Substrate clamping jig equipped with substrate protector

Abstract

The present invention relates to a substrate clamping jig equipped with a substrate protector, in which a flexible material protection cap equipped with a plurality of first gripping jaws contacting the end portions of the first gripping jaws in a manner to clamp and grip the edge portions of a substrate vulnerable to impact, thereby functioning as a buffer, and the inner side structure of the opening portion of the protection cap is improved, thereby preventing the protection cap from being separated after the protection cap is combined with the first gripping jaws. Another object of the present invention relates to a substrate clamping jig equipped with a substrate protector, in which a structure equipped with a non-slip function is improved, thereby preventing the protection cap from slipping with respect to the substrate at the edge portions of the substrate contacting the protection cap.

Description

TECHNICAL FIELD

[0001] The present invention relates to a substrate clamping jig equipped with a substrate protection member More particularly, the present invention relates to a substrate clamping jig equipped with a substrate protection member, in which a flexible material protection cap is provided to protect a substrate by being combined with a first gripping clamp having a spring shape and being in contact with an edge portion of a substrate to be easily affected by an impact, and a structure of an opening portion of the protection cap is improved to prevent the protection cap from being separated after being combined with the first gripping clamp. BACKGROUND

[0002] Generally, a printed circuit board (PCB) is the most basic component used in electronic communication devices and the like, and has been developed in the direction of multi-layering, fine patterning, miniaturization, and packaging, as electronic products have tended to be smaller, thinner, higher density, and packaged, and personal portable in recent years.

[0003] Accordingly, in order to improve the fine patterning ability, reliability, and design density of a printed circuit board, there has been a tendency to change raw materials and to use a composite structure in the layer configuration of a circuit, and components have also changed from a dual in-line package (DIP) type to a surface mount technology (SMT) type, thereby improving the mounting density.

[0004] In addition, a printed circuit board includes a circuit pattern for electrically connecting a plurality of electronic components to each other, and includes bumps electrically connected to the circuit pattern. The electronic components are electrically connected to the bumps and mounted on the printed circuit board, thereby allowing the electronic components to be electrically connected to each other.

[0005] In recent years, with the development of the semiconductor and display device industries and an increase in consumer demand for products to be smaller, thinner, and lighter, there is an urgent need to develop a technology for thinning a display panel (panel) manufactured in a glass bonding form. Specifically, an etching technology for patterning a fine pattern on a substrate has received much attention.

[0006] That is, along with the thinning of the device, the thickness of the glass used in the liquid crystal display panel (LCD) substrate or the like is also required to be ultra-thinned, and the thinning technology as described above is achieved by etching the display panel.

[0007] As the prior art for the thinning of the panel using the etching method as well known at present, there are included the dip method and the spray method or the like.

[0008] Especially, in the case of the cross-sectional etching for etching or thinning the cross section of the substrate by supplying the etching solution from the outside of the glass substrate, as in the spray method, in general, the following process is performed.

[0009] First, in order to allow the substrate to be closely fixed to the substrate stage for fixing the substrate, a protective film (such as a tape or the like) is formed, and then the contact surface of the substrate and the substrate stage is sealed after the substrate is closely fixed, and then the etching is performed by supplying the etching solution to one side surface of the substrate using the etching module.

[0010] However, the etching process as described above is performed in the state that the thickness of the substrate before the etching is a certain degree or more, and after the etching, the thickness of the substrate becomes very thin, and thus in the process of removing the sealing material and detaching the tape, there is a problem that the functional film on the substrate can be damaged or the circuit on the back surface of the etched surface of the substrate can be damaged.

[0011] As the prior art related to the substrate clamping jig equipped with the substrate protection member, as disclosed in Korean Registered Patent Gazette No. 10-1038572 "Substrate drug processing system equipped with vacuum substrate jig" (registered date: May 26, 2011), as a drug processing system for thinning or forming a pattern of the substrate by supplying the etching solution to the substrate using the etching solution supply module, there are included a vacuum substrate jig body formed in a shape corresponding to the substrate, a plurality of vacuum holes connected to a vacuum line for substrate adsorption by being formed on the vacuum substrate jig body, and a sealing portion for sealing the surface of the substrate closely fixed to the surface of the vacuum substrate jig.

