Liquid treatment method, device and equipment

Abstract

The invention provides a liquid treatment method, device and equipment, the liquid treatment method comprises a first liquid supply assembly, and the method comprises the following steps: obtaining a current concentration value of a target element in a to-be-treated liquid; wherein the to-be-treated liquid has a preset flow rate, the target element has a molar coefficient, the target element interacts with a reaction element in the reaction liquid, the reaction element has a preset concentration value, and the target element and the reaction element have a molar ratio; determining the target flow of the reaction liquid according to the current concentration value and the molar coefficient of the target element, the preset flow of the liquid to be treated, and the preset concentration value and the molar ratio of the reaction element; according to the target flow of the reaction liquid, a control signal is generated, and the control signal is used for changing the flow of the reaction liquid. By adopting the technical scheme, the dosage of the reaction solution can be adjusted, and the treatment efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of liquid processing, and particularly to a liquid processing method, apparatus and equipment. Background Art

[0002] In semiconductor processes, multiple processes are usually required. In some processes, such as cleaning processes, wet etching processes, etc., liquids are needed to process the initial wafers or wafers with patterns formed thereon to improve the quality and performance of semiconductor products.

[0003] When performing manufacturing processes, some waste liquids will be generated. These waste liquids usually contain chemicals, solvents and other pollutants, so precipitation treatment is usually required before discharging these waste liquids.

[0004] However, there are still some problems with the existing precipitation treatment methods. Summary of the Invention

[0005] In view of this, the present invention provides a liquid processing method, apparatus and equipment, which can adjust the dosage of the reaction solution and improve the processing efficiency.

[0006] An embodiment of the present disclosure provides a liquid processing method, including:

[0007] Obtain the current concentration value of the target element in the liquid to be processed; wherein, the liquid to be processed has a preset flow rate, the target element has a molar coefficient, the target element interacts with the reaction element in the reaction liquid, the reaction element has a preset concentration value, and the target element and the reaction element have a molar ratio;

[0008] Determine the target flow rate of the reaction liquid according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be processed, the preset concentration value of the reaction element, and the molar ratio;

[0009] Generate a control signal according to the target flow rate of the reaction liquid, and the control signal is used to change the flow rate of the reaction liquid.

[0010] Optionally, the determining the target flow rate of the reaction liquid according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be processed, the preset concentration value of the reaction element, and the molar ratio includes:

[0011] Determine the estimated flow rate of the reaction liquid according to the current concentration value of the target element, the preset flow rate of the liquid to be processed, and the preset concentration value;

[0012] Determine the corrected flow rate of the reaction liquid based on the current concentration value of the target element, the molar coefficient, the current concentration value of the target element, and the reaction rate constant;

[0013] Determine the target flow rate of the reaction liquid based on the estimated flow rate and the corrected flow rate of the reaction liquid.

[0014] Optionally, use the following formula to determine the estimated flow rate of the reaction liquid:

[0015]

[0016] where Q1(t) represents the estimated flow rate of the reaction liquid, Q w represents the preset flow rate of the liquid to be treated, C w (t) represents the current concentration value of the target element, C r represents the preset concentration value of the reaction element.

[0017] Optionally, use the following formula to determine the corrected flow rate of the reaction liquid:

[0018]

[0019] where Q2(t) represents the corrected flow rate of the reaction liquid, k represents the reaction rate constant, C w (t) represents the current concentration value of the target element, v w represents the molar coefficient, and α represents the molar ratio.

[0020] Optionally, the control signal is used to change the opening degree of a switch disposed on the flow path of the reaction liquid, and there is a mapping relationship between the opening degree of the switch and the flow rate of the reaction solution;

[0021] Generating a control signal according to the target flow rate of the reaction liquid includes:

[0022] Determine the target opening degree corresponding to the target flow rate according to the mapping relationship between the opening degree of the switch and the flow rate of the reaction solution;

[0023] In response to the target opening degree, generate a control signal to the switch so that the switch has the target opening degree.

[0024] Optionally, the reaction element is calcium ion; the target element is fluoride ion

[0025] Correspondingly, an embodiment of the present disclosure further provides a liquid processing device, including: a first transfer component, the first transfer component includes a first pipeline, and a switch disposed on the first pipeline, the switch is used to control the flow rate of the reaction liquid flowing through the first pipeline; the reaction element in the reaction liquid has a preset concentration value;

[0026] a second transfer component, the second transfer component includes a second pipeline, and a detector disposed on the second pipeline, the detector is used to detect the current concentration value of the target element in the liquid to be processed flowing through the second pipeline; wherein, the liquid to be processed has a preset flow rate, the target element has a molar coefficient, and the target element and the reaction element have a molar ratio;

[0027] a reaction chamber, which is respectively communicated with the first transfer component and the second transfer component, and is used to provide a space for the reaction of the reaction liquid and the liquid to be processed;

[0028] a processor, which is respectively coupled to the switch and the detector, and is used to determine the target flow rate of the reaction liquid according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be processed, as well as the preset concentration value and the molar ratio of the reaction element; and generate a control signal according to the target flow rate of the reaction liquid to change the flow rate of the reaction liquid.

