matching with the excimer lamp load.

[0010] Preferably, it further includes: a data acquisition module, which is used to collect in real time the discharge frequency, current and voltage of the excimer lamp, and transmit the collected discharge frequency, current and voltage in real time to the intelligent control unit.

[0011] Preferably, the data acquisition module specifically includes:

[0012] A voltage sampling circuit, which is used to collect the voltage values at both ends of the excimer lamp and feed back the voltage values at both ends of the excimer lamp to the intelligent control unit;

[0013] A current sampling circuit, which is used to collect the current value of the excimer lamp and feed back the current value of the excimer lamp to the intelligent control unit;

[0014] A discharge frequency detection circuit, which is used to collect the discharge frequency of the excimer lamp and feed back the collected discharge frequency to the intelligent control unit.

[0015] Preferably, in the intelligent control unit, the voltage required for the excimer lamp to start or maintain discharge is calculated in real time, specifically including:

[0016] Calculating the actual power according to the fed-back current value and voltage value of the excimer lamp;

[0017] Obtaining the rated power of the excimer lamp, comparing the actual power of the excimer lamp with the rated power to obtain the ratio of the actual power to the rated power;

[0018] Performing PID operation according to the obtained ratio of the actual power to the rated power, converting the obtained control quantity into the change of the frequency and duty cycle of the output gate drive circuit PWM, adjusting the current and the voltage of the high-voltage DC power supply, realizing negative feedback regulation, and ensuring that the power applied to the excimer lamp is stable at the rated power without change.

[0019] Preferably, the high-frequency boost conversion module specifically includes:

[0020] A full-bridge inverter circuit, which is used to perform high-frequency conversion of 400V DC voltage through a full-bridge inverter topology to obtain the 400V DC voltage after high-frequency conversion;

[0021] A boost circuit, which is used to boost the 400V DC voltage after high-frequency conversion to the high voltage required for the excimer lamp to start or maintain discharge.

[0022] Preferably, the voltage adjustable range of the high-frequency boost conversion module is specifically 4KV - 6KV.

[0023] Preferably, it further includes: an auxiliary power supply module, which is used to convert 220V alternating current into 12V direct current to supply power to the intelligent control unit and the protection circuit module.

[0024] Preferably, the auxiliary power supply module specifically includes:

[0025] A DCDC flyback converter, which steps down the 220v alternating current after rectification and filtering, is controlled by UC3842, and then outputs 12V direct current after rectification and filtering to supply power to subsequent components.

[0026] Preferably, it further includes a protection circuit module for protecting the excimer lamp and preventing the excimer lamp from being damaged due to overvoltage, overcurrent or short circuit.

[0027] In the present invention, the proposed high-voltage high-frequency pulse power supply device for driving an excimer lamp solves the problems of long starting time, low efficiency, poor output waveform stability, etc. existing in the existing driving power supply, expands the application range of the excimer lamp, ensures the voltage and power stability of the excimer lamp under various working conditions, improves the efficiency and stability of the power supply device, and at the same time the protection circuit module effectively prevents the excimer lamp from being damaged due to abnormal conditions and prolongs the service life of the lamp. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the device architecture of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0029] Figure 2 It is a 4000v DC flow chart of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0030] Figure 3 It is a schematic diagram of a full-bridge inverter of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0031] Figure 4 It is a schematic diagram of the structure of a DCDC flyback converter of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0032] Figure 5 It is a schematic diagram of the UC3842 control structure of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0033] Figure 6 It is a schematic diagram of the structure of a gate drive sicmos tube of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0034] Figure 7 It is a schematic diagram of the structure of a shaping circuit of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0035] Figure 8 It is a schematic diagram of the structure of a current sampling circuit of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0036] Figure 9 It is a schematic diagram of the structure of a voltage sampling circuit of a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention;

[0037] Figure 10Schematic diagram of a frequency sampling circuit for a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention. Detailed implementation manners

[0038] Refer to Figures 1 - 10 , a high-voltage high-frequency pulse power supply device for driving an excimer lamp proposed by the present invention includes:

[0039] A rectifier-filter module for connecting to a 220V AC power supply, rectifying the connected 220V AC power supply into a 400V DC voltage, and then filtering the 400V DC voltage to supply power to the high-frequency boost conversion module.

