Fluid control structure and control method suitable for microfluidic channels

Abstract

The application relates to a fluid control structure suitable for micro flow channels, a first micro flow channel and a second micro flow channel are provided with a first position in close contact with each other, and the first position comprises a through hole; an elastic diaphragm or an elastic sheet is arranged at the through hole, and a bulk acoustic wave chip faces the through hole; when the bulk acoustic wave chip is in a working state, a jet flow force generated by the bulk acoustic wave chip driving liquid acts on the elastic diaphragm, a second part of the elastic diaphragm is displaced towards the direction of the second micro flow channel to expose the through hole, and the first micro flow channel and the second micro flow channel are communicated. A fluid control method is also provided. The application can realize more fine and flexible control of fluid flow or mixing in the micro flow channels.

Description

Technical Field

[0001] This application relates to the field of microfluidics, and in particular to a fluid control structure and control method suitable for microchannels. Background Technology

[0002] Microchannels are extremely small, typically with diameters in the millimeter, micrometer, or nanometer range. Currently, the control of liquid flow within these microchannels is mostly achieved through liquid injection devices connected to the microchannel inlet, such as controlling the injection or pausing of liquid, or controlling the injection rate, etc.

[0003] This control method indirectly controls the flow of liquid within the microchannel through the injection process of the liquid injection device. However, since it is concentrated at the inlet of the microchannel, it is a relatively coarse control method. It can only control the overall flow of liquid within the entire microchannel and is difficult to achieve fine and flexible control of the fluid within the microchannel.

[0004] Therefore, how to provide a fluid control structure suitable for microchannels to achieve more precise and flexible control of fluid flow or mixing within microchannels is a technical problem that needs to be solved. Summary of the Invention

[0005] In view of the above-mentioned problems of the prior art, this application provides a fluid control structure suitable for microchannels, which can improve the precision and flexibility of fluid flow control in microchannels.

[0006] To achieve the above objectives, a first aspect of this application provides a fluid control structure suitable for microchannels, comprising: a first microchannel and a second microchannel, wherein the first microchannel and the second microchannel include a first position in which they are closely fitted together, and the first position includes a through hole connecting the first microchannel and the second microchannel; an elastic diaphragm, including a first portion and a second portion extending from the first portion; wherein the first portion is fixedly disposed at the first position and located beside the through hole, and the second portion is in a non-fixed state; and the elastic diaphragm covers the through hole in its natural state; and a bulk acoustic wave chip capable of acting on liquid within the first microchannel, wherein when the bulk acoustic wave chip is in a working state, the jet force generated by the bulk acoustic wave chip driving the liquid acts on the elastic diaphragm, causing the second portion of the elastic diaphragm to shift toward the second microchannel to expose the through hole, and to connect the first microchannel and the second microchannel.

[0007] As described above, by controlling the elastic diaphragm through a bulk acoustic wave chip, communication between the first and second microchannels can be achieved, as well as control over fluid flow direction. The fluid control structure of this microchannel can be deployed at desired locations within the microchannel, thus enabling more precise and flexible control of fluid flow within the microchannel.

[0008] As one possible implementation of the first aspect, the magnitude of the displacement of the second part is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip, and / or the maximum value of the displacement causes the elastic diaphragm to block the fluid in the second microchannel.

[0009] As described above, the opening degree of the first microchannel and the second microchannel can be controlled as needed when used as a three-way valve, thereby controlling the mixing degree of the fluid flowing downstream from the first microchannel and the second microchannel.

[0010] As one possible implementation of the first aspect, the bulk acoustic wave chip is positioned such that the direction of the jet force it generates is perpendicular to the through hole at the first position.

[0011] As shown above, the jet force is perpendicular to the elastic diaphragm at the through hole, which allows for better control of the elastic diaphragm using the jet force.

[0012] The second aspect of this application provides a fluid control method using any of the fluid control structures suitable for microchannels described in the first aspect. The method includes: activating a bulk acoustic wave chip, wherein the jet force generated by the bulk acoustic wave chip driving the liquid in a first microchannel acts on an elastic diaphragm, causing a second portion of the elastic diaphragm to shift toward a second microchannel to expose a through-hole, thereby enabling communication between the first microchannel and the second microchannel.