[0029] Optionally, the second pipeline has a first outlet and a second outlet, the first outlet is communicated with the reaction chamber, and the detector is disposed at the second outlet;

[0030] The liquid processing device further includes:

[0031] a detection chamber, which is communicated with the second outlet and is used to accommodate the liquid to be processed flowing out of the second outlet.

[0032] Optionally, the liquid processing device further includes a first liquid supply device communicated with the first pipeline to provide the reaction liquid;

[0033] a second liquid supply device communicated with the second pipeline to provide the liquid to be processed.

[0034] An embodiment of the present disclosure further provides a data processing device, including: a memory and a processor, wherein, the memory is suitable for storing one or more computer instructions, and when the processor runs the computer instructions, it executes the liquid processing method described in any one of the foregoing embodiments.

[0035] Compared with the prior art, the technical solution of the invention embodiment has the following advantages:

[0036] Using the liquid treatment method provided by the invention embodiment, the liquid to be treated includes a target element, the reaction liquid has a reaction element that interacts with the target element, and the liquid to be treated has a preset flow rate, and the reaction element has a preset concentration value. Thus, when obtaining the current concentration value of the target element in the liquid to be treated, the target flow rate of the reaction liquid can be determined based on the current concentration value of the target element, the molar coefficient, the preset flow rate of the liquid to be treated, and the preset concentration value and molar ratio, which represents the dosage of the reaction element when fully reacting with the target element. When generating a control signal based on the target flow rate of the reaction liquid, the flow rate of the reaction liquid can be changed, so that while the target element can fully react with the reaction element, the dosage of the reaction liquid is reduced. Brief Description of the Drawings

[0037] To more clearly illustrate the technical solutions of the embodiments of the present disclosure, the following will briefly introduce the drawings required for describing the embodiments of the present disclosure or the prior art. Obviously, the following described drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0038] Figure 1 Shows a schematic diagram of a precipitation treatment scenario;

[0039] Figure 2 Shows a flowchart of a liquid treatment method in an embodiment of the present invention;

[0040] Figure 3 Shows a flowchart of determining the target flow rate of the reaction liquid in an embodiment of the present invention;

[0041] Figure 4 Shows a schematic structural diagram of a liquid treatment device in an embodiment of the present invention;

[0042] Figure 5 Shows a schematic structural diagram of a data processing device in an embodiment of the present invention. Detailed Description of the Embodiments

[0043] In the following, only some exemplary embodiments are simply described. As those skilled in the art can recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary in nature rather than restrictive.

[0044] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present invention, the meaning of "a plurality" is two or more unless otherwise specifically defined. In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected", and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection: it may be a mechanical connection, an electrical connection, or a connection that allows mutual communication; it may be a direct connection, or an indirect connection through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. In addition, the present invention may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0046] As described in the background art, there are still some problems with the existing precipitation treatment methods.

[0047] See Figure 1 The schematic diagram of a precipitation treatment method shown in Figure 1 As shown, the liquid supply tank 10 stores the reaction liquid A, the reaction tank 20 stores the liquid B to be treated, and a pipeline 30 is provided between the liquid supply tank 10 and the reaction tank 20, as well as an air pump 40 provided on the pipeline 30.

[0048] Under the action of the air pump 40, the reaction liquid A can flow through the pipeline 30 in the direction shown by the arrow to the reaction tank 20, so as to react with the liquid B to be treated to achieve sedimentation treatment.

[0049] As the reaction proceeds, when the concentration of the relevant elements in the liquid B to be treated changes, the reaction liquid A still maintains its original concentration. When the sedimentation treatment is completed, there is still a large amount of the reaction liquid A that has not been consumed, increasing the operation and maintenance costs.

[0050] To solve the above technical problems, a switch 50 is provided on one side of the pipeline 30 close to the reaction tank 20, and the opening degree of the switch 50 is changed manually to change the addition amount of the reaction liquid A.

[0051] However, there is still a problem of excessive addition of the reaction liquid A by manually changing the opening degree of the switch 50.

