Dissociation device, vacuum dissociation equipment and semiconductor epitaxial growth equipment

Abstract

The invention discloses a dissociation device, vacuum dissociation equipment and semiconductor epitaxial growth equipment. The dissociation device comprises a sample placing mechanism used for fixing a sample; the dissociation adhesive tape releasing mechanism and the dissociation adhesive tape recycling mechanism are arranged in a spaced mode, the dissociation adhesive tape releasing mechanism is used for fixing a dissociation adhesive tape roll, and the dissociation adhesive tape recycling mechanism is used for pulling a dissociation adhesive tape to move; releasing the effective part of the dissociation adhesive tape from the dissociation adhesive tape roll and moving to the dissociation station, and recovering the invalid part of the dissociation adhesive tape after the sample dissociation is executed at the dissociation station; and the dissociation executing mechanism is used for driving the effective part of the dissociation adhesive tape to be in contact with the sample on the sample placing mechanism and driving the dissociation adhesive tape adhered to the sample to be separated from the sample so as to dissociate the sample. Through the design of the linkage bearing, fixing, updating and recycling of the dissociation adhesive tape are achieved, and the dissociation requirements of most two-dimensional materials are met.

Description

Technical Field

[0001] The present invention particularly relates to a dissociation device for sample dissociation in a vacuum, a vacuum dissociation device, and a semiconductor epitaxial growth device, belonging to the technical field of vacuum machinery. Background Art

[0002] Generally, a gas state with a pressure lower than one atmosphere in a given space is called a vacuum. Compared with the atmosphere, a vacuum environment has the following basic characteristics: (1) low pressure, with a pressure difference from the atmosphere; (2) few gas molecules per unit volume, that is, low molecular number density; (3) long mean free path of gas molecules; (4) long time to form a monolayer on the surface. In a vacuum state of 10 -4 Pa, it only takes about 2.9 s for a solid surface to adsorb a layer of air molecules. At 10 -6 Pa, it only takes about 5 min. Such a short time is insufficient to complete the analysis of the sample surface. When the system vacuum degree reaches 10 -8 Pa, this process is extended to about 8 h. Therefore, only in a very good ultra-high vacuum environment can we obtain a clean surface and keep it for a long time to complete surface analysis. When studying surface physics, it is required that the sample growth process is not affected by other gas molecules, and the sample surface remains clean for a long time during the test, because the gas molecules adsorbed on the sample surface will change the surface morphology and electronic structure of the sample, thus affecting the measurement results. Therefore, the growth and characterization of samples need to be carried out in an ultra-high vacuum environment. Generally, a vacuum of 10 -9 torr and higher is called ultra-high vacuum (UHV).

[0003] There are generally two ways to obtain a clean sample in ultra-high vacuum: One is in-situ growth in an ultra-high vacuum environment. For example, molecular beam epitaxy (MBE) is an important means for growing high-quality single-crystal thin films and nanostructures. MBE was first successfully applied in the epitaxial growth of GaAs (that is, the lattice of the thin film maintains a strict extension relationship with the lattice of the substrate). Its basic principle is under ultra-high vacuum conditions (about 1×10 -10 Torr), molecules or atoms with a certain kinetic energy are deposited on the surface of a single-crystal substrate by heating an evaporation source, and after adsorption, migration, or reaction with the surface, the epitaxial growth of the material is achieved. The other way is to obtain a clean surface for testing by dissociating samples prepared outside ultra-high vacuum, such as samples grown by methods like CVD.

[0004] There are generally two ways to dissociate different samples: for samples with stable structures that are not easily oxidized and deliquescent, the samples can be dissociated outside the vacuum and then introduced into the ultra-high vacuum. The samples are processed by heating to desorb the water molecules and gas molecules adsorbed on the sample surface, so as to obtain a clean surface, and then the subsequent tests or growth can be carried out. However, this solution is only applicable to samples with stable structures that are not easily oxidized and deliquescent. Moreover, to obtain a clean surface again, the sample must be taken out of the vacuum chamber and then the operation is repeated. Each time in and out of the vacuum chamber takes several hours or even longer, seriously affecting the experimental process.

