Hybrid probe, near-field scanning system and scanning method thereof

Abstract

The invention relates to the technical field of near-field scanning, in particular to a hybrid probe, a near-field scanning system and a scanning method thereof.The hybrid probe comprises a detection assembly used for obtaining electromagnetic hybrid information through detection; the signal processing unit is used for acquiring the electromagnetic mixing information and separating the electromagnetic mixing information to obtain electric field voltage information and magnetic field voltage information; and the signal switching unit is used for acquiring the electric field voltage information, the magnetic field voltage information and the control signal, and outputting the electric field voltage information or the magnetic field voltage information according to the control signal, so that the near-field scanning is more convenient, and the efficiency of acquiring the electric field and magnetic field components by the near-field scanning is improved.

Description

Technical Field

[0001] This application relates to the field of near-field scanning technology, and in particular to a hybrid probe, a near-field scanning system and a scanning method thereof. Background Art

[0002] The working frequency of integrated circuits is increasing day by day, and the manufacturing process is also increasing. At the same time, the number of chips on a single PCB is increasing, and the electromagnetic compatibility problem between each chip cannot be ignored. Electromagnetic field scanning and reconstruction are beneficial to detecting and understanding the electromagnetic compatibility problem of integrated circuits.

[0003] Near-field scanning usually uses a single-component electromagnetic field measurement probe. Only one component of the electric field or magnetic field can be obtained in a single scan, and the probe needs to be replaced during the measurement to obtain the electric field and magnetic field information. In order to make near-field scanning more convenient, the existing improvement method is to integrate the electric field probe and the magnetic field probe into the same structure to simultaneously realize electromagnetic field scanning, which can avoid the operation of replacing the probe during the scanning process, or use a multi-component probe and measurement system to obtain the electric field or magnetic field component through a complex post-processing process. Among them, the form of integrating the electric field probe and the magnetic field probe on a single PCB is still essentially two probes and still needs to be replaced, while the method of using post-data processing to extract the mixed electromagnetic field is inefficient, time-consuming and costly. The above problems need to be solved. Summary of the Invention

[0004] In order to make near-field scanning more convenient and improve the efficiency of obtaining the electric field and magnetic field components in near-field scanning, this application provides a hybrid probe, a near-field scanning system and a scanning method thereof, and adopts the following technical solutions:

[0005] In a first aspect, this application provides a hybrid probe, including:

[0006] A detection component for detecting electromagnetic hybrid information;

[0007] A signal processing unit for obtaining the electromagnetic hybrid information, separating and processing the electromagnetic hybrid information to obtain electric field voltage information and magnetic field voltage information;

[0008] A signal switching unit for obtaining the electric field voltage information, the magnetic field voltage information and a control signal, and outputting the electric field voltage information or the magnetic field voltage information according to the control signal.

[0009] Preferably, the detection component includes an induction layer and two shielding layers, and the middle part of the induction layer is arranged between the shielding layers.

[0010] Preferably, the sensing layer is provided with a detection sensing end and a detection output end. The detection sensing end is one end of the sensing layer, and the detection output end is the other end of the sensing layer. The detection sensing end is used to detect electromagnetic hybrid information, and the detection output end is used to connect to a signal processing unit.

[0011] Preferably, the signal processing unit is an inverting hybrid coupler. The input end of the inverting hybrid coupler is connected to the detection output end, and the output end of the inverting hybrid coupler is connected to a signal switching unit.

[0012] Preferably, the signal switching unit is an SPDT RF switch.

[0013] Preferably, the detection output end includes a first output end, and the first output end is used to output the sum of the electric field voltage information and the magnetic field voltage information.

[0014] Preferably, the detection output end includes a second output end, and the second output end is used to output the difference between the electric field voltage information and the magnetic field voltage information.

[0015] Preferably, the output of the electric field voltage information or the magnetic field voltage information according to the control signal is specifically as follows:

[0016] When the control signal is a first control signal, the electric field voltage information is output;

[0017] When the control signal is a second control signal, the magnetic field voltage information is output.