[0052] To solve the above technical problems, an embodiment of the present disclosure provides a liquid treatment method, including: obtaining the current concentration value of a target element in the liquid to be treated; wherein, the liquid to be treated has a preset flow rate, the target element has a molar coefficient, the target element interacts with a reaction element in the reaction liquid, the reaction element has a preset concentration value, and the target element and the reaction element have a molar ratio; determining the target flow rate of the reaction liquid according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be treated, the preset concentration value of the reaction element, and the molar ratio; generating a control signal according to the target flow rate of the reaction liquid, and the control signal is used to change the flow rate of the reaction liquid.

[0053] Using the liquid treatment method provided by the embodiment of the present disclosure, the liquid to be treated includes a target element, the reaction liquid has a reaction element that interacts with the target element, and the liquid to be treated has a preset flow rate and the reaction element has a preset concentration value. Therefore, when obtaining the current concentration value of the target element in the liquid to be treated, the target flow rate of the reaction liquid can be determined based on the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be treated, the preset concentration value, and the molar ratio, which represents the dosage of the reaction element when fully reacting with the target element. When generating a control signal based on the target flow rate of the reaction liquid, the flow rate of the reaction liquid can be changed, so that the target element can fully react with the reaction element while reducing the dosage of the reaction liquid.

[0054] Moreover, this solution can obtain the current concentration value of the target element in the liquid to be treated in real time, with a faster response speed, and can adapt to various waste liquid treatment scenarios, improving the treatment efficiency.

[0055] To enable those skilled in the art to have a clearer understanding of the technical conceptions, technical principles, advantages, etc. included in the embodiments of the present disclosure, the following will be introduced in detail with reference to the accompanying drawings, through specific embodiments, and in combination with specific application scenarios, etc.

[0056] See Figure 2 In the flowchart of a liquid treatment method in an embodiment of the present invention shown in Figure 2 As shown, the following steps can be executed:

[0057] S10. Obtain the current concentration value of the target element in the liquid to be treated.

[0058] In some embodiments, during the process of reacting a reaction liquid with a liquid to be treated to separate a target element, the concentration value of the target element in the liquid to be treated will change. The flow rate of the liquid to be treated is relatively fixed, so that the amount of reaction elements entering the reaction chamber per unit time cannot adapt to the change in the concentration value of the target element.

[0059] For example, when the concentration value of the target element suddenly decreases and the amount of the reaction liquid flowing into the reaction chamber per unit time is large, a mismatch phenomenon will occur, resulting in a large amount of the liquid to be treated remaining unconsumed after the liquid to be treated is processed. In this way, the reaction liquid is mixed with other liquids, making the reaction liquid unable to be used again and causing a large amount of waste.

[0060] This solution can, by obtaining the current concentration value of the target element in the liquid to be treated, make adjustment measures based on the current concentration value of the target element, so that the amount of reaction elements flowing into the reaction chamber is adapted to the current concentration value of the target element.

[0061] In some embodiments, the liquid to be treated has a preset flow rate. In other words, the total amount of the liquid to be treated flowing into the reaction chamber per unit time is fixed, and due to the change in the concentration value of the target element, a mismatch phenomenon between the target element and the reaction elements occurs.

[0062] In some embodiments, the target element has a molar coefficient.

[0063] In some embodiments, the reaction elements in the reaction liquid have a preset concentration value. In other words, by changing the flow rate of the reaction liquid, what is changed is the mass of the reaction liquid flowing into the reaction chamber per unit time, while the reaction elements still have a preset concentration value.

[0064] In some embodiments, the target element interacts with the reaction elements in the reaction liquid, and through the interaction between the two, a compound containing the target element and the reaction elements can be formed.

[0065] As a specific embodiment, if the reaction element is calcium ion and the target element is fluoride ion, then calcium fluoride precipitate can be formed through the interaction relationship between calcium ion and fluoride ion.

[0066] In some embodiments, the target element and the reaction elements have a molar ratio. Among them, the molar ratio (MolarRatio) is a proportional relationship used to describe the molar quantity ratio between the target element and the reaction elements when participating in a reaction or being generated.

[0067] Continuing with the previous example, if the reaction element is calcium ion and the target element is fluoride ion, then the molar ratio is 1:2.

[0068] It should be noted that when performing step S10, the current concentration value of the target element obtained may refer to "the concentration value of the target element before flowing into the reaction chamber".

[0069] S20. Determine the target flow rate of the reaction liquid according to the current concentration value of the target element, the molar coefficient, the preset flow rate of the liquid to be treated, the preset concentration value of the reaction element, and the molar ratio.