[0013] As one possible implementation of the second aspect, the direction of the horizontal component of the jet force acting on the elastic diaphragm is opposite to the fluid flow direction of the second microchannel. As another possible implementation of the second aspect, fluid control is achieved by controlling the jet force generated by the bulk acoustic wave chip driving the liquid, to realize one of the following:

[0014] By controlling the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement does not block the fluid in the second microchannel, allowing the fluid in the first microchannel to flow into the second microchannel, mix with the fluid in the second microchannel, and flow downstream of the second microchannel.

[0015] By generating the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. This displacement blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow downstream of the second microchannel.

[0016] As a possible implementation of the second aspect, the horizontal component of the jet force acting on the elastic diaphragm is oriented in the same direction as the fluid flow direction of the second microchannel. As another possible implementation of the second aspect, fluid control is achieved by controlling the jet force generated by the bulk acoustic wave chip driving the liquid, to realize one of the following:

[0017] By controlling the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement does not block the fluid in the second microchannel, allowing the fluid in the first microchannel to flow into the second microchannel, mix with the fluid in the second microchannel, and flow downstream of the second microchannel.

[0018] By generating the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow upstream of the second microchannel.

[0019] By generating the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement blocks the fluid in the second microchannel, causing the fluid in the second microchannel to flow into the first microchannel and flow upstream or downstream of the first microchannel.

[0020] As a possible implementation of the second aspect, it further includes: achieving fluid control by controlling the spaced jet force generated by the bulk acoustic wave chip driving the liquid to achieve one of the following:

[0021] By generating intermittent jet force, the displacement of the elastic diaphragm is controlled. The displacement intermittently blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel intermittently, and alternately flow with the liquid in the second microchannel downstream of the second microchannel.

[0022] By generating intermittent jet force, the displacement of the elastic diaphragm intervals is controlled. The displacement does not block the fluid in the second microchannel, allowing the fluid in the first microchannel to be intermittently injected into the second microchannel, mixed with the liquid in the second microchannel, and then flowing downstream of the second microchannel.

[0023] As a possible implementation of the second aspect, when the fluid in the second microchannel is blocked, the fluid in the first microchannel and the fluid in the second microchannel are mixed at the contact point.

[0024] Therefore, by controlling the magnitude of the jet force generated by the bulk acoustic wave chip, the continuity of the jet, and / or the flow of the liquid in the second microchannel, the mixing mode of the liquid in the two microchannels can be affected, and the flow direction of the fluid in the two microchannels can be controlled, so as to achieve flexible control. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of a fluid control structure suitable for microchannels provided in the first embodiment of this application;

[0026] Figure 2 This is a schematic diagram of a fluid control structure suitable for microchannels provided in the second embodiment of this application;

[0027] Figure 3 This is a schematic diagram of an elastic diaphragm including a tangent notch provided in an embodiment of this application;

[0028] Figure 4 This is a schematic diagram of a fluid control structure suitable for microchannels provided in the third embodiment of this application;

[0029] Figure 5 This is a schematic diagram of a fluid control structure suitable for microchannels provided in the fourth embodiment of this application.

[0030] It should be understood that the dimensions and shapes of the blocks in the above structural diagrams are for reference only and should not constitute an exclusive interpretation of the embodiments of the present invention. The relative positions and inclusion relationships between the blocks presented in the structural diagrams are only schematic representations of the structural relationships between the blocks, and are not intended to limit the physical connection methods of the embodiments of the present invention. Detailed Implementation

[0031] The technical solutions provided in this application will be further described below with reference to the accompanying drawings and embodiments. It should be understood that the system architecture and business scenarios provided in the embodiments of this application are mainly for illustrating possible implementations of the technical solutions of this application and should not be construed as the sole limitation on the technical solutions of this application. Those skilled in the art will recognize that the technical solutions provided in this application are equally applicable to similar technical problems as system architectures evolve and new business scenarios emerge.

[0032] It should be understood that the fluid control schemes for microchannels provided in this application include fluid control structures for microchannels and methods for controlling fluids within microchannels based on these structures. Since these technical solutions solve problems using the same or similar principles, some repetitions may not be repeated in the following descriptions of specific embodiments. However, these specific embodiments should be considered as mutually referencing each other and can be combined with each other.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. In case of any inconsistency, the meaning set forth in this specification or derived from the content described herein shall prevail. Furthermore, the terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit this application. To accurately describe the technical content of this application and to accurately understand the invention, the following explanations or definitions of the terms used in this specification are provided before describing specific embodiments:

[0034] 1) Bulk acoustic resonator: In this application, it refers to an acoustic resonator with a frequency typically greater than 1 GHz. Under the excitation of an input signal, it generates ultra-high frequency vibrations and emits bulk acoustic waves, which can act on fluids.