[0005] For samples with unstable structures that are easily contaminated and oxidized in air, generally, after the sample is fixed on the sample holder, a ceramic rod with a polished lower end is glued above the sample with vacuum glue. It is hardened by heating and then introduced into the vacuum chamber. The ceramic rod is mechanically knocked off by a manipulator or a magnetic rod in the vacuum chamber, so as to expose a newly dissociated clean surface for testing or growth. The method of gluing the ceramic rod into the vacuum chamber and dissociating it with a manipulator and a magnetic rod, on the one hand, due to the limitation of the diameter of the ceramic rod, can only dissociate small samples (about 1mm * 1mm) and cannot dissociate larger samples. On the other hand, the dissociation success rate is low, and only one sample can be dissociated each time. For samples that need to be reused, they must be taken out of the chamber and the previous operation is repeated, which takes a long time. Summary of the Invention

[0006] The main object of the present invention is to provide a dissociation device for sample dissociation in vacuum, a vacuum dissociation device and a semiconductor epitaxial growth device, which can realize multiple sample dissociations in a vacuum chamber to obtain a clean substrate sample surface that can be reused repeatedly, thereby overcoming the deficiencies in the prior art.

[0007] To achieve the foregoing invention object, the technical solutions adopted by the present invention include:

[0008] The first aspect of the embodiment of the present invention provides a dissociation device for sample dissociation in vacuum, which is matched with a vacuum chamber. The dissociation device for sample dissociation in vacuum includes:

[0009] A sample parking mechanism for fixing the sample at the dissociation station in the vacuum chamber;

[0010] A dissociation tape release mechanism and a dissociation tape recovery mechanism. The dissociation tape release mechanism and the dissociation tape recovery mechanism are arranged at intervals. The dissociation tape release mechanism is used to fix the dissociation tape roll, and the dissociation tape recovery mechanism is used to traction the dissociation tape to move, so that the effective part of the dissociation tape is released from the dissociation tape roll and moves to the dissociation station, and, recover the invalid part of the dissociation tape after sample dissociation at the dissociation station;

[0011] A dissociation actuator for driving an effective portion of a dissociation tape to contact a sample located on the sample parking mechanism and driving the dissociation tape adhered to the sample away from the sample to achieve dissociation of the sample.

[0012] The second aspect of the embodiment of the present invention provides a vacuum dissociation device, including a vacuum chamber and the dissociation device for dissociating samples in a vacuum.

[0013] The third aspect of the embodiment of the present invention provides a semiconductor epitaxial growth device, including the vacuum dissociation device.

[0014] Compared with the prior art, the advantages of the present invention include: the dissociation device for dissociating samples in a vacuum provided by the present invention realizes the fixation, renewal and recycling of the dissociation tape through the design of a linkage bearing, meeting the dissociation requirements of most two-dimensional materials; and the dissociation device for dissociating samples in a vacuum provided by the present invention can meet the requirement of dissociating samples repeatedly in the vacuum chamber, greatly saving the experimental time and accelerating the experimental process. Description of the Drawings

[0015] Figure 1 is a schematic structural diagram of a vacuum dissociation device provided in a typical embodiment of the present invention;

[0016] Figure 2 is a side view of a fixed bearing / aligning bearing provided in a typical embodiment of the present invention;

[0017] Figure 3 is a front view of a fixed bearing / aligning bearing provided in a typical embodiment of the present invention. Detailed Embodiments

[0018] In view of the deficiencies in the prior art, the inventors of this case have proposed the technical solution of the present invention through long-term research and a large number of practices. The following will further explain the technical solution, its implementation process and principle, etc.

[0019] The first aspect of the embodiment of the present invention provides a dissociation device for dissociating samples in a vacuum, which is matched with a vacuum chamber. The dissociation device for dissociating samples in a vacuum includes:

[0020] A sample parking mechanism for fixing a sample at a dissociation station in the vacuum chamber;

[0021] A dissociation tape releasing mechanism and a dissociation tape recycling mechanism, the dissociation tape releasing mechanism and the dissociation tape recycling mechanism are arranged at intervals. The dissociation tape releasing mechanism is used to fix the dissociation tape roll, and the dissociation tape recycling mechanism is used to drive the movement of the dissociation tape, so that the effective part of the dissociation tape is released from the dissociation tape roll and moves to the dissociation station, and, recycle the invalid part of the dissociation tape after the sample is dissociated at the dissociation station;

[0022] A dissociation execution mechanism, which is used to drive the effective part of the dissociation tape to contact the sample located on the sample parking mechanism, and drive the dissociation tape adhered to the sample to separate from the sample, so as to realize the dissociation of the sample.