[0070] In some embodiments, by obtaining the current concentration value of the target element, the concentration change of the target element can be determined. Furthermore, in response to this change, the target flow rate of the reaction liquid can be adjusted, and the amount of the reaction element can be adjusted to achieve a complete reaction.

[0071] More specifically, the preset flow rate of the liquid to be treated and the current concentration value of the target element characterize the amount of the target element. Based on the molar coefficient, the preset concentration value of the reaction element, and the molar ratio between the target element and the reaction element, the target flow rate of the reaction liquid can be determined.

[0072] Next Figure 2 , referring to Figure 3 the flowchart of a method for determining the target flow rate of a reaction liquid in an embodiment of the present invention as shown in Figure 3 , the following steps can be performed:

[0073] S21. Determine the estimated flow rate of the reaction liquid according to the current concentration value of the target element, the preset flow rate of the liquid to be treated, and the preset concentration value of the reaction element.

[0074] In some embodiments, the estimated flow rate can characterize the flow rate portion for the current concentration value of the target element and also takes into account the relationship between the preset flow rate of the liquid to be treated and the reaction element.

[0075] More specifically, the preset flow rate of the liquid to be treated limits the flow rate of the liquid to be treated and determines the rate of the target element. The current concentration value of the target element changes with time and characterizes the concentration of the target element in the liquid to be treated at any moment. Thus, in the case where the concentration value of the reaction element is a fixed value, the "desired flow rate" can be determined.

[0076] That is, the rate at which the target element in the liquid to be treated needs to be reacted, and thus the amount of the reaction liquid that needs to be reacted can be determined, so that the treatment amounts of the reaction element and the target element are matched.

[0077] In one embodiment, the following formula is used to determine the estimated flow rate of the reaction liquid:

[0078]

[0079] Among them, Q1(t) represents the estimated flow rate of the reaction liquid, and Q w represents the preset flow rate of the liquid to be processed, and C w (t) represents the current concentration value of the target element, and C r represents the preset concentration value of the reaction element.

[0080] In other words, the ratio between the product of the current concentration value of the target element and the preset flow rate of the liquid to be processed and the preset concentration value is used as the estimated flow rate of the reaction liquid.

[0081] S22. Determine the corrected flow rate of the reaction liquid according to the current concentration value of the target element, the molar coefficient, the current concentration value of the target element, and the reaction rate constant.

[0082] In some embodiments, based on S21, the determined estimated flow rate is a "desired flow rate". However, in the actual reaction process, the influence of the change in the concentration value of the target element on the reaction process also needs to be considered. Therefore, the corrected flow rate for correcting the estimated flow rate can be determined, so as to determine how much reaction solution is actually needed to completely react with the target element in the actual reaction process.

[0083] Among them, the reaction rate constant reflects the intensity of the interaction between the reaction element and the target element, and the reaction rate constant is affected by various factors. For example, the concentrations of the reaction element and the target element, temperature, catalyst, etc.

[0084] In some embodiments, the concentration values of the same element (such as the target element) can be measured at multiple different time points; for the concentration value at any time point, take the natural logarithm of the concentration value; according to the time point and the natural logarithm of each concentration value, determine the relationship between the natural logarithm of each concentration value and time, and form a fitting curve (such as close to a straight line); take the negative of the slope of the fitting curve as the reaction rate constant.

[0085] In one embodiment, the following formula is used to determine the corrected flow rate of the reaction liquid:

[0086]

[0087] Among them, Q2(t) represents the corrected flow rate of the reaction liquid, k represents the reaction rate constant, and C w (t) represents the current concentration value of the target element, and v w represents the molar coefficient, and α represents the molar ratio.

[0088] In other words, the ratio between the product of the reaction rate constant, the current concentration value of the target element, and the molar coefficient and the molar ratio is used as the corrected flow rate of the reaction liquid.

[0089] It should be noted that the reaction rate constant is a parameter with units, and the reaction rate constant is related to the units used for the current concentration value.

[0090] S23. Determine the target flow rate of the reaction liquid based on the estimated flow rate and the corrected flow rate of the reaction liquid.

[0091] In a specific embodiment, the difference between the estimated flow rate and the corrected flow rate of the reaction liquid can be used as the target flow rate of the reaction liquid.

[0092] Moreover, the reason for using the "difference" as the target flow rate of the reaction liquid is as follows: The estimated flow rate is the "ideal flow rate", which is the flow rate requirement of the reaction solution under the condition of considering no reaction consumption; while the corrected flow rate takes into account the consumption during the actual reaction process, so the flow rate needs to be "reduced" to achieve neither excessive addition of the reaction solution nor neglecting the actual reaction process, in order to achieve precise control of the flow rate.