[0040] An intelligent control unit for calculating in real time the voltage required for the excimer lamp to start or maintain discharge, and controlling the high-frequency boost conversion module to adjust the output voltage to the voltage required by the excimer lamp.

[0041] A high-frequency boost conversion module for adjusting the 400V DC voltage to the voltage required by the excimer lamp.

[0042] A pulse intelligent control unit for generating a pulse signal from the voltage required by the excimer lamp after being converted by the high-frequency boost conversion module and transmitting it to the shaping and matching module.

[0043] A shaping and matching module for receiving the pulse signal from the pulse intelligent control unit, optimizing the edge characteristics of the pulse signal, and achieving the best impedance matching with the excimer lamp load.

[0044] In this embodiment, as Figure Two shown, the 220V alternating current is rectified and filtered to obtain 400V direct current, and the high-voltage DC power supply circuit uses a full-bridge soft-switching inverter circuit (such as Figure Three ) and a DC-DC booster to raise the voltage to a high-voltage direct current of 4000V - 6000V and apply it to both ends of the load (222nm excimer lamp).

[0045] On the other hand, after the 220V alternating current passes through the rectifier-filter circuit, it is stepped down by a DC-DC flyback converter ( Figure Four ), controlled by UC3842 ( Figure Five ), and then rectified and filtered to output 12V direct current to supply power to subsequent components. The subsequent pulse control module is controlled by an intelligent control unit based on a microcontroller. It includes a push-pull gate drive circuit to drive a silicon carbide MOSFET as a switch (such as Figure Six), the silicon carbide device can use a thinner epitaxial layer, thus significantly reducing the on-resistance of the device. This enables the silicon carbide MOSFET to operate stably in a high-voltage environment, with a voltage range of 800V to 3300V or even higher. The gate drive circuit drives the DS stage of the silicon carbide MOSFET to conduct and turn off, causing the circuit to continuously open and close under high DC voltage, ultimately forming a high-voltage pulsed current across the 222nm excimer lamp load. By controlling the switching interval of the silicon carbide MOSFET to determine the pulse width of the entire cycle, controllable pulsed discharge is achieved. Depending on the power of the excimer lamp, the size of the lamp tube, and the structure of the electrodes, etc., the output frequency can be adjusted from 20k to 100kHz, specifically determined by the power of the 222nm excimer lamp load. Then, an RC network is used to shape the output waveform ( Figure Seven ), optimize the edge characteristics of the pulse, and simultaneously achieve the best impedance matching with the excimer lamp load.

[0046] Specifically, it further includes: a data acquisition module for real-time collecting the discharge frequency, current, and voltage of the excimer lamp, and transmitting the real-time collected discharge frequency, current, and voltage to the intelligent control unit.

[0047] Specifically, the data acquisition module specifically includes:

[0048] A voltage sampling circuit for collecting the voltage value across the excimer lamp and feeding back the voltage value across the excimer lamp to the intelligent control unit;

[0049] A current sampling circuit for collecting the current value of the excimer lamp and feeding back the current value of the excimer lamp to the intelligent control unit;

[0050] A discharge frequency detection circuit for collecting the discharge frequency of the excimer lamp and feeding back the collected discharge frequency to the intelligent control unit.