[0018] In a second aspect, the present application provides a near-field scanning system, including a control host, a receiver, an electric moving device, and the hybrid probe as described above. The control host is electrically connected to the receiver, the control host is electrically connected to the electric moving device, the receiver is electrically connected to the hybrid probe, and the hybrid probe is fixedly installed on the mobile end of the electric moving device.

[0019] In a third aspect, the present application provides a scanning method configured in a near-field scanning system, including:

[0020] The control host receives scanning mode information;

[0021] The electric moving device obtains the scanning mode information and adjusts its position according to the measurement point coordinate information corresponding to the scanning mode information;

[0022] The hybrid probe obtains the scanning mode information and performs electromagnetic hybrid detection on the object to be measured according to the scanning mode information, obtaining electric field voltage information and magnetic field voltage information for output to the control host or the receiver.

[0023] In summary, compared with the prior art, the beneficial effects brought by the technical solution provided by the present application at least include:

[0024] In this application, an electromagnetic hybrid information of a circuit to be checked is acquired by a detection component, and the acquired electromagnetic hybrid information is transmitted to a signal processing unit. The signal processing unit separates and processes the electromagnetic hybrid information to obtain independent electric field voltage information and magnetic field voltage information, and transmits the electric field voltage information and the magnetic field voltage information to a signal switching unit for screening. The signal switching unit outputs the electric field voltage information or the magnetic field voltage information correspondingly through a control signal, thereby obtaining multiple electromagnetic field component information in one measurement, without additional processing after signal acquisition, making near-field scanning more convenient and improving the efficiency of obtaining electric and magnetic field components in near-field scanning. Description of the Drawings

[0025] Figure 1 It is a schematic diagram of the modules of a hybrid probe according to an embodiment of this application.

[0026] Figure 2 It is a front view structural schematic diagram of a probe assembly according to an embodiment of this application.

[0027] Figure 3 It is a side view structural schematic diagram of a probe assembly according to an embodiment of this application.

[0028] Figure 4 It is a schematic diagram of the detection route of a scanning probe according to an embodiment of this application.

[0029] Figure 5 It is a schematic diagram of the modules of a near-field scanning system according to an embodiment of this application.

[0030] Description of the Reference Numerals:

[0031] 1. Detection component; 11. Inductive layer; 12. Shielding layer; 2. Signal processing unit; 3. Signal switching unit. Detailed Embodiments

[0032] The following Figures 1 - 5 further describes this application in detail. The terms used in the embodiments of this application are only for the purpose of describing specific embodiments and are not intended to be limiting.

[0033] As the operating frequency of integrated circuits increases day by day, the manufacturing process also becomes more advanced, and at the same time, the number of chips on a single PCB is increasing. The electromagnetic compatibility issues between individual chips cannot be ignored. Electromagnetic field scanning and reconstruction are beneficial for detecting and understanding the electromagnetic compatibility problems of integrated circuits. To comprehensively analyze the electromagnetic field distribution on the surface of an integrated circuit, it is usually necessary to measure six components of the electromagnetic field: Ez, Ex, Ey, Hx, Hy, Hz. However, existing near-field scanning systems have the problem of low efficiency. The main reasons are as follows: Conventional near-field scanning systems use single-component electromagnetic field measurement probes. Each single scan can only obtain one component of the electric field or magnetic field. During measurement, the probe needs to be replaced to obtain the electric field and magnetic field information. Existing research has integrated electric field probes and magnetic field probes into the same structure to simultaneously achieve electromagnetic field scanning. This solution can avoid the operation of replacing the probe during scanning, but the structure is relatively complex. A few have proposed multi-component probes and measurement systems. However, the acquisition of electric field or magnetic field measurement values still requires a complex post-processing process. Most of the existing near-field probes are single electric field or single magnetic field probes. Even if there are composite probes, in one case, the electric field probe and the magnetic field probe are directly integrated onto a single PCB. In essence, they are still two probes. In another case, it is necessary to perform post-data processing to extract the mixed electromagnetic field. Compared with two separate probes, the efficiency is not improved significantly. For the former, switching the electromagnetic field output is a problem; for the latter, data processing brings more inconvenience. And in a near-field scanning system, a spectrum analyzer is usually used as the receiver, which usually has only one input terminal. Then the existing technology will face connection problems. And existing scanning systems usually carry these conventional near-field probes and can only output a single electromagnetic field classification after a single scan, resulting in low scanning efficiency and long time consumption.