[0035] 2) Jet and vortex are two phenomena of bulk acoustic waves in a fluid. Jet from a bulk acoustic resonator can generate pressure or thrust, while vortex can generate drag. In some embodiments, the density or interval of the pulses input to the bulk acoustic resonator, or the proportion of pulses in the pulse period (the percentage of a pulse's high level within a pulse period), can be controlled to make the bulk acoustic resonator exhibit either a jet generating pressure or thrust, or a vortex generating drag. For example, a smaller pulse proportion (shorter pulses) more strongly indicates a jet, a lower pulse density (pulse continuity) or a larger pulse interval more strongly indicates a jet, and vice versa, a greater tendency to generate vortices.

[0036] The fluid control structure for microchannels provided in this application can be deployed at one or more corresponding locations along the extension direction of the microchannel, depending on the function it performs. This allows for control of multiple locations along the extension direction of the microchannel, improving the precision and flexibility of fluid flow control within the microchannel. The fluid control structure for microchannels provided in this application can also function as a valve, such as a two-way valve or a three-way valve.

[0037] The fluid control structure for microchannels provided in this application can be used in combination to control the flow of liquid within a microchannel, thereby achieving complex functions. For example, when multiple fluid control structures are used to implement valve functions, they can be applied to control the selection and merging of different types of fluid inputs from multiple inlets, or to the selection and merging of outputs from multiple outlets, or to proportional control when multiple fluids merge.

[0038] The solutions provided in this application will now be described in detail with reference to the accompanying drawings and embodiments.

[0039] This application provides a fluid control structure suitable for microchannels, which can realize the function of a valve in microchannels. This embodiment realizes the function of a three-way valve. Figure 1 As shown, the fluid control structure provided in this embodiment includes a microchannel, which includes a first microchannel and a second microchannel, an elastic diaphragm, and a bulk acoustic wave chip. This embodiment can realize valve control of the fluid in the first microchannel and the second microchannel, which is connected to a downstream channel. The downstream channel can be the downstream of the second microchannel.

[0040] The first microchannel and the second microchannel include a first position where they are closely fitted together, and the first position includes a through hole connecting the first microchannel and the second microchannel.

[0041] The elastic diaphragm includes a first part and a second part extending from the first part; wherein the first part is fixedly disposed at the first position and located beside the through hole, and the second part is in a non-fixed state; and the elastic diaphragm covers the through hole in its natural state.

[0042] The bulk acoustic wave chip can act on the liquid in the first microchannel. When the bulk acoustic wave chip is in working state, the jet force generated by the liquid in the bulk acoustic wave chip acts on the elastic diaphragm, causing the second part of the elastic diaphragm to shift toward the second microchannel to expose the through hole and to connect the first microchannel with the second microchannel.

[0043] In some embodiments, the first microchannel and the second microchannel include a first position where they are closely fitted together, meaning that the first microchannel and the second microchannel can be closely fitted together at least at one point. In some embodiments, the first microchannel and the second microchannel are arranged in parallel and are closely fitted together, wherein the first microchannel and the second microchannel may be located in the same plane or in two different planes.

[0044] In some embodiments, the first microchannel and the second microchannel are not arranged in parallel, but have a first position in three-dimensional space that are closely attached to each other, wherein the first microchannel and the second microchannel may be located in two planes, one above the other.

[0045] In some embodiments, the first microchannel and the second microchannel are not arranged in parallel, and at least one is a curved channel with a first position in close contact in three-dimensional space, wherein the first microchannel and the second microchannel may be located in two planes, one above the other. In other embodiments, the first microchannel and the second microchannel may also have a first position in close contact on the same plane, which may be the position where the two channels are tangent (similar to the tangency of a curve and a straight line).

[0046] In some embodiments, the magnitude of the displacement of the second portion of the elastic diaphragm is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip. In some embodiments, the maximum value of the displacement causes the elastic diaphragm to block the fluid in the second microchannel.

[0047] In some embodiments, the degree of displacement of the second part of the elastic diaphragm is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip. Thus, the jet force can be adjusted as needed to achieve the mixing of the fluids in the first microchannel and the second microchannel in different proportions (related to the amount of displacement generated by the jet force acting on the second part of the elastic diaphragm) and flow downstream of the second microchannel.