[0051] In this embodiment, the voltage sampling circuit ( Figure Eight ), the current sampling circuit ( Figure Nine ), and the discharge frequency detection circuit ( Figure Ten ) are connected to the main control circuit of the intelligent control unit to complete the real-time collection of circuit data, and then information such as the actual power of the circuit is obtained. The voltage sampling circuit divides the voltage by connecting multiple resistors at the output end of the high-voltage power supply. After voltage following by an operational amplifier across a voltage-dividing resistor, it is then input to the main control ADC for sampling. The current sampling circuit amplifies through a sampling resistor and a differential operational amplifier. After voltage division, the sampling resistor passes through a differential follower operational amplifier circuit and then through an RC low-pass filter for filtering and input to the ADC for sampling. The discharge frequency detection circuit uses a comprehensive peak detection circuit to amplify the signal to different degrees according to the peak, and the other path is input to the ADC for signal acquisition.

[0052] Specifically, in the intelligent control unit, the voltage required for the excimer lamp to start or maintain discharge is calculated in real time, specifically including:

[0053] Calculate the actual power based on the feedback current value and voltage value of the excimer lamp;

[0054] Obtain the rated power of the excimer lamp, compare the actual power and the rated power of the excimer lamp to obtain the ratio of the actual power to the rated power;

[0055] Perform PID operation according to the obtained ratio of the actual power to the rated power, convert the obtained control quantity into the change of the frequency and duty cycle of the output gate drive circuit PWM, adjust the current and the voltage of the high-voltage DC power supply, realize negative feedback regulation, and ensure that the power applied to the excimer lamp is stable at the rated power without change.

[0056] Specifically, the high-frequency boost conversion module specifically includes:

[0057] A full-bridge inverter circuit for realizing high-frequency conversion of 400V DC voltage through a full-bridge inverter topology to obtain the high-frequency converted 400V DC voltage;

[0058] A boost circuit for boosting the 400V DC voltage after high-frequency conversion to the high voltage required for the excimer lamp to start or maintain discharge.

[0059] In this embodiment, the voltage adjustable range of the high-frequency boost conversion module is specifically 4KV - 6KV.

[0060] In this embodiment, it further includes: an auxiliary power supply module for converting 220V AC into 12V DC to supply power to the intelligent control unit and the protection circuit module.

[0061] In this embodiment, the auxiliary power supply module specifically includes:

[0062] A DCDC flyback converter, which steps down the 220v AC after rectification and filtering, is controlled by UC3842, and then outputs 12V DC after rectification and filtering to supply power to subsequent components.

[0063] In this embodiment, it further includes: a protection circuit module for protecting the excimer lamp to prevent the excimer lamp from being damaged by overvoltage, overcurrent or short circuit.

[0064] In this embodiment, a human-machine interaction device is added to the main control of the intelligent control system. The rated power of the 222nm excimer lamp is set through the upper computer communication interface. The main control compares the actual power on the load with the rated power, performs PID operation based on the obtained waveform value, and converts the calculated control quantity into the change of the frequency and duty cycle of the PWM output to the gate drive circuit, adjusting the current and the voltage of the high-voltage DC power supply to achieve a negative feedback regulation, ensuring that the power applied to the 222nm excimer lamp is stable at the rated power. The 222nm excimer lamp receives a high-frequency high-voltage pulsed current and completes its operation through DBD dielectric barrier discharge. At the same time, an alarm device, a short-circuit protection circuit, an overvoltage protection circuit, and an anti-reverse connection protection circuit are added to the main control. When the main control identifies abnormal conditions such as the discharge frequency and current, it alarms through a buzzer and cuts off the circuit in a timely manner. Thus, a high-voltage high-frequency pulsed power supply for a 222nm excimer lamp that can be adjusted is designed and completed.

[0065] In this embodiment, during the starting stage: a high-voltage narrow pulse signal (frequency 100kHz - 300kHz) is used to quickly break down the gas medium inside the excimer lamp to achieve lamp starting; during the stable stage: the pulse frequency is adjusted to the operating frequency range (20kHz - 100kHz), and the output current is kept stable through closed-loop control to maintain the light output intensity; during the intelligent adjustment stage: according to the ambient temperature and load changes, the pulse width and duty cycle are dynamically adjusted to optimize the lamp life and light efficiency; during the protection and monitoring stage: the discharge voltage, current, and discharge frequency are monitored in real time to detect states such as overvoltage, overcurrent, short circuit, and abnormal arcing, preventing abnormal conditions from damaging the power supply and the lamp.