[0034] Therefore, it is very important to provide an electromagnetic field near-field probe and scanning system that can directly measure multiple electric field or magnetic field components to improve the efficiency of electromagnetic field detection. This application provides a hybrid probe, a near-field scanning system, and its scanning method. Using a simple probe structure is beneficial for reducing the manufacturing cost.

[0035] Referring to Figure 1 , a hybrid probe involved in this application specifically includes:

[0036] A detection component for detecting electromagnetic mixed information;

[0037] A signal processing unit for obtaining the electromagnetic mixed information, separating and processing the electromagnetic mixed information to obtain electric field voltage information and magnetic field voltage information;

[0038] A signal switching unit for obtaining the electric field voltage information, the magnetic field voltage information, and a control signal, and outputting the electric field voltage information or the magnetic field voltage information according to the control signal.

[0039] Specifically, in this application, an electromagnetic hybrid information of the circuit to be investigated is acquired through a detection component, and the acquired electromagnetic hybrid information is transmitted to a signal processing unit. The signal processing unit separates and processes the electromagnetic hybrid information to obtain independent electric field voltage information and magnetic field voltage information, and transmits the electric field voltage information and the magnetic field voltage information to a signal switching unit for screening. The signal switching unit outputs the electric field voltage information or the magnetic field voltage information correspondingly through a control signal, thereby achieving the acquisition of multiple electromagnetic field component information in one measurement without additional processing after signal acquisition, making near-field scanning more convenient and improving the efficiency of obtaining electric and magnetic field components in near-field scanning. Aiming at the problem of low scanning efficiency and long scanning time in the traditional near-field scanning system, this application adopts a fast probe switching mode, enabling the approximate simultaneous acquisition of electric and magnetic field signals at the same measurement point, thus avoiding the repeated operations of multiple scans in the traditional scanning system and greatly improving the scanning efficiency.

[0040] This application can be applied to a variety of scenarios, including but not limited to the detection of electromagnetic field distribution on the surface of integrated circuit packages, the failure analysis of integrated circuits, the detection of near-field electromagnetic field distribution of PCB boards, the failure analysis of PCB boards, the near-field electromagnetic field radiation monitoring of specific objects, etc.

[0041] As one of the implementation manners, the detection component includes an induction layer and two shielding layers, and the middle part of the induction layer is arranged between the shielding layers.

[0042] Refer to Figure 2 and Figure 3 , specifically, the probe in the embodiment of this application consists of three parts, including a detection component, a signal processing unit, and a signal switching unit. Among them, the detection component consists of three parts, an induction layer and two shielding layers. The detection component is a hybrid probe used to acquire the information of the mixed electric and magnetic fields, and the normal electric field Ez and the tangential magnetic field Hx or Hy are measured by the induction measurement method.

[0043] The shielding layers of the detection component in the embodiment of this application are divided into a top layer and a bottom layer. Both the top layer and the bottom layer are metal ground shielding layers, and the induction layer is clamped between the top layer and the bottom layer.

[0044] As one of the implementation manners, the induction layer is provided with a detection induction end and a detection output end. The detection induction end is one end of the induction layer, and the detection output end is the other end of the induction layer. The detection induction end is used to detect the electromagnetic hybrid information, and the detection output end is used to connect to the signal processing unit.

[0045] Specifically, the detection induction end and the detection output end in the embodiment of this application are respectively the two ends of the induction layer. Among them, the middle part of the induction layer is located between the shielding layers, and the two ends of the induction layer extend beyond the two ends of the shielding layer.

[0046] The induction layer is specifically a metal loop between the shielding layers. The detection induction end is the protruding circular part, which is used as a magnetic field probe, an electric field probe, and a hybrid probe to detect electromagnetic hybrid information. The detection output end is two separate output ends, which are connected to the input end of the signal processing unit.

[0047] As one of the implementation manners, the detection output end includes a first output end, and the first output end is used to output the sum of the electric field voltage information and the magnetic field voltage information.