[0012] As described above, in the case of using the vacuum pressure, since the vacuum flow path and the vacuum hose need to be installed on the substrate, there is a problem that the structure of the substrate becomes complicated, and since a separate vacuum device for forming the vacuum pressure needs to be additionally installed, there is also a problem that the manufacturing cost is significantly increased and the printed circuit board is damaged due to the vacuum pressure.

[0013] As another prior art related to the existing substrate clamping jig equipped with a substrate protector, as disclosed in Korean Patent Laid-Open Publication No. 10-2022-150488 "Jig device for substrate gripping of substrate processing apparatus" (Publication Date: 2022.11.11), it is a jig device for individually gripping a substrate in a substrate processing apparatus that continuously moves and processes a substrate in a state where the substrate is vertically upright, including: a jig frame consisting of an upper bar, a lower bar, a left side bar, and a right side bar in a rectangular shape; upper and lower clamps, a plurality of which are respectively installed along the extension direction of the upper and lower bars, for gripping the upper and lower ends of the substrate; and a side end gripping mechanism installed at one or more of the left and right side bars for gripping the side end of the substrate.

[0014] However, in the case of the existing substrate being a glass substrate, a printed circuit board (PCB), or a flexible printed circuit board (FPCB) that is easily affected by external impact, a dent or a crack can occur at the edge of the substrate during the clamping process of the upper and lower clamps due to the external impact force occurring when one of the upper and lower clamps contacts the edge of the substrate.

[0015] Prior Art Documents

[0016] Patent Documents

[0017] (Patent Document 1) Korean Registered Patent Publication No. 10-1038572 "Substrate pharmaceutical processing system equipped with vacuum substrate jig" (Registration Date: 2011.05.26)

[0018] (Patent Document 2) Korean Patent Laid-Open Publication No. 10-2022-150488 "Jig device for substrate gripping of substrate processing apparatus" (Publication Date: 2022.11.11) SUMMARY

[0019] The present application aims to solve the problems as described above, and the purpose is to provide a substrate clamping jig equipped with a substrate protector, which is equipped with a protective cap of a flexible material that protects the substrate by being combined to the end of a plurality of first gripping clamps that contact in a manner of clamping and gripping the edge portion of a substrate that is easily affected by impact, thereby functioning as a buffer, and the inside structure of the opening portion of the protective cap is improved, thereby preventing the protective cap from being separated after being combined with the first gripping clamps, and the structure of the protective cap is improved.

[0020] Another object of the present invention is to provide a substrate clamping jig equipped with a substrate protection member having an improved anti-slip structure and capable of preventing the protective cap from sliding relative to the substrate at the edge of the substrate in contact with the protective cap.

[0021] In order to achieve the above-mentioned purpose, the present invention is characterized in that it includes: a fixture frame, a middle hole is formed in order to make the center open The rectangular frame is in the form of a first, second, third and fourth frame; the second grasping clamp is respectively arranged to at least one of the first, second, third and fourth frames, and is extended from the inner edge of at least one of the first, second, third and fourth frames to the central hole, so that the edge of the substrate can be placed; the first grasping clamp is made of metal material and is arranged to at least one of the first, second, third and fourth frames on which the second grasping clamp is installed, and the clamping part that clamps the edge of the substrate at the corresponding position facing the second grasping clamp by being combined in a manner surrounding the outer periphery of the hinge axis is rotated toward the edge of the substrate by means of elastic force; and a protective cap is made of flexible material, embedded in a manner surrounding the outer side of the clamping part of the first grasping clamp, and an opening for the clamping part to enter is formed on one side.

[0022] In addition, in order to achieve the above-mentioned purpose, another feature of the present invention is that it includes: a jig frame, which is a rectangular frame with a central hole formed in order to make the center open, and is composed of a first, second, third, and fourth frames; a lifting frame, which is configured to the inner edges of the third and fourth frames in a manner that the two side ends can be lifted and lowered along the upper and lower directions; a second grabbing clamp, which is respectively configured to the first frame and the lifting frame at intervals, and is extended from the inner edges of the first frame and the lifting frame to the central hole, so that the edge of the substrate can be placed; a first grabbing clamp, which is made of metal material and is configured to the first frame and the lifting frame on which the second grabbing clamp is installed, and the clamping part that clamps the edge of the substrate at a corresponding position facing the second grabbing clamp by being combined in a manner surrounding the outer periphery of the hinge axis is rotated toward the edge of the substrate by means of elastic force; and a protective cap, which is made of flexible material and is embedded in a manner surrounding the outer side of the clamping part of the first grabbing clamp, and an opening is formed on one side for the clamping part to enter.