[0066] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and all should be covered by the protection scope of the present invention.

Claims

1. A high-voltage and high-frequency pulse power supply device for driving an excimer lamp, characterized in that: include: The rectifier and filter module is used to connect to the 220V AC power supply and rectify the connected 220V AC power supply to a 400V DC voltage, and then filter the 400V DC voltage to supply power to the high-frequency boost conversion module; An intelligent control unit is used to calculate in real time the voltage required for starting or maintaining the discharge of the excimer lamp, and to control the high-frequency boost conversion module to adjust the output voltage to the voltage required by the excimer lamp; A high-frequency boost conversion module is used to adjust the 400V DC voltage to the voltage required by the excimer lamp; A pulse intelligent control unit is used to generate a pulse signal from the voltage required by the excimer lamp after being converted by the high-frequency boost conversion module, and transmit it to the shaping matching module; The shaping and matching module is used to receive the pulse signal of the pulse intelligent control unit, optimize the edge characteristics of the pulse signal, and achieve the best impedance matching with the excimer lamp load.

2. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 1, characterized in that: Also includes: The data acquisition module is used to collect the discharge frequency, current and voltage of the excimer lamp in real time, and transmit the real-time collected discharge frequency, current and voltage to the intelligent control unit.

3. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 2, characterized in that: The data acquisition module specifically includes: A voltage sampling circuit is used to collect the voltage value at both ends of the excimer lamp and feed the voltage value at both ends of the excimer lamp back to the intelligent control unit; A current sampling circuit is used to collect the current value of the excimer lamp and feed the current value of the excimer lamp back to the intelligent control unit; The discharge frequency detection circuit is used to collect the discharge frequency of the excimer lamp and feed the collected discharge frequency back to the intelligent control unit.

4. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 3, characterized in that: The intelligent control unit calculates in real time the voltage required for starting or maintaining the discharge of the excimer lamp, specifically including: The actual power is calculated based on the current and voltage values ​​of the excimer lamp fed back; Obtaining the rated power of the excimer lamp, and comparing the actual power of the excimer lamp with the rated power to obtain a ratio of the actual power to the rated power; PID operation is performed based on the ratio of the actual power to the rated power, and the obtained control quantity is converted into the frequency and duty cycle changes of the output gate drive circuit PWM, and the current and the voltage of the high-voltage DC power supply are adjusted to achieve negative feedback regulation, ensuring that the power on the excimer lamp is stable at the rated power.

5. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 1, characterized in that: The high-frequency boost conversion module specifically includes: A full-bridge inverter circuit is used to achieve high-frequency conversion of a 400V DC voltage through a full-bridge inverter topology to obtain a 400V DC voltage after high-frequency conversion; The boost circuit is used to boost the 400V DC voltage after high-frequency conversion to a high voltage required for starting or maintaining discharge of the excimer lamp.

6. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 5, characterized in that: The voltage adjustable range of the high-frequency boost conversion module is specifically 4KV-6KV.

7. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 1, characterized in that: Also includes: The auxiliary power supply module is used to convert 220V AC power into 12V DC power to power the intelligent control unit and the protection circuit module.

8. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 7, characterized in that: The auxiliary power supply module specifically includes: The DCDC flyback converter steps down the 220V AC power after rectification and filtering, and is controlled by UC3842. After rectification and filtering, it outputs 12V DC power to power subsequent components.

9. The high-voltage and high-frequency pulse power supply device for driving an excimer lamp according to claim 1, characterized in that: Also includes: The protection circuit module is used to protect the excimer lamp and prevent the excimer lamp from being damaged by overvoltage, overcurrent or short circuit.

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