[0048] The detection output end includes a second output end, and the second output end is used to output the difference between the electric field voltage information and the magnetic field voltage information.

[0049] The embodiment of the present application uses a hardware circuit to separate the electromagnetic field and the hybrid signal detected by the near-field probe. In the prior art, the two output ends of the Hybrid Probe are respectively mixed with the components of the electric field and the magnetic field. UA = U_electric + U_magnetic; UB = U_electric - U_magnetic, where UA is the output signal of one of the detection output ends, and UB is the output signal of the other detection output end.

[0050] As one of the implementation manners, the signal processing unit is an inverting hybrid coupler. The input end of the inverting hybrid coupler is connected to the detection output end, and the output end of the inverting hybrid coupler is connected to the signal switching unit.

[0051] Specifically, the inverting hybrid coupler in the embodiment of the present application is specifically a 0 / 180° hybrid coupler. Using a 0 / 180° hybrid coupler as the signal processing core can separate the signal induced by the probe into electric field and magnetic field components. This component is a radio frequency module or a radio frequency chip, and the output of the signal processing unit can be directly connected to receiving devices such as a spectrum analyzer to realize the direct acquisition of measurement data.

[0052] The embodiment of the present application separates the electric and magnetic field measurement components in the hybrid probe through the signal processing unit and selects the output according to the SPDT radio frequency switch. The function of the coupler is to couple the input signal to two output ports through one port and maintain a certain phase difference between these ports, enabling the signal to form a 0° or 180° phase difference between the two output ports.

[0053] The inverting hybrid coupler uses the phase differences of 0° and 180° to distinguish and separate these electric field and magnetic field components. Specifically, the coupler will output different signals at different ports according to the propagation directions of the electric field and the magnetic field. The signal output from one port corresponds to the electric field component, while the other port corresponds to the magnetic field component.

[0054] The first port of the reverse hybrid coupler is for 0° input, the second port is for SUM output, the third port is for 180° input, and the fourth port is for ISO output. In the embodiments of the present application, the output of the SUM or ISO port can also be directly connected to the spectrum analyzer receiver, and the signal can be directly received.

[0055] As one of the implementation manners, the signal switching unit is an SPDT RF switch.

[0056] The output of the electric field voltage information or the magnetic field voltage information according to the control signal is specifically as follows:

[0057] When the control signal is the first control signal, the electric field voltage information is output;

[0058] When the control signal is the second control signal, the magnetic field voltage information is output.

[0059] Specifically, in the embodiments of the present application, an SPDT RF switch is used, so that the probe has the function of program control, while the existing near-field scanning system does not have this function. The SPDT RF switch can further improve the efficiency, reduce the operation of manually switching the components of the electromagnetic field, but instead use electrical signal control, and enables the program to quickly switch states, making the entire scanning system more automated and intelligent. Therefore, in the case of using an electromagnetic field near-field probe with multiple components, such as a probe including six components of Ez, Ex, Ey, Hx, Hy, and Hz, the embodiments of the present application can enable the existing scanning system to implement the function of a six-component near-field scanning system.

[0060] In the embodiments of the present application, the data of the multi-component electromagnetic field near-field probe is switched by an SPDT RF switch, and the SPDT RF switch is controlled by an external electrical signal. Through the MCU as a relay control unit, a control chain of PC-MCU-near-field probe is realized. In the embodiments of the present application, the electric and magnetic field components are simultaneously obtained through time division multiplexing at the same measurement point. At each measurement point, the acquisition of the electric and magnetic field components is realized by quickly switching the probe mode, where the switching time can be ignored, and the two signals are obtained almost simultaneously. Moreover, the obtained signals are the electric and magnetic field signals at the same measurement point, reducing the position error caused by replacing the probe and resweeping. The present application realizes the direct acquisition of multi-component electromagnetic field data within a single scan, significantly reducing the scanning time.