[0023] The protective cap has a space portion formed inside for the clamping portion to enter and accommodate it, and protrusions are formed on the inner upper surface and inner bottom surface of the space portion in directions facing each other, thereby forming a gap portion that is smaller than the thickness of the clamping portion.

[0024] The protrusion of the protective cap is formed in such a way that the height of the slit portion on one side of the opening is higher than the height of the slit portion on the other side of the inner space portion in order to form the height difference of the slit portion.

[0025] The protective cap is formed of silicone resin or fluororubber material.

[0026] The first grabbing clamp is formed in a spring shape with both end portions elastically supported by support blocks, and the clamping portion in the middle is formed in a hook shape that can enter and be embedded in the interior of the protective cap.

[0027] The protective cap has a scratch portion formed of a plurality of grooves on a side surface that contacts the substrate to prevent sliding relative to the substrate.

[0028] The present invention is equipped with a plurality of first grasping clamps each having a winding portion for clamping and grasping the edge of a substrate, and a protective cap made of a flexible material with a buffering function is combined at the end of the spring-shaped first grasping clamp, thereby preventing the end of the first grasping clamp from directly contacting the edge of the substrate that is susceptible to external impact during the process of clamping and grasping the edge of the substrate using the first and second grasping clamps, thereby preventing the occurrence of indentations or cracks on the edge of the substrate during the process of clamping and grasping the edge of the substrate.

[0029] In addition, the present invention forms a break in the space formed inside the protective cap. The protrusion not only allows the end of the first grabbing clamp to easily enter the interior of the protective cap, but also prevents the protective cap from being easily separated from the first grabbing clamp after the protective cap is combined with the end of the first grabbing clamp.

[0030] In addition, the clamping portion of the first grabbing clamp of the present invention is formed in a hook shape, and after the clamping portion enters the interior of the protective cap, it is interfered by the protrusion, thereby preventing the first grabbing clamp from being separated from the protective cap.

[0031] Furthermore, the present invention can prevent the protective cap from sliding relative to the substrate by forming a scratch portion consisting of a plurality of grooves on one side of the protective cap that contacts the edge of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a perspective view illustrating a substrate clamping jig equipped with a substrate protection member according to the present invention.

[0033] Figure 2 It is an oblique view of the first and second grabbing clamps of the present invention.

[0034] Figure 3 is a perspective view of the protective cap of the present application.

[0035] Figure 4 is a cross-sectional view of the A-A line in Figure 3

[0036] Figure 5 is a cross-sectional view illustrating a state in which the clamping portion of the first gripping clamp of the present application is housed into the space portion of the protective cap.

[0037] Figure 6 is a use state view illustrating a state in which the edge of the substrate is clamped to the first and second gripping clamps and the protective cap of the present application.

[0038] Figure 7 is a perspective view illustrating another modification of the protective cap of the present application.

[0039] BRIEF DESCRIPTION OF DRAWINGS

[0040] 50: substrate

[0041] 100: substrate clamping jig

[0042] 110: jig frame

[0043] 110-1: middle hole

[0044] 111, 112, 113, 114: first, second, third, fourth frames

[0045] 120: first gripping clamp

[0046] 121, 122: winding portions

[0047] 125: clamping portion

[0048] 150: lifting frame

[0049] 210: support block

[0050] 220: hinge shaft

[0051] 300: protective cap

[0052] 301: opening portion

[0053] 305: space portion

[0054] 310: protruding portion

[0055] 320: step

[0056] 330: scratch portion DETAILED DESCRIPTION

[0057] ​In describing the present application, when it is determined that a detailed description of related known technologies or configurations can cause the gist of the present application to become unclear, detailed descriptions thereof will be omitted. Also, terms used later are terms defined in consideration of functions in the present application, and can be changed according to the intention or custom of a user, etc. Therefore, they should be defined based on the entire contents of the specification. Also, when described as "including" a certain configuration element, unless explicitly stated to the contrary, it does not mean excluding other configuration elements, but means that other configuration elements can also be included.