[0023] Further, the sample parking mechanism is movably and sealingly matched with the vacuum chamber. The sample parking mechanism can enter and exit the vacuum chamber along its own axis, and, the sample parking mechanism can also rotate around its own axis.

[0024] Further, the sample parking mechanism includes a sample parking rod, and the sample parking rod includes a first operation part and a bearing part. The bearing part is arranged in the vacuum chamber and is used to fix the sample, and the first operation part is arranged outside the vacuum chamber.

[0025] Further, the dissociation tape releasing mechanism includes at least one fixed bearing, and the fixed bearing is arranged in the vacuum chamber. The fixed bearing can rotate around its own axis, and the dissociation tape roll is fixed on the fixed bearing and can rotate together with the fixed bearing.

[0026] Furthermore, a first limiting structure is also arranged on the outer ring of the fixed bearing. The first limiting structure and the outer ring enclose a first limiting space. The width of the first limiting space in the axial direction of the fixed bearing is slightly larger than or equal to the axial width of the dissociation tape roll, and the height of the first limiting space in the radial direction of the fixed bearing is slightly larger than or equal to the radial height of the dissociation tape roll.

[0027] Furthermore, the first limiting structure includes two first limiting baffles, and the two first limiting baffles are arranged at intervals along the axial direction of the fixed bearing. The two first limiting baffles and the outer ring of the fixed bearing enclose the first limiting space.

[0028] Furthermore, the first limiting baffle is an annular baffle.

[0029] Further, the dissociation tape recycling mechanism is movably and sealingly matched with the vacuum chamber. The dissociation tape recycling mechanism can enter and exit the vacuum chamber along its own axis, and, the dissociation tape recycling mechanism can also rotate around its own axis.

[0030] Further, the dissociation tape recycling mechanism includes a dissociation tape recycling magnetic rod, which includes a second operation part and a winding and recycling part. The winding and recycling part is arranged in the vacuum chamber and is used to connect with the dissociation tape and wind the dissociation tape. The second operation part is arranged outside the vacuum chamber.

[0031] In a relatively typical implementation case, the dissociation device for sample dissociation in vacuum further includes an orientation mechanism. The orientation mechanism is arranged in the vacuum chamber and between the dissociation tape release mechanism and the dissociation tape recycling mechanism. The positioning mechanism is at least used to limit the movement track of the dissociation tape and guide the dissociation tape to move along a specified track between the dissociation tape release mechanism, the dissociation station and the dissociation tape recycling mechanism.

[0032] Further, the orientation mechanism includes at least one orientation bearing, which can rotate around its own axis, and the outer ring of the orientation bearing contacts the dissociation tape.

[0033] Furthermore, a second limiting structure is also arranged on the outer ring of the orientation bearing. A second limiting space is formed by enclosing between the second limiting structure and the outer ring. The dissociation tape is arranged in the second limiting space, and the width of the second limiting space in the axial direction of the fixed bearing is slightly larger than or equal to the width of the dissociation tape.

[0034] Furthermore, the second limiting structure includes two second limiting baffles. The two second limiting baffles are arranged at intervals along the axial direction of the orientation bearing. The two second limiting baffles and the outer ring of the orientation bearing enclose the second limiting space.

[0035] Furthermore, the second limiting baffle is an annular baffle.

[0036] Furthermore, the orientation mechanism includes more than two orientation bearings. The more than two orientation bearings are arranged at intervals in sequence between the dissociation tape release mechanism and the dissociation tape recycling mechanism.

[0037] Further, the dissociation execution mechanism includes a dissociation magnetic rod and a displacement table. The displacement table is arranged outside the vacuum chamber. A part of the dissociation magnetic rod is arranged inside the vacuum chamber. The dissociation magnetic rod is movably and hermetically matched with the vacuum chamber. The dissociation magnetic rod is also in transmission cooperation with the displacement table. The dissociation magnetic rod can move along its own axis, and furthermore, the dissociation magnetic rod can also move along its own radial direction under the drive of the displacement table so that the dissociation magnetic rod is aligned with the dissociation tape and the sample.

[0038] It should be noted that the sample in the present invention is a dissociable two-dimensional material.