[0048] In some embodiments, the maximum displacement of the second portion of the elastic diaphragm can contact the inner wall of the corresponding position of the second microchannel, thereby blocking the fluid in the second microchannel. This allows for selective flow between the first and second microchannels, with the fluid flowing downstream of the second microchannel.

[0049] In some embodiments, an elastic diaphragm may cover the through-hole. A second portion of the elastic diaphragm is the opposite end of its first portion. The pressure of the fluid within the second microchannel on the elastic diaphragm causes the second portion of the elastic diaphragm to adhere tightly to the first position. When the bulk acoustic wave chip is not operating, or when the generated jet force has not yet offset the pressure of the fluid within the second microchannel on the elastic diaphragm, the elastic diaphragm isolates the first microchannel from the second microchannel. In some embodiments, the shape and size of the second portion of the elastic diaphragm may be larger than the through-hole, covering the through-hole and its edges. In other embodiments, the shape and size of the elastic diaphragm may precisely match the through-hole, achieving coverage of the through-hole.

[0050] In other embodiments, the portion of the elastic diaphragm surrounding the through-hole is fixedly connected, and the elastic diaphragm can be as follows: Figure 3 As shown, the elastic diaphragm includes tangential openings, and the second portion is located at one or more tangential openings on the elastic diaphragm. Figure 3 The diagram illustrates both straight-line and cross-shaped tangent openings. Preferably, the center of the tangent opening is aligned with the center of the through-hole. When the fluid pressure difference between the second and first microchannels is within a threshold value, the tangent opening remains unchanged and closed, with an elastic diaphragm isolating the first and second microchannels. When the bulk acoustic wave chip operates, the jet force acts on the tangent opening, causing it to open (i.e., the second part of the displacement). For the tangent opening method, the amount of displacement in the second part may be limited, making it more suitable for examples where the fluids from the first and second microchannels are mixed and then flow downstream of the second microchannel.

[0051] In some embodiments, the bulk acoustic wave chip may be located at a position on the inner wall of the first microchannel, or at a position near the inner wall. The position near the inner wall may be located inside or outside the first microchannel, and this position allows the disposed bulk acoustic wave chip to face the through hole. When facing the through hole, the jet force generated by the bulk acoustic wave chip acting on the liquid can directly act on the elastic diaphragm at the through hole.

[0052] In some embodiments, the bulk acoustic wave chip is positioned such that the direction of the jet force it generates is perpendicular to the through-hole at the first position. That is, the bulk acoustic wave chip is oriented directly towards the through-hole.

[0053] In some embodiments, depending on the direction of the jet force to be generated, the bulk acoustic wave chip may be located at the bottom of the first microchannel or on the substrate supporting the microchannel, or at the sidewall of the first microchannel, or perpendicular to the substrate.

[0054] In some embodiments, such as Figure 1 The first embodiment shown or Figure 2 In the second embodiment shown, the first position, with respect to the first microchannel, is the end position of the first microchannel. That is, the end of the first microchannel is in a closed state, and this is the first position. In other embodiments, such as... Figure 4 The third embodiment shown or Figure 5 In the fourth embodiment shown, the first position is not the end position of the first microchannel, but a position on one side wall of the first microchannel.

[0055] In some embodiments, when the end of the first microchannel is closed, the bulk acoustic wave chip can also be disposed at other locations within the first microchannel, and the generated jet force is directed toward the extension direction of the first microchannel, which points toward the direction of the end extension. For example Figure 1 The bulk acoustic wave chip is located at the first bend on the left side of the first microchannel shown in the figure, and the jet force of the bulk acoustic wave chip is directed to the right (i.e., the extension direction of the first microchannel). In this way, the elastic diaphragm at the through hole can be indirectly acted on through the transmission of the force of the liquid.

[0056] In some embodiments, the fluid flow direction within the second microchannel can be as follows: Figure 1 or Figure 2As shown, the flow direction can be opposite to or the same as the direction of the horizontal component of the jet force acting on the elastic diaphragm. By combining the control of the jet force magnitude and / or the control of the fluid force within the first and second microchannels, the flow direction of the fluid within the first and second microchannels can be controlled. Furthermore, within a certain area of ​​the contact zone between the liquid in the first and second microchannels, especially in the area acted upon by the bulk acoustic wave chip, mixing occurs at the contact zone, or the liquid is mixed under the action of the bulk acoustic wave chip. Specifically, this will be detailed in the fluid control method section below.