[0058] Referring to Figures 1 to 7 , the substrate clamping jig 100 equipped with a substrate protector according to the present application includes: a jig frame 110 formed in a rectangular frame shape with a central hole 110-1 formed for a central opening, composed of first, second, third, and fourth frames 111, 112, 113, and 114; second gripping tongs 130 respectively disposed apart into at least one of the first, second, third, and fourth frames 111, 112, 113, and 114, extending from the inner edge of at least one of the first, second, third, and fourth frames 111, 112, 113, and 114 to the central hole 110-1, allowing the edge portion of the substrate 50 to be seated; first gripping tongs 120 composed of a metal material, disposed into at least one of the first, second, third, and fourth frames 111, 112, 113, and 114 in which the second gripping tongs 130 are installed, rotating toward the edge side of the substrate 50 by means of elastic force through the clamping portion 125 that clamps the edge of the substrate 50 in a corresponding position facing the second gripping tongs 130 by being combined in a manner surrounding the outer circumference of the hinge shaft 220; and a protective cap 300 composed of a flexible material, embedded in a manner surrounding the outside of the clamping portion 125 of the first gripping tongs 120, and having an opening portion 301 formed in one side portion through which the clamping portion 125 can enter.

[0059] Among them, the substrate 50 can be a glass substrate, a printed circuit board (PCB), or a flexible printed circuit board (FPCB) that is easily affected by external impact.

[0060] Referring to Figure 1 and Figure 2 , the jig frame 110 is formed in a rectangular frame shape with a central opening for seating the substrate 50, composed of first, second, third, and fourth frames 111, 112, 113, and 114.

[0061] A plurality of first and second gripping clamps 120 and 130 are arranged at positions apart from each other on at least one of the first, second, third, and fourth frames 111, 112, 113, and 114 of the jig frame 110, and a case in which the first gripping clamps 120 are mounted to the first frame 111 will be described below.

[0062] In addition, a lifting frame 150, in which both side end portions are arranged to be lifted in the upward and downward directions, is arranged to the inner side edges of the third and fourth frames 113 and 114 of the jig frame 110, and a plurality of first and second gripping clamps 120 and 130 are arranged at positions apart from each other in order to grip and hold the lower side edge of the substrate 50. Figures 1 to 7 The substrate gripping jig 100, in which the lifting frame 150 is arranged as described above, includes a jig frame 110, which is in the form of a rectangular frame having a central opening in which a hole 110-1 is formed, and is composed of first, second, third, and fourth frames 111, 112, 113, and 114; a lifting frame 150, in which both side end portions are arranged to be lifted in the upward and downward directions, is arranged to the inner side edges of the third and fourth frames 113 and 114; second gripping clamps 130, which are arranged at positions apart from each other to the first frame 111 and the lifting frame 150, respectively, and are extended from the inner side edges of the first frame 111 and the lifting frame 150 to the hole 110-1, so that the edge portions of the substrate 50 can be seated; first gripping clamps 120, which are composed of a metal material, are arranged to the first frame 111 and the lifting frame 150 in which the second gripping clamps 130 are mounted, and the gripping portions 125, which grip the edges of the substrate 50 at positions facing the second gripping clamps 130 by being combined in a manner surrounding the outer periphery of the hinge shaft 220, are rotated toward the edge side of the substrate 50 by the elastic force; and a protective cap 300, which is composed of a flexible material, is inserted in a manner surrounding the outside of the gripping portions 125 of the first gripping clamps 120, and an opening portion 301, through which the gripping portions 125 can pass, is formed at one side portion.

[0063] The lifting frame 150 can be moved in the upward and downward directions according to the height of the substrate 50, thereby improving the compatibility with the substrate 50.