[0039] The second aspect of the embodiments of the present invention provides a vacuum dissociation device, including a vacuum chamber and the dissociation device for dissociating samples in vacuum.

[0040] The third aspect of the embodiments of the present invention provides a semiconductor epitaxial growth device, including the above-mentioned vacuum dissociation device. Exemplarily, the semiconductor epitaxial growth device can be a Molecular Beam Epitaxy (MBE) device, a Chemical Vapor Deposition (CVD) device, etc.

[0041] The technical solution, its implementation process and principle will be further explained below in conjunction with the drawings and specific implementation cases. Unless otherwise specified, the vacuum chamber in the embodiments of the present invention, as well as the structures, displacement tables, bearings, flange port gate valves, etc. used to achieve the movable and sealed cooperation between the vacuum chamber and the magnetic rod are known to those skilled in the art, and they can all be obtained through commercial purchase. The specific structures and product models thereof are not limited herein.

[0042] In a more specific implementation case, please refer to Figure 1 , a vacuum dissociation device, including a vacuum chamber 100 and a dissociation device. The dissociation device cooperates with the vacuum chamber 100 and is used to achieve multiple dissociations of samples in the vacuum chamber 100 to obtain a clean substrate sample surface that can be reused. It should be noted that the dissociation device can perform multiple dissociations on multiple samples or repeat multiple dissociations on the same sample, avoiding the pollution and time consumption caused by repeated entry and exit of samples into the vacuum chamber 100, and greatly saving the experimental time.

[0043] Specifically, please refer to again Figure 1, the dissociation device includes a sample parking rod 210, a fixed bearing 220, a dissociation tape recovery magnetic rod 230, and a dissociation magnetic rod 240. The sample parking rod 210 is movably and sealingly fitted with the vacuum chamber 100. A part of the sample parking rod 210 is disposed inside the vacuum chamber 100 and is used to carry the sample. The fixed bearing 220 is disposed inside the vacuum chamber 100 and is used to fix the dissociation tape roll. The dissociation tape recovery magnetic rod 230 is movably and sealingly fitted with the vacuum chamber 100. A part of the dissociation tape recovery magnetic rod 230 is disposed inside the vacuum chamber 100. The dissociation tape recovery magnetic rod 230 is used to connect with the dissociation tape, tow the dissociation tape to move from the dissociation tape roll to the dissociation station, and recover the used dissociation tape. The dissociation magnetic rod 240 is movably and sealingly fitted with the vacuum chamber 100. A part of the dissociation magnetic rod 240 is disposed inside the vacuum chamber 100 and is at least used to drive the dissociation tape between the fixed bearing 220 and the dissociation tape recovery magnetic rod 230 to approach the sample located on the sample parking rod 210 and adhere to the sample, so as to achieve the dissociation of the sample.

[0044] Specifically, the sample parking rod 210 can reciprocate along its own axis and rotate around its own axis to send the sample to the dissociation station and make the sample face the dissociation magnetic rod 240. More specifically, the sample parking rod 210 includes a first operation part and a bearing part. The bearing part is disposed inside the vacuum chamber 100 and is used to fix the sample. The first operation part is disposed outside the vacuum chamber 100, and the sample parking rod 210 is manipulated by operating the first operation part. More specifically, a fixing structure for restricting the sample can be disposed on the bearing part of the sample parking rod 210, and the specific structure and form of this fixing structure are not limited herein.

[0045] Specifically, the fixed bearing 220 is fixedly disposed inside the vacuum chamber 100, and the dissociation tape roll is fixed on the fixed bearing 220. More specifically, the inner ring of the fixed bearing 220 is fixed, and the inner ring is fixed to the vacuum chamber 100. The outer ring can rotate around its own axis. The dissociation tape roll is fixedly sleeved on the outer ring of the fixed bearing 220 and can rotate with the outer ring. The dissociation tape recovery magnetic rod 230 can rotate around its own axis to transfer the dissociation tape roll from the dissociation tape roll to the dissociation tape recovery magnetic rod 230. It can be understood that the fixed bearing 220 can be understood as an unwinding mechanism, and the dissociation tape recovery magnetic rod 230 can be understood as a winding mechanism.