[0057] This application provides a fluid control method for a microchannel, based on the fluid control structure of the microchannel described in the above embodiments or any optional embodiments. The fluid control method includes:

[0058] When the bulk acoustic wave chip is in working condition, the jet force generated by the liquid in the first microchannel driven by the bulk acoustic wave chip acts on the elastic diaphragm, causing the second part of the elastic diaphragm to shift toward the second microchannel to expose the through hole and to connect the first microchannel with the second microchannel.

[0059] Once the two microchannels are connected, it means that the liquids in the two microchannels can come into contact. Furthermore, the flow direction of the fluids in the two microchannels and the mixing method of the liquids in the two microchannels can be controlled by controlling the magnitude of the jet force generated by the bulk acoustic chip, the continuity of the jet, and / or the flow of the liquid in the second microchannel. Examples of this will be further illustrated later.

[0060] In some embodiments, the jet force acts on the direction of the horizontal component of the elastic diaphragm, such as... Figure 1 As shown, the fluid flow direction is opposite to that of the second microchannel.

[0061] When the horizontal component of the jet force is opposite to the fluid flow direction in the second microchannel, in some embodiments, the following fluid control can be achieved by controlling the jet force generated by the liquid driven by the bulk acoustic wave chip: by controlling the magnitude of the generated jet force, the displacement of the elastic diaphragm is controlled, and the displacement does not block the fluid in the second microchannel, so that the fluid in the first microchannel flows into the second microchannel, mixes with the fluid in the second microchannel, and flows downstream of the second microchannel.

[0062] When the horizontal component of the jet force is opposite to the fluid flow direction in the second microchannel, in some embodiments, the following fluid control can be achieved by controlling the jet force generated by the liquid driven by the bulk acoustic wave chip: by controlling the magnitude of the generated jet force, the displacement of the elastic diaphragm is controlled, and the displacement blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow downstream of the second microchannel.

[0063] In some embodiments, where the displacement generated by the aforementioned elastic diaphragm does not obstruct the fluid within the second microchannel, the bulk acoustic wave chip can generate a continuous jet. The liquid in the first microchannel is continuously injected into the second microchannel, and simultaneously, under the influence of the jet from the bulk acoustic wave chip and the eddy current effect generated by the continuous jet (the jet can act within the second microchannel directly opposite the bulk acoustic wave chip), it continuously mixes with the liquid in the second microchannel and continues to flow downstream within the second microchannel. The extent of the eddy current effect on mixing is also related to the fluid velocity within the second microchannel; the slower the velocity, the more pronounced the effect.

[0064] In some embodiments, where the displacement generated by the elastic diaphragm does not block the fluid in the second microchannel, the bulk acoustic wave chip can generate intermittent jets. The liquid in the first microchannel is intermittently injected into the second microchannel, and the intermittently injected liquid is surrounded and mixed by the liquid in the second microchannel, and continues to flow downstream in the second microchannel along with the liquid in the second microchannel.

[0065] In some embodiments, when the displacement generated by the elastic diaphragm blocks the fluid in the second microchannel, the bulk acoustic wave chip can generate intermittent jets, in which the liquid in the first microchannel is intermittently injected into the second microchannel, and the liquid in the first microchannel is intermittently blocked, thereby forming a state in which the liquids of the two channels alternate sequentially in the first microchannel and continue to flow downstream into the second microchannel.

[0066] In some embodiments, the jet force acts on the direction of the horizontal component of the elastic diaphragm, such as... Figure 2 As shown, the fluid flow direction is the same as that of the second microchannel.

[0067] When the horizontal component of the jet force is in the same direction as the fluid flow in the second microchannel, in some embodiments, the following fluid control can be achieved by controlling the jet force generated by the liquid driven by the bulk acoustic wave chip: by controlling the magnitude of the generated jet force, the displacement of the elastic diaphragm is controlled, and the displacement does not block the fluid in the second microchannel, so that the fluid in the first microchannel flows into the second microchannel, mixes with the fluid in the second microchannel, and flows downstream of the second microchannel.

[0068] When the horizontal component of the jet force is in the same direction as the fluid flow in the second microchannel, in some embodiments, the following fluid control can be achieved by controlling the jet force generated by the liquid driven by the bulk acoustic wave chip: by controlling the magnitude of the generated jet force, the displacement of the elastic diaphragm is controlled, and the displacement blocks the fluid in the second microchannel, so that the fluid in the first microchannel flows into the second microchannel and flows upstream of the second microchannel.