[0064] That is, the lifting frame 150 can be lifted and lowered in the upward and downward directions on the inner sides of the third and fourth frames 113 and 114 according to the height of the substrate 50, so that the first and second grasping clamps 120 and 130 configured on the lifting frame 150 can clamp the lower edge of the substrate 50, and the lifting frame 150 adopts a structure in which its movement in the lower direction is restricted when it is suspended to the lower edge of the substrate 50 by the clamping force of the first and second grasping clamps 120 and 130 that clamp the lower edge of the substrate 50.

[0065] The first grabbing clamp 120 is supported by the support block 210 fixedly mounted to the first frame 111 or the lifting frame 150 at both end portions, and the clamping portion 125 located in the middle is formed in the shape of a spring bent in the shape of a hook that can enter and embed into the interior of the protective cap 300.

[0066] Furthermore, the first grabbing clamp 120 includes a plurality of winding portions 121 and 122 that are coupled in a coil-like manner around the left and right outer circumferences of the hinge shaft 220. These winding portions are elastically supported by a support block 210 that is fixed to the first frame 111 and the lifting frame 150 at its left and right ends, respectively. This provides an elastic force that causes the first grabbing clamp 120 to rotate toward the second grabbing clamp 130. Specifically, the first grabbing clamp 120 can rotate the clamping portion 125, which is coupled around the outer circumference of the hinge shaft 220 and clamps the edge of the substrate 50 at a corresponding position facing the second grabbing clamp 130, toward the edge of the substrate 50 by virtue of the elastic force. This allows the clamping portion 125 to grip a side of the edge of the substrate 50 positioned on the edge of the second grabbing clamp 130, thereby clamping and supporting the substrate 50 on the jig frame 110.

[0067] The first grabbing clamp 120 is coupled in such a manner that the clamping portion 125 located in the middle enters the inner space 305 through the opening 301 of the protective cap 300 and is embedded in the protective cap 300 .

[0068] The protective cap 300 is as follows Figure 3 、 Figure 4 as well as Figure 5 As shown, a space portion 305 is formed inside for the clamping portion 125 to enter and accommodate it, and protrusions 310 are formed on the inner upper surface and the inner bottom surface of the space portion 305 along directions facing each other, thereby forming a gap portion that is smaller than the thickness of the clamping portion 125.

[0069] By doing so, the protrusion 310 can interfere with the clamping portion 125 after the clamping portion 125 formed in the form of a hook enters the inside of the protective cap 300, thereby preventing the clamping portion 125 from being separated from the protective cap 300.

[0070] The protrusion 310 of the protective cap 300 is formed with a step 320 in order to form a height difference of the gap portion, and is formed in such a way that the height of one side gap portion h1 on the side of the opening portion 301 is higher than the height of the other side gap portion h2 on the side of the space portion 305 through the step 320.

[0071] That is, the protrusion 310 can make it easier to enter the inside of the space portion 305 through the opening portion 301 of the protective cap 300 by the height of the step 320, and can also function to prevent the protective cap 300 from being separated from the clamping portion 125.

[0072] In order to prevent the indentation phenomenon of the contact portion of the substrate 50, the protective cap is formed of a flexible material such as silicone or fluororubber material.

[0073] In addition, the protective cap 300 is formed with a scratch portion 330 composed of a plurality of grooves in order to prevent sliding with respect to the substrate 50 on the side surface in contact with the substrate 50, as shown in Figure 7

[0074] The plurality of grooves of the scratch portion 330 can be formed in one direction or in directions crossing each other, but as shown in Figure 7

[0075] The second gripping clamp 130 is formed and fixed in a form extending from the inner edge portion of the first frame 111 to the side of the hole 110-1 to support the other side surface of the edge of the substrate 50.

[0076] ​​The present application, as constructed as above, relates to a substrate clamping jig 100 equipped with a substrate protector which clamps and transfers the edge portion of a substrate 50 to a drug treatment process in order to perform a drug treatment, and can rotate the first gripping clamp 120 among the first and second gripping clamps 120, 130 of the first frame 111 of a jig frame 110 and the first and second lifting frames 150 in a manner of lifting upward based on the hinge shaft 220, thereby opening the first and second gripping clamps 120, 130, and after placing the edge portion of the substrate 50 to the opened second gripping clamp 130, rotating the first gripping clamp 120 to the second gripping clamp 130, thereby clamping and gripping the upper and lower edge portion sides of the substrate 50 placed on the second gripping clamp 130 by the clamping portion 125 of the end portion of the first gripping clamp 120, and thereby clamping and supporting the substrate 50 on the jig frame 110.