[0046] More specifically, the fixed bearing 220 can be a bearing with a damping structure to control the rotation speed of the dissociation tape roll and the fixed bearing 220, so as to achieve the slow release of the dissociation tape (i.e., adjust the release speed of the dissociation tape). It should be noted that the damping structure is disposed between the inner ring and the outer ring of the fixed bearing 220, and the specific structure and form of the damping structure are not limited herein.

[0047] Specifically, please also refer to Figure 2 and Figure 3 , two first limiting baffles 201 are further arranged on the outer ring of the fixed bearing 220. The two first limiting baffles 201 are arranged at intervals along the axial direction of the fixed bearing 220. The two first limiting baffles 201 and the outer ring of the fixed bearing 220 enclose a first limiting space. The dissociation tape roll is arranged in the first limiting space. The width of the first limiting space in the axial direction of the fixed bearing 220 is slightly greater than or equal to the axial width of the dissociation tape roll, and the height of the first limiting space in the radial direction of the fixed bearing 220 is slightly greater than or equal to the radial height of the dissociation tape roll. By arranging the first limiting baffles, the dissociation tape roll and the dissociation tape released by the dissociation tape roll can be limited to prevent the dissociation tape from getting out of the predetermined track, deviating from the predetermined direction or detaching from the fixed bearing 220.

[0048] Specifically, the dissociation tape recovery magnetic rod 230 includes a second operation part and a winding and recovery part. The winding and recovery part is arranged in the vacuum chamber 100 and is used to connect with the dissociation tape and wind the dissociation tape. The second operation part is arranged outside the vacuum chamber 100. The dissociation tape recovery magnetic rod 230 can be operated through the second operation part.

[0049] It should be noted that the adhesive surface of the dissociation tape faces the side of the sample parking rod 210.

[0050] Specifically, a part of the dissociation magnetic rod 240 is arranged inside the vacuum chamber 100. The dissociation magnetic rod 240 is movably and sealingly matched with the vacuum chamber 100. The dissociation magnetic rod 240 can move along its own axis to realize the adhesion and separation of the dissociation tape and the sample. It should be noted that the force for realizing the adhesion and separation of the dissociation tape and the sample is the resultant force of the tension of the dissociation tape itself and the pressure provided by the dissociation magnetic rod 240.

[0051] More specifically, in order to make the dissociation magnetic rod 240 correspond to the sample along its own axis to ensure that the dissociation tape corresponding to the end of the dissociation magnetic rod 240 contacts and adheres to the sample, the dissociation magnetic rod 240 can also move along its own radial direction. More specifically, the dissociation magnetic rod 240 is also in transmission cooperation with the displacement table 250. The displacement table 250 is arranged outside the vacuum chamber 100. The dissociation magnetic rod 240 can also move along its own radial direction under the drive of the displacement table 250 to align the dissociation magnetic rod 240 with the dissociation tape and the sample.

[0052] Specifically, please refer to Figure 1, in order to enable the dissociation tape to be smoothly transferred between the fixed bearing 220 and the dissociation tape recovery magnetic rod 230, the vacuum chamber 100 is further provided with two directional bearings 260. The two directional bearings 260 are sequentially arranged at intervals between the fixed bearing 220 and the dissociation tape recovery magnetic rod 230. The dissociation tape 301 is in contact with the two directional bearings 260. While providing a certain tension, the two directional bearings 260 also define the traveling trajectory of the dissociation tape 301.

[0053] Please refer to Figure 2 and Figure 3 , similar to the structure of the fixed bearing 220, the inner ring of the directional bearing 260 is fixed and the outer ring can rotate. The dissociation tape is in contact with the outer ring of the directional bearing 260. In order to prevent the dissociation tape from deviating from the predetermined trajectory or detaching from the directional bearing 260, two second limit baffles 202 are further provided on the outer ring of the directional bearing 260. The two second limit baffles 202 are arranged at intervals along the axial direction of the fixed bearing 220. The two second limit baffles 202 and the outer ring of the directional bearing 260 enclose a second limit space. The dissociation tape is restricted within this second limit space. The width of the second limit space in the axial direction of the directional bearing 260 is slightly greater than or equal to the width of the dissociation tape. It can be understood that the second limit space can be understood as a limit channel for restricting the dissociation tape to maintain the predetermined trajectory transfer.