[0061] Refer to Figure 4, in one embodiment, the scanning probe of the present application scans according to a set route. In the existing scanning system, only one electromagnetic field component, either electric field or magnetic field, can be collected at each scanning point. However, the probe of the present application can obtain multiple electromagnetic field components simultaneously at a single scanning point. For example, first control the SPDT radio frequency switch to make the multi-component near-field probe output the electric field component; after collecting the electric field component, then control the SPDT radio frequency switch to make the multi-component near-field probe output the magnetic field component, so as to obtain multiple measurement components of the electromagnetic field simultaneously in one scan.

[0062] Referring to Figure 5 , an embodiment of the present application provides a near-field scanning system, which includes a control host, a receiver, an electric moving device, and a hybrid probe. The control host is electrically connected to the receiver, the control host is electrically connected to the electric moving device, the receiver is electrically connected to the hybrid probe, and the hybrid probe is fixedly installed on the mobile end of the electric moving device.

[0063] Specifically, the embodiment of the present application is specifically a multi-component near-field scanning system, which includes a receiver, a signal source, a multi-component near-field probe, an electric moving module, and a PC. Among them, the control host is the PC, and the electric moving device is the electric moving module.

[0064] In the embodiment of the present application, the hybrid probe is clamped on the electric moving module by a supporting fixed fixture, and is suspended above the surface of the device under test without contacting the device under test. The spectrum analyzer is used as the receiver and is connected to the multi-component near-field probe.

[0065] Among them, there is at least one receiver, such as a vector network analyzer, a spectrum analyzer, an oscilloscope, a lock-in amplifier, etc. It can also be multiple. The signal switching circuit is used to realize the signal switching with multiple receivers, and the type and quantity of the receivers can be changed according to actual needs.

[0066] The signal source is a signal generator or an arbitrary waveform generator, and whether to use it is determined according to the device under test scanned by the near-field scanning system and the test requirements.

[0067] The multi-component near-field probe is a probe that can detect the electric field and magnetic field simultaneously, or can also be a near-field probe that can detect different components of the electric field or different components of the magnetic field. Its working state is switched through an external control signal, such as switching to the electric field or switching to the magnetic field.

[0068] The electric moving device is a three-axis electric moving stage or can also be a robotic arm. The scanning probe is fixedly installed on the mobile end of the electric moving device, and the position of the probe is adjusted through the electric moving device to realize automatic detection.

[0069] The PC is used to realize the program control of the entire scanning system.

[0070] In one embodiment, the object to be measured is placed on the object placement table of the electric three-axis moving table and set to a specific working state according to the test requirements. When the electric three-axis moving table receives the scanning parameters and the "start scanning" instruction output by the host scanning system, the electric three-axis moving table will move the probe to the set scanning area and traverse the set measurement points. When the electric three-axis moving table holds the probe and moves to any measurement point, the dual-component electromagnetic field near-field probe will measure and transmit the electric field Ez and magnetic field Hx or Hy that it can detect. The detection mode of the dual-component electromagnetic field near-field probe is controlled and switched by the scanning system. The spectrum analyzer collects the electric and magnetic field components of the measurement points according to the control of the scanning system. After the collection is completed, the electromagnetic field distribution map is reconstructed by realizing the electric and magnetic field distributions in the set scanning area.

[0071] An embodiment of the present application provides a scanning method configured in a near-field scanning system, including:

[0072] The control host receives the scanning mode information;

[0073] The electric moving device obtains the scanning mode information and adjusts its position according to the measurement point coordinate information corresponding to the scanning mode information;

[0074] The hybrid probe obtains the scanning mode information and performs electromagnetic hybrid detection on the object to be measured according to the scanning mode information, and obtains the electric field voltage information and magnetic field voltage information for output to the control host or the receiver.