[0077] At this time, since the protective cap 300 is embedded and combined to the clamping portion 125 of the end portion of the first gripping clamp 120 which comes into contact with the edge portion of the substrate 50, the protective cap 300 combined to the clamping portion 125 of the first gripping clamp 120 can prevent the first gripping clamp 120 from directly coming into contact with the substrate 50 when the first gripping clamp 120 performs a substrate clamping operation, i.e., the protective cap 300 comes into contact with the edge portion of the substrate, thereby protecting the substrate from being affected by external impact occurring when the first gripping clamp 120 performs a rotating operation.

[0078] The protective cap 300 as described above is constructed of a flexible material, and thus can buffer impact between the edge portion of the substrate (e.g., a glass substrate) which is easily affected by external impact when the first gripping clamp 120 performs a substrate clamping operation, thereby preventing the edge portion of the substrate 50 from being damaged, e.g., being indented or cracked, by the first gripping clamp 120.

[0079] The first gripping clamp 120 is combined in a manner that a plurality of winding portions 121, 122 are wound in a spring shape on the hinge shaft 220, and thus an elastic force is generated, thereby forming a force which rotates the end portion of the first gripping clamp 120 to the substrate 50 and the second gripping clamp 130.

[0080] At this time, the first gripping clamp 120 combined with the protective cap 300 can be rotated to clamp and grip the edge portion side of the substrate 50 in a state where the substrate 50 is placed and supported on the second gripping clamp 130 on the other side of the edge portion.

[0081] In addition, the protective cap 300 is as shown in FIG. Figure 7 As shown, when the first grabbing clamp 120 rotates, a scratching portion 330 consisting of multiple grooves is formed on the side surface that contacts the edge of the substrate, so that the scratching portion 330 has an anti-slip function between one side of the protective cap 300 and the edge of the substrate.

[0082] That is, the present invention is equipped with a plurality of first grasping clamps 120 respectively provided with winding portions 121 and 122 for clamping and grasping the edge portion of the substrate 50, and a protective cap 300 of a flexible material with a buffering function is combined at the end portion of the spring-shaped first grasping clamp 120, so that in the process of clamping and grasping the edge of the substrate 50 using the first and second grasping clamps 120 and 130, the end portion of the first grasping clamp 120, i.e., the clamping portion 125, can be prevented from directly contacting the edge portion of the substrate 50 that is susceptible to external impact, thereby preventing indentation or cracks from occurring on the edge of the substrate 50 in the process of clamping and grasping the edge portion of the substrate 50.

[0083] In addition, the present invention forms a protrusion 310 with a break 320 in the space portion 305 formed inside the protective cap 300, thereby not only allowing the end of the first grabbing clamp 120 to easily enter the interior of the protective cap 300, but also preventing the protective cap 300 from being easily detached from the first grabbing clamp 120 after the protective cap 300 is combined with the end portion of the first grabbing clamp 120, namely the clamping portion 125.

[0084] Furthermore, the clamping portion 125 of the first grabbing clamp 120 of the present invention is formed in a hook shape, and after the clamping portion 125 enters the interior of the protective cap 300 , it is interfered with by the protrusion 310 , thereby preventing the first grabbing clamp 120 from being separated from the protective cap 300 .

[0085] Furthermore, the present invention can prevent the protective cap 300 from sliding relative to the substrate 50 by forming a scratch portion 330 composed of a plurality of grooves on one side of the protective cap 300 that contacts the edge of the substrate 50 .

[0086] As described above, specific embodiments are described in the detailed description of the present invention. However, various modifications may be made without departing from the scope of the present invention. Therefore, the scope of the present invention is not limited to the embodiments described above, but is defined within the scope of the claims described below and their equivalents.

[0087] That is, the present application described above is not limited to the specific preferred embodiments described above, but various modifications can be made without departing from the spirit of the present application as claimed in the claims, and such modifications are included in the scope of the present application as recited in the claims.