[0054] Specifically, the vacuum chamber 100 is further provided with an air extraction port 110. The air extraction port 110 is connected to a vacuum pump and is used to form a specified high-vacuum environment in the vacuum chamber 100 to maintain the cleanliness of the sample. Specifically, the vacuum chamber 100 is further provided with a flange port plug valve 120 for docking with other ultra-high vacuum chambers 100. It is designed as a standard CF35 flange port and can be connected to most ultra-high vacuum equipment for growth and testing.

[0055] The method for dissociating a sample using a vacuum dissociation device provided by the present invention may include:

[0056] Use the sample parking rod 210 to turn the sample A to dissociate from the magnetic force rod 240 and fix it. Drive the rotation of the magnetic force rod 230 for dissociating tape recovery to transfer the dissociating tape 301 from the fixed bearing 220 to the magnetic force rod 230 for dissociating tape recovery. During the transfer of the dissociating tape 301, the fixed bearing 220 and the directional bearing 260 rotate accordingly, so that the fresh dissociating tape 301 with good viscosity is exposed between the fixed bearing 220 and the magnetic force rod 230 for dissociating tape recovery. At this time, the sticky surface of the dissociating tape 301 faces the sample A. Slowly push the magnetic force rod 240 with the dissociating tape 301 forward. Align the dissociating tape 301 at the head of the magnetic force rod 240 with the sample surface to be dissociated and gently touch it by adjusting the displacement stage 250. Then slowly retract the magnetic force rod 240 and recover the tape by rotating the magnetic force rod 230 for dissociating tape recovery. This is one dissociation process. If the sample dissociation is successful, it can be transferred to other vacuum chambers 100 for the next growth and testing. If the dissociation fails, repeat the above steps. Repeat the dissociation until an ideal sample is obtained.

[0057] Compared with the solution of dissociating the sample outside the vacuum and then annealing it in the ultra-high vacuum chamber, a dissociation device for sample dissociation in vacuum provided by the present invention can be applicable to the vast majority of material systems, not limited to samples with stable structures and not easily oxidized and deliquescent.

[0058] Compared with the method of sticking a ceramic rod into the vacuum chamber and using a manipulator and a magnetic force rod for dissociation, a dissociation device for sample dissociation in vacuum provided by the present invention can be applicable to more diverse sample sizes and types, especially applicable to substrate materials such as HOPG, MoS2, h-BN, etc. that require dissociating a relatively large flat surface.

[0059] A dissociation device for sample dissociation in vacuum provided by the present invention can directly perform repeated dissociation without taking the sample out of the vacuum chamber, saving the time for repeatedly venting and evacuating the vacuum chamber and the time for remaking the sample, greatly saving the experimental time cost and consumable cost.

[0060] A dissociation device for sample dissociation in vacuum provided by the present invention realizes the fixation, update and recovery of the dissociating tape through the design of a linkage bearing, meeting the dissociation requirements of most two-dimensional materials; moreover, a dissociation device for sample dissociation in vacuum provided by the present invention can meet the requirement of repeatedly dissociating samples in the vacuum chamber, greatly saving the experimental time and accelerating the experimental process.

[0061] It should be understood that the above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and it is not intended to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A dissociation device for dissociating samples in a vacuum, in combination with a vacuum chamber, characterized in that: include: A sample parking mechanism, used to fix the sample at a dissociation station in the vacuum chamber; A dissociation tape release mechanism and a dissociation tape recovery mechanism, wherein the dissociation tape release mechanism and the dissociation tape recovery mechanism are arranged at intervals, the dissociation tape release mechanism is used to fix the dissociation tape roll, and the dissociation tape recovery mechanism is used to pull the dissociation tape to move, so that the effective part of the dissociation tape is released from the dissociation tape roll and moves to the dissociation station, and the invalid part of the dissociation tape after the sample dissociation is performed at the dissociation station is recovered; The dissociation actuator is used to drive the effective part of the dissociation tape to contact the sample located on the sample parking mechanism, and drive the dissociation tape adhered to the sample to separate from the sample, so as to achieve dissociation of the sample.

2. The dissociation device for sample dissociation in vacuum according to claim 1, characterized in that: The sample parking mechanism is movable and sealed with the vacuum chamber, the sample parking mechanism can enter and exit the vacuum chamber along its own axial direction, and the sample parking mechanism can also rotate around its own axis; And / or, the sample parking mechanism includes a sample parking rod, the sample parking rod includes a first operating part and a carrying part, the carrying part is arranged in the vacuum chamber and used to fix the sample, and the first operating part is arranged outside the vacuum chamber.