[0093] In some embodiments, based on formulas (1) and (2), the target flow rate Q(t) of the reaction liquid can be:

[0094]

[0095] S30. Generate a control signal according to the target flow rate of the reaction liquid, and the control signal is used to change the flow rate of the reaction liquid.

[0096] In some embodiments, based on steps S10 and S20, the target flow rate of the reaction liquid suitable for the current concentration value of the target element can be determined. Furthermore, a control signal for changing the flow rate of the reaction liquid can be determined according to this target flow rate of the reaction liquid. This enables the reaction liquid flowing into the same reaction chamber to fully react with the liquid to be processed.

[0097] In some embodiments, the control signal is used to change the opening degree of a switch provided on the flow path of the reaction liquid, and there is a mapping relationship between the opening degree of the switch and the flow rate of the reaction solution.

[0098] In other words, a switch is provided on the path from the reaction liquid to the reaction chamber. By changing the opening degree of the switch, the flow aperture of the reaction liquid is increased or decreased, resulting in a difference in the flow rate of the reaction liquid on both sides of the switch, thereby realizing the change in the flow rate of the reaction solution.

[0099] And by making the opening degree of the switch have a mapping relationship with the flow rate of the reaction solution, precise regulation can be achieved, so that the flow rate of the reaction solution is the target flow rate.

[0100] In some embodiments, the mapping relationship between the opening degree of the switch and the flow rate of the reaction solution can be established by obtaining the flow rate of the reaction solution at different opening degrees of the switch and through curve fitting or other data processing methods.

[0101] In this case, step S30 may include: determining a target opening degree corresponding to the target flow rate according to the mapping relationship between the opening degree of the switch and the flow rate of the reaction solution; generating a control signal to the switch in response to the target opening degree so that the switch has the target opening degree.

[0102] In other words, when the target flow rate of the reaction liquid is determined, through the pre-configured mapping relationship, the target opening degree adapted to the target flow rate can be determined, and then a control signal can be generated to cause the switch to perform an opening and closing operation, and the switch can have the target opening degree.

[0103] It should be noted that when performing liquid processing, both the reaction liquid and the liquid to be processed are in a flowing process.

[0104] The embodiment of the present invention also provides a liquid processing device, which will be introduced in detail below with reference to the accompanying drawings through specific embodiments.

[0105] It should be noted that the liquid processing device described below can be considered as a functional module required to implement the liquid processing method provided by this solution; the content of the liquid processing device described below can be correspondingly referred to the content of the liquid processing method described above.

[0106] See Figure 4 The structural schematic diagram of a liquid processing device in an embodiment of the present invention shown in Figure 4 As shown, the liquid processing device may include:

[0107] A first transmission component (not shown in the figure), the first transmission component may include: a first pipeline 110, and a switch K provided on the first pipeline 110, and the switch K is used to control the flow rate of the reaction liquid A flowing through the first pipeline 110; the reaction element in the reaction liquid A has a preset concentration value.

[0108] A second transmission component (not shown in the figure), the second transmission component may include a second pipeline 120, and a detector S provided on the second pipeline 120, and the detector S is used to detect the current concentration value of the target element in the liquid to be processed B flowing through the second pipeline 120; wherein, the liquid to be processed B has a preset flow rate, the target element has a molar coefficient, and the target element and the reaction element have a molar ratio.

[0109] The reaction chamber 130 is respectively communicated with the first transfer component and the second transfer component, and is used to provide a space for the reaction of the reaction liquid A and the liquid B to be processed.

[0110] A processor (not shown in the figure) is respectively coupled to the switch K and the detector S, and is used to determine the target flow rate of the reaction liquid A according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid B to be processed, and the preset concentration value and molar ratio of the reaction element; and generate a control signal according to the target flow rate of the reaction liquid A to change the flow rate of the reaction liquid A.

[0111] Specifically, as Figure 4 In the flow direction indicated by the schematic arrow j1, the reaction liquid A can be transferred to the reaction chamber 130 through the first pipeline 110. And by changing the opening degree of the switch K, the flow rate of the reaction liquid flowing through the switch K can be changed, that is: the flow rates of the reaction liquid at both ends of the switch K are different. Therefore, based on the change of the liquid to be processed, by changing the opening degree of the switch K, the flow rate of the reaction solution flowing into the reaction chamber 130 can be changed.