Claims

1. A substrate clamping fixture equipped with a substrate protection member, characterized in that: include: The fixture frame (110) is in the form of a rectangular frame with a central hole (110-1) formed in order to open the center, and is composed of first, second, third, and fourth frames (111, 112, 113, 114); The second grabbing clamp (130) is respectively arranged to at least one of the first, second, third and fourth frames (111, 112, 113 and 114) at intervals, and is extended from the inner edge of at least one of the first, second, third and fourth frames (111, 112, 113 and 114) toward the central hole (110-1), so as to be arranged on the edge of the substrate (50); A first grabbing clamp (120) is made of a metal material and is arranged on at least one of the first, second, third, and fourth frames (111, 112, 113, and 114) on which the second grabbing clamp (130) is installed, and a clamping portion (125) for clamping the edge of the substrate (50) at a corresponding position facing the second grabbing clamp (130) is rotated toward the edge of the substrate (50) by means of an elastic force by being coupled around the outer periphery of the hinge shaft (220); as well as, The protective cap (300) is made of a flexible material and is embedded in a manner surrounding the outside of the clamping portion (125) of the first grabbing clamp (120), and an opening (301) is formed on one side thereof for the clamping portion (125) to enter. The protective cap (300) has a space portion (305) formed therein for the clamping portion (125) to enter and accommodate the clamping portion. On the inner upper surface and the inner bottom surface constituting the space portion (305), protrusions (310) are formed in directions facing each other, thereby forming a gap portion that is smaller than the thickness of the clamping portion (125).

2. A substrate clamping fixture equipped with a substrate protection member, characterized in that: include: The fixture frame (110) is in the form of a rectangular frame with a central hole (110-1) formed in order to open the center, and is composed of first, second, third, and fourth frames (111, 112, 113, 114); A lifting frame (150) is arranged on the inner edges of the third and fourth frames (113, 114) in a manner such that both end portions thereof can be lifted and lowered in the upward and downward directions; Second grabbing clamps (130) are respectively arranged on the first frame (111) and the lifting frame (150) at intervals, and are extended from the inner edges of the first frame (111) and the lifting frame (150) toward the central hole (110-1) to accommodate the edge of the substrate (50); The first grabbing clamp (120) is made of a metal material and is arranged on the first frame (111) and the lifting frame (150) on which the second grabbing clamp (130) is installed. The clamping portion (125) that clamps the edge of the substrate (50) at a corresponding position facing the second grabbing clamp (130) is rotated toward the edge of the substrate (50) by means of elastic force by being coupled around the outer periphery of the hinge shaft (220); as well as, The protective cap (300) is made of a flexible material and is embedded in a manner surrounding the outside of the clamping portion (125) of the first grabbing clamp (120), and an opening (301) is formed on one side thereof for the clamping portion (125) to enter. The protective cap (300) has a space portion (305) formed therein for the clamping portion (125) to enter and accommodate the clamping portion. On the inner upper surface and the inner bottom surface constituting the space portion (305), protrusions (310) are formed in directions facing each other, thereby forming a gap portion that is smaller than the thickness of the clamping portion (125).

3. The substrate clamping jig equipped with a substrate protection member according to claim 1 or 2, characterized in that: The protrusion (310) of the protective cap (300) is formed in such a way that the height (h1) of the slit portion on one side of the opening portion (301) is higher than the height (h2) of the slit portion on the other side of the inner space portion (305) in order to form a height step difference of the slit portion.

4. The substrate clamping jig equipped with a substrate protection member according to claim 1 or claim 2, characterized in that: The protective cap (300) is formed of silicone resin or fluororubber material.

5. The substrate clamping jig equipped with a substrate protection member according to claim 1 or claim 2, characterized in that: Both side ends of the first grabbing clamp (120) are elastically supported by support blocks (210). The clamping portion (125) in the middle is formed in a hook-shaped bending structure that can enter and embed into the interior of the protective cap (300).

6. The substrate clamping jig equipped with a substrate protection member according to claim 1 or claim 2, characterized in that: The protective cap (300) has a scratch portion (330) formed on a side surface in contact with the substrate, the scratch portion (330) being composed of a plurality of grooves to prevent sliding relative to the substrate.

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