[0075] Specifically, the control logic of the present application is as follows: First, select the scanning mode through the host scanning system, and determine the scanning range, interval, and scanning method. The scanning method includes various types, such as point-by-point scanning and fast scanning. According to the measurement point coordinates output by the system, the electric three-axis moving table holds the probe and moves to measurement point n. The default mode of the dual-component electromagnetic field near-field probe is the electric field. The system records the spectrum analyzer information of the current measurement point n and records the scanning status information. Switch the mode of the dual-component electromagnetic field near-field probe to the magnetic field. The system records the spectrum analyzer information of the current measurement point n and records it as the magnetic field spectrum data. Reset the mode of the dual-component electromagnetic field near-field probe to the electric field and record the scanning status information. Record the spectrum data of the electric field and magnetic field and record the scanning status. Determine whether the current measurement point is the last measurement point. If so, end the scanning, record the electromagnetic field spectrum data of all measurement points, and the scanning status of all measurement points. The abnormal scanning points recorded in the scanning status will be added to the measurement points again. Otherwise, continue to the next measurement point and repeat the step of recording the scanning status information. Input the area range, frequency, electric field or magnetic field to reconstruct the electromagnetic field, and the scanning system will reconstruct the corresponding electromagnetic field.

[0076] This application combines a multi-component near-field probe and a multi-component scanning system, achieving the effect of obtaining information on multiple electromagnetic field components in a single measurement through time-division multiplexing, without the need for additional post-acquisition signal processing, greatly enhancing the rate of near-field scanning. This makes near-field scanning more convenient and improves the efficiency of obtaining electric and magnetic field components in near-field scanning.

[0077] Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the above-described devices and products can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0078] In several embodiments provided by this application, it should be understood that the disclosed methods, systems, devices, and program products can be implemented in other ways.

[0079] In addition, in each embodiment of this application, each functional unit can be integrated into a processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-integrated units can be implemented in the form of hardware or in the form of software functional units.

[0080] As described above, the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit them; although this application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of each embodiment of this application.

Claims

1. A hybrid probe, characterized in that: include: A detection component, used for detecting and obtaining electromagnetic mixed information; A signal processing unit is used to obtain electromagnetic mixed information, separate and process the electromagnetic mixed information, and obtain electric field voltage information and magnetic field voltage information; The signal switching unit is used to obtain electric field voltage information, magnetic field voltage information and a control signal, and output the electric field voltage information or the magnetic field voltage information according to the control signal.

2. The hybrid probe according to claim 1, characterized in that: The detection component comprises a sensing layer and two shielding layers, and the middle part of the sensing layer is arranged between the shielding layers.

3. The hybrid probe according to claim 2, characterized in that: The sensing layer is provided with a detection sensing end and a detection output end, the detection sensing end is one end of the sensing layer, the detection output end is the other end of the sensing layer, the detection sensing end is used to detect electromagnetic mixed information, and the detection output end is used to connect a signal processing unit.

4. The hybrid probe according to claim 3, characterized in that: The signal processing unit is an inverting hybrid coupler, the input end of the inverting hybrid coupler is connected to the detection output end, and the output end of the inverting hybrid coupler is connected to the signal switching unit.

5. The hybrid probe according to claim 1, characterized in that: The signal switching unit is a SPDT radio frequency switch.

6. The hybrid probe according to claim 3, characterized in that: The detection output end includes a first output end, and the first output end is used to output the sum of electric field voltage information and magnetic field voltage information.

7. The hybrid probe according to claim 6, characterized in that: The detection output end includes a second output end, and the second output end is used to output the difference between the electric field voltage information and the magnetic field voltage information.

8. The hybrid probe according to claim 5, characterized in that: The outputting of the electric field voltage information or the magnetic field voltage information according to the control signal is specifically as follows: When the control signal is the first control signal, outputting the electric field voltage information; When the control signal is the second control signal, the magnetic field voltage information is output.

9. A near-field scanning system, characterized in that: It includes a control host, a receiver, an electric mobile device and a hybrid probe as described in claims 1-8, wherein the control host is electrically connected to the receiver, the control host is electrically connected to the electric mobile device, the receiver is electrically connected to the hybrid probe, and the hybrid probe is fixedly installed on the mobile end of the electric mobile device.

10. A scanning method, characterized in that: Configured in near-field scanning system, including: The control host receives the scanning mode information; The electric moving device obtains the scanning mode information and adjusts the position according to the coordinate information of the measuring point corresponding to the scanning mode information; The hybrid probe acquires scanning mode information, performs electromagnetic hybrid detection on the object to be detected according to the scanning mode information, and obtains electric field voltage information and magnetic field voltage information for output to a control host or a receiver.

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