[0112] Correspondingly, as Figure 4 In the flow direction indicated by the schematic arrow j2, the liquid B to be processed can be transferred to the reaction chamber 130 through the second pipeline 120. The liquid B to be processed and the reaction liquid A can react to generate a compound including the target element and the reaction element.

[0113] During this process, the detector S can detect the current concentration value of the target element in the liquid B to be processed flowing through the second pipeline 120, and then transmit the detected relevant parameters to the processor. The processor can perform the dynamic adjustment process according to the liquid processing method in the foregoing example, so as to control the opening degree of the switch K, so that the reaction element flowing into the reaction chamber 130 is adapted to the target element, and the reaction element and the target element can fully react.

[0114] It should be noted that in some embodiments, when the current concentration value of the target element is obtained, the concentration value of the target element at the previous moment can also be compared, and when it is determined that the difference between the two is greater than the set value, the operations of determining the target flow rate and the control signal are performed.

[0115] It should be noted that Figure 4 The structures and shapes of the schematic first pipeline 110 and second pipeline 120 are only for illustrative purposes, and are used to represent the transfer function of the pipeline to transfer the liquid to be processed and the reaction container to the reaction chamber, and should not be construed as a limitation of the present invention.

[0116] In some embodiments, the switch K may include at least one of an electromagnetic valve and a pneumatic electromagnetic valve. In this way, in response to a control signal, the opening degree of the switch K can be changed in real time.

[0117] In some embodiments, the detector S may be an electrochemical sensor.

[0118] In some embodiments, the processor may be implemented by a processing chip such as a Central Processing Unit (CPU) or a Field Programmable Gate Array (FPGA), or may be implemented by an Application Specific Integrated Circuit (ASIC) or one or more integrated circuits configured to implement the embodiments of the present invention.

[0119] For more content about the processor generating the control signal, reference may be made to the foregoing examples.

[0120] In some embodiments, referring further to Figure 4 , the second pipeline has a first outlet (not shown in the figure) and a second outlet (not shown in the figure), the first outlet communicates with the reaction chamber 130, and the detector S is disposed at the second outlet (not shown in the figure).

[0121] That is, during the process of liquid processing, a part of the liquid to be processed is diverted for detecting the concentration value of the target element in the liquid to be processed.

[0122] Correspondingly, the liquid processing device may further include: a detection chamber 140, which communicates with the second outlet and is used for accommodating the liquid B to be processed flowing out through the second outlet.

[0123] In some embodiments, the liquid processing device may further communicate with the first pipeline 110, and a first liquid supply device 150 for supplying the reaction liquid A.

[0124] The first liquid supply device 150 functions to supply the reaction liquid A. By storing the reaction liquid A in the first liquid supply device 150, the liquid supply operation can be performed in real time through the first pipeline 110.

[0125] In some embodiments, the number of the first liquid supply devices 150 is multiple, and each first liquid supply device 150 stores a type of reaction liquid A.

[0126] Correspondingly, according to the type of the liquid B to be processed, any one of the first liquid supply devices 150 can be selected for the passage between the first liquid supply device 150 and the first pipeline 110, so as to supply the reaction liquid A adapted to the liquid B to be processed.

[0127] In some embodiments, when the liquid processing device includes the first liquid supply device 150, the liquid processing device may further include a first pneumatic pump 152 disposed on the first pipeline 110.

[0128] More specifically, the first pneumatic pump 152 is located between the switch K and the first liquid supply device 150.

[0129] Wherein, the first pneumatic pump 152 can make the reaction liquid A flow freely in the first pipeline 110 through the change of its own air pressure, so as to be able to transport the reaction liquid A to the reaction chamber 130.

[0130] In this embodiment, the first pneumatic pump 152 includes one or more of a pneumatic pump and a vacuum pump.

[0131] In some embodiments, the liquid processing device may also be connected to the second pipeline 120, and a second liquid supply device 160 for providing the liquid to be processed B.

[0132] The second liquid supply device 160 serves to provide the liquid to be processed B. By storing the liquid to be processed B in the second liquid supply device 160, the liquid supply operation can be carried out through the second pipeline 120 in real time.

[0133] In some embodiments, when the liquid processing device includes the second liquid supply device 160, the liquid processing device may further include a second pneumatic pump 162 disposed on the second pipeline 120.

[0134] Wherein, the second pneumatic pump 162 can make the liquid to be processed B flow freely in the second pipeline 120 through the change of its own air pressure, so as to be able to transport the liquid to be processed B to the reaction chamber 130.