3. The dissociation device for sample dissociation in vacuum according to claim 1, characterized in that: The dissociation tape release mechanism comprises at least one fixed bearing, the fixed bearing is arranged in the vacuum chamber, the fixed bearing can rotate around its own axis, and the dissociation tape roll is fixed on the fixed bearing and can rotate with the fixed bearing; And / or, a first limiting structure is also provided on the outer ring of the fixed bearing, and a first limiting space is formed between the first limiting structure and the outer ring, and the width of the first limiting space in the axial direction of the fixed bearing is slightly greater than or equal to the axial width of the dissociation tape roll, and the height of the first limiting space in the radial direction of the fixed bearing is slightly greater than or equal to the radial height of the dissociation tape roll.

4. The dissociation device for sample dissociation in vacuum according to claim 3, characterized in that: The first limiting structure comprises two first limiting baffles, which are arranged at intervals along the axial direction of the fixed bearing, and the two first limiting baffles and the outer ring of the fixed bearing enclose the first limiting space; And / or, the first limiting baffle is an annular baffle.

5. The dissociation device for sample dissociation in vacuum according to claim 1, characterized in that: The dissociation tape recovery mechanism is movable and sealed with the vacuum chamber, and the dissociation tape recovery mechanism can enter and exit the vacuum chamber along its own axial direction, and the dissociation tape recovery mechanism can also rotate around its own axis; And / or, the dissociation tape recovery mechanism includes a dissociation tape recovery magnetic rod, the dissociation tape recovery magnetic rod includes a second operating part and a winding recovery part, the winding recovery part is arranged in the vacuum chamber and is used to connect with the dissociation tape and wind the dissociation tape, and the second operating part is arranged outside the vacuum chamber.

6. The dissociation device for sample dissociation in vacuum according to claim 1, characterized in that: Also includes: An orienting mechanism is arranged in the vacuum chamber and is located between the dissociation tape releasing mechanism and the dissociation tape recovering mechanism. The positioning mechanism is at least used to limit the movement trajectory of the dissociation tape and guide the dissociation tape to move along a specified trajectory between the dissociation tape releasing mechanism, the dissociation station and the dissociation tape recovering mechanism.

7. The dissociation device for sample dissociation in vacuum according to claim 6, characterized in that: The orientation mechanism comprises at least one orientation bearing, the orientation bearing can rotate around its own axis, and the outer ring of the orientation bearing is in contact with the dissociation tape; And / or, a second limiting structure is further provided on the outer ring of the directional bearing, the second limiting structure and the outer ring enclose a second limiting space, the dissociation tape is provided in the second limiting space, and the width of the second limiting space in the axial direction of the fixed bearing is slightly greater than or equal to the width of the dissociation tape; And / or, the second limiting structure comprises two second limiting baffles, the two second limiting baffles are arranged at intervals along the axial direction of the directional bearing, and the two second limiting baffles and the outer ring of the directional bearing enclose the second limiting space; And / or, the second limiting baffle is an annular baffle; And / or, the orientation mechanism includes more than two orientation bearings, and the more than two orientation bearings are sequentially arranged at intervals between the dissociation tape releasing mechanism and the dissociation tape recovering mechanism.

8. The dissociation device for sample dissociation in vacuum according to claim 1, characterized in that: The dissociation actuator includes a dissociation magnetic rod and a translation stage, wherein the translation stage is arranged outside the vacuum chamber, and part of the dissociation magnetic rod is arranged inside the vacuum chamber. The dissociation magnetic rod is movable and sealed with the vacuum chamber, and the dissociation magnetic rod is also in transmission cooperation with the translation stage. The dissociation magnetic rod can move along its own axial direction, and can also move along its own radial direction under the drive of the translation stage, so that the dissociation magnetic rod is aligned with the dissociation tape and the sample.

9. A vacuum dissociation device, characterized in that: include: A vacuum chamber and a dissociation device for sample dissociation in vacuum as claimed in any one of claims 1 to 8.

10. A semiconductor epitaxial growth device, characterized in that: Comprising the vacuum dissociation equipment as claimed in claim 9.

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