[0069] When the horizontal component of the jet force is in the same direction as the fluid flow in the second microchannel, in some embodiments, the following fluid control can be achieved by controlling the jet force generated by the liquid driven by the bulk acoustic wave chip: by controlling the magnitude of the generated jet force, the displacement of the elastic diaphragm is controlled, and the displacement blocks the fluid in the second microchannel, causing the fluid in the second microchannel to flow into the first microchannel and flow upstream or downstream of the first microchannel.

[0070] In some embodiments, when the elastic diaphragm blocks the fluid in the second microchannel, the fluid in the first microchannel and the fluid in the second microchannel are mixed at the contact portion.

[0071] In some embodiments, where the displacement generated by the aforementioned elastic diaphragm does not block the fluid in the second microchannel, the bulk acoustic wave chip can generate a continuous jet. The liquid in the first microchannel is continuously injected into the second microchannel, and simultaneously, under the action of the jet from the bulk acoustic wave chip and the eddy current effect generated by the continuous jet (the jet can act on the second microchannel directly opposite the bulk acoustic wave chip), it continuously mixes with the liquid in the contact area of ​​the second microchannel and flows downstream of the second microchannel.

[0072] In some embodiments, where the displacement generated by the elastic diaphragm does not block the fluid in the second microchannel, the bulk acoustic wave chip can generate intermittent jets. The liquid in the first microchannel is intermittently injected into the second microchannel, and the intermittently injected liquid is surrounded and mixed by the liquid in the second microchannel, and continues to flow downstream in the second microchannel along with the liquid in the second microchannel.

[0073] In some embodiments, when the displacement generated by the elastic diaphragm blocks the fluid in the second microchannel, the bulk acoustic wave chip can generate intermittent jets, in which the liquid in the first microchannel is intermittently injected into the second microchannel, and the liquid in the first microchannel is intermittently blocked, thereby forming a state in which the liquids of the two channels alternate sequentially in the first microchannel and continue to flow downstream into the second microchannel.

[0074] In some embodiments, where the displacement generated by the aforementioned elastic diaphragm blocks the fluid within the second microchannel, the bulk acoustic wave (BAW) chip can generate a continuous jet. Liquid from the first microchannel is continuously injected into the second microchannel, and simultaneously, under the influence of the BAW chip's jet and the eddy current effect generated by the continuous jet (the jet can act within the second microchannel directly opposite the BAW chip), the liquid in the contact area within the second microchannel continuously mixes with the liquid. If the liquid pressure in the second microchannel is higher than the liquid pressure in the first microchannel, the mixed liquid will flow towards the first microchannel along with the liquid in the second microchannel. Conversely, if the liquid pressure in the second microchannel is lower than the liquid pressure in the first microchannel, the mixed liquid will flow upstream within the second microchannel along with the liquid in the first microchannel.

[0075] As can be seen from the above embodiments, by controlling the magnitude of the jet force generated by the bulk acoustic wave chip, the continuity of the jet, and / or the flow of the liquid in the second microchannel, the mixing mode of the liquid in the two microchannels and the flow direction of the fluid in the two microchannels can be affected.

[0076] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods are not limited to the above embodiments and can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative. For instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between apparatuses or units may be electrical, mechanical, or other forms.

[0077] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0078] Furthermore, the terms "first, second, third, etc." or similar terms such as module A, module B, and module C used in the specification and claims are only used to distinguish similar objects and do not represent a specific ordering of objects. It is understood that, where permissible, a specific order or sequence may be interchanged so that the embodiments of this application described herein can be implemented in an order other than that illustrated or described herein.

[0079] In the above description, the labels of the steps involved, such as S10, S20, etc., do not mean that the steps will necessarily be executed. The order of the steps can be interchanged or executed simultaneously if permitted.

[0080] The term "comprising" as used in the specification and claims should not be construed as limiting itself to what follows; it does not exclude other elements or steps. Therefore, it should be interpreted as specifying the presence of the mentioned feature, integral, step, or component, but does not exclude the presence or addition of one or more other features, integrals, steps, or components, or groups thereof. Thus, the statement "device comprising means A and B" should not be limited to a device consisting solely of components A and B.