[0135] This application document describes multiple embodiment solutions provided by the embodiments of the present invention. The optional ways introduced in each embodiment solution can be combined and cross-referenced with each other without conflict, so as to extend a variety of possible embodiment solutions, and all of these can be considered as the embodiment solutions disclosed and made public by the embodiments of the present invention.

[0136] This embodiment also provides a data processing device, including at least one memory and at least one processor, the memory stores one or more computer instructions, the memory stores one or more computer instructions, wherein, the one or more computer instructions are executed by the processor to implement the steps of the liquid processing method as described above.

[0137] See Figure 5 , Figure 5 is a schematic diagram of the hardware structure of a terminal in an embodiment of the present invention.

[0138] Figure 5 The illustrated terminal may include a memory 210, a processor 220, and a display 230. The processor 220 is coupled to the memory 210 and the display 230. The memory 210 may be located inside or outside the terminal. The memory 210, the processor 220, and the display 230 may be connected via a communication bus. The display 230 is configured to present the execution results of the steps of the device effectiveness test method.

[0139] A computer program that can run on the processor 220 is stored on the memory 210. When the processor 220 runs the computer program, it executes the steps in the liquid processing method provided in the above embodiments.

[0140] It should be understood that in this embodiment, the processor may be a central processing unit (CPU), and the processor may also be other general-purpose processors, digital signal processors (DSPs), application specific integrated circuits (ASICs), field programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor or the processor may also be any conventional processor, etc.

[0141] It should also be understood that the memory in this embodiment may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memories. Among them, the non-volatile memory may be a ROM, a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory may be a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchlink dynamic random access memory (SLDRAM), and direct rambus random access memory (DR RAM).

[0142] It should be understood that in various embodiments of the present invention, the magnitudes of the serial numbers of the above processes do not mean the order of execution, and the execution order of each process should be determined by its function and internal logic, and should not constitute any limitation to the implementation process of this embodiment.

[0143] In several embodiments provided by the present invention, it should be understood that the disclosed methods, apparatuses, and systems can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for example, the division of the units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection to each other can be through some interfaces, and the indirect coupling or communication connection of the devices or units can be in an electrical, mechanical, or other form.

[0144] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or may be distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0145] In addition, in each embodiment of the present invention, each functional unit may be integrated into a processing unit, or each unit may be physically included separately, or two or more units may be integrated into one unit. The above integrated unit may be implemented in the form of hardware, or in the form of a hardware plus a software functional unit. For example, for each device and product applied to or integrated into a chip, each module / unit included therein may be implemented in the form of hardware such as a circuit. Or, at least some of the modules / units may be implemented in the form of a software program that runs on a processor integrated inside the chip, and the remaining (if any) part of the modules / units may be implemented in the form of hardware such as a circuit. For each device and product applied to or integrated into a chip module, each module / unit included therein may be implemented in the form of hardware such as a circuit. Different modules / units may be located in the same component (such as a chip, a circuit module, etc.) or different components of the chip module. Or, at least some of the modules / units may be implemented in the form of a software program that runs on a processor integrated inside the chip module, and the remaining (if any) part of the modules / units may be implemented in the form of hardware such as a circuit. For each device and product applied to or integrated into a terminal, each module / unit included therein may be implemented in the form of hardware such as a circuit. Different modules / units may be located in the same component (such as a chip, a circuit module, etc.) or different components inside the terminal. Or, at least some of the modules / units may be implemented in the form of a software program that runs on a processor integrated inside the terminal, and the remaining (if any) part of the modules / units may be implemented in the form of hardware such as a circuit.

[0146] The above integrated unit implemented in the form of a software functional unit may be stored in a computer-readable storage medium. The above software functional unit stored in a storage medium includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute some steps of the methods described in each embodiment of the present invention. The foregoing storage medium includes: various media such as a USB flash drive, a mobile hard disk, a ROM, a random access memory RAM, a magnetic disk, or an optical disc that can store program codes.

[0147] It should be understood that the term "and / or" in this text is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, the first and / or the second may represent: the first exists alone, the first and the second exist simultaneously, and the second exists alone. In addition, the character " / " in this text indicates that the associated objects before and after are in an "or" relationship.

[0148] In this embodiment, the "plurality" refers to two or more.

[0149] In the present invention, "equal to" can be used in combination with "less than" or "greater than", but not simultaneously with both "less than" and "greater than". When "equal to" is used in combination with "less than", the technical solution adopted for "less than" applies. When "equal to" is used in combination with "greater than", the technical solution adopted for "greater than" applies.

[0150] The first, second, etc. descriptions that appear in this embodiment are only for the purpose of illustration and distinguishing the described objects, without any order, nor do they represent a special limitation on the number of devices in this embodiment, and cannot constitute any limitation to this embodiment.

[0151] Although the embodiments of the present disclosure are disclosed as above, the invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope defined by the claims.

Claims

1. A liquid treatment method, characterized in that: include: Obtaining a current concentration value of a target element in a liquid to be treated; wherein the liquid to be treated has a preset flow rate, the target element has a molar coefficient, the target element interacts with a reactive element in a reactive liquid, the reactive element has a preset concentration value, and the target element and the reactive element have a molar ratio; Determining a target flow rate of the reaction liquid according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be treated, and the preset concentration value and molar ratio of the reaction element; A control signal is generated according to the target flow rate of the reaction liquid, and the control signal is used to change the flow rate of the reaction liquid.

2. The liquid treatment method according to claim 1, characterized in that: Determining the target flow rate of the reaction liquid according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be treated, and the preset concentration value of the reaction element and the molar ratio includes: Determining an estimated flow rate of the reaction liquid according to the current concentration value of the target element, the preset flow rate of the liquid to be treated, and the preset concentration value of the reaction element; Determining a corrected flow rate of the reaction liquid according to the current concentration value of the target element, the molar coefficient and the current concentration value of the target element, and a reaction rate constant; Based on the estimated flow rate and the corrected flow rate of the reaction liquid, a target flow rate of the reaction liquid is determined.

3. The liquid treatment method according to claim 2, characterized in that: The estimated flow rate of the reaction liquid is determined using the following formula: Where Q1(t) represents the estimated flow rate of the reaction liquid, Q w Indicates the preset flow rate of the liquid to be processed, C w (t) represents the current concentration value of the target element, C r Indicates the preset concentration value of the reaction element.

4. The liquid treatment method according to claim 2, characterized in that: The corrected flow rate of the reaction liquid is determined using the following formula: Wherein, Q2(t) represents the modified flow rate of the reaction liquid, k represents the reaction rate constant, C w (t) represents the current concentration value of the target element, v w represents the molar coefficient and α represents the molar ratio.

5. The liquid treatment method according to claim 1, characterized in that: The control signal is used to change the opening degree of a switch disposed on the reaction liquid flow path, and the opening degree of the switch has a mapping relationship with the flow rate of the reaction solution; The step of generating a control signal according to the target flow rate of the reaction liquid comprises: Determining a target opening degree corresponding to the target flow rate according to a mapping relationship between the opening degree of the switch and the flow rate of the reaction solution; In response to the target opening degree, a control signal is generated to the switch so that the switch has the target opening degree.

6. The liquid treatment method according to claim 1, characterized in that: The reaction element is calcium ion; the target element is fluorine ion.

7. A liquid processing device, characterized in that: include: A first transmission component, the first transmission component includes a first pipeline, and a switch disposed on the first pipeline, the switch is used to control the flow rate of the reaction liquid flowing through the first pipeline; the reaction element in the reaction liquid has a preset concentration value; A second transmission component, the second transmission component includes a second pipeline, and a detector disposed on the second pipeline, the detector is used to detect a current concentration value of a target element in the liquid to be treated flowing through the second pipeline; wherein the liquid to be treated has a preset flow rate, the target element has a molar coefficient, and the target element and the reaction element have a molar ratio; A reaction chamber, which is communicated with the first transmission component and the second transmission component respectively, and is used to provide a space for the reaction liquid and the liquid to be treated to react; A processor is coupled to the switch and the detector respectively, and is used to determine the target flow rate of the reaction liquid according to the current concentration value and molar coefficient of the target element, the preset flow rate of the liquid to be treated, and the preset concentration value and molar ratio of the reaction element; and to generate a control signal according to the target flow rate of the reaction liquid to change the flow rate of the reaction liquid.

8. The liquid treatment device according to claim 7, characterized in that: The second pipeline has a first outlet and a second outlet, the first outlet is communicated with the reaction chamber, and the detector is arranged at the second outlet; The liquid processing device also includes: The detection chamber is communicated with the second outlet and is used to accommodate the liquid to be processed flowing out through the second outlet.

9. The liquid treatment device according to claim 7, characterized in that: Also includes: a first liquid supply device connected to the first pipeline and providing the reaction liquid; A second liquid supply device is connected to the second pipeline and provides the liquid to be treated.

10. A data processing device, characterized in that: include: A memory and a processor, wherein the memory is suitable for storing one or more computer instructions, and when the processor runs the computer instructions, it executes the liquid processing method according to any one of claims 1 to 6.

Images