[0081] The terms "an embodiment" or "an embodiment" as used in this specification mean that a particular feature, structure, or characteristic described in conjunction with that embodiment is included in at least one embodiment of this application. Therefore, the terms "in one embodiment" or "in an embodiment" appearing throughout this specification do not necessarily refer to the same embodiment, but may refer to the same embodiment. Furthermore, in one or more embodiments, the particular features, structures, or characteristics can be combined in any suitable manner, as will be apparent to those skilled in the art from this disclosure.

[0082] Note that the above are merely preferred embodiments and the technical principles employed in this application. Those skilled in the art will understand that this application is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of this application. Therefore, although this application has been described in detail through the above embodiments, this application is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of this application, all of which fall within the scope of protection of this application.

Claims

1. A fluid control structure suitable for microchannels, characterized in that, include: The first microchannel and the second microchannel include a first position where they are closely fitted together, and the first position includes a through hole connecting the first microchannel and the second microchannel. An elastic diaphragm includes a first portion and a second portion extending from the first portion; wherein the first portion is fixedly disposed at the first position and located beside the through hole, and the second portion is in a non-fixed state; and the elastic diaphragm covers the through hole in its natural state. A bulk acoustic wave chip that can act on the liquid in the first microchannel is used to, when the bulk acoustic wave chip is in working state, drive the liquid to generate a jet force that acts on the elastic diaphragm, causing the second part of the elastic diaphragm to shift toward the second microchannel to expose the through hole and to connect the first microchannel with the second microchannel.

2. The structure according to claim 1, characterized in that, The magnitude of the displacement of the second part is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip, and / or the maximum value of the displacement causes the elastic diaphragm to block the fluid in the second microchannel.

3. The structure according to claim 1 or 2, characterized in that, The location of the bulk acoustic wave chip is such that the direction of the jet force it generates is perpendicular to the through hole at the first location.

4. A fluid control method, characterized in that, Using the fluid control structure suitable for microchannels as described in any one of claims 1 to 3, the method comprises: When the bulk acoustic wave chip is in working condition, the jet force generated by the liquid in the first microchannel driven by the bulk acoustic wave chip acts on the elastic diaphragm, causing the second part of the elastic diaphragm to shift toward the second microchannel to expose the through hole, so that the first microchannel and the second microchannel are connected.

5. The method according to claim 4, characterized in that, The direction of the horizontal component of the jet force acting on the elastic diaphragm is opposite to the direction of fluid flow in the second microchannel.

6. The method according to claim 5, characterized in that, By controlling the jet force generated by the liquid driven by the bulk acoustic wave chip, one of the following fluid control methods can be achieved: By controlling the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement does not block the fluid in the second microchannel, allowing the fluid in the first microchannel to flow into the second microchannel, mix with the fluid in the second microchannel, and flow downstream of the second microchannel. By generating the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. This displacement blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow downstream of the second microchannel.

7. The method according to claim 4, characterized in that, The direction of the horizontal component of the jet force acting on the elastic diaphragm is the same as the direction of fluid flow in the second microchannel.

8. The method according to claim 7, characterized in that, By controlling the jet force generated by the liquid driven by the bulk acoustic wave chip, one of the following fluid control methods can be achieved: By controlling the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement does not block the fluid in the second microchannel, allowing the fluid in the first microchannel to flow into the second microchannel, mix with the fluid in the second microchannel, and flow downstream of the second microchannel. By generating the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow upstream of the second microchannel. By generating the magnitude of the jet force, the displacement of the elastic diaphragm is controlled. The displacement blocks the fluid in the second microchannel, causing the fluid in the second microchannel to flow into the first microchannel and flow upstream or downstream of the first microchannel.

9. The method according to any one of claims 5-8, characterized in that, Also includes: By controlling the spaced jet force generated by the liquid driven by the bulk acoustic wave chip, one of the following fluid control methods can be achieved: By generating intermittent jet force, the displacement of the elastic diaphragm is controlled. The displacement intermittently blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel intermittently, and alternately flow with the liquid in the second microchannel downstream of the second microchannel. By generating intermittent jet force, the displacement of the elastic diaphragm intervals is controlled. The displacement does not block the fluid in the second microchannel, allowing the fluid in the first microchannel to be intermittently injected into the second microchannel, mixed with the liquid in the second microchannel, and then flowing downstream of the second microchannel.

10. The method according to any one of claims 4-9, characterized in that, When the fluid in the second microchannel is blocked, The fluid in the first microchannel and the fluid in the second microchannel are mixed at the contact point.

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